Micro and Nanotechnology Laboratory Micro and Nanotechnology Laboratory investigating the processing of semiconductors and other Rashid Bashir, Director III-V materials at the nanometer scale level and applying Micro and Nanotechnology Laboratory these techniques to the realization of ultra-high speed 208 N. Wright Street optoelectronic devices. MC-249 Urbana, Illinois 61801-2355 Nanophotonics and Optoelectronics 217-333-3097 Research on lasers has focused on novel types of http://www.mntl.illinois.edu devices, such as patterned quantum dot lasers and narrow linewidth diode laser arrays, and vertical cavity surface The Micro and Nanotechnology Laboratory (MNTL), with emitting lasers (VCSELs) and photonic crystal lasers. 147,347 square feet of space, is one of the nation’s largest Areas of research include conceptualization, design, and most sophisticated university-based facilities for fabrication, and testing of micro and nanoelectronic and conducting multidisciplinary research in semiconductor, optoelectronic devices, circuits, components, and systems nanotechnology, and biotechnology research. It contains for lightwave communication and optical interconnects. more than 8,000 square feet of class 100 and class 1000 cleanroom laboratories, a new 3,000 square-foot Nanomedicine and BioNanotechnology laboratory complex specifically designed for Research is being conducted to develop bionanotechnology, and state-of-the-art ultra-high-speed nanotechnology-based solutions to solve biomedical optical and electrical device and circuit measurement problems for diagnostics, therapeutics, and tissue equipment. The bionanosystems area focuses on utilizing engineering. This includes working at the intersection of the various technologies developed in materials, nanotechnology, biology, electromagnetics, and optics to nanofabrication, devices, MEMS, and NEMS to study and develop technology that impacts health care, the life solve biological issues. sciences, agriculture, and the environment. MNTL is a user facility, where researchers from around the world work to improve and invent novel devices and MEMS/NEMS and Integrated Systems develop applications that are in high demand by industry Research involves the development of micromachining and consumers in the state, the nation, and around the methods utilizing an array of materials, including silicon, world. This is the kind of research that makes satellite gallium arsenide, and polymers, to enable applications in communications, computers, telephones, display panels, variety of multidisciplinary areas, including wireless and other devices more powerful, more efficient, and more communications, optoelectronics, power dissipation reliable. It is the basis for new kinds of biosensors for challenges in integrated circuits, and biomedical advanced drug discovery, new vaccine delivery strategies, engineering. A particular emphasis of this research area is and faster, more cost-effective DNA sequencing the design and development of integrated micro/nano techniques. Research in this laboratory is expected to lead fluidic devices and systems. to new industries and spur economic development. Research Area Index Multidisciplinary research is carried out in four key areas: Full-Time Resident Faculty* • Micro and Nanoelectronics • Nanophotonics and Optoelectronics Micro and Nanoelectronics: Ilesanmi Adesida, Keh-Yung • Nanomedicine and BioNanotechnology Cheng, Kent Choquette, James Coleman, Milton Feng, • MEMS/NEMS and Integrated Systems Matthew Gilbert, Lynford Goddard, Nick Holonyak, Jr., Kuang-Chien Hsieh, Xiuling Li, Eric Pop, (faculty Micro and Nanoelectronics members in the Department of Electrical and Computer In recent years, collaborative work conducted at the Engineering) MNTL has yielded a novel type of device—the light emitting transistor (LET). Research groups are 1 Nanophotonics and Optoelectronics: Ilesanmi Adesida, Kevin Kim, Electrical and Computer Engr. Keh-Yung Cheng, Kent Choquette, Shun Lien Chuang, William King, Mechanical Science and Engr. James Coleman, Milton Feng, Lynford Goddard, Nick Hyunjoon Kong, Chemical and Biomolecular Engr. Holonyak, Jr., Kuang-Chien Hsieh, Xiuling Li, Eric Pop Mary Kraft, Chemical and Biomolecular Engr. (faculty members in the Department of Electrical and Paul Kwiat, Physics Computer Engineering) Jean-Pierre Leburton, Electrical and Computer Engr. Deborah Leckband, Chemical and Biomolecular Engr. Nanomedicine and BioNanotechnology: Irfan Ahmad Harris Lewin, Institute for Genomic Biology (Center for Nanoscale Science and Technology and Jennifer Lewis, Materials Science and Engr. Department of Agricultural and Biological Engineering); Joseph Lyding, Electrical and Computer Engr. Rashid Bashir, Brian Cunningham, Logan Liu (faculty Nadya