687Technology Way Scope:

refer tothecatalogdatasheet. For informationandspecificationsrelatedto thespecificmodel,please appropriate AP Tech valveandregulatortobeusedinprocessgassystems. This documentisareferenceguidetohelpcustomers determinean VALVE SELECTIONGUIDE . Napa, CA 94558 PRESSURE REGULATOR Technical Bulletin#208G

. (707)259-0102 AND . Fax(707) 259-0117 www.aptech-online.com

Valve and Regulator Recommendations for Source Gas Cabinets and Gas Distribution General Notes and Definitions

Source Regulator: Pressure regulator closest to the gas source cylinder or vessel (first regulator in the system) Source Valve: Valves upstream (inlet side) of the source regulator Distribution Regulator: Any regulator downstream (outlet side) of the source regulator Distribution Valve: Any valve downstream (outlet side) of the source regulator Valve Recommendation: Valve model recommendations limited for sake of brevity. Different models with same basic size and rating may also be used. Example: 3600, 3650 and 3657 may be used in place of 3625.

1225/1210: Two stage regulation required, two regulators in series 1200S: Red indicates heating required, refer to PN 407 Conditions: Standard conditions of temperature and pressure Inlet Pressure Assumption: Source1 150 psig (10 bar) or vapor pressure of liquified gas Distribution2 30 psig (2 bar) unless low vapor pressure gas

GENERAL NOTES GENERAL 1Source pressure for non-liquified gas assumed at worst case for an empty cylinder 2Distribution assumed to be typical usage, specific operating conditions may require different selection

Caution: Read and understand definitions prior to utilizing the guide’s recommendations. Caution: Product selection is the sole responsibility of the user, regardless of any recommendations or suggestions made by the factory, such as this Technical Bulletin. The user shall make selections based upon their own analysis and testing with regard to function, material compatibility and product ratings. Proper installation, operation and maintenance are also required to assure safe, trouble free performance. Caution: One may achieve higher or lower flow capacities than stipulated in this guide due to the parameters and conditions of a specific application and system design. Caution: Please consult the factory for recommendations beyond the scope of this document or if any doubt exists.

Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK AP, AZ or AK AP, AZ or AK

230 3000 25 3550 3 1500S* 3 1000S 3625 3625 50 1400TS* 6 1000S HF Acetylene* 280 4000 45 4550 75 1200S* 50 1400TS

(C2H2) 3625 4625 75 1200S 400 3700 95 1200S HF 3800 95 1300S 185 3000 90 3550 30 1500S 30 1000S 3625 3625 100 1900S 50 1000S HF Air 225 4000 160 4550 200 1400TS 150 1400TS 3625 4625 800 1200S HR 400 1200S 3100 3800 600 1200S HF 550 3130 890 3700 600 1300S 475 3125 3800 250 3550 100 3550 5 1500S 5 1000S 3625 3625 50 1400TS 30 1000S HF Ammonia 450 4550 225 4550 75 1200S 60 1400TS (NH ) 3 4625 4625 400 1200S 125 1200S 1000 3113 1000 3700 600 1200S HF 250 1200S HF 3125 3800 1100 9100S 250 1300S

SOURCE VALVE GUIDELINE SOURCE VALVE 500 1200S FC 1000 9100S SOURCE REGULATOR GUIDELINE SOURCE REGULATOR DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE 200 3000 80 3550 10 1500S 10 1000S 3625 3625 100 1900S GUIDELINE DISTRIBUTION REGULATOR 25 1000S HF Argon 350 4000 150 4550 300 1900S HF 50 1400TS (Ar) 3625 4625 1500 1200S HR 100 1200S 1000 3130 800 3700 200 1200S HF 3125 3800 200 1300S 400 1200S FC 1000 9100S

Model number applies to all applicable series - AP, AZ and AK Red highlight denotes heating required to achieve stated flow. Example: 1000 means AP, AZ and AK 1000 *15 psig maximum source regulator outlet pressure

Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas Maximum Source Maximum Distribution Maximum Source Maximum Distribution AP, AZ or AK AP, AZ or AK Process Gas Flow Valves Flow Valves Flow AP, RegulatorAZ or AK Flow AP,Regulator AZ or AK (slpm) (slpm) (slpm) (slpm) 140 3550 55 3550 5 1500S 5 1000S Arsine 3625 3625 40 1400TS 20 1000S HF AsH ( 3) 240 4550 95 4550 4625 4625 185 3000 90 3550 15 1500S 15 1000S Arsine Mixtures 3625 3625 50 1900S 50 1000S HF (Nitrogen Balance) 225 4000 160 4550 150 1400TS 150 1400TS 3625 4625 Boron Trichloride 20 4550 15 4550 6 1402TSA 0.4 1101SH

(BCl3) 4625 4625 6 1402TSA 185 3000 90 3550 15 1500S 15 1000S Boron Trichloride 3625 3625 60 1400TS 30 1000S HF Mix 160 4550 60 1400TS (Nitrogen Balance) 225 4000 3625 4625 115 3000 60 3550 5 1500S 5 1000S Boron Trifluoride 3625 3625 25 1400TS 10 1000S HF

(BF3) 145 4000 100 4550 25 1400TS 3625 4625 115 3000 60 3550 5 1500S 5 1000S Boron 11 Trifluoride 25 10 (11BF ) 3625 3625 1400TS 1000S HF 3 145 4000 100 4550 25 1400TS 3625 4625 Butadiene 60 4550 60 4550 3 1500S 3 1000S 5 (C4H6) 4625 4625 40 1400T 1000S HF

Butane (normal) 60 4550 60 4550 3 1500S 3 1000S

(C4H10) 4625 4625 40 1400T 5 1000S HF

65 60 3 3 1000S Butene-1 4550 4550 1500S 4625 4625 50 1400TS 5 1000S HF (C4H8)

500 3000 75 3550 3 1500S 8 1000S 3625 3625 75 1400TS 20 1000S HF Carbon Dioxide 700 4000 140 4550 150 1200S VS 40 1400TS (CO ) 2 3625 4625 500 1225S VS & 100 1200S 2500 3113 750 3700 1200S HF VS 160 1200S HF SOURCE VALVE GUIDELINE SOURCE VALVE 3125 SOURCE VALVE GUIDELINE SOURCE VALVE 3800 1000 9030S VS & 160 1300S

DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE 9100S VS 325

SOURCE REGULATOR GUIDELINE SOURCE REGULATOR 1200S FC SOURCE VALVE GUIDELINE SOURCE VALVE 800 9100S DISTRIBUTION REGULATOR GUIDELINE DISTRIBUTION REGULATOR DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE SOURCE REGULATOR GUIDELINE SOURCE REGULATOR 185 3000 90 3550 5 1500S 5 1000S Carbon Monoxide 3625 3625 15 1900S GUIDELINE DISTRIBUTION REGULATOR 15 1000S HF (CO) 225 4000 160 4550 50 1400TS 50 1400TS 3625 4625 115 3000 60 3550 5 1500S 3 1000S Carbonyl Fluoride 3625 3625 25 1400TS 10 1000S HF (COF ) 2 200 4000 100 4550 3625 4625 75 3550 50 3550 3 1500SH 5 1000SH 3625 3625 50 1400TS 15 1000SH HF Chlorine 150 4550 100 4550 75 1200SH 30 1400TS (Cl ) 2 4625 4625 200 1200SH HF 75 1200SH 300 3113 400 3700 125 1200SH HF 3125 3800 125 1300S 250 1200SH FC ChlorineTrifluoride 20 4550 15 4550 6 1402TSA 0.5 1101S

(ClF3) 4625 4625 6 1402TSA 185 3000 90 3550 5 1700S 10 1000S Diborane Mixtures 20 (Nitrogen Balance) 3625 3625 225 2700S 1000S HF 225 4000 160 4550 3625 4625 Dichlorosilane 20 4550 20 4550 7 1402TSA 1 1001S 4625 4625 7 1402TSA (SiH2Cl2)

