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2020 Annual Research Report MASSACHUSETTS INSTITUTE OF TECHNOLOGY 3 Front Cover Credits 1. Pine (P. radiata) cells grown in liquid culture and marked with fluorescent probes to indicate 2 live cells (green) and the cell walls of all cells (blue). 2. Using AI to Make Better AI: New approach brings faster, AI-optimized AI that runs efficiently on IoT devices 1 3. A monolithic array of SS 316L 3D-printed MEMS corona ionizers and close-up of a single tip ; devices can be used as electrohydrodynamic gas pumps. MTL Annual Research Report 2020 Hae-Seung Lee Vladimir Bulovic Shereece Beckford Elizabeth Fox Tina Gilman Elizabeth Green Stacy McDaid Meghan Melvin Jami Mitchell © 2020 Massachusetts Institute of Technology. CONTENTS Foreword ..........................................................................................................................................................i Acknowledgments ......................................................................................................................................... iii RESEARCH ABSTRACTS Biological, Medical Devices, and Systems ............................................................................................1 Electronic, Magnetic, Superconducting, and Quantum Devices .................................................... 16 Energy ...................................................................................................................................................40 Integrated Circuits & Systems .............................................................................................................57 Machine Learning and Neuromorphic Computing ........................................................................... 79 MEMS, Field-Emitter, Thermal, and Fluidic Devices ................................................................... 100 Nanotechnology, Nanostructures, Nanomaterials ........................................................................ 122 Photonics and Optoelectronics ........................................................................................................139 Research Centers ..................................................................................................................................... 156 Faculty Profiles ......................................................................................................................................... 162 Theses Awarded ........................................................................................................................................ 203 Glossary ..................................................................................................................................................... 208 Foreword We are pleased to bring to you the 2020 Microsystems Annual Research Report. MTL’s core mission has been to foster interdisciplinary research and education as well as strong industrial rela- tion in microsystems and technology. MTL has maintained a wide footprint of research that encompasses broad areas of disciplines. They include nanoscale technology and materials as well as nano and microscale devices and systems. MTL’s research portfolio includes a diverse array of novel devices as electronic, magnetic, field emitter, thermal, fluidic, superconducting and quantum devices, as well as integrated circuits and systems, machine learn- ing and neuromorphic computing, biological and medical devices and systems, photonics, and energy. Since MTL’s research has been at the forefront of technology, an advanced, flexible fabrication facility has always been a critical element of MTL. In that regard, the completion of the ultramodern MIT.nano two years ago marked a new era for MTL. The availability of such an advanced, grand-scale fabrication facility is poised to dramatically improve MTL’s position in cutting-edge research. It is therefore, natural that MTL has been closely collaborating with and financially supporting MIT.nano since 2016. For closer collaboration, the 2020 Microsystems Annual Re- search Conference was organized and sponsored jointly by MTL and MIT.nano for the first time. To go one step further, we put together the Microsystems Annual Research Report jointly between MTL and MIT.nano for the first time. The MTL/MIT.nano joint Microsystems Annual Research Report represents a broad cross-section of the MIT community, with 90+ faculty, 121 students, postdoctoral associates, and research staff participating. As the pages ahead demonstrate, an astonishing range of insights and innovations emerge from the users of MIT’s shared fa- cilities. It is a privilege to serve this remarkable community. On behalf of the staff of MIT.nano and MTL, we offer our gratitude for the inspiration you spark in us