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Energy Table for EDS Analysis High Technology for Quality Assurance and the Environment ISO 9001 Certificated ISO 14001 Certificated Energy table for EDS analysis http://www.jeol.com/http://www.jeol.com/ High technology for quality assurance and the environment Hydrogen Characteristic X-rays Continuum X-rays The electrons generated by the electron gun If the incident electrons have sufficient acceleration The continuum X-rays are emitted Helium are accelerated and irradiate the sample. The and then have enough energy to strike an electron when the primary electrons are 1 electron has a kinetic energy proportional to from the inner shell of the atom, it'll make an decelerated by the strong electric field 2 1.01 H the accelerating voltage. The kinetic energy electron hole. An electron from the outer shell will existing close to atomic nucleus. The 4.00 He 0.08 0.19 Secondary Electron Electron transmissions of major lines E0 dissipated within the sample generates fill up the hole and then, some characteristic X-rays continuum X-rays have the energy of characteristic signals from the specimen. The will be emitted. The characteristic X-rays have the kinetic energy lost during the Incident Electron NⅦ E0 characteristic X-rays are the information different energy for each element, and the intensity deceleration. It will be observed as ： used for EDS analysis. will be proportional to the element concentration. EDS spectrum background. NⅣ Continuum X-rays ： NⅠ Lithium Beryllium Characteristic E0 hv = E4 Boron Carbon Nitrogen Oxygen Fluorine Neon X-rays hv = E3 α1 βγζ 3 4 E0 5 6 7 8 9 10 6.94 9.01 MⅤ hv = E2 10.81 12.01 14.01 16.00 19.00 20.18 Li Be ・ B C N O F Ne 0.53 1.85 MⅢ 2.54 2.25 * 1.14 1.57 1.5 1.20 ・ hv = E1 Kα 0.110 MⅠ Nucleus Kα 0.183 Kα 0.277 Kα 0.392 Kα 0.525 Kα 0.677 Kα 0.848 Nucleus M K shell α α β β γ γ L shell 1 2 1 2 1 3 LⅢ E0 -E4 Magnesium M shell Aluminium Silicon Phosphorus Sulphur Chlorine Argon Sodium N shell LⅡ O shell E0 -E3 11 12 LⅠ 13 14 15 16 17 18 22.99 Na 24.31 Mg L 26.98 Al 28.09 Si 30.97 P 32.06 S 35.45 Cl 39.95 Ar 0.97 1.74 2.70 2.42 1.83 * 2.07 * 2.2 1.65 α1 α2 β1 E0 -E2 α α Electron α α α α α α K 1.041 K 1.253 KⅠ K 1.486 K 1.739 K 2.013 K 2.307 K 2.621 K 2.957 K E0 -E1 Potassium Calcium Scandium Titanium Vanadium Chromium Manganese Iron Cobalt Nickel Copper Zinc Gallium Germanium Arsenic Selenium Bromine Krypton 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 39.10 K 40.08 Ca 44.96 Sc 47.90 Ti 50.94 V 52.00 Cr 54.94 Mn 55.85 Fe 58.93 Co 58.70 Ni 63.55 Cu 65.38 Zn 69.72 Ga 72.59 Ge 74.92 As 78.96 Se 79.90 Br 83.80 Kr 0.87 1.55 2.99 4.5 5.87 7.14 7.3 7.86 8.71 8.8 8.93 6.92 5.93 5.46 5.73 4.82 4.2 3.4 Kα 3.312 Kα 3.690 Kα 4.088 Kα 4.508 Kα 4.949 Kα 5.411 Kα 5.894 Kα 6.398 Kα 6.924 Kα 7.471 Kα 8.040 Kα 8.630 Kα 9.241 Kα 9.874 Kα 10.530 Kα 11.207 Kα 11.907 Kα 12.631 Lα 0.395 Lα 0.452 Lα 0.511 Lα 0.573 Lα 0.637 Lα 0.705 Lα 0.776 Lα 0.851 Lα 0.930 Lα 1.012 Lα 1.098 Lα 1.188 Lα 1.282 Lα 1.379 Lα 1.480 Lα 1.586 Rubidium Strontium Yttrium Zirconium Niobium Molybdenum Technetium Ruthenium Rhodium Palladium Silver Cadmium Indium Tin Antimony Tellurium Iodine Xenon 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 85.47 Rb 87.62 Sr 88.91 Y 91.22 Zr 92.91 Nb 95.94 Mo ( 97) Tc 101.07 Ru 102.91 Rh 106.4 Pd 107.87 Ag 112.40 Cd 114.82 In 118.69 Sn 121.75 Sb 127.60 Te 126.90 I 131.30 Xe 1.53 2.60 4.48 6.44 8.4 9.01 12.1 12.44 12.16 10.49 8.65 7.28 