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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA)

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Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA) Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA) SECTION 1: Identification of the substance/mixture and of the company/undertaking Product Identifier Material Name GERMANIUM TETRAFLUORIDE Synonyms GERMANE TETRAFLUORIDE; GeF4; GERMANE FLUORIDE; TETRAFLUOROGERMANE Chemical Family inorganic, halogenated, gas Product Description The gas can be packaged in either a VAC or PDS+100 gas source cylinder. The contents of the cylinder are stored at high pressure, however each package type contains regulators within the cylinder that allow a fixed delivery pressure. For VAC, the cylinder delivery pressure will be sub-atmospheric and for PDS+100 the cylinder delivery pressure will be super-atmospheric at a nominal pressure of 100 psig. This MSDS addresses only the hazards of the gas. Product Use semi-conductor fabrication, general synthetic chemical Restrictions on Use None known. Supplier Information 한국 인테그리스 주식회사 (Hanguk Entegris Co., Ltd.) 경기도 수원시 영통구 광교로 109 한국나노기술원 13층 우편번호16229 전화번호: +82-31-8065-8300 팩스: +82-31-8065-8301 켐트렉 한국내 무료전화: 003-0813-2549 켐트렉 국제: 1-703-527-3887 긴급전화 : 031-8036-9806 E-mail: [email protected] SECTION 2: Hazards identification Hazard/Risk Classification Gases Under Pressure - Liquefied gas Acute Toxicity - Inhalation - Gas - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Reproductive Toxicity - Effects on or via Lactation Specific target organ toxicity - Single exposure - Category 1 ( respiratory system ) Specific target organ toxicity - Repeated exposure - Category 1 ( skeletal system , kidneys ) Label elements Hazard symbols ____________________________________________________________ Page 1 of 11 Issue date: 2021-07-12 Revision 2.8 Print date: 2021-07-12 Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA) Signal word Danger Hazard/Risk Statement H280 Contains gas under pressure; may explode if heated. H330 Fatal if inhaled. H314 Causes severe skin burns and eye damage. H318 Causes serious eye damage. H362 May cause harm to breast-fed children. H370 Causes damage to organs. （respiratory system ） H372 Causes damage to organs through prolonged or repeated exposure. （skeletal system , kidneys ） Precautionary statements Prevention P260 Do not breathe gas. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P201 Obtain special instructions before use. P263 Avoid contact during pregnancy/while nursing. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. Response P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P410+P403 Protect from sunlight. Store in a well-ventilated place. P233 Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations (depending on the information set out in the Waste Control Act). Potential Environmental Effects No data available. Other Hazards Which Do Not Result in Classification None known. ____________________________________________________________ Page 2 of 11 Issue date: 2021-07-12 Revision 2.8 Print date: 2021-07-12 Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA) SECTION 3: Composition / information on ingredients CAS Chemical name Other Names Percent 7783-58-6 Germanium tetrafluoride GERMANIUM FLUORIDE 100 Impurities and stabilizing additives contributing to the GHS Classification None SECTION 4: First aid measures Eye contact In case of eye contact, immediately flush eyes with plenty of water for at least 30 minutes, occasionally lifting the lower and upper lids. Get medical attention immediately. Skin contact If this chemical contacts the skin, immediately flush the contaminated skin with soap and water. If clothing is contaminated, immediately remove and flush the skin with soap and water. Get medical attention immediately. Assume victim has also been exposed by inhalation. Treat as HF exposure. Consider the use of calcium gluconate. Inhalation If gas is inhaled, move victim to fresh air. If breathing has stopped, give artificial respiration. If breathing is weak, give oxygen. Get medical attention without delay. Ingestion Ingestion is not a route of exposure. Most Important Symptoms/Effects Symptoms: Immediate Fatal if inhaled, respiratory tract burns, skin burns, eye burns, respiratory system damage Symptoms: Delayed Effects on or via lactation, bone damage, fluorosis, kidney damage Indication of any immediate medical attention and special treatment needed For inhalation, consider oxygen. SECTION 5: Firefighting measures Suitable extinguishing media carbon dioxide, regular dry chemical. Large fires: Use water spray, fog or regular foam. Unsuitable Extinguishing Media Do not use water. Specific hazards arising from the chemical Heating of cylinder beyond pressure relief. Negligible fire hazard. Containers may rupture or explode if exposed to heat. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures Move container from fire area if it can be done without risk. Do not get water inside container. Damaged cylinders should be handled only by specialists. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. Keep unnecessary people away, isolate hazard area and deny entry. Use extinguishing agents appropriate for surrounding fire. Apply water from a protected location or from a ____________________________________________________________ Page 3 of 11 Issue date: 2021-07-12 Revision 2.8 Print date: 2021-07-12 Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA) safe distance. Reduce vapors with water spray. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Combustion hydrogen fluoride, oxides of germanium SECTION 6: Accidental release measures Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods for Containment In case of fire: Use appropriate media to extinguish. Keep unnecessary people away, isolate hazard area and deny entry. Stay upwind and keep out of low areas. Ventilate closed spaces before entering. Isolate area until gas has dispersed. Use appropriate protective equipment including self-contained breathing apparatus. Be certain to flush lines and enclosures with inert gas before repairing. Damaged cylinders should be handled only by specialists. Stop leak if possible without personal risk. Reduce vapors with water spray. Do not get water directly on material. SECTION 7: Handling and storage Precautions for safe handling Handle this material only in a sealed, purged system. Do not heat cylinder by any means to increase discharge rate of product from the cylinder. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Wear respiratory protection. Obtain special instructions before use. Avoid contact during pregnancy/while nursing. Do not eat, drink, or smoke when using this product. Use only outdoors or in a well-ventilated area. Conditions for safe storage, including any incompatibilities Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Protect from physical damage. Store in a cool, dry, well ventilated area of non-combustible construction. Protect cylinders from direct sunlight, mechanical damage and temperatures above 55 C. Keep away from cylinders of oxygen or other highly oxidizing or flammable materials. Ship and store cylinders with outlet plug and valve protective cap in place. Incompatible Materials acids, alkali metals, calcium oxide, moist air, organic solvents and compounds SECTION 8: Exposure controls/personal protection Exposure Guidelines Component Exposure Limits Germanium 7783-58-6 tetrafluoride Korea: 3 ppm Ceiling as F (related to Hydrofluoric acid) Skin notation (related to Hydrofluoric acid) ____________________________________________________________ Page 4 of 11 Issue date: 2021-07-12 Revision 2.8 Print date: 2021-07-12 Safety Data Sheet Material Name: GERMANIUM TETRAFLUORIDE SDS ID: 00231454 (KOREA) 0.5 ppm TWA as F (related to Hydrofluoric acid) ACGIH: 2.5 mg/m3 TWA as F (related to Fluorides) 2 ppm Ceiling as F (related to Hydrofluoric acid) Skin - potential significant contribution to overall exposure by the cutaneous route (related to Hydrofluoric acid) AIHA 2 ppm Ceiling as F (related to Hydrofluoric acid) ACGIH - Threshold Limit Values - Biological Exposure
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