bulk chemical management bulk chemical management table of contents

The backbone to the high tech Section 1: About Entegris fabrication environment is the Purify, Protect and Transport ...... 2 steady supply of process materials. Global Presence ...... 3 Safe, accurate and timely delivery Enabling Innovation ...... 4 of process chemistries throughout Close to Our Customers ...... 5 the facility enables the efficient Bulk Chemical Management Solution ...... 6 and economically stable operation Section 2: Product/Solutions of each process step. The diversity EL GRADE* CHEMICAL MANUFACTURING of the chemistries flowing through ProcessGard® NP Cartridge Filters ...... 8 the lines at any one time covers a Fluorogard® FP and FP-HP Cartridge Filters ...... 10 wide range of materials ranging Microgard™ Plus Cartridge Filters ...... 12 from aggressive acids to DI water to FluoroPure® 1000 Liter Intermediate concentrated substances. In addition, Bulk Container ...... 14 these chemistries must be controlled FluoroPure® 200 Liter Advantage Trilayer to levels general industries cannot and Trilayer HDPE Drum ...... 16 achieve in terms of repeatability EL GRADE CHEMICAL MANUFACTURING AND END-USER FACILITIES and consistency. Entegris provides Sentry™ QCIII Quick Connect System ...... 18 the solutions to succeed under Sentry™ QCII Quick Connect System ...... 20 these extreme conditions. Chemlock® Housing PFA/PP ...... 22 QuickChange® ATM and ATE Filters ...... 24 Intercept® Filters ...... 26

END-USER FACILITIES Tubing and Pipe ...... 28 Tube and Pipe Fittings ...... 30 Integra® 1/2" Orifice Valve ...... 32 Integra® 3/4" Orifice Valve ...... 34 Integra® 1"˝ Orifice Valve ...... 36 NT® Pressure Transducers ...... 38 FluoroPure® Day Tanks ...... 40 Dymension® Valve Manifold ...... 42

* Electronic grade

ENTEGRIS, INC. «» bulk chemical management «» 1 Entegris Milestones Entegris 2010 1966: Founded as Fluoroware, Inc. Number of Employees 2,200 worldwide 2000: Begins trading under the ENTG symbol on NASDAQ Industries Served Semiconductor and other 2005: Merges with Mykrolis high-technology industries Corporation, a leading provider of liquid filtration Stock Listing and gas purification prod- ENTG on NASDAQ ucts and systems purify, protect and transport global presence 2006: Expands manufacturing facility in Kulim, Malaysia Entegris provides products and services for applications With 2,200 employees worldwide, Entegris thrives on the 2007: Acquires Surmet across key semiconductor processes to help chip makers challenge to meet our customers’ expectations through a Corporation’s high-purity solve manufacturing challenges, enhance yield and gain global network of service, technology, manufacturing and semiconductor coatings sustainable competitive advantage. applications support teams, all built upon a tradition of business product and process innovation. 2008: Acquires Poco Graphite, an industry leader in high- performance graphite and silicon carbide

bulk chemical wafer handling As wafer sizes continue to increase and Entegris provides wafer handling line widths shrink, purity requirements products to protect and transport become more stringent and precise prime wafers, wafers being processed, chemical blending becomes more critical. finished wafers, bare die and packaged Whether it’s transport or storage, mixing devices. Products include wafer carriers, or dispense, Entegris has solutions to wafer shippers, mask and reticle carriers, meet bulk chemical handling needs. bare die trays, horizontal wafer shippers, chip trays and film frame shippers. chemical mechanical planarization photolithography From filtration, liquid and slurry Entegris’ broad product line enables handling, Entegris products enable lithography processing with gas lab capabilities the CMP process. filters and diffusers, wafer and reticle Analytical Services Product Testing Materials Science handling, liquid filtration, purification • Airborne molecular contamination • Performance testing • New material development and control. • Surface contamination • Particle testing • Material characterization wet etch and clean • Applications support • Electrostatic charge • Material selection Ultrapure liquids and gases are Entegris products offer reliable • Root-cause analysis • Vibration • Material incoming inspection • Flow rate optimization • Applications support purified, protected and transported protection of quartz plate reticles and with Entegris filters, purifiers, • Applied statistics masks used in multiple process steps. • Safety and industry standardization valves, fittings and sensing and • DOT and UN regulations control products. • CE marking

2 «» bulk chemical management «» ENTEGRIS, INC. ENTEGRIS, INC. «» bulk chemical management «» 3 Entegris Patents 2005: 39 new U.S. patents

2006: 44 new U.S. patents

2007: 25 new U.S. patents

2008: 35 new U.S. patents

2009: 16 new U.S. patents enabling innovation close to our customers

Direct sales and local support gives us the opportunity The technology roadmaps to produce the next generation of to achieve customer intimacy. semiconductor devices and microelectronics are presenting unprecedented technological challenges, as well as ever increasing pressure to improve yields and productivity. As Customer intimacy helps us better understand the leading provider of contamination control products and our customers’ needs through direct feedback and services to the global semiconductor and microelectronics roadmap sharing. industry, Entegris is using a wide array of analytical and materials science expertise to develop comprehensive By aligning our materials science, engineering and R&D solutions to contamination issues in the fab. initiatives, we can develop indispensable contamination control solutions to solve our customers’ roadmap challenges.

ITRS 2006 2008 2010 2012 DRAM 1/2 Pitch (nm) 70 59 45 36 Logic (Flash) 1/2 Pitch (nm) 78 (64) 59 (45) 45 (36) 36 (28) Critical Defect (nm) 29 30 23 18 DRAM Wafer Handling PWP 30 20 12 7 Molecular Contaminants Wafer level Molecules Molecules Molecules Critical Metal Ions (PPT) <0.5 <0.5 <0.5 <0.5

Electronics that are smaller, faster, cheaper and more functional

Industry 193 nm Immersion Lithography Double Patterning EUV 300 mm Wafer Processing 300 mm Prime 450 mm?

Entegris TechnologiesDRAM 1/2 Pitch (nm) 70 59 45 36 Liquid and Gas Filtration Continuous Improvement and Purification Filtration products: smaller pore size, higher flow, higher retention Purification products: volatile organics, AMC, moisture, degasification Wafer Handling 300 mm Prime product platforms 450 mm prototypes Mask Handling Carriers to prevent reticle haze EUV mask carriers Liquid Systems LiquidLens™ Multi scanner systems Subsystems Process monitoring

Leveraging our core competencies of materials science

4 «» bulk chemical management «» ENTEGRIS, INC. ENTEGRIS, INC. «» bulk chemical management «» 5 Our expertise in materials science and contamination bulk chemical management solutions control enables our customers to meet the demands of the market by reducing costs, enhancing yields, increasing productivity and improving process control.

EL Grade Chemical EL Grade Chemical Manufacturing and End-user Facilities Manufacturing End-user Facilities

EL Grade Chemical Manufacturing Challenge

Filters Connection Systems

Customer Challenges ProcessGard NP Cartridge Filters Fluorogard FP and FP-HP Cartridge Filters Microgard Plus Cartridge Filters Liter Intermediate FluoroPure 1000 Bulk Container (IBC) FluoroPure 200 Liter Advantage HDPE Drum and Trilayer Trilayer Sentry QC III Quick Connect System Sentry QC II Quick Connect System Chemlock Housing PFA/PP Filters and ATE QuickChange ATM Intercept Filters and Pipe Tubing and Pipe Fittings Tube Integra Valves NT Pressure Transducers FluoroPure Day Tanks Manifold Dymension Valve Bulk Containers and Drums Safety • • • Safety End-user Facilities Batch-to-batch quality • • • • • • • • • • • • •

Filters Fittings, Tubing and Pipe Consistent chemical specification • • • • • •

Quality Product performance stability • • • • • • • • • • • • • Product reliability • • • • • • • • • • • • • • Ready to use Valves and Manifolds Connection Systems • • • • • • • • • • Ease of handling • • • • • • • • • • • Uptime • • • • • • • • • High throughput • • • • • • • • •

Pressure Transducers Cost Low cost of operation • • • • Long product lifetime • • • • • • • • • • • • • Minimum maintenance • • • • Serviceability • • • • • • For over 40 years, Entegris has been at the forefront Tanks Environmentally friendly of providing comprehensive microcontamination • • • • •

