New Bonding Technology enables Multi-Material Photonics Solutions

Richard Bijlard, MSc. Technogation - Invenios Invenios Worldwide

Langen (Hessen) Germany Eindhoven Netherlands Santa Barbara, California, USA Material Structuring, Processing and Bonding

• A variety of processes.. etching, micromachining, drilling laser processing, surface texturing wafer cutting, packaging, plating hot embossing,…

..on a range of materials! glasses, silicon, ceramics, polymers,metals, silicon carbide, thin films, sapphire, pyrex,…

Presentation © Invenios – Richard Bijlard FOTURAN® Etch Large area processing Low aspect High aspect ratio ratio

Sub-micron Features Embedded feature

3D features with large aspect ratio !

Deep undercut ~300 microns ! Room Temperature Bonding (patented: ATB)

• Two or more substrates (different CTEs possible!) • Thin film blocking layer on interface layer • Appropriate wavelength laser • Very locally created plasma, so bulk of the material stays at room temperature • No glue or high temperatures Room Temperature Bonding - Characteristics

• High bond strength > strength of the base material • High bond yields with reasonable demands on surface smoothness & cleanliness • Low temperatures, heat impacted zone < 1 µm of bond joint • Possible to create electrical leads in the same process step • Embed fluids or biomaterial/-coatings • Seals hermetically and in a vacuum or inert gas if required • Scalable process, designed for operating in clean room production lines • Flexibility in material selection, proven process! What can you bond?

The following substrates can be bonded together in any combination:

• Several types of Glasses • Quartz/Fuzed Silica • Sapphire • Silicon • Silicon Nitride • Silicon Oxide • Indium Phosphide • Metals (Alumin, Titanium, …) • Several plastics DNA sequencing Chips, Lab-on-a-chip

Print Heads

Micro reactor

Lens, attached to holder tube by only using AR coating Electrowetting-on-dielectric

Water drop

Surface tension Hydrophobic insulator V + + + + + + + + + ______Electrode

Electrostatic force

• Electrowetting: Control of wetting with electricity • Low power: drop acts as a capacitor Electrowetting Effect

See http://optilux.com/technology/ for movies! • Apply voltage

• Change meniscus between fluids Electrowetting: lens setup The Optilux lens by Invenios Optical Image Stabilization Demo

13 Thanks for your attention!

Richard Bijlard Technogation - Invenios Mobile: +31-6-4759 4741 [email protected] www.technogation.com