Excimer Lamps/Excimer Irradiation Unit | USHIO INC

11/18/2020 Excimer lamps/Excimer irradiation unit | USHIO INC.

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Excimer lamps/Excimer irradiation unit

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Excimer VUV light is the very high-energy light generated by lamps containing noble gases or noble-gas hydride compounds. Externally applying high-energy electrons to a sealed lamp containing a noble gas or noble gas hydride compound generates intense plasma discharge (dielectric barrier discharge). This plasma features high-energy electron content, and can be extinguished instantly. The plasma discharge instantly excites the atoms of the discharge gas (noble gas) to their excimer (Xe) state (high- energy orbital atoms form excimer excited molecules). The excimer-specific spectrum is emitted when atoms return from this excimer state to their original condition (ground state). This emission is called VUV light.    Download * * * * Favorites Print catalog

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Features Main applications Case study Product Lineup Options FAQ

High photon energy

VUV (vacuum ultraviolet) light at a wavelength of 180 nm or less, which is not available using conventional UV lamps, emits light efficiently to evoke or accelerate chemical reactions otherwise unachievable with conventional UV light.

Single wavelength

Excimer emission features a single peak emission wavelength with light emitted only in a very narrow range around the peak. This enables efficient irradiation of only the particular UV energy required for a chemical reaction.

Low-temperature irradiation

With no infrared generation, the shorter irradiation time enables very quick substrate processing.

Instantaneous on/off

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About Excimer VUV Light

Excimer VUV light is the very high-energy light generated by lamps containing noble gases or noble-gas hydride compounds. Externally applying high-energy electrons to a sealed lamp containing a noble gas or noble gas hydride compound generates intense plasma discharge (dielectric barrier discharge). This plasma features high-energy electron content, and can be extinguished instantly. The plasma discharge instantly excites the atoms of the discharge gas (noble gas) to their excimer (Xe) state (high-energy orbital atoms form excimer excited molecules). The excimer-specific spectrum is emitted when atoms return from this excimer state to their original condition (ground state). This emission is called VUV light.

Excimer Lamp Structural Example

Spectral Distribution

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