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Material Name: TETRAFLUORIDE SDS ID: 00231454 (KOREA)

SECTION 1: Identification of the substance/mixture and of the company/undertaking

Product Identifier Material Name GERMANIUM TETRAFLUORIDE Synonyms GERMANE TETRAFLUORIDE; GeF4; GERMANE FLUORIDE; TETRAFLUOROGERMANE Chemical Family inorganic, halogenated, gas Product Description The gas can be packaged in either a VAC or PDS+100 gas source cylinder. The contents of the cylinder are stored at high pressure, however each package type contains regulators within the cylinder that allow a fixed delivery pressure. For VAC, the cylinder delivery pressure will be sub-atmospheric and for PDS+100 the cylinder delivery pressure will be super-atmospheric at a nominal pressure of 100 psig. This MSDS addresses only the hazards of the gas. Product Use semi-conductor fabrication, general synthetic chemical Restrictions on Use None known. Supplier Information 한국 인테그리스 주식회사 (Hanguk Entegris Co., Ltd.)

경기도 수원시 영통구 광교로 109 한국나노기술원 13층 우편번호16229

전화번호: +82-31-8065-8300 팩스: +82-31-8065-8301

켐트렉 한국내 무료전화: 003-0813-2549 켐트렉 국제: 1-703-527-3887 긴급전화 : 031-8036-9806 E-mail: [email protected]

SECTION 2: Hazards identification

Hazard/Risk Classification Gases Under Pressure - Liquefied gas Acute Toxicity - Inhalation - Gas - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Reproductive Toxicity - Effects on or via Lactation Specific target organ toxicity - Single exposure - Category 1 ( respiratory system ) Specific target organ toxicity - Repeated exposure - Category 1 ( skeletal system , kidneys ) Label elements Hazard symbols

______Page 1 of 11 Issue date: 2021-07-12 Revision 2.8 Print date: 2021-07-12

Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

Signal word Danger Hazard/Risk Statement H280 Contains gas under pressure; may explode if heated. H330 Fatal if inhaled. H314 Causes severe skin burns and eye damage. H318 Causes serious eye damage. H362 May cause harm to breast-fed children. H370 Causes damage to organs. （respiratory system ） H372 Causes damage to organs through prolonged or repeated exposure. （skeletal system , kidneys ） Precautionary statements Prevention P260 Do not breathe gas. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P201 Obtain special instructions before use. P263 Avoid contact during pregnancy/while nursing. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. Response P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P410+P403 Protect from sunlight. Store in a well-ventilated place. P233 Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations (depending on the information set out in the Waste Control Act). Potential Environmental Effects No data available. Other Hazards Which Do Not Result in Classification None known.

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

SECTION 3: Composition / information on ingredients

CAS Chemical name Other Names Percent

7783-58-6 Germanium tetrafluoride GERMANIUM FLUORIDE 100 Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 4: First aid measures

Eye contact In case of eye contact, immediately flush eyes with plenty of water for at least 30 minutes, occasionally lifting the lower and upper lids. Get medical attention immediately. Skin contact If this chemical contacts the skin, immediately flush the contaminated skin with soap and water. If clothing is contaminated, immediately remove and flush the skin with soap and water. Get medical attention immediately. Assume victim has also been exposed by inhalation. Treat as HF exposure. Consider the use of calcium gluconate. Inhalation If gas is inhaled, move victim to fresh air. If breathing has stopped, give artificial respiration. If breathing is weak, give oxygen. Get medical attention without delay. Ingestion Ingestion is not a route of exposure. Most Important Symptoms/Effects Symptoms: Immediate Fatal if inhaled, respiratory tract burns, skin burns, eye burns, respiratory system damage Symptoms: Delayed Effects on or via lactation, bone damage, fluorosis, kidney damage Indication of any immediate medical attention and special treatment needed For inhalation, consider oxygen.

SECTION 5: Firefighting measures

Suitable extinguishing media carbon dioxide, regular dry chemical. Large fires: Use water spray, fog or regular foam. Unsuitable Extinguishing Media Do not use water. Specific hazards arising from the chemical Heating of cylinder beyond pressure relief. Negligible fire hazard. Containers may rupture or explode if exposed to heat. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures Move container from fire area if it can be done without risk. Do not get water inside container. Damaged cylinders should be handled only by specialists. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. Keep unnecessary people away, isolate hazard area and deny entry. Use extinguishing agents appropriate for surrounding fire. Apply water from a protected location or from a

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

safe distance. Reduce vapors with water spray. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Combustion fluoride, oxides of germanium

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods for Containment In case of fire: Use appropriate media to extinguish. Keep unnecessary people away, isolate hazard area and deny entry. Stay upwind and keep out of low areas. Ventilate closed spaces before entering. Isolate area until gas has dispersed. Use appropriate protective equipment including self-contained breathing apparatus. Be certain to flush lines and enclosures with inert gas before repairing. Damaged cylinders should be handled only by specialists. Stop leak if possible without personal risk. Reduce vapors with water spray. Do not get water directly on material.

