Sample Flow Modeling for Rapid Performance and Failure Analysis

Sample flow modeling for rapid performance and failure analysis Citation for published version (APA): Tassew, B. (2019). Sample flow modeling for rapid performance and failure analysis. Technische Universiteit Eindhoven. Document status and date: Published: 24/10/2019 Document Version: Publisher’s PDF, also known as Version of Record (includes final page, issue and volume numbers) Please check the document version of this publication: • A submitted manuscript is the version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. 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If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the “Taverne” license above, please follow below link for the End User Agreement: www.tue.nl/taverne Take down policy If you believe that this document breaches copyright please contact us at: [email protected] providing details and we will investigate your claim. Download date: 02. Oct. 2021 / Department of Mathematics and Computer Science / PDEng Software Technology Sample Flow Modeling for Rapid Performance and Failure Analysis Beza Getachew Tassew Where innovation starts Sample Flow Modeling for Rapid Performance and Failure Analysis Beza Getachew Tassew Eindhoven University of Technology Stan Ackermans Institute / Software Technology Partners Thermo Fisher Scientific Eindhoven University of Technology Steering Group Beza G. Tassew Marcin Gramza (Thermo Fisher Scientific) Anton J. Wijs (TU/e) Date October 2019 Document Status Public PDEng report no. 2019/091 The design that is described in this report has been carried out in accordance with the rules of the TU/e Code of Scientific Conduct. Contact Eindhoven University of Technology Address Department of Mathematics and Computer Science MF 5.080A, P.O. Box 513, NL-5600 MB, Eindhoven, The Netherlands +31402474334 Published by Eindhoven University of Technology Stan Ackermans Institute Printed by Eindhoven University of Technology UniversiteitsDrukkerij SAI report no. 2019/091 Abstract Thermofisher Scientific produces different kinds of microscopes for semiconductor manufacturing process control and defect analysis. The analysis of semiconductor samples involves the processes Sample Preparation, Sample Transport, and Sample Analysis. In order to design new components or upgrade existing devices and workflows, a performance analysis is required as part of a decision- making mechanism. This project explores the use of process modeling and simulation techniques to enable performance (i.e. throughput, time and resource) analysis, optimization and failure modeling. Furthermore, it dives into the use of executable process models to enable process deployments for real- time control, analytics and optimization, using workflow engines. Keywords These keywords should be at least the keywords as issued for the SAI report no. request Preferred Sample Flow Modeling for Rapid performance and Failure Analysis, SAI Technical Report, October reference 2019. (2019/091) Partnership This project was supported by Eindhoven University of Technology and Thermo Fisher Scientific. Disclaimer Reference herein to any specific commercial products, process, or service by trade name, trademark, Endorsement manufacturer, or otherwise, does not necessarily constitute or imply its endorsement, recommendation, or favoring by the Eindhoven University of Technology or Thermo Fisher Scientific. The views and opinions of authors expressed herein do not necessarily state or reflect those of the Eindhoven University of Technology or Thermo Fisher Scientific, and shall not be used for advertising or product endorsement purposes. Disclaimer While every effort will be made to ensure that the information contained within this report is accurate Liability and up to date, Eindhoven University of Technology makes no warranty, representation or undertaking whether expressed or implied, nor does it assume any legal liability, whether direct or indirect, or responsibility for the accuracy, completeness, or usefulness of any information. Trademarks Product and company names mentioned herein may be trademarks and/or service marks of their respective owners. We use these names without any particular endorsement or with the intent to infringe the copyright of the respective owners. Copyright Copyright © 2019. Eindhoven University of Technology. All rights reserved. No part of the material protected by this copyright notice may be reproduced, modified, or redistributed in any form or by any means, electronic or mechanical, including photocopying, recording, or by any information storage or retrieval system, without the prior written permission of the Eindhoven University of Technology and Thermo Fisher Scientific. ii iii This PDEng thesis is approved by the supervisors and the Thesis Evaluation Committee is composed of the following members: Chair: Yanja Dajsuren (TU/e) Supervisors: Marcin Gramza (Thermo Fisher Scientific) Anton J. Wijs (TU/e) Members: Paul Janson (Thermo Fisher Scientific) Arjen Klomp (Thermofisher Scientific) iv Foreword The Thermo Fisher Scientific Electron Microscopy is stepping into a new, fascinating time, where multiple microscopes are connected to work together to deliver optimal results for our customers. It is a relatively new area for Thermo Fisher. We are exploring design and modelling methodologies that support efficient and high-quality software development for such systems. From the research point of view the investigation field is broad. The methodology that we envision as valuable for us should be: easy to understand by different stakeholders, varying from business owners to the software developers support fast delivery of the working and reliable software to be deployed at the customer premises integrate well with the existing microscope systems flexible for future extensions and modifications Beza took the challenge to find a solution that would fulfill all those requirements. To make her assignment realistic we selected actual problem from our domain as a use case. We have asked Beza to model the semiconductor sample flow from the very beginning (i.e. milling a tiny silicon piece of the semiconductor wafer) to the image acquisition of a semiconductor structure and obtain metrology data. The model was supposed to simulate the flow and to calculate the performance of the system. We selected two key parameters to be optimized: throughput and total time required for the production of the metrology data. Beza created the model that was not only correct and realistic, but also enabled us to simulate the different system configurations. That allowed us to find the optimal system configuration maximizing the throughput and minimizing the time required for getting the customer data. Beza accomplished another important goal, namely proved usability of the model for rapid system prototyping. She integrated the model execution engine with the microscope software and proved its usability. The concept is very promising. As a matter of fact Thermo Fisher will apply the methodology realized by Beza for rapid functionality development for the upcoming project. Project mentor, M.Sc. Marcin Gramza October 2019 v vi Preface This report represents a ten-month project entitled “Sample Flow Modeling for Rapid Performance Analysis” conducted at Thermo Fisher Scientific. This project is a part of the graduation criteria for a post masters Professional Doctorate in Engineering (PDEng) degree in Software Technology at Eindhoven technology University. This project took place in the Semiconductors group within the Material and Structural Analysis Division (MSD) of Thermo Fisher Scientific, under the supervision of Marcin Gramza (Software Architect). The goal of the project is to model the semiconductor sample preparation and analysis flow so that performance can be analyzed and predicted early in the process through modeling and simulation, which in turn aids in informed decision making. This project also explores the possibility of further extending the use of models in real-time through the use executable models. This report gives an overview of the project and the analysis, design and implementation approaches taken toward achieving the project goals in detail. The target audience for this report includes Engineers, System Designers, System Architects, Process Modelers/designers, as well as Product Managers. Readers interested in the overall context, results and recommendations can focus

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