Spice Cmos Level-2, Level-4, and Bsim-Plus Model Files
Total Page:16
File Type:pdf, Size:1020Kb
A SPICE CMOS LEVEL-2, LEVEL-4, AND BSIM-PLUS MODEL FILES Computer-aided design tools have become indispensable in the integrated circuit design. The SPICE (Simulation Program with Integrated Circuit Em phasis) program [1, 2] has been widely accepted for circuit analysis since its introduction a decade ago. Circuit simulation execution time has been substan tially reduced through algorithm improvement and hardware enhancements in the past few years. Device modeling plays an important role in VLSI circuit design because computer-aided circuit analysis results are only as accurate as the models used. The SPICE2G6.B and SPICE 3F.3 programs have provided six built-in MOS transistor models [3]-[10]. The LEVEL-1 model, which contains fairly simple expressions, is most suitable for preliminary analysis. The LEVEL-2 model, which contains expressions from detailed device physics, is widely used for the analysis of analog circuits. Its accuracy is quite limited when small-geometry transistors are used. The LEVEL-3 model represents an early attempt to pursue the semi-empirical modeling approach, which only approximates device physics and relies on the proper choice of the empirical parameters to accurately repro duce device characteristics. The LEVEL-4 model, which is also called BSIM (Berkeley Short-Channel IGFET Model), is ideal for the simulation of digital and analog circuits with effective channel lengths as small as 0.8 J.lm. The LEVEL-5 model, which supports more than 100 device parameters, requires special care to use and very elaborated parameter extraction. The LEVEL-6 model is based on the empirical nth power law and specially optimized for quick estimation of digital circuit behavior. In addition, the BSIM_plus model has been developed at University of Southern California. It is a greatly enhanced version over the original LEVEL-4 model. 513 514 ApPENDIX A The modeling equations for the LEVEL-2 model can be found in the books by P. Antognetti and G. Massobrio [11] and by D. Divekar [12]. A set of typical parameter values for the LEVEL-2 model is listed in Table A.I. These parameter values were extracted from a 2-J,Lm double-polysilicon p-well CMOS process. The test wafers were fabricated by Orbit Semiconductor Inc. through The MOSIS Service at USC/Information Sciences Institute. Table A.1 Typical parameter values for the LEVEL-2 model. parameters symbols n-channel p-channel unit vtho VTO 0.888 -0.738 V T01! TOX 3.9E-8 3.9E-8 m Xj XJ 2.0E-7 2.0E-7 m N6Ub NSUB 2.2E+16 5.8E+15 em-Oj ~f PHI 0.6 0.6 V ,\ LAMBDA 0.028 0.058 V-I J,Lo UO 585 273 em2 /V - S J,Lcrit UCRIT 121762 57420 V/em J,Le1!p UEXP 0.221 0.255 - 'Y GAMMA 0.952 0.518 V l / 2 Vma1! VMAX 72452 36876 m/s Ld LD 2.1E-7 2.4E-7 m Gj CJ 4.06E-4 2.05E-4 F/m2 Mj MJ 0.46 0.45 - Gj6W CJSW 4.17E-I0 2.34E-IO F/m Mj6w MJSW 0.35 0.32 - GGDO CGDO 2.69E-IO 3.0IE-10 F/m GGSO CGSO 2.69E-IO 3.0lE-10 F/m GGBO CGBO 2.00E-IO 2.00E-IO F/m The modeling equations for the LEVEL-4 model can be found in [4]-[6]. The format of the parameters is listed below. TRANSISTORS name L sens. factor W sens. factor units of basic parameter I VPB (VFB) VPBI (LVFB) VPBw (WVFB) V 2 <Ps (PHI) <PSI (LPHI) <Psw (WPHI) V SPICE CMOS LEVEL-2J LEVEL-4J and BSIM_plus Model Files515 3 Kl (Kl) KlI (LKl) K lw (WKl) vt 4 K2 (K2) K21 (LK2) K2w (WK2) 5 TJo (ETA) TJOI (LETA) TJow (WETA) 6 jJz (MUZ) dl (DL) dw (DW) cm2/V - s (jJm, jJm) 7 Uoz (UO) UOZI (LUO) Uozw (WUO) V-l 8 Ulz (Ul) UlZI (LUI) UlZw (WUl) jJmV- l 9 jJZB (X2MZ) jJZBI (LX2MZ) jJZBw (WX2MZ) cm2/V2 - s 10 TJB (X2E) TJBI (LX2E) TJBw (WX2E) V-l 11 TJD (X3E) TJDI (LX3E) TJDw (WX3E) V-l 12 UOB (X2UO) UOB/ (LX2UO) UOBw (WX2UO) V-2 13 UlB (X2Ul) UlBI (LX2Ul) UlBw (WX2Ul) jJmV-2 14 jJs (MUS) jJSI (LMS) jJSw (WMS) cm2/V2 - s 15 jJSB (X2MS) jJSBI (LX2MS) jJSBw (WX2MS) cm2/V2 - s 16 jJSD (X3MS) jJSDI (LX3MS) jJSDw (WX3MS) cm2/V2 - s 17 UlD (X3Ul) UlDl (LX3Ul) UlDw (WX3Ul) jJmV-2 18 Tor (TOX) Temp (TEMP) Vdd (VDD) jJm(OC,v) 19 CGDO CsubGSO CGBO P/m 20 XsubPART DUMI DUM2 21 No NOI Now 22 NB NB/ N Bw 23 ND NDI NDw INTERCONNECTS 1 R.h (RSH) Cj (CJ) Cjw (CJW) Ijs (IJS) Pj (PJ) 2 Pjw (PJW) M j (MJ) Mjw (MJW) Wdf (WDF) dl (DL) The names of the process parameters of transistors are listed below: VFB flat-band voltage rPs surface inversion potential K 1 body effect coefficient K2 drain/source depletion charge sharing coefficient TJo zero-bias drain-induced barrier lowering coefficient jJz zero-bias mobility Uoz zero-bias transverse-field mobility degradation coefficient Ulz zero-bias velocity saturation coefficient jJZB sensitivity of mobility to the substrate bias at Vd. = 0 TJB sensitivity of drain-induced barrier lowering effect to the substrate bias TJD sensitivity of drain-induced barrier lowering effect to the drain bias, at Vd.