MOCVD, CVD & ALD Precursors
Total Page:16
File Type:pdf, Size:1020Kb
Load more
Recommended publications
-
TR-499: Indium Phosphide (CASRN 22398-80-7) in F344/N Rats And
NTP TECHNICAL REPORT ON THE TOXICOLOGY AND CARCINOGENESIS STUDIES OF INDIUM PHOSPHIDE (CAS NO. 22398-80-7) IN F344/N RATS AND B6C3F1 MICE (INHALATION STUDIES) NATIONAL TOXICOLOGY PROGRAM P.O. Box 12233 Research Triangle Park, NC 27709 July 2001 NTP TR 499 NIH Publication No. 01-4433 U.S. DEPARTMENT OF HEALTH AND HUMAN SERVICES Public Health Service National Institutes of Health FOREWORD The National Toxicology Program (NTP) is made up of four charter agencies of the U.S. Department of Health and Human Services (DHHS): the National Cancer Institute (NCI), National Institutes of Health; the National Institute of Environmental Health Sciences (NIEHS), National Institutes of Health; the National Center for Toxicological Research (NCTR), Food and Drug Administration; and the National Institute for Occupational Safety and Health (NIOSH), Centers for Disease Control and Prevention. In July 1981, the Carcinogenesis Bioassay Testing Program, NCI, was transferred to the NIEHS. The NTP coordinates the relevant programs, staff, and resources from these Public Health Service agencies relating to basic and applied research and to biological assay development and validation. The NTP develops, evaluates, and disseminates scientific information about potentially toxic and hazardous chemicals. This knowledge is used for protecting the health of the American people and for the primary prevention of disease. The studies described in this Technical Report were performed under the direction of the NIEHS and were conducted in compliance with NTP laboratory health and safety requirements and must meet or exceed all applicable federal, state, and local health and safety regulations. Animal care and use were in accordance with the Public Health Service Policy on Humane Care and Use of Animals. -
Effect of Nitrogen Pressure on the Structure of Cr-N, Ta-N, Mo-N, and WN Nanocrystals Synthesized by Arc Discharge
Hindawi Publishing Corporation Journal of Nanomaterials Volume 2011, Article ID 781935, 5 pages doi:10.1155/2011/781935 Research Article Effect of Nitrogen Pressure on the Structure of Cr-N, Ta-N, Mo-N, and W-N Nanocrystals Synthesized by Arc Discharge Longhai Shen and Nan Wang School of Science, Shenyang Ligong University, Shenyang 110159, China Correspondence should be addressed to Longhai Shen, [email protected] Received 28 March 2011; Revised 10 June 2011; Accepted 5 July 2011 Academic Editor: Theodorian Borca-Tasciuc Copyright © 2011 L. Shen and N. Wang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. The effect of nitrogen pressure on the structure of Ta-N, Cr-N, Mo-N, and W-N nanocrystals formed in arc discharge process was investigated. At the nitrogen pressure of 5 ∼ 20 kPa, the pure cubic-phase TaN and CrN nanocrystals were formed, whereas pure cubic phase of Mo2N and W2N cannot be obtained. A little of metal Mo and a mass of metal W were mixed with the products of Mo2N and W2N, respectively. At the nitrogen pressure of 30 ∼ 50 kPa, subnitride Ta2NandCr2N and metal Cr were gradually formed in the product; furthermore, the proportion of metal Mo and W increased in the product of Mo2N and W2N, respectively. It indicated that the low nitrogen pressure makes cubic mononitride formation favorable. We explain this experimental observation in terms of the evaporation rate of anode metal and the ionization of nitrogen. -
© Copyright 2013 Jennifer L. Steele
© Copyright 2013 Jennifer L. Steele DIVALENT TRANSITION METAL CENTERS: THE SYNTHESIS OF NEW CHEMICAL VAPOR DEPOSITION PRECURSORS AND STUDIES OF ETHYLENE POLYMERIZATION AND OLIGOMERIZATION CATALYSTS BY JENNIFER L. STEELE DISSERTATION Submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Chemistry in the Graduate College of the University of Illinois at Urbana-Champaign, 2013 Urbana, Illinois Doctoral Committee: Professor Gregory S. Girolami, Chair Assistant Professor Alison R. Fout Professor John A. Katzenellenbogen Professor Thomas B. Rauchfuss Abstract Volatile transition metal complexes that contain boron hydride ligands are desirable for their potential as precursors for metal diboride films for