A Corrosion Resistant Silicon Barrier Coating Ideal for Acidic, Oxidative, and High Purity Environments

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Coating Data Sheet A corrosion resistant silicon barrier coating ideal for acidic, oxidative, and high purity environments. Overview Features & Benefits Silcolloy® (US Patent 7,070,833) is a chemically • 3D non-line-of-sight process coats all protective, corrosion resistant, multi-layered barrier complex geometries and small orifices of amorphous silicon. Applied via chemical vapor deposition (CVD), Silcolloy is the ideal choice for • Achieve exotic material performance at a protecting stainless steels, exotic metals, glass, fraction of the price ceramics and other alloys from acidic attack or for preventing unwanted compounds from entering the • Fight corrosion with a non-reactive, pure process stream. barrier Specifications SS alloys, ceramics, glass, titanium, most exotic metals, TIG/ Substrate compatibility*: MIG welds, vacuum-nickel brazed areas Allowable temp. range: -210°C to +1140°C Thickness: 180-800 nm Allowable pH exposure: 0-8 Lubricity (coefficient of friction): 0.7 Hydrophobicity (contact angle): 80° Wear resistance 14.00 (304 stainless steel: 13.81) Lit. Cat. #SY-002 * Contact technical service Data Acid Corrosion Resistance Semiconductor-Related Corrosion Silcolloy® protects stainless steel against High purity, corrosion resistant Silcolloy is ideal corrosive attack from even the strongest acids. for gas delivery and chamber systems. Crevice Corrosion Acid Corrosion Comparative Results Silcolloy acts as a barrier to prevent pitting and Silcolloy shows minimal pitting while uncoated crevice corrosion. stainless steel shows significant crevice corrosion. Adhesion High Purity Our CVD process ensures a molecularly Multilayer silicon surface prevents leaching of bonded coating that will not flake or peel. metal ions into process streams. Lifecycle Cost Silcolloy offers a signficantly lower lifecycle cost compared to exotic materials. Game-Changing Coatings™ Schaberweg 23 | D - 61348 Bad Homburg Tel.: +49 (0)6172- 279 721 | Fax: +49 (0)6172 - 9231347 www.SilcoTekGmbH.de | [email protected] © SilcoTek® Corporation. All Rights Reserved. Printed in the USA. Information subject to change without notice. Lit. Cat. #SY-002.

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