Mason, Physics members in the Department of Electrical and Computer George Miley, Nuclear, Plasma, and Radiological Engr. Engineering) Ralph Nuzzo, Chemistry Daniel Pack, Chemical and Biomolecular Engr. MEMS/NEMS and Integrated Systems: Irfan Ahmad Graciela Padua, Food Science and Human Nutrition (Center for Nanoscale Science and Technology and Umberto Ravioli, Electrical and Computer Engr. Department of Agricultural and Biological Engineering); John Rogers, Materials Science and Engr. Rashid Bashir, James Coleman, Brian Cunningham. David Ruzic, Nuclear, Plasma, and Radiological Engr. Milton Feng, Logan Liu, Eric Pop (faculty members in the Taher Saif, Mechanical Science and Engr. Department of Electrical and Computer Engineering) Klaus Schulten, Physics Edmund Seebauer, Chemical and Biomolecular Engr. Part-time Resident Faculty* Paul Selvin, Physics Rohit Bhargava, Bioengineering Mark Shannon, Mechanical Science and Engr. Kanti Jain, Electrical and Computer Engr. Sanjiv Sinha, Mechanical Science and Engr. Iwona Jasiuk, Mechanical Science and Engr. Stephen Sligar, Biochemistry Larry Schook, Animal Sciences Jonathan Sweedler, Chemistry Gregory Timp, Electrical and Computer Engr. Dale Van Harlingen, Physics Ning Wang, Mechanical Science and Engr. Affiliate Faculty* Kenneth Watkin, Applied Health Sciences Leslie Allen, Materials Science and Engr. Matthew Wheeler, Animal Sciences Narayana Aluru, Mechanical Science and Engr. Gerard Wong, Materials Science and Engr. Ryan Bailey, Chemistry Charles Zukoski, Chemical and Biomolecular Engr. Alexey Bezryadin, Physics Stephen Bishop, Electrical and Computer Engr. *Please visit the Micro and Nanotechnology Laboratory Stephen Boppart, Electrical and Computer Engr. website (www.mntl.illinois.edu) for an updated list of Paul Braun, Materials Science and Engr. research groups, faculty and their Web pages, and centers, Raffi Budakian, Physics along with updates on activities and accomplishments. Ioannis Chasiotis, Aerospace Engr. Jianjun Cheng, Materials Science and Engr. Multidisciplinary Research at the Micro and Hyungsoo Choi, Electrical and Computer Engr. Nanotechnology Laboratory James Economy, Materials Science and Engr. J. Gary Eden, Electrical and Computer Engr. Center for Nanoscale Science and Technology Nicholas Fang, Mechanical Science and Engr. 2014 Micro and Nanotechnology Laboratory Placid Ferreira, Mechanical Science and Engr. Ilesanmi Adesida, Director Martha Gillette, Medical Cell and Structural Biology Irfan Ahmad, Associate Director Taekhip Ha, Physics 217-333-2015 Edwin C. Hahn, III, Pathobiology www.cnst.illinois.edu Paul Hergenrother, Chemistry Jimmy Hsia, Mechanical Science and Engr. Division of Biomedical Sciences Eric Jakobsson, Molecular and Integrative Physics 1100 Micro and Nanotechnology Laboratory Shiv Kapoor, Mechanical Science and Engr. Larry Schook, Director Linda Katehi, Electrical and Computer Engr. Jennifer Eardley, Associate Director 2 217-244-8480 provost.illinois.edu/committees/DBS.html Center for Affordable Nanoengineering of Polymer Biomedical Devices (NSF-NSEC) Hyper-Uniform Nanophotonic Technology Center Rashid Bashir, Co-Investigator (DARPA) http://www.nsec.ohio-state.edu/overview_I.html 2112 Micro and Nanotechnology Laboratory K. Y. Norman Cheng, Director Faculty and Their Interests 217-333-6642 www.micro.uiuc.edu/people/profile.asp?kycheng John R. Abelson Plasma-assisted deposition of semiconductor, dielectric, Network for Computational Nanotechnology/NanoHub and conductive thin-films for electronic applications; the (NSF) physics and chemistry of film growth; fabrication of 1250 Micro and Nanotechnology Laboratory photovoltaic cells and thin-film transistors for Nahil Sobh, Site Lead macroelectronics Umberto Ravaioli, Faculty Lead 217-244-9481 Ilesanmi Adesida www.nanohub.org Electronic and transport properties of ultra-low dimensional semiconductor structures, advanced Siteman Center of Cancer Nanotechnology Excellence processing methods for electronic devices, high-speed (SCCNE)(NCI) optoelectronic devices and integrated circuits, radiation (Illinois co-location) effects 2104 Micro and Nanotechnology Laboratory Rashid Bashir, Principle Investigator (PI) Rashid Bashir Irfan Ahmad, Project Coordinator/Co-PI BioMEMS and biosensors, bionanotechnology, 217-333-2015 nanomedicine, applications of MEMS and nanotechnology www.cnst.illinois.edu in medical and biological problems, multiscale tissue engineering. National Centers at Illinois Utilizing the MNTL Rohit Bhargava Nano-CEMMS Center (NSF-NSEC) Infrared spectroscopic imaging, automated and Placid Ferreira, Director quantitative histopathology, cancer pathology, http://www.nano-cemms.uiuc.edu macromolecular dynamics in composites, molecular and tissue engineering, nanotechnology, biophotonics