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Micro and Nanotechnology Laboratory investigating the processing of semiconductors and other Rashid Bashir, Director III-V materials at the nanometer scale level and applying Micro and Nanotechnology Laboratory these techniques to the realization of ultra-high 208 N. Wright Street optoelectronic devices. MC-249 Urbana, Illinois 61801-2355 Nanophotonics and Optoelectronics 217-333-3097 Research on has focused on novel types of http://www.mntl.illinois.edu devices, such as patterned quantum dot lasers and narrow linewidth diode arrays, and vertical cavity surface The Micro and Nanotechnology Laboratory (MNTL), with emitting lasers (VCSELs) and photonic crystal lasers. 147,347 square feet of space, is one of the nation’s largest Areas of research include conceptualization, design, and most sophisticated university-based facilities for fabrication, and testing of micro and nanoelectronic and conducting multidisciplinary research in semiconductor, optoelectronic devices, circuits, components, and systems nanotechnology, and biotechnology research. It contains for lightwave communication and optical interconnects. more than 8,000 square feet of class 100 and class 1000 cleanroom laboratories, a new 3,000 square-foot Nanomedicine and BioNanotechnology laboratory complex specifically designed for Research is being conducted to develop bionanotechnology, and state-of-the-art ultra-high-speed nanotechnology-based solutions to solve biomedical optical and electrical device and circuit measurement problems for diagnostics, therapeutics, and tissue equipment. The bionanosystems area focuses on utilizing engineering. This includes working at the intersection of the various technologies developed in materials, nanotechnology, biology, electromagnetics, and optics to nanofabrication, devices, MEMS, and NEMS to study and develop technology that impacts health care, the life solve biological issues. sciences, agriculture, and the environment. MNTL is a user facility, where researchers from around the world work to improve and invent novel devices and MEMS/NEMS and Integrated Systems develop applications that are in high demand by industry Research involves the development of micromachining and consumers in the state, the nation, and around the methods utilizing an array of materials, including silicon, world. This is the kind of research that makes satellite gallium arsenide, and polymers, to enable applications in communications, computers, telephones, display panels, variety of multidisciplinary areas, including wireless and other devices more powerful, more efficient, and more communications, optoelectronics, power dissipation reliable. It is the basis for new kinds of biosensors for challenges in integrated circuits, and biomedical advanced drug discovery, new vaccine delivery strategies, engineering. A particular emphasis of this research area is and faster, more cost-effective DNA sequencing the design and development of integrated micro/nano techniques. Research in this laboratory is expected to lead fluidic devices and systems. to new industries and spur economic development. Research Area Index Multidisciplinary research is carried out in four key areas: Full-Time Resident Faculty* • Micro and Nanoelectronics • Nanophotonics and Optoelectronics Micro and Nanoelectronics: Ilesanmi Adesida, Keh-Yung • Nanomedicine and BioNanotechnology Cheng, Kent Choquette, James Coleman, Milton Feng, • MEMS/NEMS and Integrated Systems Matthew Gilbert, Lynford Goddard, Nick Holonyak, Jr., Kuang-Chien Hsieh, Xiuling Li, Eric Pop, (faculty Micro and Nanoelectronics members in the Department of Electrical and Computer In recent years, collaborative work conducted at the Engineering) MNTL has yielded a novel type of device—the light emitting transistor (LET). Research groups are

1 Nanophotonics and Optoelectronics: Ilesanmi Adesida, Kevin Kim, Electrical and Computer Engr. Keh-Yung Cheng, Kent Choquette, Shun Lien Chuang, William King, Mechanical Science and Engr. James Coleman, Milton Feng, Lynford Goddard, Nick Hyunjoon Kong, Chemical and Biomolecular Engr. Holonyak, Jr., Kuang-Chien Hsieh, Xiuling Li, Eric Pop Mary Kraft, Chemical and Biomolecular Engr. (faculty members in the Department of Electrical and Paul Kwiat, Physics Computer Engineering) Jean-Pierre Leburton, Electrical and Computer Engr. Deborah Leckband, Chemical and Biomolecular Engr. Nanomedicine and BioNanotechnology: Irfan Ahmad Harris Lewin, Institute for Genomic Biology (Center for Nanoscale Science and Technology and Jennifer Lewis, Materials Science and Engr. Department of Agricultural and Biological Engineering); Joseph Lyding, Electrical and Computer Engr. Rashid Bashir, Brian Cunningham, Logan Liu (faculty Nadya Mason, Physics members in the Department of Electrical and Computer George Miley, Nuclear, , and Radiological Engr. Engineering) Ralph Nuzzo, Chemistry Daniel Pack, Chemical and Biomolecular Engr. MEMS/NEMS and Integrated Systems: Irfan Ahmad Graciela Padua, Food Science and Human Nutrition (Center for Nanoscale Science and Technology and Umberto Ravioli, Electrical and Computer Engr. Department of Agricultural and Biological Engineering); John Rogers, Materials Science and Engr. Rashid Bashir, James Coleman, Brian Cunningham. David Ruzic, Nuclear, Plasma, and Radiological Engr. Milton Feng, Logan Liu, Eric Pop (faculty members in the Taher Saif, Mechanical Science and Engr. Department of Electrical and Computer Engineering) Klaus Schulten, Physics Edmund Seebauer, Chemical and Biomolecular Engr. Part-time Resident Faculty* Paul Selvin, Physics Rohit Bhargava, Bioengineering Mark Shannon, Mechanical Science and Engr. Kanti Jain, Electrical and Computer Engr. Sanjiv Sinha, Mechanical Science and Engr. Iwona Jasiuk, Mechanical Science and Engr. Stephen Sligar, Biochemistry Larry Schook, Animal Sciences Jonathan Sweedler, Chemistry Gregory Timp, Electrical and Computer Engr. Dale Van Harlingen, Physics Ning Wang, Mechanical Science and Engr. Affiliate Faculty* Kenneth Watkin, Applied Health Sciences Leslie Allen, Materials Science and Engr. Matthew Wheeler, Animal Sciences Narayana Aluru, Mechanical Science and Engr. Gerard Wong, Materials Science and Engr. Ryan Bailey, Chemistry Charles Zukoski, Chemical and Biomolecular Engr. Alexey Bezryadin, Physics Stephen Bishop, Electrical and Computer Engr. *Please visit the Micro and Nanotechnology Laboratory Stephen Boppart, Electrical and Computer Engr. website (www.mntl.illinois.edu) for an updated list of Paul Braun, Materials Science and Engr. research groups, faculty and their Web pages, and centers, Raffi Budakian, Physics along with updates on activities and accomplishments. Ioannis Chasiotis, Aerospace Engr. Jianjun Cheng, Materials Science and Engr. Multidisciplinary Research at the Micro and Hyungsoo Choi, Electrical and Computer Engr. Nanotechnology Laboratory James Economy, Materials Science and Engr. J. Gary Eden, Electrical and Computer Engr. Center for Nanoscale Science and Technology Nicholas Fang, Mechanical Science and Engr. 2014 Micro and Nanotechnology Laboratory Placid Ferreira, Mechanical Science and Engr. Ilesanmi Adesida, Director Martha Gillette, Medical Cell and Structural Biology Irfan Ahmad, Associate Director Taekhip Ha, Physics 217-333-2015 Edwin C. Hahn, III, Pathobiology www.cnst.illinois.edu Paul Hergenrother, Chemistry Jimmy Hsia, Mechanical Science and Engr. Division of Biomedical Sciences Eric Jakobsson, Molecular and Integrative Physics 1100 Micro and Nanotechnology Laboratory Shiv Kapoor, Mechanical Science and Engr. Larry Schook, Director Linda Katehi, Electrical and Computer Engr. Jennifer Eardley, Associate Director

2 217-244-8480 provost.illinois.edu/committees/DBS.html Center for Affordable Nanoengineering of Polymer Biomedical Devices (NSF-NSEC) Hyper-Uniform Nanophotonic Technology Center Rashid Bashir, Co-Investigator (DARPA) http://www.nsec.ohio-state.edu/overview_I.html 2112 Micro and Nanotechnology Laboratory K. Y. Norman Cheng, Director Faculty and Their Interests 217-333-6642 www.micro.uiuc.edu/people/profile.asp?kycheng John R. Abelson Plasma-assisted deposition of semiconductor, dielectric, Network for Computational Nanotechnology/NanoHub and conductive thin-films for electronic applications; the (NSF) physics and chemistry of film growth; fabrication of 1250 Micro and Nanotechnology Laboratory photovoltaic cells and thin-film transistors for Nahil Sobh, Site Lead macroelectronics Umberto Ravaioli, Faculty Lead 217-244-9481 Ilesanmi Adesida www.nanohub.org Electronic and transport properties of ultra-low dimensional semiconductor structures, advanced Siteman Center of Cancer Nanotechnology Excellence processing methods for electronic devices, high-speed (SCCNE)(NCI) optoelectronic devices and integrated circuits, radiation (Illinois co-location) effects 2104 Micro and Nanotechnology Laboratory Rashid Bashir, Principle Investigator (PI) Rashid Bashir Irfan Ahmad, Project Coordinator/Co-PI BioMEMS and biosensors, bionanotechnology, 217-333-2015 nanomedicine, applications of MEMS and nanotechnology www.cnst.illinois.edu in medical and biological problems, multiscale tissue engineering. National Centers at Illinois Utilizing the MNTL Rohit Bhargava Nano-CEMMS Center (NSF-NSEC) Infrared spectroscopic imaging, automated and Placid Ferreira, Director quantitative histopathology, cancer pathology, http://www.nano-cemms.uiuc.edu macromolecular dynamics in composites, molecular and tissue engineering, nanotechnology, biophotonics Center for the Design of Biomimetic Nanoconductors instrumentation and algorithms (NIH-NDC) Eric Jakobsson, Director Stephen G. Bishop http://www.nanoconductor.org Optical and electrical characterization of crystalline and amorphous semiconductors and semiconductor Water CAMPWS (NSF-ERC) nanostructures, compound semiconductors (GaAs, InP, Mark Shannon, Director AlGaAs, ZnSe, SiC), defects in semiconductors, http://www.watercampws/uiuc.edu isoelectronic defects, rare earth-doped chalcogenide glasses and GaN. Experimental techniques, including MNTL Faculty Participation with External Centers photoluminescence, nuclear magnetic resonance, electron spin resonance, magneto-optics, photoemission, infrared NIH Nanomedicine Development Center: spectroscopy Phi29 DNA-Packaging Motor for Nanomedicine Rashid Bashir, Co-PI Jianjun Cheng http://www.vet.purdue.edu/PeixuanGuo/NDC/index.html Biomaterials, polymers, gene delivery, nanomedicine, self-assembly Center for Food Safety Engineering (USDA/ARS) Rashid Bashir, Co-Investigator http://www.cfse.purdue.edu

3 Keh-Yung Cheng J. Gary Eden Molecular beam epitaxy technology, optoelectronic Ultraviolet and visible lasers and laser spectroscopy, integrated circuits, high speed devices, in situ fabrication microcavity plasma devices and arrays, micro- and of nanostructures, quantum wire lasers, vertical cavity nanophotonic resonators; optical physics, including surface emitting lasers, Sb-based IR detectors and femtosecond laser spectroscopy and technology, and the electronic devices interaction of intense optical fields with matter, laser magnetometry Hyungsoo Choi Precursors for nanoscale materials synthesis, including Nicholas X. Fang syntheses and development of tailored organometallic, Design and manufacturing of photonic metamaterials and inorganic, and polymeric precursors; thin film and devices, 3-D micro-nanofabrication nanoparticle fabrication, including thin films, micro- and nanoparticles, and nanowires/tubes via sol-gel processing, Milton Feng charged liquid cluster beam (CLCB) deposition, chemical High-speed devices and ICs for wireless and light emitting vapor deposition (CVD), chemical solution deposition transistors for optoelectronics (optoelectronic IC), (CSD), and precision particle fabrication (PPF) monolithic microwave and millimeter-wave IC, digital IC, technology; electronic and optical materials, including high field transport properties, RF-MEMS for wireless fabrication of electronic, optical, and magnetic materials communications, advanced Si-CMOS device physics for various devices involving thin films, micro- and nanoparticles, nanowires/tubes of metals, metal nitrides Placid M. Ferreira and oxides utilizing their electronic, optical, Design methodology and tribology, manufacturing optoelectronic, and magnetic properties; bimaterials, systems, nano-, micro-, and meso-technology, production including fabrication of micro- and nanospheres/capsules management of biodegradable/compatible materials for advances drug delivery and tissue engineering Steve Granick Polymers and biopolymers, nanorheology/tribology, Kent Choquette surface spectroscopies Vertical cavity surface emitting lasers (VCSELs), micro- and nanocavity lasers, optoelectronic devices, selective Nick Holonyak, Jr. oxidation of compound semiconductors, hybrid Semiconductors, semiconductor device physics, heterogenous integration, nanoprocessing fabrication, semiconductor crystal growth and junction formation, photonic crystal materials, Si-based optoelectronics diffused Si devices, SCRs, TRIACs, double injection, luminescence, light emitting diodes (LEDs), Shun L. Chuang heterojunctions, lasers, tunnel diodes, compound Optoelectronics, semiconductor lasers, modulators, semiconductors, quantum well heterostructures, photodetectors, photonics, quantum electronics, fiber superlattices, quantum well lasers, impurity-induced layer optical sensors, electromagnetics disordering, Al-based III-V native oxides and their use in heterostructures devices James J. Coleman Semiconductor lasers, optoelectronics, epitaxial growth Kuang C. Hsieh Semiconductor materials/devices processing and Brian Cunningham characterization Nanotechnology, photonic crystals, biosensors, micro/ nanofabrication methods and materials detection Kanti Jain instrumentation Microelectronic, optoelectronic, microsystem and biophotonic devices; novel micro and nanofabrication Brian Cunningham technologies Nanotechnology, photonic crystals, biosensors, micro/ nanofabrication methods and materials detection Iwona Jasiuk instrumentation mechanics; biomechanics; mechanics of materials; micromechanics; composite, biological and nano- materials; bone mechanics; composite interfaces; elasticity

4 Amy Wagoner Johnson Xiuling Li Synthetic biomaterials, failure mechanics of metals and Metalorganic chemical vapor deposition (MOCVD), biomaterials selective area epitaxy, III-V semiconductor optoelectronic devices, semiconductor nanotubes and nanowires, Paul J. A. Kenis nanoelectronics Microfuel cells, microreactors, engineered platforms for biology, microfluidic crystallization platforms Chang Liu MEMS, microsensors, microintegrated fluidics systems, Kyekyoon (Kevin) Kim MEMS for nanotechnology, wireless interface for sensors, Growth of GaN-based compound semiconductors and sensitive skin fabrication of optoelectronic and electronic devices using plasma-assisted MBE; plasma-arc-driven electromagnetic Daniel W. Pack for fueling of plasma devices; charged liquid Drug and gene delivery systems cluster beam generation and application to thin film deposition, micropattern generation, and nanoparticle Umberto Ravaioli fabrication; generation of solid and hollow, charged and Monte Carlo simulation of high speed electronic devices; neutral, monodisperse, micro- and nanospheres for numerical methods for semiconductor device simulation; biomedical and other applications; plasma display panels; quantum devices; supercomputation and visualization; development of novel thin film deposition techniques reliability of MOS devices; micro- and nano-electro- using plasmas, charged particles, electrostatic spraying, mechanical systems (MEMS and NEMS); charge transport and their combinations with other techniques; MEMS and in biological systems (ionic channels); properties of carbon sensors; ionized source (cluster) beam deposition for low- nanotubes temperature growth of high-quality films; inertial confinement fusion targets John A. Rogers Electroactive polymers, plastic electronics, microfluidics, William Paul King elastomers, soft lithography Nanomanufacturing, scanning probe microscopy, micro/ nano heat and transfer M. Taher A. Saif Bioengineering, engineering mechanics, materials Hyun Joon Kong behavior, nano-, micro-, and meso-technology Biomaterials, cell adhesion, tissue engineering, cell Edmund G. Seebauer Jean-Pierre Leburton Engineering of semiconductor defects for nanoscale Theory of semiconductor devices, modeling and devices simulation of nanostructures, electronic and optical properties of heterostructures and low dimensional Mark A. Shannon systems, transport in quantum structures, electronic Bioengineering, combustion and propulsion, properties, charging effects in quantum dots and computational science and engineering, energy systems nanocrystals, spin effects in nanostructures, quantum and thermodynamics, heat transfer, materials processing, computation and quantum information processing, nano- nano-, micro-, and meso-technology bio-electronics Michael S. Strano Deborah E. Leckband Chemical reactivity of nanowires and nanotubes, Bioengineering and biophysics processing of nanoparticle systems, molecular electronics

Jennifer A. Lewis Jonathan V. Sweedler Colloidal assembly, phase behavior of complex fluids, Neurotransmitter distribution and release direct-write assembly, rheology, drying, film formation

5 Gregory Timp Processing of Gallium Nitride and Related Compounds Nanoelectronics, including fabrication, development, and I. Adesida,* L. Zhou, F. Khan characterization of the performance of silicon MOS ATMI/Air nanotransistors to discover the fundamental limitations of Conducted in the Micro and Nanotechnology Laboratory the silicon MOSFET; nanobiotechnology, including nanometer-scale lithography used to probe biological This program consists of the development of viable function and study molecular transport through nanopores; processing methods for gallium nitride and related synthetic nanopore sensors for rapidly and inexpensively compounds. A systematic study of etching techniques, sequencing DNA; laser-guided assembly, including arrays ohmic contact formation, and other metallizations will be of optical traps to assemble nanosystems conducted and applied to devices. Resonant Enhanced Modulators Charles F. Zukoski I. Adesida,* S. Rommel Colloid and interfacial science Air Force; Sarnoff Corporation Advanced Processing and Circuits Conducted in the Micro and Nanotechnology Laboratory This is a collaborative program with Sarnoff Corporation AlGan/GaN HFET Fabrication and Characterization on resonant enhanced modulators in InP-based I. Adesida,* V. Kumar, A. Kuliev heterostructures. Waveguides with coupling rings are to be Triquint Corporation fabricated and characterized in InP-heterostructures. High precision patterning using inductively coupled plasma Conducted in the Micro and Nanotechnology Laboratory reactive ion etching and electron beam lithography will be This project involves a collaboration with Triquint used in fabricating the modulators. Corporation on the fabrication of AlGaN/GaN HFETs. Silicon-Germanium Modulation-doped Field Effect Technologies for the fabrication of the HFETs will be Transistors developed. I. Adesida,* K. Ismail* Gallium Nitride Optoelectronics National Science Foundation, ECS 97-10418 I. Adesida,* L. Zhou Conducted in the Micro and Nanotechnology Laboratory Defense Advanced Research Projects Agency, DAAD19-99-1-0011 This collaborative program with IBM Corp. is intended to significantly advance the growth and fabrication Conducted in the Micro and Nanotechnology Laboratory technologies for SiGe/Si modulation-doped field effect This project focuses on experimental issues for the transistors (MODFETs) needed for low-power, high-speed fabrication of novel optoelectronic devices and circuits in microwave and digital applications. Specific goals are to gallium nitride and related materials. UV detectors, field study the physics of short gate-length p-type, n-type, and effect transistors, and heterojunction bipolar transistors complementary MODFETs and to demonstrate simple will be investigated. Methods for integrating these devices circuits. will also be explored. Ultra-High-Power GaN Power Amplifier at X-Band Porous GaN: Production, Characterization, and I. Adesida,* W. Lu, D. Selvanathan Applications Air Force; TRW Corporation I. Adesida,* P. Bohn,* X. Li,* S. Kim Conducted in the Micro and Nanotechnology Laboratory U.S. , N00014-01-1 This collaborative project with TRW Corporation is to Conducted in the Micro and Nanotechnology Laboratory fabricate an ultra-high-power GaN-based HFET amplifier This program involves the generation and characterization on SiC at X-Band. Various processing techniques for GaN of porous GaN and SiC for applications in growth of high will be developed as part of this project. quality epitaxial layers. Matrices with dimensions down to 50 nm are to be achieved for the porous materials.

* Denotes principal investigator.

6 particular advantage as sensor elements because their 1-D Biochemical and Biomedical electronic structure renders carrier transport more sensitive Engineering to scattering from adsorbates than from intrinsic mechanisms. We are designing nanotube systems that act of Biological Adhesion: from Single as optical biosensors that respond to analyte binding at Molecules to Tissues tailored receptor locations with a modulation in near D. E. Leckband,* V. Maruthamuthu, Y.-H. Chien, Q. Shi infrared optical response. Such sensors are ideal for National Institutes of Health, RO1 GM51338; Drickamer implantation into human tissue to provide real time Graduate Fellowship (VM) information about biochemical concentrations in a noninvasive manner. In these studies, we are determining the molecular basis of protein-mediated cell-cell adhesion in tissues. Receptor- mediated cell adhesion is important in wound healing, Bioengineering cancer metastasis, and tissue engineering. This work uses a multiscale approach to establish how the detailed Acquisition of a Multi-Length Scale Ultra High- nanomechanics of protein bonds governs the mechanics Resolution X-Ray Nanotomography Instrument and formation dynamics of intercellular junctions in P. Braun (Mat. Sci. and Engr.),* tissues. We use a combination of molecular force probe A. J. Wagoner Johnson,* D. Griffon, W. Hurley, I. Jasiuk measurements, theoretical modeling, and molecular National Science Foundation biology techniques. Our findings are providing critical This funding was used to purchase an Xradia ultra-high- insights into the connections between protein mutations resolution x-ray nanotomography instrument (nano-CT). and human disease. This instrument supports nondestructive internal 3-D Nanoparticles for Brain Drug Delivery imaging of samples as thick as 100 µm with 30 nm D. W. Pack,* S. Anthony resolution and will be the first nonsynchrotron based nano- Parkinson's Disease Foundation CT in the United States. The nano-CT is housed at the Beckman Institute for Advanced Science and Technology The brain is isolated from the systemic circulation by the in a shared facility with expert full-time staff and blood-brain barrier (BBB), formed by the very tight equipment to aid with sample prep, acquisition, processing, junctions between brain capillary endothelial cells. As a analysis, and storage of the nano-CT data. The instrument result, most water-soluble drugs, especially would complement an already installed National Science macromolecules, cannot be effectively delivered to the Foundation funded micro-CT, filling in the resolution gaps brain from the circulation. Safe and effective delivery below that instrument’s resolution limit of 5 µm. systems are desperately needed for brain drug delivery, in particular for novel treatments of neurological diseases Understanding Force-Induced Learning and Memory (e.g., Parkinson’s and Alzheimer’s diseases) and brain T. A Saif;* A. Chiba, Y. Wang (University of Miami) cancer. The overall goal of this project is to investigate National Science Foundation, CMMI 0800870 biodegradable polymer nanoparticles as vehicles for drug Our recent in vivo experiments using Drosophila (fruit fly) delivery to the brain. Nanoparticles are covalently embryos reveal that mechanical force applied at an derivatized with targeting ligands that can be transported individual neuromuscular synapse produces neuronal across the BBB. The team uses both in vitro models of the memory. Under normal conditions, axons actively BBB and in vivo models to investigate the ability of maintain a resting tension of about 1 nN. Force exerted at nanoparticles to provide prolonged delivery of drugs to the the synapse, either naturally or artificially, has a long-term brain. impact on the accumulation of synaptic vesicles containing Near IR Signal Transduction of Molecular Binding to neuro transmitters at the synapse. Our objective is to Single Walled Biosensors explore the underlying cellular and molecular mechanisms M. S. Strano,* P. Barone, D. Heller, E. Jeng, C. Y. Lee of force sensing and force-induced neuronal memory in National Science Foundation; Mattek Corp. vivo in Drosophila embryos using advanced nano- mechanical force/stretch sensors, new molecular Near infrared light can penetrate thick tissue and whole biosensors, and semi-continuum modeling. blood samples forming the basis of in vivo sensing technologies. However, few organic molecules emit in this region in a stable manner. Carbon nanotubes hold * Denotes principal investigator.