Model number applies to all applicable series - AP, AZ and AK Red highlight denotes heating required to achieve stated flow. Example: 1000 means AP, AZ and AK 1000 *15 psig maximum source regulator outlet pressure

Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK AP, AZ or AK AP, AZ or AK

70 3000 35 3550 3 1500S 3 1000S Diethyltelluride 3625 3625 5 1900S 5 1000S HF

(Te(C2H5)2) 85 4000 60 4550 25 1400TS 25 1400TS 3625 4625

140 3000 55 3550 3 1500S 3 1000S Difluoroethylene 3625 3625 50 1400TS 6 1000S HF (C2H2F2) 200 4000 100 4550 75 1200S 50 1400TS 3625 4625 75 1200S 14 4550 7 4550 3 1500S 3 1000S Dimethylsilane 4625 4625 50 1400TS 50 1400TS (C SiH ) 2 8 150 3700 75 3700 75 1200S 75 1200S 3800 3800 Disilane 14 4550 7 4550 1 1000S 1 1000S 7 (Si2H6) 4625 4625 1402TSA 7 1402TSA 380 3000 90 3550 3 1500S 3 1000S Ethylene 3625 3625 50 1400TS 5 1000S HF (C H ) 2 4 485 4000 160 4550 75 1200S 50 1400TS 3625 4625 75 1200S Fluorine Consult Consult Consult Consult Consult Consult Consult Consult Factory Factory Factory Factory Factory Factory Factory (F2) Factory 185 3000 90 3550 5 5 1000SH Fluorine Mixtures 1500SH (10%, 500 psig) 3625 3625 25 1400TS 10 1000SH HF (Nitrogen Balance) 225 4000 160 4550 25 1400TS 3625 4625 10 3550 4 3550 1 1000S 1 1000S Germane 3625 3625 7 1402TSA 7 (GeH ) 1402TSA 4 18 4550 7 4550 4625 4625 185 3000 90 3550 10 1500S 10 1000S Germane Mixtures 3625 3625 20 1900S 20 1000S HF (Nitrogen Balance) 225 4000 160 4550 50 1400TS 50 1400TS 3625 4625 3 3 Halocarbon 12 55 4550 40 4550 1500S 1000S 4625 4625 50 1400TS 5 1000S HF (CCl2F2) 50 SOURCE VALVE GUIDELINE SOURCE VALVE 1400TS DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE Halocarbon 12B2 15 4550 15 4550 GUIDELINE SOURCE REGULATOR 5 1400TSA 0.5 1101S (CBr F ) 4625 4625 5 1402TSA 2 2 GUIDELINE DISTRIBUTION REGULATOR 140 3000 40 3550 3 1500S 3 1000S Halocarbon 13 3625 3625 50 1400TS 5 1000S HF (CClF ) 3 170 4000 70 4550 50 1400TS 3625 4625 110 3550 35 3550 3 1500S 3 1000S Halocarbon 13B1 3625 3625 50 1400TS 5 1000S HF 190 4550 65 4550 50 1400TS (CBrF3) 4625 4625 10 3000 50 3550 10 1500S 5 1000S 3625 3625 40 1900S 15 1000S HF 200 100 80 30 Halocarbon 14 4000 4550 1900S HF 1400TS 3625 4625 500 1200S HR 60 1200S (CF4) 600 3130 500 3700 100 1200S HF 3125 3800 100 1300 250 1200S FC 500 9100S Halocarbon 21 25 4550 15 4550 5 1402TSA 0.5 1101S 0.5 (CHCl2F) 4625 4625 1001S 5 1402TSA 115 3000 145 3550 10 1500S 10 1000S Halocarbon 23 3625 3625 50 1400TS 20 1000S HF 140 4000 250 4550 50 1400TS (CHF3) 3625 4625

Model number applies to all applicable series - AP, AZ and AK Example: 1000 means AP, AZ and AK 1000 Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK AP, AZ or AK AP, AZ or AK

