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¥ C O M P O S I T E S ¥ Materials News from the Department of Materials Science and Engineering Spring 2000, Vol. 5, No. 1 Virginia Polytechnic Institute and State University
✦ MSE Renovates Laboratories, 2 ✦ Microelectronics Program at Virginia Tech, 6 ✦ MSE Alumni at Corning, Inc., 10 ✦ Department News, 5 Hokies ✦ Student and Alumni News, 14 Go Global!
MSE Keeps Moving Forward
The MSE Department is moving ahead on several fronts, while at the same time anticipating the hiring of a new department head. Advertisements and announce- ments of this position brought 18 applications, including a number of excellent candidates. The Search Committee for this Prof. Norman Dowling position, chaired by Steve Kampe, narrowed the field to the Julie Martin is one of several MSE Hokies who are seeing the world this year. Stories top three candidates, all of whom have been interviewed. begin on page 14. We expect to make a decision by midsummer.
We also have two open faculty positions, one for a senior donations have been received, but these fill only a part of faculty member at the professor or associate professor the need. The initial emphasis is on equipment for sample level, and the other for a junior position at the assistant or preparation and optical microscopy, and equipment is also associate level. The emphasis of these searches is to fill a being sought for polymer labs and for a metal casting gap in the ceramics area resulting from recent retirements. foundry. Additional detail is given in an article by Carlos Over 140 applications were received, again including a Suchicital found on page 2. Our major developmental number of excellent candidates. Six candidates have been effort in materials for microelectronics is described in a interviewed and are under consideration for the positions. second article by Bob Hendricks on page 6. This Search Committee is chaired by Jess Brown, who recently retired and has been granted Emeritus status. MSE needs additional space and renovation of some existing space. A detailed plan to satisfy this need has been We continue to seek donations of funds, in large or small crafted by a committee led by Bob Hendricks and Brian amounts, and of equipment, for upgrading our under- Love. Progress has been made toward finding additional graduate instructional labs. A number of significant
Moving Forward continued page 4 Page 2 Spring 2000 - The World of Materials MSE Facilities Renovations and Equipment Upgrades Carlos Suchicital
An active campaign began in On the aesthetic side of materials, the Art and Art History 1997 to renovate and upgrade the Department is planning to use the facility to cast sculp- undergraduate teaching laborato- tures. ries and several of the graduate research laboratories within the To date, the Piedmont Chapter of AFS has generously MSE Department at Virginia donated $25,000 to help build the facility, and companies Tech. Extensive restructuring has have committed to donating materials, supplies, and taken place and the undergradu- $20,000 of new spectroscopy and thermal analysis ate teaching laboratories have equipment to the project. Paul Huffman, Education Chair been relocated to the first floor of of the Piedmont Chapter, is organizing industrial support Research Prof. Carlos Holden Hall (Figure 1). With this for the project. Bill Reynolds is the point of contact in the Suchicital centralization of the teaching MSE Department. laboratories, students can ‘do their shopping’ all in one spot; that is, they can process a sample, prepare it for These fund raising activities are greatly enhanced by the further tests, and do most of those tests all on one floor. parallel fund raising activities of our advisory board in These laboratory facilities have a companion equipment collaboration with MSE faculty and the College of repair shop and supply storage located on the same floor, Engineering Development Office. Although this effort is thus optimizing the maintenance and supervision of all expected to be a long term activity, its initial targets are facilities. Metal, polymer, and ceramic laboratories are the Metals Processing, the Metallography, and the accommodated, with composites utilizing facilities as Microscopy laboratories. determined by the nature of the material under study. Our undergraduate teaching MSE teaching facilities facilities are also an integral part Further upgrades are expected to promote close interaction of the graduate research program, occur as funds become available between undergraduate and thus promoting the close interac- for remodeling and equipment graduate students. tion between both student bodies. purchase. SCHEV funds have Indeed, a large percentage of our made possible the purchase of an extruder for ceramics, a undergraduate students actively participate in graduate freeze dryer, a large volume forced air dryer, an image research projects and likewise, our graduate students analysis system, a programmable high speed saw, and a actively collaborate with the faculty in