Table of Contents Pressure Switch Selection Guide

Table of Contents Pressure Switch Selection Guide ...... 5 Electronic Pressure Switch ...... 5 Mechanical Pressure ...... 8 Pressure Switch Application Example ...... 9 Series ZSE30/ISE30 High Precision, 2-color Display Digital Pressure Switch...... 12 Features...... 13 Series ZSE30/ISE30 High Precision, 2-color Display Digital Pressure Switch...... 15 How to Order ...... 15 Specifications...... 16 Setting...... 17 Dimensions ...... 21 Precautions...... 24 Series ZSE40/ISE40 High Precision, Digital Pressure Switch...... 26 Features...... 27 How to Order ...... 28 Specifications...... 29

Electronic Pressure Switch Series (Separate Type) Model Selection Table

Sensor

PSE53 PSE54 PSE56 PSE550

Model

Fluid General pneumaticGeneral fluids General pneumatic

Calibration

Voltage 12 to 24 VDC (Ripple p-p 10% or less)

±2% F.S. or less Temperature ±2% F.S. or less (0 to 50°C: based on 25°C) ±3% F.S. or less characteristics (25°C) ±3% F.S. or less (25°C) (–10 to 60°C: based on 25°C)

Repeatability ±1% F.S. or less ±0.2% F.S. or less ±0.3% F.S. or less

Hysteresis

Output

Display (Resolution)

Enclosure IP40 IP65 IP40

Note

Page 16-3-1 16-3-23 16-3-33

16-1-2 2

Electronic Pressure Switch Series (Separate Type) Model Selection Table

Controller

PSE300 PSE200

Model

Sensor 1 input 4 inputs input amount

Calibration Push-button calibration

Voltage 12 to 24 VDC (Ripple p-p 10% or less)

Temperature ±0.5% F.S. or less characteristics (0 to 50°C)

Repeatability ±0.1% F.S. or less

Hysteresis mode: Hysteresis mode: Variable Hysteresis Variable Window comparator mode: Window comparator mode: Variable Fixed (3 digits)

NPN/PNP open collector NPN/PNP open collector Output 2 outputs 1 CH: 2 outputs Analog output 2 to 4 CH: 1 output

Display Transparency (negative) (Resolution) LCD + Backlight

Front only IP65 Enclosure IP40 The rest IP40

Panel mounting possible Display calibration Selectable pressure unit function Auto shift function Anti-chattering Auto preset function function Peak hold Note Bottom hold

Page 16-3-33 16-3-1

16-1-3 3

Electronic Pressure Switch Series (Self-contained Type) Model Selection Table

Self-contained Type

ZSE1 ZSE2 PS1000 ZSP1 ISA2 ZSE3 ZSE30 ZSE40 ISE70 ISE75 ZSE50F ZSE60F ISE1 ISE2 PS1100 ISE3 ISE30 ISE40 ISE75H ISE50 ISE60

Model

Fluid General pneumatic General fluids

Calibration Tr immer calibration Push-button calibration

method Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 30 to 200 kPa Set 0 to 100 kPa (Detection distance 0 to 98 kPa –100 to 100 kPa –0.1 to 0.45 MPa –20 to 0.01 to 0.25 mm) –101 to 101 kPa 0.4 to 10 MPa –100 to 100 kPa pressure 0 to 1 MPa 50 to 200 kPa 0 to 0.98 MPa 10 to –101.3 kPa 0 to 1 MPa –0.1 to 0.4 MPa –101 kPa (Detection distance –0.1 to 1 MPa 0.5 to 15 MPa –0.1 to 1 MPa range 0 to –101 kPa 0.03 to 0.50 mm) 0 to –101 kPa –0.1 to 1 MPa

Voltage 12 to 24 VDC (Ripple ±10% or less)

±3% F.S. or less ±3% ±3% ±3% (5 to 40°C) 0.01 mm or less Temperature F. S. or less F. S. or less F. S. or less ±2% F.S. or less ±3% F.S. or less (0 to 60°C) characteristics (0 to 60°C) ±5% F.S. or less (0 to 60°C) (0 to 60°C) (0 to 50°C: based on 25°C) (0 to 50°C: based on 25°C) (0 to 60°C)

ZSE30: ±0.2 F.S. ±2 digits or less Repeatability ±1% F.S. or less ISE30: ±0.2% F.S. ±1 digit or less ±0.5% F.S. ±0.2% F.S. ±1 digit or less ±0.2 F.S. ±1 digit or less Hysteresis mode: Hysteresis mode: Variable Fixed Hysteresis mode: Hysteresis mode: Variable 1 to 10% Fixed Fixed 0.01 mm Variable Variable Variable Hysteresis 3% F.S. Window comparator mode: Window comparator mode: Fixed (3 digits) Fixed 3% 4% F.S. 0.5 kPa or less Window comparator Fixed (3 digits) Window comparator mode: F. S. or less or less mode: Variable Digit is min. calibration unit. Variable Digit is min. calibration unit.

NPN/PNP NPN/PNP NPN open NPN/PNP 1 setup NPN/PNP NPN/PNP open NPN/PNP NPN NPN/PNP collector open collector Output open 2-wire type open open open collector open collector open collector collector 1-5 V, 4-20 mA collector collector collector Analog Analog output PNP open collector Analog output Analog output output Analog output

Display LED LCD Green LED Green LED Green LED Green LED (Resolution) level meter (1%) Red LED Red LED

Enclosure IP66 IP40 IP65 IP67

For use For use Small Seating For use Panel Panel Selectable pressure unit R thread URJ with ZM with ZX or diameter confirmation with ZX mounting mounting Panel TSJ ejector ZR ejector nozzles 6-station ejector possible possible mounting Panel Adsorption manifold Self-diagnostic Selectable Selectable possible mounting Note confirmation available function pressure pressure Selectable possible For use Failure unit unit pressure Selectable with ZX diagnostic Auto shift unit pressure ejector output function function Auto shift unit Peak hold Compound function Auto shift Bottom hold pressure function

Page 16-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-4516-2-48 16-2-28 16-2-36

16-1-4 16-1-5 4

MechanicalMechanical PressurePressure SwitchSwitch SeriesSeries Model Selection Table

Positive Pressure Negative Pressure

IS1000IS3000 ISG11/ISG21 ISG12/ISG22 ISG13/ISG23 ISG19/ISG29 ZSM1

Model

Fluid General pneumatic General fluids General pneumatic

Set 0.1 to 0.4 MPa 0.1 to 0.7 MPa 0.02 to 0.3 MPa 0.05 to 0.7 MPa 0.1 to 1.0 MPa –7 to –100 kPa –27 to –80 kPa pressure range

4.5 to 28 VDC to 100 VDC 24 to 125 VDC 24 to 220 VDC (ZSM1-115) Voltage to 100 VAC 100 to 250 VAC 100 to 550 VAC 100 VAC/DC or less (ZSM1-121)

Repeatability ±0.05 MPa ±0.05 MPa ±3% F.S. ±3% F.S. ±3% F.S. ±3% F.S. ±10% F.S.

0.02 to 0.35 MPa 0.03 to 0.4 MPa 15 kPa or less Hysteresis (Without pointer scale) (Without pointer scale) (ZSM1-115) (Calibration 0.08 MPa or less 0.05 MPa or less 0.01 to 0.2 MPa 7 to 53 kPa range of ISG) 0.02 to 0.45 MPa 0.03 to 0.6 MPa 20 kPa or less (With pointer scale) (With pointer scale) (ZSM1-121)

NPN open collector (ZSM1-115) Contacts 1a 1ab 1a1b 1a (ZSM1-121)

Enclosure Possible with ISG2 (Equivalent to IP44)

Set pressure Micro-load type available • 2ab contact type (Option) Compliant with Note range 0.1 to 0.6 Available indicator light ZM ejector MPa (-X202) • With light (Refer to Series IS2761.)

Page 16-9-1 16-9-3 16-9-5 16-10-1

16-1-6 16-1-7 5 PressurePressure SwitchSwitch ApplicationApplication ExampleExample When selecting a model, please thoroughly review and confirm beforehand, that the model will meet the necessary specification. Adsorption Confirmation

1 Sensor installed close to the pad 2 Sensor installed close to the pad (No. 1) Series PSE54 + PSE200 (No. 2) Series PS1100 16-3-23 16-3-1 16-5-1

Pad adsorption can be confirmed easily. Response de- lays, caused by piping, will not be a factor due to the

Due to its small size, the sensor can be installed close to a pad. Calibration is easy with auto-preset function.

3 Adsorption confirmation of a 4 Installation of a group of sensors as workpiece absorbed with water/oil a manifold style at the same site Series ZSE50 Series PSE54 16-2-28 16-3-23

Adoption of a stainless diaphram enables to detect, even though water or oil is adhered to a workpiece and then made ingress to the sensing part.

Leak Test

5 Inspection of a radiator 16-3-1 Series PSE532 + PSE300 16-3-33

Low pressure sensor (PSE532-) is used to detect minute differ- entiations. Auto shift function reduces influence of fluctuations in the supply pressure.

16-1-8 6 Pressure Switch Application Example

Confirmation of Supply Pressure

6 Confirmation of supply pressure in air line 7 Confirmation of supply pressure Series ISE30 in washing line Series PSE560 + 16-3-23 16-2-1 16-3-33 PSE300

Supply pressure of water, oil, etc. can be confirmed by sensor for general purpose

fluids. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Line pressure can be adjusted by monitoring the digital readout. Visual verification of the operating pressure. Output can be pro- grammed to respond to supply pressure drops, etc.

8 Confirmation of atmospheric pressure 9 Verifies peening of hydraulic for load lock chamber cylinders Series ZSE60 Series ISE50 16-2-36 16-2-28

Verification of pressure in the load lockchamber (vacuum spare chamber of mainchamber)

Confirmation of Placement

10 Confirmation of correct workpiece 11 Confirmation of a workpiece placement presence simply Series ISA2 Series ZSE40F 16-8-1 16-2-15

kPa

Able to confirm the position easily even in a place, where the OUT1 OUT2 z temperature is high for detecting parts like die-casting, and an Presence of a workpiece is confirmed by environment, where a proximate sensor cannot be used. detecting the back pressure at the nozzle.

16-1-9 7 Pressure Switch Application Example

Low Differential Pressure Detection

12 Flow control 13 Filter clogging monitoring 16-3-33 Series PSE550 Series PSE550 16-3-33

Can control filtration and replacement periods by Can control air flow by monitoring the monitoring the flow rate clogging of the

inside the duct. filter. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

14 Liquid level detection 16-3-33 Series PSE550

Can detect the liquid level through changes in the purge pressure.

16-1-10 1 High Precision, 2-color Display Digital Pressure Switch Series ZSE30/ISE30

ZSE ISE PSE

Z I SE3 PS

With One-touch fittings are newly introduced.

Straight type Elbow type 16-2-1 2 2-color digital display allows you to choose the setting according to your application requirements.

4 different display settings are available. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

∗ This photo shows 2 display colors simultaneously for product presentation purposes. In actual application, only one color is displayed at a time. Abnormal conditions can be detected at a glance!

PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa

OUT OUT OUT OUT OUT SET SET SET SET SET

With One-touch fitting (ø4, ø6, ø5/32", ø1/4") Reduced dimensions in piping direction 17.8 mm reduction∗ 12.4 mm reduction∗ Straight type Elbow type

14.4 22.4

17.8 mm 12.4 mm

32.2 34.8

KQ2H06-M5 KQ2L06-M5

∗ Comparison when One-touch fittings (KQ2H06-M5 / KQ2L06-M5) are connected to the piping ports (M5 x 0.8) 16-2-2 3 Space-saving improvement Economical use of space

Old Model ZSE4E ISE4E Each display required its own panel opening. Display calibration

Old Model ZSE ISE 40

PSE

Z I SE3 126 PS New Model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z 1 I SE 2 New Model Just one panel opening is ZSE30 required for stackable ZSP ISE30 displays, which can be mounted either horizontally ISA2 or vertically. IS This function allows uniformity in the numbers displayed. ZSM

34.5 More user-friendly controls PF2

Raised rubber IF button controls are 103.5 clearly set apart, Data Compact profile simple to operate, soft to the touch.

Plug-type Applicable connectors take the panel thickness is burden out of up to 6 mm. wiring work and (Panel mounting) maintenance.

With analog output High-precision

In addition to the conventional voltage output type (1 to 5 V) resolution: 1/1000 Current output type (4 to 20 mA) is now available. • Convenient when longer wiring is required • Excellent noise resistance Variations Vacuum/Low pressure Positive pressure Switches for vacuum and positive ZSE30 ISE30 pressure can be easily distinguished. 100 kPa 1 MPa Rated pressure 0 0 The different display panel frame colors easily tell them apart. range

–100 kPa Vacuum/Low pressure (ZSE30) Positive pressure (ISE30) Setting/Display resolution 0.2 kPa 0.001 MPa Switch output NPN/PNP open collector (1 output) Blue Gray Output Analog output Voltage output: 1 to 5 V; Current output: 4 to 20 mA Current consumption 45 mA or less (70 mA or less for current output) Option Panel mount/Bracket

16-2-3 ® 4

High Precision, 2-color Display Digital Pressure Switch Series ZSE30/ISE30

How to Order

Option 1 Without lead wire

Nil

Lead wire with connector

For positive pressure ISE30 01 25 M

For vacuum/low pressure ZSE30 01 25 M

Piping specifications Option 2 Nil None R 1/8 01 (With M5 female thread) Bracket

NPT 1/8 T1 A (With M5 female thread)

ø4 One-touch fitting C4H Straight type ø5/32" One-touch fiting Output specifications Panel mount C6H ø6 One-touch fitting 25 NPN output 65 PNP output 26 1 to 5 V output B N7H ø1/4" One-touch fitting 28 4 to 20 mA output ø4 One-touch fitting C4L Elbow type ø5/32" One-touch fitting Panel mount adapter + Front protective C6L ø6 One-touch fitting cover D N7L ø1/4" One-touch fitting

Option Part No. Unit specifications When optional parts are required separately, use the following part numbers to place an order. Nil With unit switching function M Fixed SI unit (International System of Units) Note) Option Part no. Note Note) Fixed unit: Lead wire with connector ZS-27-A Lead wire length: 2 m For vacuum/Low pressure: kPA With mounting screws Bracket ZS-27-B For positive pressure: MPa (M3 x 5L: 2 pcs.) Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) Panel mount adater + Front protective cover ZS-27-D With M3 x 8L (2 pcs.)

16-2-4 5 High Precision, 2-color Display Digital Pressure Switch Series ZSE30/ISE30

Specifications

ZSE30 (Vacuum/Low pressure) ISE30 (Positive pressure) Rated pressure range –100.0 to 100.0 kPa 0.000 to 1.000 MPa Regulating pressure range –101.0 to 101.0 kPa –0.100 to 1.000 MPa Proof pressure 500 kPa 1.5 MPa Min. regulating unit 0.2 kPa 0.001 MPa Fluid Air, Inert gas, Non-flammable gas Power supply voltage 12 to 24 VDC, Ripple (p-p) 10% or less (With power supply polarity protection) Current consumption 45 mA or less (at no load) ZSE ISE Switch output Note 1) NPN or PNP open collector output: 1 output Max. load current 80 mA PSE Max. applied voltage 30 V (With NPN output) Residual voltage 1 V or less (With load current of 80 mA) Z I SE3 Response time 2.5 ms or less (Response time selections with anti-chattering function: 20, 160, 640, 1280 ms) Short circuit protection Ye s PS Repeatability ±0.2% F.S. ±2 digit or less ±0.2% F.S. ±1 digit or less Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Note 2) Output voltage: 1 to 5 V ±2.5% F.S. or less (With rated pressure range) Z 1 Voltage output I SE 2 Linearity: ±1% F.S. or less, Output impedance: Approx. 1 kΩ Analog Output current: 4 to 20 mA ±2.5% F.S. or less (With rated pressure range) ZSP output Note 3) Linearity: ±1% F.S. or less Current output Maximum load impedance: 300 Ω with power supply voltage of 12 V; 600 Ω with power supply voltage of 24 V ISA2 Minimum load impedance: 50 Ω Hysteresis mode Hysteresis Adjustable (can be set from 0) IS Window comparator mode 3 1/2 digit, 7-segment indicator, 2-color display (Red and green) ZSM Display Sampling cycle: 5 times/s 2% F.S. 2 digit 2% F.S. 1 digit Display accuracy ± ± ± ± PF2 (at 25°C ambient temperature) (at 25°C ambient temperature) Indicator light Light up when output is ON (Green) IF Temperature characteristics ±2% F.S. or less (based on 25°C) Enclosure IP40 Data Operating temperature range Operating: 0 to 50°C, Stored: –10 to 60°C (No freezing or condensation) Operating humidity range Operating and stored: 35 to 85% RH (No condensation) Withstand voltage 1000 VAC for 1 min. between live parts and enclosure Insulation resistance 50 MΩ or more between live parts and enclosure (at 500 VDC) 2

Environmental resistance Vibration resistance 10 to 150 Hz, 1.5 mm or 20 m/s amplitude in X, Y, Z directions for 2 hours each Impact resistance 100 m/s2 in X, Y, Z directions 3 times each Standard Compliant with CE Marking and UL (CSA) standards Note 1) When switch output is selected, analog output is not available. Note 2) When voltage output is selected, a simultaneous selection of switch output and current output is not available. Note 3) When current output is selected, a simultaneous selection of switch output and voltage output is not available.

Piping Specifications

Part 01 T1 C4H C6H N7H C4L C6L N7L R 1/8 NPT 1/8 — — — — — — M5 x 0.8 M5 x 0.8 Port One-touch fitting ø4 mm — — ø6 mm ø1/4 inch — — — size Straight type ø5/32 inch One-touch fitting ø4 mm — — — — — ø6 mm ø1/4 inch Elbow type ø5/32 inch Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR O-ring: NBR, fitting: PBT With lead wire 81 g 76 g 78 g with connector (2 m) Weight Without lead wire 43 g 38 g 40 g with connector

16-2-5 6 Series ZSE30/ISE30

Setting

Pressure setting Press theSET button. Enter the set value of the Press theSET button. Measuring mode pressure to perform switch output. Detects and displays the pressure and Measuring performs switch operations. Other functions mode such as the value clear function can be set Initial setting according to the application purpose. Press theSET button Set the output type, response time, and display color Press theSET button. and hold for 2 sec. or longer. switching. Initial Setting Initial setting mode 3. Output type setting Press and hold the SET button for 2 seconds or longer. Display monitor will be per Figure A below, and the switch The type of switch output can be set arbitrarily. will now be in the display color setting mode. While the current output type is displayed, press the DOWN button to switch between normally open and PRESSURE normally closed .

OUT

Figure A OUT OUT If the unit specification indicated at the time of ordering is “M”, Normally open Normally closed the fixed SI unit will be used. If it is Nil, refer to “Unit Switching Function” on page 16-2-8. Press the SET button to set the output type and proceed to the response time setting.

1. Display color setting 4. Response time setting Select the color for LCD display. The switch output response time can be set arbitrarily. Press the UP or DOWN button to choose a display color. Chattering can be prevented with a response time setting. While the current response time is displayed, press the UP PRESSURE PRESSURE or DOWN button to select a new response time.

PRESSURE PRESSURE PRESSURE

OUT OUT ON: Red ON: Green

OUT OUT OUT PRESSURE PRESSURE 2.5 ms 20 ms 160 ms

PRESSURE PRESSURE

OUT OUT ON/OFF: Red ON/OFF: Green Press the SET button to set the color and proceed to the OUT OUT operating mode setting. If the analog output is set, press the UP or DOWN button 640 ms 1280 ms and select the desired display color from (Green) or Press the SET button to set the response time and proceed (Red). Press the SET button to exit this mode and return to to the auto preset setting. the measuring mode. If the operating mode is the window comparator mode, press the SET button to return to the measuring mode. 2. Operating mode setting This mode will let you select the switch operating mode. 5. Auto preset setting While the current operating mode is displayed, press the This function stores the measuring pressure that is set UP or DOWN button to select a newly desired operating during the auto preset mode as a basic value. While the current setting is displayed, press the UP or PRESSURE PRESSURE DOWN button to select it as an auto preset setting.

PRESSURE PRESSURE

OUT OUT

Hysteresis mode Window comparator mode OUT OUT Hysteresis Hysteresis Hysteresis Hysteresis Hysteresis Hysteresis (H) (H) (H) (H) (H) (H) Manual Auto ON ON ON ON OFF OFF OFF OFF Press the SET button to set the auto preset and return to the P1 n1 P1 P2 n1 n2 measuring mode. (Standard: Factory setting) (Reversed) (Standard: Factory setting) (Reversed) Press the SET button to set the mode and proceed to the output type setting. 16-2-6 7 High Precision, 2-color Display Digital Pressure Switch Series ZSE30/ISE30

Pressure setting Manual setting Auto preset setting Press the SET button in the measuring mode to display the 1. Auto preset preparation mode set value. and the current set value blink alternately. While in the measuring mode, press the SET button to PRESSURE activate the auto preset preparation mode, and will be displayed. Proceed to prepare the devices to perform the pressure setting. While is still displayed, press both the ZSE UP and DOWN buttons simultaneously to return to the ISE PRESSURE OUT Alternately measuring mode. displayed Normally Open PRESSURE PSE Z PRESSURE I SE3 OUT

OUT PS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy OUT 2. Auto preset setting Z 1 I SE 2 Normally Closed Press the SET button to activate the mode to execute auto preset functions. When is displayed, start the system ZSP Press the SET button to display the next set value. Press the operation and change the pressure. The set value will be automatically detected and stored. UP or DOWN button to change the value. (Refer to “How ISA2 to Set Value” on the lower right hand corner of this page.) While is still displayed, press the SET button to complete the setting and return to the normal measuring mode. IS Hysteresis mode PRESSURE In this mode, hysteresis (H) and the set value for hysteresis are displayed alternately after setting P1. Press the SET ZSM button to return to the normal measuring mode. Press the UP or DOWN button to change the value. OUT PF2 (Refer to “How to Set Value” below right.) How to Set Value IF Window comparator mode To enter a value such as the one for pressure setting: Data In this mode, P2 and the current set value are displayed 1. Press the UP or DOWN button to change the set alternately after setting P1. Press the SET button to display value. The first digit blinks. the next set value ( : hysteresis). Press the UP or DOWN button to change the value. (Refer to “How to Set Value” at right.)