microelectronics applications. Recently our group has discovered a new class of potential precursors in the metal complexes of the chelating borohydride, N,N-dimethylaminodiboranate (DMADB). To date, attempts to synthesize homoleptic complexes of the late transition metals have afforded intractable mixtures, likely the result of overreduction of the metal center. This work has focused on the synthesis and characterization of heteroleptic complexes of the late transition metals that contain both DMADB and 1,2,3,4,5,-pentamethylcyclopentadienyl ligands. The reaction of metal complexes of the form [Cp*MX]n, where Cp* is 1,2,3,4,5,- pentamethylcyclopentadienyl, M = Cr, Fe, Co, or Ru, and X = Cl or I with sodium dimethylaminodiboranate (NaDMADB) in diethyl ether affords the divalent complexes [Cp*M(DMADB)]. Additionally, the analogous vanadium compound [Cp*V(DMADB)] can be synthesized from the reduction of [Cp*VCl2]3 with NaDMADB in diethyl ether. All of these compounds are volatile under static vacuum at room temperature, but are also thermally sensitive; the iron and ruthenium derivatives decompose at room temperature over a day. -
The Atmospheric Chemical Vapour Deposition of Coatings on Glass
The Atmospheric Chemical Vapour Deposition Of Coatings On Glass. by Kevin David Sanderson, B.Sc. A thesis submitted to Imperial College of Science Technology and Medicine for the degree of Doctor of Philosophy January, 1996 The copyright of this thesis rests with the author and no quotation from it or information derived from it may be published without the prior written consent of the author. Some of the material presented in this thesis is of a confidential nature. It is therefore requested that anyone reading this thesis maintains this confidentiality until the thesis becomes publicly available. Abstract: The deposition of thin films of indium oxide, tin doped indium oxide (ITO) and titanium nitride for solar control applications have been investigated by Atmospheric Chemical Vapour Deposition (APCVD). Experimental details of the deposition system and the techniques used to characterise the films are presented. Results from investigations into the deposition parameters, the film microstructure and film material properties are discussed. A range of precursors were investigated for the deposition of indium oxide. The effect of pre-mixing the vaporised precursor with an oxidant source and the deposition temperature has been studied. Polycrystalline In203 films with a resistivity of 1.1 - 3 x 10-3 ) cm were obtained with In(thd)3 , oxygen and nitrogen. The growth of ITO films from In(thd)3, oxygen and a range of tin dopants is also presented. The effect of the dopant precursor, the doping concentration, deposition temperature and the effect of additives on film growth and microstructure is discussed. Control over the preferred orientation growth of ITO has been achieved by the addition of acetate species during film growth. -
540.14Pri.Pdf
Index Element names, parent hydride names and systematic names derived using any of the nomenclature systems described in this book are, with very few exceptions, not included explicitly in this index. If a name or term is referred to in several places in the book, the most informative references appear in bold type, and some of the less informative places are not cited in the index. Endings and suffixes are represented using a hyphen in the usual fashion, e.g. -01, and are indexed at the place where they would appear ignoring the hyphen. Names of compounds or groups not included in the index may be found in Tables P7 (p. 205), P9 (p. 232) and PIO (p. 234). ~, 3,87 acac, 93 *, 95 -acene, 66 \ +, 7,106 acetals, 160-161 - (minus), 7, 106 acetate, 45 - (en dash), 124-126 acetic acid, 45, 78 - (em dash), 41, 91, 107, 115-116, 188 acetic anhydride, 83 --+, 161,169-170 acetoacetic acid, 73 ct, 139, 159, 162, 164, 167-168 acetone, 78 ~, 159, 164, 167-168 acetonitrile, 79 y, 164 acetyl, III, 160, 163 11, 105, 110, 114-115, 117, 119-128, 185 acetyl chloride, 83, 183 K, 98,104-106,117,120,124-125, 185 acetylene, 78 A, 59, 130 acetylide, 41 11, 89-90,98, 104, 107, 113-116, 125-126, 146-147, acid anhydrides, see anhydrides 154, 185 acid halides, 75,83, 182-183 TC, 119 acid hydrogen, 16 cr, 119 acids ~, 167 amino acids, 25, 162-163 00, 139 carboxylic acids, 19,72-73,75--80, 165 fatty acids, 165 A sulfonic acids, 75 ct, 139,159,162,164,167-168 see also at single compounds A, 33-34 acrylic acid, 73, 78 A Guide to IUPAC Nomenclature of Organic actinide, 231 Compounds, 4, 36, 195 actinoids (vs. -