teaching under- stereoscope. In addition, equipment has been obtained graduate senior projects. The department finds this from other facilities on campus, including a 50-ton press, a interaction beneficial, healthy, and rewarding for all belt furnace, high temperature furnaces, a hammer mill, a involved. low-speed saw, and a scanning acoustic microscope. Efforts are underway by several of our faculty to obtain In addition to the above, the MSE and ECE Departments equipment donations for our teaching and research have embarked on a close collaboration to spearhead a laboratories from industrial friends. A new foundry lab is program for microelectronics education and research at being built with the support of industry and the Piedmont Virginia Tech. As a result, commonly shared undergradu- Chapter of the American Foundrymen’s Society (AFS). ate teaching and graduate research facilities are The facility will include equipment for designing castings, being set up in Whittemore, Hancock, and Holden Halls. making patterns and molds, melting and handling molten The program has among its goals to provide a source of metal, and finishing cast components. Production of small highly educated and trained graduates to the microelec- castings will be possible via commercially important tronics industry in Virginia and the nation. processes such as green sand casting, investment casting, and shell molding. Several research laboratories in the department have also benefited from the remodeling and restructuring efforts. The lab will serve a variety of users and purposes. It will The Thin-Films laboratory is now located on the third provide manufacturing lab experience for MSE majors, be floor of Holden Hall in newly upgraded rooms 306 and used for senior project work, and serve as a recruiting tool 312 and is also open to undergraduate teaching. This to attract students to the MSE major. In a research facility forms an integral part of microelectronics educa- context, the facility will make it possible for Virginia Tech tion and is known as the Device Characterization Labora- to compete for metal casting research funding available tory (DCL). Here the students will learn to assemble from the U.S. Department of Energy and from industry. sophisticated systems for the controlled deposition of Page 3 Spring 2000 - The World of Materials
To Parking Lot in Rear of Building
A6
Research Lab Foundry and A5 Metals Research 128 Laboratory
130 Ceramics Processing Lab
126
A7 X-Rays,
Stairs E&O Support Lab Staff Lab Service Lab Service 119B X-ray Lab 119 124 125 Elec
Office Elec 121 127 Metallography Lab Optical Microscopy 122 Laboratory 119
Holden Hall High Temperature Lab Service st Processing Lab 1 Floor 117 Proposed 120
Polymers Processing Lab
Figure 1. Layout of undergraduate teaching laboratories in 118 the first floor of Holden Hall (rooms outlined by dashed lines).
films or coatings by several techniques including screen- departments are represented, and more are expected to join printing, sputtering, evaporation, and chemical vapor in the effort. The research and teaching facilities are being deposition. The laboratory also has capabilities for testing set up in Holden, Hancock, and Whittemore Halls with a and evaluation of the properties characteristic of the total of 9,840 sq. ft. and include a materials analysis deposited material. This laboratory operates in conjunction laboratory with an array of analytical equipment. This with other graduate research facilities that have further analytical facility has become possible through the joint capabilities for materials development and processing of efforts of the Departments of ESM, MSE, ECE, ChemE, films/coatings, including laser ablation, sol-gel, photo- and Chemistry and will render services to the broader lithography, etc. campus community. The analytical facility will be managed by an interdepartmental committee formed by The interdisciplinary research groups in Hancock Hall Professors R. Hendricks, committee chair (MSE/ECE), have welcomed a new member into their community: the W. Reynolds (MSE), C. Suchicital (MSE), and G. Wilkes Microelectronics Materials and Processes group. This (ChemE). This effort in microelectronics is Virginia group is composed of a highly interdisciplinary selection Tech’s response to the statewide effort of the Virginia of faculty and their students. At this early stage, seven Microelectronics Consortium and includes the task of continued Page 4 Spring 2000 - The World of Materials Renovations Continued developing a comprehensive combined education and working hard to obtain other relevant imaging equipment research program in microelectronics that will be rated necessary to maintain a full-fledged laboratory dedicated among the top programs in the United States within a to bioengineering. To learn more about the CBME, feel decade. More detailed information about this effort can be free to visit the Center’s website, www.bme.vt.edu. found in “Microelectronics Education and Research at Virginia Tech” on page 6. Finally, Professor Sean