Next, and the set value for hysteresis will be displayed alternately. Press the SET button to return to the normal measuring mode. Press the UP or DOWN button to 1st digit change the value. (Refer to “How to Set Value” at right.) 2. Press the UP or DOWN button to set the value arbitrarily. (If there is no button operation for more than 10 seconds, the current value will be automatically set and the function will return to the set value display Pressure set value can be verified without holding or stopping mode.) the switch output operation. 3. With every push of the SET button, the next (higher) digit blinks.

2nd digit 3rd digit

When the left-most digit is zero, “ ” or “ ” will blink. If the SET button is pressed while the left-most digit is blinking, the right-most digit will now blink.

4. Press and hold the SET button for 1 second or longer to return to the set value display mode.

16-2-7 8 Series ZSE30/ISE30

Setting

Function setting Display calibration Key lock function During measuring mode, press the SET and DOWN buttons This function prevents incorrect operations such as changing simultaneously and hold for 2 seconds or longer. and the set value accidentally. Press the SET button and hold for 4 current measured value will be displayed. seconds or longer to display the current or setting. Press the UP or DOWN button to change the set value. If Press the UP or DOWN button to select the setting and set there is no button operation for more than 2 seconds after this function with the SET button. Use the mode to avoid changing the set value, the display mode returns to displaying accidental button operation. To release a key lock function, and the current measured value. press the SET button and hold for 4 seconds or longer to display the current setting, and select the mode. PRESSURE Alternately PRESSURE Selection of lock and unlock displayed Press theSET button SET and hold for 4 sec. OUT OUT or longer Lock Unlock

Current measured value Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Press the SET button to display the adjusted value (percent). Measuring mode The adjusted value and will be alternately displayed. Measuring mode

PRESSURE Alternately PRESSURE displayed Zero out (Zero ADJ) function This function clears and resets the displayed value as long as OUT OUT the measuring pressure is within ±70 digits of the atmospheric Adjusted value pressure. (Percent) (Due to individual product differences, the setting range varies ± Press the SET button to return to the normal measuring mode. 10% F.S.) This function is effective in detecting pressure fluctuations that

PRESSURE exceed a certain amount without being affected by the supply pressure. Press and hold the UP and DOWN buttons simultaneously to reset the display. Release the buttons to return to the measuring mode.

OUT + Press and hold for 1 second or longer. This function eliminates slight differences in the output values and allows uniformity in the numbers displayed. Displayed values of the pressure sensor can be calibrated to within ± ± 5% for Series ISE and 2.5% for Series ZSE. Measuring mode ±5% R.D. (±2.5% R.D.) Unit Conversion Function When not selecting “M” for unit specification + 0 Applied pressure Desired display unit can be selected. : Factory setting display value Press the UP or DOWN button to switch the unit, and set prior to shipment the set value is automatically converted. : Display calibration range Displayed pressure value Displayed The conversion order is: PA⇔GF⇔bAr⇔PSi⇔inH⇔mmH Note) When the display calibration function is used, the regulating pressure value may change ±1 digit. Press the SET button to set the unit and proceed to the display color setting. For vacuum/low pressure Pa⇔kgf/cm2⇔bar⇔psi⇔inchHg⇔mmHg Peak/Bottom hold function For positive pressure MPa⇔kgf/cm2⇔bar⇔psi This function constantly detects and updates the maximum and minimum pressure values and allows to hold the display Indication of Units value. Displayed unit ISE30 ZSE30 To use a peak hold function, press and hold the UP button Pa 0.001 MPa 0.2 kPa for 1 second or longer. The maximum pressure value is held kgf/cm2 0.01 0.002 and blinks repeatedly. Press and hold the UP button again bar 0.01 0.002 for 1 second or longer to release this function and return to the measuring mode. psi 0.2 0.05 To use a bottom hold function, press the DOWN button for 1 mmHg — 2 second or longer. The minimum pressure value is held and inchHg — 0.2 blinks repeatedly. Press and hold DOWN button again for 1 second or longer to release this function and return to the measuring mode.

16-2-8 9 High Precision, 2-color Display Digital Pressure Switch Series ZSE30/ISE30

Description

Indication light (Green) LCD display Displays the switch operation status. Displays the current pressure condition, setting mode PRESSURE MPa conditions, selected display unit, and error codes. A display color type can be selected from either a single color display with red or green, or 2-color display in which ZSE UP button green and red are switched ISE Use this button to change the OUT according to the output.

mode or increase the ON/OFF set PSE DOWN button value. It also allows you to switch SET to the peak value display mode. Use this button to change the ZSE3 mode or decrease the ON/OFF I SET button set value. It also allows you to switch to the bottom value display PS Use this button to switch the mode. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy mode and set the set value. Z 1 I SE 2 ZSP ISA2 IS Error Correction Example of Internal Circuit and Wiring ZSM Take the following corrective solutions when errors occur. -25 NPN open collector output Error LCD Condition description display Solution Maximum 30 V, 80 mA PF2 Shut off the power Residual voltage: Brown DC(+) supply. After eliminating 1 V or less IF over- Load current of switch the output factor that Load + current output is more than 80 mA. caused the excess 12 error Black OUT to current, turn the power – Data supply back on. 24 VDC Main circuit Pressure is applied during the zero out operation as follows: Blue DC(–) When the switch for positive -26 pressure is used: ±0.071 MPa Analog output type or more. Bring the pressure 1 to 5 V (±2.5% F.S.) When the switch positive Output impedance: Residual pressure is used: back to atmospheric Brown DC(+) pressure pressure and try 1 k ±7.1 kPa or more. Ω error using the zero out After displaying for 3 seconds, function. Black OUT + it will return to the measuring (Analog output) 12 mode. Due to the individual – to product difference, the setting Load 24 VDC range varies ±10% F.S. Main circuit Blue DC(–)

Supply pressure exceeds -28 the maximum regulating Reduce/Increase Analog output type pressure. Applied supply pressure to 4 to 20 mA (±2.5% F.S.) pressure within the regulating Maximum load impedance: Brown DC(+) error Supply pressure is below pressure range. Power supply voltage 12 V: 300 Ω the minimum regulating Power supply voltage 24 V: 600 Ω Black OUT pressure. + 12 Minimum load impedance: 50 Ω (Analog output) to – Load 24 VDC

Internal data error Main circuit Blue DC(–)

-65 Internal data error Shut off the power PNP open collector System supply. Turn the Maximum 80 mA error power supply back Brown DC(+) Internal data error on. If the power should + 12 not come back on, Black OUT to please contact SMC – 24 VDC for an inspection. Load Internal data error Main circuit Blue DC(–)

16-2-9 10 Series ZSE30/ISE30

Dimensions

30 25 8 9.5 Lead wire 20 ±0.1 2-M3 x 0.5 3.6 with connector Thread depth 4

M5 x 0.8 PRESSURE MPa 0.1 10 ± SMC OUT Width across flats 20 12

SET

1.5 01: R 1/8

T1: NPT 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy A A

(mm) One-touch fitting Straight Elbow size A B A B C

C ø4, ø5/32" 20 10.4 18 B

ø ø6 14.4 11.2 22.4 12.8 20 øB ø1/4" 22.8 13.2 20.5 Straight Elbow With One-touch fitting

With bracket 42.5 10 15 4.2

3 22 30

20 25 SMC 20 45 30 1.8

35 35

16-2-10 11 High Precision, 2-color Display Digital Pressure Switch Series ZSE30/ISE30

Dimensions Panel mount

ZSE

ISE PSE

Z 7.2 17.8 8 9.5 I SE3 34.5 47.8 PS

OUT SET ISA2 MADE IN JAPAN 8.75 IS Panel thickness 0.5 to 6 ZSM PF2 Panel mount adapter + Front protective cover IF Data

42.4 11 17.8 8 9.5 34.5

Panel thickness 0.5 to 6

16-2-11

16-2-12

MADE IN JAPAN IN MADE

SET

OUT

31 xnpcs.+3.5(n–1)

PRESSURE

MPa

MADE IN JAPAN IN MADE

SET

OUT

PRESSURE

MPa

MADE IN JAPAN IN MADE

SET

OUT

PRESSURE MPa

24 and up and 24 31 –0.4

Multiple (2 pcs. or more) vertical mounting vertical more) or pcs. (2 Multiple

MADE IN JAPAN IN MADE JAPAN IN MADE JAPAN IN MADE 24 andup 31 –0.4 0

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

31 –0.4

0 31 x n pcs. + 3.5 x (n pcs. – 1) – pcs. (n x 3.5 + pcs. n x 31

SET SET SET

OUT OUT OUT

PRESSURE PRESSURE PRESSURE MPa MPa MPa

1-pc. mounting 1-pc. Multiple (2 pcs. or more) horizontal mounting horizontal more) or pcs. (2 Multiple

Panel fitting dimension fitting Panel

Dimensions

ZSE30/ISE30 Series Series 12 13 Series ZSE30/ISE30 Specific Product Precautions 1 Be sure to read before handling.

Handling Operating Environment Warning Warning

1. Do not drop, bump, or apply excessive 1. Our pressure switches are CE marked; ZSE

impacts (980 m/s2) while handling. Although however, they are not equipped with surge ISE

the body of the sensor may not be damaged, protection against lightning. Lightning surge PSE the internal parts of the sensor could be countermeasures should be applied directly damaged and lead to a malfunction. to system components as necessary. Z I SE3 2. The tensile strength of the cord is 35 N. 2. Our pressure switches do not have an Applying a greater pulling force on it can explosion proof rating. Never use in the PS cause a malfunction. When handling, hold Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy presence of an explosive gas as this may Z 1 the body of the sensor––do not dangle it I SE 2 from the cord. cause a serious explosion. 3. Do not exceed the screw-in torque of 7 to 9 3. Do not use in an environment where static ZSP N⋅m when installing piping. Exceeding this electricity can cause problems, otherwise value may cause malfunctioning of the system failure or malfunction may result. ISA2 sensor. IS 4. Do not use pressure sensors with corrosive Mounting and/or flammable gases or liquids. ZSM 5. Allow a sufficient margin of tube length in Caution piping in order to prevent application of 1. Mounting with panel mount adapter PF2 torsional, tensile or moment load to the tubes and fittings. IF 6. When a brand of tubing other than SMC is Panel mount Data used, make sure that the tolerance of the adapter tube’s O.D. satisfies the following Panel mount specifications. adapter 1) Nylon tubing: ±0.1 mm or less Panel 2) Soft nylon tubing: ±0.1 mm or less 3) Polyurethane tubing: +0.15 mm or less, –0.2 mm or less To release push the 7. The applicable fluid is air. Please consult clips outward as shown on the picture, and pull with SMC if the switch is to be used with back towards you. other types of fluids. Claw 2. Mounting with bracket Connection Mount a bracket to the body using two M3 x 5L mounting screws and install on piping with hexagon socket head cap screws. The switch can be installed horizontally depending on

Warning the installation location. 1. Incorrect wiring can damage the switch and Mounting screw cause a malfunction or erroneous switch M3 x 5L output. Connections should be done while Bracket the power is turned off. Tightening torque for bracket mounting

2. Do not attempt to insert or pull the pressure screw should be 0.5 to 0.7 N⋅m. sensor or its connector when the power is on. A switch output malfunction may occur. 3. Wire separately from power lines and high voltage lines, avoiding wiring in the same

conduit with these lines. Malfunctions may occur due to noise from these other lines. 4. If a commercial switching regulator is used, make sure that the F.G. terminal is grounded.

16-2-13 14 Series ZSE30/ISE30 Specific Product Precautions 2 Be sure to read before handling.

Connection/Removal of Connector Piping • To connect the connector, insert it straight while • Cut the tube perpendicularly. pinching the lever, and then push the lever into the jack • Hold the tube and insert it into the One-touch fitting of the housing and lock it. carefully and securely all the way to the bottom. • To remove the connector, pull it straight out while applying pressure with your thumb to the lever and unhooking it from the jack. Tube Lever DC polarity indicator Lead wire (Brown)

One-touch fitting Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Lead wire (Black) Lead wire (Blue) • Do not attempt to insert or pull the pressure sensor or its connector when the power is on. A switch output malfunction may occur.

Regulating Pressure Range and Rated Pressure Range Caution Set the pressure within the rated pressure range. The regulating pressure range is the range of pressure that is possible in setting. The rated pressure range is the range of pressure that satisfies the specifications (accuracy, linearity, etc.) on the sensor. Although it is possible to set a value outside the rated pressure range, the specifications will not be guaranteed even if the value stays within the regulating pressure range.

Pressure range Switch –100 kPa 0 100 kPa 500 kPa 1 MPa

For vacuum/ –100 kPa 100 kPa ZSE30 low pressure –101 kPa 101 kPa

For positive 0 1 MPa ISE30 pressure –100 kPa 1 MPa (–0.1 MPa)

Rated pressure range of switch Regulating pressure range of switch

16-2-14 1 High Precision, Digital Pressure Switch Series ZSE40/ISE40

ZSE ISE PSE

Z I SE3 PS

16-2-15 2

High speed response: 2.5 ms Pressure → or less Momentary change With anti-chattering function Set value P1 Stable switch output is possible even with sudden P2

Anti-chattering function Devices such as large bore cylinders and high-flow vacuum Time → ejectors consume a large volume of air when they operate, and t (ms) t (ms) this may cause a momentary drop in the primary pressure. This (Averaging) (Averaging) function prevents such momentary pressure drops from being detected as abnormal pressures by allowing the response time selection to be changed. Switch output ON operation [Selectable response times: t] when normal OFF 2.5 ms (normal), 24 ms, 192 ms or 768 ms Time → The normal setting is selected when shipped from the factory. Switch output (Operating principle) operation when ON

With auto shift function Without using auto shift Allows switch output unaffected by variations in When the primary pressure fluctuates, a correct determination becomes impossible. Pressure

primary pressure. → Primary pressure normal Primary pressure drop Primary pressure increase Auto shift function P1 Erroneous operation may occur if there is fluctuation in the Set value primary pressure. P2 The auto shift function compensates for pressure changes to ensure proper ON/OFF switch response during such fluctuations. Time → (Operating principle) At the point when the primary pressure fluctuates, the set ON Switch output Does not turn OFF pressure value is compensated by setting the auto shift input 1, 2 Does not turn ON (external input) to low (no-voltage) input, using the pressure OFF measured at that point as a standard. Time → When using auto shift Set value compensation Set value compensation

Pressure Compound pressure (ZSE40F) → Primary pressure normal Primary pressure drop Primary pressure increase P1 Able to detect suction pressure (vacuum Set value pressure) and release pressure (positive P2 pressure) with a single pressure switch. Time →

Switch output ON 1, 2 OFF

Time → 10 ms Switch output response time 5 ms or more or less [when auto shift is input. ] Hi Auto shift input Lo 3 types of piping Time → Different piping methods are possible to accommodate the installation location. Repeatability ±0.2% F.S. ±1 digit or less

IP65 compatible Dusttight/Splash proof type

16-2-16 3 High Precision, Digital Pressure Switch Series ZSE40/ISE40

How to Order

Set pressure range Nil –0.100 to 1.000 MPa For positive pressure

For positive pressure ISE40 01 22 ZSE ISE For vacuum/compound pressure ZSE40 01 22 PSE

Z I SE3

Set pressure range Option PS

E Data ∗ C4: With ø4 One-touch fitting ∗ M5: M5 x 0.8 (Female threads) ∗ C6: With ø6 One-touch fitting Wall mount Wall mount Panel mount (ZS-24-C) + Front protective cover

M5 x 0.8 ø4, ø6 F One-touch fitting

∗ Option ∗ When optional parts only are required, order with the part numbers inside ( ). Input/Output specifications Unit specifications 22 NPN open collector 2 outputs + analog output Note1) ∗ Nil With unit switching function 30 NPN open collector 2 outputs + auto shift input M SI unit only Note 2) 62 ∗ PNP open collector 2 outputs + analog output ∗ Note 1) This will no longer be sold for use in 70 PNP open collector 2 outputs + auto shift input Japan after the new Weight and ∗ Option Measure Act is implemented (October,1999). Note Note 2) Fixed unit When equipped with auto shift function, the following ranges can be set. For vacuum/compound pressure: kPa Set pressure range Setting range For positive pressure: MPa –100.0 to 100.0 kPa –100.0 to 100.0 kPa Lead wire length 10.0 to –101.3 kPa –101.3 to 101.3 kPa Nil 0.6 m –0.1 to 1.000 MPa –1.000 to 1.000 MPa L 3 m

16-2-17 4 Series ZSE40/ISE40

Specifications

ZSE40F (Compound pressure) ZSE40 (Vacuum pressure) ISE40 (Positive pressure) Rated pressure range –100.0 to 100.0 kPa 0.0 to –101.3 kPa 0.000 to 1.000 MPa Operating pressure range/Set pressure range –100.0 to 100.0 kPa 10.0 to –101.3 kPa –0.100 to 1.000 MPa Withstand pressure 500 kPa 1.5 MPa kPa 0.1 — MPa — 0.001 kgf/cm2 0.001 0.01 Set pressure bar 0.001 0.01 resolution Note 1) psi 0.02 0.01 0.1 mmHg 1 — InHg 0.1 — Applicable fluid Air, Non-corrosive/Non-flammable gas Power supply voltage 12 to 24 VDC ±10%, Ripple (p-p) 10% or less Current consumption 55 mA or less NPN or PNP 2 outputs Max. load current : 80 mA Switch output Max. applied voltage: 30 VDC (With NPN output)

Residual voltage : 1 V or less (With 80 mA load current) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Repeatability ±0.2% F.S. ±1digit or less Hysteresis mode Variable Hysteresis Window comparator mode Fixed (3 digits) Note4) Response time (With anti-chattering function) 2.5 ms or less (With anti-chattering function: 24 ms, 192 ms and 768 ms selections) Output short circuit protection Ye s Display 3 1/2 digit LED display (Sampling cycle: 5 times/sec.) Display accuracy ±2% F.S. ±1 digit or less (at ambient temperature of 25 ±3°C) Indicator light Green LED (OUT1: Lights when ON), Red LED (OUT2: Lights when ON) Output voltage: 1 to 5 V Output voltage: 1 to 5 V ±2.5% F.S. or less (in rated pressure range) ±5% F.S. or less (in rated pressure range) Analog output Note 2) Linearity: ±1% F.S. or less Linearity: ±1% F.S. or less Output impedance: Approx. 1 kΩ Output impedance: Approx. 1 kΩ Auto shift input Note 3) No-voltage input (Reed or solid state), input 5 ms or more Enclosure IP65 Ambient temperature range Operating: 0 to 50˚C, Stored: –10 to 60˚C (No condensation or freezing) Ambient humidity range Operating/Stored: 35 to 85% RH (No condensation) Environmental Withstand voltage 1000 VAC for 1 min. between lead wires and body resistance Insulation resistance 50 MΩ or more (at 500 VDC) between lead wires and body Vibration resistance 10 to 500 Hz at the smaller of amplitude 1.5 mm or acceleration 98 m/s2 (10 G) in X, Y, Z directions for 2 hrs. each (De-energized) Impact resistance 980 m/s2 (100 G) in X, Y, Z directions 3 times each (De-energized) Temperature characteristics In a temperature range of 0 to 50°C, ±2% F.S. or less of pressure measured at 25°C 01: R 1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc 1/8 Port size C4: With ø4 One-touch fitting, C6: With ø6 One-touch fitting, M5: M5 female threads Lead wire 5-wire oil resistant heavy-duty cord (0.15 mm2) Weight 01/T1 types approx. 60 g, W1 type approx. 80 g, C4/C6/M5 types approx. 92 g (Each including 0.6 m lead wires) Note 1) Equipped with unit switching function Note) (Types without the unit switching function use SI units (kPa or MPa) only.) When equipped with auto shift function, the following ranges can be set. 22 Note 2) For ZSE40 (F)/ISE40- -62 Set pressure range Setting range 30 Note 3) For ZSE40 (F)/ISE40- -70 –100.0 to 100.0 kPa –100.0 to 100.0 kPa Note 4) For ZSE40F (compound pressure) with “psi” indication, this is 0.03 to 0.04 10.0 to –101.3 kPa –101.3 to 101.3 kPa psi. – 0.1 to 1.000 MPa –1.000 to 1.000 MPa Note 5) For ZSE40F (compound pressure) with “psi” indication, zero clear is in the range of ±0.01 psi. Example of Internal Circuit and Wiring ZSE40(F) ZSE40(F) DC (+) DC (+) ISE40--22(L)-(M) (Brown) ISE40--62(L)-(M) (Brown) With analog output Analog output With analog output Analog output (Gray) 1 kΩ (Gray) 1 kΩ Load OUT1 OUT1 Load (Black) 12 to 24 VDC (Black) 12 to 24 VDC OUT2 OUT2 (White) Main circuit Main circuit

(White) Load

DC (–) DC (–) Load (Blue) (Blue)

ZSE40(F) DC (+) ZSE40(F) DC (+) (Brown) (Brown) Ω 1.2 kΩ ISE40--30(L)-(M) 1.2 k Auto shift input ISE40--70(L)-(M) Auto shift input Ω (Gray) 6.8 kΩ (Gray)

6.8 k Load With auto shift input OUT1 With auto shift input OUT1 (Black) Load 12 to 24 VDC 12 to 24 VDC (Black) OUT2 OUT2 (White) (White) Main circuit Main circuit Load

DC (–) DC (–) Load (Blue) (Blue)

16-2-18 5 High Precision, Digital Pressure Switch Series ZSE40/ISE40

Description

3 1/2-digit LED Displays present pressure. kPa Displays each mode. Displays error mode. LED (Red) LED (Green) Displays OUT2 output condition. OUT1 OUT2 Displays OUT1 output condition When it is ON, the LED is When it is ON, the LED is SET illuminated. ZSE illuminated. ISE DOWN button UP button Switches the mode and set value. PSE Switching of the mode and set value Z SET button I SE3 Switches to each mode and fixes the set value. PS

Enter the set value of the Adjusts the zero point of the Mode is not switched, even if pressure to perform switch atmospheric pressure. the button is pressed during output. operation. Initial setting

Set “Output mode”, “Response time” and “Auto or Manual mode”. Auto Manual Normal operation preset pressure setting

Automatically sets the pressure Allows fine-tuning of the Measured pressure is for the adsorption confirmation data set automatically by displayed and the switch or supply pressure auto preset. operation begins. confirmation.