7 Characterization and Modeling of Trabecular Bone Thermo Mechanical Studies of Cells with Nano Probes I. Jasiuk* on a Si Substrate [email protected] T. A. Saif* University of Illinois at Urbana-Champaign National Science Foundation, ECS 0524675 We study bone as a hierarchical material and predict its Cell adhesion plays a fundamental role on a variety of cell local fields and constitutive responses at different functionality, such as growth and cell division, as well as structural scales in healthy and disease states. More on disease progression such as angiogenesis. Until today specifically, we characterize the hierarchical structure of there is very little knowledge on the cooperative normal and osteoporotic bone at several structural levels arrangements and synergistic interactions between from nano to macro scales, identify failure and fracture adhesion sites, significance of their cluster size, shape, mechanisms in bone at different structural scales, measure their characteristic length scales, and their dynamics. This in vitro and in vivo bone’s properties at different scales and project addresses some of the yet unanswered questions on develop micromechanics and computational models to cell adhesion and provides fundamental insight on the predict local fields and constitutive responses of bone from relation between cell mechanics and disease progression. nano to macro scales. The approach is to develop a novel Si substrate and a 3-D force sensor. The cellular investigations include size and Repair by Regeneration of Large Bone Defects strength of single adhesion sites; thermal activities during I. Jasiuk,* N. Fang, J. Cameron formation of the sites; and inter- and intra-cellular response University of Illinois at Urbana-Champaign of cells due to thermal stimuli applied at the sites (jointly We study the repair by regeneration of large bone defects with the Max Planck Institute, Germany). in the adult frog Xenopus laevis limb. Xenopus tadpoles Toward a Neuro-Mechanical Memory Element have the ability to regenerate limbs but, with age, they lose T. A. Saif,* A. Chiba (Univ. of Miami) this capacity. Thus, in a single animal system we have National Science Foundation, ECCS 0801928 regeneration capacity and then lack of it. The approach involves the use of new osteo-inductive bioartificial Our objective is to explore whether a neuro-mechanical scaffolds with optimally designed microstructures for synapse can be formed by interfacing a neuron cell with a vascularization, cell growth, and mechanical support, in silicon substrate. It is based on our recent finding that combination with cell transplantation, and chemical mechanical force applied at a neuromuscular synapse of induction to promote regeneration. This research includes Drosophila (fruit fly) embryos produces neuronal memory. in vitro and in vivo experiments integrated with analytical This mechano-sensing ability of neurons is likely rooted in and computational modeling. evolutionarily conserved properties of cells. Thus, we believe that elucidating this mechano-sensitivity of BioMEMS-Based Microinstrumentation for In Situ neurons will allow designing a novel synapse between a Quantitative Investigations of Adhesion, Cell neuronal axon and a mechanical surface when properly Structural Mechanics, and Mechanotransduction of functionalized. Such a neuro-mechanical "synapse" may Single Living Cells and Embryos serve as an analogue memory element with the potential to T. A. Saif,* S. Yang form neuro-mechanical logic circuits. National Science Foundation, ECS 0118003 A Nanomechanical Approach to Understanding There is increasing experimental evidence suggesting that Metastasis through Cell Adhesion Measurement extracellular and intracellular mechanical have a T. A. Saif,* M. Kuhlenschmidt profound influence on a wide range of cell behavior, such National Science Foundation, ECCS 0725831 as growth, differentiation, apoptosis, gene expression, adhesion, and signal transduction. It is thus important to Cancer related deaths are mostly caused by metastasis of understand how the external mechanical forces are malignant cells, not by the tumor itself. A well-known transmitted into the cell and what corresponding molecular hypothesis is that, during metastasis cancer cells turn off changes they initiate. In this project, we develop a class of adhesion ability, de-adhere from their neighbors, invade bioMEMS-based sensors and actuators for biological and adhere to new host tissues, and form new colonies. If investigations such as cell adhesion at a cellular and adhesion can be tuned, metastasis might be inhibited. The subcellular level in biohabitats where the environmental proposed cancer cell experiments will test the hypothesis conditions—biochemical, electromagnetic, and ambient quantitatively by measuring adhesion strengths between a temperature—are controlled.

* Denotes principal investigator.

8 variety of cancer cells (differing in their metastatic mechanistic pathways for creating highly stable colloidal potention) and a nano patterned substrate. suspensions for drug delivery applications. Three-Dimensional Microvascular Networks Biomaterials J. A. Lewis,* S. White,* W. Wu, R. Shephard U.S. Air Force Office of Scientific Research, Controlled Ring-Opening Polymerization F49620-00-1-0094; National Science Foundation, DMI J. Cheng,* H. Lu 00-99360, DBR-01-177792 University of Illinois Three dimensional (3-D) microvascular networks with Polypeptides are a class of important biomaterials. We pervasive, interconnected channels may find widespread recently developed a group-transfer-ring-opening- application in microfluidic devices, including those used polymerization (GTROP) method that allows facile in biotechnology, autonomic materials, sensors, chemical preparation of polypeptides with well-controlled reactors, and fluidic-based computers. Although molecular weights and narrow polydispersities. This microchannel arrays are readily constructed in two- method may also provide a way for the synthesis of dimensions by lithographic techniques, their construction peptides with controlled sequence in large quantity, which in three-dimensions remains a challenging problem. The cannot be readily achieved using existing chemical and 3-D microvascular networks have been fabricated by biological methods. direct-write assembly of a fugitive organic ink that yields a pervasive network of smooth cylindrical channels (~10– Cytoplasmic Gene Delivery with Modulated 300 μm) with defined connectivity. Research is being Copolymer Micelles pursued to optimize the processing technique, tailor J. Cheng,* R. Tong fugitive ink designs, and characterize the properties of University of Illinois microvascular materials. One of the major hurdles in gene delivery is endosomal Structural Properties of Flexible Polyelectrolytes release of delivery vehicles. We are designing block E. Luijten,* P. Y. Hsiao copolymer micelle with integrated membrane U.S. Department of Energy, DE-FG02-07ER46471 permeability. The membrane permeability can be specifically activated in response to endosomal pH change, In cooperation with the Frederick Seitz Materials resulting in efficient intracellular trafficking and Research Laboratory cytoplasmic delivery of nucleic acid therapeutics. This project is concerned with the structure of flexible Polymer-Drug Nanomedicines for Cancer Therapy polyelectrolytes in aqueous solutions. We aim to resolve J. Cheng,* R. Tong the controversy between competing theories for the University of Illinois collapse and subsequent reexpansion of such chains under the influence of multivalent salt. It is challenging to make nanoparticles with encapsulated chemotherapeutics or proteins with high loading and Structure of Condensed Polyelectrolyte Phases controlled release profiles. We developed nanoconjugation E. Luijten,* R. C. Guaqueta technology that allows the facile incorporation of various University of Illinois therapeutics molecules to degradable polymer We study the properties of condensed phases (bundles) of nanoparticles at any desirable loading. This technique will like-charged polyelectrolytes. It is our aim to closely facilitate the clinical translation of particulate mimic, by means of molecular dynamics simulations, nanomedicine in cancer therapy. systems that are the subject of current experimental Nanoparticle Engineering of Colloidal Suspension research at University of Illinois. A central issue is the role Stability for Drug Delivery of counterion correlations and distributions within F-actin J. A. Lewis,* A. Mohraz bundles, and their effect on the structure of the condensed Hospira phase. We are exploring the use of novel nanoparticle species as stabilizers for hydrophobic colloidal particles in aqueous suspensions. Our specific aim is to identify new

* Denotes principal investigator.

9 Biomineralization and Biomolecular Templates for Electrical Detection of CD4+ Cells from Blood for Nanofabrication Resource Limited Settings (Collaboration with G. C. L. Wong,* H. Liang, L. Yang, S. Slimmer, Harvard University) A. Mishra X. Cheng, Y.-S. Liu, D. Irimia, U. Dimirci, U.S. Department of Energy, Petroleum Research Fund; W. Rodriguez, M. Toner, R. Bashir* National Science Foundation, Nanoscale Science and [email protected] Engineering Center National Institutes of Health In this program, we will use self-assembled biomolecular Conducted in the Micro and Nanotechnology Laboratory systems as nanoreactors for the formation of inorganic CD4 cell counts measure the health of the immune system compounds. The geometric confinement and charge in HIV-infected patients and are essential to diagnose and modulation afforded by these self-assembled "templates" monitor HIV-infected patients. The high-end laboratory allow the synthesis of quantum dots and quantum wires of equipment used in high-end countries is beyond the reach controlled sizes, aspect ratios, and crystallographic of third world resource-limited settings. Prof. Toner’s and orientations. Rodriguez’s groups had developed surfaces functionalized with Abs for the specific capture of the target cells. In BioMEMS and Bionanotechnology collaboration, Prof. Bashir’s group developed a novel technique for electrical detection of the captured cells that Nano-Therapeutics: Bacterial Mediated Delivery of is compatible with large surface area cell capture. Nanoparticles into Cells Silicon Field Effect Device Array for Label Free D. Akin, J. Sturgis, K. Burholder, A. Bhunia, Detection of DNA and Proteins J. P. Robinson, R. Bashir* O. Elibol, B. Reddy, P. Nair, A. Alam, D. Bergstrom, [email protected] R. Bashir* Purdue University [email protected] Conducted in the Micro and Nanotechnology Laboratory National Institutes of Health (NIH); National Science Foundation (NSF) In this project, we demonstrate the integration of two technologies to develop a simple yet powerful method to Conducted in the Micro and Nanotechnology Laboratory deliver genes loaded on nanoparticles, which in turn are In this NIH and NSF funded project, we are working on carried on the surface of bacteria. fabrication, modeling, and selective functionalization of Nano-Therapeutics: Bacterial Mediated Delivery of nanoscale thickness field effect transistors for the label free Nanoparticles into Cells detection of micro-RNAs and proteins. Semiconductor D. Akin, J. Sturgis, K. Burholder, A. Bhunia, based field effect sensing of biomolecules has been shown J. P. Robinson, R. Bashir* to be a promising technology for biomedical diagnostics [email protected] applications. Purdue University Silicon Field Effect Device Array for Label Free Conducted in the Micro and Nanotechnology Laboratory Detection of DNA and Proteins O. Elibol, B. Reddy, P. Nair, A. Alam, D. Bergstrom, In this project, we demonstrate the integration of two R. Bashir* technologies to develop a simple yet powerful method to [email protected] deliver genes loaded on nanoparticles, which in turn are National Institutes of Health (NIH); National Science carried on the surface of bacteria. Foundation (NSF) Conducted in the Micro and Nanotechnology Laboratory In this NIH and NSF funded project, we are working on fabrication, modeling, and selective functionalization of nanoscale thickness field effect transistors for the label free detection of micro-RNAs and proteins. Semiconductor based field effect sensing of biomolecules has been shown

* Denotes principal investigator.

10 to be a promising technology for biomedical diagnostics Nano-Medicine: Use of Phi-29 Packaging RNA applications. for Active Devices J.-M. Moon, D. Akin, C. Mao, P. Guo, R. Bashir* BASIC-Bio-Inspired Assembly of Semiconductor IC [email protected] S. Lee, R. Bashir* National Institutes of Health (NIH) [email protected] National Science Foundation Conducted in the Micro and Nanotechnology Laboratory Conducted in the Micro and Nanotechnology Laboratory A specific project recently funded through NIH Nanomedicine Center involves the use of the Phi-29 In this work a new process called BASIC (Bio-Inspired packaging RNA nanomotor and interfacing this biological Assembly of Semiconductor Integrated Circuits) is motor with micro/nano fabricated devices. The center proposed. The main theme is to use dielectrophoresis and overview can be found at (http://www.vet.purdue.edu/ biochemical molecules for the assembly of useful silicon PeixuanGuo/NDC/). devices on silicon or other substrate. Nano-Medicine: Use of Phi-29 Packaging RNA Electronic Detection of Spore Germination in Micro- NanoMotor for Active Devices fluidic Biochips J.-M. Moon, D. Akin, C. Mao, P. Guo, R. Bashir* Y.-S. Liu, T. Walter, A. Aronson, R. Bashir* [email protected] [email protected] National Institutes of Health (NIH) National Institutes of Health (NIH); USDA Conducted in the Micro and Nanotechnology Laboratory Conducted in the Micro and Nanotechnology Laboratory A specific project recently funded through NIH In the NIH and USDA funded project, we are developing Nanomedicine Center involves the use of the Phi-29 biochips for the concentration, viability and germination packaging RNA nanomotor and interfacing this biological detection, and identification of Bacillus anthracis. We motor with micro/nano fabricated devices. The center have developed a new impedance-based method to detect overview can be found at (http://www.vet.purdue.edu/ germination of spores in real time within microfluidic PeixuanGuo/NDC/). biochips using Bacillus anthracis Sterne spores as the model organism. Cantilever Based Lab on a Chip for Detection of Biological Entities Integrated Microfluidic Devices for Detection of K. Park, A. Gupta, J. Jang, D. Akin, S. Broyles, Microorganisms M. Ladisch, R. Bashir* Y. Liu, S. Bhattacharya, L. Liu, B. Panada, A. Bhunia, [email protected] M. Ladisch, R. Bashir* National Institutes of Health (NIH) [email protected] USDA/ARS Center for Food Safety Engineering Conducted in the Micro and Nanotechnology Laboratory Conducted in the Micro and Nanotechnology Laboratory In this NIH funded project, we are developing integrated devices with cantilever sensors for detection of viruses. This USDA funded project through the Center for Food The virus particles we used in the study were vaccinia Safety Engineering at Purdue is focused on development virus, which is a member of the Poxviridae family and of technology platforms for the detection and identification forms the basis of the smallpox vaccine. We have of live bacteria from food and fluid samples. We have demonstrated the detection of a single vaccinia virus integrated sample preparation, DEP and antibody mediated particle with an average mass of 9.5 fg. capture, and capture and culture of bacteria cells inside microfluidic devices. DNA Nano-Channel Sensors for Single Molecule Detection and Characterization M. Venkatesan, D. Peroulis, R. Bashir* [email protected] NASA/NIH Conducted in the Micro and Nanotechnology Laboratory In this project we have been working on fabrication of nano-pore channels for the direct characterization of single

* Denotes principal investigator.

11 molecules of DNA. The nano-pore channels are fabricated The application of this type of nanomedicine technology in an SOI silicon layer using e-beam lithography and TEM has enormous potential, not only for medical research and beam induced shrinking of the resulting pore. the treatment of cancer in the United States but also for the medicinal plant industry in Pakistan. Applications include DNA Nano-Channel Sensors for Single Molecule high throughput pharmaceutical compound screening, Detection and Characterization molecular diagnostics, polymerase chain reaction (PCR), M. Venkatesan, D. Peroulis, R. Bashir* electrophoresis, label-free microarrays, proteomics, [email protected] environmental detection, and whole-cell assays. NASA/NIH Conducted in the Micro and Nanotechnology Laboratory Biosensors In this project we have been working on fabrication of nano-pore channels for the direct characterization of single Phospholipid Bilayers at Substrates for Polymer molecules of DNA. The nano-pore channels are fabricated Adsorption in an SOI silicon layer using e-beam lithography and TEM S. Granick,* L. Zhang beam induced shrinking of the resulting pore. U.S. Department of Energy, DE-FG02-02ER 46019 Nanomedicine for Cancer Research In cooperation with the Frederick Seitz Materials K. Watkin,* I. S. Ahmad, B. T. Cunningham, A. Abbasi Research Laboratory [email protected] A largely unsolved problem in soft materials is to U.S. Agency for International Development (USAID); understand how surface reconstruction competes with the Ministry of Science and Technology/Higher Education rate of adsorption. Here, we form supported phospholipid Commission of Pakistan bilayers and investigate the subsequent adsorption of Atiya Abbasi; International Center for Chemical Sciences; charged macromolecules. The stark contrast with well- H. E. J. Research Institute of Chemistry; Dr. Panjwani known views of polymer adsorption onto surfaces whose Center for Molecular Medicine & Drug Research; structure is “frozen” and unresponsive is relevant not just University of Karachi from biological and biophysical standpoints but also for Pakistan has the third highest cancer rate of all thirteen formulating many cosmetics and pharmaceutical products. South-Central Asian countries. More than 70% of the The Materials Science of Phospholipid Bilayers developing world's population still depends on the S. Granick,* A. J. Gewirth,* L. Zhang, V. Feng complementary and alternative systems of medicine U.S. Department of Energy, DE-FG02-02ER 46019 (CAM). Evidence-based CAM therapies have shown In cooperation with the Frederick Seitz Materials remarkable success in healing acute as well as chronic Research Laboratory and the Department of Chemistry diseases. The Indo-Pakistan subcontinent is rich in remedial sources, most of which remain untouched. Supported lipid bilayers on planar substrates provide Pakistan is among the eight leading exporters of medicinal model systems to study different physical phenomena on plants. There is a need to build partnerships that help 2-D surfaces with the advantage of a well-defined planar provide the infrastructure and training for the application geometry and, on the practical side, they provide an and utilization of recently developed, new rapid screening environment in which to study polypeptides and membrane techniques for evidenced-based evaluation of various proteins. In this study we quantify, using AFM (atomic medicinal plant extracts. We have developed a new label- force microscopy), how the microstructure of a simple free optical biosensor system for high throughput class of these films evolves during the phase evaluation of proteins and drug candidates. This new transformation process, from liquid crystalline (fluid) to biosensor array system has recently been utilized for rapid solid (gel) phase. evaluation of the breast cancer apoptotic potential of medicinal plant extracts. In order to achieve our vision, we have devised a systematic plan for excellence by concentrating on cancer research and education on the use of label free optical biosensors through integration and translation into medicinal plant research with the H. E. J. Chemistry Institute, University of Karachi.

* Denotes principal investigator.

12 Ceramic Synthesis and Processing Complex Fluids

Concentrated Nanoparticle Inks for Directed Assembly Colloidal Assembly of Microsphere-Nanoparticles of 3-D Periodic Structures Mixtures J. A. Lewis,* R. Rao, J. Yoshikawa J. A. Lewis,* A. Chan, J. Gilchrist National Science Foundation, Nanoscale Science and U.S. Department of Energy, National Nanoscale Initiative, Engineering Center, DMR-01-177792 DE-FG02-01ER45941 We are developing concentrated nanoparticle inks for the In cooperation with the Frederick Seitz Materials direct-write assembly of 3-D periodic structures. Research Laboratory Specifically, we are using robotic deposition to guide A new mechanism for regulating the stability of colloidal materials assembly in a layer-by-layer fashion. By suspensions has been discovered, known as nanoparticle carefully controlling interparticle forces, we can create haloing. Colloidal microspheres suspended under nanoparticle inks with a tailored viscoelastic response conditions near their isoelectric point were stabilized by needed for building complex, 3-D structures that may find the addition of highly charged nanoparticles. Such species potential application as structural or functional composites. segregated to regions near negligibly charged Directed Colloidal Assembly of 3-D Periodic microspheres leading to their effective charge build up. At Composites even higher nanoparticle volume fractions, system stability J. A. Lewis,* R. Rao was reversed due to attractive depletion interactions. By National Science Foundation, Division of Design, engineering the strength of energetic and entropic Manufacturing, and Innovation, DMI-00-99360 interactions via nanoparticle additions, we have assembled colloidal fluid, gel, and crystalline phases from binary We have developed concentrated colloidal inks for the microsphere-nanoparticle mixtures whose structure and direct-write assembly of 3-D periodic composites. flow behavior varies dramatically. Specifically, we are using robotic deposition to guide materials assembly in a layer-by-layer fashion. By Flow Dynamics of Colloidal Fluids and Gels in carefully controlling interparticle forces, we can create Microchannels colloidal inks with a tailored viscoelastic response needed J. A. Lewis,* M. Roberts, K. Christiansen for building complex, 3-D structures that when infilled NSF Center for Nanoscale Chemical-Electrical- with a second interpenetrating phase may find potential Mechanical Manufacturing Systems (NanoCEMMS), NSF application as structural or functional composites. DMI 03-28162 Patterning Colloidal Films via Evaporative We are investigating the effects of colloid size, volume Lithography fraction, and interparticle interactions on the flow and J. A. Lewis,* D. J. Harris jamming behavior of colloidal fluids and gels in U.S. Department of Energy, DE-FG02-91ER45439 microchannels of varying size and geometry. To systematically probe how the profile and 3-D In cooperation with the Frederick Seitz Materials structure of the flowing colloidal media are affected by Research Laboratory such parameters, we are employing a combination of We are studying the effects of film composition and drying microparticle imaging velocimetry (μ-PIV) and confocal parameters on the ability to create patterned colloidal films. microscopy. By controlling interparticle forces and local evaporation Microfluidic Assembly of Patterned Hydrogel Drops kinetics, we are fabricating colloidal films with patterned and Colloidal Granules features at length scales ranging from millimeters to J. A. Lewis,* R. Shepherd, J. Conrad microns. NSF Center for Nanoscale Chemical-Electrical- Mechanical Manufacturing Systems (NanoCEMMS), NSF DMI 03-28162 The microfluidic assembly of colloid-filled hydrogel drops and dried granules of varying shapes and compositions is described. Drops are formed by shearing a concentrated colloidal microsphere-acrylamide suspension in a

* Denotes principal investigator.

13 continuous oil phase using a sheath-flow device. Silica microspheres are synthesized with different fluorescent Energy Systems and cores to allow direct visualization of the process. Both Thermodynamics homogeneous and Janus (hemispherically distinct) spheres and disks are produced by confining the assembled drops Characterization of Transport and Detection of Toxins in microchannels of desired geometry. To preserve their in Single Nanopores drop structure, photopolymerization of an acrylamide- M. A. Shannon,* P. W. Bohn* based hydrogel solution is carried out immediately after [email protected] drop-breakup. Representative drops and granules are National Science Foundation, Center of Advanced imaged using fluorescence and scanning electron Materials for the Purification of Water with Systems microscopy, respectively. Our approach offers a facile (WaterCAMPWS) route for assembling colloid-filled hydrogel drops and dried granules with controlled morphology and The objective is to characterize transport in nanopores by composition. studying the properties of isolated single nanofluidic channels by measuring nanochannel flow and binding Structure and Rheology of Biphasic Colloidal Mixtures characteristics of individual fluorescent probe molecules. J. A. Lewis,* S. Rhodes, A. Mohraz, K. Schweizer A goal is to elucidate mechanisms involved in removal of NSF, Nanoscale Science and Engineering Center, trace contaminates with advanced water purification DMR-01-177792 materials. One fundamental problem that pervades all We are investigating the structure and rheological water purification and reclamation technologies is the properties of biphasic colloidal mixtures composed of both understanding of fluid flow and chemical reactions in attractive and repulsive particles. Our aim is to understand restricted geometries that for structures with nanometer the static and dynamic properties and, ultimately, to characteristic dimensions are fundamentally different than provide guidelines for the next generation of 3-D inks for the same phenomena in their larger m-scale counterparts. direct-write assembly. Therefore, macromolecules may traverse a significant fraction of a nanometer diameter channel while rotating Phase Behavior of Charged Colloidal Mixtures through part of its range, thus significantly changing its E. Luijten,* J. Liu transport and absorption probabilities. The detection of the Intel Corporation macromolecules within these channels, such as toxins in This project pursues a fundamental understanding of water, is also a critical need. To do so, we are developing binary colloidal mixtures in which the constituents exhibit a multicompartment, multimembrane biofluidic device large size and charge asymmetries. Recent experimental with characteristic linear dimensions of nanometers and research has provided evidence for a new mechanism for volumes ranging from tens of attoliters and up, specifically colloidal stabilization in these systems, which may open designed to manipulate species that must be handled at wide areas of applications. Our research focuses on the extremely low . Electrical-impedance spectroscopy development of computational techniques for the (EIS) is being investigated for integration into these investigation of such fluid mixtures. The advantage of the systems. simulation approach is that the various stabilized phases DNA Amplification and Detection Chip are accessible at the molecular level, permitting a M. A. Shannon* simultaneous study of structural and thermodynamic [email protected] properties. The resulting insight can contribute to the Akonni, Inc. rational design and tailoring of colloidal suspensions. The objective of this research is to develop a new, rapid method of amplifying DNA using polymerase chain reactions (PCR). The PCR chip uses a new micro- nanofluidic device based on the molecular gate, in which multiple types of gates are integrated with PCR reaction chambers to enhance amplification rates, as well as a separation system with electronics and optical systems for detection of completed DNA structures. The device and approach include on-chip heating and cooling,

* Denotes principal investigator.

14 incorporating advances in biomolecular tagging and recognizing a multiplicity of compounds, making on-chip General Engineering: Bioengineering analysis of the wide range of biological warfare agents a Embryonic Development in Integrated Microfluidic practical reality. Systems M. B. Wheeler,* S. G. Clark, S. Rodriguez-Zas Experimental Biological and U.S. Department of Agriculture; National Institutes of Health (NIH); Council for Food and Agricultural Biomolecular Physics Research (C-FAR); University of Illinois NIRT: Single Molecule Detection in Living Cells using The work focuses on identification of embryo viability Carbon Nanotube Optical Probes using microfluidics and microelectromechanical systems. M. Strano (Chem. Biomol. Engr.), T. Ha,* K. J. Schulten The objectives are to develop prototype microscale National Science Foundation 07-08459 systems for the handling and evaluation of individual embryos and to demonstrate the use of these systems using The goal of this project is to investigate and utilize optical mammalian embryos. The present research is aimed at the transduction mechanisms at the single nanotube level. development of technology that will allow study of single Researchers will develop design rules for macromolecular cell/embryo biology utilizing integrated embryo transport, assembly onto carbon nanotubes by calculating culture, and NMR analysis systems. intermolecular potential functions and simulating optical properties. Kinetic theory and molecular modeling will assist our project in optimizing the strategies for SWNT High Frequency Devices coating, cellular uptake, and signal enhancement. Theory and modeling will be integrated into the entire 38-GHz Ion Implantation GaAs MESFET Technology development effort, providing guidance for selection of Transfer Program biomolecules chosen for coating, explaining the M. Feng,* J. Middleton, S. K. Hsia mechanism of nanotube internalization and trafficking, and Northrop Grumman Corp.; M/A-Com/Amp furnishing the quantum mechanical theory for nanotube Conducted in the Micro and Nanotechnology Laboratory optical spectra and their interpretation in terms of nanotube-adsorbate interactions. This project is aimed at the technology transfer of the University of Illinois 0.25 μm gate GaAs MESFET for Sequencing a DNA Molecule Using a Synthetic 24-GHz and 38-GHz MMICs for LNA and VCO to Nanopore M/A-Com. for low-cost production. G. L. Timp,* J-P. Leburton (Elect. & Comput. Engr.); A. Aksimentiev, K. J. Schulten, S. Sligar (Biochem.) 50-GHz Ion Implanted GaAs MESFET National Institutes of Health, R01 HG003713 M. Feng,* H. Hsia, Z. Tang, D. Beecher TriQuint Semiconductor In collaboration with Beckman Institute for Advanced Science and Technology Conducted in the Micro and Nanotechnology Laboratory This project explores the feasibility of sequencing a DNA This program is to study the 50 GHz to 100 GHz ion molecule using a revolutionary type of silicon integrated implanted GaAs MESFET for millimeter-wave integrated circuit that incorporates a nanopore mechanism with a circuit application. molecular trap through a combination of experimental and 50-GHz Ion-implanted Enhanced/Depletion/Power theoretical approaches. GaAs MESFETs Fast and affordable technology for sequencing DNA has M. Feng,* H. Hsia, D. Becher, Z. Tang, J. J. Hwang, the potential to revolutionize medicine by providing a S. Shen means for accurate diagnostics of about 6,000 genetic and Network Device Inc. multifactorial diseases, and for tailoring drugs and Conducted in the Micro and Nanotechnology Laboratory treatments to the person's genetic makeup. This project is to develop enhancement mode, depletion mode, and power mode (E/D/P) GaAs MESFETs operated at 50 GHz.

