Bulk Chemical Management Bulk Chemical Management Table of Contents
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bulk chemical management bulk chemical management table of contents The backbone to the high tech Section 1: About Entegris fabrication environment is the Purify, Protect and Transport ....................................................... 2 steady supply of process materials. Global Presence ............................................................................. 3 Safe, accurate and timely delivery Enabling Innovation ...................................................................... 4 of process chemistries throughout Close to Our Customers ................................................................. 5 the facility enables the efficient Bulk Chemical Management Solution ......................................... 6 and economically stable operation Section 2: Product/Solutions of each process step. The diversity EL GRADE* CHEMICAL MANUFACTURING of the chemistries flowing through ProcessGard® NP Cartridge Filters ........................................ 8 the lines at any one time covers a Fluorogard® FP and FP-HP Cartridge Filters ........................ 10 wide range of materials ranging Microgard™ Plus Cartridge Filters ........................................ 12 from aggressive acids to DI water to FluoroPure® 1000 Liter Intermediate concentrated substances. In addition, Bulk Container .................................................................... 14 these chemistries must be controlled FluoroPure® 200 Liter Advantage Trilayer to levels general industries cannot and Trilayer HDPE Drum ................................................... 16 achieve in terms of repeatability EL GRADE CHEMICAL MANUFACTURING AND END-USER FACILITIES and consistency. Entegris provides Sentry™ QCIII Quick Connect System .................................. 18 the solutions to succeed under Sentry™ QCII Quick Connect System .................................... 20 these extreme conditions. Chemlock® Housing PFA/PP .................................................... 22 QuickChange® ATM and ATE Filters ...................................... 24 Intercept® Filters ..................................................................... 26 END-USER FACILITIES Tubing and Pipe ........................................................................ 28 Tube and Pipe Fittings ............................................................. 30 Integra® 1/2" Orifice Valve ....................................................... 32 Integra® 3/4" Orifice Valve ....................................................... 34 Integra® 1"˝ Orifice Valve ......................................................... 36 NT® Pressure Transducers .......................................................... 38 FluoroPure® Day Tanks ............................................................ 40 Dymension® Valve Manifold .................................................... 42 * Electronic grade ENTEGRIS, INC. «» BULK CHEMicAL MANAgeMent «» 1 Entegris Milestones Entegris 2010 1966: Founded as Fluoroware, Inc. Number of Employees 2,200 worldwide 2000: Begins trading under the ENTG symbol on NASDAQ Industries Served Semiconductor and other 2005: Merges with Mykrolis high-technology industries Corporation, a leading provider of liquid filtration Stock Listing and gas purification prod- ENTG on NASDAQ ucts and systems purify, protect and transport global presence 2006: Expands manufacturing facility in Kulim, Malaysia Entegris provides products and services for applications With 2,200 employees worldwide, Entegris thrives on the 2007: Acquires Surmet across key semiconductor processes to help chip makers challenge to meet our customers’ expectations through a Corporation’s high-purity solve manufacturing challenges, enhance yield and gain global network of service, technology, manufacturing and semiconductor coatings sustainable competitive advantage. applications support teams, all built upon a tradition of business product and process innovation. 2008: Acquires Poco Graphite, an industry leader in high- performance graphite and silicon carbide bulk chemical wafer handling As wafer sizes continue to increase and Entegris provides wafer handling line widths shrink, purity requirements products to protect and transport become more stringent and precise prime wafers, wafers being processed, chemical blending becomes more critical. finished wafers, bare die and packaged Whether it’s transport or storage, mixing devices. Products include wafer carriers, or dispense, Entegris has solutions to wafer shippers, mask and reticle carriers, meet bulk chemical handling needs. bare die trays, horizontal wafer shippers, chip trays and film frame shippers. chemical mechanical planarization photolithography From