16-2-19 6 Series ZSE40/ISE40

Calibration Procedures

Initial Setting

1. Initial condition mode 2. Selection of output mode OUT1 3. Selection of output mode OUT2

SET

Press the “SET” button.

Press the “SET” button for more Select the “output mode” for Select the “output mode” for than 2 seconds until “ ” is OUT1 by pressing either į but- OUT2 by pressing either į displayed. ton or Ĭ button. button or Ĭ button. Release it when the display turns “ ” Normally open mode “ ” Normally open mode to “ ”. “ ” Normally closed mode “ ” Normally closed mode Unit mode: When using a product with Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy a unit switching function, refer to the next page for unit-setting (for overseas).

4. Selection of response time 5. Setting Auto/Manual

SET SET SET

Press the “SET” button. Press the “SET” button. Press the “SET” button to complete the setting.

Select the response time by Select “Auto preset mode” or pressing either į button or Ĭ “Manual set mode” by pressing button. either į button or Ĭ button. (“ ”: 2.5 ms, “ ”: 24 ms, “ ” Auto preset mode “ ”: 192 ms,“ ”: 768 ms “ ” Manual set mode Select among them.) Manual Pressure Setting Output mode differs by the pressure set value.

1. Manual set mode 2. Input set point value for OUT1 (1) 3. Input set point value for OUT1 (2)

SET

Press the “SET” button.

Select the manual set mode in į button: Increases set value į button: Increases set value the initial condition mode and Ĭ button: Decreases set value Ĭ button: Decreases set value press the “SET” button until Displays the set values “ ” or Displays the set values “ ” or “ ” or “ ” is displayed. “ ” alternately. “ ” alternately.

4. Input set point value for OUT2 (1) 5. Input set point value for OUT2 (2) 6. Display of setting auto shift

SET SET SET SET

Press the “SET” button. Press the “SET” button. Press the “SET” button. Press the “SET” button to complete the setting.

į button: Increases set value į button: Increases set value ∗ Only for ZSE40(F)/ISE40--30/70(L)-M, Ĭ button: Decreases set value Ĭ button: Decreases set value displays the input mode “ ” and the Displays the set values “ ” or Displays the set values “ ” or compensation value alternately. “ ” alternately. “ ” alternately. If auto shift input is not complete, zero is displayed.

16-2-20 7 High Precision, Digital Pressure Switch Series ZSE40/ISE40

Unit Set Output Type It's only subject to ZSE40(F)/ISE40--(L). ON

YES OFF Hysteresis mode Unit selection P-2 P-1 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) [P] Ǟ ≥ H (Fixed hysteresis) = 3 digits ZSE H H ISE ON

Window comparator mode OFF PSE NO P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) Z Set the unit by either į button or Ĭ button. Ǟ I SE3 : kPa or MPa, : kgf/cm2, OUT1 Output mode : bar, : psi, ON : inHg, : mmHg PS ∗ OUT2: Same as OUT1. YES OFF Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Hysteresis mode n-2 n-1 Z 1 High pressure (for positive pressure/compound pressure) I SE 2 High vacuumǞ (for vacuum pressure) SET Press “SET” button. ≥ ZSP [N] H H H (Fixed hysteresis) = 3 digits ON ISA2 OFF Window comparator mode OUT1: Selection of the output mode NO n-1 n-2 High pressure (for positive pressure/compound pressure) IS High vacuumǞ (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data

SET

Press the “SET” button.

Select the Auto preset mode in Prepare the equipment for use Repeat adsorption and non- the initial setting mode and under operating conditions. adsorption release several times press the “SET” button until When setting OUT1 is not in this state. “ ” is displayed. required, press both the į The optimal set value is button and Ĭ button determined automatically. simultaneously in this state to skip to “ ”.

4. Preparation for auto preset 5. Auto preset of OUT2

High Suction Vacuum Workpiece 1 Workpiece 2 Workpiece n Max. A SET SET SET ON Press the “SET” button. Press the “SET” button. Press the “SET” button to complete the setting. OFF

Min. B Supplies vacuum pressure, Repeat adsorption and non- Released changing the condition of a adsorption several times in this Workpiece 1 Workpiece 2 Workpiece n workpiece by adsorption nozzle, state. Atmosphere A – B Max. A: Max. pressure value when a workpiece is adsorbed. ON = A – etc. When setting OUT2 is not The optimum set value is 4 required, press both the į determined automatically. Min. B: Min. pressure value when a workpiece is not adsorbed. OFF = B + A – B 4 button and Ĭ button simultaneously in this state to skip to the measurement mode.

16-2-21 8 Series ZSE40/ISE40

Calibration Procedures Auto Preset (In the case of confirming the supply pressure)

1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1

SET

Press the “SET” button.

Select the Auto preset mode in Prepare the equipment for use The pressure is read and the the initial setting mode and under operating conditions. optimal set value is determind press the “SET” button until When setting OUT1 is not automatically. “ ” is displayed. required, press both the į button and Ĭ button simultaneously in this state to

skip to “ ”. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 4. Preparation for auto preset 5. Auto preset of OUT2

SET SET SET

Press the “SET” button. Press the “SET” button. Press the “SET” button to complete the setting.

ON point (C, C1) Hysteresis (3 digits) Prepare the equipment for use The pressure is read and the OFF under operating conditions of optimal set value is determind OUT2. automatically. ON point = C, C1 When setting OUT2 is not OFF point = C-3 digits, C1-3 digits required, press both the į (1 digit is the minimum setting unit.) button and Ĭ button simultaneously in this state to skip to the measurement mode. Other Functions Key lock mode Used to avoid a malfunction when buttons on the front part of the switch are pressed.

Initiate key lock Release key lock

SET SET

Press the “SET” button Press the “SET” button to complete the setting. to complete the setting.

Press the “SET” button for 4 Display “ ” by pressing į Press the “SET” button for 4 Display “ ” by pressing į seconds or longer. button or Ĭ button. seconds or longer. button or Ĭ button. Release it when the display Release it when the display turns to “ ”. turns to “ ”.

Peak mode Allows holding of the maximum pressure Bottom mode Allows holding of the minimum pressure value on display under measurement. value on display under measurement.

While displayed, pressing the į button for 1 While displayed, pressing the Ĭ button for 1 second or longer causes the peak mode to second or longer causes the bottom mode to display and blink. display and blink. Pressing the į button once again for 1 second Pressing the Ĭ button once again for 1 second or longer reinstates it. or longer reinstates it. Note) Displaying the peak and the bottom Note) Displaying the peak and the bottom display is not distinguished. display is not distinguished.

Zero clear Allows an adjust to zero on the display if the pressure to be measured is within a range of ±70 digits from the atmospheric pressure. Pressing the į + Ĭ buttons simultaneously with the supply pressure released to the atmosphere, causes it to reset to zero on the display and completes the zero clear operation. The function then returns to the measurement mode.

16-2-22 9 High Precision, Digital Pressure Switch Series ZSE40/ISE40

Dimensions

01 ZSE40(F)/ISE40- T1

30 20 M5 x 0.8 thread depth 5 MPa

ZSE 30

20 ISE OUT1 OUT2 SET PSE 2-M3 x 0.5 thread depth 4

6.4 Z Atmospheric 12 I SE3

release port 18.35 Width across flats PS

2.6 2.5 ZSM 30

15.2

4.5 PF2 10.7 ∗ For splash proof use (IP65), insert an air tube into the atmospheric release port. 14 (Refer to “Precautions” on page 16-2-24 for details.) IF

01: R 1/8 1.5 T1: NPT 1/8 Data

ZSE40(F)/ISE40-W1

2-M4 x 0.7 20 30 thread depth 4

Rc 1/8 MPa 7 20 30 OUT1 OUT2 SET 19 6.5 R 6.4 Atmospheric

release port 18.35

ø3.5 600 (3000) Lead wire length

7.8 12.4 7

2.6 2.5 30 42 15.2 10.7 4 6 ∗ For splash proof use (IP65), insert an air tube into the atmospheric release port. (Refer to “Precautions” on page 16-2-24 for details.) 12 Rc 1/8

16-2-23 10 Series ZSE40/ISE40

Dimensions C4 ZSE40(F)/ISE40– C6 M5

32.3 30 12.8 20 2-4.5

MPa 28.15 22.15 44.3 30 OUT1 OUT2 SET 19 25.4 6.4

release port 18.35

length ø3.5 Lead wire 600 (3000)

7.8 For–M5

12.4 7

2.6 2.5 30 43 15.2 10.7 7 8.5

12 One-touch fitting ø4, ø6 M5 x 0.8 thread depth 5

∗ For splash proof use (IP65), insert an air tube into the atmospheric release port. (Refer to “Precautions” for details.)

Precautions Caution 1. Immediately after supplying power, there is drift of about ±0.5% F.S. When used with very low pressure, allow the unit to warm up for about 20 to 30 minutes. MPa 2. Do not use in locations where there is splashing or spraying of oils and solvents.

3. When using a commercially available switching regulator, be sure to ground the OUT1 OUT2 FG terminal. SET 4. In locations where the switch is exposed to water and dust, etc., these may enter the switch from the atmospheric release port. Insert ø4 tubing (inside Atmospheric release port diameter ø2.5) into the atmospheric release port, and extend the other end to a safe area where water, etc., is not splashed or sprayed. Be sure that tubing is not bent and holes are not blocked, etc., or it will become impossible to make Air tube correct pressure measurements. Recommended tubing (SMC) TU0425 (Polyurethane)

16-2-24 1 High Precision, Digital Pressure Switch For General Fluids 50 50 Series ZSE 60 F/ISE60

ZSE ISE PSE

Z I SE3 PS

High precision/High resolution pressure switch. Applicable for pressure detection with a wide range of fluids, by using a stainless steel diaphragm.

16-2-25 2 Pressure detection for a wide range of fluids.

Argon Air containing drain Ammonia Freon Hydraulic fluid (JIS-K2213) Carbon dioxide Silicon oil (JIS-K2213) Nitrogen Lubricating oil (JIS-K6301) To measure low-quality air, containing drain Fluoro carbon Leakage test with nitrogen

To confirm absorption of workpiece with Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy water on the surface, e.g. wet LCD glass plate To measure hydraulic pressure

Using of stainless steel diaphragm Pressure sensor The stainless steel diaphragm prevents direct Fitting contact between sensor and measured fluid. Liquid and gas contact areas Stainless steel 630 Fittings Stainless steel 304 Extremely low leakage Sensor and fittings are electron-beam welded. Stainless steel diaphragm Leakage is kept at the lowest level by using VCR and Swedgelok fittings. ZSE50F / ISE50 1 x 10-5 Pa⋅m3/s ZSE60F / ISE60 1 x 10-10 Pa⋅m3/s

Enclosure IP65

Panel mount With bracket Option

Panel mount + Front side protection cover

To confirm adsorption To confirm primary pressure To confirm working pressure of hydraulic cylinder of workpieces of cleaning line Application containing water examples

16-2-26 3 High precision and high resolution

Compound pressure 1/2000 (0.1 kPa) Positive pressure 1/1000 (0.001 MPa) ZSE Repeatability 0.2% F.S. 1 digit or less ISE PSE

Z I SE3 PS Anti-chattering function Auto preset function Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Variety of Z 1 Prevents erroneous operation due to Automatic pressure setting is possible. I SE 2 functions sudden fluctuations in primary pressure, by Saves time for setting operation. allowing the response time to be changed. ZSP Selectable response times: 2.5 ms (default), 24 ms, 192 ms, 768 ms or less • Key lock function ISA2 Auto shift function • Peak and bottom display IS Pressure detection is not affected by function fluctuations in primary pressure. • Zero out function ZSM PF2 IF Confirmation of atmospheric pressure of load lock Series ZSE60F/ISE60 Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 –10 Pa.m3/s

ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4

ZSE50F ISE50 ZSE60F ISE60 Model Special fittings for the semiconductor industry Standard thread type Variations (Metal gasket seal fittings) Port size R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 –5 –10 Leak rate 1 x 10 Pa. m 3/s 1 x 10 Pa⋅m3 /s

100 kPa 1MPa 100 kPa 1 MPa

Rated pressure range 0 0 0 0

–100 kPa –100 kPa

Switch output 2 outputs NPN or PNP Output Analog output Output voltage 1 to 5 V

16-2-27 4

High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50

How to Order

For positive pressure ISE50 02 22 L M

For compound pressure ZSE50F 02 22 L M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Piping specifications Option 02 R 1/4 (M5 with female screw), Piping in backward direction Nil None T2 NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G2∗ G 1/4 (M5 with female screw), Piping in backward direction ∗ Option A

Input/Output specifications 22 NPN open collector 2 output + Analog output Bracket D 30 NPN open collector 2 output + Auto shift input Refer to the dimensions for 62∗ PNP open collector 2 output + Analog output D the difference between 70∗ PNP open collector 2 output + Auto shift input brackets A and D. ∗ Option Note) Auto shift input is used for the auto shift function. Panel mount For more information, please refer to “Auto Shift Function” on page 16-2-32. E Lead wire length L 3 m

Panel mount + Front protection cover

F Analog Output

Suitable model: ZSE50F/ISE50--22/62(L)-(M) Series ISE50 Series ZSE50F

5 5 Unit specification Nil With unit switching function Note 1) M Fixed SI unit Note 2) 1 1 Note 1) Under the New Measurement Law, 0 which has been in effect since 1.0 MPa 100 kPa 100 kPa October, 1999, sales of switches with

Analog output value (V) Analog output value (V) Analog output value the unit conversion function have not been allowed for use in Japan. Pressure Pressure Note 2) Fixed units: For compound pressure : KPa Option For positive pressure: MPa When option parts are required separately, use the following part numbers to place an order. Option Part no. Qty. Note Bracket A ZS-24-A 1 With 2 pcs. of mounting screws Bracket D ZS-24-D 1 With 2 pcs. of mounting screws Panel mount ZS-24-E 1 Panel mount + Front protection cover ZS-24-F 1

16-2-28 5 High Precision, Digital Pressure Switch for General Fluids Series ZSE50F/ISE50

Specifications

ZSE50F (Compound pressure) ISE50 (Positive pressure) Rated pressure range 100 to 100 kPa 0.000 to 1.000 MPa Operating pressure range and regulating pressure range 100 to 100 kPa 0.100 to 1.000 MPa Proof pressure 500 kPa 1.5 MPa kPa 0.1 — MPa — 0.001 Note 1) kgf/cm2 0.001 0.01 Setting/Display bar 0.001 0.01 ZSE resolution ISE psi 0.02 0.1 mmHg 1 — PSE inHg 0.1 — Fluid Fluid that will not corrode stainless steel 630 and 304 Z I SE3 Power supply voltage 12 to 24 VDC, Ripple (p-p) 10% or less Current consumption 55 mA or less (With no load) PS Switch output NPN or PNP 2 output (Max. applied voltage 30 V (NPN), Max. load current 80 mA)

Function

Various additional functions are available for easy measurement, switch operation and check of measured values suitable for the conditions of the measured fluid. Auto shift function Note 1) Can correct the pressure set point value of switch output according to fluctuations in the primary pressure. 16-2-32 Anti-chattering function Prevents malfunction due to sudden fluctuations in the primary pressure by adjusting the response time. Key lock function The key board operation can be locked to prevent incorrect operation on the operation switch. Peak hold function Can retain the maximum pressure value displayed during measurement. Bottom hold function Can retain the minimum pressure value displayed during measurement. 16-2-43 Zero out function The pressure display can be set at zero when the pressure is open to the atmosphere. Unit conversion (for overseas use) Note 1) Can convert the display value (for overseas use only). Note 1) Select and order by specifying the types and models.

16-2-29 6 Series ZSE50F/ISE50

Output Method

ON YES • Hysteresis mode OFF P_2 P_1 Large pressure and vacuum pressure [P] H (Fix hysteresis) = 3 digits H H ON • Window comparator NO OFF mode P_1 P_2

∗ Same with OUT2. ON YES • Hysteresis mode OFF n_2 n_1 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON • Window comparator NO OFF mode n_1n _2 Large pressure and vacuum pressure

16-2-30 7 High Precision, Digital Pressure Switch for General Fluids Series ZSE50F/ISE50

Example of Internal Circuit and Wiring

50 50 50 50 ZSE 60 F/ISE 60 - -22(L)-(M) ZSE 60 F/ISE 60 - -30(L)-(M) With analog output With auto shift input

DC (+) DC (+) (Brown) (Brown) Ω Analog output 1.2 k Auto shift input (Gray) 1 kΩ Load Ω (Gray) 12 VDC 6.8 k Load 12 VDC

OUT 1 Load OUT 1 Load ZSE to to (Black) (Black) ISE 24 VDC 24 VDC OUT 2 OUT 2 Main circuit Main circuit (White) (White) PSE DC () DC () Z (Blue) (Blue) I SE3 PS

Main circuit (White) Main circuit (White) Load Load

Load DC ( ) DC ( ) Load (Blue) (Blue)

16-2-31 8 Series ZSE50F/ISE50

Auto Shift Function

This function uses the measured pressure at the time of auto shift Auto shift function conditions and explanation input as the reference pressure value and corrects the set point • Keep the pressure constant at least for 5 ms after the last values “P_1” and “P_2” of switch output 1 and “P_3” and “P_4” of transition signal of auto shift input. switch output 2. “P_1” to “P_4” correspond to “n_1” to “n_4” in • At the time of auto shift input, the display unit displays “ooo” for case of normally closed circuit. about 1 second. The pressure value at this time is saved as the correction value “C_5” . When auto shift is not used: • The set point values “P_1” to “P_4” or “n_1” to “n_4” are Fluctuations in the primary pressure interrupt correct judgement. corrected based on the saved correction values. Normal Drop of Increase of • The time between the auto shift input and start of switch output primary pressure primary pressure primary pressure is 10 ms or less. P1 • If the set point value corrected by auto shift input falls out of the P2 possible set range, the correction value is not saved. The Pressure display will show “UUU” if the set point value is above the upper Time limit and “LLL” if it is below the lower limit. ON Switch output 1, 2 • The correction value “C_5” set by auto shift input disappears OFF when the power is turned off. • The correction value “C_5” for the auto shift function is reset to Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy zero (the initial value) when the power is turned on again.

When auto shift is used: ∗ When the primary pressure changes, set the auto shift function to The correction value is not stored on the EEPROM. Lo. The pressure value at this point will be saved as the reference value to correct the pressure set point values in order to make The possible set range for types with auto shift function is as follows: correct judgments. Regulating pressure range The possible set range for types with auto shift function Normal Drop of Increase of –100.0 to 100.0 kPa –100.0 to 100.0 kPa primary pressure primary pressure primary pressure –0.1 to 1.000 MPa –1.000 to 1.000 MPa P1 P2 Pressure Time ON Switch output 1, 2 OFF 5 ms 10 ms Switch output response time or more or less []when auto shift inputs. Hi Auto shift input Lo

Anti-chattering Function

A large bore cylinder or ejector consumes a large amount of air in operation and may experience a temporary drop in Pressure the primary pressure. This function prevents detection of Temporary fluctuation such temporary drops in primary pressure as abnormal pressure. P1 Set point value P2 This function averages pressure values measured during the response time set by the user and then compares the t (ms) t (ms) Time average pressure value with the pressure set point value to output the result on the switch.

Switch output ON operation in OFF normal conditions Time Switch output operation when ON chattering prevention function is on OFF Time

16-2-32 9 High Precision, Digital Pressure Switch for General Fluids Series ZSE50F/ISE50

Description

Take the following measures when an error occurs. Error description LCD display Condition Solution OUT 1 Shut off the power supply. After eliminating Over current error Load current of switch output is more than 80 mA. the output factor that caused the excess OUT 2 current, turn the power supply back on.

Pressure is applied during the zero out operation as follows: Bring the pressure back to 0.071 MPa or more with ISE50/60 ZSE Residual pressure error atmospheric pressure and try using ISE 7.1 kPa or more with ZSE50F/60F the zero out function. ∗ After displaying for 3 seconds, it will return to the measuring mode. PSE

Z Supply pressure exceeds the maximum regulating I SE3 pressure. Reduce/Increase supply pressure to Applied pressure error within the regulating pressure range. PS Supply pressure is below the minimum regulating

Internal data error ZSM PF2 Internal data error Shut off the power supply. Turn the power supply back on. If the power IF System error should not come back on, please contact SMC for an inspection. Internal data error Data

Internal data error

∗ The upper limits and lower limits are shown in the table below. Regulating pressure range Lower limit Upper limit Compound pressure –100.0 to 100.0 kPa –100.0 kPa 100.0 kPa Positive pressure –0.100 to 1.000 MPa –0.100 MPa 1.000 MPa With auto shift function Regulating pressure range Lower limit Upper limit Compound pressure –100.0 to 100.0 kPa –100.0 kPa 100.0 kPa Positive pressure –1.000 to 1.000 MPa –1.000 MPa 1.000 MPa

16-2-33 10 Series ZSE50F/ISE50

Dimensions

02 ZSE50F/ISE50-T2 G2

23.4 30 30 (In case of NPT 23.9) 20 2-M3 x 0.5 depth 4 8.45 20

Piping port M5 x 0.8 depth 5

6.4 Piping port R, NPT 1/4

18.35 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

ø3.5

7.8 12.4 7

25.1 2.5 2.6 8.45 12.4 30 10.1 15.2 10.7 22 14.5 ø ø

Piping port G 1/4

Piping port G

16-2-34 11 High Precision, Digital Pressure Switch for General Fluids Series ZSE50F/ISE50

Dimensions Bracket A

30 20

ZSE ISE

20 PSE 45 Z 55 I SE3 40 4.5 11.5 15 PS

7.2 7.5 1.6 35 41.5 22

Bracket D View A ZS-24-D

Cutting dimensions for panel mounting 43 or more +0.5 Panel mount 36 0

42.4 7.8 25.4 0 +0.5 36 47.4 70 or more

Front protection cover

The thickness of the panel is to 3.2 mm.