Corcoran has established a nanomechanical and electrochemistry laboratory in 125 On another front, Professor Brian Love, on behalf of a Holden. This research laboratory is equipped with a larger group of faculty associated with the Center for Hysitron Nanoindentation Instrument, which is used to Biomedical Engineering (CBME), was allocated space make mechanical measurements such as micronewton (566 sq. ft.) in 106 Hancock Hall last spring. The labora- sensitivity in load and nanometer sensitivity in displace- tory, which is the physical infrastructure associated with ment. It also performs elastic modulus and hardness the Center, started as an empty shell that the faculty have measurements of surfaces at depths as shallow as 10nm. been working hard to fill up. Among the acquisitions are a There is also an atomic force microscope (AFM)/scanning ZM Model Coulter Counter for cell blood count analysis probe microscope manufactured by Digital Instruments. and for particle aggregation studies, an HP model 1050 This instrument consists of a scanning tunneling micro- High Performance Liquid Chromatography (HPLC) scope, a magnetic force microscope, and an electrochemi- Workstation for protein characterization and other cell and cal scanning tunneling microscope. This AFM permits materials characterization, and a Perkin Elmer DSC-7 and imaging of the surface of anything from an angstrom TGA-7 for more materials analysis. Professor Love has (atomic resolution) up to 100 microns in size. It is used to also purchased a couple of computers for the laboratory, study electrochemical processes in the early stages of and the students have found effective use for the instru- corrosion. mentation since acquisitions began in April. Professor Tom Diller in the Mechanical Engineering Department has Dr. Carlos Suchicital is a Research Professor in the MSE provided a blood gas analyzer which needs some minor Department, and he serves as the Facilities and Technolo- refurbishing to put it into working order. The group is gies Manager.
❖❖❖❖ Moving Forward cont’d from page 1 space for MSE, but a few details remain to be finalized If you should contact the MSE Department, and we hope before the added space is finally allocated. A major you will, you are likely to talk to Tracey Keister, our funding request to the university has also been made for Executive Secretary, who has been with us since August as the needed renovations. a welcome addition to the staff. (The MSE main office phone number is 540-231-6640.) Two other key office Enrollments at both the undergraduate and graduate levels staff members have been with us for several years: Amy have increased steadily but have not yet reached desired Hill, Fiscal Technician Senior, and Jan Doran, Student levels. We currently have 78 sophomore through senior Services Specialist. Amy has an assistant, Sharon Proffitt, undergraduate students, 19 of whom graduated this May. who recently joined us. These capable staff keep the The quality of our undergraduate students is also department office running smoothly. Research Assistant increasing, as evidenced by the numbers of Honors Professor Carlos Suchicital, our Technology and Facilities Program students, currently 2 seniors, 4 juniors, and 5 Manager, and David Berry, Technician Senior, provide sophomores. Our undergraduate program has been ably critical expertise in developing, maintaining, and led for the last few years by Ron Kander. This work has operating laboratories. recently been taken over by Lou Guido, freeing Ron to lead the major effort of preparing for the ABET under- We have also recently added a part time instructor, Kathy graduate program accrediting visit coming up in the fall of Rohr, who will teach the metallurgy laboratory course, and 2001. other courses as well. Many alumni may remember Kathy, as she did similar teaching for MSE several years ago. The new MSE Ph.D. program, replacing the former She rejoins us after working as a metallurgist in industry interdisciplinary materials Ph.D. program, began its first during the intervening period. Kathy is available on a fee year in August of 1999 and is progressing well under the basis to do small jobs of materials testing and analysis, leadership of Bill Reynolds. The initiation of this program using any of several laboratories in MSE and elsewhere on is a major step forward by the MSE Department. Graduate campus. Contact her at phone 540-231-3577, or e-mail student enrollments have increased to 19 M.S. and 28 [email protected]. ❖ Ph.D. students. Page 5 Spring 2000 - The World of Materials Department News
Alfred E. Knobler Honored This spring, Alfred E. Knobler (CERE ‘38) was among the seven inductees into the Academy of Engineering Excellence for 2000. This academy was established in 1999 by the College of Engineering and the College’s Committee of 100 Advisory Board. Academy member- ship is reserved for individuals who have a Virginia Tech Engineering degree and who have made “sustained and meritorious engineering and/or leadership contributions during their careers.”
