Specialty Gases Specialty Gases

Home , Acetylene, Argon, Bromomethane, Butane, Carl von Linde, Chloroethane

Title page: The atmosphere

Sundown in orbit. The earth's atmosphere, photographed from an altitude of 300 kilometers during the D-2 Mission (April/May 1993). A pink-colored layer can be seen about 15 kilometers high. The color indicates particles of sulfuric acid and ammonium sulfate, caused in turn by an immense presence of sulfur particles – released a few days before by the eruption of Mount Pinatubo.

Photo with the kind permission of the DLR German Aerospace Center. About This Catalog

Many fields of application in high-technology industrial processes, research and development, instrumentation and medicine require high-purity gases, high-quality gas mixtures and appropriate gas handling equipment such as efficient pressure regulators and customized gas supply systems.

In this catalog we present the broad range of our product lines and services. We also provide a wealth of important and useful information on the safe handling of our products.

Should you have any further questions, we will gladly send you additional detailed information. Our team of qualified specialists near you and in our headquarters will solve your specific problems quickly and precisely. Years of experience and a strongly developed sense of quality, safety and environment form the basis for high customer benefits and long-lasting, successful partnerships. Content

Quality, Safety and Environmental Protection ...... 3 – 5

Pure Gases ...... 6 – 53 Index ...... 11 Acetylene to Xenon ...... 13 – 53

Gas Mixtures / Calibration Gas Mixtures ...... 54 – 71

Instrumentation Gases ...... 72 – 77

Gases in Small Containers ...... 78 – 87 Linde Small Steel Cylinders ...... 82 Linde minican® pressure cans ...... 83 Linde Plastigas® bags ...... 86

Gas Supply Systems ...... 88 – 95

Specialty Gas Service ...... 96 - 103 Gas analytical service ...... 99 Environmentally-compatible disposal and recycling ...... 101

Containers for Specialty Gases ...... 104 – 115

Information, Tables and Diagrams ...... 116 – 137

Order Processing Information and Terms and Conditions ...... 138 – 142

Extract from the Linde Product Line ...... 143

1 2 Quality, Safety and Environmental Protection

3 Quality, Safety, Environmental Certificate for our operations in Germany. Similar certificates exist in other countries

4 Quality, Safety and Environmental Protection

Quality, safety and environmental protection in the pro- Integrated QSE Management System with duction, transportation and use of our products are an certificate important part of our corporate philosophy. Our new policy in this field (see overleaf) also defines our responsibili- Linde was the first gas company in Germany to introduce a ty to our customers, employees, the authorities, society management system for quality, safety and the environment at large and the environment. (QSE) in its operations and to have it certified for all its business premises according to DIN EN ISO 9001 (quality management), SCC (safety management) and DIN EN ISO 14001 Quality (environmental protection management). Meanwhile a number of operative units in other countries followed this example. We introduced a certified quality management system based on ISO 9001 in most of our group companies world- The aim of our management system is to ensure constant wide. We also meet other specifications, e.g. in the fields of improvement in our internal and external services. We place nuclear technology, medicine and pharmacy as well as for the similar demands on our suppliers, service-providers and sales automotive and semiconductor industries. partners. Our specialty gas activities are, therefore, firmly embedded in a comprehensive quality management system. Customer complaints and deviations from our internal standards are systematically analyzed and detailed corrective and preventative measures introduced. Work processes are Safety regularly checked for efficiency and our employees encour- aged to improve their qualifications. In this way we will con- Safety is of essential importance to our work. The aim of tinually improve our products, processes and services. our publications on the characteristics, transportation and handling of our products is to ensure their safe use. Details on this are included in this catalog. Our customer consultants Advantages to our customers and safety experts will also gladly help you in your individual questions and problems. The general objectives of our integrated QSE Management System are:

Environmental protection Environmentally safe products and services Safety in their supply and use It is our concern that no harm to the environment Constant high product quality emanates from our gases at any stage from production and Individual, competent advice storage through distribution to use and disposal. We realize Consistent orientation to the needs of our customers this on the basis of applicable laws and in some cases even go beyond them.

5 6 Pure Gases

7 Sample extraction

8 Pure Gases

Linde's current product portfolio of pure gases is Purity information: The purity of the gases is indicated by intended to cover as many fields of application in a short suffix serving as an abbreviated indication of the mini- production, work safety, environmental protection mum content of a pure gas. The first digit in the suffix indica- and research and development as possible. Its spe- tes the number of "nines" in the specification of the gas's puri- cial gases for the semiconductor industry are also ty in percent. The second digit indicates the first decimal place included in this chapter. An overview of the most not "nine". The first and second digits are separated by a important information on them is listed under "Elec- point. tronic Gases". Examples: Ethylene 2.8 means 99.8 % purity To aid in finding the gases, the index that follows Argon 6.0 means 99.9999 % purity includes old or customary gas names in addition to presently applicable terminology. The descriptions of Instead of the short suffix, a few gases have an applicati- the gases contain details of their purities, complete on-related suffix, e.g. Nitrogen CO-free. Irrespective of the cylinder information as well as all major gas data and minimum purity indicated in the product description, these properties. Further physical specifications, vapor gases have an especially low residual content of certain other- pressure curves, etc. can be found in the chapter wise troublesome impurities. "Information, Tables and Diagrams". Percentage information: The percentages indicated in Industrial gases and their mixtures are not dealt conjunction with purities or impurities are mole percents (ideal with in detail in this catalog. Separate literature is volume percentages). Extremely low percentages are indicat- available on these gases. An overview of the entire ed in ppm or ppb (1 ppm = 1 part per million = 10-4 %; range of Linde gases is contained at the end of this 1 ppb = 1 part per billion). catalog. Volume information: Unless otherwise expressly stated, Important information for the use of these the following applies: 1m3 of gas is the volume of gas that will fill gases a cube having an edge length of 1 m at a temperature of 15 °C and a pressure of 1 bar. One liter of gas is one thousandth of Definition of purity: The minimum purity of a the gas volume thus defined. Unless otherwise expressly noted, gas refers to the specified impurities that characteri- pressures indicated in bars are absolute pressures. The volume ze the pure gas. The specific limits for the impurities information for gases with a critical temperate Tc ≥ -10 °C is are not exceeded. In the case of gases without given in kg. details on impurities, the specification of their purity is to be seen as a typical value. New color coding

In the case of a number of high purity gases, Pursuant to the new EN 1089 Part 3 the color coding is every filled cylinder is accompanied by a certificate effected on the cylinder shoulder. The color of the cylinder of analysis confirming that the maximum limits for shoulder is given for every gas under "Identification". impurities have not been exceeded. This is noted for the gas purities to which it applies. It does not apply Since the standard provides for a transitional period for to "Gases in Small Containers". Cylinder fillings fre- implementation extending to the year 2006, cylinders with the quently display purities that are higher than those old color coding can also be in circulation up to this point in which have been guaranteed. Even if this should time. Both types of cylinder identification are therefore shown occur repeatedly, it should nevertheless not be taken in this catalog. as any assurance of uniformly higher purities. Further information on the change to the new color coding can be obtained from every Linde Sales Center.

9 Leuna Gas Production Center

10 Pure Gases Index (Linde's names for the gases are printed in boldface type)

Name PageName Page Name Page

Acetylene ...... 13 Ethene = Ethylene ...... 27 Nitrogen trifluoride ...... 26 Ammonia ...... 13 Ethylene ...... 27 Octafluorocyclobutane ...... 26 Argon ...... 14 Ethylene dichloride = Octafluoropropane ...... 26 Arsine ...... 26 Vinyl chloride ...... 51 Oxygen ...... 47 Boron trichloride ...... 26 Ethylene oxide ...... 28 Phosphine ...... 26 Boron trifluoride ...... 16/26 Fluoromethane ...... 26 Propane ...... 49 1,3-Butadiene ...... 16 Germane ...... 26 Propene = Propylene ...... 49 Butane ...... 17 Helium ...... 29 Propylene ...... 49 i-Butane = Isobutane ...... 36 Helium-3 ...... 32 R 13 = Chlorotrifluoromethane . .26 1-Butene ...... 17 Hexafluoroethane ...... 26/32 R 14 = Tetrafluoromethane . .26/51 i-Butene = Isobutene ...... 37 Hydrogen ...... 33 R 22 = Chlorodifluoromethane . .26 n-Butane = Butane ...... 17 Hydrogen bromide ...... 26 R 23 = Trifluoromethane . . . .26/51 Carbon dioxide ...... 18 Hydrogen chloride ...... 35 R 32 = Difluoromethane ...... 26 Carbon monoxide ...... 20 Hydrogen sulfide ...... 36 R 41 = Fluoromethane ...... 26 Chlorine ...... 21/26 Isobutane ...... 36 R 116 = Hexafluoroethane . . .26/32 Chlorodifluoromethane ...... 21 Isobutene ...... 37 R 218 = Octafluoropropane . . . .26 Chloromethane ...... 22 Isobutylene = Isobutene ...... 37 R C318 = Octafluorocyclobutane 26 Chlorotrifluoromethane ...... 26 Krypton ...... 37 Silane ...... 26 Deuterium ...... 22 Laughing Gas = Silicon tetrafluoride ...... 26 Dichlorosilane ...... 26 Nitrous oxide ...... 26/45 Sulfur dioxide ...... 26/50 Difluoromethane ...... 26 Methane ...... 38 Sulfur hexafluoride ...... 26/50 Dimethyl ether ...... 23 Methyl chloride = Tetrafluoromethane ...... 26/51 2,2-Dimethylpropane ...... 23 Chloromethane ...... 22 Trifluoromethane ...... 26/51 Dinitrogen monoxide = Neon ...... 40 Vinyl chloride ...... 51 Nitrous oxide ...... 26/45 Neopentane = Xenon ...... 53 Dinitrogen tetroxide = 2,2-Dimethylpropane ...... 23 Nitrogen dioxide ...... 45 Nitric oxide ...... 26/41 Disilane ...... 26 Nitrogen ...... 41 Electronic Gases ...... 26 Nitrogen dioxide ...... 45 Ethane ...... 27 Nitrous oxide ...... 26/45

11 F-AAS (Flame atomic absorption spectrometry) for the analysis of individual elements with acetylene as fuel gas

12 Pure Gases

Acetylene Acetylene Ammonia 3.8 for Flame (solvent-free) photometry (dissolved in acetone)

Purity, %: ≥ 99.6 ≥ 99.6 ≥ 99.98 (referred to C2H2 (from vaporized without acetone) liquid phase)

Impurities, ppm:ent: Hydrogen compounds Hydrogen compounds of As, S and P of As, S and P ≤ 5 ≤ 10 N2 ≤ 4000

Containers: Water Filling Contents Water Filling Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters approx. bar kg liters approx. bar kg liters at 20° C, bar kg Steel cylinders 2 8.59 1 10 18 1.6 10 8.59 5.3 20 18 3.2 40 19 8.0 40 25 1.2 Linde Small Steel Cylinders 0.38 8.,59 0.18

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1–1.100 1–1,100 1 1.058 0.722 0.909 – 1 0,909 – 1 0.945 1 0.682 1.386 1.466 1 Identification: Cylinder shoulder color Maroun RAL 3009 Yellow RAL 1018 Label Acetylene for Flame photometry/ Ammonia 3.8 Acetylene solvent-free Valve outlet: Yoke fitting, DIN 477 No. 3 W 21.80 x 1/14, DIN 477 No. 6 Properties: Highly flammable Liquefied gas, toxic, caustic, flammable, environmentally harmful MAK value – 50 ppm Chemical symbol C2H2 NH3 Molar mass 26.038 g/mol 17.030 g/mol Critical temperature (Tc) 308.33 K ( 35.18 °C) 405.55 K (132.40 °C) Sublimation temperature at 1.013 bar 189.12 K (-84.03 °C)

Boiling point at 1,013 bar (Tb) 239.75 K (-33.40 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.905 0.596

Other types of supply: See page 26 for higher purities

13 Argon 4.8 Argon for Argon 5.0 spectrometry

Purity, %: ≥ 99.998 ≥ 99.998 ≥ 99.999

Impurities, ppm: O2 ≤ 3 O2 ≤ 3 O2 ≤ 2 N2 ≤ 10 N2 ≤ 10 N2 ≤ 5 H2O ≤ 5 H2O ≤ 5 H2O ≤ 3 CnHm ≤ 0.5 CnHm ≤ 0.5 CnHm ≤ 0.2

Cylinder bundles 600 200 128.4 600 200 128.4 600 200 128.4 600 300 183.6 600 300 183.6

® Linde minican 11212 l

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.197 1.669 1 1.197 1.669 1 1.197 1.669 0.835 1 1.394 0.835 1 1.394 0.835 1 1.394 0.599 0.717 1 0.599 0.717 1 0.599 0.717 1 Identification: Cylinder shoulder color Dark green RAL 6001 Label Argon 4.8/for spectrometry/5.0

Valve outlet: Filling pressure 200 bar: W 21.80 x 1/14, DIN 477 No. 6 Filling pressure 300 bar (bundles):W 21.80 x 1/14, 477 No. 6 (pressure regulating valve < 200 bar) and ISO 5145 No. 0170 (standard valve to 300 bar) Properties: Compressed gas, suffocating, chemically inert

MAK value – Chemical symbol Ar Molar mass 39.948 g/mol Critical temperature (Tc) 150.75 K (-122.40 °C) Boiling point at 1,013 bar (Tb) 87.29 K (-185.86 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.380

Other types of supply: Argon is also available cryogenically liquefied, in road tankers.. In this case the technical equipment required is provided by Linde. The LI-PUR® system satisfies even the most stringent demands.

14 Pure Gases

Argon 5.3 Argon 5.6 Argon 6.0

Purity, %: ≥ 99.9993 ≥ 99.9996 ≥ 99.9999

Impurities, ppm: O2 ≤ 1 O2 ≤ 0.7 O2 ≤ 0.5 N2 ≤ 3 N2 ≤ 1 N2 ≤ 0.5 H2O ≤ 2 H2O ≤ 1 H2O ≤ 0.5 CnHm ≤ 0.1 CnHm ≤ 0.1 CnHm ≤ 0.1 CO ≤ 0.1 CO ≤ 0.1 CO2 ≤ 0.1 CO2 ≤ 0.1

Certificate of analysis: Yes Yes Yes

Containers: Water Filling Contents Water Filling Contents Water Filling Contents capacity pressure capacity pressure capacity pressure liters approx. bar m3 liters approx. bar m3 liters approx. bar m3 Steel cylinders 2 200 0.4 10 200 2.1 50 200 10.7 10 200 2.1 10 200 2.1 50 300 15.3 50 200 10.7 50 200 10.7

Linde Small Steel Cylinders 0.38 200 80 l

Valve outlet: Filling pressure 200 bar: W 21.80 x 1/14, DIN 477 No. 6 Filling pressure 300 bar (single cylinder): M 30 x 1,5 INT, DIN 477 No. 52

Properties: Compressed gas, suffocating, chemically inert

Other types of supply: Argon is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde. The LI-PUR® system satisfies even the most stringent demands.

15 Argon 7.0 Boron trifluoride 1,3-Butadiene 2.5 1.6

Purity, %: ≥ 99.99999 ≥ 96 ≥ 99.5 (from vaporized liquid phase) Impurities, ppb: O2 ≤ 30 H2 ≤ 30 H2O ≤ 50 CnHm ≤ 30 CO ≤ 30 CO2 ≤ 30 Halogenated hydrocarbons in SF6 equivalents ≤ 1

Certificate of analysis: Yes

Containers: Water Filling Contents Water Filling Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters approx. bar m3 liters approx. bar kg liters at 20 °C, bar kg Steel cylinders 7 2.48 3 Aluminum cylinders 10 150 1.6

Linde Small Steel Cylinders 0.38 100 0.24

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.197 1.669 1 1.804 2.867 1 3.584 2,.330 0.835 1 1.394 0.554 1 1.589 0.279 1 0.650 0.599 0.717 1 0.349 0.629 1 0.429 1.538 1 Identification: Cylinder shoulder color Dark green RAL 6001 Yellow RAL 1018 Red RAL 3000 Label Argon 7.0 Boron trifluoride 1.6 1,3-Butadiene 2.5

Valve outlet: W 21.80 x 1/14, 1, DIN 477 No. 8 W 21.80 x 1/14 LH, DIN 477 No. 6 DIN 477 No. 1 Properties: Compressed gas, suffo- Compressed gas, Liquefied gas, toxic, cating, chemically inert highly toxic, caustic carciogenic (Cat. 2), highly flammable MAK value – 1 ppm 5 ppm (preliminary value) Chemical symbol Ar BF3 C4H6 Molar mass 39.948 g/mol 67.805 g/mol 54.09 g/mol Critical temperature (Tc) 150.75 K (-122.40 °C) 260.95 K ( -12.20 °C) 425.15 K (152.00 °C) Boiling point at 1,013 bar (Tb) 87.29 K (-185.86 °C) 172.85 K (-100.30 °C) 268.65 K ( -4.50 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1,380 2.370 1.926

Other types of supply: The LI-PUR® system satis- See page 26 fies even the most stringent for higher purities demands.

16 Pure Gases

Butane 2.5 Butane 3.5 1-Butene 2.5

Purity, %: ≥ 99.5 ≥ 99.95 ≥ 99.5 (from vaporized (from vaporized (from vaporized liquid phase) liquid phase) liquid phase)

Other CnHm ≤ 500 Other CnHm ≤ 5000

Certificate of analysis: Yes

Steel drums 950 2.06 485

Linde minican® 1 2.06 0.5

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 4.196 2.522 1 4.196 2.522 1 3.836 2.417 0.238 1 0.601 0.238 1 0.601 0.261 1 0.630 0.397 1.663 1 0.397 1.663 1 0.414 1.587 1 Identification: Cylinder shoulder color Red RAL 3000 Red RAL 3000 Label Butane 2.5/3.5 1-Butene 2.5

Valve outlet: W 21.80 x 1/14 LH, W 21.80 x 1/14 LH, DIN 477 No. 1 DIN 477 No. 1 Properties: Liquefied gas, Liquefied gas, highly flammable highly flammable

MAK value 1000 ppm – Chemical symbol C4H10 C4H8 Molar mass 58.123 g/mol 56.107 g/mol Critical temperature (Tc) 425.16 K (152.01 °C) 419.55 K (146.40 °C) Boiling point at 1,013 bar (Tb) 272.65 K ( -0.50 °C) 266.90 K ( -6.25 °C) Relative density at 15 °C, 1 bar (dry air = 1) 2.085 1.998

17 Carbon dioxide Carbon dioxide Carbon dioxide 3.0 4.5 4.8

Purity, %: ≥ 99.9 ≥ 99.995 ≥ 99.998 (from vaporized (from vaporized (from vaporized liquid phase) liquid phase) liquid phase)

Impurities, ppm: O O ≤ 15 O ≤ 2 2 ≤ 500 2 2 N2 } N2 ≤ 30 N2 ≤ 10 H2O ≤ 250 CO ≤ 1 CO ≤ 1 CnHm ≤ 50 H2O ≤ 5 H2O ≤ 5 CnHm ≤ 2 CnHm ≤ 2

Certificate of analysis: Yes Yes

Containers: Water Vapor Contents Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters at 20 °C, bar kg liters at 20 °C, bar kg liters at 20 °C, bar kg Steel cylinders 2 57.29 1.5 2 57.29 1.5 10 57.29 7.5 10 57.29 7.5 10 57.29 7.5 50 57.29 37.5 50 57.29 37.5 50 57.29 37.5

Linde Small Steel Cylinders 0.38 57.29 0.28

Linde minican® 1 Filling pressure 21 g 12 bar

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, (-56,6 °C, (15 °C, (-56,6 °C, (15 °C, (-56,6 °C, 1 bar) 5,2 bar) 1 bar) 5,2 bar) 1 bar) 5,2 bar) 1 1.569 1.848 1 1.569 1.848 1 1.569 1.848 0.637 1 1.178 0.637 1 1.178 0.637 1 1.178 0.541 0.849 1 0.541 0.849 1 0.541 0.849 1 Identification: Cylinder shoulder color Grey RAL 7037 Label Carbon dioxide 3.0/4.5/4.8

Valve outlet: W 21.80 x 1/14, DIN 477 No. 6

Properties: Liquefied gas, suffocating

MAK value 5000 ppm Chemical symbol CO2 Molar mass 44.01 g/mol Critical temperature (Tc) 304.21 K ( 31.06 °C) Boiling point at 1,013 bar (Tb) 194.65 K (-78.50 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.528

Other types of supply: Carbon dioxide is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde.

18 Pure Gases

Carbon dioxide Carbon dioxide Carbon dioxide 5.3 SFC/SFE SFE high purity

Purity, %: ≥ 99.9993 ≥ 99.9993 ≥ 99.9996 (from vaporized (from vaporized (from vaporized liquid phase) liquid phase) liquid phase)

Impurities, ppm: O2 ≤ 2 O2 ≤ 2 O2 ≤ 1 N2 ≤ 3 N2 ≤ 3 N2 ≤ 2 CO ≤ 0.5 CO ≤ 0.5 CO ≤ 0.5 H2O ≤ 1 H2O ≤ 1 H2O ≤ 1 CnHm ≤ 1 CnHm ≤ 1 CnHm ≤ 0.01 Halogenated hydrocarbons in CCl4 equivalents ≤ 0.01 ppb Certificate of analysis: Yes Yes Yes

Containers: Water Vapor Contents Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters at 20 °C, bar kg liters at 20 °C, bar kg liters at 20 °C, bar kg Aluminum cylinders 10 57.29 6 10 57.29 6 10 approx. 120* 5.5 10 approx. 120* 5.5 40 57.29 30 31.5 57.29 19.6 40 approx. 120* 22 31.5 approx. 120* 17.3 Steel cylinders 10 57.29 7.5 50 57.29 37.5 * Helium * Helium supporting supporting pressure pressure

Valve outlet: W 21.80 x 1/14, DIN 477 No. 6 (double valve with submerged pipe for SFC/SFE & SFE high purity)

Properties: Liquefied gas, suffocating

Other types of supply: Carbon dioxide is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde.

19 Carbon monoxide Carbon monoxide Carbon monoxide 2.0 3.0 3.7

Purity, %: ≥ 99 ≥ 99.9 ≥ 99.97

Impurities, ppm: N2 ≤ 4000 N2 ≤ 750 N2 ≤ 300 O O O ≤ 10 2 }}≤ 3000 2 ≤ 60 2 Ar Ar Ar ≤ 20 H2 ≤ 1500 H2 ≤ 250 H2 ≤ 100 CnHm ≤ 500 CnHm ≤ 50 CnHm ≤ 10 H2O ≤ 10

Certificate of analysis: Yes

Containers: Water Filling Contents Water Filling Contents Water Filling Contents capacity pressure capacity pressure capacity pressure liters approx. bar m3 liters approx. bar m3 liters approx. bar m3 Steel cylinders 2 100 0.2 10 150 1.5 10* 150 1.5 10* 150 1.5 40 150 5.9 40* 150 5.9 40* 150 5.9 Cylinder bundles 480* 200 93.2 Linde Small Steel Cylinders 0.38 130 50 l Linde minican® 11212 l

*Aluminum cylinders *Aluminum cylinders *Aluminum cylinders

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.484 1.170 1 1.484 1.170 1 1.484 1.170 0.674 1 0.789 0.674 1 0.789 0.674 1 0.789 0.855 1.268 1 0.855 1.268 1 0.855 1.268 1 Identification: Cylinder shoulder color Yellow RAL 1018 Label Carbon monoxide 2.0/3.0/3.7

Valve outlet: 1 LH, DIN 477 No. 5

Properties: Compressed gas, toxic, highly flammable, toxic for reproduction (development) (Cat. 1) MAK value 30 ppm Chemical symbol CO Molar mass 28.01 g/mol Critical temperature (Tc) 132.91 K (-140.24 °C) Boiling point at 1,013 bar (Tb) 81.62 K (-191.53 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.967

20 Pure Gases

Carbon monoxide Chlorine 2.8 Chlordifluoro- 4.7 methane 2.8 R 22

Purity, %: ≥ 99.997 ≥ 99.8 ≥ 99.8 (from vaporized (from vaporized liquid phase) liquid phase)

Impurities, ppm: N2 ≤ 5 O2 ≤ 5 Ar ≤ 15 H2 ≤ 1 CnHm ≤ 2 H2O ≤ 5

Certificate of analysis: Yes

Containers: Water Filling Contents Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters approx. bar m3 liters at 20 °C, bar kg liters at 20° C, bar kg Steel cylinders 2 6.88 2.5 10* 150 1.5 10 6.88 12.5 7 9.22 7 40* 150 5.9

Linde Small Steel Cylinders 0.38 6.88 0.45

*Aluminum cylinders

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.484 1.170 1 1.924 3.007 1 2.597 3.670 0.674 1 0.789 0.520 1 1.563 0.385 1 1.413 0.855 1.268 1 0.333 0.640 1 0.272 0.708 1 Identification: Cylinder shoulder color Yellow RAL 1018 Yellow RAL 1018 Bright green RAL 6018 Label Carbon monoxide 4.7 Chlorine 2.8 R 22 2.8

Valve outlet: 1 LH, DIN 477 No. 5 1, DIN 477 No. 8 W 21.80 x 1/14, DIN 477 No. 6 Properties: Compressed gas, toxic, Liquefied gas, toxic, irritating, Liquefied gas, suffocating, highly flammable, toxic for environmentally harmful environmentally harmful reproduction (development) (Cat. 1) 0,5 ppm MAK value 30 ppm Cl2 – Chemical symbol CO 70.906 g/mol CHClF2 Molar mass 28.01 g/mol 417.15 K (144.00 °C) 86.48 g/mol Critical temperature (Tc) 132.91 K (-140.24 °C) 239.05 K ( -34.10 °C) 369.15 K ( 96.00 °C) Boiling point at 1,013 bar (Tb) 81.62 K (-191.53 °C) 232.37 K (-40.78 °C) Relative density at 15 °C, 1 bar 2.486 (dry air = 1) 0.967 3.034 See page 26 Other types of supply: for higher purities

21 Chloromethane Deuterium 2.8 Stabile H2 isotope

Purity, %: ≥ 99.8 ≥ 99.9 (from vaporized Enrichment ≥ 99.8 % liquid phase)

Containers: Water Vapor Contents Water Filling Contents capacity pressure capacity pressure liters at 20° C, bar kg liters approx. bar m3 Steel cylinders 2500.1 10 100 1 50 100 5 50 200 8.9 Linde Small Steel Cylinders 0.38 5.0 0.27 Linde minican® 11212 l

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 2.131 2.137 1 1.0265 0.1667 0.469 1 1.003 0.9742 1 0.1624 0.468 0.997 1 5.9988 6.1576 1 Identification: Cylinder shoulder color Red RAL 3000 Red RAL 3000

Label Chloromethane 2.8 Deuterium

Valve outlet: W 21.80 x 1/14 LH, W 21.80 x 1/14 LH, DIN 477 No. 1 DIN 477 No. 1

Properties: Liquefied gas, harmful, Compressed gas, highly carcinogenic (Cat. 3), flammable highly flammable

MAK value 50 ppm – Chemical symbol CH3Cl D2 Molar mass 50.488 g/mol 4.029 g/mol Critical temperature (Tc) 416.25 K (143.10 °C) 38.35 K (-234.80 °C) Boiling point at 1,013 bar (Tb) 249.39 K ( -23.76 °C) 23.57 K (-249.58 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.767 0.138

22 Pure Gases

Dimethyl ether 2,2-Dimethyl- 3.0 propane 2.0

Purity, %: ≥ 99.9 ≥ 99 (from vaporized (from vaporized liquid phase) liquid phase)

Containers: Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure liters at 20 °C, bar kg liters at 20 °C, bar kg

Linde Small Steel Cylinders 0.38 5.31 0.2 0.38 1.49 0.16

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 2.673 1.964 1 5.297 3.194 0.374 1 0.735 0.189 1 0.603 0.509 1.361 1 0.313 1.658 1 Identification: Cylinder shoulder color Red RAL 3000 Red RAL 3000 Label Dimethylether 3.0 2,2-Dimethylpropane 2.0

Valve outlet: W 21.80 x 1/14 LH, W 21.80 x 1/14 LH, DIN 477 No. 1 DIN 477 No. 1

Properties: Liquefied gas, highly Liquefied gas, highly flammable flammable MAK value 1000 ppm 1000 ppm Chemical symbol C2H6O C5H12 Molar mass 46.069 g/mol 72.15 g/mol Critical temperature (Tc) 400.10 K (126.95 °C) 433.78 K (160.63 °C) Boiling point at 1,013 bar (Tb) 248.33 K ( -24.82 °C) 282.65 K ( 9.50 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.624 2.641

23 Electronic gases

Electronic gases for high-tech use

The demands of the microelectronics industry are growing from day to day. Linde's response has been to engage in a program of ongoing product development to meet even the most stringent of requirements. We support our customers in the optimization of their processes by delivering gases of the highest purity to their point of use. An indispensable prerequisite for this development work is cooperation between user and supplier in a spirit of trust and confidence.

