IEEE-NEMS 2021
The 16th IEEE International Conference The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems on Nano/Micro Engineered & Molecular Systems
IEEE-NEMS.org/2021 April 25-29 , 2021, Xiamen, China
PROGRAM
April 25-29 , 2021 Xiamen, China
WELCOME
Welcome to the 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021)! The IEEE NEMS Conference series originated in 2005, is a premier conference series sponsored by the IEEE Nanotechnology Council. This Conference brings together annually the international MEMS community consisting of top players in academia and industry by providing them with the latest results on every aspect of M/NEMS, nanotechnology, and molecular technology. Previous 15 conferences were held in Zhuhai (2006), Bangkok (2007), Hainan Island (2008), Shenzhen (2009), Xiamen (2010), Kaohsiung (2011), Kyoto (2012), Suzhou (2013) , Hawaii (2014), Xi’an (2015), Matsushima Bay and Sendai (2016), Los Angeles (2017), Singapore (2018), Bangkok(2019). Despite the unprecedented challenges due to the COVID-19 pandemic, NEMS2020 was held online virtually. At 2021, based on the improving situation of COVID19 at mainland China and fully support of Xiamen University, the committee decided to have NEMS2021 at Xiamen for attendees in mainland China, meanwhile provide the online broadcast to participants who NOT in mainland China. The conference has also enabled us to feature more attendees than other years. We hope that you will enjoy the presentations by our accomplished both on onsite and online. We would like to express our sincerest gratitude to all the authors who submitted papers. Their high quality work serves as the foundation for the success of this conference. A total of 515 accepted paper out of 730 submissions were carefully selected by 90 experts comprising the Technical Program Committee (TPC). The conference arranges presentation of accepted papers in parallel sessions with 10 plenary and 30 keynote and 128 invited talks 180 oral presentations, and 350 posters including late news. In addition, the TPC collectively nominated, based on quality, paper submissions as finalists for the Best Conference Paper Award, the Best Student Paper Award, the Best Conference Poster Award, and CM HO Best Paper Award in Micro/Nano Fluidics. These awards aim to recognize excellence amongst work and will be announced in a special ceremony at conference banquet. More important, this year is the 100 anniversary of Xiamen University, we will celebrate it with a special memorial session of Prof. Wen H Ko, the pioneer and founder of Micro-Nano transducers feld, the excellent alumni of Xiamen University, the frst WHK Scholarship will be awarded too. We gratefully acknowledge the all sponsors and benefactors for their contributions to this conference. The strong support from Xiamen University is highly appreciated. In closing, we hope you enjoy the technical presentations, online networking, exhibition, and all the interactive features of the onsite/online platforms of the IEEE NEMS 2021 Conference!
General Chair General Co-Chair TPC Chair Haixia(Alice) ZHANG Daoheng SUN Xu HOU Peking University Xiamen University Xiamen University
April 25-29 , 2021 Xiamen, China
CONTENTS
Organizing Committee 8 Contests Information 11 Benefactors 12 General Information 13 General Map 14 Floor Map 15 Program Schedule 21 Day 1 - Monday, 26 April 21 Opening Ceremony 21 Plenary Speaker Ia 21 Plenary Speaker Ib 21 Session Ia: Micro/Nano/Molecular Fabrication-I 21 Chihming Ho Award 22 Invited Session Ia: Advanced Micro/nano Fabrication, Materials and Applications 23 Invited Session Ib: Thermal management in MicroNano Systems 24 Invited Session Ic: Resonant Micro/Nanoelectromechanical Systems 24 Session Ib: Energy Conversion and Storage-I 25 Session Ic: Micro/Nano Pores and Channels 26 Lunch Break 27 Best Conference Paper 27 Wen H Ko Memorial Session 28 Plenary Speaker Ic: 28 Invited Session Id: Self-powered Micro/Nano Systems 28 Invited Session Ie: Bioelectronic Devices and Systems 29 Invited Session If: Non-linear Micro/Nanoelectromechanical Systems 30 Session Id: MEMS/NEMS-I 30 Session Ie: Micro/Nano Fluidic-I 31 Plenary Speaker Id (Nobel Laureate) 32 Coffee Break & Poster Session I 32 学术好莱坞讲座 -- 现代科研论文的构思与写作 33 Adjourn for the Day 33 VIP Dinner (By Invited) 33 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems Day 2 - Tuesday, 27 April 43 Plenary Speaker IIa 43 Plenary Speaker IIb 43 Coffee Break 43 Session IIa: MEMS/NEMS-II 43 Best Student Paper 44 Invited Session IIa: Micro Nano and Molecular Systems for Diagnostics and Therapeutics 45 Invited Session IIb: Micro-/Nanofluidic Devices and Systems 46 Invited Session IIc: Multidisciplinary Frontier: Advanced Chemistry Materials for MEMS/ NEMS 47 Session IIb: Nanophotonics and Nanoscale Imaging 47 Session IIc: Energy Conversion and Storage-II 48 Lunch Break 49 Session IId: Soft&Flexibe Devices and Applications-I 50 Session IIe: Micro/Nano Fluidic-II 51 Invited Session IId: Multidisciplinary Frontier: Micro/Nano Energy and Smart Electronics 52 Invited Session IIe: Electronic and Optoelectronic Fibers and Textiles 52 Invited Session IIf: RF Micro/Nano Components and Systems 53 Session IIf: Nanoscale Robotics, Assembly, and Automation 54 Session IIg: Micro/Nano Sensors and Actuators-I 55 Plenary Speaker IIc (Nobel Laureate) 56 Coffee Break & Poster Session I 56 学术格莱美讲座 -- 如何与编辑沟通？ 56 Top Journal Session 56 Adjourn for the Day 56
Day 3 - Wednesday, 28 April 68 Plenary Speaker IIIa 68 Plenary Speaker IIIb 68 Coffee Break 68 Session IIIa: MEMS/NEMS-III 68 Session IIIb: Soft&Flexibe Devices and Applications-II 69 Invited Session IIIa: Multidisciplinary Frontier: Soft Rubbery Electronics and Stretchable Integrated Systems 70 Invited Session IIIb: Multidisciplinary Frontier: Nanoplasmonics and Biosensors 71 Invited Session IIIc: Flexible and Wearable Microsystems for Sensing and Actuation 71 Session IIIc: Micro/Nano Sensors and Actuators-II 72 Session IIId: Micro/Nano/Molecular Fabrication-II 73 Lunch Break 74 Session IIIe: M/NEMS-IV 74 Session IIIf: Soft&Flexibe Devices and Applications-III 75 Invited Session IIId: Advanced Scanning Probe Technology and Applications 76 April 25-29 , 2021 Xiamen, China
Invited Session IIIe: Advanced Microsystems for Biomedical Applications 77 Invited Session IIIf: Multidisciplinary Frontier: Advanced Micro/Nano Electronics Plus (Bio-, Photo-, Energy-) 78 Session IIIg: MEMS/NEMS-V 78 Session IIIh: Nanomaterials-I 79 Plenary Speaker IIIc (Nobel Laureate) 80 Coffee Break & Poster Session I 81 Industrial Panel 81 学术奥斯卡讲座 -- 如何做好学术报告？ 81 Adjourn for the Day 81 Banquet & Award Ceremony 81
Day 4 - Thursday, 29 April 94 Session IVa: MEMS/NEMS-VI 94 Session IVb: Bio-inspired multiscale Interfaces 95 Invited Session IVa: Multidisciplinary Frontier: Micro/Nano-Engineered Materials for Sensing and Applications 96 Session IVc: Nanomaterials-II 97 Session IVd: Nature-inspired energy conversion and harvesting: from fundamentals to applicaitons 98 Coffee Break 98 Session IVe: MEMS/NEMS-VI 99 Session IVf: Soft&Flexibe Devices and Applications-IV 99 Invited Session IVb: Multidisciplinary Frontier: Functional Micro-nano Structures, Techniques and Applications 100 Session IVg: Soft&Flexibe Devices and Applications-V 101 Session IVh: Micro&Nanotechnologies for biomedicine 101 Fairwell Lunch & Adjourn of Conference 102 Lab Tour (Optional) 102
POSTER SESSION 112 Day 1 - Monday, 26 April 112 Poster Session I 112
Day2 - Tuesday, 27 April 124 Poster Session II 124
Day3 - Wednesday, 28 April 136 Poster Session III 136 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
ORGANIZING COMMITTEE
International Advisory Committee
Chih-Ming HO Univ. of California Masayoshi ESASHI Tohoku Univ. Meyya MEYYAPPAN NASA AMES Nicolas F. de ROOIJ Univ. of Neuchatel Toshio FUKUDA Beijing Institute of Technology/Meijo Univ.
Steering Committee
Ning XI Univ. of Hong Kong Haixia (Alice) ZHANG Peking Univ. Daoheng SUN Xiamen Univ. Gwo-Bin LEE National Tsing Hua Univ. Osamu TABATA Kyoto Univ. Wen J. LI City Univ. of Hong Kong William C. TANG Univ. of California at Irvine Shuji TANAKA Tohoku Univ. Yu-Chong TAI California Institute of Technology
IEEE-NEMS 2021 Committee
Honorary Chair: Zhongqun TIAN Xiamen University
General Chair: Haixia (Alice) ZHANG Peking University
General co-Chair: Daoheng SUN Xiamen University
Program Chair: Xu HOU Xiamen University
Program co-Chairs: Jungmok SEO Yonsei University Jianyu LI McGill University Paolo MALGARETTI Helmholtz Institute Erlangen-Nürnberg for Renewable Energy Xian ZHANG Stevens Institute of Technology
8 April 25-29 , 2021 Xiamen, China
Zhigang CHEN University of Southern Queensland
Invited Session Chair: Xiaosheng ZHANG Univ. of Electronic Science & Technology of China
Organizing Chair: Wei ZHOU Xiamen University
Award Committee Chair: Wenjung LI City University of HongKong
Sponsor Chair: Liang HOU Xiamen University
Industrial Chair: Shenglin MA Xiamen University
Promotion Chair: Lingyun WANG Xiamen University
Publication Chair: Zhidong WANG Chiba Institute of Technology Xu HOU Xiamen University
Technical Program Committee
Alberto GIACOMELLO Sapienza Università di Roma Arend van der ZANDE UIUC Azeemuddin SYED International Institute of Information Technology Hyderabad Baiyi CHEN Xiamen University Beomjoon KIM The University of Tokyo Binghao WANG The University of Tokyo Bo MENG Shenzhen University Boyang ZHANG McMaster University Cheng TU University of Electronic Science and Technology of China Daewoo KIM Yonsei University Dingbang XIAO National University of Defense Technology Frank NIKLAUS KTH Royal Institure of Technology Ho Cheung SHUM University of Hong Kong Hojeong JEON Korea Institute of Science and Technology Hong Nam KIM Korea Institute of Science and Technology Huacheng ZHANG RMIT Huicong LIU Soochow University Hyojin LEE Korea Institute of Science and Technology Jaehong LEE DGIST Jiajia CHEN Xiamen University Jianjun WANG Institute of Chemistry Chinese Academy of Sciences Jie JU Henan University Jinhye BAE University of California San Diego Kaichen XU Zhejiang University
9 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Mahmoud ALMASRI University of Missouri Massimo MASTRANGELI Delft University of Technology Matteo FASANO Politecnico di Torino Mauro CHINAPPI Università di Roma Tor Vergata Mengchuang ZHANG Northwestern Polytechnical University Mengdi HAN Peking University Miao WANG Xiamen University Min ZHANG Peking University Philippe BASSET Univ Gustave Eiffel Qihan LIU University of Pittsburgh Qijun SUN Beijing Institute of Nanoenergy and Nanosystems, CAS Qing YANG Zhejiang University, China Quan YUAN Institute of Semiconductors, CAS Rusen YANG Xidian University Seongjun PARK KAIST Shuai WANG Xiamen University Shuli WANG Xiamen University Shuo GAO Beihang University Stefano PALAGI Scuola Superiore Sant’Anna Tae-Eun PARK Ulsan National Institute of Science and Technology Tianxun GONG University of Electronic Science and Technology of China Tuhin SANTRA Indian Institute of Technology Madras Wei ZHOU Xiamen University Wendong WANG Shanghai Jiao Tong University Wenhui WANG Tsinghua University Wibool PIYAWATTANAMETHA KMTIL Xinge YU City University of Hong Kong Xipeng LI Xiamen university Xu XIAO University of Electronic Science and Technology of China Yaqi HOU Xiamen University Yi LI SUSTech Yinghui WANG Institute of Microelectronics of Chinese Academy of Sciences Yoshikazu HIRAI Kyoto University Yu ZHOU Central South University Yuan GAO University of Illinois Yuanjing LIN Southern University of Science and Technology Yuanzhi TAN Xiamen University Yuerui LU Australian National University Yunlong ZI The Chinese University of Hong Kong Zhizhi SHENG Suzhou Institute of Nano-Tech and Nano-Bionics, CAS Zhuoqing YANG Shanghai Jiao Tong University Zhuqing WANG Sichuan University Zongyou YIN The Australian National University
10 April 25-29 , 2021 Xiamen, China
CONTESTS INFORMATION
The IEEE-NEMS Conference Series annually selects winners to receive the Best Conference Paper Award and the Best Student Paper Award. Starting from NEMS 2011, the Steering Committee has decided to also grant a Best Conference Poster Award annually at the conference. In addition, we are very grateful to a group of private donors in contributing financially to the conference to set up a CM HO Best Paper Award in Micro/Nano Fluidics, in honor of Prof. C.-M. Ho, of the University of California, Los Angeles. For any of these awards, factors to be considered in determining the winners are the signifcance of the new fndings/applications, technical merits, originality, potential impact on the feld, and clarity of presentation.
Best Conference Award Committee
Co-Chairs: Yong QIN(onsite), Wen Jung LI(online)
Best Conference Paper Award Committee
Zheng CUI, Weizheng YUAN, Yuan LIN, Chaoyong YANG
CM HO Best Paper Award in Micro/Nano Fluidics Committee
Zheng CUI, Weizheng YUAN, Yuan LIN, Chaoyong YANG
Best Student Paper Award Committee
Zheng CUI, Weizheng YUAN, Yuan LIN, Jian CHEN
Best Conference Poster Award Committee
Zhengchun PENG, Xiongying YE, Wenbo DING, Mengdi HAN, Xueyong WEI, Tao WU, Zenghui WANG, Jian CHEN
11 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
BENEFACTORS We gratefully acknowledge, at the time of printing, the fnancial contributions from the following: CONFERENCE SPONSORS
BENEFACTORS
Microsystems & Nanoengineering Evatec China Ltd.
Guangdong Sygole Intelligent Technology Co.,Ltd BMF Precision Tech Inc.
嘉庚创新实验室 TAN KAH KEE INNOVATION LABORATORY
TAN KAN KEE INNOVATION LABORATORY Nanomaterials (MDPI)
Ningbo ABAX Sensing Electronic Technology Co. Ltd. Xiamen High-End MEMS Technology Co., Ltd.
Suzhou Research Materials Microtech Co.,Ltd XI’AN LEADMEMS SCI&TECH CO.,LTD.
Jiangsu Hinovaic Technology Co. Ltd. ICEASY TECHNOLOGY CO.,LTD.
BEST PAPER AWARD BENEFACTOR
Microsystems & Nanoengineering/Springer Nature
12 April 25-29 , 2021 Xiamen, China
GENERAL INFORMATION
LOCATION: Science & Art Center, Xiamen University ADDRESS: 422 Siming South Road,Siming District,Xiamen City,Fujian Province,China
Registration Desk:
Date Time Venue April 25, Sun. 13:00-21:00 Pre-function Area, 2rd Floor April 26, Mon. 08:30-18:30 Pre-function Area, 2rd Floor April 27, Tue. 08:30-18:30 Pre-function Area, 2rd Floor April 28, Wed. 08:30-18:30 Pre-function Area, 2rd Floor April 29, Thur. 08:30-12:00 Pre-function Area, 2rd Floor
Conference Events:
Welcome Reception on April 25
18:30-20:30 at Pre-function Area, Science & Art Center, 2/F
Conference Lunches on April 26-29
(April 26-29) 12:15-13:30 at Qinye Canteen, 3/F
Banquet & Award Ceremony on April 28
19:00-21:00 at Qinye Canteen, 3/F
Fairwell Lunch & Adjourn of Conference on April 29
12:00-14:00 at Qinye Canteen, 3/F
13 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
GENERAL MAP
Xiamen University Siming Campus
Linwutong Building
Yixuan Building Qinye Canteeen Yifu Building
Science & Art Center
Please scan the QR code for the detailed map of Xiamen University
14 April 25-29 , 2021 Xiamen, China
FLOOR MAP
Science & Art Center, Xiamen University
15 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Official Language
The offcial language of the conference is English. All presentation including discussion and submissions shall be made in English.
Presentation Specifications
In each oral presentation room, one LCD projector with the aspect ratio of 16:9 and one laptop will be available. The presenters should prepare Power Point Slides to facilitate their presentations. The presenters should test it before session start to avoid potential format problems caused by different software versions.
*Speakers should use the laptop provided at the conference hall.
Duration for each category of presentation are listed below:
• Plenary Lectures are scheduled for 45 minutes (including 10 minutes Q&A) each. • Keynote Lectures are scheduled for 30 minutes (including 5 minutes Q&A) each. • Invited sessions are scheduled for 20 minutes (including 5 minutes Q&A) each. • Oral presentations are schedule for 15 minutes (including 3 min Q&A) each.
Poster Specifications
Dimensions: Poster Size: 90 cm (wide) x 120 cm (high). Title: The title of your poster should appear at the top with lettering of at least 70 pt font size. Below the title, place the names of authors and their affliations. Text: Text should be readable from fve feet away. Use a minimum font size of 18 pt. Keep the text brief. Try to use text to introduce the study, explain visuals and direct viewers’ attention to signifcant data trends and relationships portrayed in the visuals, state and explain the interpretations that follow from the data. It is also a good idea to put future research plans or questions for discussion with viewers in your text. Figures: Each fgure should have a brief title. Figures should be numbered consecutively according to the order in which they are frst mentioned in the text. Try to use color fgures rather than only black and white text to make your poster attractive and highlight the important technical content of your paper. Make sure that the text and the visuals are integrated.
Conference Attire
Appropriate attire is requested during the conference; e.g., casual attire at the Welcome and Farewell Party; a business suit or a white shirt at all technical sessions.
16 April 25-29 , 2021 Xiamen, China
IEEE-NEMS 2021 Program
Location：Science & Art Center, Xiamen University （厦门大学思明校区，科学与艺术中心） Sunday, 25 April Venue: Pre-function Area, 2rd Floor 13:00-21:00 Registration 18:30-20:30 Reception Venue: Exhibition Hall (1F) 13:00-21:00 Exhibition Set Up Day1 - Monday, 26 April Main Venue: Concert Hall (2F) 08:30 - 08:45 Opening Ceremony Chair: Haixia ZHANG 08:45 - 09:30 Plenary Speaker Ia：Lei JIANG Chair: Zhongqun TIAN 09:30 - 10:15 Plenary Speaker Ib：Paul WEISS Chair: Xu HOU 10:15 - 10:45 Coffee Break & Group Photo Session Ia: Micro/Nano/Molecular Fabrication-I Keynote Speaker: Wenjing HONG 10:45 - 12:45 Chair: Sheng HU 445,455,515,578,655 Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F) Chihming Ho Award Invited Session Ia Chair: Yong QIN Advanced Micro/nano Fabrication, Materials and Applications 60,99,263,511,544 Chair: Zhuoqing YANG Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F) Invited Session Ib Invited Session Ic 10:45 - 12:45 Thermal management in MicroNano Systems Resonant Micro/Nanoelectromechanical Systems Chair: Xian (Annie) ZHANG Chair: Zenghui WANG Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F) Session Ib Session Ic: Micro/Nano Pores and Channels Energy Conversion and Storage-I Keynote Speaker: Zhongyi JIANG Keynote Speaker: Xiaodong CHEN Chair: Xinghua XIA Chair: Huan LIU 93,127,161,340,411 241,261,358,364,484 Location: Qinye Canteen 3rd Floor 12:45 - 13:30 Lunch Break Main Venue: Concert Hall (2F) Best Conference Paper Chair: Yong QIN 111,112,150,182,298,380,587 Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F) Wen H Ko Memorial Session Invited Session Id Self-powered Micro/Nano Systems Plenary Speaker Ic：Minghui HONG Chair: Wei TANG 13:30 - 15:30 Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F) Invited Session Ie Invited Session If Bioelectronic Devices and Systems Non-linear Micro/Nanoelectromechanical Systems Chair: Zhou LI & Mengdi HAN Chair: Dong F. WANG & Xueyong WEI Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F) Session Id Session Ie MEMS/NEMS-I Micro/Nano Fluidic-I Keynote Speaker: Sang-Woo KIM Keynote Speaker: Xinghua XIA Chair: Ting ZHANG Chair: Zhongyi JIANG 652,674,684,698,471,386 64,361,114,552,591,456 Main Venue: Concert Hall (2F) 15:30 - 16:30 Plenary Speaker Id (Nobel Laureate) : Jean-Marie LEHN Chair: Yunbao JIANG Venue: Exhibition Hall (1F) 08:30 - 16:30 Exhibition 16:30 - 18:30 Coffee Break & Poster Session I Accept Posters from No.4 to No.320 except 256 & 314 17:00 - 18:00 中文讲座：学术好莱坞-现代科研论文的构思与写作，主讲人：李风煜教授（暨南大学） 18:30 Adjourn for the Day Location: Yifu Building 19:00- 21:00 VIP Dinner (By Invited)
17 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Day2 - Tuesday, 27 April Main Venue: Concert Hall (2F) 08:30 - 09:15 Plenary Speaker IIa：Chennupati JAGADISH Chair: Haixia ZHANG 09:15 - 10:00 Plenary Speaker IIb：Shigang SUN Chair: Yan LI 10:00 - 10:15 Coffee Break Session IIa: MEMS/NEMS-II Keynote Speaker: Jing LIU 10:15 - 12:15 Chair: Dezhi WU 372,539,440,266,482,144 Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F) Best Student Paper Invited Session IIa Chair: Yong QIN Micro Nano and Molecular Systems for Diagnostics and Therapeutics 2,149,335,407,448,460,469,664 Chair: Yi ZHANG Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F) Invited Session IIc Invited Session IIb Multidisciplinary Frontier: Advanced Chemistry Materials for 10:45 - 12:15 Micro-/Nanofluidic Devices and Systems MEMS/NEMS Chair: Yan XU & Wenhui WANG Chair: Xi YAO Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F) Session IIb Session IIc Nanophotonics and Nanoscale Imaging Energy Conversion and Storage-II Keynote Speaker: Mona JARRAHI Keynote Speaker: Jianhua ZHANG Chair: Xu XIAO Chair: Honglong CHANG 508,660,669,695,599,438,177 473,625,267,310,384,98,621 Location: Qinye Canteen 3rd Floor 12:15 - 13:30 Lunch Break Main Venue: Concert Hall (2F) Session IId Soft&Flexibe Devices and Applications-I Keynote Speaker: Zheng CUI Chair: Wenli ZHOU 253,269,322,382,397,651,102 Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F) Session IIe Micro/Nano Fluidic-II Invited Session IId Keynote Speaker: Xingyu JIANG Multidisciplinary Frontier: Micro/Nano Energy and Smart Electronics 13:30 - 15:30 Chair: Yan LI Chair: Yong ZHAO & Xiuhan LI 613,371,336,697,132 Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F) Invited Session IIe Invited Session IIf Electronic and Optoelectronic Fibers and Textiles RF Micro/Nano Components and Systems Chair: Fabien Sorin & Lei WEI Chair: Joshua E.-Y. LEE & Cheng TU Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F) Session IIf Session IIg Nanoscale Robotics, Assembly, and Automation Micro/Nano Sensors and Actuators-I Keynote Speaker: Metin SITTI Keynote Speaker: Xinxin LI Chair: Xi XIE Chair: Xueyong WEI 159,200,417,293,251,368 631,403,461,488,529,622 Main Venue: Concert Hall (2F) 15:30 - 16:30 Plenary Speaker IIc (Nobel Laureate) : Jean Pierre SAUVAGE Chair: Xiaoyu CAO Venue: Exhibition Hall (1F) 08:30 - 16:30 Exhibition 16:30 - 18:30 Coffee Break & Poster Session II Accept Posters from No.323 to No.526 include 256 & 314 16:30 - 17:00 中文讲座：学术格莱美讲座--如何与编辑沟通？主讲人：李彦教授（北京大学，ACS Nano副主编） 17:00 - 18:30 中文讲座：顶刊交流会 Top Journal Session 18:30 Adjourn for the Day
18 April 25-29 , 2021 Xiamen, China
Day3 - Wednesday, 28 April
Main Venue: Concert Hall (2F) 08:30 - 09:15 Plenary Speaker IIIa: Joost VLASSAK Chair: Xu HOU 09:15 - 10:00 Plenary Speaker IIIb: Alex JEN Chair: Xiaosheng ZHANG 10:00 - 10:15 Coffee Break Session IIIa MEMS/NEMS-III 10:15 - 12:15 Keynote Speaker: Yuan LIN Chair: Xiaosheng ZHANG 30,583,257,321,229,270 Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F) Session IIIb Invited Session IIIa Soft&Flexibe Devices and Applications-II Multidisciplinary Frontier: Soft Rubbery Electronics and Stretchable Keynote Speaker: Yongan HUANG Integrated Systems Chair: Libo GAO Chair: Cunjiang YU & Wei LAN 129,134,211,146,218,219 Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F) Invited Session IIIb Invited Session IIIc 10:45 - 12:15 Multidisciplinary Frontier: Nanoplasmonics and Flexible and Wearable Microsystems for Sensing and Actuation Biosensors Chair: Zhengchun PENG & Xinge YU Chair: Xiangwei ZHAO Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F) Session IIIc Session IIId Micro/Nano Sensors and Actuators-II Micro/Nano/Molecular Fabrication-II Keynote Speaker: Jian ZHU Keynote Speaker: Litao SUN Chair: Tie LI Chair: Zenghui WANG 278,306,362,493,509,555,436 435,57,275,395,426,348 Location: Qinye Canteen 3rd Floor 12:15 - 13:30 Lunch Break Main Venue: Concert Hall (2F) Session IIIe M/NEMS-IV Keynote Speaker: Lining SUN Chair: Hongzhong LIU 226,106,48,53,232,239,562 Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F) Session IIIf Soft&Flexibe Devices and Applications-III Invited Session IIId Keynote Speaker: Guozhen SHEN Advanced Scanning Probe Technology and Applications Chair: Rui ZHOU Chair: Huan HU & Yu Kyoung RYU 13:30 - 15:30 430,576,533,561,563,565 Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F) Invited Session IIIf Invited Session IIIe Multidisciplinary Frontier: Advanced Micro/Nano Electronics Plus Advanced Microsystems for Biomedical Applications (Bio-, Photo-, Energy-) Chair: Soo Hyeon KIM Chair: Yu ZHOU & Yue SHAO Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F) Session IIIg Session IIIh MEMS/NEMS-V Nanomaterials-I Keynote Speaker: Liviu NICU Keynote Speaker: Yan LI Chair: Zewen LIU Chair: Jingxia WANG 203,105,116,173,538,418 13,11,34,284,186,676 Main Venue: Concert Hall (2F) 15:30 - 16:30 Plenary Speaker IIIc (Nobel Laureate) : Kostya NOVOSELOV Chair: Nanfeng ZHENG Venue: Exhibition Hall (1F) 08:30 - 16:30 Exhibition 16:30 - 18:30 Coffee Break & Poster Session III Accept Posters from No.527 to No.720 16:30 - 17:30 Industrial Panel 17:30 - 18:30 中文讲座：学术奥斯卡讲座--如何做好学术报告？主讲人：张海霞教授（北京大学） 18:30 Adjourn for the Day Location: Qinye Canteen 3rd Floor 19:00- 21:00 Banquet & Award Ceremony
19 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Day4 - Thursday, 29 April
Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F) Session IVb Session IVa Bio-inspired multiscale Interfaces MEMS/NEMS-VI Keynote Speaker: Shutao WANG Keynote Speaker: Yulong ZHAO Keynote Speaker: Dechen JIANG Chair: Zewen LIU Chair: Peiyi WU 242,311,334,637,338,223,163 199,209,391,560,23 Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F) Session IVc Invited Session IVa Nanomaterials-II 8:30- 10:30 Multidisciplinary Frontier: Micro/Nano-Engineered Keynote Speaker: Jian JIN Materials for Sensing and Applications Chair: Jie JU Chair: Xu XIAO & Tianxun GONG 295,458,510,550,466 Venue: Conference Room No.07 (3F) Session IVd Nature-inspired energy conversion and harvesting: from fundamentals to applicaitons Keynote Speaker: Zuankai WANG Chair: Haisheng SAN 101,443,532,376,92,600 10:45- 11:00 Coffee Break Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F) Session IVe Session IVf MEMS/NEMS-VII Soft&Flexibe Devices and Applications-IV Keynote Speaker: Yikuen LEE Keynote Speaker: Peiyi WU Chair: Songyue CHEN Chair: Shutao WANG 396,646,365 51,90,28 Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F) Session IVg Invited Session IVb Soft&Flexibe Devices and Applications-V 11:00 - 12:00 Multidisciplinary Frontier: Functional Micro-nano Keynote Speaker: Hu TAO Structures, Techniques and Applications Chair: Guozhen LIU Chair: Yang CAO 491,598,115 Venue: Conference Room No.07 (3F) Session IVh Micro&Nanotechnologies for biomedicine Keynote Speaker: Beomjoon KIM Chair: Guoan TAI 513,497 Location: Qinye Canteen 3rd Floor 12:00 - 14:00 Fairwell Lunch & Adjourn of Conference 14:00 Lab Tour (Optional)
20 April 25-29 , 2021 Xiamen, China
PROGRAM SCHEDULE
Day 1 - Monday, 26 April
08:30 - 08:45 Opening Ceremony
Main Venue: Concert Hall (2F) Chair: Haixia ZHANG
08:45 - 09:30 Plenary Speaker Ia
Main Venue: Concert Hall (2F) Chair: Zhongqun TIAN
“BIOINSPIRED SUPER-WETTABILITY SYSTEM AND BEYOND ——QUANTUM-CONFINED SUPERFLUID: ENERGY CONVERSION, CHEMICAL REACTION AND BIOLOGICAL INFORMATION TRANSFER” Lei JIANG Techinical Institute of Chemistry, Chinese Academy of Sciences
09:30 - 10:15 Plenary Speaker Ib
Main Venue: Concert Hall (2F) Chair: Xu HOU
ATOMICALLY PRECISE CHEMICAL, PHYSICAL, ELECTRONIC, AND SPIN CONTACTS Paul S. WEISS University of California, Los Angeles
10:15 - 10:45 Coffee Break & Group Photo
Session Ia: 10:45 - 12:30 Micro/Nano/Molecular Fabrication-I Venue: Concert Hall (2F) Chair: Sheng HU 10:45-11:15 KEYNOTE SPEAKER : OPPORTUNITIES FOR SINGLE-MOLECULE ELECTRONICS: A TEN-YEAR PERSPECTIVE Wenjing HONG Xiamen University
21 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
11:15-11:30 #445, SYNCHRONIZED SURFACE MODIFICATION OF TIO2 COMPOSITE NANOFIBER THROUGH CORE-SHELL ELECTROSPINNING Hao Peng, Guoyi Kang, Jiaxin Jiang, Zungui Shao, Juan Liu, Yifang Liu and gaofeng zheng Xiamen University
11:30-11:45 #455, PRECURSOR-BASED ZNO NANO INKS FOR PRINTED ELECTRONICS Wenxin Liu, Hao Dong, Di Wang and Xing Chen Zhejiang University
11:45-12:00 #515, EFFICIENT MANUFACTURING OF MICRODOME ARRAY FOR ADVANCED ELECTRONIC AND OPTICAL DEVICES Zehua Xiang, Haobin Wang, Hang Guo, Ji Wan, Chen Xu, Liming Miao, Mengdi Han and Haixia Zhang Peking Universiry
12:00-12:15 #578, SOLVENT-FREE NANOFABRICATION BASED ON ICE-ASSISTED ELECTRON-BEAM LITHOGRAPHY Yu Hong, Ding Zhao and Min Qiu Westlake University
12:15-12:30 #655, ICE-ASSISTED ELECTRON-BEAM LITHOGRAPHY FOR 3D NANOFABRICATION Ding Zhao, Yu Hong and Min Qiu Westlake University
10:45 - 12:00 Chihming Ho Award
Venue: Multi-function Hall (1F) Chair: Yong QIN 10:45-11:00 #60, INTEGRATED ELECTRICAL TEST VEHICLE CO-DESIGNED WITH MICROFLUIDICS FOR EVALUATING THE PERFORMANCE OF EMBEDDED COOLING Yuxin Ye, Nan Zhang, Lihang Yu, Bo Cong, Ruiwen Liu, Yanmei Kong and Binbin Jiao Institute of Microelectronics of the Chinese Academy of Science
11:00-11:15 #99, FREQUENCY CHARACTERISTICS OF MICROFLUIDIC SINGLE GATE OSCILLATOR Zhou Zhou, Manman Xu, Hai Wang, Kunpeng Zhang and Daoheng Sun Anhui Polytechnic University
11:15-11:30 #263, MINIMAL-INVASIVE LEVODOPA SENSING BASED ON DIFFERENTIAL AMPEROMETRY MICRONEEDLE ELECTRODES
22 April 25-29 , 2021 Xiamen, China
DECORATED WITH SPIKE-LIKE AU NANOPARTICLES Hangxu Ren, Xiyu Mao, Shanshan Zhang, Yu Cai, Lu Fang, Xuesong Ye and Bo Liang Zhejiang University
11:30-11:45 #511, SILICON NANOWIRE ARRAY SENSOR FOR HIGHLY SENSITIVE AND SELECTIVE DETECTION OF NERVE AGENT SIMULANT VAPOR VIA SURFACE HYDROXYL GROUPS Xingqi Liu, Hongpeng Zhang, Zhiping Huang, Xuanlin Yang, Shixing Chen, Yuelin Wang, Tie Li and Zhenxing Cheng Shanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences
11:45-12:00 #544, MAGNETIC FORCE ENABLED PLANT SEED LEVITATION TO SIMULATE MICROGRAVITY ENVIRONMENT ON A MICROFLUIDIC CHIP Jing Du, Lin Zeng, Zitong Yu, Sihui Chen, Xi Chen, Yi Zhang and Hui Yang Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences
Invited Session Ia: 10:45 - 12:45 Advanced Micro/nano Fabrication, Materials and Applications
Venue: Conference Room No.01 (1F) Chair: Zhuoqing YANG 10:45-11:05 SURFACE AND BULK MICRO/NANOMACHINING OF POLYMERS Junshan LIU Dalian University of Technology
11:05-11:25 FLEXIBLE HEALTHCARE SENSORS Xuewen WANG Northwestern Polytechnical University
11:25-11:45 HEXAGONAL BORON NITRIDE PHONONIC CRYSTAL WAVEGUIDES FOR CLASSICAL AND QUANTUM SIGNAL TRANSDUCTION Yanan WANG University of Florida
11:45-12:05 MICRO-FLUIDIC HEAT DISSIPATION TECHNOLOGY BASED ON MULTI-ELEMENTS COMPATIBLE MEMS PROCESS Yunna SUN Shanghai Jiao Tong University
12:05-12:25 ACCURATE THREE-DIMENSIONAL PHYSICAL SIMULATIONS OF MICRO/NANO FABRICATION PROCESSES Zaifa ZHOU Southeast University
12:25-12:45 MICRO-SYSTEM BASED MULTIMODALITY IMAGING SYSTEM FOR
23 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
QUANTITATIVE MOLECULAR IMAGING AND PRECISION HEALTH Zhen QIU Michigan State University
Invited Session Ib: 10:45 - 12:45 Thermal management in MicroNano Systems
Venue: Conference Room No.04 (2F) Chair: Xian (Annie) ZHANG 10:45-11:05 THERMAL TRANSPORT OF MECHANICALLY DEFORMED 2D MATERIALS Baoxing XU University of Virginia
11:05-11:25 THERMAL TRANSPORT PROPERTIES OF METALS AND METALLIC NANOSTRUCTURES Hua BAO Shanghai Jiao Tong University
11:25-11:45 RATIONAL DESIGN OF CONDUCTIVE POLYMERS FOR FLEXIBLE THERMOELECTRIC DEVICE Hui LI Institute of Ceramics, Chinese Academy of Sciences
11:45-12:05 LAYERED TWO-DIMENSIONAL MATERIALS SHOWING TWO EXTREMES OF HEAT TRANSPORT Hyejin JANG Seoul National University
12:05-12:25 LAYER DEPENDENT THERMAL TRANSPORT PROPERTIES OF 2D WSE2 Xian (Annie) ZHANG Stevens Institute of Technology
12:25-12:45 TEMPERATURE-MICROSTRUCTURE-PROPERTIES RELATIONSHIPS DURING AL-SN-AL THERMO-COMPRESSION WAFER BONDING Zhiyuan ZHU Southwest University, China
Invited Session Ic: 10:45 - 12:45 Resonant Micro/Nanoelectromechanical Systems
Venue: Conference Room No.05 (2F)
Chair: Zenghui WANG 10:45-11:05 HIGH RESOLUTION MICRO-SENSORS BASED ON COUPLED RESONATORS/MODES Chun Zhao HUST
24 April 25-29 , 2021 Xiamen, China
11:05-11:25 MULTIMODE RESONANT MICROMECHANICAL SYSTEMS IN LIQUID FOR BIOPHYSICAL STUDIES OF CANCER CELLS Hao Jia SIMIT
11:25-11:45 SENSING WITH SERIAL OR PARALELL MICROMECHANICAL RESONATORS Honglong Chang NWPU
11:45-12:05 ATOMICALLY-THIN MOS2 NANOELECTROMECHANICAL RESONATORS Rui Yang SJTU
12:05-12:25 NONLINEAR MEMS: FUNDAMENTALS AND APPLICATIONS Xueyong Wei XJTU
12:25-12:45 ULTRA-WIDE BANDGAP Β-GA2O3 RESONANT NANOELECTROMECHANICAL SYSTEMS (NEMS) Xuqian Zheng University of Florida
Session Ib: 10:45 - 12:30 Energy Conversion and Storage-I Venue: Conference Room No.07 (3F) Chair: Huan LIU 10:45-11:15 KEYNOTE SPEAKER : CONFORMAL BIOELECTRONIC INTERFACES Xiaodong CHEN Nanyang Technological University
11:15-11:30 #241, BROADBAND PIEZOELECTRIC HARVESTER UTILIZING THREE-WAFER BONDING FOR SELF-POWERED WIRELESS SENSOR SYSTEM Xin Chen, Daqiao Tong, Jian Zhang, Lingxiao Gao, Fayang Wang, Hongzhi Pan, Liang Cao and Xiaojing Mu Chongqing University
11:30-11:45 #261, DESIGN AND FABRICATION OF A METAL-SILICON ACTUATOR WITH LARGE DISPLACEMENT AND LOW VOLTAGE Ying Bu, Jin Xie, Kaiquan Li, Zhuang Xiong, Bing Tang, Qi Tao and Jun Dai Beijing Institute of Technology
11:45-12:00 #358, FLEXIBLE SINGLE ELECTRODE TRIBOELECTRIC NANOGENERATOR Yuchi Liu, Rami Ghannam and Xiaosheng Zhang University of Electronic Science and Technology of China
25 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
12:00-12:15 #364, DEVELOPMENT OF CLOSED-LOOP SOFT ACTUATORS WITH SELF-SENSING CAPABILITY FOR ADVANCED WEARABLE ASSISTIVE ROBOTICS Hwajoong Kim and Jaehong Lee Soft Biomedical devices Lab, Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology(DGIST)
12:15-12:30 #484, WEARABLE TRIBOELECTRIC NANOGENERATOR BASED ON THE CONDUCTIVE TEXTILE WITH POLYANILINE GRAFTED Yun Tian, Chuanhong Zhou, Zejue Yu, Zhangwei Liu, Chenyang Xing, Bo Meng and Zhengchun Peng Shenzhen University
Session Ic: 10:45 - 12:30 Micro/Nano Pores and Channels Venue: Sunshine Hall (3F) Chair: Xinghua XIA 10:45-11:15 KEYNOTE SPEAKER: ORGANIC MOLECULAR SIEVE MEMBRANES Zhongyi JIANG Tianjin University
11:15-11:30 #93, REGULATORY MECHANISM OF IONIC/MOLECULAR TRANSPORT B EHAVIORS IN NANOSCALE CHANNELS Yaqi Hou and Xu Hou Xiamen University
11:30-11:45 #127, FABRICATION OF NANOSLITS WITH <111> ETCHING TSWE METHOD Hao Hong, Li Ye, Ke Li, Pasqualina M Sarro, Guoqi Zhang and Zewen Liu Department of Microelectronics, Delft University of Technology
11:45-12:00 #161, CONFINED COLLOIDS GATING SYSTEM FOR TUNABLE FLUID TRANSPORT Zhizhi Sheng, Mengchuang Zhang, Jing Liu and Xu Hou Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences
12:00-12:15 #340, CHARACTERIZATION OF ITO-SINX NANOPORES FOR SINGLE-BIOMOLECULAR SENSING Xin Zhu, Chaoming Gu, Xiaojie Li, Zhi Ye, Zhen Cao and Yang Liu Zhejiang University
12:15-12:30 #411, MECHANICAL ENERGY HARVESTER FOR SMART SHARED BICYCLE APPLICATION Junlong Huang, Chen Bao, Anxin Luo and Fei Wang Southern University of Science and Technology
26 April 25-29 , 2021 Xiamen, China
12:15 - 13:30 Lunch Break
Location: Qinye Canteen 3rd Floor
13:30 - 15:15 Best Conference Paper
Venue: Concert Hall (2F) Chair: Yong QIN 13:30-13:45 #111, CHIP-LEVEL-MICROASSEMBLY COMB-DRIVE XYZ-MICROSTAGE WITH LARGE DISPLACEMENTS AND LOW CROSSTALK Gaopeng Xue, Masaya Toda, Xinghui Li and Takahito Ono Tsinghua University
13:45-14:00 #112, EFFECT OF THE DIFFERENT SUBSTRATES AND THE FILM THICKNESS ON THE SURFACE ROUGHNESS OF STEP STRUCTURE Chenying Wang, Jiangtao Pu, Lei Li, Weixuan Jing, Yijun Zhang, Yaxin Zhang, Feng Han, Ming Liu, Wei Ren and Zhuangde Jiang Xi’an Jiaotong University
14:00-14:15 #150, EFFICIENT INFRARED–THERMAL-ELECTRIC CONVERSION WITH TEXTURED DIELECTRIC FILM Yunqian He, Yuelin Wang and Tie Li Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
14:15-14:30 #182, INERTIAL FOCUSING CHIP BASED ON SUPERPOSED SECONDARY FLOWS Jianguo Feng, Qi Wang, Yuanming Ma, Honglong Chang and Gaobin Xu Hefei University of Technology
14:30-14:45 #298, A SENSORISED FORCEP BASED ON PIEZORESISTIVE FORCE SENSOR FOR ROBOTIC-ASSISTED MINIMALLY INVASIVE SURGERY Cheng Hou, Jiangjun Geng, Yuyang Sun, Tao Chen, Fengxia Wang, Hongliang Ren, Xiuli Zuo, Yanqing Li, Huicong Liu and Lining Sun Soochow University
14:45-15:00 #380, IN SITU LASER-ASSISTED MICROMACHINING OF ENVIRONMENTALLY-RESPONSIVE HYDROGEL FILMS Hongjie Jiang, Manuel Ochoa and Rahim Rahimi South China University of Technology
15:00-15:15
27 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#587, THREE-DIMENSIONAL GRAPHENE FETS FOR PH DETECTION Tao Deng, Yuning Li, Zhaohao Zhang, Yang Zhang and Zewen Liu Beijing Jiaotong University
Wen H Ko Memorial Session 14:30 - 17:00 Plenary Speaker Ic:
Venue: Multi-function Hall (1F) Chair: Kangping WANG 14:30-15:40 Wen H Ko Memorial Events Chair: Haixia ZHANG
15:40-16:20 Plenary Speaker Ic: PUSHING LASER PRECISION ENGINEERING FROM MICRO-SCALE TO NANO-SCALE: PROGRESS, CHALLENGES AND OPPORTUNITIES Minghui HONG National University of Singapore
16:20-16:30 MEMS/SEMI ECOSYSTEM IN CHINA --2021 Lucy HUANG Hanking Electronics (Liaoning) Co., Ltd.