Green Minimize waste control solutions – with products and services that • • • • surround key processes such as bulk chemical, wet The following pages highlight products designed to etch and clean, lithography, chemical mechanical solve your fab challenges by providing best-in-class planarization and wafer handling. purification, materials management and process control solutions.>>>

6 «» bulk chemical management «» ENTEGRIS, INC. ENTEGRIS INC. «» bulk chemical management «» 7 EL Grade CHEMICAL MANUFACTURING

9 Differential Pressure (PSID) Pressure Differential 8 7 6 5 4 3 2 1 0 6 ) 3.0 µm 1.4 0, 20 µm 1 «» «» 2.0 µm Longer lifetime Reduce bubble issue Longer lifetime Longer lifetime Longer lifetime Longer lifetime Longer lifetime Longer lifetime Benefit expected 1.2 ent m 5.0 µm ge 1.0 1.0 µm 0.8 GPM

al mana al

Disposables 0.6 0.05 µm ic m e h 0.4 c Application UV lacquer PVA coating Cleaning Wet etching Wet Stripping Developer Cleaning Wet etching Wet Stripping Developer Cleaning Solder bumping, C4 etching Wet Developer Central distribution 12345 pical Flow Rate (L/min) - 1 cP @ 20°C (68°F 0.2 Ty «» bulk bulk «» 0 0

0

0.6 0.5 0.4 0.3 0.2 0.1 Differential Pressure (bar) Pressure Differential

Optical disk CRT Color filter TN/STN Back end TFT-LCD Market CMP Differential Pressure (PSID) Pressure Differential 0 9 8 7 6 5 4 3 2 1 0 50 ) 12 1.0 µm 04 me 2.0, 3.0 µm e eti 40 f µm 10 me Li m) im eti nt (µ f 5, 10 me Li fet eti ting f Li 0.05 µm 02 r Li r Cresce 30 ard NP 5. n Ra etito etito mp mp ard NP 20, 30, 40 µm ocessg GPM Pr Co Co Retentio 20 Cartridges .0 ProcessG

10 2468 pical Flow Rate (L/min) - 1 cP @ 20°C (68°F 52 0. Ty 0 0 0 0 0 0

0 20 80 60

40

12

16 14 10

e ng alle Ch ntinuous

Co 0

r r de un me Ti ugging Pl 0.7 0.6 0.5 0.4 0.3 0.2 0.1 Differential Pressure (bar) Pressure Differential performance frequently asked questions What will be my pressure drop? ENTEGRIS, INC. ENTEGRIS, ENTEGRIS, INC. ENTEGRIS, BENEFIT Saves time due to easy installations in the equipment No retrofit costs Increasing overall chemical purity Lower filtration costs Improving tool uptime due to long-term chemical compatibility Improving quality and overall yield Reducing filter changing due to longer lifetime Increase tool uptime • • • • • • • • Pleated depth membrane or disposable Available in cartridge configuration ratings from Wide range of retention 0.5 μm to 40 μm Excellent chemical and heat resistance Optimized for electronic chemical manufacturers Consumer electronic market: TFT-LCD, wet etching, stripping, TN/STN, color filter, cleaning developer, Chemical mechanical planarization (CMP) slurry epth filters with high flow and with high flow epth filters Pleated d retention efficiency, excellent broad range applications or electronics ideal prefiltration parts plating processes. providing Depth pleated structure longer lifetime. • • • • AGE

ADVANT «» ent m Fits most available housings Superior retention of colloids and particles ensuring low particle counts Wide range of contaminants captured in a single filter unit Providing clean and durable performance Low extractable levels ensure superior downstream cleanliness Higher particle and gel holding capability ge • • • • • • al mana al ic m e h c TURE «» bulk bulk «» ProcessGard® NP Cartridge Filters NP Cartridge ProcessGard® FEA Available in cartridges (code F and code 0) and disposable configurations Available in different retention length and manifold ratings, adapter codes Robust polypropylene construction supports Thermoplastic bonding with no adhesives Surface and depth filter design 8 EL Grade CHEMICAL MANUFACTURING 11

est Quantity 1 = 1/pack

«» «»

TEV (Teflon® TEV (Teflon® Encapsulated Viton®) µm 0.1 kg/cm² d µm 0.05 kg/cm² O-ring Material V = Viton® E = EPDM T =  ent

m

A prewette A 1 day after nonprewetted after day 1 FP-HP 10 FP-HP 10 ge

Optional Chemlock key Optional Chemlock key attached to cartridge for use with Chemlock housing ONLY

*

Cartridge Length 1 = 10” 2 = 20” 3 = 30” d 2nd autoclave IP autoclave 2nd al mana al

A prewette A ic 2nd autoclave nonprewetted autoclave 2nd m

FP-HP 0.2 µm 0.1 kg/cm² FP-HP 0.2 µm 0.2 kg/cm² e µm µm 1 K* Code 7 Code F Code 0 h

— = = = c 1 day after IP after day 1

7 F Cartridge Configuration O 10.0 µm 10.0 3.0 µm 1.0 µm 0.10 µm 0.10 0.20 0.50 0.05 µm d 0 = = = = = — C S G = H = A V Retention Rating Z

—

Fluorogard FP-HP Heat-resistance T Fluorogard FP-HP Heat-resistance 1 day after nonprewetted after day 1 «» bulk bulk «» —

0

15 75 45 30 60 Flow Rate (L/min) Rate Flow

CWE

How do I create the right part number for How do I create the right part number ordering the FP filter? 1st autoclave nonprewette autoclave 1st Differential Pressure (PSID) Pressure Differential 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0 40 0 ) 3.0 µm 0.0 µm 1 81 1.0 µm 30 0.20 µm 0 µm 0.50 µm 0.1 20 GPM 0.05 µm 10

PTFE membrane in a PP structure, PTFE membrane in a 2 pical Flow Rate (L/min) – 1 cP @ 20°C (68°F Ty 0 0246 0 0

0.1 0.30 0.25 0.20 0.15 0.05 Differential Pressure (bar) Pressure Differential the Fluorogard FP exhibits very good chemical the Fluorogard FP exhibits It is an economi- resistance in most applications. material is required. cal choice where PTFE chemical Ideal solution for electronic-grade cleaning applications manufacturing and wet in many industries. The hydrophilic version exhibits very good wettability even after drain and dry modes, without flow loss. frequently asked questions FP What is my flow capability for a Fluorogard cartridge? 10’’ performance is mainly driven by Chemical compatibility to chemicals. With the surface area exposed its 7000 cm ENTEGRIS, INC. ENTEGRIS, ENTEGRIS, INC. ENTEGRIS, BENEFIT More consistent, reliable process Increased tool uptime due to no prewetting needed in aqueous chemicals Saves time due to easy installations in the equipment Streamlined offering that covers all filtration needs Improved tool uptime due to long-term chemical compatibility Improving quality and overall yield • • • • • • Wide range of retention ratings from Wide range of retention μm 0.05 μm to 10 cartridge sizes Available in three different 20” and 30’’) (10’’, and 7 and 5 (2-226 F, Available in code 0, 2-222 o-rings) Operating temperature up to 90°C Optimized for filtration of process e.g., water-based chemicals chemicals, and organic solvents Usable in bulk or point-of-use applications Fluorogard FP and FP-HP are constructed FP and FP-HP Fluorogard hydrophilic PTFE pleated of hydrophobic or supports to membranes with polypropylene and cleanliness. enhance durability • • • • AGE

ADVANT «» ent m Optimized chemical compatibility Spontaneous wetting Fits most available housings, and and Fits most available housings, addresses all filtration requirements Providing clean and durable performance Low extractable levels ensure superior downstream cleanliness ge • • • • • al mana al ic m e h c TURE «» bulk bulk «» P Cartridge Filters HP Cartridge and FP- FP Fluorogard® FEA Available in two different PTFE membranes: – Hydrophobic (FP) – Hydrophilic (FP-HP) Available in different retention μm), ratings (0.05 μm to 10 20’’ and 30’’) and lengths (10’’, codes (0 and 7) PTFE membrane and polypropylene construction 10 EL Grade CHEMICAL MANUFACTURING

13 Differential Pressure (PSID) Pressure Differential 18 16 14 12 10 8 6 4 2 0 0 nm ) 7 0.2 nm «» «» Mini 10 Asymmetric 25 0.1 nm 30 nm ent First run Confirmation run m 03 ge 0” Filters V2 5 nm 0.05 nm 20 nm pe Asymmetric 52 GPM Filter Ty al mana al nm ic 01 nm m 10 e V2 10 h c Microgard Plus 1 51 pical Flow Rate (L/min) – 1 cP @ 20°C (68°F Ty otal Defectivity Comparison by Filter T 0 0123456 «» bulk bulk «» V2 20 nm