SECTION 7: Handling and storage

Precautions for safe handling Handle this material only in a sealed, purged system. Do not heat cylinder by any means to increase discharge rate of product from the cylinder. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Wear respiratory protection. Obtain special instructions before use. Avoid contact during pregnancy/while nursing. Do not eat, drink, or smoke when using this product. Use only outdoors or in a well-ventilated area. Conditions for safe storage, including any incompatibilities Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Protect from physical damage. Store in a cool, dry, well ventilated area of non-combustible construction. Protect cylinders from direct sunlight, mechanical damage and temperatures above 55 C. Keep away from cylinders of oxygen or other highly oxidizing or flammable materials. Ship and store cylinders with outlet plug and valve protective cap in place. Incompatible Materials acids, alkali metals, calcium oxide, moist air, organic and compounds

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits Germanium 7783-58-6 tetrafluoride

Korea: 3 ppm Ceiling as F (related to Hydrofluoric acid)

Skin notation (related to Hydrofluoric acid)

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

0.5 ppm TWA as F (related to Hydrofluoric acid)

ACGIH: 2.5 mg/m3 TWA as F (related to Fluorides)

2 ppm Ceiling as F (related to Hydrofluoric acid)

Skin - potential significant contribution to overall exposure by the cutaneous route (related to Hydrofluoric acid)

AIHA 2 ppm Ceiling as F (related to Hydrofluoric acid) ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) Germanium tetrafluoride (7783-58-6) 2 mg/l Medium: urine Time: prior to shift Parameter: Fluoride (background, nonspecific ); 3 mg/l Medium: urine Time: end of shift Parameter: Fluoride (background, nonspecific ) (related to Fluorides) IDLH 250 mg/m3 Appropriate engineering controls Exhausted process enclosure recommended to meet published exposure limits. Use only in a well ventilated area. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection When contacted directly to the applicable substance or with possible exposure, ensure to wear the required protective goggle/face shield certified by the Korea Occupational Safety and Health Agency (KOSHA). Install eyewash and emergency shower facility near the work area. Skin and Body Protection When contacted directly to the applicable substance or with possible exposure, ensure to wear the required protective clothing for chemicals certified by the Korea Occupational Safety and Health Agency (KOSHA). Hand protection When contacted directly to the applicable substance or with possible exposure, ensure to wear the required safety gloves for chemicals certified by the Korea Occupational Safety and Health Agency (KOSHA). Protective Materials neoprene, natural rubber, nitrile Respiratory Protection Respirators depend on exposure level. SCBA with full face piece recommended during change outs and available in case of emergency. Further information AIHA WEELs, DFG MAKs have not developed exposure limits for any of this product's components. NIOSH: 3 ppm TWA; 2.5 mg/m3 TWA related to Hydrofluoric acid. OSHA:. 2.5 mg/m3 TWA Fluorides.

SECTION 9: Physical and chemical properties

Appearance colorless gas

Physical State gas

Physical Form gas

Color colorless (fumes white smoke in open air)

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

Odor acrid odor

Odor Threshold Not available

pH (Strong acid gas )

Melting Point -15 °C at 4 Atm

Freezing point Not available

Boiling Point -36.5 °C

Boiling Point Range Not available

Flash Point (Non-flammable gas )

Evaporation Rate Not available

Flammability (solid, gas) Non-flammable gas

Upper Explosive Limit Not available

Lower Explosive Limit Not available

Vapor Pressure 235 psia @ 21 °C

Solubility (Other) Not available

Water Solubility (Reacts )

Vapor Density (air=1) 5.13

Specific Gravity (water=1) Not available

Partition coefficient: n-octanol/water Not available

Autoignition Temperature Not available

Decomposition temperature Not available

Viscosity Not available

Molecular Weight 148.6

Density 2.162 g/cc (Liquid )

Molecular Formula Ge-F4

SECTION 10: Stability and reactivity

Reactivity

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

May react on contact with water. Releases toxic and/or corrosive gases. Germanium tetrafluoride is not known to decompose thermally. Chemical stability May react on contact with water. Releases toxic and/or corrosive gases. Germanium tetrafluoride is not known to decompose thermally. Possibility of Hazardous Reactions Will not polymerize. Conditions to avoid Minimize contact with material. Containers may rupture or explode if exposed to heat. Avoid contact with water or moisture. Materials to Avoid (Incompatibilities) acids, alkali metals, calcium oxide, moist air, organic solvents and compounds Hazardous Decomposition Products Thermal decomposition products , oxides of germanium Water or Moisture fluorogermanic acids, hydrogen fluoride

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation Fatal if inhaled, burns, respiratory system damage Skin burns Eye burns Ingestion burns, fluorosis, bone damage, kidney damage Health Hazards Acute and Chronic Toxicity Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: Germanium tetrafluoride (7783-58-6) Inhalation LC50 Rat 0.79 mg/L 1 h (related to Hydrofluoric acid) Acute Toxicity Estimate No data available. Immediate Effects Fatal if inhaled, respiratory tract burns, skin burns, eye burns, respiratory system damage Delayed Effects Effects on or via lactation, bone damage, fluorosis, kidney damage Skin corrosive/irritant skin burns Serious eye damage/irritation eye burns Respiratory Sensitization No data available. Dermal Sensitization No data available.

