Hydrazine-Assisted Formation of Indium Phosphide (Inp)-Based Nanowires and Core-Shell Composites
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(12) United States Patent (10) Patent No.: US 9,543,378 B2 Singh (45) Date of Patent: Jan
USO09543378B2 (12) United States Patent (10) Patent No.: US 9,543,378 B2 Singh (45) Date of Patent: Jan. 10, 2017 (54) SEMICONDUCTOR DEVICES AND USPC ........................................... 257/25, 347, 402 FABRICATION METHODS THEREOF See application file for complete search history. (71) Applicant: GLOBALFOUNDRIES Inc., Grand (56) References Cited Cayman (KY) U.S. PATENT DOCUMENTS (72) Inventor: Jagar Singh, Clifton Park, NY (US) 4,940,671 A * 7/1990 Small ................ HO1L 21,82285 257 (491 (73) Assignee: GLOBALFOUNDRIES INC., Grand 8,610,241 B1* 12/2013 Hu ...................... HOL 270629 Cayman (KY) 257,353 2004/0095698 A1* 5, 2004 Gerrish ............... HOL27/O255 *) Notice: Subject to anyy disclaimer, the term of this 361 (91.1 patent is extended or adjusted under 35 2004/0253779 A1* 12/2004 Hong ............... HOL 21,8249 U.S.C. 154(b) by 10 days. 438,203 (21) Appl. No.: 14/467,420 * cited by examiner Primary Examiner — Kenneth Parker (22) Filed: Aug. 25, 2014 Assistant Examiner — Warren H Kilpatrick (65) Prior Publication Data (74) Attorney, Agent, or Firm — Heslin Rothenberg Farley & Mesiti P.C.; Kristian E. Ziegler US 2016/OO56231 A1 Feb. 25, 2016 (57) ABSTRACT (51) Int. Cl. Semiconductor devices and fabrication methods thereof are HOIL 29/06 (2006.01) provided. The semiconductor devices include: a substrate, HOIL 29/66 (2006.01) the Substrate including a p-type well adjoining an n-type HOIL 29/735 (2006.01) well; a first p-type region and a first n-type region disposed HOIL 29/47 (2006.01) within the n-type well of the substrate, where the first p-type HOIL 29/423 (2006.01) region at least partially encircles the first n-type region; and HOIL 29/08 (2006.01) a second p-type region and a second n-type region disposed HOIL 29/10 (2006.01) in the p-type well of the substrate, where the second n-type (52) U.S. -
TR-499: Indium Phosphide (CASRN 22398-80-7) in F344/N Rats And
NTP TECHNICAL REPORT ON THE TOXICOLOGY AND CARCINOGENESIS STUDIES OF INDIUM PHOSPHIDE (CAS NO. 22398-80-7) IN F344/N RATS AND B6C3F1 MICE (INHALATION STUDIES) NATIONAL TOXICOLOGY PROGRAM P.O. Box 12233 Research Triangle Park, NC 27709 July 2001 NTP TR 499 NIH Publication No. 01-4433 U.S. DEPARTMENT OF HEALTH AND HUMAN SERVICES Public Health Service National Institutes of Health FOREWORD The National Toxicology Program (NTP) is made up of four charter agencies of the U.S. Department of Health and Human Services (DHHS): the National Cancer Institute (NCI), National Institutes of Health; the National Institute of Environmental Health Sciences (NIEHS), National Institutes of Health; the National Center for Toxicological Research (NCTR), Food and Drug Administration; and the National Institute for Occupational Safety and Health (NIOSH), Centers for Disease Control and Prevention. In July 1981, the Carcinogenesis Bioassay Testing Program, NCI, was transferred to the NIEHS. The NTP coordinates the relevant programs, staff, and resources from these Public Health Service agencies relating to basic and applied research and to biological assay development and validation. The NTP develops, evaluates, and disseminates scientific information about potentially toxic and hazardous chemicals. This knowledge is used for protecting the health of the American people and for the primary prevention of disease. The studies described in this Technical Report were performed under the direction of the NIEHS and were conducted in compliance with NTP laboratory health and safety requirements and must meet or exceed all applicable federal, state, and local health and safety regulations. Animal care and use were in accordance with the Public Health Service Policy on Humane Care and Use of Animals. -
Discovering Amorphous Indium Phosphide Nanostructures with High-Temperature Ab Initio Molecular Dynamics