16:30-16:40 FOREVER SCALING—PUSHING THE LIMIT OF MINISCULE SENSORS AND ACTUATORS Zenghui WANG University of Electronic Science and Technology of China
16:40-16:50 FOREVER PIONEER- IN MEMORY OF PROF. WEN KO Tie LI Shanghai Institute of Microsystem and Information Technology
16:50-17:00 MICRO NANO RESEARCH AT XIAMEN UNIVETSITY Daoheng SUN Xiamen University
Invited Session Id: 13:30 - 15:30 Self-powered Micro/Nano Systems
Venue: Conference Room No.01 (1F) Chair: Wei TANG 13:30-13:50 TRIBOTRONICS FOR ACTIVE MECHANOSENSATION AND SELF-POWERED MICROSYSTEMS Chi ZHANG Beijing Institute of Nanoenergy and Nanosystems, Beijing
28 April 25-29 , 2021 Xiamen, China
13:50-14:10 PULSED TRIBOELECTRIC NANOGENERATOR AND SELF-POWERED SENSING SYSTEM Gang CHENG Henan University
14:10-14:30 HIGH EFFICIENT VIBRATION ENERGY HARVESTING FOR SELF-POWERED MACHINE MONITORING APPLICATION Jian HE North University of China
14:30-14:50 NANOGENERATORS FOR SELF-POWERED WEARABLE PHYSICAL MONITORING SYSTEMS Wei TANG Beijing Institute of Nanoenergy and Nanosystems, Beijing
14:50-15:10 TRIBOELECTRIC POLYMERS AND ELECTROSTATIC POWER SOURCE Xiangyu CHEN Beijing Institute of Nanoenergy and Nanosystems, Beijing
15:10-15:30 SELF-POWERED TRIBOELECTRIC PRESSURE SENSORS Zhen WEN Soochow University
Invited Session Ie: 13:30 - 15:30 Bioelectronic Devices and Systems
Venue: Conference Room No.04 (2F) Chair: Zhou LI & Mengdi HAN 13:30-13:50 DEVELOPMENT OF SELF-POWERED SENSORS TOWARDS MACHINE-LEARNING ENABLED SMART SYSTEMS Chengkuo LEE National University of Singapore
13:50-14:10 INTERACTIVE NEUROMORPHIC SYNAPTIC DEVICES AND SYSTEMS Qijun SUN Beijing Institute of Nanoenergy and Nanosystems, CAS
14:10-14:30 MINIMALLY INVASIVE BIOSENSORS Xi XIE Sun Yat-sen University
14:30-14:50 FLEXIBLE BIOELECTRONIC DEVICES FOR MONITORING AND REGULATING PHYSIOLOGICAL ACTIVITIES Xian HUANG Tianjin University
14:50-15:10 SHAPE-ADAPTABLE BIOMEDICAL DEVICES Xuemin DU Shenzhen Institutes of Advanced Technology Chinese Academy of Sciences
29 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
15:10-15:30 SELF-POWERED MEDICAL ELECTRONICS Zhou Li Beijing Institute of Nanoenergy and Nanosystems, CAS
Invited Session If: 13:30 - 15:30 Non-linear Micro/Nanoelectromechanical Systems
Venue: Conference Room No.05 (2F) Chair: Dong F. WANG & Xueyong WEI 13:30-13:50 NONLINEAR INTERACTION IN COUPLED CANTILEVERS AND ITS SENSING APPLICATIONS: MODE-LOCALIZATION, SYNCHRONIZATION AND INTERNAL RESONANCE Cao XIA Jilin University
13:50-14:10 INSIGHT OF SENSING MECHANISMS FOR CONJUGATED POLYMER BASED GAS SENSORS Jian SONG Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences
14:10-14:30 ULTRASENSITIVE MASS SENSING UTILIZING NONLINEAR MODE LOCALIZATION OF MEMS CURVED BEAMS WITH DISTRIBUTED ELECTRODES Jian ZHAO Dalian University of Technology
14:30-14:50 NONLINEAR BROADBAND ENERGY HARVESTING AND APPLICATIONS Junyi CAO Xi’an Jiaotong University
14:50-15:10 DYNAMIC-BASED MICRO AND NANO DEVICES AND PHENOMENA Mohammad I. Younis King Abdullah University of Science and Technology
15:10-15:30 NONLINEAR DYNAMICS OF COUPLED MEMS RESONATORS AND ITS APPLICATION Ronghua HUAN Zhejiang University
Session Id: 13:30 - 15:30 MEMS/NEMS-I Venue: Conference Room No.07 (3F) Chair: Ting Zhang 13:30-14:00 KEYNOTE SPEAKER: TRIBOELECTRIC NANOGENERATOR FOR POWERING BODY-IMPLANTABLE ELECTRONICS
30 April 25-29 , 2021 Xiamen, China
Sang-Woo KIM Sungkyunkwan University (SKKU)
14:00-14:15 #386, LUBRICATED NON-IMMUNOGENIC NEURAL PROBES FOR LIFELONG USE BRAIN-MACHINE INTERFACES Yeontaek Lee, Hyogeun Shin, Il-Joo Cho and Jungmok Seo School of Electrical and Electronic Engineering, Yonsei University
14:15-14:30 #471, DEVELOPMENT OF THIN GLASS-BASED BICONVEX MICROLENS VIA THERMAL EXPANSION Yusufu Aishan Osaka University
14:30-14:45 #652, ANALYSIS OF VIBRATION MODES IN TPOS DISK RESONATORS Feilong Li, Cheng Tu, Jiannan Chen and XIAOSHENG ZHANG University of Electronic Science and Technology of China
14:45-15:00 #674, A RESONANT DIFFERENTIAL PRESSURE SENSOR BASED ON B ULK SILICON TECHNOLOGY Chao Cheng, Yadong Li, Yulan Lu, Chao Xiang, Junbo Wang, Deyong Chen and Jian Chen State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences
15:00-15:15 #684, AN ULTRALOW-RIPPLE POLARIZATION VOLTAGE GENERATOR BASED ON HIGH- VOLTAGE BANDGAP REFERENCE FOR MEMS GYROSCOPES Hua Chen, Zhen Meng, Xingcheng Zhang and Ke Liu Institute of Microelectronics CAS
15:15-15:30 #698, ELECTROCHEMICAL MICROMACHINING OF COPPER WORKPIECE WITH ULTRASHORT VOLTAGE PULSES Zhen Ma, Lianhuan Han, Hantao Xu, Bingqian Du, Yang Wang and Dongping Zhan Xiamen University
Session Ie: 13:30 - 15:30 Micro/Nano Fluidic-I Venue: Sunshine Hall (3F) Chair: Zhongyi JIANG 13:30-14:00 KEYNOTE SPEAKER: NANOFLUIDIC DEVICES FOR BIOSENSING AND ENERGY CONVERSION Xinghua XIA Nanjing University
14:00-14:15 #64, INNER SURFACE DESIGN OF MICROFLUIDIC CHANNELS FOR
31 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
MICROSCALE FLOW CONTROL Shuli Wang and Xu Hou Xiamen University
14:15-14:30 #114, FREQUENCY RESEARCH OF MICROFLUIDIC WEAR DEBRIS DETECTION CHIP BASED ON INDUCTIVE WHEATSTONE BRIDGE Yucai Xie, Hongpeng Zhang, Haotian Shi and Yuwei Zhang
14:30-14:45 #361, CARBON NANOTUBE-BASED IONIC DIODES: DESIGN AND MECHANISM Ran Peng, Yueyue Pan, Biwu Liu, Zhi Li, Peng Pan, Shuailong Zhang, Zhen Qin, Aaron R. Wheeler, Shirley Tang and Xinyu Liu Dalian Maritime University
14:45-15:00 #456, FLOW-THROUGH ELECTROPORATION USING SILVER-PDMS BASED 3D SIDEWALL MICROELECTRODES Yao Cai, Yunyi Huang, Guangyu Qin, Duli Yu and Xiaoxing Xing Beijing University of Chemical Technology
15:00-15:15 #552, MOLECULAR DYNAMICS SIMULATION ON DIRECTIONAL WETTING BEHAVIOR OF A NANO DROPLET ON TITANIUM OXIDES SURFACE Chenhua Liu, Xiangmeng Li and Xijing Zhu North University of China
15:15-15:30 #591, A HUMAN CORNEA-ON-A-CHIP FOR THE STUDY OF EPITHELIAL WOUND HEALING BY EXTRACELLULAR VESICLES Zitong Yu, Rui Hao, Jing Du, Xi Chen, Yi Zhang, Wei Li, Zhongze Gu and Hui Yang Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences
15:30 - 16:30 Plenary Speaker Id (Nobel Laureate)
Main Venue: Concert Hall (2F) Chair: Yunbao JIANG
FROM SUPRAMOLECULAR TO ADAPTIVE CHEMISTRY – CONTRIBUTIONS TO NANOSCIENCE AND TECHNOLOGY Jean-Marie LEHN University of Strasbourg
32 April 25-29 , 2021 Xiamen, China
16:30 - 18:30 Coffee Break & Poster Session I
Venue: Exhibition Hall (1F)
Accept Posters from No.4 to No.320 except 256 & 314
17:00 - 18:00 学术好莱坞讲座 -- 现代科研论文的构思与写作
Venue: Exhibition Hall (1F)
主讲人 : 李风煜教授 ( 暨南大学 )
18:30 Adjourn for the Day
19:00 - 21:00 VIP Dinner (By Invited)
Location: Yifu Building
33 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Plenary Speaker
Bioinspired Super-wettability System and Beyond ——Quantum-confined Superfluid: Energy Conversion, Chemical Reaction and Biological Information Transfer
Lei Jiang
Techinical Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, P.R. China
E-mail : [email protected]
ABSTRACT A new concept of "quantum-confined superfluid (QSF)" has been proposed for ultrafast ions and molecules transmission in biological ion channels, which are in a quantum way of single molecular or ionic chain with a certain number of molecules or ions. The biomimetic systems also exhibit QSF phenomena, such as ultrafast ions transport in artificial ion channels, and ultrahigh water flux in artificial water channels. The introduction of QSF concept in the fields of energy, chemistry and biology may create significant impact. As a challenge to the traditional theory, the concept of QSF will open up a new field of quantum ionics, promote the development and application of energy conversion material system, subvert the understanding of neural signal transmission in neuroscience and brain science, and promote the development of interfacial catalytic chemistry theory, and open up a new way for the future development of chemistry,chemical engineering and synthetic biology.
BIOGRAPHY
Lei Jiang is a Professor at the Technical Institute of Physics and Chemistry, Chinese Academy of Sciences. He is an academician of the Chinese Academy of Sciences, Academy of Sciences for the Developing World, and National Academy of Engineering, USA. His scientific contribution is learning from nature, discovering and establishing super-wettability system: from fundamental understanding to innovative applications. He has made a series of achievements, continuously leading the development of bioinspired super-wettability field in the world, and won many important international awards. Recent research interest includes introduction of quantum-confined superfluid into super-wettability system, and its applications in energy conversion, chemical reaction and biological information transfer.
34 April 25-29 , 2021 Xiamen, China
Atomically Precise Chemical, Physical, Electronic, and Spin Contacts
Paul S. Weiss
California NanoSystems Institute and Departments of Chemistry & Biochemistry, Bioengineering, and Materials Science & Engineering, University of California, Los Angeles (UCLA), Los Angeles, California 90095, USA
E-mail: [email protected] Website: www.nano.ucla.edu
ABSTRACT Two seemingly conflicting trends in nanoscience and nanotechnology are our increasing ability to reach the limits of atomically precise structures and our growing understanding of the importance of heterogeneity in the structure and function of molecules and nanoscale assemblies. By having developed the “eyes” to see, to record spectra, and to measure function at the nanoscale, we have been able to fabricate structures with precision as well as to understand the important and intrinsic heterogeneity of function found in these assemblies. The physical, electronic, mechanical, and chemical connections that materials make to one another and to the outside world are critical and are intertwined in terms of their function. Just as the properties and applications of conventional semiconductor devices depend on these contacts, so do nanomaterials, many nanoscale measurements, and devices of thefuture. We discuss the important roles that these contacts can play in preserving key transport and other properties. Initial nanoscale connections and measurements guide the path to future opportunities and challenges ahead. Band alignment and minimally disruptive connections are both targets and can be characterized in both experiment and theory. Chiral assemblies can control the spin properties and thus transport at interfaces. I discuss our initial forays into these areas in a number of materials systems.
BIOGRAPHY Paul S. Weiss holds a UC Presidential Chair and is a distinguished professor of chemistry & biochemistry, bioengineering, and materials science & engineering at UCLA. His interdisciplinary research group includes chemists, physicists, biologists, materials scientists, mathematicians, bioengineers, electrical and mechanical engineers, computer scientists, clinicians, and physician scientists. Theyfocus on the ultimate limits of miniaturization, exploring the atomic-scale chemical, physical, optical, mechanical, and electronic properties of surfaces, interfaces, supramolecular, and biomolecular assemblies. They develop new techniques to expand the applicability and chemical specificity of scanning probe microscopies. They apply these and other tools to study self- and directed assembly, and molecular and nanoscale devices. They advance nanofabrication down to ever smaller scales and greater chemical specificity to operate and to test functional molecular assemblies, and to connect to the chemical and biological worlds in neuroscience, gene editing, cancer immunotherapy, tissue engineering, and the microbiome. He has written over 400 publications, holds over 30 patents, and has given over 800 invited, plenary, keynote, and named lectures. Prof. Weiss has been awarded a National Science Foundation (NSF) Presi dential Young Investigator Award, a Sloan Fellowship, the American Chemical Society (ACS) Nobel Laureate Signature Award for Graduate Education in Chemistry, a Guggenheim Fellowship, a NSF Creativity Award, the ACS Award in Colloid and Surface Chemistry, the ACS Southern California Section Tolman Medal, the ACS Patterson-Crane Award in Chemical Information, and the IEEE Nanotechnology Pioneer Award, among others. He is a fellow of the: American Association for the Advancement of Science, American Physical Society, American Vacuum Society, ACS, American Academy of Arts and Sciences, American Institute for Medical & Biological Engineering, Canadian Academy of Engineering, IEEE, Materials Research Society, and an honorary fellow of the Chinese Chemical Society and Chemical Research Society of India. He has been a visiting professor at the University of Washington and Kyoto University, and a distinguished visiting professor at the Kavli Nanoscience Institute and the Joint Center for Artificial Photosynthesis at Caltech. He is a visiting scholar at the Wyss Institute for Biologically Inspired Engineering at Harvard University. He held the Institut National de la Recherche Scientifique (INRS) Chaire d'excellence Jacques-Beaulieu and was a Fulbright Specialist for the Czech Republic. He is the founding editor-in-chief of ACS Nano.
35 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Pushing Laser Precision Engineering from Micro-scale to Nano-scale: Progress, Challenges and Opportunities
Hong Minghui Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117508 E-mail : [email protected] Website: https://online.ece.nus.edu.sg/staff/web.asp?id=eleHMH
ABSTRACT Laser precision engineering in micro/nano-scales has unique advantages as a non-contact process with flexible setup and high speed processing in ambient air. It is an important advanced manufacturing means for high quality micro/nano-structures’ fabrication and related surface processing, especially to create new functional MEM/NEM devices and structures. In the past decades, we have witnessed its extensive applications from academic researches to production lines. Combined with other advanced processing tools, laser precision engineering’s resolution has been pushed down to ~ 25 nm in laboratories, much smaller than the optical diffraction limit, which will soon play a much more important role in next-generation nano-manufacturing. In this talk, the research progress on dynamic laser- matter interactions will be reviewed. How to achieve small heat affected zone is the first key challenge in high quality laser precision engineering to push its resolution from micro-scale to nano-scale. To apply ultrafast femtosecond laser induced photo-thermal and photo-chemical effects is a must to solve this issue. The second key challenge is how to ensure high enough processing speed to meet various industrial needs as one beam laser processing at high resolution could not achieve this mission. Parallel laser beam processing becomes a versatile solution to fit the both requirements on high resolution and high speed at the same time. The third challenge is how to carry out the laser nano-structuring in far field as the near field effect requires our tiny optics working very close to sample surfaces, which confines the near field laser nanofabrication to be only suitable for a few super-smooth surface samples. Our recent research shows that hybrid fs laser processing in far field and in ambient air is a novel method to make ~15 nm features directly on Si surfaces (Fig. 1). Though we still need to understand clearly the complicated physics behind this unique experimental result, further fine tuning of our experimental setup and laser processing parameters is highly possible to bring our laser nano-fabrication resolution down to ~10 nm.
BIOGRAPHY zProf. Hong Minghui specializes in laser microprocessing & nanofabrication, optical engineering and laser applications. He has co-authored 15 book chapters, 42 patents granted, and 450+ scientific papers in Nature, Chemical Reviews, Nature Nanotechnology, Advanced Materials, Advances in Optics and Photonics, Nano Letters, Light: Science and Applications, ACS Nano, Science Advances, Nature Communications, and Laser & Photonics Reviews etc. and 80+ plenary/keynote/invited talks in international conferences. He is a member of organizing committees for Laser Precision Micromachining International Conference (2001~2021), International Symposium of Functional Materials (2005, 2007 and 2014), Chair of International Workshop of Plasmonics and Applications in Nanotechnologies (2006), Chair of Conference on Laser Ablation (2009) and Chair of Asia-Pacific Near-field Optics Conference (2013 and 2019). Prof. Hong is invited to serve as an Editor of Light: Science and Applications, Engineering, Science China G, Laser Micro/nanoengineering, and Executive Editor-in-chief of Opto-Electronic Advances. Prof. Hong is Fellow of Academy of Engineering, Singapore (FSEng), Fellow of Optical Society of America (OSA), Fellow of International Society for Optics and Photonics (SPIE), and Fellow and Vice President of International Academy of Photonics and Laser Engineering (IAPLE) and Fellow and Vice President of Institution of Engineers, Singapore (IES). Prof. Hong is currently a Full Professor and the Director of Advanced Research and Technology Innovation Centre (ARTIC), Director of Optical Science and Engineering Centre (OSEC), Department of Electrical and Computer Engineering, National University of Singapore. He is also a founder of Phaos Technology Pte. Ltd.
I
36 April 25-29 , 2021 Xiamen, China
From Supramolecular to Adaptive Chemistry – Contributions to Nanoscience and Technology
Jean-Marie Lehn
ISIS, University of Strasbourg; Strasbourg, France E-mail : [email protected]
Supramolecular chemistry is actively exploring systems undergoing self-organization, i.e. systems capable of spontaneously generating well-defined functional supramolecular architectures by self-assembly from their components, on the basis of the molecular information stored in the covalent framework of the components and read out at the supramolecular level through specific interactional algorithms, thus behaving as programmed chemical systems. The implementation of molecular information controlled, “programmed” and functional systems allows the spontaneous but controlled generation of well-defined, functional molecular and supramolecular architectures of nanometric size through self-organization by design . It represents a means of performing programmed engineering and processing of functional nanostructures and offers attractive perspectives to nanoscience and nanotechnology. Supramolecular entities as well as molecules containing reversible bonds are able to undergo a continuous change in constitution by reorganization and exchange of building blocks. This capability allows for self-organisation with selection and defines a Constitutional Dynamic Chemistry (CDC) on both the molecular and supramolecular levels. CDC introduces a paradigm shift with respect to constitutionally static chemistry. It takes advantage of dynamic constitutional diversity to enable variation and selection and thus allow for adaptation leading to the emergence of an adaptive chemistry towards a chemistry of complex systems. Lehn, J.-M., Supramolecular Chemistry: Concepts and Perspectives, VCH Weinheim, 1995. Lehn, J.-M., Dynamic combinatorial chemistry and virtual combinatorial libraries, Chem. Eur. J., 1999, 5, 2455. Lehn, J.-M., Programmed chemical systems : Multiple subprograms and multiple processing/expression of molecular information, Chem. Eur. J., 2000, 6, 2097. Lehn, J.-M., Toward complex matter: Supramolecular chemistry and self-organization, Proc. Natl. Acad. Sci. USA, 2002, 99, 4763. Lehn, J.-M., Toward self-organization and complex matter, Science, 2002, 295, 2400. Lehn, J.-M., From supramolecular chemistry towards constitutional dynamic chemistry and adaptive chemistry, Chem. Soc. Rev., 2007, 36, 151. Lehn, J.-M., in Constitutional Dynamic Chemistry, ed. M. Barboiu, Topics Curr. Chem, 2012, 322, 1-32. Lehn, J.-M., Perspectives in Chemistry – Steps towards Complex Matter, Angew. Chem. Int. Ed., 2013, 52, 2836-2850. Lehn, J.-M., Perspectives in Chemistry – Aspects of Adaptive Chemistry and Materials, Angew. Chem. Int. Ed., 2015, 54, 3276-3289.
BIOGRAPHY
Jean-Marie LEHN was born in Rosheim, France in 1939. In 1970 he became Professor of Chemistry at the Université Louis Pasteur in Strasbourg and from 1979 to 2010 he was Professor at the Collège de France in Paris. He is presently Professor at the University of Strasbourg Institute for Advanced Study (USIAS). He shared the Nobel Prize in Chemistry in 1987 for his studies on the chemical basis of “molecular recognition” (i.e. the way in which a receptor molecule recognizes and selectively binds a substrate), which also plays a fundamental role in biological processes. Over the years his work led him to the definition of a new field of chemistry, which he has proposed calling “supramolecular chemistry” as it deals with the complex entities formed by the association of two or more chemical species held together by non-covalent intermolecular forces, whereas molecular chemistry concerns the entities constructed from atoms linked by covalent bonds. Subsequently, the area developed into the chemistry of "self-organization" processes and more recently towards "adaptive chemistry", dynamic networks and complex systems. Author of over 1000 scientific publications, Lehn is a member of many academies and institutions. He has received numerous international honours and awards. 37 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Keynote Speaker
Opportunities for Single-Molecule Electronics: A Ten-Year Perspective
Wenjing Hong
College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistry of Solid Surfaces Xiamen University, 361005 Xiamen, China
E-mail : [email protected] Website : pilab.xmu.edu.cn
ABSTRACT With the development and scaling downward of electronic devices, the dimension of electronic device has shrunk down to nanometer scale. Molecular electronics is an important subject of nanoelectronics, which will utilize rich varieties of organic and inorganic molecular materials as the functioning electronic component to realize the electronic behaviors as conventional electronic devices. “More Moore”: The original goal of molecular electronics is to build functional molecules from atomic level, and then to build electronic devices and circuits from the individual molecules. Towards this goal, quantum interference effect in the charge transport through single-molecule junction enables potential higher switching ratio and even lower subthreshold swing than traditional transistors when leads to the single-molecule transistors. However, the stability and the integration of multiple devices on chip remained as a major challenge for the fabrication of “molecular circuits”. “Beyond Moore”: In recent years, we extended the application of single-molecule techniques to the quantitative analysis of the molecular physical-chemical process by counting the number of molecules. n this talk, I will share our recent effort towards quantitative analysis of the reaction rate, adsorption free energy, isomerization, the movement manipulation of molecules, and even the assembly of molecules at the scale of single or several molecules. As perspective, recent advances of molecular electronics will lead to their device application on the field of sensors and thermoelectric devices in the next ten years.
BIOGRAPHY
Wenjing Hong is currently “Minjiang” Chair Professor of Chemical Engineering and Vice Dean in College of Chemistry and Chemical Engineering, Xiamen University. He is also the Assistant to Director (Prof. Zhong-qun Tian) in Tan Kah Kee Innovation Laboratory. Prof. Hong received his bachelor degree from Xiamen University, master degree from Tsinghua University, and Ph.D. degree from University of Bern, Switzerland. After his postdoctoral research at the University of Bern, Switzerland, he joined Xiamen University as a full professor in 2015. Prof. Hong’s research mainly focused on single-molecule electronics, and the application of artificial intelligence for chemical engineering. 80+ peer-reviewed papers are published in top journals of chemistry and nanotechnology, including Nature Materials, 13 papers in Science Advances/Chem/Matter/Nature Communications, 17
38 April 25-29 , 2021 Xiamen, China papers in J. Am. Chem. Soc./Angew. Chem. Int. Ed., and 5 invited reviews in Chem. Soc. Rev., Acc. Chem. Res., Adv. Mater., etc. Besides the publications, the scientific instrument for single-molecule electronic characterization developped by his group has been used in 10+ research labs all over the world. Prof. Hong was supported by the National Science Foundation for Excellent Young Scholars Program in 2017, he has undertaken serveral research projects such as the National Key Research and Development Program of China and the National Natural Science Foundation of China. In 2019, he was awarded the Chinese Chemical Society Award for Outstanding Young Chemist. In 2020, he won the second prize of Fok Ying Tung Education Foundation Young Faculty Award and the Fujian Province Youth Science and Technology Award.
Conformal Bioelectronic Interfaces
Xiaodong Chen
Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, Singapore E-mail : [email protected] Website: https://personal.ntu.edu.sg/chenxd
ABSTRACT Smart sensors not only enrich daily lives by providing enhanced smart functions, but also provide health information by monitoring body conditions. For example, patchable sensors have the potential to better interface with human skin, thus improving the sensitivity of detection of health indicators. However, the crucial aspects toward the advancement of such sensors rely on the development of novel mechanically durable materials, which allow maintaining the function under the deformed states. In this talk, I will present our latest progress on building conformal bioelectronic interfaces, manufacturing conformal sensors and their integration of individual devices into systems.
BIOGRAPHY Dr. Xiaodong Chen is the President’s Chair Professor in Materials Science and Engineering, Professor of Chemistry and Medicine (by courtesy) at Nanyang Technological University, Singapore (NTU). He is the Director of Innovati ve Centre for Flexible Devices (iFLEX) at NTU and the Director of Max Planck – NTU Joint Lab for Artificial Senses. He received his B.S. degree (Honors) in chemistry from Fuzhou University (China) in 1999, M.S. degree (Honors) in physical chemistry from the Chinese Academy of Sciences in 2002, and Ph.D. degree (Summa Cum Laude) in biochemistry from University of Muenster (Germany) in 2006. After his postdoctoral fellow working at Northwestern University (USA), he started his independent research career as Nanyang Assistant Professor at Nanyang Technological University since 2009. He was promoted to Associate Professor with tenure in Sept 2013, then Full Professor in Sept 2016. He was appointed as the President’s Chair Professor in Materials Science and Engineering in April 2019. His research interests include mechano-materials and devices, integrated nano-bio interface, and cyber- human interfaces. He has been elected as a Fellow of the Academy of Engineering Singapore and a Fellow of Royal Society of Chemistry in UK. In addition, he was recognized by multiple prestigious awards and honors including Singapore NRF Investigatorship, Small Young Innovator Award, Singapore NRF Fellowship, Nanyang Research Award, Lubrizol Young Materials Science Investigator Award, Mitsui Chemicals- SNIC Industry Award in Materials and Nano-chemistry, and Friedrich Wilhelm Bessel Research Award from Alexander von Humboldt Foundation.
39 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Organic Molecular Sieve Membranes
Zhongyi Jiang
School of Chemical Engineering and Technology, Tianjin University, Tianjin, 300072, P.R. China
E-mail : [email protected] Website : http://www.jiang-lab.com/
ABSTRACT Molecular separations that enable selective transport of target molecules from gas and liquid molecular mixtures, represent the most energy sensitive and significant demands. A number of emerging microporous organic materials have displayed the great potential as building blocks of molecular separation membranes, which not only integrate the rigid, engineered pore structures and desirable stability of inorganic m olecular sieve membranes, but also exhibit high degree of freedom to create chemically-rich combinations/sequences. In this talk, we propose the concept of organic molecular sieve membranes (OMSMs) with the focus on the precise construction of membrane structures and efficient intensification of membrane processes. The platform chemistries, designing principles, assembly methods for the precise construction of OMSMs are elaborated. Conventional mass transport mechanisms are analyzed based on the interactions between OMSMs and penetrate(s). Particularly, ‘STEM’ guidelines of OMSMs are highlighted to guide the precise construction of OMSM structures and efficient intensification of OMSM processes. Emerging mass transport mechanisms are elucidated inspired by the phenomena and principles of the mass transport processes in biological realm. The representative applications of OMSMs in gas and liquid molecular mixture separations are highlighted.
BIOGRAPHY
Zhongyi Jiang is a Professor at School of Chemical Engineering and Technology of Tianjin University. He obtained a PhD degree from Tianjin University in 1994. He was a visiting scholar of University of Minnesota with Prof. Edward Cussler in 1997 and California Institute of Technology with Prof. David Tirrell in 2009. He is the winner of the National Science Fund for Distinguished Young Scholars in China, and a fellow of the Royal S ociety of Chemistry. He is an editorial board membrane of Journal of Membrane Science, Separation and Purification Technology, Green Chemical Engineering, etc. His research interests include biomimetic and bioinspired membranes and membrane processes, biocatalysis, and photocatalysis. Until now, he has co-authored over 560 peer-reviewed scientific papers, and the total citation times is over 22,000 with a h-index of 79.
40 April 25-29 , 2021 Xiamen, China
Triboelectric Nanogenerator for Powering Body-implantable Electronics
Sang-Woo Kim
School of Advanced Materials Science and Engineering, SKKU Advanced Institute of Nanotechnology (SAINT), Samsung Advanced Institute for Health Sciences & Technology (SAIHST), Sungkyunkwan University (SKKU), Suwon 16419, Republic of Korea
E-mail : [email protected] Website : http://nesel.skku.edu/
ABSTRACT In this presentation, I firstly introduce the fundamentals and possible device applications of TENGs, including their basic operation modes. Then the different improvement parameters will be discussed. As the first main topic, I will report transcutaneous ultrasound energy harvesting using triboelectric technology. Implantable medical devices (IMDs) are designed to perform or augment the functions of existing organs by using monitoring, measuring, processing units, and the actuation control. Conventional IMDs are powered with primary batteries that require frequent surgeries for maintenance and replacement. Therefore, IMDs require a new reliable and safe powering system to avoid the need for frequent surgeries. Recently my group demonstrated that ultrasound was used to deliver mechanical energy through skin and liquids and demonstrated that a thin inplantable vibrating triboelectric nanogenerator (TENG) is able to effectively harvest it. Ultrasound TENG (US-TENG) was triggered with an applied 20-kHz ultrasound at 3 W/cm2 reaching 9.71 V(root mean square [RMS]) and 427 ARMS. The measured output current was enhanced two orders of magnitude compared with conventional TENGs, with a similar level of surface charge density, triggered in low-frequency mechanical environments. Interestingly, to experimentally simulate clinical conditions closer to human in the laboratory, we in serted US-TENG under porcine tissue, showing that it fully charged a rechargeable Li-ion battery having a capacity of 0.7 mAh. As the second topic, I will deal with our very recent demonstration of a commercial coin battery-sized high-performance inertia-driven TENG (I-TENG) based on body motion and gravity. In a preclinical test, we demonstrate that the encapsulated device successfully harvested energy using real-time output voltage data monitored via a Bluetooth low-energy information-transmitting system. Details will be presented in the conference site.
BIOGRAPHY Dr. Sang-Woo Kim is currently an SKKU Distinguished Professor (SKKU Fellow) at Sungkyunkwan University (SKKU) and Director of the BK21 FOUR SKKU MSE Program. He received a Ph.D. in Electronic Science and Engineering from Kyoto University in 2004 and completed his postdoctoral research at University of Cambridge. From 2015 to 2016, he was a visiting professor at Georgia Institute of Technology as a sabbatical stay. His recent research interest is belonging to triboelectric/piezoelectric nanogenerators for powering wearable and body-implatable electronics, self- powered sensors and neurostimulation, and 2D materials including graphene, h-BN, and TMDs.. Prof. Kim has published over 270 research papers including Science, Nature Journals, etc (h-index of 69) and presented more than 100 Plenary, Keynote, Invited talks in international/domestic conferences.
Prof. Kim served as Chairman of the 4th NGPT (Nanogenerators and Piezotronics) conference at SKKU in 2018 and Director of SAMSUNG-SKKU Graphene/2D Research Center. He is currently serving as Head of the MSE graduate program at SKKU, an Associate Editor of Nano Energy, and an Executive Board Member of Advanced Electronic Materials. He received the Award of the Ministry of Science and Technology (Science Technology Researcher Award for this month, 2020), the Award for Excellent Basic Research (2019), the Research Award of the National Academy of Engineering of Korea (2018), The Republic of Korea President’s Award for Scientific Excellence (2015), etc.
41 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Nanofluidic devices for Biosensing and Energy Conversion
Xing-Hua Xia
State Key Lab of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210023, China
E-mail : [email protected] Website : https://xxh.nju.edu.cn/
ABSTRACT The ionic transport properties of nanochannels with size comparable to the electric double layer thickness are dominantly determined by the surface properties and can be regulated by surface recognition reaction and external fields such as light and heat. Thus, understanding of influence of surface properties on the mass transport behavior in nanochannel will help us to exploit the interesting application of the nanofluidic device in biosensing and energy conversion. This talk will introduce how the surface properties regulate the mass transport behavior through the nanochannels for biosensing and energy conversion. Our results show that the surface charges play a determining role when the channel size is approximately close to the electric double layer thickness. As the nanochannel surface is negatively charged, anions will be accumulated in front of the channel, while cations can easily pass through. Based on these unique phenomena, biomolecules carrying different charges can be easily separated and label-free DNA assays are developed. In addition, rapid protein concentration, efficient florescence labeling and purification can be achieved on a micro/nanofluidic devices. At the end, we will show the integrate of plasmonics to nanochannels for the possibility of light-electricity conversion on a nanofluidics devices. Our results demonstrate the micro/nano-fluidic devices are promising platform for bioanalysis and energy conversion.
BIOGRAPHY Xing-Hua Xiais currently a Professor at the School of Chemistry and Chemical Engineering, Nanjing University, China. He received the M.Sc. degree in chemistry from Xiamen University, China, in 1989 and the Ph.D. degree of chemistry in 1996 from the University of Bonn, Germany. During the following five years, he worked at the Universität der Bundeswehr München, at the Fritz-Haber- Institute of the Max-Planck-Society in Berlin, Germany and the Debye Institute of the University of Utrecht, The Netherlands, performing postdoctoral studies. Since 2001, he took the Professor position at the School of Chemistry and Chemical Engineering, Nanjing University, China. He was awarded as the National Science Fund for Outstanding Young Scholars (2001) and Changjiang Chair Professor from the MOE of China (2009). His research activities were awarded the first class prize of natural science researches from the Ministry of Education of China (2011). He is now an editor of Journal of Electroanalytical Chemistry and member in editorial boards of Scientific Reports, Analytical Chemistry, Talanta and a few Chinese Chemical Journals. The current research activities of his group are focused on interfacial behaviors of biomolecules and biosensors, plasmon enhanced spectroscopies and electrochemistry, bioinspired catalytic materials chemistry, biorecognition and reaction kinetics of bioevents within confined nanospace, e.g., mass transport properties in nanofluidics. He has published more than 370 peer review papers.
