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Pressure Sensors NCAT.E100-1A Pressure Sensors For Gas For Gas and Liquid Monitor (Controller) INDEX Pressure sensor product variations ...................... Page 1 and 2 Wiring specifications ...................................................... Page 10 General performance table [For gas] ..................... Page 3 and 4 Type of mounting .............................................................. Page 11 [For gas and liquid] ............. Page 5 Adaptable to different environments ............................. Page 12 [Monitor] ............................... Page 6 Functions ......................................................................... Page 13 Pressure range and application examples .............. Page 7 to 9 Accuracy .......................................................................... Page 14 Output type ...................................................................... Page 10 Working principle of pressure sensors / Pressure type ..... Page 15 Pressure Sensor Product Variations Ap ds Pre e “ ” – 15 MPa Vacuum pressure • Air, Nitrogen, Argon, Compound pressure Carbon dioxide Low pressure Positive pressure (1.6 MPa) (Atmospheric pressure) –100 kPa 0 100 kPa 1 MPa 15 MPa etc. Air, Nitrogen, Argon, High pressure Carbon dioxide (Atmospheric pressure) • Anti-corrosiveness, Airtightness 0 2 kPa 5 kPa (Differential pressure) Auto shift function Key lock function Peak/Bottom hold function Refer to “General Performance Table”. Clean room Copper free Oil free to different Silicon free Fluorine free Low density ozone gas compatible environments 1 P e ele Analog Digital output display • Series Z/ISE20 • Series Z/ISE80 • Series Z/ISE30 • Series Z/ISE50 • Series Z/ISE40 • Series Z/ISE60 • Series ISE70 • Series ISE75 • Sensor/Display self-contained (for high pressure) • Numerically displays the setting and measurement values. Output type • Series Z/ISE1 • Series Z/ISE2 • Series PS1000/1100 • Sensor only product • ON/OFF confirmed by LED Output type • Series PSE530 • Series PSE560 • Series PSE540 • Series PSE550 • Sensor only product • Can be connected to a separate monitor. Output type [For 1 ch] • Series PSE300 [For 4 ch] • Sensor type display • Series PSE200 • Numerical control can be placed in a distant location. : Under development 2 General Performance Table [For Gas] Pressure range [Pa] Digital –100 k (–101 k) 0 100 k 300 k 500 k 1 M 1.5 M Z/ISE20 Z/ISE30 Z/ISE40 ISE70 Vacuum pressure Compound pressure Note) Low pressure Positive pressure Pressure range 0 250 500 1 k 2 k 5 k Low differential pressure 1-output Switch output 2-output General 1 to 5 (V) specifications Analog output 4 to 20 (mA) Digital display Green/Red Red Green/Red Enclosure IP40 (IP65) IP40 IP65 IP67 CE International UL/CSA standards RoHS (Lead free) Repeatability (%F.S.) ±0.2 ±0.5 Analog output accuracy (%F.S.) ±2 ±2.5 ±5 Operating temperature range 0 to 50°C Cable entry Connector Grommet Connector R R R Rc NPT NPT NPT NPT Piping specification One-touch fittings Rc One-touch fittings G Resin pipe M (female thread) One-touch fittings Auto shift function Auto preset function Functions Display calibration function (Page 13) Peak/Bottom hold function Key lock function Anti-chattering function Bracket Option Type of mounting (Page 11) Bracket Panel mount Clean room Adaptable Copper free to different environments Oil free (Page 12) Fluorine free Low density ozone gas compatible Made to Order Flexible cable Wiring Pre-wired specification ∗ (Page 10) Cable length Available up to 10 m. 1 Cable end option Desired connector can be mounted. ∗1 Wiring specification Compatible with various fittings. ∗1 Note) a :Pressure range is available as Made to Order. : Available as a standard model, : Available as Made to Order : Manufacturable, : Not available, : Under development ∗1: Please consult with us for details. 3 Sensor Switch PSE530 PSE540(A) PSE550 Z/ISE1 Z/ISE2 PS1000/1100 –0.1 to 0.4 MPa –0.1 to 0.45 MPa IP40 IP40 ±1 ±0.2 ±0.3 ±1 ±2 ±2 (±1) ±1 ±5 0 to 50°C 0 to 60°C Connector GrommetConnector, Grommet Grommet R M NPT R R Resin pipe Plug-in reducer Plug-in reducer M NPTF NPTF Plug-in reducer Bracket Ejector mounted Ejector mounted Available up to 10 m. ∗1 Available up to 10 m. ∗1 Desired connector can be mounted. ∗1 Desired connector can be mounted. ∗1 Compatible with various fittings. ∗1 Compatible with various fittings. ∗1 4 General Performance Table [For Gas and Liquid] Pressure range [Pa] Digital Sensor –100 k 0 300 k 1 M 3 M 10 M (–101 k) 100 k 500 k 2 M 5 M 15 M Z/ISE80 Z/ISE50 Z/ISE60 ISE75/75H PSE560 Vacuum pressure Compound pressure Note) Low pressure Pressure range Positive pressure Low differential pressure 1-output Switch output 2-output General 1 to 5 (V) specifications Analog output 4 to 20 (mA) Digital display Green/Red Red Green/Red Enclosure IP65 IP65 IP67 IP65 CE International UL/CSA standards RoHS (Lead free) Repeatability (%F.S.) ±0.2 ±0.2/±0.3 ±0.5 ±0.2 Analog output accuracy (%F.S.) ±2 ±2.5/±5 ±5 ±1 Operating temperature range 0 to 50°C –5 to 50°C ∗2 –10 to 60°C ∗3 Cable entry Connector Grommet Connector Grommet R R NPT R URJ Rc NPT Piping specification G NPT TSJ NPT Rc URJ G G URJ TSJ TSJ Auto shift function Auto preset function Functions Display calibration function (Page 13) Peak/Bottom hold function Key lock function Anti-chattering function Bracket Option Type of mounting (Page 11) Bracket Panel mount Clean room Copper free Adaptable Oil free to different environments Silicon free (Page 12) Fluorine free Made to Order Low density ozone gas compatible Flexible cable Wiring Pre-wired specification ∗ (Page 10) Cable length Available up to 10 m. 1 Cable end option Desired connector can be mounted. ∗1 Wiring specification Compatible with various fittings. ∗1 Wetted parts material Stainless steel 316L Note) a :Pressure range is available as Made to Order. : Available as a standard model, : Available as Made to Order : Manufacturable, : Not available, : Under development ∗1: Please consult with us for details. ∗2: Operating temperature range –5 to 80°C ∗3: Available up to 150°C of fluid temperature (Made to Order) 5 General Performance Table [For Monitor] Monitor PSE200 PSE300 Series 530 Series 540 Type of connecting sensor Series 550 Series 560 Number of sensor inputs 4 1 Number of switch outputs 5 2 Number of analog outputs 0 1 1 to 5 (V) Analog output General 4 to 20 (mA) specifications Digital display Orange Green/Red Enclosure Front parts IP65, Others IP40 IP40 CE International UL/CSA standards RoHS (Lead free) Repeatability (%F.S.) ±0.5 ±0.5 Analog output accuracy (%F.S.) ±0.6 to ±2.0 Operating temperature range 0 to 50°C Auto shift function Auto preset function Functions Display calibration function (Page 13) Peak/Bottom hold function Key lock function Anti-chattering function Bracket Option Type of mounting (Page 11) Panel mount Panel mount Adaptable to different Clean room environments (Page 12) Made to Order Flexible cable Wiring Pre-wired specification ∗ (Page 10) Cable length Available up to 10 m. 1 Cable end option Desired connector can be mounted. ∗1 : Available as a standard model, : Available as Made to Order : Manufacturable, : Not available, : Under development ∗1: Please consult with us for details. 6 Pressure Range and Application Examples Application examples Pressure (Atmospheric pressure) range –100 kPa 0 100 kPa 1 MPa 15 MPa Low (1.6 MPa) High 0 2 kPa 5 kPa (Differential pressure) Absorption Confirmation not be a factor, due to the close proximity of the Due to the small size, the sensor can be installed close to a pad. Calibration is easy with the auto preset function. Absorption confirmation of a workpiece absorbed with moisture Absorption of a stainless diaphragm enables to detect, even though water or oil is adhered to a work and then made ingress to the sensing part. 7 Placement Verification Leak Test Supply Pressure Confirmation The supply pressure of water, oil, etc. can be confirmed by using a sensor for general purpose fluids. The line pressure can be adjusted by monitoring the digital readout which provides a visual verification of the operating pressure. The output can be programmed to respond to supply pressure drops, etc. Verifies caulking by a hydraulic cylinder (vacuum spare chamber of the main chamber) 8 Liquid Coolant Pressure Control Monitoring Filter Clogging The filtration and replacement periods can be controlled by monitoring the clogging of the filter. Level Detection of a Liquid Can detect the level of a liquid through changes in the purge pressure. 9 Output Type generates an output for a switch. the pressure. NPN output type Voltage output (1 to 5 V DC) type DC(+) 5 Brown Load OUT Power Switch Black main circuit supply 1 Analog output [V] DC(–) Min. rated Max. rated Blue pressure pressure PNP output type Current output (4 to 20 mA DC) type Effective for long distance transmission (more than 10 m). DC(+) Brown 20 OUT Black Switch Power Load main circuit supply 4 DC(–) Analog output [mA] Blue Min. rated Max. rated pressure pressure Wiring Specifications Tinned M8 connector M12 connector Half-stripped Made to Order We can provide the cable with a connector from the shown Available with 2 to 4-wire sensors. manufacturers. (Tyco Electronics AMP K.K., Molex, J.S.T. (5-wire sensors can be used without using 1 wire.) 0.6 m, 2 m, and 3 m applications having excessive movement or bends. Made to Order Available up to 10 m. Type of Mounting Type of Piping Steel piping is available with PT thread (R One-touch fittings thread/Rc thread), NPT thread, NPTF thread, PF Straight and elbow fittings are available in mm and inch thread (G thread), TSJ thread, URJ thread, and M diameter. thread. Compatible with 1/8 or 1/4 inch port size, but not with M thread. Plug-in reducer Compatible with the smaller size ø4, ø6. M thread is available with 3 mm or 5 mm.
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