(12) United States Patent (10) Patent No.: US 7,030,260 B2 Asirvatham Et Al

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(12) United States Patent (10) Patent No.: US 7,030,260 B2 Asirvatham Et Al USOO7030260B2 (12) United States Patent (10) Patent No.: US 7,030,260 B2 Asirvatham et al. (45) Date of Patent: Apr. 18, 2006 (54) PREPARATION OF MIXED-HALOGEN Uhlig, W., Synthesis of Functional Substituted Oligosilanes HALO-SILANES Based on Sillyltriflate Derivatives, Organosilicon Chemistry: From Molecules to Materials, Eds. N. Auner, J. Weiss (75) Inventors: Edward Asirvatham, Chatham, NJ Federal Republic of Germany, (1994), pp. 21-26. (US); Jeff Czarnecki, Branchburg, NJ Katzenbeisser, U. Si-Si-Coupling Constants of Bromo (US); Matthew H. Luly, Hamburg, NY and Iododislanes and -trisilanes XSi-H and XSi-Hs. (US); Lawrence F. Mullan, (X= Br, I), Organosilicon Chemistry: From Molecules to Williamsville, NY (US); Alagappan Materials, Eds. N. Auner, J. Weiss, Federal Republic of Then appan, Wilmington, DE (US) Germany, (1994), pp. 37-38. (73) Assignee: Honeywell International Inc., Pátzold, U. Synthesis of Heavily Halogenated Vinylsilanes, Morristown, NJ (US) Organosilicon Chemistry IV: From Molecules to Materials, Eds. N. Auner, J. Weiss, Federal Republic of Germany, *) Notice: Subject to anyy disclaimer, the term of this (1996), pp. 226-228. patent is extended or adjusted under 35 Hassler, K., Köll, W., Synthesis and Spectroscopy of U.S.C. 154(b) by 214 days. Phenylated and Halogenated Trisilanes and Disilanes, Organosilicon Chemistry II: From Molecules to Materials, (21) Appl. No.: 10/377,367 Eds. N. Auner, J. Weiss, Federal Republic of Germany, (1996), pp. 81-88. (22) Filed: Feb. 27, 2003 Hassler, K. Schenzel, K., Syntheses, Si NMR Spectra, and (65) Prior Publication Data Vibrational Spectra of Methylated Trisilanes, Organosilicon Chemistry II: From Molecules to Materials, Eds. N. Auner, US 2004/OO19231 A1 Jan. 29, 2004 J. Weiss, Federal Republic of Germany, (1996), 95-100. Pöschl, U. Siegl, H., Hassler, K., Synthesis, Reactivity, and Related U.S. Application Data Spectroscopy of Phenylated Cyclotetrasilanes and (60) Provisional application No. 60/359,884, filed on Feb. Cyclopentasilanes, Organosilicon Chemistry II: From 27, 2002. Molecules to Materials, Eds. N. Auner, J. Weiss, Federal Republic of Germany, (1996) pp. 113-119. (51) Int. Cl. Hassler, K., Silicon-Phosphrus, -Arsenic, Antimony, and C07F 7/04 (2006.01) -Bismith Cages. Syntheses and Structures, Organosilicon (52) U.S. Cl. ...................................................... 556/484 Chemistry II: From Molecules to Materials, Eds. N. Auner, (58) Field of Classification Search ................. 556/484 J. Weiss, Federal Republic of Germany, (1994), pp. 203-208. See application file for complete search history. W. Uhlig, Convenient Approach to Novel Organosilicon Polymers, Organosilicon Chemistry: From Molecules to (56) References Cited Materials, Eds. N. Auner, J. Weiss, Federal Republic of Germany, (1996), pp. 703-708. U.S. PATENT DOCUMENTS (Abstract Only Forwarded) Adamova, Y., Skachkov, A., 2,894,012 A * 7/1959 Rosenberg et al. ......... 556,480 Reaction of Boron Trichloride with Tetraflurosilane initiated by Two Frequency-tunable Carbon Dioxide Lasers, Khim. FOREIGN PATENT DOCUMENTS Vys. Energ., (1990) 24 (1), pp. 88-91. GB 79.5772 5, 1958 Stanton, C., McKenzie, S., Sardella, D., Levy, R., GB 1238932 7, 1971 JP 61117112 6, 1986 Davidovitis, P., Boron atom reaction with silicon and JP 3028371 2, 1991 germanium tetrahalides, J. Phys. Chem. 92(16) pp. 4658 JP 2001097709 4/2001 4662. OTHER PUBLICATIONS (Continued) Hassler et al., {Schwingungsspektren, Normalkoodinat enanalysen und Synthesen der t-Butylsilane, Journal of Primary Examiner Johann Richter Organometallic Chemistry, 465 (1-2), 127-135, 1994.* Assistant Examiner Chukwuma Nwaonicha Emeleus H.J., Wilkins, C.J., Some New Ethyl and Phenyl (74) Attorney, Agent, or Firm—Deborah M. Chess Silicon Fluorides, J. Chem. Soc., (1944), p. 454. Lawton E.A., Levy A., Incorporation of Adenosine-5' - (57) ABSTRACT Phosphate into Ribonucleic Acid, J. Amer. Chem. Soc., (1955) 77, p. 6083. Newkirk, A.E., Preparation of the Methylfluorosilanes, J. The preparation of halosilanes having mixed-halogen Sub Amer. Chem. Soc., (1946) 68, pp. 2736-2737. stituents is described comprising providing an aryl-halo Chao, T.H., Moore S.L., Lane J., Preparation of Some Cyclic silane having one more first halogens and one or more aryl Fluorosilanes, J. Organometal. Chem. (1971) 33, pp. 157 groups, and Substituting one or more of said aryl groups of 16O. said aryl-halo-silane with a second halogen having an Buck, H.M., Bloemhoff W., Oosterhoff J.J., The System atomic number greater than that of said first halogen. Lewis Acid-Nitro Compound as a Strong Electron Accep tor, Tetrahedron Letters,(1960) 9, pp. 5-11. 