Electronic gases, however, are not only used in microelectronics, but also in other fields of high technology, e.g. in the production of optical glass fibers, surface coating of materials and glasses as well as in the production of sensors and solar Preparation of cylinders for electronic gases cells.

Production of high-purity electronic gases Special containers and their preparation

Thanks to its own production operations and procurement Particular care is made in the selection of the containers on the world market, Linde can guarantee reliable availability and cylinder valves because the quality of high-purity gases of its products. Where necessary, the products are purified depends on the containers and fittings to a significant extent. further in our own purification plants for optimum conformity to our customers' requirements. Proven materials used include hardened and tempered steels with inner surface treatment, passivated aluminum alloy or (electropolished) stainless steel. In the case of the cylinder valves there are simply no alternatives: stainless steel valve models are employed exclusively since they have demonstrat- ed their superiority in comprehensive tests with respect to major properties such as low particle generation, leak tightness, purging, handling and reliability. On request, valves with flow restrictors (reduction of the cross-sectional area at the valve outlet) and pneumatic valves can also be supplied.

To meet even the highest standards, supply concepts are offered in which the connections between valve and cylinder and between valve and gas supply system are designed with metallic seals. This enables a supply system for gases from pressurized gas containers to be designed in stainless steel throughout, from the storage container all the way to the point of use.

In addition to the selection of the ideal container material for the particular gas in question, pretreatment of the containers also plays a crucial role. The containers are subjected to intensive treatment using turbomolecular pumps and tested Analysis of corrosive gases using a special sampling system for particle emissions and residual contamination before being filled.

24 Pure Gases

Electronic gases

Filling of ultra-high purity gases Quality assurance and gas mixtures

To prevent cross-contamination with other process gases, Decades of experience in the analysis of calibration gas cylinders are only refilled with similar gases or gas mixtures. mixtures (e.g. with corrosive components) and with trace ana- Every cylinder is individually controlled and all relevant infor- lysis in ultra-high purity gases have made it easier to imple- mation documented in an electronic database. ment and optimize analysis methods for quality assurance of electronic gases. In addition, special sampling techniques Both the cylinder inventory as well as the filling equipment have also been developed, mainly for corrosive gases and are kept strictly segregated by gases. Sophisticated equip- metal trace analysis. ment and perfect gas handling preclude any loss in purity during filling of the containers. The filling procedure is also Leading-edge methods of gas chromatography, (FT-) infra- combined with purification measures (reduction in gaseous red absorption, atomic absorption and (ICP-) mass spectro- impurities, filtration). Gas mixtures are prepared gravimetrically metry as well as particle counting are available for quality by means of high-precision electronic scales. assurance.

Within the scope of the final inspection, information on the purity and the individual specifications of the product are provided on the certificate of analysis for every cylinder of gas.

Quality management for electronic gases

In the field of electronic gases quality, certification to DIN EN ISO 9001 means not only that every filled cylinder is checked in a final analysis, but also that intermediate tests are carried out in every step of production for process control purposes. The results of these tests are, for example, regularly evaluated in the form of SPC data for the pretreatment of containers and used for ongoing process improvement.

Pilot plant for large-scale secondary purification of HCl

Container for chlorine: layout developed by Linde

25 Electronic gases

Key products in the Linde product line

Gas Purity 2.0/3.0 3.5 4.0 4.5 4.8 5.0/5.5/6.0

Ammonia NH3 Arsine AsH3 Boron trichloride BCl3 Boron trifluoride BF3 Chlorine Cl2 Chlortrifluoromethane CClF3 Disilane Si2H6 Germane GeH4 Difluoromethane CH2F2 Fluoromethane CH3F Hexafluoroethane C2F6 Hydrogen bromide HBr Hydrogen chloride HCl Nitric oxide NO

Nitrogen trifluoride NF3 Nitrous oxide N2O Octafluorocyclobutane C4F8 Octafluoropropane C3F8 Phosphine PH3 Silicon tetrafluoride SiF4 Sulfur hexafluoride SF6 Tetrafluoromethane CF4 Trifluoromethane CHF3 Gas Purity 2.0 3.0 4.0 5.0

Dichlorosilane SiH2Cl2 50 Ωcm 150 Ωcm

Silane SiH4 300 Ωcm 2000 Ωcm Doping gas mixtures and further reactive gases on request

The key products in our line of electronic gases are shown in the obove table. The ultra-high purities offered by Class 5.0/6.0 represent the best qualtities that are presently available on the elctronic gases market. Further information is given in product leavlets and safety data sheets available from your local Linde representative on our Export Head Office.

The employment of high-quality products, some of which have extreme chemical and toxicological properties, necessiates gas supply systems that incorporate professionally sophisticated concepts, designs and construction. In this regard see chapter “Gas Supply Systems”.

A number of standard mixtures for use in the electronic industry is to be found on page 71.

26 Pure Gases

Ethane 2.5 Ethane 3.5 Ethylene 2.8

Purity, %: ≥ 99.5 ≥ 99.95 ≥ 99.8 (from vaporized (from vaporized liquid phase) liquid phase)

Impurities, ppm: Other CnHm ≤ 5000 Other CnHm ≤ 450 O2 ≤ 30 N2 ≤ 150 Other CnHm ≤ 1800

Certificate of analysis: Yes

Containers: Water Vapor Contents Water Vapor Contents Water Filling Contents capacity pressure capacity pressure capacity pressure* liters at 20 °C, bar kg liters at 20 °C, bar kg liters at 20 °C, bar kg Steel cylinders 2 37.76 0.8 2 37.76 0.8 2 120 0.7 10 37.76 3.9 10 37.76 3.9 10 120 3.7 50 37.76 19.5 50 37.76 15 50 120 18.5 Linde Small Steel Cylinders 0.38 37.76 0.15 Linde minican® 1 Filling 14 g 11213 g pressure 12 bar * Filling pressure greatly de- pendent upon temperature

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 2.315 1.265 1 2.315 1.265 1 2.074 1.178 0.432 1 0.547 0.432 1 0.547 0.482 1 0.568 0.791 1.830 1 0.791 1.830 1 0.849 1.761 1 Identification: Cylinder shoulder color Red RAL 3000 Red RAL 3000 Label Ethane 2.5/3.5 Ethylene 2.8

Valve outlet: W 21.80 x 1/14 LH, DIN 477 No. 1 W 21.80 x 1/14 LH, DIN 477 No. 1

Properties: Liquefied gas, highly flammable Compressed gas, highly flammable

MAK value – – Chemical symbol C2H6 C2H4 Molar mass 30.069 g/mol 28.054 g/mol Critical temperature (Tc) 305.42 K ( 32.27 °C) 282.65 K ( 9.50 °C) Boiling point at 1,013 bar (Tb) 184.47 K (-88.68 °C) 169.43 K (-103.72 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.046 0.974

27 Ethylene 3.5 Ethylene oxide 3.0

Purity, %: ≥ 99.95 ≥ 99.9 (from vaporized liquid phase)

Impurities, ppm: O2 ≤ 15 N2 ≤ 50 Other CnHm ≤ 450

Certificate of analysis: Yes

Containers: Water Filling Contents Water Vapor Contents capacity pressure* capacity pressure liters at 20 °C, bar kg liters at 20 °C, bar kg Steel cylinders 2620.4 10 120 3.7 50 120 18.5 Linde Small Steel Cylinders 0.38 120 0.14 0.38 1.4 0.26

* Filling pressure greatly de- pendent upon temperature

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 2.074 1.178 1 2,.141 1.899 0.482 1 0.568 0.467 1 0.887 0.849 1.761 1 0.527 1.127 1 Identification: Cylinder shoulder color Red RAL 3000 Red RAL 3000 Label Ethylene 3.5 Ethylene oxide 3.0

Valve outlet: W 21.80 x 1/14 LH, W 21.80 x 1/14 LH, DIN 477 No. 1 DIN 477 No. 1

Properties: Compressed gas, Liquefied gas, toxic, highly flammable irritating, highly flammable, carcinogenic (Cat. 2), gene- modifying (Cat. 2) MAK value – 1 ppm (preliminary value) Chemical symbol C2H4 C2H4O Molar mass 28.054 g/mol 44.053 g/mol Critical temperature (Tc) 282.65 K ( 9.50 °C) 468.93 K ( 195.78 °C) Boiling point at 1,013 bar (Tb) 169.43 K (-103.72 °C) 283.60 K ( 10.45 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.974 1.570

28 Pure Gases

Helium 4.6 Helium 5.0 Helium ECD

Purity, %: ≥ 99.996 ≥ 99.999 ≥ 99.999

Impurities, ppm: O2 ≤ 5 O2 ≤ 2 O2 ≤ 2 N2 ≤ 20 N2 ≤ 3 H2O ≤ 2 H2O ≤ 5 H2O ≤ 3 CnHm ≤ 0.1 CnHm ≤ 1 CnHm ≤ 0.2 Halogenated hydrocarbons in SF6 equivalents ≤ 1 ppb

Certificate of analysis: Yes

Cylinder bundles 600 200 109.2 600 300 157.2 Trailers 20500 200 3730 Linde minican® 11212 l

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.336 0.1670 1 1.336 0.1670 1 1.336 0.1670 0.7485 1 0.1250 0.7485 1 0.1250 0.7485 1 0.1250 5.988 8.000 1 5.988 8.000 1 5.988 8.000 1 Identification: Cylinder shoulder color Brown RAL 8008 Label Helium 4.6/5.0/ECD

Valve outlet: Filling pressure 200 bar: W 21.80 x 1/14, DIN 477 No. 6 Filling pressure 300 bar (bundles):W 21.80 x 1/14, DIN 477 No. 6 (pressure regulating valve < 200 bar) and ISO 5145 No. 0170 (standard valve to 300 bar) Properties: Compressed gas, suffocating, chemically inert

MAK value – Chemical symbol He Molar mass 4.0026 g/mol Critical temperature (Tc) 5.21 K (-267.94 °C) Boiling point at 1,013 bar (Tb) 4.22 K (-268.93 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.138

Other types of supply: The LI-PUR® system satisfies even the most stringent demands.

29 Helium as lifting gas for balloons, airships and dirigibles Helium 5.3

Purity, %: ≥ 99.9993

Impurities, ppm: O2 ≤ 1 N2 ≤ 2 H2O ≤ 2 CnHm ≤ 0.1

Certificate of analysis: Yes

Containers: Water Filling Contents capacity pressure liters approx. bar m3 Steel cylinders 2 200 0.4 10 200 1.8 50 200 9.1

Linde Small Steel Cylinders 0.38 200 70 l

Conversion factors: m3 of gas Liters kg (15 °C, liquid at Tb 1 bar) 1 1.336 0.1670 0.7485 1 0.1250 5.988 8.000 1 Identification: Cylinder shoulder color Brown RAL 8008 Label Helium 5.3

Valve outlet: W 21.80 x 1/14, DIN 477 No. 6

Properties: Compressed gas, suffocating, chemically inert MAK value – Chemical symbol He Molar mass 4.0026 g/mol Critical temperature (Tc) 5.21 K (-267.94 °C) Boiling point at 1,013 bar (Tb) 4.22 K (-268.93 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.138

Other types of supply: The LI-PUR® system satisfies even the most stringent demands.

30 Pure Gases

Helium 5.6 Helium 6.0 Helium 7.0

Purity, %: ≥ 99.9996 ≥ 99.9999 ≥ 99.99999

Impurities, ppb: O2 ≤ 0.7 O2 ≤ 0.5 O2 ≤ 30 N2 ≤ 1 N2 ≤ 0.5 H2 ≤ 30 H2O ≤ 1 H2O ≤ 0.5 H2O ≤ 50 CnHm ≤ 0.1 CnHm ≤ 0.1 CnHm ≤ 30 CO ≤ 0.1 CO ≤ 0.1 CO ≤ 30 CO2 ≤ 0.1 CO2 ≤ 0.1 CO2 ≤ 30 Halogenated hydrocarbons in SF6 equivalents ≤ 1

Certificate of analysis: Yes Yes Yes

Aluminum cylinders 10 150 1.4

Valve outlet: W 21.80 x 1/14, DIN 477 No. 6

Properties: Compressed gas, suffocating, chemically inert

Other types of supply: The LI-PUR® system satisfies even the most stringent demands.

31 Liquid Helium Helium-3 Hexafluoroethane Stable He isotope 2.8 R 116

Purity, %: ≥ 99.99 ≥ 99.8 Enrichment ≥ 99.9

Containers: Water Water Filling Contents Water Filling Contents capacity capacity pressure capacity pressure* liters liters approx. bar Liter liters at 20 °C, bar kg Steel cylinders 12 – 15 2 – 15 2332 10 33 10

Linde Small Steel Cylinders 0.38 2.6 – 26 1 – 10

Vacuum insulated dewars 30 – 450

* Filling pressure greatly de- pendent upon temperature Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.336 0.1670 1 2.169 0.128 1 3.625 5.829 0.7485 1 0.1250 0.461 1 0.059 0.276 1 1.608 5.988 8.000 1 7.813 16.949 1 0.172 0.622 1 Identification: Cylinder shoulder color Brown RAL 8008 Bright green RAL 6018 Label Liquid Helium Helium-3 R 116 2.8 Valve outlet: Gland for siphon diameters W 21.80 x 1/14, W 21.80 x 1/14, 10/12/12.7/16/18 mm DIN 477 No. 6 DIN 477 No. 6 OMT coupling for 250 and 450 liter containers

Properties: Cryogenically liquefied gas, Compressed gas, suffo- Compressed gas, suffo- suffocating, chemically inert cating, chemically inert cating, chemically inert MAK value – – – 3 Chemical symbol He He C2F6 Molar mass 4.0026 g/mol 3.016 g/mol 138.01 g/mol Critical temperature (Tc) 5.21 K (-267.94 °C) 3.33 K (-269.82 °C) 292.85 K ( 19.70 °C) Boiling point at 1,013 bar (Tb) 4.22 K (-268.93 °C) 3.19 K (-269.96 °C) 194.95 K (-78.20 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.138 0.106 4.817 Other types of supply: See page 26 for higher purities

32 Pure Gases

Hydrogen 5.0 Hydrogen ECD Hydrogen 5.3

Purity, %: ≥ 99.999 ≥ 99.999 ≥ 99.9993

Impurities, ppm: O2 ≤ 2 O2 ≤ 2 O2 ≤ 1 N2 ≤ 3 H2O ≤ 2 N2 ≤ 3 H2O ≤ 5 CnHm ≤ 0.1 H2O ≤ 2 CnHm ≤ 0.5 Halogenated hydrocarbons CnHm ≤ 0.2 in SF6 equivalents ≤ 1 ppb

Certificate of analysis: Yes

Containers: Water Filling Contents Water Filling Contents Water Filling Contents capacity pressure capacity pressure capacity pressure liters approx. bar m3 liters approx. bar m3 liters approx. bar m3 Steel cylinders 2 200 0.4 10 200 1.8 10 200 1,8 10 200 1.8 50 200 8.9 50 200 8,9 50 200 8.9 Cylinder bundles 600 200 106.8 Trailers 20500 200 3650 to 33000 to 5875 Linde Small Steel Cylinders 0.38 200 65 l Linde minican® 11212 l

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.188 0.0841 1 1.188 0.0841 1 1.188 0.0841 0.8418 1 0.0708 0.8418 1 0.0708 0.8418 1 0.0708 11.890 14.124 1 11.890 14.124 1 11.890 14.124 1 Identification: Cylinder shoulder color Red RAL 3000

Label Hydrogen 5.0/ECD/5.3

Valve outlet: W 21.80 x 1/14 LH , DIN 477 No. 1

Properties: Compressed gas, highly flammable MAK value – Chemical symbol H2 Molar mass 2.016 g/mol Critical temperature (Tc) 33.24 K (-239.91 °C) Boiling point at 1,013 bar (Tb) 20.38 K (-252.77 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.0695

Other types of supply: Hydrogen is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde. The LI-PUR® system satisfies even the most stringent demands.

33 Steam reformer for the production of hydrogen in Milazzo (Italy)

34 Pure Gases

Hydrogen 5.6 Hydrogen 6.0 Hydrogen chloride 2.8

Purity, %: ≥ 99.9996 ≥ 99.9999 ≥ 99.8 (from vaporized liquid phase) Impurities, ppm: O2 ≤ 0.7 O2 ≤ 0.5 N2 ≤ 1 N2 ≤ 0.5 H2O ≤ 1 H2O ≤ 0.5 CnHm ≤ 0.1 CnHm ≤ 0.1 CO ≤ 0.1 CO ≤ 0.1 CO2 ≤ 0.1 CO2 ≤ 0.1

Certificate of analysis: Yes Yes

Containers: Water Filling Contents Water Filling Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters approx. bar m3 liters approx. bar m3 liters at 20 °C, bar kg Steel cylinders 10 200 1.8 10 200 1.8 2 42.6 1.5 50 200 8.9 50 200 8.9 10 42.6 7.4

Linde Small Steel Cylinders 0.38 42.6 0.25

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.188 0.0841 1 1.188 0.0841 1 1.290 1.536 0.8418 1 0.0708 0.8418 1 0.0708 0.775 1 1.191 11.890 14.124 1 11.890 14.124 1 0.651 0.840 1 Identification: Cylinder shoulder color Red RAL 3000 Yellow RAL 1018 Label Hydrogen 5.6/6.0 Hydrogen chloride 2.8

Valve outlet: W 21.80 x 1/14 LH, DIN 477 No. 1 1, DIN 477 No. 8

Properties: Compressed gas, highly flammable Liquefied gas, toxic, caustic

MAK value – 5 ppm Chemical symbol H2 HCl Molar mass 2.016 g/mol 36.461 g/mol Critical temperature (Tc) 33.24 K (-239.91 °C) 324.69 K (51.54 °C) Boiling point at 1,013 bar (Tb) 20.38 K (-252.77 °C) 188.12 K (-85.03°C) Relative density at 15 °C, 1 bar (dry air = 1) 0.0695 1.270

Other types of supply: Hydrogen is also available cryogenically liquefied, in road See page 26 tankers. In this case the technical equipment required is for higher purities provided by Linde. The LI-PUR® system satisfies even the most stringent demands.

35 Hydrogen sulfide Isobutane 2.5 Isobutane 3.5 2.5

Purity, %: ≥ 99.5 ≥ 99.5 ≥ 99.95 (from vaporized (from vaporized (from vaporized liquid phase) liquid phase) liquid phase)

Impurities, ppm: Other CnHm ≤ 5000 Other CnHm ≤ 500

Certificate of analysis: Yes

Containers: Water Vapor Contents Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters at 20 °C, bar kg liters at 20 °C, bar kg liters at 20 °C, bar kg Steel cylinders 2 17.9 1.3 2 3.04 0.8 10 17.9 6.7 7 3.04 3 7 3.04 3 27 3.04 11 27 3.04 11 79 3.04 38 Steel drums 950 3.04 465 Linde Small Steel Cylinders 0.38 3.04 0.16 Linde minican® 1 3.04 0.45

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.567 1.434 1 4.237 2.514 1 4.237 2.514 0.638 1 0.915 0.236 1 0.593 0.236 1 0.593 0.697 1.093 1 0.398 1.685 1 0.398 1.685 1 Identification: Cylinder shoulder color Yellow RAL 1018 Red RAL 3000 Label Hydrogen sulfide 2.5 Isobutane 2.5/3.5

Valve outlet: 1 LH, DIN 477 No. 5 W 21.80 x 1/14 LH, DIN 477 No. 1

Properties: Liquefied gas, highly toxic, Liquefied gas, highly flammable highly flammable, environmentally harmful MAK value 10 ppm 1000 ppm Chemical symbol H2S C4H10 Molar mass 34.08 g/mol 58.123 g/mol Critical temperature (Tc) 373.20 K (100.05 °C) 408.13 K (134.98 °C) Boiling point at 1,013 bar (Tb) 212.95 K ( -60.20 °C) 261.45K ( -11.70 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.187 2.079

Other types of supply: Isobutane 2.5 is also available liquefied, in road tankers.