0

1.4 1.2 1.0 0.8 0.6 0.4 0.2

Differential Pressure (bar) Pressure Differential s Defect otal T

Why does Microgard Plus hold back gels more Why does Microgard Plus hold back gels effectively than PTFE filters? The string and node structure of PTFE allows gels to Furthermore, pressure pushes gels pass through easily. through PTFE membranes. The sponge-like structure of UPE prevents gels from passing through the membrane and additionally has more loading capacity. Differential Pressure (PSID) Pressure Differential 18 16 14 12 10 8 6 4 2 0 21 0 20 ) 19 18 nm 17 10 16 52 15 14 13 12 0” Asymmetric UPE 01 11 GPM UPE 0.1 µm filter article Count Comparison 10 Pleated 0.05 µm PTFE filter Dispense Number 5 nm 79 51 68

pical Flow Rate (L/min) – 1 cP @ 20°C (68°F Ty 2345 0 012345 Microgard Plus LE 1 0 1 10 0 10

1.4 1.2 1.0 0.8 0.6 0.4 0.2

0,000 1,000 articles/wafer >0.15 µm >0.15 articles/wafer P Differential Pressure (bar) Pressure Differential 1 UPE vs. PTFE Membrane P frequently asked questions flow Why does the Microgard Plus have better characteristics than other filters? Entegris’ surface modification technology enhances the membrane to create less pressure drop and greater surface area. performance ENTEGRIS, INC. ENTEGRIS, ENTEGRIS, INC. ENTEGRIS, BENEFIT Lower operational cost and increased tool uptime through fast filter installation and qualification Cleaner chemicals protect processes and end-user products. Reduced need for exchange of downstream filters. yield Reduction of defects, improvement Improved COO due to reduced need for maintenance • • • • High retention efficiency of up to 99.999% at High retention efficiency rated particle size and gels Removal of microbubbles Low pressure drop contamination Low leaching of ionic/metallic from filter Optimized for bulk chemical distribution filtration of stripping photo- systems, photoresist stripping at chemicals, temperatures below 70°C. Microgard Plus patented UPE membrane Plus patented UPE Microgard retention efficiency of any shows the highest low surfactant binding membrane. It offers wettability in solvents. and spontaneous • • • • AGE

ADVANT «» ent m No prewetting or flush-up required for rapid start-up and the risk of Eliminates IPA chemistry interactions Low particle counts and metal contamination in bulk chemical production and chemical delivery systems Excellent retention of microbubbles and gels Long filter lifetime and low pressure drop ge • • • • • al mana al ic m e h c TURE «» bulk bulk «» icrogard™ Plus Cartridge Filters Cartridge Plus Microgard™ FEA High retention efficiency and superior downstream cleanliness Sponge-like structure of patented UPE membrane Large filtration area Hydrophobic UPE membrane wets spontaneously in solvents 12 EL Grade CHEMICAL MANUFACTURING 15 ater) 0.5 µm «» «» ent m ilayer ge QCII and QCIII

0.3 µm Advantage Tr article Size al mana al P ic m esting (Counting in DI W esting (Counting in DI e ilayer IBC h Tr c 0.2 µm article T P «» bulk bulk «»

5 0

10

35 30 25 20 15 L articles/m P of Number Can I connect the Sentry quick connect systems? both systems are connectable. Yes,

Gauge pressure up to 100 kPa Gauge pressure up to 100 Typical Typical metals: ppt total metals Less than 170 Trilayer Trilayer particles (counted in DI water) particles/mL @ 0.2 15 6 particles/mL @ 0.3 1 particle/mL @ 0.5 — — — Package is approved for safe operation at at safe operation for approved is Package dispense) pressure for kPa (not100 approved safety operator ensures The disk burst — — Expected levels cleanliness — frequently asked questions • • performance • What makes our solution unique? inner materials. The clean Entegris Trilayer the liter IBC also have Will the FluoroPure 1000 same inner liner as the 200 liter version? and 200 liter packages both utilize the 1000 Yes, the inner liner material. ENTEGRIS, INC. ENTEGRIS, ENTEGRIS, INC. ENTEGRIS,

, 4 BENEFIT PO 3 , H 4 Saves both time and money Faster startup time More flexibility for facility setup No extra testing Suitable for worldwide application and transportation Complete package No extra testing; ready for use Decreases handling cost per gallon of delivered chemical SO 2 • • • • • • • • , H 2 O 2 CMP – Colloidal silica, KOH-based slurry UN tested and approved, and in compliance UN tested and approved, Group II and III for packaging with DOT rated) kPa chemicals (100 QCII and QCIII Accommodates Sentry quick connect systems three ports includes Package High-purity package Fork pocket opening on all four sides Optimized for: wet etch and clean H – HF, AGE For applications where a package greater For applications where required. The inner wetted than 200 liters is to the 200 Liter HDPE material is identical drum. Trilayer • • • • • Liter Intermediate ADVANT

«» ent Relieves user from testing qualification Dispensing, recirculation and safe shipping of chemical via separate ports Complete package Legal permission for worldwide use Single source supplier for chemical bulk delivery system Reusable application m • • • • • • ge al mana al ic m e h c TURE ulk Container (IBC) Container Bulk «» bulk bulk «» FEA FluoroPure® 1000 1000 FluoroPure® Three ports: 1. POU drum insert 2. Return drum insert 3. Burst disk UN tested and approved, and in for packaging compliance with DOT Group II and III chemicals rated) kPa (100 UN tested and approved with Sentry QCII and QCIII quick connect systems All-plastic design (HDPE material) Same wetted material as FluoroPure drums 200 liter (55 gallon) HDPE Trilayer 14 EL Grade CHEMICAL MANUFACTURING 17 «» «» ent m ge al mana al ic m e h c «» bulk bulk «» When do I use Trilayer or Advantage or Advantage When do I use Trilayer drum? Trilayer Please contact the factory with your media to discuss which drum would perform better for your specific application. ate 0% (0 of 6) 50% (3 of 6) 67% (4 of 6) Failure R Failure 2.0 meters 1.9 meters 1.9 meters Drop Height

performance HDPE Trilayer Drum: Drop test results for Drum Entegris drum frequently asked questions Competitor drum Japanese Competitor US drum Can I connect the Sentry QCII and QCIII quick Can I connect the Sentry QCII and QCIII connect systems? both systems are connectable. Yes, and What design features improve the strength closure protection? The single-piece design with molded-in chimes increases strength and closure protection. above. provided See the performance test results ENTEGRIS, INC. ENTEGRIS,

ENTEGRIS, INC. ENTEGRIS, dvantage BENEFIT iter) A Minimizes residual chemical Package cost is rapidly amortized Package over several round-trips No spending for new DIP tube (compared to competition) Complete package No additional testing; ready for use No extra testing Suitable for worldwide applications and transportation Minimize metallic, organic and particle contamination • • • • • • • • HDPEDrum UN tested and approved, and in compliance withUN tested and approved, II and III chemicals for packaging Group DOT insert during chime protects drum Tall transportation Corrosion-free performance QCIII Compatible with our Sentry QCII and quick connect system Optimized for wet etch and clean application and chemical mechanical planarization. AGE UN tested and approved for all Entegris Sentry UN tested and approved High purity option for quick connect systems. distributing chemicals. transporting and • • • • ADVANT

«» ent Maximum retrievability Reduced disposal costs Protection for drum insert and closure during transportation Single source supplier for chemical bulk delivery system Legal permission for worldwide use Ensures chemical integrity and cleanliness m • • • • • • ge al mana al ic m e h c TURE Trilayer and Trilayer andTrilayer Trilayer «» bulk bulk «» FEA FluoroPure® 55 Gallon (200FluoroPure® L Unique sump design Reusable package Molded-in chime UN tested and approved with Sentry QCII and QCIII quick connect systems UN tested and approved, and in for packaging compliance with DOT rated) kPa Group II and III chemicals (100 Wetted inner liner of the purest Wetted virgin HDPE 16

