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Wear Mechanisms in Microfabricated Ball Bearing Systems

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Wear Mechanisms in Microfabricated Ball Bearing Systems Wear 326-327 (2015) 1–9 Contents lists available at ScienceDirect Wear journal homepage: www.elsevier.com/locate/wear Wear mechanisms in microfabricated ball bearing systems Brendan Hanrahan a,b, Saswat Misra c, C. Mike Waits d, Reza Ghodssi c,n a Formerly Materials Science and Engineering Department, University of Maryland, College Park, MD 20704, USA b Currently Oak Ridge Associated Universities Fellowship Program, U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783, USA c Electrical and Computer Engineering Department, Institute for Systems Research, University of Maryland, 2173 A.V. Williams Building, College Park, MD 20704, USA d U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783, USA article info abstract Article history: Microfabricated ball bearings have been demonstrated successfully in a number of microsystems, Received 3 September 2014 although a complete understanding of their tribological properties remains elusive. This paper Received in revised form investigates the wear mechanisms for a microfabricated ball bearing platform that includes silicon 20 December 2014 and thin-film coated silicon raceway/steel ball materials systems. Adhesion of ball material, found to be Accepted 22 December 2014 the primary wear mechanism, is universally present in all tested materials systems. Volumetric adhesive Available online 31 December 2014 wear rates are observed between 4 Â 10 À4 and 4 Â 10 À5 mm3/mN Á rev. Pressured-induced phase changes Keywords: take place in the contact areas of the bare silicon raceways, observed with Raman spectroscopy. An Rolling friction understanding of the wear mechanisms within microfabricated ball bearings will help optimize Micro-abrasion operational parameters and materials systems for long-term reliability. Galling & 2015 Elsevier B.V. All rights reserved. Bearings Surface analysis 1. Introduction surface-to-volume ratio obtained from scaling features to shorter length scales, enhancing the influence adhesion; and (2) the specific Rolling bearings are universally employed in macroscale machin- materials systems used in integrated circuit microfabrication techni- ery to provide a low friction and wear contact for fast moving, loaded ques, which are often times non-ideal for mechanical/tribological components. Recently, rolling bearing technology has been extended applications. Wear studies within the MEMS domain are typically to the realm of micro-electromechanical systems (MEMS) in the split into two experimental categories[13]: in situ testing [11,14,15],in demonstration of high-performance linear and rotary micromachines. which wear is qualitatively described by observation or characterized The microscale rolling bearings differ from macro bearings in both byanumberofcyclesordevicelifetime[10]; and tribometer-based materials systems due to the use of silicon-based microfabrication studies [16–18], where contact is initiated in a pin-on-disc methodol- technology versus steel machining and size scales with feature sizes ogy using MEMS materials of interest. A classic example of in situ wear on the order of 100s of micrometers versus centimeters to meters. testing of micromachined silicon structures was performed by Meh- The understanding of wear mechanisms specific to rolling bearing regany et al., where the authors fabricated a side-drive polysilicon microsystems materials and geometries will ultimately enable the wobble motor [19]. Motor rotational speed is a function of the gap long-term use of high-performance micromachinery. between rotor and stator, which changes gradually with the wear of Microfabricated ball bearing systems provide long travel, mini- the contact bearing. The authors determined that there were three mal friction and wear, and good mechanical stability. Linear and primary regimes of operation for such a device: the burn-in period, rotary micromachines are attractive for power, sensing, and where large asperities on the bearing from the reactive ion etching are actuation applications, such as micropumps [1], microgenerators smoothed; the break-in period, where the speed of the motor [2], and micromotors [3–5]. Friction within the microball bearings gradually increases from smoothing of the surface roughness; and has been modeled in [6] and experimentally explored in [7–12]. the rotor slip region, where the rotor speed departs from the exciting The wear mechanisms present in microfabricated systems differ voltage due to slip. Tambe et al. published a study that highlighted the significantly from macroscale counterparts, and therefore, need to be scale and material dependence of tribological phenomena using a specifically addressed. This difference is due to (1) the increased micro-tribometer for the microscale portion and a modified atomic force microscope (AFM) for the nanoscale study [20]. In this study, the adhesive force between contacting materials showed a strong depen- n Corresponding author. Tel.: þ1 301 405 8158. dence on residence time, humidity, and temperature, which can be E-mail address: [email protected] (R. Ghodssi). related to water vapor-derived meniscus forces developed between http://dx.doi.org/10.1016/j.wear.2014.12.032 0043-1648/& 2015 Elsevier B.V. All rights reserved. 