every day. We know the innovations represented in this report will translate into impact in the world, and we are excited to see what comes next. Hae-Seung Lee Director, Microsystems Technology Laboratories Vladimir Bulović Director, MIT.nano August 2020 MTL ANNUAL RESEARCH REPORT 2020 Foreword i ii Acknowledgments MICROSYSTEMS INDUSTRIAL GROUP MTL TECHNICAL STAFF Analog Devices, Inc. Daniel A. Adams, Research Specialist Applied Materials Bernard A. Alamariu (retired), Research Engineer Draper Robert J. Bicchieri, Research Specialist Edwards Kurt A. Broderick, Research Associate HARTING Whitney R. Hess, EHS Coordinator Hitachi High-Tech Corporation Michael J. Hobbs, Systems Administrator IBM Donal Jamieson, Research Specialist Lam Research Co. Gongqin Li, Research Software Developer NEC Eric Lim, Research Engineer TSMC Thomas J. Lohman, Project Leader, Computation Texas Instruments William T. Maloney, Systems Manager Paul J. McGrath, Research Specialist MTL LEADERSHIP TEAM Michael B. McIlrath, CAD Manager Ryan O'Keefe, Technician Hae-Seung Lee, Director Kristofor R. Payer, Research Specialist Duane S. Boning, Associate Director, Computation Scott J. Poesse, Research Specialist Vicky Diadiuk, Associate Director, Facilities and Technical Instructor Jing Kong, Associate Director Gary Riggott, Research Associate Jeffrey H. Lang, Associate Director David M. Terry, Project Technician Stacy McDaid, Administrative Officer Paul S. Tierney, Research Specialist Timothy K. Turner, Technician MTL POLICY BOARD Dennis J. Ward, Research Specialist Paudely Zamora (retired), Research Specialist Karl K. Berggren Geoffrey S. D. Beach MTL ADMINISTRATIVE STAFF Vladimir Bulović Gang Chen Joseph Baylon, Administrative Assistant Vicky Diadiuk Kathleen Brody, Administrative Assistant Karen K. Gleason Valerie J. DiNardo Administrative Assistant Lionel C. Kimerling Margaret Flaherty, Administrative Assistant Tomás Palacios Elizabeth Green, Senior Administrative Assistant Charles G. Sodini Elizabeth Kubicki, Administrative Assistant Timothy M. Swager Ludmila Leoparde, Financial Officer Carl V. Thompson Meghan Melvin, Communications Administrator Jami L. Mitchell, Administrative Assistant Steven O’Hearn, Administrative Assistant Flora Whitney, Financial Officer MTL ANNUAL RESEARCH REPORT 2020 Acknowledgments iii PROCESS TECHNOLOGY COMMITTEE Social Activities Elaine McVay Vicky Diadiuk, Chair Akintunde I. Akinwande Transportation Chair/Winter Activities Chair Xiaowei Cai Jay Sircar Winston Chern Nadim Chowdhury Outreach Chair Jeffrey H. Lang Morteza Sarmadi Derek Kita Eveline Postelnicu Registration/Logistics Chair Jörg Scholvin Rishabh Mittal Max Shulaker Saima Afroz Siddiqui Photography/Videography Tathagata Srimani Navid Abezadeh, Chair Erik Saathoff MTL SEMINAR SERIES COMMITTEE Circuits: Integrated Electronics, Energy Luis Velásquez-García, Chair Efficient AI, and Systems Committee Jeffrey H. Lang Jane Lai, Session Chair Jami L. Mitchell Gladynel Saavedra-Pena Vivienne Sze James Noraky MARC2020 CONFERENCE ORGANIZERS Electronic & Quantum Devices 1 Committee Qingyun Xie, Session Chair STEERING COMMITTEE Nadim Chowdhury Hae-Seung (Harry) Lee, MTL Director Joshua A. Perozek Jesús A. del Alamo, Former MTL Director Vladimir Bulović, MIT.nano Director Nanotechnology & Nanomaterials, Materials Stacy McDaid, Administrative Officer & Manufacturing Committee Katrina Mounlavongsy, Human Haozhe Wang, Session Chair Resources Administrator Jiahao Han Jami Mitchell, Publications & Proceedings Kuan Qiao Amanda Stoll, Publications & Proceedings Zhe Shi Joseph Baylon, Organization & Logistics Qichen Song Shereece Beckford, Organization & Logistics Paul McGrath, Photography Medical Devices & Biotechnology, Electronic Mayuran Saravanapavanantham, Conference Co-Chair & Quantum Devices 2 Committee Rachel Yang, Conference Co-Chair Kruthika Kikkeri, Session Chair Wei Liao Audio/Visual Management Chair Miaorong Wang Photonics & Optoelectronics Committee Mohamed Ibrahim, Session Chair Website and Proceedings Chair Isaac Harris Jatin Patil Sally El-Henawy Communications Training Committee Jessica Boles, Chair Deanna Montgomery, EECS Communication Lab Manager Reyu Sakakibara iv Acknowledgments MTL ANNUAL RESEARCH REPORT 2020 MIT.NANO CONSORTIUM Timothy K. Turner, Project Technician Electro - Mechanical Agilent Technologies Annie I. Wang, Research Scientist Analog Devices, Inc. Dennis J. Ward, Research Specialist Dow Paudely Zamora, Research Specialist Draper DSM AFFILIATED MIT.NANO STAFF Edwards Fujikura Anuradha Murthy Agarwal, Principal IBM Research Scientist Lam Research Edward Brignole, Assistant Director, Dept. of Biology NCSOFT Vicky Diadiuk, MTL Associate Director NEC Phat Vinh Dip, Research Scientist, Dept. of Biology Raith Michael Hobbs, Systems Manager Waters
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