Discovering Amorphous Indium Phosphide Nanostructures with High-Temperature ab Initio Molecular Dynamics The MIT Faculty has made this article openly available. Please share how this access benefits you. Your story matters. Citation Zhao, Qing, Lisi Xie, and Heather J. Kulik. “Discovering Amorphous Indium Phosphide Nanostructures with High-Temperature Ab Initio Molecular Dynamics.” The Journal of Physical Chemistry C 119.40 (2015): 23238–23249. As Published http://dx.doi.org/10.1021/acs.jpcc.5b07264 Publisher American Chemical Society (ACS) Version Author's final manuscript Citable link http://hdl.handle.net/1721.1/105155 Terms of Use Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. Discovering Amorphous Indium Phosphide Nanostructures with High-Temperature Ab Initio Molecular Dynamics Qing Zhao1,2, Lisi Xie1, and Heather J. Kulik1,* 1Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139 2Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139 ABSTRACT: We employ high-temperature ab initio molecular dynamics (AIMD) as a sampling approach to discover low-energy, semiconducting, indium phosphide nanostructures. Starting from under-coordinated models of InP (e.g. a single layer of InP(111)), rapid rearrangement into a stabilized, higher-coordinate but amorphous cluster is observed across the size range considered (In3P3 to In22P22). These clusters exhibit exponential decrease in energy per atom with system size as effective coordination increases, which we define through distance-cutoff coordination number assignment and partial charge analysis. The sampling approach is robust to initial configuration choice as consistent results are obtained when alternative crystal models or computationally efficient generation of structures from sequential addition and removal of atoms are employed. -
COMBINED LIST of Particularly Hazardous Substances
COMBINED LIST of Particularly Hazardous Substances revised 2/4/2021 IARC list 1 are Carcinogenic to humans list compiled by Hector Acuna, UCSB IARC list Group 2A Probably carcinogenic to humans IARC list Group 2B Possibly carcinogenic to humans If any of the chemicals listed below are used in your research then complete a Standard Operating Procedure (SOP) for the product as described in the Chemical Hygiene Plan. Prop 65 known to cause cancer or reproductive toxicity Material(s) not on the list does not preclude one from completing an SOP. Other extremely toxic chemicals KNOWN Carcinogens from National Toxicology Program (NTP) or other high hazards will require the development of an SOP. Red= added in 2020 or status change Reasonably Anticipated NTP EPA Haz list COMBINED LIST of Particularly Hazardous Substances CAS Source from where the material is listed. 6,9-Methano-2,4,3-benzodioxathiepin, 6,7,8,9,10,10- hexachloro-1,5,5a,6,9,9a-hexahydro-, 3-oxide Acutely Toxic Methanimidamide, N,N-dimethyl-N'-[2-methyl-4-[[(methylamino)carbonyl]oxy]phenyl]- Acutely Toxic 1-(2-Chloroethyl)-3-(4-methylcyclohexyl)-1-nitrosourea (Methyl-CCNU) Prop 65 KNOWN Carcinogens NTP 1-(2-Chloroethyl)-3-cyclohexyl-1-nitrosourea (CCNU) IARC list Group 2A Reasonably Anticipated NTP 1-(2-Chloroethyl)-3-cyclohexyl-1-nitrosourea (CCNU) (Lomustine) Prop 65 1-(o-Chlorophenyl)thiourea Acutely Toxic 1,1,1,2-Tetrachloroethane IARC list Group 2B 1,1,2,2-Tetrachloroethane Prop 65 IARC list Group 2B 1,1-Dichloro-2,2-bis(p -chloropheny)ethylene (DDE) Prop 65 1,1-Dichloroethane -
Binary and Ternary Transition-Metal Phosphides As Hydrodenitrogenation Catalysts
Research Collection Doctoral Thesis Binary and ternary transition-metal phosphides as hydrodenitrogenation catalysts Author(s): Stinner, Christoph Publication Date: 2001 Permanent Link: https://doi.org/10.3929/ethz-a-004378279 Rights / License: In Copyright - Non-Commercial Use Permitted This page was generated automatically upon download from the ETH Zurich Research Collection. For more information please consult the Terms of use. ETH Library Diss. ETH No. 14422 Binary and Ternary Transition-Metal Phosphides as Hydrodenitrogenation Catalysts A dissertation submitted to the Swiss Federal Institute of Technology Zurich for the degree of Doctor of Natural Sciences Presented by Christoph Stinner Dipl.-Chem. University of Bonn born February 27, 1969 in Troisdorf (NRW), Germany Accepted on the recommendation of Prof. Dr. Roel Prins, examiner Prof. Dr. Reinhard Nesper, co-examiner Dr. Thomas Weber, co-examiner Zurich 2001 I Contents Zusammenfassung V Abstract IX 1 Introduction 1 1.1 Motivation 1 1.2 Phosphides 4 1.2.1 General 4 1.2.2 Classification 4 1.2.3 Preparation 5 1.2.4 Properties 12 1.2.5 Applications and Uses 13 1.3 Scope of the Thesis 14 1.4 References 16 2 Characterization Methods 1 2.1 FT Raman Spectroscopy 21 2.2 Thermogravimetric Analysis 24 2.3 Temperature-Programmed Reduction 25 2.4 X-Ray Powder Diffractometry 26 2.5 Nitrogen Adsorption 28 2.6 Solid State Nuclear Magnetic Resonance Spectroscopy 28 2.7 Catalytic Test 33 2.8 References 36 3 Formation, Structure, and HDN Activity of Unsupported Molybdenum Phosphide 37 3.1 Introduction -
