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Center for Micro- and Nanotechnologies Annual Report 2003

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Center for Micro- and Nanotechnologies Annual Report 2003 ZMN, Center for Micro- and Nanotechnologies Annual Report 2003 Halle Leipzig Braunschweig Magdeburg Berlin B4 B87 A9 Kassel Erfurt Frankfurt Weimar B88 A4 Gotha Jena Eisenach A71 A4 Chemnitz B88 A4 Dresden Arnstadt B88 Gera A71 B88 B4 B87 Rudolstadt B88 Suhl Ilmenau Saalfeld Center for Micro- and A9 Fulda B4 Meiningen Nanotechnologies A73 A71 B4 Hof Coburg Schweinfurt Nürnberg Würzburg Bamberg München ZMN, Center for Micro- and Nanotechnologies Technical University Gustav-Kirchhoff-Str. 7 98693 Ilmenau, Germany of Ilmenau fon: +49-(0)3699-69-3400 fax: +49-(0)3699-69-3499 email: [email protected] URL : http://www.zmn.tu-ilmenau.de Director: Prof. Oliver Ambacher Contact: Dr. Herwig Döllefeld Adresses ZMN Center for Micro- and Nanotechnologies Gustav-Kirchhoff-Str. 7 98693 Ilmenau Germany fon: +49-(0)3677-69-3401 fax: +49-(0)3677-69-3499 e-mail: [email protected] URL: http://www.zmn.tu-ilmenau.de Oliver Ambacher: [email protected] fon: +49-(0)3677-69-3723 Front page (from left to right): Theodor Doll: LTCC chip for microwave applications in [email protected] satellite communications fon: +49-(0)3628-990-100 Technical solution for an artificial Phloem Gerd Jäger: cell [email protected] fon: +49-(0)3677-69-2822 SiC/Si nozzles formed by ECR etching for MEMS applications Heinrich Kern: [email protected] Surface analytic module fon: +49-(0)3677-69-2533 WC/C multilayer structure for tribological Christian Knedlik: coatings [email protected] fon: +49-(0)3677-69-3611 Schematic layer structure of a SiC transistor for GHz applications Jürgen A. Schäfer: [email protected] fon: +49-(0)3677-69-3609 Heiko Thust: Editorial Board: [email protected] fon: +49-(0)3677-69-2605 Editor: Principal of the TU Ilmenau, Gert Winkler: Prof. Dr. rer. nat. habil. Peter Scharff [email protected] fon: +49-(0)3677-69-2606 Editorial office: ZMN, Dr. Herwig Döllefeld Helmut Wurmus: [email protected] Layout/press: fon: +49-(0)3677-69-2487 Klapproth and Koch, Weimar Funding: µ-Comp e. V. PREFACE 1 Preface The entire staff at the Center for Micro- and Nanotechnologies (ZMN) is dedicated to pursuing education, research, and innovation in micro- and nanotechnology. The research is focused on the development of smart materials, the patterning of novel micro- and nanostructures, the design and realization of devices, and the development of systems demonstrating possible applications for future industrial technologies. In 2003, important goals were reached which The evaluation procedure required before the contributed to the further improvement of Technical University (TU) was allowed to join the the infrastructure of the Center for Micro- and German Research Foundation (DFG) was located at Nanotechnologies (ZMN). This progress has increased the ZMN which obviously was one of the important the number of scientists that can benefit from the reasons for its success. This event was one of many outstanding technological and analytical equipment in which the ZMN and its members were able to within the ZMN and has allowed the number of improve the reputation of the Technical University projects running simultaneously in the ZMN clean of Ilmenau. In spring 2003, referees of the DFG rooms to grow in number. The key to the center’s approved additional funding for investments success is the interdisciplinary cooperation of which will include an e-beam lithography system several chairs belonging to three different faculties. and a complex system for producing hetero- and Based on interdisciplinary cooperation between nanostructures based on metal oxides and metal scientists with expertise covering the key fields of nitrides. Furthermore, since the inauguration of the design, materials, technology, devises, and systems, ZMN in March 2002, the scientific teams in the ZMN the primary mission of the ZMN is to provide an have raised more that 10 M € which are distributed intellectual and working environment that enables over about 30 projects. education through teaching and research in areas One of the outstanding projects funded by the that require or may benefit from advanced silicon Thuringian Ministry is focused on the creation and based microsystems, wide bandgap semiconductor analysis of nano- and picoliter droplets of water nanostructures, ceramics for microperipherics, based liquids. The goal of this project, which involves polymer heterostructures for electronic devices, all partners in the ZMN, is to build a system which novel positioning systems, or advanced tools for allows the identification of organic substances by a structural and surface analytics. combination of transparent electronic sensors for biotechnological and medical applications. It is my pleasure to summarize some additional and exemplary highlights of 2003: Feburary Evaluation by the DFG resulting in additional funding. March Dipl.