(12) United States Patent (10) Patent No.: US 7,041,178 B2 Tong Et Al
US007041178B2 (12) United States Patent (10) Patent No.: US 7,041,178 B2 Tong et al. (45) Date of Patent: May 9, 2006 (54) METHOD FOR LOW TEMPERATURE 3,607,466 A 9/1971 Miyazaki BONDING AND BONDED STRUCTURE 3,640,807 A 2/1972 Van Dijk 3,647,581 A 3, 1972 Mash (75) Inventors: Qin-Yi Tong. Durham, NC (US); Gaius 3,888,708 A 6, 1975 Wise et al. Gillman Fountain, Jr., Youngsville, 4.416,054 A 11/1983 Thomas et al. NC (US); Paul M. Enquist, Cary, NC 4,612,083. A 9, 1986 Yasumoto et al. (US) (Continued) (73) Assignee: Ziptronix, Inc., Triangle Park, NC (US) FOREIGN PATENT DOCUMENTS (*) Notice: Subject to any disclaimer, the term of this JP 541 16888. A 3, 1978 patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days. (Continued) OTHER PUBLICATIONS (21) Appl. No.: 10/460,418 Tong et al., “Low Temperature Wafer Direct Bonding, Mar. (22) Filed: Jun. 13, 2003 1994, IEEE, Journal of Microelectromechanical Systems, vol. 3, No. 1, pp. 29-35.* (65) Prior Publication Data US 2003/0211705 A1 Nov. 13, 2003 (Continued) Primary Examiner George Fourson Related U.S. Application Data Assistant Examiner Joannie Adelle Garcia (62) Division of application No. 09/505,283, filed on Feb. (74) Attorney, Agent, or Firm Oblon, Spivak, McClelland, 16, 2000, now Pat. No. 6,902,987. Maier, Neustadt, P.C. (51) Int. C. (57) ABSTRACT HOIL 2L/48 (2006.01) (52) U.S. Cl. ..................... 148/33.4; 438/459:438/485; A method for bonding at low or room temperature includes 438/974: 148/DIG.
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