42 April 25-29 , 2021 Xiamen, China
Day 2 - Tuesday, 27 April
08:30 - 09:15 Plenary Speaker IIa
Main Venue: Concert Hall (2F) Chair:Haixia ZHANG
SEMICONDUCTOR NANOWIRES FOR OPTOELECTRONICS APPLICATIONS Chennupati JAGADISH Australian National University
09:15 - 10:00 Plenary Speaker IIb
Main Venue: Concert Hall (2F) Chair: Yan LI
NANOMATERIALS OF HIGH-SURFACE ENERGY FOR EFFICIENT ELECTROCHEMICAL ENERGY CONVERSION AND STORAGE Shigang SUN Xiamen University
10:00 - 10:15 Coffee Break
Session IIa: 10:15 - 12:15 MEMS/NEMS-II
Venue: Concert Hall (2F) Chair: Dezhi WU 10:15-10:45 KEYNOTE SPEAKER: LIQUID METAL NANO ELECTRONICS Jing LIU Tsinghua University
10:45-11:00 #144, RESEARCH ON A MEMS DETONATED DEVICE WITH BUILT-IN SAFETY AND ARMING DEVICE Kexin Wang, Tengjiang Hu, Yulong Zhao and Wei Ren Xi’an Jiaotong University
43 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
11:00-11:15 #266, RESEARCH ON MOTION CHARACTERISTICS FOR LATCHING MECHANISM OF MEMS SAFETY AND ARMING DEVICE UNDER DUAL ENVIRONMENTAL FORCES Shenghong Lei, Yun Cao, Weirong Nie, Zhanwen Xi, Na Xu and Weixiang Qiu Nanjing University of Science and Technology
11:15-11:30 #372, DESIGN AND MANUFACTURE OF A HIGH PRECISION MEMS FLEXIBLE FORCE SENSOR Huimin Zhang, Yanlu Feng and Wei Zhang Peking University
11:30-11:45 #440, POWER HANDLING CAPABILITY ENHANCED RF MEMS SWITCH USING MODIFIED-WIDTH CANTILEVERS STRUCTURE Yulong Zhang, Zhuhao Gong, Huiliang Liu and Zewen Liu Tsinghua University
11:45-12:00 #482, MODELING AND OPTIMIZATION OF SCALN-BASED MEMS MIRROR WITH LARGE STATIC TWO-AXIS TILTING ANGLE Changhe Sun, Bolun Li, Wenqu Su, Yufei Liu and Yaming Wu Yangtze Univerisity
12:00-12:15 #539, LINEAR STIFFNESS TUNING OF MEMS TRIANGULAR CAPACITORS Yiming Jin, Zhipeng Ma, Yixuan Guo, Tengfei Zhang, Xudong Zheng and Zhonghe Jin Zhejiang University
10:15 - 12:15 Best Student Paper
Venue: Multi-function Hall (1F) Chair: Yong QIN 10:15-10:30 #2, MICROSTRUCTURAL-PVDF DIELECTRIC LAYER BASED HIGH-RESOLUTION FLEXIBLE CAPACITIVE PRESSURE SENSOR Zebang Luo, Jing Chen, Zhengfang Zhu, Lin Li, Yi Su, Lei Wang and Hui Li Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen
10:30-10:45 #149, ELECTROHYDRODYNAMICALLY PRINTED MULTICOLOR PEROVSKITE IMAGE SENSOR ARRAY Qilu Wang, Guannan Zhang, Hanyuan Zhang, Yongqing Duan and YongAn Huang Huazhong University of Science and Technology
10:45-11:00 #335, A NOVEL PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER WITH ADJUSTABLE BROAD AND FLAT FREQUENCY BAND Lei Wang, Wei Zhu, Zhipeng Wu, Wenjuan Liu and Chengliang Sun
44 April 25-29 , 2021 Xiamen, China
Institute of Technological Sciences, Wuhan University, China
11:00-11:15 #407, STACKABLE TRIBOELECTRIC NANOGENERATORS FOR SELF-POWERED MARINE MONITORING BUOY Jiale Dong, Hao Wang, Xiu Xiao, Taili Du, Yunpeng Zhao, Zhongqi Fan and minyi xu College of Marine Engineering, Dalian Maritime University
11:15-11:30 #448, MODULATING THE ELECTRICAL TRANSPORT CHARACTERISTICS OF A METAL-SEMICONDUCTOR-METAL STRUCTURE BY LOCAL STRAIN GRADIENT Youchao Huang, Shenhui Ma, Jiaona Zhang, Chao Xie and Min Zhang Peking University Shenzhen Graduate School
11:30-11:45 #460, A HIGH-FREQUENCY NARROW-BAND FILTERING MECHANISM BASED ON AUTO-PARAMETRIC INTERNAL RESONANCE Rong Wang, Cao Xia, Dong F. Wang and Takahito Ono Micro Engineering and Micro Systems Laboratory (JML), Jilin University
11:45-12:00 #469, CALIBRATE SILICON NANOWIRES FIELD EFFECT TRANSISTOR SENSOR WITH ITS PHOTORESPONSE Yi Yang, Yuelin Wang, Shixing Chen and Tie Li Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences; University of Chinese Academy of Sciences
12:00-12:15 #664, FLEXIBLE AND TRANSPARENT ULTRAVIOLET PHOTODETECTOR ENABLED BY METAL DOPING ZNO NANORODS BASED ON MICA SUBSTRATE Yao huang, Hainan Zhang, Guanhua Dun, Yuhua Li, Renrong Liang, Yi Yang, Dan Xie, He Tian and Tian-ling Ren Tsinghua University
Invited Session IIa: 10:15 - 12:15 Micro Nano and Molecular Systems for Diagnostics and Therapeutics
Venue: Conference Room No.01 (1F) Chair: Yi ZHANG 10:15-10:35 FUSION APPLICATION OF MEDICAL SENSORS AND INTERNET OF MEDICAL THINGS Jinhong GUO University of Electronic Science and Technology of China
10:35-10:55 SEMICONDUCTING MOLECULAR PROBES FOR ULTRASENSITIVE AFTERGLOW IMAGING AND EARLY DIAGNOSIS Kanyi PU Nanyang Technological Univeristy, Singapore
45 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
10:55-11:15 CELL-BASED BIOSENSING TECHNOLOGY AND SYSTEM Ning HU Sun Yat-sen University
11:15-11:35 EVANESCENT WAVE FLUORESCENT BIOSENSOR FOR THE DETECTION OF MICRORNA Xiaohong ZHOU Tsinghua University, China
11:35-11:55 3D PRINTING MAGNETIC SOFT MILIROBOTS BY RECIRCULATING VAT POLYMERIZATION FOR POINT-OF-CARE DIAGNOSTICS Yi ZHANG Nanyang Technological Univeristy, Singapore
11:55-12:15 ACTIVE SENSING AND HYBRIDIZED SENSORS TOWARDS TACTILE INTELLIGENCE Bo MENG Shenzhen University
Invited Session IIb: 10:15 - 12:15 Micro-/Nanofluidic Devices and Systems
Venue: Conference Room No.04 (2F) Chair: Yan XU & Wenhui WANG 10:15-10:35 PATIENT-DERIVED ORGANOIDS ANALYZED ON A SUPERHYDROPHOBIC MICROWELL ARRAY FOR PREDICTING DRUG RESPONSE OF LUNG CANCER PATIENTS WITHIN A WEEK Peng LIU Tsinghua University
10:35-10:55 FLEXIBLE FILTER BASED LIQUID BIOPSY Wei WANG Peking University
10:55-11:15 A FULLY INTEGRATED AND AUTOMATED MICROFLUIDIC SYSTEM FOR RAPID TESTING OF RESPIRATORY VIRUSES Liangbin PAN CapitalBio
11:15-11:35 BIOINSPIRED SURFACE MICROFLUIDICS FOR DIGITAL PCR AND DIGITAL ELISA Tianzhun WU SIAT, CAS
11:35-11:55 MULTI-DIMENSIONAL MANIPULATION OF SOLID/LIQUID INTERACTION Xu DENG University of Electronic Science and Technology of China
11:55-12:15 NANOWIRE-INTEGRATED MICROFLUIDIC DEVICES TO IDENTIFY
46 April 25-29 , 2021 Xiamen, China
URINARY MICRORNA GROUPS FOR CANCER DETECTION Takao YASUI Nagoya University
Invited Session IIc: 10:15 - 12:15 Multidisciplinary Frontier: Advanced Chemistry Materials for MEMS/NEMS
Venue: Conference Room No.05 (2F) Chair: Xi YAO 10:15-10:35 FABRICATING FLUORESCENT GLASS DERIVED FROM MESOPOROUS POWDERS Lianjun WANG Donghua University
10:35-10:55 CONTROLLABLE LIQUID TRANSFER FOR MAKING HIGH-PERFORMANCE THIN-FILM DEVICES Huan LIU Beihang University
10:55-11:15 PHOTO-CROSSLINKABLE, INSULATING SILK FIBROIN FOR BIOELECTRONICS WITH ENHANCED CELL AFFINITY Jie JU Henan University
11:15-11:35 UNCONVENTIONAL NANOTEMPLATE-BASED TECHNIQUE AND ITS EMERGING APPLICATIONS Liaoyong WEN Westlake University
11:35-11:55 PAINTABLE HYDROGELS BASED ON SILANE CHEMISTRY Xi YAO Henan University
11:55-12:15 ELECTRODEPOSTION FILLING METHOD OF TSV FOR 3D INTEGRATION Yan WANG University of Electronic Science and Technology of China
Session IIb: 10:15 - 12:30 Nanophotonics and Nanoscale Imaging
Venue: Conference Room No.07 (3F) Chair: Xu XIAO 10:15-10:45 KEYNOTE SPEAKER: WAVELENGTH CONVERSION THROUGH PLASMON-COUPLED SURFACE STATES Mona JARRAHI University of California, Los Angeles
10:45-11:00
47 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#177, FULL-SPECTRUM OPTOELECTRONICS BASED ON BANDGAP-GRADED MATERIALS Zongyin Yang Zhejiang University
11:00-11:15 #438, COMPARE OF SNOM, PTIR, PIFM AND PFIR Hai-Long Wang, En-Ming You, Song-Yuan Ding and Zhong-Qun Tian Xiamen University
11:15-11:30 #508, PHOTONIC NANOJET PRODUCED BY A MICROFLUIDIC CHANNEL FOR BIOFLUID MONITORING Guoqiang Gu, Pengcheng Zhang and Hui Yang Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences
11:30-11:45 #599, SELF-POWERED TEXTILE-BASED TACTILE SENSORS INSPIRED BY HUMAN-SKIN FOR MULTIFUNCTIONAL SENSING OF WEARABLES AND ROBOTS Changyong Cao Michigan State University
11:45-12:00 #660, FLUORESCENCE ENHANCEMENT UTILIZING DIELECTRIC MICROBEADS WITH SEMI-OPEN MICROWELLS Pengcheng Zhang, Bing Yan, Guoqiang Gu, Zitong Yu, Xi Chen, Zengbo Wang and Hui Yang Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences
12:00-12:15 #669, SPECTROMETER-FREE REFRACTOMETRIC SENSING USING IMAGE RECOGNITION ON CENTIMETER-SCALE GRADIENT NANOSTRUCTURES Siyi Min, Shijie Li, Zhouyang Zhu, Yu Liu, Chuwei Liang, Jingxuan Cai, Fei Han, Yuyan Li, Xing Cheng and Wen-Di Li The University of Hong Kong
12:15-12:30 #695, STRONGLY ANISOTROPIC MONOLAYER INSE POLARIZED LIGHT DETECTOR Xusheng Wang and xi zhang
Session IIc: 10:15 - 12:30 Energy Conversion and Storage-II
Venue: Sunshine Hall (3F) Chair: Honglong CHANG 10:15-10:45 KEYNOTE SPEAKER: FLEXIBLE BIONIC INTELLIGENT PERCEPTION SYSTEM Jianhua ZHANG Shanghai University
48 April 25-29 , 2021 Xiamen, China
10:45-11:00 #98, WIND-DRIVEN SELF-POWERED WIRELESS ENVIRONMENTAL SENSORS FOR INTERNET OF THINGS AT LONG DISTANCE Di Liu, Baodong Chen, Jie An, Chengyu Li, Jiajia Shao, Wei Tang, Chi Zhang and Zhonglin Wang Beijing Institute of Nanoenergy and Nanosystems Chinese Academy of Sciences
11:00-11:15 #267, CARD-BASED HYBRID PIEZO-TRIBOELECTRIC NANOGENERATOR FOR SIMULTANEOUSLY HARVESTING SLIDING MECHANICAL ENERGY Danliang Wen, Peng Huang, Yanyuan Ba and Xiaosheng Zhang University of Electronic Science and Technology of China
11:15-11:30 #310, SELF-POWERED ELECTROCHEMICAL INTERFACES FOR MATERIAL AND ENERGY CONVERSION Shuyan Gao and Zhong Lin Wang Henan Normal University
11:30-11:45 #384, A MICRO DEVICE ARRAY FOR REAL-TIME MONITORING CARDIAC CONTRACTION Li Wang, Jun Chen, Weiguang Su, Anqing Li, Pengbo Liu and Chonghai Xu Qilu University of Technology
11:45-12:00 #473, FABRICATION OF LASER SCRIBED GRAPHENE STRETCHABLE SUPERCAPACITOR BY LASER-ASSISTED TRANSFER PRINTING STRATEGY Guangyuan Xu, Yanan Chen, Fangshuai Chen, Yanfang Meng, Yinji Ma and Xue Feng Tsinghua University
12:00-12:15 #621, DESIGN OF SELF-POWERED ENVIRONMENT MONITORING SENSOR BASED ON TEG AND TENG Jianhao Liu, Changxin Liu, Cong Zhao, Huaan Li, Guanghao Qu, Zhuofan Mao and Zhenghui Zhou Dalian Maritime University
12:15-12:30 #625, SMART POWER MANAGEMENT MICROSYSTEM FOR DISTRIBUTED RENEWABLE ENERGY HARVESTING Linhao Feng, Kai Huang, Mingxin Liu, Hongsheng Zhong and Xiaosheng Zhang POWERCHINA SICHUAN ELECTRIC POWER ENGINEERING CO.,LTD.
12:15 - 13:30 Lunch Break
Location: Qinye Canteen 3rd Floor
49 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Session IId: 13:30 - 15:45 Soft&Flexibe Devices and Applications-I
Venue: Concert Hall (2F) Chair: Wenli ZHOU 13:30-14:00 KEYNOTE SPEAKER: PRINTED FLEXIBLE/STRETCHABLE ELECTRONICS AND APPLICATIONS Cui ZHENG Suzhou Institute of Nano-Tech and Nano-Bionics,CAS
14:00-14:15 #102, A SELF-POWERED RETRACTABLE DEVICE BASED ON TRIBOELECTRIC NANOGENERATOR FOR SENSING OF JOINT AND SPINAL BENDING/STRETCHING Chengyu Li, Di Liu, Chaoqun Xu, Ziming Wang, Sheng Shu, Zhuoran Sun, Wei Tang and Zhonglin Wang Beijing Institute of Nanoenergy and Nanosystems Chinese Academy of Sciences Huairou, Beijing
14:15-14:30 #253, OPTICAL MICRO/NANOFIBER ENABLED COMPACT TACTILE SENSOR FOR HARDNESS DISCRIMINATION Yao Tang, Haitao Liu, Jing Pan, Zhang Zhang, Yue Xu, Lei Zhang and Limin Tong Zhejiang University
14:30-14:45 #269, A FLEXIBLE TRIBOELECTRIC-ELECTROMAGNETIC HYBRIDIZED NANOGENERATOR Haitao Deng, Zhiyong Wang, Yanyuan Ba, Xinran Zhang, Danliang Wen and Xiaosheng Zhang University of electronic science and technology of china
14:45-15:00 #322, A MULTIFUNCTIONAL ULTRASENSITIVE HYBRID OPTICAL SKIN Jing Pan, Lei Zhang and Limin Tong Zhe Jiang University
15:00-15:15 #382, AN INTEGRATED STRETCHABLE SENSING PATCH FOR SIMULTANEOUSLY MONITORING OF PHYSIOLOGICAL AND BIOCHEMICAL PARAMETERS Wenhao Pan, Shiyi Xu, Xiyu Mao, Tianyu Li, Qingpeng Cao, Xuesong Ye and Bo Liang Zhejiang University
15:15-15:30 #397, A TEXTILE TACTILE SENSOR FOR DUAL-MODE PROXIMITY/PRESSURE PERCEPTION IN SMART ROBOTICS Qinhua Guo, Weiguan Zhang and Zhengchun Peng Shenzhen University
15:30-15:45
50 April 25-29 , 2021 Xiamen, China
#651, MODELING AND SIMULATION OF FLEXIBLE VECTOR SHEAR FLOW SENSOR BASED ON COMSOL MULTIPHYSICS Guochang Liu, Wenping Cao, Haoyu Tan, Renxin Wang and Wendong Zhang North University of China
Session IIe: 13:30 - 15:15 Micro/Nano Fluidic-II
Venue: Multi-function Hall (1F) Chair: Yan LI 13:30-14:00 KEYNOTE SPEAKER: MICROFLUIDIC LIQUID METAL FOR STRETCHABLE BIOMED-ELECTRONICS Xingyu JIANG Southern University of Science and Technology
14:00-14:15 #132, BUBBLE FORMATION IN NANOPORES Alberto Giacomello and Roland Roth Sapienza Università di Roma
14:15-14:30 #336, LIQUID METAL-BASED MICROFLUIDIC FOR SPERM THERMOTAXIS. Yimo Yan, Ran Liu and Boxuan Zhang Tsinghua University
14:30-14:45 #371, MACRO-POROUS FERRO-GEL FOR REGULATION OF FLOW AND DRUG RELEASE IN BIO-MICROFLUIDICS USING STATIC MAGNETIC FIELD Hongjie Jiang, Manuel Ochoa, Babak Ziaie and Yi Ma South China University of Technology
14:45-15:00 #613, BIOINSPIRED UNIVERSAL FLEXIBLE ELASTOMER-BASED MICROCHANNELS Baiyi Chen, Rongrong Zhang, Hexuan Fu and Xu Hou Xiamen University
15:00-15:15 #697, DIGITAL MICROFLUIDICS FOR EFFICIENT AND ACCURATE MOLECULAR PROFILING OF SINGLE CIRCULATING TUMOR CELLS Qingyu Ruan, Jian Yang, Fenxiang Zou, Lingling Wu, Zhi Zhu and Chaoyong Yang Xiamen University
51 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Invited Session IId: 13: 30 - 15: 30 Multidisciplinary Frontier: Micro/Nano Energy and Smart Electronics
Venue: Conference Room No.01 (1F) Chair: Yong ZHAO & Xiuhan LI 13:30-13:50 2D MEMS METAMATERIAL MODULATORS FOR THZ COMMUNICATION Xiuhan LI Beijing jiaotong university
13:50-14:10 FIBER STRUCTURED FLEXIBLE PRESSURE SENSOR AND ELECTRONIC SKIN Zhaoling LI Donghua University
14:10-14:30 SELF-POWERED SENSING TECHNIQUES TOWARDS INTELLIGENT HUMAN-MACHINE INTERACTION Huicong LIU Soochow University
14:30-14:50 SURFACE PLASMON POLARITONS ENHANCED 2D-MATERIAL PHOTODETECTOR FOR INFRARED APPLICATION Wen HUANG University of Electronic Science and Technology of China
14:50-15:10 REGULATION OF STRONG AND WEAK BONDS IN LITHIUM METAL BATTERIES TO ENHANCE THEIR PERFORMANCE Yong ZHAO Henan University
15:10-15:30 ACHIEVING ULTRAHIGH OUTPUT ENERGY DENSITY OF TRIBOELECTRIC NANOGENERATOR IN HIGH-PRESSURE GAS ENVIRONMENT Yunlong ZI Chinese University of Hong Kong
Invited Session IIe: 13: 30 - 15: 30 Electronic and Optoelectronic Fibers and Textiles
Venue: Conference Room No.04 (2F) Chair: Fabien Sorin & Lei WEI 13:30-13:50 TUNING THE VISCOSITY FOR A MULTI-MATERIAL MULTI-FUNCTIONAL FIBER Chong Hou Huazhong University of Science and Technology, China
13:50-14:10 NANOPARTICLES ENABLED DRAWING OF ULTRA-LONG METAL NANOWIRES Xiaochun Li University of California, Los Angeles, USA
52 April 25-29 , 2021 Xiamen, China
14:10-14:30 ELECTRONIC MULTI-MATERIAL FIBER SENSORS AND ENERGY HARVESTERS Fabien Sorin École Polytechnique Fédérale de Lausanne, Switzerland
14:30-14:50 ADVANCED FUNCTIONAL SEMICONDUCTOR FIBERS AND TEXTILES Lei Wei Nanyang Technological University, Singapore
14:50-15:10 COMPUTATIONAL DESIGN OF NOVEL TWO-DIMENTIONAL SEMICONDUCTING SILICON CARBIDES FOR OPTOELECTRIC APPLICATIONS Liujiang Zhou University of Electronic Science and Technology of China,CHINA
15:10-15:30 NANO-/MICRO-ENABLED MULTIMATERIAL FIBERS FOR WEARABLE AND BIOSENSING APPLICATIONS Xiaoting Jia Virginia Tech., USA
Invited Session IIf: 13:30 - 15:30 RF Micro/Nano Components and Systems
Venue: Conference Room No.05 (2F) Chair: Joshua E.-Y. LEE & Cheng TU 13:30-13:50 MEMS RESONATORS WITH HIGH Q AND GOOD TEMPERATURE STABILITY Guoqiang WU Wuhan University
13:50-14:10 NOVEL RF MEMS DEVICES USING ALGANGAN HETEROSTRUCTURE Haoshen ZHU South China University of Technology
14:10-14:30 MECHANICALLY-FLEXIBLE RF MEMS RESONATORS ENABLED BY FLEXMEMS TECHNOLOGY Menglun ZHANG Tianjin University
14:30-14:50 CHIP-SCALE ALN THIN FILM TRANSDUCERS AND RF WAKE-UP RECEIVERS Tao WU ShanghaiTech University
14:50-15:10 SOI-MEMS BASED RF MICROMACHINED SWITCHES FOR WIRELESS APPLICATIONS Yong Zhu Griffith University, Australia
15:10-15:30 INVESTIGATION ON ENERGY DAMPING MECHANISMS AND Q-ENHANCEMENT STRATEGIES IN PIEZOELECTRIC-ON-SILICON MEMS RESONATORS Cheng TU University of Electronic Science and Technology of China
53 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Session IIf: 13:30 - 15:30 Nanoscale Robotics, Assembly, and Automation
Venue: Conference Room No.07 (3F) Chair: Xi XIE 13:30-14:00 KEYNOTE SPEAKER: SMALL-SCALE WIRELESS ROBOTS FOR MEDICAL APPLICATIONS Metin SITTI Max Planck Institute, MPI
14:00-14:15 #159, ORDER AND INFORMATION IN THE PHASES OF SPINNING MICRO-DISKS Wendong Wang, Gaurav Gardi, Paolo Malgaretti, Vimal Kishore and Metin Sitti Shanghai Jiao Tong University
14:15-14:30 #200, SINGLE CELL MANIPULATION WITH ACOUSTICALLY POWERED MICROROBOTIC PLATFORMS Xiaolong Lu Nanjing University of Aeronautics and Astronautics
14:30-14:45 #251, ANISOTROPIC SPREADING OF DROPLETS ON STRIPED ELECTRODES Wei Wang, Yanbo Xie and Antoine Riaud MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, School of Physical Science and Technology, Northwestern Polytechnical University
14:45-15:00 #293, 3D PRINTING OF MAGNETICALLY ACTUATED MINIATURE SOFT ROBOTS Zhongbao Wang, Yigen Wu, Dezhi Wu and Zhenyin Hai Department of Mechanical and Electrical Engineering, Xiamen University
15:00-15:15 #368, LOW-COST MICRO SEARCH-COIL MAGNETIC SENSOR WITH SELF CALIBRATION FOR THE INTERNET OF THINGS Hadi Tavakkoli, Izhar, XU ZHAO and Yi-Kuen Lee the Department of Mechanical and Aerospace Engineering, The Hong Kong University of Science and Technology
15:15-15:30 #417, SIMULATION OF THE SHAPE-DIRECTED AC DRIVEN DEFECTIVE MICROMOTORS Rencheng Zhuang, Dekai Zhou, Xiaocong Chang and Longqiu Li Harbin Institute of Technology
54 April 25-29 , 2021 Xiamen, China
Session IIg: 13:30 - 15:30 Micro/Nano Sensors and Actuators-I
Venue: Sunshine Hall (3F) Chair: Xueyong WEI 13:30-14:00 KEYNOTE SPEAKER: NANO SIZE-EFFECT ENHANCED SENSITIVITY OF GAS DETECTION Xixin LI Shanghai Institute of Microsystem and Information Technology
14:00-14:15 #403, THERMALVOLTAGE MEASUREMENT AND MANIPULATION IN SINGLE-MOLECULE DEVICE Junyang Liu, Hang Chen, Ping Zhou, Wenqiang Cao and Wenjing Hong Xiamen University
14:15-14:30 #461, A TUNGSTEN-RHENIUM THIN FILM THERMOCOUPLES SENSOR BASED ON ALN TRANSITION LAYER Bian Tian, Bingfei Zhang, Zhongkai Zhang, Zhaojun LIiu, Jiangjiang Liu, Gong Cheng, Qijing Lin, Chen Wu, Peng Shi and Zhuangde Jiang Xi’an Jiaotong University
14:30-14:45 #488, THIN FILM ANTIOXIDATIVE COATING FOR HIGH-TEMPERATURE THIN FILM SENSORS MADE OF POLYMER-DERIVED CERAMICS FOR HARSH ENVIRONMENT Xiaochuan Pan, Zaifu Cui, Zhenyin Hai, Guochun Chen and Daoheng Sun Xiamen University
14:45-15:00 #529, A NEW METHOD FOR CHARACTERIZATION OF SINGLE CELL USING SYSTEM IDENTIFICATION Shuang Ma, Wenxue Wang, Lianqing Liu, Yuechao Wang and Tianlu Wang Shenyang Institute of Automation, Chinese Academy of Sciences
15:00-15:15 #622, REVERSIBLE IMMUNOAFFINITY INTERFACE ENABLES DYNAMIC MANIPULATION OF TRAPPING FORCE FOR ACCUMULATED CAPTURE AND EFFICIENT RELEASE OF CIRCULATING RARE CELLS Xiaofeng Chen, Lingling Wu and Chaoyong Yang Xiamen University
15:15-15:30 #631, SCALABLE SYNTHESIS OF SNO2 NANOSHEET ARRAYS ON CHIPS FOR ULTRALOW CONCENTRATION NO2 DETECTION Gaoqiang Niu, Changhui Zhao and Fei Wang Southern University of Science and Technology
55 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
15:30 - 16:30 Plenary Speaker IIc (Nobel Laureate)
Main Venue: Concert Hall (2F) Chair: Xiaoyu CAO
MOLECULES IN MOTION: FROM BIOLOGY TO CHEMISTRY Jean Pierre SAUVAGE University of Strasbourg
16:30 - 18:30 Coffee Break & Poster Session I
Venue: Exhibition Hall (1F)
Accept Posters from No.323 to No.526 include 256 & 314
16:30 - 17:00 学术格莱美讲座 -- 如何与编辑沟通？
Venue: Exhibition Hall (1F)
主讲人 李彦教授（北京大学， 副主编） : ACS Nano
17:00 - 18:20 Top Journal Session
Venue: Exhibition Hall (1F)
17:00-17:10 ACS Nano Speaker: Yan LI 17:10-17:20 Advanced Materials Speaker: Lu SHI 17:20-17:30 Joule &Matter Speaker: Duan YAN&Jiqing SUN 17:30-17:40 Light: Science and Applications Speaker: Yuhong BAI 17:40-17:50 Microsystems & Nanoengineering/Springer Nature Speaker: Na LI 17:50-18:00 National Science Review Speaker: Yanzhang ZENG 18:00-18:10 Research Speaker: Yongchao SHI 18:10-18:20 Sensors and Actuators A Speaker: Bin WU
18:30 Adjourn for the Day
56 April 25-29 , 2021 Xiamen, China
Plenary Speaker
Semiconductor Nanowires for Optoelectronics Applications
Chennupati Jagadish
ARC Centre of Excellence on Meta-Optical Systems, Research School of Physics, Australian National University, Canberra, ACT 2601, Australia
E-mail : [email protected] Website : https://physics.anu.edu.au/contact/people/profile.php?ID=106
ABSTRACT Semiconductors have played an important role in the development of information and communications technology, solar cells, solid state lighting. Nanowires are considered as building blocks for the next generation electronics and optoelectronics. In this talk, I will introduce the importance of nanowires and their potential applications and discuss about how these nanowires can be synthesized and how the shape, size and composition of the nanowires influence their structural and optical properties. I will present results on axial and radial heterostructures and how one can engineer the optical properties to obtain high performance lasers, THz detectors, solar cells and to engineer neuronal networks. Future prospects of the semiconductor nanowires will be discussed.
BIOGRAPHY Professor Jagadish is a Distinguished Professor and Head of Semiconductor Optoelectronics and Nanotechnology Group in the Research School of Physics, Australian National University. He has served as Vice-President and Secretary Physical Sciences of the Australian Academy of Science during 2012-2016. He is currently serving as Past President of IEEE Photonics Society, Past President of Australian Materials Research Society. Prof. Jagadish is the Editor-in-Chief of Applied Physics Reviews, Editor of 3 book series and serves on editorial boards of 19 other journals. He has published more than 950 research papers (680 journal papers), holds 5 US patents, co-authored a book, co-edited 15 books and edited 12 conference proceedings and 18 special issues of Journals. He has won the 2000 IEEE Millennium Medal and received Distinguished Lecturer awards from IEEE NTC, IEEE LEOS and IEEE EDS. He is a Foreign Member of US National Academy of Engineering, Fellow of the Australian Academy of Science, Australian Academy of Technological Sciences and Engineering, The World Academy of Sciences, US National Academy of Inventors, Indian National Science Academy, Indian National Academy of Engineering, Indian Academy of Sciences, National Academy of Sciences of India, IEEE, APS, MRS, OSA, AVS, ECS, SPIE, AAAS, FEMA, APAM, IoP (UK), IET (UK), IoN (UK) and the AIP. He received many awards including IEEE Pioneer Award in Nanotechnology, IEEE Photonics Society Engineering Achievement Award, OSA Nick Holonyak Jr Award, Welker Award, IUMRS Somiya Award, UNESCO medal for his contributions to the development of nanoscience and nanotechnologies and Lyle medal from Australian Academy of Science for his contributions to Physics, Beattie Steel Medal from Australian Optical Society and IEEE Education Award from Electron Devices Society. He has received Australia’s highest civilian honor, AC, Companion of the Order of Australia, from the Australian Government.
57 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Nanomaterials of High-Surface Energy for Efficient Electrochemical Energy Conversion and Storage
Shi-Gang Sun
State Key Laboratory of Physical Chemistry of Solid Surfaces, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China
E-mail: [email protected] Website : https://pcoss.xmu.edu.cn/en/info/1084/1082.htm; http://www.sungroup.ac/index.asp
ABSTRACT
Electrochemical energy conversion and storage paly a major role in mobile electronic devices, electric vehicles, renewable energy development and utilization, and are also widely applied in information technology and NEMS. The fast development of above application scenarios is raising increasing demands on electrochemical energy conversion and storage, including higher energy density, higher power density, higher safety, longer lifespan, lower cost and wider window of operation temperature. To fulfill this requirement and to promote the reduction of carbon emission, the key issue is to develop/exploit high-efficient electrocatalysts for fuel cells and high-performant electrode materials for batteries. The nanomaterials of high-surface energy possesses an open surface structure, and are appropriate high-efficient electrocatalysts with high-density of catalytic active sites and high-performant electrode materials with high-density of transportation channels. We have focused, in recent years, on structural design and controlled synthesis of nanomaterials of high-surface energy for both fuel cell catalysts and lithium batterie electrodes, the main progresses will be reported at the presentation. References: 1. N. Tian et al. Science, 2007, 316, 732. 2. N. F. Yu, et al. Angew. Chem. Int. Ed. 2014, 53, 5097. 3. J. Xiao et al. J. Am. Chem. Soc. 2013, 135, 18754. 4. Z.Y. Zhou et al. Chem. Soc. Rev. 2011, 40, 4167. 5. G. Z. Wei et al. Adv. Mater. 2010, 22, 4364. 6. F. Fu et al. J. Mater. Chem. A, 2013, 1, 3860. 7. T. Sheng et al. Acc. Chem. Res. 2016, 49, 2569. 8. Y.C. Wang et al. ChemElectroChem. 2018, 5, 1914. 9. S.J, Zhang, et al. Small, 2018, 14, 1801054. 10. X.C. Liu, et al. Nano Energy, 2018, 50, 685. 11. N.F. Yu, et al. ACS Catal. 2019, 9, 3144. 12. C. Xiao, et al. Joule, 2020, 4, 2562.
58 April 25-29 , 2021 Xiamen, China
BIOGRAPHY
Shi-Gang Sun obtained his Bachelor of Science from Xiamen University, China, in 1982, Doctorat d’Etat (Docteur ès Sciences Physiques) from Université Pierre et Marie Curie (Paris VI), France, in 1986. After one-year post-doctoral research in the Laboratoire d’Electrochimie Interfaciale du CNRS, France, he returned to China by the end of 1987, and served as associate professor and later full professor in 1991 at the Department of Chemistry of Xiamen University till now. His main research interests of Prof. Sun include Electrocatalysis, Electrochemical SurfaceScience, Spectroelectrochemistry, Nanomaterials and Chemical power sources. Prof. Sun is Academician of Chinese Academy of Sciences, fellow of International Society of Electrochemistry (ISE) and fellow of Royal Society of Chemistry (RSC). He has been awarded the “Brian Conway Prize” from International Society of Electrochemistry (ISE), “Distinguished Contribution Award” from the Chinese Society of Electrochemistry, “Le prix Franco-Chinois 2014-2015” jointly from Société Chimique de France (SCF) and Chinese Chemical Society (CCS), and the State Natural Science Award (2nd Degree) of China, “Achievement award” from Internatioanl Automotive Lithium Battery Associetion, and “Achievement award in spectroscopy” from Chinese Chemical Society and Chines Optics Society. He is now editorial board member of Journal of Electroanalytical Chemistry, Functional Materials Letters, ACS Energy Letters, Electrochemical Energy Review, National Science Review, Applied Chemistry and Journal of Solid State Electrochemistry, and is serving as associate editor to Electrochimica Acta, Spectral Analysis and Spectroscopy, Chinese Journal of Chemical Education, Acta Chimica Sinica, and editor-in-chief of the Journal of Electrochemistry.
59 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Molecules in Motion: From Biology to Chemistry
Jean-Pierre Sauvage
Institut de Science et d'Ingénierie Supramoléculaires (ISIS), University of Strasbourg, F-67000 Strasbourg, France E-mail : [email protected]
ABSTRACT An important family of molecules is that of interlocking or threaded rings named catenanes and rotaxanes respectively. The simplest catenane, a [2] catenane, consists of two interlocking rings. Rotaxanes consist of rings threaded by acyclic fragments (axes). These compounds played an important role in the emergence of the field named "molecular machines". This field has experienced a spectacular development, in relation to molecular devices at the nanometric level or as mimics of biological motors. In biology, motor proteins are omnipresent and crucial in a large variety of processes essential to life (ATPase, a rotary motor, being particularly impressive). Numerous examples of artificial molecular machines are based on simple or complex rotaxanes or catenanes. Non- interlocking ring compounds have also been used. In particular, light-driven rotary motors have been created by the team of Feringa. Finally, potential applications and future developments of this active research area will be mentioned.
BIOGRAPHY Since the beginning of the 80s, Sauvage and his group have been interested in various fields including : (i) coordination photochemistry and solar energy conversion, (ii) CO2 electrocatalytic reduction, (iii) chemical topology: catenanes, knots and rotaxanes, (iv) multifunctional ruthenium and iridium complexes for light-induced charge separation, (v) multifunctional porphyrins as models of the photosynthetic reaction centre as well as (vi) molecular switches and molecular machine prototypes such as a "swinging catenane", "muscles" or "compressors". Sauvage received many awards.
The most recent ones are listed below : 2014 "Grand Prix de la Fondation de la Maison de la Chimie" 2016 Nobel Prize in Chemistry with J. Fraser Stoddart and Ben Feringa Honorary Fellow of the Royal Society of Chemistry (U-K) Foreign Member of the Russian Academy of Sciences 2017 Grand Officier de l'Ordre National du Mérite Honorary Doctorate, University of Athens (Greece) 2018 Honorary Doctorate, Uppsala University (Sweden) 2019 Honorary Doctorate, Universitat Politècnica de València (Spain) Foreign Associate of the U.S. National Academy of Sciences 2020 The Order of the Rising Sun, Gold and Silver Star, Japan
60 April 25-29 , 2021 Xiamen, China
Keynote Speaker
Liquid Metal Nano Electronics
Jing Liu
Department of Biomedical Engineering, School of Medicine, Tsinghua University, Beijing 100084, China & Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
E-mail : [email protected] Website : www.liquidmetallab.com
ABSTRACT Conventional micro/nano electronics are generally complex, time, material and energy consuming to make. From an alternative, the recently initiated direct printing of electronics and then making of functional devices via the liquid metal ink and its allied material and machines. Such basic way also opens big potential towards straightforward fabrication of ever smaller circuits, say the nano electronics and the MEMS and NEMS thus involved. This talk is dedicated to present an overview and perspective on the fundamentals and technological endeavors of the new horizontal liquid metal printed nano electronics. The challenges thus raised and the opportunities offered from the nanoscience will be clarified. Particularly, a group of key strategies through nanotechnologies to innovate and enhance various liquid metal electronic inks, printing machines as well as new generation transformable nano electronics will be illustrated. The fundamental mechanisms lying behind will be interpreted. Further, several representative desktop printing methods developed in the lab will be taken as examples to illustrate their pervasive adaptability in quickly making nano electronics and future ending user NEMS devices. Typical utilization of high performance liquid metal printed nano electronics in diverse situations such as tiny soft device, biomedical health care system with high sensitivity, smart home appliances, and advanced printed MEMS/NEMS etc. will be discussed. Prospects within the area spanning from revolutionizing material, machine to new conceptual practices etc. will be given.
BIOGRAPHY Jing Liu is a jointly appointed Professor of Tsinghua University (THU) and Technical Institute of Physics and Chemistry, Chinese Academy of Sciences. He received his double bachelor’s degrees (B.E. in Engineering & B.S. in Physics) in 1992, and Ph.D. (in Engineering and Biomedicine) in 1996, all from THU. Dr. Liu had ever been a Post-Doctorial Research Associate at Purdue University and Senior Visiting Scholar at Massachusetts Institute of Technology. He works intensively at the interdisciplinary areas among liquid metal, biomedical engineering and thermal science and has published 16 popular books on the cutting edge frontiers, 21 invited book chapters and more than 500 peer reviewed journal articles (over 30 selected as cover or back cover story), 200 issued invention patents. Dr. Liu pioneered a group of very fundamental discoveries and technological breakthrough on liquid metals which were frequently featured over the world. Many of his inventions have been widely used in industry and by the society. He is a recipient of numerous awards like: The William Begell Medal, 2015 R&D 100 Award Finalist etc.
61 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Wavelength conversion through plasmon-coupled surface states
Mona Jarrahi
Electrical and Computer Engineering Department, University of California Los Angeles, 90095, CA, USA
E-mail : [email protected] Website : https://www.seas.ucla.edu/~mjarrahi/mjarrahi.html
ABSTRACT Surface states generally degrade semiconductor device performance by raising the charge injection barrier height, introducing localized trap states, inducing surface leakage current, and altering the electric potential. Therefore, there has been an endless effort to use various surface passivation treatments to suppress the undesirable impacts of the surface states. We show that the giant built-in electric field created by the surface states can be harnessed to enable passive wavelength conversion without utilizing any nonlinear optical phenomena. Photo-excited surface plasmons are coupled to the surface states to generate an electron gas, which is routed to a nanoantenna array through the giant electric field created by the surface states. The induced current on the nanoantennas, which contains mixing product of different optical frequency components, generates radiation at the beat frequencies of the incident photons. We utilize the unprecedented functionalities of plasmon-coupled surface states to demonstrate passive wavelength conversion of nanojoule optical pulses at a 1550 nm center wavelength to terahertz regime with record-high efficiencies that exceed nonlinear optical methods by 4-orders of magnitude. The presented scheme can be used for optical wavelength conversion to different parts of the electromagnetic spectrum ranging from microwave to infrared regimes by using appropriate optical beat frequencies.
BIOGRAPHY Mona Jarrahi received her B.S. degree in Electrical Engineering from Sharif University of Technology in 2000 and her M.S. and Ph.D. degrees in Electrical Engineering from Stanford University in 2003 and 2007. She served as a Postdoctoral Scholar at the University of California Berkeley from 2007 to 2008. After serving as an Assistant Professor at the University of Michigan Ann Arbor, she joined the Univer sity of California Los Angeles in 2013 where she is currently a Professor of Electrical Engineering and the Director of the Terahertz Electronics Laboratory. Prof. Jarrahi has made significant contributions to the development of ultrafast electronic and optoelectronic devices and integrated systems for terahertz, infrared, and millimeter-wave sensing, imaging, computing, and communication systems by utilizing novel materials, nanostructures, and quantum well structures as well as innovative plasmonic and optical concepts. The outcomes of her research have appeared in 200 publications and 160 keynote/plenary/invited talks and have received a significant amount of attention from scientific news outlets including Huffington Post, Popular Mechanics, EE Times, IEEE Spectrum, Optics & Photonics News Magazine, Laser Focus world, and Photonics Spectra Magazine. Her scientific achievements have been recognized by severa l international and national prestigious awards including the Presidential Early Career Award for Scientists and Engineers (PECASE); Friedrich Wilhelm Bessel Research Award from Alexander von Humboldt Foundation; Moore Inventor Fellowship from the Gordon and Betty Moore Foundation; Kavli Fellowship by the USA National Academy of Sciences (NAS), Grainger Foundation Frontiers of Engineering Award from the USA National Academy of Engineering (NAE); Breakthrough Award from Popular Mechanics Magazine; Research Award from Okawa Foundation; Early Career Award in Nanotechnology from the IEEE Nanotechnology Council; Outstanding Young Engineer Award from the IEEE Microwave Theory and Techniques Society; Booker Fellowship from the USA National Committee of the International Union of Radio Science; Lot Shafai Mid-Career Distinguished Achievement Award from the IEEE Antennas and Propagation Society; Early Career Award from the USA National Science Foundation (NSF); Young Investigator Awards from the USA Office of Naval Research (ONR), the Army Research Office (ARO), and the Defense Advanced Research Projects Agency (DARPA); the Elizabeth C. Crosby Research Award from the University of Michigan; and the Distinguished Alumni Award from Sharif University of Technology. Prof. Jarrahi is a Fellow of IEEE, OSA, SPIE, and IOP societies and has served as a distinguished lecturer of IEEE, traveling lecturer of OSA, and visiting lecturer of SPIE societies.
