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Common-Notes Pressure-Sensor.Pdf ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ Products or specifications on the catalog are 〈Warranty Coverage〉 subject to be changed without notice. Please If any malfunctions should occur due to our inquire our sales agents for our latest fault, NIDEC COPAL ELECTRONICS warrants specifications. We require an acknowl edgment any part of our product within one year from the of specification documents for product use date of delivery by repair or replacement at beyond our specifications, and conditions free of charge. However, warranty is not appli- needing high reliability, such as nuclear reactor cable if the causes of defect should result control, railroads, aviation, automobile, from the following con ditions: combustion, medical, amusement, • Failure or damages caused by inappropriate Disaster prevention equipment and etc. use, inappropriate conditions, and Furthermore, we ask you to perform a swift inappropriate handling. incoming inspection for delivered products and • Failure or dam ages caused by inappropriate we wouldalso appreciate if full attention is given mod i fi cations, adjustment, or repair. to the storage conditions of the product. • Failure or damage caused by technically and sci en tif i cally unpredictable factors. 〈Warranty Period〉 • Failure or damage caused by natural disaster, The Warranty period is one year from the date fire or unavoid able factors. of delivery. The warranty is only applicable to the product itself, not applic a ble to con sumable products such as batteries and etc. PRESSURE SENSORS OUTLINE A pressure sensor is a device that converts fluid ■ PRODUCT LINE-UP pressure into an electrical signal. NIDEC COPAL a) Diffusion type semi-conductor pressure sensors ··· ELECTRONICS pressure sensors are man u fac- P series tured from the semiconductor pressure sensing A basic pressure sensing device which converts chips to a variety of pressure sensor products at its pressure into an electrical signal. own facility. The output is in the form of voltage which is proportional to the applied pressure. NIDEC COPAL ELECTRONICS pressure sensors The output voltage will be positive when the pressure is feature: positive and negative when the pressure is negative with a constant current source connected. 1. Compact and light weight 2. Excellent electrical and mechanical performance 3. Wide range of products to choose from for b) Pressure transducers with a built-in amplifier ··· various applications PA series The PA series pressure transducers are semiconductor (diffusion type) pressure sensors combined with elec- tronic circuits and provide electrical analog output signals. The electronic circuits consist of a voltage to current conversion circuit which provides excitation current for the pressure sensor and an amplifier circuit which amplifies the pressure sensor signals and provides specified output. The output signals are provided either in the form of voltage change or current change that is proportional to the pressure applied to the pressure transducer. V / I Power Pressure Amp. Analog output P.T Common （C for power supply and output） P.T.：Pressure transducer OUTLINE PRESSURE SENSORS c) Solid-state pressure switches ··· PS series d) Pressure gauges ··· PG series The PS series pressure switches are solid-state The PG series pressure gauges are pressure gauges pressure switches consisting of a semiconductor type composed of a semiconductor type pressure sensor, elec- pressure transducer and electronic circuits which turn tronic circuits and a display which measure pressure and on and off accord ing to a preset pressure value. display the pressure in the digital/numerical value. The electronic circuits are composed of a voltage to The option includes those with a pressure switch function current conversion circuit which supplies electric and an analog output function. current needed for excitation of the pressure trans- The pressure setting for the pressure switch can be made ducer, an amplifier which amplifies the pressure trans- looking at the digital pressure display. ducer signal and a comparator & output circuit which compares the amplified pressure transducer output and the preset voltage corresponding to the preset pressure value and turns the output transistor on and off. V / I Power The pressure setting can be made easily by adjusting Display the potentiometer. Pressure switch Switch output The switch output is given by an open collector 1.000 transistor and can turn on and off an external load. The Pressure Amp. & Display circuit Analog output state of the switch output can be visually confirmed by P.T an indicator LED. Common C for power supply, switch output( and analog output ) P.T：Pressure transducer V / I Power Comparator & Amp. Pressure Output circuit Switch output P.T e) Pressure indicators ··· PZ series Analog output The indicator is used in combination with a pressure Common sensor with an amplifier. Pressure is indicated in the C for power supply, switch output( and analog output ) dig i tal form with voltage input of 1~5 V or current input P.T.