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Pressure Regulator and Valve Selection Guide

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Pressure Regulator and Valve Selection Guide PRESSURE REGULATOR AND VALVE SELECTION GUIDE Technical Bulletin #208G Scope: This document is a reference guide to help customers determine an appropriate AP Tech valve and regulator to be used in process gas systems. For information and specifications related to the specific model, please refer to the catalog data sheet. Valve and Regulator Recommendations for Source Gas Cabinets Distribution Valve 687 Technology Way . Napa, CA 94558 . (707) 259-0102 . Fax (707) 259-0117 www.aptech-online.com General Notes and Definitions Source Regulator: Pressure regulator closest to the gas source cylinder or vessel (first regulator in the system) Source Valve: Valves upstream (inlet side) of the source regulator Distribution Regulator: Any regulator downstream (outlet side) of the source regulator Distribution Valve: Any valve downstream (outlet side) of the source regulator Valve Recommendation: Valve model recommendations limited for sake of brevity. Different models with same basic size and rating may also be used. Example: 3600, 3650 and 3657 may be used in place of 3625. 1225/1210: Two stage regulation required, two regulators in series 1200S: Red indicates heating required, refer to PN 407 Conditions: Standard conditions of temperature and pressure Inlet Pressure Assumption: Source1 150 psig (10 bar) or vapor pressure of liquified gas Distribution2 30 psig (2 bar) unless low vapor pressure gas GENERAL NOTES GENERAL 1Source pressure for non-liquified gas assumed at worst case for an empty cylinder 2Distribution assumed to be typical usage, specific operating conditions may require different selection Caution: Read and understand definitions prior to utilizing the guide’s recommendations. Caution: Product selection is the sole responsibility of the user, regardless of any recommendations or suggestions made by the factory, such as this Technical Bulletin. The user shall make selections based upon their own analysis and testing with regard to function, material compatibility and product ratings. Proper installation, operation and maintenance are also required to assure safe, trouble free performance. Caution: One may achieve higher or lower flow capacities than stipulated in this guide due to the parameters and conditions of a specific application and system design. Caution: Please consult the factory for recommendations beyond the scope of this document or if any doubt exists. Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK AP, AZ or AK AP, AZ or AK 230 3000 25 3550 3 1500S* 3 1000S 3625 3625 50 1400TS* 6 1000S HF Acetylene* 280 4000 45 4550 75 1200S* 50 1400TS (C2H2) 3625 4625 75 1200S 400 3700 95 1200S HF 3800 95 1300S 185 3000 90 3550 30 1500S 30 1000S 3625 3625 100 1900S 50 1000S HF Air 225 4000 160 4550 200 1400TS 150 1400TS 3625 4625 800 1200S HR 400 1200S 3100 3800 600 1200S HF 550 3130 890 3700 600 1300S 475 3125 3800 250 3550 100 3550 5 1500S 5 1000S 3625 3625 50 1400TS 30 1000S HF Ammonia 450 4550 225 