140 3000 55 3550 3 1500S 3 1000S Halocarbon 32 3625 3625 50 1400TS 6 1000S HF

(CH2F2) 175 4000 100 4550 75 1200S 50 1400TS 3625 4625 75 1200S Halocarbon 114 30 4550 25 4550 7 1402TSA 0.5 1101S (C2ClF4) 4625 4625 1 1000S 7 1402TSA 60 4550 40 4550 3 1500S 3 1000S Halocarbon 115 4625 4625 50 1400TS 5 1000S HF (C2ClF5) 75 1200S 50 1400TS 75 1200S 60 3000 40 3550 3 1500S 3 1000S 50 10 Halocarbon 116 3625 3625 1400TS 1000S HF 100 80 75 25 (C2F6) 4000 4550 1200S 1400TS 3625 4625 125 1200S HF 50 1200S 275 3113 400 3700 90 1200S HF 3125 3800 90 1300 175 1200S FC 450 9100S 180 4550 70 4550 3 1500S 3 1000S Halocarbon 125 4625 4625 25 1400TS 5 1000S HF (C2HF5) 75 1200S 25 1400TS 75 1200S 55 4550 40 4550 3 1500S 3 1000S Halocarbon 134A 4625 4625 50 1400TS 5 1000S HF (C2H2F4) 3100 3800 75 1200S 50 1400TS 350 3700 230 3700 75 1200S 3800 3800 35 3550 20 3550 3 1500S 3 1000S Halocarbon R218 3625 3625 50 1400TS 5 1000S HF (C3F8) 60 4550 40 4550 75 1200S 50 1400TS 4625 4625 75 1200S Halocarbon C318 25 4550 20 4550 6 1402TSA 1 1101S (C4F8) 4625 4625 6 1402TSA 750 3000 250 3550 125 1500S 65 1000S

SOURCE VALVE GUIDELINE SOURCE VALVE 3625 3625 500 1900S 125 1000S HF Helium

DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE 625 275 1000 4000 450 4550 GUIDELINE SOURCE REGULATOR 1900S HF 1400TS (He) 3625 4625 2000 1200S HR 625 1200S 2500 3130 2500 3700 GUIDELINE DISTRIBUTION REGULATOR 900 1200S HF 3125 3800 900 1300 1200 1200S FC 2500 9100S 20 4550 15 4550 6 1402TSA 6 1402TSA Hexafluoropropane 4625 4625 C3H2F6 ( ) 4550 40 4550 3 1500S 3 1000S Hexafluoropropylene 60 4625 4625 50 1400TS 5 1000S HF (C3F6) 75 1200S 50 1400TS 75 1200S 800 3000 300 3550 125 1500S 65 1000S 3625 3625 500 1900S 125 1000S HF 1600 625 275 Hydrogen 4000 600 4550 1900S HF 1400TS 3625 4625 900 625 1200S (H ) 2700S 2 3000 3130 3000 3700 1200 1200S HR 900 1200S HF 3125 3800 900 1300S 1200 1200S FC 3000 9100S 155 3000 55 3550 1 1500SH 1 1000SH 3625 30 1400TS 2 Hydrogen Bromide 3625 1000SH HF 50 30 (HBr) 190 4000 95 4550 1200SH 1400TS 3625 4625 50 1200SH

Model number applies to all applicable series - AP, AZ and AK Example: 1000 means AP, AZ and AK 1000 Red highlight denotes heating required to achieve stated flow. Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK AP, AZ or AK AP, AZ or AK