：Pressure transducer of 4~20 mA. PRESSURE SENSORS OPERATING PRINCIPLES ■ Semi conductor type pressure sensors ■ Semi conductor type pressure sensors 〈Operation〉 〈Operation〉 1. The pressure sensor utilizes the piezoresistive 2. The pressure sensing chip is made of a single properties of a semiconductor which exhibits crystal silicone and measures approximately 4 × 3 change in the resistance when stress is applied. × 1.7 mm. The chip has a diaphragm which deforms when pressure is applied. 3. Piezoresistors are created on the surface of the 4. There are four piezoresistors forming a wheatstone single crystal silicone by a heat diffusion process bridge which is excited by constant current. When and sense stress when pressure acts on the pressure is applied, voltage signals proportional to diaphragm. the pressure can be obtained from the output terminals. 〈Output〉 The output obtained is change in the voltage that is proportional to the applied pressure and is approximately 100 mV at the rated pressure. Measurement accuracy is increased by adding temperature compensation resistors which are contained in the pressure sensor. Cross–section view Electrical schematics Pressure Piezo resistor Silicon board Bonding pad Bonding wire Glass base Constant current source Header Reference hole for Terminal pin atmospheric pressure V Output voltage ：Piezoresistive element ：Temperature compensation resistor OPERATING PRINCIPLES PRESSURE SENSORS ■ Thin-film type pressure sensors 〈Operation〉 1. The structure of our thin film pressure sensor is that 2. If pressure is applied to the sensor, the metal insulation film is formed on the metal diaphragm, diaphragm is altered. In turn, the thin film gauge on and thin film gauges are arranged on the insulation the metal diaphragm is altered and causes a film. change in its resistance. 3. Four thin film resisters, forming a Wheatstone 〈Output〉 bridge, is driven by constant voltage and produce output voltage in proportionate to the applied Output voltage is produced in proportion to the pressure. applied voltage. It is about 30 mV if rated pressure is applied. Cross‒section view Electrical schematics Insulating film Thin film gauge resistance V Constant voltage source Electrode pad Base Metal diaphragm V Pressure Output voltage ：Thin film gauge resistor ：Zero compensation resistor PRESSURE SENSORS APPLICATIONS ● Atmospheric pressure confirmation of chamber ● Suction detection Transfer chamber Load lock chamber Process chamber Dry vacuum pump ● Clogging detection in strainer ● Pressure sensing for water vapor PA-838-D Sensor Pressure indicator Siphon pipe Sensor for high temperature Vapor Vapor APPLICATIONS PRESSURE SENSORS ● Dialysis system ● Detection of vacuum level for blood analyzing apparatus Transmembrane Venous pressure pressure Dialysate supply Dialyzer equipment samples Infusion pressure Vacuum pump Table for samples Transmembrane pressure ● Detection of foreign particle by fraise ● Measuring of water level Milling blade Foreign particle Work Vacuum pump PRESSURE SENSORS HANDLING NOTES ■ Handling notes of all pressure sensors • Please check the pressure medium. • Please check the specifications of the products. Each product of our pressure sensors has different pres sure Please make sure of the Pressure range, Power voltage, medium compatibility. Select proper products after check ing Output and Fitting. The misapplication may result in failure. the materials of the components in contact with media. Please also check the contents of the instruction manu al if it’s included, and keep it handy it in order to look at it any- time when needed. • Excessive pressure • No entry/contact of foreign matter Please do not apply pressure exceeding the maximum A diaphragm is placed inside the pressure port. If foreign pres sure as shown in the specifications/catalogs. The matter such as wire enters through the pressure port, excessive pressure may affect the sensor characteristics damage could occur. So, this must be absolutely avoided. and may make accurate measurement impossible. In the case of double diaphragm type, please avoid contact with the diaphragm or force solid matter into the diaphragm as it may deform the diaphragm and damage the sensor. Also care must be taken not to put foreign matter on the surface of the diaphragm. • Freezing • Drip proof and moisture resistance When the moisture on the sensor chip freezes, it may Please do not use sensors at anyplace where
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