Chapter 2 Polymerisation of MMA Using Novel Chromium(II)
A Thesis Submitted for the Degree of PhD at the University of Warwick Permanent WRAP URL: http://wrap.warwick.ac.uk/133954 Copyright and reuse: This thesis is made available online and is protected by original copyright. Please scroll down to view the document itself. Please refer to the repository record for this item for information to help you to cite it. Our policy information is available from the repository home page. For more information, please contact the WRAP Team at: [email protected] warwick.ac.uk/lib-publications Novel chromium compounds and their use in the polymerisation of methyl methacrylate Mark Andrew Stump A Thesis submitted for the Degree of Doctor of Philosophy Department of Chemistry University of Warwick Coventry CV4 7AL 18th January 1998 A: Table of Contents A Table of Contents 1• B Table of Tables Vlll• • • C Table of Figures xiv D Declaration xix E Acknowledgements XX F Summary xxi G Abbreviations xxii 1. Introduction 2 1.1. An Introduction to Polymers 12 3 1.2. Types of Polymerisation 5 1.2.1. Anionic Polymerisation 5 1.2.2. Co-ordination Polymerisation 7 1.2.3. Radical Polymerisation 9 1.3. Controlled Polymerisation 10 1.3.1. Stereochemistry of vinyl polymerisation 10 1.3.2. Other Aspects of Controlled Polymerisation 12 1.4. Living Polymerisation 13 1.5. An Introduction To Chromium Chemistry 22 1.6. Methods of Analysis for Polymers 34 1.6.1. Size Exclusion Chromatography (SEC) 34 1.6.2. Thermal Gravimetric Analysis (TGA) 35 1.7. References 44 2. Polymerisation of MMA using novel chromium(II) and (III) compounds in conjunction with alkyl halides 49 2.1. -
Enhancement of the Corrosion Resistance of 304 Stainless Steel by Cr–N and Cr(N,O) Coatings
Article Enhancement of the Corrosion Resistance of 304 Stainless Steel by Cr–N and Cr(N,O) Coatings Mihaela Dinu 1, Emile S. Massima Mouele 2, Anca C. Parau 1, Alina Vladescu 1,3, Leslie F. Petrik 2 and Mariana Braic 1,* 1 National Institute for Optoelectronics, 409 Atomistilor St., 077125 Magurele, Romania; [email protected] (M.D.); [email protected] (A.C.P.); [email protected] (A.V.) 2 Department of Chemistry, Environmental and Nano Sciences, University of the Western Cape, Robert Sobukwe Road, Bellville 7535, South Africa; [email protected] (E.S.M.M.); [email protected] (L.F.P.) 3 National Research Tomsk Polytechnic University, Lenin Avenue 43, Tomsk 634050, Russia * Correspondence: [email protected]; Tel.: +4-21-457-57-59 Received: 27 February 2018; Accepted: 2 April 2018; Published: 5 April 2018 Abstract: Chromium nitride and oxynitride coatings were deposited as monolayers ((Cr–N), Cr(N,O)) and bilayers (Cr–N/Cr(N,O), Cr(N,O)/Cr–N) on 304 steel substrates by reactive cathodic arc method. The coatings were characterised by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectrometry (EDS), surface profilometry, and scratch tester. The anticorrosive properties of the coatings were assessed by electrochemical tests in 0.10 M NaCl + 1.96 M H2O2, carried out at 24 °C. Cr2N, CrN, and Cr(N,O) phases were identified in the coatings by grazing incidence X-ray diffraction (GI-XRD) measurements. The measured adhesion values ranged from 19 N to 35 N, the highest value being obtained for the bilayer with Cr(N,O) on top. -
Bond Distances and Bond Orders in Binuclear Metal Complexes of the First Row Transition Metals Titanium Through Zinc