350 3000 75 3550 2 1500SH 8 1000SH 3625 3625 90 1400TS 20 1000SH HF 500 4000 150 4550 150 1200SH 40 1400TS Hydrogen Chloride 3625 4625 600 85 (HCl) 1225SH & 1200SH 2000 3113 850 3700 1210SH HF 160 1200SH HF 3125 3800 2000 9030S & 160 1300S 9110S 300 1200SH FC 800 9100S Hydrogen Chloride 210 3000 105 3550 10 1500SH 10 1000SH Mixtures 3625 3625 20 1900SH 20 1000SH HF (Nitrogen Balance) 265 4000 190 4550 40 1400TS 40 1400TS 3625 4625 Hydrogen Fluoride 20 4550 20 4550 5 1402TSA 5 1402TSA (HF) 4625 4625 125 3550 55 3550 5 1500S 5 1000S Hydrogen Selenide 3625 3625 40 1400TS 20 1000S HF (H Se) 2 215 4550 95 4550 40 1400TS 4625 4625 3000 90 3550 10 1500S 10 1000S Hydrogen Selenide 185 3625 3625 20 1900S 20 1000S HF Mixtures 4000 160 4550 50 1400TS 50 1400TS (Nitrogen Balance) 225 3625 4625 210 3000 80 3550 5 1500S 5 1000S Hydrogen Sulfide 3625 3625 40 1400TS 10 1000S HF H S ( 2 ) 260 4000 140 4550 40 1400TS 3625 4625 105 3000 50 3550 20 1500S 20 1000S Krypton 3625 3625 60 1400TS 30 1000S HF (Kr) 130 4000 90 4550 60 1400TS 3625 4625 245 3000 120 3550 10 1500S 10 1000S Methane 3625 3625 20 1900S 20 1000S HF (CH ) 4 295 4000 210 4550 40 1400TS 40 1400TS 3625 4625 70 4550 40 4550 3 1500S 3 1000S Methanol 4625 4625 50 1400TS 5 1000S HF

SOURCE VALVE GUIDELINE SOURCE VALVE (CH3OH) DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE SOURCE REGULATOR GUIDELINE SOURCE REGULATOR

Methyl Bromide 25 4550 15 4550 5 1402TSA GUIDELINE DISTRIBUTION REGULATOR 5 1402TSA

(CH3Br) 4625 4625 Methyl Chloride 60 4550 45 4550 1 1000S 10 1402TSA

(CH3Cl) 4625 4625 10 1402TSA 200 3550 70 3550 3 1500S 3 1000S Methysilane 3625 3625 50 1400TS 5 1000S HF CH SiH ( 3 3) 350 4550 120 4550 75 1200S 50 1400TS 4625 4625 75 1200S 400 3000 120 3550 5 1500S 5 1000S Methyl Fluoride 3625 3625 50 1400TS 10 1000S HF CH F ( 3 ) 490 4000 200 4550 50 1400TS 3625 4625 215 3000 110 3550 20 1500S 20 1000S Neon 3625 3625 40 1900S 40 1000S HF (Ne) 260 4000 190 4550 300 1200S HR 100 1400TS 3625 4625 250 3000 100 3550 50 1500S 25 1000S 3625 3625 200 1900S 50 1000S HF Nitrogen 400 4000 4550 1400TS (N ) 200 250 1900S HF 150 2 3625 4625 350 2700 250 1200S 1000 3130 1000 3700 1000 1200S HR 300 1200S HF 3125 3800 300 1300S 400 1200S FC 1000 9100S

Model number applies to all applicable series - AP, AZ and AK Example: 1000 means AP, AZ and AK 1000 Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK AP, AZ or AK AP, AZ or AK

75 3000 60 3550 5 1500S 6 1000S Nitrogen Trifluoride 3625 3625 60 1400TS 15 1000S HF NF 1400TS ( 3) 100 4000 110 4550 150 1400TS 30 3625 4625 150 2700S 75 1200S 350 3130 500 3700 400 1200S HR 125 1200 S HF 3125 3800 1000 9030 & 9110 125 1300S 250 1200S FC 600 9100S