Measurement and Application of Optical Nonlinearities in Indium Phosphide, Cadmium Mercury Telluride and Photonic Crystal Fibres
MEASUREMENT AND APPLICATION OF OPTICAL NONLINEARITIES IN INDIUM PHOSPHIDE, CADMIUM MERCURY TELLERIDE AND PHOTONIC CRYSTAL FIBRES Trefor James Sloanes A Thesis Submitted for the Degree of DEng at the University of St. Andrews 2009 Full metadata for this item is available in the St Andrews Digital Research Repository at: https://research-repository.st-andrews.ac.uk/ Please use this identifier to cite or link to this item: http://hdl.handle.net/10023/723 This item is protected by original copyright Measurement and Application of Optical Nonlinearities in Indium Phosphide, Cadmium Mercury Telluride and Photonic Crystal Fibres This thesis is presented in application for the degree of Doctor of Engineering to the University of St. Andrews by Trefor James Sloanes I, Trefor James Sloanes, hereby certify that this thesis, which is approximately 28,500 words in length, has been written by me, that it is the record of work carried out by me and that it has not been submitted in any previous application for a higher degree. I was admitted as a research student in October, 2003 and as a candidate for the degree of Doctor of Engineering in August, 2004; the higher study for which this is a record was carried out in the University of St Andrews between 2003 and 2008. date ……………… signature of candidate ……………… I hereby certify that the candidate has fulfilled the conditions of the Resolution and Regulations appropriate for the degree of Doctor of Engineering in the University of St Andrews and that the candidate is qualified to submit this thesis in application for that degree. -
Vertically Aligned Arrays of Insb Nanostructures for Tuning Light Absorption in the Mid-Infrared
Vertically Aligned Arrays of InSb Nanostructures for Tuning Light Absorption in the Mid-Infrared The Harvard community has made this article openly available. Please share how this access benefits you. Your story matters Citable link http://nrs.harvard.edu/urn-3:HUL.InstRepos:37799758 Terms of Use This article was downloaded from Harvard University’s DASH repository, and is made available under the terms and conditions applicable to Other Posted Material, as set forth at http:// nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of- use#LAA Vertically Aligned Arrays of InSb Nanostructures for Tuning Light Absorption in the Mid-Infrared Nicholas Collins A Thesis in the Field of Bioengineering and Nanotechnology for the Degree of Master of Liberal Arts Harvard University March 2018 Copyright 2017 Nicholas Collins Abstract Infrared detection is valuable across a diverse range of fields. Military applications have long been the focus of development of infrared detection technology, but as accessibility to infrared detectors grows, industries ranging from waste management to medicine have shown broad uses for the technology. Imaging of biological samples is particularly well suited for near and mid infrared imaging as opaque superficial layers often inhibit the use of visible light to detect underlying structures which may hold diagnostic value. Infrared detecting devices are typically underutilized in a biomedical setting despite there being many potential applications. The primary objective of this research was to provide a proof of concept for a novel transmission filters system in the near and mid infrared range using vertically oriented indium antimonide (InSb) nanostructures. This was achieved by conducting optical simulations of InSb nanowires, developing an ICP-RIE etching process suitable for InSb, and, lastly, by measuring specular reflectance of the InSb nanostructure arrays using FT-IR microscopy. -
United States Patent (19) (11) 4,237,471 Pommerrenig 45) Dec