-Ing. Michael Fischer joins the ZMN staff. March First anniversary of ZMN. April Funding by the BMBF to map out a strategy for a Center of Innovation competence. April Kirsti Schneider becomes a permanent member of the ZMN staff in order to organize the financial aspects of a fast increasing number of projects. June First plenary ZMN meeting with invited speaker. September Workshop „MacroNano“. October Representatives of the VDI/VDE-IT „microtechniques“ visit the ZMN. This is the first step towards organizing a conference related to microsystems in 2004. November Submission of a completed concept for a Center of Innovation competence funded by the BMBF. December PD Dr. Frank Schwierz successfully finalizes his habilitation. www.zmn.tu-ilmenau.de 2 PREFACE The 2003 Annual Report of the Center for Micro- and Nanotechnologies provides a much more detailed overview of the facilities, staff, faculties, and students associated with the ZMN, as well as a description of many of the ongoing research projects which make use of the ZMN facilities. These developments, which are based on close links with industry and cooperation with German, as well as international institutes, contribute to the advanced education for our students. I would like to take this opportunity to thank all my colleagues, the scientific fellows, and technicians for all their dedicated work. We kindly acknowledge the support of the Federal Ministry of Research, the German Science Foundation, the Thuringian Ministry of Science, and the European Commission. I look forward to participating in the promising development of innovative micro- and nanostructures, new devices, and concepts through the use of semiconductor technology. Sincerely, Oliver Ambacher www.zmn.tu-ilmenau.de CONTENTS 3 Contents Scientific Activities - Titles 4 Development of the ZMN 5 Research Departments and Staff of the ZMN 7 Materials Science 8 Technology 10 Design 14 Devices 15 Modules 16 Systems 18 Analytics 18 Infrastructure and Equipment 20 Finances 25 Scientific Activities Materials Science 26 Technology 38 Design 54 Devices 56 Modules 68 Systems 74 Analytics 78 Publications and Conference Contributions 92 Materials Science 92 Technology 93 Design 95 Devices 95 Modules 96 Systems 97 Analytics 98 Theses 100 Invited Talks and Colloquia 101 Scientific Projects 102 www.zmn.tu-ilmenau.de 4 SCIENTIFIC ACTIVITIES - TITLES Design development, technology optimization, and Scientific Activities - Titles electrical characterization of silicon carbide MESFETs Materials Science The preparation of novel group III-nitride based Nanoscale multilayer WC/C coatings developed for micro- and nanomechanical devices nanopositioning Submicrometer organic field-effect transistor Bias-magnetron sputtering of tungsten carbide coatings on steel Electron mobility models for GaN and AlGaN/GaN Thin film materials and structures for microsensors Modules Advanced LTCC processes using Pressure Assisted Low-emitting ceramic layers Sintering Preparation and investigations of nickel zinc ferrite Ultrasonic and x-ray inspection of multilayer PBC layers on copper foils for the processing of printed and LTCC hybrid circuits - comparison and advan- circuit boards tages of both methods Preparation of hexagonal WSi and tungsten silicide 2 KERAMIS: 20 GHz LTCC applications for satellite metallization with adjustable thermal coefficients communications - Challenges for design and tech- of the electrical resestivity nology Technology Systems Functional liquid-crystalline elastomers in micro- Experimental set-up and investigations for an in- systems tegrated measuring station for the examination of biological material in the nano- and picovolume ECR-etching of 3C-SiC for MEMS range Education network for the maintenance of Investigation of the metrological characteristics of qualified employees in microsystems technology in the nanopositioning and nanomeasuring machine Thuringia with an integrated focus sensor Characterization of vertical regions of microstruc- Analytics tures based on monochromatic speckle-techniques Characterization of SiC/Si heterostructures and GaN films on sapphire by infrared spectroscopic ellipso- Modification of GaN and AlGaN surfaces for nano- metry and picofluidic sensors Structural investigations of cubic InN Modelling and alignment of SiC quantum dots Determination of dopands and polytypes of SiC by Forisomes in MEMS Auger Electron Spectroscopy A new type of heterostructures for SiC technology: Organic field effect transistors: the molecule-metal 3C-(Si C )Ge /4H-SiC 1-x 1-y x+y interface Design Defect related absorption and emission of AlGaN New materials and technologies for printed circuit based UV
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