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Safety Data Sheet Material Name: Germane Mixture SDS ID: 352P

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Safety Data Sheet Material Name: Germane Mixture SDS ID: 352P Safety Data Sheet Material Name: Germane Mixture SDS ID: 352P Section 1 - PRODUCT AND COMPANY IDENTIFICATION Material Name Germane Mixture Product Description This material is packaged in a VAC® (Vacuum Actuated Cylinder). Product Use semiconductor manufacture Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) Emergency Telephone Number: CHEMTREC - U.S. - 1-800-424-9300 CHEMTREC - Intl. - 1-703-527-3887 E-mail: [email protected] Section 2 - HAZARDS IDENTIFICATION Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Flammable Gases - Category 1 Gases Under Pressure - Compressed gas Acute Toxicity - Oral - Category 4 Acute Toxicity - Inhalation - Gas - Category 1 Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2A Specific target organ toxicity - Single exposure - Category 1 ( kidneys , liver ) Specific target organ toxicity - Single exposure - Category 2 ( blood ) Specific target organ toxicity - Single exposure - Category 3 ( respiratory system , central nervous system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( blood ) Simple Asphyxiant GHS Label Elements Symbol(s) Signal Word ____________________________________________________________ Page 1 of 11 Issue date: 2019-09-09 Revision 2.3 Print date: 2019-09-09 Safety Data Sheet Material Name: Germane Mixture SDS ID: 352P Danger Hazard Statement(s) Extremely flammable gas. Contains gas under pressure; may explode if heated. May displace oxygen and cause rapid suffocation. Fatal if inhaled. Harmful if swallowed. Causes skin irritation. Causes serious eye irritation. Causes damage to organs. （kidneys , liver ） May cause damage to organs. （blood ） May cause respiratory irritation. May cause drowsiness or dizziness. Causes damage to organs through prolonged or repeated exposure. （blood ） Precautionary Statement(s) Prevention Keep away from heat/sparks/open flame/hot surfaces - No smoking. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves and eye/face protection. Wear respiratory protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Response Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. IF exposed: Call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Immediately call a POISON CENTER or doctor/physician. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN: Wash with plenty of soap and water. If skin irritation occurs: Get medical advice/attention. Take off contaminated clothing and wash before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention. IF SWALLOWED: Call a POISON CENTER or doctor/physician if you feel unwell. Rinse mouth. Storage Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed. Store locked up. Disposal Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Oral 80% of the mixture consists of ingredient(s) of unknown acute toxicity. Other Hazards Rapid release of compressed gas may cause frostbite. ____________________________________________________________ Page 2 of 11 Issue date: 2019-09-09 Revision 2.3 Print date: 2019-09-09 Safety Data Sheet Material Name: Germane Mixture SDS ID: 352P Section 3 - COMPOSITION / INFORMATION ON INGREDIENTS CAS Component Name Percent 1333-74-0 Hydrogen 70-80 7782-65-2 Germane 20-30 The chemical identity and/or percentage of composition is being withheld as a trade secret. Section 4 - FIRST AID MEASURES Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. Get immediate medical attention. Do not attempt rescue in confined spaces without adequate protective gear and proper training. Skin Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get medical attention, if needed. Thoroughly clean and dry contaminated clothing and shoes before reuse. If frostbite or freezing occur, immediately flush with plenty of lukewarm water (105-115°F; 41-46°C). DO NOT USE HOT WATER. If warm water is not available, gently wrap affected parts in blankets. Get immediate medical attention. Eyes Immediately flush eyes with plenty of water for at least 15 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion Ingestion is not a route of exposure. Most Important Symptoms/Effects Acute Fatal if inhaled, Harmful if swallowed, frostbite, suffocation, respiratory tract irritation, skin irritation, eye irritation, central nervous system depression, kidney damage, liver damage, blood damage Delayed blood damage Note to Physicians For inhalation, consider oxygen. Section 5 - FIRE FIGHTING MEASURES Extinguishing Media Suitable Extinguishing Media regular dry chemical, carbon dioxide, water spray, alcohol-resistant foam. Let burn unless leak can be stopped immediately. Unsuitable Extinguishing Media Do not direct water at source of leak or safety devices; icing may occur. Special Hazards Arising from the Chemical Severe fire hazard. Vapor/air mixtures are explosive. May ignite on exposure to air. Hazardous Combustion Products oxides of germanium, hydrogen Advice for firefighters Severe fire hazard. Vapor/air mixtures are explosive. May ignite on exposure to air. ____________________________________________________________ Page 3 of 11 Issue date: 2019-09-09 Revision 2.3 Print date: 2019-09-09 Safety Data Sheet Material Name: Germane Mixture SDS ID: 352P Fire Fighting Measures Move container from fire area if it can be done without risk. Damaged cylinders should be handled only by specialists. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: Cool containers with water from unmanned hose holder or monitor nozzles until well after fire is out. If this is impossible then take the following precautions: Keep unnecessary people away, isolate hazard area and deny entry. Let the fire burn. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. For tank, rail car or tank truck: Evacuation radius: 1600 meters (1 mile). Do not attempt to extinguish fire unless flow of material can be stopped first. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Section 6 - ACCIDENTAL RELEASE MEASURES Personal Precautions, Protective Equipment and Emergency Procedures Wear personal protective clothing and equipment. Methods and Materials for Containment and Cleaning Up Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. All equipment used when handling the product must be grounded. Fully encapsulating, vapor protective clothing should be worn for spills and leaks with no fire. Do not touch or walk through spilled material. Stop leak if possible without personal risk. Do not direct water at spill or source of leak. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Ventilate closed spaces before entering. Damaged cylinders should be handled only by specialists. Isolate area until gas has dispersed. Keep unnecessary people away, isolate hazard area and deny entry. Environmental Precautions Avoid release to the environment. Section 7 - HANDLING AND STORAGE Precautions for Safe Handling Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves and eye/face protection. Wear respiratory protection. Do not eat, drink, or smoke when using this product. Use only outdoors or in a well-ventilated area. Conditions for Safe Storage, Including any Incompatibilities Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Compressed gases can present significant safety hazards. Store in a cool, dry, well ventilated area of non-combustible construction. Keep away from cylinders of oxygen or other highly oxidizing or flammable materials. Ship and store cylinders with outlet plug and valve protective cap in place. Grounding and bonding required. Use explosion-resistant electrical equipment. Store cylinders away from heavily trafficked areas and emergency exits. Keep away from heat, sparks and naked flames. Cylinders should be stored upright (with valve protection cap in place). For additional and specific safe practices consult the following Compressed Gas Association (CGA) publications: P-1 "Safe Handling of Compressed Gases in Cylinders", AV-1 "Safe Handling
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