16-2-35 12

High Precision, Digital Pressure Switch for General Fluids Series ZSE60F/ISE60

How to Order

For positive pressure ISE60 A2 22 L M

For compound pressure ZSE60F A2 22 L M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Piping specifications Option A2 URJ 1/4∗, Piping in the backward direction Nil None B2 TSJ 1/4∗, Piping in the backward direction Bracket A ∗ URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment. A

Input/Output specifications 22 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input 30 Refer to the dimensions for 62∗ PNP open collector 2 output + Analog output D the difference between 70∗ PNP open collector 2 output + Auto shift input brackets A and D. ∗ Option Note) Auto shift input is used for the auto shift function. Panel mount For more information, please refer to “Auto Shift Function” on page 16-2-32. E Lead wire length L 3 m

Panel mount + Front protection cover

F Analog Output Suitable mode: ZSE60F/ISE60--22/62(L)-(M) Series ISE60 Series ZSE60F

5 5 Unit specifications Nil With unit switching function Note 1) M Fixed SI unit Note 2) 1 1 Note 1) Under the New Measurement Law, 0 which has been in effect since 1.0 MPa 100 kPa 100 kPa October, 1999, sales of switches

Analog output value (V) Analog output value (V) Analog output value with the unit conversion function have not been allowed for use in Pressure Pressure Japan. Note 2) Fixed unit: Option For compound pressure: KPa When option parts are required separately, use the following part numbers to For positive pressure: MPa place an order. Option Part no. Qty. Note Bracket A ZS-24-A 1 With 2 pcs. of mounting screws Bracket D ZS-24-D 1 With 2 pcs. of mounting screws Panel mount ZS-24-E 1 Panel mount + Front protection cover ZS-24-F 1

16-2-36 13 High Precision, Digital Pressure Switch for General Fluids Series ZSE60F/ISE60

Specifications

ZSE60F (Compound pressure) ISE60 (Positive pressure) Rated pressure range –100 to 100 kPa 0.000 to 1.000 MPa Operating pressure range and regulating pressure range –100 to 100 kPa –0.100 to 1.000 MPa Proof pressure 500 kPa 1.5 MPa kPa 0.1 s MPa — 0.001 Note 1) kgf/cm2 0.001 0.01 Setting/Display bar 0.001 0.01 ZSE resolution ISE psi 0.02 0.1 mmHg 1 — PSE inHg 0.1 — Fluid Fluid that will not corrode stainless steel 630 and 304 Z I SE3 Power supply voltage 12 to 24 VDC, Ripple (p-p) 10%or less Current consumption 55 mA or less (With no load) PS Switch output NPN or PNP 2 output (Max. applied voltage 30 V (NPN), Max. load current 80 mA)

Function Various additional functions are available for easy measurement, switch operation and check of measured values suitable for the conditions of the measured fluid. Auto shift function Note 1) Can correct the pressure set point value of switch output according to fluctuation in the primary pressure. 16-2-32 Anti-chattering function Prevents malfunction due to sudden fluctuations in the primary pressure by adjusting the response time. Key lock function The key board operation can be locked to prevent incorrect operation on the operation switch. Peak hold function Can retain the maximum pressure value displayed during measurement. Bottom hold function Can retain the minimum pressure value displayed during measurement. 16-2-43 Zero out function The pressure display can be set at zero when the pressure is open to the atmosphere. Unit conversion function (For overseas use)Note 1) Can convert the display value (For overseas use only). Note 1) Select and order by specifying the types and models.

16-2-37 14 Series ZSE60F/ISE60

Dimensions

A2 ZSE60F/ISE60-B2

30 30 27.7 20 2-M3 x 0.5 depth 4 8.45 20 6.4 Piping port

18.35 URJ 1/4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

ø3.5

7.8 12.4 7

21.7 2.5 2.6 8.45 30 15.2 10.7

Piping port TSJ 1/4

Piping port TSJ

The following items are identical with those of Series ZSE50F/ISE50. Item Reference page Output type 16-2-30 Example of internal circuit and wiring 16-2-31 Auto shift function, Anti-chattering function 16-2-32 Measures to be taken when error occurs 16-2-33

16-2-38 15 High Precision, Digital Pressure Switch for General Fluids Series ZSE60F/ISE60

Dimensions Bracket A

30 20

ZSE ISE

20 PSE 45 Z 55 I SE3 4.5 40 11.5

15 PS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 4.5 Z 1 ø I SE 2 6.5 1.6 41.5 20 Bracket A ZSP ZS-24-A View A ISA2 IS Bracket D A ZSM 30 PF2 20 IF Data 20 45 55 4.5 40 4.2 11.5 15

7.2 7.5 41.5 22 Bracket D ZS-24-D View A

Cutting dimensions for panel mounting 43 or more +0.5 Panel mount 36 0

42.4 7.8 25.4 0 +0.5 36 47.4 70 or more

Piping port URJ 1/4 Front protection cover

The thickness of the panel is to 3.2 mm.

16-2-39 16 50 50 Series ZSE60F/ISE60

Description (Common to ZSE50F/ISE50 and ZSE60F/ISE60)

31/2 digit LED Displays current pressure kPa Displays current mode Displays error mode LED (Red) LED (Green) Displays OUT 2 switch output status OUT1 OUT2 Displays OUT 1 switch output status Light up when ON Lights up when ON SET UP button Down button Use this button to change the mode Use this button to change the mode or set value. or set value. Set button Use this button to change the mode

or set value. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60)

Calibration procedure

Manual calibration

Enter the set value on the pressure to perform switch output. Normal Initial setting 16-2-41 Value clear operation

Set “Output mode”, “Res- Adjust the zero point of Detects and displays ponse time” and “Auto/ atmospheric pressure. pressure and operates Manual mode.” Auto preset switch. 16-2-41 16-2-43

The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation. 16-2-42

Manual Key lockPeak hold Bottom hold Unit conversion fine adjustment

Display unit can The data set by Prevents incorrect Can retain the Can retain the be changed auto preset operation such as maximum pressur minimum pressure overwriting set displayed during displayed during (for overseas use function is fine point value by measurement. measurement. only). turned. mistake.

16-2-40 17 High Precision, 50 50 Digital Pressure Switch for General Fluids Series ZSE60F/ISE60

Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60)

Initial setting

1. Initial setting mode 2. OUT1 output mode selection 3. OUT2 output mode selection

SET ZSE Press the SET button. ISE PSE

Press the SET button at least 2 Select the “output mode” of OUT1 Select the “output mode” of OUT2 Z seconds. Release it when the with or button. with or button. I SE3 display turns to “1no” “1no”: Normally open mode, “2no”: Normally open mode, “1nC”: Normally closed mode “2nC”: Normally closed mode Unit In case of types with PS specifications: unit conversion func-

SET SET SET IS Press the SET button. Press the SET button. Press the SET button to complete calibration. ZSM

Set the response time with or Select the auto preset mode or manual PF2

button. calibration mode with the or button. F (Select from “2.5: 2.5 ms,” “24: 2.4 ms,” “RU_ ”: Auto preset mode, “192: 192 ms,” and “768: 768 ms. ”) “nRn”: Manual calibration mode. IF

Please refer to “Chattering prevention Data function” on page 16-2-43.

Manual pressure setting The output method is determined by the pressure set point value.

1. Manual setting mode 2. OUT1 (1) output set point value input 3. OUT1 (2) output set point value input

SET Press the SET button.

Select the manual setting mode as the button: Increases the set point value. button: Increases the set point value. initial setting mode. Press the SET button: Decrease the set point value. button: Decrease the set point value. button and hold it unit “P_1” or “n_1” “P_1” or “n_1” and the set point value “P_2” or “n_2” and the set point value appears on the display. light up alternately. light up alternately.

4. OUT2 (1) output set point value input 5. OUT2 (2) output set point value input 6. Auto shift input display

SET SET SET SET

Press the SET button. Press the SET button. Press the SET button. Press the SET button to complete calibration.

button: Increases the set point value. button: Increases the set point value. “C_5” and the correction value light up alternately. In case button: Decrease the set point value. button: Decrease the set point value. there has been no auto shift input, zero is displayed. “P_3” or “n_3” and the set point value “P_4” or “n_4” and the set point value ∗ Auto shift input is displayed only if auto shift is light up alternately. light up alternately. supported by the I/O specifications (-30/-70). It is not displayed in case of types with analog output (-22/-62).

16-2-41 18 50 50 Series ZSE60F/ISE60

Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60)

Auto preset (Example: Adsorption Confirmation)

1. Auto preset mode 2. Preparation of auto preset 3. OUT1 auto preset

SET

Press the SET button.

Select auto preset mode as the Prepare the equipment to be set Repeat vacuum and break several initial setting mode. Press the while “RP1” is displayed. times while “AIL” is displayed. The SET button and hold it until “RP1” If OUT1 setting is not required, optimum set point value is appears on the display. press the and buttons determined automatically.

simultaneously to skip to “RP2”. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

4. Preparation of auto preset 5. OUT2 auto preset

SET SET SET

Press the SET button. Press the SET button. Press the SET button to complete calibration.

Change the vacuum nozzle or Repeat vacuum and break several other conditions of the workpiece times while “AIL” is displayed. The and supply vacuum pressure. If optimum set point value is OUT2 setting is not required, determined automatically. press the and buttons simultaneously to skip to the measurement mode.

High Suction Vacuum Work 1 Work 2 Work n Max.A

ON point

OFF point

Min.B

Not adsorption Work 1 Work 2 Work n Atmosphere ON point = A – A – B Max.A: Maximum pressure value when workpiece is vacuumed. 4 Min.B: Maximum pressure value when workpiece is not vacuumed. OFF point = B + A – B 4

16-2-42 19 High Precision, 50 50 Digital Pressure Switch for General Fluids Series ZSE60F/ISE60

Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60)

Key lock function Can prevent incorrect operation of operation buttons on the switch front.

Key lock start Key lock cancel

ZSE SET SET ISE

Press the SET Press the SET button to com- button to com- PSE plete calibration. plete calibration. Z I SE3 Press the SET button at least 2 Change the display to “LoC” with the Press the SET button at least 4 Change the display to "UnL” with the seconds. Release it when the or button. seconds. Release it when the or button. display turns to “UnL” . display turns to “LoC”. PS

Zero out Unit conversion (for overseas use) 50 50 The displayed value can be calibrated at zero if the measured Only for ZSE 60 F/ISE 60 - - (L) pressure is in the range of 70 increments of atmospheric pressure. Unit selection OUT1 output mode selection

Let the supply pressure open to the atmosphere. Hold both and buttons simultaneously to reset the display value to zero. After resetting, the Goes to 2. OUT1 output operation returns to the measurement mode. SET mode selection in Initial Setting on page 16-2-41. Press the SET button.

Set the unit with the or button. : kPa or MPa : kgf/cm2 : bar : psi : inHg Note 1) : mmHg Note 1) Note 1) Calibration is available with series ZSE50 and ZSE60.

16-2-43 20 50 50 Series ZSE 60 F/ISE60 Pressure Switch Precautions Be sure to read before handling.

Handling Pressure Source Warning Warning 1. Do not drop, or apply excessive impact (980 m/s2) while 1. Use of toxic, corrosive or flammable gas. handing. Although the body of the sensor may not be The materials of the pressure sensor and fittings on the switch damaged, the internal parts of the sensor could be damaged are stainless steel 630 and stainless steel 304. Do not use and lead to a malfunction. toxic or corrosive gas. 2. The tensile strength of the cord is 49 N. Applying a greater The switch is not protected against explosion. Do not use it pulling force on it can cause a malfunction. When handling, with flammable gas, either. hold the body of the sensor — do not dangle it from the cord. 3. Do not exceed the screw-in torque of 13.6 N⋅m when installing 2. Fluid compatibility piping. Exceeding this value may cause malfunctioning of the The fluid contact areas are stainless steel 630 (pressure sensor. sensor) or stainless steel 304 (fittings). Use fluid that will not Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 4. Do not use pressure sensors with corrosive and/or flammable corrode the materials. gases or liquids. (For corrosiveness of fluid, consult with the manufacturer of the fluid.) Connection Helium leakage test Warning Helium leakage test is conducted on the welding parts. Use a 1. Incorrect wiring can damage the switch and cause a ferrule a ferrule by (Swagelok fittings) as the TSJ fittings and malfunction or erroneous switch output. packing, ground, etc. by Cajon (VCR fittings) as the URJ fittings. 2. Turn off the power before connecting the wires. If a ferrule, packing or ground by other manufacturers are to be 3. Wire separately from power lines and high voltage lines, used, conduct helium leakage test before using those products. avoiding wiring in the same conduit with these lines. Malfunctions may occur due to noise from these lines. 4. If a commercial switching regulator is used, make sure that the Mounting Method F.G. terminal is grounded. Caution Operating Environment 1. Mounting with panel mount adapter Warning Front protection cover (Option) 1. Our pressure switches are CE marked; however, they are not equipped with surge protection against lightning. Lightning Panel surge countermeasures should be applied directly to system components as necessary. 2. Our pressure switches do not have an explosion proof rating. Never use it in the presence of an explosive gas as this may cause a serious explosion.

Panel mounting Caution adapter A 1. Do not use in an environment with spattering liquid of oil or Panel mounting solvent. adapter B 2. In an environment where the body of the switch is exposed to water or dust, there is possibility of water or dust invasion of 2. Mounting with brackets the switch through the atmospheric release port. Insert a ø4 Mount a bracket to the using two M3 x 5L mounting screws tube (with inside diameter of ø2.5) into the atmospheric and install on piping with a hexagon socket cap screws. The release port and pipe the other end to a place with no switch can be installed horizontally depending on the spattering water or other liquid. Do not fold or clog the tube or installation location. the pressure cannot be measured properly. Mounting screw M3 x 5L

Atmospheric release port

To a safe place with The tightening torque for bracket mounting no water or dust screw should be 0.98 N⋅m or less. Air tube Bracket A or D

∗ Confirm that the air tube is inserted to the bottom of the atmospheric release port. ∗ Use SMC TU0425 (Material: Polyurethane, O.D.: ø4, I.D: ø2.5) as the air tube.

16-2-44 1 2-color Display Digital Pressure Switch Series ISE70/75/75H

ZSE ISE PSE Metal Body Type Z (Die-cast aluminum) I SE3 For General PS

Easily identifiable abnormal readings

10 mm character height

M12 Connector • Lead wire with M12 connector (5m) • Straight and right-angled connectors

With Bracket Function • User-selectable mounting orientation • Anti-chattering • Display calibration • Zero out • Key lock • Unit display switching

For Air For General Fluids ISE70(1MPa) ISE75(10MPa) ISE75H(15MPa)

MPa MPa MPa

OUT1 OUT1 OUT1 • Withstand pressure: Rated pressure x 3 U P DOWN U P DOWN U P DOWN SET SET SET

• Model with initial displaydisplay settings of PSI is also availableavailable as standard. Plain Gray Orange • PPortort sizsizee • Rc1/4, NPT1/4, G1/4(ISO1179) PRESSURE SWITCH PRESSURE SWITCH PRESSURE SWITCH 16-2-45 ® 2 2-color Display Digital Pressure Switch/For Air Series ISE70

How to Order

1MPa ISE70 02 43 M

Output Fixed setting: 2 43 NPN open collector 1 output (Pin no. 4) + A 1 PNP open collector 1 output (Pin no. 2) 65 PNP open collector 1 output (Pin no. 4) 3 4 Note) Mounting screws Connector Pin are not included. Assignments Display unit Output -43 Nil With unit display switching function 1 Brown DC (+) M Fixed SI unit Note 1) Option 1 None 2 White OUT1 (PNP) Pressure unit: PSI (Initial value) Nil 3 Blue DC (–) P Lead wire with M12 connector (5m), With unit display switching function S 4 Black OUT1 (NPN) straight Note 1) Fixed unit: MPa Lead wire with M12 connector (5m), Output -65 L right-angled 1 Brown DC (+) 2 White NC 3 Blue DC (–) 4 Black OUT1 (PNP)

Optional Part No.

When option parts are required separately, use the following part numbers to place an order. Option Part No. Note

1 OUT DOWN Bracket B and the bracket assembly P U T SE make up one set. Bracket ZS-31-A Note: Mounting screws are not included. Bracket B

Bracket assembly

Lead wire with M12 connector, ZS-31-B Lead wire length: 5m straight

Lead wire with M12 connector, ZS-31-C Lead wire length: 5m right-angled 16-2-46 3 Digital Pressure Switch For Air Series ISE70

Specifications

ISE70 Rated pressure range 0 to 1MPa Set pressure range –0.1 to 1MPa Proof pressure 1.5MPa

Set pressure resolution 0.01MPa ZSE Fluid Air, lnert gas, Non-flammable gas ISE Power supply voltage 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) PSE Current consumption 55 mA or less (at no load) Switch output Output -43: Fixed setting; NPN open collector 1 output (Pin no. 4) + PNP open collector 1 output (Pin no. 2) Note 1) Z I SE3 Output -65: PNP open collector 1 output (Pin no. 4) Note 1) Max. load current 80 mA PS Max. applied voltage 30 V (with NPN output) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z 1 Residual voltage 1 V or less (with load current of 80 mA) I SE 2 Response time 2.5 ms (Response time selections with anti-chattering function: 20 ms, 160 ms, 640 ms, 1000 ms, 2000 ms) ZSP Short circuit protection With short circuit protection Repeatability ±0.5%F.S. ISA2 Hysteresis mode Hysteresis Adjustable (can be set from 0) Window comparator mode IS Display 3 digit, 7-segment indicator, 2-color display (red and green) can be interlocked with the switch output, Sampling cycle: 5 times/s Display accuracy ±2%F.S. ±1 digit or less (at 25°C ±3°C) ZSM Indication light Light up when output is ON (Green) Functions Anti-chattering function, Unit display switching function, Zero out function, Key lock function PF2 Enclosure IP67 IF Fluid temperature range 0 to 50°C (with no freezing or condensation) Environ- Operating temperature range Operating: 0 to 50°C, Stored: –10 to 60°C (with no freezing or condensation) Data mental Operating humidity range Operating and stored: 35 to 85%RH (with no condensation) resistance Withstand voltage 1000 VAC for 1 min. between live parts and enclosure Insulation resistance 50 MΩ or more between live parts and enclosure (at 500 VDC Mega) Vibration resistance 10 to 500 Hz, 1.5 mm or 98 m/s2 amplitude in X, Y, Z directions for 2 hours each Impact resistance 980 m/s2 in X, Y, Z directions 3 times each (Non energized) Temperature characteristics ±2%F.S. or less (Based on 25°C: Operating temperature range) Standard Compliant with CE Marking and UL/CSA (UL508) standards Wetted material Fitting: C3602 (electroless nickel plated), Sensor port: PBT, Sensor pressure receiving area: silicon, O-ring: NBR Port size 02: Rc1/4, N02: NPT1/4, F02: G1/4 (ISO1179) Note 2) Lead wire Lead wire with M12 4-pin pre-wired connector (5 m) Mass (Weight) 190 g (excluding the lead wire with M12 4-pin pre-wired connector) Note 1) The NPN and PNP outputs function for a single set point. Note 2) G1/4: Applicable to ISO1179-1 Internal Circuit and Wiring Examples

Fixed setting: NPN open collector output + PNP open collector output See the operation manual for information on how to (the pressure set point for switching the output signal is common to both outputs.) set and on handling precautions. Maximum 30 V (NPN only), 80 mA, Residual voltage 1 V or less Output -43 Output -65 DC (+) DC (+) (Brown) (Brown)

OUT1 (NPN) N.C. Load + (White) + (Black) 12 to 12 to 24 VDC OUT1 (PNP) 24 VDC – (Black) –

Main circuit OUT1 (PNP) Main circuit Load Load (White) DC (–) DC (–) (Blue) (Blue) 16-2-47 ® 4 2-color Display Digital Pressure Switch/For General Fluids Series ISE75/75H

How to Order

10MPa ISE75 02 43 M

15MPa ISE75H 02 43 M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Piping 02 Rc1/4 Option 2 N02 NPT1/4 Nil None Note 1) F02 G1/4 (ISO1179) With bracket Note 1) G1/4: Applicable to ISO1179-1

2 1 Output A Fixed setting: 3 4 43 NPN open collector 1 output (Pin no. 4) + Connector Pin PNP open collector 1 output (Pin no. 2) Assignments 65 PNP open collector 1 output (Pin no. 4) Output -43 1 Brown DC (+) 2 White OUT1 (PNP) Display unit Option 1 3 Blue DC (–) Nil With unit display switching function Nil None 4 Black OUT1 (NPN) M Note 1) Lead wire with M12 connector (5m), Fixed SI unit S Pressure unit: PSI (Initial value) straight Output -65 P With unit display switching function Lead wire with M12 connector (5m), 1 Brown DC (+) L Note 1) Fixed unit: MPa right-angled 2 White NC 3 Blue DC (–) 4 Black OUT1 (PNP)

Optional Part No.

When option parts are required separately, use the following part numbers to place an order. Option Part No. Note

N OW OUT1 D Bracket B and the bracket assembly P U T SE make up one set. Bracket ZS-31-A Bracket B

Bracket assembly

Lead wire with M12 connector, ZS-31-B Lead wire length: 5m straight

Lead wire with M12 connector, ZS-31-C Lead wire length: 5m right-angled 16-2-48 6_02_ZSE_ISE.qxd 04.9.22 19:13 Page 2-49

5 Digital Pressure Switch For General Fluids Series ISE75/75H

Specifications

ISE75 ISE75H Rated pressure range 0 to 10MPa 0 to 15MPa Set pressure range 0.4 to 10MPa 0.5 to 15MPa Proof pressure 30MPa 45MPa

Set pressure resolution 0.1MPa ZSE Fluid Fluid that will not corrode stainless steel SUS430 and SUS630 ISE Power supply voltage 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) PSE Current consumption 55 mA or less (at no load) Switch output Output -43: Fixed setting; NPN open collector 1 output (Pin no. 4) + PNP open collector 1 output (Pin no. 2) Note 1) Z I SE3 Output -65: PNP open collector 1 output (Pin no. 4) Note 1) Max. load current 80 mA PS

Fixed setting: NPN open collector output + PNP open collector output See the operation manual for information on how to (the pressure set point for switching the output signal is common to both outputs) set and on handling precautions. Maximum 30 V (NPN only), 80 mA, Residual voltage 1 V or less Output -43 Output -65 DC (+) DC (+) (Brown) (Brown)

OUT1 (NPN) N.C. Load + (White) + (Black) 12 to 12 to 24 VDC OUT1 (PNP) 24 VDC – (Black) –

Main circuit OUT1 (PNP) Main circuit Load Load (White) DC (–) DC (–) (Blue) (Blue) 16-2-49 6 Series ISE70/75/75H

Description

Indication light (Green) LCD display MPa Displays the switch operation status. Displays the current pressure condition, set mode and error code. The display mode can be selected

OUT1 from four options: fixed green SET button single-color reading, fixed red U P DOWN single-color reading, green reading Use this button to switch the mode SET interlocked with output for switching and set the set value. to red reading, and red reading interlocked with output for switching to green reading. UP button DOWN button Use this button to change the mode PRESSURE SWITCH or increase the ON/OFF set value. It Use this button to change the mode also allows you to switch to the peak or decrease the ON/OFF set value. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy value display mode. It also allows you to switch to the bottom value display mode.

