Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
SECTION 1: Identification
Product identifier Material Name Boron Trifluoride, Isotopically Enriched Boron 11 Synonyms Boron Trifluoride, Enriched; Trifluoroborane-11B; Boron Trifluoride B-11 Enriched; BF3 Chemical Family boron, halides, fluoride Product Description The gas can be packaged in either a VAC, PDS+100 or PDS+HP gas source cylinder. The contents of the cylinder are stored at high pressure, however each package type contains regulators within the cylinder that allow a fixed delivery pressure. For VAC, the cylinder delivery pressure will be sub-atmospheric and for PDS+100 the cylinder delivery pressure will be super-atmospheric at a nominal pressure of 100 psig. For PDS+HP the nominal cylinder delivery pressure will be 1250 psig. This SDS addresses only the hazards of the gas. Product Use semiconductor manufacture, general synthetic chemical Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc.
129 Concord Road Building 2 Billerica, MA 01821 USA
Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)
Local Contact Information/maklumat tempatan untuk dihubungi Entegris Malaysia SDN. BHD. (Penang Office) Unit 14 and 15, Lower Level 5 (Executive Wing), Hotel Equatorial No. 1 Jalan Bukit Jambul, 11900 Bayan Lepas, Penang Malaysia
Telephone/Telefon: +60-4-427-4200 Fax/Faks: +60-4-641-3294
Emergency Phone Numbers/Nombor Telefon Kecemasan 1-800-815-308 (CHEMTREC Toll Free in country) +(60)-392125794 (CHEMTREC Local in country) 1-703-527-3887 (International/Antarabangsa) E-mail: [email protected]
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Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
SECTION 2: Hazards identification
GHS Classification Gases Under Pressure - Liquefied gas Acute Toxicity - Oral - Category 3 Acute Toxicity - Inhalation - Gas - Category 2 Skin Corrosion/Irritation - Category 1A Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 3 ( respiratory system ) Label elements Hazard symbols
Signal word Danger Hazard statements H280 Contains gas under pressure; may explode if heated. H330 Fatal if inhaled. H301 Toxic if swallowed. H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation. Precautionary statements Prevention P260 Do not breathe gas. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. Response P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove victim to fresh air and keep at rest in a position comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Remove/take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P410 Protect from sunlight. P403 Store in a well-ventilated place. P233 Keep container tightly closed. P405 Store locked up. ______Page 2 of 10 Issue date: 2020-12-03 Revision 9.0 Print date: 2020-12-03
Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification None known.
SECTION 3: Composition / information on ingredients
CAS Component Name Percent
20654-88-0 [11b]Boron trifluoride 100 Impurities and stabilizing additives contributing to the GHS Classification None
SECTION 4: First aid measures
Description of Necessary Measures Inhalation If gas is inhaled, move victim to fresh air. If breathing has stopped, give artificial respiration. If breathing is weak, give oxygen. Get medical attention without delay. Skin contact If this chemical contacts the skin, immediately flush the contaminated skin with soap and water. If clothing is contaminated, immediately remove and flush the skin with soap and water. Get medical attention immediately. Assume victim has also been exposed by inhalation. Treat as HF exposure. Consider the use of calcium gluconate. Eye contact In case of eye contact, immediately flush eyes with plenty of water for at least 30 minutes, occasionally lifting the lower and upper lids. Get medical attention immediately. Ingestion Ingestion is not a route of exposure. Most Important Symptoms/Effects Acute Fatal if inhaled, Toxic if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns, hypocalcemia Delayed fluorosis, hypocalcemia Indication of any immediate medical attention and special treatment needed For inhalation, consider oxygen. Skin: Consider the use of calcium gluconate.
SECTION 5: Firefighting measures
Flammable Properties Heating of cylinder beyond pressure relief. Suitable extinguishing media regular dry chemical, carbon dioxide. Large fires: Use water spray, fog or regular foam. Unsuitable Extinguishing Media Do not direct water at source of leak or safety devices; icing may occur. Specific hazards arising from the chemical Heating of cylinder beyond pressure relief. Protective Equipment and Precautions for Firefighters
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Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures Apply cooling water to sides of container exposed to flame until well after fire is out. Isolate area until gas has dispersed. Move container from fire area if it can be done without risk. Do not get water inside container. Damaged cylinders should be handled only by specialists. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. Combustion boric acid, fluoroboric acid, oxides of boron
SECTION 6: Accidental release measures
Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods and Materials for Containment and Cleaning Up Isolate area until gas has dispersed. Use appropriate protective equipment including self-contained breathing apparatus. Be certain to flush lines and enclosures with inert gas before repairing. Fully encapsulating, vapor protective clothing should be worn for spills and leaks with no fire. Do not touch or walk through spilled material. If possible, turn leaking containers so that gas escapes rather than liquid. Do not direct water at spill or source of leak. Stop leak if possible without personal risk.