62 April 25-29 , 2021 Xiamen, China
Flexible Bionic Intelligent Perception System
Jian-Hua Zhang
Key Laboratory of Advanced Display and System Application, Ministry of Education, Shanghai University, Shanghai 200072, China
E-mail : [email protected]
ABSTRACT To construct an intelligent perception system with the same function as the organism is promising in the application of personal health surveillance, man-machine interaction, and artificial electronic skin. The perception function of the organism includes both the acquisition of the external information through sensing organs and the cognitive competence by means of learning, judgment, and reasoning of the nervous system. Thus, an intelligent perception system mainly depends on two basic units: flexible sensor and artificial synapse. However, the device structure and fabrication process of flexible sensor hampers not only the further improvement of its sensing properties, including the sensitivity and linearity range, but also the massive large-area manufacture in the form of high-density arrays. In terms of artificial synapse, the search for new material systems and device structures to simulate synaptic properties remains challenges. This talk will introduce flexible piezoresistive pressure sensors with highly sensitivity and ultrabroad linear response range based on biomimetically textured porous materials and pollen-shaped hierarchical structure. On the other hand, taking advantage of high-density manufacturing and signal amplification of thin film transistor (TFT), we developed the active electrode array based on TFT to realize the high resolution perception of human EMG signals. Meanwhile, kinds of synaptic transistors based on TFT with high migration rate were designed and prepared to simulate the memory property of the human brain. These works provide the innovative application of TFT in the field of intelligent perception, which are promising for the application of medical physiological signal, man-machine interaction, etc.
BIOGRAPHY Jian-Hua Zhang is currently a Professor in the Key Laboratory of Advanced Display and System Application, Ministry of Education, Shanghai University, China. She received the Ph.D. degree of engineering in 1999 the Shanghai University, China. During the following two years, she worked at the City University of Hong Kong in Hongkong and Heriot-Watt University, UK, performing postdoctoral studies. Since 2005, she took the Professor position in Key Laboratory of Advanced Display and System Application, Ministry of Education, Shanghai University, China. She was awarded as the National Science Fund for Outstanding Young Scholars (2018). Her research activities were awarded the first prize of technical invention in Shanghai (2014), the first prize of science and technology progress in Shanghai twice (2016, 2020). She is now an editor of Journal of Bionic Engineering and Advance In Manufacturing, and chairman in China OLED technical committee in Society for Information Display (SID).Her group endeavors on the development of semiconductor manufacturing and packaging process and its applications in flexible intelligent display. Prof. Zhang is active in the field of heterogeneous integration of integrated circuit (IC), display technology and sensor.
63 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Printed flexible/stretchable electronics and applications
Zheng Cui
Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Sciences, P.R. China
E-mail : [email protected] Website : www.perc-sinano.com
ABSTRACT Lithography-based patterning and subtractive pattern transfer have been the dominant fabrication technologies for the fabrication of either integrated circuit chips or electronic circuit boards. In the past decade, printing fabrication has risen to prominence because of its additive nature. Printing enables patterning in large area and at low cost, can be of high throughput and less pollutant to environment, and most interestingly, independent of substrate properties. For the fabrication of a flexible or stretchable electronic system, conventional lithographic patterning has to rely on a rigid carrier substrate to perform the fabrication processes, printing can directly construct circuit patterns on a flexible or stretchable substrate. The rapid development in solution forms of various functional electronic materials has made printing as a preferred technology for the fabrication of flexible or stretchable electronics. The author’s group has been engaged in the development of printed flexible and stretchable electronics technologies since 2009 when the Printable Electronics Research Center (PERC) was setup. In the past 10 years, printable conductors, semiconductors and light emitting inks have been developed. Thin-film transistors, light emitting devices, sensors and solar cells have been made by inkjet printing, screen printing or an innovative hybrid printing technique. The printed flexible/stretchable electronics have found applications in touch panels, RFID tags, wearable sensors and smart textiles as shown in Figure 1.
BIOGRAPHY Professor Zheng Cui had his PhD in 1988 and worked in the UK for 20 years, first at Cambridge University and then at Rutherford Appleton Laboratory in the field of micro and nanofabrication technologies. In 2009, he returned to China and setup the Printable Electronic s Research Center (PERC). The Center has established research themes from electronic ink formulation to printing process development with applications including printed solar cells, printed thin-film transistors, printed organic light emission, and printed flexible/stretchable/wearable electronics. He has authored and coauthored over 280 technical papers, 7 books on the subject of micro and nanofarication technologies and 4 books on the subject of printed electronics. Some of the developed technologies at PERC have been transferred to industry.
64 April 25-29 , 2021 Xiamen, China
Microfluidic Liquid Metal for Stretchable Biomed-electronics
Xingyu JIANG
Southern University of Science and Technology, Shenzhen, China
E-mail : [email protected] Website : http://www.jiangxingyu.com
ABSTRACT Our interest in making stretchable bioelectronics stems from our work in microfluidic chips that allow many biomedical functions, such as diagnosis, screening/synthesis of therapeutics, as well as tissue engineering. Integrating liquid metal and elastic polymer-based microfluidic chips into stretchable electronic circuits, we find that these stretchable circuits can dramatically expand the capability of micro-/nano-scale structures in a variety of biomedical applications, such as biomedical sensing, tissue engineering, drug discovery and biological computing. For example, a fully stretchable blood oxygen sensor and a fully stretchable sweat detection device can be prepared by using liquid metal elastic polymer microfluidic devices. These new materials can also be used to prepare healable electronic blood vessels and vascular stents that allow gene therapy on targeted live tissues.
BIOGRAPHY Xingyu Jiang is a Chair Professor at the Southern University of Science and Technology, Shenzhen, China. He obtained his BS at the University of Chicago (1999) and PhD at Harvard University (Chemistry, 2004). In 2005, he joined the National Center for NanoScience and Technology. He moved to the Southern University of Science and Technology in 2018. His research interests include microfluidics and nanomedicine. He was awarded the National Science Foundation of China’s Distinguished Young Scholars Award, the Human Frontier Science Program Young Investigator Award, and Tencent ExplorePrize. He is a Fellow of the Royal Society of Chemistry (UK) and American Institute of Medical and Biological Engineering. He has published over 300 peer-reviewed papers.
65 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Small-scale Wireless Robots for Medical Applications
Metin Sitti
Director, Max Planck Institute for Intelligent Systems, Stuttgart, Germany Professor, Department of Information Technology and Electrical Engineering, ETH Zurich, Switzerland Professor, Koc University, School of Medicine & College of Engineering, Istanbul, Turkey
E-mail: [email protected] URL: http://pi.is.mpg.de
ABSTRACT Wireless small-scale medical robots have the potential to revolutionize healthcare, since they have the unique capability of non-invasive access and operation inside hard-to-reach and unprecedented small spaces inside the human body. However, due to miniaturization limitations on on-board actuation, powering, sensing, computing and communication, new methods need to be introduced in creating such tiny robots. First, cell-driven biohybrid microrobots are proposed, where a synthetic microrobot body is driven by attached biological microorganisms (bacteria and microalgae) or cells (macrophages). Such biohybrid microswimmers loaded with drugs are shown in vitro to deliver drugs actively and locally to cancerous tissues. Next, external magnetic fields are used to actuate and steer rolling microrobots, spinning helical microswimmers and soft-bodied magnetic millirobots. Inspired by soft- bodied small animals, soft millirobots are demonstrated to be able to have seven locomotion modalities to be able to navigate in complex environments, such as inside the human body. Also, a baby jellyfish-inspired soft swimmer is shown to realize many diverse functions by controlling the local fluidic flow around them towards medical use.
BIOGRAPHY
Professor Sitti has pioneered many research areas, including small-scale wireless medical robots, gecko-inspired microfiber adhesives, bioinspired miniature robot locomotion and physical intelligence. He was a professor in Department of Mechanical Engineering and Robotics Institute at Carnegie Mellon University in Pittsburgh, USA during 2002-2014 and a research scientist at University of California at Berkeley during 1999-2002. He is currently director at Max Planck Institute for Intelligent Systems in Stuttgart, Germany since 2014. As side academic appointments, he is a professor in Department of Information Technology and Electrical Engineering at ETH Zurich, Switzerland and professor in School of Medicine & College of Engineering at Koç University, Turkey. He received the BSc (1992) and MSc (1994) degrees in electrical and electronics engineering from Boğaziçi University, Turkey, and the PhD degree (1999) in electrical engineering from the University of Tokyo, Japan. He is an IEEE Fellow. He founded nanoGriptech Inc. in 2012 to commercialize his lab’s gecko-inspired microfiber adhesive technology, branded as Setex®. He is an IEEE Fellow. He has published over 460 peer-reviewed articles, 2 books and over 15 patents.
Prof. Sitti received the Breakthrough of the Year Award in the Falling Walls World Science Summit (2020), ERC Advanced Grant (2019), Rahmi Koç Science Prize (2018), SPIE Nanoengineering Pioneer Award (2011) and NSF CAREER Award (2005). He has won over fifteen awards at major conferences, such as Best Paper Award in Robotics Science and Systems Conference (2019), IEEE/ASME Best Mechatronics Paper Award (2014) and Best Paper Award in the IEEE/RSJ Intelligent Robots and Systems Conference (2009, 1998). He is the editor-in-chief of Progress in Biomedical Engineering and Journal of Micro-Bio Robotics and associate editor in Science Advances and Extreme Mechanics Letters journals.
66 April 25-29 , 2021 Xiamen, China
Nano Size-effect Enhanced Sensitivity of Gas Detection
Xinxin Li
State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
E-mail : [email protected]
ABSTRACT Nano size-effect is the soul of nanoscience and technology, where the feature nano-scale dimension dominates the properties of the nanomaterial. Recently more and more functionalized nanomaterials are proposed and developed for biochemical sensing applications. Beyond the increase in specific surface area, nanostructure can exhibit more significant property change when the solid geometry is shrunk down to nano-scale. Along with the size decrease, the atom/molecule number at surface is comparable to that in the body and the former may be dominant in surface activity. The author’s group have worked on the topic for many years and quite a lot of nano size-effects on sensitivity of biochemical nanosensors have been found experimentally and analytically revealed by using quantitative characterization of thermodynamic/kinetic parameters, which reflect the essential of phenomenal behavior of the sensing nanomaterial. The presentation will introduce a series of nanosensors developed in the group by using ZnO nanowires.
BIOGRAPHY Prof. Xinxin Li received his BS degree from Tsinghua University, PhD degree from Fudan University. He ever worked in HKUST, Nanyang Technological University of Singapore, Tohoku University of Japan. In MEMS and transducer technology field, Prof. Xinxin Li is a senior scientist. He is now serving as a professor and Director of the State Key Lab of Transducers Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. He received National Science Fund for Distinguished Youth Scholars in 2007. He has authored/co-authored more than 300 SCI journal papers. He became the first IEEE MEMS TPC member from mainland China and totally served the committee for four years. From 2011 to 2019, he also served as the only International Steering Committee member from mainland China for the Transducers conference and he has authored/co-authored 72 papers there (including an invited presentation in 2009 at Denver, USA). He has invented more than 100 patents on MEMS and sensor technology, including more than 30 licensed to industrial field for volume production. He is now serving as associate editor or editorial member for the SCI journals of J Micromech Microeng, Scientific Reports, Microsyst & Nanoeng, and, Micromachines.
67 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Day 3 - Wednesday, 28 April
08:30 - 09:15 Plenary Speaker IIIa
Main Venue: Concert Hall (2F) Chair: Xu HOU
NANO-CALORIMETRY: A NEW TOOL FOR MATERIALS DEVELOPMENT Joost VLASSAK Harvard University
09:15 - 10:00 Plenary Speaker IIIb
Main Venue: Concert Hall (2F) Chair: Xiaosheng ZHANG
TRANSFORMATIVE IMPACT OF PRINTABLE SOLAR CELLS FOR MEETING, NEXT-GENERATION ENERGY DEMANDS Alex JEN City University of Hong Kong
10:00 - 10:15 Coffee Break
Session IIIa: 10:15 - 12:15 MEMS/NEMS-III
Venue: Concert Hall (2F) Chair: Xiaosheng ZHANG 10:15-10:45 KEYNOTE SPEAKER: APPLICATIONS OF FLEXIBLE INORGANIC THIN-FILM DEVICES IN BIOELECTRONICS Yuan LIN University of Electronic Science and Technology of China
10:45-11:00 #30, AN ON-CHIP INDUCTIVE-CAPACITIVE SENSOR FOR THE DETECTION OF WEAR DEBRIS AND AIR BUBBLES IN HYDRAULIC OIL Haotian Shi, Hongpeng Zhang, Wei Li, Zhiwei Xu, Laihao Ma, Yucai Xie and Dian Huo Dalian Maritime University
11:00-11:15 #229, A MODE-LOCALIZED MASS SENSOR WITH DIFFERENT ORDER MODES COUPLING INDUCED BY ASYMMETRIC STRUCTURES Jiahao Song, Jian Zhao, Ming Lyu, Pengbo Liu, Heng Zhong, Xianze Zheng and Yinghai Tang
68 April 25-29 , 2021 Xiamen, China
Dalian University of Technology
11:15-11:30 #257, MODELING OF MAGNETIC SENSOR BASED ON BAW MAGNETOELECTRIC COUPLING MICRO-HETEROSTRUCTURE Si Chen, Wanchun Ren, Junru Li, Chunrui Peng and Yang Gao Southwest University of Science and Technology
11:30-11:45 #270, A BREATHING MODE DUAL-RING RESONATOR WITH HIGH QUALITY FACTOR OPERATING AT ATMOSPHERE PRESSURE Wen Chen, Wenhan Jia and Guoqiang Wu Wuhan University
11:45-12:00 #321, THE 3D CAPACITANCE MODELING OF NON-PARALLEL PLATES BASED ON CONFORMAL MAPPING Yue Feng, Zilong Zhou, Wenlong Wang, Zehong Rao and Yanhui Han Beijing Insititute of Technology
12:00-12:15 #583, ALN CONTOUR MODE RESONATORS WITH HALF CIRCLE SHAPED REFLECTORS Zhifang Luo, shuai shao and Tao Wu ShanghaiTech University
Session IIIb: 10:15 - 12:15 Soft&Flexibe Devices and Applications-II
Venue: Multi-function Hall (1F) Chair: Libo GAO 10:15-10:45 KEYNOTE SPEAKER: VERSATILE E-PRINTING FOR FLEXIBLE ELECTRONICS Yongan HUANG Huazhong University of Science and Technology
10:45-11:00 #129, A HIGH-RESOLUTION SELF-POWERED FLEXIBLE PRESSURE SENSOR MATRIX BASED ON ZNO NANOWIRES Qifeng Lu, Fuqin Sun, Lili Li, Yuanyuan Bai, Zihao Wang and Ting Zhang Suzhou Institute of Nano-Tech and Nano-Bionics,CAS
11:00-11:15 #134, DESIGN AND PREPARATION OF A MICROFLUIDIC SYSTEM FOR STRETCHING OF CELLS IN TOPOGRAPHIC MICROSTRUCTURES Yingning He, Yuqian Yang, Yexin Gu, Tianjiao Mao, Yue Yu and Jiandong Ding Fudan University
11:15-11:30 #146, DYNAMIC SIMULATION OF NANOGENERATOR BASED ON FINITE ELEMENT
69 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
MODEL COUPLED WITH LUMPED PARAMETER ELEMENTS Yao Chu, Ruixing Han, Huiliang Liu, Xiongying Ye and Fei Tang Tsinghua University
11:30-11:45 #211, STOCHASTIC ANALYSIS OF THE ELCTROTHERMAL MICROACTUATOR WITH FABRICATION ERROR Haotian Liu, Hao Chen, Yun Cao, Weirong Nie, Zhanwen Xi and Shenghong Lei Nanjing University of Science and Technology
11:45-12:00 #218, DIRECT INK WRITING OF SOFT MICROSCALE STRUCTURES USING PURE POLYDIMETHYLSILOXANE Huyue Chen, Qifan Ding, Wen-Ming Zhang and Lei Shao University of Michigan – Shanghai Jiao Tong University Joint Institute
12:00-12:15 #219, ALL-PRINTED FLEXIBLE TACTILE SENSORS WITH HIGH SENSITIVITY AND LARGE DETECTION RANGE Qifan Ding, Huyue Chen, Wenming Zhang and Lei Shao Shanghai Jiaotong University
Invited Session IIIa: 10:15 - 12:15 Multidisciplinary Frontier: Soft Rubbery Electronics and Stretchable Integrated Systems
Venue: Conference Room No.01 (1F) Chair: Cunjiang YU & Wei LAN 10:15-10:35 E-SKINS WITH SUPERHIGH PRESSURE RESOLUTION AND TOUGH INTERFACES Chuanfei GUO Southern University of Science and Technology
10:35-10:55 SOFT RUBBERY ELECTRONICS Cunjiang YU University of Houston
10:55-11:15 THREE-DIMENSIONAL SOFT ELECTRONIC SYSTEMS FOR BIOMEDICINE Mengdi HAN Peking University
11:15-11:35 DESIGN OF ARTIFICIAL SYNAPSES AND SENSORIMOTOR NEURONS Wentao XU Nankai University
11:35-11:55 RATIONAL DESIGN OF DIELECTRIC MATERIALS FOR FLEXIBLE CAPACITIVE PRESSURE SENSING COATINGS Zhuo LI Fudan University
70 April 25-29 , 2021 Xiamen, China
11:55-12:15 MECHANICS-DRIVEN DESIGNS OF SOFT NETWORK MATERIALS AND THEIR APPLICATIONS IN STRETCHABLE INTEGRATED DEVICES Yihui ZHANG Tsinghua University
Invited Session IIIb: 10:15 - 12:15 Multidisciplinary Frontier: Nanoplasmonics and Biosensors
Venue: Conference Room No.04 (2F) Chair: Xiangwei ZHAO 10:15-10:35 SURFACE PLASMOINC ENHANCED EXCITON-POLARITON EFFECT IN SEMICONDUCTOR NANOWIRES Qing ZHANG Peking University
10:35-10:55 OPTICAL SUPEROSCILLATION FOR LABEL-FREE SUBDIFFRACTION BIOIMAGING Guanghui Yuan Nanyang Technological Univeristy, Singapore
10:55-11:15 IMPLANTABLE BIOCHIP FOR MANAGEMENT OF INFLAMMATION IN LUNG CANCER MODEL Guozhen Liu The University of New South Wales
11:15-11:35 IN-VITRO DIAGNOSTIC ASSAYS ENABLED BY PLASMON-ENHANCED PHOTOACOUSTIC DETECTION Meng Lu Iowa State University
11:35-11:55 2D NANOMATERIALS ENHANCED SURFACE PLASMON RESONANCE FOR SENSING APPLICATIONS Shuwen Zeng CNRS/University of Limoges
11:55-12:15 HYBRID METAL/DIELECTRIC NANOSYSTEMS AND APPLICATIONS Yali Sun ITMO University
Invited Session IIIc: 10:15 - 12:15 Flexible and Wearable Microsystems for Sensing and Actuation
Venue: Conference Room No.05 (2F) Chair: Zhengchun PENG & Xinge YU 10:15-10:35 TRIGGER-DETACHABLE HYDROGEL ADHESIVES FOR BIOELECTRONIC INTERFACES
71 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Ji LIU Southern University of Science and Technology
10:35-10:55 MATERIALS AND DEVICES DESIGNS FOR BIOELECTRONIC MEDICINES Jie ZHAO Fudan University
10:55-11:15 BIODEGRADABLE MATERIALS FOR ELECTRONIC MEDICINE AND BIOSENSORS Lan YIN Tsinghua University
11:15-11:35 MICROSCALE OPTOELECTRONIC DEVICES FOR BIOLOGICAL MODULATION AND SENSING Xing SHENG Tsinghua University
11:35-11:55 HYBRIDIZED AND COUPLED NANOGENERATORS Ya YANG Beijing Institute of Nanoenergy and Nanosystems, CAS
11:55-12:15 DEFORMABLE STRUCTURES FOR FLEXIBLE SMART MATERIALS Zunfeng LIU Nankai University
Session IIIc: 10:15 - 12:30 Micro/Nano Sensors and Actuators-II Venue: Conference Room No.07 (3F) Chair: Tie LI 10:15-10:45 KEYNOTE SPEAKER: HETEROGENEOUS INTEGRATION FOR RF APPLICATION Jian ZHU Nanjing Electronic Devices Institute
10:45-11:00 #278, CHITOSAN/GRAPHENE OXIDE/MOS2/AUNPS MODIFIED ELECTROCHEMICAL SENSOR FOR TRACE MERCURY DETECTION Ri Wang, Chenyu Xiong, Yong Xie, Mingjie Han, Yuhao Xu, Chao Bian and Shanhong Xia State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences
11:00-11:15 #306, VISUAL CHEMICAL DETECTION MECHANISM BY A LIQUID GATING SYSTEM WITH DIPOLE-INDUCED INTERFACIAL MOLECULAR RECONFIGURATION Yi Fan and Xu Hou Xiamen University
11:15-11:30 #362, QUANTITATIVE GLUCOSE MEASUREMENT ON A SYNTHETIC PAPER TEST STRIP Weijin Guo, Jonas Hansson and Wouter van der Wijngaart KTH Royal Institute of Technology, Sweden
72 April 25-29 , 2021 Xiamen, China
11:30-11:45 #436, IMPROVED DESIGN OF POLYMER MICROMACHINED TRANSMISSION FOR FLAPPING WING NANO AIR VEHICLE RASHMI KANT, Daisuke Ishihara, Ryotaro Suetsugu, Sunao Murakami and Prakasha Ramegowda Kyushu Institute of Technology
11:45-12:00 #493, ORGANIC FIELD-EFFECT TRANSISTORS BASED GAS SENSORS FOR VOLATILE TOLUENE DETECTION Tengfei Guo, Yuelin Wang, Jian Song and Tie Li Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
12:00-12:15 #509, P-DOPANT ENHANCED ORGANIC THIN FILM TRANSISTORS BASED GAS SENSORS FOR VOLATILE BENZENES DETECTION Meng Liu, Yuelin Wang, Jian Song and Tie Li Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
12:15-12:30 #555, COUPLING MECHANISM OF THE MICRO MASS-SPRING SYSTEM AND ELECTROTHERMAL ACTUATOR AND ITS APPLICATION IN OPTICAL SWITCHES Changlei Feng, Jin Xie, Kaiquan Li, Zhuang Xiong, Bin Tang and Jun Dai Beijing Institute of Technology
Session IIId: 10:15 - 12:15 Micro/Nano/Molecular Fabrication-II Venue: Sunshine Hall (3F) Chair: Zenghui WANG 10:15-10:45 KEYNOTE SPEAKER: ATOMIC-SCALE MANUFACTURING BASED ON TEM Litao SUN Southeast University
10:45-11:00 #57, OBJECT MANIPULATION WITH FREESTANDING MAGNETIC MICROFIBERS FABRICATED BY FDM 3D PRINTING Qing Lu, Ki-Young Song and Yue Feng Beijing Institute of Technology
11:00-11:15 #275, ELECTROCHEMICAL NANOIMPRINT LITHOGRAPHY Hantao Xu, Lianhuan Han, Bingqian Du, Qinghui Meng, Yang Wang, Zhen Ma, Zhong-Qun Tian, Zhao- Wu Tian and Dongping Zhan Xiamen university
11:15-11:30 #348, STUDY ON THE MINIMUM SIZE OF MOLECULE BY EMPLOYING THE SINGLE-MOLECULE PLASMONIC OPTICAL TRAPPING METHOD
73 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Yang Yang, Biao-Feng Zeng, Chun-An Huo, Jia Shi, Wenjing Hong and Zhong-Qun Tian Xiamen University
11:30-11:45 #395, ADAPTIVE WAVEFRONT SHAPING FOR DIRECT LASER ABLATION APPLICATION Chong Kuong Ng, Fan Zhang, Peng Tan and Yuanliu Chen Zhejiang University
11:45-12:00 #426, SIMULATION AND EXPERIMENTAL STUDY ON SINGLE PULSE ABLATION BY A FEMTOSECOND LASER Fan Zhang, Peng Tan, Chong Kuong Ng and Yuanliu Chen Zhejiang University
12:00-12:15 #435, RESEARCH ON MELT ELECTROWRITING TPU HYDROPHOBIC MICROFIBER MESH FOR DIRECTIONAL WATER TRANSPORT Zungui Shao, Jiaxin Jiang, Junyu Chen, Huatan Chen, Guoyi Kang and Gaofeng Zheng Xiamen University
12:15 - 13:30 Lunch Break
Location: Qinye Canteen 3rd Floor
Session IIIe: 13:30 - 15:45 M/NEMS-IV Venue: Concert Hall (2F) Chair: Hongzhong LIU 13:30-14:00 KEYNOTE SPEAKER: SOFT MICRO-ROBOTS AND MICRO-ACTUATORS: MATERIALS, DESIGN, CONTROL AND APPLICATIONS Lining SUN Soochow University
14:00-14:15 #48, OPTICAL MEASUREMENT OF THE DYNAMIC RESPONSE OF AN ELECTROTHERMAL MICROACTUATOR Chen Hao, Wang Xingjie, Xi Zhanwen, Wang Jiong and Nie Weirong Nanjiing University of Science and Technology
14:15-14:30 #53, A WEARABLE STRAIN SENSOR BASED ON FIBER-STRUCTURED PU/MXENE/CNT COMPOSITE WITH ULTRA-HIGH SENSITIVITY AND BROAD SENSING RANGE Guoxi Luo, Qiankun Zhang, Yunyun Luo, Ke Chen, Wenke Zhou, Libo Zhao and Zhuangde Jiang Xi’an Jiaotong University
74 April 25-29 , 2021 Xiamen, China
14:30-14:45 #106, INFLUENCE OF MASS LOADING EFFECT ON RADIATION QUALITY FACTOR OF BAW MAGNETOELECTRIC ANTENNA Junru Li, Chunrui Peng, Yang Gao, Wanchun Ren and Xuefeng He Chongqing University
14:45-15:00 #226, ULTRASENSITIVE MASS SENSING UTILIZING HIGH-ORDER MODE LOCALIZATION OF CLAMPED-CLAMPED MICROBEAMS WITH DISTRIBUTED ELECTRODES Ming Lyu, Jian Zhao, Pengbo Liu, Jiahao Song, Heng Zhong, Xianze Zheng and Yinghai Tang Dalian University of Technology
15:00-15:15 #232, NONLINEAR THRESHOLD MASS SENSOR USING THE SNAP-THROUGH PHENOMENON OF A CLAMPED–CLAMPED MICROMACHINED ARCH BEAM Heng Zhong, Jian Zhao, Ming Lyu, Jiahao Song, Pengbo Liu, Xianze Zheng and Yu Huang Dalian University of Technology
15:15-15:30 #239, FEASIBILITY STUDY OF WEARABLE MUSCLE DISORDER DIAGNOSING BASED ON PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER Mengjiao Qu, Hong Ding, Xuying Chen, Dengfei Yang, Dongsheng Li, Ke Zhu and Jin Xie Zhejiang University
15:30-15:45 #562, MULTIFUNCTIONAL CARDIOMYOCYTE-BASED BIOSENSOR FOR ELECTROPHYSIOLOGY-MECHANICAL BEATING-GROWTH VIABILITY MONITORING Dongxin Xu, Jiaru Fang and Ning Hu Sun Yat-Sen University
Session IIIf: 13:30 - 15:30 Soft&Flexibe Devices and Applications-III
Venue: Multi-function Hall (1F) Chair: Rui ZHOU 13:30-14:00 KEYNOTE SPEAKER: DEVELOPING BIOCOMPATIBLE AND IMPLANTABLE FLEXIBLE PRESSURE SENSORS FOR HEALTH MONITORING APPLICATIONS Guozhen SHEN Institute of Semiconductors,Chinese Academy of Sciences
14:00-14:15 #430, AN ELECTRICAL DOUBLE LAYER-BASED IONTRONIC TACTILE SENSOR FOR DETECTION OF BIOLOGICAL IONIC LIQUID Yulu Liu, Shuyi Huang, Menglu Li, Xiangyu Zeng, Wei Li and Xiaozhi Wang College of Information Science and Electronic Engineering, Zhejiang University
75 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
14:15-14:30 #533, HIGHLY SENSITIVE AND FLEXIBLE TACTILE SENSOR BASED ON THE FABRICATION OF POROUS GRAPHENE/SILICONE RUBBER COMPOSITES Zhijian Chen, Yancheng Wang, Deqing Mei and Jie Jin Zhejiang University
14:30-14:45 #561, UNIFORMLY DISTRIBUTED SELF-FILLING MICRO-STRIPS FOR HIGH-PERFORMANCE PRESSURE-SENSITIVE SENSOR Zhiping Chai, Xingxing Ke, Han Chen, Jiaqi Zhu, Chuanfei Guo and Zhigang Wu Huazhong University of Science and Technology
14:45-15:00 #563, A SENSITIVE FLEXIBLE STRAIN SENSOR VIA ANISOTROPY MICROSTRUCTURED SENSITIZED SURFACE RESISTIVE CHANGE F OR HUMAN MOTION MONITORING Wenjie Fei, Shuo Zhang and Zhigang Wu Huahzong University of Science and Technology
15:00-15:15 #565, A SURFACE AND INTERIOR MATERIAL IDENTIFICATION TECHNOLOGY BASED ON DUAL-MODE SENSOR Zhuhui Yin, Ning Li, Weifeng Chen, Yue Jiang, Kaiyang Lan, Jiabin Peng and Zhengchun Peng Shenzhen University
15:15-15:30 #576, STRAIN-ENGINEERED BISTABLE CLAMPED THIN FILMS: FROM MACROSCALE TO NANOSCALE FABRICATION Guangchao Wan, Ziao Tian, Borui Xu, Yongfeng Mei and Zi Chen Dartmouth College
Invited Session IIId: 13:30 - 15:30 Advanced Scanning Probe Technology and Applications
Venue: Conference Room No.01 (1F) Chair: Huan HU & Yu Kyoung RYU 13:30-13:50 MARKERLESS FABRICATION OF FINFET DEVICES BY THERMAL SCANNING PROBE LITHOGRAPHY Armin W. Knoll IBM Zurich Laboratory
13:50-14:10 ADVANCED SCANNING PROBES FOR NANOFABRICATION AND NANOMEASUREMENT Huan Hu Zhejiang University
14:10-14:30 SCANNING PROBE-ASSISTED NANOWIRE CIRCUITRY Pablo Ares Universidad Autónoma de Madrid
76 April 25-29 , 2021 Xiamen, China
14:30-14:50 ADVANCED LITHOGRAPHY FOR OPTO-ELECTRONIC NANOCHIPS Xiaorui Zheng Westlake University
14:50-15:10 2D MATERIALS PATTERNING BY OXIDATION SCANNING PROBE LITHOGRAPHY Yu Kyoung Ryu Instituto de Sistemas Optoelectrónicos de Madrid (Universidad Politécnica de Madrid)
15:10-15:30 SPATIALLY CONFINED SURFACE REACTIONS AND NANOPATTERNING BY CANTILEVER-FREE POLYMER TIP ARRAYS Zhuang Xie Sun Yat-sen University
Invited Session IIIe: 13:30 - 15:50 Advanced Microsystems for Biomedical Applications
Venue: Conference Room No.04 (2F) Chair: Soo Hyeon KIM 13:30-13:50 ENGINEERING AND MEASURING SYSTEMIC MULTI-ORGAN INTERACTIONS Yi-Chin TOH Queensland university of technology
13:50-14:10 INTELLIGENT DRUG DELIVERY SYSTEM BASED ON MICRONEEDLE TECHNOLOGY Jongho PARK University of Tokyo
14:10-14:30 MECHANOSENSING OF BIOLOGICAL SAMPLES WITH SILICON-BASED MICROSYSTEMS Mehmet Cagatay TARHAN Yncrea HdF, Lille, France
14:30-14:50 SINGLE-MOLECULE ANALYSIS OF BIO-MOLECULES AND ITS APPLICATION Rikiya WATANABE RIKEN
14:50-15:10 ADVANCED BIOMEDICAL MICROSYSTEMS FOR SINGLE-CELL ANALYSIS Soo Hyeon Kim University of Tokyo
15:10-15:30 SURFACE ENHANCED RAMAN SCATTERING SENSORS FOR DISEASES DETECTION Tianxun GONG University of Electronic Science and Technology of China
15:30-15:50 ADVANCED MICROFLUIDICS AND PCR TECHNOLOGY COMBINED FOR POINT-OF-CARE DIAGNOSTICS
77 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Sisi LI Fraunhofer Institute for Microengineering and Microsystems IMM
Invited Session IIIf: 13:30 - 15:30 Multidisciplinary Frontier: Advanced Micro/Nano Electronics Plus (Bio-, Photo-, Energy-)
Venue: Conference Room No.05 (2F) Chair: Yu ZHOU & Yue SHAO 13:30-13:50 ANGSTROM-POROUS MOF MATERIALS FOR EFFICIENT ION ADSORPTION AND SIEVING Huacheng ZHANG RMIT University
13:50-14:10 SURFACE FREE ENERGY CHARACTERIZATION OF SOFT MATERIALS THROUGH COMPUTATIONAL EXPERIMENTS Matteo FASANO Politecnico di Torino
14:10-14:30 SOLITON MICROCOMBS: INTEGRATED PHOTONICS POWERING METROLOGY Qifan YANG Peking University
14:30-14:50 SYNTHETIC EMBRYOLOGY: MERGING STEM CELLS AND MECHANICAL MICROSYSTEMS TO FORGE AN EMBRYO-FREE FUTURE FOR HUMAN EMBRYOLOGY Yue SHAO Tsinghua University
14:50-15:10 CONTROLLED SYNTHESIS AND DEVICES APPLICATIONS OF 2D CRYSTAL ARRAYS Yu ZHOU Central South University
15:10-15:30 ACTIVE IONIC ARTIFICIAL SKIN: ION TRANSPORT MECHANISMS AND PROTOTYPE DESIGN Zicai ZHU Xi’an Jiaotong University
Session IIIg: 13:30 - 15:30 MEMS/NEMS-V
Venue: Conference Room No.07 (3F) Chair: Zewen LIU 13:30-14:00 KEYNOTE SPEAKER: MEMS-BASED PLATFORMS FOR CHARACTERIZATION OF ADVANCED FUNCTIONAL MATERIALS
78 April 25-29 , 2021 Xiamen, China
Liviu NICU LAAS-CNRS
14:00-14:15 #105, MULTI-MODAL RESONANCE MEASUREMENT CAPABLE OF DISCERNING AND VISUALIZING EFFECTS DUE TO EXCITATION SCHEMES IN MEMS RESONATOR Bo Xu, Jiankai Zhu, Tongqiao Miao, Jing Li, Qingyang Deng, Song Wu, Ting Wen, Fei Wang, Xiaoping Hu, Xuezhong Wu, Dingbang Xiao and Zenghui Wang UESTC
14:15-14:30 #116, NANOSTRUCTURE VANADIUM-DOPED ZINC OXIDE FILM SENSOR ENDOWED WITH ENHANCED PIEZOELECTRIC RESPONSE Wei Gao, Yu Zhang, Binghe Ma, Jian Luo, Jinjun Deng and Weizheng Yuan Northwestern Polytechnical University
14:30-14:45 #173, HUMIDITY SENSOR WITH HIGH RESOLUTION AND FAST RESPONSE BASED ON ALN CANTILEVER WITH TWO GROUPS OF SEGMENTED ELECTRODES Dongsheng Li, Hanyong Dong, Zihao Xie, Mengjiao Qu, Qian Zhang and Jin Xie Zhejiang University
14:45-15:00 #203, DESIGN AND FABRICATION OF A LATCHING SILICON-BASED MEMS SWITCH Tongtong Cao, Tengjiang Hu and Yulong Zhao Xi’an Jiaotong University
15:00-15:15 #418, 3D PRINTED SUGAR SCAFFOLD FOR HIGH PRECISION AND HIGHLY SENSITIVE ACTIVE AND PASSIVE WEARABLE SENSORS Dong Hae Ho, Panuk Hong, Joong Tark Han, Sang Youn Kim, S. Joon Kwon and Jeong Ho Cho Yonsei university
15:15-15:30 #538, DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION Boshen Liang, Louis Paquet, Yongbin Jeong, Paul Heremans and David Cheyns Imec
Session IIIh: 13:30 - 15:30 Nanomaterials-I
Venue: Sunshine Hall (3F) Chair: Jingxia WANG 13:30-14:00 KEYNOTE SPEAKER: STRUCTURE-CONTROLLED SYNTHESIS OF SINGLE-WALLED CARBON NANOTUBES Yan LI Peking University
14:00-14:15
79 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#11, SYNTHESIS OF POROUS CO3O4-ZNO AND ITS PERFORMANCE FOR SENSITIVE ETHANOL DETECTION Xiao Zhang, Yaohua Xu, Feng Wei and Anjie Ming GRINM
14:15-14:30 #13, A NOVEL LOW-TEMPERATURE POST-CURING TRANSFER METHOD OF GRAPHENE WRINKLING SURFACE FOR STRAIN ENGINEERING Kai-Ming Hu State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University
14:30-14:45 #34, SIMULTANEOUS SENSING OF REFRACTIVE INDEX AND TEMPERATURE USING A SYMMETRY-BREAKING SILICON METASURFACE WITH MULTIPLE FANO PEAKS Luo Zhao, Guoguo Kang, Junyi Wang, Haiyang Li and Cheng Zhang Beijing Institution of Technology
14:45-15:00 #186, SWITCHABLE PDT BY A SELFASSEMBLED FRET QUENCHING NANOPARTICLE Ziying Li and Yu Gao Cancer Metastasis Alert and Prevention Center
15:00-15:15 #284, DYNAMIC CURVATURE NANOCHANNEL-BASED MEMBRANE WITH ANOMALOUS IONIC TRANSPORT BEHAVIORS Miao Wang and Xu Hou Xiamen University
15:15-15:30 #676, ENHANCED ION SENSING STABILITY WITH NANOTEXTURED BIOSENSORS Yanfang Wang and Yuanjing Lin Southern University of Science and Technology
15:30 - 16:30 Plenary Speaker IIIc (Nobel Laureate)
Main Venue: Concert Hall (2F) Chair: Nanfeng ZHENG
Kostya NOVOSELOV The University of Manchester
16:30 - 18:30 Coffee Break & Poster Session I
Venue: Exhibition Hall (1F) Accept Posters from No.527 to No.720
80 April 25-29 , 2021 Xiamen, China
16:30 - 17:30 Industrial Panel
Venue: Exhibition Hall (1F)
17:30 - 18:30 学术奥斯卡讲座 -- 如何做好学术报告？
Venue: Exhibition Hall (1F)
主讲人：张海霞教授（北京大学）
18:30 Adjourn for the Day
19:00 - 21:00 Banquet & Award Ceremony
Location: Qinye Canteen 3rd Floor
81 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Plenary Speaker
Nano-calorimetry: A New Tool for Materials Development
Joost J. Vlassak
Harvard School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
E-mail : [email protected] Website : https://vlassakgroup.seas.harvard.edu/
ABSTRACT Calorimetry has long been used to study chemical reactions and phase transitions in materials. The technique finds its origin in the mid-18th century when Scottish physician Joseph Black discovered the notion of latent heat and Lavoisier developed an ice calorimeter to measure the amount of heat given off during combustion of carbon or respiration of living organisms. Since then calorimetry has developed into a sophisticated technique indispensable in chemistry and materials science. In this talk, I will show how the same technique can be used in the context of the Materials Genome Initiative. We use micromachining to fabricate arrays of calorimetric sensors that can perform measurements on samples as thin as a few nanometers at rates varying from isothermal to 105 K/s. The sensor arrays are ideally suited to explore complex materials systems using a combinatorial approach based on sputter-deposited thin-film composition spreads, especially when guided by computational materials science modeling. The methodology is illustrated for high-temperature shape memory alloys. Because of its large dynamic range, nanocalorimetry is also ideal for evaluating the kinetics of solid- state and solid-gas reactions. As an example, we use nano-calorimetry to evaluate the kinetics of solid- state reactions in Zr/B and Zr/B4C multilayers and demonstrate that ultra-high temperature ceramics such as ZrB2 and ZrB2/ZrC alloys can be synthesized at moderate temperatures. Calorimetry traces show that the formation reactions typically proceed in two distinct steps: inter-diffusion and amorphization, followed by crystallization. First-principles calculations provide insight in the amorphization processes in the reactive multilayers and confirm the relatively low activation energies associated with these processes. Finally, I will present results on the non-Arrhenius crystallization kinetics of Cu50Zr50 metallic glass. Time permitting, a new isothermal device with applications in biophysics will be briefly discussed.
BIOGRAPHY Joost J. Vlassak is currently the Abbott and James Lawrence Professor of Materials Engineering at Harvard University. Dr. Vlassak received his PhD degree in Materials Science from Stanford University. After working for several companies in Silicon Valley, Dr. Vlassak joined the School of Engineering and Applied Sciences at Harvard University in 2000. Dr. Vlassak is active in the field of the thermo-mechanical behavior of materials. He has developed experimental methods to characterize phase transitions and solid-state reactions in thin films, plastic deformation of coatings, elastic anisotropy in indentation, and fracture of thin films. Current experimental research projects focus on fracture of hydrogels, the use of hydrogels as ionic conductors in 3D printed devices, combinatorial calorimetry and calorimetry sensors for metabolic rate measurements in biological systems. Dr. Vlassak is co-author of more than 150 peer-reviewed scientific publications and several book chapters, and holds 7 US patents.