4550 75 1200S 60 1400TS (NH ) 3 4625 4625 400 1200S 125 1200S 1000 3113 1000 3700 600 1200S HF 250 1200S HF 3125 3800 1100 9100S 250 1300S SOURCE VALVE GUIDELINE SOURCE VALVE 500 1200S FC 1000 9100S SOURCE REGULATOR GUIDELINE SOURCE REGULATOR DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE 200 3000 80 3550 10 1500S 10 1000S 3625 3625 100 1900S GUIDELINE DISTRIBUTION REGULATOR 25 1000S HF Argon 350 4000 150 4550 300 1900S HF 50 1400TS (Ar) 3625 4625 1500 1200S HR 100 1200S 1000 3130 800 3700 200 1200S HF 3125 3800 200 1300S 400 1200S FC 1000 9100S Model number applies to all applicable series - AP, AZ and AK Red highlight denotes heating required to achieve stated flow. Example: 1000 means AP, AZ and AK 1000 *15 psig maximum source regulator outlet pressure Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas Maximum Source Maximum Distribution Maximum Source Maximum Distribution AP, AZ or AK AP, AZ or AK Process Gas Flow Valves Flow Valves Flow AP, RegulatorAZ or AK Flow AP,Regulator AZ or AK (slpm) (slpm) (slpm) (slpm) 140 3550 55 3550 5 1500S 5 1000S Arsine 3625 3625 40 1400TS 20 1000S HF AsH ( 3) 240 4550 95 4550 4625 4625 185 3000 90 3550 15 1500S 15 1000S Arsine Mixtures 3625 3625 50 1900S 50 1000S HF (Nitrogen Balance) 225 4000 160 4550 150 1400TS 150 1400TS 3625 4625 Boron Trichloride 20 4550 15 4550 6 1402TSA 0.4 1101SH (BCl3) 4625 4625 6 1402TSA 185 3000 90 3550 15 1500S 15 1000S Boron Trichloride 3625 3625 60 1400TS 30 1000S HF Mix 160 4550 60 1400TS (Nitrogen Balance) 225 4000 3625 4625 115 3000 60 3550 5 1500S 5 1000S Boron Trifluoride 3625 3625 25 1400TS 10 1000S HF (BF3) 145 4000 100 4550 25 1400TS 3625 4625 115 3000 60 3550 5 1500S 5 1000S Boron 11 Trifluoride 25 10 (11BF ) 3625 3625 1400TS 1000S HF 3 145 4000 100 4550 25 1400TS 3625 4625 Butadiene 60 4550 60 4550 3 1500S 3 1000S 5 (C4H6) 4625 4625 40 1400T 1000S HF Butane (normal) 60 4550 60 4550 3 1500S 3 1000S (C4H10) 4625 4625 40 1400T 5 1000S HF 65 60 3 3 1000S Butene-1 4550 4550 1500S 4625 4625 50 1400TS 5 1000S HF (C4H8) 500 3000 75 3550 3 1500S 8 1000S 3625 3625 75 1400TS 20 1000S HF Carbon Dioxide 700 4000 140 4550 150 1200S VS 40 1400TS (CO ) 2 3625 4625 500 1225S VS & 100 1200S 2500 3113 750 3700 1200S HF VS 160 1200S HF SOURCE VALVE GUIDELINE SOURCE VALVE 3125 SOURCE VALVE GUIDELINE SOURCE VALVE 3800 1000 9030S VS & 160 1300S DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE 9100S VS 325 SOURCE REGULATOR GUIDELINE SOURCE REGULATOR 1200S FC SOURCE VALVE GUIDELINE SOURCE VALVE 800 9100S DISTRIBUTION REGULATOR GUIDELINE DISTRIBUTION REGULATOR DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE SOURCE REGULATOR GUIDELINE SOURCE REGULATOR 185 3000 90 3550 5 1500S 5 1000S Carbon Monoxide 3625 3625 15 1900S GUIDELINE DISTRIBUTION REGULATOR 15 1000S HF (CO) 225 4000 160 4550 50 1400TS 50 1400TS 3625 4625 115 3000 60 3550 5 1500S 3 1000S Carbonyl Fluoride 3625 3625 25 1400TS 10 1000S HF (COF ) 2 200 4000 100 4550 3625 4625 75 3550 50 3550 3 1500SH 5 1000SH 3625 3625 50 1400TS 15 1000SH HF Chlorine 150 4550 100 4550 75 1200SH 30 1400TS (Cl ) 2 4625 4625 200 1200SH HF 75 1200SH 300 3113 400 3700 125 1200SH HF 3125 3800 125 