36 Pure Gases

Isobutene 3.5 Krypton 4.0 Krypton 4.8

Purity, %: ≥ 99.95 ≥ 99.99 ≥ 99.998 (from vaporized liquid phase)

Impurities, ppm: Other CnHm ≤ 450 O2 ≤ 2 O2 ≤ 1 N2 ≤ 20 N2 ≤ 5 H2O ≤ 5 H2O ≤ 3 CnHm ≤ 1 CnHm ≤ 1 H2 ≤ 2 H2 ≤ 1 Xe ≤ 20 Xe ≤ 3 Ar ≤ 5 Ar ≤ 2 Certificate of analysis: Yes Yes

Containers: Water Vapor Contents Water Filling Contents Water Filling Contents capacity pressure capacity pressure capacity pressure liters at 20 °C, bar kg liters approx. bar liters** liters approx. bar liters** Steel cylinders 2 2.68 0.8 280200 280200 7 2.68 3 10 80 1000 10 80 1000 50 140 10000 50 140 10000

Linde minican® 11212

**Filled by weight, **Filled by weight, 1 liter corresponds to 3.51 g 1 liter corresponds to 3.51 g Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 3.863 2.418 1 1.453 3.507 1 1.453 3.507 0.259 1 0.626 0.688 1 2.413 0.688 1 2.413 0.413 1.597 1 0.285 0.414 1 0.285 0.414 1 Identification: Cylinder shoulder color Red RAL 3000 Bright green RAL 6018 Label Isobutene 3.5 Krypton 4.0/4.8

Valve outlet: W 21.80 x 1/14 LH, W 21.80 x 1/14, DIN 477 No. 6 DIN 477 No. 1

Properties: Liquefied gas, highly Compressed gas, suffocating, chemically inert flammable

MAK value – – Chemical symbol C4H8 Kr Molar mass 56.107 g/mol 83.80 g/mol Critical temperature (Tc) 417.85 K (144.70 °C) 209.40 K ( -63.75 °C) Boiling point at 1,013 bar (Tb) 266.03 K ( -7.12°C) 119.80 K (-153.35 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.999 2.900

37 Methane 2.5 Methane 3.5 Methane 4.5

Purity, %: ≥ 99.5 ≥ 99.95 ≥ 99.995

Impurities, ppm: O2 ≤ 100 O2 ≤ 30 O2 ≤ 5 N2 ≤ 600 N2 ≤ 200 N2 ≤ 20 H2 ≤ 500 H2 ≤ 20 H2 ≤ 5 Other CnHm ≤ 3000 Other CnHm ≤ 300 Other CnHm ≤ 20 H2O ≤ 5

Certificate of analysis: Yes Yes

Containers: Water Filling Contents Water Filling Contents Water Filling Contents capacity pressure capacity pressure capacity pressure liters approx. bar m3 liters approx. bar m3 liters approx. bar m3 Steel cylinders 10 200 2.5 10 200 2.5 2 100 0.2 50 200 12.6 50 200 12.6 10 200 2.5 50 200 12.6 Cylinder bundles 600 200 151.2 Linde Small Steel Cylinders 0.38 140 70 l Linde minican® 11212 l

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.588 0.671 1 1.588 0.671 1 1.588 0.671 0.630 1 0.423 0.630 1 0.423 0.630 1 0.423 1.490 2.366 1 1.490 2.366 1 1.490 2.366 1 Identification: Cylinder shoulder color Red RAL 3000 Label Methane 2.5/3.5/4.5

Valve outlet: W 21.80 x 1/14 LH, DIN 477 No. 1

Properties: Compressed gas, highly flammable

MAK value – Chemical symbol CH4 Molar mass 16.043 g/mol Critical temperature (Tc) 190.53 K ( -82.62 °C) Boiling point at 1,013 bar (Tb) 111.63 K (-161.52°C) Relative density at 15 °C, 1 bar (dry air = 1) 0.555

38 Pure Gases

Environmentally friendly drive technology with CNG (compressed natural gas) as fuel Methane 5.5

Purity, %: ≥ 99.9995

Impurities, ppm: O2 ≤ 0.5 N2 ≤ 4 H2 ≤ 0.1 Other CnHm ≤ 1 H2O ≤ 2

Certificate of analysis: Yes

Containers: Water Filling Contents capacity pressure liters approx. bar m3 Steel cylinders 2 100 0.2 10 200 2.5 50 200 12.6

Conversion factors: m3 of gas Liters kg (15 °C, liquid at Tb 1 bar) 1 1.588 0.671 0.630 1 0.423 1.490 2.366 1 Identification: Cylinder shoulder color Red RAL 3000 Label Methane 5.5

Valve outlet: W 21.80 x 1/14 LH, DIN 477 No. 1

Properties: Compressed gas, highly flammable MAK value – Chemical symbol CH4 Molar mass 16.043 g/mol Critical temperature (Tc) 190.53 K ( -82.62 °C) Boiling point at 1,013 bar (Tb) 111.63 K (-161.52°C) Relative density at 15 °C, 1 bar (dry air = 1) 0.555

39 Neon 3.5 Neon 4.5 Neon 5.0

Purity, %: ≥ 99.95 ≥ 99.995 ≥ 99.999

Impurities, ppm: O2 ≤ 3 O2 ≤ 2 O2 ≤ 1 N2 ≤ 10 N2 ≤ 5 N2 ≤ 2 H2O ≤ 3 H2O ≤ 3 H2O ≤ 2 CnHm ≤ 0.2 CnHm ≤ 0.2 CnHm ≤ 0.1 He ≤ 200 He ≤ 20 He ≤ 5

Certificate of analysis: Yes

Containers: Water Filling Contents Water Filling Contents Water Filling Contents capacity pressure capacity pressure capacity pressure liters approx. bar liters liters approx. bar liters liters approx. bar liters Steel cylinders 2 100 200 2 100 200 2 100 200 10 100 1000 10 100 1000 10 100 1000 50 200 9100 50 200 9100 Linde Small Steel Cylinders 0.38 200 70 Linde minican® 11212

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 0.698 0.842 1 0.698 0.842 1 0.698 0.842 1.432 1 1.206 1.432 1 1.206 1.432 1 1.206 1.188 0.829 1 1.188 0.829 1 1.188 0.829 1 Identification: Cylinder shoulder color Bright green RAL 6018 Label Neon 3.5/4.5/5.0

Valve outlet: W 21.80 x 1/14, DIN 477 No. 6

Properties: Compressed gas, suffocating, chemically inert

MAK value – Chemical symbol Ne Molar mass 20.179 g/mol Critical temperature (Tc) 44.40 K (-228.75 °C) Boiling point at 1,013 bar (Tb) 27.10 K (-246.05 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.696

40 Pure Gases

Nitric oxide 2.5 Nitrogen 4.6 Nitrogen 5.0

Purity, %: ≥ 99.5 ≥ 99.996 ≥ 99.999 (incl. rare gases) (incl. rare gases)

Impurities, ppm: O2 ≤ 5 O2 ≤ 3 H2O ≤ 5 H2O ≤ 5 CnHm ≤ 0.5 CnHm ≤ 0.2

Containers: Water Filling Contents Water Filling Contents Water Filling Contents capacity pressure capacity pressure capacity pressure liters approx. bar m3 liters approx. bar m3 liters approx. bar m3 Steel cylinders 2500.1 10 50 0.5 10 200 2 10 200 2 50 50 2.6 50 200 10 50 200 10 Steel drums 600 200 120 600 200 120 600 300 156 600 300 156 Linde Small Steel Cylinders 0.38 38 15 l Linde minican® 11212 l

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 0.962 1.250 1 1.447 1.170 1 1.447 1.170 1.040 1 1.300 0.691 1 0.809 0.691 1 0.809 0.800 0.769 1 0.855 1.237 1 0.855 1.237 1 Identification: Cylinder shoulder color Yellow RAL 1018 Black RAL 9005 Label Nitric oxide 2.5 Nitrogen 4.6/5.0 Valve outlet: 1, DIN 477 No. 8 Filling pressure 200 bar: W 24,32 x 1/14, DIN 477 No. 10 Filling pressure 300 bar (bundles): W 24,32 x 1/14, DIN 477 No. 10 (pressure regulating valve< 200 bar) and ISO 5145 No. 0170 (standard valve to 300 bar) Properties: Compressed gas, Compressed gas, suffocating, chemically inert highly toxic, caustic MAK value 25 ppm – Chemical symbol NO N2 Molar mass 30.006 g/mol 28.013 g/mol Critical temperature (Tc) 180.15 K ( -93.00 °C) 126.20 K (-146.95 °C) Boiling point at 1,013 bar (Tb) 121.40 K (-151.75 °C) 77.35 K (-195.80 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.034 0.967

Other types of supply: Nitrogen is also available cryogenically liquefied, in road tankers, or from nitrogen service vehicles in the case of low requirements from 5 to 300 l. The LI-PUR® system satisfies even the most stringent demands.

41 Laser-beam cutting with LASPUR® laser gases

42 Pure Gases

Nitrogen Nitrogen Nitrogen 5.3 CO-free ECD

Purity, %: ≥ 99.999 ≥ 99.999 ≥ 99.9993 (incl. rare gases) (incl. rare gases) (incl. rare gases)

Impurities, ppm: O2 ≤ 3 O2 ≤ 2 O2 ≤ 2 H2O ≤ 5 H2O ≤ 2 H2O ≤ 2 CnHm ≤ 0.2 CnHm ≤ 0.1 CnHm ≤ 0.1 CO ≤ 0.1 Halogenated hydrocarbons in SF6 equivalents ≤ 1 ppb

Certificate of analysis: Yes Yes Yes

Linde Small Steel Cylinders 0.38 200 72 l

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.447 1.170 1 1.447 1.170 1 1.447 1.170 0.691 1 0.809 0.691 1 0.809 0.691 1 0.809 0.855 1.237 1 0.855 1.237 1 0.855 1.237 1 Identification: Cylinder shoulder color Black RAL 9005 Label Nitrogen CO-frei/ECD/5.3

Valve outlet: Filling pressure 200 bar: W 24,32 x 1/14, DIN 477 No. 10 Filling pressure 300 bar (single cylinder): M 30 x 1,5 INT, DIN 477 No. 52

Properties: Compressed gas, suffocating, chemically inert

MAK value – Chemical symbol N2 Molar mass 28.013 g/mol Critical temperature (Tc) 126.20 K (-146.95 °C) Boiling point at 1,013 bar (Tb) 77.35 K (-195.80 °C) Relative density at 15 °C, 1 bar (dry air = 1) 0.967

43 Nitrogen 5.6 Nitrogen 6.0 Nitrogen 7.0

Purity, %: ≥ 99.9996 ≥ 99.9999 ≥ 99.99999 (incl. rare gases) (incl. rare gases) (incl. rare gases)

Impurities, ppm: O2 ≤ 0.5 O2 ≤ 0.5 O2 ≤ 30 ppb H2O ≤ 1 H2O ≤ 0.5 H2O ≤ 50 ppb CnHm ≤ 0.1 CnHm ≤ 0.1 CnHm ≤ 30 ppb CO ≤ 0.1 CO ≤ 0.1 CO ≤ 30 ppb CO2 ≤ 0.1 CO2 ≤ 0.1 CO2 ≤ 30 ppb H2 ≤ 30 ppb Halogenated hydrocarbons in SF6 equivalents ≤ 1 ppb

Certificate of analysis: Yes Yes Yes

Aluminum cylinders 10 150 1,5

Valve outlet: W 24,32 x 1/14, DIN 477 No. 10

Properties: Compressed gas, suffocating, chemically inert

44 Pure Gases

Nitrogen dioxide/ Nitrous oxide 2.5 Dinitrogen tetroxide 2.0

Purity, %: ≥ 99 ≥ 99.5 (from vaporized (from vaporized liquid phase) liquid phase)

Impurities, ppm: Air constituents ≤ 5000

Containers: Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure liters at 20 °C, bar kg liters at 20 °C, bar kg Steel cylinders 2 50,8 1.5 10 50,8 7.5 40 50,8 29.6 Linde Small Steel Cylinders 0.38 1.0 0.45 0.38 50,8 0.28

Linde minican® 1 Filling 21 g pressure 12 bar

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 2.327 3.358 1 1.515 1.853 0.430 1 1.443 0.660 1 1.223 0.298 0.693 1 0.540 0.818 1 Identification: Cylinder shoulder color Yellow RAL 1018 Blue RAL 5010

Label Nitrogen dioxide 2.0 Nitrous oxide 2.5

Valve outlet: 1, DIN 477 No. 8 G 3/8, DIN 477 No. 11; for steel cylinders with water capacity up to 3 liters G 3/4 INT, DIN 477 No. 12 (however not for Linde Small Steel Cylinders) Properties: Liquefied gas, Liquefied gas, oxidizing highly toxic, caustic MAK value 5 ppm 100 ppm Chemical symbol NO2/N2O4 N2O Molar mass 46.0/92.01 g/mol 44.013 g/mol Critical temperature (Tc) 431.00 K (157.85 °C) 309.56 K ( 36.41 °C) Boiling point at 1,013 bar (Tb) 294.25 K ( 21.10 °C) 184.68 K (-88.47 °C) Relative density at 15 °C, 1 bar (dry air = 1) approx. 3 1.532

Other types of supply: See page 26 for higher purities Also available for medical use!

45 Ultra-pure specialty gases are indispensable in the production of semiconductor elements. A tropical example is the development of the first 300 mm wafer mega-microchip shown in the photo. Photograph courtesy Infineon Technologies AG

46 Pure Gases

Oxygen Oxygen 4.5 Oxygen 5.0 HC-free

Purity, %: ≥ 99.6 ≥ 99.995 ≥ 99.999

Impurities, ppm: N N ≤ 20 N ≤ 5 2 ≤ 4000 2 2 Ar } Ar ≤ 10 Ar ≤ 2 H2O ≤ 5 H2O ≤ 5 H2O ≤ 3 CnHm ≤ 0.1 CnHm ≤ 0.5 CnHm ≤ 0.2 CO2 ≤ 1 CO2 ≤ 0.5 CO2 ≤ 0.2

Certificate of analysis: Yes

Linde Small Steel Cylinders 0.38 200 76 l Linde minican® 11212 l

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 1.172 1.337 1 1.172 1.337 1 1.172 1.337 0.853 1 1.141 0.853 1 1.141 0.853 1 1.141 0.748 0.876 1 0.748 0.876 1 0.748 0.876 1 Identification: Cylinder shoulder color White RAL 9010 Label Oxygen HC-free/4.5/5.0

Valve outlet: G 3/4, DIN 477 No. 9

Properties: Compressed gas, oxidizing

MAK value – Chemical symbol O2 Molar mass 31.999 g/mol Critical temperature (Tc) 154.58 K (-118.57 °C) Boiling point at 1,013 bar (Tb) 90.18 K (-182.97 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.105

Other types of supply: Oxygen is also available cryogenically liquefied, in road tankers. In this case the technical equipment required is provided by Linde. The LI-PUR® system satisfies even the most stringent demands.

47 Oxygen 5.6 Oxygen 6.0

Purity, %: ≥ 99.9996 ≥ 99.9999

Impurities, ppm: N2 ≤ 2 N2 ≤ 0.5 Ar ≤ 1 Ar ≤ 1 H2O ≤ 1 H2O ≤ 0.5 CnHm ≤ 0.1 CnHm ≤ 0.1 CO2 ≤ 0.1 CO2 ≤ 0.1 CO ≤ 0.1 CO ≤ 0.1

Certificate of analysis: Yes Yes

Containers: Water Filling Contents Water Filling Contents capacity pressure capacity pressure liters approx. bar m3 liters approx. bar m3 Steel cylinders 10 200 2 10 200 2 50 200 10 50 200 10

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 1.172 1.337 1 1.172 1.337 0.853 1 1.141 0.853 1 1.141 0.748 0.876 1 0.748 0.876 1 Identification: Cylinder shoulder color White RAL 9010 Label Oxygen 5.6/6.0

Valve outlet: G 3/4, DIN 477 No. 9

Properties: Compressed gas, oxidizing

48 Pure Gases

Propane 2.5 Propane 3.5 Propylene 2.8

Purity, %: ≥ 99.5 ≥ 99.95 ≥ 99.8 (from vaporized (from vaporized (from vaporized liquid phase) liquid phase) liquid phase)

Impurities, ppm: Other CnHm ≤ 5000 Other CnHm ≤ 500 Other CnHm ≤ 1000

Certificate of analysis: Yes

Containers: Water Vapor Contents Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters at 20 °C, bar kg liters at 20 °C, bar kg liters at 20 °C, bar kg Steel cylinders 2 8.53 0.8 2 8.53 0.8 2 10.43 0,8 7 8.53 3 7 8.53 3 7 10.43 3 27 8.53 11 27 8.53 11 27 10.43 11 79 8.53 33 79 10.43 33

Steel drums 950 8.53 400

Linde Small Steel Cylinders 0.38 8.53 0.16

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 3.215 1.871 1 3.215 1.871 1 2.908 1.785 0.311 1 0.582 0.311 1 0.582 0.344 1 0.614 0.534 1.718 1 0.534 1.718 1 0.560 1.629 1 Identification: Cylinder shoulder color Red RAL 3000 Red RAL 3000 Label Propane 2.5/3.5 Propylene 2.8

Valve outlet: W 21.80 x 1/14 LH, DIN 477 No. 1 W 21.80 x 1/14 LH, DIN 477 No. 1

Properties: Liquefied gas, highly flammable Liquefied gas, highly flammable MAK value 1000 ppm – Chemical symbol C3H8 C3H6 Molar mass 44.096 g/mol 42.081 g/mol Critical temperature (Tc) 369.82 K (-96.67 °C) 364.75 K ( 91.60 °C) Boiling point at 1,013 bar (Tb) 231.11 K (-42.04 °C) 225.43 K (-47.72 °C) Relative density at 15 °C, 1 bar (dry air = 1) 1.547 1.476

49 Sulfur dioxide Sulfur 3.8 hexafluoride 3.0

Purity, %: ≥ 99.98 ≥ 99.9 (≥ 99.97 %*) (from vaporized (from vaporized liquid phase) liquid phase)

Impurities, ppm: Air components ≤ 500 ppm* CF4 ≤ 500 ppm* H2O ≤ 5 ppm* Acid content calculated as HF ≤ 0,3 ppm* Hydrolizable fluorides calculated as HF ≤ 1 ppm* *Mass fractions

Containers: Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure liters at 20 °C, bar kg liters at 20 °C, bar kg Steel cylinders 2 3.26 2 10 3.26 12 10 21.0 10 40 21.0 40 Larger cylinders on request Linde Small Steel Cylinders 0.38 3.26 0.4 0.38 21.0 0.39 Linde minican® 1 Filling pressure 69 g 12 bar

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 1.869 2.725 1 3.234 6.176 0.535 1 1.458 0.309 1 1.910 0.367 0.686 1 0.162 0.524 1 Identification: Cylinder shoulder color Yellow RAL 1018 Bright green RAL 6018 Label Sulfur dioxide 3.8 Sulfur hexafluoride 3.0

Valve outlet: G 5/8, DIN 477 No. 7 W 21.80 x 1/14, DIN 477 No. 6 Properties: Liquefied gas, toxic, caustic Liquefied gas, suffocating

MAK value 2 ppm 1000 ppm Chemical symbol SO2 SF6 Molar mass 64.063 g/mol 146.05 g/mol Critical temperature (Tc) 430.80 K (157.65 °C) 318.69 K (45.54 °C) Boiling point at 1,013 bar (Tb) 263.14 K ( -10.01 °C) Sublimation temperature at 1.013 bar 209.35 K (-63.80 °C) Relative density at 15 °C, 1 bar (dry air = 1) 2.253 5.106

Other types of supply: See page 26 for higher purities

50 Pure Gases

Tetrafluoro- Trifluoro- Vinyl chloride 3.7 methane 2.8 methane 2.8 R 14 R 23

Purity, %: ≥ 99.8 ≥ 99.8 ≥ 99.97 (from vaporized (from vaporized liquid phase) liquid phase)

Containers: Water Filling Contents Water Vapor Contents Water Vapor Contents capacity pressure capacity pressure capacity pressure liters approx. bar kg liters at 20 °C, bar kg liters at 20° C, bar kg Steel cylinders 2 100 1.2 2 41.6 1.5 10 100 6 50 100 30

Linde Small Steel Cylinders 0.38 3.37 0.25

Conversion factors: m3 of gas Liters kg m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 bar) 1 2.303 3.692 1 2.049 2.949 1 2.739 2.659 0.434 1 1.603 0.488 1 1.439 0.365 1 0.971 0.271 0.624 1 0.339 0.695 1 0.376 1.030 1 Identification: Cylinder shoulder color Bright green Bright green Red RAL 3000 RAL 6018 RAL 6018 Label R 14 2.8 R 23 2.8 Vinyl chloride 3.7

Valve outlet: W 21.80 x 1/14, W 21.80 x 1/14, W 21.80 x 1/14 LH, DIN 477 No. 6 DIN 477 No. 6 DIN 477 No. 1

Properties: Compressed gas, Liquefied gas, suffocating Liquefied gas, carcinogenic suffocating (Cat. 1), highly flammable MAK value – – TRK value 2 ppm Chemical symbol CF4 CHF3 C2H3Cl Molar mass 88.01 g/mol 70.01 g/mol 62.499 g/mol Critical temperature (Tc) 227.70 K ( -45.45 °C) 299.15 K ( 26.00 °C) 429.65 K (156.50 °C) Boiling point at 1,013 bar (Tb) 145.21 K (-127.94 °C) 190.97 K (-82.18 °C) 259.45 K ( -13.70 °C) Relative density at 15 °C, 1 bar (dry air = 1) 3.05 2.438 2.199

Other types of supply: See page 26 See page 26 for higher purities for higher purities

51 52 Pure Gases

Xenon for the lamp industry

Xenon 4.0 Xenon 4.8

Purity, %: ≥ 99.99 ≥ 99.998

Impurities, ppm: O2 ≤ 2 O2 ≤ 1 N2 ≤ 10 N2 ≤ 3 H2O ≤ 5 H2O ≤ 3 CnHm ≤ 1 CnHm ≤ 1 Kr ≤ 20 Kr ≤ 5 Ar ≤ 5 Ar ≤ 2

Certificate of analysis: Yes

Containers: Water Filling Contents Water Filling Contents capacity pressure * capacity pressure * liters approx. bar liters liters approx. bar liters Steel cylinders 1Vapor pressure 100–200 Vapor pressure 2at 16.6 °C: 200–400 2at 16.6 °C: 200–400 10 58.4 bar 1000–2000 10 58.4 bar 1000–2000

(pcrit) (pcrit) Linde Small Steel Cylinders 0.38 18 Linde minican® 11212

*Filled by weight, 1 liter *Filled by weight, 1 liter corresponds to 5.517 g corresponds to 5.517 g Conversion factors: m3 of gas Liters kg m3 of gas Liters kg (15 °C, liquid at Tb (15 °C, liquid at Tb 1 bar) 1 bar) 1 1.873 5.517 1 1.873 5.517 0.534 1 2.945 0.534 1 2.945 0.181 0.340 1 0.181 0.340 1 Identification: Cylinder shoulder color Bright green RAL 6018 Label Xenon 4.0/4.8

Valve outlet: W 21.80 x 1/14, DIN 477 No. 6

Properties: Compressed gas, suffocating, chemically inert

MAK value – Chemical symbol Xe Molar mass 131.30 g/mol Critical temperature (Tc) 289.73 K ( 16.58 °C) Boiling point at 1,013 bar (Tb) 165.05 K (-108.10 °C) Relative density at 15 °C, 1 bar (dry air = 1) 4.562

53 0.5

0.4 ] Specially treated aluminum cylinder ppm

[ 0.3

Untreated aluminum cylinder 0.2

Concentration 0.1

0 012243648 60 Time [ months ]

54 Gas Mixtures/ Calibration Gas Mixtures

55 Important information is given by the labels and new cylinder shoulder colors

56 Gas Mixtures/Calibration Gas Mixtures

Gas mixtures are compressed gases that consist of more In order to clearly describe a gas mixture/calibration gas than one type of molecule and that have been homogeneous- mixture, it is not only necessary to know the type of balance ly blended. gas and the calibration component(s), but also the partial amount of the calibration component(s) or the concentration(s). Calibration gas mixtures are a subgroup of gas mixtures satisfying special requirements with regard to preparation tole- Partial amount: rance, measurement uncertainty and the purity of the source Is the ratio between the quantity of the calibration compo- products. nent and the total quantity of all components in the calibration gas mixture. They are primarily used in the calibration of instruments. In addition to this, they also perform important functions in pro- Concentration: cesses and experimental investigations in which gas mixtures Represents the ratio between the quantity of this cali- of a precisely defined composition are required. bration component and the total volume of the mixture.

According to German regulation TRG 102, Annex 1, indu- The following terms and units can be employed to provide strial gas mixtures can be filled in pure gas cylinders. unambiguous designation: – Mole fraction, Most standard and calibration gas mixtures are availa- e.g. mole/mole, mmole/mole, µmole/mole = ppm ble from stock. – Volume fraction, e.g. m3/m3, l/m3, ml/m3 = ppm – Mass concentration, e.g. kg/m3, g/m3, mg/m3 – Volume concentration, e.g. m3/m3, l/m3, ml/m3 Explanation of important terms – Mole concentration, e.g. mole/m3, mole/l, mmole/l

The most important definitions are contained in the guideli- Volumes are always based on the standard state nes of the Society of German Engineers (VDI), VDI 3490, (1.013 bar; 273.15 K). Parts by volume are always based on Sheet 1: ideal gas volumes.

Calibration gas mixture: “A gas mixture, usually compressed, which generally con- sists of a balance gas and one or more calibration components.”

Balance gas: “A pure gas or gas mixture which, as the major component, supplements the components that are employed for calibration purposes.”

Calibration component: “A gaseous or vaporized component of a calibration gas mixture, whose quality and quantity are known and which is employed directly for testing and calibration purposes.”

Exhaust gas examination with calibration gases (= test gas with special qualification)

57 Preparation of calibration gas mixtures Depending on the compatibility of the material to the gas mixture, valves are made of brass or stainless steel. Dia- Source products phragm valves are mainly used. Calibration gas mixtures are prepared from high-purity gases and vapors from pure liquids. In addition to the products from our line of pure gases, numerous other substances are also available as calibration components.

Compared to the composition, the purity of the gas mixtures is often of secondary importance. This purity is naturally restricted by the purity of the pure gases used for the mixture. Based on their purities, contents of possibly unwanted calibration components are also likely in the gas mixtures. Should the demands of an application (e.g. Geiger-Müller counter tubes, ionization chambers, etc.) be particularly high in this regard, this can be taken into account in the preparation of a mixture on request by specification of especially high purity requirements.

Technical feasibility Depending on the customer's requirements, calibration gas mixtures can be prepared with one or more calibration components in a balance gas in a range from lower ppb to %.

Linde has experience with more than 200 pure gases and vapors as calibration components for gas mixtures. The resultant number of theoretically possible combinations of up to 20 calibration components in a cylinder is greater than 1026.

In practice, however, there are restrictions in mixing various Emptying and gas type-specific assignment in the preparation types of gases with each other or with respect to the maxi- of test gas cylinders for corrosive mixtures mum possible filling pressure as a result of safety requirements as well as from the laws of chemistry and physics. Cylinder pretreatment Reduction in the filling pressure may be necessary, depending Depending on the requirements, the inside surface of the on the concentration in question, if vapors of liquids or other cylinder is treated by various methods. Irrespective of this, easily condensable substances are desired as a calibration calibration gas mixture cylinders are subjected to a compre- component. hensive purge/evacuation cycle with the cylinders being heated during this procedure. This ensures removal of even traces In making these decisions the user can call on Linde's long of previously filled gases, vapors and especially moisture to a experience. level that is below the limit of detection.

Cylinder and valve selection In special cases (e.g. mixtures with low corrosive compo- Linde usually uses cylinders of steel or aluminum alloys. nents) the result of the purge process is checked by a moistu- Stainless steel cylinders are also used in exceptional cases. re measurement. Only through such thorough and systematic cylinder pretreatment it is possible to prepare stable calibration gas mixtures.

Preparation methods The choice of preparation method is based, among other considerations, on the preparation tolerances required. The

58 Gas Mixtures/Calibration Gas Mixtures

following methods are usually used by Linde for the preparation of gas mixtures/calibration gas mixtures in cylinders:

Gravimetric method In gravimetric preparation state-of-the-art high-sensitivity, high-load balances are employed. This produces a direct correlation between the weighed gases and the basic unit “kg” or “mole”. If necessary, calibration gas mixtures in the ppm range can be prepared gravimetrically by using suitable “pre-mixtures”.

Final inspection of test gas cylinders Volumetric/Gravimetric method This preparation method is a combination method. It is usually employed when minute quantities of calibration components are added to a balance gas, e.g. by means of a result of this, it is usually the preferred method for applica- gas-tight syringes. tions of mixtures in instrumentation technology.