Functions

Display calibration function Error function This function eliminates slight differences in the output values and Take the following corrective solutions when error occurs. allows uniformity in the numbers displayed. Error description LCD display Condition Solution Displayed values of the pressure sensor can be calibrated to within ±5% of their readings. A load current Shut off the power greater than 80 mA supply. After eliminating 5%R.D. ± Over-current is turned on through the output factor that error either or both of the caused the excess switch outputs. current, turn the power + supply back on. 0 Applied pressure : Factory setting display value A pressure level greater set prior to shipment than ±7% F.S. has been : Display calibration range applied during zero Displayed pressure value Note) When the display calibration function is used, the set pressure value adjustment. The switch Bring the pressure may change ±1 digit. Residual will automatically return back to atmospheric pressure to measuring mode in pressure and try Peak/Bottom hold function error three seconds, however. using the zero out Note that the range of function. This function constantly detects and updates the maximum and zero adjustment differs minimum pressure values and allows to hold the display value. by ±1 digit due to switch- to-switch variations. Key lock function Supply pressure This function prevents incorrect operations such as changing the set exceeds the maximum value accidentally. Applied set pressure. Reduce/Increase pressure supply pressure to Zero out (Zero ADJ) function error Supply pressure is within the set below the minimum pressure range. The measured pressure reading can be adjusted to zero. set pressure. More specifically, the factory-set reading can be corrected to within ±7% F.S.

Unit display switching function Internal data error The reading unit can be selected. Unit/Reading resolution ISE70 ISE75/75H Internal data error Shut off the power Pa 0.01MPa 0.1MPa System error supply. Turn the kgf/cm2 0.1 1 power supply back bar 0.1 1 Internal data error on. psi 1 1 (x 10)

Internal data error Anti-chattering function

A large bore cylinder or ejector consumes a large amount of air in operation and Note) If the switch will not recover to normal even after all of the may experience a temporary drop in the primary pressure. This function prevents above mentioned solutions have been applied, consult SMC for detection of such temporary drops in primary pressure as abnormal pressure. investigation.

Response time selections: 20ms, 160ms, 640ms, 1000ms, 2000ms 16-2-50 7 Digital Pressure Switch For Air/For General Fluids Series ISE70/75/75H

Dimensions ISE70/ 75 / 75H 34 9 39

MPa

ZSE ISE OUT1 Lead wire with M12 U P DOWN connector (5m) PSE 70 SET straight Z I SE3 14.5 PS

2 1 IF Data With bracket 3 4 34 Connector Pin 9 44.5 Assignments Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP)

OUT1 3 Blue DC (–)

U P DOWN 4 Black OUT1 (NPN) SET Output -65

90 1 Brown DC (+) 14.5 2 White NC 3 Blue DC (–) 4 Black OUT1 (PNP) 2–6.5 18.3

(28.7) 46 35 (38.2) 60

Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 6

16-2-51 8 Series ISE70/75/75H Pressure Switch Precautions Be sure to read before handling.

Mounting Warning 2. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping. Do not apply a wrench to the body part as this may damage the

switch. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Series ISE70/75/75H Digital Pressure Switch Precautions Be sure to read before handling.

Mounting Warning 1. Operation Refer to the instruction manual for the operation of the digital pressure switch.

Wiring Warning 1. Connect a DC (–) wire (blue) as close as possible to the DC power supply GND terminal. Connecting the power supply away from the GND terminal can cause malfunctions due to noise from devices that are connected to the GND terminal. 2. Do not attempt to insert or pull the pressure sensor or its connector when the power is on. 3. A cable with a right-angled connector is also available. The right-angled connector faces down (toward the piping). Do not attempt to rotate the connector, as it is not rotatable.

16-2-52 9 Series ISE70/75/75H Specific Product Precautions 1 Be sure to read before handling.

Handling Operating Environment Warning Warning 1. Do not drop, bump, or apply excessive 1. Our pressure switches are CE marked; ZSE impacts (980 m/s2) while handling. Although however, they are not equipped with surge ISE the body of the sensor may not be damaged, protection against lightning. Lightning surge the internal parts of the sensor could be countermeasures should be applied directly PSE damaged and lead to a malfunction. to system components as necessary. Z I SE3 2. The tensile strength of the cord is 50 N. 2. Our pressure switches do not have an Applying a greater pulling force on it can explosion proof rating. Never use in the PS cause a malfunction. When handling, hold the

N 1 OW OUT D

P U T SE Bracket B and the bracket assembly make up one set.

Bracket B

Bracket assembly 16-2-53 10 Series ISE70/75/75H Specific Product Precautions 2 Be sure to read before handling.

Set pressure range and rated pressure range Caution 1. Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting. The rated pressure range is the range of pressure that satisfies the specifications (accuracy, linearity, etc.) on the sensor. Although it is possible to set a value outside the rated pressure range, the specifications will not be guaranteed even if the value stays within the set pressure range.

Pressure range Switch –100kPa 00.4MPa 0.5MPa1MPa 10MPa 15MPa

0 1MPa Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy For 1MPa (For Air) ISE70 –100kPa 1MPa (–0.1MPa)

0 10MPa For 10MPa ISE75 (For General Fluids) 0.4MPa 10MPa

0 15MPa For 15MPa ISE75H (For General Fluids) 0.5MPa 15MPa

The ISE75/75H switch shows zero (0) when the pressure being applied goes below the lower limit of the set pressure range. Rated pressure range of switch Set pressure range of switch

16-2-54 1 High Precision, Remote Type Digital Pressure Sensor Series PSE530/200

ZSE ISE PSE

Z I SE3 PS

MPa kPa 2 A single controller monitors up to OUT1 OUT2 CH 1234 PRESSURE 4 SET 4 pressure sensors. 3

16-3-1 2 1

MPa kPa 2 A single controller monitors up to 4 pressure sensors. OUT1 OUT2 CH 1234 PRESSURE 4 SET 3

ZSE ISE Pressure Sensor Multi-channel Controller PSE Series PSE530 Series PSE200 Z I SE3 1 Space saving 3 Multifunction PS 40 mm Auto shift function (P. 16-3-17) Display calibration (P. 16-3-17) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Channel scan function (P. 16-3-18) Z 1 Allows stable switch output even when supply Each channel has an adjustable display Allows constant monitoring of the displayed SE pressure changes. function. I 2 pressure value for each channel.

MPa kPa Auto preset (P. 16-3-14) Although supply Displays exact the MPa kPa ZSP Automatically sets the pressure value. pressure for each same pressure OUT1 channel is the same, values for all OUT2 CH 1234 slightly different channels. CH PRESSURE Auto identification function (P. 16-3-17) values are displayed. ISA2 SET MPa MPa MPa kPa Can automatically identify the pressure range kPa kPa MPa MPa kPa kPa of a connected SMC sensor. OUT1 OUT2 CH % 1234 76 CH CH PRESSURE IS CH SET CH Copy function (P. 16-3-17) MPa MPa reduction in Each channel’s information can be copied to kPa kPa another channel. ZSM installation CH CH MPa kPa CH1 setting can be copied to CH2, CH3, and CH4. MPa MPa 165 mm space kPa kPa PF2 CH Copy CH2 (Compared to the panel mounted ZSE40/ISE40.) CH CH • Reset function Copy MPa MPa kPa kPa kPa kPa kPa kPa CH1 CH3 • Key lock function IF Copy CH CH • Displays peak & bottom pressure OUT1 OUT2 OUT1 OUT2 OUT1 OUT2 OUT1 OUT2 CH4 Data 40 mm SET SET SET SET Less panel Anti-chattering function (P. 16-3-12) values mounting work Prevents malfunction due to sudden Panel mounting pressure changes.

2 Simplified application 4 Application

A single controller monitors various applications. Connectable to SMC’s other series

(Series PSE510 & PSE52 ) . . . .

The use of connector literally . Suction Ejector supply

. Connecting to general purpose

. verification pressure verification

makes wiring work a snap. . pressure sensor PSE52 allows the .

. sensor to verify hydraulic or liquid

. pressure rather than air pressure.

. PSE520

. No tools Verifies

. required peening of

. a hydraulic . cylinder. Thanks to a tool-free module press-in connector, PSE520 all you need to do is to simply snap-in the lead Verifies supply wire and lock it! pressure for MPa Crimping tools are not required. kPa line cleaning and washing operations. OUT1 OUT2 CH 1234 PRESSURE

SET The connection cable is a halogen-free PSE521 heavy-duty cord. (ISO 14000 compatible) Placement Controller Leak test verification Suctioning Pressure sensor of wet workpieces can be verified.

Note) Connector types vary depending on the core wire size of the sensor cable and Low power consumption: 55 mA or less (Controller) the outside diameter of insulation. The new controller provides energy savings without compromising display brightness quality Refer to “Connecting to other series” on page 16-3-21. thanks to the use of transparent (negative) LCD and a backlight.

16-3-2 16-3-3 3

Pressure Sensor Series PSE530

How to Order

PSE53 0 M5

Pressure sensing range

Port size L M5 M5 x 0.8 Option Sensor cable (3 m) + Connector (1 pc.) When only optional parts are required, order using the part numbers listed below. Connector CL

Description Part no. Note

Connector ZS-26-E 4 pcs. per set 4 3 2 1 Sensor cable ZS-26-F Cable length: 3 m Note) At the factory, the connector is not connected to the Connector + Cable length: 3 m ZS-26-G The connector is not connected to cable, but packed together with it for shipment. Sensor cable the cable at the time of shipment.

Specifications

Model PSE530-M5 PSE531-M5 PSE532-M5 PSE533-M5 Rated pressure range 0 to 1 MPa 0 to –101 kPa 0 to 101 kPa –101 to 101 kPa Proof pressure 1.5 MPa 500kPa Fluid Air/Non-corrosive gas Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Current consumption 15 mA or less Output specification Analog output (1 to 5 V, Output impedance: Approx. 1 kΩ) Accuracy ±2% F.S. or less (Within rated pressure range, Ambient temperature 25° ±3°C) Linearity ±1% F.S. or less Repeatability ±1% F.S. or less Power supply voltage effect ±1% F.S. or less based on the analog output at 18 V ranging from 12 to 24 VDC Enclosure IP40 Temperature range 0° to 50°C; Stored: –10° to 70°C (No freezing or condensation) Withstand voltage 1000 VAC, 50/60Hz for 1 minute between external terminals and case Insulation resistance 5 MΩ between external terminals and case (at 50 VDC)

Resistance Vibration resistance 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized) Impact resistance 980 m/s2 in X, Y, Z directions, 3 times each (De-energized) Temperature characteristics (Based on 25°C) ±2% F.S. or less based on the analog output value at 25°C from a range of 0° to 50°C Port size M5 x 0.8 Material Body: Stainless steel Grade 303, Internal enclosure: PPE; Pressure sensor: Silicon; O-ring: NBR Sensor cable/Option Halogen-free heavy-duty cord, ø2.7, 0.15 mm2, 3 cores, 3 m

16-3-4 4

Pressure Sensor Series PSE530

Internal Circuit

Brown Sensor cable color DC (+) Power supply Brown Black 12 to 24 VDC DC (–) GND Blue Load

Analog output (1 to 5 V) Black Main circuit Blue

ZSE ISE

Dimensions PSE Z PSE53-M5 I SE3 PS 3.4 29.4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy M5 x 0.8 Z 1 0.5 27.2 SE Pressure port I 2 ø2.5 ø13 ZSP 5.4 ø12 ø7.2 ISA2

3 12 IS 4 5 5.5 ZSM

With sensor cable PF2 IF ø2.7

ø10.4 Data

16-3-5 5

Multi-channel Controller Series PSE200

How to Order

PSE20 0 M

Option 2 Input/Output specifications Nil Without connector

Unit specifications 4C Nil With unit display switching function M Fixed SI unit Note) Note) Fixed unit Connector For vacuum low pressure & compound pressure: kPa Option 1 For high pressure: MPa Nil Without panel mount/protective cover Panel mount

Accessory: Power supply/Output connection cable (2 m) Included with the controller. A Mounting screws (M3 x 8L) (Accessory) Waterproof seal Panel mount adapter Power supply/Output connection cable (Accessory) ZS-26-A Panel Front protective cover + Panel mount

B Mounting screws (M3 x 8L) Front protective cover (Accessory)

Waterproof seal Panel mount adapter (Accessory) Panel Option

When only optional parts are required, order with the part numbers listed below. Description Part no. Note Panel mount adapter ZS-26-B Waterproof seal, screws included Front protective cover ZS-26-01 Front protective cover + ZS-26-C Waterproof seal, screws included Panel mount adapter ZS-26-D 48 conversion adapter

48 conversion adapter This adapter is used to mount Series PSE200 on the panel fitting of Series PS100.

Order panel mount adapter separately. Connector ZS-26-E (4 pcs. per set) 16-3-6 6

Multi-channel Controller Series PSE200

Specifications

Model PSE200 PSE201 Output specification NPN open collector PNP open collector Power supply voltage 12 to 24 VDC ±10%, Ripple (p-p) 10% or less (With power supply polarity protection) Current consumption 55 mA or less (Current consumption for sensor is not included.) Power supply voltage for sensor [Power supply voltage] –1.5 V Power supply current for sensor Note 1) 40 mA maximum (100 mA maximum for the total power supply current when 4 sensors are input.) Sensor input 1 to 5 VDC (Input impedance: Approx. 800 kΩ) No. of inputs 4 inputs ZSE ISE Input protection With excess voltage protection (Up to 26.4 V) Hysteresis mode Variable Hysteresis PSE Window comparator mode 3-digit fixed No. of outputs 5 outputs (CH1: 2 outputs, CH2 to 4: 1 output) Z I SE3 Maximum load current 80 mA Switch output Maximum load voltage 30 VDC (With NPN) PS Residual voltage 1 V or less (With load current of 80 mA)

16-3-7 7 Series PSE200

Dimensions PSE200 & PSE201

40 40.1 18.7 Connector 6 6.5 (option)

MPa kPa

OUT1 CH PSE200 OUT2 1 2 3 4 36.8

PRESSURE MADE IN JAPAN ZZ

SET Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Sensor connector (4P x 4) Connector (Option)

PIN no. Ter minal DC (+) IN (1 to 5 V) DC (–) 4 3 2 1 N.C.

Power supply/Output connector (8P)

Power supply/Output connection cable (Included)

Pin no. PIN no. Terminal 8 Yellow : Auto shift input DC (+) 7 Green : CH4_OUT1 DC (–) 6 Red : CH3_OUT1 CH1_OUT1 5 Gray : CH2_OUT1 CH1_OUT2 4 White : CH1_OUT2 CH2_OUT1 3 Black : CH1_OUT1 2000 CH3_OUT1 2 Blue : DC (–) CH4_OUT1 1 Brown: DC (+) Auto shift input

16-3-8 8

Multi-channel Controller Series PSE200

Dimensions

Front protective cover + Panel mount

53 47 9.4 (2) 42.4

ZSE ISE MPa kPa PSE

OUT1 OUT2 CH Z 1234 46.4 I SE3 PRESSURE

SET PS

MPa PF2 kPa OUT1 IF OUT2 CH 1234 PRESSURE Data SET

Panel mount adapter Waterproof seal

Panel 48 conversion adapter

55 or more +0.1 37.5 -0.2 55 or more

Panel fitting dimension Applicable panel thickness: 0.5 to 8 mm

16-3-9 9 Series PSE530/200

Descriptions

4-digit display Unit display Displays the measured The selected unit lights up. Use pressure value, content for MPa unit labels for units other than each setting, and error code. kPa MPa and kPa. Switch output display Displays the output status of Unit labels 2 OUT1 (CH1 to CH4), OUT2 OUT1 kgf/cm bar PSI inHg mmHg (CH1 only). OUT2 CH Lights up when it is ON. 1234 Channel display UP button PRESSURE Displays the selected channel. Use this button to change the mode or set value. SET

DOWN button Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy SET button Use this button to change the Use this button to set the mode mode or set value. or set value.

Error Code & Solution Internal Circuit and Connection LED display Contents Solution PSE200-(M) • NPN open collector 5 outputs + Auto shift 1 input specification Excess current is Shut off the power flowing into the supply. After switch output of eliminating the DC (+) (Brown) OUT1. output factor that DC (+) Sensor input: +1 to 5 VDC Excess current is caused the excess DC (–) 1.2 k N.C. Load Load Load Load flowing into the current, turn the Load switch output of power supply back 7.3 k DC (+) Auto shift input (Yellow) OUT2. on. Sensor input: +1 to 5 VDC Pressure is applied DC (–) CH1_OUT1 (Black) N.C. +12 to 24 VDC to a pressure sensor CH1_OUT2 (White) + during the reset DC (+) Main circuit operation (a zero Sensor input: +1 to 5 VDC CH2_OUT1 (Gray) – point adjustment) as DC (–) CH3_OUT1 (Orange) follows: Bring the pressure N.C. When compound CH4_OUT1 (Pink) back to atmospheric DC (+) pressure is used: pressure and use Sensor input: +1 to 5 VDC ± 2.5% F.S. or more. DC (–) the reset function DC (–) (Blue) When pressure other N.C. (zero point than compound pressure is used: adjustment) again. ±5% F.S. or more. ∗ After displaying for 2 seconds, it will return to the measuring mode. PSE201-(M) • PNP open collector 5 outputs + Auto shift 1 input specification Supply pressure exceeds the maximum regulating Reduce/Increase DC (+) (Brown) DC (+) pressure. supply pressure to Sensor input: +1 to 5 VDC 1.2 k DC (–) 7.3 k within the regulating Auto shift input (Yellow) Supply pressure is pressure range. N.C.

below the minimum DC (+) regulating pressure. Sensor input: +1 to 5 VDC CH1_OUT1 (Black) DC (–) N.C. CH1_OUT2 (White) +12 to 24 VDC + DC (+) CH2_OUT1 (Gray)

Internal data error. Please contact SMC. Main circuit Sensor input: +1 to 5 VDC – DC (–) CH3_OUT1 (Orange) N.C. CH4_OUT1 (Pink) DC (+) Internal data error. Sensor input: +1 to 5 VDC Load Load Load Load DC (–) Load N.C. DC (–) (Blue) Shut off the power supply and turn it Internal data error. back on. Please contact SMC if it does not recover.

Internal data error.

16-3-10 10

Multi-channel Controller/Pressure Sensor Series PSE530/200

Operation 1: Initial Setting

1 Channel selection

MPa kPa

OUT1 OUT2 CH 1234 PRESSURE CH1 CH2 CH3 CH4 ZSE SET ISE

Press SET button and hold for 2 seconds or longer. PSE Z 2 Range setting I SE3 PS

OUT1 ZSP OUT2 CH 1234 PRESSURE Compound pressure Vacuum Low pressure High pressure ISA2 SET Note) Sensor range varies depending on the type of pressure sensor. IS Pressure Sensor/Sensor Range ZSM Sensor supply pressure (Compound pressure) (Vacuum) (Low pressure) (High pressure) Regulating pressure range –101 to 101 kPa 10 to –101 kPa –10 to 101 kPa –0.1 to 1 MPa PF2 Applicable pressure sensor PSE533 PSE531 PSE532 PSE530 IF If the controller is equipped with a unit switching function, unit setting can be changed. SET (Refer to page 16-3-17 for details.) Data

3 Output mode setting

OUT1 setting MPa kPa or

OUT1 OUT2 CH 1234 PRESSURE Normally Open Normally Closed SET

SET (For CH2, CH3, and CH4, go to Response time setting.)

OUT2 setting/(CH1 only) MPa kPa or

OUT1 OUT2 CH 1234 PRESSURE Normally Open Normally Closed SET

SET

16-3-11 11 Series PSE530/200

Operation 1: Initial Setting

4 Response time setting

MPa kPa

OUT1 OUT2 CH 1234 PRESSURE 5 ms 20 ms 160 ms 640 ms SET

Press SET button.

Anti-chattering function Pressure ↑ Devices such as large bore cylinders and high-flow vacuum Momentary change ejectors consume a large volume of air when they operate, and

this may cause a momentary drop in the supply pressure. This Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy function prevents such momentary drops from being detected Set value P1 as abnormal pressures by changing the response time setting. P2

t (ms) t (ms) Time → The pressure values measured within the response time that is selected by the user are averaged. By comparing this average pressure value with the set pressure value, switch output (ON//OFF) is determined. Switch output ON operation when normal OFF Time → Switch output ON operation when anti-chattering OFF function is used. Time →

5 Manual setting/Auto preset

MPa kPa or

OUT1 OUT2 CH 1234 PRESSURE Manual set mode Auto preset mode SET

Press SET button. CH1 setting is completed when the channel display changes from blinking to lights on. Repeat the same setting steps for CH2 to CH4.

16-3-12 12

Multi-channel Controller/Pressure Sensor Series PSE530/200

Operation 2: Pressure Setting

Manual setting Channel selection Output mode MPa kPa Hysteresis mode: Hysteresis of the switch output can be set arbitrarily.