Metal-Metal (MM) Bond Distances and Bond Orders in Binuclear Metal Complexes of the First Row Transition Metals Titanium Through Zinc Richard H. Duncan Lyngdoh*,a, Henry F. Schaefer III*,b and R. Bruce King*,b a Department of Chemistry, North-Eastern Hill University, Shillong 793022, India B Centre for Computational Quantum Chemistry, University of Georgia, Athens GA 30602 ABSTRACT: This survey of metal-metal (MM) bond distances in binuclear complexes of the first row 3d-block elements reviews experimental and computational research on a wide range of such systems. The metals surveyed are titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, and zinc, representing the only comprehensive presentation of such results to date. Factors impacting MM bond lengths that are discussed here include (a) n+ the formal MM bond order, (b) size of the metal ion present in the bimetallic core (M2) , (c) the metal oxidation state, (d) effects of ligand basicity, coordination mode and number, and (e) steric effects of bulky ligands. Correlations between experimental and computational findings are examined wherever possible, often yielding good agreement for MM bond lengths. The formal bond order provides a key basis for assessing experimental and computationally derived MM bond lengths. The effects of change in the metal upon MM bond length ranges in binuclear complexes suggest trends for single, double, triple, and quadruple MM bonds which are related to the available information on metal atomic radii. It emerges that while specific factors for a limited range of complexes are found to have their expected impact in many cases, the assessment of the net effect of these factors is challenging. -
Compound - Physical Properties Density Melting Point G Cm-3 C
Goodfellow Corporation 125 Hookstown Grade Road, Coraopolis, PA 15108-9302. USA Tel: 1-800-821-2870 : Fax 1-800-283-2020 Compound - Physical Properties Density Melting point g cm-3 C Aluminum Carbide 2.36 - Al C 4 3 Aluminum Nitride 3.26 - AlN Antimony Telluride 6.50 - Sb Te 2 3 Barium Titanate 5.8-6.0 - BaTiO3 Bismuth Telluride 7.7 - Bi Te 2 3 Boron Nitride 2.25 - BN Calcium Boride 2.3 - CaB6 Calcium Fluoride 3.18 1360-1400 CaF2 Calcium Titanate 4.10 1975 CaTiO3 Chromium Carbide 6.68 - Cr C 3 2 Chromium Diboride 4.36 - CrB2 Chromium Nitride 5.9 - Cr2N Chromium Silicide 5.5 - CrSi2 Cobalt (II) Oxide 6.45 1795 CoO Cobalt (III) Oxide 5.18 - Co O 3 4 Copper Selenide 5.99 - CuSe Cupric Oxide 6.39 - CuO Hafnium Carbide 12.2 approx. 3890 HfC Hafnium Diboride 10.5 3100 HfB2 Indium Oxide/Tin Oxide 7.16 - In O 90 /SnO2 10 2 3 All information and technical data are given as a guide only. Although every effort has been made to ensure that the information 1 is correct, no warranty is given as to its completeness or accuracy. September 17 2021 Goodfellow Corporation 125 Hookstown Grade Road, Coraopolis, PA 15108-9302. USA Tel: 1-800-821-2870 : Fax 1-800-283-2020 Compound - Physical Properties Density Melting point g cm-3 C Iron Silicide 6.1 - FeSi Lanthanum Hexaboride 2.61 - LaB6 Lead Selenide 8.10 - PbSe Magnesium Fluoride - 1396 MgF2 Magnesium Oxide 3.58 - MgO Molybdenum Carbide 8.9 - Mo2C Molybdenum Diboride 7.12 - MoB2 Molybdenum Disilicide 6.31 - MoSi2 Nickel Oxide 6.67 1984 NiO Niobium Boride 6.97 - NbB2 Niobium Carbide 7.6 - NbC Niobium Nitride 8.4 - NbN Niobium Pentoxide 4.47 - Nb O 2 5 Niobium Silicide 5.37 - NbSi2 Silicon Carbide 3.217 - SiC Silicon Monoxide 2.13 - SiO Silicon Nitride 3.44 - Si N 3 4 Silver Chloride 5.56 455 AgCl Sodium Chloride 2.16 - NaCl Tantalum Boride 11.15 approx. -
Speciation of Volatile Arsenic at Geothermal Features in Yellowstone National Park
Geochimica et Cosmochimica Acta 70 (2006) 2480–2491 www.elsevier.com/locate/gca Speciation of volatile arsenic at geothermal features in Yellowstone National Park Britta Planer-Friedrich a,*, Corinne Lehr b,c,Jo¨rg Matschullat d, Broder J. Merkel a, Darrell Kirk Nordstrom e, Mark W. Sandstrom f a Technische Universita¨t Bergakademie Freiberg, Department of Geology, 09599 Freiberg, Germany b Montana State University, Thermal Biology Institute Bozeman, MT 59717, USA c California Polytechnic State University, Department of Chemistry and Biochemistry, San Luis Obispo, CA 93407, USA d Technische Universita¨t Bergakademie Freiberg, Department of Mineralogy, 09599 Freiberg, Germany e US Geological Survey, 3215 Marine St, Boulder, CO 80303, USA f US Geological Survey, National Water Quality Laboratory, Denver, CO 80225-004, USA Received 2 September 2005; accepted in revised form 7 February 2006 Abstract Geothermal features in the Yellowstone National Park contain up to several milligram per liter of aqueous arsenic. Part of this arsenic is volatilized and released into the atmosphere. Total volatile arsenic concentrations of 0.5–200 mg/m3 at the surface of the hot springs were found to exceed the previously assumed nanogram per cubic meter range of background concentrations by orders of magnitude. Speciation of the volatile arsenic was performed using solid-phase micro-extraction fibers with analysis by GC–MS. The arsenic species most frequently identified in the samples is (CH3)2AsCl, followed by (CH3)3As, (CH3)2AsSCH3, and CH3AsCl2 in decreasing order of frequency. This report contains the first documented occurrence of chloro- and thioarsines in a natural environment. Toxicity, mobility, and degradation products are unknown. -