Manometric method A varied and modern range of analytical instruments is In this method the pressure changes after adding of the needed to carry out the analytical check. The following are individual calibration components/balance gas are measu- examples of instruments/methods used by Linde for quality red. Precision manometers are used for this. control purposes:

Homogenization Gas chromatography with a variety of detector systems Optical methods (FTIR, IR, UV-VIS) After being filled, the gas mixture is homogenized in an Chemiluminescence method additional step. As has been proven both theoretically and on Special oxygen and moisture measuring systems the basis of numerous tests, gas mixtures will no longer sepa- Mass spectrometry rate again once they have been homogenized. This is naturally Atomic absorption spectrometry only true as long as the temperature does not drop below the Inductively coupled plasma spectrophotometry condensation temperature of one of the calibration compo- Ion chromatography nents. (Especially temperature-sensitive mixtures are specially Wet-chemical absolute methods marked!) The following methods are used to verify the measuring Quality assurance results:

The composition of gas mixtures can be determined by Use of our own calibration standards, fabricated on a spe- two methods: firstly by exact checking of the quantities of cali- cial high-sensitivity, mechanical beam balance bration components added during filling and secondly by ana- Use of national and international standards lyzing the gas of the finished mixture. (Bundesanstalt für Materialforschung und -prüfung/BAM, National Institute of Standards and Technology/NIST, Both methods have specific advantages and disadvantages: Nederlands Meetinstituut/NMi, NPL). Use of wet chemical absolute methods Whereas the gas quantities added during mixing can Comparative measurements by intra and intercompany usually be checked high accurately with, for example, a balan- cross reference service (“Round Robin Testing”). ce, this method is difficult to document conclusively and is naturally only possible once for every mixture.

Compared to it, the result of the gas analysis method is usually less accurate, but very suitable for documentation purposes and it can be repeated almost as often as required. As

59 Test gas cylinders ready for dispatch with the analysis certificate attached

This information is necessary because it has been found in practice that some calibration gas mixtures can contain calibration components which, over the course of time, can undergo chemical change as a result of reaction with the internal walls of the container can form heavy deposits on the internal walls of the container due to physical reasons (e.g. high dipole moment of the molecule) as a result of adsorption Certificate can change under pressure due to molecular instability (e.g. nitric oxides). Calibration gas mixtures with strict preparation tolerances are delivered with a certificate of preparation or analysis, while The stability periods indicated in the certificate of analysis Class 1 and 2 calibration gas mixtures are accompanied by a are based on our own long-term observations of test series certificate of analysis. This certificate contains all of the infor- and are regularly updated through new investigations. mation recommended by German and international bodies (e.g. DIN 51895, March 1987; VDI 3490, Sheet 2; ISO 6141 - New results from these activities directly benefit the user of 1984) for characterization of a calibration gas mixture: our calibration gas mixtures. Calibration gas mixtures containing components that have a critical impact on stability, espe- Issuer of the certificate cially in the case of low partial amounts, are subjected to a Customer data repeat stability observation before the gas is supplied. Alt- Nominal and analytical values with information on analytical hough this procedure necessitates a longer delivery period, it accuracy/preparation tolerance is preferred in the interests of quality assurance for the custo- Data on the cylinder and filling mer. Method of preparation Technical information, including preparation date and The diagram below shows the function curve over time of

stability 0.4 ppm H2S, balance gas nitrogen, observed in practice. represents the function in an aluminum cylinder with simple The original of this certificate accompanies every cylinder treatment, while shows the function in an aluminum cylinder of calibration gas mixture in a tag. pretreated by a process specially developed by Linde. Cylin- In addition to this, calibration gas mixtures can also be ders of this type are routinely employed for especially sensitive supplied with an additional comparison against reference calibration gas mixtures. standards: 0.5 Calibration gas mixtures for the automotive industry with direct comparison between analytical values and available 0.4 gas standards from the NIST ] Specially treated aluminum cylinder

ppm Methane as well as calibration gas mixtures that contain [ 0.3 methane with an official certificate indicating the heat of Untreated aluminum cylinder combustion and/or the nominal density 0.2 Calibration gas mixtures for exhaust gas tests (CO, CO2,

C3H8), which are analyzed against e.g. BAM-certified cali- Concentration 0.1 bration gas mixtures in the presence of an official from the Office of Weights and Measures. 0 012243648 60 Stability Time [ months ] The stability of a calibration gas mixture is the period of The influence of the quality of compressed gas vessels time during which the composition of the gas regarding the on the stability of test gases calibration components may only deviate within the specified (setpoint value: 0.4 ppm hydrogen sulphide in nitrogen) analytical accuracy (see certificate).

60 Gas Mixtures/Calibration Gas Mixtures

Calibration gas mixtures with strict preparation tolerance (abbr. PEH) are divided into two groups:

PEHs that are prepared individually on a special, high-sensitivity beam balance with all avoidable external influences being eliminated during the weighing process. (The preparation process is optimized exclusively under the aspect of achieving low preparation tolerances.) The composition is obtained from the weighed component data. As a general rule, the composition is significantly more accurate than that obtainable from gas analysis, although this is additionally performed as a plausibility check. It must, however, be possible to assume that the impact of the interaction between the gas phase and the interior surface of the container will remain within the preparation tolerances named. These gas mixtures are mainly used as internal Linde standards to ensure the correctness of calibration gas mixtures in the other classes. PEHs that are prepared individually on a high-sensitivity Gravimetric individual cylinder filling electronic balance. The preparation process is optimized exclusively to achieve low preparation tolerances. In addition to this, an analytical accuracy of ± 1 % rel. is achieved by means of a correspondingly complex calibration gas Uncertainty of calibration component information for comparison. calibration gas mixtures Information on the composition of a calibration gas mixture Test gas classes can be obtained both on the basis of the mixing procedure as well as through gas analysis. Class Share of admixtures Preparation tolerance Measuring uncertainty Depending on the method that is employed, the effort PEH 1 - 99 ppm ± 2 % rel. involved and the desired composition, the relative accura- 100 - 999 ppm ± 1 % rel. cies that can be achieved range from approx. 0.1 to 10 ±1 % rel. ** 0.1 - 4.9 % ± 0.5 % rel. percent of the given value. } 5- 50 % ± 0.1 % rel. To satisfy the various demands that are placed on the 11-99ppm ± 10 % rel. ± 2 - 5 % rel. preparation tolerance and measurement uncertainty of cali- 100 - 999 ppm ± 5 % rel. ± 2 % rel. bration gas mixtures, they are available in four different cali- 0.1 - 4.9 % ± 2 % rel. ± 2 % rel. bration gas classes. 5- 50% ± 1 % rel. ± 1 % rel. The accuracies given in the table represent guidelines. 2 100 - 999 ppm ± 10 % rel. ± 5 % rel. This means that deviations in the preparation tolerance are, 0.1 - 4.9 % ± 5 % rel. ± 2 % rel. for example, possible in the case of calibration compo- 5- 50% ± 2 % rel. ± 2 % rel. nents like helium or hydrogen due to the low molecular weight. The same applies in the case of small containers 3 0.1 - 4.9 % ± 10 % rel. * due to the low contents. The measurement uncertainty in 5- 50% ± 5 % rel. * the case of “multi-component” gas mixtures can also deviate. The individual accuracies are stated in the certifi- * only analytically tested in batches for safety reasons cate of analysis. ** if analytically checked (i.e. the measuring uncertainty is less than the preparation tolerance)

61 Class 1 calibration gas mixtures Liquid phase mixtures

are prepared individually or in batches, usually by means of A gas cylinder can contain gas mixtures both exclusively in the gravimetric method, and are analyzed individually. The the gaseous phase and “liquefied under pressure”, i.e. most of composition is obtained from the analysis data. With this pre- the mixture is then liquid (density ratio between gas and liquid paration method deviations between the nominal and analyti- phase roughly 1:1000). cal values range from 1 to 10 percent. The relative measurement uncertainty ranges from 1 to 5 percent, depending on Calibration components that have very low vapor pressu- the amount and nature of the calibration component. res force gaseous calibration gas mixtures to be filled at correspondingly low filling pressures, which means that only a Class 2 calibration gas mixtures small quantity of the respective calibration gas mixture will be available. If larger quantities of such mixtures are required, it is are filled in batches, but usually analyzed individually. The advantageous to provide them in the liquid phase. composition is obtained from the analysis data. As a result of the (efficient) batch-type filling process, the deviation between There are three possibilities for withdrawing liquid phase the nominal and analytical values can range from 2 to 10 per- calibration gas mixtures: cent, while the relative measurement uncertainty ranges from 2 to 5 percent. If the cylinder is equipped with a normal valve, the liquid phase can be withdrawn from the cylinder if it is placed Class 3 calibration gas mixtures upside down.

are filled in batches, with only a batch analysis being per- If the cylinder valve is equipped with a dip tube, the vapor formed for verification purposes. The composition is determi- pressure above the liquid phase will force the liquid out of ned on the basis of the filling data. The relative preparation the valve with the cylinder standing upright. tolerance ranges between 5 and 10 percent. If the calibration gas cylinder is equipped with a dual port valve with dip tube, withdrawal of the liquid phase can be effected through pressurizing with an inert gas, preferably helium.

Pallet filling with connected analysis unit Analytical quality control of test gases

62 Gas Mixtures/Calibration Gas Mixtures

Pressurizing can also be employed in the first two cases; it Container information is advisable for the gas buffer to be provided by the manufac- turer of the gas mixture. Generally speaking gas mixtures and calibration gas mixtures are preferably supplied in Linde cylinders for loan, with sui- In the case of different calibration component vapor pres- table cylinder materials being selected. sures, the lighter volatile components are enriched in the gas phase and the heavier volatile components in the liquid phase. Since the container materials and the preparation of the This means that the homogenous distribution of the calibrati- cylinders are matched to the mixture in question, customer- on components in the total quantity of gas is no longer strictly owned cylinders should only be employed for calibration gas fulfilled during withdrawal: the composition of the gas mixture mixtures if their suitability has been ensured. changes continuously during gas withdrawal, depending on Through the introduction of the stainless steel high-pressu- whether the gas or liquid phase is being withdrawn. To mini- re cylinders listed in the table, it has been possible to signifi- mize the change during withdrawal, one should proceed as cantly expand our product line for sensitive calibration gas described above. mixtures, especially in the low concentration range. Moreover, the employment of these stainless steel cylinders has also The liquid phase that is withdrawn from the cylinder can be permitted new calibration gas components to be added to the employed either directly or following complete vaporization. product line. The majority of our calibration gas mixtures are individually The changes in the quantitative composition during with- prepared in accordance with our customers' specifications. A drawal can be calculated if the withdrawal conditions are fully number of standard calibration gas mixtures are, however, known. available from stock (cf. tables “Linde standard gas mixtures and calibration gas mixtures”, page 67).

Containers for gas mixtures / test gases

Capacity Outside Length Empty weight Cylinder max. filling Filling quantity Ø with cap of the material pressure of the complete pressurized cylinder gas vessel Liters approx. mm approx. mm approx. kg approx. bar 2 118 460 2 AL 200 The filling pressure 10 140 1100 11,5 AL 200 and filling quantity 10 140 970 16 LS 200 depend on the 10 140 1030 19 NS 150 respective 10 219 590 32 ES 200 composition of the 40 229 1560 45 AL 200 test gas 40 204 1730 78 NS 150 40 219 1560 81 ES 200 50 229 1640 67 LS 200 12 x 40 760 x 965 1842 950 LS 200 12 x 50 760 x 965 1842 1057 LS 200 Linde minican® pressurized gas cans (disposable containers) 180270 0.15 AL 12 approx. 12 liters

LS = tempered steel NS = steel with a minimum yield point of ≤ 390 N/mm2 (max. filling pressure 150 bar) AL = aluminium alloy ES = stainless steel

63 What must be taken into account Characterization of gas mixture/calibration gas mixture cylinders when ordering gas mixtures/ calibration gas mixtures? Gas mixture/Calibration gas mixture

Composition of the mixture Cylinder color: Calibration component(s) Cylindrical part: Brilliant blue RAL 5007 Partial amount/Concentration Cylinder shoulder Unit (e.g. ppm, %) (per EN 1089 Part 3): Yellow RAL 1018 Balance gas for toxic and/or corrosive mixtures Red RAL 3000 Required calibration gas mixture class for flammable mixtures Measurement uncertainty requirement Light blue RAL 5012 Preparation tolerance requirement (if neces- for oxidizing mixtures sary) Bright green RAL 6018 for inert mixtures Special requirements regarding the preparation Stamping: “Gasgemisch” or “Gasgemisch K” (Gas Mixture) tolerance, e.g. defined value may not be or “Prüfgas” or “Prüfgas K” (Calibration Gas Mixture) exceeded or undercut. Label: Types of gases contained in the mixture, Compliance with impurity requirements, e.g. in the order of their concentrations analytical checks going beyond the analytical Cylinder valve: per DIN 477:

value of the calibration components Calibration M 19 x 1,5 LH (O2 ≤ 21 %) gas mixture G 3/4 (O2 > 21 %) Use of source materials of a certain purity Gas mixture W 21,80 x 1/14 LH (O2 ≤ 21 %) G 3/4 (O2 > 21 %) Cylinder size Gas mixtures according TRG 102, Annex 1 (“Industrial gas mixtures”) Number of cylinders Cylinder color: Cylindrical part: Grey RAL 7037 Special shipping requirements or like pure gas Cylinder shoulder Other requirements (per EN 1089 Part 3): Like pure gas Stamping: Like pure gas Label: Types of gases contained in the mixture, in the order of their concentrations Cylinder valve: Like pure gas according to DIN 477 Country-specific requirements can be met for foreign deliveries.

Analytical quality control of test gases

64 Gas Mixtures/Calibration Gas Mixtures

List of possible calibration components

The substances contained in this list are typical examples of This list is being regularly expanded as a result of ongoing the major gases and vapors that are stocked by Linde for development and customer requests. employment in the preparation of calibration gas mixtures.

Acetaldehyde Dichloromethane (Methylene chloride) Methylmercaptan Acetone Dichlorosilane 2-Methylpentane Acetylene (Ethyne) 1,2-Dichlorotetrafluoroethane (R 114) 2-Methyl vinyl ether Acrolein (Propenal) Diethylsulfide Acrylonitrile 1,1-Difluoroethane (R 152 a) Neon Ammonia Diiodo methane (Methylene iodide) Nitric oxide Aniline (Aminobenzene) Dimethylamine Nitrogen Argon Dimethyl ether Nitrogen dioxide (Dinitrogen tetroxide) Arsine 2,2-Dimethylpropane (Neopentane) Nitrous oxide (Laughing gas, Dinitrogen Dimethyl sulfide monoxide) Benzene Disilane Nonane Boron trichloride Bromochlorodifluoromethane (R 12 B 1) Enflurane Octafluorocyclobutane (R C318) Bromoethylene (Vinyl bromide) Ethane Octafluoropropane (R 218) Bromomethane (Methyl bromide) Ethanol (Ethyl alcohol) Octane Bromotrifluoromethane (R 13 B 1) Ethylene (Ethene) Oxygen 1,2-Butadiene Ethyl acetate 1,3-Butadiene Ethylamine Pentane Butane (n-Butane) Ethylene oxide (Oxirane) 1-Pentene 1-Butene Ethylmercaptan 2-Pentene (cis-/trans-) cis-2-Butene Ethyl methyl ketone (Methyl ethyl ketone) Phosgene trans-2-Butene Phosphine Butyl acetate FAM Standard mineral spirits (as per DIN Propadiene (Allene) tert.-Butylmercaptan 51635) Propane tert.-Butylmethylether (MTB) Fluorine 1-Propanol (n-Propyl alcohol) 1-Butyne (Ethylacetylene) Fluoromethane (R 41) 2-Propanol (Isopropyl alcohol) 2-Butyne (Dimethylacetylene) Formaldehyde Propylene (Propene) Propyne (Methylacetylene) Carbon dioxide Germane Carbon-13-dioxide (13CO2) Sevoflurane Carbon disulfide Halothane Silane Carbon monoxide Helium Silicon tetrafluoride Carbon monoxide-18 (C18O) Helium-3 Styrene Carbon-13-monoxide (13CO) Heptane Sulfur dioxide Carbonyl sulfide (Carbon oxisulfide) Hexafluoroethane (R 116) Sulfur hexafluoride Chlorine Hexane Chlorodifluoromethane (R 22) Hydrogen 1,1,1,2-Tetrachloroethane Chloroethane (Ethyl chloride) Hydrogen bromide 1,1,2,2-Tetrachloroethane Chloroethylene (Vinyl chloride) Hydrogen chloride Tetrachloromethane (Carbon tetrachloride) Chloro iodo methane Hydrogen cyanide Tetrafluoromethane (R 14) (Chloromethylene iodide) Hydrogen fluoride Tetrahydrothiophene Chloromethane (Methyl chloride) Hydrogen sulfide Toluene Chloropentafluoroethane (R 115) Tribromomethane (Bromoform) Chlorotrifluoromethane (R 13) Iodoethane 1,1,1-Trichloroethane Cyclohexane Iodomethane 1,1,2-Trichloroethane Cyclohexanone Isobutane (i-Butane) Trichloroethylene Cyclopropane Isobutene (i-Butene, Isobutylene) Trichlorofluoromethane (R 11) Isoflurane Trichloromethane (Chloroform) Decane Isopropyl acetate 1,1,2-Trichlorotrifluoroethane (R 113) Desflurane Trifluoromethane (R 23) Deuterium Krypton Trimethylamine Diborane Dibromomethane (Methylene bromide) Methane Water vapor 1,4-Dichlorobutene-2 (cis-/trans-) Methanol (Methyl Alcohol) Dichlorodifluoromethane (R 12) Methoxyflurane Xenon 1,1-Dichloroethane Methylamine Xylene (o-, m- or p-Xylene) 1,2-Dichloroethane 2-Methylbutane Dichlorofluoromethane (R 21) 3-Methyl-1-butene

65 Storage site for calibration gases and pure gases

66 Standard Gas Mixtures and Calibration Gas Mixtures

Linde stocks a wide variety of standard gas mixtures and field and electronics industry to the latest calibration gas mix- calibration gas mixtures needed for use in the fields of rese- tures for the measurement of emissions as well as for analysis arch, technology, medicine and analysis. These gas mixtures and trace analysis. are available at short notice. The range extends from modern gas mixtures for lasers through gas mixtures for the medical Examples are shown in the following tables.

Examples of gas mixtures/calibration gas mixtures employed in analysis

Product designation Cylinder shoulder color Cylinder size Contents Application Composition Valve outlet, Water capacity DIN 477 Liters m3

Synthetic air 10 2 Instrumentation gas for GC detectors HC-free Bright green 50 10 20 % Oxygen G 3/4 600 120 Purging and zero gas Balance Nitrogen for sampling equipment CnHm ≤ 0.1 ppm Bright green 10 1.5 and measuring instruments M 19 x 1.5 LH 50 7.5

18 – 21 % Oxygen Bright green Balance Nitrogen M 19 x 1.5 LH 10 1.5

30 – 40 % Oxygen Light blue 10 2 Instrumentation gas Balance Nitrogen G 3/4 50 10

40 % Hydrogen Red Fuel gas for flame ionization Balance Helium W 21.80 x 1/14 LH 50 10 detectors

Red M 19 x 1.5 LH 50 10

P10/P5 Gas P 10 Red ECD P 5 Bright green 10/5 % Methane W 21.80 x 1/14 LH 50 10.9 Process gas for electron capture Balance Argon detectors

P10 Gas Red Process gas for proportional counter for Spectrometry W 21.80 x 1/14 LH 50 10.9 tubes for measurement of 10 % Methane radioactive radiation Balance Argon Red M 19 x 1.5 LH 50 7.5

H2 /Ar for Spectrometry ≤ 2.9 % Bright green 10 2.1 Shielding/Purging gas 2 – 5 % Hydrogen > 2.9 % Red 50 10.5 for spark spectrometers Balance Argon W 21.80 x 1/14 LH

4%Nitrogen 1.5 % Carbon Dioxide Red 10 1.4 11D Calibration gas mixture 4 % Ethane M 19 x 1.5 LH 50 6.8 for gross calorific value 1%Propane measurements with process gas 0.2 % Butane chromatographs 0.2 % Isobutane 0.05 % Pentane 0.05 % Isopentane 0.05 % 2,2-Dimethylpropane 0.05 % Hexane Balance Methane

10 % Methane Red 10 2 Reagent gas for AED Balance Nitrogen W 21.80 x 1/14 LH 50 10

Further gas mixtures are available from stock or can be prepared on request

67 Examples of calibration gas mixtures employed in emission and immission measurement

Product designation Cylinder shoulder color Cylinder size Contents Application Composition Valve outlet, Water capacity DIN 477 Liters m3

1/2.5/4/8 % Oxygen Bright green Emission measurements in furnaces Balance Nitrogen M 19 x 1.5 LH 10 1.5 pursuant to German Immissions Protection Regulations and the 400 ppm (500 mg/m3) German Clean Air Technical Carbon Carbon monoxide Bright green 10 1.5 Instruction Balance Nitrogen M 19 x 1.5 LH

700 ppm (2000 mg/m3) Sulfur dioxide Bright green 10 1.5 Balance Nitrogen M 19 x 1.5 LH

90 ppm (121 mg/m3) Nitric oxide Bright green 10 1.5 Balance Nitrogen M 19 x 1.5 LH

100 ppm (135 mg/m3) Nitric oxide Bright green 10 1.5 Balance Nitrogen M 19 x 1.5 LH

300 ppm (400 mg/m3) Nitric oxide Bright green 10 1.5 Balance Nitrogen M 19 x 1.5 LH

Calibration Gas A Calibration gases for exhaust 3.5 % Carbon monoxide Bright green 10 1.5 gas tests with official test 14 % Carbon dioxide M 19 x 1.5 LH certificate 2000 ppm Propane Balance Nitrogen

Calibration Gas B 0.5 % Carbon monoxide Bright green 10 1.5 6 % Carbon dioxide M 19 x 1.5 LH 200 ppm Propane Balance Nitrogen

1 - 20 ppm Formaldehyde Bright green 10 1.0 -1.2 Emission measurement, Balance Nitrogen M 19 x 1.5 LH room air monitoring

200 - 500 ppb Immission measurement Nitric oxide Bright green 10 1.5 Balance Nitrogen M 19 x 1.5 LH

200 - 500 ppb Nitrogen dioxide Bright green 10 1.5 Balance Synthetic air M 19 x 1.5 LH

200 - 500 ppb Sulfur dioxide Bright green 10 1.5 Balance Synthetic air M 19 x 1.5 LH

30 - 150 ppb Benzene 30 - 150 ppb Toluene Bright green 10 1.5 BTX calibration gas 30 - 150 ppb Xylene M 19 x 1.5 LH Balance Synthetic air or Nitrogen

Further gas mixtures are available from stock or can be prepared on request

68 Standard Gas Mixtures and Calibration Gas Mixtures

Examples of gas mixtures employed in the medical field

Product designation Cylinder shoulder color Cylinder size Contents Application Composition Valve outlet, Water capacity DIN 477 Liters m3

Carbogen Respiratory gas; 5 % Carbon dioxide White/Grey 10 2 incubation in biochemistry Balance Oxygen G 3/4 50 10

6/15 wt. % Ethylene oxide ≤ 9 % Bright green Sterilization of Balance Carbon dioxide > 9 % Red 50 37.5 kg medical equipment W 21.80 x 1/14 LH

10/15 % Carbon dioxide Bright green Blood gas analysis Balance Nitrogen W 24.32 x 1/14 10 2

Bright green M19 x 1.5 LH 10 1.5

6 % Carbon dioxide Bright green 12 % Oxygen W 24.32 x 1/14 10 2 Balance nitrogen

5 % Carbon dioxide Bright green 10 2 20 % Oxygen W 24.32 x 1/14 Balance nitrogen

Bright green 10 1.5 M19 x 1.5 LH

5 % Carbon dioxide Bright green 10 1.5 Balance Synthetic air M 19 x 1.5 LH

20.9 % Oxygen Bright green 10 1.5 Lung function tests Balance Nitrogen M 19 x 1.5 LH

0.25 % Carbon monoxide Bright green 10 1.5 18 % Helium M 19 x 1.5 LH Balance Synthetic air

Further gas mixtures are available from stock or can be prepared on request

69 Examples of gas mixtures employed in laser application

Product designation Cylinder shoulder color Cylinder size Contents Application Composition Valve outlet, Water capacity DIN 477 Liters m3

LASPUR ® 110 4.5 % Carbon dioxide Bright green 50 9.1 Gas mixture for CO2 lasers 13.5 % Nitrogen W 21.80 x 1/14 Balance Helium

LASPUR ® 207 3.4 % Carbon dioxide Bright green 50 10 15.6 % Nitrogen W 21.80 x 1/14 Balance Helium

LASPUR ® 208 3 % Xenon Bright green 10 1.5 3 % Oxygen M 19 x 1.5 LH 4 % Carbon dioxide 6 % Carbon monoxide 19 % Nitrogen Balance Helium

LASPUR ® 216 5 % Carbon dioxide Bright green 50 10 40 % Nitrogen W 21.80 x 1/14 Balance Helium

LASPUR ® 258 0.25 % Hydrogen Bright green 50 7.5 Gas mixtures for marking lasers 3 % Carbon monoxide M 19 x 1.5 LH 7.5 % Carbon dioxide 15 % Nitrogen Balance Helium

LASPUR ® 264 0.5 % Hydrogen Bright green 50 7.5 4 % Carbon monoxide 1 LH 8 % Carbon dioxide 16 % Nitrogen Balance Helium Bright green 50 7.5 M 19 x 1.5 LH

LASPUR ® E80 5 % Fluorine Yellow 10 0.3 Gas mixture for excimer lasers Balance Helium M 19 x 1.5 LH 10 1.5

Yellow 10 0.3 1

LASPUR ® E85 5 % Hydrogen chloride Bright green 10 1.5 Balance Helium M 19 x 1.5 LH

