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Resonant Behaviour of Pulse Generators for the Efficient Drive of Optical Radiation Sources Based on Dielectric Barrier Discharges

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Michael Meißer Resonant Behaviour of Pulse Generators for the Efficient Drive of Optical Radiation Sources Based on Dielectric Barrier Discharges Resonant Behaviour of Pulse Generators Generators Resonant Pulse Behaviour of Michael MeißerMichael Michael Meißer Resonant Behaviour of Pulse Generators for the Efficient Drive of Optical Radiation Sources Based on Dielectric Barrier Discharges Resonant Behaviour of Pulse Generators for the Efficient Drive of Optical Radiation Sources Based on Dielectric Barrier Discharges by Michael Meißer Dissertation, Karlsruher Institut für Technologie (KIT) Fakultät für Elektrotechnik und Informationstechnik, 2013 Impressum Karlsruher Institut für Technologie (KIT) KIT Scientific Publishing Straße am Forum 2 D-76131 Karlsruhe www.ksp.kit.edu KIT – Universität des Landes Baden-Württemberg und nationales Forschungszentrum in der Helmholtz-Gemeinschaft Diese Veröffentlichung ist im Internet unter folgender Creative Commons-Lizenz publiziert: http://creativecommons.org/licenses/by-nc-nd/3.0/de/ KIT Scientific Publishing 2013 Print on Demand ISBN 978-3-7315-0083-4 Resonant Behaviour of Pulse Generators for the Efficient Drive of Optical Radiation Sources Based on Dielectric Barrier Discharges Resonanzverhalten von Pulsgeneratoren zum effizienten Betrieb von optischen Strahlungsquellen basierend auf der Dielektrisch Behinderten Entladung Zur Erlangung des akademischen Grades eines DOKTOR-INGENIEURS von der Fakultät für Elektrotechnik und Informationstechnik des Karlsruher Instituts für Technologie (KIT) genehmigte DISSERTATION von Dipl.-Ing. Michael Meißer geboren in Schwerin Tag der mündlichen Prüfung: 10.07.2013 Hauptreferent: Prof. Dr.-Ing. Wolfgang Heering Korreferent: Prof. Dr.-Ing. Michael Braun “Knowledge is the only possession that proliferates when shared.” Translated statement of Marie Freifrau von Ebner-Eschenbach, Austrian author. I. ZUSAMMENFASSUNG Die vorliegende Arbeit umfasst die Untersuchung neuartiger Schaltungstopologien zum gepulsten Betrieb von Excimer-Lampen basierend auf Dielektrisch Behinderten Entladungen (DBE), die zur Erzeugung optischer Strahlung im sichtbaren und ultravioletten Bereich eingesetzt werden. Der Fokus liegt dabei auf der effizienten Erzeugung kurzer Pulse und vorteilhafter Pulsformen um einen hohen Systemwirkungsgrad sicher zu stellen. Erstmals werden in dieser Arbeit bekannte und neu entwickelte Schaltungstopologien zum Betrieb von DBE grundlegend klassifiziert und durchgängig experimentell validiert. Die neu entwickelten Topologien und Betriebsmodi basieren sowohl auf rein resonantem Betrieb als auch auf der Drosselvorladung, welche die Adaptivität an unterschiedliche Lampen sowie eine höhere Spannungsverstärkung bietet. Der Fokus dieser Arbeit liegt auf der Untersuchung von transformatorlosen Topologien, die – ausgestattet mit modernen Silizium-Karbid Leistungshalbleitern – die Anregung der DBE-Lampen mit Pulsen kürzer als 1 µs erlauben. Der positive Effekt der kurzen Pulsdauer auf die Lampeneffizienz und -leistungsdichte wurde experimentell nachgewiesen. Eine flache DBE-Lampe mit vergleichsweise großem Energiebedarf (3.18 nF Kapazität und 2 kV Zündspannung) konnte mit Pulsfrequenzen von mehr als 1 MHz betrieben werden, während eine kleinere Koaxial-DBE mit bis zu 3.1 MHz Pulsfrequenz angeregt wurde. Aufgebaute Pulsinverter erreichten Spitzenwirkungsgrade von 92 %. Anstelle von Simulationen wurden in der Arbeit hauptsächlich Kalkulationen und elektrische Messungen durchgeführt, um Bauteile und Schaltungen zu beschreiben. Die Hauptkomponenten der Hochfrequenz- Pulsinverter, wie Leistungshalbleiter und magnetische Bauelemente sowie die DBD-Lampen wurden bezüglich ihrer parasitären Eigenschaften mittels spektral aufgelöster Impedanzmessungen charakterisiert. Aufbauend auf den Messergebnissen konnte die parasitäre Induktivität von Gate-Treibern und Leistungsstufen signifikant reduziert werden. Darüber hinaus wurden thermische Messungen zum Erfassen von Verlustleistungen sowie statische Messungen des Einschaltwiderstandes von Leistungshalbleitern vorgenommen. Neben dem Betrieb von Silizium-Karbid MOSFETs und JFETs wurde auch die Verschaltung von Silizium MOSFETs zu einem Matrix-Schalter mit 2,7 kV Betriebsspannung untersucht. Ausgehend vom recherchierten Stand der Technik werden vorteilhafte Spannungspulsformen zum Betrieb der DBE diskutiert. Darüber hinaus enthält diese Arbeit eine Abhandlung zu den Einflüssen der verschiedenen DBE-Kapazitäten auf die Entladung und die Energie, die vom Pulsgenerator zur Verfügung gestellt werden muss. ◊ 9 ◊ II. ABSTRACT This dissertation presents novel methods of operating dielectric barrier discharge (DBD) excimer lamps with short, high-voltage