EL Grade cHEMICAL MANUFACTURING AND END-USER FACILITIES

) Pa Pressure Drop (k Drop Pressure 19 3.4 137.9 10 68.9 34.5 0 20 75.7 «» «» ent 15 56.8 m ge Pressure drop flow in (PSI) 10 37.9 al mana al Pressure drop flow out (PSI) ater Flow vs. Pressure Drop ater Flow vs. Pressure ic Flow Rate (GPM) Flow Rate (L/min) m e h ort W c 18.9 «» bulk bulk «» 05 0 Dispense P

5 0

10 20 15 ) (PSI Drop Pressure

Connection can be made without any Connection can be made without any visual alignment Requires less “push down” force by Requires less “push operator Dual engagement thread creates easy  Dual engagement thread in chemical room assembly by operators — — — — — 4-port includes recirculation diffuser 4-port includes recirculation o-ring vs. three Drum insert has no and one o-ring o-rings on Sentry QCII on shipping cap features Improved assembly — performance • • • Are the connections exclusive to Flaretek® fittings? Are the connections exclusive to Flaretek® all three connections are Flaretek connections. Yes, drumCan you use QCIII dispense head with QCII insert? No. ENTEGRIS, INC. ENTEGRIS, frequently asked questions

- ENTEGRIS, INC. ENTEGRIS, , MAE and

3 , HNO BENEFIT 4 ’’ connection) 4 ⁄ PO 3 3 , H 4 Cost-savings due to fewer changing operations for inserts (reduced maintenance) Lower labor costs with fewer connections and easier handling (self-alignment) Avoid damaging slurry performance Longer pump life due to less pump stress Increase tool up time Cost-savings due to no maintenance / replacement SO • • • • • • 2 , H 2 O 2 chemical mechanical planarization. Recirculation option ( Recirculation option prevent misconnects and dispense port) 2 check valves (in fill parts include PFA, Dispense head: wetted materials 4001 FEP and Kalrez® poly­ Drum insert: wetted parts are PFA or ethylene with FEP encapsulated o-rings Optimized for wet etch and clean applications: H HF, Key-coded connection system to connection Key-coded Key-coded Sentry QCIII Quick Connect System QCIII Quick Connect Sentry Key-coded option is the safest methodwith recirculation chemical containersof connecting FluoroPure equipment. into your distribution • • • • • AGE

ADVANT «» ent m ge Safety for maintenance personnel Insurance in maintaining correct chemical dispense to the POU Minimization of operator errors Higher flow rate No maintenance / replacement necessary • • • • • al mana al ic m e h c TURE «» bulk bulk «» Sentry™ QCIII Quick Connect System Connect Quick QCIII Sentry™ FEA 5.0 vs. 3.3 for Sentry v Key-coded system (same Key-coded key code system as for QCII) 4-port option: Recirculation and dispense in one connection C QCII system O-ring free main dispense seal at drum insert 18 EL Grade cHEMICAL MANUFACTURING AND END-USER FACILITIES

21 a) (kP Drop Pressure 7.0 03.5 20 172.5 138.0 1 69.0 34.5 0 20 port 7 ” «» «» 4 18 / Filling 3 poppet without ent poppet 16 without Dispense m poppet ge 14 Dispense with 12 10 poppet al mana al Filling with ic Flow Rate (GPM) Flow Rate (L/min) m e 68 h c 4 2 ater Flow vs. Pressure Drop @ ater Flow vs. Pressure «» bulk bulk «» 0 0123456 W

5 0

10 25 20 15 130 (PSI) Drop Pressure Increased flow DH has no check valve in – Increased flow DH has no check valve is it safe? has By incorporating a PTFE plug valve, Entegris successfully eliminated the chemical restriction while maintaining operator safety and increasing flow capacity. of 5.3 v of 3.3 v

Increased flow DH has a C Increased flow DH DHT has a C We can create a new key code for every can create a new key We chemical/blending/mixture — — — A wide range of accessories are available A wide range of accessories checker, code for QCII (e.g. covers, shipping plugs) — Flow performance: — Approximately 700 different key codes for different key Approximately 700 available different chemicals — • • performance • Are the connections exclusive to Flaretek fittings? Are the connections exclusive to Flaretek all three connections are Flaretek connections. Yes, increased Do I have to use other key codes for the flow DH? DHT. No, it is the same key code system as for ENTEGRIS, INC. ENTEGRIS, frequently asked questions

ENTEGRIS, INC. ENTEGRIS, , MAE and 3 , HNO BENEFIT 4 PO 3 , H 4 Cost-savings due to fewer changing operations for inserts (reduced maintenance) Longer pump life due to less pump stress Lower replacement costs O-ring core material can be selected to match media compatibility for longer service SO • • • • 2 turn plug valve) 4 ⁄ 1 , H 2 O 2 chemical mechanical planarization. Optimized for wet etch and clean applications: H HF, Key-coded connection system connection Key-coded prevents misconnects dispensing, One connection provides venting and level detection to seal off backflow Check valve designed the Sentry QCII when disconnecting system (safety) Dispense head: wetted parts include PFA, materials 4079 FEP and Kalrez poly- Drum insert: wetted parts are PFA or ethylene with FEP encapsulated o-rings available Optional high-flow dispense head is (includes Key-coded Sentry QCII Quick Connect System QCII Quick Connect Sentry Key-coded of connecting FluoroPure is the safest method chemical containers. • • • • • • AGE ADVANT

«» ent m Improved operator safety Insurance in maintaining correct chemical dispense to the P.O.U. High flow rate Replace only key code ring instead of complete dispense head Compatibility for all chemicals ge • • • • • al mana al ic m e h c TURE «» bulk bulk «» Sentry™ QCII Quick Connect System Connect Quick QCII Sentry™ FEA 5.3 available v Key-coded system (same key code system (same key code Key-coded system as for QCIII) Increased flow dispense head with C Dispense head key code ring replacement available Different o-ring material options (FEP encapsulated silicone, FEP encapsulated Viton and FEP encapsulated EPDM) 20 EL Grade cHEMICAL MANUFACTURING AND END-USER FACILITIES 23 «» «» ent m ge al mana al ic m Chemlock Housing e h c 0” cartridge; 457.2 mm Chemlock housing saves more than 210 mm (8.3”) for 1 (18”) for 20” cartridge «» bulk bulk «» Can I upgrade the Chemgard bowl to Chemlock? the Chemlock bowl is compatible with Yes, full benefits. Competitor Housing view an Tighten locking ring to easily seat double o-rings. Use a Chemlock/Chemgard™ integrated housing wrench to ensure proper tightening. -turn 4 4. ⁄ 1 .entegris.com wist filter T to lock. ee seal, it is indispensable to follow 2.

e a leak-fr

om the Chemlock installation manual. To ensur To

ANT: Attach head to bowl. onic file of this manual, go to www 3. Insert cartridge into bowl. IMPORT the instructions fr electr installation* frequently asked questions Can I use any standard 10“ filter in this housing? Can I use any standard 10“ will fit, standard filters without Chemlock-key Yes, way in but they have to be inserted the traditional the housing head. housing Why does Entegris recommend using a wrench and torque wrench? and This ensures proper installation of the filter avoids leakages. ENTEGRIS, INC. ENTEGRIS, 1. ENTEGRIS, INC. ENTEGRIS, etc., 3 , HNO BENEFIT 4 PO 3 , H 4 Allows for quick installation and reduced exposure to chemicals and vapors Lower cost of ownership, no need for extra fittings and connections Reduced downtime due to easy access to filter and secured cartridge insertion Lower cost of ownership due to space-savings SO 2 • • • • , H 2 O 2 A / PP chemical mechanical planarization and chemical mechanical planarization electronic grade chemical manufacturing. Small footprint changeout Easy and fast filter handling Improved safety and Lower cost of ownership PP Available in PFA and Optimized for bulk chemical distribution wet etch and clean applications: systems, H HFF, The Chemlock housing offers a space- and housing offers The Chemlock like no other cartridge time-saving solution available It is today. filter housing available and a large variety of in different sizes fitting configurations. • • • • • age Advant