* Denotes principal investigator.

15 50-GHz Self-Aligned Gate MESFETs Center of Hyper Uniform Nanophotonic Technologies M. Feng,* D. Becher, D. Caruth for Ultrafast Optoelectronic Systems Vitesse Semiconductor Corp. M. Feng,* R. Chan, K. Cimino, W. Hafez, F. Dixon [email protected] Conducted in the Micro and Nanotechnology Laboratory Defense Advanced Research Project Agency HUNT We have investigate Vitesse self-aligned gate MESFET for Program the analog applications in term of noise gain and power. Conducted in the Micro and Nanotechnology Laboratory We have compare performance with the University of Illinois realigned gate FET with Vitesse and to understand The goal of this project is to develop new optical source device improvement issues. laser and LED using light emitting transistors modified by quantum well base and DBR to achieve high speed ADC Circuit Design on a Sigma-Delta Modulator modulation of optical interconnect. M. Feng,* M. Heins, D. Barlage U.S. Army Research Office, DAAH04-96-0218 (Intel Development Materials for GaN-Based Minority- Fellowship) Carrier Power Electronic Devices for Advanced DoD Systems Conducted in the Micro and Nanotechnology Laboratory M. Feng,* J. Lai, K. Price This project is aimed at design of 3 Gbit/s for an 8-bit ADC. Defense Advanced Research Projects Agency, GaN Power Our first goal is to design the subcircuits library of Program (under UTA team-Prof. Russel Dupuis) comparator, sample, and hold circuit and OA design of an Conducted in the Micro and Nanotechnology Laboratory ADC. This program is to study material interface of AlGaAs/GaAs HBT Modeling heterjunction, minority carrier transport property in GaN M. Feng,* P. Mares, M. Hein HBT system, since HBT provides high linearity and high Rockwell Microelectronics, Inc. efficiency power amplification. Conducted in the Micro and Nanotechnology Laboratory Digital Radar Receiver This project aims to establish a useful SPICE model for M. Feng,* J. Fendrich HBT integrated circuits application. Our approach is based Mayo Foundation; Defense Advanced Research Projects on 45-MHz to 50-GHz bias-dependent microwave data Agency collection on an HBT device using HP-ICCAP. Conducted in the Micro and Nanotechnology Laboratory Temperature-dependent microwave data collection will be included in the model. This project performs the design and fabrication of an RF front end (400-700 MHz) fully tunable receiver system. CAD Design Tools for an Integrated Millimeter-Wave We are working closely with the Mayo Foundation Wireless Communication Microsystem MIT-Lincoln Lab and Defense Advanced Research M. Feng,* S. C. Shen, J. J. Hwang, M. Heins Projects Agency to build two brassboard RF receiver front Defense Advanced Research Projects Agency, ends for digital radar applications. F30602-97-2-0328 Direct Ion Implantation GaAs MESFETs In collaboration with C. Liu. Conducted in the Micro and M. Feng,* H. Hsia, Z. Tang, D. Becher, S. Shen Nanotechnology Laboratory. GaAstronics Co. We are developing CAD capabilities for a gigahertz Conducted in the Micro and Nanotechnology Laboratory wireless communication and distribution microsystems. We are also developing scalable MMIC modules with This project is to develop low-cost ion-implanted GaAs integrated MEMS components. MESFETs for 5.8-GHz MMICs. GaAs- and InP-Based HBT Reliability M. Feng,* D. Barlage, M. Heins U.S. Army Research Office, DAAH04-94-0369 Conducted in the Micro and Nanotechnology Laboratory This project is to set up an HBT reliability test. HBT reliability has become a major issue because of

* Denotes principal investigator.

16 heterostructure interface and fast diffuse p-type impurities InGaAs/InP BiFET for ADC Applications in both InP- and GaAs-based HBTs. We will test HBT M. Feng,* D. W. Seo, H. Hsia, Z. Tang devices from Rockwell, Hughes, and TRW for the basic Defense Advanced Research Projects Agency, N66001-97- failure mechanism. C-8618 GaN HBT Technology Conducted in the Micro and Nanotechnology Laboratory M. Feng,* J. J. Huang We have developed a 200-GHz InGaAs/InP HFET and U.S. Navy, UTA 99-0302 integrated it with a 200-GHz HBT. Using this technology, Conducted in the Micro and Nanotechnology Laboratory we will construct a fifth-order Sigma-Delta ADC for a 16-bit and 3 FDR > 100 dbc. GaN has great potential to be a power source in millimeter wave ICs and high-speed electronics due to its large InGaP HBT for ADC Applications breakdown voltage and higher saturation velocity. In M. Feng,* D. W. Seo, J. Mu, M. Heins collaborate with Prof. Dupuis at the University of Texas at Defense Advanced Research Projects Agency, N66001-96- Austin, we have fabricated GaN HBT with beta >100. C-8615 There are many problems to be solved in terms of current Conducted in the Micro and Nanotechnology Laboratory and power efficiency issues at millimeter wave frequency. We are developing an InGaP HBT device model (thermal High-Frequency Measurement Project on High-Tc and electrical model) for implantation into MDS and Superconductor HSPICs. The second-order Sigma-Delta ADCs with 5 M. Feng,* J. Fendrich, H. S. K. Hsia Gbits and 8-bit resolution has been designed, simulated, National Science Foundation, DMR 89-20539 and fabricated. In conjunction with the Science and Technology Center for Intelligent Vehicle Highway System Chip Sets (II) Superconductivity. Conducted in the Micro and (IVHS) Nanotechnology Laboratory. M. Feng,* H. Hsia This project has contributed to the study of BKBO and Northrop Grumman Corp. YBCO film characterization at microwave and terahertz Conducted in the Micro and Nanotechnology Laboratory frequencies. A parallel-plate resonator (10 GHz) was built to characterize sheet resistance in the microwave This project is a follow-up of the TRP/DARPA contract frequency. A noncontact coherent time-domain based on the success of the University of Illinois 24-GHz spectroscopy (THz) was used to characterize real and and 38-GHz GaAs MESFET MMIC for LNA and VCO. imaginary parts of conductivity. An on-wafer cryogenic The new contract is aimed at low-cost implementation of microwave probing technique (1-40 GHz, 15-300K) is a 0.1 μm gate GaAs MESFET and MMIC by direct ion employed to establish patterned film scattering parameter. implantation for 77-GHz LNA and VCO collision This work also aims to develop engineering model avoidance radar. parameters using a GHz on-wafer probe technique. Intelligent Vehicle Highway System Chip Sets (IVHS) Hybrid and Monolithic OEIC Receivers M. Feng,* P. Apostolakis, J. Middleton M. Feng* Northrop Grumman Corp. Defense Advanced Research Projects Agency, Center for Conducted in the Micro and Nanotechnology Laboratory Optoelectronics Science and Technology This project is a joint development effort between the Conducted in the Micro and Nanotechnology Laboratory University of Illinois and Northrop Grumman Corp. on This project is aimed at hybrid integration of a PIN/GaAs millimeter-wave IC chip sets for IVHS. We will design transimpedance amplifier at 20 GHz operation. The transmitter, receiver, mixer, and oscillator millimeter- monolithic IC is involved in design and fabrication of wave ICs using co-planar technology. The mask and 4-channel OEIC receivers using GaAs MESFET fabrication will use University of Illinois ion implanted, technology. super-low-noise GaAs MESFETs, and a monolithic IC process.

* Denotes principal investigator.

17 Millimeter Wave Technology HBT and HFET frequency device characterization, an equivalent circuit M. Feng* model will be generated. This model will then be used for Sumitomo Chemical America, Inc. MMWIC design. The fabrication of the MMWICs will be demonstrated. Conducted in the Micro and Nanotechnology Laboratory Noise Characterization of Self-Aligned Gate GaAs We will design and fabricate MOCVD-grown, doped MESFETs channel HFETs and InGaP and AlGaAs HBTs. We will M. Feng* characterize these devices and optimize their performance ITT Corp. for 24- to 77-GHz applications. Conducted in the Micro and Nanotechnology Laboratory Millimeter-Wave ICs and Packages M. Feng* This project aims to reduce the minimum noise figure on Georgia Institute of Technology, NSF Package Research the direct ion-implanted self-aligned GaAs MESFETs Center based on the design of experiments in terms of dose and gate overlay. Conducted in the Micro and Nanotechnology Laboratory Novel Giga Sampling Analog-to-Digital Conversion for This project is to develop 38-GHz and 77-GHz coplanar Direct Digital Receiver MMICs for flip chip packages. M. Feng,* D. W. Seo MOCVD HEMT Technology National Science Foundation, ECS-9979341 M. Feng,* Z. Tang Conducted in the Micro and Nanotechnology Laboratory Sumitomo Chemical America, Inc. We proposed novel GHz ADC architecture, the folding and Conducted in the Micro and Nanotechnology Laboratory interpolation-based 15-bit subrange A/D converter, will We will investigate the performance of MOCVD grown reduce the transistor count by one-third and the area by P-HEMT and HEMT technology and its performance 60%. The subrange ADC requires a very precise and wide- comparison between MESFETs and MBE-grown HEMTs. band track and hold amplifier to maximize input bandwidth Modeling of Flip Chip Interconnects for RF/Wireless to great than 2 GHz and converter resolution to greater than M. Feng,* J. Schutt-Aine 15 bits. Georgia Institute of Technology, NSF ERC Package Optical Correlation Spectroscopy Using Research Center, SBC GIT E21-N50-G5 Reconfigurable Diffraction Grating Conducted in the Micro and Nanotechnology Laboratory M. Feng,* Q. He, K. F. Chen, J. J. Huang Defense Advanced Research Projects Agency Center The next generation of wireless personal communication (DARPA) BOSS Program, MDA972-00-1-0020 links and wireless LAN and WAN will be focused in the millimeter wave range due to wide bandwidths and less Under Defense Advanced Research Projects Agency interference effects. This work is to develop a low-cost Center for Bio-Optical Sensor System. In collaboration solution of millimeter-wave MMICs flip chip technology. with K. Y. Cheng. Conducted in the Micro and This work will provide the design, simulation, and process Nanotechnology Laboratory. of MMICs operating at 38 GHz for a real application in Sponsored by DARPA, the goal of this program is to point-to-point communication links. The Georgia Tech develop a nano spectrometer for biological and chemical PRC will provide the flip chip package technology. agents detection. Our group is to design and fabricate re- Monolithic Millimeter-Wave Integrated Circuits configurable grating using novel MEMS switch. It is Technology capable of detecting 3-10 μm wavelength. M. Feng* Northrop Grumman Corp. Conducted in the Micro and Nanotechnology Laboratory This project is a joint effort with Northrop Grumman Corp. for developing 0.25 μm gate and 0.1 μm gate GaAs FET- based technology for the application in monolithic millimeter wave ICs (MMWICs). Based on the high-

* Denotes principal investigator.

18 Technology for Efficient, Agile Mixed Signal YBCO Superconducting Transmission Line Microsystems Characterization M. Feng,* R. Chan, K. F. Chen, W. G. Ho M. Feng,* J. Fendrich Defense Advanced Research Projects Agency, TEAM Superconductor Technology Inc. Program Conducted in the Micro and Nanotechnology Laboratory Under BAE Systems and collaboration with Greg Timp. This project studies the design rule of MCM using a Conducted in the Micro and Nanotechnology Laboratory. superconductor as an interconnect line. Loss and phase The goal is to develop silicon RF CMOS with Ft and Fmax delay are compared between gold and the superconductor > 400GHz with 20 nm gate. The RF mixed signal circuits line. Bit-error-rate and crosstalk will also be examined. will be developed based the fastest RF CMOS technology. Technology for Frequency Agile Digitally Synthesized Magnetic Resonance Transmitter M. Feng,* J. Lai, M. Hafez, M. Hampson, D. Chan, Nanoliter Volume Nuclear Magnetic Resonance B. Chu-Kung J. V. Sweedler, A. G. Webb* Defense Advanced Research Projects Agency TFAST National Institutes of Health, PHS 2 RO1 GM53030-04 Program Conducted in the Beckman Institute for Advanced Science Under BAE Systems and Vitesse Semiconductor. and Technology Conducted in the Micro and Nanotechnology Laboratory. This project designs NMR microcoils for studying The goal of this research is to develop InP DHBT with Ft chemical separation processes, and involves the and Fmax > 500 GHz with sub-micron scaling of emitter construction of multicoil probeheads. size down to 0.1 micron. The technology is also required to demonstrate Flip-Flop speed over 200 GHz. A VLSI InP technology of over 10,000 transistor level of mixed signal Materials direct digital synthesizer (DDS) will be developed. Improved Metal Catalysts with Properties Controlled VCSEL and Smart Pixels for VLSI Photonics by Semiconductor Band Engineering M. Feng,* N. Holonyak, Jr., K.-Y. Cheng, K. C. Hsia E. G. Seebauer,* S. Ong, M. Kratzer Defense Advanced Research Projects Agency, Singapore A*STAR, University of Illinois at Urbana- DAAG55-98-1-0303 Champaign Partnership Program Conducted in the Micro and Nanotechnology Laboratory Catalysts with metals on semiconducting oxides have This project is focused on developing oxide confined proven to be quite useful for applications in fuel cell VCSELs at 85 nm and 1330 nm, as well as smart pixels for cathodes and hydrogen production. This project seeks to VSLI photonics. employ principles routinely used in the design of nanoscale integrated circuits to circumvent these problems. Such Wavefunction Engineering of Individual Donors for Si- devices often use “heterojunctions,” which are structures Based Quantum Computers in which two different kinds of semiconductors are M. Feng,* R. Chan, C. Chuang sandwiched together. Such heterojunctions form the basis Defense Advanced Research Projects Agency, Quantum of laser pointers, but we believe the same principles can be Computer Program, DAAD19-01-1-0324 employed with oxides of metals such as titanium, zinc, and In collaboration with John Tucker. Conducted in the Micro iron to make “catalyst heterostructure” devices. In and Nanotechnology Laboratory. particular, this work seeks to employ principles of semiconductor band engineering to deliberately control the The goal is to place individual phosphorus donors into electronic structure of metals in compound catalysts. An silicon with atomic precision, demonstrate electronic entirely new class of catalysts is being created, in which control over wavefunction overlap, and characterize the nanoscopically thick layers of metal are deposited atop spin singlet and triplet states of the two-electron system on semiconductor substrates. The substrate type and doping couple donor pairs. level will be chosen to tune the surface properties of the metal by the “Schwab effect.” Quantum calculations by density functional theory will be used to help predict the

* Denotes principal investigator.

19 type of semiconductor and doping to use for the substrate, New Methods for Defect Manipulation in as well as the thickness of the metal required. The requisite Semiconducting Oxides structures will then be created by deposition methods E. G. Seebauer,* A. Hollister drawn from microelectronics processing, and the National Science Foundation, DMR 07-04354 properties of the semiconductor-metal catalysts will be Through experiments and modeling, we seek to develop characterized by optical and electron-based methods. entirely new forms of defect manipulation in oxide Improved Photocatalysts with Properties Controlled semiconductors using surfaces. Solid-state diffusion by Semiconductor Band Engineering measurements have quantified how surfaces react with E. G. Seebauer,* M. Kratzer bulk point defects such as interstitial atoms and vacancies. National Science Foundation, DMR 07-04354 The chemistry is comparable in richness to the reactions of surfaces with gases. Up to now, little attention has been The microelectronics industry has developed principles for paid to this alternative form of surface chemistry, even the design of metal/semiconductor structures to obtain though it can play a primary role in regulating bulk defect novel and controllable electrical behavior in integrated concentrations. In semiconductors, bulk-surface coupling circuits. Many of these principles should be adaptable to occurs through electrostatic and surface bond insertion/ obtain novel and controllable chemical behavior in generation mechanisms. The science base to be developed catalysts. This work seeks to demonstrate how to employ here should offer entirely new possibilities for controlling the notion of electronic band engineering in bulk defects in a wide variety of applications. Such defect semiconductors to create an entirely new class of catalysts manipulation might also be helpful for energy production with controllable properties. Since metal oxide catalysts by semiconductors using solar power (e.g., water splitting), are semiconductors that can support electrical charge where electron-hole recombination rates in the fabricated distributed in space, it is possible for surface electronic devices are affected by the concentrations of bulk defects properties to couple to bulk electronic properties. We left over from device fabrication. believe the electronic band structure of the underlying support can be tailored to beneficially affect the electronic Multifunctional Nanocomposites Based on Single properties (average charge state, reducibility, and so forth) Walled Carbon Nanotubes of the free surface. Successful demonstration of such M. S. Strano,* R. Graff, J. Swanson structures would have broad applications in environmental United States Air Force 2 photocatalysis by TiO . Carbon nanotubes are the strongest molecular fibers Measurement of Illumination Induced Diffusion in realized to date. Single nanotube tensile strengths exceed Oxide Semiconductors 1 TPa. Our interest is in the synthesis of ultra-strong E. G. Seebauer,* R. Vaidyanathan composites with multiple functionalities, such as Applied Materials embedded electronics, electromagnetic absorption for shielding, and electromechanical modulation. To The present work seeks to develop entirely new forms of accomplish this, nanotubes need to be dispersed into a defect manipulation in oxide semiconductors, such as matrix at the single molecule level. We are developing new titanium dioxide, based on optical stimulation of defect fabrication techniques that allow unprecedented control of formation and migration. Diffusion measurements have nanoscale interfaces for the next generation of “smart” shown that defect mobilities and concentrations can be materials. nonthermally modulated in semiconductors by super-band gap illumination. Specially synthesized structures are used Assembly of Nanoparticles to measure motion of vacancies and interstitial atoms. C. F. Zukoski,* E. Mock Quantification is accomplished through detailed U.S. Department of Energy, DEFG02-91ER45439 continuum modeling backed by characterization of near- In cooperation with the Frederick Seitz Materials surface electric fields through optical photoreflectance. Research Laboratory Particles with anisotropic interactions are synthesized and used to assemble novel microstructures. Using novel synthesis techniques we control the physical and chemical anisotropy of particles, with the goal of studying how anisotropy affects microstructural arrangements. Links

* Denotes principal investigator.

20 between particle microstructure and macroscopic optical Synthesis and Characterization of Nanostructured and rheological properties are studied. We are interested in Alloys with Enhanced Mechanical Properties how anisotropy can be used to engineer novel complex J. R. Abelson,* N. Kumar, P. Bellon,* A. Chaterjee particle arrangements. National Science Foundation, NSF-DMR 03-54060 Microstructure and Mechanics of Filled Polymer Melts Metal diboride thin films are developed into a novel hard C. F. Zukoski,* B. J. Anderson coating technology. We have demonstrated superhard Nanoscale Science and Engineering Initiative of the films of HfB2: with a grain size of only 5 nm, the films National Science Foundation, NSF Award No. have a nanoindentation hardness of 40 GPa, exceeding the DMR-0117792 bulk value of 29 GPa. The Young's modulus of the films is adjusted by alloying with nitrogen during growth. Recent We explore the effects of polymer molecular weight, work explores the wear properties using pin-on-disc tests, nanoparticle volume fraction, and polymer-particle surface including the formation of chemically mixed layers at the affinity on the microstructure and mechanics of filled wear interface, as well as nanoscratch methods. polymer melts. The design of these materials is often hindered by inadequate particle dispersion resulting in low Polyelectrolyte Inks for Directed Assembly of 3-D product performance. Thus, these studies are conducted to Periodic Structures understand the stability and behavior of nanoparticles J. A. Lewis,* M. Xu, S. Parker dispersed in high molecular weight solvents. A variety of U.S. Department of Energy, DE-FG02-91ER45439 phases are expected as molecular weight, volume fraction In cooperation with the Frederick Seitz Materials and surface affinity are varied: homogeneous fluid, phase Research Laboratory separation, or nonequilibrium gel. Materials are characterized through scattering and rheological We are developing concentrated polyelectrolyte inks for techniques. the direct-write assembly of 3-D micro-periodic materials. Specifically, we are using robotic deposition to guide materials assembly in a layer-by-layer fashion. By Materials Chemistry carefully controlling electrostatic forces between anionic and cationic polyelectrolytes, we can create polyelectrolyte Metal Boride Thin Films: Synthesis of New Molecular inks with a tailored viscoelastic response needed for Precursors and Growth by Remote-Plasma CVD building complex, 3-D structures at the microscale (lattice J. R. Abelson,* Y. Yang, N. Kumar, S. T. Lazarz, constant ~1 micron). Such structures may serve as G. S. Girolami* (Chem.), D. Kim, W. Noh, C. Spicer templates for nanoparticle assembly, photonic band gap National Science Foundation 0420768; Intel materials, or as scaffolds for tissue engineering. We synthesize new single-source precursors and deposit Sol-Gel Inks for Direct-Write Assembly of 3-D Micro- thin films of the "metallic ceramic" compounds ZrB2, Periodic Structures HfB2, and CrB2 that are technologically attractive as hard, J. A. Lewis,* E. Duoss, M. Twardowski wear-resistant coatings and as diffusion barriers in ULSI U.S. Army Research Office, DAAD19-03-1-0227 microelectronics. We also deposit films of the 39K superconductor MgB2. Our approach, remote-H2 plasma We are developing concentrated sol-gel inks for the chemical vapor deposition, combines the best features of directed assembly of 3-D micro-periodic materials. the chemical and physical deposition routes: the high rate Specifically, we are using robotic deposition to guide and conformal coverage characteristic of CVD, and the low materials assembly in a layer-by-layer fashion. By substrate temperature characteristic of PVD. The research carefully controlling the ink and reservoir chemistry, we includes analysis of the growth chemistry using real-time can build complex, 3-D structures at the microscale (lattice spectroscopies and evaluation of the resulting film constant ~1 micron). Such structures may serve as properties and performance. templates for nanoparticle assembly, photonic band gap materials, or as scaffolds for tissue engineering.

* Denotes principal investigator.

21 Synthesis and Assembly of Photoresponsive Colloids implemented in distributed fashion within electronic J. A. Lewis,* A. Mohraz, J. Conrad, J. Moore architectures. U.S. Department of Energy, DE-FG02-91ER45439 Microscale Systems for Nanomanufacturing In cooperation with the Frederick Seitz Materials P. J. A. Kenis,* M. A. Shannon, B. R. Schudel, Research Laboratory M. C. Cole, C. Gupta National Science Foundation, DMI 03-28162, Nanoscale Colloidal suspensions enjoy widespread use in Science and Engineering Center (NSEC) applications ranging from advanced materials to drug delivery. By tailoring the interactions between particles, The overall goal of Nano-CEMMS, the National Science one can design colloidal fluids, gels, or crystals needed for Foundation NSEC grant here at Illinois, is the development ceramic, coating, ink, photonic, and pharmaceutical of fluidic and ionic-based nanomanufacturing technology. materials. One common strategy is to alter their We identified the critical parameters that determine the electrostatic interactions by varying either the pH or ionic amount of fluid (e.g. ink) transferred from one surface to strength of the solution in which they are suspended. the next for substrates of different hydrophilicity. However, problems such as non-uniform mixing and Subsequently, we used this knowledge to print droplets as disruption of suspension microstructure arise when acid, small as 70 femtoliter in a two-step procedure starting from base, or electrolyte species are added. The ability to tailor microliter-sized droplets. We also created multiplexed electrostatic interactions between colloids with spatial and arrays of electric sensors (resistive, capacitive, conductive) temporal control in the absence of chemical additions to track plugs of fluid (e.g. ink) through a microfluidic would not only alleviate these problems, but also open new network, enabling feedback control of these plugs being possibilities in colloidal assembly. In this project, we focus routed to a certain nozzle in a multinozzle on a new approach for modulating the surface charge of nanomanufacturing toolbit. The multiplexing concept colloidal particles, and hence their electrostatic dramatically reduces the number of leads required to interactions, by irradiation with UV light. Specifically, monitor events in an mxn sensor array, specifically from photo-cleavable self-assembled monolayers (SAMs) are 2xmxn to m+n+1; so for a 10x10 array, from 200 to 21 being developed that enable us to create photoresponsive leads. In addition, we integrated novel microfluidic colloids. Currently, we are investigating their surface networks comprised of nanoliter-sized wells with photonic properties as a function of SAM chemistry, UV exposure crystal-based biosensors for the combinatorial synthesis time, and solution properties as well as exploring their and screening of drug leads (with B. Cunningham). Part of phase behavior, 3-D structure, and assembly. the latter effort is the successful development of actuate- to-open valves that are closed in rest, highly desirable for Microchemical, Microfluidic, and experiments that take a long time. Presently we are pursuing the manufacturing of fully integrated Nanochemical Systems microfluidic chips for multinozzle manufacturing toolbits through heterogeneous integration and transfer printing Distributed Nano Fuel Cells Compatible with approaches. Transistor Fabrication P. J. A. Kenis,* P. O. Lopez-Montesinos Microstructure Characterization Grainger Program Most present fuel cell technologies use polymer electrolyte Nanoscale Order in Amorphous : Structure, membranes such as Nafion to separate the anode and Transformations, and Electronic Properties cathode compartments. While these fuel cell technologies J. R. Abelson,* S. N. Bogle, T. Li hold promise to replace other power sources, most notably National Science Foundation, DMR-06-05890 batteries, their introduction to the market has been This focused research group is a broad-ranging effort to seriously hampered by issues related to these membranes, understand nanometer-scale medium range order (MRO) most notably fuel crossover, catalyst leaching, anode dry- in amorphous semiconductors and glassy materials, out, and cathode flooding, all leading to reduced including its origins, structure, and electronic effects. We performance. Here, we develop silicon-based microfuel employ the fluctuation electron microscopy technique to cells in which the membrane has been replaced with evaluate whether solids that appear to be amorphous in microfabricated structures, such that it can be fabricated diffraction in fact contain MRO. We have demonstrated side-by-side with electronic elements, and thus * Denotes principal investigator.