Further gas mixtures are available from stock or can be prepared on request

70 Standard Gas Mixtures and Calibration Gas Mixtures

Examples of gas mixtures employed in the electronic industry

Product designation Cylinder shoulder color Cylinder size Contents Application Composition Valve outlet, Water capacity DIN 477 Liters m3

15 % Arsine Yellow 0.38 19 l Ion implantation Balance Hydrogen W 21.80 x 1/14 LH

15 % Phosphine Yellow 0.38 19 l Ion implantation Balance Hydrogen W 21.80 x 1/14 LH

0.4 ppm Phosphine Bright green 10 1.5 Calibration of occupational Balance Nitrogen M 19 x 1.5 LH threshold value sensors

4 – 15 % Oxygen Bright green 50 5.5 Plasma etching of silicon in Tetrafluoromethane M 19 x 1.5 LH

Examples of gas mixtures employed in science, research and technology

Product designation Cylinder shoulder color Cylinder size Contents Application Composition Valve outlet, Water capacity DIN 477 Liters m3

Lamp argon 5 - 20 % Nitrogen Bright green 10 2.1 Gas for filling Balance Argon W 21.80 x 1/14 50 10.5 incandescent lamps

10 - 20 % Helium Bright green 10 2 Leak detection Balance Nitrogen W 24.32 x 1/14 50 10

4 - 10 % Hydrogen ≤ 5.7 % Bright green Balance Nitrogen > 5.7 % Red 50 10 Forming gas for metallurgy W 21.80 x 1/14 LH and semiconductor production

≤ 5.7 % Bright green > 5.7 % Red 50 7.5 M 19 x 1.5 LH

2.5 % Methane Bright green 10 1.5 Calibration gas for gas detectors Balance Synthetic air M 19 x 1.5 LH

Further gas mixtures are available from stock or can be prepared on request

71 Plasma torch of an ICP device (schematic)

72 Instrumentation Gases

73 Coupling of gas chromatography and mass spectrometry for quality tests on pure gases

74 Instrumentation Gases

High-quality instrumentation gases are a basic prerequisite Instrumentation gases with designations like Carbon di- for trouble-free, dependable operations of modern analytical oxide SFC/SFE, Carbon dioxide SFE High Purity, Synthetic air systems. Instrumentation gases and zero gases must not HC-free, Nitrogen CO-free or Nitrogen ECD, etc. indicate their contain any impurities that influence measurement. specific applications. In the preparation and quality assurance of these specialty instrumentation gases their later use is In addition to their use as calibration gas mixtures to cali- taken into consideration. For example, instrumentation gases brate measuring instruments (see chapter “Gas Mixtures/Cali- for ECD analysis are tested during quality control down into bration Gas Mixtures”), instrumentation gases have many the lowest ppb range for interfering impurities like halogenated other functions. Instrumentation gases are employed in the hydrocarbons with an ECD (electron capture detectors). Car- preparation of samples as extraction, stripping or refrigerating bon dioxide for sample extraction (SFE = Super Fluid Extrac- medium to extract samples, expel highly volatile substances tion) is offered in two grades for routine and trace analyses. or enable enrichment in a refrigerating trap. As zero gas instrumentation gases are used to zero analytical instruments Linde: Everything from one source and as carrier, shielding, purging, fuel, reagent or oxidation gas they enable trouble-free and dependable operation of From the production of ultra-high purity gases to the pro- analytical instruments. vision of gases at their point of use at the customer's, Linde offers various customized supply concepts for all analytical Quality assurance applications. The following tables summarize important fields of application for instrument gases in the field of analysis. For Analytical testing of the gases on their delivery and dis- further questions on instrumentation gases and gas supply patch guarantee their compliance with the given specification. systems, please contact a specialist at a Linde Sales Center Analytical methods like gas chromatography with various de- or Specialty Gas Center. tectors, mass spectrometry with various ionization methods, FTIR spectroscopy, atomic absorption spectrometry and other analytical methods are used. Further information on the impurities in the pure gases is to be found in the chapter “Pure Gases”, in Linde data sheets and in the case of individual pure gases in the certificate of analysis, which is to be found on the gas cylinder.

The right choice of instrumentation gas

Beginning with the analytical task at hand, the analyst must select a suitable sample preparation method and a valid analytical method. Depending on what partial amounts are to be detected, instrumentation gases with a correspondingly low number of impurities must be used. Gas purities of at least 5.0 should be used for sample extraction and for analysis with higher partial amounts. Purities of up to 7.0 are needed for the trace and ultra-trace range. Should, in addition to this, it be necessary to remove any existing traces of impurities before the point of use, this can be accomplished by means of appropriate gas purification systems.

Measuring trace elements with an ICP spectrometer

75 Gas chromatography (GC)

Detector Carrier gas Instrumentation gas Gas purity for measuring range Remarks ppt – 100 ppb 100 ppb – 10 ppm > 10 ppm Thermal Hydrogen 5.3 5.0 conductivity Helium 5.3 5.0 detectors Argon 5.3 5.0 TCD Nitrogen 5.3 5.0 Flame Hydrogen 6.0 5.6 5.3 5.0 ionization Helium 6.0 5.6 5.3 5.0 A detectors Nitrogen 6.0 5.6 5.3 5.0 FID Synthetic air HC-free Electron Helium Nitrogen ECD capture Nitrogen ECD B detectors Helium P 10 / P 5 Gas ECD ECD Hydrogen (% Methane in Argon) ECD Flame Hydrogen 6.0 5.6 5.3 5.0 photometric Helium 6.0 5.6 5.3 5.0 A detectors Nitrogen 6.0 5.6 5.3 5.0 FPD Synthetic air HC-free Photo Helium 6.0 5.6 5.3 5.0 ionization Nitrogen 6.0 5.6 5.3 5.0 C detectors PID Helium Helium 7.0 – 6.0 6.0 ionization D detectors HID Thermionic Hydrogen 6.0 5.6 5.3 5.0 detectors Helium 6.0 5.6 5.3 5.0 A TID Argon 6.0 5.6 5.3 5.0 Nitrogen 6.0 5.6 5.3 5.0 Synthetic air HC-free Atomic Helium 6.0 6.0 emission Nitrogen 6.0 5.3 E detectors Hydrogen 5.0 5.0 AED Oxygen 5.0 5.0 Methane 4.5 4.5 Mass selektive Helium 7.0 – 6.0 6.0 detectors (GC-) MS Remarks A Hydrocarbon impurities (HC) in the instrumentation gases cause strong reference line noise and thus a deterioration in the detection limit. The HC concentration in the instrumentation gases should therefore be as low as possible. A gas mixture of 40 % hydrogen, balance helium is also used as fuel gas for FID/FPD. BThe ECD detector reacts very sensitively to impurities in the gases, lines, fittings and seals from substances with a high electron affinity like moisture, oxygen and CFCs. Moisture and CFCs cause a deterioration in the detection limit. C Easily ionizable hydrocarbon impurities (HC) in the instrumentation gases increase reference line noise. The HC share in the instrumentation gas should therefore be as low as possible. D Due to the interference liability of the HID, the detector should be operated under a protective atmosphere. E Besides high purity helium as carrier and plasma gas, the spectrometer needs high purity nitrogen as purge gas and various reagent gases, depending on which elements are to be measured. High purity instrumentation gases and a suitable gas supply system (see chapter “Gas Supply Systems”) are, in addition to exact sample preparation, the most important prerequisites for trouble-free and dependable analysis with modern measuring instruments.

76 Instrumentation Gases

Atomic emission spectrometry (AES)

Technique Detection limit Gas Gas purity Application Remarks Flame ppm Propane 2.5 Fuel gas Propane is heavier than air. photometry range Synthetic air Standard Oxidation gas It may therefore not be used/stored in basements or under the earth’s Acetylene Acetylene for Fuel gas surface. Flame Photometry Synthetic air Standard Oxidation gas See also remarks 1 and 2 Spark ppm/ppb Argon Argon Protective Oxygen and moisture in the protective spektrometry range for Spectrometry atmosphere atmosphere influence the sensitivity 2 – 4% Hydrogen Both 6.0 Protective and measuring result. A high purity Balance Argon atmosphere protective atmosphere is essential. Spektrometry ppb/ppt Argon Argon for Trägergas The sensitivity and reproducibility with range Spectrometry depend on the purity of the gas. inductively Argon Argon for Plasma gas The same applies to ICP-MS. coupled Spectrometry plasma (ICP) Argon Argon for Cooling gas Spectrometry Nitrogen 5.0 Cooling gas Atomic absorption spectrometry (AAS)

Technique Detection limit Gas Gas purity Application Remarks Flame ppb/ppt Acetylene Acetylene for Fuel gas See also remarks 1 and 2 technique range Flame Photometry Synthetic air Standard Oxidation gas Acetylene Acetylene for Fuel gas See also remarks 1 and 2 Flame Photometry Nitrous 2.5 Oxidation gas oxide Hydrogen 5.0 Fuel gas Interfering escort substances often Synthetic air Standard Oxidation gas cause matrix effects. Hydrogen 5.0 Fuel gas This very interference-prone flame is Argon Argon for used for highly volatile elements. Spectrometry Ambient air Oxidation gas Graphit-tube ppb/ppq Argon Argon for Inert/Purge gas The disadvantage of the nitrogen is technique range Spectrometry the possible formation of nitride and Nitrogen 5.0 Inert/Purge gas cyanide as well as a reduction in sensitivity. Hydride and ppb/ppt Argon Argon for Carrier gas Noble metal carriers are used to raise cold vapor range Spectrometry sensitivity for Hg enrichment. technique Nitrogen 5.0 Carrier gas

Remarks 1 Due to the presence of phosphine from the production of the acetylene, the blue acetylene flame has a milky color, which interferes with the photometric analysis. For this reason specially purified “Acetylene for Flame photometry” should be used. 2 The proportion of acetone in the acetylene rises as the cylinder pressure drops. This causes measuring errors in the case of elements whose sensitivity strongly depends on the composition of the fuel gas/oxidation gas. Instrument manufacturers therefore recommend that the acetylene cylinder be changed at a remaining pressure of 6 - 7 bar.

High purity instrumentation gases and a suitable gas supply system (see chapter “Gas Supply Systems”) are, in addition to exact sample preparation, the most important prerequisites for trouble-free and dependable analysis with modern measuring instruments.

77 78 Gases in Small Containers

Gases in Small Containers

In the case of many applications, large gas cylinders are too cumbersome. In addition, there are also other reasons, such as low or only sporadic gas requirements, safety considerations, technical prerequisites, etc., that necessitate more suitable forms of gas supply.

With its product line of “Gases in Small Containers”, Linde offers total solutions wherever light container weight or only very small quantities of gas are required.

The following models are available:

Linde Small Steel Cylinders (lecture bottles)

Linde minican® pressure cans

All standard gases and gas mixtures in small containers are available from current production at short notice. To save both time and expense, they are shipped directly from the supplying plant or – where permissible – by mail (please refer to the information provided under the respective type of container).

The containers described here are not intended for reuse. No credit is given for containers and packaging that are returned.

This chapter also describes:

Linde Plastigas® bags

The main fields of application for these bags are the withdrawal of gas samples and the preparation of calibration gas mixtures at the customer site. Gases and gas mixtures are not delivered in Plastigas® bags.

Small gas containers store

81 Quality control of gases in Linde Small Steel Cylinders

Linde Small Steel Cylinders Type of gas Purity Chemical Contents Order Linde Small Steel Cylinders (lec- symbol (approx.) number ture bottles) are high-pressure steel containers for high-purity gases. Ammonia 3.8 NH3 180 g 1 4940 001 They are employed as disposable Argon 5.3 Ar 80 l 1 4930 002 containers. The cylinders are TÜV- Boron trifluoride 1.6 BF3 240 g 1 4940 004 approved an comply with the Ger- Carbon dioxide 4.5 CO2 280 g 1 4930 028 man Pressure Vessel Directive Carbon monoxide 3.7 CO 50 l 1 4930 029 (Druckbehälterverordnung). Their 300 Chlorine 2.8 Cl2 450 g 1 4940 013 bar test pressure permits large quan- Chloromethane (Methyl chloride) 2.8 CH3Cl 270 g 1 4940 034 tities of gas to be filled. Gas withdra- Dimethylether 3.0 C2H6O 200 g 1 4940 019 wal is by means of type-tested valves 2,2-Dimethylpropane (Neopentane) 2.0 C5H12 160 g 1 4930 020 with outlet connection according to Ethane 3.5 C2H6 150 g 1 4930 022 DIN 477. Ethylene (Ethene) 3.5 C2H4 140 g 1 4930 023 Ethylene oxide 3.0 C2H4O 260 g 1 4940 026 Linde charges for the costs of Helium 5.3 He 70 l 1 4930 027 3 disposing of Small Steel Cylinders Helium-3 (Stable He Isotope) * He 1 – 10 l returned to it. According to transpor- Hydrogen 5.3 H2 65 l 1 4930 050 tation regulations, these cylinders Hydrogen chloride 2.8 HCl 250 g 1 4930 014 may only be returned in their original Isobutane (i-Butane) 3.5 C4H10 160 g 1 4930 007 packing. Methane 4.5 CH4 70 l 1 4930 031 Neon 4.5 Ne 70 l 1 4930 035 Specifications Nitric oxide 2.5 NO 15 l 1 4930 064 Water capacity: 0.38 liters Nitrogen 5.3 N2 72 l 1 4930 042 Tare weight (with valve): 1.7 kg Nitrogen dioxide (Dinitrogen tetroxide) 2.0 NO2 (N2O4) 450 g 1 4940 043 Length (with valve): approx. 380 mm Nitrous oxide 2.5 N2O 280 g 1 4930 021 Outside diameter: 50 mm Oxygen 4.5 O2 76 l 1 4930 052 Propane 3.5 C3H8 160 g 1 4930 037 Shipment by mail is not possible. Sulfur dioxide 3.8 SO2 400 g 1 4940 039 In the case of reasonable quantities, Sulfur hexafluoride 3.0 SF6 390 g 1 4930 040 other gases or mixtures are also Vinyl chloride (Chloroethylene) 3.7 C2H3Cl 250 g 1 4940 048 available in Linde Small Steel Xenon 4.0 Xe 18 l 1 4930 051 Cylinders. * Enrichment ≥ 99.9 %

82 Gases in Small Containers

Linde minican® Pure gases pressure cans Type of gas Purity Chemical Contents Order Linde minican® pressure cans are symbol (approx.) number disposable aluminum containers. They are approved pursuant to the Argon 5.0 Ar 12 l 1 4950 001 German Pressure Vessel Directive Butane (n-Butane) 2.5 C H 500 g 1 4950 004 (Druckbehälterverordnung). 4 10 Carbon dioxide 4.5 CO2 21 g 1 4950 015 Carbon monoxide 3.7 CO 12 l 1 4950 029 Linde participates with its Deuterium * D 12 l 1 4950 005 minican® pressure can in the recyc- 2 Ethane 2.5 C H 14 g 1 4950 011 ling system “Der grüne Punkt – 2 6 Ethylene (Ethene) 2.8 C H 13 g 1 4950 012 Duales System Deutschland”. Empty 2 4 Helium 5.0 He 12 l 1 4950 014 cans are passed on for recycling Hydrogen 5.0 H 12 l 1 4950 027 through this collection system. 2 Isobutane (i-Butane) 2.5 C4H10 450 g 1 4950 003 Krypton 4.0 Kr 12 l 1 4950 016 The test pressure is 18 bar. The Methane 3.5 CH 12 l 1 4950 017 cans are equipped with a self-closing 4 Neon 4.5 Ne 12 l 1 4950 018 valve in a pretected location, with the Nitrogen 5.0 N 12 l 1 4950 021 same outlet being employed for all 2 Nitrous oxide 2.5 N O 21 g 1 4950 010 types of gases. A special line of fit- 2 Oxygen 4.5 O 12 l 1 4950 019 tings, which can be employed univer- 2 Sulfur hexafluoride 3.0 SF 69 g 1 4950 020 sally throuthout the minican® system, 6 Xenon 4.0 Xe 12 l 1 4950 028 permits the gases to be withdrawn and fed. * Enrichment ≥ 99.8 %

Specifications Water capacity: 1 liter Tare weight: approx. 140 g Length including cap: 270 mm Outside diameter: 80 mm

With the exception of carbon monoxide, all gases in pressure cans can be shipped by mail in shipments of up to 10 cans.

83 Linde minican®- Calibration gas mixtures/Gas mixtures pressure cans Application Standard mixtures Order number

Room air 30 ppm CO Balance Synth. air 1 4960 013 monitoring 300 ppm CO Balance Synth. air 1 4960 001 1% CO Balance Synth. air 1 4960 002

1% H2 Balance Synth. air 1 4960 006 1.6 % H2 Balance Synth. air 1 4960 405 0.88 % CH4 Balance Synth. air 1 4960 290 1% CH4 Balance Synth. air 1 4960 011 1.76 % CH4 Balance Synth. air 1 4960 295 2.5 % CH4 Balance Synth. air 1 4960 012 0.5 % C3H8 Balance Synth. air 1 4960 004 0.5 % DIN-Propane Balance Synth. air 1 4960 009 1% DIN-Propane Balance Synth. air 1 4960 010

20 % O2 Balance N2 1 4960 019 (Synthetic air)

Exhaust control 15 % CO2, 0.3 % CO Balance N2 1 4960 021 4% CO Balance N2 1 4960 024 8% CO Balance N2 1 4960 022

Calibration gas C 1.5 % CO, 11 % CO2, for exhaust gas tests 600 ppm C3H8 Balance N2 1 4960 033

Withdrawal equipment for the Linde Calibration gas A 3.5 % CO, 14 % CO2, minican® for exhaust gas tests 2000 ppm C3H8 Balance N2 1 4960 035

O2 instrumentation 1 % O2 Balance N2 1 4960 042

Gas- each 10 ppm CH4, C2H6, C3H8, n-C4H10, i-C4H10 chromatography Balance He 1 4960 051

each 100 ppm CH4, C2H6, C3H8, n-C4H10, i-C4H10 Balance He 1 4960 052

Instruction 10 % H2 Balance N2 1 4960 071

Medicine 5.6 % CO2 Balance O2 1 4960 092 10 % CO2 Balance N2 1 4960 095 5% CO2 Balance N2 1 4960 043 2% CO2, 2 % O2 Balance N2 1 4960 096 5% CO2, 12 % O2 Balance N2 1 4960 094 5% CO2, 20.9 % O2 Balance N2 1 4960 100 5% CO2, 65 % N2O Balance O2 1 4960 090 4 % CO2 Balance Synth. air 1 4960 098 Lighting 25 % Ar Balance Ne 1 4960 003 Contents per can: 12 liters. All gas mixtures/calibration gas In addition to these standard mixtures, mixtures having other compositions are also mixtures listed in Linde minican® available on request. A prerequisite, however, is that each consignment consist of a pressure cans can be shipped by minimum order of 5 cans per mixture. mail.

84 Gases in Small Containers

Equipment for Linde minican® pressure cans

Spray nozzle for blowing gases at open instrumentation Order number: 3 7610 001

Syringe adapter for withdrawal of minute quantities of gas with the aid of pressure-proof syringes and needles Order number: 3 7610 004

Pressure regulator with metering valve for gas withdrawal at a uniform overpressure of 500 mbar (fixed setting) Order number: 3 7610 011

Pressure regulator as under , but additionally with inlet pressure gauge Order number: 3 7610 010

Fine-regulating valve can be evacuated, especially suitable for metered withdrawal of even minute quantities of gas Order number: 3 7610 012

Fine-regulating valve as under , but additionally with pressure gauge Order number: 3 7610 013

Tube fitting for 6 mm outside diameter glass pipe; attaches to the regulating valve, suitable for connection to glass fittings Order number: 3 7610 014

85 Linde Plastigas® bags mixture that can be achieved by means of the volumetric-static method range from a few ppm to 1000 ppm at ± 4 % rel., which means that in many cases control analyses are not Examples of application fields: required. Since gas-tight syringes are employed, the air con-

stituents N2, O2 and argon cannot be proportioned with the Linde Plastigas® bags as sampling containers same accuracy.

Linde Plastigas® bags are superbly suited for taking, trans- It is necessary to ensure that the inner plastic layer (poly- porting and storing gas samples under atmospheric pressure. ethylene) of the Linde Plastigas® bags is compatible with the In many cases, for example, they are employed for exhaust balance gas and the component(s). The extent of any absorp- gas analyses in environmental pollution monitoring and for tion of the component(s) or balance gas by the inner wall of monitoring occupational threshold values. Among the advan- the bag must be taken into consideration. tages offered by Linde Plastigas® bags over conventional sampling vessels (glass or metal containers) are their ease of The preparation of calibration gas mixtures in accordance use, even in hard-to-reach locations, the fact that they can be with the volumetric-static method using plastic bags is de- completely emptied, and the trouble-free manner in which scribed in Sheet 11 of VDI Standard 3490 “Measuring of they can be transported. gases/calibration gas mixtures”.

Linde Plastigas® bags used for storing small parts in Linde Plastigas® bags are defined gas atmospheres flexible, but not elastic An interesting application for Linde Plastigas® bags is in gas tight conjunction with experiments whose purpose is to determine pressure resistant up to gauge pressures of approx. the behavior of small components when they are stored in 0.3 bar reactive gas atmospheres. In these experiments the compo- temperature resistant up to approx. 50 °C nents to be tested is welded into a Plastigas® bag, which is then filled with the desired gas or gas mixture. These kinds of Design: experiment arrays can provide information on disturbing components in production processes, for example, or on how cor- Aluminum foil substrate backed with multiple layers rosion occurs. On the basis of analyses of the gaseous reac- of plastic tion components, it is possible to provide quantitative informa- Interior coated with polyethylene tion as a function of the exposure period. Seams thermoplastically welded

Linde Plastigas® bags with certified volumes (± 1 % rel.) for preparing calibration gas mixtures

It can often be practical to prepare calibration gas mixtures by directly blending the components at virtually atmospheric pressure if the required gas mixture cannot (condensation) or should not (safety) be produced at elevated pressure, if cost considerations dictate that a large volume of calibration gas mixtures should not be produced, or if maximum accuracy of the calibration gas mixture is not initially required for preliminary tests.

The preparation accuracies of the volume concentrations of the components in a calibration gas

86 Gases in Small Containers

Gas withdrawal/filling by means of:

Septum with needle or gas-tight syringe Spout with bubble hose Valve with hose connection

The pressure required for removing the gas is produced by compressing the bag. The “bubble hose” has a conical en- largement (the “bubble”), which produces a gas-tight seat in the spout after it has been cut open.

Following gas withdrawal/filling, the bag is sealed by ben- ding the spout over and sealing it with a paper clip or ad- hesive tape, for example.

Plastigas® bags can be shipped by mail.

Note: Due to the thermoplastic welding and inner surface of Plastigas® bag for sampling polyethylene, it cannot be completely ruled out that the inside at a ventilator outlet of the bag is contaminated with traces of hydrocarbon. If the bags are to be used for samples with traces of hydrocarbon, either blank values must be determined first or the bags must be purged intensively with inert gas.

Analysis of a gas sample

Model Contents Quantity Accessories Order Liters approx. per package number

with nozzle for bubble hose 2.5 10 1 bubble hose 3 7660 001 with nozzle for bubble hose 5.5 10 1 bubble hose 3 7660 002 with nozzle for bubble hose 22 3 1 bubble hose 3 7660 003 bubble hose alone 3 7660 005 with valve 10 3 3 7660 006 with valve 27 2 3 7660 007 with valve, volume calibrated 10 3 Instructions for use 3 7660 008

87 88 Gas Supply Systems

89 90 Gas Supply Systems

Due to their special properties, specialty gases place particular demands on the components for transport, control and monitoring. Either because the application requires that the gases be provided in espacially high purity at the point of use, or because their chemicophysical properties necessitate special design of the gas supply installations and their components.

Everything from one source

Linde is thoroughly familiar with the properties of these gases and the resulting equipment requirements and is therefore in a position to offer total gas management and engi- neered solutions.

Complete solutions

The customer's objective and ideas are first surveyed on site. A concept is then developed on the basis of the specific situation at the customer's site and submitted to the customer in the forrn of a proposal. If several alternative versions are possible, the optimum solution is developed jointly with the user.

Linde supplies turn-key facilities for virtually every concei- vable application in research, development and production.

Linde's services:

Consultancy Concept development Design Project planning Erection and installation Commissioning Documentation Service

91 The appropriate equipment for every application

The type of gas and the purity in which it is required are dic- Using the typical components of a specialty gas supply tated by the application. It is necessary for the gas supply system by way of example, the table below illustrates how the system to satisfy the corresponding requirements. During the specifications differ on the basis of the varying requirements. course of the design phase, the type and nature of the equipment is specified by our engineers in such a manner as to Supply systems for industrial gases are not treated here. provide optimum safety, economy and satisfaction of the Please refer to our brochure entitled “Central Gas Supply” for application-specific aspects. details regarding selection of individual components.