«» ent ousing ousing PF m Provides virtual hands-free cartridge changeout for maximum safety and cleanliness Minimized footprint Ensures compatibility for most filter applications Cartridge can be inserted outside of the cabinet Requires less space for cartridge changeout H ge • • • • • al mana al ic m e h c TURE «» bulk bulk «» Chemlock® Chemlock® FEA Easy cartridge changeout design Compact head design with molded-on fittings Simple ¼ turn twist to lock cartridge into the bowl Smaller footprint, “minimal-clearance” Cartridge/bowl design 22 EL Grade cHEMICAL MANUFACTURING AND END-USER FACILITIES 25 7 Drain 6 Drain «» «» 5 TM 50 nm hydrophobic A Drain ent m 4 ge Drain 3 TM 50 nm Drain Number Drain QC A al mana al 2 rain ic m QuickChange does not dewet e h 1 c Drain TM 30 nm and without QuickChange Modification) and without QuickChange Hydrophobic PTFE dewets QC A Average Pressure Drop in SC2 at 80°C Average Pressure Drop InitialD «» bulk bulk «» (Due to Drain and Refill Cycles of New Membranes with (Due to Drain and Refill Cycles

3.25 3.00 2.75 2.50 2.25 2.00 1.75 1.50 a/(L/min) kP Why are QuickChange filters higher in price Why are QuickChange filters higher in filters? than other Teflon and QuickChange is an extremely clean filter, its prewetting and nondewetting technology requires high manufacturing input. All advantages as shown above easily pay off over time and run. help our customers save money in the long

QuickChange nondewetting filters QuickChange nondewetting do not dewet filter membrane Entegris’ nondewetting performance by delivers yield enabling retention and providing consistent flow properties performance • • What is the shelf life of a QuickChange filter? What is the shelf life of a QuickChange QuickChange filters are autoclaved to prevent microbiological contamination. Entegris warranties unlimited shelf life for QuickChange. ENTEGRIS, INC. ENTEGRIS, frequently asked questions ENTEGRIS, INC. ENTEGRIS, BENEFIT Higher yield and wafer throughput Cleaner device, higher yield needed for advanced technology nodes Reduced overall maintenance Lower COO and increased OEE through extended filter lifetime Higher yields and longer life through consistent filter performance Increased tool time and decreased COO through longer filter life Decreased COO through reduced work/chemical consumption • • • • • • • Enabling of rapid filter changeout due to Enabling of rapid filter prewet membrane. surface in outgassing No loss of membrane nondewetting chemicals due to patented technology while maintaining Retention of nanoparticles high flow Low metal extractables ensure cleanliness of chemicals High membrane-surface area enables low pressure drop and long lifetime Optimized for aqueous aggressive acids outgassing chemicals like and bases, SC1, SC2, SPM and piranha and high- temperature applications. QuickChange ATM and ATE filters are prewet filters and ATE ATM QuickChange ultraclean filters that enableand nondewetting removal at low pressure rapid nanoparticle rates. drop and high flow • • • • • AGE

ADVANT and ATE Filters ATM «» ent m Reduction in qualification time, ensures ultraclean processing, low risk of metallic contamination of wafers Smaller particle removal, 30 nm ATM and ATE designs add 100% and add 100% designs and ATE ATM 145% of surface area respectively to elements standard 10“ Lower flow resistance and higher flow Extended lifetime Eliminates prewetting and flushing cycles ultraclean, High-purity, ready-to-use filter Consistent flow performance in outgassing chemistries ge • • • • • • • • al mana al ic m e h c TURE «» bulk bulk «» QuickChange® QuickChange® FEA Low metal extractables High retention High membrane surface area Prewet and nondewetting PTFE membrane 24 EL Grade cHEMICAL MANUFACTURING AND END-USER FACILITIES 27 «» «» ent m ge 4.9 1.5 7.7 2.9 8.0 0.4 0.5 0.0 5.7 0.2 0.1 1.8 0.1 33.8 al mana al Intercept Hydrophilic UPE PE HCl 10% µg/unit (ppb) ic m e h c «» bulk bulk «» Filter: Membrane: Material: Chemical: Metal Na Mg Al K Ca Ti Cr Mn Fe Ni Cu Zn Pb Total etal Extractables Sample Data Intercept Metal Extractables Sample n aals force and impactio by Cake by Impaction by Sieving

particle capture by van der W

- size exclusion

- re re Intercept removes particles in typical DHF Intercept removes additional mechanism applications by an to sieving: physisorption size is retention below rated pore Particle process capability achieved, enhancing Po Po performance • • Sieving Interception How does this dual-capture mechanism work? How does this dual-capture mechanism Sieving (i.e., size exclusion) is the most common capture mechanism. Utilizing patented surface modification technology (pH <2.5), the Intercept “van der physisorption (so-called UPE membrane’s forces”) become active with small particles Waals adhering the membrane surface. This is how a 0.2 µm retention rating filter achieves a 0.03 µm retention rating performance. frequently asked questions INC. ENTEGRIS,

ENTEGRIS, INC. ENTEGRIS, BENEFIT Higher yield and throughput through efficient nanoparticle removal Increased tool up-time through fast filter installation/qualification Fast ROI through easy implementation • • • Hydrophilic membrane eliminates need for Hydrophilic membrane formation of prewetting and minimizes microbubbles Even with a 0.2 µm membrane, particle 0.03 µm (pH <2.5 and retention down to while maintainingno surfactant) is enhanced, high flow rate Long filter lifetime low metal extractables Extremely clean filter, BOE solutions in HF, Optimized for DHF, and batch baths chemical delivery systems, single wafer tools. Hydrophilic dual-capture membrane for membrane for dual-capture Hydrophilic Intercept is superior particle removal. UPE liquid one of the most advanced platforms available. microcontamination • • • • AGE ADVANT

«» ent m No prewetting or flush-up required for rapid start-up and the risk of Eliminates IPA chemistry interactions One filter fits many applications All-polyethylene cartridge provides clean drop-in replacement for existing filters Dual particle capture can improve process performance and reduce on-wafer particle defects ge • • • • • al mana al ic m e h c TURE «» bulk bulk «» Intercept® Filters FEA Hydrophilic membrane Universal filter design Advanced membrane technology 26 END-USER FACILITies 29 «» «» ent m ge al mana al ic m e h c «» bulk bulk «» Is a convoluted tubing available? available in ½”, ¾” and 1” sizes. Yes, How can I identify my installed tubing? to a Laser marking identifies the size, and traceability record material lot number and production inspection (except 0.030’’ wall). 0 5 34 24 79 34 0 17 13 10 69 .4 0 04 40 72 6. 50 17 e 03 2 8.9 F) C) 4 06 30 0- e (° e (° 11 75 62 ur ur 1. 50 AT at at 12 emperatur 2 er 00-0 er 5 . T 02 mp mp .3 AT 5-06 Te Te vs 20 93 37 , * AT uid uid 62 7 75 Fl Fl 50 sure 65.5 0-0

0-04 0 50-0 ” ratings vary slightly. Please consult the factory for 25 4 10 12 Pres / 01 .8 1 AT AT AT 37 10 *1” and 1 specific rating information. 0 50 0 0 0 0 0 0

50

15 10 25 30 20

) SIG (P re Pressu frequently asked questions Can I use the standard 4200 material with Can I use the standard 4200 material surfactant? surfactants. 4200 should not be used with fluorinated Are all tubings available as coiled tubing? coiled the standard straight wall tubing can be Yes, customized. performance ENTEGRIS, INC. ENTEGRIS, , 3

’’, ’’,

8

⁄ 3 , HNO 4 ’’, ’’, 4 ⁄ 1 PO ENTEGRIS, INC. ENTEGRIS, 3 , H 4 ’’, 1’’, sizes 2’’ 1’’, ’’, 4 ⁄ 3 SO 2 BENEFIT ’’, ’’, 2 ⁄ , H 1 2 ’’, ’’, O ’’sizes 4 2 ⁄ 2 ⁄ 1 1 Lower cost of ownership through increased productivity and throughput Added safety Lower cost of ownership through increased manufacturing uptime Accurate and easy identification in critical situations Increased product performance and longer product life ’’, 1 4 ⁄ • • • • • 1 ’’, 1’’, 1 1’’, ’’, 4 ⁄ 3 ’’, ’’, 2 ⁄ 1 Pipe is available in Tube flaring process provides leak-free flaring process provides Tube design flexibility connections and offers is ideal when PureBond weld process are required permanent connections and Non-intrusive, non-contaminating laser-marking allows permanent serialized identification immediate material Standard wall tubing is available in PFA grades Optimized for bulk distribution, valve cleanmanifold boxes mainline, wet etch and H applications: HF, Pipe and tubing are available in different MAE and chemical mechanical planarization. • pipe made from of tubing and Broad range for virgin high-purity PFA material 100% applications. highly corrosive, ultrapure • • • • • AGE ADVANT