310 3000 75 3550 3 1500S 3 1000S Nitric Oxide 3625 3625 50 1400TS 6 1000S HF (NO) 380 4000 125 4550 75 1200S 50 1400TS 3625 4625 75 1200S 3000VS 3550 3 1500S VS 8 1000S 300 70 Nitrous Oxide 3625VS 3625 60 1400TS VS 20 1000S HF (N O) 2 3002VS 4550 100 1200S VS 35 1400TS 500 140 3625VS 4625 150 1200S VS HF 85 1200S 3113VS 3700 500 1225S VS & 160 1200S HF 1500 750 3125VS 3800 1200S VS HF 160 1300S 1000 9030S VS & 320 1200S FC 9100S VS 800 9100S 4550 0.3 1101S Octafluorocyclopentene 4550 15 5 1402TSA 15 4625 5 1402TSA (C5F8) 4625

3000 75 3550 10 1500S 10 1000S Oxygen 250 3625 3625 80 1900S 25 1000S HF (O ) 2 4000 150 4550 150 1900S HF 50 1400TS 400 3625 4625 1000 1200S HR 120 1200S 1000 3700 200 1200S HF 3800 200 1300S 400 1200S FC 1000 9100S 3550 Perfluoropropane* 3550 35 2 1500S 2 1000S 70 3625 3625 20 4 (C3F8) 1400TS 1000S HF 4550 60 4550 20 1400TS 125 4625 4625

1402TSA 1101S Perfluorobutadiene 25 4550 25 4550 5 0.5 SOURCE VALVE GUIDELINE SOURCE VALVE (C F ) 4 6 4625 4625 5 1402TSA DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE SOURCE REGULATOR GUIDELINE SOURCE REGULATOR

320 3000 80 3550 5 1500S GUIDELINE DISTRIBUTION REGULATOR 5 1000S Phosphine 3625 3625 40 1400TS 10 1000S HF (PH ) 3 390 4000 145 4550 3625 4625 185 3000 90 3550 10 1500S 10 1000S Phosphine 3625 3625 20 1900S 20 1000S HF Mixtures (Nitrogen Balance) 225 4000 160 4550 3625 4625 15 3000 3550 10 1500S 1000S Phosphorous 5 10 3625 3625 20 1900S 1000S HF Pentafluoride 20 19 4000 4550 (PF ) 9 5 3625 4625 41 3130 52 3700 3125 3800

65 3550 42 3550 3 1500S 3 1000S Propane 3625 3625 50 1400TS 5 1000S HF (C H ) 3 8 115 4550 75 4550 1200S 50 1400TS 4625 4625

185 3550 75 3550 3 1500S 3 1000S Propene 3625 3625 50 1400TS 5 1000S HF (C H ) 3 6 320 4550 125 4550 50 1400TS 4625 4625

Model number applies to all applicable series - AP, AZ and AK Example: 1000 means AP, AZ and AK 1000 Red highlight denotes heating required to achieve stated flow. *Same as Halocarbon R218 Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK AP, AZ or AK AP, AZ or AK

150 3000 75 3550 5 1500S 10 1000S Silane 3625 3625 40 1400TS 25 1000S HF (SiH4) 250 4000 150 4550 50 2700S 50 1400TS 3625 4625 60 1200S 120 1200S 600 3130 750 3700 100 1200S HF 200 1200S HF 3125 3800 500 1225S & 200 1300S 1200S HF 400 1200S FC 1000 9100S 185 3000 90 3550 10 1500S 10 1000S Silane Mixtures 3625 3625 20 1900S 20 1000S HF (Nitrogen Balance) 225 4000 160 4550 40 1400TS 40 1400TS 3625 4625 Silicon 10 4550 10 4550 5 1402TSA 0.5 1101S Tetrachloride 4625 4625 5 1402TSA

