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Extreme Ultraviolet Source Based on Microwave Discharge Produced Plasma Using Cavity Resonator
D2-PMo-1 APPC12 The 12th Asia Pacific Physics Conference Extreme Ultraviolet Source based on microwave discharge produced plasma using cavity resonator S. Tashima, M. Ohnishi, H. Osawa, W. Hugrass a Department of Electrical and Electronic Engineering, Faculty of Engineering Science, Kansai University, 3-3-35 Yamate-cho, Suita, Osaka 564-8680, Japan aSchool of Computing and Information Systems, University of Tasmania, Locked Bag 1359, Launceston, Tasmania 7250, Australia [email protected] Extreme ultra violet (EUV) lithography is a leading technology for the production of the next-generation chips with small features. The 13.5-nm EUV radiation can be obtained using either discharge-produced plasma (DPP) or laser-produced plasma (LPP) sources. Because the EUV radiation is strongly absorbed by all known materials, the entire EUV scanner system must be in a vacuum environment. The debris and the tin vapor generated in some EUV sources may cause contamination of the EUV mirrors and the silicon wafers. The microwave discharge produced plasma (MDPP) source invented at Kansai University does not produce debris because it is electrode-less and the working gas is Xe.. Figure 1 shows the photo of MDPP. The microwave frequency is 2.45 GHz, the maximum power (Prf ) is 6 kW and the cavity mode is TM110. The Xe gas is fed in a glass tube with inner diameter 3 mm. The EUV radiation is measured using a calorie meter and EUV spectroscopy. The preliminary experiments show that the Figure 1 The system of microwave discharge produced plasma system MDPP produces pulsed EUV radiation of 10 W/4π str. -
Extreme-Ultraviolet Frequency Combs for Precision Metrology and Attosecond Science
REVIEW ARTICLE https://doi.org/10.1038/s41566-020-00741-3 Extreme-ultraviolet frequency combs for precision metrology and attosecond science Ioachim Pupeza 1,2 ✉ , Chuankun Zhang3,4, Maximilian Högner 1 and Jun Ye 3,4 ✉ Femtosecond mode-locked lasers producing visible/infrared frequency combs have steadily advanced our understanding of fundamental processes in nature. For example, optical clocks employ frequency-comb techniques for the most precise measure- ments of time, permitting the search for minuscule drifts of natural constants. Furthermore, the generation of extreme-ultraviolet attosecond bursts synchronized to the electric field of visible/infrared femtosecond pulses affords real-time measurements of electron dynamics in matter. Cavity-enhanced high-order harmonic generation sources uniquely combine broadband vacuum- and extreme-ultraviolet spectral coverage with multimegahertz pulse repetition rates and coherence properties akin to those of frequency combs. Here we review the coming of age of this technology and its recent applications and prospects, including precision frequency-comb spectroscopy of electronic and potentially nuclear transitions, and low-space-charge attosecond-temporal-resolution photoelectron spectroscopy with nearly 100% temporal detection duty cycle. he control over broadband visible/near-infrared (VIS/NIR) ωN = ω0 +Nωr. Here ωr = 2π/Tr and ω0 are two frequencies in the electromagnetic waves, such as uniquely enabled by laser radiofrequency domain, corresponding to the inverse round-trip Tarchitectures employing mode-locked oscillators, lies at the time Tr of the optical pulse inside the mode-locked oscillator and heart of most advanced optical metrologies. The temporal inter- to an overall comb-offset frequency, respectively, and N is an play between gain, loss, dispersion and nonlinear propagation in integer. -
A Theoretical Investigation