OUT1 OUT2 CH Hysteresis 1234 PRESSURE ON CH1 CH2 CH3 CH4 Switch output 1 & 2 ZSE SET Measuring mode OFF ISE

P2 P1 High pressure: Compound pressure type P4 P3 PSE SET Positive pressure type High vacuum: Vacuum type Z Manual mode OUT1 setting (1) I SE3 Hysteresis

MPa For normally open ON kPa Displays Switch output 1 & 2 PS alternately OFF Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy OUT1 Z 1 OUT2 CH SE 1234 I 2 Increases the n2 n1 PRESSURE set value High pressure: Compound pressure type For normally closed n4 n3 Positive pressure type SET Decreases the set value High vacuum: Vacuum type ZSP Note) If the hysteresis is set for less than 2 digits, the switch output may ISA2 SET possibly chatter when the input pressure changes around the set value. OUT1 setting (2) Manual mode Window comparator mode: Allows the switch output to be turned IS For normally open ON or OFF within any set pressure range. MPa kPa Displays ZSM alternately Hysteresis Hysteresis

OUT1 OUT2 ON CH 1234 Increases the Switch output 1 & 2 PF2 PRESSURE For normally closed set value OFF Decreases the SET set value IF P1 P2 High pressure: Compound pressure type SET P3 P4 Positive pressure type High vacuum: Vacuum type SET (For CH1) Data Hysteresis Hysteresis Manual mode OUT2 setting (1)/CH1 only ON For normally open Switch output 1 & 2 MPa kPa Displays OFF alternately n1 n2 OUT1 OUT2 High pressure: Compound pressure type CH n3 n4 1234 Increases the Positive pressure type set value PRESSURE For normally closed High vacuum: Vacuum type Decreases the SET set value Note) The hysteresis is set to 3 digits. When setting the pressure, allow 7 digits or more. SET (For CH1) Note 1) Window Note 2) Regulating Main Hysteresis OUT2 setting (2)/CH1 only Display comparator Manual mode pressure range application mode mode

or CH2 to CH4 MPa For normally open Adsorption and vacuum F kPa –101.0 to 101.0 kPa P2(n2) ≤ P1(n1) P2(n1) > P1(n2) Displays release verification alternately ≥ OUT1 10.0 to –101.0 kPa Adsorption verification P2(n2) P1(n1) P2(n1) < P1(n2) OUT2 CH 1234 Increases the –10.0 to 101.0 kPa Supply pressure P2(n2) ≤ P1(n1) P2(n1) > P1(n2) PRESSURE For normally closed set value verification –0.1 to 1000.0 MPa Leak test P2(n2) ≤ P1(n1) P2(n1) > P1(n2) SET Decreases the set value ∗ P3(n3) and P4(n4) are the same as P1(n1) and P2(n2). Note 1) If the hysteresis is set too small, the switch output may possibly SET chatter when the input pressure changes around the set value. Note 2) The hysteresis is set to 3 digits. When setting the pressure in the window comparator mode, allow 7 digits or more. Manual mode If the allowance is less than 7 digits, the controller will not For CH1 MPa operate. kPa

OUT1 OUT2 Displays rectified value CH 1234 PRESSURE For CH2 to CH4 Displays zero when the SET auto shift input function is not turned on.

SET

To measuring mode 16-3-13 13 Series PSE530/200

Operation 2: Pressure Setting

Auto preset Channel selection

MPa kPa

OUT1 OUT2 CH 1234 PRESSURE CH1 CH2 CH3 CH4

Measuring mode SET

Adsorption Verification SET High Suction Auto preset mode Vacuum Work 1 Work 2 Work n OUT1 auto preset preparation Max. A Prepare the equipment to be set in MPa kPa this mode. ON

SET Released Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value ON = A – A – B when workpiece is adsorbed. 4 SET OFF = B + A – B Min. B: Minimum pressure value 4 when workpiece is not adsorbed. OUT1 auto preset

MPa For adsorption verification: kPa In this mode, repeat the adsorption and release of the workpiece for a OUT1 few times. OUT2 CH 1234 The optimum values will be set PRESSURE automatically. SET For supply pressure verification: + The optimum values will be set automatically.

In the case SET where OUT1 ( setting is not ) required. OUT2 auto preset preparation (CH1 only)

MPa For adsorption verification: kPa Change the conditions of the workpiece such as the (suction) OUT1 nozzle with vacuum pad attachment OUT2 CH 1234 and supply vacuum pressure. PRESSURE For supply pressure verification: SET Prepare the equipment for the OUT2 setting in this mode.

SET

OUT2 auto preset (CH1 only)

MPa For adsorption verification: kPa In this mode, repeat the adsorption and release of the workpiece for a OUT1 OUT2 few times. CH 1234 The optimum values will be set PRESSURE automatically. SET For supply pressure verification: + The optimum values will be set automatically. In the case where OUT2 SET ( setting is not ) required. To measuring mode

16-3-14 14

Multi-channel Controller/Pressure Sensor Series PSE530/200

Operation 3: Special Setting

1 Precision indicator setting Refer to A Display calibration function on page 16-3-17 for details.

Calibration mode

SET + MPa Press and hold for kPa 2 seconds or longer.

OUT1 OUT2 CH 1234 PRESSURE ZSE Measuring mode SET ISE PSE SET or Channel selection Z After setting all 4 channels, Calibration mode I SE3 press SET button. MPa Proceed to the copy mode. kPa PS

SET Setting is complete (CH1). SET ZSP Return to calibration mode. Repeat the setting ISA2 SET procedure for CH2 to CH4.

Calibration mode IS Displays alternately SET Displays alternately MPa kPa ZSM

OUT1 OUT2 CH Displays the supply pressure value 1234 Displays the percentage. PF2 PRESSURE button increases the value. Displays the adjusted amount of pressure since SET button decreases the value. the time of shipment IF (±5% R.D. or less). Data 2 Copy setting Refer to B Copy setting function on page 16-3-17 for details.

Copy mode Copy mode Selection of the channel to be copied

MPa or MPa kPa kPa

OUT1 OUT1 OUT2 OUT2 CH CH 1234 1234 PRESSURE PRESSURE

SET SET

SET

Copy mode Selection of the channel to be copied to

MPa Displays kPa alternately

OUT1 OUT2 SET CH 1234 PRESSURE

After setting SET for copy ( mode, ) press SET . SET Setting is complete. Proceed to the Return to the copy mode. auto shift mode.

16-3-15 15 Series PSE530/200

Operation 3: Special Setting

3 Auto shift Refer to C Auto shift function on page 16-3-17 for details.

Auto shift mode

MPa or MPa kPa kPa Displays

OUT1 OUT1 alternately OUT2 OUT2 CH CH 1234 1234 PRESSURE PRESSURE CH1 On Off SET SET

SET

MPa kPa Displays

SET

MPa SET kPa Displays alternately OUT1 OUT2 CH 1234 PRESSURE CH3 On Off

SET

MPa kPa Displays alternately OUT1 OUT2 CH 1234 PRESSURE CH4 On Off SET

SET Setting is complete. Proceed to the auto identification mode.

4 Auto identification Refer to D Auto identification function on page 16-3-17 for details.

Auto identification mode

MPa or MPa kPa kPa

OUT1 OUT1 OUT2 OUT2 CH CH 1234 1234 PRESSURE PRESSURE

SET SET

Auto identification mode Auto identification mode ON. OFF.

SET Setting is complete.

To measuring mode

16-3-16 16

Multi-channel Controller/Pressure Sensor Series PSE530/200

Function Details

A Display calibration function B Copy function This function eliminates slight differences in the output values of all 4 Information that can be copied includes the following: q Pressure set channels and allows uniformity in the numbers displayed. Displayed values, w Range settings, e Display Units, r Output modes, t values of the pressure sensors can be adjusted to within ±5%. Response times. ± 5% R.D. • When CH1 is copied to CH2, CH3, and CH4, information of OUT1 in CH1 will be copied. • When CH2, CH3, or CH4 is copied to CH1, information of OUT1 in CH2, + CH3, or CH4 will be copied only to OUT1 in CH1. ZSE 0 Applied pressure Note) When the copy function is used, the regulating pressure value of ISE the copied channel may change ±1 digit. PSE Displayed pressure value Displayed

Displayed value at the time of shipment Z Adjustable range of display calibration function I SE3 Note) When the display calibration function is used, the regulating pressure value may change ±1 digit. PS

• The time from the moment the auto shift is input, to the moment the Time → switch output actually operates is 15 ms or less.

• If the set value rectified by the auto shift input exceeds the regulating Switch output ON pressure range, it will be rectified once more to within the values of the 1 & 2 OFF regulating pressure range. Time → • When the auto shift function is turned “off”, the shift value will be zero. Switch output 15 ms response time when • When all of the auto shift functions are turned “off”, “ooo” will not be 10 ms or more or less ( auto shift is input. ) displayed even if the auto shift input is set to Lo (no-voltage input). Hi • Values “C_5” and “C_3”, rectified after the auto shift is input, will be lost Auto shift once the power is turned off. input Lo • Values “C_5” and “C_3”, rectified after the auto shift function is used, will be reset to zero (initial value) when the power is turned back on again. E Unit display switching function Note) Rectified values are not saved in EEPROM. Display units can be switched with this function. Units that can be displayed vary depending on the range of the pressure D Auto identification function sensors connected to the controller. This function automatically identifies the pressure range of the pressure Display units can be selected using either or . sensor that is connected to the multi-channel pressure sensor controller, thus eliminating the need of having to reset the range again after Unit Display and Resolution replacing the sensor. This function will be activated either when “Aon” is Applicable pressure sensor PSE530 PSE531 PSE532 PSE533 set in the auto identification mode or when the power is turned back on in Regulating pressure range –0.1 to 1 MPa 10 to –101 kPa –10 to 101 kPa –101 to 101 kPa that condition. However, this function only works in conjunction with specific pressure sensors (SMC Series PSE53). When other pressure kPa — 0.1 0.1 0.1 sensors are used, this function will not work. When using other types of MPa 0.001 — — — pressure sensors, first set the auto identification mode to “AoF”, and then kgf/cm2 0.01 0.001 0.001 0.001 proceed to setting the range. Turning the power back on while in the “Aon” bar 0.01 0.001 0.001 0.001 setting can cause a malfunction. psi 0.1 0.01 0.01 0.02 mmHg — 1 — 1 inHg — 0.1 — 0.1

16-3-17 17 Series PSE530/200

Operation 4: Other Functions

Reset

+ Press and hold for 1 second or longer. Measuring mode

Key lock

Lock/Unlock selection

Note) Channel selection and channel scan operation will not be locked even if the key lock function is on.

Peak/Bottom display

Peak/Bottom selection

Press and hold for 2 seconds or longer.Peak/Bottom mode OFF Peak mode Bottom mode Measuring mode

SET SET SET

Measuring mode

Peak value blinks Bottom value blinks

To return to the measuring mode, press

any of these keys. SET

∗ If any buttons other than above are pressed during the peak/bottom mode, the peak/bottom mode will be deactivated. Channel scan

Press and hold for Press and hold for 2 seconds or longer. 2 seconds or longer. CH1 CH2 Channel scan function deactivated. Return to the measuring mode. Measuring mode

CH4 CH3

∗ Pressure value for each channel are displayed at 2 second intervals.

16-3-18 18 Series PSE Specific Product Precautions 1 Be sure to read before handling.

Pressure Sensor Controller Handling Handling Warning Warning 1. Do not drop, bump, or apply excessive impacts (980 1. Do not drop, bump, or apply excessive impacts 2 (1000 m/s2) while handling. Although the body of ZSE m/s ) while handling. Although the body of the ISE sensor may not be damaged, the inside of the the controller case may not be damaged, the inside sensor could be damaged and lead to a of the controller could be damaged and cause a PSE malfunction. malfunction. 2. The tensile strength of the cord is 23 N. Applying a 2. The tensile strength of the power supply/output Z I SE3 greater pulling force on it can cause a malfunction. connection cable is 50 N; that of the pressure When handling, hold the body of the sensor—do sensor lead wire with connector is 25 N. Applying a PS not dangle it from the cord. greater pulling force than the applicable specified Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 3. Do not exceed the screw-in torque of 3.5 N⋅m when tensile strength to either of these components can ZSE 1 installing piping. Exceeding this value may cause lead to a malfunction. When handling, hold the I 2 body of the controller—do not dangle it from the malfunctioning of the sensor. ZSP 4. Do not use pressure sensors with corrosive and/or cord. inflammable gases or liquids. Connection ISA2 5. Connecting the sensor cable (Option) Hold the female connector of the sensor cable with your Warning IS fingers and carefully insert it into the connector. 1. Incorrect wiring can damage the switch and cause a malfunction or erroneous switch output. ZSM Connections should be done while the power is turned off. PF2 Sensor 2. Do not attempt to insert or pull the pressure sensor or its connector when the power is on. Switch IF Male connector output may malfunction. 3. Wire separately from power lines and high voltage Data Female connector lines, avoiding wiring in the same conduit with A connector cover is provided as part of the cable assembly these lines. Malfunctions may occur due to noise (see the figure below). It is designed to keep the female from these other lines. connector from slipping out of the sensor. To lock the connector 4. If a commercial switching regulator is used, make cover in place, first make sure it is facing in the right direction sure that the F.G. terminal is grounded. as you slip it over the female connector, then lock it to the sensor body by turning it clockwise. To remove the cover, first unlock it by turning it counterclockwise, then pull back on it. To remove the female connector, grab it with your fingers and pull Operating Environment back on it. Do not pull on the cable. Warning 1. Our multi-channel pressure sensor controllers are Lock CE marked; however, they are not equipped with surge protection against lightning. Lightning surge Sensor countermeasures should be applied directly to system components as necessary. Connector cover 2. Our multi-channel pressure sensor controllers do not have an explosion proof rating. Never use Unlock pressure sensors in the presence of inflammable or explosive gases. Operating Environment 3. Enclosure “IP65” applies only to the front face of the panel when mounting. Do not use in an Warning environment where oil splashing or spraying are 1. The pressure sensors are CE marked; however, they anticipated. are not equipped with surge protection against lightning. Lightning surge countermeasures should be applied directly to system components as necessary. 2. The pressure sensors do not have an explosion proof rating. Never use pressure sensors in the presence of inflammable or explosive gases.

16-3-19 19 Series PSE Specific Product Precautions 2 Be sure to read before handling.

Mounting Wiring Caution Caution The front face of the panel mount conforms to IP65 1. Connecting sensor cable and connector (ZS-26-E) (IP40 when using the 48 conversion adapter); • Cut the sensor cable as shown below. however, there is a possibility of liquid filtration if the • Insert each lead wire into the corresponding connector number panel mount adapter is not installed securely and by following the chart provided below. properly. Securely fix the adaptor with screws as shown below. 20 mm or more Connector Core wire color no. of sensor cable Standard 1 Brown (DC+) Front protective cover Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 2 Black (Analog output) Brown 1 (ZS-26-01) Panel mount Black 2 (ZS-26-B) 3 Blue (DC–) Blue 3 4 N.C. N.C. 4

• Make sure that the number of connector and the core wire color match. After verifying that the wires are inserted all the way, temporarily hold the connector down manually.

2-M3 x 8L • Using pliers, snap A into B as shown below so that there is no gap between A and B, and secure the connector. • The A and B portion of the sensor connector are already tacked Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. down temporarily at the time of shipment. Do not snap the A portion in place before inserting the cable. Note that the connector cannot be taken apart to be reused once it is crimped. Use a new sensor connector in case wiring or the When using 48 conversion adapter snapping of A into B are done incorrectly. 48 conversion adapter (ZS-26-D) B A

4 3 2 1 4 3 2 1

4 3 2 1

Verify from the top side of A that the lead wires are inserted completely. • To connect the connector to the multi-channel pressure sensor, push the connector with its A portion facing toward you into the socket until it clicks as shown below. • To remove the connector, pull it straight out while applying pressure to the fingers on both sides.

1 2 3 4 Sensor connector port

Power supply/Output connector

2. Connecting power supply/output connection cable • To connect the power supply/output connection cable to the controller, insert the cable connector with the C part facing down until it clicks.

2 m

16-3-20 20 Series PSE Specific Product Precautions 3 Be sure to read before handling.

Wiring Caution 3. Connecting to other series ZSE • Any pressure sensor (SW) can be connected as long as it ISE generates analog output (1 to 5 V) signal. However, the pressure range must match. PSE • SMC pressure sensors, Series PSE510 & PSE520, are also connectable. ZSE3 • When connecting to pressure sensors other than the Series I PSE530, connector types will vary depending on the wire core size of the cable and the outside diameter of the insulation PS cover. Refer to the table provided below. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z 1 I SE 2 Connector Insulation Wire core size cover Sensor part no. part no. O.D. ZSP ZS-26-E AWG24-26 (0.14 to 0.2 mm2) ø1.0 to 1.4 PSE510, PSE530 ZS-26-E-1 AWG24-26 (0.14 to 0.2 mm2) ø1.4 to 2.0 ISA2 ZS-26-E-2 AWG20-22 (0.3 to 0.5 mm2) ø1.0 to 1.4 PSE521 ZS-26-E-3 AWG20-22 (0.3 to 0.5 mm2) ø1.4 to 2.0 PSE520 IS • Refer to the following diagram for connecting Series PSE520 to the connector. ZSM

Brown 1 PF2 Black 2 Blue 3 N.C. 4 IF

F. G . Data Connect the shielding wire to the frame ground (F.G.) or F.G. terminal.

There is no shielding wire for ( Series PSE510 & PSE530. )

Regulating Pressure Range & Rated Pressure Range Caution 1. Regulating pressure range: Refers to allowable pressure range in a pressure setting mode. • Setting range is between P_1(n_1) to P_4(n_4). • For Series PSE200, the regulating pressure range and the setting pressure range that can be displayed are the same. 2. Rated pressure range: Refers to the pressure range that satisfies the product specifications. • Pressure range that satisfies the product specifications (accuracy and linearity) for PSE530.

16-3-21 1 High Precision, Remote Type, 2-color Display Digital Pressure Sensor Series PSE540/560

ZSE Compact Pressure ISE Sensor for Pneumatics PSE Z Series PSE540 I SE3 Weight g PS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy ZSE 1 Dimension x x mm I 2 ZSP Pads can be directly Manifolding is mounted. possible. ISA2 IS ZSM Pressure Sensor Controller PF2 IF Series PSE300 9.6 18 Data Response Time ms Set Pressure Resolution 20.8 Can be mounted in close proximity with each other either horizontally or vertically.

PRESSURE MPa PRESSURE MPa PRESSURE MPa Pressure Sensor for OUT1 OUT2 OUT1 OUT2 OUT1 OUT2 General Purpose Fluids SET SET SET Series PSE560 30 Connection Power supply/Output connector Wetted Material Stainless steel 316L

e-con connector • Copper-free • Oil-free (Single diaphragm) Sensor connector

Washing line 2 outputs + Analog output or auto shift input

16-3-23 2

Variations

Compact Pressure Sensor for Pneumatics Series PSE540 P. 16-3-25

Male thread type Plug-in reducer type M5 female thread, through type

M3 x 0.5 R 1/8 (With M5 female thread) ø4 plug-in reducer M5 x 0.8 M5 x 0.8 (With mounting hole)

M5 x 0.8 NPT 1/8 (With M5 female thread) ø6 plug-in reducer Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Pressure Sensor for General Purpose Fluid Series PSE560 P. 16-3-27

Male thread type Female thread type Applicable fluid example

Argon Nitrogen Air containing drainage Hydraulic fluid Ammonia Silicon oil Freon Lubricating oil Carbon dioxide Fluorocarbon

R 1/8, 1/4 (With M5 female thread) Rc 1/8 NPT 1/8, 1/4 (With M5 female thread) URJ 1/4, TSJ 1/4

Controller Series PSE300 P. 16-3-36

Functions

• Auto shift function • Auto preset function • Precision indicator setting • Peak and bottom display function • Key lock function • Reset function • Error indication function • Unit display switching function • Anti-chattering function

Series Rated pressure range PSE541 0 to –101 kPa Vacuum –101 kPa 0 For pneumatics PSE543 –100 to 100 kPa Compound pressure –100 kPa 100 kPa PSE560 0 to 1 MPa Positive pressure 01 MPa For general PSE561 0 to –101 kPa Low pressure –101 kPa 0 purpose fluids PSE563 –100 to 100 kPa Compound pressure –100 kPa 100 kPa PSE564 0 to 500 kPa Positive pressure 0 500 kPa

16-3-24 ® 3

Compact Pressure Sensor For General Air Series PSE540

How to Order ZSE ISE Pressure sensing range PSE 1 Vacuum (0 to –101 kPa) Option (Connector) 3 Compound pressure (–100 to 100 kPa) Nil C1 C2 Z I SE3 Connector for PSE200 multiple Connector for PSE300 multiple channel pressure controller channel pressure controller PS 1 pc. 1 pc. Without Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy PSE54 1 M3 Z 1 I SE 2

Port size ZSP Note) At the factory, the connector is not connected to the cable, but M3 M3 x 0.5 M5 female thread, packed together with it for shipment. IM5 through type ISA2 M5 M5 x 0.8 01 R 1/8 (With M5 female thread) M5 female thread, Option/Part No. IS IM5H through type N01 NPT1 /8 (With M5 female thread) (With mounting hole) Description Part no. Note ZSM Connector for PSE200 ZS-26-E-4 1 pc. R04 ø4 plug-in reducer Connector for PSE300 ZS-28-C 1 pc. PF2 R06 ø6 plug-in reducer IF Specifications Data Conforms to CE marking and UL (CSA) standards. Model PSE541 PSE543 Rated pressure range 0 to –101 kPa –100 to 100 kPa Proof pressure 500 kPa Fluid Air, No-corrosive gas, Non-flammable gas Power supply voltage 12 to 24 VDC ±10%, Ripple (p-p) 10% or less (With power supply polarity protection) Current consumption 15 mA or less Output specification Analog output 1 to 5 V (Within rated pressure range), Output impedance: Approx. 1 kΩ Accuracy (Ambient temperature of 25°C) ±2% F.S. or less Linearity ±0.4% F.S. or less Repeatability ±0.2% F.S. or less Power supply voltage effect ±0.8% F.S. or less Enclosure IP40 Operating temperature range Operating: 0 to 50°C, Stored: –20 to 70°C (No condensation or freezing) Operating humidity range Operating/Stored: 35 to 85% RH (No condensation) Withstand voltage 1000 VAC, 50/60 Hz for 1 minute between live parts and case Insulation resistance 50 MΩ between live parts and case (at 500 VDC)

Resistance 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) Impact resistance 980 m/s2 in X, Y, Z directions, 3 times each (de-energized) Temperature characteristics ±2% F.S. or less (based on 25°C) Piping Specifications Model M3 M5 01 N01 R04 R06 IM5 IM5H R1/8 NPT1/8 ø4 ø6 M5 female thread, M5 female thread, Port size M3 x 0.5 M5 x 0.8 through type M5 x 0.8 M5 x 0.8 plug-in reducer plug-in reducer through type (with mounting hole) Resin case: PBT Resin case: PBT Resin case: PBT Case PBT Material Fitting: Stainless steel 303 Fitting: C3604BD Fitting: A6063S-T5 Pressure sensing section Pressure sensor: Silicon, O-ring: NBR Sensor cable 3-wire oval cable (0.15 mm2) With sensor cable 42.4 g 42.7 g 49.3 g 41.4 g 41.6 g 43.3 g 44.1 g Weight Without sensor cable 2.9 g 3.2 g 9.8 g 1.9 g 2.1 g 3.8 g 4.6 g 16-3-25 4 Series PSE540