Mr. Knobler is the CEO of The Pilgrim Glass Corporation, which he purchased in 1949 when it was a small hand- Alfred E. Knobler (center) with MSE Department Head blown-glass factory in West Virginia. Today, Pilgrim Norman Dowling (left) and College of Engineering Glass stands “at the forefront of technological advances in Dean Bill Stephenson glass production and is the only producer worldwide of American Cameo Art Glass.” Graduate Recruiting Day 2000 Prof. Brian Love reports that MSE participated in the second official College of Engineering Graduate Recruiting Day on March 25. The idea for a recruiting day arose from discussions between the Departments of MSE, ME, ChemE, and ESM. These four departments flew in a pool of approximately 60 candidates from all over the nation to meet department representatives. The MSE contingent of 14 included Virginia Tech under- graduates who are considering Tech as well as students from Northwestern, Syracuse, The Colorado School of Mines, St. Joseph’s College, The University of Virginia, Indiana University of Pennsylvania, Mount Holyoke University, and Dartmouth. A serious effort is underway to improve the level of recruiting in order to increase the size of the graduate program through an increase in U.S. applicants. Prof. Bill Reynolds gave a presentation on the Mr. Knobler with his children, Peter, a writer and workings of the graduate program, as well as highlighting Joanna, a psychiatrist. All three reside in New faculty who have current or future research openings. York City. Current graduate students organized tours of the campus and the town. Overall, the group seemed well satisfied Mr. Knobler is a man who acts on his convictions, with the presentations and the program. This type of event evidenced early in his life when, at age 15, he and his reflects very well on all who helped to make it a reality. A friends picketed Yankee Stadium to demand that the major good number of graduate recruitments are expected to leagues admit black baseball players in 1930. Today, he is result from this event. ❖ “Grandpa Alfred” at New York City Public School 42, his elementary alma mater, where he visits weekly and has Sean Corcoran was honored on provided funding and even a much needed piano. At April 5 with an Outstanding New Virginia Tech, he has endowed scholarships in the English Assistant Professor Award Department and in Materials Science and Engineering. He presented by the College of has also recently contributed funds toward the purchase of Engineering. This was one of lab equipment in the MSE Department. He serves on the three such awards in the College Committee of 100, the MSE Industry Advisory Board, and for the year 2000. In less than two he is a member of the university’s Ut Prosim Society. ❖ years, Sean has obtained four research grants totaling over $700,000, is advising under- graduate and graduate students, and receives excellent ratings in teaching evaluations. ❖ Department News continued page 19 Page 6 Spring 2000 - The World of Materials Microelectronics Education and Research at Virginia Tech (http://www.microelectronics.vt.edu) Robert W. Hendricks
Introduction The funding of $2.5 million in infrastructure to In 1994, Motorola, IBM/ establish modest clean room facilities for under- Toshiba, and Motorola/Siemens graduate and Master’s level microelectronics announced plans to locate major fabrication laboratory experiments. semiconductor fabrication plants in Virginia. Since then, two The allocation of $750,000 to establish an facilities have opened and are endowment for student scholarships. Additional both now undergoing significant allocations will result in a final endowment of expansions of production. $1.5 million by 2002. Prof. Robert Hendricks These plants will eventually employ several thousand engineers and technicians with many more in supporting Virginia Tech seeks industries. This has the potential to create a strong prominence in demand for enhanced science and engineering education microelectronics by 2010 in K-12 all the way up through the doctoral degree as well as a need for industry-academic partnerships. In response to this statewide initiative, Virginia Tech has The Virginia Microelectronics Consortium (VMEC), undertaken the task of developing a comprehensive which includes The College of William and Mary, combined education and research program in microelec- George Mason University, Old Dominion University, tronics that will be rated among the top programs in the The University of Virginia, Virginia Commonwealth United States within a decade. University, and Virginia Tech, was established to collaborate on the delivery of high quality microelec- Mission tronics undergraduate and master’s level educational The Microelectronics program at Virginia Tech will focus programs. The Commonwealth of Virginia has com- on designing and developing an undergraduate and mitted $9 million and Motorola has pledged $1 million graduate microelectronics program that will meet the toward establishing educational programs in support of following criteria: the semiconductor industry. Excellence in education, research, and