«» ent m Products can be used with confidence at maximum continuous rating Sure method of traceability Customizable in different material quality requirements Exact grade of PFA can be selected to best fit the application Broad chemical compatibility Long product life ge • • • • • • al mana al ic m e h c TURE «» bulk bulk «» Tubing and Pipe and Tubing FEA Long-term performance testing at various media temperatures Laser marked tubing Available in different PFA grades: 4200, 4300 and 4400 (HP plus) PFA material of construction 28 END-USER FACILITies 31 «» «» ent m ge al mana al ic m e Flow Pattern Comparison Flow Pattern h c Standard vs. Sweep Elbow at 5 GPM Standard vs. Sweep Elbow «» bulk bulk «» The Computational Fluid Dynamics software analysis shows a 56% analysis software The Computational Fluid Dynamics size the same through drop in flow and 60% lower pressure increase the shear the sharp corner also reduces fitting at 5 GPM. Eliminating of slurries. rate What does a X at the end of a part number mean What does a X at the end of a part number (e.g. E8-8FN-1X)? Plus X means fitting body is made of PFA HP and it is recommended for chemicals containing fluorinated surfactants. When is FlareLock II recommended? or higher For elevated temperatures >100°C pressure (see chart) and before/after pumps (pulsation / vibration). N/A 90 (620) PFA Nut 140 (965) 225 (1551) 225 (1551) 190 (1310) FlareLock II

— 75 (514) (758) 110 CPFA Nut 225 (1551) 225 (1551 190 (1310) (758) (514) (1551) (1551) (1310)

— 75 PFA Nut 110 225 225 190 — Values in PSIG (kPa) — Values

(758) (514) (1551) (1551) (1310

75 80 (552) 110 PVDF Nut 225 225 190 ” 4 ” ” ” ” ⁄ @ Room Temperature Maximum Pressure Capabilities 4 8 2 4 1 ⁄ ⁄ ⁄ ⁄ ENTEGRIS, INC. ENTEGRIS, Size performance 1 3 1 3 1” 1 frequently asked questions What is Flaretek? expansion The flaring process provides a permanent of the (flare) of the tubing end, allowing insertion Flaretek fitting body. proper What are the tools required to make a Flaretek connection? cutter. A heating source (air gun), mandrel and tube PureBond What are the requirements to make a connection? A 1‘‘ or 2‘‘ Entegris PureBond tool. , 3

, HNO 4 PO 3 , H 4 ’’ – 2” elbows, unions, unions, 2” elbows, – ’’ SO 8 ⁄ 2 BENEFIT 1 , H 2 O 2 Reduces number of suppliers Lower design cost High service levels in all regions Lower cost of ownership through increased manufacturing uptime Lower cost of ownership through increased productivity and throughput • • • • • ’’, PureBond ’’, 4 ⁄ 1 ’’ – 1 ’’ 4 ⁄ 1 Most complete line of flare and pipe fitting Most complete line connection applications leak-free performance in Flare fittings provide demanding applications pipe fittings provide a rigid, PureBond weldable piping system permanent, leak-free and configurations: Broad range of sizes flare crosses and adapters tees, caps, reducers, Optimized for bulk distribution, valve manifold boxes mainline, wet etch and cleanmanifold boxes mainline, wet etch and H applications: HF, MAE and chemical mechanical planarization. Entegris has the broadest range of PFA fitting range of PFA fitting has the broadest Entegris sizes available for Flaretek, configurations and FlareLock®II and PureBond.® • • • • AGE ADVANT Single source supplier for all corrosive chemical high-purity, connection needs Suitable for a wide variety of FPD applications Global manufacturing and support Assured reliability and performance Provides high purity and chemical resistance Long product life • • • • • • TURE Tube and Pipe Fittings Pipe and Tube FEA Available in a broad range of sizes and configurations Largest installed customer base of PFA fittings PFA wetted surfaces 30 END-USER FACILITies 33 «» «» ent m ge al mana al ic m Cutaway View e h c Valve Integra Pneumatic ” 2 ⁄ 1 «» bulk bulk «» Is there a 1/2‘‘ orifice 3-way valve available? manually and pneumatically normally closed Yes, D8-3X-xx. inlet/ Is the 3-way valve available with different outlet configurations? ports - the D8 series is available with inlet/outlet Yes opposite of a standard valve.

‘‘ orifice sampling (T) valve available? 2 ⁄ ratings are 2 to 3 1 v Pressure range of 29” Hg to 80 PSIG (5.5 bar) Pressure range of 29” bar) for high pressure valve 0 to 120 PSIG (8.3 rating from room Ambient temperature (150°F) temperature to 65°C ratings start at room Media temperature depending on the style temperature and vary Most C frequently asked questions the Is the maximum inlet pressure same as maximum outlet pressure? diaphragm and valve to due reduced is pressure Outlet design. Is valve repair possible? Do I need tools? tools repair is possible. A repair kit and repair Yes, are available. Is there a Yes, manually and pneumatically normally closed manually and pneumatically normally closed Yes, MA8-3X-xx. performance • • • • • ENTEGRIS, INC. ENTEGRIS, , 3

, HNO 4 PO 3 , H 4 SO 2 BENEFIT , H 2 O 2 No contamination – high purity Advanced process control Lower cost of ownership No discoloration when using ammonia • • • • Available in options compliant to SEMI® standard Available in options No external metal parts molded PFA All wetted parts are design allows for field repair Unique top loading in PFA diaphragm Piston shaft is encapsulated cavity Unique body design allows for 100% drainage Optimized for bulk distribution, valve manifold boxes mainline, wet etch and cleanmanifold boxes mainline, wet etch and H applications: HF, MAE and chemical mechanical planarization. eliable field-repairable 1⁄2’’ orifice Integra 1⁄2’’ Reliable field-repairable configuration options valves with many pneumatic, 2-way, (manual, multiturn, high-pressure). 3-way, • • • • • • AGE ADVANT No metal contact with media Capability to detect media and to monitor valve position (open or closed) Allows field repair More robust material for base applications • • • • ” Valve Orifice 2 ⁄ 1 TURE Integra® Integra® FEA Piston shaft is encapsulated in the molded PFA diaphragm Available with electronic leak detection and position indication sensors loading design Top Available with ECTFE cap 32 END-USER FACILITies 35 «» «» ent m ge al mana al ic m Internal radius e h c Pressure Drop, Reduces Shear Pressure Drop, Reduces Increases Flow Capacity, Decreases Increases Flow Capacity, «» bulk bulk «» What is meant by “internal radius“? design to used from the sweep elbow Technology avoid sharp corners. Is the valve recommended for slurry application? due to the internal radius – it prevents shearing. Yes, 32°C

‘‘ orifice sampling (T) valve available? 4 ⁄ 3 90°F) ratings from 7.0 to 8.5 ratings from 7.0 to up to 180°C @ high temp valve up to 180°C @ high up to 165°C @ standard valve up to 165°C @ standard — — v Ambient temperature rating from 23°– Ambient temperature — (73°– C lockout option Manual valve safety Pressure range of 29” Hg to 80 PSIG (5.5 bar) Pressure range of 29” rating Media temperature — • • • performance • • Yes, in the DH high temperature configuration Yes, frequently asked questions Is there a higher-temperature version? in a 2-way and a sampling configuration. Yes, Is there a ENTEGRIS, INC. ENTEGRIS, , 3

, HNO 4 PO 3 , H 4 SO 2 BENEFIT , H 2 O 2 Lower cost of ownership due to space-savings Lower cost of ownership Advanced process control Decreased risk of chemical exposure during equipment maintenance • • • • ’’ design (manual and pneumatic design (manual and ’’ 4 ⁄ 3 Increasing flow capacity drop Reducing pressure No external metal parts Minimizing turbulence Saving valuable space available High temperature version (180°C/30 PSIG) Optimized for bulk distribution, valve manifold boxes mainline, wet etch and cleanmanifold boxes mainline, wet etch and H applications: HF, MAE and chemical mechanical planarization. New designs) for higher flow and small footprint. designs) for higher • • • • • • AGE ADVANT High flow with small footprint Allows field repair Capability to detect media and to monitor valve position (open or closed) Helps protect users and equipment ” Orifice Valve ” Orifice • • • • 4 ⁄ 3 TURE Integra® Integra® FEA Unique internal radius Top loading design Top Available with electronic leak detection and position indication sensors Manual valve safety lockout option 34 END-USER FACILITies 37

