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Ieee-Nems 2021 IEEE-NEMS 2021 The 16th IEEE International Conference The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems on Nano/Micro Engineered & Molecular Systems IEEE-NEMS.org/2021 April 25-29 , 2021, Xiamen, China PROGRAM April 25-29 , 2021 Xiamen, China WELCOME Welcome to the 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021)! The IEEE NEMS Conference series originated in 2005, is a premier conference series sponsored by the IEEE Nanotechnology Council. This Conference brings together annually the international MEMS community consisting of top players in academia and industry by providing them with the latest results on every aspect of M/NEMS, nanotechnology, and molecular technology. Previous 15 conferences were held in Zhuhai (2006), Bangkok (2007), Hainan Island (2008), Shenzhen (2009), Xiamen (2010), Kaohsiung (2011), Kyoto (2012), Suzhou (2013) , Hawaii (2014), Xi’an (2015), Matsushima Bay and Sendai (2016), Los Angeles (2017), Singapore (2018), Bangkok(2019). Despite the unprecedented challenges due to the COVID-19 pandemic, NEMS2020 was held online virtually. At 2021, based on the improving situation of COVID19 at mainland China and fully support of Xiamen University, the committee decided to have NEMS2021 at Xiamen for attendees in mainland China, meanwhile provide the online broadcast to participants who NOT in mainland China. The conference has also enabled us to feature more attendees than other years. We hope that you will enjoy the presentations by our accomplished both on onsite and online. We would like to express our sincerest gratitude to all the authors who submitted papers. Their high quality work serves as the foundation for the success of this conference. A total of 515 accepted paper out of 730 submissions were carefully selected by 90 experts comprising the Technical Program Committee (TPC). The conference arranges presentation of accepted papers in parallel sessions with 10 plenary and 30 keynote and 128 invited talks 180 oral presentations, and 350 posters including late news. In addition, the TPC collectively nominated, based on quality, paper submissions as finalists for the Best Conference Paper Award, the Best Student Paper Award, the Best Conference Poster Award, and CM HO Best Paper Award in Micro/Nano Fluidics. These awards aim to recognize excellence amongst work and will be announced in a special ceremony at conference banquet. More important, this year is the 100 anniversary of Xiamen University, we will celebrate it with a special memorial session of Prof. Wen H Ko, the pioneer and founder of Micro-Nano transducers field, the excellent alumni of Xiamen University, the first WHK Scholarship will be awarded too. We gratefully acknowledge the all sponsors and benefactors for their contributions to this conference. The strong support from Xiamen University is highly appreciated. In closing, we hope you enjoy the technical presentations, online networking, exhibition, and all the interactive features of the onsite/online platforms of the IEEE NEMS 2021 Conference! General Chair General Co-Chair TPC Chair Haixia(Alice) ZHANG Daoheng SUN Xu HOU Peking University Xiamen University Xiamen University April 25-29 , 2021 Xiamen, China CONTENTS Organizing Committee 8 Contests Information 11 Benefactors 12 General Information 13 General Map 14 Floor Map 15 Program Schedule 21 Day 1 - Monday, 26 April 21 Opening Ceremony 21 Plenary Speaker Ia 21 Plenary Speaker Ib 21 Session Ia: Micro/Nano/Molecular Fabrication-I 21 Chihming Ho Award 22 Invited Session Ia: Advanced Micro/nano Fabrication, Materials and Applications 23 Invited Session Ib: Thermal management in MicroNano Systems 24 Invited Session Ic: Resonant Micro/Nanoelectromechanical Systems 24 Session Ib: Energy Conversion and Storage-I 25 Session Ic: Micro/Nano Pores and Channels 26 Lunch Break 27 Best Conference Paper 27 Wen H Ko Memorial Session 28 Plenary Speaker Ic: 28 Invited Session Id: Self-powered Micro/Nano Systems 28 Invited Session Ie: Bioelectronic Devices and Systems 29 Invited Session If: Non-linear Micro/Nanoelectromechanical Systems 30 Session Id: MEMS/NEMS-I 30 Session Ie: Micro/Nano Fluidic-I 31 Plenary Speaker Id (Nobel Laureate) 32 Coffee Break & Poster Session I 32 学术好莱坞讲座 -- 现代科研论文的构思与写作 33 Adjourn for the Day 33 VIP Dinner (By Invited) 33 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems Day 2 - Tuesday, 27 April 43 Plenary Speaker IIa 43 Plenary Speaker IIb 43 Coffee Break 43 Session IIa: MEMS/NEMS-II 43 Best Student Paper 44 Invited Session IIa: Micro Nano and Molecular Systems for Diagnostics and Therapeutics 45 Invited Session IIb: Micro-/Nanofluidic Devices and Systems 46 Invited Session IIc: Multidisciplinary Frontier: Advanced Chemistry Materials for MEMS/ NEMS 47 Session IIb: Nanophotonics and Nanoscale Imaging 47 Session IIc: Energy Conversion and Storage-II 48 Lunch Break 49 Session IId: Soft&Flexibe Devices and Applications-I 50 Session IIe: Micro/Nano Fluidic-II 51 Invited Session IId: Multidisciplinary Frontier: Micro/Nano Energy and Smart Electronics 52 Invited Session IIe: Electronic and Optoelectronic Fibers and Textiles 52 Invited Session IIf: RF Micro/Nano Components and Systems 53 Session IIf: Nanoscale Robotics, Assembly, and Automation 54 Session IIg: Micro/Nano Sensors and Actuators-I 55 Plenary Speaker IIc (Nobel Laureate) 56 Coffee Break & Poster Session I 56 学术格莱美讲座 -- 如何与编辑沟通？ 