outreach Broadly inclusive across the university New Virginia industry Undergraduate laboratories and research will creates demand for expanded follow a carefully designed curriculum curriculum in microelectronics Graduate research will build on the strength of diverse faculty interests yet capitalize on well- designed and maintained central processing and The Virginia Semiconductor Educational Endowment, in analytical facilities recognition of the need for program leadership and the Synergistic with sister VMEC schools and meets creation of basic facilities at participating schools, state requirements authorized these actions in 1998: Will lead Tech into national prominence in microelectronics within a decade. The creation of endowed chairs at each of the initial VMEC institutions to guide each school’s To fulfill our mission and achieve our goal of national VMEC program. Funding for these chairs, prominence in the field of microelectronics within a totaling $6 million, began in 1999 and will be decade, our program should have the following capabili- completed by 2002, when each school will ties: receive endowment income of $50,000 per year. The endowment professors will provide highly A faculty of 25-30 whose primary teaching and visible, senior leadership to implement the research interests are microelectronics; collaborative program developed by VMEC. Fully equipped clean rooms with state-of-the-art processing and characterization equipment for a wide range of materials types including Page 7 Spring 2000 - The World of Materials
Ð an 1800 sq. ft. Class 10,000 introductory - a laboratory for semiconductor device processing and device characterization clean and thin film characterization. room designed to handle 500 entering Further, from a pedagogical standpoint, we must students per year, provide a common introductory IC fabrication Ð an advanced undergraduate and graduate laboratory for teaching 500 students per year packaging teaching laboratory, and from three departments* offering four degrees; Ð the creation of centralized (common) provide advanced undergraduate and graduate advanced undergraduate and graduate education through high-quality research utilizing fabrication and characterization teaching and carefully designed common processing and research laboratories including characterization facilities; - a crystal and thin film growing laboratory capitalize on existing advanced courses in with state-of-the-art PVD, CVD, and Ð Semiconductor materials and devices MOCVD capabilities; Ð Solid state physics - a supporting materials characterization Ð Analog and power electronics laboratory with AFM, SAM, SEM, Ð Hybrid and thick film microelectronics TEM, XRD, and other advanced Ð Radio/microwave engineering capabilities; Ð RFIC design - a 5000 sq. ft. Class 100 to Class 10,000 Ð Digital/analog VLSI design clean room facility with state-of-the-art Ð Fiber-optics processing and equipment and participate in the statewide junior summer instrumentation suitable for the program; and fabrication of microelectronic devices provide outreach to community colleges and in compound semiconductors, silicon other VMEC institutions through distance carbide, and silicon; and education.
Table 1. Microelectronics-Related Faculty Name Affiliation Area of Interest
James A. Armstrong ECE VLSI design Peter Athanas ECE VLSI design Richard O. Claus ECE/MSE Self-assembled materials, optical sensors John C. Duke ESM Non-destructive evaluation Stephane Evoy ECE MEMS, nanomechanical systems, confined optoelectronic systems Festus G. Gray ECE VLSI design Louis Guido MSE/ECE GaN, SiC, optoelectronic materials & devices Wilhelm Graupner PHYS Organic optoelectronic materials Dong S. Ha ECE VLSI low-power/mixed-signal design James R. Heflin PHYS Optoelectronics, nonlinear optical devices, polymer electro-optics Robert W. Hendricks MSE/ECE Semiconductor materials, education Alex Q. Huang ECE Power semiconductor devices Mark T. Jones ECE VLSI design Guo-Quan Lu MSE/ECE Electronics packaging, microelectronic materials processing Kent A. Murphy ECE Optical fibers and sensors Douglas J. Nelson ME Heat-transfer in microelectronic circuits Sanjay Raman ECE High-frequency microelectronics, mixed-signal, MEMS Sedki Riad ECE Processing, measurement and modeling Ravi Saraf CHE Nanotechnology Subhash Sarin ISE Semiconductor manufacturing Carlos T. A. Suchicital MSE Thin-films, packaging, ceramics, free-forming, devices & instrumentation Anbo Wang ECE Optical materials and sensors, thin-films, MEMS