«» «» ent m ge

al mana al

ic

m e h c

«» bulk bulk «» Unique bellows design – One piece – Optimum material pleat design – “No Touch” – Integral media seal Helps maintain media integrity Is there a 3-way valve available? No. Is valve repair possible? Do I need tools? tools repair is possible. A repair kit and repair Yes, are available. • • 38°C

ratings from 9 to 13.6 40 PSIG (2.8 bar) @ 93°C (200°F) 40 PSIG (2.8 bar) @ — v Ambient temperature rating from 23°– Ambient temperature (73°–100°F) rating from 23°–93°C Media temperature (73°–200°F) C Pressure range of 29” Hg to 80 PSIG (5.5 bar) Pressure range of 29” — Is there a 1‘‘ orifice sampling (T) valve available? Is there a 1‘‘ orifice sampling (T) valve in both manual and pneumatic designs. Yes, bellows? Could slurry particles agglomerate in the No, due to “no touch” pleat design. frequently asked questions • • • performance • ENTEGRIS, INC. ENTEGRIS, , 3

, HNO 4 PO 3 , H 4 SO 2 BENEFIT , H 2 O 2 ’’ Flaretek connection 4 ⁄ 1 Longer lifetime in high-flow applications Lower cost of ownership Lower cost of ownership due to space-savings • • • Optimized for bulk distribution, valve distribution, valve Optimized for bulk wet etch and cleanmanifold boxes mainline, H applications: HF, Ideal for high flow application Ideal for high flow No external metal parts Unique below design Available up to 1 MAE and chemical mechanical planarization. 1’’ for bulk chemical distribution where chemical distribution 1’’ for bulk (manual, pneumatic, high flow is required sampling designs). • • • • AGE ADVANT More robust valve design Allows field repair Increased flow rates • • • TURE Integra® 1” Orifice Valve 1” Integra® FEA Actuator body / outer cap Top loading design Top Bellows design 36 END-USER FACILITies 39

B B B B C B B B C B B B B B C B B B C B C B B C A B D C PE RTS A «» «»

C C B B C B C B B C B C B B B B B C C B B B A A A A A D PP ent m ge

NONWETTED P C C B B B B B C C B C B B B B B A A A A A A A A A A A D PVDF

P al mana al U ic B A A A A A A A A A A A A A A A A A A A A A A A A A A/B A/B alrez® m K e 6375

h c B B C A A A A A A A A A A A A A A A A A A A A B/C B/C B/C A/B A/B alrez® 1050 . Nothing in this chart constitutes a change to the K

«» bulk bulk «» B B B B B C A A A A A A A A A A A A A A A A A A A rts A/B A/B A/B alrez® 4079 K Pa Not recommended for wetted parts in high-purity Not recommended for wetted for nonwetted parts in some applications. May be suitable applications C:  D: Information not available A A A A A A A A A A A A A A A A A A A A A A A A A A A A etted PTFE W A**

B B C B B B B A A A A A A A A A A A A A A A A A A A A A PF

B B B C B B B B B B A A A A A A A A A A A A A A A A A/B A/B CTFE** Potassium Hydroxide Potassium Acetone Hydrogen Peroxide Dissolved Ozone Dissolved Chlorine n-Butyl Acetate Phosphoric Sulfuric Ammonium Hydroxide Ethylene Glycol Isopropyl Alcohol Methanol Methyl Ethyl Ketone Nitric Ammonium Fluoride n-methyl pyrrolidone Acetates Hydrofluoric Tetra Methyl Ammonium Methyl Ammonium Tetra Hydroxide (TMAH) Alcohols Amines Hydrocarbones, Aromatic Hydrochloric Hydrocarbons, Alkane Ketones Chemical Acetic HFN High Temperature > 122°F (50°C)

Preferred, suitable for all high-purity applications Preferred, suitable for all high-purity Acceptable, suitable for nonwetted parts in most applications. Acceptable, suitable for nonwetted parts in high-purity May not be suitable for wetted applications The compatibility chart is compiled from information published by: Entegris, DuPont Dow Elastomers, Welch Fluorocarbon, Welch Dow Elastomers, DuPont The compatibility chart is compiled from information published by: Entegris, Guide. the PDL Handbook and Compass Corrosion Little Giant Pump Company, *  ** The suitability of CTFE and PFA is based on both chemical resistance and permeability. chart for specific end-user Entegris neither represents nor warrants the accuracy or sufficiency of the information set forth in this applications. Ultimate responsibility for material selection remains with the end user terms and conditions under which the Entegris product was sold. Organic solvents Organic Organic solvents Organic Oxidants Bases Categories Chemical Type Acids Entegris chemical compatibility chart for Sensing and Control products* for Sensing chart chemical compatibility Entegris A:  B: ENTEGRIS, INC. ENTEGRIS, , 3

, HNO 4 PO 3 , H 4 SO BENEFIT 2 , H 2 O 2 Improves yield by increasing particle performance Increases overall equipment efficiency Improves system design flexibility Increases tool uptime • • • • System diagnostics System pressure monitoring for tool queuing valve manifold Pressure at distribution modules, boxes and point-of-use Differential pressure in filtration systems Accuracy of 1% of full scale Accuracy of 1% of technology Nonmetallic sensing constructed of PFA, PTFE , All wetted parts are CTFE and Kalrez No moving parts No fill fluids Optimized for bulk distribution, valve cleanmanifold boxes mainline, wet etch and H applications: HF, MAE and chemical mechanical planarization. Where can I use NT pressure transducers? • • • • AGE Provide accurate and reliable inert pressure and reliable Provide accurate gas or liquid pressure, measurements. Measure process conditions for allowing you to monitor system performance. increased safety and • • • • • ADVANT Compatible with all semiconductor process chemistries Enables tool interaction with pressure transducer and offers increased accuracy in pressure measurements Compact design enables easy installation Reduces contamination potential • • • • TURE NT® Transducers Pressure FEA CTFE is generally used for aqueous solutions, CTFE is generally used for aqueous solutions, exceptions apply exceptions apply PFA is generally used for solvents, In temperatures above 50°C, PFA performs better All wetted parts are constructed of PTFE, sapphire and other high purity polymers for corrosion resistance Provides compatibility and easy integration with electronic displays and monitoring systems Industry standard Flaretek flared port connections No moving parts or fill fluids 38 frequently asked questions What is the PFA vs CTFE sensor interface when not using sapphire technology? • • • END-USER FACILITies 41 «» «» ent m ge al mana al ic m e h c «» bulk bulk «» What is the largest available volume? gallons. The largest volume for the day tank is 500 Are different vessel volumes available? from 50 liters up to 500 gallons. Yes, (83”) (76”) (49”) (37”) (59”) (63”) Height 940 mm 2108 mm 2108 1930 mm 1245 mm 1499 mm 1600 mm

Diameter 914 mm (36”) 914 mm (32”) 813 1168 mm (46”) 1168 1168 mm (46”) 1168 mm (46”) 1168 1219 mm (48”) 1219 211 317 500 132 150 190 Gallon

719 1893 1200 500 567 800 Liter RM10087 Part Number Part RM500T RM10052 RM10022 RM800T RM1200T ENTEGRIS, INC. ENTEGRIS, frequently asked questions Could I have a drain in a PE/PFA day tank? a drain port can be molded and Yes, connections bonded. Could I have a drain in a PE/PE day tank? the No, a drain port is not available because of non-bondable material. performance

’’ 4 ⁄ 1 , MAE and 3 ’” to 16 ⁄ 1 , HNO BENEFIT 4 PO 3 , H 4 Reduces contamination risk Reduces contamination risk SO • • 2 , H 2 O 2 chemical mechanical planarization. Expertise in the design, development and Expertise in the design, mixing or storage tanks, manufacture of process containers vessels and shipping vessels rotationally Custom and semi-custom including of materials, molded out of a variety PFA and polyethylene from 20 L to 1,900 L Size capabilities range from with a wall thickness HF, H HF, Low volume runs are economical due to lower Low volume runs are economical due or tooling costs compared to blowmolded injection molded products Optimized for wet etch and clean applications: Day tanks are a customized solution for non- are a customized Day tanks from 50 L up to 1,900 L. transportable vessels • • • • AGE ADVANT Customized day tank along with customer requirements Flaretek connection possible Level observation Customized day tank along with customer requirements • • • • TURE FluoroPure® Day Tanks FEA Stands (stainless steel, epoxy-coated carbon steel, PVC) Stands (stainless steel, epoxy-coated carbon steel, PVC) Overpack options for PE/PFA: – Ability of welding connections – Sight windows boxes – Valve – Connection supports –  Overpack options for PE/PE: – All connection NPT (no welding) – Sight windows boxes – Valve – Connection supports –  40 END-USER FACILITies 43 ‘‘ 2 ⁄ 1 ‘‘ and «» «» 8 ⁄ 3 ent m ge al mana al ic m Manifold Examples e h ‘‘ custom Integra. c 2 ⁄ 1 «» bulk bulk «» stack valve, eliminates tubing and fitting connection, and allows complex flow pass and control in a single component. How can I manage the mixing analysis? Entegris can perform computational analysis. Are other types of manifolds available? there are Dymension full rinse, Yes, drawing where the specific /

