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Materials of Low Secondary Electron Emission to Prevent the Multipactor Effect in High-Power RF Devices in Space

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Materials of Low Secondary Electron Emission to Prevent the Multipactor Effect in High-Power RF Devices in Space 6th Spacecraft Charging Technology Conference, AFRL-VS-TR-20001578, 1 September 2000 Materials of Low Secondary Electron Emission to Prevent the Multipactor Effect in High-Power RF Devices in Space N.Díaz, S.Castañeda, J.M.Ripalda, I.Montero*, L.Galán, S. Feltham**, D.Raboso** and F.Rueda Departamento de Física Aplicada, Universidad Autónoma de Madrid, 28049-Madrid (Spain) * Instituto de Ciencia de Materiales de Madrid, CSIC, 28049-Madrid (Spain) ** ESTEC. ESA, Noordwijk (The Netherlands) Abstract Deposition methods of promising low secondary electron emission coatings such a TiNx, CrNx and CNx have been studied using ion assisted electron gun evaporation in nitrogen atmosphere. Surface composition, by XPS, crystalline structure, by XRD, and morphology by SEM have been studied. Secondary electron emission coefficient has been correlated with multipactor threshold power. For each material its distinguishing physical properties and its prospect for antimultipactor coating implementation as a function of the composition of the films is obtained. TiNx and CNx, both obtained in crystalline phase, appear as excellent coatings to prevent multipactor. Introduction an electron bombardment evaporator The multipactor effect sets one of and a 3 cm diameter ion gun the main limits to the working power (Commonwealth Scientific). of RF devices in space. The Aluminium alloy blocks were used as multipactor discharge is an electron the substrates of the coatings to be avalanche in vacuum in resonance multipactor tested at ESTEC. Ion with the RF field and sustained by assistance consists of the Ar+ ion the secondary electron emission bombardment with energy in the (SEE) from the surfaces exposed. range of 100-200 eV and 0.2 This electron avalanche phenomenon mA/cm2 ionic current, in a radius of appears for a determined power, about 5 cm, while the coating is frequency and electrode or wall being deposited distance and may destroy a RF X-Ray Photoelectron Spectroscopy equipment working in vacuum. (XPS), Scanning Electron Microscopy The main objective of this work has (SEM) and X-Ray Diffraction (XRD) been to prepare and characterize have been used to analyze the coatings that delay the appearance of composition, morphology and multipactor discharge, i.e. increase structure of the coatings. Total SEE the multipactor threshold power, yield (σ) was measured varying the relating the SEE properties of the primary electron beam energy (Ep) coatings with the multipactor test from 20 to 2000 eV, while the results. For this purpose we have sample current to ground was selected titanium nitride, chromium recorded. The sample was biased at - nitride and carbon nitride coatings as 30 eV, to repel secondaries. We the best coatings to prevent obtain the total secondary electron multipactor. emission coefficient from the relation: σ = 1 – (sample current / primary Experimental current). The primary current of the A “Varian” system with a glass bell electron gun was obtained by a jar was dedicated to the deposition of relative calibration method, using the the coatings. It has an ultimate total secondary electron emission -8 1 vacuum of 1×10 torr and includes yield of platinum . σ(Ep) is 205 6th Spacecraft Charging Technology Conference, AFRL-VS-TR-20001578, 1 September 2000 characterised by the parameters: E1, even after long air exposure. In Table the first primary electron energy at 1 we compare the SEE parameters of which σ = 1, σm, the maximum yield, titanium nitride coatings that have Em, the primary electron energy at the been exposed to air for a similar time, maximum yield and E2, the second but prepared with and without ion primary electron energy at which gun assistance. The XPS quantitative σ = 1. analysis is also shown. Apart from Multipactor threshold power was the higher nitrogen incorporation to determined at ESTEC. The following the surface of the coatings that is parameters were used in the tests: shown by XPS, from XRD and SEM frecuency=5.3Ghz, pulse analysis can be observed the width=25µs, temperature: different structure and morphology ambient,P∼10-6mb. that is produced in each case. Thus, the XRD patterns in 2θ = 20º-80º of Results and Discussion the assisted coatings, present 1.