82 April 25-29 , 2021 Xiamen, China
Transformative Impact of Printable Solar Cells for Meeting Next-Generation Energy Demands
Alex Jen Department of Materials Science & Engineering and 2Department of Chemistry, City University of Hong Kong, Kowloon, HK SAR E-mail: [email protected]
ABSTRACT To complement silicon PV and make PV ubiquitous through a sustainable subsidy-free market model, it is crucial to develop low cost and high efficiency printable solar cells. Among different printable solar cell technologies, organic solar cells (OSCs) and perovskite solar cells (PVKSCs) are two candidates that have immense potential. They have inherently easier manufacturability, where low- temperature solution processing via high-throughput printing techniques like spray coating, inkjet printing, screen printing, blade coating, and slot die roll-to-roll (R2R) coating) can be used for manufacturing at scale. As a result, the capex requirements are significantly lower which will favor a low levelized-cost of electricity. OSCs and PVKSCs also offer versatility in form factor for realizing flexible, semi-transparent, and color-tunable solar cells. These variants are pivotal for the success of building integrated photovoltaics (BIPVs) and niche market products (portable and wearable devices useful in fields like electronics, aviation, military, and medicine). Advancements in terms of non-fullerene acceptors (for OSCs) and multi-junction device architectures (for PVKSCs) have recently escalated the progression in power conversion efficiency (PCE). Record PCEs in lab scale devices have reached 19% and 25.5% for OSCs and PVKSCs, respectively, and efforts for scaling up and demonstrating large scale modules have begun through close cooperation between academia and industry. In this talk, I will provide an overview of progress and challenges for printable solar cells (OSCs and PVKSCs) toward commercialization and highlight our integral contributions over the last decade in this field.
BIOGRAPHY
Professor Alex Jen is the Lee Shau Kee Chair Professor of Materials Science and Chair Professor of Chemistry and Materials Science of the City University of Hong Kong. He also served as the Provost for CityU during 2016-2020. He is a distinguished researcher with more than 900 publications, 65,000 citations, and an H-index of 129. He is also a co-inventor for 63 patents and invention disclosures. His interdisciplinary research covers organic/hybrid functional materials and devices for photonics, energy, sensors, and nanomedicine.
For his pioneering contributions in organic photonics and electronics, Professor Jen was elected as an Academician by both the European Academy of Sciences and the Washington State Academy of Sciences. He is also a Fellow of several professional societies including AAAS, MRS, ACS, PMSE, OSA, SPIE. He was named by the Times Higher Education (THE) as one of the “Top 10 university researchers in Perovskite Solar Cell Research” from 2014 to 2017. In addition, he was recognized by Thomson Reuters as one of the "World’s Most Influential Scientific Minds of 2015 and as a "Highly Cited researcher" in materials science from 2014-2019. He has also demonstrated strong capability in technology transfer, and was the founder of the Institute of Advanced Materials for Energy (i-AME) of the University of Washington.
He has also been appointed as the Changjiang Endowed Chair by the Ministry of Education, 1000 Talent Professor (Zhejiang Univ.), and as the World Class University Professor by the Korea Univ., and as the Distinguished Chair Professor by the National Taiwan University.
83 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Van der Waals Heterostructures
Kostya S. Novoselov
Department of Materials Science and Engineering, National University of Singapore, Singapore, 117575, Singapore
ABSTRACT One of the most important “property” of graphene is that it has opened a floodgate of experiments on many other 2D atomic crystals: BN, NbSe2, TaS2, MoS2, etc. The resulting pool of 2D crystals is huge, and they cover a massive range of properties: from the most insulating to the most conductive, from the strongest to the softest. If 2D materials provide a large range of different properties, sandwich structures made up of 2, 3, 4 … different layers of such materials can offer even greater scope. Since these 2D-based heterostructures can be tailored with atomic precision and individual layers of very different character can be combined together, - the properties of these structures can be tuned to study novel physical phenomena or to fit an enormous range of possible applications, with the functionality of heterostructure stacks is “embedded” in their design. Already now such materials bring to life a number of exciting applications. In my lecture I will review some of them.
BIOGRAPHY Prof Sir Konstantin ‘Kostya’ Novoselov FRS was born in Russia in August 1974. He has both British and Russian citizenship. He is best known for isolating graphene at The University of Manchester in 2004, and is an expert in condensed matter physics, mesoscopic physics and nanotechnology. Every year since 2014 Kostya Novoselov is included in the list of the most highly cited researchers in the world. He was awarded the Nobel Prize for Physics in 2010 for his achievements with graphene. Kostya holds positions of a Tan Chin Tuan Centennial Professor at the National University of Singapore. He is also part time Langworthy Professor of Physics and the Royal Society Research Professor at The University of Manchester.
He graduated from the Moscow Institute of Physics and Technology, and undertook his PhD studies at the University of Nijmegen in the Netherlands before moving to The University of Manchester in 2001. Later Professor Novoselov joint the National University of Singapore in 2019. Professor Novoselov has published more than 400 peer-reviewed research papers. He was awarded with numerous prizes, including Nicholas Kurti Prize (2007), International Union of Pure and Applied Science Prize (2008), MIT Technology Review young innovator (2008), Europhysics Prize (2008), Bragg Lecture Prize from the Union of Crystallography (2011), the Kohn Award Lecture (2012), Leverhulme Medal from the Royal Society (2013), Onsager medal (2014), Carbon medal (2016), Dalton medal (2016), Otto Warburg Prize (2019) among many others. He was knighted in the 2012 New Year Honours. 2020.
84 April 25-29 , 2021 Xiamen, China
Keynote Speaker
Applications of Flexible Inorganic Thin-film Devices in Bioelectronics
Yuan Lin
School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, P.R. China
E-mail : [email protected]
ABSTRACT Flexible bioelectronics have greatly improved the way of human-machine interaction due to the fact that they can provide seamless interactions with humans. Due to the advantages of mature processibility and rich physicochemical properties, flexible and stretchable inorganic thin-film electronics play an increasingly important role in the emerging and exciting flexible electronic field. Serving as sensor elements or biomimetic actuators, flexible inorganic thin film bioelectronics could dynamically sense physiological signals and provide timely stimulations or treatments. Thus, these types of electronics may change the future of healthcare. This talk summarizes our recent work in the development of flexible inorganic thin film devices focusing on their biomedical applications, including biosensing and non-pharmacological stimulation treatments. A future perspective into the challenges and opportunities for the next-generation flexible bioelectronics will also be discussed.
BIOGRAPHY Yuan Lin is currently a Professor at School of Materials and Energy, University of Electronic Science and Technology of China. Dr. Lin received her Ph.D. degree in Condensed Matter Physics from University of Science and Technology of China in 1999. After that, she had worked in the University of Houston and Los Alamos National Lab as a postdoc, and in Intel Corp as a senior engineer. In 2008, she joined the faculty of University of Electronic Science and Technology of China as a Yangtze River Scholars Distinguished Professor. Dr. Lin is active in the field of electronic thin films and devices. Her main research interests are focused in the development of various thin films (such as ferroelectric oxide, vanadium oxide and other oxides) for applications in electronic devices, especially in stretchable and flexible electronic devices. She has co-authored more than 150 papers in peer-reviewed journals and her publications have been cited for more than 2000 times. She also has more than 20 Chinese patents and 4 US patents awarded.
85 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Versatile E-Printing for Flexible Electronics
YongAn Huang
State Key Laboratory of Digital Manufacture Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China.
E-mail : [email protected] Website : http://faculty.hust.edu.cn/huang
ABSTRACT Electrohydrodynamic (EHD) printing (E-Printing), which adopts electric field force to pull fluid flows from microcapillary nozzles, is becoming a promising technology for flexible electronics manufacture due to its unique advantages of high-resolution (<1μm) and compatibility with wide range of inks (1- 10000 cps). Three types of printing mode that are E-jet printing, EHD direct-writing, and electrospray, can be switched through process adjustment to deposit dots, fibers/lines and thin films directly. Specially, the E-Printing technology enables large-scale deposition of highly aligned nanofibers in an additive, noncontact, real-time adjustment, and individual control manner on rigid or flexible substrates, making it rather attractive in the fabrication of flexible electronics. This talk will briefly introduce our recent researches on E-Printing techniques, including the basic principles, alignment strategiesand their applications. Several attractive applications in flexible electronics are also presented herein: (1) a hyper-stretchable (>300%) self-powered sensor that can be used to measure different physical quantities simultaneously; (2) organic thin-film transistor (OTFT) arrays that are fabricated in a large-area, high-efficiency and photolithography-free manner; (3) Au metal-network electrodes that are fabricated to obtain a flexible and transparent touch panel with transmittance of 94.3% and sheet resistance of 36.7 Ω□−1; (4) full color perovskite display and photodetector, including full-color pixel and high-resolution dot matrix of 1 μm are fabricated. This technology overcomes the limitations on the resolution of fabrication and viscosity of ink of conventional inkjet printing, and represents major advances in manufacturing of flexible electronics.
BIOGRAPHY YongAn Huang, professor of Huazhong University of Science and Technology (HUST), vice director of State Key Laboratory of Digital Manufacturing Equipment and Technology. Dr. Zhang received her Bachelor, Master and Ph.D. degrees from the Northwestern Polytechnical University. After finishing his postdoctoral research at HUST, he joined the faculty of HUST in 2009. In 2012, he was a visiting professor at the Northwestern University. He is a winner of The National Science Fund for Distinguished Young Scholars. He focuses on the research of design and manufacturing for flexible electronics, including 1) EHD printing and laser lift-off, and 2) flexible printed display, smart skin of aircrafts, electronic skin of robots and epidermal electronics of human. He has published more than 100 papers in journals including Science Advances, Advanced Materials, Advanced Functional Materials, Materials Horizon, Nano Energy, Small, Nature Communication, etc, and also published 3 monographs. He has won first prize of Natural Science in Hubei Province, Gold/Special Gold Award on International Exhibition of Inventions in Geneva, Switzerland.
86 April 25-29 , 2021 Xiamen, China
Heterogeneous Integration for RF application
Jian Zhu
Nanjing Electronic Devices Institute, Nanjing, 210096, P.R. China E-mail : [email protected]
ABSTRACT Complementary metal oxide semiconductor (CMOS) offers ultimate advantages in terms of maturity, complexity and integration density among semiconductor technologies, especially in digital function applications. III-V compound semiconductor (CS) technology is dominating radio frequency (RF) applications due to their superior transport properties. CS devices offer better RF performance in power, efficiency, bandwidth, dynamic range and frequency, comparing to their Si based competitors. Therefore, integration of high performance CS circuits with CMOS is essential for a RF module with both optimum performance and compact size. Conventional printed circuit board (PCB) or low temperature co-fired ceramic (LTCC) based assemblies are cost-effective and reliable solutions for CS and CMOS integration. However, drawbacks in pattern resolution, stacking accuracy, and interconnect size restrict these techniques in higher frequency and more compact applications. Heterogeneous Integration technology is emerging as an attractive approach. This talk will introduce our latest research activities on heterogeneous integration technology for RF application. A 38 GHz T/R module will be used as an example to illustrate the idea. A silicon based IPD structure combined with Cu TSV interposer is suitable for RF applications. Compound material based MMICs are integration through heterogeneous integration scheme. The processing techniques are compatible with the standard CMOS technology.
BIOGRAPHY Jian Zhu is currently a Chief scientist at CETC. Dr. Zhu is a joint professor at Nanjing University. Dr. Zhu received her Ph.D. degree from Southeast University. Dr. Zhu is active in the field of RF MEMS and microsystem. She is fellow of Chinese Society of Micro-Nano Technology （CSMNT ） , vice president of Chinese semiconductor Society MEMS board, board member of DTIP OF MEMS/MOEMS Technical Program Committee, and expert in national science foundation committee. She publishes over 130 papers and holds over 40 patents.
87 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Atomic-scale Manufacturing based on TEM
Litao Sun
SEU-FEI Nano-Pico Center, Key Lab of MEMS of Ministry of Education, School of Electronic Science and Engineering, Southeast University, Nanjing, 210096, P.R. China
E-mail : [email protected] Website : http://www.seu-npc.com
ABSTRACT With the rapid development of semiconductor technology, the 5 nm feature size of fabrication is already achieved. It is thus quite essential to explore more precise manufacturing and characterization method to evaluate the shape/structure stability and possible new properties of sub-5nm material components, especially under external stimuli such as strain, electric, or thermal fields. Along with the reduction of dimensions, the surface-to-volume ratio of the materials increases. Surface atoms are preferably reconstructed for adapting their geometrical and electronic structure to the environment. Thus, the surface structure begins to dominate material properties ranging from electronic and structural aspects when the characteristic dimension is reduced to sub-5 nm. Here we review our recent progress in atomic resolution manufacturing and dynamic characterization of individual nanostructures and nanodevices based on the idea of "setting up a nanolab inside a transmission electron microscope". The electron beam can be used as a tool to induce manufacturing on the atomic scale. Additional probes from a special-designed holder provide the possibility to further manipulate and measure the electric/mechanical properties of the nanostructures in the small specimen chamber of a TEM. Recently, the optical signal also was introduced into the electron microscope to enrich the coveragef o investigation inside the “multifunctional nanolab”. All phenomena from the in-situ experiments can be recorded in real time with atomic resolution.
References: [1] L. Sun, F. Banhart, et. al., Science 312, 1199 (2006) [2] J. R-Manzo, M. Terrones, et.al., Nature Nanotechnology 2, 307 (2007) [3] X. Liu, T. Xu, et al., Nature Communications 4, 1776 (2013) [4] X. Guo, G. Fang, et al., Science 344, 616 (2014) [5] J. Sun, L. He, et al., Nature Materials 13, 1007 (2014) [6] Q. Zhang, K. Yin, et al., Nature Communications 8, 14889 (2017) [7] C. Zhu, S. Liang, et al., Nature Communications 9, 421 (2018) [8] H. Dong, F. Xu, et al., Nature Nanotechnology 14, 950 (2019)
BIOGRAPHY Prof. Litao Sun received his PhD from the Shanghai Institute of Applied Physics, Chinese Academy of Sciences in 2005. He worked as a research fellow at University of Mainz, Germany from 2005 to 2008, and a visiting professor at University of Strasbourg, France from 2009 to 2010. Since 2008, he joined SEU and honored as a Distinguished Professor. He currently serves as the head of School of Electronic Science and Engineering, Southeast University (SEU), the director of SEU-FEI Nano-Pico center, the director of Key Lab of MEMS of Ministry of Education, and the director of Center for Advanced Materials and Manufacture, Joint Research Institute of Southeast University and Monash University. He is the founding chairman of IEEE Nanotechnology Council Nanjing Chapter. He is the author and co-author of around 200 papers on international journals including 2 in Science, 15 in Nature and Nature series journals, etc. He was selected the Global Highly Cited Researchers list from the Web of Science Group. He holds around 80 patents and has given more than 160 invited presentations. He is the Review Panel member of Graphene Flagship, European Union and Member of European Science Foundation College of Expert Reviewers. He has obtained National Science Fund for Distinguished Young Scholars of China, New Century Excellent Talents in University, Young Leading Talent in Science and Technology Innovation, Cheung Kong Scholar Chair Professor from Ministry of Education etc.
88 April 25-29 , 2021 Xiamen, China
Soft Micro-robots and Micro-actuators: Materials, Design, Control and Applications
Lining Sun
Soochow University, Suzhou 215000 P.R. China
E-mail : [email protected] Website : group or personal website if applicable
ABSTRACT Microrobots have drawn extensive attentions due to their great potential for biomedical and MEMS applications. In this talk, I would like to share my experiences of creating soft micro-robots and micro- actuators with stimulus-responsive materials. Then, I will report our field based teleoperation actuation systems to accurately control these micro-robots. Finally, I will show our attempts of applying these micro-robots and micro-actuators to execute targeted drug delivery and therapy trial and cooperatively micro-manipulation.
BIOGRAPHY Prof. Lining Sun is currently the director of Robotics and Microsystems Center of Soochow University, and is the dean of the College of Mechatronic Engineering of Soochow University. He is also the vice- director of the State Key Laboratory for Robotics and System in Harbin Institute of Technology. He is the Chang-Jiang Professor and the obtainer of The National Natural Science Fund for Distinguished Young Scholars. Prof. Sun has directed more than 30 projects from “863” Program, “973” Program and NSFC, and obtained many academic honors and awards, including National Science and Technology Progress Awards and Provincial Science and Technology Prizes, the Ho Leung Ho Lee Foundation Science and Technology Innovation Award, to name a few.
89 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Developing biocompatible and implantable flexible pressure sensors for health monitoring applications
Guozhen Shen
State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, P.R. China E-mail : [email protected] Website : https://www.x-mol.com/groups/flextronics
ABSTRACT Advances in digital health care have driven innovations in high-performance wearable and smart sensors. One requirement in this field is establishing healthy, secure and reliable medical devices for precisely monitoring vital signs of the human body or the surrounding environment through flexible sensors with not only high sensing performance, but also excellent biofunctionality. Smart wearable sensors with excellent biofunctionality furnish medical devices with various smart functions such as biocompatibility, biodegradability, and self-healing, which have attracted widespread interest from device engineers and materials scientists. Here, we focus on the various types of materials used in biomedical and implantable devices and their bio-multifunctional (biocompatible, biodegradable, and self-healing) designs. The subsequent content highlights the most advanced medical applications of bio-multifunctional wearable sensors, classified into three main subfields (Figure 1): 1) biophysical monitoring (heart rate/pulse, human motion, and temperature), 2) biochemical tracking (biomolecule, blood glucose, and Na+/K+), and 3) real-time environmental information detection (gas molecules and humidity). Finally, this work concludes with an overview of key challenges and a summary of opportunities, ultimately determining that advances in smart wearable sensors are critical to their continuing progress.
BIOGRAPHY Guozhen Shen is currently a Professor and Group Leader at Institute of Semiconductors, Chinese Academy of Sciences. Dr. Shen received his Ph.D degree in Chemistry from University of Science and Technology of China. From 2004 to 2013, he did his research in Hanyang University (Korea), National Institute for Materials Science (Japan), University of Southern California (US) and Huazhong University of Science and Technology (China). Dr. Shen’s research focuses on design of low- dimensional nanostructures for flexible electronic applications, including flexible sensors, flexible energy storage devices and flexible multifunctional integrated electronic systems. He is the Editor/ Editorial board member of Nanoscale Research Letters, Advanced Materials Technologies, Journal of Semiconductors, etc. Dr. Shen has published more than 300 peer-reviewed articles and edited2 books with an H-factor of 76. Dr. Shen won several important awards, including the National Science Fund for Distinguished Young Scholars, the 2nd prize of Science and Technology Award of Beijing, and 1st prize of Science and Technology of C-MRS.
90 April 25-29 , 2021 Xiamen, China
MEMS-based platforms for characterization of advanced functional materials
Liviu Nicu1, Susan Trolier-McKinstry2, Gabor Molnar3, Azzedine Bousseksou3, Maria Dolores Manrique Juarez1, Fabrice Mathieu1, Daisuke Saya1, Karsten Haupt4, Denis Dezest5, Thierry Leïchlé1,6
1LAAS-CNRS, Université de Toulouse, France 2Department of Materials Science and Engineering and Materials Research Institute, The Pennsylvania State University, PA, USA 3LCC-CNRS, Université de Toulouse, France 4Université de Technologie de Compiègne, CNRS Laboratory of Enzyme and Cell Engineering, Compiègne, France 5CEA-Leti, Grenoble, France 6Georgia Tech-CNRS Joint International Laboratory, GA, USA E-mail: [email protected] Website: www.laas.fr
Liviu NICU is currently senior scientist at the French National Scientific Research Center and is General Director of the CNRS Systems Analysis and Architecture Laboratory in Toulouse, France. After obtaining his PhD degree in Electrical Engineering from Paul Sabatier University in Toulouse, he joined Thales Avionics Valence (France) where he took charge of the company's inertial silicon microsensor projects from 2001 to 2003. He joined the Systems Analysis and Architecture Laboratory since 2003 where he conducted research in the fields of bioMEMS and MEMS for the physical and chemical characterization of advanced functional materials. Liviu NICU is co-author of over 100 peer-reviewed articles, 2 books / book chapters and has co-invented 3 patents. The laboratory he is heading since January 2016 brings together more than 700 people working in the fields of automation, robotics, computing and micro-nanotechnologies.
Abstract
The integration of new advanced functional materials in the production chain of microelectromechanical systems (MEMS) requires a fundamental in-depth knowledge of their physical and chemical properties. In recent years, there has been a significant increase in publications reporting on performant transduction properties of classes of materials partially or completely unknown by the production chain mentioned above [1], [2]. These materials are generally synthesized and characterized in a form (powders, single crystals, etc.) that is not suitable for MEMS manufacturing processes, rather requiring homogeneous thin films. Thus, despite the announced performances, which are very convincing and promising, there is no guarantee that they can be easily integrated into MEMS devices, nor can there be any guarantee that their performances will be preserved once the integration phase is successful. Our work over the past few years was to assess the performance of materials, which either by their nature or by the way they are structured, still remain exotic for conventional micro / nanofabrication pathways. This assessment goes through the same stages, which are: the deposition and patterning of these materials at the micro-scale (by conventional or alternative techniques), their integration into basic micrometric structures (passive or active levers) and their characterization. In this talk we will present our contribution to the characterization of three classes of materials: molecularly imprinted polymers (MIP), spin crossover materials (SCO) and piezoelectric materials (sol-gel lead zirconate titanate or PZT). In each of the cases presented, the same process flow and characterization methodology are followed, namely: - in case of SCO materials (Figure 1.a): evaporation onto microfabricated cantilevers with actuation and sensing capabilities, assessment of the post-process spin cross-over capabilities; - in case of MIPs (Figure 1.b): deposition and patterning of the MIP (by spin-coating and photolithography) fully integrated within the process flow of the microcantilevers’ fabrication, assessment of the post-process mechanical integrity of the MEMS and chemical functionality preservation;
91 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
- in case of sol-gel PZT (Figure 1.c): integration of the active material into the process flow of microcantilevers’ fabrication by means of micro-contact printing in order to assess the actuation and sensing capabilities. As a general conclusion, we will demonstrate that by appropriately integrating thin films of these advanced materials and using the MEMS transduction capability, MEMS platforms are powerful tools for the physical and chemical characterization of these materials. As exemplified by the works presented here, these materials can be organic or inorganic, deposited by evaporation, micro-contact printing, spray coating or other types of techniques adaptable to MEMS manufacturing chain. The anticipation of the compatibility with MEMS process flow should allow, when a new material with high transduction potential is identified, its integration into the whole device architecture starting with the design phase.
References
[1] M. D. Manrique-Juárez et al., « Switchable molecule-based materials for micro- and nanoscale actuating applications: Achievements and prospects », Coord. Chem. Rev., vol. 308, p. 395‑408, févr. 2016, doi: 10.1016/j.ccr.2015.04.005. [2] E. Ahmed, D. P. Karothu, et P. Naumov, « Crystal Adaptronics: Mechanically Reconfigurable Elastic and o Superelastic Molecular Crystals », Angew. Chem. Int. Ed., vol. 57, n 29, p. 8837‑8846, juill. 2018, doi: 10.1002/anie.201800137.
Biography
Liviu NICU is currently senior scientist at the French National Scientific Research Center and is General Director of the CNRS Systems Analysis and Architecture Laboratory in Toulouse, France. After obtaining his PhD degree in Electrical Engineering from Paul Sabatier University in Toulouse, he joined Thales Avionics Valence (France) where he took charge of the company's inertial silicon microsensor projects from 2001 to 2003. He joined the Systems Analysis and Architecture Laboratory since 2003 where he conducted research in the fields of bioMEMS and MEMS for the physical and chemical characterization of advanced functional materials. Liviu NICU is co-author of over 100 peer-reviewed articles, 2 books / book chapters and has co-invented 3 patents. The laboratory he is heading since January 2016 brings together more than 700 people working in the fields of automation, robotics, computing and micro-nanotechnologies.
92 April 25-29 , 2021 Xiamen, China
Structure-Controlled Synthesis of Single-Walled Carbon Nanotubes
Yan Li
College of Chemistry and Molecular Engineering and Academy for Advanced Interdisciplinary Studies, Peking University, Beijing National Laboratory for Molecular Sciences, Beijing, China
E-mail : [email protected]
ABSTRACT Single-walled carbon nanotubes (SWCNTs) can be either semiconducting and metallic. Semiconducting SWCNTs (s-SWCNTs) present direct bandgap and balanced high mobility toward electrons and holes, which is desired in electronic applications. However, the bandgap is determined by their structure which is described by their chiral index (n,m). Therefore, the structure-controlled preparation of SWCNTs is a crucial issue for carbon-based nanoelectronics and has been a great challenge since 1990s. We developed a strategy to synthesize SWCNTs with a specific chirality by using intermetallic compound Co7W6 nanocrystals. The catalyst nanocrystals act as the structural templates for the formation of SWNTs with designed chiralities. SWCNTs of high chirality purity are obtained under optimized kinetic growth conditions. This strategy has shown success in the synthesis of SWCNTs of several different chiralities. Further in situ studies on the catalysts under reactive environment reveals the mechanism at atomic scale.
BIOGRAPHY Yan Li joined the faculty of Chemistry, Peking University in 1995 and has been the full professor of chemistry at Peking University since 2002. She was a visiting associate professor in Department of Chemistry, Duke University from 1999 to 2001. From 2016 to 2019, she was appointed as Distinguished Visiting Professor at School of Engineering, University of Tokyo and was awarded as Fellow of the School in 2020. Her research is focused on carbon nanomaterials, especially the preparation, modification, characterization and application of carbon nanotubes. She has published over 150 papers in premier journals such as Nature, Science, J. Am. Chem. Soc., Adv. Mater., Acc. Chem. Res, Chem. Rev. etc. Currently, she is serving as the associated editor of ACS Nano. She is also on the editorial or advisory board of several journals including Chemical Society Reviews, Materials Horizons, Nano Research, and Carbon. Dr. Li has received many awards and honors, such as National Science Fund for Distinguished Young Scholars by NSFC (2011), Chang Jiang Scholar by Chinese Ministry of Education (2013), Fellow of Royal Society of Chemistry (2014), First Class Science and Technology Award by China Association for Instrumental Analysis (2015), Outstanding Researcher by China Association for Science and Technology (2016), First Prize in Natural Science by Ministry of Education (2017), Chemical Innovation Award Distinguished Scientist by Chinese Chemical Society (2018). She was also awarded as Top Ten Best Teacher (for undergraduate education) in Peking University (2008), Famous Teacher of Beijing City (2013), and Top Ten Best Supervisor (for graduate education) in Peking University (2015).
93 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Day 4 - Thursday, 29 April
Session IVa: 08:30 - 10:45 MEMS/NEMS-VI
Venue: Multi-function Hall (1F) Chair: Zewen LIU 08:30-09:00 KEYNOTE SPEAKER: HIGH ACCURACY RESONANT ACCELEROMETERS BASED ON QMEMS Yulong ZHAO Xi’an Jiaotong University
09:00-09:15 #163, LARGE-SWING LOW-DISTORTION HIGH VOLTAGE AMPLIFIER DESIGN FOR MEMS GYROSCOPES Hua Chen, Ke Liu and Zhen Meng Institute of Microelectronics CAS
09:15-09:30 #223, PREPARATION AND DETECTION OF MICRO-NANO ELECTRODE ARRAY BASED ON CHIPMUNK HYPOTHALAMUS IN SPECIFIC BRAIN REGIONS Yiding Wang, Shengwei Xu, Chao Yang, Penghui Fan, Botao Lu, Gucheng Yang, Yinghui Li and Xinxia Cai State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
09:30-09:45 #242, INFRARED THERMAL IMAGING SENSOR USING TRANSFERRED RUPHEN-BASED TEMPERATURE SENSITIVE FILM Jialiang LI, Jun Hu, Yufei Zhai, Song Li, Yiming Yuan and Min Wang Southern University of Science and Technology
09:45-10:00 #311, HYBRID FREQUENCY-TIME DOMAIN ANALYSIS OF BULK ACOUSTIC WAVE CIRCULATOR Jing Yuan , Bingbin Zhang, Chengfeng Wu and Yang Gao School of Information Engineering, Southwest University of Science and Technology
10:00-10:15 #334, A PIEZOELECTRIC MICROMACHINED ULTRASONIC ARRAY WITH FREQUENCY-SELECTABLE TUBES Wei Zhu, Lei Wang, Zhipeng Wu, Wenjuan Liu and Chengliang Sun Institute of Technological Sciences, Wuhan University, China
94 April 25-29 , 2021 Xiamen, China
10:15-10:30 #338, RESEARCH ON THE STABILITY THRESHOLD AND SUBHARMONIC OSCILLATION IN A PARAMETRIC EXCITATION MEMS RESONATOR Kuo Lu, Kai Wu, Qingsong Li, Xin Zhou, Yongmeng Zhang, Ming Zhuo, Xuezhong Wu and Dingbang Xiao National University of Defense Technology
10:30-10:45 #637, A MICROMACHINED ELECTROCHEMICAL ANGULAR ACCELEROMETER BASED ON INTERDIGITAL ELECTRODES Tian Liang, Junbo Wang, Deyong Chen, Jian Chen, Bowen Liu, Chao Xu, Wenjie Qi, Xu She, Mingwei Chen, Anxiang Zhong and Yumo Duan State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences
Session IVb: 08:30 - 10:45 Bio-inspired multiscale Interfaces
Venue: Conference Room No.01 (1F) Chair: Peiyi WU 08:30-09:00 KEYNOTE SPEAKER: BIO-INSPIRED MULTISCALE ADHESIVE INTERFACIAL MATERIALS Shutao WANG Technical Institute of Physics and Chemistry CAS
09:00-09:30 KEYNOTE SPEAKER: NANOKITS FOR SINGLE CELL ANALYSIS Dechen JIANG Nanjing university
09:30-09:45 #23, FABRICATION OF POLYMER/METAL COMPOSITE MICRO/NANO ARRAY STRUCTURES AND THEIR APPLICATIONS IN BIOLOGICAL INTERFACES AND ACTUATORS Hongxu Chen Jiaxing University
09:45-10:00 #209, MWCNT/PEDOT:PSS NANOCOMPOSITES-MODIFIED MICROELECTRODE ARRAY FOR RECORDING NEURAL ACTIVITY OF HIPSCS-DERIVED MATURE NEURONS TO DIFFERENT CONCENTRATIONS OF K+ AND GLU Enhui He, You Zhou, Shihong Xu, Kui Zhang, Shengwei Xu, Yilin Song, Jinping Luo, Wanwan Zhu, Qi Xu and Xinxia Cai State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences; University of Chinese Academy of Sciences
10:00-10:15 #199, SWCNTS/PEDOT:PSS MODIFIED MICROELECTRODE ARRAY FOR DETECTION OF THE NEURONAL ELECTROPHYSIOLOGICAL ACTIVITY OF CORTICAL
95 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
NEURONS UNDER GLUTAMATE STIMULATION Shihong Xu, Yu Deng, Enhui He, Shenwei Xu, Longzhe Sha, Kui Zhang, Yiling Song, Jinping Luo, Qi Xu and Xinxia Cai State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences
10:15-10:30 #391, BIOINSPIRED LIQUID GATING MEMBRANE-BASED CATHETER WITH ANTICOAGULATION AND POSITIONALLY DRUG RELEASE PROPERTIES Chunyan Wang and Xu Hou College of Chemistry and Chemical Engineering, Innovation Center of Chemistry for Energy Materials, Xiamen University.
10:30-10:45 #560, ULTRA-THIN FLEXIBLE NEURO PROBE UTILIZING BIODEGRADABLE COLLAGEN MICRONEEDLE Dong Huang, Junshu Li, Zhongyan Wang, Zhitong Zhang, Qining Wang and Zhihong Li National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University
Invited Session IVa: 08:30 - 10:30 Multidisciplinary Frontier: Micro/Nano-Engineered Materials for Sensing and Applications
Venue: Conference Room No.04 (2F) Chair: Xu XIAO & Tianxun GONG 08:30-08:50 FLEXIBLE HUMAN-MACHINE INTERACTING SENSORS Yanchao MAO Zhengzhou University
08:50-09:10 SOFT ROBOTIC MANIPULATION SYSTEM CAPABLE OF STIFFNESS VARIATION AND DEXTEROUS OPERATION FOR SAFE HUMAN-MACHINE INTERACTIONS Changyong CAO Michigan State University, USA
09:10-09:30 BOROPHENE-BASED TWO-DIMENSIONAL MATERIALS AND DEVICES Guoan TAI Nanjing University of Aeronautics and Astronautics
09:30-09:50 FUNCTIONAL PHOTONIC CRYSTAL WITH SUPERWETTABILITY Jingxia WANG Technical Institute of Physics and Chemistry, CAS
09:50-10:10 TWO-DIMENSIONAL TRANSITION METAL CARBIDES AND NITRIDES FOR TERAHERTZ ABSORPTION TECHNOLOGY Xu XIAO University of Electronic Science and Technology of China
10:10-10:30
96 April 25-29 , 2021 Xiamen, China
ROOM TEMPERATURE GAS SENSORS BASED ON TRANSITION METAL DICHALCOGENIDES HETEROSTRUCTURES Zhi YANG Shanghai Jiao Tong University
Session IVc: 08:30 - 10:15 Nanomaterials-II
Venue: Conference Room No.05 (2F) Chair: Jie JU 08:30-09:00 KEYNOTE SPEAKER: DESIGN OF SUB-NANOMETRE PORES FOR PRECISE SEPARATION Jian JIN Soochow University
09:00-09:15 #295, SELF-POWERED FLEXIBLE SUPERCAPACITOR FOR HUMAN MOTION MONITORING Zheng Fan, Hongmei Chen, Yanyun Fan, Danfeng Cui, Shubin Yan and Chenyang Xue North University of China
09:15-09:30 #458, OPTOELECTRONIC SYNAPSE USING MOS2 VAN DER WAALS HOMOJUNCTION WITH INTERFACIAL PASSIVATION FOR FAST POTENTIATION Yizhen Ke, Lin Lin, Tianxun Gong, XIAOSHENG ZHANG and Wen Huang University of Electronic Science and Technology of China
09:30-09:45 #466, FUNCTIONALIZATION AND APPLICATION OF INORGANIC POROUS NANOFIBERS Yunqian Dai Southeast University
09:45-10:00 #510, BIONIC TACTILE SENSOR BASED ON TRIBOELECTRIC NANOGENERATOR FOR MOTION PERCEPTION Siyuan Wang, Peng Xu, Xinyu Wang, Hao Wang, Changxin Liu, Liguo Song, Guangming Xie and minyi xu Dalian Maritime University
10:00-10:15 #550, TRIBOELECTRIC NANOGENERATOR BASED ON SILVER NANOWIRES Fengru Fan Xiamen University
97 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Session IVd: 08:30 - 10:30 Nature-inspired energy conversion and harvesting: from fundamentals to applicaitons Venue: Conference Room No.07 (3F) Chair: Haisheng SAN 08:30-09:00 KEYNOTE SPEAKER: NEMS-ENABLED INNOVATIONS AT INTERFACES FOR WATER-ENERGY NEXUS Zuankai WANG City University of Hong Kong
09:00-09:15 #92, A SELF POWERED ANGLE SENSOR AT NANORADIAN RESOLUTION FOR ROBOTIC ARMS AND PERSONALIZED MEDICARE Ziming Wang, Jie An, Jinhui Nie, Jianjun Luo, Jiajia Shao, Tao Jiang, Baodong Chen, Wei Tang and Zhong Lin Wang Beijing Institute of Nanoenergy and Nanosystems, CAS
09:15-09:30 #101, APPLICATION AND PROSPECT OF MEMS TECHNOLOGY TO GEOPHYSICS Heting Hong, Lvchao Ni and Hongchun Sun Northeastern University
09:30-09:45 #376, ULTRASOUND-MEDIATED TOUGH TISSUE ADHESIVES USING NANOPARTICLES Shuaibing Jiang, Zhenwei Ma, Tony Jin, Edmond Lam, Audrey Moores and Jianyu Li McGill University
09:45-10:00 #443, DESIGN AND ANALYSIS OF MEMS BIAXIAL COUPLED RESONANCE ACCELEROMETER Huimin Zhang, Yating Zhang and Wei Zhang Peking University
10:00-10:15 #532, DEVELOPMENT OF ANNULAR-SHAPED BERNOULLI GRIPPER FOR CONTACTLESS GRIPPING OF LARGE-SIZE SILICON WAFER Shihang Wang, Yancheng Wang, Deqing Mei and Songqiao Dai Zhejiang University
10:15-10:30 #600, DIELECTROPHORETIC MICRODEVICE WITH PLANAR ELECTRODES FOR CONCENTRATING MICROPARTICLES Salini Krishnan, Alia Mohammmed Shaker Alblooshi, Fadi Alnaimat and Bobby Mathew United Arab Emirates University
10:30 - 11:00 Coffee Break
98 April 25-29 , 2021 Xiamen, China
Session IVe: 11:00 - 12:15 MEMS/NEMS-VI
Venue: Multi-function Hall (1F) Chair: Songyue CHEN 11:00-11:30 KEYNOTE SPEAKER: SEMICONDUCTOR BIOSENSORS FOR GLOBAL HEALTH IN THE ERA OF AIOT Yikuen LEE Hong Kong University of Science and Technology
11:30-11:45 #365, PREPARATION AND CHARACTERIZATION OF NI-AAO COMPOSITE SCAFFOLD GETTER WITH INDUCTION HEATING Lujiang Liu, Lingyun Wang, Zhenxiang Bu, Kuixi Wu, Wenlong Lv and Dandan Gu Department of Mechanical and Electrical Engineering, Xiamen University
11:45-12:00 #396,FREQUENCY OUTPUT, A MULTI-MODES VACUUM GAUGE WITH HIGHLY OUTPUT LINEARITY BASED ON ELECTROSTATIC NONLINEARITY Chengxiang Wang, Yunbing Kuang, Yulie Wu, Zhanqiang Hou, Yongmeng Zhang, Xuezhong Wu and Dingbang Xiao National University of Defense Technology
12:00-12:15 #646,HIGH-RESOLUTION NONCONTACT ELECTROSTATIC VOLTAGE METER BASED ON MICROSENSOR CHIP Xiaolong Wen, Pengfei Yang, Bo Zhang and Chunrong Peng University of Science and Technology Beijing
Session IVf: 11:00 - 12:15 Soft&Flexibe Devices and Applications-IV
Venue: Conference Room No.01 (1F) Chair: Shutao WANG 11:00-11:30 KEYNOTE SPEAKER: BIO-INSPIRED IONIC SKIN FOR THERANOSTICS Peiyi WU Donghua University
11:30-11:45 #28, SPONTANEOUS BREATH ANALYSIS AND HEALTHCARE ASSESSMENT ENABLED BY TRIBOELECTRIC NANOGENERATORV Yuanjie Su, Mingliang Yao, Guangzhong Xie, Huiling Tai and Yadong Jiang University of Electronic Science and Technology of China
11:45-12:00 #51, ULTRA-FLEXIBLE AND HIGHLY TRANSPARENT HYDROGEL-BASED TRIBOELECTRIC NANOGENERATOR FOR PHYSIOLOGICAL SIGNAL MONITORING
99 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Jiahao Yu, Zhensheng Chen, Haozhe Zeng, Bowen Ji, Zixuan Wu, Jin Wu, Yunjia Li, Jianbing Xie, Honglong Chang and Kai Tao Northwestern Polytechnical University
12:00-12:15 #90, A FLEXIBLE TACTILE SENSOR FOR THREE-DIMENSIONAL FORCE DETECTION BASED ON PIEZOELECTRIC SENSING Yunyun Luo, Libo Zhao, Guoxi Luo, Zhikang Li, Ping Yang, Qiankun Zhang, Qijing Lin, Zhuangde Jiang, Hongyan Wang and Yongshun Wu Xi’an Jiaotong University
Invited Session IVb: 11:00 - 13:00 Multidisciplinary Frontier: Functional Micro-nano Structures, Techniques and Applications Venue: Conference Room No.04 (2F) Chair: Yang CAO 11:00-11:20 NANOFORESTS AND NANOFOREST-BASED MICRO SENSORS Haiyang MAO Institute of Microelectronics of Chinese Academy of Sciences
11:20-11:40 BIOINSPIRED CATALYTIC MATERIALS BASED ON METAL-SULFUR CLUSTERS Jian LIU Qingdao University of Science and Technology
11:40-12:00 MASS TRANSPORT IN ATOMIC SCALE CONFINEMENTS Sheng HU Xiamen University
12:00-12:20 QUALITY HETEROSTRUCTURE FROM TWO-DIMENSIONAL MATERIALS Yang CAO Xiamen University
12:20-12:40 FIBER INTEGRATED MULTIFUNCTIONAL SENSING AND SUPER-RESOLUTION IMAGING Qing YANG Zhejiang University
12:40-13:00 THE APPLICATIONS OF VANADIUM DIOXIDE THIN FILMS ON MULTI-FUNCTIONAL SENSOR Ming GAO University of Electronic Science and Technology of China
100 April 25-29 , 2021 Xiamen, China
Session IVg: 11:00 - 12:15 Soft&Flexibe Devices and Applications-V
Venue: Conference Room No.05 (2F) Chair: Guozhen LIU 11:00-11:30 KEYNOTE SPEAKER: THE REINVENTION OF SILK Hu TAO Shanghai Institute of Microsystem and Information Technology
11:30-11:45 #115, A THREE-ELECTRODE MULTI-MODULE SENSOR FOR ACCURATE BODILY-KINESTHETIC MONITORING Haobin Wang, Yu Song, Hang Guo, Ji Wan, Liming Miao, Chen Xu, Zhongyang Ren, Xuexian Chen and Haixia Zhang Peking University
11:45-12:00 #491, A MULTIFUNCTIONAL SOFT ROBOTIC FINGER BASED ON NANO TEMPERATURE-PRESSURE SENSOR FOR MATERIAL RECOGNITION Xiaoshuang Zhang, Wentuo Yang, Cheng Zhou, Xueyou Sun, Mengying Xie and Xuexin Duan Tianjin University
12:00-12:15 #598, READOUT OF NEURAL ACTIVITY IN MAMMALIAN PERIPHERAL OLFACTORY SYSTEM VIA MICROELECTRODE ARRAYS Liujing Zhuang, Yan Duan, Suhao Wang, Qunchen Yuan, Jizhou Song and Ping Wang Zhejiang University
Session IVh: 11:00 - 12:00 Micro&Nanotechnologies for biomedicine
Conference Room No.07 (3F) Chair: Guoan TAI 11:00-11:30 KEYNOTE SPEAKER: BIOMOLECULAR NEEDLING SYSTEM FOR MEDICALS Beomjoon KIM University of Tokyo
11:30-11:45 #497, TENG ENHANCED AND SELF-POWERED SENSORS FOR BIOMEDICAL SIGNAL DETECTION Jieyu Dai and Zhou Li Center on Nanoenergy Research, College of Chemistry and Chemical Engineering, Guangxi University
11:45-12:00 #513, PHYSICAL FORCES INFLUENCE THE SELF-ORGANIZATION OF T HE FORMATION OF LEADER CELLS DURING COLLECTIVE CELL MIGRATION
101 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Mengyun Pan, Yongliang Yang and Lianqing Liu Shenyang Institute of Automation, CAS
12:00 - 14:00 Fairwell Lunch & Adjourn of Conference
Location: Qinye Canteen 3rd Floor
14:00 Lab Tour (Optional)
102 April 25-29 , 2021 Xiamen, China
Keynote Speaker
High Accuracy Resonant Accelerometers Based on QMEMS
Yulong Zhao
State Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, China;
E-mail :[email protected]
ABSTRACT It is well known that there are many kinds of micro accelerometers, such as capacitive sensors, piezoresistive sensors, resonant sensors and so on. Compared with capacitive or piezoresistive sensors, resonant accelerometers based on QMEMS have the ability to achieve better performances such as high accuracy, high resolution and low power consumption. Benefiting from digital output signals, resonant accelerometers can be easily interfaced with digital electronics, highly compatible with digital instrumentation and data-processing units on account of the frequency output. This talk will introduce some new research activities on high accuracy resonant accelerometers based on QMEMS such as working principle, some novel optimization of structural design and fabrication. We also focus on integrated packaging and temperature compensation technology, which makes significantimpact on the performance of resonant accelerometers. By improvements of structures and packaging processes, tests show that the QMEMS accelerometers obtain the characteristic of higher stability and reliability. The resolution of the designed sensor is less than 1µg and bias stability is improved to 5µg. this sensor can be used in the fields of high accuracy micro inertial measurement unit (MIMU) system.
