Edited by Sukumar Basu Multilayer ThinVersatileFilms Applications - for Materials Engineering This book, “Multilayer Thin Films-Versatile Applications for Materials Engineering”, includes thirteen chapters related to the preparations, characterizations, and applications in the modern research of materials engineering. The evaluation of nanomaterials in the form of different shapes, sizes, and volumes needed for utilization in different kinds of gadgets and devices. Since the recently developed two-dimensional carbon materials are proving to be immensely important for new Multilayer Thin Films configurations in the miniature scale in the modern technology, it is imperative to innovate various atomic and molecular arrangements for the modifications of Versatile Applications structural properties. Of late, graphene and graphene-related derivatives have been proven as the most versatile two-dimensional nanomaterials with superb mechanical, for Materials Engineering electrical, electronic, optical, and magnetic properties. To understand the in-depth technology, an effort has been made to explain the basics of nano dimensional materials. The importance of nano particles in various aspects of nano technology is Edited by Sukumar Basu clearly indicated. There is more than one chapter describing the use of nanomaterials as sensors. In this volume, an effort has been made to clarify the use of such materials from non-conductor to highly conducting species. It is expected that this book will be useful to the postgraduate and research students as this is a multidisciplinary subject. ISBN 978-1-78985-437-4 Published in London, UK © 2020 IntechOpen © saga1966 / iStock Multilayer Thin Films - Versatile Applications for Materials Engineering Edited by Sukumar Basu Published in London, United Kingdom Supporting open minds since 2005 Multilayer Thin Films - Versatile Applications for Materials Engineering http://dx.doi.org/10.5772/intechopen.77490 Edited by Sukumar Basu Contributors Huseyn Mamedov, Parthasarathy Panchatcharam, Tania Tsvetkova, Cheng-An Tao, Jianfang Wang, Rui Chen, Surajit Kumar Hazra, P.B Barman, Shikha Sinha, Anuradha Kashyap, Supriyo Bandyopadhyay, Sajjad Habibzadeh, Ehsan Rahmani, Mohammad Reza Saeb, Mohammad Reza Ganjali, Jamal Chaouki, Miguel Angel Pasquale, Nicolás Muzzio, Omar Azzaroni, Sergio Moya, Arnab Hazra, Nagesh Samane, Sukumar Basu, Subhashis Gangopadhyay, Atanu Dutta, Nithya S, Tynee Bhowmick, Vibhav Amabardekar, Partha Pratim Bandyopadhyay, Sudip Nag, Subhasish B Majumder, Abhishek Ghosh, Moumita Dewan, Antonio Riul Jr., Maria Luisa Braunger, Rafael Hensel, Gabriel Gaál, Mawin Jimenez, Varlei Rodrigues © The Editor(s) and the Author(s) 2020 The rights of the editor(s) and the author(s) have been asserted in accordance with the Copyright, Designs and Patents Act 1988. 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For more information visit www.intechopen.com Meet the editor Prof. Sukumar Basu obtained his Ph.D. in solid-state chemistry in 1973 from the Indian Institute of Technology (IIT), Kharag- pur, India. He undertook his post-doctoral research at the Insti- tute of Physical and Theoretical Chemistry, University of Vienna (1972-1974), Austria and he was a Research Associate in the Max Planck Institute for Carbon Research, Muelheim a.d Ruhr (1975-1978). After returning to India, Prof. Basu joined IIT Kharagpur as a faculty member in 1979 and was promoted to full professor in 1995. He visited several international research institutions abroad e.g. visiting scientist in the Department of Physical Chemistry and Materials Science, State University of Milan, Italy (1995-1996) with ICTP fellowship and Japan Research Center for Atom Technology (JRCAT), Tsukuba, Japan (May-July 1999) with JSPS fellowship. He has attended a number of international and national seminars, conferences, and work- shops in India and abroad and presented research papers on semiconductor materi- als, crystal growth and characterizations, solar energy conversions, spintronics, and chemical sensors. Prof. Basu has organized almost a dozen international and na- tional seminars and conferences. He has taken part in joint SRC (Swedish Research Council) research project with the institute of Physics, Chemistry and Biology, Linkoping University, Sweden and IBSA (India-Brazil-South Africa) projects on the development of chemical gas sensors. His present research areas are graphene and graphene oxides for chemical gas sensors. Prof. Basu is associated with the Depart- ment of Physics and Materials Science, Jaypee University of Information Technolo- gy, Himachal Pradesh (HP), India as Professor Emeritus. Contents Preface III Chapter 1 1 A Review on Metal Oxide-Graphene Derivative Nano-Composite Thin Film Gas Sensors by Arnab Hazra, Nagesh Samane and Sukumar Basu Chapter 2 29 Crystalline Silicon Nitride Films on Si(111): Growth Mechanism, Surface Structure and Chemistry down to Atomic Scale by Subhashis Gangopadhyay Chapter 3 47 Nanostructured Silicon Sensors by Huseyn M. Mamedov Chapter 4 63 Environmental Gas Sensors Based on Nanostructured Thin Films by Nithya Sureshkumar and Atanu Dutta Chapter 5 77 Synthesis and Characterization of CoO-ZnO-Based Nanocomposites for Gas-Sensing Applications by Parthasarathy Panchatcharam Chapter 6 93 Metal Organic Frameworks-Based Optical Thin Films by Cheng-an Tao, Jianfang Wang and Rui Chen Chapter 7 109 Nanoscale Optical Patterning of Amorphous Silicon Carbide for High-Density Data Archiving by Tania Tsvetkova Chapter 8 127 Multilayered and Chemiresistive Thin and Thick Film Gas Sensors for Air Quality Monitoring by Tynee Bhowmick, Vibhav Ambardekar, Abhishek Ghosh, Moumita Dewan, Partha Pratim Bandyopadhyay, Sudip Nag and Subhasish Basu Majumder Contents Preface XIII Chapter 1 1 A Review on Metal Oxide-Graphene Derivative Nano-Composite Thin Film Gas Sensors by Arnab Hazra, Nagesh Samane and Sukumar Basu Chapter 2 29 Crystalline Silicon Nitride Films on Si(111): Growth Mechanism, Surface Structure and Chemistry down to Atomic Scale by Subhashis Gangopadhyay Chapter 3 47 Nanostructured Silicon Sensors by Huseyn M. Mamedov Chapter 4 63 Environmental Gas Sensors Based on Nanostructured Thin Films by Nithya Sureshkumar and Atanu Dutta Chapter 5 77 Synthesis and Characterization of CoO-ZnO-Based Nanocomposites for Gas-Sensing Applications by Parthasarathy Panchatcharam Chapter 6 93 Metal Organic Frameworks-Based Optical Thin Films by Cheng-an Tao, Jianfang Wang and Rui Chen Chapter 7 109 Nanoscale Optical Patterning of Amorphous Silicon Carbide for High-Density Data Archiving by Tania Tsvetkova Chapter 8 127 Multilayered and Chemiresistive Thin and Thick Film Gas Sensors for Air Quality Monitoring