22 that amorphous silicon cannot be described by the NER: Manufacturing of Superionic Active Metallic continuous random network model, but is paracrystalline, Nanostructures defined as the small grain size limit of nanocrystallinity. N. Fang,* P. M. Ferreira We are currently investigating the MRO in compounds, National Science Foundation including chalcogenide glasses and transition metal This project will exploit an innovative nanomanufacturing diborides. process, solid-state superionic stamping to realize a suite Microstructural Acoustics and Picosecond Ultrasonics of ionically modulated active nanostructures. The J. A. Rogers* convergence of this electrochemical nanoimprint University of Illinois technique with the nano-ionic devices with enhanced transduction and information processing using superionic Picosecond pulsed lasers provide a convenient source of conductor materials opens up new routes to economically acoustic waves with frequencies in the GHz range and with viable, active nanostructures. Specifically the team will be wavelengths between one and several hundred microns. exploring: tunable nanowire resonators/antennae for THz This project seeks to develop and use these laser-based frequencies; plasmonic devices for sensing sub-femtoliter tools to study the high frequency acoustic responses of analyte; and mechanical actuators that require dramatically structures with characteristic dimensions that are similar to lower voltages and operate with much faster strain rate that the acoustic wavelengths: thin films and membranes, are amenable to harsh environments. In addition, we will multilayer stacks, phononic crystals, microfluidic undertake fundamental research in computational and networks, and so forth. Analysis of these measurements experimental characterization of ionic transport in (solid- yields intrinsic mechanical and thermal properties on state) superionic conductors at nanoscale, leading to a micron length scales. These methods also can be used for fundamental understanding of nanostructure growth by basic studies of phononic bandgaps and other interesting ionic conduction and strategies to actively control and acoustic phenomena. modulate it. Nano-, Micro-, and Meso-Technology Probing Molecular Scale Thermal Electric Conversion by Superionic Nanowires N. Fang* Development of Electrochemical Imprint Machine for Richard W. Kritzer Research Grants Solid-State Superionic Stamping N. Fang,* P. M. Ferreira In this project, we propose a novel biomimetic approach Grainger Emerging Technology utilizing superionic nanowires for effective thermal electric sensors. We expect that the nanoscale confinement We are developing a solid-state electrochemical will effectively reduce noncoherent scattering and nanoimprint machine to exploit the novel direct metal facilitate ballistic charge transport in the nanowires, as patterning capabilities of solid-state superionic stamping already demonstrated in semiconductor thermal electric (S4). This electrochemical imprint machine, the first of its devices. The study focus will include the molecular scale kind, will produce metallic nanostructures with better that origin of this novel effect that could potentially lead to new 50 nm features in films ranging in thickness from 50 to 500 forms of energy harvesting systems. nm with an imprint area of 2 square inches. The building, testing and demonstration of such a machine are essential Solid State Electrochemical Nanomanufacturing steps in the commercialization of the S4 process. It answers N. Fang,* P. M. Ferreira* questions about the large-area, high-throughput, [email protected] automation of the S4 process while, at the same time, NSF Center for Nanoscale Chemical-Electrical- providing a viable platform for commercialization of the Mechanical Manufacturing Systems (NanoCEMMS) demonstrated capability of the S4 process in patterning 50 This project proposes a revolutionary approach, based on nm features. room-temperature solid state ionic (superionic) conductors that enable the fast and reversible growth and dissolution of metallic (specifically silver and copper) nanoclusters, to achieve active and reprogrammable nanopatterning. It offers a highly competitive approach, both as a stand-alone process and as a complement of other nanofabrication

* Denotes principal investigator.

23 techniques, in fabricating chemical sensors, photonic and Characterization and Modeling of Cr3C2-Ni Cermets plasmonic structures, and electronic interconnects. I. Jasiuk,* I. Hussainova (Tallinn Univ. of Tech., Solid-State Superionic Stamping (S4) for Direct Digital Estonia) Micro- and Nano-Patterning of Metals [email protected] N. Fang,* P. M. Ferreira University of Illinois at Urbana-Champaign Office of Naval Research, Naval Research Labs Experimental investigation of chromium carbide based In this project, we propose to develop a solid state ionic Cr3C2-Ni cermets with different compositions uses several manufacturing technique into a direct digital experimental approaches: scanning electron microscopy to manufacturing tool for a range of functional metallic obtain microstructure information, EDS to identify special structures such as antennae, chemical sensors, and chemical composition, and nanoindentation technique to plasmonic structures that promise exciting applications to obtain local mechanical properties. These ceramic-metal navy and more general defense science and technology. composites consist of 80% (by weight) of ceramic Cr3C2 phase and the 20% (by weight) of Ni-based binder phase. Development of a Microtransfer Printing Machine- The binder phase is either pure nickel or nickel combined Tool with Applications to Flexible Solid-State Lighting with either molybdenum or copper. Local spatially varying P. M. Ferreira,* J. Rogers* (Mat. Sci. & Engr.), elastic modulus and hardness are measured for using the P. Elvikis, J. Dong nanoindentation. Modeling involves micromechanics National Science Foundation, DMI-0328162 (through approaches to determine constitutive model response of Nano-CEMMS); Ford Motor Company such materials. Microtransfer printing, a process developed by Professor Characterization and Modeling of Polymer Matrix J. Rogers and his collaborators, is used to transfer prints' Nanocomposite Materials microscale solid structures from donor substrates to I. Jasiuk* various receiving substrates, thus enabling the integration [email protected] of microstructures and devices of different materials that University of Illinois at Urbana-Champaign are ordinarily difficult to co-process. This project addresses the development of an automated printer that Polymer matrix composites with the same volume fraction allows for large-area printing of flexible solid-state of nano and micron size reinforcement are considered in lighting panels. order to assess how the size of reinforcement contributes to the overall mechanical properties. Characterization tools Fabrication and Testing of MEMS-Scale Parallel- include electron microscopy to assess the arrangement and Kinematic Stages size distribution of particles. Then, we conduct P. M. Ferreira,* J. Dong, D. Mukhopadhyay, nanoindentation measurements to determine local J. Luebbering properties. Tensile testing focuses on mechanical National Science Foundation, DMI-0422687; properties such as elastic modulus, ultimate strength, DMI-0328162 (through Nano-CEMMS); ONR (through fracture toughness, and strain to failure. Modeling includes TRECC) the micromechanics continuum-based analysis and MEMS-scale ultra-precision positioning stages find molecular level simulations. applications in metrology, processing, in-situ testing, and High Speed Large-Area Nanoimaging using Probe single-cell biological studies. This effort focuses on the Arrays design and characterization of stages that can be fabricated W. P. King,* E. Corbin by surface micromachining processes, the development of U. S. Defense Advanced Research Projects Agency recipes for fabricating them and the development of (DARPA) appropriate actuation and sensing strategies for closed- loop control of the devices. Various designs for XY and This project seeks to develop nanometrology tools capable XY-Theta stages have been fabricated and tested. Work of centimeter-scale imaging of surfaces with nanometer- concentrates on the development of stages capable of out- scale resolution. of-plane motion and the related fabrication approaches.

* Denotes principal investigator.

24 Nanoscale Measurements of Temperature and Active Nanopore Membranes Thermal Properties for Applications in Thermal M. A. Shannon* Management and Energy Harvesting [email protected] W. P. King,* J. Rho National Science Foundation, Center of Advanced U.S. Office of Naval Research Materials for the Purification of Water with Systems (WaterCAMPWS) The goal of this project is to develop metrology tools to investigate temperature and thermal properties at the The objective of this project is to develop a low-energy nanometer scale. The tools will be applied to applications usage, active ion pump for separating ions from water. In in thermal management and energy harvesting. desalination systems, water molecules are separated from the influent aqueous ionic solution that they reside in, Effect of Grain Boundary and Size on Electro- leaving a higher concentrated aqueous solution as the Thermomechanical Properties and Internal of exfluent. In this project, we are developing a material Nanograined Thin Metal Films Using MEMS Devices system that will actively pump hydrated cations and anions T. A. Saif* from ionic aqueous solutions (>20,000 to <500 ppm) using National Science Foundation, ECS-0304243 electrical energy and diffusion to power active nanopore Submicron metal films and wires are essential ingredients membranes. The goal is to reduce energy consumption for micro/nanoelectronics as well as for required for ion separation, and to improve the microelectromechanical systems (MEMS) and understanding of the effect of eliminating concentration nanomechanical systems. Such metal structures are polarization impedance, a critical issue for aqueous ion typically polycrystalline in nature, with nanoscale grains separation. that offer an abundance of grain boundaries. Such boundaries play a major role in determining the thermoelectromechanical properties of nanograined Nanoscience and Technology metals. Such properties at nanoscale are far from being Double Direct Templating of Periodically fully understood. This project explores the role of grain Nanostructured ZnS Hollow Microspheres boundaries in determining elastic and plastic properties, P. V. Braun,* A. Wolosiuk, D. Gough electrical and thermal conductivity, and internal friction of National Science Foundation, DMR-0117792 nanograined metals. MEMS sensors and actuators are employed in exploring these properties. In this project, we are developing a "double direct templating" approach to obtain hollow ZnS 500 nm Interplay Between In-Homogeneity and Size Scale of diameter microspheres perforated with a periodic array of Microstructure: A New Paradigm in the Mechanistic uniform 2-3 nm diameter pores and to demonstrate the Exploration of Nano Grained Metal Deformation entrapment of Au nanoparticles and biological T. A. Saif* macromolecules within these microspheres. In double National Science Foundation, CMMI 0728189 direct templating, a lyotropic liquid crystal templates the We have experimental evidence showing that plastically mineralization of ZnS on the surface of a silica or deformed polycrystalline free standing thin metal films polystyrene colloidal template. Removal of the templates with average grain size of 50-100 nm recover all of the results in a periodically mesostructured ZnS hollow plastic strain under macroscopic stress-free conditions capsule. The regular controlled pore structure of the (Science, (2007) 315, p. 1831). This observation wall opens the possibility for the encapsulation of challenges the age-old view that plastic strain is permanent. nanoparticles, polymers, and biological macromolecules. When the grain size is increased to 100-200 nm, the films Micro/Nanofluidic Techniques for Patterning show strong Bauschinger effect during unloading. These Materials from the Liquid Phase with Nanometer surprising and seemingly unrelated phenomena, we Resolution hypothesize, are governed by an interplay between the J. A. Rogers* small size scale of the microstructure and its National Science Foundation, NSF-DMI-03-28162 inhomogeneity. This project explores this relatively unexplored paradigm through quantitative in-situ Advances in micro/nanofluidic networks that incorporate deformation and annealing studies of thin metal films active valving and pumping schemes with 3-D (jointly with Austrian Academy of Science). architectures offer possibilities, when combined with nanoscale nozzles, for printing solution phase inks with

* Denotes principal investigator.

25 high resolution. This effort seeks to develop the Nanofibrous Scaffolds for Cartilage Engineering engineering and scientific knowledge for building these B. T. Cunningham,* D. Griffon types of systems and for using them to build unusual [email protected], [email protected] electronic and photonic devices. Beckman Institute for Advanced Science and Technology Unconventional Techniques for Nanofabrication Conducted in the Micro and Nanotechnology Laboratory, J. A. Rogers* the Beckman Institute for Advanced Science and University of Illinois Technology, and the College of Veterinary Medicine New tools for fabricating structures with micron and The project aims to optimize production of chitosan nanometer dimensions are critical to the progress of nanofibers with nanometer-scale diameter for chondrocyte nanoscience and nanotechnology. This project seeks to attachment and proliferation. Utilizing nanometer-scale develop soft lithographic methods for nanofabrication and lithography, a silicon template wafer is used to produce to use them for building structures that are needed for basic large area rubber molds. By filling the molds with chitosan and applied studies. Our recent efforts focus on the solution, curing the chitosan solution to a solid, and development and use of these methods for building harvesting the cured fibers from the mold, large nanophotonic systems and for constructing organic populations of fibers with any desired diameter can be transistors and diodes that have nanometer or molecular produced in large quantities. The fibers produced by this scale dimensions. method will be used to determine the extent to which the diameter of chitosan fibers affects in vitro chondrogenesis. Optical Physics and Engineering Our working hypothesis is that decreasing the diameter of chitosan fibers will improve chondrocytes’ attachment, proliferation, and matrix production. Nanofibrous Scaffolds for Cartilage Engineering B. T. Cunningham,* D. Griffon Optical Biosensors [email protected], [email protected] B. T. Cunningham* Beckman Institute for Advanced Science and Technology [email protected] SRU Biosystems Conducted in the Micro and Nanotechnology Laboratory, the Beckman Institute for Advanced Science and Conducted in the Micro and Nanotechnology Laboratory Technology, and the College of Veterinary Medicine An optical biosensor is used to rapidly screen protein-small The project aims to optimize production of chitosan molecule interactions that are not easily screened by other nanofibers with nanometer-scale diameter for chondrocyte methods. The assay is based upon a sensor technology attachment and proliferation. Utilizing nanometer-scale called a "photonic crystal" structure that is inexpensively lithography, a silicon template wafer is used to produce manufactured from sheets of plastic film and incorporated large area rubber molds. By filling the molds with chitosan into disposable microplates. By eliminating the need for a solution, curing the chitosan solution to a solid, and label, the assay is less susceptible to errors and artifacts harvesting the cured fibers from the mold, large caused by conformational change or blocking of active populations of fibers with any desired diameter can be binding epitopes. It is envisioned that the technology will produced in large quantities. The fibers produced by this be used in the context of a primary screen of a chemical method will be used to determine the extent to which the library and as a secondary screen for measuring dose- diameter of chitosan fibers affects in vitro chondrogenesis. response characteristics of a protein-small molecule Our working hypothesis is that decreasing the diameter of combination. chitosan fibers will improve chondrocytes’ attachment, Optical Biosensors proliferation, and matrix production. B. T. Cunningham* [email protected] SRU Biosystems Conducted in the Micro and Nanotechnology Laboratory An optical biosensor is used to rapidly screen protein-small molecule interactions that are not easily screened by other methods. The assay is based upon a sensor technology

* Denotes principal investigator.

26 called a "photonic crystal" structure that is inexpensively structures to maximize the interaction of the field with manufactured from sheets of plastic film and incorporated adsorbed biomolecules, will be demonstrated. into disposable microplates. By eliminating the need for a Tunable Optical Filters Using Photonic Crystals and label, the assay is less susceptible to errors and artifacts Nonlinear Dyes caused by conformational change or blocking of active B. T. Cunningham* binding epitopes. It is envisioned that the technology will [email protected] be used in the context of a primary screen of a chemical Batelle library and as a secondary screen for measuring dose- response characteristics of a protein-small molecule Conducted in the Micro and Nanotechnology Laboratory combination. Photonic crystal narrowband reflectance filters can be Photonic Crystal Biosensor Nanostructures and designed with resonant wavelengths over the visible Materials for Advanced Performance portion of the light spectrum and may have utility as B. T. Cunningham* countermeasures against laser-based systems designed to [email protected] induce temporary or permanent blindness in pilots. A National Science Foundation photonic crystal that would block laser illumination at specific wavelengths while allowing all other wavelengths Conducted in the Micro and Nanotechnology Laboratory to reach the pilot's eyes could be incorporated into the visor The specific aims of the research project investigate means of a fighter pilot. In addition, a photonic crystal-based visor for advancing the state-of-the-art for photonic crystal might incorporate nonlinear dye material that would biosensor performance and applications. Sensor designs rapidly respond to hostile laser illumination and would will be approached first by computer simulation using allow controllable tuning of the filtered wavelength. rigorous coupled wave analysis (RCWA) and finite Tunable Optical Filters Using Photonic Crystals and difference time domain (FDTD) methods, followed by Nonlinear Dyes fabrication and testing of the structure. The design goals B. T. Cunningham* will be to produce more narrow resonant spectra, higher [email protected] surface/volume ratio, and higher electromagnetic field Batelle interaction with adsorbed material than first-generation designs. The incorporation of different materials to Conducted in the Micro and Nanotechnology Laboratory increase surface electromagnetic field intensity, and Photonic crystal narrowband reflectance filters can be structures to maximize the interaction of the field with designed with resonant wavelengths over the visible adsorbed biomolecules, will be demonstrated. portion of the light spectrum and may have utility as Photonic Crystal Biosensor Nanostructures and countermeasures against laser-based systems designed to Materials for Advanced Performance induce temporary or permanent blindness in pilots. A B. T. Cunningham* photonic crystal that would block laser illumination at [email protected] specific wavelengths while allowing all other wavelengths National Science Foundation to reach the pilot's eyes could be incorporated into the visor of a fighter pilot. In addition, a photonic crystal-based visor Conducted in the Micro and Nanotechnology Laboratory might incorporate nonlinear dye material that would The specific aims of the research project investigate means rapidly respond to hostile laser illumination and would for advancing the state-of-the-art for photonic crystal allow controllable tuning of the filtered wavelength. biosensor performance and applications. Sensor designs Arrays of Microdischarges: A New Generation of will be approached first by computer simulation using Lighting Sources rigorous coupled wave analysis (RCWA) and finite J. G. Eden,* M. J. Kushner,* N. P. Ostrom, S. McCain, difference time domain (FDTD) methods, followed by A. Bhoj, K. Rajaraman, I. Mitchell fabrication and testing of the structure. The design goals Electric Power Research Institute, EP-P6654/C3385 will be to produce more narrow resonant spectra, higher surface/volume ratio, and higher electromagnetic field This experimental and computational program is devoted interaction with adsorbed material than first-generation to investigating diatomic molecules as efficient emitters designs. The incorporation of different materials to for lamps. The microdischarge serves as the platform with increase surface electromagnetic field intensity, and which a wide variety of diatomics (excimers, metal-

* Denotes principal investigator.

27 halides, etc.) will be studied. A close linkage between Femtosecond Nonlinear Optical Phenomena experimental results and theoretical predictions is a key J. G. Eden* element of this research effort. [email protected] Northrop Grumman Corp. Equipment for Machining of Microdischarge Devices J. G. Eden,* C. Herring, J. Gao, A. Oldenburg Experiments are being conducted in which ultrafast laser U.S. Air Force Office of Scientific Research, pulses (~100-150 fs) produce ionized filaments in air or F49620-99-1-0106 other gases. Peak optical field intensities exceeding 1013 -2 Under the DOD DURIP program, equipment is being W-cm are sufficient to produce stable channels having purchased to facilitate the fabrication of microdischarge extraordinary optical and electrical characteristics. In devices in silicon and other materials systems. A 1-kHz particular, emphasis is being placed on the coherent pulse repetition frequency Ti:sapphire regenerative nonlinear optical processes occurring in these filaments. amplifier will be used with an existing oscillator to Microdischarge Arrays: Phase 2 ablatively machine microchannels in silicon for use in J. G. Eden,* N. P. Ostrom, S. J. Park, K. Chen, arrays of discharge devices. Also, vacuum ultraviolet S. O. Kim optics enabling arrays of sub-50 μm diameter cylindrical [email protected] channels to be machined in Si metals or SiO2 at 193 nm U.S. Air Force Office of Scientific Research, AF EWING have been obtained. The introduction of polymer films into TECHNOLOGY 03-1 these multilayer devices as dielectrics or emission down- The focus of this research program is scaling of converters is another thrust of this program. microdischarge arrays to 104-105 devices and emitted Experimental Studies of Microdischarge Devices and power densities of 0.1-1 W-cm–2 in the ultraviolet. Arrays Arrays are being fabricated in silicon with devices having inverted J. G. Eden,* C. Wagner, S. Kim, P. Galvez, J. Tang square pyramidal cathodes and polymer or U.S. Air Force Office of Scientific Research, multicomponent dielectrics. Large arrays have also been F49620-99-1-0317 successfully constructed and operated in glass in which the This research program is focused on fabricating and pixels are excited with an interdigitated electrode examining the properties of arrays of microdischarge configuration. Several diatomic molecular emitters and devices. A variety of processes (wet and dry chemical excitation processes are under investigation, with initial processing, laser , and ultrasonic milling) are emphasis on mid- and near-UV emitters. employed to fabricate cylindrical and pyramidal cathodes Microdischarge Devices and Arrays: Quantum and in silicon as part of a multilayer structure suitable for large- Coherence Effects scale production. The properties of arrays and single J. G. Eden,* S. J. Park, C. J. Wagner, N. P. Ostrom, devices operating in the rare gases are of particular interest, A. A. Senin, Z. Lu, J. R. Allen, C. Zhu, B. Ricconi and emphasis is being placed on the characteristics of U.S. Air Force Office of Scientific Research, devices smaller than 50 μm. F49620-00-1-0372 Fabrication of Large Area, High Density A family of photonic devices, known as microdischarges, Microdischarge Arrays on Flexible Substrates is being developed under this multiyear program. Based J. G. Eden* on microplasmas confined to volumes of nanoliters or less, [email protected] these devices have remarkable properties, including the National Science Foundation; Anvik Corporation ability to operate as stable glows at atmospheric pressure In collaboration with the Anvik Corporation, the and with specific power loadings of several tens of kW- -3 fabrication of large arrays of microcavity discharge devices cm . Single devices and arrays as large as 30 x 30 pixels on flexible substrates is being pursued. Excimer laser have been fabricated in silicon, ceramic, and metal/ micromachining techniques, combined with roll-to-roll polymer structures. Many applications, including broad- processing, are attractive for inexpensively manufacturing area UV sources, pump sources for microchip lasers, arc microdischarge devices in large area arrays. lamp ignition, and gas chromatography, are being pursued. Other research thrusts in this program are femtosecond spectroscopy of small molecules by coherent nonlinear

* Denotes principal investigator.