BIOGRAPHY Yulong Zhao is currently a professor of Xi’an Jiaotong University, Xi’an, China. Dr. Zhao received his Ph.D. degree on high temperature MEMS pressure sensor in Xi’an Jiaotong University. His main research fields include MEMS sensors, biosensors, precise instrument and micro/nano manufacturing technology. and he has published about 300 scientific articles including 160 SCI indexed papers. He also owns more than 100 China invention patents. Those papers and patents are mainly about MEMS sensors and biosensors on piezoresistive and resonance theory, or based on new materials. It also includes MEMS actuators, PCR technology and femtosecond micro machining. Dr. Zhao is a Doctoral Advisor & the Vice Director of State Key Laboratory for Manufacturing Systems Engineering. The rewards that Prof. Zhao received include: National Nature Science Foundation for Distinguished Young Scholars, National Talents Project, National High-level Personnel of Special Support Program (Scientific and Technological Innovation Leader), Tengfei Scholars Program of Xi’an Jiaotong University, Program for New Century Excellent Talents in University.
103 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Bio-inspired multiscale adhesive interfacial materials
Shutao Wang
CAS Key Laboratory of Bio-inspired Materials and Interfacial Science, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, P. R. China E-mail: [email protected]
ABSTRACT Bio-interfacial adhesion has become a frontier hot in interfacial chemistry. It is not only helpful for us to understand the mystery of living systems, but also important for the development of new functional interfacial materials and related technologies. Leaning from nature, our group has recently investigated several special adhesion phenomena on biointerfaces and developed a series of bio-inspired adhesive interfacial materials. 1) We discovered the superdurability of bird feathers against tears originated from their cascaded slide-lock system, not from the “hook–groove system” proposed centuries ago; Inspired by the arrester system of dragonfly, we developed a new mechanical interlocker with a nylon pestle instead of the traditional hook, which breaks the limitation of traditional Velcro with undesirable deformation, breaking and noise. 2) Inspired by immune system, we proposed the concept of synergistic effect of biointerface adhesion based on structural matching and molecular recognition for detecting circulating tumor cell (CTC). We have developed a series of CTC detecting biochips by chemical etching, vapor deposition, electrochemical deposition, template replication, electrospinning and others; We also developed an emulsion interfacial polymerization strategy to fabricate bio-inspired immunomagnetic bead (spanning from Janus to porous) with controllable topology and surface chemistry. 3) We disclosed the microstructure of wound blood scab and developed a series of wound dressing, greatly promoting wound healing.
BIOGRAPHY Shutao WANG, doctoral supervisor, project leader, was selected into the National Outstanding Youth, youth top talents. He mainly engaged in the research of bionic multi-scale adhesion controllable interface materials, such as anti-adhesive interface materials, efficient bio-identification adhesion interfaces and devices, and early diagnosis of diseases. He firstly proposed the biomarker adhesion effect of "structural matching and molecular recognition" which is used for cancer detection. It is 1000 times more sensitive than the traditional cell separation method, so it was nominated for the 2010 World Science and Technology Award. He has won major scientific advances in China in 2006, outstanding doctoral thesis of the Chinese Academy of Sciences in 2008 (50 papers), National Outstanding Doctoral Dissertation Nomination Award in 2009, and China Chemical Society Youth Chemistry Award in 2013. He has published over 140 SCI papers with H-index of 39, including Angew. Chem.(9), Adv. Mater.(20), JACS (2), Nat. Protocol.(1), which have been cited over 4200times. He has 8 patents authorized by China and 2 by USA. He has published Invitation reviews and 3 English articles on well-known international journals such as Chemical Review, Chemical Society Review, Annual Review Nano Research, Account of Chemical Research, Journal of Photochemistry and Photobiology C: Chemistry Review, MRS Bulletin. His researching results have been reported in highlight in Nature, Nature medicine, Science Daily, Chem&Eng News, Materials Views China, Material Today, Lab Chipfor many times. He has accepted interview of “The Sceptical Chemist” of Nature Chemistry, “People Watch” of Asia-Pacific Biothech News and China Science Daily.
104 April 25-29 , 2021 Xiamen, China
Nanokits for Single Cell Analysis
Dechen Jiang
State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing, 210092, China
E-mail : [email protected] Website : group or personal website if applicable
ABSTRACT Single cell analysis can obtain more accurate and comprehensive information reflecting the physiological state and process of cells, which is of great significance for life science research and early diagnosis of major diseases. At present, the main analysis strategy is to design specific recognition molecules (probes) to realize the detection of intracellular biomolecules. However, due to the differences in the uptake of probes by different cells, it is difficult to accurately regulate the content and distribution of these recognition probes in cells. Consequently, this approach could only provide relatively quantitative results In the past six years, our laboratory has developed a single-cell nanokit strategy that addresses the challenging as mentioned above. This talk will focus on the introduction of nanokit, and the application to determine the activity of biomolecules in a single cell, and even in a single lysosome. Compared with the current methods, the nanokit has adapted features of the well-established biological kits, and thus, could provide a specific device to characterize the individual cell activity.
BIOGRAPHY Dr. Dechen Jiang is currently a professor in State Key Laboratory of Analytical Chemistry for Life, School of Chemistry and Chemical Engineering at Nanjing University. He obtained his B.S. M.S and Ph.D. degrees from Nanjing University (2000), Fudan University (2003) and Case Western Reserve University (2008). After three years postdoctoral training at UNC-Chapel Hill, Dr. Jiang joined Nanjing University to start his independent research. Dr. Jiang has published over 50 research publications as the corresponding author, such as PNAS, JACS, Angew Chem and Anal. Chem. His research focuses on the development of cutting-edge technology and instrumental for the characterization of cellular activity at single cells. He has received multiple awards, such as the NSFC Award for Distinguished Young Scientist, Changjiang Young Professor of the Ministry of Education, Young Innovation Award for Analytical Instrument (China Instrument and Control Society).
105 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Design of Sub-nanometre Pores for Precise Separation
Jian Jin
Chemical Engineering and Materials Science, Soochow University, Suzhou, 215123, P. R. China
E-mail : [email protected] Website: http://www.film-sinano.com/
ABSTRACT With the rapid development of modern industry, the development of materials and technologies for energy- efficient precise separation, and the realization of precise separation of ions and molecules will have a revolutionary impact on energy, water, chemical, pharmaceutical and other fields, which is our urgent need and goal. Membrane separation has the advantages of low energy consumption, mild separation conditions and easy operation. It has been widely used in various fields of industrial production and daily life. However, the preparation of nanoporous membranes with highly uniform pore size and accurate separation of ions or small molecules are still facing great challenges. Nanofiltration membrane prepared by interfacial polymerization is the main form of commercial nanoporous membrane, which has great potential in the application of water treatment, food, medicine, metallurgy and so on. This talk will introduce our recent progress on developing nanofiltration membranes with high flux and high rejection for precise separation of ions and small molecules. Our strategies include: (1) design of new porous support membrane based on one dimensional nanowires network; (2) increasing the effective filtration area of the selective layer by using nanoparticles and salt crystals as sacrificing template; (3) regulation of the reaction process of interfacial polymerization via a dynamic, self-assembled network of surfactants monolyer. As a result, we achieved polyamide nanofiltration membranes with highly uniform sub-nanometre pores for sub-1 Å precision separation.
BIOGRAPHY Jian Jin is currently a Professor at Chemical Engineering and Materials Science, Soochow University. Dr. Jin received her Ph.D. degree in Institute of Chemistry from Jilin University. She was a postdoctoral fellow in Tokyo University from 2001 to 2003. From 2004 to 2009, she worked as a senior researcher in National Institute for Materials Science, Japan. In 2009, she joined Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences as a group leader. She moved to Soochow University as a distinguished professor in 2017. Her research interests are designing porous materials and membranes for ion/molecule separation, wastewater purification, gas separation, and the applications in other fields. She has published more than 130 peer-reviewed scientific publications with over 9600 citations and h-index 52. She applied 40 invention patents and received 22 licensed patents (include 2 US patents). Dr. Jin was awarded “Distinguished Yong Scholar Award” from National Natural Science Foundation of China and “Hundred Talents Program” of Chinese Academy of Sciences. She was honored as the Leading Innovative Talent Scholars of Young and Middle Age in the Ministry of Science and Technology of People´s Republic of China and elected as a member in the Ten Thousand-Talent Program in China. She won the “Zhu Li Yue Hua” Excellent Supervisor Award. As an outstanding woman scholar, she was awarded as “National Woman Pacesetter”. In 2018, she won the first prize of Jiangsu Science and Technology Award.
106 April 25-29 , 2021 Xiamen, China
NEMS-enabled Innovations at Interfaces for Water- Energy Nexus
Zuankai Wang
Department of Mechanical Engineering, City University of Hong Kong, Hong Kong, 999077, P.R. China
E-mail :[email protected] Website : https://wangzuankai.wixsite.com/wanglab
ABSTRACT Water is the origin of life and energy. In spite of its ubiquity and seemingly simplicity, the water is probably the least understood matter in the world. The phase transition, transport, and manipulation of water, normally spanning different time and length scales, constitute the basic paradigm of numerous biological systems and industrial processes such as thermal management, energy, agriculture, and healthcare. Over the past decade, the advances in NEMS manufacturing and visualization provide new dimensions in our fundamental and controlling of interfacial and transport phenomena of water, especially on textured surfaces and under complicated working environments involving varying temperatures. In this talk, I will discuss recent innovations enabled by NEMS at the interfaces to address one of the most important challenges facing us today, i.e., water-energy nexus. In particular, I will highlight how the rational design and control of topological structures enables us to fundamentally change the triple-phase interaction and achieve the preferred functionalities. Examples include how to efficiently collect water from air, how to use one droplet to cool down hot surfaces by several hundreds of degrees, and how to use one droplet to light up 100 LEDs.
BIOGRAPHY Dr. Zuankai Wang is a full professor in the Department of Mechanical Engineering and Associate Dean in the College of Engineering at the City University of Hong Kong. He earned his B.S. degree in Mechanical Engineering from Jilin University in 2000 and Master degree in Microelectronics from Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, in 2003, and Ph. D. degree in Mechanical Engineering at Rensselaer Polytechnic Institute in 2008. After one-year postdoc training in Biomedical Engineering at Columbia University, he joined in the City University of Hong Kong in September 2009 as an assistant professor.
Dr. Wang is the founding member of Young Academy of Science of Hong Kong, fellow of the International Society of Bionic Engineering and Changjiang Chair Professor awarded by Ministry of Education of China. He has won many awards including the 2020 Xplorer Prize, World Cultural Council Special Recognition Award, Outstanding Youth Award from International Society of Bionic Engineering, Outstanding Research Award and President’s Lectureship at the City University of Hong Kong. The Ph.D. students he supervised have won a number of prestigious awards including MRS Graduate Student Gold Award, MRS Graduate Student Silver Award, Hiwin Doctoral Dissertation Silver Award, Hong Kong Young Scientist Award (2015, 2019).
107 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Semiconductor Biosensors for Global Health in the Era of AIoT
Prof. Yi-Kuen Lee Department of Mechanical and Aerospace Engineering Department of Chemical and Biomolecular Engineering Nanosystem Fabrication Facility Hong Kong Center for Construction Robotics Nanosystem Fabrication Facility Hong Kong University of Science and Technology Clear Water Bay, Kowloon, Hong Kong SAR http://meyklee.people.ust.hk/
ABSTRACT Semiconductor technologies, especially silicon-based micro/nano CMOS processes, have been making a tremendous impact on human society in the past 60 years. In recent years, Field Effect Transistors (FET) biosensors, e.g., Ion Sensitive FET (ISFET), have been developed for the detection of various ions and biomolecules for biomedical applications. One of the most prominent applications is CMOS ISFET-based DNA sequencing, such as the Ion Torrent Ion Proton II chip with 660 million ISFET sensors. With the synergy of a fundamental principle of electrochemistry, generalized dimensional analysis from mechanics, analog IC design technique, and fabricated devices’ experimental data, we propose a generalized gm/Id theory for the design of FET-based biosensors for detection of ions, DNA, and cells using commercial CMOS/CMOS MEMS foundry processes (TSMC 0.18m CMOS process and InvenSense 0.18 m CMOS MEMS process). The nonlinear coupling behavior of electrochemical-FET biosensors can be described as the sensitivity as a function of critical normalized parameters such as gm/Id, the normalized drain current (Inversion Coefficient), the electrochemical reference voltage, and various noises. A series of CMOS biosensors for detection of ions, DNA, and bacteria with excellent performance. In addition, we are working on developing a new CMOS Bio-MEMS platform for integration with micro PCR/RT-PCR, the on-chip microelectronic circuit, microfluidics and edge-AI using heterogeneous integration of commercial semiconductor foundry processes, in-house-designed fabrication processes at HKUST NFF. This will be promising in the era of AIoT for detecting various diseases, such as infectious diseases (COVID-19 and emerging infectious diseases), cancer diagnosis, etc.
BIOGRAPHY Yi-Kuen Lee receive his BS degree with honor at National Taiwan University (NTU) in 1992. He received his MS degree under the supervision of late Prof Yih-Hsing Pao (member of US NAE and Academia Sinica) in the Institute of Applied Mechanics, NTU in 1995. He went to US and obtained Ph.D. degree in Mechanical Engineering with Major in MEMS under the guidance of Prof Chih-Ming Ho (member of US NAE and Academia Sinica) at UCLA in 2001. He was an Assistant Professor from 2001 to 2007 at HKUST. He received substantiation and was promoted to Associate Professor in 2007. He was a Visiting Associate at Caltech in 2011. He has published two book chapters, more than 120 refereed journal and international conference papers. His current research topics include microfluidics for enumeration of Circulation Tumor Cells (CTCs) for cancer diagnostics, microchips for DNA transfection, micro/nano heat transfer, micro/nano electrophoresis for large DNA molecules, MEMS sensors for environmental monitoring and energy-efficiency building. He is the Associate Editor, HKIE Transaction. He is the President of Hong Kong Society of Theoretical and Applied Mechanics since 2014. He is the co-founder of the annual Nano/Micro Engineered and Molecular Systems (IEEE NEMS) conferences since 2006; the co-founder of International Contest of Application in Nano-micro Technology (ICAN) Association; Technical Program Committee (TPC) member of IEEE MEMS 2007, Kobe, Japan; TPC member of IEEE Nano 2007; TPC member of APCOT 2008, 2010, 2012, 2014; TPC member of IEEE NEMS 2009, 2010, 2011 & 2012, IEEE Transducers 2009 & 2011, 2013, 2015. He is also the Chair for the 5th International Workshop on Innovation and Commercialization of Micro & Nano Technologies (ICMAN 2011), Shenzhen, 5-8 Nov 2011. He is the Associate Editor of Microfluidics and Nanofluidics, Nature Springer. He chaired APCOT 2018 (Asia-Pacific Conference of Transducers and Micro-Nano Technology), Hong Kong in 2018. He also serves the Editorial Board of Micro/Nanotechnology Journal in China, and the Bio-Design and Manufacturing (BDM), Springer.
108 April 25-29 , 2021 Xiamen, China
Bio‐Inspired Ionic Skin for Theranostics
Peiyi Wu
State Key Laboratory for Modification of Chemical Fibers and Polymer Materials， College of Chemistry, Chemical Engineering and Biotechnology, Donghua University
E-mail : wupeiyi@ dhu.edu.cn Website : www.peiyiwu.cn
ABSTRACT
The first‐generation ionic skins demonstrate great advantages in the tunable mechanical properties, high transparency, ionic conductivities, and multiple sensory capacities. However, little attention is paid to the interfacial interactions among the ambient environment, natural organisms, and the artificial skins. In particularly, current ionic skins based on traditional synthetic hydrogels suffer from dehydration in vitro and lack of substance communication channels with biological tissues. Herein, this work develops a bio‐inspired hydrogel to address these key challenges. The hydrogel is designed with natural moisturizing factors to lock water, biomineral ions to transmit signals, and biomimetic gradient channels to transport substances from non‐living to living interfaces. It is stable in ambient condition, adhesive and hydrated on mammal skins, and capable of non‐invasive point‐to‐point theranostics. This theranostic ionic skin realizes sensitive detection, enhanced treatment efficacy, and reduced side effects toward major diseases in vitro. It will shed light on the hydrogel bioelectronics with excellent biocompatibility, bio‐protection, and bio‐integration for human–machine interfaces and intelligent theranostics.
BIOGRAPHY Dr. Peiyi Wu is currently a Professor and Dean at College of Chemistry, Chemical Engineering and Biotechnology, Donghua University. Dr. Wu received his Ph.D. degree in Chemistry from University Essen, Germany. He was a Professor(2000-2017) and dean(2005-2012) of the Department of Macromolecular Science, Fudan University. Prof. Wu is active in the fields of two dimensional correlation spectroscopy and smart materials. He is corresponding-author of 300 peer-reviewed scientific publications including Science Advances, Nature Communications and Advanced Materials, etc.. Professor Wu is a distinguished young scholar of the national natural science foundation of China(2004) and fellow of the royal society of chemistry
109 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
The Reinvention of silk
Hu TAO
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, P.R. China
E-mail : [email protected]
ABSTRACT A paradigm shift for implantable medical devices lies at the confluence between regenerative medicine, where materials remodel and integrate in the biological milieu, and technology, through the use of recently developed material platforms based on biomaterials and bioresorbable technologies such as optics and electronics. The union of materials and technology in this context enables a class of biomedical devices that can be optically or electronically functional and yet harmlessly degrade once their use is complete. The talk will discuss the use of silk protein as a sustainable material in transient optics and photonics, electronics and optoelectronic applications. The favorable properties of the material certainly make a favorable case for the use of silk, yet serve as a broad inspiration to further develop biological foundries for both the synthesis and processing of Nature’s materials for high technological applications.
BIOGRAPHY Hu TAO received his Ph.D. in Mechanical Engineering with the Best Dissertation Award from Boston University, in 2010. His research interests have mainly focused on terahertz metamaterials using MEMS technology. He is currently a Professor at Shanghai Institute of Microsystem and Information Technology, CAS and his research interests focus on green nanotechnology, micro/nano- technology enhanced novel electronic and photonic devices for biomedical applications. Dr. Tao has published over 70 papers in peer-reviewed scientific journals including Science, Nature, Nature Photonics, Nature Nanotechnology, Nature Communications, PNAS, Advanced Materials and Physical Review Letters.
110 April 25-29 , 2021 Xiamen, China
Biomolecular Needling System for Medicals
Beomjoon Kim
Institute of Industrial Science, The University of Tokyo, Japan
E-mail : [email protected] Website : http://www.kimlab.iis.u-tokyo.ac.jp/
ABSTRACT Based on nano/micro components systems for the fabrication of novel nano devices, we have very successfully investigated to develop various micro sensors for biological applications, health care as well as environmental monitoring. Here, new transdermal drug delivery system by using dissoluble micro needle patch will be introduced. Recently, in the transdermal drug delivery methods, the microneedle-mediated drug delivery system (DDS) has been developed to replace the hypodermic injection-mediated DDS, to provide painless self- administration of biological drug with patient friendly manner. Especially, dissolving microneedles, which deliver the target drugs as the drug-loaded microneedle dissolves into the skin, have been spotlighted recently. We investigate a novel fabrication method to achieve the user-friendliest, low-cost, and safest way for dissoluble microneedle patches with vaccine delivery, several medical treatments, and even glucose sensing. We have developed a porous microneedle patch for monitoring glucose levels using a paper sensor. The device painlessly monitors fluid in the skin within seconds. Anyone can use the disposable patch without training, making it highly practical. Additionally, fabrication is easy, low cost, and the glucose sensor can be swapped for other paper-based sensors that monitor other important biomarkers. Furthermore, to monitor the biological information through the skin continuously, a novel microneedles’ structure is proposed and investigated by combining flexible "sponge-like" porous PDMS matrix and the coating by dissoluble hyaluronic acid (HA).
BIOGRAPHY Beomjoon Kim is currently a full professor of Institute of Industrial Science, the University of Tokyo, Japan (Dept. of Precision Engineering, The Univ. of Tokyo) and a director of LIMMS/CNRS-IIS UMI 2820. He received the B.S. degree from Seoul National University, Dept. of Mechanical Design and Production Engineering, Seoul, Korea, in 1993, and received M.Eng., and Ph.D. in Department of Precision Engineering, the University of Tokyo, Tokyo, Japan, in 1995 and 1998, respectively. Recently he is also in charge as a chair of corporate sponsored research division of “Virological Medicine”, at I.I.S., the University of Tokyo, and active as executive advisor of BNS Medicals, Co., Ltd., Japan.
He was a CNRS Associate Researcher for Microsensors, Nano-instruments for Nanotechnology in Centre National de la Recherché Scientifique at Besancon, France at 1998. He worked also in research orientation NanoLink, MESA+ Research Institute, University of Twente in the Netherlands, to September 2000. Since September 2000, he has been an Associate Professor of Institute of Industrial Science, the University of Tokyo until April 2014. He visited Institute of Micro-engineering, EPFL (group of Prof. Juergen Brugger), Swiss, Dept. Chemical Eng. (group of Prof. D. Schwartz), The University of Washington, USA in 2005, Dept. Chemistry, (group of Prof. Y. Chen) École Normale Supérieure (ENS) Paris, in 2010, and Dept. of Medicine, Harvard Medical School, Harvard-MIT HST, Cambridge, USA in 2013 as well for collaboration about micro/nano bio- engineering.
He investigates several aspects of bio-sensors components to accomplish portable Point-of-Care diagnostic devices, which are disposal, user-friendly, low-cost, and highly sensitive. Moreover, he is interested to develop self-powered, energy harvesting micro sensors as well as smart monitoring system with network like “internet of things”. Recently, main research topic is focused to study on new transdermal drug delivery system by using dissoluble micro needle patch. He has published 103 peer reviewed Journal papers, 200 international conference papers, 189 domestic conference papers as well as several patents, books publications so far.
111 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
POSTER SESSION
Day 1 - Monday, 26 April
Poster Session I 16:30 - 18:30 (Accept Posters from No.4 to No.320 except 256 & 314)
#151—SELF-DRIVEN PHOTOELECTROCHEMICAL UV-VISIBLE PHOTODETECTORS USING ZRO2@TIO2 CORE-SHELL NANOROD ARRAYS MODIFIED WITH SINGLE-WALLED CARBON NANOTUBES Zhen Wang, Renrong Zheng, Na Wang and Haisheng San Xiamen University
#155—ELECTRONIC SKIN BASED ON ELECTROSPUN PVDF NANOFIBERS FOR SLIPPING DETECTION Lingke Yu, Wenchang Tu, Shanshan You, Lingling Liu and Daoheng Sun Xiamen University
#158—A FLEXIBLE HYBRIDIZED ELECTROMAGNETIC-TRIBOELECTRIC NANOGENERATOR AND ITS APPLICATION FOR 3D TRAJECTORY SENSING Ji Wan, Haobin Wang, Liming Miao, Hang Guo, Chen Xu and Hai Xia (Alice) Zhang Peking University
#188—A SIMPLE BANDWIDTH BROADENING METHOD OF TERAHERTZ METAMATERIAL ABSORBER BY PARTIALLY REMOVING THE DIELECTRIC LAYER Jia Xu, Jiahao Miao, Yi Liu, Yuan Tian and Xiaomei Yu Peking University,
#204—TOUGH SELF-HEALING POLYMER ENCAPSULATED STRETCHABLE CONDUCTIVE FIBERS FOR SYSTEMATICAL INTEGRATION OF WEARABLE ELECTRONICS Chaebeen Kwon and Taeyoon Lee Yonsei University
#216—MINIATURIZED PIEZORESISTIVE SENSORS WITH WIDE WORKING RANGE FOR WEARABLE HUMAN MACHINE INTERFACES Hong Xu, Ling Duan and Libo Gao Xidian University
#227—WATER DROP DETECTION CONTAINED IN LUBRICANT OIL FOR
112 April 25-29 , 2021 Xiamen, China
SUBMERSIBLE PUMP FAULT DIAGNOSIS Fumikazu Mizutani, Michio Shimimura, Akinori Mori, Yoshikazu Yoshida, Yoshihiro Hosokawa, Tadao Matsunaga and Sang-Seok Lee Tottori University, Sakuragawa Pump MFG Co., Ltd
#4—LATERAL CHARACTERISTIC CALIBRATION OF AN ATOMIC FORCE MICROSCOPE USING A CR ATOMIC DEPOSITION GRATING Junjie Wu, Xiaoyu Cai, Yuan Li, Yunxia Fu and Jiasi Wei Shanghai Institute of Measurement and Testing Technology
#14—A MINIATURIZED PM2.5 CONCENTRATION MONITORING SYSTEM BASED ON QCM SENSOR AND OPTIMIZED STRUCTURE VIRTUAL IMPACTOR Yong Wang, Dongyang Chen, Qian Zhang, Yinshen Wang and Jin Xie Zhejiang University
#20—PREPARATION OF POROUS SNO2 AND ITS ETHANOL DETECTION PERFORMANCE IN MEMS STRUCTURE GAS SENSOR Xiao Zhang GRINM
#37—HIGH ELECTROCHEMICAL ACTIVITY OF OXYGEN-DOPED GRAPHENE SHEETS EMBEDDED CARBON FILM Yuanyuan Cao, Kaikai Sun, Haohua Zhong and Dongfeng Diao Shenzhen University
#38—FAST-SCAN MOEMS MIRROR FOR HD LASER PROJECTION APPLICATIONS Huijun Yu, Wenjiang Shen and Peng Zhou School of Nano-Tech and Nano-Bionics, University of Science and Technology of China
#43—MODELING AND OPTIMIZATION OF VLF PIEZOELECTRIC ANTENNA TOWARDS LOWER FREQUENCY Huiliang Liu, Yao Chu, Weiguo Hou, Yinqiao Li, Yuan Yao and Yaxing Cai China Academy of Space Technology
#55—ELECTRICALLY INDUCED WIRE-FORMING 3D PRINTING TECHNOLOGY OF FLEXIBLE GALINSTAN Shane Wang Beihang University
#61—AMORPHOUS CARBON FILM BASED WEAK PRESSURE SENSOR WITH ULTRATHIN SENSITIVE STRUCTURE Qi Zhang and Yulong Zhao School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
#62—BACTERIAL OUTER MEMBRANE VESICLES PRESENTING PROGRAMMED DEATH 1 FOR IMPROVED CANCER IMMUNOTHERAPY VIA IMMUNE ACTIVATION AND CHECKPOINT INHIBITION Yao Li Xiamen University
#63—MICRO-FABRICATED ALKALI VAPOR CELLS FOR ATOMIC SPIN GYROSCOPE
113 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
STUDY Yao Chen, mingzhi Yu, Yintao Ma, Guoxi Luo, Zhuangde Jiang, Yu Bai and Libo Zhao Xi’an Jiaotong University
#66—DOPAMINE MODIFIED NANOPORE FOR ULTRA-TRACE LEVEL DETECTION Weijun Li and Xu Hou Xiamen University
#67—NANO/MICRO WEARABLE PHOTO-SENSOR SYSTEM BASED ON NOVEL CARBON FILM Xi zhang and Dongfeng Diao Shenzhen University
#68—ELECTRON-INDUCED PERPENDICULAR GRAPHENE SHEETS EMBEDDED POROUS CARBON FILM FOR FLEXIBLE TOUCH SENSORS Sicheng Chen and Lei Yang Xi’an Jiaotong University
#69—GRAPHENE OXIDE NANOSHEET ASSISTED POROUS CHITOSAN SPONGE FOR HEMOSTATIC APPLICATIONS Yuanyuan YANG and Yajing Shen City University of Hong Kong
#88—HIGH-PERFORMANCE FLEXIBLE SUPERCAPACITORS BASED ON NITROGEN- DOPED GRAPHENE FIBER ELECTRODES Feng Han, Weixuan Jing, Bian Tian, Qijing Lin, Chenying Wang, Libo Zhao, Ping Yang and Zhuangde Jiang Xi’an Jiaotong University
#89—DESIGN AND SIMULATION OF A WIDE-BANDWIDTH CMUTS ARRAY WITH DUAL- MIXED RADII AND MULTI OPERATING MODES Zichen Liu, Libo Zhao, Yihe Zhao, Jie Li, Zhikang Li, Yu Bai, Ping Yang, Qijing Lin, Zixuan Li, Jiawei Yuan and Zhuangde Jiang Xi’an Jiaotong University
#97—TRANSPARENT, ANTI-FREEZING HYDROGELS FOR ULTRASENSITIVE TEMPERATURE AND STRAIN SENSOR BASED ON A THIN-FILM STRUCTURE Zixuan Wu, Haojun Ding, Yaoming Wei, Kai Tao and Jin Wu Sun Yat-Sen University
#100—UNIFORMLY ARRAYED CARBON NANOFIBERS DOWN TO SEVERAL NANOMETERS Jufeng Deng, Chong Liu and Madou Marc Dalian University of Technology