filtration, liquid and slurry Entegris’ broad product line enables handling, Entegris products enable lithography processing with gas lab capabilities the CMP process. filters and diffusers, wafer and reticle Analytical Services Product Testing Materials Science handling, liquid filtration, purification • Airborne molecular contamination • Performance testing • New material development and control. • Surface contamination • Particle testing • Material characterization wet etch and clean • Applications support • Electrostatic charge • Material selection Ultrapure liquids and gases are Entegris products offer reliable • Root-cause analysis • Vibration • Material incoming inspection • Flow rate optimization • Applications support purified, protected and transported protection of quartz plate reticles and with Entegris filters, purifiers, • Applied statistics masks used in multiple process steps. • Safety and industry standardization valves, fittings and sensing and • DOT and UN regulations control products. • CE marking 2 «» BULK CHEMicAL MANAgeMent «» ENTEGRIS, INC. ENTEGRIS, INC. «» BULK CHEMicAL MANAgeMent «» 3 Entegris Patents 2005: 39 new U.S. patents 2006: 44 new U.S. patents 2007: 25 new U.S. patents 2008: 35 new U.S. patents 2009: 16 new U.S. patents enabling innovation close to our customers Direct sales and local support gives us the opportunity The technology roadmaps to produce the next generation of to achieve customer intimacy. semiconductor devices and microelectronics are presenting unprecedented technological challenges, as well as ever increasing pressure to improve yields and productivity. As Customer intimacy helps us better understand the leading provider of contamination control products and our customers’ needs through direct feedback and services to the global semiconductor and microelectronics roadmap sharing. industry, Entegris is using a wide array of analytical and materials science expertise to develop comprehensive By aligning our materials science, engineering and R&D solutions to contamination issues in the fab. initiatives, we can develop indispensable contamination control solutions to solve our customers’ roadmap challenges. ITRS 2006 2008 2010 2012 DRAM 1/2 Pitch (nm) 70 59 45 36 Logic (Flash) 1/2 Pitch (nm) 78 (64) 59 (45) 45 (36) 36 (28) Critical Defect (nm) 29 30 23 18 DRAM Wafer Handling PWP 30 20 12 7 Molecular Contaminants Wafer level Molecules Molecules Molecules Critical Metal Ions (PPT) <0.5 <0.5 <0.5 <0.5 Electronics that are smaller, faster, cheaper and more functional Industry 193 nm Immersion Lithography Double Patterning EUV 300 mm Wafer Processing 300 mm Prime 450 mm? Entegris TechnologiesDRAM 1/2 Pitch (nm) 70 59 45 36 Liquid and Gas Filtration Continuous Improvement and Purification Filtration products: smaller pore size, higher flow, higher retention Purification products: volatile organics, AMC, moisture, degasification Wafer Handling 300 mm Prime product platforms 450 mm prototypes Mask Handling Carriers to prevent reticle haze EUV mask carriers Liquid Systems LiquidLens™ Multi scanner systems Subsystems Process monitoring Leveraging our core competencies of materials science 4 «» BULK CHEMicAL MANAgeMent «» ENTEGRIS, INC. ENTEGRIS, INC. «» BULK CHEMicAL MANAgeMent «» 5 Our expertise in materials science and contamination bulk chemical management solutions control enables our customers to meet the demands of the market by reducing costs, enhancing yields, increasing productivity and improving process control. EL Grade Chemical EL Grade Chemical Manufacturing and End-user Facilities Manufacturing End-user Facilities EL Grade Chemical Manufacturing Challenge Filters Connection Systems Customer Challenges ProcessGard NP Cartridge Filters Fluorogard FP and FP-HP Cartridge Filters Microgard Plus Cartridge Filters Liter Intermediate FluoroPure 1000 Bulk Container (IBC) FluoroPure 200 Liter Advantage HDPE Drum and Trilayer Trilayer Sentry QC III Quick Connect System Sentry QC II Quick Connect System Chemlock Housing PFA/PP Filters and ATE QuickChange ATM Intercept Filters and Pipe Tubing and Pipe Fittings Tube Integra Valves NT Pressure Transducers FluoroPure Day Tanks Manifold Dymension Valve Bulk Containers and Drums Safety • • • Safety End-user Facilities Batch-to-batch quality • • • • • • • • • • • • • Filters Fittings, Tubing and Pipe Consistent chemical specification • • • • • • Quality Product performance stability • • • • • • • • • • • • • Product reliability • • • • • • • • • • • • • • Ready to use Valves and Manifolds Connection Systems • • • • • • • • • • Ease of handling • • • • • • • • • • • Uptime • • • • • • • • • High throughput • • • • • • • • • Pressure Transducers Cost Low cost of operation • • • • Long product lifetime • • • • • • • • • • • • • Minimum maintenance • • • • Serviceability • • • • • • For over 40