Louisiana State University LSU Digital Commons LSU Master's Theses Graduate School 2004 Design, fabrication and thermomechanical testing of a vertical bimorph sensor in the wafer plane Madhulika Sathe Louisiana State University and Agricultural and Mechanical College,
[email protected] Follow this and additional works at: https://digitalcommons.lsu.edu/gradschool_theses Part of the Mechanical Engineering Commons Recommended Citation Sathe, Madhulika, "Design, fabrication and thermomechanical testing of a vertical bimorph sensor in the wafer plane" (2004). LSU Master's Theses. 2620. https://digitalcommons.lsu.edu/gradschool_theses/2620 This Thesis is brought to you for free and open access by the Graduate School at LSU Digital Commons. It has been accepted for inclusion in LSU Master's Theses by an authorized graduate school editor of LSU Digital Commons. For more information, please contact
[email protected]. DESIGN, FABRICATION AND THERMOMECHANICAL TESTING OF A VERTICAL BIMORPH SENSOR IN THE WAFER PLANE A Thesis Submitted to the Graduate Faculty of the Louisiana State University and Agricultural and Mechanical College in partial fulfillment of the requirements for the degree of Master of Science in Mechanical Engineering in The Department of Mechanical Engineering by Madhulika Sathe B.Tech, Bapatla Engineering College, India, 2000 December 2004 To my husband Akshay and my parents Meera and Dilip Sathe, who always believed in me and were there for me at each and every stage of life ii ACKNOWLEDGEMENTS I have learned a lot during the course of completion of my thesis. I have grown both emotionally and intellectually. I undertook more roles than any one around me. I was a tutor for LSU student athletes in the Department of Kinesiology for two semesters and then I worked as a student worker and as graduate assistant at CAMD.