Preprints (www.preprints.org) | NOT PEER-REVIEWED | Posted: 6 September 2019 doi:10.20944/preprints201909.0069.v1 ON THE EXTENSION OF COMPTON’S EXPERIMENT:A THEORETICAL INVESTIGATION Amal Pushp Fellow, The Royal Astro. Soc. Burlington House, Piccadilly London W1J 0BQ [email protected] September 6, 2019 ABSTRACT With new discoveries and insights in atomic and optical physics, the field of spectroscopy is advancing to a new level with applications ranging from material science to astronomy. We here propose a theoretical description of a potential new phenomenon resulting from the extension of Compton’s experiment on the scattering of high energy photons through atomic electrons. How the proposed phenomenon can be tested experimentally is discussed in the paper as well.∗ ∗The Idea of the paper is to be presented as part of an International Conference talk (ICECMP-2019) © 2019 by the author(s). Distributed under a Creative Commons CC BY license. Preprints (www.preprints.org) | NOT PEER-REVIEWED | Posted: 6 September 2019 doi:10.20944/preprints201909.0069.v1 SEPTEMBER 6, 2019 1 Introduction Therefore, we get, In 1923, A.H. Compton made a discovery which showed h h h the remarkable transformation that X rays undergo when δλ = ; δλ = ; :::::; δλ = 1 m c 2 m c β m c they are scattered by atoms [1, 2]. Some 5 years later, Sir e e e CV Raman, an Indian physicist at the Indian Association or for the Cultivation of Science (IACS), discovered along δλ = δλ1 + δλ2 + ::: + δλβ (4) with his students, that this scattering involving the change in wavelength of the radiation is also possible for visible or light [3]. -
24 Electromagnetic Waves.Pdf
CHAPTER 24 | ELECTROMAGNETIC WAVES 861 24 ELECTROMAGNETIC WAVES Figure 24.1 Human eyes detect these orange “sea goldie” fish swimming over a coral reef in the blue waters of the Gulf of Eilat (Red Sea) using visible light. (credit: Daviddarom, Wikimedia Commons) Learning Objectives 24.1. Maxwell’s Equations: Electromagnetic Waves Predicted and Observed • Restate Maxwell’s equations. 24.2. Production of Electromagnetic Waves • Describe the electric and magnetic waves as they move out from a source, such as an AC generator. • Explain the mathematical relationship between the magnetic field strength and the electrical field strength. • Calculate the maximum strength of the magnetic field in an electromagnetic wave, given the maximum electric field strength. 24.3. The Electromagnetic Spectrum • List three “rules of thumb” that apply to the different frequencies along the electromagnetic spectrum. • Explain why the higher the frequency, the shorter the wavelength of an electromagnetic wave. • Draw a simplified electromagnetic spectrum, indicating the relative positions, frequencies, and spacing of the different types of radiation bands. • List and explain the different methods by which electromagnetic waves are produced across the spectrum. 24.4. Energy in Electromagnetic Waves • Explain how the energy and amplitude of an electromagnetic wave are related. • Given its power output and the heating area, calculate the intensity of a microwave oven’s electromagnetic field, as well as its peak electric and magnetic field strengths Introduction to Electromagnetic Waves The beauty of a coral reef, the warm radiance of sunshine, the sting of sunburn, the X-ray revealing a broken bone, even microwave popcorn—all are brought to us by electromagnetic waves. -
Compensation of Extreme Ultraviolet Lithography Image Field Edge Effects Through Optical Proximity Correction
Rochester Institute of Technology RIT Scholar Works Theses 2-2014 Compensation of Extreme Ultraviolet Lithography Image Field Edge Effects Through Optical Proximity Correction Chris Maloney Follow this and additional works at: https://scholarworks.rit.edu/theses Recommended Citation Maloney, Chris, "Compensation of Extreme Ultraviolet Lithography Image Field Edge Effects Through Optical Proximity Correction" (2014). Thesis. Rochester Institute of Technology. Accessed from This Thesis is brought to you for free and open access by RIT Scholar Works. It has been accepted for inclusion in Theses by an authorized administrator of RIT Scholar Works. For more information, please contact [email protected]. COMPENSATION OF EXTREME ULTRAVIOLET LITHOGRAPHY IMAGE FIELD EDGE EFFECTS THROUGH OPTICAL PROXIMITY CORRECTION by CHRIS MALONEY A thesis submitted in partial fulfillment of the requirements For the degree of Master of Science in Microelectronic Engineering Kate Gleason College of Engineering Department of Electrical and Microelectronic Engineering Rochester Institute of Technology Rochester, NY February 2014 Author: _________________________________________________________________ Chris Maloney Approved by: ____________________________________________________________ Robert Pearson, Ph.D. Approved by: ____________________________________________________________ Bruce W. Smith, Ph.D. Approved by: ____________________________________________________________ Dale Ewbank, Ph.D. Approved by: ____________________________________________________________ -