56 Top Journal Session 56 Adjourn for the Day 56 Day 3 - Wednesday, 28 April 68 Plenary Speaker IIIa 68 Plenary Speaker IIIb 68 Coffee Break 68 Session IIIa: MEMS/NEMS-III 68 Session IIIb: Soft&Flexibe Devices and Applications-II 69 Invited Session IIIa: Multidisciplinary Frontier: Soft Rubbery Electronics and Stretchable Integrated Systems 70 Invited Session IIIb: Multidisciplinary Frontier: Nanoplasmonics and Biosensors 71 Invited Session IIIc: Flexible and Wearable Microsystems for Sensing and Actuation 71 Session IIIc: Micro/Nano Sensors and Actuators-II 72 Session IIId: Micro/Nano/Molecular Fabrication-II 73 Lunch Break 74 Session IIIe: M/NEMS-IV 74 Session IIIf: Soft&Flexibe Devices and Applications-III 75 Invited Session IIId: Advanced Scanning Probe Technology and Applications 76 April 25-29 , 2021 Xiamen, China Invited Session IIIe: Advanced Microsystems for Biomedical Applications 77 Invited Session IIIf: Multidisciplinary Frontier: Advanced Micro/Nano Electronics Plus (Bio-, Photo-, Energy-) 78 Session IIIg: MEMS/NEMS-V 78 Session IIIh: Nanomaterials-I 79 Plenary Speaker IIIc (Nobel Laureate) 80 Coffee Break & Poster Session I 81 Industrial Panel 81 学术奥斯卡讲座 -- 如何做好学术报告？ 81 Adjourn for the Day 81 Banquet & Award Ceremony 81 Day 4 - Thursday, 29 April 94 Session IVa: MEMS/NEMS-VI 94 Session IVb: Bio-inspired multiscale Interfaces 95 Invited Session IVa: Multidisciplinary Frontier: Micro/Nano-Engineered Materials for Sensing and Applications 96 Session IVc: Nanomaterials-II 97 Session IVd: Nature-inspired energy conversion and harvesting: from fundamentals to applicaitons 98 Coffee Break 98 Session IVe: MEMS/NEMS-VI 99 Session IVf: Soft&Flexibe Devices and Applications-IV 99 Invited Session IVb: Multidisciplinary Frontier: Functional Micro-nano Structures, Techniques and Applications 100 Session IVg: Soft&Flexibe Devices and Applications-V 101 Session IVh: Micro&Nanotechnologies for biomedicine 101 Fairwell Lunch & Adjourn of Conference 102 Lab Tour (Optional) 102 POSTER SESSION 112 Day 1 - Monday, 26 April 112 Poster Session I 112 Day2 - Tuesday, 27 April 124 Poster Session II 124 Day3 - Wednesday, 28 April 136 Poster Session III 136 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems ORGANIZING COMMITTEE International Advisory Committee Chih-Ming HO Univ. of California Masayoshi ESASHI Tohoku Univ. Meyya MEYYAPPAN NASA AMES Nicolas F. de ROOIJ Univ. of Neuchatel Toshio FUKUDA Beijing Institute of Technology/Meijo Univ. Steering Committee Ning XI Univ. of Hong Kong Haixia (Alice) ZHANG Peking Univ. Daoheng SUN Xiamen Univ. Gwo-Bin LEE National Tsing Hua Univ. Osamu TABATA Kyoto Univ. Wen J. LI City Univ. of Hong Kong William C. TANG Univ. of California at Irvine Shuji TANAKA Tohoku Univ. Yu-Chong TAI California Institute of Technology IEEE-NEMS 2021 Committee Honorary Chair: Zhongqun TIAN Xiamen University General Chair: Haixia (Alice) ZHANG Peking University General co-Chair: Daoheng SUN Xiamen University Program Chair: Xu HOU Xiamen University Program co-Chairs: Jungmok SEO Yonsei University Jianyu LI McGill University Paolo MALGARETTI Helmholtz Institute Erlangen-Nürnberg for Renewable Energy Xian ZHANG Stevens Institute of Technology 8 April 25-29 , 2021 Xiamen, China Zhigang CHEN University of Southern Queensland Invited Session Chair: Xiaosheng ZHANG Univ. of Electronic Science & Technology of China Organizing Chair: Wei ZHOU Xiamen University Award Committee Chair: Wenjung LI City University of HongKong Sponsor Chair: Liang HOU Xiamen University Industrial Chair: Shenglin MA Xiamen University Promotion Chair: Lingyun WANG Xiamen University Publication Chair: Zhidong WANG Chiba Institute of Technology Xu HOU Xiamen University Technical Program Committee Alberto GIACOMELLO Sapienza Università di Roma Arend van der ZANDE UIUC Azeemuddin SYED International Institute of Information Technology Hyderabad Baiyi CHEN Xiamen University Beomjoon KIM The University of Tokyo Binghao WANG The University of Tokyo Bo MENG Shenzhen University Boyang ZHANG McMaster University Cheng TU University
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