2 B. Hanrahan et al. / Wear 326-327 (2015) 1–9 the contact point and substrate. Additionally, a velocity dependence on of publications [11,25]. A schematic of the microtribology device friction force was discovered for multiple material systems, further (MTD) with 100 285-mm-diameter 440C stainless steel balls is shown strengthening the argument that tribological phenomena are strongly in Fig. 1. scaledependent.Kuetal.bridgedthegapbetweenin situ testing and a The MTD was selected because it can perform normal-load- tribometer by fabricating silicon thrust contact bearing geometries to resolved friction testing, and has a high fabrication yield and act as the pin of the pin-on-disc methodology [21]. The authors found consistent surface quality within the races. As shown in [3], the asignificant dependence on surface state of the measured coefficient encapsulated bearings can be integrated into integrated circuit of friction and wear rates. This result was deduced from a comparison fabrication flows to create future motors, generators, and sensors. of samples tested immediately after oxygen plasma cleaning and Packaging of the MTD allows for independent turbine and thrust samples left out in “room air” for a period of 15 h. A majority of these flow while simultaneously measuring the speed via an optical studies are focused on sliding regime wear mechanisms on micro-to- displacement sensor (ODS) on etched equiradial tracking marks, nano length scales, with little focus on the unique realm of microscale the turbine input pressure and flow rate, and the thrust plenum rolling contact. pressure. The thrust plenum, created by an o-ring sealed cavity Thin-film coatings are capable of greatly affecting the tribologi- between the device and packaging, allows for variable normal loads cal properties of a system owing to the fact that friction and wear to be acted on the rotor independent of speed. phenomena generally initiate at the surface or near-surface of The MTD rotor is fabricated using two silicon wafers containing a contacting bodies. Two regimes exist for the use of solid thin films shallow and deep-etched race half to achieve an offset bearing-bond in a tribological system: those that act as lubrication and wear in a interface, with a third wafer comprising the air manifold layer manner that reduces friction, e.g.,graphite[22] or molybdenum (Fig. 1). The offset bond interface is used to prevent ball contact on disulfide [23]; and those that remain intact and reduce the chemical the corners of the bonded wafers. To obtain offset interfaces and affinity for the contacting surfaces or enhance the mechanical alignment pits simultaneously, an asymmetrical etching scheme is properties of the surfaces. Solid film lubricants are typically used employed, described thoroughly in [26]. The dimensions of a in situations where it is difficult to maintain a fluid film boundary completed bearing are presented in Fig. 2. layer, such as high load or high speed operation. Hard thin films are The bearing surfaces have been characterized to assure consis- used in applications where debris generation is not tolerable. In the tency among the tested devices. The roughness of the raceway is RMS current demonstration of microball bearings, hard film coatings are 5 nm. There is a slight radius to the bottom of the raceway, a typical employed to alter the surface mechanical and chemical properties in product of the etch process. For first approximations of contact an attempt to enhance the tribology of the overall system. Silicon mechanics, the raceway is assumed to be flat. The sidewall roughness carbide (SiC) thin-film coatings were shown to improve the per- is a function of the ratio of etching to deposition time in the deep formance of a microfabricated ball bearing by reducing the coefficient reactive-ion etching (DRIE) process, found to be 160-nm scallops. of friction (COF) from 0.002 to 0.0006 over bare silicon raceways [8]. Ideally, the balls will not contact the sidewall because the frictional At high loads (10–500 mN), fracture was observed for similar SiC force will keep them in place. Realistically, the balls are not all under coated raceways, while ultrananocrystalline diamond (UNCD) films equal load due to waviness in the raceway from the etch process; exhibited virtually no wear
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