Management in the Protection from Ionizing Radiation
Management in the Protection from Ionizing Radiation Miodrag Radunovića*, MD, PhD, Krsto Nikolića, MD, Goran Rakićb, BSc aMinistry of Health, Labour and Social Welfare in the Government of Montenegro, Rimski trg 46, 81000, Podgorica, Montenegro. bProving Ground, Seljanovo 36, 85320, Tivat, Montenegro. Abstract. There are numerous types and forms of endangering working and living environment, ranging from natural disasters to nuclear accidents. Challenges of the New Age determined that most of the countries reviewed its strategic decisions in the system of protection from ionizing radiation and nuclear safety and defined in a new way the threats, which could considerably imperil health of the population and national interests as well. Excessive radiation of the pouplation became a serious and actual problem in the era of increasingly mass application of ionizing radiation, especially in medicine. The goal of this work is to reduce the risk through using knowledge and exisitng experiences, in particular when it comes to ionizing radiation in medicine. Optimization of the protcetion in radiology actually means an effort to find the compromise between quality information provided by diagnostics procedure and quality effects of therapy procedure on one side and dose of radiation received by patients on the other. Criteria for the quality management in the protection from ioniizing radiation used in diagnostic radiology was given by the European Commission: European Guidelines on Quality Criteria for Diagnostic Radiographic Images, EUR, 16260. KEYWORDS: Ionizing Radiation, Medicine, Radiology, Risk Management, Protection from Ionizing Radiation 1. Introduction The effects of ionizing and non-ionizing radiation can be expressed directly on the radiated person by means of somatic effects or indirectly, on offspring, by genetic effects. -
Radio Waves: Microwaves: Infrared: Visible: Ultraviolet: X-Rays: Gamma
The Electromagnetic (EM) Spectrum Hawaiian Comparisons to the Sizes of Wavelengths: Aloha Tower Aloha Stadium Hale Kamehameha Point of a Needle Plant Cell Bacteria Protein Water Molecule Atom (Hawaiian House) Butterfly 3 -2 -5 -6 -8 -10 -12 Longer 10 10 10 10 10 10 10 Shorter Wavelength (Meters): Radio Waves: Microwaves: Infrared: Visible: Ultraviolet: X-Rays: Gamma Rays: Radio waves have the longest wavelength in the EM Since microwaves can penetrate haze, light Infrared light has a range of wavelengths Visible light waves are the only waves in spec- Ultraviolet light is invisible to the human As the wavelengths of the spectrum de- Gamma rays have the smallest wavelength, spectrum. As implied, radio waves bring music to ra- rain, snow, clouds and smoke, these waves like visible light. “Near infrared” light is trum that humans can see. These waves are eyes, but some insects, like bumblebees, have crease, the energy increases, such as how but have the most energy out of all of the other dios, but they also provide signals to cell phones, tele- are ideal for viewing the Earth from space. closest in wavelength to visible light and seen in a range of colors with red having the proven to be able to see ultraviolet light. The x-rays tend to act more like a particle than waves in the spectrum. These waves are gener- visions, etc. Radio waves are received at an estimate The wavelength of micro waves in a mi- “far infrared” is closer to the microwave re- longest wavelength and violet (purple) having ultraviolet part of the spectrum is divided into a wave. -
Laser-Plasma Sources for Extreme-Ultraviolet Lithography