26 Claims, No Drawings US 7,030.260 B2 Page 2 OTHER PUBLICATIONS Database Chemabs Online Chemical Abstracts Service, Columbus, OH, US; Kuroda Katsuhiko, et al.: “Organic (Abstract Only Forwarded) Adamova, Y., Pankratov, A., fluorine-silicon compounds. XI. Preparation and Properties SagitV., Skachkov, A., Stolyarova, G., Shmerling, G., Laser of silicon-functional phenylfluorosilanes and poly Chemical Reaction of Boron Trichloride with Silicon Tet (phenylfluorosiloxane)” XP002265134; Database accession rafluoride, Khim. Vys. Energ., (1978) 12(1), pp. 89-90. No. 76:60125 abstract & Kogyo Kagaku Zasshi, 74 (10), (Abstract Forwarded) Dele-Dubois, M., Wallert, F., 2132-7 Coden: KGKZA7; ISBN: 0368-5462, 1971. Preparation and Laser-Raman Spectroscopic Indentification Patent Abstracts of Japan: vol. 0103, No. 03 (C-378), Oct. of Fluorochlorosilanes, C.R. Acad. Sci., Ser. B, (1971) 16, 1986 & JP 61 117112 A (Central Glass Co., LTD), Jun. 272(18), pp. 1059-1061. 4, 1986 abstract. Airey, W., Sheldrick, G., Preparation and Properties of Database Chemabs Online Chemical Abstracts Service, Columbus, OH, US; Suresh, B. S. et al: "Halogen exchange Methoxytrifluorosilane, and Study of Its Reaction with reactions of silicon tetrafluoride with phosphorus trichloride Boron Trihalides, J. Inorg. Nucl. Chem. (1970) 32(6), pp. and phosphoryl chloride' XP002265135: Database acces 1827-1829. Sion No. 103:204851 abstract & Journal of fluorine Johansen, T., Hagen, K., Hassler, K., Tekautz, G., Stolevik, Chemistry, 29 (4), 463-6 Coden: JFLCAR: ISSN: 0022 R., 1,1,2-Triiododisilane (I2HSi-SiH2I): Molecular 1139, 1985. Structure, Internal Rotation and Vibrational Properties Patent Abstracts of Japan: Vol. 2000, No. 21, Aug. 3, 2001 Determine by Gas-phase Electron Diffraction, Infrared and & JP 2001 097709 A (Tori Chemical Kenkyusho:KK), Apr. Raman Spectroscopy, and Ab Initio Molecular Orbital- and 10, 2001 abstract. Density Function Calculations, J. Mol. Struct., (1999) 509 English translation of Hassler, et al., “Vibration Spectra, (1-3), pp. 237-254. Normal Coordinate Analyses and Syntheses of Tert Kunai, A., Sakurai, T., Toyoda, E., Ishikawa, M., Selective butylsilane tEuSiX3, X=H, D, F, C1, Br, I, Journal of Synthesis of Fluoro-, Fluorohydro-, and Chlorofluorosilanes Organometallic Chemistry, 465 (1994) 127-135. from Hydrosilanes with the Use of a CuCl2(Cu 1)/KF Reagent, Organometallics, (1996) 15, pp. 2478-2482. * cited by examiner US 7,030,260 B2 1. 2 PREPARATION OF MIXED-HALOGEN the bonding characteristics of the halogens involved. In an HALO-SILANES Si Xbond (where X is a halogen), the ability to replace one halogen with another by direct halogen Substitution tends to REFERENCE TO RELATED APPLICATION follow the order of Si X bond strength, Si F>Si– CldSi Bre-Si-I. Thus, fluorine can replace chlorine, bro This application is based on and claims priority to U.S. mine, and iodine, chlorine can replace bromine and iodine, Provisional Application No. 60/359,884 filed Feb. 27, 2002, and bromine can replace iodine. Synthesis of mixed-halogen which is hereby incorporated by reference. halo-silanes by preparative schemes based on direct replace ment of one halogen species with a different halogen species FIELD OF INVENTION 10 are problematic because such reactions tend to lead to complete replacement of one halogen with another. The present invention relates to the preparation of high Although techniques are often employed to shift the reac purity halo-silanes having two or more halogen moieties. tions equilibrium to favor incomplete substitution of one halogen species for another, these reactions nevertheless BACKGROUND 15 produce a distribution of perhalogenated products. Processes that produce a distribution of halosilane species High-purity silanes having two or more different halogen from which a single species must be isolated do not use moieties (referred to herein as “mixed-halogen halo-si starting materials efficiently. In addition, because cognate lanes') are useful sources of atomic silicon and halogens in halosilane species boil over a very narrow range, isolation of a variety of applications. For example, trichloro-fluoro any one species to achieve high purity requires specialized silane (SiFC1), dichloro-difluoro-silane (SiFC1), and equipment, Such as a high theoretical plate distillation col chloro-trifluoro-silane (SiFCI) has been used as a source of high-purity silicon in the preparation of semiconductor umn, which is expensive to obtain and operate. materials and communication-quality fiber optic materials. Therefore, there is a need for a process that uses reactions In addition, it has been recently reported that trifluoro-iodo 25 having high specific conversion of the starting material into silane (SiFI) is particularly amenable to laser isotopic a single product species, thereby efficiently using the starting separation, providing isotopically
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