Internal Circuit

PSE54 Brown DC (+) Voltage output type 1 to 5 V Output impedance 1 kΩ Black OUT + 10 to 24 VDC Approx. 1 kΩ (Analog output) –

Main circuit Load Blue DC (–)

Dimensions

M3 R04

PSE54 - M5 PSE5 - R06 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 10 10 B A

With across B M3: M3 x 0.5 flats 7 M5: M5 x 0.8 A

PSE54-M3 PSE54-M5 PSE54-R04 PSE54-R06 A 10.8 11.5 A ø4 ø6 B 3 3.5 B 18 20

Common dimensions PSE54-IM5

18 3000 13 9.6 8.7 4 9

M5 x 0.8

01 PSE54 - N01 PSE54 -IM5H 8.7 10

01: R 1/8 ø3.4 3 13

N01: NP T1/8 8 14.4

With across 7 M5 x 0.8 M5 x 0.8 flats 12

16-3-26 ® 5

Pressure Sensor For General Fluids Series PSE560

How to Order ZSE ISE Pressure sensing range PSE 0 Positive pressure (0 to 1 MPa) Option (Connector) 1 Vacuum (0 to –101 kPa) Z 3 Compound pressure (–100 to 100 kPa) Nil C1 C2 I SE3 4 Positive pressure (0 to 500 kPa) Connector for PSE200 multiple Connector for PSE300 multiple channel pressure controller channel pressure controller PS 1 pc. 1 pc. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Without ZSE 1 PSE56 0 01 I 2 ZSP Port size Note 1) Current output type cannot be connected to PSE20 and PSE30. 01 R 1/8 (With M5 female thread) Note 2) The connector is not connected to the cable and is ISA2 02 R 1/4 (With M5 female thread) supplied loose at the time of shipment. C01 Rc 1/8 IS N01 NPT 1/8 (With M5 female thread) Option/Part No. N02 NPT 1/4 (With M5 female thread) Output specifications Description Part no. Note ZSM A2 URJ 1/4 Nil Voltage output type 1 to 5 V Connector for PSE200 ZS-26-E-4 1 pc. B2 TSJ 1/4 28 Current output type 4 to 20 mA Connector for PSE300 ZS-28-C 1 pc. PF2 Specifications IF Conforms to CE marking and UL (CSA) standards. Model PSE560 PSE561 PSE563 PSE564 Data Rated pressure range 0 to 1 MPa 0 to –101 kPa –100 to 100 kPa 0 to 500 kPa Proof pressure 1.5 MPa 500 kPa 500 kPa 750 kPa

Model PSE56- PSE56--28 Fluid Fluid, including gas, that will not corrode Stainlesss steel 316L Power supply voltage 12 to 24 VDC ±10%, Ripple (p-p) 10% or less (With power supply polarity protection) Current consumption 10 mA or less — Analog output 4 to 20 mA (Within rated pressure range) Analog output 1 to 5 V (Within rated pressure range) Output specification Allowable load impedance: 500 Ω or less (at 24 VDC) Output impedance: Approx. 1 kΩ 100 Ω or less (at 12 VDC) Accuracy (Ambient temperature of 25°C) ±1% F.S. or less Linearity ±0.5% F.S. or less Repeatability ±0.2% F.S. or less Power supply voltage effect ±0.3% F.S. or less Enclosure IP65 Operating temperature range Operating: –10 to 60°C, Stored: –20 to 70°C (No condensation or freezing) Operating humidity range Operating/Stored: 35 to 85% RH (No condensation) Withstand voltage 250 VAC for 1 minute between live parts and case Insulation resistance 50 MΩ between live parts and case (at 50 VDC)

Resistance 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) Impact resistance 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Temperature characteristics ±2% F.S. or less (0 to 50°C, based on 25°C), ±3% F.S. or less (–10 to 60°C, based on 25°C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Material Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316L PSE56-: Oil proof 3-wire heavy-duty vinyl cable with air tube (0.2 mm2) Sensor cable PSE56--28: Oil proof 2-wire heavy-duty vinyl cable with air tube (0.2 mm2) With sensor cable 193 g 200 g 194 g 201 g 187 g 203 g 193 g Weight Without sensor cable 101 g 108 g 102 g 109 g 95 g 111 g 101 g 16-3-27 6 Series PSE560

Internal Circuit

PSE56 - Brown DC(+) PSE56 - -28 Brown LINE(+) Voltage output type Current output type Load 1 to 5 V 1 kΩ 4 to 20 mA Black OUT + 12 to + 12 to Output impedance (Analog output) Allowable load impedance Ω – 24 VDC Ω – 24 VDC Approx. 1 k Load 500 or less (at 24 VDC) Main circuit Main circuit Blue DC(–) 100 Ω or less (at 12 VDC) Blue LINE(–) Load

∗ Install the load either on the LINE (+) or LINE (–) side.

Dimensions

01 N01

PSE56 - 02 / PSE56 - N02 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 24 A 37.5 11.5 3025 5.5 30

B ø24 ø14 5 20 ø5.1

Air tube M5 x 0.8 Part-C

∗ The dimensions of Part C are common to all PSE56 models. PSE56-C01 24 B

PSE56-A2 Model AB 24 A PSE56 -01 8.2 R 1/8 B PSE56-02 12 R 1/4 PSE56-N01 9.2 NPT 1/8 PSE56-N02 12.2 NPT 1/4 PSE56-C01 — Rc 1/8 PSE56-A2 15.5 URJ 1/4 PSE56-B2 9.5 TSJ 1/4

PSE56-B2 24 A B

16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling.

Pressure Sensor Handling Air Supply

Warning Warning ZSE 1. Do not drop, bump, or apply excessive impact 1. Use of toxic, corrosive or flammable gases ISE 2 2 (PSE540: 980 m/s , PSE560: 500 m/s ) while han- Since the switch uses stainless steel 316L as the material of the dling. Although the body of the sensor may not be PSE pressure sensor and fittings, do not use toxic or corrosive damaged, the inside of the sensor could be damaged gases. Z and lead to malfunction. I SE3 2. The tensile strength of the cord is 50 N. Applying a 2. Fluid compatibility greater pulling force to it can cause malfunction. Since the switch uses stainless steel 316L as the wetted PS

• Confirm that the numbers on the Handling

2 Part-A connector match the colors of the 34 wires and that the wires are inserted to the Warning bottom. Press Part A by hand for 1. Do not drop, bump, or apply excessive impact temporary fixing. (100 m/s2) while handling. Although the body of the • Press in the central part of Part A vertically with controller case may not be damaged, the inside of a tool such as pliers. the controller could be damaged and cause

• A sensor connector cannot malfunction.

2 3 be taken apart for reuse 4 2. The tensile strength of the power supply/output once it is crimped. If the wire connection cable is 50 N; that of the pressure sensor lead wire with connector is 25 N. Applying a greater arrangement is incorrect or pulling force than the applicable specified tensile if the wire insertion fails, use a new sensor connector. strength to either of these components can lead to • For connection to SMC Series PSE300 pressure switches, use malfunction. When handling, hold the body of the sensor connectors (ZS-28-C) or e-con connectors listed below. controller—do not dangle it from the cord. Manufacturer Part no. Sumitomo 3M 37104-3101-000FL Connection Tyco Electronics AMP 1-1473562-4 • For detailed information about e-con connectors, please Warning consult the manufacturers of the respective connectors. 1. Incorrect wiring can damage the switch and cause malfunction or erroneous switch output. Connections Operating Environment should be done while the power is turned off. Warning 2. Do not attempt to insert or pull out the pressure sensor or its connector when the power is on. Switch 1. The pressure sensors are CE marked; however, they output may malfunction. are not equipped with surge protection against lightning. Lightning surge countermeasures should 3. Wire separately from power lines and high voltage be applied directly to system components as lines, avoiding wiring in the same conduit with these necessary. lines. Malfunctions may occur due to noise from these other lines. 2. The pressure sensors do not have an explosion proof rating. Never use pressure sensors in the 4. If a commercial switching regulator is used, make presence of flammable or explosive gases. sure that the F.G. terminal is grounded. 16-3-29 8 Series PSE Specific Product Precautions 2 Be sure to read before handling.

Controller Operating Environment Mounting Warning Caution 1. Our pressure sensor controllers are CE marked; 3. Panel mount adapter removal however, they are not equipped with surge To remove the controller with panel mount adapter from the protection against lightning. Lightning surge countermeasures should be applied directly to equipment, remove the two mounting screws, and pull out the system components as necessary. controller while pushing the claws outward. 2. Our pressure sensor controllers do not have an Failure to follow this procedure can cause damage to the explosion proof rating. Never use pressure sensors controller and panel mount adapter.

Mounting Caution 1. Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Wiring Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 N·m. Caution M3 x 5L 1. Connection and removal of sensor connector • Hold the lever and connector body with two fingers and insert Bracket the connector straight into the pin until it is locked with a click (Part no. ZS-28-B) sound. M3 x 5L • To remove the connector, pull it out straight while pressing the lever with one finger. 2. Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Sensor connector Panel Front protective cover M3 x 8L (Part no. ZS-27-01) Lever

2. Connector pin numbers for power supply/output cable

Panel mount adapter (Part no. ZS-27-C) DC (+) Brown 5 Rotate 90° to mount. OUT1 Black 4 OUT2 White 3 Analog or auto shift Gray 2 DC (-) Blue 1

16-3-30 9 Series PSE Specific Product Precautions 3 Be sure to read before handling.

Regulating Pressure Range and Rated Pressure Range Caution Set the pressure within the rated pressure range. ZSE The regulating pressure range is the range of pressure that can be set on the controller. ISE The rated pressure range is the range of pressure that satisfies the specifications (accuracy, linearity, etc.) of the sensor. Although it is possible to set a value outside the rated pressure range, the specifications will not be guaranteed even if the value stays PSE within the regulating pressure range. Z I SE3 Pressure range Sensor –100 kPa 0 100 kPa 500 kPa 1 MPa PS

0 1 MPa IS PSE560 –100 kPa 1 MPa For positive (–0.1 MPa) ZSM pressure 0 500 kPa PSE564 PF2 –50 kPa 500 kPa Rated pressure range of sensor IF Regulating pressure range of controller Data

16-3-31 1

Low Differential Pressure Sensor Series PSE550/300

ZSE ISE

Rated differential pressure range: PSE Z I SE3 00 toto 22 kPakPkPaa PS

Applications

Filter clogging Liquid level Flow monitoring detection control

Can control air flow by monitoring the flow rate Can control filtration and replacement periods Can detect the liquid level through changes in inside the duct. by monitoring the clogging of the filter. the purge pressure.

Plug connection TTwwo mounting methods

Controller PSE300 Low differential pressure sensor PSE550

e-con connector Direct mounting Bracket mounting

16-3-33 ® 2

Low Differential Pressure Sensor Series PSE550

How to Order PSE550

Option 2 (Connector) Nil None Connector for PSE300 multiple channel Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Output specifications Nil Voltage output type 1 to 5 V pressure controller 1 pc. 28 Current output type 4 to 20 mA C2

Note 1) Current output type cannot be connected to the Series PSE300. Note 2) The connector is unassembled in the factory but is included with the shipment. Option/Part No. Option 1 (Bracket) Nil None Description Part no. Note Bracket Bracket ZS-30-A With M3 x 5L (2 pcs.) Connector for PSE300 ZS-28-C 1 pc. A

Note) The bracket is unassembled in the factory, but is included with the shipment. Specifications

Model PSE550 PSE550-28 Rated differential pressure range 0 to 2 kPa Operating pressure range –50 to 50 kPa Note) Proof pressure 65 kPa Applicable fluid Air/Non-corrosive gas/Non-inflammable gas Power supply voltage 12 to 24 VDC ±10%, Ripple (p-p) 10% or less (With power supply polarity protection) Current consumption 15 mA or less — Analog output 4 to 20 mADC Analog output 1 to 5 VDC (Within rated differential pressure range) Output specification (Within rated differential pressure range) Allowable load impedance: Output impedance: Approx. 1 kΩ 500 Ω or less (at 24 VDC) 100 Ω or less (at 12 VDC) Accuracy (Ambient temperature of 25°C) ±1% F.S. or less Linearity ±0.5% F.S. or less Repeatability ±0.3% F.S. or less Indication light Orange light is on (When energized) Enclosure IP40 Operating temperature range Operating: 0 to 50°C, Stored: –20 to 70°C (No freezing or condensation) Operating humidity range Operating/Stored: 35 to 85% RH (No condensation) Withstand voltage 1000 VAC or more, 50/60 Hz for 1 minute between live parts and case Insulation resistance 50 MΩ or more between live parts and case (at 500 VDC) 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 100 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) 2

Environmental resistance Environmental Impact resistance 300 m/s in X, Y, Z directions, 3 times each (De-energized) Temperature characteristics ±3% F.S. or less (Based on 25°C) ø4.8 (ø4.4 in the end) resin piping Port size (Applicable to I.D. ø4 air tubing) Material of wetted parts Resin pipe: Nylon, Piston area of sensor: Silicon Sensor cable 3-wire oval cable (0.15 mm2) 2-wire oval cable (0.15 mm2) With sensor cable 75 g Weight Without sensor cable 35 g Note) Can detect differential pressure from 0 to 2 kPa within the range of –50 to 50 kPa. 16-3-34 3

Low Differential Pressure Sensor Series PSE550

Analog Output

1 to 5 VDC 4 to 20 mADC

5 20

ZSE 1 4 ISE Analog output [V] Analog output [mA] PSE 0 2 Differential 0 2 Differential pressure [kPa] pressure [kPa] Z I SE3 Internal Circuit PS

ø15

2-M3 x 0.5 depth 4 11.7 10.4 3000

With bracket

37 27 25 40.9 4.2 11.6 68 69.5

7 38.5 20

1.6 A View ZS-30-A bracket

16-3-35 ® 4

Controller Series PSE300

How to Order

Input/Output specifications Unit specifications 0 NPN2 output + 1-5 V output Nil With unit display switching function 1 NPN2 output + 4-20 mA output M Fixed SI unit Note 1) 2 NPN2 output + Auto shift input Note 1) Fixed unit 3 PNP2 output + 1-5 V output For vacuum & low pressure & low differential 4 PNP2 output + 4-20 mA output pressure & compound pressure: kPa 5 PNP2 output + Auto shift input Positive pressure: MPa (For 1 MPa)

kPa (For 500 kPa) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

PSE30 0 M

Option 1 Option 3 Nil Without cable Nil Without connector Power supply/Output connection cable Sensor connector

Power supply/ Output connection cable Sensor connector L ZS-28-A C (e-con connector) ZS-28-C

Note) The cable is unassembled in the factory, but is Note) The connector is unassembled in the factory, but is included with the shipment. included with the shipment. Option 2 Nil Without bracket/panel mount adapter/front protective cover Bracket M3 x 5L

A Bracket

M3 x 5L

Panel mount adapter Panel

Mounting screw (M3 x 8L) Panel mount adapter (Accessory)

Panel mount adapter + Front protective cover Option/Part No. Panel Front protective cover Description Part no. Note D Power supply/Output connection cable ZS-28-A Bracket ZS-28-B With M3 x 5L (2 pcs.) Mounting screw Sensor connector ZS-28-C 1 pc. (M3 x 8L) (Accessory) Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) Panel mount adapter Panel mount adapter + Front protective cover ZS-27-D With M3 x 8L (2 pcs.) Note) These options are unassembled in the factory, but are included with the shipment.

16-3-36 5

Controller Series PSE300

Specifications

Conforms to CE marking and UL (CSA) standards. Model PSE30 Set (differential) pressure range –101 to 101 kPa 10 to –101 kPa –10 to 100 kPa –0.1 to 1 MPa –50 to 500 kPa –0.2 to 2 kPa Pressure range Note 1) For compound pressure For vacuum For low pressure For positive pressure For low difference pressure Rated (differential) pressure range –100 to 100 kPa 0 to –101 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa 0 to 2 kPa Power supply voltage 12 to 24 VDC, Ripple (p-p) 10% or less (With power supply polarity protection) Current consumption 50 mA or less (Current consumption for sensor is not included.) Sensor input 1 to 5 VDC (Input impedance: 1 MΩ) ZSE No. of inputs 1 input ISE Input protection With excess voltage protection (Up to 26.4 V) Hysteresis Hysterisis mode: Variable, Window comparator mode: Variable PSE Switch output NPN or PNP open collector output: 2 outputs Z Maximum load current 80 mA I SE3 Maximum load voltage 30 VDC (at NPN output) Residual voltage 1 V or less (With load current of 80 mA) PS

Analog output ZSM Linearity: ±0.2% F.S. (Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25°C) ±1.0% F.S. or less ±1.5% F.S. or less ±2.0% F.S. or less PF2 Display accuracy ±0.5% F.S. 0.5% F.S. 1 digit or less (Ambient temperature of 25 C) ± ± ° ±2 digits or less IF Display 3 + 1/2 digit, 7 segment indicator, 2-color display (Red/Green), Sampling frequency: 5 times/sec Indicator light OUT1: Lights up when ON (Green), OUT2: Lights up when ON (Red) Data Auto shift input Note 2) Non-voltage input (Reed or Solid state), Low level input: 5 ms or more, Low level: 0.4 V or less Enclosure IP40 Operating temperature range Operating: 0 to 50°C, Stored: –10 to 60°C (No freezing or condensation) Operating humidity range Operating/Stored: 35 to 85% RH (No condensation) Withstand voltage 1000 VAC for 1 minute between live parts and case Insulation resistance 50 MΩ or more between live parts and case (at 500 VDC Mega) Resistance Vibration resistance 10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized) Impact resistance 100 m/s2 in X, Y, Z directions, 3 times each (De-energized) Temperature characteristics ±0.5% F.S. or less (Based on 25°C) Connection Power supply/Output connection: 5P connector, Sensor connection: 4P connector Material Front case: PBT, Rear case: PBT With power supply/output connection cable 85 g eight

W Without power supply/output connection cable 30 g Note 1) Pressure range can be selected during initial setting. Note 2) Auto shift function is not available when analog output option is selected. Also, analog output option is not available when auto shift function is selected. Note 3) The following units can be selected with unit conversion function: For vacuum & compound pressure: kPa·kgf/cm2·bar·psi·mmHg·inHg For positive pressure & low pressure: MPa·kPa·kgf/cm2·bar·psi For low differential pressure: kPa·mmH2O

Analog Output

1 to 5VDC 4 to 20 mADC Range Rated pressure range AB For vacuum 0 to –101 kPa 0 –101 kPa 5 20 For compound pressure –100kPa to 100 kPa –100 kPa 100 kPa

For positive 0 to 1 MPa 0 1 MPa pressure 0 to 500 kPa 0 500 kPa

1 4 Range Rated differential pressure range CD Analog output [V] Analog output [mA] For low differential 0 to 2 kPa0 2 kPa A B Pressure A B Pressure pressure C D Differential pressure C D Differential pressure

16-3-37 6 Series PSE300

Internal Circuit PSE300 PSE303 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Analog output: 1 to 5 V Output impedance: Approx. 1 kΩ Output impedance: Approx. 1 kΩ DC (+) DC (+) (Brown) (Brown) Analog output Analog output (Gray) Load + (Gray) + Load OUT1 12 to OUT1 12 to (Black) 24 VDC (Black) 24 VDC Load – – Main circuit OUT2 Main circuit OUT2

(White) (White) Load Load Load DC (–) DC (–) (Blue) (Blue) PSE301 PSE304 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 4 to 20 mA Analog output: 4 to 20 mA Maximum load impedance: 300 Ω (12 VDC), 600 Ω (24 VDC) Maximum load impedance: 300 Ω (12 VDC), 600 Ω (24 VDC) Minimum load impedance: 50 Ω Minimum load impedance: 50 Ω DC (+) DC (+) (Brown) (Brown) Analog output Analog output

(Gray) Load + (Gray) + Load OUT1 12 to OUT1 12 to (Black) 24 VDC (Black) 24 VDC Load – – Main circuit OUT2 Main circuit OUT2

(White) (White) Load Load Load DC (–) DC (–) (Blue) (Blue) PSE302 PSE305 NPN open collector output with auto shift input (2 outputs), PNP open collector output with auto shift input (2 outputs), Max. 30 V, 80 mA, residual voltage 1 V or less Max. 80 mA, residual voltage 1 V or less

DC (+) DC (+) (Brown) (Brown) + Auto shift input Auto shift input 12 to Load (Gray) + (Gray) 24 VDC OUT1 12 to OUT1 – (Black) 24 VDC (Black)

Load – Main circuit Main circuit OUT2 OUT2

(White) (White) Load Load DC (–) DC (–) (Blue) (Blue)

Descriptions

LCD Output (OUT2) display (Red) Displays the current pressure, set mode, selected Lights up when OUT2 is ON. display unit, and error code. Four different display settings are available. Always use red or green display; or switch between green and red according to the output. SET button Output (OUT1) display (Green) Use this button to change the mode or confirm the set value. Lights up when OUT1 is ON. Up button Down button Use this button to select the mode or increase the Use this button to select the mode or decrease the ON/OFF set value. ON/OFF set value. It is also used for switching to the peak display It is also used for switching to the bottom display mode. mode.

16-3-38 7

Controller Series PSE300

Dimensions

30 31 3 20 ± 0.1 Power supply/Output connector 2–M3 x 0.5 depth 4 1.5 10

ZSE ISE

Sensor connector PSE 1.5 3.2 Z 8.2 I SE3 PS Power supply/Output connection cable (ZS-28-A) Sensor connector Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z 1 I SE 2 DC (+) Brown 5 PIN no. Ter minal OUT1 Black 4 1 DC (+) ZSP OUT2 White 3 2 N.C. Analog output or auto shift input Gray 2 3 DC (–) ISA2 DC (–) Blue 1 20 2 m 20 4 IN (1 to 5 V) IS

With bracket ZSM A PF2 30 20 IF 46 Data 4.2 10 15 40 31.5 26.5

1.6 7.2 22 35 41 ZS-28-B A View Bracket

With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 7 24 34.5 11 24

Panel thickness 0.5 to 6 ZS-27-D 8.75 Panel mount adapter + Front protective cover ZS-27-C Panel mount adapter

16-3-39 8 Series PSE300

Dimensions Panel cutout dimensions

Horizontal stacking mount of multiple units (n pcs.)