pulses of favourable wave-shape in order to ensure operation at highest efficiency. Novel and state-of-the-art power electronic pulse inverter topologies are investigated, experimentally validated and classified in terms of their main properties. The novel topologies introduced are based on pure resonant operation or a combination of resonant operation and inductor pre-charge which offers an improved adaptability to different lamps and higher voltage amplification. Many topologies are modified towards transformer-less variants which are equipped with SiC power semiconductor switches. A flat DBD lamp with a capacitance of 3.18 nF and an ignition voltage of 2 kV was operated with a pulse frequency of more than 1 MHz while a smaller experimental coaxial DBD was operated at 3.1 MHz. Peak inverter efficiencies of 92 % were achieved. Experiments verified the positive effect of multi-MHz pulses on DBD lamp efficiency and power density. Instead of simulations, the development was driven by theoretical calculations and real world measurements. The main pulse inverter components as well as the DBD lamps are characterised by means of frequency-resolved impedance measurements with high-voltage DC bias. Building on the results, the parasitic inductance of power stages and gate drive circuits was significantly reduced. Basing on the requirements for HF operation SiC power semiconductor switches are benchmarked and by means of an alternative approach, a modular Si-MOSFET equipped 2.7 kV matrix switch design is presented. Based on the state-of-the-art, characteristic electrical parameters of possible pulse voltage wave-shapes are discussed. Beyond that, this work contains a theoretical study on the influence of the different DBD capacitances on the energy support of the transient DBD plasma and on the energy that needs to be provided by the inverter. Having the focus both on mathematical backgrounds of pulsed resonant circuits and practical implementation of low-inductive power stages, the work at hand marries theory and practice. ◊ 11 ◊ III. ACKNOWLEDGEMENT This work would not have been possible without the continuous support of my colleagues at the LTI. I owe general thanks to the students who supported my research by their work and valuable feedback. I thank especially Kay Messerschmidt, Timon Messner, Fabian Denk, Hannes Ruf, Denis Krämer, Thomas Lüth, Philip Leuger, Manuel Popp, Martin Perner, Qiao Guo, Gennady Benderman, William Truong and Carina Hansmann. I would like to express my sincere gratitude to my doctorate supervisor Prof. Heering for his valued feedback and in-depth review of this work. I appreciate the commitment of Prof. Braun for taking over the second assessment. I acknowledge the continued support throughout the course of this work of my supervisor Dr. Rainer Kling. I am glad to have been colleague of Karsten Haehre and Christoph Simon owing special thanks to them for the review of this work and others, inspiring discussions and constructive comments. I am grateful to Mark Paravia and Klaus Trampert for their valued suggestions and guidance during my first months at the LTI. Special thanks go to Prof. Philip Mawby at the University of Warwick, UK, for accepting me as a visiting researcher and Dr. Dean Hamilton for his valuable support. I enjoyed the friendly atmosphere at Warwick that was last but not least contributed to by Dr. Mike Jennings. I am grateful to my colleagues Christoph Kaiser and Mohan Ögün for their continued support and fruitful discussions. I will definitely miss our talks during lunch, which mostly started at the quality of the meal and ended up in discussions of aspects of global interest. My studies and research at the LTI were rewarding and enjoyable not least due to the excellent work and comprehensive support by the LTI workshop staff, the IT administrators and the secretaries. I owe thanks especially to Siegfried Kettlitz who was always helpful when I faced software problems. Special thanks go to Felix Geislhöringer, the good spirit of the LTI, for his extensive support. I cannot thank enough Ellen Hofmann for the extensive proof-reading which (hopefully) makes this work also readable for English native speakers. I owe thanks to my loved parents, my brother and dear friends for their understanding, intense care and passionate support. This work was generously supported by the Karlsruhe House of Young Scientists (KHYS). ◊ 13 ◊ IV. TABLE OF CONTENTS I. Zusammenfassung .............................................................................................................................9 II. Abstract ............................................................................................................................................. 11 III. Acknowledgement .........................................................................................................................
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