Laser-Plasma Sources for Extreme-Ultraviolet Lithography BJÖRN A. M. HANSSON Doctoral Thesis Stockholm, Sweden 2003 TRITA FYS 2003-56 ISSN 0280-316X KTH ISRN KTH/FYS/--03:56--SE SE-100 44 Stockholm ISBN 91-7283-658-X SWEDEN Akademisk avhandling som med tillstånd av Kungl Tekniska högskolan framlägges till offentlig granskning för avläggande av teknologie doktorsexamen fredagen den 19 december 2003 kl. 10.00 i Kollegiesalen, Administrationsbyggnaden, Kungl Tekniska högskolan, Valhallavägen 79, Stockholm. °c Björn A. M. Hansson, november 2003 Tryck: Universitetsservice US AB iii Abstract This thesis describes the development and characterization of a liquid- xenon-jet laser-plasma source for extreme-ultraviolet (EUV) radiation. It is shown how this source may be suitable for production-scale EUV lithography (EUVL). EUVL is one of the main candidates to succeed deep-ultraviolet (DUV) lithography for large-scale manufacturing of integrated circuits (IC). However, a major obstacle towards the realization of EUVL is the current unavailability of a source meeting the tough requirements on especially power and clean- liness for operation in an EUVL stepper. The liquid-xenon-jet laser-plasma concept has key advantages that may make it suitable for EUVL since, e.g., its plasma consists only of the inert noble gas xenon and since the liquid- jet target technology enables plasma operation at large distances from the source-hardware thereby reducing sputtering and to allowing for high-power operation. At the beginning of the work described in this thesis, a spatial insta- bility of the liquid-xenon-jet made stable operation of a plasma at practical distances from the nozzle orifice difficult. -
RADIATION the Fundamentals of Electromagnetic Radiation Principles
RADIATION The Fundamentals of Electromagnetic Radiation Principles Contents 1. Physics of radiation. 2. Interaction of light with matter. 3. Rayleigh and Mie scattering. 4. Laws of radiation and their implication for radiative processes on earth and its environment. 5. UV radiation and Ozone depletion problem. Physics of Radiation 1. Transport of Radiant Energy (EMW): Electromagnetic radiation is a form of energy derived from oscillating magnetic and electrostatic fields and is capable of transmission through empty space where its velocity is equal to speed of light. 2. Radiation Environment: Almost all the energy for physical and biological processes at the earth’s surface comes from the sun and much of environmental physics is concerned with ways in which this energy is dispersed or stored in thermal, mechanical, or chemical form. Electromagnetic Radiation (i) Electromagnetic Radiation: consists of waves of electric and magnetic energy moving together through space. (ii) All electromagnetic radiation can be classified by frequency from the extremely low to extremely high frequencies. (iii) Extremely high frequency radiation such as Ultraviolet (UV) and X-rays is called “Ionizing Radiation” because it is powerful enough to effect changes in the atoms of matter it strikes, by breaking chemical bonds (ionization) , thus altering their chemical and biological nature. (iv) Electromagnetic radiation at those frequencies below the UV band are generally classified as “Non-Ionizing Radiation” because they typically lack the energy to effect -
Spectral Purification and Infrared Light Recycling in Extreme Ultraviolet Lithography Sources
Spectral purification and infrared light recycling in extreme ultraviolet lithography sources Muharrem Bayraktar,1,* Fred A. van Goor,1 Klaus J. Boller,1 and Fred Bijkerk1,2,3 1Laser Physics and Nonlinear Optics Group, MESA + Research Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands 2Industrial Focus Group XUV Optics, MESA + Research Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands 3Dutch Institute for Fundamental Energy Research, P.O. Box 1207, 3430 BE, Nieuwegein, The Netherlands *[email protected] Abstract: We present the design of a novel collector mirror for laser produced plasma (LPP) light sources to be used in extreme ultraviolet (EUV) lithography. The design prevents undesired infrared (IR) drive laser light, reflected from the plasma, from reaching the exit of the light source. This results in a strong purification of the EUV