28 optical processes and the study of the optical properties of Microdischarges for Phased Arrays of Low Coherence nanoparticles for lasers and biosensing applications. Emitters, and Microchip and Microsphere Lasers J. G. Eden* Microdischarge Long Wave Infrared Source [email protected] Technology Development U.S. Air Force Office of Scientific Research, J. G. Eden* F49620-03-1-0391 [email protected] Northrop Grumman Corp. A new family of photonic devices, known as microcavity discharges, is being developed under this multiyear The characteristics of microcavity plasma devices as program. Based on microplasmas confined to volumes of emitters in the infrared (5-12 μm) are being studied in nanoliters (or less) and spatial dimensions of nominally experiments with a variety of device designs. 10-100 μm, these devices exhibit remarkable optical and Spectroscopic and power measurements of single devices electrical properties. The fabrication of single devices and and arrays are being carried out in conjunction with arrays as visible or ultraviolet emitters for applications in theoretical studies. biomedical diagnostics, displays, and environmental Microdischarge Micro-Thruster Technology sensing is being pursued. Microcavity discharge devices Development with semiconductor cathodes have also been observed to J. G. Eden* be sensitive detectors of visible and near-infrared radiation, [email protected] and the properties of these new photodetectors are under Ewing Technology Associates investigation. An emphasis of this program is the The potential of microcavity discharges as sources of thrust realization of two-dimensional arrays of microemitters in for small ("pico") satellites is under investigation. which adjacent pixels are optically coupled. Experiments measuring the electrical characteristics of Novel Miniature Diagnostic Using Microdischarge robust device structures, including Ni/BN/Ni designs, are Technology being conducted to assess the magnitude of thrust J. G. Eden,* C. Wagner attainable as well as the device lifetime. National Science Foundation; SBIR; SBC ETA UI-99-09- Microdischarges and Rare Earth-Doped Waveguide P1 Devices: Visible and Ultraviolet Sources for Lasers and This SBIR program is developing chemical sensors based Sensors on microdischarges fabricated in a "flow through" J. G. Eden,* C. Wagner, A. Oldenburg, A. Senin, geometry. Because of the high specific power loadings F. Shen, J. Conway accessible with microdischarges (> 100 kW-cm-3), arrays U.S. Air Force Office of Scientific Research, of these devices are well suited for the remediation of toxic F49620-98-1-0030 gases. The emission spectra of gases flowing through a The demonstration of new sources of ultraviolet and visible single 100–400 μm diameter microdischarge are presently radiation is the thrust of this research program. Current being studied as a diagnostic of molecular fragmentation efforts are two-pronged. Microdischarge devices in the discharge and as a means of detecting impurities in developed in this laboratory are under study as emission the gas flow stream. sources for displays or as chemical sensors. Cylindrical and Spatially-Resolved Detection of Weak Magnetic Fields typically 20 to 400 μm in diameter, these microdischarges by Laser Magneto-Optical Techniques have properties (VI characteristics, specific power loading) J. G. Eden,* J. Gao,* J. M. Talmadge, R. Roth, A. Fai that are unique and quite attractive for a variety of U.S. Air Force Office of Scientific Research, applications. The second facet of this research effort is the F49620-01-1-0546 study of nonlinear optical phenomena on the sub-100 fs Magneto-optical techniques are being developed under this time scale and at intensities exceeding 1010 W-cm-2. Using program to detect weak (< 1 nT) magnetic fields for colliding pulse mode-locked and Ti:Al O laser systems, 2 3 biomedical applications. By employing epitaxial films of wave packet formation, four-wave mixing, and high-order novel garnet films in combination with nonlinear optical harmonic generation are being studied, both processes and synchronous detection, magnetic fields as experimentally and theoretically. low as 10 nT have been detected reliably.

* Denotes principal investigator.

29 Visible and Infrared Laser Spectroscopy application in the eventual toolbit, which enables a new J. G. Eden,* J. Gao, C. Zhu, A. A. Senin, R. Kogler, revolution of manufacturing. We are developing photonic D. Miftakhutdinov crystal vertical cavity lasers that employ photonic crystal [email protected] effects in the direction of light propagation. These devices Northrop Grumman Corp. are promising for the high-power, single-mode operation that will be required for optical sensing at the toolbit. The Atomic and molecular laser spectroscopy in the visible, holes inherent to this device are also suitable for material ultraviolet, and infrared is the focus of this research effort. introduction pores of the toolbit assembly. In addition, we Currently, emphasis is being placed on the spectroscopy of are developing integrated vertical cavity surface emitting the Rydberg states of the neon dimer and rubidium dimers. lasers (VCSELs) and photodetectors. Such a device will Excitation spectroscopy of the neon dimer has yielded the find application in fluorescence identification and position first rotationally resolved bands as well as observation of sensing. We are thus pursuing close packed 2-dimensional triplet splitting. As a result, structural constants of the arrays of intermeshed VCSELs and photodetectors for use molecule have been determined. Femtosecond studies of as optical sensors. the dissociation of diatomic molecules, observed in real time, are also being carried out. Next-Generation Optical Materials and Devices K. D. Choquette,* J. J. Coleman Integration of Photonic Crystal Sensors with Nanofluid [email protected] Flow Channels National Science Foundation P. Kenis, and B. T. Cunningham* [email protected], [email protected] The goal of nanotechnology is to create materials and NSF Center for Nanoscale Chemical-Electrical- devices that exhibit novel and significantly improved Mechanical Manufacturing Systems (NanoCEMMS) properties due to their nanoscale size. We are developing nanophotonic light sources with enhanced characteristics Conducted in the Micro and Nanotechnology Laboratory for future photonic ultra-high-capacity communication and in Roger Adams Laboratory systems. We seek to combine aggressive advances in 3- The project objective is to incorporate plastic-based dimensional electronic confinement obtained from photonic crystal optical sensors within nanofluidic flow quantum dots with the unprecedented optical confinement channels for the detection of biochemical interactions achieved from photonic crystals to develop the next between mixed reagents, temperature of reagents, pressure generation of highly efficient microcavity optical sources. within sealed reaction vessels, and as a means for Photonic Crystal Emitters for Next Generation Light indicating the presence or absence of fluid at particular Sources locations within a fluid network. Using integrated sensors K. D. Choquette* and fluid control within a single small chip, we plan to [email protected] demonstrate the ability to simultaneously monitor large Army Research Laboratories numbers of photonic crystal sensors within the chip using a noncontact optical imaging scanner instrument. We are developing vertical cavity laser sources with enhanced characteristics for future photonic and remote Optoelectronics sensing applications. Our devices consist of vertical cavity surface emitting lasers that are transversely defined by a photonic crystal. The pursuit of suitable Nanoscale Chemical-Electrical-Mechanical required for photonic crystal fabrication in a variety of Manufacturing Systems materials is under way. Specifically, electron beam and K. D. Choquette* focused ion beam lithography are being developed for [email protected] photonic crystal fabrication. This work will also focus on National Science Foundation transversely coupled photonic crystal defects, producing The objective of the NSF Center for Nanoscale Chemical- coherently coupled vertical cavity laser arrays. Electrical-Mechanical Manufacturing Systems (NanoCEMMS) is the development of a manufacturing capability for manipulation and sensing of materials ultimately at the nanometer scale. To this end, the Photonic Device Research Group is developing optical sources for

* Denotes principal investigator.

30 Photonic Crystal Nanophotonic Devices Antimony-Based Type-II Superlattice Photodetectors K. D. Choquette* S. L. Chuang,* A. Petschke [email protected] [email protected] U.S. Air Force Office of Scientific Research Army Research Office, Army W911NF-06-1-0353 The objective is to develop nanophotonic devices based We propose to develop Sb-based superlattice upon photonic crystal nanocavities employing a variety of photodetectors for 77K to room or higher temperature semiconductor material systems. Our goal is to develop the operation. We will explore the IR detection applications of photonic crystal design and processing techniques to type-II superlattice quantum structures based on InAs/ maximize cavity quality values, minimize cavity volume, AlGaInSb material systems. We propose new structures and minimize waveguide loss. We will also explore novel including an interband tunneling detector similar to that in vertical photonic crystal nanocavities incorporating a type-II quantum-cascade laser structure, except for the quantum dots, and pursue coupling photonic crystal reduction of the multiple cascade regions to a single period cavities and waveguides for integrated devices with post- with the active absorption region replaced by a type-II processing cavity tuning techniques. superlattice. We will perform extensive theoretical and experimental investigation of the optical and electrical Spatial, Temporal, and Spectral Localization for characteristics of mid-IR photovoltaic photodetectors. The Advanced Photonic Applications materials will be provided by our collaborator at Georgia K. D. Choquette,* J. J. Coleman Institute of Technology (Dupuis). [email protected] Defense Advanced Research Project Agency Characterization of Antimony-Based Type-II Superlattice Photodetectors Future chip-based optoelectronic systems will require an S. L. Chuang,* S. Mou unprecedented decrease of size and operating power, while [email protected] simultaneously incorporating greater functionality and Jet Propulsion Laboratory, NASA JPL 1289790 complexity. This research program builds on advanced materials and device concepts to create a multifunctional We will conduct research on the optical and electrical photonic crystal based photonic integrated circuit that characterization of type-II superlattice samples grown by incorporates quantum dot active regions. We will explore our collaborators at JPL. The tasks include: diode injection and extraction to and from engineered photoluminescence (PL) spectroscopy with temperature quantum dot structures, integrated with spatial selectivity dependence, absorption and transmission measurements, within photonic crystal waveguides and optical PL imaging, and lifetime measurements. With a Bomem nanocavities. This project will encompass three levels of FTIR, we can measure the transmission spectra from technology research: system integration, novel device visible to far-infrared (100 μm). Using the substrate structures, and advanced epitaxial growth. In the Photonic transmission spectra, we are able to accurately extract the Device Research Group, our objective is to demonstrate a optical absorption coefficients of InAs/InGaSb photonic microsystem composed of an electrically injected superlattices. optical source, compact waveguides, detectors, and optical Fiber Optical Force Sensors for Truck Hunting memory elements. Applications VCSEL Reliability S. L. Chuang,* M. Chuang K. D. Choquette* [email protected] [email protected] Association of American Railroads Sun Microsystems The objective is to develop fiber optical force sensors for We are investigating the reliability of vertical cavity measurement of time-dependent lateral impact force on the surface emitting lasers (VCSELs) operating under high track for truck hunting applications in railroads. We have temperature and humidity. This research involves the succeeded in two designs of fiber optical force sensors fabrication of several different VCSEL structures, which based on the attenuation of light transmission due to will be life tested. After testing, the characteristics of the microbending effects. The idea for our applications is to VCSELs will be examined, and in particular the influence use our fiber sensors for measurements of lateral impact of the laser structure on reliability will be ascertained. force as a function of time at various locations on a track. We have previously succeeded in measuring the weigh-in- motion sensor for different waveforms of the force. We will

* Denotes principal investigator.

31 apply our experimental techniques to detect the wheel Modeling and Characterization of SiGeSn-Based impact of the side of the track for lateral force Quantum-Cascade Lasers and Interband Lasers measurement. This technology will have potential S. L. Chuang,* C. Y. Ni applications for truck hunting. [email protected] Air Force Office of Scientific Research (MURI award), AF High-Speed Wavelength-Agile Optical Network Sub AZ State 07-750 S. L. Chuang,* I. Adesida,* K. D. Choquette,* S. Lumetta* We propose to design interband lasers as well as [email protected] intersubband THz quantum-cascade lasers. We will National Science Foundation investigate the GeSiSn/Ge material system operating in the L-valley of the conduction band (electrons), and the We propose to explore the architecture and device SiGeSn/SiGe material system operating in the valence development issues necessary to develop optical local area band (holes). In both structures, the carriers (electrons or networks (LANs) that are ready to interface with optical holes) are first injected into the active region via a metropolitan area networks (MANs). Our goal is to miniband in the injection region. The radiative transition, develop a clear plan for integration of multiwavelength which generates THz photons, takes place in the active LANs and MANs in order to improve the degree to which region. After the transition, carriers are directed out of the the benefits of high bandwidth in the MANs are delivered active region by another miniband and injected into the to end users on the LANs. Our tasks include the following: active region in the next stage for recycling. Our tasks quantitatively evaluate the impact of wavelength include: QCL design and modeling, waveguide conversion on network reliability and study the design of fabrication, and laser testing and characterization. We also all-optical access architectures that leverage high-speed investigate the possibility of interband strained quantum- wavelength conversion and add/drop channel capabilities; well lasers using SiGeSn/Ge systems. design and fabricate tunable laser sources and wavelength converters using composite resonator vertical cavity lasers; Nonlinear Quantum Optical Devices Using Quantum design and fabricate a novel semiconductor-based Dots wavelength converter capable of format-transparent and S. L. Chuang,* S. W. Chang, H. Su, D. Nielsen ultrafast wavelength conversion; and design and fabricate [email protected] add/drop filters and photodetectors. Defense Advanced Research Projects Agency (University of California-Berkeley-prime), DARPA SA4472-32446 Modeling and Characterization of Nanoscale Optical Antennas with Quantum Dots We propose the use of quantum dots (QDs) for slow light S. L. Chuang,* S. W. Chang, C. Y. Ni, C. Y. Lu and optical buffer applications. We will develop the theory Defense Advanced Research Projects Agency (UC- of slow light in semiconductor quantum dots (QDs) and its Berkeley-prime) dependence on physical parameters such as dot size, materials, optical pump intensity, and wavelength. The Conducted in Everitt Laboratory major goal is to achieve variable time delay with a broad We will conduct research on nanolasers in collaboration bandwidth from 1 GHz to 40 GHz using semiconductor with Professor Yang at UC-Berkeley. We will apply the quantum dot devices. We will also explore the applications finite-element method (FEM) and finite difference time of coherent quantum effects in low-dimensional domain (FDTD) method in the designs of optical antenna semiconductor structures including quantum dots. This based on metal-semiconductor surface plasmon modes task is part of a Defense Advanced Research Projects coupled to quantum well and quantum dots optical active Agency funded Photonics Center at the University of media. We will explore this possibility by theoretically and California-Berkeley with other team members. numerically modeling structures formed by a nanoscale Optical Bleaching and Voltage Controllable Optical quantum-dot gain medium coupled to metallic Buffers Using Quantum Dots and Wells nanostructures, which utilize the localized surface plasmon S. L. Chuang,* A. Matsudaira, P. Kondratko polariton effect. The project is part of the DARPA program [email protected] on Nanoscale Architectures for Coherent Hyper-Optic Defense Advanced Research Projects Agency-Phase II Sources (NACHOS). (UC Berkeley-prime) With a controllable effective lifetime in the reverse bias regime, we propose to implement a variable and wide-

* Denotes principal investigator.

32 bandwidth slow-light device. The controllable bandwidth colloidal crystal template is formed through the gravity- can reduce the number of wavelength-division- assisted self-organization of a water-based suspension of multiplexing (WDM) channels required in an optical nearly monodisperse colloidal particles. Following buffer with an ultra-wide bandwidth. We will model the assembly, the solvent is removed. Then the waveguide slow light based on the optical bleaching in quantum wells structure is deposited into the colloidal crystal though and quantum dots. The HH exciton will be our main focus multiphoton direct writing. High refractive index colloidal since it has a relatively narrow linewidth. An optical pump material is deposited into the interstitial space through is applied to the HH continuum in QWs or to the ALD or CVD. Following the deposition of the high inhomogeneous-broadened absorption in quantum dots. refractive index material, the colloidal template is removed to increase the refractive index contrast. Theoretical Slow Light in Semiconductor Quantum Well studies indicate these waveguide structures should be Waveguides highly effective for the manipulation of light. S. L. Chuang,* P. Kondratko [email protected] Nanoparticle-Mediated Epitaxial Assembly of U.S. Air Force Office of Scientific Research (University of Colloidal Crystals California-Berkeley-prime), AF UCAL SA4455-32432PG J. A. Lewis,* S. Rhodes, R. Kershner, P. Braun National Science Foundation, DMR 00-71645 We will develop theory for achieving controllable slow- down of the group velocity in a narrow transparency Colloidal crystals are being epitaxially assembled onto window by applying a pump beam based on the mechanism patterned substrates produced by focused ion beam of electromagnetically induced transparency (EIT) and by milling. Nanoparticle species are utilized to both provide applying an electric field to quantum-well structures with colloidal stability as well as create robust crystals. Current an electric field bias (or an external pump). We can control efforts focus on creating photonic crystals with a targeted the exciton energy levels and wave functions. Therefore, optical response at visible wavelengths. we can engineer the slow light effects for applications in High Speed Liquid Crystal Devices novel variable optical buffers, which are essential for all- J. A. Rogers* optical networks. National Science Foundation, GOALI Program This project seeks to understand fundamental issues and Photonic Materials practical considerations that define upper limits for the operating speed of liquid crystal based modulators and Holographic Assembly of Nanoparticles in Polymer switches. It includes a component that focuses on inventing Dispersed Liquid Crystals unusual means to use liquid crystals for tunable fiber and P. V. Braun,* J. Busbee, A. Griffith integrated optical devices. Army Research Office, DAAD19-03-1-0227 Microfluidic Networks and Photonics Holographic polymer dispersed liquid crystals (H-PDLCs) J. A. Rogers* have been of significant interest for a number of years National Science Foundation because of the potential for optically switchable windows, variable lasers, and other optical devices. To date, the This project seeks to exploit pumped microfluidics for new majority of these devices have been formed from all classes of tunable photonic devices. It includes basic study organic based materials. We are using chemically and development of means to fabricate microfluidic functionalized nanoparticles to modulate the optical networks and phenomena, such as electrowetting, that can properties in ways not possible using only organic be used to pump the fluids. With proper designs, the motion materials. of the fluids can be coupled to the optical properties of basic photonic elements such as planar waveguides and optical Templated Synthesis of Waveguides in 3-D Photonic fiber. In another approach, it is possible to construct Band Gap Materials directly these and other elements (e.g., microlenses) out of P. V. Braun,* S. Pruzinsky, G. Gratson, J. A. Lewis fluidic structures whose shapes can be dynamically National Science Foundation, DMR 00-71645 adjusted. These types of technologies have capabilities that Photonic band gap structures are being created through the can complement those of existing conventional systems. infilling of the interstitial space of colloidal crystals with optically active, high refractive index materials. The

* Denotes principal investigator.

33 spectroscopy. Various configurations of tunable lasers Power and Energy Systems have been analyzed, and a two- or three-section distributed feedback (DFB) or distributed Bragg reflector (DBR) laser A Microgrid-Based Telecom Power System Using is often the choice. The goal of these programs is to develop Modular Multiple-Input Dc-Dc Converters narrow linewidth, single longitudinal mode, strained layer P. T. Krein,* A. Kwasinski InGaAs DBR laser diodes operating near 1065 and 1040 Grainger Center for Electric Machinery and nm for remote sensing applications. Electromechanics Development of Advanced Laser Diode Sources for A microgrid is an independently controlled portion of an Remote-Sensing Applications electrical grid. It comprises its own power sources (such J. J. Coleman,* G. C. Papen* as fuel cells, solar cells, microturbines), energy storage National Aeronautics and Space Administration, NAG devices (such as flywheels, batteries, ultracapacitors), and 1-1861 loads, usually interconnected with a larger grid. With independent control, a microgrid with a utility tie can Conducted in the Micro and Nanotechnology Laboratory deliver high reliability, high efficiency, and uninterruptible Several outstanding technical issues for narrowband power functions, while reducing energy storage needs systems, such as water vapor DIAL lidars, must be resolved compared to traditional systems. This work explores a before solid-state, laser-based remote-sensing systems microgrid-based telecommunications power plant with a have widespread use. One issue is the development of cw distributed architecture. Combinations of converters and local oscillators (LOs) based on semiconductor laser diode controls create a flexible, reliable plant that meets technology for use as injection seeders, which has not been performance needs of modern telecommunication systems. fully realized because of the severe linewidth, tunability, and stability requirements of narrowband systems. This Processing project will develop novel semiconductor devices specifically for use as tunable LO sources for narrowband Separation of Single Walled Carbon Nanotubes water vapor DIAL systems operating in the 940 nm region. According to Electronic and Geometric Structure Researchers will focus on a novel ridge-waveguide, M. S. Strano,* M. Usrey, D. Heller distributed-Bragg-reflector laser, which has significant Dupont; Ocean Optics Inc. performance improvements for optical remote-sensing applications relative to conventional Fabry-Perot or Carbon nanotubes are a diverse class of electronic and distributed-feedback lasers. optical materials. Depending on their diameter and helical twisting, nanotubes can be metallic, semimetallic or EOSS+ Laser Diode Substrate semiconducting. All currently known synthesis methods J. J. Coleman* create random mixtures of all types, but to use these Northrop Grumman Corp. materials as nanoelectronic circuits and sensors, one needs Conducted in the Micro and Nanotechnology Laboratory to isolate and control one particular type. We are developing robust methods to sort and separate carbon The electro-optic test station known as the EOSS+ is nanotubes into distinct fractions for electronic designed to support the testing of laser platforms at 1.064 applications. mm through the use of a laser diode source. The characteristics of this diode, such as center wavelength and peak power, are determined by the capabilities of the test Semiconductor Lasers receiver and the design of the EOSS+ unit itself. The purpose of this program is to provide for the fabrication of 1065 and 1040 nm DBR Laser Diodes a custom-built diode grown from a novel substrate J. J. Coleman* designed to meet specification. HRL Laboratories Conducted in the Micro and Nanotechnology Laboratory Narrow linewidth, tunable semiconductor lasers are of interest to a variety of applications, including fiber optic communication systems, optical generation of microwave radiation, remote optical sensing, and molecular

* Denotes principal investigator.

34 High Brightness Laser Diodes for multielement integration, master oscillator-power J. J. Coleman* amplifier (MOPA) configurations, frequency stabilization, Nuvonyx, Inc. and distributed Bragg pulse shaper high-speed parallel-to- serial packet encoders. Conducted in the Micro and Nanotechnology Laboratory Naturally Nanostructured Epitaxial Semiconductors The objective of this program is to address several issues J. M. Gibson,* D. G. Cahill, J. E. Greene, related to the MOCVD growth and characterization of A. M. Zangwill, J. J. Coleman InGaAs-GaAs strained layer lasers in the range of 920 nm National Science Foundation, DMR 9705440 to 1080 nm for high brightness applications. This approach will be to develop a real index guided laser with integrated Conducted in the Coordinated Science Laboratory beam expanders and other active and passive optics formed This FRG/GOALI proposal addresses basic materials by selective area epitaxy. Present narrow stripe science and engineering issues in a collaborative program semiconductor lasers are generally limited to less than 200 between the University of Illinois and Hewlett-Packard mW of fundamental mode output power, because of the Laboratories to understand fundamental phenomena and narrow aperture. If the beam can be expanded while interactions associated with naturally nanostructured retaining fundamental mode operation, then the operating epitaxial semiconductors. Goals of the project are to obtain power can be correspondingly increased. semiconductor epitaxial nanostructures smaller than Narrow Linewidth, Multiple Wavelength, feasible via lithography and to examine their applications Simultaneous-Emission Laser Diodes for Remote to novel devices. Strain-induced self-organization and Optical Sensing and Other Applications kinetically driven pattern formation are two approaches J. J. Coleman* being taken to achieve naturally nanostructured materials. National Science Foundation, ECS 9900258 Conducted in the Micro and Nanotechnology Laboratory Semiconductor Physics The proposal describes a program to develop 3-D Self-Consistent Simulation of Quantum Dot Spin multiwavelength, simultaneous-emission lasers based on a Transistors of Quantum Information Processing ridge-waveguide distributed Bragg reflector J. P. Leburton,* M. Lu semiconductor laser. The specific example of an [email protected] application that defines the need of such lasers is the Semiconductor Research Corporation, 2003-NJ-1045 differential absorption, remote optical sensing of water vapor. A multiwavelength source with closely spaced Conducted in the Beckman Institute for Advanced Science narrow laser lines would be useful to obtain the detailed and Technology absorption profile without having to turn the laser on and This research concentrates on developing 3-D self- off the absorption peak as is practiced currently. This consistent computer tools for realistic simulation of spin program is designed to study and develop a simple multiple operation in silicon quantum dot spin effects transistors in wavelength source suitable for these kinds of applications. order to assess their feasibility and viability for Semiconductor Laser Transmitters for Integrated applications in quantum information processing. We Optical Interconnects consider Si FET-device configurations similar to Kane's J. J. Coleman* proposal to achieve a C-NOT gate. Our purpose is to obtain National Science Foundation, ECD 89-43166 a coherent 3-D picture of the interdependence among physical parameters and device considerations for spin- Conducted in the Micro and Nanotechnology Laboratory qubit operations, and to provide design rules for optimizing This program involves development of semiconductor the device. lasers suitable for use in integrated optoelectronics. There are a number of key technical issues to be addressed in this program, including the development of etched facet structures, distributed feedback and distributed Bragg reflector grating structures, monolithic space division multiplexing arrays designed for fiber coupling, selective epitaxy for wavelength division multiplexing arrays and

* Denotes principal investigator.

35 Scalable Spin-Qubit Circuits with Quantum Dots channels, treated as nanoscale natural devices. Continuum J. P. Leburton,* D. Melnikov, J. Kim, L. Zhang (drift-diffusion) and particle (Transport Monte Carlo) [email protected] simulation approaches have been developed where Defense Advanced Research Projects Agency, QuIST interaction with the aqueous environment is resolved in program, DAAD19-01-1-0659 terms of mobility or scattering rate. The goal of this work is to provide a scalable input-output description of natural Conducted in the Beckman Institute for Advanced Science nanopores for uses in bioelectronic sensor design. and Technology Artificial or biomimetic nanopores are also investigated This research is aimed at achieving a scalable elementary with similar simulation tools, for the design of artificial spin-qubit circuit for quantum computing that is based on membranes incorporating features of biological ones. the manipulation of electron spins in coupled III-V Simulation of Electro-Thermal Processes in MEMS semiconductor quantum dots (QDs). We take advantage of and NEMS Structures the advanced technology for planar and lateral QDs U. Ravaioli,* P. Martin, Z. Aksamija AlGAs/GaAs heterostructures and the fact that the electron [email protected] effective mass is small, which eases the conditions for DARPA IMPACT Center for Advancement of MEMS/ quantum confinement. Moreover, III-V materials enjoy NEMS VLSI long spin coherence times, which is of utmost importance for preserving quantum information over many qubit Micro- and Nano-Electro-Mechanical Systems have operations. For this purpose, we have assembled an reliability problems that are not easily addressed by trial- international research team involving the University of and-error experimental procedures. An attractive Basel, the University of Delft, Harvard University, alternative is to develop multiscale multiphysics models to Princeton University, and Tokyo University. Team simulate and optimize structures but this is a very members have complementary expertise in the physics of challenging multidisciplinary effort. In this project, we quantum computation and spintronics in nanostructures. study the coupling between thermal and electrical These areas of expertise are fully integrated into a coherent processes to capture some of the essential failure and interactive effort, leading to the realization of an mechanisms in MEMS/NEMS and consider the elementary qubit circuit. heterogeneous system, including metals, oxide, and semiconductor materials. Interactive Tools for Nanotechnology Education U. Ravaioli,* R. Braatz,* H.-S. Hahm Simulation of Nanoscale Biological and Biomimetic [email protected] Systems NSF National Science Center for Learning and Teaching U. Ravaioli,* R. Toghraee Nanoscale Science and Engineering [email protected] NIH Nanomedicine Center for the Design of Biomimetic This project involves a multidisciplinary, multi-university Nanoconductors team involving Northwestern University (lead institution), University of Illinois at , University of Illinois at Simulation of ion charge transport in membranes is studied Urbana-Champaign, Purdue University, and University of using various engineering simulation approaches, Michigan. One of the goals is to pursue research in including continuum and particle models, to develop education addressing the introduction of nanotechnology design methodologies for nanoscale systems. Physical concepts at various school levels, from middle school to approaches like classical and quantum molecular dynamics undergraduate programs. Our group is developing are relied on to provide first-principle calibration of interactive simulation and visualization tools to explore transport parameter for the engineering reduced order new ways to introduce advanced concepts in the curricula. models. The goal of this multidisciplinary project is to create a software infrastructure to support the future design Simulation of Charge Transport in Ionic Channels of biomimetic components for a variety of applications in U. Ravaioli,* T. A. Van der Straaten, G. A. Kathawala, nanomedicine, including implantable self-sustaining Y. Li power sources and artificial organs. [email protected] NSF Network for Computational Nanotechnology The well developed tools of computational electronics have been adapted to simulate ion transport in biological

* Denotes principal investigator.