Flushing performance Flow velocity Mixing analysis Mixer designs available for multiple flow requirements Creates homogeneous chemical mix downstream of manifold Effective inline blending — — — — — — — — Computational fluid dynamics: — — — Optional integrated-mixing element: — Mixing Manifold Solution ENTEGRIS, INC. ENTEGRIS, frequently asked questions What do I need for quoting? will need a sketch You function is described. What is the lead time on such customized products? working days The lead time for a new prototype is 10 pieces. for up to 10 Why does a manifold reduce overall fluid delivery system cost? Manifolds require less space and have reduced main­ tenance. Manifolds also have fewer connections which • performance •

, MAE and 3 , HNO 4 BENEFIT PO 3 , H 4 SO Reduces overall fluid delivery system cost - Less space - Reduced maintenance - Fewer potential leak points Lower cost of ownership Short lead times Reduces process start-up time 2 • • • • , H 2 O 2 chemical mechanical planarization. HF, H HF, Enables you to replace or change a single Enables you to replace valve as needed technology provides a FlareMount™ sealing robust, leak-free seal FlareMount interface Available with a dual available in PFA or Manifold blocks are proprietary HyQ® PTFE space Small footprint saves valuable equipment Optimized for wet etch and clean applications: anifold Customized fluid control solution where a fluid control Customized is needed small footprint valve-function leaking points – tailoredwith fewer potential to specific needs. • • • • • age Advant Less space needed Eliminates tubing and fitting connections Allows complex flow path and control Eliminates gasket or o-rings Increases serviceability Enables simple field adjustments Fast prototyping within 10 Fast prototyping within 10 working days • • • • • • • TURE Dymension® M Valve FEA Manifold block – simplifies design – Single component – One part number Unique FlareMount technology - Replaceable valves - Interchangeable valves Manufacturing process via quick-turn capability 42 Entegris regional customer service centers

Region Telephone Fax North America 800-394-4083 800-763-5820 Germany +49 (0) 351 795 97-0 +49 (0) 351 795 97-499 France +33 (0) 4 76 35 73 50 +33 (0) 4 76 35 73 80 United Kingdom +33 476 357 354 +33 476 357 380 Italy +33 476 357 352 +33 476 357 380 Israel +972 (0) 73 221 00 00 +972 (0) 73 221 00 22 Japan +81 3-5442-9718 +81 3-5442-9738 Malaysia +60-4-427-4200 +60-4-641-3294 Korea +82-31 738-5300 +82-31 738-5302 Taiwan +886-3-571-0178 +886-3-572-9520 Singapore +65 6745-2422 +65 6745-4477 China +86 21 2898 6710 +86 21 5080 5598

North America EUROPE JAPAN ASIA/PACIFIC Massachusetts France Nihon Entegris K.K. Korea Entegris, Inc. Customer Service Center Regional Headquarters Entegris Korea, Ltd. Corporate Headquarters for Southern, Western and Mita-Kokusai Bldg. 8F, Seongok B/D 129 Concord Road Northern Europe 4-28, 1-Chome Mita Minato-Ku 4-1, Sunae-dong Billerica, MA 01821 USA Entegris S.A.S. Tokyo, Japan 108-0073 Bundang-gu, Seongnam-city Tel. +1 978-436-6500 Parc Centr’ Alp Ouest Tel. +81 3-5442-9718 Kyunggi-do, Korea 463-825 Fax +1 978-436-6735 196 rue du Rocher de Lorzier Fax +81 3-5442-9738 Tel. +82 31 738-5300 38430 Moirans Fax +82 31 738-5301 Minnesota France Nihon Entegris K.K. Entegris, Inc. Tel. +33 (0) 4 76 35 73 50 Shin-Osaka Prime Tower Bldg. Malaysia 101 Peavey Road Fax +33 (0) 4 76 35 73 80 1-1, Nishinakajima Entegris (Malaysia) Sdn Bhd Chaska, MN 55318 USA 6-Chome Yodogawa-Ku Unit 14 & 15, Lower Level 5 Tel. +1 952-556-3131 Germany Osaka, Japan 532-0011 (Executive Wing), Hotel Equatorial Fax +1 952-556-1880 Customer Service Centers for Tel. +81 6-6390-0594 No. 1 Jalan Bukit Jambul Eastern and Central Europe Fax +81 6-6390-3110 11900 Bayan Lepas, Penang Customer Service Entegris GmbH Malaysia Tel. +1 952-556-4181 Hugo-Junkers-ring 5 Nihon Entegris K.K. Tel. +60-4-427-4200 Tel. 800-394-4083 Gebaude 107 Hakataekihigashi 113 Bldg. Fax +60-4-641-3294 (toll-free within Industriegebiet Klotzsche 13-9 Hakataekihigashi North America) 01109 Dresden 1-Chome Hakata-Ku Singapore Fax +1 952-556-8022 Germany Fukuoka, Japan 812-0013 Entegris Singapore Pte Ltd. Fax 800-763-5820 Tel. +49 (0) 351-79597-0 Tel. +81 92-471-8133 31 Kaki Bukit Road 3 (toll-free within Fax +49 (0) 351-79597-499 Fax +81 92-471-8134 Techlink, #06-08/11 North America) Singapore 417818 Israel ASIA/PACIFIC Tel. +65 6745-2422 Entegris Israel Limited Fax +65 6745-4477 China  Izmargad Street 12 Entegris (Shanghai) Taiwan Kiryat-Gat Microelectronics Trading Co., Ltd. Entegris Asia LLC, Taiwan Branch Israel Unit 606-609, Tower 1 14F, No. 120, Sec. 2, Tel. +972 (0) 73 221 00 00 German Centre Gong Dao Wu Road Fax +972 (0) 73 221 00 22 No. 88, Ke Yuan Road Hsinchu City 30072 Zhangjiang Hi-Tech Park Taiwan R.O.C. Shanghai 201203 Tel. +886-3-571-0178 P.R. of China Fax +886-3-572-9520 Tel. +86 21 2898 6710 Fax +86 21 5080 5598 Entegris Asia LLC, Taiwan Branch 14F-6, No. 126, Yung-Fu Road Entegris (Beijing) Taichung 40762 Microelectronics Trading Co., Ltd. Taiwan R.O.C. Room 1105, Zhaolin Mansion Tel. +886-4-2463-9939 No. 15 Ronghua Middle Road Fax +886-4-2463-9025 BDA, Beijing 100176 P.R. of China Entegris Asia LLC, Taiwan Branch Entegris®, Mykrolis®, Chemlock®, Chemgard™, Dymension®, FlareLock®, FlareMount™, Flaretek®, Fluorogard®, FluoroPure®, HyQ®, Integra®, Intercept®, Tel. +86 10 5107 8379 3F, No. 322, Chung-Cheng Road LiquidLens™, Microgard™, NT®, ProcessGard®, PureBond®, QuickChange® and Sentry™ are trademarks of Entegris, Inc. Tel. +86 10 5107 8300 Hsinshih Township Kalrez® and Viton® are registered trademarks of DuPont Dow Elastomers, L.L.C. Fax +86 10 5107 8326 Tainan County 74447 Teflon® is a registered trademark of E. I. du Pont de Nemours and Company. Taiwan R.O.C. SEMI® is a registered trademark of Semiconductor Equipment and Materials International. Tel. +886-6-589-6008 Fax +886-6-501-3799 ENTEGRIS, INC. Corporate Headquarters 129 Concord Road Billerica, MA 01821 USA Tel. +1 978-436-6500 Fax +1 978-436-6735 www.entegris.com

©2010 Entegris, Inc. All rights reserved. 9000-5946ENT-0610