Design of components in specialty gas supply systems

Gas purity Class 5.0 Class 6.0 Class 6.0 and higher as well as as semiconductor process gases

Pressure regulator Brass or stainless steel, Predominantly stainless steel, Stainless steel, specially cleaned, specially cleaned, electropolished, He leak rate = 10-7 mbar l/s, He leak rate = 10-9 mbar l/s, high surface quality, elastomer or metallic stainless steel diaphragm He leak rate = 10-9 mbar l/s, diaphragm stainless steel diaphragm, minimized dead volume, free of NF metals, assembled under cleanroom conditions, minimum particulate emission Valves Diaphragm-type seal, Diaphragm-type seal Diaphragm-type seal rarely packing seal Bellow-type seal Bellow-type seal or O-ring seal Electropolished Minimized deal volume

Piping Copper or stainless Stainless steel, specially Stainless steel, steel, specially cleaned cleaned or electropolished electropolished

Pipe connections Brazed flux-free, Orbital welded Orbital welded orbital welded Detachable connections Metal-to-metal sealed Metal-to-metal sealed Metal-to-metal sealed tube fittings tube fittings VCR unions Metal-to-metal sealed VCR unions Application examples Gas supply for general laboratory Gas supply for laboratory Gas supply for R&D applications needs, for gas analyzers, needs involving high purity involving ultra-high purities, e.g. in for production plants using gases, for gas analyzers using microelectronics, for production high-quality working gases, calibration gas mixtures in the plants using ultra-high purity gases e.g. CO2 lasers, lamp ppm range and/or with corrosive and gas mixtures as well as manufacturing, fabrication of calibration components, for corrosive and toxic process gases, special ceramics and metals production plants using highest e.g. for VLSI circuits, sensors, purity gases and gas mixtures, solar cells e.g. excimer lasers, manufacture of optical fibers, discrete components and less highly integrated circuits

92 Gas Supply Systems

Components for specialty gas supply systems

Complete supply systems for specialty gases usually comprise the following components:

Cylinder cabinets with pressure regulating stations (1st pressure stage) Piping Shutoff, control and safety fittings Points of use (2nd pressure stage)

Depending on the application in question and specific customer demands, additional components can also be integrated:

Process and purge gas panels Particle filters Gas purification systems Gas mixing systems Pipeline section for high-purity gases and test gases Gas dilution systems Measurement and monitoring systems for inlet pressure, outlet pressure mass flow gas purity particle content workplace environment (explosion hazard, TLV) Waste gas purification Signaling and control systems for emergency shut-down of the gas supply system in the event of potentially hazardous malfunctions Measurement and control systems for pressure, volume and mass flow Stored-program control (SPC) systems for automated cylinder cabinets and special facilities Monitoring systems for ongoing quality monitoring and documentation PC-based gas management systems.

Assembly service

Portable concrete boxes for setting up special gas cylinders outdoors

93 Complete supply systems Central gas supply

Linde designs and installs complete supply systems. The systems can be either standard systems for common applications, or they can be customized for special needs.

Standard systems

Examples of proven standard systems include central gas supply for gas chromatographs, especially for ECD analysis and for excimer lasers.

ECD analysis is employed if traces of halogen compounds are to be detected. Consequently, only those materials which are definitely free of halogen compounds may be employed in the gas supply system. In addition, it is also necessary to ensure that only CFC-free cleaning agents are used for the cleaning steps during the course of the manufacture and assembly of the individual components.

For excimer lasers working gases are employed that contain fluorine or hydrogen chloride in the percent range. In the design of the supply system for these highly toxic and corrosive gases it is imperative to give special consideration to materials compatibility and safety. Our standard supply systems for excimer lasers, for example, are therefore equipped with a dry-type filter to protect against corrosion (option), special safety fittings as well as a waste gas purification system.

Custom-tailored supply systems

The specific requirements of gas applications in widely varying industries usually necessitate custom-tailored solutions. The system could be used, for example, to automatically supply climate simulation chambers with artificially generated atmospheres, or to supply a program-controlled filling plant for lamp gases.

Highly complex supply systems are generally employed in the high-technology sector, e.g. for fabricating highly integra- Gas supply for excimer lasers, 2-cylinder version, installation in ted components in microelectronics, or in solar and sensor safety cabinet technology. Linde has this expertise. Our engineering department Designing and building these kinds of systems necessitate designs and builds custom-tailored systems to solve gas the utmost in competence and specific know-how on the part supply problems. of the supplier.

94 Gas Supply Systems

Atmospheric Pressure Ionization Time-of-flight mass spectrometer (APITOF)

Linde offers these users a complete supply system that can be optimized for every particular application to achieve highest gas purities.

Such a system can begin with an on-site air separation plant, which today is capable of simultaneously producing nitrogen in a purity up to 8.8 and oxygen up to 6.0. This is naturally only economical if most of the gas used (approx. > 60 %) is needed in this high purity. If not, it is better to re- duce the production purity to 6.0 or 7.0 and install a catalytic or getter-based gas purifier for the small quantity of gas needed in a very high purity. This generally also applies to the supply of cryogenically liquefied gases, which are usually produced in the above-mentioned purities (exception: liquefied hydrogen can be produced in qualities up to 9.0 without extra purification). Gas purifiers work fully automatic over many years without interruption and do not need much maintenance.

To check whether the gas purifier is working correctly and track down recontamination by, for example, faults in the gas distribution system, a gas analyzer system is usually installed downstream of the gas purifier. The system works fully automatically and continuously and can measure various compo- Gas purifiers and analyzer systems nents in the gas simultaneously. It can detect impurities in most bulk gases down into the ppt range. These systems are Certain gas applications require very high levels of gas equipped with their own calibration system, alarm functions, purity, sometimes even the maximum that is technically pos- permanent storage of measured data, remote service and sible. An example of such an application is ULSI in modern data transmission capabilities and are, thanks to a graphic microelectronics (ULSI = Ultra Large Scale Integration). user surface, easy to use.

Silicon, the basic material used predominantly in this field, These systems can can, for example, be purified to a purity of 99.99999999 %, or be either bought or in gas point notation “10.0”, by means of the Czochralski rented as wished. Linde method. The purities of the protective gases used, for exam- offers maintenance ser- ple, in high temperature processes must also lie at least in vices for all the above- these ranges. mentioned systems. Due to the many years The costs of achieving this level of purity and of the quality of operating experience control required, however, rise disproportionately high with the with them, this mainte- purity achieved. nance is especially economical. It is therefore uneconomical to orientate the purity of gases produced in large quantities to the quality requirements of a minority of very demanding customers. It is more economical to provide special methods for customer-specific purification and quality control for these applications. Inline monitoring system for bulk gases

95 96 Specialty Gas Service

97 Quality Control of the filling gas of a ROSAT detector before the launch of a satelitte at Cape Canaveral (NASA)

98 Specialty Gas Service

Gas analytical service

This service is aimed especially at companies that do not Below is a selection of the analysis systems available: have their own analysis equipment. For cost reasons the high investments in equipment and personnel are frequently not A sector field mass spectrometer designed especially for justified because analysis problems only have to be handled analyzing gases occasionally. A time-of-flight mass spectrometer with ionization at Depending on the transportability and availability of the atmospheric pressure to detect impurities in the ppt range equipment, these analyses can also be carried out at the customer's site. The Mobile Analytical Service with its well- Various gas chromatographs, equipped with universal equipped vehicle is available on call for these analyses. (TCD, HeID) and specific detectors (FID, ECD, argon, Hall, helium, chemiluminescence detectors) In view of the relative measuring accuracy regarding the substances and impurities that have to be determined in the Chemiluminescence analyzers for nitrogen gas samples, representative sampling is of decisive importance. The know-how of Linde's personnel and suitable Gas chromatograph with enrichment module to analyze sampling containers and systems minimize these influencing HC impurities in the ppb range factors. Particle measurement devices on laser basis

High-resolution FTIR with pressure-resistant long path cells

Various NDIR analyzers for various types of gases

Numerous devices for direct wet-chemical determination according to DIN/VDI guidelines

Moisture analyzers (e.g. dew-point level, capacitive measuring methods)

Oxygen trace analyzers (electrochemical, phosphorous luminescence)

A row of dedicated analyzers, some of which are not even available on the instrumentation market

Ion chromatography

UV/VIS spectrometry

AES (atomic emission spectrometry)

99 Accreditation of the “Analytical Laboratory”

A major aim of the European internal market is to make the requirements placed on goods and products comparable, i.e. to simplify work in test laboratories.

The accreditation policy needed for this aims to facilitate the reciprocal recognition of test certificates to save cost-intensive multiple testing. The German accreditation Mobile Analytical Service system has, on the one hand, to take European regulations into account and, on the other, to pay due regard to the situation prevailing in Germany – the interaction and coexistence of the regulated and unregulated fields. Both fields fall under the control of the DAR – Deutscher Rat für Akkreditierung or Ger- man Board of Accreditation – which coordinates activities in Prerequisites for accreditation: the field of accreditation, recognition of test laboratories and control bodies in Germany. The accreditation of test laborato- Trained personnel ries in the statutorily unregulated field is carried out by the Independence of employees DAP – Deutsches Akkreditierungssysttem Prüfwesen GmbH. Technical competence Similar approving laboratories eg. N.P.L./U.K.A.S. exist in Availability of suitable premises and equipment other countries. Validation of the analytical methods Maintenance of a quality management system Keeping of confidentiality

Linde's “Analytical Laboratory” of the Specialty Gas Works in Unterschleissheim has been accredited according to DIN EN 45001 – General Criteria for the Operation of Test Labora- tories – by DAP. It therefore has the competence to carry out tests in the fields of gas analysis named according to standar- dized and modified methods.

Accreditation, however, also means that the quality of the analytical tests are regularly checked by DAP throughout the period of validity of the accreditation.

What does accreditation mean for our customers?

Equal recognition in the case of arbitrational analyses Upgrading of the customer's position when it introduces quality management systems (audits) Proof of qualifications when participating in cooperative tests and in the compilation of reference materials

100 Specialty Gas Service

Environmentally-compatible disposal Linde has used its long technical experience in the field of and recycling gases to develop a system for disposing of gases in gas cylinders in Germany that is both ecologically sound and also in full conformity with the law. Compressed gas cylinders are usually extremely safe and To this end a Central Disposal Center was erected in Un- reliable containers for the storage and transportation of com- terschleissheim near Munich. It contains all the facilities need- pressed gases or gases liquefied under pressure if they are ed for proper disposal of gases, a complex safety infrastruc- handled, cared for and tested properly and in accordance with ture and is staffed by experienced, specially trained personnel. regulations. If, however, this is not the case, e.g. if they are stored in a corrosive atmosphere for a long period of time, Linde has all the necessary certificates and permits re- were buried in underground or were damaged by fire, they quired in terms of current legislation: can become a serious danger to man, environment and property. It is then necessary to dispose of the gases and con- Permit to erect and operate a residual gas disposal plant tainers in a safe, technically correct and environmentally-com- according to BImschG (German law on immissions) patible manner. Collection and transportation permit in terms of § 49, par. 1 KrW-/AbfG (German law on recycling and waste mana- Due to the very special properties of compressed gases gement) and containers, normal special waste management compa- Authorization to collect waste nies are usually not qualified to carry out this work. ADR permit to transport hazardous goods

Disposal Center in Unterschleissheim near Munich

101 In addition to the statutory requirements, Linde also offers Linde specialists are in a position to identify apparently the following services for environmentally-friendly disposal and unimportant details, e.g. valve thread, paint residues, recycling: stamping fragments, corrosion products on the valve and, if necessary, the contents of gas cylinders by means of Help in acute emergencies metal-penetrating measuring methods without having to (e.g. badly corroded, leaking or fire-damaged cylinders, operate the possibly defective valve. defective valves, etc.) For this Linde offers on-site consulting by gas specialists, pressure-resistant recovery containers for gas cylinders and a mobile intervention squad with comprehensive technical equipment.

Identification of the contents that could prove to be difficult in the case of badly corroded cylinders and simultaneously unsafe or defective valves.

This identification of contents is an essential prerequisite for every further step, e.g. – Transportation in conformity with legal requirements (approval of the recovery container / existence of a special transportation permit / equipment of the disposal vehicle) – Decision on whether the cylinder can be drilled in the case of a defective valve Protecting a corroded cylinder in a recovery container –Checking whether the gas in question is contained in the permit for Linde's residual gas disposal plant.

Consultation services for the waste producer, collection of compressed gas cylinders

Linde is authorized by permit to collect wastes. If a producer has a quantity of waste of one type (according to the same EWC-No.) of less than 15 tons per year, Linde can collect it and issue a general certificate confirming its disposal. If the quantity of waste exceeds the threshold value mentioned above, Linde can on request advise the customer in the compilation of an individual disposal certificate.

Transportation of the cylinders to the disposal plant in Unterschleissheim

Linde's relevant employees are authorized in terms of ADR to transport hazardous goods. Linde also has a general transportation permit in terms of § 41, par. 1 KrW-/AbfG. There are a number of possibilities for the management of transportation. Our specialists know what is permitted by applicable regulations and what is appropriate in the interests of public safety. Gas-tight, pressure-resistant recovery container

102 Specialty Gas Service

Reutilization of the cylinder material by scrapping

Cylinders that are no longer fit for use are scrapped and the material then recycled.

Procedure for the disposal of gases – Notification of the responsible Linde Distribution Center by the customer of his need to have gas disposed of – Cost estimate by Linde – Placing of an order – Filing of all documents on the whereabouts of the wastes

It is important in such an event that all applicable laws, regulations and requirements, e.g. of waste law, transportation law and German immissions law, are complied with in full and that the steps are documented. Only in this way are the customer and Linde equipped for investigations by the regula- Drilling a cylinder with defective valve tory authorities on the whereabouts of specially controlled wastes.

Opening of the cylinder in the case of a defective valve and controlled gas withdrawal

Linde has a number of methods for the controlled emptying of compressed gas cylinders with defective valves, i.e. the gas contents are not released uncontrolled. A reliable and rational method for this is drilling with a gas-tight drill.

Recycling or chemical conversion of the gas into a state in which it can be reused, emitted or dumped.

In terms of the provisions of KrW-/AbfG on the avoidance, utilization and disposal of wastes, Linde works by the following order of priority: – Collection, reprocessing and reutilization of pure gases – Catalytic decomposition of nitrogen oxides in oxygen and nitrogen – Open combustion if all the waste gases produced are constituents of the natural atmosphere – Combustion in closed combustion chambers followed by waste- gas scrubbing Purging a small recovery container with neutralization of the purge gas – Acidic, alkaline or alkaline oxidative gas scrubbing with reprocessing of the resultant saline solutions – Conversion on solid adsorbers. Linde offers these services to multiply its benefits to the customer. If you want to find out more about this subject or have cylinder gases you need to get rid of, please contact your nearest Linde Distribution Center.

103 104 Containers for Specialty Gases

105 106 Containers for Specialty Gases

Linde pressurized gas containers comply with the German Pressure Vessel Directive (TRG 310 and TRG 801 ff).

Seamless high-pressure cylinders (of steel or aluminum) are used for compressed gases or gases liquefied under pres-

sure whose critical temperature is TC < +70 °C.

Cylinder bundles are larger transport units consisting of 12 to 16 high-pressure cylinders fixed in a steel frame and connected by pipes. Gas filling and withdrawal is effected through a common valve.

A trailer contains a large number of firmly mounted cylinders.

Welded low-pressure cylinders (of sheet steel) are used for

gases liquefied under pressure whose TC ≥ + 70 °C insofar as this is permitted. Welded steel casks are also available for these gases. They are clamped in a steel frame and may be transported by road.

The Linde range of containers is supplemented by special Small Steel Cylinders, which are delivered as disposable cylinders.

The cylinder colors and labels as well as the respective valve outlets are given in the specifications on the gases or gas mixtures.

See page 159 for a list of valve outlets prescribed by DIN 477/ISO 5145.

107 Cylinder valve outlets 3. A diaphragm valve in which the diaphragms are welded to the lower spindle is used for electronic gases. Since the The function of the cylinder valve is to safely lock in the gas lower spindle and knob are joined by a mechanical contents. It is not suitable for regulation of gas withdrawal (see connection, there is no necessity for a spring in the gas the chapter Gas Handling Equipment). chamber. This measure results in a gas chamber with minimum area (= adsorption area). This raises the tightness Three types are mainly used: (leak rate ≤ 10-9 mbar l /s). The shape of the gas chamber and the lack of a spring also result in significantly improved 1. A proven O-ring valve particle behavior. The body is for industrial gases. made of stainless steel 316 L O-ring valves have a (material number 1.4404/35). long spindle lift and are In addition to the classical therefore suitable for connection as per DIN 477, high flow rates. They an all-metal sealing connec- have a packing system tion identical to the American that allows knob opera- CGA connections of the tion with low torque up series 630 and 710 are avai- to the maximum opera- lable for electronic gases on ting pressure. They are request for the valve-side also designed for tough outlet thread (= DISS). operating conditions. The packing materials are selected specifically for the type of gas for which they are to be used. The body is made of brass (e.g. material number 2.0540, DIN 17.660).

2. Diaphragm valves are used almost exclusively for ultra-high purity gases and calibration gas mixtures. Diaphragm valves have good external and internal tightness (leak rate ≤ 10-7 mbar l/s). This is achieved by metal diaphragms clamped between the upper spindle and valve body and which thereby seal the body metalli- cally. Depending on the compatibility of the material with the gas, the body is made of brass or stainless steel (e.g. material number 1.4305, DIN 17440). The gas-side diaphragm is made of Hastelloy and the valve seat of PCTFE.

108 Containers for Specialty Gases

Cylinder valve outlets as per DIN 477/ISO 5145

Gas category Valve outlet thread Connection number

DIN 477

Arsine, 1,3-Butadiene, Butane, 1-Butene, Chloromethane, Deuterium, Difluoromethane (R 32), Dimethylether, 2,2-Dimethylpropane, Disilane, Ethane, Ethylene, W 21.80 x 1/14 LH 1 Ethylene Oxide, Germane, Hydrogen, Hydrogen Phosphide (Phosphine), Isobutane, Isobutene, Methane, Propane, Propylene, Silicane (Silane), Vinyl Chloride

Butane, Isobutane, Propane (water capacity up to 33 liters) W 21.80 x 1/14 LH 2

Acetylene Yoke fitting 3

Carbon Monoxide, Dichlorosilane, Hydrogen Sulfide 1 LH 5

Ammonia, Argon, Carbon Dioxide, Chlorodifluoromethane (R 22) Helium, Hexafluoroethane (R 116), Krypton, Neon, Octafluorocyclobutane (R C318), Octafluoropropane (R 218), W 21.80 x 1/14 6 Sulfur Hexafluoride, Tetrafluoromethane (R 14), Trifluoromethane (R 23), Xenon

Sulfur Dioxide G 5/8 7

Boron Trichloride, Boron Trifluoride, Chlorine, Fluorine, Hydrogen Bromide, Hydrogen Chloride, Nitrogen Dioxide, 1 8 Nitric Oxide, Nitrogen Trifluoride, Silicon tetrafluoride 4.0

Oxygen, Calibration Gas Mixtures (oxygen content above 21 %) G 3/4 9

Nitrogen W 24.32 x 1/14 10

Nitrous Oxide (standard connection) G 3/8 11

Nitrous Oxide (water capacity up to 3 liters) G 3/4 INT 12

Calibration Gas Mixtures (oxygen content 21 % or less) M 19 x 1.5 LH 14

Non-flammable and non-toxic gases, M 30 x 1.5 INT 52 filling pressure 300 bar

ISO 5145

Argon, Helium, Nitrogen W 30 x 2 0170 Filling pressure above 200 - 300 bar

109 Linde pressurized containers with old and new color coding

110 Containers for Specialty Gases

Linde pressurized gas containers

Water Container Type of Tare weight Length Outside Filling/ capacity material container of the complete incl. cap diameter Design liters container pressure approx. kg approx. mm approx. mm bar

0,38 NS HD 1,7 380 50 200/300 1LS HD/S 2 285 83 200/300 2AL HD/S 4,7 460 118 200/300 2LSHD 5,3 490 100 200/300 7SGND4300 200 21*/32 10 AL HD/S 11,5 1100 140 200/300 10 LS HD 16 970 140 200/300 10 LS HD/A 21 980 140 18/60 10 NS HD/K 19 1030 140 150/225 10 ES ND/S 21 560 219 40*/60 10 ES HD/S 32 590 219 200/300 20 LS HD/A 38 940 204 18/60 20 ES ND/S 17 660 265 43*/65 27 SG ND 12 485 300 21*/32 40 AL HD/S 45 1560 229 200/300 40 LS HD/S 48 1630 204 150*/225 40 LS HD/A 60 1630 204 19/60 40 NS HD/K 78 1730 204 150/225 40 ES HD/S 81 1560 219 200/300 47 ES ND/S 50 1660 219 40*/60 50 LS HD 67 1640 229 200/300 50 LS HD/S 93 1750 229 300/450 50 ES ND/S 31 1220 265 43*/65 79 SG ND 35 1145 318 21*/32 12x40 AL BL/M/S 950 1842 760x965 200/300 12x40 AL BL/E/S 950 1842 760x965 200/300 12x50 LS BL/M 1057 1842 760x965 200/300 12x50 LS BL/E/S 1100 1842 760x965 300/450 950 SG F 565 2420 1000 22/33 410x50 LS BF – – – 200/300 *Filling by weight, varies depending on filling factor Key:

Container material: TS = Temper-hardened steel NS = Steel with a minimum yield point of = 390 N/mm2 SW = Sheet steel, welded AL = Aluminum alloy SS = Stainless steel Type of container: HP = High-pressure cylinder, seamless drawn LP = Low-pressure cylinder, welded, for liquefied gases (Tc ≥ + 70 °C) BL = Bundle of 12-16 high-pressure cylinders C=Cask, dimensions and weight incl. transport frame T=Trailer with 280 or 410 high-pressure cylinders With supplement: /A = Acetylene cylinder (weight of the porous mass and solvent included in the tare weight) /C = For corrosive gases and gas mixtures /S = Stainless steel piping /C = Copper piping /S = Only for special purposes

111 Cryo-containers

Cryo-containers are used for the storage and transportation of cryogenically liquefied gases like oxygen, argon, nitrogen, hydrogen and helium. They consist of an inside and an outside container. The space in between is filled with special insulating material and highly evacuated. The cryo-containers are available as portable containers as well as equipped with forklift pockets and/or rotatable wheels. A detailed description with technical specifications of containers from 5 to 1000 l effective volumes including accessories and safety equipment is to be found in the brochure “Linde Cryo-containers”.

Linde Liquefied Nitrogen (LIN) Storage and transportation containers

L 2005 to L 2100

Super-vacuum-insulated containers in upright construction are available for the storage and transportation of liquefied nitrogen. They are made of alloyed aluminum (lacquered) and equipped with a simple sealing cap. The containers are intended for in-house use, but are also approved for transportation on public roads in an unpressurized state.

A wheeled base and take-off are also offered for transportation, transfusing and withdrawal - further information on request.

B 2002 to B 2036

Linde also offers super-vacuum-insulated liquefied nitrogen containers in upright construction with sample holders for the safe long-term storage of various samples at very low tempe- ratures. The containers are made of alloyed aluminum (lacquered) and equipped with a simple sealing cap. They are intended for in-house use, but are also approved for transportation on public roads in an unpressurized state.

Cryo-containers for cryogenically liquefied gases

112 Containers for Specialty Gases

Specifications Type of container L 2005 L 2012 L 2025 L 2035 L 2050 L 2100 Geom. volume l 5.5 12.4 26 35 50 100 Operating pressure max.bar 1.0 1.0 1.0 1.0 1.0 0.65 Tare weight kg 4.4 8.1 10 15 17 32 Gross weight kg 8.8 18.1 31 41.5 57.5 113 Vaporization rate (stat.) %/d 2.4 1.2 0.8 0.7 0.6 0.8 Neck outlet no no DN 50 KF DN 50 KF DN 50 KF DN 50 KF Overall height cm 49.4 60 68.4 59.1 67.5 103.5 Diameter cm 24.5 31 39.5 48 50 50

Specifications Long-term freezing containers High-capacity freezing containers Type of container B 2002 B 2003 B 2008 B 2011 B 2020 B 2036 B 2015 B 2016 B 2021 B 2030 B 2035 Geom. volume l2 4.1 8.6 12 21.7 35.9 15.8 16.4 21.2 29.4 35.9

Tare weight (without canister) kg 2.7 4.2 7.1 8.1 9.8 16 8.1 9.2 10.9 12.9 14.7

Gross weight (without canister) kg 4.3 7.5 14 17.8 27.2 45 20.8 22.4 28.1 36.7 43.7 Overall height mm 407 433 533 623 660 652 623 449 482 552 688 Outside diameter mm 190 251 310 310 395 480 310 450 480 480 480 Neck diameter mm 32 51 51 51 51 51 89 51 89 89 89 Vaporization rate (stat.) %/d 0.08 0.10 0.09 0.09 0.09 0.09 0.25 0.13 0.22 0.23 0.17 Stat. holding time d254295133 238 365 63 120 96 127 211 Number of ampoule-holder levels 11122211112 Canister height mm 110 110 110 270 270 270 270 110 110 110 110 270 Canister diameter mm 27 38 38 38 38 38 66 38 66 66 66 Canister number 36666669999 6

Information on accessories like ampoules, ampoule holders and roller base, etc. on request.

113 Liquid helium for cooling of superconductive magnets

Filling of an MR tomograph (MR = magnetic resonance) with liquid helium

114 Containers for Specialty Gases

Linde Liquid Helium (LHe) Pressurization systems, consisting of a pressurized gas Storage and transportation container cylinder and pressure regulator as well as transfer siphon, are offered for the transfusing of liquid helium. Super-vacuum-insulated containers are available for the storage and transportation of liquid helium (see table). They In addition to the standard containers, containers with are made of non-magnetic cryogenic steel or alloyed alumi- built-in withdrawal dip tube, level meter and electric own num. With their four rotatable wheels, the containers can be pressurization system as well as various items of equipment transported to any point of use. The containers are equipped for simplified LHe transfer are offered. with safety fittings and, depending on the type of approval, are suitable for in-house use or transportation of LHe by road or For further information see the brochure “Liquefied Helium rail as well as by air after a small change to the fittings. In - Indispensable for Research, Technology and Medicine”. dependence on the diameter of the transfusing siphon, the appropriate crimp union is flanged on to the container in the filling works.