= Vdd 516 ApPENDIX A UOB sensitivity of transverse-field mobility degradation effect to the substrate bias U1B sensitivity of velocity saturation effect to the substrate bias J-Ls mobility at zero substrate bias and at Vd, = Vdd J-LSB sensitivity of mobility to the substrate bias at Vd, = Vdd J-LSD sensitivity of mobility to the drain bias at Vd, = Vdd UlD sensitivity of velocity saturation effect to the drain bias, at Vd,= Vdd Tox gate-oxide thickness Temp temperature at which the process parameters are measured Vdd measurement bias range No zero-bias subthreshold slope coefficient N B sensitivity of subthreshold slope to the substrate bias N D sensitivity of subthreshold slope to the drain bias CaDo gate-drain overlap capacitance per meter channel width Caso gate-source overlap capacitance per meter channel width CaBO gate-bulk overlap capacitance per meter channel length XPART gate-oxide capacitance model flag Note: XPART= 0, 0.5, and 1 selects the 40/60, 50/50, and 0/100 channel charge partitioning methods, respectively. The names of the process parameters of diffusion layers are listed below: sheet resistance/square R,h fJ/square zero-bias bulk junction bottom capacitance/unit area Cj F/m 2 zero-bias bulk junction sidewall capacitance/unit length Cjw F/m bulk junction saturation current/unit area lj. A/m2 bulk junction bottom potential Pj V bulk junction sidewall potential Pjw V bulk junction bottom grading coefficient M·J bulk junction sidewall grading coefficient Mjw default width of the layer Wdf m average reduction of size due to side etching or mask compensation m The names of the process parameters of poly and metal layers are listed as following: sheet resistance/square fJ/square capacitance/unit area F/m 2 edge capacitance/unit length F/m default width of the layer m SPICE CMOS LEVEL-2, LEVEL-4, and BSIM_plus Model Files517 average variation of size due to side etching or mask compensation m The following is an example of a parameter set from The MOSIS Service. The lines starting with "*,, are used as comments. NM1 PM1 DU1 DU2 ML1 ML2 *PROCESS=hp *RUN=n29z *WAFER=2 *Gate-oxide thickness= 176.0 angstroms *Geometries (W-drawn/L-drawn, units are f.lm/ f.lm) of transistors measured were: * 1.5/1.0,3.0/1.0,9.0/1.0,3.0/3.0, 3.0/9.0 *Bias range to perform the extraction (VDD) = 5 volts *DATE=02-11-93 *NMOS PARAMETERS -7.58998E-01, 2.14897E-02, 1.23152E-01 7.42201E-01, O.OOOOOE+OO, -2.83200E-24 8.90900E-01, -3.11958E-02, -3.54696E-01 7.88072E-02, 5.78136E-02, -1. 73583E-01 -2.99119E-03, 2.33191E-02, -1.70910E-02 5.54302E+02, 4.81357E-001, 4.75992E-001 1.01538E-01, 9.08377E-02, -9. 19324E-02 -9.93277E-03, 8.94698E-02, 8.29828E-03 8.86808E+00, -4.74779E+00, -4.92191E-01 -6.74775E-04, -4.16015E-03, 2.76833E-03 3.57104E-04, -1.45437E-03, 8.70530E-04 -2.91818E-04, -1. 71502E-03, -1. 70371E-03 2.87472E-04, 3.81244E-03, -5.70459E-03 5.96706E+02, 3.38649E+01, -1. 06304E+0 1 6.06875E-01, 8.52691E+00, -1.53784E+01 1.06405E+00, 7.52749E+00, -1.59711E+00 -1.46476E-04, 4.02165E-03, -2.18420E-03 1. 76000E-002, 2.70000E+01, 5.00000E+00 7.08322E-010, 7.08322E-010, 3.88315E-010 1.00000E+000, O.OOOOOE+OOO, O.OOOOOE+OOO 1.00000E+000, O.OOOOOE+OOO, O.OOOOOE+OOO 518 ApPENDIX A O.OOOOOE+OOO, O.OOOOOE+OOO, O.OOOOOE+OOO O.OOOOOE+OOO, O.OOOOOE+OOO, O.OOOOOE+OOO * Gate Oxide Thickness is 176 Angstroms *PMOS PARAMETERS -3.13668E-Ol, 7.71734E-02, -8.49659E-02 7.46549E-Ol, O.OOOOOE+OO, O.OOOOOE+OO 4.90935E-Ol, -1.06839E-Ol, 1.39901E-Ol -8.01381E-03, 4.93369E-03, 2.51322E-02 -1.17312E-02, 2.85411E-02, -1.52749E-03 1.78348E+02, 3.17007E-001, 4.86131E-001 1.57383E-Ol, 9.28071E-02, -9.12893E-02 -5.32992E-03, 4.19297E-02, 1.02423E-02 8.400 17E+00, -2.31231E+00, -3.92977E-Ol -1.