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Method of Manufacturing Josephson Junctions

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Method of Manufacturing Josephson Junctions Europaisches Patentamt 0 382 609 3> European Patent Office 3> Publication number: A3 Dffice europeen des brevets © EUROPEAN PATENT APPLICATION © Application number: 90400283.9 © Int. CI.5: H01 L 39/22, H01L 39/24 © Date of filing: 02.02.90 © Priority: 04.02.89 JP 24773/89 Applicant: Yamane, Hisanori 31.08.89 JP 225322/89 No. 201 Roju Aihara 10-27, Otamayashita, Aoba-ku © Date of publication of application: Sendai-shi Miyagi-ken(JP) 16.08.90 Bulletin 90/33 © Inventor: Kurosawa, Hideyuki, c/o Kabushiki © States: Designated Contracting Kaisha Riken CH DE PR GB LI Kumagaya Branch, 810, Kumagaya Saitama-ken(JP) ® Date of deferred publication of the search report: Kumagaya-shi, 26.09.90 Bulletin 90/39 Inventor: Hirai, Toshio 3-4-91, Takamori, Izumi-ku Sendai.shi, Miyagi-ken(JP) © Applicant: KABUSHIKI KAISHA RIKEN Inventor: Yamane, Hisanori, 201 Roju Aihara 13-5, Kudan-Kita 1-chome 10-27, Otamayashita, Aoba-ku Chiyoda-ku Tokyo(JP) Sendai-shi, Miyagi-ken(JP) Inventor: Yamashita, Tsutomu Research Development Applicant: ^ ^ Kaminozokimachi.ko Corporation of Japan Nagaoka-shi,„ , ...... Nngata-ken(JP) 5-2,B « Nagatacho* l. 2-chomeo t M 3 Chiyoda-ku Tokyo(JP) Jean-Pierre et al Applicant: Hirai, Toshio © Representative: Serin, 3-4-91, Takamori, Izumi-ku Cabinet PIERRE LOYER 77, rue Boissiere Sendai-shi Miyagi-ken(JP) F-75116 Paris(FR) © Method of manufacturing Josephson Junctions. FIG. 1 ' © A method of manufacturing Josephson junctions includes steps of high Tc superconductor thin films on a substrates by chemical vapor deposition using CO raw materials, which includes at least yttrium, barium ^and copper, serving as vapor generating sources, 05 and fabricating the high Tc superconductor thin films Ointo micro-bridges to produce Josephson junctions. CP (N 00 a. LU Xerox Copy Centre Patent Application IN umber European EUROPEAN SEARCH REPORT Office EP 90 40 0283 DOCUMENTS CONSIDERED TO BE RELEVANT Citation of document with indication, where appropriate, Relevant CLASSIFICATION Or 1HE Category of relevant passages to claim APPLICATION qnt. CI. 5) PATENT ABSTRACTS OF JAPAN vol. 13, no. 1,5 P,X , H 01 L 39/22 195 (E-754)[3543], 10th May 1989; & H 01 L 39/24 JP-A-115 988 (NIPPON TELEGRAPH & TELEPHONE) 19-01-1989 * Full page * APPLIED PHYSICS LETTERS, vol. 52, no. 1-6 20, 16th May 1988, pages 1743-1745, New York, US; A.D. BERRY et al . : "Formation of high Tc superconducting films by organometall ic chemical vapor deposition" * Page 1743, full page * JAPANESE JOURNAL OF APPLIED PHYSICS, 1-6 vol. 26, no. 12, December 1987, pages L1961-L1963, Tokyo, JP; H. TANABE et al.: "Grain boundery Josephson junctions using Y-Ba-Cu-0 films operative at 77 K" * Page L1961, paragraphs 3-5, figure 1 TECHNICAL FIELDS SEARCHED (Int. C1.5) JAPANESE JOURNAL OF APPLIED PHYSICS, 1-6 H 01 L 39 vol. 27, no. 6, June 1988, pages L1107-L1109, Tokyo, JP; T. YAMASHITA et al.: "Josephson effects at 77 K in grain boundary bridge made of thick films" * Page L1107, full page; page L1108, figures 4-5 * -/- The present search report has been drawn up for all claims Place of search Date of completion of the search J&xaminer THE HAGUE 17-07-1990 HAMMEL E.J. CATEGORY OF CITED DOCUMENTS T : theory or principle underlying the invention E : earlier patent document, but published on, or X : particularly relevant if taken alone after the filing date Y : particularly relevant if combined with another D : document cited in the application document of the same category L : document cited for other reasons A : technological background O : non-written disclosure & : member of the same patent family, corresponding P : intermediate document document Page 2 Patent Application Number J) European EUROPEAN SEARCH REPORT Office EP 90 40 0283 DOCUMENTS CONSIDERED TO BE RELEVANT Citation of document with indication, where appropriate, Relevant CLASSIFICATION OF THE Category of relevant passages to claim APPLICATION qnt. CI. 5) IEEE TRANSACTIONS ON MAGNETICS, vol. 1-6 25, no. 2, March 1989, pages 976-979, New York, US & APPLIED SUPERCONDUCTIVITY CONFERENCE, 21st-25th August 1988, San Francisco, US; R.H. 0NO et al.: "Switching noise in YBa2Cu30x "macrobridges" * Page 976, paragraph 6; page 977, paragraphs 1-4, figure 2 * P,X JAPANESE JOURNAL OF APPLIED PHYSICS, 1-6 vol. 28, no. 10, October 1989, pages L1816-L1819, Tokyo, JP; A. IRIE et al . : "YBCO DC SQUID of MOCVD thin film bridge" * Page L1816, paragraphs 1-2, figure 2 P,X JAPANESE JOURNAL OF APPLIED PHYSICS, 1-6 vol. 28, no. 9, September 1989, pages L1581-L1584, Tokyo, JP; S. NOGE et al . : TECHNICAL FIELDS SEARCHED C1.5) "Bridge type Josephson junctions in (Int. MO-CVD thin films" * Page L1581, paragraphs 3-4, figure 2 The present search report has been drawn up for all claims Place of search Date of completion of the search Examiner THE HAGUE 17-07-1990 HAMMEL E.J. CATEGORY OF CITED DOCUMENTS T : theory or principle underlying the invention E : earlier patent document, but published on, or X : particularly relevant if taken alone after the filing date Y : particularly relevant if combined with another D : document cited in the application document of the same category L : document cited for other reasons at A : technological background O O : non-written disclosure & : member of the same patent family, corresponding P : intermediate document document .
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