#113—SELF-POWERED TRANSPARENT STRETCHABLE 3D MOTION SENSOR Hang Guo, Haobin Wang, Zehua Xiang, Chen Xu, Wan Ji, Liming Miao, Jiayin Li, Mengdi Han and Haixia Zhang
114 April 25-29 , 2021 Xiamen, China
Peking University
#118—ENHANCING SENSITIVITY USING ELECTROSTATIC SPRING IN COUPLING MODE-LOCALIZED MEMS ACCELEROMETER Zheng Wang, XingYin Xiong, KunFeng Wang, WuHao Yang, ZhiTian Li and XuDong Zou The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute Chinese Academy of Sciences
#119—SELF-POWERED DELTA-PARALLEL-BASED INTERFACE FOR DIVERSIFIED CONTROL APPLICATIONS FOR 2/3D CONTROL IN VIRTUAL/REAL SPACE Cheng Hou, Jiangjun Geng, Tao Chen, Huicong Liu and Lining Sun Soochow University
#120—MICROCHIP BASED GIGAHERTZ ACOUSTIC STREAMING INDUCED CELLULAR INTERNALIZATION OF GOLD NANORODS Shan He, Xiaoyu Wu, Wenjun Li, Wei Pang, Xuexin Duan and Yanyan Wang Tinajin University
#121—DIRECT-WRITE 3D PRINTED SELF-SUPPORTING FLEXIBLE MICROSTRUCTURE DEVICES Cuiwen Hu, Haifeng Chen, Deyun Mo, Haishan Lian, Yinhuan Yang and Xiaojun Chen Lingnan Normal University
#122—BIOMIMETIC CURVATURES CONTROLLED FLUID OVERFLOW SYSTEM Zhichao Dong Technical Institute of Physics and Chemistry, Chinese Academy of Sciences
#125—A FLEXIBLE PAIN SENSOR BASED ON PDMS-AGNWS Chen Xu, Liming Miao, Haobin Wang, Hang Guo, Zehua Xiang and Haixia Zhang Peking University
#128—LIQUID GATING MEMBRANES FOR MULTIPHASE SEPARATION Shijie Yu Xiamen University
#130—A BIONIC FISH WITH 4 IPMC PECTORAL FINS zhao chun, Wang Yanjie, Tang Gangqiang, wang jiale, zhu denglin and Luo Minzhou
#137—OHMIC CONTACT CHARACTERISTICS OF SILICON CARBIDE-BASED MEMS DEVICES Wu Chen Xi’an JiaoTong University
#145—FACILE FABRICATION OF NIO WRINKLE MICRO/NANOSTRUCTURES AND THE APPLICATION OF ENZYME-FREE GLUCOSE SENSORS Shulan Jiang and Yong Tan China University of Gecosciences
#148—HARD PROTECTIVE TRANSPARENT COATINGS FOR FLEXIBLE ELECTRONICS Oleksiy Penkov and Mahdi Khadem
115 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Zhejiang University
#152—HIGH-EFFICIENT ELECTROCHEMICAL BETAVOLTAIC CELL USING ZRO2 MODIFIED TIO2 NANOROD ARRAYS Renrong Zheng, Zhen Wang, Na Wang, Zan Ding and Haisheng San Xiamen University
#154—DESIGN AND FABRICATION OF PDMS THIN FILM ELECTROMAGNETIC ACTUATOR Hongguang Lu, Xiaodan Miao, He Chen and Shihai Liu Shanghai University Of Engineering Science
#156—ELASTOMERS WITH ULTRAFAST LOW TEMPERATURE SELF-HEALING RATE AND LOW ADHESION TO ICE Yizhi Zhuo Norwegian University of Science and Techonology
#162—SPOOF PLASMON SURFACES FOR TERAHERTZ SENSING Yi Huang, Shuncong Zhong, Tingling Lin and Yujie Zhong Fuzhou University
#166—A FLEXIBLE PRESSURE/FLOW SENSOR BASED ON GRAPHENE PIEZORESISTIVITY Zihao Dong, Yonggang Jiang and Deyuan Zhang Beihang University
#174—HYPOXIA/PH DUAL-RESPONSIVE NITROIMIDAZOLE-MODIFIED CHITOSAN/ ROSE BENGAL DERIVATIVE NANOPARTICLES FOR ENHANCED PHOTODYNAMIC ANTICANCER THERAPY Xudong Li and Yu Gao Fuzhou University
#175—RESEARCH ON KEY TECHNOLOGY OF NOVEL RF MEMS SWITCH DESIGNING AND FABRICATING Yun Qi, Yuanyuan Yang and Wenjiang Shen Nano Science and Technology Institute, University of Science and Technology of China
#176—DESIGN AND ANALYSIS OF DUAL SUBSTRATE RF MEMS CAPACITIVE SWITCH WITH LOW ACTUATION VOLTAGE Yuanyuan Yang, Yun Qi and Wenjiang Shen University of Science and Technology of China
#179—A PULSE DIAGNOSIS INSTRUMENT BASED ON DIGITAL MICROFLUIDICS SYSTEM TO IMITATE TCM Shouju Yao, Hang Jin, Bin Qiu, Wenchang Tu, yike zhou, Shanshan You, Tianhao Wu, lingling liu, gonghan he and Daoheng Sun Xiamen University
#180—EXPLORING THE THERAPEUTIC EFFECT OF SONODYNAMIC THERAPY IN CANCER CELLS UNDER DIFFERENT ULTRASONIC PARAMETERS AND TREATMENT CONDITIONS
116 April 25-29 , 2021 Xiamen, China
Yilin Zheng, Jun Wang and Yu Gao Fuzhou University
#185—STRETCHABLE AND FLEXIBLE FIBER ELECTRODE FOR MEASURING NEURAL SIGNAL WITH AU NANOPARTICLE CONDUCTIVE NETWORKS Chihyeong Won and Taeyoon Lee Yonsei University
#187—BROADBAND LINEAR-TO-CIRCULAR POLARIZATION CONVERTER BASED ON ULTRATHIN METAL NANO-GRATING Yuanyi Fan, Ran Zhang, Ze Liu, Chuanlong Guan and Jinkui Chu Dalian University of Technology
#189—SKIN INSPIRED HUMIDITY AND PRESSURE SENSOR WITH WRINKLE-ON- SPONGE STRUCTURE Liming Miao, Ji Wan, Chen Xu, Hang Guo, Haobin Wang, Zehua Xiang, Jiayin Li, Mengdi Han and Haixia Zhang Peking University
#190—PROBING ZETA POTENTIAL OF GLASS IN ELECTROLYTE SOLUTIONS BY COLLOIDAL PROBE TECHNIQUE Zhijian Liu, Jiaming Gao, Tianze Wu, Sen Wu, Zixiao Fan, Ziyi Yuan, Yongxin Song and Xinxiang Pan Dalian Maritime University
#191—HIGH-RESOLUTION MEASUREMENT METHOD BASED ON ARRAY FOV AND CODED APERTURES Li Zhang and Fei Xing Tsinghua University
#193—DIFFERENT EFFECTS OF MASS AND DAMPING ON PERFORMANCE OF VIBRATION AND WIND ENERGY HARVESTERS Xiaokang Yang, Xuefeng He, Zhengguo Shang, Hui Huang, Chunlong Li and Yufei Liu Chongqing University, Henan University of Science and Technology
#194—NANOCOMPOSITES MODIFIED PLATINUM WIRE ELECTRODE FOR DETECTION OF 17Β-ESTRADIOL UTILIZING THE CONFORMATIONAL CHANGES OF APTAMERS Fanli Kong, Jinping Luo, Tao Ming, Shuai Sun, Yu Xing, Yan Cheng, Shihong Xu, Hongyan Jin and Xinxia Cai State Key Lab. of Transducer Technology Aerospace Information Research Institute, Chinese Academy of Sciences
#196—IN-SITU DEPOSITED ION-IMPRINTED POLYMERS FOR ELECTROCHEMICAL DETECTION OF TRACE CADMIUM IN WATER Shuyu Xiao, Jingfang Hu, Jiyang Wang, Yu Song, Yansheng Li, Guowei Gao and Lei Qin Beijing Information Science & Technology University
#197—FABRICATION OF THREE-DIMENSIONAL SI BASED ELECTRODES FOR INTEGRATED LI ION MICROBATTERIES Chuang Yue Ningbo University
117 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#201—ELECTROCHEMICAL BETAVOLTAIC CELL USING BLACK TIO2 NANOTUBE ARRAYS MODIFIED WITH SINGLE-WALLED CARBON NANOTUBES Na Wang, Renrong Zheng, Zhen Wang, Jiang Chen and Haisheng San Xiamen University
#202—AN ACOUSTIC MICROROBOT CONTROL SYSTEM WITH VISION FEEDBACK Xiaolong Lu Nanjing University of Aeronautics and Astronautics
#206—ELECTROCHEMICAL PAPER APTASENSOR BASED ON BIOTIN-STREPTAVIDIN SYSTEM FOR LABEL FREE DETECTION OF 17Β-ESTRADIOL Tao Ming, Jinping Luo, Juntao Liu, Shuai Sun, Yu Xing, Fanli Kong, Yan Cheng, Hongyan Jin and Xinxia Cai Aerospace Information Research Institute, Chinese Academy of Sciences
#207—TEMPERATURE COMPENSATION FOR MOEMS MICROMIRROR WITH PIEZORESISTIVE ANGLE SENSOR Lei Qian, Huijun Yu, Jie Hu and Wenjiang Shen University of Science and Technology of China
#208—NANOCRYSTALLINE COMPOSED SNO2 INVERSE OPAL FOR HIGHLY SENSITIVE ACETONE GAS SENSOR AT PPB-LEVEL Feng Jiang, Wen Zhang and Yu Wei Xi’an Jiaotong University
#210—STUDY OF THE LIGHT EMISSION FROM EU3+ DOPED NANOPOROUS ORGANOSILICATE FILMS JinMing Zhang, Jing Zhang, Yanrong Wang, Md. Rasadujjaman, Shuhua Wei and Jiang Yan North China University of Technology
#213—A HIGHLY SENSITIVE ORIGAMI-PAPER-BASED APTASENSOR FOR DETECTION OF PROGRAMMED CELL DEATH PROTEIN 1 (PD-1) Shuai Sun, Tao Ming, Jinping Luo, Juntao Liu, Yu Xing, Fanli Kong and Xinxia Cai State Key Lab. of Transducer Technology Aerospace Information Research Institute, Chinese Academy of Sciences
#214—INVESTIGATION ON ELECTROSTATICALLY ACTUATED MICROMACHINED GYROSCOPE Junduo Wang and Wenjiang Shen University Of Science And Technology Of China
#217—HIGHLY SENSITIVITY RESONANT BI-DIRECTIONAL MAGNETIC FIELD MICRO- SENSOR Nouha ALCHEIKH, Sofane Mbarek and Mohammad Younis KAUST
#220—MICROELECTRODE ARRAY FOR ELECTROPHYSIOLOGY DETECTION OF AMYGDALA IN FREE-MOVING MICE Penghui Fan, Yilin Song, Yuchuan Dai, Yiding Wang, Botao Lu, Enhui He and Xinxia Cai Information Research Institute, Chinese Academy of Sciences
118 April 25-29 , 2021 Xiamen, China
#221—PHOTOLUMINESCENT TOUGH GEL SHEATHED SUTURE FOR NEAR INFRARED BIOIMAGING Zhenwei Ma, Fan Yang, Dongling Ma and Jianyu Li McGill University
#222—A FLEXIBLE MECHANICAL COMPOSITE MICRO-GRATING TAILORED BY ONE-DIMENSIONAL ORDERED WRINKLE PATTERNS Yi-hang Xin, Kai-Ming Hu, Xiu-Yuan Li, Er-Qi Tu and Wen-Ming Zhang State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University
#224—VIBRATION CHARACTERISTICS OF PIEZOELECTRIC TIMOSHENKO NANOBEAMS IN VISCOELASTIC MEDIUM Dong Wu, Dapeng Zhang, Mingwei Liu and Yongjun Lei the College of Aerospace Science and Engineering, National University of Defense Technology
#225—AC & DC MAGNETIC FIELD SENSOR BASED ON FLEXIBLE PIEZOELECTRIC POLYMER Weilong Han, Jian Wen, Yifei Wu, Bo Niu, Yi Wu and Mingzhe Rong Xi’an JiaoTong University
#228—LARGE AREA TRANSIENT FILMS AND DEVICES BY PHOTONIC SINTERING OF TWO DIMENSIONAL MATERIALS Wenxing Huo, Zi’an Zhang, Zilun Wang, Ziyue Wu, Jiameng Li and Xian Huang Tianjin University
#230—FAST RECONSTRUCTION OF RAMAN IMAGE BASED ON THE MULTI-CHANNEL IMAGING SYSTEM AND KERNEL FUNCTION Xian-Guang Fan, Long Liu, Ting Nie, Yi-Xin Lin, Ying-Jie Xu, Jian He and Xin Wang Xiamen University
#231—MAGNETICALLY INDUCED MICROPILLAR ARRAYS FOR ULTRA-SENSITIVE FLEXIBLE SENSOR WITH WIRELESS RECHARGING SYSTEM Libo Gao Xidian University
#235—A CAPACITIVELY TRANSDUCED BULK ACOUSTIC WAVE MEMS RESONATOR WITH LOW BIAS VOLTAGES Zeji Chen, Qianqian Jia, Wenli Liu, Yinfang Zhu, Quan Yuan, Jinling Yang and Fuhua Yang Institute of Semiconductors, Chinese Academy of Sciences
#236—DETECTION OF SINGLE PROTEIN MOLECULES USING MOS2 NANOPORES OF VARIOUS SIZES Chaoming Gu, Zhoubin Yu, Xiaojie Li, Xin Zhu, Zhen Cao, Zhi Ye, Chuanghong Jin and Yang Liu Zhejiang University
#238—HUMIDITY SENSOR BASED ON THIN-FILM PIEZOELECTRIC-ON-SUBSTRATE RESONATOR AND MOS2 FOR MULTIFUNCTIONAL APPLICATIONS Hanyong Dong, Jintao Pang, Dongsheng Li, Qian Zhang and Jin Xie Zhejiang University
119 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#243—IRREVERSIBLE ELECTROWETTING ON PETAL-MIMETIC NANOTEXTURED DIELECTRIC FOR FORMATION OF SHAPE CONTROLLABLE POLYMERIC LENSES Huifen Wei and Xiangmeng Li North University of China
#245—IN-SITU SYNTHESIZED LIQUID METAL MICROGELS Dawei Wang, Chennan Lu, Xiaohong Wang and Wei Rao Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, University of Chinese Academy of Sciences
#246—DESIGN AND DEVELOPMENT OF HIGH PRECISION MAGNETIC ENCODER BASED ON TMR MEMS DEVICE Zhang Bo, Jiang Yong, Li Yang, Chen Xiaoli and Wen Xiaolong University of Science and Technology Beijing
#247—FLEXIBLE ELECTRICAL STIMULATION DEVICE WITH CHITOSAN- VASELINE® DRESSING THAT ACCELERATES WOUND HEALING IN DIABETES AND CORRESPONDING STIMULATION OPTIMIZATION BASED ON A PRECISION LAYERED SKIN MODEL Menglu Li, Xiaofeng Wang, Jikui Luo, Wei-qiang Tan and Xiaozhi Wang Zhejiang University
#249—ACHIEVING ULTRAHIGH ENERGY DENSITY FOR TRIBOELECTRIC NANOGENERATOR Jingjing Fu and Yunlong Zi The Chinese University of Hong Kong
#252—OPTICAL MICRO/NANOFIBRE EMBEDDED SOFT FILM ENABLES MULTIFUNCTIONAL FLOW SENSING IN MICROFLUIDIC CHIPS Zhang Zhang, Jing Pan, Yao Tang, Yue Xu, Lei Zhang, Yuan Gong and Limin Tong Zhejiang University
#255—DYNAMICAL REVERSIBLE ELECTROWETTING WITH LOW VOLTAGE ON THE DIMETHICONE INFUSED CARBON NANOTUBE ARRAY IN AIR Lei Zhou, Miao Wang and Xu Hou Xiamen University
#259—TRACE MERCURY DETECTION BY RUTHENIUM-BASED MOFS MODIFIED MICROELECTRODE Chenyu Xiong, Yuhao Xu, Chao Bian, Ri Wang, Yong Xie, Mingjie Han and Shanhong Xia State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences
#262—FREQUENCY MATCHING SYSTEM OF MEMS GYROSCOPE BASED ON FUZZY CONTROL STRATEGY Yifang Liu, Ruimin Liu, Gang Fu, Xin Yan, JunYu Chen and Gaofeng Zheng Xiamen University
#264—HIGH-YIELD AND LARGE-SIZE SUSPENDED GRAPHENE DEVICE FABRICATION TECHNIQUE AND EDGE BURR EFFECT ANALYSIS Ying Liu, Qin Wang, Yong Zhang, Jing Qiu and Guan-jun Liu
120 April 25-29 , 2021 Xiamen, China
National University of Defense Technology
#265—ATOMIC STUDY ON THE DEFORM MECHANISM OF CUTA/CU AND CUTA/TA NANOLAMINATES Xiao Wang, Mengjie Wang, Min Liu, Yue Liu and Weidong Wang Xidian university
#268—WIRELESS IMPLANTABLE PHOTOTHERAPY DEVICE FOR ORAL INFLAMMATION REPAIR Shuang Huang, Cheng Yang, Ziqi Liu, Xinshuo Huang and Hui-Jiuan Chen Sun Yat-Sen University
#271—DEVELOPMENT OF MULTI-FUNCTIONAL BIOCOMPATIBLE PHOTOPOLYMER Seokyoung Bang, Dongha Tahk, Noo Li Jeon and Hong Nam Kim KIST
#272—MULTIPARAMETRIC FLEXIBLE SENSORARRAYS SYSTEM FOR IN SITU IMMEDIATE DIAGNOSIS OF GLOSSITIS Ziqi Liu, Keer Li, Shuang Huang, Xinshuo Huang, Lingfei Zhou, Tiancheng Sun and Hui-Jiuan Chen Sun Yat-Sen University
#273—CONTRIBUTION DISCRIMINATION OF AUXETIC CANTILEVER FOR INCREASED PIEZOELECTRIC OUTPUT IN VIBRATION ENERGY HARVESTING Lu Wang Xi’an Jiaotong University
#276—RESEARCH ON EMBEDDED 3D PRINTING FOR MAGNETIC SOFT ROBOTS Wei Zhang, Jiachen Li, Huicong Liu and Guoqing Jin Soochow University
#279—RESEARCH ON COUPLING MECHANISM OF WIRELESS POWER SUPPLY EQUIPMENT FOR FILM PRESSURE WIRELESS SENSING NODE OF WATER- LUBRICATED BEARING Yifan Zhao, Nan Wang and Fan Jiang
#280—INVESTIGATION OF ELECTROSTATIC-PIEZOELECTRIC HYBRID VIBRATIONAL POWER GENERATORS WITH DIFFERENT FREQUENCY BROADENING SCHEMES Yongqi Cao, Dezhi Nie, Jian Zhang, Yiwei Wang, Ronggang He, Zhe Zhao, Bowen Ji, Jianbing Xie and Kai Tao Northwestern Polytechnical University
#281—BIO-INSPIRED FLEXIBLE, DUAL-MODULATION SYNAPTIC TRANSISTORS TOWARDS ARTIFICIAL VISUAL MEMORY SYSTEMS Fuqin Sun, Qifeng Lu and Ting Zhang i-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO) Chinese Academy of Sciences (CAS)
#282—KINETIC INVESTIGATION INTO FAST SUPRAMOLECULAR PROCESSES AND CHEMICAL REACTIONS THROUGH MICROFLUIDIC NMR Xinchang Wang, Liulin Yang, Xiaoyu Cao and Zhongqun Tian Xiamen University
121 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#285—LIQUID METAL NANOPARTICLES DECORATED WITH GRAPHENE OXIDE FOR ENHANCED PEROXIDASE-LIKE ACTIVITY Xiaohong Wang, Dawei Wang, Chennan Lu and Wei Rao Technical Institute of Physics and Chemistry, Chinese Academy of Sciences; University of Chinese Academy of Sciences
#286—SIZE-DEPENDENT PARTICLE SEPARATING IN CURVED MICROFLUIDIC CHIP Yun Tian, Yongkang Wang and Yunfei Chen Southeast University
#287—TAILORING SURFACE MORPHOLOGY AND CRYSTAL QUALITY CHARACTERISTICS IN INGAAS/GAAS QUANTUM WELL STRUCTURE BY INSERTING HIGH-TEMPERATURE LAYER Quhui Wang, Haizhu Wang and Xiaohui Ma Changchun University of Science and Technology
#288—3D ALL-METAL NANO-CAVITY COUPLED METAMATERIAL FOR REFRACTIVE INDEX SENSING Kenan Zhang, Peimin Lu, Wengang Wu, Jia Zhu, Guanzhou Lin and Yun Huang College of Physics and Information Engineering, Fuzhou University, Fujian
#289—HUMIDITY INSENSITIVE NANOGENERATOR BASED ON NATURAL NANOFIBRILS Yanyuan Ba, Xiaowen Li and Xiaosheng Zhang University of Electronic Science and Technology of China
#291—DESIGN AND SIMULATION OF A DOUBLE-ENDED ARRANGEMENT INFRARED THERMOPILE Yihao Guan and Cheng Lei
#292—NODDING DUCK STRUCTURED HYBRID TRIBOELECTRIC-ELECTROMAGNETIC NANOGENERATOR TOWARDS OCEAN WAVE ENERGY HARVESTING AND SELF- POWERED MONITORING Liqiang Liu, Xiya Yang and Qunwei Tang Jinan University
#294—A FACILE AND GREEN MICROWAVE HYDROTHERMAL METHOD FOR FABRICATING G-C3N4 NANOSHEETS WITH IMPROVED HYDROGEN EVOLUTION PERFORMANCE Hongmei Chen, Yanyun Fan, Zheng Fan, Danfeng Cui, Chenyang Xue and Wendong Zhang North University of China
#300—ONE-STEP VAPOR DEPOSITION OF FLUORINATED POLYCATIONIC COATING TO FABRICATE ANTIFOULING AND ANTI-INFECTIVE TEXTILE AGAINST DRUG- RESISTANT Ruixiang Zhao
#301—ATOMIC LAYER DEPOSITION OF AL2O3 ON 2D MOS2 FOR ENHANCING THE RECOVERY RATE OF GAS SENSOR Sungjoo Wi, Inkyu Sohn, Youngjun Kim, Seungmin Jung and Hyungjun Kim
122 April 25-29 , 2021 Xiamen, China
School of Electrical and Electronic Engineering, Yonsei University, Republic of Korea
#303—NONLINEAR DYNAMIC OF COUPLING MECHANICAL MODES DEMONSTRATED BY PHONONIC FREQUENCY COMS Jiangkun Sun National university of defense technology
#304—DEEP SPATIAL FREQUENCY SHIFT ENABLED CHIP-BASED SUB-WAVELENGTH- RESOLUTION IMAGING Mingwei Tang, Xiaowei Liu, Qing Yang and Xu Liu Zhejiang University
#305—A LOW-COST DIGITAL LITHOGRAPHY SYSTEM SUPPORTING VISUAL FOCUSING AND ITS APPLICATION ON OPTICAL FIBER Luming Wang, Zhimin Zhang, Ningning Luo, Haifeng Xiao, Long Ma and Qingwang Meng Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test (Ministry of Education), Nanchang Hangkong University, Nanchang, China
#313—AU-ENABLED NANOSTRUCTURED SAPPHIRE OPTICAL FIBER SENSOR FOR IN- SITU GAS SENSING IN HARSH ENVIRONMENTS Kai Liu, Paul Ohodnicki, Jeffrey Wuenschell, Subhabrata Bera, Renhong Tang, Lin Li, Yi Liu, Tinghan Liu, Han Wu, Zhihua Huang and Henry Du National Innovation Center of Advanced Rail Transit Equipment
#315—RESEARCH ON THE RESOLUTION OF SUBMICRON LITHOGRAPHIC PROJECTION SYSTEM BASED ON DMD FOR OPTICAL FIBER END FACE Qingwang Meng, Zhimin Zhang, Ningning Luo, Luming Wang and Menghan Xiong Key Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test (Ministry of Education), Nanchang Hangkong University, Nanchang, China
#318—GOLD NANOPARTICLES MODIFIED SENSITIVITY-ENHANCED UNCOOLED NEAR-INFRARED DETECTOR Xiaoyu Wu, Quanquan Guo, Wencheng Li, Chenyang Yu and Yanyan Wang Tianjin University
#320—RESEARCH ON NONLINEAR SHRINKAGE CHARACTERISTICS OF SMALL MODULUS PLASTIC GEAR BASED ON MOLDFLOW Xiansong He, Wangqing Wu and Yihua Lei Central South University
123 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Day2 - Tuesday, 27 April
Poster Session II 16:30 - 18:30 (Accept Posters from No.323 to No.526 include 256 & 314)
#256—DESIGN AND OPTIMIZATION OF GLASS FRIT PACKAGE STRUCTURE FOR MICRO PRESSURE SWITCH Lingyun Wang, Daner Chen, Heng Xiong and yifang Liu Xiamen University
#314—DAMAGE PROFILE MODEL OF NANOSTRUCTURE FABRICATED BY FOCUSED HELIUM ION BEAM Chenglong Liu, Qi Li, Qianhuang Chen and Yan Xing Southeast University
#353—INVESTIGATION OF BROADING MODULUS RANGE OF SOFT PROBES BY SINGLE BEAM ACOUSTIC TWEEZER Huiyao Shi, Jialin Shi, Peng Yu and Lianqing Liu Shenyang Institute of Automation
#404—VERTICAL ORGANIC SYNAPSE EXPANDABLE TO 3D CROSSBAR ARRAY Yongsuk Choi, Seyong Oh, Chuan Qian, Jin-Hong Park and Jeong Ho Cho Yonsei University
#415—ACTIVE-POWERING WEARABLE IONTRONIC TACTILE SENSING FOR HUMAN PHYSIOLOGICAL MONITORING Hongyan Sun, Yu Chang and Tingrui Pan Shenzhen Institutes of Advanced Technology, Chinese Academy of Science
#424—NEGATIVE DIFFERENTIAL RESISTANCE EFFECT IN GRAPHENE NANORIBBONS HETEROJUNCTION Li Cheng, Yu Zhu, Qingfeng Gong and Wenli Zhou Huazhong University of Science and Technology
#504—3D PRITED KENICS STATIC MICROMIXER Kunpeng Zhang, Gonghan He and Daoheng Sun Xiamen University
#323—VISCOELASTIC DEFORMATION AND PROCESS OPTIMIZATION OF POLYMER MICROFLUIDIC CHIP FOR RAPID IN-MOLD BONDING Yihua Lei,Wangqing Wu and Xiansong He Central South University
#324—FACTORS INFLUENCING RESOLUTION OF OPTICAL FIBER END FACE
124 April 25-29 , 2021 Xiamen, China
PROCESSING IN DIGITAL LITHOGRAPHY Menghan Xiong, Ningning Luo, Zhimin Zhang and Qingwang Meng Nanchang Hangkong University
#326—STUDY ON FRICTION HEAT GENERATION MECHANISM BY MOLECULAR DYNAMICS Changsheng He and Wangqing Wu Central South University
#328—THROUGH GLASS VIAS BY WET-ETCHING PROCESS IN 49% HF SOLUTION USING AN AZ4620 ENHANCED CR/AU MASK Guanghui Ding, Binghe Ma, Yuchao Yan, Weizheng Yuan, Jinjun Deng and Jian Luo Northwestern Polytechnical University
#329—DNA-DIRECTED NANOFABRICATION OF ULTRA-SCALED HIGH-PERFORMANCE ELECTRONICS Yahong Chen, Mengyu Zhao, Zhi Zhu and Wei Sun Xiamen University
#330—THE DESIGN OF LOVE WAVE IMMUNOSENSOR FOR REAL-TIME DETECTION OF CANCER BIOMARKER FROM HUMAN SALIVA Junyu Zhang, Tao Zhang, Yuantao Chen, Xiaojing Zhang, Hao Wan and Ping Wang Zhejiang University
#331—MEASUREMENT OF CARDIOMYOCYTES MOTION BASED ON SURFACE PATTERNED POLYDIMETHYLSILOXANE MEMBRANE Si Tang, Jialin Shi, Huiyao Shi, Peng Yu and Lianqing Liu Shenyang Institute of Automation
#333—AN ADAPTIVE OCTREE LEVEL SET SIMULATION METHOD OF THE WET ETCHING PROCESS FOR THE FABRICATION OF MICRO STRUCTURE ON SAPPHIRE CRYSTAL Ye Chen, Jin Qian, Xinyan Guo and Yan Xing Southeast University at Nanjing
#337—SURFACE ACOUSTIC WAVE (SAW) DEVICES BASED ON SCALN/ALN/SI LAYERED STRUCTURES WITH LARGE FIGURE OF MERIT Yan Liu, Binghui Lin, Yang Zou, Yao Cai, Wenjuan Liu and Chengliang Sun The Institute of Technological Sciences, Wuhan University
#339—A FLEXIBLE AGNPS-PDMS SUBSTRATE TO PRODUCE ULTRASENSITIVE SERS DETECTION Guanzhou Lin, Kenan Zhang, Yun Huang, Shengxiao Jin, Tian Kang, Yusa Chen, Liye Li, Peimin Lu and Wengang Wu Peking University
#342—FABRICATION AND PROPERTIES OF TWO-DIMENSIONAL INSE TOP-GATE TRANSISTORS AND THEIR APPLICATIONS IN LOGIC CIRCUITS Wei Li and Xiaozhi Wang Zhejiang University
125 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#343—VOXELATED MENISCUS-CONFINED ELECTRODEPOSITION OF 3D METALLIC MICROSTRUCTURES Yutao Wang and Yuanliu Chen Zhejiang University
#345—A CLOGGING RATE PREDICTION MODEL BASED ON POROUS MICROARRAY MEMBRANES FOR LIQUID BIOPSIES Yinghao He, Yaoping Liu, Wei Wang and Yufeng Jin Peking University ShenZhen Graduate School
#346—BIOMIMETIC ELECTRODE–ELECTROLYTE DESIGN FOR EFFICIENT ELECTROCATALYTIC NITROGEN FIXATION UNDER AMBIENT CONDITIONS Yang Liu, Xinyi Zhang, Panagiotis Tsiakaras and Pei Kang Shen Henan Normal University
#349—MICRO-DROPLET OF PARTICULATE SUSPENSION GENERATED BY A PNEUMATIC EJECTION SYSTEM Weijie Bao, Shengnan Sun, Zhihai Wang and Yaohong Wang Faculty of Information, Beijing University of Technology
#354—TWEEZERS FOR MICRO-DROPLET TRANSFER BASED ON HYDROPHOBIC NON- PARALLEL PLATE STRUCTURE Jiaqiang Wang, Liguo Chen, Xiongheng Bian and Zaichen Wang
#359—DESIGN AND PREPARATION OF A HIGH RESOLUTION ACCELEROMETER BASED ON GRAPHENE Xiaodong Zhao, Yanlu Feng, Wei Zhang and Jianhui Liao Peking University
#363—NANOROBOTIC MANIPULATION INSIDE SCANNING ELECTRON MICROSCOPE FOR THE ELECTRICAL AND MECHANICAL CHARACTERIZATION OF ZNO NANOWIRES Mei Liu, Aristide Djoulde, Quan Yang, Weilin Su, Lingli Kong, Jinjun Rao, Jinbo Chen and Zhiming Wang Shanghai University
#366—NANO MECHANICS MARKERS FOR ACCESSING THE EFFECTS OF ULTRAVIOLET(UVC) DISINFECTION Yuxuan Xue, Ning Xi, Kaicheng Huang and Ye Ma The University of HongKong
#367—MULTI-PULSE TRIBOELECTRIC NANOGENERATOR BASED ON MICRO-GAP CORONA DISCHARGE FOR ENHANCEMENT OF OUTPUT PERFORMANCE Ru Wang, Juan Cui and Yong-Qiu Zheng North University of China
#369—CONTROL OVER ELECTRICAL PROPERTY OF A-INGAZNO THIN FILM TRANSISTORS USING COUPLED SELF-ASSEMBLED MOLECULAR LAYER AS COPPER DIFFUSION BARRIER. Seungmin Lee, Minkyu Lee and Taeyoon Lee Yonsei University
126 April 25-29 , 2021 Xiamen, China
#370—LATERALLY-EXCITED BULK-WAVE RESONATORS (XBARS) WITH EMBEDDED ELECTRODES IN 149.5° Z-CUT LINBO_3 Xiyu Gu, Jieyu Liu, Yao Cai, Yan Liu, Chao Gao, Zhiwei Wen, Shishang Guo and Chengliang Sun The School of Physics and Technology, Wuhan University
#373—RESEARCH ON INTEGRATED RELIABLE MICRO-HIGH EXPLOSIVE TRAIN MODEL Bo He, Wenzhong Lou, Hengzhen Feng, Yuecen Zhao and Yi Sun School of Mechatronical Engineering, Beijing Institute of Technology
#377—SPATIAL AND TEMPERATURE CONTROL OF EXCITON EMISSION BY FERROELECTRIC IN MONOLAYER TMDS Bo Wen, Xi Zhang and Dongfeng Diao Shenzhen University
#378—THZ HYBRID GRAPHENE &METAL PATCHES METASURFACE FOR RCS REDUCTION AND DIGITAL CODING Baolong Wang, Jiayi Yang, Shuangshuang Liu, Wei Xu, Guobin Chen, Di Feng, Lingjie Jia, Yan Meng and Xiuhan Li Beijing Jiaotong University
#379—A FLEXIBLE CIRCUIT FABRICATED BY TUNING THE WETTABILITY OF LIQUID METAL Chengjun Zhang, Qing Yang, Jingzhou Zhang, Jiale Yong, Xun Hou and Feng Chen Xi’an Jiaotong University
#381—A METHOD FOR AUTOMATIC COUNTING AND LABELING OF CELLS STAINED WITH MICROPOROUS MEMBRANE Jiangcheng Cao, Tingting Hun, Wenbo Zhou, Zheng Liu, Wei Wang and Yufeng Jin Peking University ShenZhen Graduate School
#385—DESIGN OF A CONTROLLABLE PUSH-TRIGGERED MICROFLUIDIC CHIP FOR VITRIFICATION REAGENT LOADING/UNLOADING Guangyi Cai, Boshi Jiang, Jiaxin Zhu, Fenglin Liu and Tianzhun Wu Shenzhen Institute of Advanced Technolog, Chinese academy of science
#387—BMP-2 IMMOBILIZED LUBRICANT-INFUSED SURFACE COATING FOR ORTHOPEDIC IMPLANTS WITH ANTI-BACTERIAL, ANTI-INFLAMMATORY, AND OSTEOGENIC FUNCTIONALITIES Jaegyu Park, Yeontaek Lee, Kijun Park and Jungmok Seo Yonsei University
#389—DIRECT AND ALL-DRY MICROFABRICATION OF ULTRAMICROELECTRODE BASED ON COLD ATMOSPHERIC MICROPLASMA JET Ye Xi, Longchun Wang, Zhejun Guo, Bin Yang and Jingquan Liu Shanghai Jiao Tong University
#390—NANOPORE SURFACE CHARGE SENSING WITH ION-STEP METHOD Jing Yang and Chen Songyue Xiamen University
127 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#392—RESEARCH ON COMPLEX SURFACE PATTERNED CONFORMAL MANUFACTURING SYSTEM BASED ON POINT CLOUD THEORY Joe Yao, Junchuan Gao and Gonghan He Xiamen University
#393—A COPLANAR ELECTRODE DIRECT CURRENT TRIBOELECTRIC NANOGENERATOR WITH FACILE FABRICATION AND STABLE OUTPUT Guoqiang Xu and Yunlong Zi The Chinese University of Hong Kong
#399—THE MECHANISM AND REALIZATION OF USING ULTRASONIC ATOMIC FORCE MICROSCOPY TO MEASURE SUBSURFACE DEFECTS OF ULTRA-PRECISION COMPONENTS Yuyang Wang, Chengjian Wu, Jinyan Tang and Yuanliu Chen Zhejiang University
#400—BREATHABLE GRAPHENE-BASED HYDROGEL STRAIN SENSORS Xingchi Liu, Hengchang Bi and Xing Wu East China Normal University
#401—ENGINEERING APPLICATION OF MICRO SURFACE ACOUSTIC WAVE SENSING SYSTEM IN TEMPERATURE DETECTION OF COPPER BUSBARS IN TRANSFORMER CABINET OF ELECTRIC LOCOMOTIVE Tinghan Liu
#402—IMMUNE-CAMOUFLAGE COATING FOR IMPLANTABLE MEDICAL DEVICES, BIOPRINTING, AND MICROFLUIDICS Kijun Park, Yejin Jo, Inwoo Kim, Soyeon Kim and Jungmok Seo Yonsei University
#406—SLIPPERY COATED IMPLANTABLE FLEXIBLE MICROELECTRODE ARRAY (FMEA) FOR HIGH-PERFORMANCE NEURAL INTERFACE Md Eshrat E Alahi, Tian Zhou, Sara Khademi, Hao Wang and Tianzhun Wu Shenzhen Institutes of Advanced Technology Chinese Academy of Sciences
#408—LIGHT EXTRACTION EFFICIENCY INVESTIGATION OF ALGAN-BASED DEEP ULTRAVIOLET LIGHT-EMITTING DIODES ON NANO-PATTERNED SAPPHIRE SUBSTRATE Wan Hui, Lei Yu, Lan Shuyu, Gong Liyan, Gui Chengqun and Zhou Shengjun Wuhan University
#409—EQUIVALENT ELECTRICAL MODEL AND EXPERIMENTAL ANALYSIS OF A NOVEL NEEDLE-RING ATMOSPHERIC PRESSURE PLASMA MICROJETS ARRAY Lingju Xia, Junfeng Yang and Li Wen University of Science and Technology of China
#410—A WEARABLE HEALTH MONITORING SYSTEM SELF-POWERED BY HUMAN- MOTION ENERGY HARVESTER Chen Bao, Anxin Luo, Yi Zhuang, Junlong Huang and Fei Wang the School of Microelectronics, Southern University of Science and Technology (SUSTech)
128 April 25-29 , 2021 Xiamen, China
#412—IMPROVED RESERVOIR COMPUTING BY CARBON NANOTUBE NETWORK WITH POLYOXOMETALATE DECORATION Shuo Wu, Wenli Zhou, Kaiqiang Wen, Chengzhu Li and Qingfeng Gong Huazhong University of Science and Technology
#413—2D MICROSCOPY OF MAGNETIC FIELD USING ATOMIC VAPOR CELL Liu Chen
#414—ATOMISTIC RESOLVED SIGNALS OF AMINO ACIDS FOR PEPTIDE SEQUENCING BY TUNNELING CURRENT ANALYSIS Tommaso Civitarese and Giuseppe Zollo Sapienza University of Rome
#416—SINGLE-MOLECULE ELECTRONICS: RECENT ADVANCES AND PERSPECTIVES Junyang Liu and Wenjing Hong Xiamen University
#422—TUNABILITY OF OPTOELECTRONIC OSCILLATOR BASED ON SIO2 OPTICAL WAVEGUIDE RING RESONATOR Zerong Jia, Yongqiu Zheng, Jiamin Chen, Liyun Wu, Chen Chen and Chenyang Xue North University of China
#423—LITHOGRAPHIC PROPERTIES OF AMORPHOUS SOLID WATER Shan Wu, Ding Zhao and Min Qiu Westlake University
#425—CHEMICAL BONDING OF FUNCTIONAL GROUPS IN SELF-ASSEMBLED MONOLAYER (SAM) FOR CU DIFFUSION BARRIER Minkyu Lee and Taeyoon Lee Yonsei University
#427—FUNCTIONALIZED NANOCHANNELS FOR CONSTRUCTING ULTRASENSITIVE ELECTROCHEMICAL SENSOR Wenrui Ma, Shunbo Li and Yi Xu College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China.
#428—THE OPPOSITE ANISOTROPIC PIEZORESISTIVE EFFECT RES2 Chunhua An and Jing Liu Tianjin University
#429—STRUCTURAL DESIGN AND SIMULATION OF IONIC TRANSPORT AND MASS SELECTION PROCESS IN MEMS TIME-OF-FLIGHT MASS SPECTROMETRY CHIP Zongjia Cai, Ming Hao, Tianyuan Qi, Cong Wang, Kun Liu, Renchao Dou, Donghui Meng, Lichen Sun and Rongxin Yan School of Mechanical Engineer and Automation, Northeastern University, Shenyang, China
#431—MECHANISMS OF BRANCH TIP FUSION IN MESHWORK PATTERNS Shan Guo, Mingzhu Sun and Xin Zhao Nankai university
129 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#434—LEAF-LIKE SELF-ASSEMBLED MXENE/ZNOEP HYBRID NETWORK FOR HIGH-SENSITIVE TEMPERATURE SENSING IN ELECTRONIC SKIN Shijie Wan, Weiguan Zhang, Chenyang Xing and Zhengchun Peng Shenzhen University
#437—ENERGY LOCALIZATION OF LAMB WAVE RESONATOR USING DISPERSION ENGINEERING Yusi Zhu, Lidong Du, Zhan Zhao and Zhen Fang Aerospace Information Research Institute, Chinese Academy of Sciences; University of Chinese Academy of Sciences
#439—ROOM TEMPERATURE LINEAR MAGNETORESISTANCE IN VERTICALLY ALIGNED GRAPHENE NANOCRYSTALLINE NETWORK FILM Dong Ding, Xingze Dai, Chao Sang and Dongfeng Diao Shenzhen University
#441—PREPARATION OF FLAME-RETARDANT LITHIUM-ION BATTERY SEPARATOR BY COAXIAL ELECTROSPINNING Fangqin Shao, Guoyi Kang, Huatan Chen, Zungui Shao, Xiang Wang, Wengwang Li and Gaofeng Zheng Department of Instrumental and Electrical Engineering
#442—A NUMERICAL STUDY ON THE EFFECTS OF MECHANICAL PROPERTIES OF RED BLOOD CELLS ON RHEOLOGY IN NARROW MICROCHANNELS De-Yun Liu, Peng Jing, Xiaolong Wang, Qiaodong Wei, Shenghong Zhang and Xiaobo Gong Shanghai Jiao Tong University
#446—FLEXIBLE TRANSPARENT CONDUCTIVE NETWORK BASED ON LIQUID FILM RUPTURE SELF-ASSEMBLY METHOD Xinran Zhang, Haitao Deng, Danliang Wen, Yanyuan Ba, Haixia Zhang and Xiaosheng Zhang University of Electronic Science and Technology of China
#447—AN IN2O3 NANOTUBES BASED GAS SENSOR ARRAY COMBINED WITH MACHINE LEARNING ALGORITHMS FOR TRIMETHYLAMINE DETECTION Wenjie Ren, Changhui Zhao, Yingming Liu and Fei Wang Southern University of Science and Technology
#449—STUDY OF TOUCH MODE MEMS CAPACITANCE VACUUM GAUGE WITH CIRCULAR DIAPHRAGM Xiaodong Han, Gang Li, Yongjian Feng and Detian Li Xiamen University
#450—PMUT-BASED AIR-COUPLED IMAGING AND SURFACE STAIN DETECTION Sheng Sun, Jianyuan Wang, Yuan Ning and Menglun Zhang Tianjin University
#451—3D PRINTED WATER-SOLUBLE UV PHOTOPOLYMER FOR FLEXIBLE SENSOR WITH SACRIFICIAL SCAFFOLDS AND INDIRECTED MOLDING PROCESS Chunjiang Wang, Wanhao Niu, Qihang Song, Xiangyu Mi, Jianxu Shi and Xiaoming Chen Xi’an Jiaotong University
130 April 25-29 , 2021 Xiamen, China
#453—ULTRASENSITIVE SILICON NANOWIRE FIELD-EFFECT BIOSENSORS ENABLED BY FUNCTIONALIZED WITH GOLD NANOPARTICLES AND APTAMERS Qianhui Wei, Jianglan Yang, Han Xiao, Kuo Men, Qingzhu Zhang, Jing Zhang and Feng Wei GRIMAT Engineering Institute Co. Ltd.