7.30 * 6.62 6.25 4.94 Kα 13.373 Kα 14.140 Kα 14.931 Kα 15.744 Kα 16.581 Kα 17.441 Kα 18.325 Kα 19.233 Lα 2.696 Lα 2.838 Lα 2.984 Lα 3.133 Lα 3.286 Lα 3.443 Lα 3.604 Lα 3.769 Lα 3.937 Lα 4.109 Lα 1.694 Lα 1.806 Lα 1.922 Lα 2.042 Lα 2.166 Lα 2.293 Lα 2.424 Lα 2.558 M 0.368 M 0.691 M 0.733 M 0.778 Cesium Barium Lanthanoid Hafnium Tantalum Tungsten Rhenium Osmium Iridium Platinum Gold Mercury Thallium Lead Bismuth Polonium Astatine Radon 55 56 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 132.91 Cs 137.34 Ba 178.49 Hf 180.95 Ta 183.85 W 186.21 Re 190.2 Os 192.22 Ir 195.09 Pt 196.97 Au 200.59 Hg 204.37 Tl 207.2 Pb 208.98 Bi (209) Po (210) At (222) Rn 1.87 3.5 57-71 13.3 16.6 19.3 20.53 22.5 22.42 21.37 18.88 14.19 11.86 11.34 9.78 Lα 4.286 Lα 4.465 Lα 7.898 Lα 8.145 Lα 8.396 Lα 8.651 Lα 8.910 Lα 9.174 Lα 9.441 Lα 9.712 Lα 9.987 Lα 10.267 Lα 10.550 Lα 10.837 Lα 11.129 Lα 11.425 Lα 11.725 M 0.972 M 1.644 M 1.709 M 1.774 M 1.842 M 1.914 M 1.977 M 2.048 M 2.120 M 2.195 M 2.267 M 2.342 M 2.419 Actinoid Francium Radium Lanthanum Cerium Neodymium Prometium Samarium Gadolinium Terbium Dysprosium Holmium Erbium Thulium Ytterbium Lutetium 87 88 Praseodymium Europium (223) Fr 226.03 Ra 57 5858 59 60 61 62 63 64 65 66 67 68 69 70 71 5 138.91 La 140.12 Ce 140.91 Pr 144.24 Nd (145) Pm 150.4 Sm 151.96 Eu 157.25 Gd 158.93 Tb 162.50 Dy 164.93 Ho 167.26 Er 168.93 Tm 173.04 Yb 174.97 Lu 89-103 6.17 6.66 6.77 7.02 7.54 5.25 7.90 8.25 8.56 8.80 9.06 9.32 6.96 9.84 Lα Lα 12.029 12.340 Lα 4.650 Lα 4.839 Lα 5.033 Lα 5.229 Lα 5.432 Lα 5.635 Lα 5.845 Lα 6.056 Lα 6.272 Lα 6.494 Lα 6.719 Lα 6.947 Lα 7.179 Lα 7.414 Lα 7.654 M 0.833 M 0.883 M 0.929 M 0.978 M 1.081 M 1.131 M 1.185 M 1.240 M 1.293 M 1.347 M 1.405 M 1.462 M 1.521 M 1.581 Actinium Thorium Protactinium Uranium Neptunium Plutonium Americium Curium Berkelium Californium Einsteinium Fermium Mendelevium Nobelium Lawrencium 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 (227) Ac 232.04 Th 231.04 Pa 238.03 U 237.05 Np (244) Pu (243) Am (247) Cm (247) Bk (251) Cf (254) Es (257) Fm (258) Md (255) No (262) Lr Gold Name 10.07 11.00 18.7 Number 79 Lα 12.650 Lα 12.967 Lα 13.288 Lα 13.612 Lα 13.942 Lα 14.276 Lα 14.615 Lα 14.953 Lα 15.304 Lα 15.652 Atomic mass 196.97 Au Symbol M 2.991 M 3.077 M 3.164 M 3.260 M 3.348 M 3.437 M 3.539 M 3.634 M 3.731 18.88 Density Lα 9.712 (kg/m3) M 2.120 Characteristic X-ray （keV) Information from specimen Generation depth and space resolution Analytical area Note: Density * ‘C’ as (graphite), ‘P’ as (white), Castaing’s formula Electron probe 3 ‘S’ as (alpha), ‘Sn’ as (white) A 0.5 1 5 10 20 (kg/m ) Incident electrons z = 0.033 (E 1.7 E 1.7) m 0 - C ρZ PLASTICS Si Al Ti Ge Fe Ag Au WOOD RUBBER CERAMICS Cu Pb Secondary electrons X-rays GLASS Secondary electrons E : Accelerating voltage (kV) Minimum accelerating voltage 0 ROCK Auger electrons EC : Minimum emission voltage (keV) Cathodoluminescence Backscattered electrons A : Atomic mass 3 Unable Backscattered electrons ρ : Density (kg/m ) Unable to 5kV Z : Atomic number to 5kV Auger electrons detect or higher detect or higher Continuum X-rays E0 1 5102050 (kV) Specimen Characteristic X-rays EC E0 Fluorescent X-rays Electromotive force 10kV10kV 15kV15kV Absorbed electrons oror higher higher oror higher higher (μm) zm (μm) 0.010.05 0.1 0.5 1 510 50100 Transmitted electrons The colors mean to detect the characteristic X-ray of the lowest energy for each element.
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