Journal of Physics D: Applied Physics PAPER Related content - Nucleation and growth process of atomic Controllable ALD synthesis of platinum layer deposition platinum nanoparticles on strontium titanate nanocuboids Chuandao Wang, Linhua Hu, Kenneth nanoparticles by tuning different synthesis Poeppelmeier et al. parameters - Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation To cite this article: Chuandao Wang et al 2017 J. Phys. D: Appl. Phys. 50 415301 Adriaan J M Mackus, Matthieu J Weber, Nick F W Thissen et al. - Sub-nanometer dimensions control of core/shell nanoparticles prepared by atomic layer deposition View the article online for updates and enhancements. M J Weber, M A Verheijen, A A Bol et al. This content was downloaded from IP address 129.105.122.65 on 04/12/2017 at 17:10 IOP Journal of Physics D: Applied Physics Journal of Physics D: Applied Physics J. Phys. D: Appl. Phys. J. Phys. D: Appl. Phys. 50 (2017) 415301 (9pp) https://doi.org/10.1088/1361-6463/aa8709 50 Controllable ALD synthesis of platinum 2017 nanoparticles by tuning different synthesis © 2017 IOP Publishing Ltd parameters JPAPBE Chuandao Wang1,2,4, Linhua Hu2, Yuyuan Lin1,2, Kenneth Poeppelmeier2, Peter Stair2,3 and Laurence Marks1 415301 1 Department of Materials Science and Engineering, Northwestern University, 2220 North Campus Drive, Evanston, IL 602083108, United States of America C Wang et al 2 Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, IL 602083113, United States of America 3 Chemical Sciences and Engineering Division, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, IL 60439, United States of America Printed in the UK Email:
[email protected] Received 17 July 2017, revised 11 August 2017 JPD Accepted for publication 18 August 2017 Published 15 September 2017 10.1088/1361-6463/aa8709 Abstract Pt nanoparticles were successfully deposited using three different atomic layer deposition (ALD) methods, e.g.