#454—SELF-ASSEMBLY OF ELECTROSPUN POLYMER NANOFIBERS: A GENERAL PHENOMENON GENERATING CYLINDER-PATTERNED NANOFIBROUS STRUCTURES Tianhao Wu and Daoheng Sun Xianmen University
#457—THE FABRICATION OF THREE-LAYER SILICON STACKED ANTENNA Yang Lei Cao, Jian Zhu, Fang Hou, Min Huang and Zong Lei Jiao Nanjing Institute of Electronic Devices
#459—ENHANCED TRAPPING STIFFNESS BASED ON SERS EMBEDDED MICROCAVITY Yanhong Wang, Zhihui Li, Jingzhi Wu and Hengze Yang North University of China
#463—SELF-POWERED ELECTRO-TACTILE SYSTEM FOR VIRTUAL TACTILE EXPERIENCES Yuxiang Shi Chinese Academy of Science
#464—INFLUENCE OF THE PARTICLE SIZE OF GLASS POWDER ON SINTERING CHARACTERISTICS IN TGV PACKAGING yifang Liu, Hongbo Sang, Zhenxiang Bu, Yulong Zhang, Guangen Gao and Lingyun Wang Xiamen University
#465—A SELF-POWERED SYSTEM DRIVEN BY RANDOM HUMAN WALKING ENERGY FOR WEARABLE HEALTHCARE APPLICATIONS Fan Wang and Xiangyu Chen
#468—AN ELECTROMAGNETIC-PIEZOELECTRIC-TRIBOELECTRIC HYBRIDIZED ENERGY HARVESTER TOWARDS BLUE ENERGY Yunfei Li, Tianyi Tang, Manjuan Huang, Xin Ma, Zhaohui Chen, Peijuan Cui, Huicong Liu and Lining Sun Harbin Institute of Technology
#470—INTERNAL RESONANT OSCILLATION IN COUPLED RESONATORS FOR HIGH- RESOLUTION MASS SENSING WITH A WIDER COUPLING RANGE Nanxing Li, Cao Xia, Guowen Zheng, Xu Du and Dong F. Wang Micro Engineering and Micro Systems Laboratory (JML), Jilin University
#472—AN IMMERSED BOUNDARY METHOD FOR MASS TRANSFER THROUGH POROUS BIOMEMBRANES UNDER LARGE DEFORMATIONS Xiaolong Wang, Peng Jing, Qiaodong Wei, Shenghong Zhang and Xiaobo Gong Shanghai Jiao Tong University
#474—ELASTIC STRAINING OF FREE-STANDING MONOLAYER GRAPHENE Ke Cao Xidian University
131 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#475—MULTI-ORDER NONLINEARITIES AND RESULTING COHERENT OSCILLATIONS OF THE STATES IN QUANTUM DOT-NANOMECHANICAL RESONATOR HYBRID SYSTEM Xinhe Wang, Lin Cong, Guangwei Deng, Kaili Jiang, Xiaoyang Lin and Weisheng Zhao Beihang University
#476—INVESTIGATION THE MINIMUM MEASUREMENT POINTS FOR CALIBRATION A HIGH PRECISION NTC THERMISTORS IN CRYOGENIC FIELD Gong Xun, Xiaohe Tang, Yanjie Li, Minmin You, Zude Lin and Jingquan Liu University of Shanghai Jiao Tong
#477—IMPROVE THE EFFICIENCY OF SIDEWALL REFLECTOR-TYPE OPTICAL SWITCH BY COMBINING INDUCTIVELY COUPLED PLASMA AND FOCUSED-ION-BEAM ETCHING Haoran Xu, Jin Xie, Kaiquan Li, Zhuang Xiong, Weikang Dong, Kometani Reo and Jun Dai Beijing Institute of Technology
#478—A TRIBOELECTRIC NANOGENERATOR WITH GEAR TRANSMISSION FOR HARVESTING ELASTIC POTENTIAL ENERGY Xiaobo Lin, Lanxin Yang, Junfeng Zhong, Zhaoming Deng, Chenyang Xing, Bo Meng and Zhengchun Peng Shenzhen University
#479—A FACILE LOW-COST WIRELESS SELF-POWERED FOOTWEAR SYSTEM FOR MONITORING PLANTAR PRESSURE Huayi Huang, Ziya Wang, Zhihao Zhu, Waner Lin and Zhengchun Peng Shenzhen University
#480—INVESTIGATION OF THE RELIABILITY OF THE INTERCONNECTION BETWEEN METAL ELECTRODE AND SILICON ANCHOR IN SILICON-ON-GLASS PROCESS Mengxia Liu, Xianshan Dong, Jian Cui and Qiancheng Zhao Peking University
#481—A BISTABLE CRITERION FOR THE V-BEAM MECHANISM Min Liu, Weidong Wang, Xiao Wang, D SY, Yingmin Zhu, Zimin Huo and Yijia Du Xidian University
#483—SELF-ADAPTIVE MICROJET ARRAY COOLING FOR RF HIGH POWER GAN INTEGRATION ON SILICON Miao Yu Nanjing University
#485—WEARABLE WIRELESS SENSING SYSTEM WITH ULTRASENSITIVE AND SELF-CLEANING PRESSURE SENSOR FOR ELECTRONIC SKIN Xuan Li, Meng Wang, Weidong Wang and Libo Gao Xidian University
#486—EFFECT OF DEPOSITION PRESSURE ON THE TRIBOLOGICAL PROPERTIES OF TI/WS2 COMPOSITE FILMS DEPOSITED BY MAGNETRON SPUTTERING Jun Ye
132 April 25-29 , 2021 Xiamen, China
Henan University of Science and Technology
#487—HIGH-TEMPERATURE THIN FILM TEMPERATURE SENSOR MADE OF POLYMER-DERIVED CERAMICS FOR HARSH ENVIRONMENT Zaifu Cui, Guochun Chen, Xiaochuan Pan, Zhenyin Hai and Daoheng Sun Xiamen University
#490—A CONTACTLESS SWITCH FOR CELL SORTING BY AREA COOLING Yigang Shen, Yaxiaer Yalikun and Yo Tanaka Osaka Univeristy
#492—LIGHT-CONFINED PLASMONIC PROBE FOR PHOTOELECTRIC CHARACTERIZATION BY ATOMIC FORCE MICROSCOPY Yaoping Hou, Chengfu Ma, Wenting Wang and Yuhang Chen University of Science and Technology of China
#494—ALUMINA COMPOSITE COATINGS ELECTRICAL INSULATING PROPERTIES ON NI-BASED SUPERALLOY Chao Wu and Daoheng Sun Xiamen University
#495—A MULTI-PARAMETER FLEXIBLE SENSOR FOR DETECTION OF WATER- QUALITY AND AQUATIC ANIMAL ACTIVITIES Zhihong Wang, Zheng Gong, QIpei He, Deyuan Zhang and Yonggang Jiang Beihang University
#496—REAL-TIME MONITORING AND ANALYSIS OF JET BEHAVIORS IN ELECTROHYDRODYNAMIC DIRECT-WRITING Yifang Liu, Junyu Chen, Jiaxin Jiang, Guoyi Kang, Huatan Chen, Jianyi Zheng and Gaofeng Zheng Xiamen University
#499—MOLECULAR INSIGHTS INTO DISTINCT DETECTION PROPERTIES OF Α-HEMOLYSIN, MSPA, CSGG, AND AEROLYSIN NANOPORE SENSORS Wanqi Zhou Nanjing University of Aeronautics and Astronautics
#501—LARGE-SCALE UNIFORMLY HYBRID MICRO-NANO STRUCTURE WETTING SOLID SUBSTRATE FOR SURFACE-ENHANCED RAMAN SPECTROSCOPY Fanhong Chen, Qi Qi, Yupeng Zhao, Shaoxun Zhang, Yongmin Zhao, Anjie Ming and Changhui Mao GRINM GROUP CORPORATION LIMITED
#505—ANTIBACTERIAL POLYMERIC FILMS WITH KILLING AND ANTIFOULING PROPERTIES SYNTHESIZED BY INITIATED CHEMICAL VAPOR DEPOSITION Qing Song Northwestern Polytechnical University
#506—ELECTROOSMOTIC FLOW IN WILD-TYPE AND MUTATED CGSG NANOPORE Giovanni Di Muccio, Blasco Morozzo della Rocca and Mauro Chinappi Università di Roma Tor Vergata
#512—SURFACE FREE ENERGY CHARACTERIZATION OF SOFT MATERIALS
133 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
THROUGH COMPUTATIONAL EXPERIMENTS Francesco Maria Bellussi, Annalisa Cardellini, Lorenzo Chiavarini, Pietro Asinari and Matteo Fasano Politecnico di Torino
#514—AN IMPROVED ADAPTIVE PERIODICAL SEGMENT MATRIX ALGORITHM FOR SIGNAL DENOISING IN REAL-TIME ECG SENSING Xinggu Liu, Liang He, Jinhua Li and Zhuqing Wang Sichuan University
#516—DATA ANALYSIS WITH MACHINE LEARNING FOR HIGH-ACCURACY MULTI- TARGET GAS SENSOR ARRAY Qihong Ning, Chun Huang, Liang He, Jinhua Li and Zhuqing Wang Sichuan University
#517—BUCKLED STRUCTURE FORMATION ON THE SURFACE OF STRETCHABLE CONDUCTIVE FIBERS AND APPLICATION FOR HYDROGEN SENSOR Kukro Yoon and Taeyoon Lee Yonsei University
#518—A TUNABLE QUASI-ZERO STIFFNESS MECHANISM FOR THERMAL COMPENSATION OF A MEMS GRAVIMETER Xiaopeng Zhang, Xueyong Wei, Yang Gao, Minghui Zhao, Yonghong Qi, Libo Zhao and Zhuangde Jiang Xi’an Jiaotong University; Northwest Institute of Nuclear Technology, Xi’an, China
#520—EFFECT OF A HYDROPHOBIC GAS ON THE EVAPORATION OF WATER IN CONFINEMENT Antonio Tinti, Gaia Camisasca and Alberto Giacomello Sapienza University of Rome
#521—ELECTROOSMOTIC FLUX IN UNCHARGED SOLID-STATE NANOPORES: AN ATOMISTIC SIMULATION STUDY Matteo Baldelli, Sébastien Balme and Mauro Chinappi University of Rome Tor Vergata
#522—THE REALIZATION OF ZROXNY TEMPERATURE SENSORS WITH GOOD SENSITIVITY AND STABILITY IN THE TEMPERATURE RANGE ABOVE 150K Yanjie LI, Minmin YOU, Gong Xun, Xiuyan LI, Zude LIN and Jingquan LIU ShanghaiJiaoTong University
#523—NEMS SENSORS BASED ON SUSPENDED GRAPHENE Xuge Fan and Frank Niklaus KTH Royal Institute of Technology
#524—ON-CHIP MICRO/NANO DEVICES FOR ENERGY CONVERSION AND STORAGE Lin Xu and Liqiang Mai Wuhan University of Technology
#525—A MINIATURE INFRARED EMITTER WITH ULTRA-HIGH EMISSIVITY Dongsheng Shu, Jifang Tao, Yan Li and Xinye Fan School of information science and engineering, Shandong University
134 April 25-29 , 2021 Xiamen, China
#526—ULTRATHIN ELASTIC SHAPE SENSOR USED FOR SHAPE RECONSTRUCTION OF ENDOSCOPE Leixin Meng, Yuan Zhuang, Liqiang Wang and Qing Yang Zhejiang Lab
135 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Day3 - Wednesday, 28 April
Poster Session III 16:30 - 18:30 (Accept Posters from No.527 to No.720)
#564—PHOTONIC CHIP-BASED ULTRAFAST RAMAN SOLITON SOURCE Zhao Li, Qingyang Du, Chaopeng Wang, Jinhai Zou, Juejun Hu and Zhengqian Luo Department of Electronic Engineering, Xiamen university
#566—RESPONSIVE DNA HYDROGEL FACILITATES ISOLATION AND RETRIEVAL OF CIRCULATING TUMOR CELLS Shuguang Xuan, Hongtao Feng, Yulin Zhou, Yuqing Huang and Yan Chen Shenzhen Institute of Advanced Technology
#597—ELECTRON-BEAM GRAYSCALE LITHOGRAPHY USING SOLID ANISOLE Rui Zheng, Ding Zhao and Min Qiu Westlake University
#649—VELOCITY RANDOM WALK MODELLING OF A SILICON MEMS RESONANT ACCELEROMETER BASED ON NON-AGC CONTROL LOOP Dong Li, QianCheng Zhao and Jian Cui Peking university
#665—A PIEZORESISTIVE PRESSURE MICROSENSOR BASED ON SIMPLIFIED FABRICATION PROCESSES QingGang Meng, Yulan Lu, Junbo Wang, Deyong Chen, Jian Chen and Bo Xie The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences and also with the School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences
#668—FABRICATION AND VERIFICATION OF A NOVEL LOW-G MEMS INERTIAL SWITCH Min Liu, Weidong Wang, Xiao Wang, D SY, Yingmin Zhu and Yijia Du Xidian University
#669—SPECTROMETER-FREE REFRACTOMETRIC SENSING USING IMAGE RECOGNITION ON CENTIMETER-SCALE GRADIENT NANOSTRUCTURES Siyi Min, Shijie Li, Zhouyang Zhu, Yu Liu, Chuwei Liang, Jingxuan Cai, Fei Han, Yuyan Li, Xing Cheng and Wendi Li The University of Hong Kong
#527—SENSITIVE ACETONE GAS SENSORS BASED ON MOF-DERIVED CARBON NANOPARTICLES-DECORATED MESOPOROUS FE2O3 NANORODS ON MEMS Liyuan Zhu, Kaiping Yuan, Xueyan Wu, Taotao Wu and Hongliang Lu
136 April 25-29 , 2021 Xiamen, China
Fudan University
#530—HOLLOW MXENE SPHERE-BASED FLEXIBLE E-SKIN FOR MULTIPLEX DETECTION OF APPLIED FORCE Xuefeng Zhao, Xiaohong Wen, Mengyang Liu and Hongliang Lu Fudan University
#531—TRIBOELECTRIC NANOGENERATOR POWERED ELECTROWETTING-ON- DIELECTRIC ACTUATORS Dongyue Jiang, minyi xu, Jie Tan, Yutao Wang and Penghao Tian Dalian University of Technology
#534—MASS FABRICATION OF 4H-SIC HIGH TEMPERATURE PRESSURE SENSORS BY FEMTOSECOND LASER ETCHING Lukang Wang, You Zhao, Yulong Zhao, Yu Yang, Bo Li and Taobo Gong State Key Laboratory for Mechanical Manufacturing Systems, Xi’an Jiaotong University, Xi’an, China.
#535—3D HIERARCHICAL NANOARCHITECTURE AUNPS/MXENE@PAMAM BASED BIOSENSOR FOR CTNT DETECTION IN HUMAN SERUM Xin Liu, Yong Qiu, Hao Wan, Liujing Zhuang and Ping Wang Zhejiang University
#536—INSIGHT OF VOLATILE BENZENES SENSING MECHANISMS FOR CONJUGATED POLYMER BASED GAS SENSORS Jian Song, Tengfei Guo, Meng Liu, Yuelin Wang and Tie Li Shanghai Institute of Microsystem and Information Technology
#537—MULTIDIMENSIONAL CHARACTERIZATION OF OPTOGENETICALLY ENGINEERED CELLS BASED ON AN INTEGRATED PLATFORM Jia Yang, Lipeng Zu, Wenxue Wang, Ning Xi and Lianqing Liu State Key Laboratory of Robotics, Shenyang Institute of Automation (SIA) Chinese Academy of Sciences(CAS)
#541—DESIGN AND OPTIMIZATION OF MICROFLUIDIC SYSTEM BASED ON ENERGY MINIMIZATION Yike Zhou and Daoheng Sun Xiamen University
#543—EFFECT OF SCAN LINE SPACING ON LASER-REDUCED GRAPHENE OXIDE BASED TEMPERATURE SENSING Rui Chen, Wei Zhou, Chiqian Xiao and Tao Luo
#545—HIGH CURRENT DENSITY ELECTRON WIND FORCES IN METALLIC GRAPHENE NANORIBBONS Ji Zhang, Tarek Ragab and Cemal Basaran School of Mechano-Electronic Engineering, Xidian University
#547—A TENG-PRESSURE COMBO-SENSOR FOR ACCURATE MATERIAL IDENTIFICATION Weifeng Chen, Ning Li, Zhuhui Yin, Yue Jiang, Jiabin Peng and Zhengchun Peng Shenzhen University
137 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#549—INVESTIGATION OF FLEXIBLE SWEAT SENSOR FOR SODIUM-ION CONCENTRATION WITH A COMBINATION OF TWO SENSING MECHANISMS Jiufu Zheng, Xuankai Xu, Yunzhi Hua, Xiaojin Zhao and Wei Xu Shenzhen University
#553—LONG - LINE TRANSMISSION DESIGN OF OCEAN MULTI - PARAMETER SENSOR DATA BASED ON CR600 Xuan Wang, Yongqiu Zheng, Juan Cui and Haoling Zhang North University of China
#554—SENSITIVE WIDE-FREQUENCY-RESPONSE ACOUSTIC SENSOR BASED ON EVANESCENT FIELD EXCITED IN SEMI-BURIED OPTICAL WAVEGUIDE RING RESONATOR Yongqiu Zheng, chen chen, Jiamin Chen, Liyun Wu, Yuan Han and Chenyang Xue North University of China
#558—FABRICATION OF MONODISPERSE MAGNETIC NANORODS FOR IMPROVING HYPERTHERMIA EFFICACY Shan Zhao, Nanjing Hao, John X.J. Zhang, P.Jack Hoopes, Fridon Shubitidze and Zi Chen Dartmouth College
#567—PYRO-ELECTROSPINNING FOR THE FABRICATION OF NANOFIBER MEMBRANE-EMBEDDED 3D DEVICES Bin Qiu, feng xu, Shouju Yao, Wenchang Tu, yike zhou, Shanshan You, lingling liu, Tianhao Wu and Daoheng Sun Xiamen University
#569—PHOTOTHERMAL GEL MICROVALVE APPLIED TO PRECISE FLOW CONTROL OF MICROFLUIDIC CHIP Khan Chen, Jingwen Pan, Minghao Xu, Shuai Wang and wenqiang zhang China Agricultural University
#570—ALN HYBRID-COUPLED RESONATOR WITH PHONONIC CRYSTAL REFLECTOR Kangfu Liu, Yuxi Wang and Tao Wu Shanghaitech University
#571—MULTILAYERED ELECTRET GENERATOR FOR SELF-POWERED WIRELESS DATA TRANSMISSION Zeyuan Cao, Shiwen Wang, Zibo Wu, Rong Ding and Xiongying Ye Tsinghua University
#573—OPTIMIZATION OF S1 LAMB WAVE RESONATOR WITH AL0.8SC0.2N Shuai Shao, Zhifang Luo and Tao Wu ShanghaiTech University
#574—STRUCTURE DESIGN AND PARAMETER EXPLORATION OF A NEW TYPE OF PLASMA ANEMOMETER Xianlong Liu and Daoheng Sun Xiamen university
138 April 25-29 , 2021 Xiamen, China
#575—PREPARATION OF NANOFIBER MEMBRANE WITH CONTROLLABLE PORE SIZE AND DIAMETER BASED ON AUXILIARY COUNTER ELECTRODE Lingling Liu and Dangheng Sun Xiamen University
#577—OPTIMIZING DESIGN, FABRICATION AND CALIBRATION OF THIN FILM HEAT FLUX GAUGE ON ITO/IN2O3 THERMOPILE Xin Li School of Physical Science and Technology, Xiamen University
#579—SUPER-LIGHTWEIGHT FLEXIBLE WIRELESS OPTOGENETIC STIMULATION DEVICE Rui Luo, Ziqi Mei, Zheng You and Dahai Ren Tsinghua University
#580—RESEARCH ON THE BOUNCING-BALL BASED TRIBOELECTRIC NANOGENERATOR FOR SELF-POWERED VIBRATION FREQUENCY MONITORING Xusheng Zuo, Taili Du, Fangyang Dong, Shunqi Li, Yongjiu Zou, Junhao Zhao, Peng Zhang, Yuewen Zhang, Peiting Sun and Minyi Xu Marine Engineering College, Dalian Maritime University
#581—SURFACE MODIFICATION OF 3D PRINTED MICROFLUIDIC CHIP Shanshan You, Kunpeng Zhang, Shouju Yao, lingling liu, Tianhao Wu and yike zhou
#582—MICRO-ACTUATORS DESIGN BASED ON LINBO3 THIN FILM Yushuai Liu, Zhiyuan Gao, Kangfu Liu and Tao Wu
#585—DESIGN OF A MINIATURE FLAT PLATE-TYPE PROPELLANT ACTUATOR FOR MEMS SAFE AND ARM DEVICES Yaoxiong Wang, Jinhong Huang, Bin Tang, Chongfei Zhang and Jun Dai Beijing Institute of Technology
#586—PATTERNING MULTILAYER ALGINATE/PCL SCAFFOLDS FOR CULTURING MYOCARDIAL TISSUE Feng Xu, Qiang Gao, Bin Lin and Daohen Sun Xiamen University
#588—ELECTROSPUN POLYIMIDE NANOFIBER SEPARATORS FOR LITHIUM-ION BATTERIES Wenwang Li, Bangzhou Che, Jinghua Lin, Sinan Fu, Jiaxin Jiang, Gaofeng Zheng and Xiang Wang Xiamen University of Technology
#590—DESIGN AND RESEARCH ON HIGH OVERLOAD RESISTANCE OF A MICRO- MIRROR STRUCTURE Qiwei Wang Nan Chang University
#592—SIMULATION AND ANALYSIS OF NANO ROBOTIC MANIPULATOR INSIDE SEM Ziliang He, Lue Zhang and Zhan Yang
139 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
#593—PEDOT:PSS-BASED NANOPORE ELECTROCHEMICAL TRANSISTOR SENSORS FOR PARTICLE RECOGNITION Lin Li, Feng Zhou, Qiannan Xue and Xuexin Duan Tianjin University
#594—SOFT ROBOTIC MANIPULATION SYSTEM CAPABLE OF STIFFNESS VARIATION AND DEXTEROUS OPERATION FOR SAFE HUMAN-MACHINE INTERACTIONS Changyong Cao Michigan State University
#595—ULTRA-LIGHT METAMATERIAL FOR SOUND ABSORPTION BASED ON MIURA- ORI SANDWICH STRUCTURE Yixin Wang, Jingwen Guo, Xingru Chen, Yi Fang, Xin Zhang and Hongyu Yu the Hong Kong University of Science and Technology
#601—HIGH-TEMPERATURE THIN FILM HEAT FLUX SENSOR MADE OF POLYMER- DERIVED CERAMICS FOR HARSH ENVIRONMENT Guochun Chen, Zaifu Cui, Xiaochuan Pan, Zhenyin Hai and Daoheng Sun Department of Mechanical and Electrical Engineering, Xiamen University
#603—CFD ANALYSIS OF MIXING PROCESS IN A CROSS-SHAPED MICROMIXER Shuai Yuan, Bingyan Jiang, Tao Peng and Mingyong Zhou Central South University
#604—HIGH-DETECTIVITY INFRARED DETECTOR BASED ON DUAL-LAYER THERMOPILE zhaohui yang, Gaobin Xu, Shirong Chen, Jianguo Feng, Yuanming Ma and Xing Chen Hefei University of Technology
#605—A HIGH-PRECISION MODE MATCHING METHOD FOR RATE-INTEGRATING HONEYCOMB DISK RESONATOR GYROSCOPE Sheng Yu, Xuezhong Wu, Xiang Xi, Jiangkun Sun, Qingsong Li, Dingbang Xiao and Yongmeng Zhang National University of Defense Technology
#608—DIRECT ELECTRON-BEAM PATTERNING OF MONOLAYER MOS2 WITH WATER ICE Guangnan Yao, Ding Zhao, Yu Hong and Min Qiu Zhejiang University & Westlake University
#609—ACOUSTOFLUIDIC MICROMIXER WITH BUBBLE INDUCED ULTRASONIC MICROSTREAMING Peng Tao Central South University
#610—AN OPTICAL MICROPHONE BASED ON FABRY-PEROT ETALON STABILITY STRUCTURE Liyun Wu, Yongqiu Zheng, Jiamin Chen, Chen Chen, Xiaoqiang Hua and Chenyang Xue North University of China
#611—CAPACITIVE STRETCHABLE STRAIN SENSORS BASED ON WAVY-STRUCTURED METAL ELECTRODES
140 April 25-29 , 2021 Xiamen, China
Siqi Yu and Hongyu Yu Hong Kong University of Science and Technology
#612—FABRICATION OF SOFT MAGNETIC MICROSTRUCTURES FOR MODULATION OF THE MAGNETIC FIELD DISTRIBUTION ON THE MICROMETER SCALE Fengshan Shen, Yan Yu, Yuexuan Li, Hongtao Feng and Yan Chen Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences
#614—SOFT INTERFACE DESIGN FOR ELECTROKINETIC ENERGY CONVERSION Jian Zhang and Xu Hou College of Chemistry and Chemical Engineering
#616—AN UNDERWATER MATERIAL RECOGNITION DEVICE BASED ON THE SEEBECK EFFECT Nanxi Chen, Baichuan Shan, Jianhao Liu, Yuhang Fan, Kaiyuan Zhao, Mengze Li and Changxin Liu Dalian Maritime University
#618—PATTERNED DIPHENYLALANINE NANOTUBES REGULATE THE BEHAVIOR OF HIPPOCAMPAL NEURONS Lipeng Zu, Huiyao Shi, Jia Yang, Yuanyuan Fu, Wenxue Wang, Ning Xi and Lianqing Liu Shenyang Institute of Automation, CAS
#619—TEMPERATURE COMPENSATION FOR MEMS MASS FLOW SENSORS BASED ON BACK PROPAGATION NEURAL NETWORK Yan Wang, Shijin Xiao and Jifang Tao School of Information Science and Engineering, Shandong University
#620—PRESSURE INDUCED TRANSITION FROM WRINKLING TO PERIOD-DOUBLING INSTABILITY IN FLEXIBLE TACTILE SENSORS Xiuyuan Li, Kaiming Hu, Yihang Xin, Erqi Tu and Wenming Zhang State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University
#623—IMPROVEMENT ON THE UNIFORMITY OF DEEP REACTIVE ION ETCH FOR ELECTRICALLY ISOLATED SAMPLES Xiao Hu, Zhihan Zhen and Qiyu Huang Shanghai Jiao Tong University
#624—DESIGN OF A NOVEL CLOSED-LOOP ELECTROSTATIC VOLTAGE SENSOR BASED ON WEAKLY COUPLED RESONATORS Zilong Wang, Zhengwei Wu, Xiangming Liu, Yahao Gao, Simin Peng, Ren Ren, Fengjie Zheng, Yao Lv, Jun Liu, Hucheng Lei, Zhouwei Zhang, Wei Zhang, Jiachen Li and Chunrong Peng University of Chinese Academy of Sciences
#626—EFFECT OF THE PITCH ON ELECTROFORMING PROCESS OF THE MICROCHANNELS Yanzhuo Dong Central South University
#627—THE TUNABLE DEFORMATION OF MICROFLUIDIC STRAIN SENSOR BASED ON AUXETIC METAMATERIAL
141 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Linna Mao, Dengji Guo, Sirong Huang and Taisong Pan School of Materials and Energy, University of Electronics Science and Technology of China
#628—EFFECT OF THE SUBSTRATE SIZE ON ACCURACY OF IN-SITU STRESS MEASUREMENTS Jun Qiang and Bingyan Jiang Central South University
#629—MEASUREMENT OF COMB FREQUENCY AND SPACING STABILITY IN PHONONIC FREQUENCY COMB Qiqi Yang, Liu Xu, Ronghua Huan, Zhuangde Jiang, Adarsh Ganesan and Xueyong Wei Xi’an Jiaotong University
#630—INDUCTIVE EFFECT OF NANOFIBER DEPOSITION ON GROOVE STRUCTURE ON CELL CULTURE Wenchang Tu, Yike Zhou, Bin Qiu, Shanshan You, Lingling Liu and Tianhao Wu Xiamen University
#632—PATTERNING AND IMMOBILIZATION OF SILVER NANOWIRES FOR FLEXIBLE ELECTRONICS BY USING MICROWAVE Sara Khademi, Kiyumars Jalili, Hao Wang, Md Eshrat E Alahi and Tianzhun Wu Shenzhen Institute of Advanced Technology
#634—RAPID FABRICATION OF FLEXIBLE STRAIN SENSOR FOR PLANTS GROWTH MONITORING Yicong Zhao, Jing Niu, Wenxing Huo and Xian Huang Tianjin University
#636—TEMPERATURE AND PRESSURE DUAL-PARAMETER SENSING BASED ON FIBER BRAGG GRATING Na Zhao, Qijing Lin, Liangquan Zhu, Kun Yao, Bian Tian, Libo Zhao and Zhuangde Jiang Xi’an Jiaotong university
#639—ACHIEVING HIGH ENERGY-STORABLE POLYTHIOUREA DIELECTRIC MATERIALS IN MOLECULAR DESIGN THROUGH TUNING H-BONDS Yang Feng, Guanghao Qu, Liuqing Yang, Huan Niu and Shengtao Li Xi’an Jiaotong University
#640—OPTICAL ANALYSIS OF PEROVSKITE LIGHT-EMITTING DIODES WITH NANOSTRUCTURED EMISSIVE LAYER VIA ELECTRICAL SIMULATION-ASSISTED DIPOLE LOCATION Liyang Chen, Zhuofei Gan, Dehu Cui, Jingxuan Cai and Wendi Li University of Hong Kong
#641—ULTRATHIN ELASTIC SHAPE SENSOR USED FOR ENDOSCOPE SHAPE RECONSTRUCTION Leixin Meng, Yuan Zhuang, Liqiang Wang and Qing Yang Zhejiang Lab
#642—MICROFLUIDICS FOR SINGLE-CELL MULTI-OMICS ANALYSIS Xu Xing and Yang Chaoyong
142 April 25-29 , 2021 Xiamen, China
Xiamen University
#643—A BIOSENSOR KIT BASED ON CU-MOF FOR SIMULTANEOUS DETECTION THE CORTISOL AND CYFRA21-1 IN HUMAN SALIVA Xinyi Wang, Tao Zhang, Shuqi Zhou, Liubing Kong, Wencheng Lin, Hao Wan and Ping Wang University of zhejiang university
#644—LASER INDUCED GRAPHENE PATTERNS ON A THIN POLYIMIDE FILM VIA A COOLING PLATE Qixiang Chen, Dezhi Wu, Zhiwen Chen, Hang Yu, Qinnan Chen and Daoheng Sun Department of Mechanical and Electrical Engineering, Xiamen University
#645—A ROBOTIC DYNAMIC TACTILE SENSING SYSTEM BASED ON ELECTRONIC SKIN Jishen Dai, Yu Xie, Dezhi Wu, Chen Songyue, Ting Fu and Wei Zhou Xiamen University
#647—CHARACTERIZATION OF AN ASYMMETRICAL CAPACITIVE MEMS TILT SENSOR Yang Gao, Xiaopeng Zhang, Yonghong Qi, Maeda Ryutaro, Zhuangde Jiang and Xueyong Wei Xi’An Jiaotong University
#648—A REFLECTIVE COLOR FILTER BASED ON ITO-BA0.5SR0.5TIO3-ITO NANOFILMS CAPITALIZING ON A BLACK LAYER Rui Wang, Jinying Zhang, Bingnan Wang, Xinye Wang, Defang Li, Jingyi Chen, Chenyu Guo, Xin Wang, Zhuo Li and Suhui Yang Beijing Institute of Technology
#653—HIGH-PERFORMANCE RUBBERY ELECTRONICS ENABLED BY ELASTOMERIC COMPOSITE MATERIALS Kyoseung Sim Ulsan National Institue of Science and Technology (UNIST)
#654—A FLEXIBLE ROPE-LIKE STRUCTURE SENSOR BASED ON TRIBOELECTRIC NANOGNERATOR FOR MULTIFUNCTIONAL SENSING Cong Zhao, Anaeli Elibariki Mtui, Xiangyu Liu, Kun Jiang, Jianye Wang, Chuan Wang and Minyi Xu Dalian Maritime University
#656—GIANT OPTICAL ACTIVITY IN ACHIRAL PLASMONIC AU NANOCONES EMBEDDED INTO ALUMINA NANOHOLE ARRAYS Yuyi Feng Beijing Institute of Technology
#657—FERROELECTRIC NANOCRACK-BASED NANOELECTROMECHANICAL (NEM) SWITCHES FOR MEMORY AND COMPLEMENTARY LOGIC Yaodong Guan, Zhe Guo, Qiang Luo, Jeongmin Hong and Long You Huazhong University of Science and Technology
#658—CONICAL HELMHOLTZ RESONATOR-BASED TRIBOELECTRIC NANOGENERATOR FOR HARVESTING OF ACOUSTIC ENERGY HongYong Yu, Taili Du, Hongfa Zhao, Qiqi zhang, Ling Liu, yue Huang, Anaeli Elibariki Mtui, Xiu
143 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Xiao and Minyi Xu
#659—3D CELL ELECTRICAL IMPEDANCE BIOSENSOR FOR REAL-TIME DRUG PERMEABILITY GRADIENT EFFECT MONITORING Yong Qiu, Xin Liu, Hao Wan, Ping Wang and Liujing Zhuang Zhejiang University
#661—TRIBOELECTRIC NANOGENERATOR FOR WIND ENERGY HARVESTING AND SPEED SENSING Yan Wang, Chuanqing Zhu, Mengwei Wu, Hao Wang, Xiu Xiao, Guochang Wang, Jianchun Mi and Minyi Xu Dalian Maritime University
#662—FLEXIBLE TRIBOELECTRIC NANOGENERATOR FOR FLOW CONTROL Chuanqing Zhu, Xiangyi Wang, Mengwei Wu, Jialin Zhang, Chenxing Jia, Guochang Wang, Jianchun Mi and Minyi Xu Dalian Maritime University
#666—DESIGN AND FABRICATION OF A MULTIMODE OPTICAL FIBER SURFACE PLASMON RESONANCE UREA BIOSENSOR Jiayin Li, Mengdi Han, Ji Wan and Haixia Zhang Peking University
#670—A RESONANT DIFFERENTIAL PRESSURE MICROSENSOR WITH A STRESS ISOLATION LAYER Yadong Li, Chao Cheng, Yulan Lu, Jian Chen, Deyong Chen and Junbo Wang Aerospace Information Research Institute, Chinese Academy of Sciences
#671—A NOVEL DUAL-CHANNEL HELMHOLTZ RESONANCE ACOUSTIC ENERGY CONVERTER BASED ON FRICTION NANOGENERATOR Ling Liu, Hongfa Zhao, Zhenhui Lian, Hongyong Yu, Qiqi Zhang, Wenxiang Li, Minyi Xu and Xiu Xiao
#672—FABRICATION OF MULTI-ORIENTED COMPOSITE NANOFIBROUS MEMBRANE BY ELECTROSPINNING Xiang Wang, Yongfu Xu, Jinghua Lin, Sinan Fu, Jiaxin Jiang, Gaofeng Zheng and Wenwang Li Xiamen University of Technology
#673—A BREATHABLE AND FLEXIBLE EPIDERMAL GLUCOSE SENSOR Hailong Chen, Zhihua Pu and Dachao Li Tianjin University
#675—DESIGN OF LOW SIDELOBE LEVEL MILIMETER-WAVE PLANAR SLOTTED ARRAY ANTENNA FED BY RIDGE WAVEGUIDE Cao Yan and Yiming Tang Nanjing University of Posts and Telecommunications
#679—MODULARIZED HYDROGEL-GATE FIELD-EFFECT-TRANSISTOR BIOSENSORS Xiaochuan Dai Tsinghua University
144 April 25-29 , 2021 Xiamen, China
#680—BANDWIDTH EXPANSION IN ACOUSTIC FILTERS BASED ON ALN-ON-SILICON RESONATORS Jiannan Chen, Cheng Tu, Feilong Li and XIAOSHENG ZHANG University of Electronic Science and Technology of China
#681—AN ELECTROMAGNETIC ACTUATOR WITH NONLINEAR PLANAR MICRO- SPRING FOR EXTENDED OUTPUT RANGE Xuhan Dai Shanghai Jiao Tong University
#682—A HIGH DC CURRENT OUTPUT SALT BATTERY HYBRID AND ENHANCED BY TENG Shuangshuang Liu, Jiayi Yang, Zihao Niu, Yan Meng, Wei Xu, Di Feng, Baolong Wang, Meiqi Wang and Xiuhan Li Beijing Jiaotong University
#683—THE INFLUENCE OF ELECTRODE ON ELASTIC CONSTANT C33D EXTRACTION OF SCANDIUM-DOPED ALUMINUM NITRIDE THIN FILM BY THICKNESS- EXTENSIONAL MODE FBAR Hu Xia Xiamen University
#685—ONE-STEP PREPARATION OF UNDERWATER SUPEROLEOPHOBIC ALUMINUM- COATED COPPER MESH BY PULSED LASER CLADDING FOR ENHANCED OIL-WATER SEPARATION Junjin Lai and Rui Zhou Xiamen University
#686—A RESONANT HIGH PRESSURE SENSOR BASED ON DUAL CAVITIES DESIGN Jie Yu, Yulan Lu, Deyong Chen, Junbo Wang and Bo Xie Chinese Academy of Science
#687—MICROFLUIDIC DEVICE FOR ISOLATING CIRCULATING FETAL CELLS Huimin Zhang and Chaoyong Yang
#689—NUMERICAL ANALYSIS OF LASER ABLATED STRUCTURAL SIZE EFFECT ON ENHANCED ANTI-ICING PROPERTY OF TC4 SURFACE Zhekun Chen, Rui Zhou, Yuhang Lin, Yi Zhu and Huangping Yan Xiamen University
#690—FACILE ACCESS TO SOLVENT-DEPENDENT LUMINESCENT CARBON NANOPARTICLES BY LASER ABLATION OF ACTIVATED CARBON POWDERS Zhibin Chen, Rui Zhou, Longfan Li and Jingqin Cui Xiamen University
#693—FABRICATION OF SUPERHYDROPHOBIC SURFACE BY INKJET PRINTING OF NANO SILVER SEEDS ON POROUS PAPER Xinghao Zhang, Jin Xie and YU LIU Jiangnan University
#696—A MEMS VOICE COIL MOTOR WITH A 3D SOLENOID COIL
145 The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems
Jiamian Sun, Zhi Tao, Haiwang Li, Kaiyun Zhu, Donghui Wang, Tiantong Xu and Hanxiao Wu Beihang University
#702—TRIBOVOLTAIC AND TRIBO-THERMOELECTRIC COUPLING EFFECT ON METAL-SEMICONDUCTOR INTERFACE Zhi Zhang and Chi Zhang Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences
#703—FULL PRINTED FLEXIBLE PRESSURE SENSOR BASED ON MICROCAPSULE CONTROLLABLE STRUCTURE AND COMPOSITE DIELECTRICS Xiangyou Meng, Jing Zhao, Yaqin Pan, ziyun Han and Lixin Mo Beijing Institute of Graphic Communication
#707—NANOSCALE TRIBOELECTRIFICATION GATED TRANSISTOR Tianzhao Bu and Chi Zhang Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences
#708—MODULATED FLEXIBLE ARTIFICIAL SYNAPTIC TRANSISTOR BASED ON GRAPHENE AND IONIC GEL Di Feng Beijing Jiaotong University
#709—PREPARATION AND RESEARCH OF ITO THIN FILM STRAIN GAUGE Tao Yang and Daoheng Sun School of Aerospace Engineering,Xiamen University
#710—SCREEN PRINTING-BASED WEARABLE MULTI-SENSING DOUBLE-CHAIN THERMOELECTRIC GENERATOR Tao Feng, Danliang Wen, Haitao Deng and Xiaosheng Zhang University of Electronic Science and Technology of China
#711—OPTICAL FIBER WAVEGUIDING SOFT PHOTOACTUATORS EXHIBITING GIANT REVERSIBLE SHAPE CHANGE Yongcheng He, Haohua Liang, Jiulin Gan, Zhongmin Yang and Meihua Chen South China University of Technology
#712—STUDY OF STRAIN SENSING BEHAVIOR OF SELF-POWERED STRETCHABLE MECHANOLUMINESCENT OPTICAL FIBER Haohua Liang, Yongcheng He, Meihua Chen, Jiulin Gan and Zhongmin Yang South China University of Technology
#713—THE LARGE PIEZOELECTRICITY AND HIGH-POWER DENSITY OF A 3D-PRINTED MULTILAYER COPOLYMER IN A RUGBY THE BALL-STRUCTURED MECHANICAL ENERGY HARVESTER Xiaoting Yuan, Zhanmiao Li, Zhonghui Yu and Shuxiang Dong Peking university at Beijing
#714—TUNING AND VISUALIZING MOTIONAL SIGNAL TRANSDUCTION EFFICIENCY IN ATOMICALLY-THIN NANOELECTROMECHANICAL RESONANT STRUCTURES Jiankai Zhu, Jing Li, Xu Bo, Song Wu, Fei Xiao, Yachun Liang, Ting Wen, Fei Wang and Zenghui Wang University of Electronic Science and Technology of China
146 April 25-29 , 2021 Xiamen, China
#715—PARTICLE-FILLED PHPS SILAZANE-BASED INSULATION COATING WITH HIGH-TEMPERATURE ELECTRICAL INSULATING PROPERTIES ON NI-BASED SUPERALLOY SUBSTRATES Ji’an Lin, Qinnan Chen, Zaifu Cui, Zhenyin Hai and Daoheng Sun Xiamen University
#716—RESEARCH ON TORQUE CALCULATION MODEL OF MR FLUID-BASED MICRO- BRAKE IN THERMAL ENVIRONMENT Yan Zhang, Ying Liu and Jun Dai Nanchang University
#718—A LOW POWER MEMS MICROHEATER FOR MOS GAS SENSOR APPLICATIONS Ziwei Lian State key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co. Ltd
#719—ELECTRON-BEAM-INDUCED 3D DIRECT-WRITING OF A NANOELECTRODE ARRAY FOR INTRACELLULAR ELECTROPHYSIOLOGICAL RECORDING Wenqi Zhang and Lixin Dong Department of Biomedical Engineering, City University of Hong Kong
#720—ELECTRICALLY-RESPONSIVE COLLOIDAL PARTICLE ASSEMBLY IN IONIC SURFACTANT SOLUTIONS Minqi Yang, Lisha Luo, Haiyang Fu, Hongjie Yin, Zhibin Yan, Mingliang Jin, Huicheng Feng, Guofu Zhou and Lingling Shui South China Normal University
147
武汉华威科智能技术有限公司高分辨率电流体喷印设备 ——+.*0KZ系列科研型 ]]]KNJPKZIUS
产品介绍 6XUJ[IZ/TZXUJ[IZOUT
+.*0KZ系列科研型电流体喷印设备，源自华中科技大学数字制造装备 与技术国家重点实验室的高分辨率电流体喷印原创性技术，获 年湖北 省自然科学一等奖和年国际日内瓦发明展金奖；配置高速视觉系统、 高精度多自由度运动平台、精密供墨系统等功能模块，适用I6Y粘 度的有机无机墨水，集成按需点喷、纺丝直写、雾化制膜三种打印模式， 支持矢量图、位图等图形输入，高精度制备微纳级点点阵、线曲线、薄膜 结构等复杂微纳图案。
功能模式 ,[TIZOUTSUJK
按需点喷 纺丝直写 雾化制膜
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光电显示：量子点、像素点、:,:、光提取等
电子传感：薄膜器件、可拉伸器件、电极线等
光学：打印光刻胶、电流体光刻掩膜、微透镜等 ✓ 定位重复运动精度达±±1μm ✓ 高帧率在线观测 精密定位相机 ✓ 支持矢量图 位图格式 ✓ 可定制化：曲面补偿、熔融纺丝等 光刻胶I6Y6<*,I6Y，刻蚀微沟道 微米级微透镜，光敏树脂I6Y占空比 ✓ 兼容墨水粘度范围：dI6Y 材料生物：晶体生长、薄膜沉积、纤维支架等 点喷 最小直径 "μm 打线 最小线宽 "μm 制膜 最小厚度 dTS 6+5I6Y，生长纳米@T5 雾化石墨烯薄膜 62-'纤维 *6)2支架 *4'点阵
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Welcomes you all for NEMS 2021 IEEE-NEMSIEEE-NEMS The 17th IEEE International Conference on Nano/Micro Engineered & Molecular Systems 20222022 April 14-17, 2022 Chang Gung University, Taoyuan, Taiwan Key Info: ＊The conference is now accepting Invited Session proposals. Please send Invited Session proposals to Prof. Kin Fong Lei ([email protected]). ＊Conference Website: https://ieee-nems.org/2022/.
Conference scope: Conference Committee: ＊Micro/Nano Electro-Mechanical General Chair: Systems (M/NEMS) Eric Pei-Yu Chiou (University of California at Los Angeles) ＊Micro/Nano/Molecular Fabrication General Co-chair: ＊Nanomaterials Pin-Chuan Chen ＊Nanomaterial Based Devices and (National Taiwan University of Science and Technology) Systems Program Chair: ＊Nanophotonics and Nanoscale Kin Fong Lei (Chang Gung University) Imaging Program Co-chair: ＊Nanoscale Robotics, Assembly, Aaron Ohta (Hawaii University) and Automation Organizing Chair: ＊Molecular Sensors, Actuators, Cheng-Hsin Chuang (National Sun Yat-sen University) and Systems Invited Session Chairs: ＊Micro/Nano Fluidics Guangyi Shi (Peking University) ＊Micro/Nano Mechanics Sung Yong Park (San Diego State University) ＊Nanobiology/Nanomedicine Tim Yeh (University of Texas at Austin)
Important Dates: Two-Page Abstract Deadline Notification of Acceptance: Full-paper Submission Deadline: (both Oral & Poster): December 1, 2021 January 15, 2022 October 15, 2021 * (Only required to publish papers in Xplore) * Best paper competition: A full paper (4 to 6 pages) is required by October 15, 2021 to enter best paper contests. ican-x.com
Connect the world and Universe 联结世界和宇宙
打造以“创新、科技、教育”为主题的 集教育、传播、服务为一体的国际创新生态系统！ IEEE-NEMS 2021
The 16th IEEE International Conference The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems on Nano/Micro Engineered & Molecular Systems
IEEE-NEMS.org/2021 April 25-29 , 2021, Xiamen, China
PROGRAM