*The ECE, MSE, and Physics Departments have determined that students seeking degrees in their respective departments must be exposed to semiconductor processing at some point in their education. This accounts for the target of 500 students per year in the introductory laboratory. Page 8 Spring 2000 - The World of Materials Resources Centers of Excellence The resources available for developing an integrated The faculty members involved with this program have microelectronics education and research program at made a significant number of research contributions, Virginia Tech comprise its people, the space and equip- which are being used by the microelectronics industry, and ment available, and an adequate capital and operating they are investigating topics that offer great potential for budget to build and sustain the activity. Virginia Tech has improving the efficiency and effectiveness of microelec- had a long and distinguished record in certain areas of tronic systems. microelectronics. The Fiber and Electro-Optics Research Center (FEORC), the Center for Wireless Telecommunica- Virginia Tech has allocated approximately 25,000 sq. ft. tions (CWT), the Center for Power Electronics Systems of personal research space in support of their ongoing (CPES), and the Mobile and Portable Radio Group research as identified in Table 2. It is clear that our (MPRG) are internationally renowned. The work of microelectronics effort is based on a firm foundation of previous faculty in the area of ferro-electric ceramics and people, equipment, research funding, and space. hybrid microelectronics was also well known and highly regarded. Our Photonics Laboratory excels in developing As a result of a strong commitment from the Electrical and sensors for harsh environments. Computer Engineering and the Materials Science and Engineering Departments, and with similarly strong support from the Dean of Engineer- ing, we have been allocated almost 10,000 sq. ft. in three closely related buildings in which to create our Diffusion central or common teaching and Furnace research facilities and clean room. Module The combined central facilities plus personal research space dedicated to microelectronics research being performed at Virginia Tech is approximately 35,000 sq. ft.
Equipment The faculty members identified in Table 1 have assembled an impres- sive array of microelectronics processing and characterization equipment and tools. It is essential that we develop a series of common Physical Vapor Deposition Module or centralized processing and characterization facilities that will serve the entire user community.
Our current facilities (equipment and tools) come from four major Device Characterization Module sources: an ongoing grant of used Processing tools in new undergraduate semiconductor processing clean room. semiconductor manufacturing tools donated by Motorola, equipment Personnel left behind when two senior faculty There are currently twenty-two faculty members at members departed to accept department headships at other Virginia Tech whose research interests are primarily universities, equipment obtained by faculty members for microelectronics or VLSI-related. Table 1 identifies these inclusion in a materials analysis and characterization cost faculty and summarizes their research interests. This center, and equipment obtained by faculty members as a group represents a diverse multidisciplinary team from part of their ongoing research. Virginia Tech already has seven departments: Chemical Engineering, Electrical and in place approximately $12 million in processing and Computer Engineering, Engineering Science and materials characterization equipment. Thus, we are Mechanics, Industrial and Systems Engineering, starting our integrated microelectronics teaching and Materials Science and Engineering, Mechanical research program on a very solid foundation. Engineering, and Physics. Page 9 Spring 2000 - The World of Materials Central Facilities Development We are creating two undergraduate teaching laboratories Table 2. Faculty Research Laboratories and four centralized advanced teaching and research laboratories that will support our university-wide micro- Lab Name Professor electronics effort. The undergraduate teaching laborato- Compound Semiconductor Lab Louis Guido ries include an introductory Semiconductor Fabrication Electromagnetic Materials & Guo-Quan Lu Laboratory (SFL) in which entering students will learn the Devices Lab basics of semiconductor processing and a Semiconductor Electronics Manufacturing Subhash Sarin Packaging Laboratory (SPL) in which they will learn the Research Lab basics of semiconductor device packaging. The four Fiber & Electro-optics Richard Claus Research Lab centralized facilities are being developed for teaching and Nanomechanical & Confirmed Stephane Evoy research with advanced undergraduate and graduate Optical Systems Lab students and include a Materials Synthesis Laboratory Nanotechnology Lab Ravi Saraf (MSL) that will include PVD, CVD, and MOCVD Nonlinear Optics Lab James Heflin reactors for growing semiconductor thin films; a Materials Organic Microelectronic Wilhelm Graupner Analysis Laboratory (MAL), open to research from across Materials Lab the university, that will contain state-of-the-art electron Photonics Lab Anbo Wang microscopes, x-ray diffraction, and other analytical tools; Power Electronics Packaging Guo-Quan Lu a Device Fabrication Laboratory (DFL) in which students Research Lab Wireless Microsystems Sanjay Raman will perform research in a Class 100 to Class 10,000 clean Technology Lab room on a wide range of advanced electronic materials; and a Device Characterization Laboratory (DCL) with electronic and optical characterization instrumentation.