United States Patent (19) (11) 4,237,471 Pommerrenig 45) Dec. 2, 1980 54 METHOD OF PRODUCING A 58) Field of Search ........................ 357/30, 16, 61, 63 SEMCONDUCTORPHOTODODE OF NDUM ANTMONDE AND DEVICE 56 References Cited THEREOF U.S. PATENT DOCUMENTS 75 Inventor: Dieter H. Pommerrenig, Burke, Va. 3,558,373 1/1971 Moody ................................. 148/171 73 Assignees: Hamamatsu Corporation, Middlesex, Primary Examiner-Martin H. Edlow N.J.; Hamamatsu TV Co., Ltd., Attorney, Agent, or Firm-Moonray Kojima Hamamatsu, Japan 57 ABSTRACT (21 Appl. No.: 51,245 A method of producing semiconductor photodiodes of indium antimonide, by growing an indium antimonide 22 Filed: Jun. 22, 1979 epitaxial layer of one type conductivity onto a substrate of indium antimonide of another type conductivity, Related U.S. Application Data utilizing conventional vapor phase or liquid phase epi 60 Continuation of Ser. No. 879,640, Feb. 21, 1978, aban taxial techniques, wherein the antimony in the epitaxial doned, which is a division of Ser. No. 739,659, Nov. 8, layer is partially replaced by either arsenic or phospho 1976, abandoned. rus, thus resulting in a high performing photoelectric 51 Int. Cl’............................................. H01L 27/14 device. 52 U.S.C. ........................................ 357/30; 357/16; 357/61 6 Claims, 16 Drawing Figures U.S. Patent Dec. 2, 1980 Sheet 1 of 2 4,237,471 A.27, 7 W/W 727.4c /////////////////// XXXXXXXXXXXXXXXXXXXXXXXX A27.4eXXYYXXYYXXXX U.S. Patent Dec. 2, 1980 Sheet 2 of 2 4,237,471 77.5A O 27 PZZZZZZZZZZZZZZZZZZZZ-53 " V ZZZZZZZZZZZZZZZZZZZZZZZ \ \ 22222XXXXXXXXXXXV N Ny.V 4,237,471 2 thereby, and wherein an indium antimonide epitaxial METHOD OF PRODUCING ASEMECONDUCTOR layer of one type conductivity is epitaxially grown onto PHOTODODE OF NEDUMANTMONDE AND an indium antimonide substrate of another type conduc DEVICE THEREOF tivity, with the antimony in the epitaxial layer partially replaced with arsenic or phosphorus, Photodiodes and This is a continuation of application Ser. -
Indium Phosphide 22398-80-7
Indium Phosphide 22398-80-7 DRAFT REPORT SUPPORT FOR CHEMICAL NOMINATION AND SELECTION PROCESS OF THE NATIONAL TOXICOLOGY PROGRAM NIEHS CONTRACT NO. NO1-ES-85218 EXECUTIVE SUMMARY OF DATA INDIUM PHOSPHIDE (22398-80-7) November 7, 1988 Submitted to: National Toxicology Program National Institutes of Health Building 31, Room 2B-55 Bethesda, Maryland 20205 Submitted by: Chemical Hazard Assessment Division Syracuse Research Corporation Merrill Lane Syracuse, New York 13210 Overview for Indium Phosphide Nomination History: Indium phosphide was nominated to the NTP for toxicity and carcinogenicity testing by NIEHS based on its use in the electronics industry, its potential acute toxicity, and lack of toxicity data. Physical and Chemical Properties: Brittle, metallic mass with a melting point of 1070oC. No information was found on its solubility in water or organic solvents. It is slightly soluble in mineral acids. Production, Uses, and Exposure: The TSCA Inventory reported three companies as domestic producers of indium phosphide in 1977. One of these reported less than 1,000 pounds; the other two did not report production. No other information on the domestic production or importation of indium phosphide was available. Indium phosphide is used in semiconductor devices, injector lasers, and solar cells. It has been proposed to replace silicon in microchips. Indium phosphide is not listed in the NOES data base. The ACGIH has not recommended a TLV for indium phosphide but has recommended a TLV of 0.1 mg/m3 for indium and its compounds. Regulatory Status: No information was found on the regulatory status of indium phosphide. Toxicological data: Human - No information on toxicological effects in humans was found. -
High Hazard Chemical Policy
Environmental Health & Safety Policy Manual Issue Date: 2/23/2011 Policy # EHS-200.09 High Hazard Chemical Policy 1.0 PURPOSE: To minimize hazardous exposures to high hazard chemicals which include select carcinogens, reproductive/developmental toxins, chemicals that have a high degree of toxicity. 2.0 SCOPE: The procedures provide guidance to all LSUHSC personnel who work with high hazard chemicals. 3.0 REPONSIBILITIES: 3.1 Environmental Health and Safety (EH&S) shall: • Provide technical assistance with the proper handling and safe disposal of high hazard chemicals. • Maintain a list of high hazard chemicals used at LSUHSC, see Appendix A. • Conduct exposure assessments and evaluate exposure control measures as necessary. Maintain employee exposure records. • Provide emergency response for chemical spills. 3.2 Principle Investigator (PI) /Supervisor shall: • Develop and implement a laboratory specific standard operation plan for high hazard chemical use per OSHA 29CFR 1910.1450 (e)(3)(i); Occupational Exposure to Hazardous Chemicals in Laboratories. • Notify EH&S of the addition of a high hazard chemical not previously used in the laboratory. • Ensure personnel are trained on specific chemical hazards present in the lab. • Maintain Material Safety Data Sheets (MSDS) for all chemicals, either on the computer hard drive or in hard copy. • Coordinate the provision of medical examinations, exposure monitoring and recordkeeping as required. 3.3 Employees: • Complete all necessary training before performing any work. • Observe all safety -