SECTION 7: Handling and storage
Precautions for safe handling Handle this material only in a sealed, purged system. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Wear respiratory protection. Do not eat, drink, or smoke when using this product. Use only outdoors or in a well-ventilated area. Conditions for safe storage, including any incompatibilities Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store in accordance with all current regulations and standards. Protect from physical damage. Store in a cool, dry, well ventilated area of non-combustible construction. Keep away from cylinders of oxygen or other highly oxidizing or flammable materials. Ship and store cylinders with outlet plug in place. Store in a tightly closed container. Store below 52 C. Keep separated from incompatible substances. Incompatible Materials alcohols, alkali metals, alkyl mercaptans, alkyl nitrates, aluminum bromide, ALUMINUM CHLORIDE, amines, calcium oxide, hydrogen sulfide, metals, nitrates, organic solvents and compounds, slaked lime
SECTION 8: Exposure controls/personal protection
Exposure Guidelines Component Exposure Limits [11b]Boron trifluoride 20654-88-0
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Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
ACGIH: 2.5 mg/m3 TWA as F (related to Fluorides)
0.7 ppm Ceiling (related to Boron trifluoride)
NIOSH: 1 ppm Ceiling ; 3 mg/m3 Ceiling (related to Boron trifluoride)
OSHA (US): 2.5 mg/m3 TWA as F (related to Fluorides)
1 ppm Ceiling ; 3 mg/m3 Ceiling (related to Boron trifluoride)
Malaysia: 2.5 mg/m3 TWA as F (related to Fluorides)
1 ppm Ceiling ; 2.8 mg/m3 Ceiling (related to Boron trifluoride) ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) [11b]Boron trifluoride (20654-88-0) 2 mg/l Medium: urine Time: prior to shift Parameter: Fluoride (background, nonspecific ); 3 mg/l Medium: urine Time: end of shift Parameter: Fluoride (background, nonspecific ) (related to Fluorides) IDLH 25 ppm Engineering controls Exhausted process enclosure recommended to meet published exposure limits. Use only in a well ventilated area. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection Wear splash resistant safety goggles with a faceshield. Contact lenses should not be worn. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Body protection Wear appropriate chemical resistant clothing. Hand protection Wear appropriate chemical resistant gloves. Respiratory Protection Respirators depend on exposure level. SCBA with full face piece recommended during change outs and available in case of emergency.
SECTION 9: Physical and chemical properties
Appearance Compressed gas Physical State gas Colorless (fumes Odor pungent Color white smoke upon exposure to air)
Odor 1.5 ppm pH (Strong acid gas ) Threshold Melting Point -128.4 °C Boiling Point -99.8 °C Boiling Point Not available Freezing point Not available Range
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Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
Evaporation Flammability Not available Not flammable Rate (solid, gas) Autoignition Not available Flash Point (Not flammable ) Temperature Lower Decomposition (Not applicable ) Not available Explosive Limit temperature (Not applicable, gas Upper (Not applicable ) Vapor Pressure above -12.3 °C Explosive Limit (critical temperature) )
Vapor Density Specific Gravity 2.4 @ 20 °C Not applicable (air=1) (water=1) Partition Water (hydrolyzes, Reacts ) coefficient: n- Not available Solubility octanol/water Viscosity 0.0171 cp @ 25 °C Kinematic viscosity Not available Solubility Not available Bulk Density 3.07666 g/L (Other) Density Not available Log KOW 0.22 Compressed gas above - Physical Form 12.3 °C; may partially Molecular Formula BF3 liquefy below -12.3 °C
Molecular 67.81 Weight
SECTION 10: Stability and reactivity
Reactivity May react on contact with water. Releases toxic and/or corrosive gases. Chemical stability May react on contact with water. Releases toxic and/or corrosive gases. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Minimize contact with material. Avoid inhalation of material or combustion by-products. Containers may rupture or explode if exposed to heat. Exposure to air. Materials to Avoid (Incompatibilities) alcohols, alkali metals, alkyl mercaptans, alkyl nitrates, aluminum bromide, ALUMINUM CHLORIDE, amines, calcium oxide, hydrogen sulfide, metals, nitrates, organic solvents and compounds, slaked lime Hazardous decomposition products Thermal decomposition products boric acid, fluoroboric acid, oxides of boron Water or Moisture acid halides, halogenated compounds, hydrogen fluoride, organic acids ______Page 6 of 10 Issue date: 2020-12-03 Revision 9.0 Print date: 2020-12-03
Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
SECTION 11: Toxicological information
Inhalation Fatal if inhaled, respiratory tract burns Skin skin burns Eyes eye burns Ingestion Toxic if swallowed, mucous membrane burns Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: [11b]Boron trifluoride (20654-88-0) Oral 196 mg/kg (QSAR model prediction) Inhalation LC50 Rat 1180 mg/m3 4 h (related to Boron trifluoride) Acute Toxicity Estimate Inhalation - Gas 425.47 ppm
Oral 196 mg/kg (QSAR model prediction) Immediate Effects Fatal if inhaled, Toxic if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns, hypocalcemia Delayed Effects fluorosis, hypocalcemia Irritation/Corrosivity Data respiratory tract burns, skin burns, eye burns, mucous membrane burns Respiratory Sensitization No data available. Dermal Sensitization No data available. Carcinogenicity Component Carcinogenicity [11b]Boron trifluoride 20654-88-0
ACGIH: A4 - Not Classifiable as a Human Carcinogen (related to Fluorides) Mutagenic Data No data available. Reproductive Effects Data No data available. Tumorigenic Data No data available. Specific Target Organ Toxicity - Single Exposure respiratory system Specific Target Organ Toxicity - Repeated Exposure skeletal system Aspiration hazard Not applicable.
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Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
Medical Conditions Aggravated by Exposure eye disorders, skin disorders, respiratory disorders Additional Data Boron trifluoride exists as a gas under standard conditions, so testing through the skin is limited. Therefore, acute dermal toxicity testing is scientifically impossible.
SECTION 12: Ecological information
Component Analysis - Aquatic Toxicity [11b]Boron trifluoride 20654-88-0
Invertebrate: EC50 48 h Daphnia magna 21.3 mg/L IUCLID (related to Boron trifluoride) Persistence and Degradability No data available. Bioaccumulative potential No data available. Mobility in soil No data available. Other adverse effects No data available.
SECTION 13: Disposal considerations
Disposal Methods Dispose in accordance with all applicable regulations. Contaminated packaging disposal Dispose in accordance with all applicable regulations.
SECTION 14: Transport information
IATA Information: Shipping Name: BORON TRIFLUORIDE Hazard Class: 2.3 UN#: UN1008 Forbidden by Air
ICAO Information: Shipping Name: BORON TRIFLUORIDE Hazard Class: 2.3 UN#: UN1008 Forbidden by Air
IMDG Information: Shipping Name: BORON TRIFLUORIDE Hazard Class: 2.3 UN#: UN1008 Required Label(s): 2.3, 8 International Bulk Chemical Code
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Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None
SECTION 15: Regulatory information
Malaysia Regulations Malaysia Poisons List No components of this material are listed. Component Analysis - Inventory [11b]Boron trifluoride (20654-88-0) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2
Yes NSL No No EIN Yes Yes Yes No
KR - REACH CCA MX NZ PH TH-TECI TW, CN VN (Draft)
Yes No No No No Yes No
SECTION 16: Other information
NFPA Ratings Health: 4 Fire: 0 Instability: 1 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 11/18/2020 - Update to Section(s) 2, 4, 7, 11. Preparation and Revision Date 1/12/2015 Revision date 11/18/2020 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - China; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Japan Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals ______Page 9 of 10 Issue date: 2020-12-03 Revision 9.0 Print date: 2020-12-03
Safety Data Sheet Material Name: Boron Trifluoride, Isotopically Enriched Boron 11 SDS ID: 009 (MALAYSIA)
List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; KR REACH CCA - Korea Registration and Evaluation of Chemical Substances Chemical Control Act; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TH-TECI - Thailand - FDA Existing Chemicals Inventory (TECI); TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – Taiwan; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.
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