(SiCl4) 3000 45 3550 10 1000S Silicon 95 10 1500S 3625 3625 20 1000S HF Tetrafluoride 40 1400TS 4000 (SiF ) 115 80 4550 40 1400TS 4 3625 4625 1 Sulfur Dioxide 80 4550 30 4550 1000S 6 1402TSA SO ( 2) 4625 4625 6 1402TSA 125 3000 35 3550 3 1500S 5 1000S 3625 3625 40 1400TS 12 1000S HF Sulfur Hexafluoride 200 4000 75 4550 60 1200S 25 1400TS (SF6) 3625 4625 150 1200S HF 60 1200S 500 3113 400 3700 500 9100S 90 1200S HF 3125 90 1300S SOURCE VALVE GUIDELINE SOURCE VALVE 3800 180 1200S FC DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE SOURCE REGULATOR GUIDELINE SOURCE REGULATOR 400 9100S 3 GUIDELINE DISTRIBUTION REGULATOR 3 Sulfur Tetrafluoride 200 4550 80 4550 1500S 1000S 4625 4625 15 1400TS 5 1000S HF (SF4) 15 1400TS Trichlorosilane 35 4550 30 4550 10 1402TSA 0.5 1101S

(SiHCl3) 4625 4625 10 1402TSA Trimethylsilane 30 4550 25 4550 7 1402TSA 0.5 1101S

((CH3)3SiH) 4625 4625 7 1402TSA Tungsten 10 4550 10 4550 5 1402TSA 0.3 1101SH Hexafluoride 4625 4625 5 1402TSA

(WF6) 85 3000 40 3550 5 1500S 5 1000S Xenon 3625 3625 25 1400TS 10 1000S HF (Xe) 100 4000 70 4550 25 1400TS 3625 4625

Model number applies to all applicable series - AP, AZ and AK Example: 1000 means AP, AZ and AK 1000 Red highlight denotes heating required to achieve stated flow.

Alphabetical Listing by Gas Formula 11BF Boron 11 Trifluoride C H F Hexafluoropropane Helium SiH Silane 3 3 2 6 CH3F Methyl Fluoride He 4 Ar Argon C H Propene Hydrogen Fluoride SiHCl Trichorosilane 3 6 CH3OH Methanol HF 3 AsH Arsine C H Propane Krypton SO Sulfur Dioxide 3 3 8 CH3SiH3 Methysilane Kr 2 BCl Boron Trichloride C F Perfluorobutadiene Nitrogen Te(C H ) Diethyltelluride 3 4 6 CH4 Methane N2 2 5 2 BF Boron Trifluoride C F Halocarbon C318 Nitrous Oxide WF Tungsten Hexafluoride 3 4 8 CHCl2F Halocarbon 21 N2O 6 B H Diborane C H Butadiene Neon Xe 2 6 4 6 CHF3 Halocarbon 23 Ne C ClF Halocarbon 114 C H Butene-1 Nitrogen Trifluoride 2 4 4 8 Cl2 Chlorine NF3 C ClF Halocarbon 115 C H Butane (normal) Ammonia 2 5 4 10 ClF3 Chlorine Trifluoride NH3 C2F6 Halocarbon 116 C5F8 Octafluorocyclopentene CO Carbon Monoxide NO Nitric Oxide C H Acetylene CBr F Halocarbon 12B2 Oxygen 2 2 2 2 CO2 Carbon Dioxide O2 C H F Difluoroethylene CBrF Halocarbon 13B1 Phosphorous Pentafluoride 2 2 2 3 COF2 Carbonyl Fluoride PF5 C H F Halocarbon 134A CCl F Halocarbon 12 Phosphine 2 2 4 2 2 F2 Fluorine PH3 C H Ethylene CClF Halocarbon 13 Sulfur Tetrafluoride 2 4 3 GeH4 Germane SF4 C HF Halocarbon 125 CF Halocarbon 14 Sulfur Hexafluoride 2 5 4 H2 Hydrogen SF6 C SiH Dimethylsilane CH F Halocarbon 32 Disilane 2 8 2 2 H2Se Hydrogen Selenide Si2H6 C F Hexafluoropropylene (CH ) SiH Trimethylsilane Silicon Tetrachloride 3 6 3 3 H2S Hydrogen Sulfide SiCl4 C F Halocarbon R218 CH Br Methyl Bromide Silicon Tetrafluoride 3 8 3 HBr Hydrogen Bromide SiF4 C3F8 Perfluoropropane CH3Cl Methyl Chloride HCl Hydrogen Chloride SiH Cl Dichlorosilane 2 2 INH09/09/14