United States Patent [191 Patent Number: 5,279,987 Lechaton Et A1
US005279987A United States Patent [191 Patent Number: 5,279,987 Lechaton et a1. Date of Patent: Jan. 18, 1994 [54] FABRICATING PLANAR Autodoping from Arsenic Buried Layer by Selective COMPLEMENTARY PA'I'I‘ERNED Epitaxy Capping”, IEEE Electron Device Letters, vol. SUBCOLLECI‘ORS WITH SILICON 11, No. 3, Mar. 1990, 123-125. EPITAXIAL LAYER Y. Kobayashi, et al., Entitled “High Performance LSI [75] Inventors: John S. Lechaton; Shaw-Ning Mei; Performance Technology: SST CBI-CMOS”, IEDM, Dominic J. Schepis, all of 1988, pp. 760-763. Wappingers Falls; Mithkal M. T. Ishii, et al., Entitled “Silicon Epitaxial Wafer with Smadi, Beacon, all of N.Y. Abrupt Interface by Two-Step Epitaxial Growth Tech nique”, J. Electrochemical Soc., vol. 122, No. 11, 1975, [73] Assignee: International Business Machines pp. 1523-1531. Corporation, Armonk, N.Y. T. J. Donahue, et al., Entitled “Low Temperature Sili [21] Appl. No.: 785,656 con Epitaxy Deposited by Very Low Pressure Chemi [22] Filed: Oct. 31, 1991 cal Vapor Deposition”, J. Electrochem. Soc., vol. 133, No. 8, Aug. 1986, pp. 1697-1701. [51] Int. 01.5 ........................................... H01L 21/20 H-R. Chang, Entitled “Autodoping in Silicon Epi [52] U.S. Cl. ...................................... .. 437/95; 437/59; taxy”, The Journal of Electrochemical Society, vol. 437/108; 148/DIG. 25 132, No. 1, pp. 219-224, Jan. 1985. [58] Field of Search ..................... .. 437/54, 59, 95, 97, 437/108, 112, 161, 952; l48/DIG. 7, DIG. 15, Primary Examiner—-Brian E. Hearn DIG. 25, DIG. 9 Assistant Examiner-C. Chaudhari Attorney, Agent, or Firm—Jeffrey L. Brandt; Harold [56] References Cited Huberfeld U.S.
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