University of Central Florida STARS Electronic Theses and Dissertations, 2004-2019 2012 Multiscale Simulation Of Laser Ablation And Processing Of Semiconductor Materials Lalit Shokeen University of Central Florida Part of the Materials Science and Engineering Commons Find similar works at: https://stars.library.ucf.edu/etd University of Central Florida Libraries http://library.ucf.edu This Doctoral Dissertation (Open Access) is brought to you for free and open access by STARS. It has been accepted for inclusion in Electronic Theses and Dissertations, 2004-2019 by an authorized administrator of STARS. For more information, please contact
[email protected]. STARS Citation Shokeen, Lalit, "Multiscale Simulation Of Laser Ablation And Processing Of Semiconductor Materials" (2012). Electronic Theses and Dissertations, 2004-2019. 2420. https://stars.library.ucf.edu/etd/2420 MULTISCALE SIMULATION OF LASER PROCESSING AND ABLATION OF SEMICONDUCTOR MATERIALS by LALIT SHOKEEN Bachelor of Science (B.Sc. Physics), University of Delhi, India, 2006 Masters of Science (M.Sc. Physics), University of Delhi, India, 2008 Master of Science (M.S. Materials Engg.), University of Central Florida, USA, 2009 A dissertation submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy in the Department of Mechanical, Materials and Aerospace Engineering in the College of Engineering and Computer Science at the University of Central Florida Orlando, Florida, USA Fall Term 2012 Major Professor: Patrick Schelling © 2012 Lalit Shokeen ii ABSTRACT We present a model of laser-solid interactions in silicon based on an empirical potential developed under conditions of strong electronic excitations. The parameters of the interatomic potential depends on the temperature of the electronic subsystem Te, which is directly related to the density of the electron-hole pairs and hence the number of broken bonds.