Specifications CS 30 CS 60 CS 100 CS 250 ✦ CS 450 ✦ LHe LHe LHe LHe LHe Volume l 30 60 100 250 450 Operating pressure bar 1.2 1.2 1.2 1.2 1.2 Tare weight approx. kg 78.25 95.5 122.5 190 315 ✩ ------392 Contents: approx. kg3.75 7.50 12.50 31.25 56.25 Vaporization rate (stat.) %/d 3.0 2.2 1.5 1.2 0.9 ✦ ------1.5 1.2 Neck outlet KF 40 40 40 50 50 Neck diameter (d) mm 32 32 32 50 50 Overall height mm 1210 1330 1360 1750 1754 ✩ ------1920 Overall diameter mm 550 600 700 750 1050 Dip depth mm 940 1070 1140 1475 1300 Wheel diameter mm 100 125 125 160 200 Siphon opening Small flange DN 25 with crimp union alternatively (10/12/12.7/16/18 mm); connection coupling for a transfer line (✦);

✩ With forklift pockets ✦ Also available with built-in withdrawal dip tube and/or electric pressurization system

115 116 Information, Tables and Diagrams

117 118 Information,Tables and Diagrams

Regulations governing the handling of compressed gases

To ensure proper safety, a number of rules and regulations must be observed when handling compressed gases. In this context, “handling compressed gases” will be deemed to mean the transportation, storage, provision and emptying of gas containers as well as the employment of the compressed gases themselves. The following information on this topic contains the most frequently applicable rules, regulations, instructions and other publications.

The latest edition of the publication in question is definitive.

In view of the wide application range of compressed gases, however, it is not possible to provide an exhaustive enumeration here. It is therefore the responsibility of every user to ensure that the pertinent rules and regulations are observed. Definitive information can be obtained from the competent local authorities. Needless to say that the local Linde representative and/or the Export Head Office will also provide assistance.

The following regulations are applicable for the transportation of compressed gases

German International Technische Regeln Druckgase (TRG) (Technical Rules for Compressed Gases) Road GGVS ADR Acetylenverordnung (AcetV) (Acetylene Directive) – Applies only with respect to the emptying and provision Rail GGVE RID of acetylene cylinders Berufsgenossenschaftliches Vorschriften- und Regelwerk Sea GGVSee IMDG (BGVR) – BG-Vorschriften (BGV) Air ICAO ICAO/IATA e.g. – „Allgemeine Vorschriften“ (BGV A1) – „Gase“ (BGV B6) Mail Postal Code Postal Code – „Sauerstoff“ (BGV B7) – BG-Regeln (BGR) In-house Pressure Vessel Directive e.g. – „Laboratorien“ (BGR 120) (Druckbehälter-Verordnung) – BG-Informationen (BGI) – BG-Grundsätze (BGG) Various rules and regulations - depending on the industry Gefahrstoffverordnung in questions - apply for the storage, provision and empty- (Hazardous Substances Directive) ing of pressure containers and for the employment of MAK-Werte-Liste compressed gases (in the FRG), for example (List of threshold limit values)

Druckbehälter-Verordnung (DruckbehV) (Pressure Vessel Directive)

119 Safety instructions for the handling of com- Gases that are dissolved under pressure are dissolved in a pressed gases liquid under an overpressure.

Gases can only be handled safely if their specific pro- Pressurized gas containers perties are taken into consideration and safe handling of the pressurized containers is ensured, by competent and trained The following safety instructions are practical recommen- personnel. dations for the safe handling of pressurized gas containers. They are intended to supplement official safety regulations and Many of the gases and gas mixtures that are contained in not as a substitute for them. These safety instructions apply to this catalog are hazardous substances in terms of § 4 of the all pressurized gas containers containing gases, e.g.: German Hazardous Substances Directive (Gefahrstoffverord- nung). They are flammable, oxidizing, toxic, spontaneously Steel cylinders flammable or corrosive. In some cases these products can Aluminum cylinders and possess several hazardous properties in parallel. Even an inert Pressure cans, e.g. Linde minican® gas, for example, which is not a hazardous substance in terms of the Hazardous Substances Directive, can have an Identification asphyxiating effect if it replaces the oxygen in breathing air. The identification marking provides information pertaining The products can be supplied compressed in the gaseous to the contents of the pressurized gas containers. In the case phase, liquefied under pressure, cryogenic liquefied or dis- of cylinders the marking is in the form of embossments, prin- solved under pressure.

Definitions

Mixed with air or other oxidizing substances, flammable gases have a flammable range.

Gases that have an ignition temperature of less than 100 °C are termed spontaneously flammable. These gases can ignite already at room temperature when mixed with air or oxygen.

Gases are termed oxidizing if they propagate the combustion of substances.

Corrosive gases have a highly aggressive effect on many materials, especially metals, and have a damaging effect on skin and mucous membranes.

A gas is considered to be toxic if even minute concentra- ted lettering and labels. In the case of calibration gas mixtures tions can result in significant health hazards or death after additional information can be seen from the certificate of ana- being inhaled by humans or coming into contact with their lysis that accompanies the gas. skin. Equipment Liquefied gases are gases that can be liquefied under pressure at room temperature. To prevent pressurized containers from being confused, they are equipped with different, gas-specific valve outlets. Cryogenic liquefied gases are gases which remain in the Which gases are equipped with which valve outlets can be liquid phase under low temperature. seen from DIN 477 and ISO 5145 (see page 159). The valves are protected by means of cylinder protection caps or appro-

120 Information,Tables and Diagrams

priate packaging. If the valves on the pressurized containers “Transportation of gas cylinders by motor vehicle” provide are equipped with thread protection caps, they must be in further information on the subject of transporting cylinders on place when the cylinders are being transported or stored. public roads.

Periodic inspections Storage

Compliance with the inspection dates is monitored by the Whenever possible, upright and secured against tipping Linde filling plants. Gas may continue to be withdrawn from over. pressurized containers whose inspection date has expired. This involves no safety hazard. Gases from “expired cylinders” Horizontally, if secured against rolling away. Horizontal can continue to be employed without any reduction in quality. storage is not permissible in the case of liquefied gases. However, pressurized containers whose inspection date has expired may only be transported on public roads if they are No storage in passageways, traffic areas, corridors or being taken for inspection. stairwells to make sure that evacuation routes are always kept free. Transportation No storage together with flammable substances, e.g. In-house, pressurized containers should preferably be paper, flammable liquids. transported with cylinder trucks, or in suitable carriers in the case of small containers. Linde Safety Instructions No. 11 Storage areas for pressurized containers must be suffi- ciently ventilated.

To avoid impairing the quality of container and gas, pressurized containers should be protected against the effects of the weather (rain, snow), physical damage and dirt. Protection against sunshine is not required.

Pressurized containers should not be placed in the direct vicinity of sources of heat, e.g. radiators and furnaces. They must be stored at a sufficient distance from radiators to ensure that a surface temperature of 50 °C is not exceeded.

121 Safe handling and withdrawal Do not use any slipping agents, lubricants or tools for this purpose. Pressurized gas containers may only be handled by trained personnel. Some of the training aids that are available The connection should be checked for leaks by means of include the Linde Safety Instructions and product informa- suitable methods (e.g. leak spray or helium leak test). tion leaflets. The information provided in these publications includes physical and safety data as well as information Turn the handwheel of the pressure regulator slowly to the pertaining to toxicology and ecology. right until the desired outlet pressure has been reached.

When in use, cylinders must be protected against tipping Close the cylinder valve during interruptions in gas with- over. drawal.

Cylinders containing liquefied gases must be drained Return the pressurized containers with a slight overpres- upright. Exception: if withdrawal in the liquid phase is de- sure. This ensures that no foreign matter will be able to sired, e.g. when equipped with a downstream evaporator. penetrate into the cylinder.

For reasons of safety and quality, it is urgently recommen- Pressurized containers with obvious defects must be clear- ded that gas never be filled from one pressurized container ly marked and returned to the Linde filling plant in into another, regardless of the purpose. question.

Only those pressurized containers that are required for uninterrupted continuation of the work should be located at the point of use.

Before pressurized containers are connected, it is necessary to ensure that the gas cannot flow back into the cylinders from the piping system.

Should it be necessary to increase the pressure through heating in order to withdraw gas from pressurized containers that are filled with liquefied gases, the containers may only be heated to a maximum temperature of 50 °C. Heating should be effected with hot water or air, never with an exposed flame.

After the valve outlet cap has been removed, avoid contamination of the valve outlet and immediately connect a pressure regulator or cylinder connection valve.

Linde offers pressure regulators with matching connections.

Before opening the cylinder valve, the handwheel on the pressure regulator must be backed off all the way (pressure regulator closed).

Open the cylinder valve smoothly (open slowly in the case of oxygen cylinders). One turn of the handwheel opens the valve fully.

122 Information,Tables and Diagrams

Actions in the event of fire

Notify the fire department.

If at all possible, remove pressurized containers from the area endangered by the fire. If this is not possible, cool the pressurized containers by spraying them with water from a protected location.

Inform the fire department of the presence of pressurized containers in the area endangered by fire.

First aid Publications The following first aid information can be employed in the majority of all cases. However, the substance that was res- The publications listed below are available from the local ponsible for the emergency can also necessitate additional or Linde representative and/or the Export Head Office. These entirely different first aid measures. safety instructions, safety data sheets and special leaflets are constantly being updated and supplemented. If a corrosive gas comes into contact with the eyes, flush generously with water immediately (for at least 15 min.). Safety data sheets for gases as per DIN 52900

If a corrosive gas comes into contact with the skin, flush General safety instructions the afflicted area generously with water (for at least No. 1: Handling of cryogenic liquefied gases 15 min.). Remove contaminated clothing. No. 2: How to prevent acetylene cylinders from exploding No. 3: Oxygen deficiency If a toxic gas is inhaled, move the victim to fresh air imme- No. 4: Oxygen enrichment diately. The victim must be kept warm and calm. If breath- No. 5: Cryogenic burns and frostbite ing has ceased, perform artificial respiration (CPR). If No. 7: Handling pressurized gas containers breathing is difficult, additional oxygen should be adminis- No. 8: Transferring/ Filling gas cylinders tered by an appropriately trained person. No. 10: Handling of acetylene No. 11: Transportation gas containers in motorised vehicles If an asphyxiating gas has been inhaled, move the victim to (replaces nos. 6 and 9)

fresh air and keep the victim warm and calm there. If No. 12: Working with Carbon dioxide (CO2) breathing has ceased, perform artificial respiration (CPR). No. 13: Handling of hydrogen No. 14: Handling of liquefied gases Should a cryogenic liquefied gas come into contact with No. 15: Transportating gas cylinders with toxic gases the body, it will evaporate very rapidly, absorbing large No. 16: Handling of cryogenic liquefied nitrogen in mobile quantities of heat from the victim's tissue and causing cryo-containers “cryogenic burns”. Carefully flush the afflicted are with No. 17: Handling leaking inert gas cylinders lukewarm water. Additional information is provided in No. 18: Handling pressurized gases Safety Instructions No. 5 “Cryogenic burns and frostbite”. IGV brochure: Transportation of gas cylinders, pallets and In all of the above cases a physician should be notified bundles on road vehicles immediately.

123 Information,Tables and Diagrams

Where to obtain cited regulations and other publications Title Source GGVS: Verordnung über die innerstaatliche und grenzüberschreitende Deutsche Bundes-Verlag GmbH Beförderung gefährlicher Güter auf Straßen mit Anlagen A + B Postfach 120380, 53045 Bonn ADR: European Agreement of the Transport of Dangerous Goods by Road Deutsche Bundes-Verlag GmbH GGVE: Verordnung über die innerstaatliche und grenzüberschreitende Deutsche Bahn AG Beförderung gefährlicher Güter mit der Eisenbahn Dokumentation und Logistik Stuttgarter Str. 61a 76137 Karlsruhe RID: Ordnung für die internationale Eisenbahnbeförderung Deutsche Bahn AG gefährlicher Güter Dokumentation und Logistik GGVSee: Gefahrgutverordnung See K. O. Storck-Verlag Stahltwiete 7, 22671 Hamburg IMDG: International Maritime Dangerous Goods Code K. O. Storck-Verlag, and Int. Maritime Organization, Publications Section, 4 Albert Embankment, London SE1 7SR ICAO: International Civil Aviation Organization: Technical Instructions K. O. Storck-Verlag for the Safe Transport of Dangerous Goods by Air. DOC 9284-AN/905 Postal Code: Postordnung vom 16.5.1953 (Bundesgesetzblatt Teil I, S. 341) Bundesministerium für das Post- und Fernmeldewesen Postfach, 53010 Bonn DruckbehV: Verordnung über Druckbehälter, Druckgasbehälter und Füllanlagen Carl Heymanns Verlag KG Luxemburgerstr. 449, 50939 Köln TRG: Technische Regeln Druckgase Carl Heymanns Verlag KG AcetV: Verordnung über Acetylenanlagen und Calciumcarbidlager Carl Heymanns Verlag KG TRAC: Technische Regeln für Acetylenanlagen und Calciumcarbidanlagen Carl Heymanns Verlag KG BGVR: Berufsgenossenschaftliches Vorschriften- und Regelwerk Carl Heymanns Verlag KG (Vorschriften, Regeln, Informationen, Grundsätze) MAK-Werte-Liste Carl Heymanns Verlag KG GefStoffV: Verordnung zum Schutz vor gefährlichen Stoffen Carl Heymanns Verlag KG DIN standards Beuth Verlag GmbH Burggrafenstr. 6, 12623 Berlin VDI guidelines Beuth Verlag GmbH Notices “Gefährliche Arbeitsstoffe”: Kühn-Birett, loose-leaf collection ecomet-Verlagsgesellschaft mbH with updating service Justus-von-Liebig-Str. 1 86899 Landsberg/Lech Safety data sheets TRG Linde representative/Export Head Office Safety instructions Linde representative/Export Head Office

124 Information, Tables and Diagrams

Characteristics of flammable gases

Name of Chemical Explosion range in air Ignition temperature Heat of combustion gross value gas symbol (20 °C, 1 bar) % °C kJ/kg

Acetylene C2H2 2.4 – 83.0 305 49 912 Ammonia NH3 15.0 – 30.2 630 22 254 Arsine AsH3 3.9 – 77.8 285

1,3-Butadiene C4H6 1.4 – 16.3 415 46 989 Butane C4H10 1.5 – 8.5 365 49 500 1-Butene C4H8 1.6 – 10.0 440 48 426

Carbon monoxide CO 12.5 – 74.0 620 10 103

Chloromethane CH3Cl 7.6 – 19.0 625

Deuterium D2 6.6 – 79.6 560 Diborane B2H6 Spontaneously flammable Dichlorosilane SiH2Cl2 2.5 – 80.0 185 Difluoromethane CH2F2 13.1 – 28.4 648 Dimethylether C2H6O 3.0 – 18.6 235 31 702 2,2-Dimethylpropane C5H12 1.3 – 7.5 450 48 740

Ethane C2H6 3.0 – 15.5 515 51 877 Ethene C2H4 2.7 – 34.0 425 50 283 Ethylene oxide C2H4O 2.6 – 100 440 29 707

Hydrogen H2 4.0 – 75.6 560 141 800 Hydrogen sulfide H2S 4.3 – 45.5 270 16 500

Isobutane C4H10 1.8 – 8.5 460 49 356 Isobutene C4H8 1.6 – 10.0 465 48 123

Methane CH4 4.5 – 15.0 595 55 498

Phosphine PH3 Spontaneously flammable Propane C3H8 2.1 – 9.5 470 50 345 Propene C3H6 2.0 – 11.1 455 48 918

Silane SiH4 Spontaneously flammable

Vinyl chloride C2H3Cl 3.8 – 31.0 435 19 167

125 Compatibility of gases with materials

Name of Character- Recommended material for Name of Character- Recommended material for gas istics Containers and Seals and gas istics Containers and Seals and fittings hoses fittings hoses .E. .E. F F .D.F. .C. .C. .D.F. V V oxic oxic .C.T.F.E. .E. .E. .C.T.F.E. P P. T Flammable Spont. flammable Corrosive Al Cu Ms St SS Monel But.-K. C.R. P P.V Chlor.P.E. P.T. T Flammable Spont. flammable Corrosive Al Cu Ms St SS Monel But.-K. C.R. P P.V Chlor.P.E. P.T. P P. Acetylene B – – Hexafluoroethane Ammonia G B –– Hydrogen B Argon Hydrogen sulfide G B K –– Arsine G B Isobutane B – Boron trichloride G K – – – –– Isobutene B – Boron trifluoride G K – – – Krypton Ethylene bromide G B –– – Methane B – Bromomethane G B –– Methylamine G B K –– Bromotrifluoromethane ––– Methylmercaptan G B –– Hydrogen bromide G K – – –– Methylvinylether B 1,3-Butadiene G B Neon Butane B – Nitrogen 1-Butene B – Nitrogen dioxide G K –– – cis-2-Butene B – – Nitric oxide G –– trans-2-Butene B – – Nitrogen trifluoride G ––– Carbon dioxide Octafluorocyclobutane Carbon monoxide G B –– Octafluoropropane Chlorine G K – – – ––– Oxygen Chlorodifluoroethane B Phosgene G K Chlorodifluoromethane Phosphine G S Chloroethane B – – Propane B Chloromethane G B – –– Propene B – Chloropentafluoroethane Sulfur dioxide G K Chlorotrifluoroethylene G B – – – –– Sulfur hexafluoride Chlorotrifluoromethane Silane S Hydrogen chloride G K – –– Tetrafluoromethane Cyclopropane B Trifluoromethane Deuterium B Trimethylamine G B K –– Diborane G S – Vinyl chloride G B –– Dichlorodifluoromethane Xenon Dichlorofluoromethane G Dichlorsilane G B K Legend: 1,2-Dichlorotetra- „“ Suitable fluoroethane „–“ Not suitable 1,1-Difluoroethane B „“ Suitable with Cu content < 70 % Difluoromethane B „“ Depends on condition (moisture?); Dimethylamine G B K –– or no ISO recommendation Dimethylether B –– „ “ No known literature 2,2-Dimethylpropane B – Nitrous oxide Abbreviations for materials: Ethane B But.-K. = Butyl rubber Ethene B C.R. = Chlorobutadiene rubber Ethylamine G B K –– (e.g. Neoprene, Chloroprene) Ethylene oxide G B – – – –– P.E. = Polyethylene Fluorine G K ––––– P. V.C. = Polyvinyl Chloride Chlor.P.E. = Chlorinated polyether (e.g. Penton) Fluoromethane B P. T.F.E. = Polytetrafluorethylene (e.g. Teflon) Helium P.C.T.F.E. = Polytrifluorochloroethylene (e.g. Kel-F) Helium-3 P. V.D.F. = Polyvinylidenefluoride

126 Information, Tables and Diagrams

Dew point/water content of gases

The water content of gases can be expressed both in The following table contains the respective values. terms of concentrations as well as by the dew point of the gases. Dew point Water Content Dew point Water Content (at 1.013 bar) (at 1.013 bar) (at 1.013 bar) (at 1.013 bar) ¡C ppm mg/m3 ¡C ppm mg/m3 -90 0.092 0.071 -34 246 189 -88 0.134 0.103 -32 340 261 -86 0.184 0.141 -30 376 289 -84 0.263 0.202 -28 462 354 -82 0.389 0.293 -26 566 435 -80 0.526 0.404 -24 691 531 -78 0.747 0.574 -22 841 646 -76 1.01 0.776 -20 1020 783 -74 1.38 1.06 -18 1230 945 -72 1.88 1.44 -16 1498 1146 -70 2.55 1.96 -14 1790 1375 -68 3.44 2.64 -12 2140 1640 -66 4.60 3.53 -10 2560 1965 -64 6.10 4.68 - 8 3060 2350 -62 8.07 6.20 - 6 3640 2800 -60 10.6 8.15 - 4 4320 3320 -58 14.0 10.8 - 2 5100 3920 -56 18.3 14.1 0 6020 4620 -54 23.4 18.0 2 6953 5590 -52 31.1 23.9 4 8022 6450 -50 39.4 30.2 6 9216 7410 -48 49.7 38.2 8 10584 8510 -46 63.2 48.5 10 12114 9740 -44 80.0 61.5 12 13806 11100 -42 101.0 77.6 14 15796 12700 -40 127 97.5 16 17885 14400 -38 159 122 18 20396 16400 -36 198 152 20 23020 18500

127 Physical properties of gases

Gas Chemical Molar Tripel or melting point (*) (at 1.013 bar) Boiling point (at 1.013 bar) Symbol mass Name of gas Temperature Vapor Latent Temperature Latent heat of pressure heat of vaporization fusion

g/mol K °C bar kJ/kg K °C kJ/kg kJ/m3 under standard conditions

Acetylene C2H2 26.038 192.35 -80.8 1.282 96.46 189.12 -84.03 801.9 942.0 Subl. temp. Subl. temp.. Subl. heat Subl. heat

Ammonia NH3 17.03 195.41 -77.74 0.0607 331.6 239.75 -33.4 1371.2 1057.7

Argon Ar 39.948 83.78 -189.37 0.687 29.3 87.29 -185.86 160.81 286.82

Arsine AsH3 77.95 156.15 -117 0.03 15.38 210.67 -62.48 214.3

Boron trichloride BCl3 117.17 165.65 -107.5 < 0.001 17.9 285.65 12.5 203.48 N/A

Boron trifluoride BF3 67.805 144.45 -128.7 0.07 62.112 172.85 -100.3 278.8 839.3

Bromomethane CH3Br 94.939 179.49 -93.66 0.002 62.74 276.71 3.56 252.05 N/A

Bromotrifluoromethane R 13 B1 CBrF3 148.93 *105.37 *-167.78 - 215.35 -57.8 121.42 864.5

1.3-Butadiene C4H6 54.09 164.23 -108.92 0.00069 147.1 268.65 -4.5 417.8 1037.6 . -6 Butane C4H10 58.123 134.86 -138.29 4 10 80.22 272.65 -0.5 385.6 1064.3

1-Butene C4H8 56.107 *87.80 *-185.35 68.62 266.9 -6.25 390.6 1019.3 . -6 cis-2-Butene C4H8 56.107 134.15 -138.9 1.1 10 130.3 276.87 3.72 416.37 N/A

trans-2-Butene C4H8 56.107 167.65 -105.5 0.00054 174 274.03 0.88 405.7 N/A

Carbon dioxide CO2 44.01 216.58 -56.57 5.185 196.65 194. 65 -78.5 573.02 1129 Subl. temp. Subl. temp. Subl. heat Subl. heat Carbon monoxide CO 28.01 68.14 -205.01 0.1535 29.89 81.62 -191.53 215.2 265.6

Chlorine Cl2 70.906 172.15 -101 0.014 90.44 239.05 -34.1 288.05 935

1-Chloro-1.1-difluoroethane R 142 b C2H3ClF2 100.495 *142.35 *-130.80 26.75 263.35 -9.8 222.95 1024

Chlorodifluoromethane R 22 CHClF2 86.48 *113.15 *-160.0 - 232.37 -40.78 234.32 901

Chloroethane R 160 C2H5Cl 64.514 *134.85 *-138.30 69.04 285.43 12.28 382.2 N/A

Chloromethane CH3Cl 50.488 175.44 -97.71 0.0087 127.45 249.39 -23.76 428.31 965.4

Chloropentafluoroethane R 115 C2ClF5 154.48 167.15 -106 0.01 - 235.15 -38 1314 906.1

Chlorotrifluoroethene R 1113 C2ClF3 116.47 *115.05 *-158.10 47.73 244.79 -28.36 178.36 985.7

Chlorotrifluoromethane R 13 CClF3 104.46 *92.15 *-181.0 - 191.65 -81.5 150.1 700

Cyclopropane C3H6 42.08 *145.53 *-127.62 129.4 240.35 -32.8 477.3 898.9

Deuterium D2 4.029 18.72 -254.43 0.171 48.8 23.57 -249.58 304.4 534.4 . -4 Diborane B2H6 27.67 108.15 -165 6.1 10 161.6 180.65 -92.5 516.8 650.7

Dichlorodifluoromethane R 12 CCl2F2 120.93 *115.37 *-157.78 34.33 243.37 -29.78 167.22 902.7

Dichlorofluoromethane R 21 CHCI2F 102.92 *138.20 *-134.95 - 282.05 8.9 242.42 N/A

Dichlorsilane SiH2Cl2 101.01 151.15 -122 < 0.0001 249.5 281.55 8.4 249.5 N/A

1.2-Dichlorotetrafluoroethane R 114 C2Cl2F4 170.93 *179.15 *-94.0 - 276.75 3.6 136.9 N/A

1.1-Difluoroethane R 152a C2H4F2 66.05 *156.15 *-117.0 - 248.15 -25 326.6 962

Difluoromethane CH2F2 52.02 221.5 -51.65 360.76

Dimethylamine C2H7N 45.084 180.95 -92.2 0.001 131.88 280.55 7.4 587.83 N/A

Dimethylether C2H6O 46.069 *132.15 *-141.0 111.41 248.33 -24.82 467.2 960.8

2.2-Dimethylpropane C5H12 72.15 *256.58 *-16.57 45.78 282.65 9.5 315.56 N/A . -6 Ethane C2H6 30.069 89.28 -183.27 11 10 95.04 184.47 -88.68 488.76 652.3

Ethylamine C2H7N 45.084 192.15 -81 0.0015 603 289.75 16.6 602.9 N/A

Ethylene C2H4 28.054 103.97 -169.43 0.0012 119.45 169.43 -103.72 482.86 608.9

Ethylene bromide C2H3Br 106.955 135.15 -138 < 0.001 215.2 288.95 15.8 242.8 N/A

Ethylene oxide C2H4O 44.053 *160.60 *-112.55 117.48 283.6 10.45 579.8 N/A

128 Information, Tables and Diagrams

Critical point Liquid phase Gaseous phase

Temperature Pressure Density Density Density Vapor Specific heat Density Specific Thermal Bunsen’s at boiling at 20 °C pressure at boiling point at 1 bar heat at conductivity coefficient point at 20 °C and 15 °C 1.013 bar at 1 bar of solubility at and 25 °C and 15 °C at 1.013 bar 1.013 bar and 20 °C

K°Cbar g/l g/l g/l bar kJ/kg . K kg/m3 kJ/kg . K µW/cm . Kl (gas)/kg (water)