36 The Science and Technology of Nano/Molecular Photoluminescence Studies of Semiconductor Electronics: Theory, Simulation, and Experimental Nanostructures and Rare Earth-Doped Semiconductor Characterization Materials U. Ravaioli,* R. Ravishankar, Z. Yang S. G. Bishop,* I. Adesida, J. J. Coleman [email protected] University of Illinois Defense University Research Initiative on Conducted in the Micro and Nanotechnology Laboratory Nanotechnology, U.S. Army Research Office, SIT 527826-08 This research program applies photoluminescence (PL), photoluminescence excitation spectroscopy, time resolved Conducted in the Beckman Institute for Advanced Science PL, and PL imaging to the characterization of defects and and Technology impurities in bulk and epitaxial semiconductor materials, This project is part of a DURINT multi-university effort, and the composition, doping, thickness, interfaces, with Stevens Institute of Technology as lead institution. uniformity, and quantum confinement effects in The specific goals of this subcontract are to develop semiconductor nanostructures. Rare earth-doped nanelectronics simulation tools to understand the ultimate semiconducting glasses and rare earth implanted GaN are limits of silicon technology and explore new device being developed as sources of near- and mid-IR radiation. concepts based on quantum effects. The emphasis of the Excitation of the intra-4f shell emission from rare earth work is on 3-D simulation and high performance parallel dopants (e.g. Er3+, Pr3+, Dy3+) in chalcogenide glasses by computing, using nonequilibrium Green's function and broad band optical absorption in the Urbach edge of the Monte Carlo simulation approaches. host glass is under investigation as a novel optical pumping mechanism. Semiconductors High Quantum Efficiency Infrared Photodetector Arrays Based on Nanowire Heterostructures Ge-Sb-Te Phase Change Materials: Optical and Y. C. Chang* (Physics), K.-Y. Cheng,* K. C. Hsieh* Electronic Properties, Structural Transformations, [email protected] and Fabrication of Nanostructures National Reconnaissance Office, NRC000-05-C-0023 S. G. Bishop,* B.-S. Lee, J. R. Abelson Conducted in the Micro and Nanotechnology Laboratory [email protected] National Science Foundation, DMR-0412939 The goal of this project is to developed high quantum- efficiency, high color-contrast multi-wavelength quantum Conducted in the Coordinated Science Laboratory wire infrared photodetector (QWRIP) arrays. The QWRIP The properties of Ge-Sb-Te alloys and the rapid uses a self-assembly approach to create high-density amorphous-crystalline phase change that they exhibit are nanoscale quantum wire structures that provide the basis being investigated using ellipsometry, optical absorption for high quantum efficiency infrared detection. The and reflection spectroscopy, photoconductivity, QWRIP combines the best features of the quantum well photoluminescence, electrical conductivity, Hall effect, infrared photodetector (QWIP) and quantum dot infrared high resolution TEM, and fluctuation electron microscopy. photodetector (QDIP) to offer normal incidence Specific problems include: optical, electronic, and absorption, high quantum efficiency, and adjustable structural characterization of sputtered thin films of the infrared absorption from 8 to 40 μm. Unique polarization materials; the effects of composition, conditions of sensitive absorption properties of quantum wires enable synthesis, thermal annealing, and optical or e-beam two distinct quantum wire infrared detection layers (or a irradiation on their properties; detection and quantum wire layer and a quantum well layer) with characterization of nano-crystallites in the amorphous different spectral responses to be monolithically integrated phase and their role in the phase change mechanism; and without interference, yielding excellent color contrast. the spatial limits/resolution of the phase change, aimed at fabricating quantum structures.

* Denotes principal investigator.

37 Center of Hyper-Uniform Nanophotonic Technologies Ultra-High-Speed Heterojunction Bipolar Transistors for Ultra-Fast Optoelectronic Systems (HUNT Center) K.-Y. Cheng* K.-Y. Cheng,* M. Feng,* N. Holonyak, Jr.,* [email protected] K. C. Hsieh, R. D. Dupuis* (Georgia Tech Univ.), Semiconductor Research Corporation, SRC-2001-NJ-946 V. Narayanamurti* (Harvard Univ.), Conducted in the Micro and Nanotechnology Laboratory W. I. Wang* (Columbia Univ.) [email protected] The goal of this research is to develop viable techniques Defense Advanced Research Projects Agency, University that allow demonstration of Inp-based HBTs with Photonics Research Centers Program, fT>400GHz for insertion into the ultra-high-speed (>100 HR0011-04-1-0034 GHz) circuits. Conducted in the Micro and Nanotechnology Laboratory VCSEL and Smart Pixel Research for VLSI Photonic Systems The mission of the HUNT Center (Center of Hyper- K.-Y. Cheng,* N. Holonyak, Jr.,* M. Feng,* Uniform Nanophotonic Technologies for Ultra-Fast K. C. Hsieh* Optoelectronic Systems) is the development of critical [email protected] technologies, including hyper-uniform nano-photonic Defense Advanced Research Projects Agency, fabrication, high performance quantum dot vertical-cavity DAAG55-98-1-0303 surface-emitting lasers, and ultra-fast light-emitting transistor-based lasers for the realization of ultra-fast Conducted in the Micro and Nanotechnology Laboratory (≥100Gb/s) optoelectronic interconnect systems. Center The purpose of this research is to develop technology programs encompass semiconductor nanoscale materials related to VLSI photonic systems. The scope of the growth, nano-patterning, nanoscale material analysis, program ranges from basic materials research, to the nanostructure laser device design and fabrication, optical fabrication of large-scale integrated circuits, to advanced receiver design and fabrication, as well as high-speed technologies for the integration of systems in optoelectronics integrated heterogeneously on a common heterogeneous materials. Goals of the project include the semiconductor platform to perform ultra-fast optical design, growth, fabrication, and testing of III-V interface functions. semiconductor vertical cavity surface-emitting lasers; the GaAs-Based Metal-Oxide-Semiconductor Structures development of smart pixels, circuits for the detection of K -Y. Cheng,* K. C. Hsieh* optical signals, intelligent routing of the information, and [email protected] re-emission of optical signals; and the development of Agere Systems techniques for the integration of heterogeneous materials. Conducted in the Micro and Nanotechnology Laboratory Materials Research for High-Performance Optoelectronic Devices Employing III-V Compound The goal of this research program is to develop oxide Semiconductor Native Oxide Layers deposition techniques for the fabrication of GaAs-based N. Holonyak, Jr.* metal-oxide-semiconductor field effect transistors National Science Foundation, DMR-9612283 (MOSFETs). Various oxides, including SiO2, Al2O3, Conducted in the Micro and Nanotechnology Laboratory Ga2O3, and Gd3Ga5O12 are deposited on GaAs in an ultrahigh vacuum system at Bell Laboratories to form MOS The primary thrust of this program is the growth and structures. Researchers will characterize their structural, characterization of heteroepitaxial materials employing optical, and chemical properties through transmission quantum wells, quantum dots, layer disordering, and native electron microscopy, photoluminescence spectroscopy, oxide device definition, e.g. buried apertures. This work is and Auger electron spectroscopy, respectively, to improve focused on the development of better lasers, LEDs, and the oxide deposition process. transistor lasers.

* Denotes principal investigator.

38 Surface Engineering for Compliant Epitaxy close proximity to a superconductor, and superconductor K. C. Hsieh,* K.-Y. Cheng,* I. Adesida phase electronics based on Josephson tunneling and Defense Advanced Research Projects Agency, SQUIDs. Supporting this effort will be a theory component F49620-98-1-0496 that addresses key issues concerning the evolution and monitoring of quantum-entangled states and an Conducted in the Micro and Nanotechnology Laboratory experimental study of qubit dynamics using the highly The goal of this research is to realize dislocation-free and developed techniques of modern quantum optics. stress-relaxed lattice mismatched epitaxy growth of Biologically Inspired Artificial Haircell Sensors different compound semiconductors on various substrates C. Liu,* D. L. Jones, F. Delcomyn across the whole wafer or on selected areas for device U.S. Air Force Office of Scientific Research, integration applications. Our immediate goals include F49620-01-1-0496 fundamental understanding of the growth conditions related to the formation of strained-modulated and defect- Conducted in the Micro and Nanotechnology Laboratory absorbing templates and the development of techniques to This work is aimed at developing artificial haircell sensors fully control the formation of strain-absorbing and that are inspired by biological haircell sensors. This work deformable growth templates with an emphasis on is focused on studying the fundamental principles of processing simplicity and system integrability. InP-based neurological responses of haircells to develop optoelectronic and microwave devices will be integrated micromachined devices that mimic the performance of selectively on surface-engineered GaAs substrates. biological entities. Wafer Bonding for Advanced Optoelectronic Devices CAD Design Tools for Millimeter-Wave Wireless K. C. Hsieh,* K.-Y. Cheng Communication Microsystems Defense Advanced Research Projects Agency, MDA C. Liu,* M. Feng, S. M. Kang, E. Michielssen, 972-00-1-0020 J. Schutt-Ainé Conducted in the Micro and Nanotechnology Laboratory Defense Advanced Research Projects Agency, Composite- CAD Program, F30602-97-0328 The goal of this research is to develop wafer-bonding technologies for hybrid integrating mismatched device Conducted in the Micro and Nanotechnology Laboratory structures for advanced optoelectronic integrated circuits. A mixed technology computer-aided design system is The potential applications include fabricating high- being developed for the cost effective design of wireless performance visible LEDs, vertical-cavity-surface- communication modules that will ultimately enable emitting lasers, resonant-cavity photodetectors, 2-D and 3- networked distributed MEMS. The module, operating at D photonic crystals, and high-performance semi-insulating millimeter-wave frequencies, will allow direct interface wafer substrates. Our current efforts are focused on between MEMS transducers and the free-space developing high-efficient wafer-bonding strategy and electromagnetic radiation. MEMS components offer fundamental understanding of the hybrid interface unique advantages for RF circuits. As an example, properties, including interface microstructures, electrical micromechanical switches exhibit lower insertion loss and and optical characteristics, interface strain/stress and higher isolation compared with conventional electronics adhesion properties, and so forth. The long-term goals will switching components. MEMS fabrication technology for include developing chip-scale photonic/electronic silicon and composed semiconductor materials is being integration methodologies for high-density 3-D studied in order to realize mechanical RF switches as well architectures. as high-gain antennas to validate results of the E-M ITR/SY: Foundations of Solid-State Quantum simulation. Information Processing Efficient Computational Prototyping of Mixed P. G. Kwiat,* A. J. Leggett, M. B. Salamon, J. R. Tucker, Technology Microfluidic Components and Systems D. Van Harlingen C. Liu* National Science Foundation, EIA-01-21568 Defense Advanced Research Projects Agency The core of this program is an exploration of three distinct Conducted in the Micro and Nanotechnology Laboratory but related solid state technologies as candidates for quantum information processing: single spins on The objective is to develop microfluid components individual P-donors in silicon, ferromagnetic particles in (including pumps and valves), materials (including

* Denotes principal investigator.

39 polymeric MEMS and biodegradable materials), and Integrated Sensitive Skin with Advanced Data applications (including drug delivery systems). Microfluid Architecture circuits are on the scale of micrometer to millimeter; they C. Liu,* N. Shanbhag, D. L. Jones are used to transport biological and chemical materials. National Science Foundation, IIS 00-80639 Integrated Biomimetic Sensors Using Artificial Hair Conducted in the Micro and Nanotechnology Laboratory Cells An interdisciplinary team of researchers will develop C. Liu,* F. Delcomyn microfabricated, multiple modality sensor skin with National Aeronautics and Space Administration, NAG advanced data structure and signal processing algorithms. 5-8781 A flexible sensor skin that imitates biological tactile Conducted in the Micro and Nanotechnology Laboratory sensors faces important challenges in terms of microfabrication, materials, density of sensors, and The main focus of this work is to develop prototype accompanying circuits. Prof. Liu and students will develop micromachined artificial haircell (AHC) sensors that can advanced multimodal sensors with self-configuration be used as modular building blocks for a variety of sensors capabilities. Prof. Shanbhag is developing energy efficient for sensing acceleration, flow rate, and tactile information. signal processors, while Prof. Jones is interested in Integrated Capillary Microelectrode Arrays for developing signal processing algorithms that are Studies of Olfactory Response Patterns in the Insect biologically inspired. Brain Mechanically Conformal and Electronically C. Liu* Reconfigurable Aperture (RECAP) Using Low- Defense Advanced Research Projects Agency, Controlled Voltage MEMS and Flexible Membrane for Space- Biological Systems Program Based Radar Applications Conducted in the Micro and Nanotechnology Laboratory C. Liu* This project aims to develop the first arrayed capillary Defense Advanced Research Projects Agency microelectrodes using integrated microfabrication Conducted in the Micro and Nanotechnology Laboratory technology and to demonstrate the enhanced capabilities The objective is to develop micromachined antennas with for monitoring neurological behavior of insect olfactory reconfigurible wavelength and directionality using systems. micromachined switches. We are currently developing Integrated Sensing: Biomimetic Sensors for micromachining processes based on polymeric materials Autonomous Underwater Vehicles to realize three-dimensional RF MEMS. C. Liu,* G. Karniadakis, C. Chryssostomidis CAREER: Biologically-Inspired Integrated Sensors National Science Foundation, ECS 02-25S19 for Robotics Applications Conducted in the Micro and Nanotechnology Laboratory C. Liu* A team of researchers from the University of Illinois and National Science Foundation, IIS 99-84954 CAR the MIT Ocean Engineering Department join efforts in Conducted in the Micro and Nanotechnology Laboratory developing artificial lateral line sensors for autonomous This CAREER award is aimed at imitating biological underwater vehicles (AUV) that are useful for underwater haircell sensors that are widely used in the biological exploration, warfare, and security. The lateral line sensor world. The research is focused on developing is a basic flow sensor for nearly all species of fish and many micromachined artificial haircell sensors for flow sensor amphibian animals. We will develop micromachined applications. underwater flow sensors with artificial haircells, shear stress sensors based on thermal transfer, and pressure Research Experience for Undergraduates (REU) sensors. Such sensors will be developed on a flexible C. Liu* substrate suitable for underwater applications. National Science Foundation, IIS 99-84954 REU Conducted in the Micro and Nanotechnology Laboratory This grant provides undergraduate students with opportunities to conduct advanced research projects in C. Liu's research group.

* Denotes principal investigator.

40 Wavefunction Engineering of Individual Donors for Si- in unique ways, and they may serve as the basis for Based Quantum Computers chemical and biological sensors. J. Tucker,* M. Feng, Y. C. Chang, Self-Healing Materials T. C. Shen (Utah State Univ.), R. R. Du (Univ. of Utah) P. V. Braun,* S. H. Cho, S. White, N. Sottos* U.S. Army Research Office, 42257-PH-QC U.S. Air Force Office of Scientific Research The goal of this multi-investigator program is to develop A new environmentally stable self-healing system has been the basic fabrication and measurement technologies developed based on the polycondensation of PDMS. This needed to implement a silicon-based quantum computer. system is stable to water and oxygen, and uses a low-cost To do this, researchers must place individual phosphorous stable tin catalyst system. Healing efficiencies of up to 50% donors into the silicon lattice with atomic precision, have been observed slightly above room temperature. establish electrical control over wavefunction overlap between donor-pairs, and successfully detect spin states of Studies of Surface Diffusion the resulting two-electron system by measuring the P. V. Braun,* C. Heitzman, H. Tu presence or absence of electronically-induced polarization. Arnold and Mabel Beckman Foundation The research team does not propose working quantum The diffusive transport of small molecules and ions in one logic gates within this three-year project. If successful, and two dimensions on a surface is being studied as a however, that goal will be undertaken in a follow-up function of surface chemistry. Gold surfaces have been program that incorporates SiGe overgrowth and patterning coated with oligo(ethylene oxide) and alkane thiol of individual top-gates for each P-atom donor. molecules, and silica surfaces have been functionalized with molecules of varying length and bulkiness. The Soft Materials surface is then dosed with a submonolayer coating of fluorescent molecules, and the diffusion of the molecules Photonic Crystal-Based Chemical Sensors is studied via laser scanning confocal microscopy. P. V. Braun,* Y. J. Lee Confocal Raman Studies of Confined Fluids U.S. Department of Energy, DE-FG02-91ER45439 S. Granick,* S. C. Bae We demonstrate the synthesis, swelling kinetics, and U.S. Department of Energy, DE-FG02-02ER46019 optical diffraction of inverse opal hydrogel sensors with a In cooperation with the Frederick Seitz Materials pH sensitivity of 0.01 pH units using touching colloidal Research Laboratory crystal templates. Among the advantages for this system are facile diffusion and thus relatively rapid response due For the first time, Raman spectroscopy is being employed to an interconnected pore structure and good mechanical to study the structure and dynamical responses of fluids stability. The mesoporous hydrogels were based on within nanometer-thin films. Using a modified surface HEMA-AA copolymers and exhibited pH-dependent forces apparatus, the orientation of fluids and the shifts in optical diffraction that were regulated by the AA modification of their structure under shear deformations concentration. are being studied. By discriminating the vibrational responses of different functional groups along the same Self-Assembly of 3-D Multifunctional Ceramic molecule, the relative orientation of different functional Composites for Photonics and Sensors groups is discriminated. P. V. Braun,* P. Wiltzuis, A. Wolosiuk, M. George, M. Shyr, R. Barry Exceptions to the Conventional No-slip Boundary Army Research Office, DAAD19-03-1-0227 Condition of Continuum Hydrodynamics S. Granick,* J. S. Wong We are studying new routes for the self-assembly of National Science Foundation, CMS0119626; U.S. ceramic composites including colloidal self-assembly. Department of Energy, DE-FG02-02ER46019 Examples include self-assembly of spherical ceramic objects that are on the order of 0.5 to 1 micrometer in In cooperation with the Frederick Seitz Materials diameter, multiphoton writing of ceramic waveguide Research Laboratory structures inside of colloidal crystals, and biologically Viscous flow is familiar and useful, yet the underlying directed assembly, for example by using DNA or proteins. physics is surprisingly subtle and complex. Recent The resulting structures have the potential to modulate light experiments and simulations show that the textbook assumption of "no slip at the boundary" can fail massively * Denotes principal investigator.

41 when walls are sufficiently smooth. The reasons appear to measurements on model systems (at the University of involve materials chemistry interactions that can be Illinois) with measurements of systems of immediate controlled, especially wettability and the presence of trace practical importance (Koc University, Istanbul, ). impurities, even of dissolved gases. Modulation of the no- Variables of interest include polymer molecular weight, slip boundary condition in a modified surface forces degree of crystallinity, and intensity of polymer-filler apparatus can result in surprisingly large energy savings interaction. (by orders of magnitude) in viscous flow of Newtonian Sum-Frequency Generation Studies of Confined Fluids fluids. S. Granick,* J. Turner, S. C. Bae Fluorescence Correlation Spectroscopy (FCS) of U.S. Department of Energy, DE-FG02-02ER46019 Confined Fluids In cooperation with the Frederick Seitz Materials S. Granick,* L. Hong, J. Zhao Research Laboratory and the Department of Chemistry U.S. Department of Energy, DE-FG02-02ER46019 The surface sensitive nonlinear spectroscopic method of In cooperation with the Frederick Seitz Materials sum-frequency generation is being applied in the Research Laboratory broadband mode using femtosecond lasers, in order to It is not unusual to postulate that liquids undergo a phase resolve those molecules immediately at solid-liquid transition when they are confined between two solids to be interfaces where the environment lacks a center of molecularly thin. We investigate this hypothesis symmetry. It is being applied in particular to experimentally using the technique of fluorescence implementation within a modified surface force apparatus. correlation spectroscopy, which as implemented here Surface Diffusion of Adsorbed Polymers quantifies the translational diffusion rates of probe S. Granick,* L. Hong, J. Zhao molecules embedded at nanomolar concentration within U.S. Department of Energy, DE-FG02-02ER46019 the fluids. An extraordinary dependence on the normal load and on the shear rate is under investigation. In cooperation with the Frederick Seitz Materials Research Laboratory Nanofluidics S. Granick,* L. Zhang, L. Hong, S. C. Bae The dynamics of polymers at the solid-liquid interface U.S. Department of Energy, DE-FG02-02ER46019 underlies numerous applications including rheology and steric stabilization, yet surprisingly little is known from In cooperation with the Frederick Seitz Materials direct measurement. In these studies, we measure Research Laboratory translational diffusion directly using fluorescence The directed flow of fluids contained within small channels correlation spectroscopy. Studies of the polyethylene oxide constitutes an emerging theme of modern chemistry and system show a surprising transition from relatively rapid materials science. New applications are proliferating, for diffusion, to far slower diffusion, as the surface coverage example in the fields of microfluidics, chemical analysis, increases. and protein crystallization. Most prior work has concerned channels whose cross-section dimensions are on the order Solid State Devices of micrometers to hundreds of micrometers. It is also attractive to consider the potential for directed flow of Luminescence and Laser Studies in III-V molecules contained within molecularly thin layers. This Semiconductors we accomplish by embedding small molecules within N. Holonyak, Jr.,* G. Walter adsorbed polymers (layers that are one molecule thick) and National Science Foundation, ECS 82-00517 studying the diffusion rate using fluorescence correlation spectroscopy. Conducted in the Micro and Nanotechnology Laboratory in conjunction with the Department of Physics Polymer Fillers and the Role of Interfacial Rheology S. Granick,* A. L. Demirel Heterojunctions in AlxGa1-xAs-GaAs and related materials National Science Foundation, International Programs, are being examined. Quantum size effects have been INT-9810529 observed and have led to single and multiple active layer In this collaborative effort, researchers study the role of quantum-well diode light emitters and lasers. Stimulated polymer-solid interfacial interactions by relating emission, absorption, disorder, alloy clustering, carrier scattering, phonon processes, tunneling effects, and

* Denotes principal investigator.

42 impurity diffusion in these structures are being studied. structures and to investigate their interaction with Impurity-induced disordering and Al-bearing native macromolecules such as DNA. The results of the oxides are being studied and used to form stripe-geometry simulations will be used to design new molecules, which lasers and more complicated array structures. Quantum will be synthesized and tested by experimental methods. well lasers have been operated in an external grating cavity in an extended wavelength range. Newer forms of Thin Films and Charged Particles quantum-well lasers have been realized, including native- oxide-defined lasers and waveguides. Quantum dot lasers Synthesis and Study of Tailored Organometallic, coupled to quantum well lasers are being studied. Also, Inorganic, and Polymeric Precursors for Sol-Gel heterojunction bipolar light emitting transistors (HBLETs) Processing, Charged Liquid Cluster Beam Deposition, have been identified and are being studied; these include and Chemical Vapor Deposition HBLETs both with and without quantum well and quantum H. Choi,* K. Kim,* S. Lim, M. G. Kang dot modifications. [email protected] Quantum-Well Heterostructures APL Engineered Materials N. Holonyak, Jr.,* G. Walter To fabricate highly ordered micro and nano structures, National Science Foundation, DMR 89-20538 such as nanowires, nanoparticles, and thin films of Conducted in the Micro and Nanotechnology Laboratory controlled chemical composition and stoichiometry by in cooperation with the Department of Physics and the charged liquid cluster beam technique, chemical vapor Frederick Seitz Materials Research Laboratory deposition (CVD), and Sol-Gel processing, it is crucial to have precursors with desired properties. Such precursors The fundamental properties of III-V heterostructures are designed, synthesized, and their physical properties are grown by vapor phase epitaxy are being studied. On evaluated by analyzing the materials prepared from them. quantum-well MOCVD AlGaAs-GaAs heterostructures, Resulting optimal precursors are used to fabricated the laser operation 400 meV above E (GaAs) has been g desired highly ordered nanoscale structures. observed, the first cw 300 K laser operation has been achieved, laser operation on phonon-sidebands below the Precision Particle Fabrication: The Targeted Delivery confined-particle states has been observed, and alloy of Microsphere Encapsulated Aminobisphosphonates disorder and clustering in quantum-well heterostructures for Treating Autoimmune and Neoplastic Diseases of have been identified. Impurity-induced disordering of The Mononuclear Phagocytic System quantum-well heterostructures and Al-bearing native T. Fan,* S. Charney,* K. Kim,* H. Choi,* C. Kyung oxides, that is, the native oxide of AlxGa1-xAs formed at [email protected] Veterinary Medical Research Funds 400° to 500°C with H2O + N2, are being examined via TEM and photoluminescence studies. This project is the first The main objective of this multidisciplinary initiative is to (1977) to realize p-n quantum-well lasers and to coin the successfully encapsulate two aminobisphosphonates, name "QW lasers." pamidronate and zoledronate, into hydroxyethyl starch microspheres using a patent-pending technology known as Theoretical Biological and precision particle fabrication. The long-term goals of this pilot investigation would be to develop a novel, Biomolecular Physics commercially viable therapeutic modality for treating autoimmune and neoplastic disorders involving the Single Molecule Detection in Living Cells and Tissues mononuclear phagocytic system. Using a New Class of Optical Sensors Based on Single Walled Carbon Nanotubes M. Strano (Chem. Biomol., Engr.),* K. J. Schulten University of Illinois, Beckman Seed Proposal This project investigates the application of carbon nanotubes in designing nanodevices that are of potential use in a variety of biological applications. The project is a combined experimental and theoretical one in which simulation methodologies are used to design nanotube

* Denotes principal investigator.