light, while the reflected IR light becomes refocused into the plasma for enhancing the IR-to-EUV conversion. The dual advantage of EUV purification and conversion enhancement is achieved by incorporating an IR Fresnel zone plate pattern into the EUV reflective multilayer coating of the collector mirror. Calculations using Fresnel-Kirchhoff’s diffraction theory for a typical collector design show that the IR light at the EUV exit is suppressed by four orders of magnitude. Simultaneously, 37% of the reflected IR light is refocused back the plasma. ©2014 Optical Society of America OCIS codes: (050.1970) Diffractive optics; (220.3740) Lithography; (230.7408) Wavelength filtering devices; (260.3060) Infrared; (340.7480) X-rays, soft x-rays, extreme ultraviolet (EUV); (350.5400) Plasmas. -
Ultra High Frequency Follow-On Satellite
OFFICE OF THE INSPECTOR GENERAL ULTRA HIGH FREQUENCY FOLLOW-ON SATELLITE Report Number 92-112 June 30, 1992 Department of Defense The following acronyms are used in this report. ASD(C3I) •••••..•Assistant Secretary of Defense (Command, Control, Communications and Intelligence) CAAS ••••••••...•••••••Contracted Advisory and Assistance Services CDR •.••••••••.••••••...••..••..••••..••....Critical Design Review DAB •••.••..••••••••..••.••••••••••••••.•Defense Acquisition Board DISA •••••••••••••..•.•..•.•••••Defense Information Systems Agency EHF •••••••••••••••.•.••......•..••.••••••Extremely High Frequency FAR .•••••••••••.•..••••.•••••••••••Federal Acquisition Regulation JCS •••••••••••••••.••••.••••..•..•••••.•••.•Joint Chiefs of Staff MILSTAR ••••.•...•••••.••.•••Military Strategic and Tactical Relay MOU ••••••••••...•.••••.•.••.•.••••••.•Memorandum of Understanding OMB ••••••••••..••••••••••.••••••••Office of Management and Budget UHF •...•.••••....•..•.••.•..•..•.•........•..Ultra-High Frequency INSPECTOR GENERAL DEPARTMENT OF DEFENSE 400 ARMY NAVY DRIVE ARLINGTON, VIRGINIA 22202-2884 June 30, 1992 MEMORANDUM FOR ASSISTANT SECRETARY OF DEFENSE (COMMAND, CONTROL, COMMUNICATIONS AND INTELLIGENCE) ASSISTANT SECRETARY OF THE NAVY (FINANCIAL MANAGEMENT) ASSISTANT SECRETARY OF THE AIR FORCE (FINANCIAL MANAGEMENT AND COMPTROLLER) DIRECTOR, JOINT STAFF SUBJECT: Audit Report on the Ultra-High Frequency Follow-on Satellite (Report No. 92-112) We are providing this final report for your information and use. Comments on a draft of this report -
Millimeter Wave Health Effects
5G Wireless Technology: Millimeter Wave Health Effects Electromagnetic Radiation Safety https://www.saferemr.com/2017/08/5g-wireless-technology-millimeter-wave.html Joel M. Moskowitz, Ph.D. School of Public Health University of California, Berkeley April 20, 2020 Links hereby incorporated by reference. January 21, 2020 Nov 14, 2018 (Updated Feb 22, 2019) The emergence of 5G, fifth-generation telecommunications technology, has been in the news lately because the wireless industry has been pushing controversial legislation at the state and federal level to expedite the deployment of this technology. The legislation would block the rights of local governments and their citizens to control the installation of cellular antennas in the public “right-of-way.” Cell antennas may be installed on public utility poles every 10-20 houses in urban areas. According to the industry, as many as 50,000 new cell sites will be required in California alone and at 800,000 or more new cell sites nationwide. Although many major cities and newspapers have opposed this legislation, the potential health risks from the proliferation of new cellular antenna sites have been ignored. These cell antennas will expose the population to new sources of radio frequency radiation including millimeter waves. 5G will employ low- (0.6 GHz - 3.7 GHz), mid- (3.7 – 24 GHz), and high-band frequencies (24 GHz and higher). In the U.S., the Federal Communications Commission (FCC) has allocated “low-band” spectrum at 0.6 GHz (e.g., 600 MHz), “mid-band” spectrum in the 3.5 GHz range, and 11 GHz of “high-band” frequencies including licensed spectrum from 27.5-28.35 GHz and 37-40 GHz, as well as unlicensed spectrum from 64-71 GHz which is open to all wireless equipment manufacturers.