- Titanium nitride coatings reflections from (111) and (200) Titanium nitride thin films have been planes that are identified with TiN of used with success as anti-multipactor cubic structure (Osbornite). This coatings in RF devices 2, 3, 4, due to phase is not distinguished in the case their low SEE coefficient (σ) in of the un-assisted coatings, vacuum conditions. However air appearing only crystalline phases of exposure produces a so important metallic and oxide titanium. The SEM increase of σ that these coatings can micrographs, show that the assisted become unusable for anti-multipactor coatings have a flatter surface. applications. A treatment that hinders This improvement of the secondary this process after air exposure is electron emission properties with the needed. We have found that the argon assistance is correlated with a argon ion assistance during spectacular increase of the deposition produces titanium nitride multipactor threshold power from 4.2 coatings with lower SEE coefficient kW to 14 kW. Table 1 Comparison of σm and E1 values and XPS quantitative analysis for titanium nitride samples deposited with and without argon ion assistance. Ion assistance SEE Surface composition Air exposure (days) parameters σm E1 (eV) O N C Ti YES 1.17 147 1.48 1.17 0.17 1.00 7 NO 1.58 53 1.40 0.81 0.76 1.00 4 2.- Chromium nitride coatings exposure have low SEE 2. Thus, the As far as we know, the SEE high increase of the nitrogen content characteristics of chromium nitride that happen when the films are have not been reported in the deposited with argon ion assistance, literature. The SEE yield of the does not lead to an improvement of chromium nitride coatings appears as the SEE characteristics (see Table 2). the most stable after air exposure in As in the case of titanium nitride spite of the σ value of these coatings coatings, the assistance produces the in vacuum is not as low as the one of appearance of a new crystalline phase the other coatings presented in this associated with the nitride (hexagonal work. We have observed that the β-Cr2N structure). Cr2O3 layers that grow upon air 206 6th Spacecraft Charging Technology Conference, AFRL-VS-TR-20001578, 1 September 2000 Multipactor results are consistent with highest multipactor threshold (9.5 kW) the SEE results since the coating than the un-assisted ones (5.75 kW deposited with ion assistance showed and 6.2 kW). Table 2 Comparison of SEE parameters and surface composition of chromium nitride coatings obtained without and with Ar+ assistance. Ion assistance SEE parameters Surface composition Air exposure (days) σm E1 (eV) O N C Cr YES 1.78 41 0.54 1.22 0.46 1.00 3 NO 1.71 63 1.23 0.19 0.56 1.00 3 3.- Carbon and carbon nitride the hexagonal and chaoite structures coatings of carbon. Graphite and sp2 hybridized The carbon and carbon nitride amorphous carbon coatings present coatings tested at ESTEC discharged one of the lowest σ found in the at 7 kW. The “as-grown” non- literature5, 6. As far as we know, the contaminated CN surface has a value SEE characteristics of carbon nitride of σm lower than unity and therefore, have not been reported in the no multipactor would be produced at literature. We prepared carbon and any RF intensity. In multipactor tests, carbon nitride coatings by with appropriate conditioning, these evaporation of graphite in a nitrogen low σm values are expected to be atmosphere with occasional argon ion recovered, and consequently the assistance during deposition. The multipactor effect to be suppressed. SEE characteristics and the surface CN coating should be retained as a compositional analysis of the films qualified candidate to mitigate are presented in Table 3. The XRD multipactor. patterns present peaks in the 2θ=10º-80º, which correspond to Table 3 Carbon and carbon nitride coatings deposited evaporating graphite in a nitrogen atmosphere with occasional Ar+ assistance during deposition. SEE Surface composition Ion assistance Substrate parameters Air exposure (days) σm E1 O N C Ar (eV) (%) (%) (%) (%) YES Al 1.30 64 3.7 22.0 73.2 1.1 4 YES Mo/Al 1.42 52 4.5 16.2 78.2 1.1 8 NO Mo/Al 1.23 91 4.4 - 95.6 - 2 Multipactor Test Results alloys used in the aerospace industry In Fig. 1 we present the multipactor to prevent multipactor). For the threshold power obtained for the multipactor threshold power of different titanium nitride, chromium “Alodine” we have used an average nitride, carbon and carbon nitride value from ESTEC data7. Fig. 2 coatings tested at ESTEC compare to shows a reasonable correlation that of “Alodine” (the passivating between E1 and the multipactor coating for Al-Cu-Mg-Mn aluminum threshold power. The scatter can be 207 6th Spacecraft Charging Technology Conference, AFRL-VS-TR-20001578, 1 September 2000 due to the time elapsed between the • A high correlation has been found SEE measurements and the between the values of σ and the multipactor test. multipactor threshold power. The scatter in the results is explained by the time elapsed between the SEE measurements and the multipactor test. 16 • The multipactor tests, performed TiN* at ESTEC, showed higher 14 multipactor threshold for some of 12 the coatings presented in this CrN 10 work than for the “Alodine”. The 8 Alodine CN* C CN* best titanium nitride discharged at CrN* CrN* 14.2 kW, the best chromium 6 TiN nitride discharged at 9.5 kW and 4 (*) argon ion assistance during deposition for the carbon nitride coatings the Multipactor Threshold Power (KW) Multipactor 2 multipactor threshold was around Samples 7 kW.
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