MEMS Resonators: Getting the Packaging Right Aaron Partridge1, Markus Lutz1, Bongsang Kim2, Matthew Hopcroft2, Rob N
MEMS Resonators: Getting the Packaging Right Aaron Partridge1, Markus Lutz1, Bongsang Kim2, Matthew Hopcroft2, Rob N. Candler2, Thomas W. Kenny2, Kurt Petersen1, Masayoshi Esashi3 (1) SiTime Corporation, (2) Stanford University, (3) Tohoku University Biography: drift on the order of a hundred ppm per day [3]. Quartz Aaron Partridge received the B.S., M.S., and Ph.D. degrees resonators dominate the timing reference market and are in Electrical Engineering from Stanford University,generally packaged in metal or ceramic vacuum enclosures. Stanford, CA, in 1996, 1999, and 2003, respectively. He is Similar enclosures might be made to work with MEMS currently CTO of SiTime Corp. From 2001 through 2004 resonators [4], but resonators packaged this way have yet to he was Project Manager at Robert Bosch Research andshow the required stability. Anodically bonded covers Technology Center (RTC), Palo Alto, CA, where he have been found to give clean enough environments for coordinated the MEMS resonator research. In 1987, hesome resonator types in some applications [5], but are not co•founded Atomis, Inc., a manufacturer of STM, AFM, yet universally sufficiently clean. Getters have been and Ballistic Emission Electron Microscopes (BEEM),investigated to provide a clean encapsulated environment were he was Chief Scientist through 1991 when Atomis [6] and have yielded high quality vacuums, but the added was sold to Surface Interface Inc. Atomis equipment has cost and complexity of getters is significant and integration been installed at AT&T Bell Laboratories, CERN, NIST, problems exist. GM, and various universities. Dr. Partridge has authored and co•authored over 30 scientific papers and holds The8 resonator packaging should leverage MEMS strengths, patents.
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