Michigan Technological University Digital Commons @ Michigan Tech Michigan Tech Patents Vice President for Research Office 3-20-2007 Magnetic annealing of ferromagnetic thin films using induction heating Paul L. Bergstrom Michigan Technological University,
[email protected] Melissa L. Trombley Michigan Technological University Follow this and additional works at: https://digitalcommons.mtu.edu/patents Part of the Engineering Commons Recommended Citation Bergstrom, Paul L. and Trombley, Melissa L., "Magnetic annealing of ferromagnetic thin films using induction heating" (2007). Michigan Tech Patents. 19. https://digitalcommons.mtu.edu/patents/19 Follow this and additional works at: https://digitalcommons.mtu.edu/patents Part of the Engineering Commons US007193193B2 (12) United States Patent (io) Patent No.: US 7,193,193 B2 Bergstrom et al. (45) Date of Patent: Mar. 20, 2007 (54) MAGNETIC ANNEALING OF 6,096,149 A 8/2000 Hetrick et al. FERROMAGNETIC THIN FILMS USING 6,217,672 B1 4/2001 Zhang INDUCTION HEATING 6,288,376 B1 9/2001 Tsumura 6,368,673 B1 4/2002 Seo (75) Inventors: Paul L. Bergstrom, Houghton, MI 6,455,815 B1 9/2002 Melgaard et al. 6,465,281 B1 10/2002 Xu et al. (US); Melissa L. Trombley, Chassell, 6,509,621 B2 1/2003 Nakao MI (US) 6,518,588 B1 2/2003 Parkin et al. 6,878,909 B2 * 4/2005 Bergstrom et al............. 219/635 (73) Assignee: Board of Control of Michigan 2001/0014268 Al 8/2001 Bryson, III et al. Technological University, Houghton, 2001/0021570 Al 9/2001 Cheng et al. MI (US) 2002/0183721 Al 12/2002 Santini, Jr.