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

Carcinogenicity Not applicable based on available data. Component Carcinogenicity Germanium tetrafluoride 7783-58-6

ACGIH: A4 - Not Classifiable as a Human Carcinogen (related to Fluorides) Mutagenic Data Not applicable based on available data. Reproductive Effects Data May cause harm to breast-fed children. Specific Target Organ Toxicity - Single Exposure respiratory system Specific Target Organ Toxicity - Repeated Exposure kidneys, skeletal system Aspiration hazard Not applicable. Medical Conditions Aggravated by Exposure bone, joint or tooth disorders, central nervous system disorders, eye disorders, kidney disorders, respiratory disorders, skin disorders and allergies Additional Data May cross the placenta. May be excreted in breast milk.

SECTION 12: Ecological information

Ecotoxicity Component Analysis - Aquatic Toxicity Germanium 7783-58-6 tetrafluoride

EC50 48 h Daphnia species 270 mg/L IUCLID (related to Hydrofluoric Invertebrate: acid) Abiotic degradation Will decompose on contact with water to form hydrogen fluoride. Persistence and degradability No data available. Bioaccumulative Potential No data available. Mobility in soil No data available. Other adverse effects All work practices must be aimed at eliminating environmental contamination. This gas will be dissipated rapidly in well ventilated areas. Due to the corrosivity and toxicity of this gas, contact with animals, plants and aquatic life may cause damage or be fatal. Frost produced in the presence of rapidly expanding gases may adversely affect plant life. Will decompose on contact with water to form hydrogen fluoride.

SECTION 13: Disposal considerations

Disposal Methods

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

Dispose in accordance with Waste Control Act. Disposal Precaution Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: UN#: UN3308 Shipping Name: LIQUEFIED GAS, TOXIC, CORROSIVE, N.O.S. , ( Contains: GERMANIUM TETRAFLUORIDE ) Hazard Class: 2.3 Required Label(s): 2.3, 8 Packing Group: Not applicable Forbidden by Air Marine pollutant: Not a marine pollutant

ICAO Information: UN#: UN3308 Shipping Name: LIQUEFIED GAS, TOXIC, CORROSIVE, N.O.S. , ( Contains: GERMANIUM TETRAFLUORIDE ) Hazard Class: 2.3 Required Label(s): 2.3, 8 Packing Group: Not applicable Forbidden by Air Marine pollutant: Not a marine pollutant

IMDG Information: UN#: UN3308 Shipping Name: LIQUEFIED GAS, TOXIC, CORROSIVE, N.O.S. , ( Contains: GERMANIUM TETRAFLUORIDE ) Hazard Class: 2.3 Required Label(s): 2.3, 8 Packing Group: Not applicable Marine pollutant: Not a marine pollutant International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None known.

SECTION 15: Regulatory information

Korea Regulations Industrial Safety and Health Act Germanium tetrafluoride 7783-58-6

Matters subject to Submission of Process Safety Substance subject to Process Safety Report Reports (PSM): Submission

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

Manufacturing or Handling Yes

Storage Yes

Occupational exposure limit values:

0.5 ppm TWA as F Serial No. 243 (related TWA. to Hydrofluoric acid)

3 ppm Ceiling as F 243 (related to Hydrofluoric Ceiling acid)

Skin notation Serial No. 238 (related Skin notation to Hydrofluoric acid) Chemicals Control Act (CCA) None of the substances are regulated under the Chemicals Control Act. Dangerous Materials Safety Control Act This product is not regulated under the Dangerous Materials Safety Control Act. Product Classification Not applicable Waste Management Act Not applicable Other requirements in domestic and other countries No data available. Component Analysis - Inventory Germanium tetrafluoride (7783-58-6) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes NSL No Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW, CN VN (Draft)

No No No No No Yes No

SECTION 16: Other information

NFPA Ratings Health: 4 Fire: 0 Instability: 1 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Information sources and references No data available. Summary of Changes 07/12/2021 - Update to Section(s) 1. Preparation Date 07/09/2014 Revision date 07/12/2021 Key / Legend ______Page 10 of 11 Issue date: 2021-07-12 Revision 2.8 Print date: 2021-07-12

Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - China; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Japan Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime ; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; KR REACH CCA - Korea Registration and Evaluation of Chemical Substances Chemical Control Act; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TH-TECI - Thailand - FDA Existing Chemicals Inventory (TECI); TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – Taiwan; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

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