43 Tissue Engineered Scaffolds with Imbedded capsules of precise size, shell thickness, porosity, and Microspheres to Improve Bone and Soft Tissue Healing charge are investigated for various applications in Through Controlled Delivery of Growth Factors biotechnology. Applications under investigation include R. Jamison,* K. Kim,* H. Choi,* Y. Choy, A. Morgan, advanced drug delivery, tissue engineering, biosensor/ A. Sendemir-Urkmez, C. Kearney, C. Kyung biomarker development, and bioavailability enhancement [email protected] of functional foods. Mechanical, hydrodynamic, electrical, College of Engineering and sol-gel techniques and their combinations are used to fabricate the particles. The smallest particles fabricated to This research is to optimize the design of tissue engineering date are in the 10-nanometer range, and the largest in the substitutes for bone by understanding the relationship mm range. between the size, structure, and distribution of microspheres in porous scaffolds and their drug release Electromagnetic Railgun Hydrogen-Pellet Accelerator characteristics. An array of microspheres from chitosan for Magnetic Fusion Reactor Refueling and hydrogel polymer, biocompatible material currently K. Kim,* H. Fan used for treatment of burns and delivery of drugs, will be U.S. Department of Energy, DE-FG02-84ER52111 produced, loaded with growth factors, and then embedded Feasibility of an electromagnetic railgun as a high-velocity in porous scaffolds of the same polymers. The rate, (~10 km/s) hydrogen pellet injector for refueling magnetic concentration, and duration of drug release will be fusion reactors is investigated both experimentally and measured in vitro for several growth factors that have theoretically. A variety of advanced railgun configurations shown promise in other studies. are considered, especially those that rely on magnetic Coating of Liquid Crystal Display Panel Components propulsion of the pellet by a plasma-arc and that Using the Charged Liquid Cluster Beam Technique do not require a fuse to effect the system operation. The K. Kim,* H. Choi,* S. H. Rhee principal diagnostics used are laser interferometry, optical LG. Philips LCD spectroscopy, streak camera, and magnetic probes. A CAMAC system is employed for data acquisition and In collaboration with Beckman Institute for Advanced processing. Using the present acceleration scheme, a solid Science and Technology hydrogen pellet velocity in the range of 3.3 km/s has been This work focuses on extensive utilization of the CLCB demonstrated. technique developed by this research group for deposition Epitaxial Growth and Characterization of GaN-Based of films needed for the manufacture and development of Materials and Application to Electronic and Optical high-performance LDCs. In particular, the work makes use Devices by Plasma-Assisted Molecular Beam Epitaxy of the unique capabilities of the CLCB technique to K. Kim,* S. H. Rhee, C. W. Park produce high-quality films of controlled chemical Concorde Diversified, Inc. compositions and stoichiometries that are needed for various key LCD components, including metallic The objective of this work is to grow device-quality GaN- semiconducting and insulating films. These films are based films for fabrication of short-wavelength optical characterized and evaluated using the microanalysis devices and high-speed, high-power electronic devices. facilities at the University of Illinois. The growth technique used is the plasma-assisted molecular beam epitaxy that employs an atomic nitrogen Development of Methods for Fabricating Uniform beam from an rf-discharge nitrogen plasma and a Ga source Micro- and Nanospheres and Capsules of beam. The growth system is one designed and fabricated Biodegradable and Biocompatible Materials for at the University of Illinois, and the nitrogen plasma source Application to Biotechnology is uniquely capable of producing contamination-free K. Kim,* H. Choi,* Y. Choy, C. Kyung, A. Simnick; plasmas. The films are characterized using a variety of D. Pack, C. Berkland (Chem. Engr.); microanalysis techniques including RHEED, XRD, SEM, R. Jamison (Mat. Sci. & Engr.); and TEM. K. Singletary (Food Sci. & Human Nutri.) [email protected] Dong Wha Pharmaceutical; Alkermes Advanced methods of fabricating uniform biodegradable and biocompatible micro- and nanospheres and multilayer

* Denotes principal investigator.

44 Epitaxial Growth and Characterization of GaN-Based Investigation of Plasma-Material Interaction Using Nitride Semiconductors Using Plasma-Assisted Transaugmented Electromagnetic Railgun Molecular Beam Epitaxy for Development of High- K. Kim* Speed, High-Power Heterostructure Electronic Devices U.S. Department of Energy K. Kim,* I. Adesida,* S. J. Hong, T. Day, C. W. Park Feasibility of employing a transaugmented ETRI Electronics, Inc. electromagnetic railgun as a testbed with which to study The dual objectives of this work are to grow and plasma-material interaction is investigated both characterize device-quality heterostructure GaN-based experimentally and theoretically. A variety of advanced films and use them to develop high-speed, high-power railgun configurations are considered that allow for electronic devices. The materials growth is achieved using separate control of the velocity, temperature, and density a plasma-assisted molecular beam epitaxy system designed of the free-traveling plasma-arc armature. The principal and fabricated at the University of Illinois. The plasma diagnostics used are laser interferometry, optical source is capable of producing contamination-free nitrogen spectroscopy, streak camera, and magnetic probes. A plasmas. The films are characterized using a variety of CAMAC system is used for data acquisition and microanalysis techniques including RHEED, XRD, SEM, processing. TEM, AFM, PL, CL, SIMS, and Hall measurement. Nanowire and Nanotube Interconnect Technology for Investigation of Methods for Controlled Fabrication of 3-D ICs Thin Films and Nanoparticles Using Charged Liquid K. Kim,* H. Choi,* A. Cangellaris,* M. G. Kang, Cluster Beams of Precursor Solutions S. Lim, N. McDonnell K. Kim,* H. Choi,* R. Singh, C. Kyung, T. Day, [email protected] N. McDonnell Synchrotron Radiation Center [email protected] To improve on-chip interconnect performance beyond the LG. Philips LCD 65 nm node, 3-D interconnects and nanotubes are A novel scheme utilizing flow-limited field-injection investigated, with the focus placed on better understanding electrostatic spraying (FFESS) of precursor solutions is of their material properties, their compatibility with investigated to develop methods of fabricating thin films semiconductor processing techniques, and the and nanoparticles of controlled size and morphology. The development of macroscopic models to facilitate unique aspects of the FFESS technique is its inherent quantification of their impact on performance capability to produce uniform, charged nanodrops of enhancement. The proposed research will be founded on controlled size, chemical composition, and stoichiometry, novel processes for the growth of both vertical nanowires allowing for fabrication of high-quality films and uniform and carbon nanotubes along with a cross-disciplinary nanoparticles. Specific applications include fabrication of expertise in the areas of nanotechnology, novel materials catalytic nanoparticles to facilitate development of synthesis, nanoscale chemical processing, and signal advanced displays and deposition of polymer films for integrity-driven electromagnetic interconnect modeling OLED development. and simulation. Investigation of Novel Approaches to Fabricating A Novel Method for Preparing Thin Films and Micro and Nanoscale Structures for Development of Nanoparticles by Using Charged Liquid Cluster Beams New Devices for Lighting, Display, and Power Storage of Liquid-Mix Precursors K. Kim,* H. Choi,* J. Gao,* M. G. Kang, S. Lim K. Kim,* H. Choi,* Y. Yang [email protected] University of Illinois APL Engineered Materials A novel scheme using field-injection electrohydrodynamic Charged liquid cluster beam technique, chemical vapor spraying of liquid-mix precursors is investigated for deposition (CVD), Sol-Gel processing, and other chemical development of a method for fabricating thin films of and physical techniques are utilized, either individually or metals, semiconductors, superconductors, and insulators. in combinations, to fabricate highly ordered micro and The same technique is also suitable for fabricating nano structures, such as nanowires, nanoparticles, and thin nanoparticles from a variety of liquid precursors. Unique films, of certain technologically important materials. The aspects of this new technique are that it is inherently target of this investigation is to develop novel device capable of producing a uniform, charged fine spray of concepts for lighting, display, and power storage. liquid precursors of controlled size, chemical composition,

* Denotes principal investigator.

45 and stoichiometry, and that the energy of the spray can be National Science Foundation; U.S. Department of Energy; controlled, allowing for fabrication of high-quality films DuPont and uniform nanoparticles. Certain classes of organic materials, ranging from small Design of Microparticles for Precision Drug Delivery molecules to polymers to carbon nanotubes and graphite, D. Pack,* K. Kim,* H. Choi, C. Berkland, Y. Choy, show interesting electronics properties. Some of these C. Kyung materials may offer application possibilities as thin film [email protected] transistors for flexible electronic devices. In addition, National Institutes of Health many of the materials and processing approaches developed for this area are important for a variety of In Collaboration with Chemical and Biomolecular emerging carbon-based nanoelectronic systems that might Engineering have roles in future high density memories or processors. The primary goal of this project is to investigate the effects This project focuses on fundamental and applied aspects of microparticle size and size distribution, and the shell related to the active organic materials and the lithographic thickness of microcapsules, on small molecule drug methods that are used to pattern circuits out of them. encapsulation and release. We have developed a novel Printable Forms of Single Crystal Inorganic method for fabrication of uniform polymer microspheres Semiconductors for Flexible Electronics and microcapsules that allows precise control of the J. A. Rogers* particle diameter and shell thickness. By controlling the Defense Advanced Research Projects Agency particle size, we showed we could achieve zero-order release of model drugs and discovered several competing The goal of this project is to fabricate thin film electronics mechanisms that can affect release rates. Four model drugs with nearly-single-crystal performance onto flexible that span a range of sizes and water solubility will be substrates. Using reactive magnetron sputtering, we investigated: piroxicam, ciprofloxacin, ganciclovir, and deposit insulating a-SiNx and semiconducting a-Si thin cyclosporin. films onto polymeric substrates at low temperatures. The a-Si layers are transformed into crystalline Si using Thin-Film Electronics excimer laser processing in the sequential lateral solidification mode (by James Im at Columbia University), and devices are processed at the Sarnoff Laboratories. We Ge-Sb-Te Phase Change Materials: Optical and analyze the Si layer quality and evaluate the test devices. Electronic Properties, Structural Transformations, and Nanostructures J. R. Abelson,* B. S. Lee, K. Darmawikarta, Journal Articles S. Bishop* (Elec. & Comput. Engr., Physics) National Science Foundation, NSF-DMR 04-12939 Biochemical and Biomedical We synthesize and analyze the phase-change chalcogenide Ge2Sb2Te5 and related alloys that are used as nonvolatile Engineering data storage media: they can be reversibly transformed from an amorphous semiconducting state to a crystalline Kong, H. J., Hsiong, S., and Mooney, D. J. Nanoscale cell semimetallic state, which dramatically changes the optical adhesion ligand presentation regulates nonviral gene reflectivity (as employed in RW-CVDs) and electrical delivery and expression. Nano Letters, 7:1, 161-166 (Jan. conductivity (as proposed for flash memory devices). The 2007). goals are to understand the relationship between nanostructure, transformation kinetics, and the resulting Bioinstrumentation electronic properties. Plastic and Molecular Electronics Kim, B. Y., Swearingen, C. B., Ho, J. A., J. A. Rogers* Romanova, E. V., Bohn, P. W., and Sweedler, J. V. Direct Defense Advanced Research Projects Agency; The immobilization of Fab' in nanocapillaries for Grainger Foundation; Petroleum Research Fund; manipulating mass-limited samples. Journal of the American Chemical Society, 129:24, 7620-7626 (Jun. 2007).

* Denotes principal investigator.

46 Pandit, S. A., Khelashvili, G., Jakobsson, E., Grama, A., Microchemical, Microfluidic, and and Scott, H. L. Lateral organization in lipid-cholesterol Nanochemical Systems mixed bilayers. Biophysics Journal, 92, 440-447 (2007).

Perring, M., Mitchell, M., Kenis, P. J. A., and Varma, S. and Jakobsson, E. The cPLA2 C2alpha Bowden, N. B. Patterning by etching at the nanoscale domain in solution: Structure and dynamics of its Ca2 (PENs) on Si(111) through the controlled etching of +-activated and cation-free states. Biophysics Journal, PDMS. Chemistry of Materials, 19:11, 2903-2909 (May 92, 966-976 (2007). 2007) (http://dx.doi.org/10.1021/cm062988n). Optical Physics and Engineering Nanoscale Mechanics and MEMS Agarwal, A. and Kushner, M. J. Characteristics of pulsed Chasiotis, I., Bateson, C., Timpano, K., McCarty, A., plasma doping sources for ultrashallow junction Barker, N. S., and Stanee, J. Strain rate effects on the formation [art. no. 063305]. Journal of Applied Physics, mechanical behavior of nanocrystalline Au films. 101:6, 63305 (Mar. 2007) (http://dx.doi.org/ Journal of Thin Solid Films, 515, 3183-3189 (2007). 10.1063/1.2433746).

Chasiotis, I., Bateson, C., Timpano, K., McCarty, A., Arakoni, R. A., Babaeva, N. Y., and Kushner, M. J. O2 Barker, N. S., and Stanee, J. Strain rate effects on the (1Δ) production and gain in plasma pumped oxygen– mechanical behavior of nanocrystalline Au films. iodine lasers: Consequences of NO and NO2 additives. Journal of Thin Solid Films, 515, 3183-3189 (2007). Journal of Physics D: Applied Physics, 40:16, 4793-4809 (Aug. 2007). Naraghi, M., Chasiotis, I., Dzenis, Y., Wen, Y., and Kahn, H. Mechanical deformation and failure of Arakoni, R. A., Bhoj, A. N., and Kushner, M. J. H2 electrospun polyacrylonitrile nanofibers as a function generation in Ar/NH3 microdischarges. Journal of of strain rate. Applied Physics Letters, 91, 151901 (2007). Physics D: Applied Physics, 40:8, 2476-2490 (Apr. 2007) (http://dx.doi.org/10.1088/0022-3727/40/8/010). Naraghi, M., Chasiotis, I., Dzenis, Y., Wen, Y., and Kahn, H. Mechanical deformation and failure of Babaeva, N. Y., Arakoni, R., and Kushner, M. J. O2(Δ) electrospun polyacrylonitrile nanofibers as a function production in high pressure flowing He/O2 plasmas: of strain rate. Applied Physics Letters, 91, 151901 (2007). Scaling and quenching [art. no. 123306]. Journal of Applied Physics, 101:12, 23306 (Jun. 2007). Naraghi, M., Chasiotis, I., Dzenis, Y., Wen, Y., and Kahn, H. Novel method for mechanical Block, I. D., Chan, L. L., and Cunningham, B. T. Large- characterization of polymeric nanofibers. Review of area submicron replica molding of porous low-k Scientific Instruments, 78, 085108 (2007). dielectric films and application to photonic crystal biosensor fabrication. Microelectronic Engineering, Naraghi, M., Chasiotis, I., Dzenis, Y., Wen, Y., and 84:4, 603-608 (Apr. 2007) (http://dx.doi.org/10.1016/ Kahn, H. Novel method for mechanical j.mee.2006.12.011). characterization of polymeric nanofibers. Review of Scientific Instruments, 78, 085108 (2007). Chan, L. L., Cunningham, B. T., Li, P. Y., and Puff, D. Self-referenced assay method for photonic crystal Nanoscience biosensors: Application to small molecule analytes. Sensors and Actuators B: Chemical, 120:2, 392-398 (Jan. Pandit, S. A., Chiu, S.-W., Jakobsson, E., Grama, A., and 2007) (http://dx.doi.org/10.1016/j.snb.2006.02.047). Scott, H. L. Cholesterol surrogates: A comparison of Chan, L. L., Gosangari, S. L., Watkin, K. L., and cholesterol and 16:0 ceramide in POPC bilayers. Cunningham, B. T. A label-free photonic crystal Biophysics Journal, 92, 920-927 (2007). biosensor imaging method for detection of cancer cell cytotoxicity and proliferation. Apoptosis, 12:6, 1061-1068 (Jun. 2007).

47 Choi, C. J. and Cunningham, B. T. A 96-well microplate Ricconi, B. J., Park, S. J., Sung, S. H., Tchertchian, P. A., incorporating a replica molded microfluidic network and Eden, J. G. OH(A2Σ+) and rare gas–deuteride (NeD, integrated with photonic crystal biosensors for high ArD) excimers generated in microcavity plasmas: throughput kinetic biomolecular interaction analysis. Ultraviolet emission spectra and formation kinetics Lab on a Chip, 7:5, 550-556 (2007) (http://dx.doi.org/ [art. no. 201504]. Applied Physics Letters, 90:20, 1504 10.1039/b618584c). (May 2007).

Ganesh, N., Xiang, A., Beltran, N. B., Dobbs, D. W., and Ricconi, B. J., Park, S. J., Sung, S. H., Tchertchian, P. A., Cunningham, B. T. Compact wavelength detection and Eden, J. G. Ultraviolet emission from OH and ArD system incorporating a guided-mode resonance filter in microcavity plasma devices. Electronics Letters, [art. no. 081103[. Applied Physics Letters, 90:8, 81103 43:22, 1194-1196 (Oct. 2007) (http://dx.doi.org/10.1049/ (Feb. 2007) (http://dx.doi.org/10.1063/1.2591342). el:20071673).

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50 Leckband, D. E. Nanomechanics of bioadhesion: From single molecules to tissues. BIOSURF VII (Zurich, Optoelectronics Switzerland, Aug. 2007). Choquette, K. D., Giannopoulos, A., Kasten, A. M., Pack, D. W. Hybrid viral/synthetic gene delivery Long, C., and Chen, C. Two-dimensional integrated nanovectors: Toward an artificial virus. Center for VCSEL and PiN photodetector arrays for a Nanoscale Science and Technology Nanotechnology bidirectional optical links. 2007 Institute of Electrical Workshop (Urbana, IL, May 2007). and Electronics Engineers Aerospace Conference (Big Sky, MT, Mar. 2007). Proceedings of the 2007 Institute of Pack, D. W. Precision particle fabrication for Electrical and Electronics Engineers Aerospace controlled-release drug delivery. Design of Medical Conference 4161431 (2007) (http://dx.doi.org/10.1109/ Devices Conference (Minneapolis, MN, May 2007). AERO.2007.353012).

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52 Tsai, C.-L. Gallium-arsenide quantum wire infrared photodetectors. Ph.D. thesis, K. Cheng, advisor (2007). Thin Films and Charged Particles

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Yang, Z. Study of biological ion channels by using PNP/ Awards and Honors ECP model. Ph.D. thesis, U. Ravaioli, advisor (2007). John R. Abelson IBM University Partnership Award, 1995-1997 Patents Fakultetsopponent (External Examiner), University of Linkoping, Sweden, 1995 Xerox Award for Faculty Research, University of Illinois Energy Systems and College of Engineering, 1996 Thermodynamics Engineering Council Award for Excellence in Advising, University of Illinois, 1997 Incomplete List of Teachers Ranked as Excellent, Shannon, M. A., Kuo, T., Sweedler, J. V., and Bohn, P. W. University of Illinois, 2000, 2002 Hybrid Microfluidic and Nanofluidic System [Utility Fellow, American Vacuum Society, 2004 Patent Grant], # US 7220345, May 2007. Ilesanmi Adesida Nanoscience and Technology Scientific Member, Bohmische Physical Society Fellow, Institute of Electrical and Electronics Engineers Rogers, J. A. and Menard, E. Composite Patterning (IEEE) Devices for Soft Lithography [Utility Patent Grant], # Engineering Council Advisors List for Outstanding US 7195733, Mar. 2007. Advising, University of Illinois, 1993, 1999 Distinguished Lecturer, IEEE Electronic Device Society, 1977-1999 Optical Physics and Engineering University Scholar, University of Illinois, 1997, 1999 Associate Member, Center for Advanced Study, Block, I., Chan, L. L., and Cunningham, B. T. Photonic 2000-2001 Crystal Biosensor Structure and Fabrication Method [Utility Patent Application], # US 11177708, Jan. 2007. Rashid Bashir Bliss Professor, University of Illinois Eden, J. G. and Park, S. Arrays of Microcavity Plasma Purdue University Faculty Scholar, 2005-2010 Devices with Dielectric Encapsulated Electrodes Visiting Professor of Surgery, Harvard Medical School [Utility Patent Application], # US 11487949, Jul. 2007. Visiting Professor of Surgery, Shriner's Hospital for Children Eden, J. G. and Park, S. Method of Manufacturing Visiting Professor of Surgery, Massachusetts General Microdischarge Devices with Encapsulated Electrodes Hospital [Utility Patent Grant], # US 7297041, Nov. 2007. Member, United States delegation to Japan for the Second Japan-U.S. Joint Symposium on Nanotechnology in Eden, J. G. and Park, S. Plasma Extraction Microcavity Advanced Therapy and Diagnostics, Yokohama, Japan, Plasma Device and Method [Utility Patent 2003 Application], # US 11344514, May 2007. Honorary Member, Golden Key International Honor Park, S., Eden, J. G., Lu, M., and Cunningham, B. Polymer Society, 2005 Microcavity and Microchannel Devices and Education and Mentorship Award, BioMEMS and Fabrication Method [Utility Patent Application], # US Biomedical Nanotechnology World Congress Meeting, 11698264, Aug. 2007. 2003

53 Global Indus Technovator Award, MIT Sloan Business Fellow, Optical Society of America School and the Indian Business Club, 2003 EPSRC Fellow, Visiting Professor at Cavendish Small Times Magazine Finalist, Innovator of the Year Laboratory, University of Cambridge, United Kingdom Award, 2005 Engineering Excellence Award, Optical Society of Agricultural Team Research Award, Purdue University, America 2006 Associate, University of Illinois Center for Advanced Study, 1995 Rohit Bhargava Sabbatical Chair, Sony Research Center, Japan, 1995 List of Teachers Ranked as Excellent by Their Students, Distinguished Lecturer Award, IEEE Lasers and Electro- University of Illinois at Urbana-Champaign, 2006, 2007 Optics Society (LEOS), 2004-2006 Accenture Outstanding Faculty Award for Undergraduate William Streifer Scientific Achievement Award, IEEE Advising, University of Illinois at Urbana-Champaign, LEOS, 2007 2007 Young Investigator Award, Prostate Cancer Research James J. Coleman Program, Department of Defense, 2007 Fellow, American Association for the Advancement of Science Stephen G. Bishop Fellow, American Physical Society Fellow, American Association for the Advancement of Fellow, Institute of Electrical and Electronics Engineers Science (IEEE) Fellow, American Physical Society Fellow, Optical Society of America Fellow, Optical Society of America IEEE LEOS William Streifer Scientific Achievement Board of Trustees, Gettysburg College, 1992-2006 Award Distinguished Lecturer, IEEE, 1997-1998, 1998-1999 Jianjun Cheng Franklin Woeltge Professorship, University of Illinois Competitive Award, Prostate Cancer Foundation, Electrical and Computer Engineering Department, 2002 2007-2008 Faculty Early Career Development Program (CAREER) J. Gary Eden Award, National Science Foundation, 2008-2013 Fellow, American Physical Society Fellow, Institute of Electrical and Electronics Engineers Keh-Yung Cheng (IEEE) Fellow, Institute of Electrical and Electronics Engineers Fellow, Optical Society of America (IEEE), 2001 Associate, University of Illinois Center for Advanced Fellow, American Association for the Advancement of Study, 1987-1988 Science (AAAS), 2004 Board of Governors, IEEE Lasers and Electro-Optics Ministry of Education Distinguished Visiting Chair Society, 1990-1993 Professor, National Tsing-Hua University, Hsinchu, Associate Editor, Photonics Technology Letters, Taiwan, 2003-2004 1990-1994 Vice President (Technical Affairs), IEEE Lasers and Kent Choquette Electro-Optics Society, (LEOS), 1993-1995 Fellow, IEEE/Laser and Electro-Optical Society Editor-in-Chief, IEEE Journal of Quantum Electronics, Fellow, Optical Society of America 1996-2002 Distinguished Lecturer, IEEE/Laser and Electro-Optical Editor, IEEE Journal of Selected Topics in Quantum Society, 2000-2001 Electronics, 1996 Distinguished Lecturer, IEEE/Laser and Electro-Optical James F. Towey University Scholar, University of Illinois, Society, 2001-2002 1996-1999 Engineering Council Award for Excellence in Advising, President, IEEE Lasers and Electro-Optics Society University of Illinois, 2004 (LEOS), 1998 IEEE Third Millennium Medal, 2000 Shun L. Chuang Faculty Advisors List, University of Illinois College of Fellow, American Physical Society Engineering, 2001, 2004 Fellow, Institute of Electrical and Electronics Engineers Awards Chair, IEEE LEOS, 2003, 2004 (IEEE) Distinguished Lecturer, IEEE LEOS, 2003-2005 Fellow, Japan Society for the Promotion of Science