1300S 250 1200SH FC ChlorineTrifluoride 20 4550 15 4550 6 1402TSA 0.5 1101S (ClF3) 4625 4625 6 1402TSA 185 3000 90 3550 5 1700S 10 1000S Diborane Mixtures 20 (Nitrogen Balance) 3625 3625 225 2700S 1000S HF 225 4000 160 4550 3625 4625 Dichlorosilane 20 4550 20 4550 7 1402TSA 1 1001S 4625 4625 7 1402TSA (SiH2Cl2) Model number applies to all applicable series - AP, AZ and AK Red highlight denotes heating required to achieve stated flow. Example: 1000 means AP, AZ and AK 1000 *15 psig maximum source regulator outlet pressure Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK AP, AZ or AK AP, AZ or AK 70 3000 35 3550 3 1500S 3 1000S Diethyltelluride 3625 3625 5 1900S 5 1000S HF (Te(C2H5)2) 85 4000 60 4550 25 1400TS 25 1400TS 3625 4625 140 3000 55 3550 3 1500S 3 1000S Difluoroethylene 3625 3625 50 1400TS 6 1000S HF (C2H2F2) 200 4000 100 4550 75 1200S 50 1400TS 3625 4625 75 1200S 14 4550 7 4550 3 1500S 3 1000S Dimethylsilane 4625 4625 50 1400TS 50 1400TS (C SiH ) 2 8 150 3700 75 3700 75 1200S 75 1200S 3800 3800 Disilane 14 4550 7 4550 1 1000S 1 1000S 7 (Si2H6) 4625 4625 1402TSA 7 1402TSA 380 3000 90 3550 3 1500S 3 1000S Ethylene 3625 3625 50 1400TS 5 1000S HF (C H ) 2 4 485 4000 160 4550 75 1200S 50 1400TS 3625 4625 75 1200S Fluorine Consult Consult Consult Consult Consult Consult Consult Consult Factory Factory Factory Factory Factory Factory Factory (F2) Factory 185 3000 90 3550 5 5 1000SH Fluorine Mixtures 1500SH (10%, 500 psig) 3625 3625 25 1400TS 10 1000SH HF (Nitrogen Balance) 225 4000 160 4550 25 1400TS 3625 4625 10 3550 4 3550 1 1000S 1 1000S Germane 3625 3625 7 1402TSA 7 (GeH ) 1402TSA 4 18 4550 7 4550 4625 4625 185 3000 90 3550 10 1500S 10 1000S Germane Mixtures 3625 3625 20 1900S 20 1000S HF (Nitrogen Balance) 225 4000 160 4550 50 1400TS 50 1400TS 3625 4625 3 3 Halocarbon 12 55 4550 40 4550 1500S 1000S 4625 4625 50 1400TS 5 1000S HF (CCl2F2) 50 SOURCE VALVE GUIDELINE SOURCE VALVE 1400TS DISTRIBUTION VALVE GUIDELINE DISTRIBUTION VALVE Halocarbon 12B2 15 4550 15 4550 GUIDELINE SOURCE REGULATOR 5 1400TSA 0.5 1101S (CBr F ) 4625 4625 5 1402TSA 2 2 GUIDELINE DISTRIBUTION REGULATOR 140 3000 40 3550 3 1500S 3 1000S Halocarbon 13 3625 3625 50 1400TS 5 1000S HF (CClF ) 3 170 4000 70 4550 50 1400TS 3625 4625 110 3550 35 3550 3 1500S 3 1000S Halocarbon 13B1 3625 3625 50 1400TS 5 1000S HF 190 4550 65 4550 50 1400TS (CBrF3) 4625 4625 10 3000 50 3550 10 1500S 5 1000S 3625 3625 40 1900S 15 1000S HF 200 100 80 30 Halocarbon 14 4000 4550 1900S HF 1400TS 3625 4625 500 1200S HR 60 1200S (CF4) 600 3130 500 3700 100 1200S HF 3125 3800 100 1300 250 1200S FC 500 9100S Halocarbon 21 25 4550 15 4550 5 1402TSA 0.5 1101S 0.5 (CHCl2F) 4625 4625 1001S 5 1402TSA 115 3000 145 3550 10 1500S 10 1000S Halocarbon 23 3625 3625 50 1400TS 20 1000S HF 140 4000 250 4550 50 1400TS (CHF3) 3625 4625 Model number applies to all applicable series - AP, AZ and AK Example: 1000 means AP, AZ and AK 1000 Maximum Source Maximum Distribution Maximum Source Maximum Distribution Flow (slpm) Valves Flow (slpm) Valves Flow (slpm) Regulator Flow (slpm) Regulator Process Gas AP, AZ or AK AP, AZ or AK
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