Environmental Protection Agency § 712.30
Environmental Protection Agency § 712.30 (2) As a non-isolated intermediate. ment Information Manufacturer’s Re- (3) As an impurity. port for each chemical substance or [47 FR 26998, June 22, 1982; 47 FR 28382, June mixture that is listed or designated in 30, 1982] this section. (2) Unless a respondent has already § 712.28 Form and instructions. prepared a Manufacturer’s Report in (a) Manufacturers and importers sub- conformity with conditions set forth in ject to this subpart must submit a sin- paragraph (a)(3) of this section, the in- gle EPA Form No. 7710–35, ‘‘Manufac- formation in each Manufacturer’s Re- turer’s Report—Preliminary Assess- port must cover the respondent’s latest ment Information,’’ for each plant site complete corporate fiscal year as of the manufacturing or importing a chem- effective date. The effective date will ical substance listed in § 712.30. be 30 days after the FEDERAL REGISTER (b) Reporting companies may submit publishes a rule amendment making their reports through individual plant the substance or mixture subject to sites or company headquarters as they this subpart B. choose. A separate form must be sub- (3) Persons subject to this subpart B mitted for each plant site manufac- need not comply with the requirements turing the chemical substance. of paragraph (a)(2) of this section if (c) You must submit forms by one of they meet either one of the following the following methods: conditions: (1) Mail, preferably certified, to the (i) The respondent has previously and Document Control Office (DCO) voluntarily provided EPA with a Manu- (7407M), Office of Pollution Prevention facturer’s Report on a chemical sub- and Toxics (OPPT), Environmental stance or mixture subject to this sub- Protection Agency, 1200 Pennsylvania part B, which contains data for a one- Ave., NW., Washington, DC 20460–0001, year period ending no more than three ATTN: 8(a) PAIR Reporting. -
Room-Temperature Indium Antimonide Mid-Infrared Photodiode Potential Applications Include Human Body Detection for Power Savings
72 Technology focus: Photodetectors Room-temperature indium antimonide mid-infrared photodiode Potential applications include human body detection for power savings. sahi Kasei Microdevices Corporation and Kyushu University in Japan have developed room-tem- Aperature mid-infrared semiconductor detectors based on indium antimonide (InSb) [Koichiro Ueno et al, Jpn. J. Appl. Phys., vol52, p092202, 2013]. The researchers believe such devices could be used to save power in facilities where no people are present through the detection or not of human body heat. The human body gives out detectable thermal radia- tion in the range 3–25µm, peaking around 10µm (essentially a Planck blackbody distribution for 36–37°C). The Asahi Kasei/Kyushu device covers the 2–7µm range. Present methods of detecting humans tend to depend on measuring temperature changes (e.g. pyroelectric devices), so if the people are stationary a false signal to turn off power could be sent. However, mid-infrared semiconductor detectors usually need cooling to operate. To enable room-temperature operation, the researchers worked to reduce the non radiation part of the current (‘the diffusion current’) of the device by increasing the resistance under zero bias (R0). The device also featured improved IR incidence efficiency by gathering radiation through the gallium arsenide (GaAs) substrate rather than through InSb layers. In addition, the GaAs surface was roughened to reduce reflection. The indium antimonide (InSb) photodiode structure (Figure 1b) was grown on a semi-insulating (001) GaAs substrate using Riber MBE-49 molecular beam epitaxy system. The substrate temperature during growth was 410°C. The group V (Sb) to group III (In) flux ratio was 2:1.