54 Aron Kressel Award, Institute of Electrical and Electronics Award for Special Creativity, National Science Engineers Lasers and Electro-Optics Society, 2005 Foundation, 1993 Distinguished Polymer Lecturer, Lehigh University, 1993 Nicholas X. Fang Xerox Award for Faculty Research, University of Illinois Participant (1 of 14), 2006 U.S.-Japan Young Researcher College of Engineering, 1993 Exchange Program for Nanotechnology and Sabbatical Scholar, Kyoto University, Japan, 1994 Nanomanufacturing, National Science Foundation, Key Tribology Lecturer, Tsinghua University, China, 1996 2006 University Scholar, University of Illinois, 1997 Pi-Tau-Sigma Gold Medal, American Society of Founder Professor of Engineering, University of Illinois Mechanical Engineers, 2006 College of Engineering, 1999 Chaire Paris Sciences, City of Paris, France, 2002 Milton Feng Chair-Elect, Division of Polymer Physics, American Fellow, Institute of Electrical and Electronics Engineers Physical Society, 2005 (IEEE) Associate, Center for Advanced Study, University of Fellow, Optical Society of America Illinois, 2005 Engineering Council Advisors List for Outstanding Chair, Division of Polymer Physics, American Physical Advising, University of Illinois College of Engineering, Society, 2006 1995, 1996, 1998 Vice-Chair, Gordon Research Conference on Liquids, Associate Member, University of Illinois Center for 2007 Advanced Study, 1998 Nick Holonyak, Jr. Professorship, University of Illinois, Nick Holonyak, Jr. 2000-2005 Member, National Academy of Engineering Best Student Paper Award, International GaAs Member, National Academy of Sciences Manufacturing Conference, 2003 Fellow, American Academy of Arts and Sciences Life Fellow, Institute of Electrical and Electronics Placid M. Ferreira Engineers (IEEE) Outstanding Young Manufacturing Engineer, Society of Fellow, Optical Society of America Manufacturing Engineers, 1990 Fellow, American Physical Society Andersen Consulting Award for Excellence in Advising, Member, Center for Advanced Study, University of Illinois University of Illinois College of Engineering, 1990 John Scott Medal, City of Philadelphia, 1975 Presidential Young Investigator Award, National Science Edison Medal, IEEE, 1989 Foundation, 1991 National Medal of Science, 1990 Listed in Daily Illini "Incomplete List of Teachers Ranked Honorary Doctor of Science, Northwestern University, as Excellent by their Students,” University of Illinois, 1992 Spring 1990, 1992 Honorary Member, Ioffe Physical-Technical Institute, St. Department Editor, Manufacturing Processes and Petersburg, , 1992 Devices, IIE Transactions on Design of Centennial Medal, American Society for Engineering Manufacturing, 1993- Education, 1993 University Scholar, University of Illinois, 1995 John Bardeen Chair Professor of Electrical and Computer Engineering Council Award for Excellence in Advising, Engineering and of Physics, University of Illinois, 1993- University of Illinois College of Engineering, 1997, Honorary Doctor of Engineering, Notre Dame University, 2008 1994 Invited Guest Professor, Controls Engineering Fellow, International Engineering Consortium Department, Chalmers University, Gothenberg, Eminent Member, Eta Kappa Nu Sweden, Summer 1999 Distinguished Alumnus, Tau Beta Pi Foreign Member, Russian Academy of Sciences Steve Granick IEEE Third Millennium Medal, 2000 Fellow, American Physical Society Frederic Ives Medal, Optical Society of America, 2001 SM Young Faculty Award, 1988 National Medal of Technology, 2002 Fellow, Center for Advanced Study, University of Illinois, Fellow, American Association Advancement Science 1990-1991 IEEE Medal of Honor, 2003 Global Energy International Prize, 2003

55 Washington Award, Western Society of Engineers, 2004 Member, Board of Directors, Society of Engineering Lemelson-MIT Prize, 2004 Science, 2000-2007 Von Hippel Award, Materials Research Society, 2004 Keynote Speaker, ME '00, The 2000 International Illinois Division Energy Conservation Award, Izaak Mechanical Engineering Congress and Exposition, Walton League of America, 2004 Orlando, Florida, 2000 Laureate, Lincoln Academy of Illinois, 2005 Most Helpful Professor Teaching Award, Georgia Member, Consumer Electronics Association (CEA) Hall Technical University, 2002 of Fame, 2006 Fellow, American Society of Mechanical Engineers, 2003 Vice-Chair, Applied Mechanics Division Composites Kanti Jain Committee, American Society of Mechanical Member, Board of Directors, International Society for Engineers, 2003 Optical Engineering (SPIE), 1992-1994 Plenary Lecture, “Modeling of Trabecular Bone as a Member, Executive Committee, Board of Directors, SPIE, Hierarchical Material," 2nd International Conference on 1992, 1993 Science & Technology of Composite Materials Editor, Microlithography World, Pennwell Publishing (COMAT 2003), Mérida, Mexico, 2003 Company and SPIE, 1992-2004 Member, Board of Editors International Journal of Publications Chair, International Society for Optical Multiscale Computational Engineering, 2003- Engineering, 1992, 1993 Guest Editor, Special Issue of Mechanics of Materials, Fellow, International Society for Optical Engineering, 2003 1993 Guest Editor, Special Issue of Mechanics of Materials, Founding Member, Department of Physics Advisory 2004 Board, University of Illinois, 1998-2002 Chair, Applied Mechanics Division Composites Fellow, Optical Society of America, 1999 Committee, American Society of Mechanical Fellow, Institute of Electrical and Electronic Engineers, Engineers, 2004 2005 Member, Board of Editors, Journal of Mechanics of Materials and Structures, 2005- Iwona Jasiuk Member, Board of Directors, Society of Engineering Guest Editor, Special Issue of Applied Mechanics Science, 2000-2007 Reviews, 1994 Vice-President, Society of Engineering Science, 2005 Plenary lecture at the Workshop on Phase President, Society of Engineering Science, 2006 Transformations, Composite Materials and Member, Editorial Board, International Journal of Microstructure on “Micromechanics of Composite Damage Mechanics, 2006- Materials: Influence of Interface, Shape and Geometric Invited seminar speaker, IT Distinguished Women Arrangement of Fibers,” Institute for Mathematics and Scientists and Engineers Speakers Program, University Its Applications, University of Minnesota, 1995 of Minnesota, Minneapolis, 2006 Listed in Marquis Who’s Who in Science and Engineering License: Professional Engineers of Ontario, Engineering (2nd & 3rd Editions), 1996 Canada, 2006- Member, Board of Editors, International Journal of Solids Representative, U.S. National Committee on Theoretical and Structures, 1996-2005 and Applied Mechanics, Society of Engineering Listed in Marquis Who’s Who in American Education, (5th Science, 2007-2010 Edition), 1997 Member, Scientific Committee, 4th International Guest Editor, Special Issue of International Journal of Conference on Science and Technology of Composite Solids and Structures, 1998, 2001 Materials (COMAT 2007), Rio de Janeiro, Brazil, 2007 Guest Editor, Applied Mechanics in the Americas Vols. 6, Technical Chair, Society of Engineering Science Annual 7, 8, Proceedings of the 6th Pan-American Congress of Conference, University of Illinois at Urbana- Applied Mechanics and 8th International Conference on Champaign, 2008 Dynamic Problems in Mechanics, Rio de Janeiro, Brazil, Advisor (jointly with J. Dantzig) of Natarajan Kumar, 3rd 1999 place student paper award recipient, Society of Listed in Polish American Who’s Who (1st Edition), 2000 Engineering Science Conference, College Station, Texas, 2007

56 Amy Wagoner Johnson International Branimir F. von Turkovich Outstanding Scholarship, Society of Women Engineers/Central Young Manufacturing Engineer Award, Society of Intelligence Agency, 1993-1994 Manufacturing Engineers, 2006 Fontana Scholarship, The Ohio State University Invited Participant, 2006 U.S.-Japan Young Researcher’s Department of Materials Science and Engineering, Exchange Program for Nanotechnology and 1993-1994 Nanomanufacturing, 2006 Scholar, American Society for Materials (ASM), 1995 TR35–List of the Most Innovative People under the Age GANN Fellowship, U.S. Department of Education, of 35, Technology Review, 2006 1996-1998 Young Investigator Award, Office of Naval Research, Paper listed at the Top 10 most downloaded Biomaterials 2007-2010 (IF 5.196) papers, 2007 R&D 100 Award, “Nano Thermal Analysis,” one of the 100 most technologically significant innovations to Paul J. A. Kenis enter the market, 2007 Akzo-Nobel Graduate Fellowship, 1993-1997 Micro/Nano 25 Award, "Nano Thermal Analysis," one of TALENT Postdoctoral Fellowship from NWO, Dutch the 25 most significant micro/nano technology Science Foundation, 1998 innovations, 2007 3M Young Faculty Award, 2001-2004 Fellow, Defense Sciences Research Council, 2007-2009 Collins Scholar, Academy for Excellence in Engineering Education, University of Illinois College of Hyun Joon Kong Engineering, 2001 Fellowship Award, Hanyang University, 1988-1989 Advisors List for Advising Excellence, University of Fellowship Award, Samnam Foundation, 1990-1991 Illinois College of Engineering, 2002, 2003, 2007 Honored Student, 1992 Faculty Early Career Development Program (CAREER) International Fellowship, Hanyang University, 1995-1997 Award, National Science Foundation, 2005-2010 Xerox Foundation Award for Faculty Research, University Jean-Pierre Leburton of Illinois College of Engineering, 2006 Member, New York Academy of Science Excellence in Teaching Award, University of Illinois Fellow, American Association for Advancement of School of Chemical Sciences, 2006 Science Beckman Fellow, University of Illinois Center for Fellow, American Physical Society Advanced Study, 2007-2008 Fellow, Electro Chemical Society Helen Corley Petit Scholar, University of Illinois College Fellow, Institute of Electrical and Electronics Engineers of Liberal Arts & Sciences, 2007-2008 Fellow, Optical Society of America Associate, University of Illinois Center for Advanced Kyekyoon (Kevin) Kim Study Overseas Member, National Academy of Engineering, Hitachi Ltd. Quantum Materials Chair, Research Center Korea, 2002 for Advanced Sciences and Technology, University of Tokyo, 1992 William Paul King Chevalier Dans L’Ordre Des Palmes Academiques, 1994 Teaching Fellow, Georgia Institute of Technology Class of King Albert II of Belgium, Round Table on the “Mobility 1969, 2005-2006 of European Research Scientist” European Science and IBM Graduate Research Fellow, 2000-2002 Technology Commission, 2001 Faculty Early Career Development CAREER Program Inaugural Montefiore Distinguished Lecture, Penn State Award, National Science Foundation, 2003-2008 University, 2002 Outstanding Alumni Award, University of Dayton School Gregory Stillman Professor in Electrical and Computer of Engineering, 2004 Engineering, University of Illinois College of Invited Participant, National Academy of Sciences Keck Engineering, 2004 Futures Conference on Nanobiotechnology, 2004 Gold Medal for Scientific Achievement, 75th Anniversary Department of Energy Defense Program Early Career of the Alumnus Association of the University of Liege, Award for Scientists and Engineers, 2005-2010 Belgium, 2004 Presidential Early Career Award for Scientists and Quantum Devices Award, Outstanding Achievement in the Engineers, PECASE, 2005-2010 Area of Compound Semiconductor Research, 2004

57 Deborah E. Leckband Faculty Research Award, Allied Signal Foundation, 1998 Reid T. Milner Professor of Chemical Sciences University Scholar, University of Illinois, 2001 Fellow, American Institute of Medical and Biological Willett Faculty Scholar Award, University of Illinois, 2002 Engineering (AIMBE) Brunaeur Award, American Ceramic Society, 2003 Fellow, American Association for the Advancement of Associate Editor, Journal of the American Ceramic Science (AAAS) Society, 2004 National Science Foundation Research Initiation Award, Editorial Advisory Board, Langmuir, 2004 1993-1996 Hans Thurnauer Professor of Materials Science and FIRST Award, National Institutes of Health, 1993-1998 Engineering, University of Illinois, 2004- Faculty Early Career Development Program (CAREER) Fellow, American Ceramic Society, 2005 Award, National Science Foundation, 1995-1999 National Science Foundation Advance Lecturer, Case Amoco Lectureship, Stanford University, 1998 Western Reserve University, 2005 Xerox Faculty Research Award, University of Illinois Featured Public Lecture, Boulder School for Condensed College of Engineering, 1998 Matter and Materials Physics, 2006 Helen Petit Professorship, University of Illinois College of Plenary Talk, International Conference on Ceramic Liberal Arts and Sciences, 1999-2000 Processing Science, 2006 Fellow, University of Illinois Center for Advanced Study, Meeting Chair, 2007 Spring Materials Research Society 1999-2000 Meeting, 2007 University Scholar, University of Illinois, 2001-2004 Fellow, American Physical Society, 2007 Plenary Speaker, American Chemical Society Colloids and Plenary Talk, Composites at Lake Louise, 2007 Surface Science Symposium, 2001 Plenary Talk, Society of Rheology, 2007 Keynote Speaker, University of Virginia Bioengineering Penn Engineering Grace Hopper Lecture, 2007 Symposium on Biomechanics of Adhesion, 2002 Provost's Distinguished Lecture Series, University of Chang Liu Texas, Austin, 2003 Academician, Academia Sinica, 1998 Distinguished Lecturer, Cell and Molecular Biology, Boston University School of Dental Medicine, Boston, Daniel W. Pack 2003 Excellence in Teaching Award, School of Chemical Britton Chance Distinguished Lecturer in Engineering and Sciences, University of Illinois, 2000 Medicine, University of Pennsylvania, 2004 Selection to Frontiers of Engineering Symposium, Fellow, American Institute of Medical and Biological National Academy of Engineering, 2002 Engineering (AIMBE), 2005- Faculty Early Career Development Program (CAREER) Fellow, American Association for the Advancement of Award, National Science Foundation, 2002 Science, 2006- Excellence in Teaching Award, School of Chemical Sciences, University of Illinois, 2003 Jennifer A. Lewis 3M Young Faculty Award, 2003-2006 Incomplete List of Teachers Ranked as Excellent, Beckman Fellow, Center for Advanced Study, University University of Illinois, 1992-1994, 1999 of Illinois, Urbana-Champaign, 2004-2005 Arnold O. Beckman Research Award, University of Multi-Year Faculty Achievement Award, College of Illinois, 1994 Engineering, University of Illinois, Urbana-Champaign, Burnett Teaching Award, University of Illinois 2007 Department of Materials Science and Engineering, 1994 Engineering Council Advisors List for Outstanding Umberto Ravaioli Advising, University of Illinois, 1994, 1995 Fellow, Institute of Physics, 1999 Presidential Faculty Fellow Award, National Science Engineering Council Advisors List for Advising Foundation, 1994 Excellence, University of Illinois, 1994, 1996, 1998, Materials Research Society Travel Award for Young 2004, 2006 Scientists, International Conference on Advanced Fellow, Institute of Electrical and Electronics Engineers, Materials (ICAM), 1995 2003 Schlumberger Foundation Award, 1995 Xerox Award for Faculty Research, University of Illinois College of Engineering, 1996, 2001

58 John A. Rogers Faculty Early Career Development Program (CAREER) Junior Fellow, Harvard University Society of Fellows, Award, National Science Foundation, 1998 1995-1997 GE Scholar, University of Illinois, 1998 TR100 Award, Technology Review Magazine, 1999 Strathmore’s Who’s Who, 2002-2005 Robert B. Woodward Scholar, Harvard University, 2001 Who’s Who in Engineering Education, 2002 Best of the Best Award, R&D Magazine, 2001 Xerox Award for Faculty Research, University of Illinois R&D 100 Award for Technical Innovation, 2001, 2002 College of Engineering, 2003, 2006 Team Innovation Award, American Chemical Society, Listed in Daily Illini “Incomplete List of Teachers Ranked 2002 as Excellent by Their Students,” University of Illinois, Unofficial List of Teachers Ranked Excellent by Their Spring 2003, 2004; Fall 2006 Students, University of Illinois, 2005, 2006 Willett Faculty Scholar Award, College of Engineering, Distinguished Lecturer, University of Texas at Austin, 2003-2008 2006 Invited Member, U.S.-Japan Young Researchers’ One of the Top 15 Innovators in Nanotechnology for 2005, Exchange Program for Nanotechnology, U.S. National NASA Technology Briefs, 2005 Science Foundation and Japan Ministry of Education, One of the "10 Coolest Technologies That You’ve Never Culture, Sports, Science, and Technology, 2003 Heard Of," for stretchable silicon, PC Magazine, 2005 Associate, Center for Advanced Study, University of Fellow, American Physical Society, 2005 Illinois, 2004-2005 Third Place Winner, Best Professional Science Film, Effective Teaching Award (by alumni graduated during Materials Research Society, 2005 2004), 2006 2007 Dorn Lecturer, Northwestern University Department of Materials Science and Engineering, 2005 Edmund G. Seebauer Daniel Drucker Eminent Faculty Award, University of Dow Teaching Excellence Award, 1988 Illinois College of Engineering, 2007 Presidential Young Investigator Award, National Science Baekeland Award, American Chemical Society, 2007 Foundation, 1988 Zhongguancun Forum, Institute of Physics, Chinese DuPont Young Faculty Award, 1989 Academy of Sciences, 2007 Observer for U.S. Delegation, International Union of Pure Elected to the Defense Science Research Council, Defense and Applied Chemistry General Assemblies, 1989, 1991 Advanced Research Projects Agency, 2007 Fellow, Alfred P. Sloan Foundation, 1994-1996 Elected Fellow, Center for Advanced Study, University of Inventor Recognition Award, Semiconductor Research Illinois, 2007 Corp., 1995 Co-organizer (with V. Bulovic, S. Coe-Sullivan and I. Teaching Excellence Award, University of Illinois School Kymmissis), Fall 2007 MRS Symposium: Flexible of Chemical Sciences, 1996 Electronics and Optoelectronics, 2007 Fellowship for Study in a Second Discipline, University of Co-organizer (with S. Lacour, T. Someya and B. Illinois, 2000 Morrison), Spring 2007 MRS Symposium: Materials Fellow, American Vacuum Society, 2000 and Technology for Flexible, Conformable, and Distinguished Lecturer, Institute of Electrical and Stretchable Sensors and Transistors, 2007 Electronic Engineers Electron Device Society, 2004-2006 M. Taher A. Saif Beckman Associate, Center for Advanced Study, Honors in B.S. with rank (1/209; one of only two students University of Illinois, 2004 to receive annual honors), Bangladesh University of Excellence in Advising Award, College of Engineering, Engineering and Technology, 1984 University of Illinois, 2005 Invited Member, Honor Society of Phi Kappa Phi, Cornell James W. Westwater Professor, University of Illinois, University Chapter, 1992 2006 Executive Board Member, International Students Fellow, American Association for the Advancement of Programming Board, Cornell University, 1990-1991 Science, 2007 Ralph Bolgiano, Sr., Outstanding Teaching Assistant Fellow, American Physical Society, 2007 Award, Sibley School of Mechanical and Aerospace Engineering, Cornell University, 1991 Teaching Assistant Fellow, College of Engineering, Cornell University, 1991-1992

59 Mark A. Shannon Jonathan V. Sweedler Listed in Daily Illini "Incomplete List of Teachers Ranked New Faculty Award, and Camille Dreyfus as Excellent by Their Students," University of Illinois, Foundation, 1991 Fall 1998; Spring 2002, 2004 David and Lucile Packard Foundation Fellowship in Engineering Council Award for Excellence in Advising, Science and Engineering, 1992 University of Illinois College of Engineering, 1995, Young Investigator Award, National Science Foundation, 1998, 2002, 2008 1992 Faculty Early Career Development Program (CAREER) Beckman Fellow, University of Illinois Center for Award, National Science Foundation, 1997 Advanced Study, 1993 Accenture Award for Excellence in Advising, University Searle Scholars Awards, 1993 of Illinois College of Engineering, 2002, 2003 Fellow, A. P. Sloan Foundation, 1995 Multi-Year Faculty Achievement Award, University of Camille Dreyfus Teacher Scholar Award, Henry and Illinois College of Engineering, 2003 Camille Dreyfus Foundation, 1996 Kritzer Faculty Scholar, University of Illinois Department University Scholar, University of Illinois, 1997 of Mechanical and Industrial Engineering, 2003-2006 Young Analytical Chemist, Analytical Division of the Xerox Award for Faculty Research, University of Illinois American Chemical Society, 1997 College of Engineering, 2004 Benidetti-Pichler Award in Microanalysis, American Willett Faculty Scholar Award, University of Illinois Microchemical Society, 1999 College of Engineering, 2004-2007 Gill Prize, 2000 James W. Bayne Professor in Mechanical and Industrial Fellow, American Association for the Advancement of Engineering, University of Illinois, 2006 Science, 2001 BP Award for Innovation in Undergraduate Instruction, Lycan Professorship in Chemistry, University of Illinois, University of Illinois College of Engineering, 2006 2001 The Heinrich-Emanuel Merck Prize, Merck Company, Michael S. Strano 2002 Sidney A. Savitt Award for Academic Excellence in Instrumentation Award, American Chemical Society Chemical Engineering, Polytechnic University, 1997 Analytical Division, 2002 Garrett Reed Cantwell Graduate Scholarship, University Special Creativity Extension, National Science of Delaware, 1998 Foundation, 2002-2004 Annual Research Award, Philadelphia Catalysis Society, Theophilus Redwood Lecturer, Analytical Division, Royal 1999, 2001 Science of Chemistry, 2007 Graduate Award, American Institute of Chemical Pittsburgh Analytical Chemistry Award, Society of Engineers Separations Division, 2001 Analytical Chemists of Pittsburgh, 2007 Honorable Mention, Graduate Award, American Institute Associate Editor, Analytical Chemistry, 2007 of Chemical Engineers Environmental Division, 2002 Engineering Corp's Award for Young Investigator Award, Dupont, 2004 Outstanding Team Effort, Army Corp of Engineers, Top Young Innovator Award, MIT Technology Review, 2007 2004 Faculty Early Career Development (CAREER) Award, Gregory Timp National Science Foundation, 2005 Bell Laboratories Fellowship, 1978-1979 Top 1% of Highly Cited Researchers, Essential Science Fellow, IEEE Indicators/Web of Science, 2005 Fellow, American Physical Society, 2006 Young Investigator Award, Nanoscale Science and Fellow Founding Member, American Academy of Engineering Forum, American Institute of Chemical Nanomedicine Engineers, 2005 Fellow American Association for the Advancement of Coblentz Award for Molecular Spectroscopy, 2006 Science 3M Nontenured Faculty Award, 2006 Beckman Young Investigator Award, 2006 Charles F. Zukoski Collaboration Success Award, Council of Chemical Presidential Young Investigator Award, National Science Research, 2006 Foundation, 1987 Presidential Early Career Award for Scientists and Everitt Award for Teaching Excellence, University of Engineers (PECASE), 2006 Illinois College of Engineering, 1992

60 Fulbright Teaching/Scholar Fellowship to visit the University of Melbourne, 1992 Robert W. Vaughan Lectureship in Chemical Engineering, California Institute of Technology, 1993 Alumni Professor, University of Illinois Department of Chemical Engineering, 1994-1999 Thiele Lectureship in Chemical Engineering, Notre Dame University, 1994 University Scholar, University of Illinois, 1994-1997 Plenary Lecture: 13th Symposium on Industrial Crystallization, Toulouse, France, 1996 Moulton Medal, Institute of Chemical Engineers, 1997 Publication Award, Society of Rheology, 1997 Ralph K. Iler Award, American Chemical Society, 1997 Alcoa Plenary Lecture, Symposium on Particulate Fluids, Melbourne, Australia, 1998 William H. and Janet G. Lycan Chair, School of Chemical Sciences, University of Illinois, 2000- Wilheim Lectureship, Princeton University Department of Chemical Engineering, 2001 Engineering Council Award for Excellence in Advising, University of Illinois, 2002 Alpha Chi Sigma Award for Chemical Engineering Research, American Institute of Chemical Engineers, 2002 Member, National Academy of Engineering, 2007

61