Phenasen®, Arsenic Trioxide, 10Mg in 10Ml, Injection
Phenasen®, Arsenic Trioxide, 10mg In 10ml, Injection Phebra Pty Ltd Chemwatch Hazard Alert Code: 4 Chemwatch: 23-0970 Issue Date: 10/07/2017 Version No: 6.1.1.1 Print Date: 02/03/2018 Safety Data Sheet according to WHS and ADG requirements S.GHS.AUS.EN SECTION 1 IDENTIFICATION OF THE SUBSTANCE / MIXTURE AND OF THE COMPANY / UNDERTAKING Product Identifier Product name Phenasen®, Arsenic Trioxide, 10mg In 10ml, Injection Synonyms Not Available Other means of identification Not Available Relevant identified uses of the substance or mixture and uses advised against Phenasen injection is for the treatment of acute promyelocytic leukaemia where treatment with all-trans retinoic acid and anthracycline chemotherapy has Relevant identified uses failed or where the patient has relapsed. Details of the supplier of the safety data sheet Registered company name Phebra Address 19 Orion Road Lane Cove West NSW 2066 Australia Telephone +61 2 9420 9199|1800 720 020 Fax +61 2 9420 9177 Website www.phebra.com Email [email protected] Emergency telephone number Association / Organisation Not Available Emergency telephone numbers +61 401 264 004 Other emergency telephone N/A numbers SECTION 2 HAZARDS IDENTIFICATION Classification of the substance or mixture Poisons Schedule S4 Classification [1] Acute Toxicity (Oral) Category 4, Acute Toxicity (Inhalation) Category 4, Carcinogenicity Category 1A Legend: 1. Classified by Chemwatch; 2. Classification drawn from HSIS ; 3. Classification drawn from EC Directive 1272/2008 - Annex VI Label elements Hazard pictogram(s) SIGNAL WORD DANGER Hazard statement(s) H302 Harmful if swallowed. H332 Harmful if inhaled. H350 May cause cancer. Precautionary statement(s) Prevention P201 Obtain special instructions before use. -
Cacodylic Acid), in F344/Ducrj Rats After Pretreatment with Five Carcinogens1
[CANCER RESEARCH 55, 1271-1276, March 15, 1995] Cancer Induction by an Organic Arsenic Compound, Dimethylarsinic Acid (Cacodylic Acid), in F344/DuCrj Rats after Pretreatment with Five Carcinogens1 Shinji Vaniamolo,2 Yoshitsugu Konishi, Tsutomu Matsuda, Takashi Murai, Masa-Aki Shibata, Isao Matsui-Yuasa,3 Shuzo Otani, Koichi Kuroda, Ginji Endo, and Shoji Fukushima First Department of Pathology ¡S. Y., Ts. M., Ta. M.. M-A. S.. S. F.1, Second Department of Biochemistry //. M-Y., S. O.j, and Department of Preventive Medicine and Environmental Health /K K., G. E.I, Osaka City University Medical School, 1-4-54 Asahi-machi, Aheno-ku, Osaka 545, and Osaka Cit\ Institute of Public Health and Environmental Sciences, Osaka 543 IK. K.], Japan ABSTRACT Taiwan and Mexico are exposed to high amounts of As via the drinking water (5, 8). Moreover, the wide population in the United Arsenic (As) is environmentally ubiquitous and an epidemiologically States may be supplied with water containing more than 50 ju.g/1As significant chemical related to certain human cancers. Dimethylarsinic (6). Industrial arsenicals are used for smelting, glass making, and the acid (cacodylic acid; DMA) is one of the major methylated metabolites of manufacture of semiconductors (3, 9). For more than half a century, ingested arsenicals in most mammals. To evaluate the effects of DMA on chemical carcinogenesis, we conducted a multiorgan bioassay in rats given various carcinogenic effects of As for humans have been documented, various doses of DMA. One-hundred twenty-four male F344/DuCrj rats mainly involving the skin and lung (7). In addition, recent epidemi- were divided randomly into 7 groups (20 rats each for groups 1-5; 12 rats ological studies have indicated that there are significant dose-response each for groups 6 and 7).