308.33 35.18 61.91 230.8 420 397 43.15 1.1 1.685 200.6 1.047 (at 20 °C) (at 15.6 °C) 405.55 132.4 114.8 235 682 610 8.59 4.47 0.722 2.16 247.0 685.7 (at 25 °C) 150.75 -122.4 48.98 538 1394 N/A N/A 1.05 1.669 0.519 161 0.034 373.05 99.9 66 - 1634 15 3.253 0.494 156.1 0.23 451.95 178.8 38.7 790 1346 1330 1.6 4.913 0.532 79.9 Hydrolized 260.95 -12.2 49.85 591 1589 N/A N/A 1.52 2.867 0.745 182.9 1.057 (at 0 °C) 467.15 194 52.3 577.1 1721 1662 1.9 4.069 0.446 79.5 3.75 340.15 67 39.85 744.8 1992 1570 14.2 0.871 6.3 0.469 80.4 0.0442 425.15 152 43.22 245 650 620 2.48 2.13 2.33 1.47 168.7 0.202 425.16 152.01 37.96 228 601.4 580 2.06 2.36 2.522 1.66 149 0.034 419.55 146.4 39.25 233 630 605 2.62 2.24 2.417 1.53 148 - 435.55 162.4 42.07 239 641 620 1.8 2.23 2.424 1.4 140 0.158 428.61 155.46 40.8 238 626 604 2.05 2.15 (at 0 °C) 2.426 1.57 140.7 - 304.21 31.06 73.825 466 1177.8 776.2 57.29 1.848 1.848 0.85 157 0.87 (at Tr.-P.) 132.91 -140.24 34.99 301 788.6 N/A N/A 2.15 (at -197 °C) 1.17 1.04 241 0.0227 417.15 144 77 573 1563 1413 6.88 0.926 (at -30 °C) 3.007 0.473 84.5 2.26 410.25 137.1 41.19 435 1192.8 1193 3.08 1.235 4.29 0.848 118 0.415 369.15 96 49.36 525 1413 1211 9.22 1.01 3.67 0.657 104 0.775 460.35 187.2 52.66 331 877 894 1.33 2.758 0.971 126 0.199 416.25 143.1 66.8 353 1002.9 934 5 1.569 (at 0 °C) 2.137 0.808 105 317 353.15 80 31.6 613 1544 1310 7.93 1.315 6.598 0.687 111.8 0.0087 380.15 107 39.52 550 1464 1271 5.25 1.051 4.963 0.723 106.2 - 301.93 28.78 38.6 581 1526 929 31.8 1.03 (at -30 °C) 4.414 0.641 123 0.02 398.3 125.15 55.79 258.5 680.2 610 6.2 1.86 (at -53 °C) 1.785 1.33 139 0.999 38.35 -234.8 16.65 67.26 162.4 N/A N/A - 0.1667 5.187 1360.3 - 289.15 16 40.4 160 421 N/A N/A 2.8 1.226 2.04 106 - 385.15 112 41.15 557.4 1486 1330 5.67 0.988 (at 30 °C) 5.089 0.582 94.6 0.052 451.65 178.5 51.68 522 1397.5 1380 1.53 1.07 4.436 0.586 80.8 2.066 449.45 176.3 43.8 479 1261 1236 1.6 4.397 0.611 Hydrolized 418.85 145.7 32.63 578 1527 1472 1.83 1.0 (at 0 °C) 7.377 0.712 105 0.017 386.65 113.5 47.56 365 1011 913 5.17 2.808 1.03 139 0.706 351.55 78.4 58.3 430 1213 986 14.7 2.724 0.825 134.9 437.75 164.6 53.05 256 670.8 655 1.7 3.03 (at 2.4 °C) 1.944 1.532 159 118 400.1 126.95 52.69 271.4 734.7 661 5.31 2.24 1.964 1.428 154.1 35 (at 25 °C) 433.78 160.63 31.96 238 603.2 591 1.49 2.365 3.194 1.687 156 - 305.42 32.27 48.84 205.6 546.5 350 37.76 2.43 1.265 1.768 200 0.049 456.55 183.4 56.29 248.3 687.4 676.9 1.17 2.87 1.915 1.612 201 - 282.65 9.5 50.76 218 567.92 N/A N/A 2.42 1.178 1.54 188 0.122 463.51 190.36 68.6 692 1527 1516 1.2 4.5 0.5169 83.4 - 468.93 195.78 71.91 314 887 880 1.4 1.955 1.899 1.1 121 1.89

129 Gas Chemical Molar Tripel or melting point (*) (at 1.013 bar) Boiling point (at 1.013 bar) Symbol mass Name of gas Temperature Vapor Latent Temperature Latent heat of pressure heat of vaporization fusion

g/mol K °C bar kJ/kg K °C kJ/kg kJ/m3 under standard conditions

Fluorine F2 37.997 53.48 -219.67 0.00252 13.4 85.05 -188.1 172.12 292

Fluoromethane CH3F 34.033 *131.4 -141.75 194.74 -78.41 516 357.1 Helium He 4.0026 2.177 -270.97 0.051 3.49 4.22 -268.93 20.3 3.62 Helium-3 3He 3.016 2*10-3 -273.15 < 0.0001 - 3.19 -269.96 8.45 1.13

Hexafluoroethane R 116 C2F6 138.012 173.13 -100.02 0.265 117.2 194.95 -78.2 116.7 729

Hydrogen H2 2.016 13.95 -259.2 0.072 58.24 20.38 -252.77 454.3 40.83 Hydrogen bromide HBr 80.912 186.29 -86.86 0.299 35.4 206.43 -66.72 217.7 785.9 Hydrogen chloride HCl 36.461 158.91 -114.24 0.138 54.64 188.12 -85.03 442.94 727.4

Hydrogen sulfide H2S 34.08 187.45 -85.7 0.227 69.79 212.95 -60.2 548.47 829.7 . -5 Isobutane C4H10 58.123 113.73 -159.42 5 10 78.17 261.45 -11.7 366.8 972.9

Isobutene C4H8 56.107 *132.80 *-140.35 105.59 266.03 -7.12 400.67 1021.9 Krypton Kr 83.8 115.95 -157.2 0.731 19.51 119.8 -153.35 107.81 398.9

Methane CH4 16.043 90.68 -182.47 0.117 58.3 111.63 -161.52 510 366

Methylamine CH5N 31.057 *179.69 *-93.46 197.62 266.82 -6.33 831.5 1166.2

Methylmercaptan CH4S 48.1 *150.15 *-123.00 122.8 279.11 5.96 511.04 N/A

Methylvinylether C3H6O 58.081 *151.15 *-122.00 117.5 279.15 6 422 N/A

Neon Ne 20.179 24.55 -248.6 0.433 16.7 27.1 -246.05 88.7 77.35 Nitric oxide NO 30.006 109.55 -163.6 0.219 76.62 121.4 -151.75 461.3 608.4

Nitrogen N2 28.013 63.15 -210 0.1253 25.75 77.35 -195.8 198.7 248.48

Nitrogen dioxide/Dinitrogen tetroxide NO2/N2O4 46.0/92.01261.95 -11.2 0.186 159.52 294.25 21.1 414 N/A Nitrogen trifluoride NF3 71.002 66.36 -206.79 144.15 -129 163.1 N/A

Nitrous oxide N2O 44.013 182.34 -90.81 0.878 148.63 184.68 -88.47 376.14 732.9

Octafluorocyclobutane R C318 C4F8 200.031 233 -40.15 0.191 266.73 -6.42 116

Octafluoropropane R 218 C3F8 188.02 124.85 148.3 236.45 -36.7 104

Oxygen O2 31.999 54.35 -218.8 0.00152 13.91 90.18 -182.97 212.98 304.32

Phosgene COCl2 98.916 145.37 -127.78 < 0.001 58.046 280.7 7.55 246.8 N/A

Phosphine PH3 33.998 139.25 -133.9 0.0036 33.3 185.38 -87.77 429.4 657 . -9 Propane C3H8 44.096 85.47 -187.68 3 10 95.04 231.11 -42.04 426 854.1 . -9 Propene C3H6 42.081 87.8 -185.35 4 10 71.38 225.43 -47.72 437.94 731

Sulfur dioxide SO2 64.063 197.63 -75.52 0.0167 115.56 263.14 -10.01 389.37 1119.4

Sulfur hexafluoride SF6 146.05 222.35 -50.8 2.24 34.4 209.35 -63.80 162.2 1053.6 Subl. temp. Subl. temp. Subl. heat Subl. heat

Silane SiH4 32.118 86.75 -186.4 < 0.001 24.62 161.75 -111.4 361.2 520

Tetrafluoromethane R 14 CF4 88.01 *89.26 *-183.39 79.5 145.21 -127.94 135.7 526.1

Trifluoromethane R 23 CHF3 70.01 *118.15 *-155.00 58.2 190.97 -82.18 238.5 803.6

Trimethylamine C3H9N 59.111 *156.05 *-117.10 110.95 276.02 2.87 388.1 N/A

Vinyl chloride C2H3CI 62.499 *119.45 *-153.70 75.9 259.45 -13.7 332.8 924.6

Xenon Xe 131.3 161.35 -111.8 0.816 17.488 165.05 -108.1 96.29 564.64

130 Information, Tables and Diagrams

Critical point Liquid phase Gaseous phase

K°Cbar g/l g/l g/l bar kJ/kg . K kg/m3 kJ/kg . KµW/cm . Kl (gas)/kg (water)

144.15 -129 55.7 0.5738 1505 N/A N/A - 1.587 0.825 26.8 Forms HF 317.7 44.55 58.8 0.3 808 33 1.747 1.445 1.745 5.21 -267.94 2.29 69.4 125 N/A N/A 4.48 0.167 5.196 1482 0.0083 3.33 -269.82 1.17 41.3 59 N/A N/A 2.64 (at -271.15 °C) 0.128 - - 292.85 19.7 33 601 1608 N/A N/A 0.951 5.829 0.771 161.3 - 33.24 -239.91 12.98 30.1 70.8 N/A N/A 9.38 0.0841 14.27 1769 0.0178 363.05 89.9 85.52 807 2203 1790 21 4.2 (at 35 °C) 3.409 0.36 94.2 532.1 (at 25 °C) 324.69 51.54 83.4 420 1191 836 42.6 1.536 0.82 169 (at 25 °C) 448 373.2 100.05 89.37 346 914.9 800 17.9 1.98 1.434 1.001 139 2.582 408.13 134.98 37.2 221 593.4 557.1 3.04 2.41 (at 20 °C) 2.514 1.671 152 0.0325 417.85 144.7 40.01 234 626.2 598.63 2.68 2.3 (at 15.6 °C) 2.418 1.591 153 - 209.4 -63.75 55.02 919 2413 N/A N/A 0.535 3.507 0.247 96 0.59 190.53 -82.62 46.04 162 422.62 N/A N/A 3.43 0.671 2.22 321 0.035 430.05 156.9 74.6 216 694 662.4 3 3.28 1.329 1.612 183 757 469.95 196.8 72.33 332 886 866 1.67 7.696 (at -21°C) 2.046 1.05 130 11.25 436.75 163.6 46.66 768.4 776 1.74 2.439 1.326 147 3.86 (at 0 °C) 44.4 -228.75 27.2 484 1206 N/A N/A 1.841 (at -246.4 °C) 0.842 1.03 476 0.01 180.15 -93 64.85 520 1300 N/A N/A - 1.25 0.996 248 0.047 126.2 -146.95 33.999 314.03 808.5 N/A N/A 2.06 1.17 1.041 250 0.0156 431 157.85 101.32 550 1439 1443 0.96 - - 1.327 132 Hydrolized 233.89 -39.26 45.31 522 1540 N/A N/A 2.96 309.56 36.41 72.45 452 1222.8 788.2 50.8 - 1.853 0.879 156 0.665 388.47 115.32 27.77 616 1637 1541 2.70 8.87 0.816 67 345.05 71.9 26.8 628 1601 1345 7.7 7.99 0.5999 138.3 154.58 -118.57 50.43 436.1 1141 N/A N/A 1.69 1.337 0.919 253.6 0.31 455.16 182.01 56.74 520 1410 1285 1.52 1.017 4.184 0.582 91 Decomp. into HCl/CO2 325.05 51.9 65.3 301 740 567 34.6 0.998 1.432 1.091 163 - 369.82 96.67 42.5 217 582 500.5 8.53 2.52 1.871 1.662 167 (at 25 °C) 0.039 364.75 91.6 46.1 232.5 613.9 510 10.43 2.176 1.785 1.549 156 0.23 430.8 157.65 78.84 525 1458 1380 3.26 1.331 (at 0 °C) 2.725 0.624 91 39.4 318.69 45.54 37.59 734 1910 1439 21 0.759 6.176 0.666 131.5 0.0056 (at -50.8 °C) (at 15 °C) (at -48 °C) 269.65 -3.5 48.4 309 556 N/A N/A 1.35 1.33 178 - 227.7 -45.45 37.43 633 1603 N/A N/A 1.23 (at -80 °C) 3.692 0.71 162 0.0038 299.15 26 48.37 516 1439 816 41.6 6.5 (at 25 °C) 2.949 0.737 130.2 3.19 433.3 160.15 40.8 233 653.4 633 1.86 2.21 (at -2.7 °C) 2.552 1.553 154 180 429.65 156.5 55.9 370 970.7 920.2 3.37 1.255 2.659 0.858 75 1.07 (at 15 °C) 289.73 16.58 58.4 1110 2945 N/A N/A 3.37 5.517 0.159 55.7 0.108

131 Vapor pressure curves of various inorganic gases Vapor 100 80 60 Argon 40 Neon Carbon Monoxide 20 Deuterium

Hydrogen 10 8 6

Helium 2 Vapor pressure [ bar ]

1 0.8 Nitrogen 0.6

0.4

0.2

Oxygen 0.1 0 50 100

132 Information, Tables and Diagrams

r pressure curves of various inorganic gases 100 Hydrogen Chlorine Hydrogen Bromide 80 Carbon Dioxide Nitric Oxide 60 n Boron Trifluoride Chlorine 40 Krypton Arsine Diborane

20 Phosgene Dichlorsilane SF6 10 Boron Trichloride Sulfur Dioxide 8 Silane 6

Xenon Stickstoffdioxid 1 0.8 0.6

0.4

Hydrogen Sulfide 0.2 Ammonia

0.1 150200 250 300 350 400 450 Temperature [ K ]

133 Vapor pressure curves of various hydrocarbons Vapo 100 80

60 Methane 40

10 8 6

2 Vapor pressure [ bar ]

1 0.8 0.6

0.4

0.2

0.1 100 150 200

134 Information, Tables and Diagrams

or pressure curves of various hydrocarbons 100 Ethane 80

Ethene Acetylene Propene 60 Propane 40 Cyclopropane Dimethylether 20 Dimethylpropane 1,3-Butadiene

cis-Butene 10 8 6

l-Butene 4

Isobutene 2

Isobutane 1 0.8 0.6 Butane 0.4

trans-Butene 0.2 Methylvinylether

0.1 250 300350 400 450 Temperature [ K ]

135 Vapor pressure curves of various hydrocarbon derivatives Vapor pre 100 80 60

10 8 6

2 Vapor pressure [ bar ]

1 0.8 0.6

0.4

0.2

0.1 100 150 200

136 Information, Tables and Diagrams

essure curves of various hydrocarbon derivatives 100 Methylmercaptan Methylamine 80 R 152 R 12 R 40 R 21 60 R 23 R 22 R 13 B1 R 142 B 40 R 218 R 14 R 13 R 114 R 160 20

R 116 10 Dimethylamine 8 6

Trimethylamine Ethylene Bromide 1 0.8 Ethylene Oxide 0.6 Ethylamine 0.4

RC 318 0.2

0.1 250 300350 400 450 Temperature [ K ]

137 138 Order Processing Information and Terms and Conditions of Supply

139 140 Order processing information and terms and conditions of supply

Order processing information and terms and conditions of supply Empties should be returned freight and customs duty pre- paid to the following address, unless specified otherwise: Purchase orders, as well as any and all inquiries relating thereto, should be directed to the local Linde representative or Urban-Transport GmbH to the following address: Carl-von-Linde-Straße 25 D-85716 Unterschleissheim Linde Gas AG Germany Export Department Carl-von-Linde-Str. 25 with the following remark: D-85716 Unterschleissheim “Consignee: Linde Gas AG, Tel. INT-89-31001-336 Export Department”. FAX INT-8931001-275 www.Linde-Gas.com All deliveries are subject to our General Terms and Condi- In order to avoid time-consuming queries, all purchase tions of Supply. Gases for export are preferably supplied in orders should always contain the following data in addition to cylinders to be sold to the customers or in containers provi- the customary information: ded by the customer. If customer-owned containers are provided, their suitability for filling will be examined on the basis of • Quantity, size and contents of the containers; applicable rules and regulations as well as with regard to as well as material compatibility, which might result in longer delivery times. This procedure must also be followed in order to main- • In the case of pure gases: tain the stability of sensitive gas mixtures. Precise name, indication of the purity level in the form of the numeric key or as a percentage. All specifications, engineering data and information contained in this catalog are made to the best of our knowledge • In the case of gas mixtures and calibration gas and belief and are the same as those employed by Linde in mixtures: the performance of its own work. However, no further warran- Indication of the type of mixture (e.g. “Industrial gas mix- ty is either implied or expressed therefrom, nor the right to use ture” or “Class ... calibration gas mixture”), the name and any patents or industrial property rights which may exist. concentration of all desired components, as well as indication of the balance gas, if necessary. Abbreviations should be used only if there is no possibility of confusion, e.g. “Carbogen”, but not “Laser gas”, as various combinations are possible in this case. In the case of liquefied gas mixtures, the desired type of valve must also be indicated.

• Gases in small containers: The order number must additionally be indicated in this case.

• Gas handling equipment: Indication of the order number, if stipulated. All details shown in the corresponding narrative must be stated. In the case of gas fittings always indicate the type of gas with which they are to be employed.

141 General Terms and Conditions of Supply for Gases and Provision of Containers and Pallets

1. Transportation and handling of gases, containers and pallets 6. Terms of payment Gases, including containers and pallets, shall be shipped ex loading dock of the All invoices shall be due and payable net upon receipt. The date upon which Linde service point, at Customer's expense and risk. If picked up by Customer, payment is received by Linde shall govern the timeliness of said payment. or by shippers commissioned by Customer, Customer shall be solely responsible Should Customer be in arrears with payment, Linde shall be entitled to cease for the safe loading, off-loading and transportation thereof. Should Linde provide supply and to charge penalty interest on payments which are in default. Custo- assistance in conjunction therewith, said assistance shall be deemed to have mer shall be entitled to offset claims against Linde only in such instances in been provided in Customer's name and at Customer's risk. Customer shall save which said claims are either uncontested or final. Linde free and harmless of any and all claims which may be brought against Linde as a result of damage or injury resulting from unsafe loading. 7. Retention of title Customer shall observe the pertinent regulations governing the handling of in- The supplied goods shall remain the property of Linde until such time as any and dustrial gases, in particular job safety and accident prevention regulations, as all obligations of Customer have been satisfied in full. However, Customer shall well as generally accepted rules of good engineering practice. Appropriate infor- be entitled to dispose of said goods within the scope of its usual and customary mative literature is available at Linde service points. business operations. 2. Rented containers and pallets 8. Delay in supply Linde shall charge Customer rent, at the currently applicable rates, for Linde Should supply be delayed or prove to be impossible, Customer shall be entitled containers and/or pallets which Linde may provide to Customer. Customer's sig- to rescind the agreement after having stipulated a reasonable period of grace to nature on the delivery voucher shall also be deemed to constitute the execution Linde and after said period of grace shall have expired without supply having of the rental agreement for said containers and/or pallets. An additional long- been effected. Indemnification for damages resulting from said delay in supply term rental charge shall be made for Linde containers which remain in Custo- shall be made only in instances of malicious intent or gross negligence. mer's possession for periods in excess of three months. The currently applicable 9. Warranty rental rates are to be found in notices displayed at the Linde service points. Should a consignment be faulty or damaged, Customer shall make written notifi- Customer shall be liable for loss of or damage to the Linde containers and/or cation thereof to the Linde service point without delay. Faulty or damaged con- pallets which are provided to Customer. Said containers and/or pallets may not tainers and/or pallets shall not be used; said faulty or damaged containers be passed on to third parties. and/or pallets shall be conspicuously marked and returned immediately. After being emptied, Customer shall immediately return the rented containers If a gas consignment is faulty or deviates from the type or quantity ordered, and/or pallets to the Linde service point, at Customer's expense and risk; said Customer shall be entitled, at its discretion, to demand free replacement corre- return shall be effected during the normal working hours of the service point. sponding to the scope of the consignment not executed contractually, a reduc- Return shall be deemed to have been effected only if a written receipt is issued tion in the purchase price or cancellation of the contract. therefor by the Linde service point. 10. Liability The inventory of Linde containers and/or pallets in Customer's possession that is indicated in the rental invoice and/or the statement of account for containers Any claims for compensation by Customer for non-contractual supply and ser- shall be verified by Customer for correctness. Should no objection be made to vice or breach of Linde's obligation to exercise due care are, regardless of the Linde within one month of receipt of the invoice or statement of account, the legal basis, restricted to the value of the consignment. indicated inventory shall be deemed to have been acknowledged by Customer. This restriction does not apply to damages caused by intent, gross negligence or Said invoice or statement of account shall serve as a confirmation of balance. lack of warranted qualities or for damages for which Linde is liable in terms of Customer shall not be entitled to withhold said containers and/or pallets. product liability law. 3. Security deposit 11. Force majeure Any and all acts of force majeure or other acts beyond the control of the affected Linde shall be entitled to require a non-interest-bearing security deposit for Lin- part, such as interruptions of operations, traffic, transportation or power, as well de containers and/or pallets which have been provided to Customer, with the as strikes and lockouts, shall relieve Linde of its contractual obligations for the amount of said security deposit representing the respective replacement value duration and extent of the effects thereof. This shall also apply in instances in thereof, should, which said circumstances shall relate to subcontractors. a) Customer be in default of at least two months' rental payments; b) Customer fail to fulfil its obligations of return following termination of the rental 12. Determination of quantities agreements by Linde; Quantities stated in “m3” shall be deemed to refer to a gas at a temperature of c) Customer otherwise be in culpable breach of its contractual obligations. 15 °C and a pressure of 1 bar. No remuneration shall be made for any residues In cases of doubt, the following replacement values plus value added tax shall in containers which are accepted for return. apply: 13. Supply through third parties Per Linde cylinder for industrial gases: DM 405.00 Linde shall be entitled to have its obligations of supply satisfied by another ent- Per Linde cylinder for propane: DM 130.00 erprise. Per Linde pallet: DM 850.00 14. Court of venue Said security deposit shall be refunded upon return of the containers and/or The court of venue shall be either Munich, Federal Republic of Germany, or Cus- pallets to the service point, less any expenses which may be incurred by Linde tomer's registered place of business, at Linde's discretion, insofar as Customer for replacement, repair of damage or contamination. is a registered business, a public legal entity or a semi-governmental agency. 4. Indemnification 15. Amendments to the agreement In the event of loss of or damage to Linde containers and/or pallets, Linde shall be entitled to demand indemnification in the amount of the respective replace- Any and all amendments to the agreed terms and conditions shall be made in ment value as per Clause 3 hereof. writing. 5. Customer-owned containers 16. Invalidity Customer-owned containers which are received at the service point shall be Should a provision of this contract be or become invalid, this shall not affect the filled as per Customer's order. Customer's order shall also be deemed to include validity of the remaining provisions. any required official inspections or any repairs which may be required pursuant to applicable regulations prior to filling by the filling plants. *) *) This provision shall apply only with respect to registered businesses, if the agree- The filling order comes into being with signing of the delivery note for the emp- ment is part of their commercial operations, and with respect to public legal en- ties. Linde shall be entitled to charge for its services after carrying out the filling tities or semi-governmental agencies. order. November 1996 edition

142 Extract from the Linde Product Line

Process gases Gases for medical applications

Argon, gaseous and liquid Oxygen Oxygen, gaseous and liquid Nitrous oxide (Laughing gas) Nitrogen, gaseous and liquid Carbon dioxide Helium, gaseous and liquid Xenon Compressed air/Synthetic air Carbogen Carbon dioxide (Carbonic acid) Helium BIOGON® Sterilizing gases Shielding gases Calibration gas mixtures Synthesis gas Carbon monoxide Hydrogen, gaseous and liquid Specialty gases (see page 11)

High-purity gases Gases for metalworking Rare gases (Neon/Krypton/Xenon) Alternative refrigerants Fuel gases Calibration gas mixtures/Instrumentation gases Acetylene Gases in small containers Ethylene LNG/CNG Methane Ultra-high purity gases Propane for high technology applications Hydrogen Argon LI-PUR® Shielding gases for welding Oxygen LI-PUR® CORGON® Nitrogen LI-PUR® CRONIGON® Helium LI-PUR® VARIGON® Hydrogen LI-PUR® CRONIWIG® Electronic gases T.I.M.E. gas LASPUR® laser gases Argon Processes, plants, Helium equipment and services Carbon dioxide for gas applications Forming gases

143 9012/3 1200 - 1.3 au Printed on chlorine-free bleeched paper Food processing Application Power engineering Know-how Metallurgy andchemistry equipment and supply Application Metal working Glass Service onthespot Medicine Service Industrial cleaning pipeline supply. gases, theECOVAR bundles, tanksupplyofcryogenicliquid mer specifications:Gascylindersandcylinder economic supplysystemaccording tocusto- It goeswithoutsayingthatwecustomizean and doallthegas-related handling. hardware, andcarryouttestsforourcustomers We ic of life,helpingyoutoproduce more econom- or testingisrequired. Theyimprove thequality heating, industrialcleaning,artificialrespiration freezing ordrivingpurposes,andwhere Linde industrialgasesare usedforwelding, WithLindeGases Need It– Competence WhereYou ally andthussafeguarding yourfuture. Y offer advice,know-how, customer-specific our salesanddistributioncentre: Environmental technology Microelectronics ® supply systemand advice Competent, thorough Advice ECOVAR Pipeline a +49897446-1230 www.linde-gas.com fax +49897446-0 phone D-82049 Höllriegelskreuth Seitnerstraße 70 Headquarters Linde GasAG ® Air separationplant Tanks Production Supply Cylinders

Specialty Gases