Mount of single unit

0 31 -0.4 31 x n pcs. + 3.5 x (n pcs. – 1)

24 or more Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 0 -0.4 0 -0.4 31 31

Vertical stacking mount of multiple units (n pcs.)

0 24 or more 31 –0.4 31 x n pcs. + 3.5 x (n pcs. – 1) + 3.5 x (n pcs. 31 x n pcs.

16-3-40 9

Controller Series PSE300

Functions

A Auto shift function D Peak and bottom display function When there are large fluctuations in the supply pressure, the switch This function constantly detects and updates the maximum and may fail to operate correctly. The auto shift function compensates minimum values and allows to hold the display value. such supply pressure fluctuations. It measures the (differential) pressure at the time of auto shift signal input and uses it as the E Key lock function reference (differential) pressure to correct the set value on the switch. This function prevents incorrect operations such as accidentally Set value correction by auto shift function changing the set value. Supply pressure Supply pressure Supply pressure normal drop increase F Reset function ZSE ISE P-1 C-5 This function clears and resets the zero value on the display of C-5 ± (P-3) H-1 measured (differential) pressure within 7% F.S. of the factory (H-2) adjusted value. PSE Pressure (Differential) G Error indication function Z ON I SE3 Switch output Error name Error code Description 1·(2) OFF PS OUT1

Switch output Overcurrent Load current of switch output Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 5 ms or more 10 ms or less response time error exceeds 80 mA. Z 1 when auto OUT2 I SE 2 shift is input. Hi Pressure applied during the zero ZSP Auto shift ± Lo reset operation exceeds 7% F.S. input ∗ Residual pressure After displaying the error code for 3 seconds, the switch automatically ISA2 Possible Set Range For Auto Shift Input error returns to the measuring mode. Due Set (differential) pressure range Possible set range to individual product differences, the IS setting range varies ±4 digits. Compound pressure –101.0 to 101.0 kPa –101.0 to 101.0 kPa Vacuum 10.0 to –101.0 kPa –101.0 to 101.0 kPa Supply pressure exceeds the ZSM Low pressure –10 to 100.0 kPa –100.0 to 100.0 kPa maximum set (differential) pressure –0.1 to 1.000 MPa –1.000 to 1.000 MPa or upper limit of the display pressure. Positive pressure Applied pressure PF2 –50 to 500 kPa –500 to 500 kPa error A sensor may be unconnected or mis- Low differential pressure –0.2 to 2.00 kPa –2.00 to 2.00 kPa wired. Or, supply pressure is below the IF minimum set (differential) pressure or lower limit of the display pressure. B Auto preset function Data Auto preset function, when selected in the initial setting, calculates The value measured at the time of and stores the set value from the measured (differential) pressure. auto shift input is outside the set Auto shift error (differential) pressure range. The optimum set value is determined automatically by repeating ∗ vacuum and break with the target workpiece several times. After displaying the error code for one second, the switch returns to the measuring mode. Adsorption Verification Internal data error High Vacuum Absorption Work 1 Work 2 Work n Internal data error Max. A System error P-1 Internal data error H-1

Internal data error Min. B Non- absorption H Unit display switching function Work 1 Work 2 Work n Atmosphere Display units can be switched with this function. P-1 = A – (A – B) / 4 A = Maximum pressure value Units that can be displayed vary depending on the range of the H-1 = (A – B) / 2 B = Minimum pressure value pressure sensors connected to the controller.

Pressure For For For For For low C Display calibration function range compound vacuum low positive pressure differential pressure pressure pressure This function eliminates slight differences in the output values and ∗∗ Applicable ∗ allows uniformity in the numbers displayed. Displayed values of the PSE533 PSE531 ∗ PSE530 pressure PSE543 PSE541 PSE532 PSE564 PSE550 pressure sensors can be adjusted to within ±5%. PSE560 sensor PSE563 PSE561 ±5%R.D. Set (differential) –101 to 101 10 to –101 –10 to 100 –0.1 to 1 –50 to 500 –0.2 to 2.00 pressure range kPa kPa kPa MPa kPa kPa kPa 0.2 0.1 0.1 — 1 0.01 MPa + — — — 0.001 — — 0 Applied pressure kgf/cm2 0.002 0.001 0.001 0.01 0.01 — Displayed value at the time of shipment bar 0.002 0.001 0.001 0.01 0.01 —

Display pressure value Display Adjustable range of display calibration function psi 0.05 0.02 0.02 0.2 0.1 — inHg 0.1 0.1 — — — — Note) When the precision indicator setting function is used, the set (differential) pressure value may change ±1 digit. mmHg 2 1 — — — 1 mmH2O ∗ Series PSE530 pressure sensors are also applicable. Please contact SMC for more information.

16-3-41 10 Series PSE300

Functions

I Anti-chattering function A large bore cylinder or ejector consumes a large volume of air in operation and may experience a temporary drop in the supply pressure. This function prevents detection of such temporary drops in the supply pressure as an error.

Response time settings: 20 ms, 160 ms, 640 ms, 1280 ms

This function averages pressure values measured during the response time set by the user and then compares the average pressure value with the pressure set point value to output the result on the switch.

Pressure Momentary change

t (ms) t (ms) Time

Switch output operation in ON normal OFF conditions. Time Switch output ON operation when anti-chattering OFF function is on. Time

16-3-42 11 Series PSE Specific Product Precautions 1 Be sure to read before handling.

Pressure Sensor Handling Handling Warning • Make sure that the air tubing is firmly inserted to avoid possible disconnection. (Tensile strength is approx. 25 N 1. Do not drop, bump, or apply excessive impact while when being inserted 8 mm.) ZSE handling. Although the body of the sensor may not be damaged, the inside of the sensor could be • Please consult with SMC if you intend to use with fluids other ISE damaged and lead to malfunction. than air, non-corrosive gas and non-inflammable gas. PSE 2. The tensile strength of the cord is 50 N or less. Applying a greater pulling force to it can cause ZSE3 malfunction. When handling, hold the body of the Operating Environment I sensor—do not dangle it from the cord. PS 3. Care should be taken when stripping the outer Warning

temporary fixing.

1 than 8 mm. 23 Part-A

•Press in the central part of Part A 4 • Insert the low pressure tubing into “Lo” pipe, and the high- vertically with a tool such as pliers. pressure tubing into “Hi” pipe. •A sensor connector cannot be taken apart for reuse once it is crimped. If the wire Controller arrangement is incorrect or if the wire Handling insertion fails, use a new sensor

connector. Warning

1 2 3

•For connection to SMC 4 1. Do not drop, bump, or apply excessive impact Series PSE300 pressure (100 m/s2) while handling. Although the body of the switches, use sensor controller case may not be damaged, the inside of connectors (ZS-28-C) or e- the controller could be damaged and cause con connectors listed below. malfunction. 2. The tensile strength of the power supply/output Manufacturer Part no. connection cable is 50 N; that of the pressure Sumitomo 3M 37104-3101-000FL sensor lead wire with connector is 25 N. Applying a Tyco Electronics AMP 1-1473562-4 greater pulling force than the applicable specified OMRON Corporation XN2A-1430 tensile strength to either of these components can lead to malfunction. When handling, hold the body •For detailed information about e-con connectors, please of the controller. consult the manufacturers of the respective connectors. • When piping, increase the length of the air tubing to allow for any possible warping, increased tension or moment load or increased tension, etc. • In cases where SMC air tubing is not used, make sure the product has similar I.D. accuracy within ø4 ± 0.3 mm.

16-3-43 12 Series PSE Specific Product Precautions 2 Be sure to read before handling.

Controller Connection Mounting 3. Panel mount adapter removal Warning To remove the controller with panel mount adapter from the 1. Incorrect wiring can damage the switch and cause equipment, remove the two mounting screws, and pull out the malfunction or erroneous switch output. controller while pushing the claws outward. Connections should be done while the power is Failure to follow this procedure can cause damage to the turned off. controller and panel mount adapter. 2. Do not attempt to insert or pull out the pressure sensor or its connector when the power is on. Switch output may malfunction. Claw

3. Wire separately from power lines and high voltage Claw lines, avoiding wiring in the same conduit with

Operating Environment Warning Wiring 1. Our pressure sensor controllers are CE marked; however, they are not equipped with surge Caution protection against lightning. Lightning surge 1. Connection and removal of sensor connector countermeasures should be applied directly to • Hold the lever and connector body with two fingers and system components as necessary. insert the connector straight into the pin until it is locked with 2. Our pressure sensor controllers do not have an a click sound. explosion proof rating. Never use pressure sensors •To remove the connector, pull it out straight while pressing in the presence of flammable or explosive gases. the lever with one finger.

Mounting Caution Sensor connector 1. Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Lever Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 N·m. 2. Connector pin numbers for power supply/output

M3 x 5L

DC (+) Brown 5 Bracket OUT1 Black 4 (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 M3 x 5L DC (–) Blue 1

2. Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Panel Front protective cover M3 x 8L (Part no. ZS-27-01)

Panel mount adapter (Part no. ZS-27-C) Rotate 90° to mount.

16-3-44 13 Series PSE Specific Product Precautions 3 Be sure to read before handling.

Set Differential Pressure Range & Rated Differential Pressure Range Caution Set the pressure within the rated differential pressure range. The set differential pressure range is the range of differential pressure that can be set on the controller. The rated differential pressure ZSE ISE range is the range of differential pressure that satisfies the specifications (accuracy, linearity, etc.) of the sensor. Although it is possible to set a value outside the rated differential pressure range, the specifications will not be guaranteed even if the valve stays within the set differential pressure range. PSE

Pressure range Z Sensor I SE3 –2 kPa 0 2 kPa 5 kPa 10 kPa PS For low 02 kPa differential PSE550 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy –0.2 kPa 2 kPa Z 1 pressure I SE 2

Rated differential pressure range of sensor Set differential pressure range of controller ZSP ISA2 IS ZSM PF2 IF Data

16-3-45 1

LCD Readout Digital Pressure Switch Series ZSE3/ISE3 (For Vacuum) (For Positive Pressure)

ZSE ISE PSE

Z I SE3 PS

For details about certified products conforming to international standards, IF visit us at www.smcworld.com. Data Push-button calibration allows for precise and simple set up.

Built-in failure prediction output function Calibration data When system performance declines due to filter element The calibration data is stored in an EEPROM. The EEPROM clogging, worn vacuum pads, piping leakage, etc., the switch is rated to keep its memory for 100,000 hours (approx. 11 can detect and indicate an oncoming problem before failure years) without having power supplied. occurs. Modular version can be integrated Two independent outputs with ZX system

Allows the calibration of two different setpoints e.g. change of Suction filter comes as standard vacuum pad size requiring different setpoints, two different supply pressures requiring different pressure confirmation points. Self-diagnostic function Excessive current Excessive pressure Data error

LCD: SMC Error display

Indication lights kPa LED (Red)

RESET SET

16-4-1 2 Series ZSE3/ISE3

How to Order

Operating pressure range Piping specifications Nil 0 to 0.98 MPa 01 Single mounting R 1/8 L 0 to 98 kPa T1 Single mounting NPTF 1/8 Note) M5 x 0.8 female threaded.

Output specifications NPN open collector 2 outputs 21 without analog output NPN open collector 2 outputs 22 with analog output (1 to 5 V)

Positive

pressure ISE3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Vacuum ZSE3

Q CE marked products Note) Only available with output specifications 21 and 23.

Wiring specifications Nil Grommet type (Lead wire: 0.6 m) L Grommet type (Lead wire: 3 m) C Connector type (Lead wire: 0.6 m) CL Connector type (Lead wire: 3 m) ∗ CN Without connector Analog output is only available in a grommet type. ∗ Please refer to page 16-4-5 for figure. Piping specifications Output specifications 01 Single mounting R 1/8 NPN open collector 2 outputs 21 T1 Single mounting NPTF 1/8 without analog output 0X With suction filter M5 x 0.8 NPN open collector 2 outputs 22 0XY With suction filter M6 x 1 (Option) with analog output (1 to 5 V) Note) Single mounting type: M5 x NPN open collector 1 output 23 0.8 female threaded. Failure predict function without analog output

NPN open collector 1 output 24 Failure predict function with analog output (1 to 5 V)

Caution Refer to pages 16-14-3 and 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series.

16-4-2 3

LCD Readout Digital Pressure Switch Series ZSE3/ISE3

Specifications

Vacuum Positive pressure 100 kPa Positive pressure 1 MPa Model ZSE3 ISE3L ISE3

Operating pressure range 0 to –101 kPa 0 to 98 kPa 0 to 0.98 MPa

Max. operating pressure 200 kPa (1) 1 MPa kPa 1 1 — Min. display unit MPa — — 0.01 ZSE ISE Indicator light (2) ON: When Green LED (OUT1) or Red (OUT2) turns on Frequency response 200 Hz PSE (3) Hysteresis mode Adjustable (3 digits or more) Hysteresis Window comparator mode Fixed (3 digits) Z I SE3 Fluid Air, Non-corrosive gases Temperature characteristics ±3% F.S. or less PS Repeatability 1% F.S. or less Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z 1 Voltage 12 to 24 VDC (Ripple ±10% or less) I SE 2 Output specification NPN open collector 30 V 80 mA or less Current consumption 25 mA or less ZSP Error display Red light blinks. Display the error code on LCD. Pressure indication 3 1/2 digits (5 mm-size numerals) ISA2 Self-diagnostic function Overcurrent, Overpressure, Data error Pressure during 0 clear Operating temperature range 0 to 60°C (No dewing) IS Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Withstand voltage Between external terminals and housing 1000 VAC, 50/60 Hz for 1 min. ZSM Insulation resistance Between external terminals and housing 2 MΩ (500 VDC by megameter) Vibration resistance 10 to 500 Hz Pulse width 1.5 mm or acceleration 98 m/s2 (at the smaller vibration) to X, Y, Z direction (2 hours) PF2 Impact resistance 980 m/s2 to X, Y, Z direction (3 times for each direction) Connector type 2 IF Lead wire Heat-resistant vinyl electric wire ø1.55 0.31 mm 4-wire Grommet type Oil-resistant vinyl cabtire code -21, -23: ø3.5 0.14 mm2 4 cores -22, -24: ø3.5 0.15 mm2 5 cores Weight 40 g (including 0.6 m-long lead wire) Data R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) • Instant pressure supply of 0.5 MPa has no influence on the switch. 23 Note 2) • ZSE3--24: Failure predictive output is Red. Note 3) • Hysteresis mode: When the values of P1 and P2 are the same or when |P1| > |P2| within 3 digits, the hysteresis will be automatically 3 digits for the set value of P1. • Window comparator mode: The hysteresis is 3 digits, so separate P1 from P2 by 7 digits or more and set them. 1 digit is the minimum pressure display unit. (See the table above.) Description

LCD Displays present pressure. Displays each mode. SMC Displays error code.

DOWN button RESET button kPa Decreases the ON/OFF set point value. This clears the unit when an RESET SET Used for switch to peak mode low. abnormality occurs. Displays “0”.

SET button UP button Switches to the setting mode. Increases the ON/OFF set point value. Changed to peak mode high.

16-4-3 4 Series ZSE3/ISE3

Calibration Procedure Pressure Setting 2 output type 1. Input mode for set point value 2. Input set point value for OUT1 (1) 3. Input set point value for OUT1 (2)

kPa kPa kPa Press the “SET” Press the “SET” button. button.

Press the “SET” button. į button: Increases set point value į button: Increases set point value Ĭ button: Decreases set point value Ĭ button: Decreases set point value (Refer to the Table 1.) 4. Input set point value for OUT2 (1) 5. Input set point value for OUT2 (2) P1: Setting of OUT1

Press the “SET” Press the “SET” button button. to complete the setting.

į button: Increases set point value į button: Increases set point value Table 1 Output type Ĭ button: Decreases set point value Ĭ button: Decreases set point value

Hysteresis mode (P1 ≥ P2, P3 ≥ P4) Window comparator mode (P1< P2, P3< P4) Note) • Hysteresis mode (one for positive pressure is same) When P1 and P2 (also P3 and P4 for 2 output type) are the Hysteresis (Adjustable) (Hysteresis = 3 digits fixed) Hysteresis same or P1 > P2 within 3 digit, hysteresis for set pressure P1 (Fixed) Hysteresis (Fixed) (or P3) becomes increments automatically. ON • Window comparator mode (one for positive pressure is same) ON Hysteresis is 3 digit, so set P1 and P2 (also P3 and P4) at OFF OFF least 7 digit. P2 P1 P1 P2 ∗ 1 digit is the minimum setting pressure unit. (P4) (P3) (P3) (P4) Pressure Low High Pressure Low High Vacuum Low High Vacuum Low High 1 output type with failure prediction function 1. Input mode for set point value 2. Input set point value for OUT1 (1) 3. Input set point value for OUT1 (2)

kPa kPa kPa

Press the “SET” Press the “SET” button. button.

Press the “SET” button. į button: Increases set point value į button: Increases set point value Ĭ button: Decreases set point value Ĭ button: Decreases set point value 4. Calibration of failure predictive pressure 5. Calibration of number of failure prediction occurrences P1: setting of OUT1 P2: setting of OUT2 P3: setting of failure prediction pressure EC: Number of failure prediction SET kPa kPa

Press the “SET” Press the “SET” button button. to complete the setting.

į button: Increases set point value į button: Increases set point value Ĭ button: Decreases set point value Ĭ button: Decreases set point value Table 2 Failure prediction (Refer to the Table 2 .) Occurrence number: 1 to 16 times (0 is not available for prediction.) Vacuum High P3 Failure prediction will register when switches turn OFF without reaching the Set pressure pressure of (P3) after switch turns ON (over P1). Output of failure detection P1 occurs when failure prediction is counted continuously within certain preset levels. Set pressure The count of failure prediction is reset when switch turns ON (over P1) and Low P2 pressure exceeds the failure prediction set pressure (P3). (Example of Failure prediction counter Normal 1 time 2 times 3 times hysteresis mode.)

16-4-4 5

LCD Readout Digital Pressure Switch Series ZSE3/ISE3

Other Functions Internal Circuit and Wiring Example Peak mode high Circuit and connection To display the high peak pressure DC (+) SMC ················ Power supply + terminal (highest degree of vacuum), press the Brown į button during normal operation. Out3 ················ Analog output 1 to 5 V (±5% F.S) The LCD displays “H”. To return back to Gray į LED Green Load impedance: 1 kΩ kPa the normal operation, press the button again. OUT1 ················ Output 1 RESET SET Tr1 D1 Black LED Red Main circuit OUT2 ················ Output 2 Tr2 D2 White ZSE ISE DC (–) ················ Supply voltage GND terminal Blue Peak mode low PSE Regular connection To display the low peak pressure (lowest SMC degree of vacuum), press the Ĭ button Brown Z I SE3 during normal operation. Gray Load The LCD displays “ ”. To return back to LED Green the normal operation, press the Ĭ but- kPa Load + PS ton again. Tr1 D1 Black 12 to 24 VDC RESET SET LED Red

Main circuit Z 1 Tr2 D2 White I SE 2 Blue ZSP Reset function Connection example with a PLC A RESET operation leads to the at negative common terminal ISA2 SMC following results. 12 to 24 VDC 1) Reset will cause the following during Brown + – normal operation: IS •Peak high is cleared. Peak low is Gray kPa LED Green cleared. PLC RESET SET ZSM •Failure prediction counter is Tr1 D1 Black Input terminal cleared. LED Red PLC •Failure predictive output is reset. Main circuit Tr2 D2 White Input terminal 2) Reset will cause the following when PF2 an error has occurred: – • Data set in setting mode will Blue COM IF remain stored and will return to the same state as when the power is How to Use Connector applied. Data (All calibration data has retained.) • In the case of data error, reset the 1. Attaching and detaching connectors setup mode and then switch will • When assembling the connector to the switch housing, push the assume normal operation. connector straight onto the pins until that lever locks into the housing (All calibration data has retained.) slot. Note) Reset Function does not work • When removing the connector from the switch housing, push the during setup mode. leverdown to unlock it from the slot and then withdraw the connector straight off of the pin. Error Correction With connector 0.2 to 0.33 mm2 Max. coating O.D. Take the following corrective solutions when errors occur. Socket ø 1.7 mm Hook Display Description Solution Part no. DXT170-71-1 Connector Set data was changed Perform the RESET DC polarity indicator by accident, reason operation, and reset all unknown. data again. Lever

Pin OUT1 is short-circuited. Turn off the power and Overcurrent is being replace the load Slot applied to the load. connected with OUT1 (Black wire). Housing OUT 2 is short-circuited. Turn off the power and Overcurrent is being replace the load applied to the load. connected with OUT2 (White wire). Pressure exceeding 0.5 Reset the supply pressure 2. Crimping of lead wires and socket MPa is being applied. less than 0.5 MPa. (Reduce Strip 3.2 to 3.7 mm of the lead wire end, insert each stripped wire into (The pressure over rated the supply pressure to a socket and crimp contact it using special crimping tool. Be careful pressure is being below rated pressure in that the outer insulation of the lead wires does not interfere with applied in case of case of rated voltage.) socket contact part. (Crimping tool: DXT170-75-1) positive pressure.) 3. Attaching and detaching lead wires with sockets When performing zero Apply atmospheric pressure • Attaching clear, compared with the at- and then reset the switch. Push the socket into the square holes of the connector (with +, 1, 2, mospheric pressure, pres- – indication), and continue to push the sockets all the way in until sure of more than 0.07 ± they lock by hooking into the seats in the connector. (When they are MPa for 1 MPa and ±7 kPa for vacuum is being applied. pushed in their hooks open and they are locked automatically.) Then confirm that they are locked by pulling lightly on the lead wires. • Detaching To detach a socket from connector, pull out lead wire while pressing the socket's hook with a stick having a thin tip (about. 1 mm). If the socket will be used again, first spread the hook outward. 16-4-5 6 Series ZSE3/ISE3

How to Replace Filter Element

Replace the filter element when clogging causes deterioration of the adsorption force or slow response time. (Element part number: ZX1-FE) Confirm that the filter gasket is seated in the groove and then reassemble the parts.

Filter case

Filter element (ZX1-FE)

Filter gasket Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Gasket groove

Regarding the filter case Caution 1. The case is made of polycarbonate. Therefore, do not operate it in an environment that is exposed to chemicals such as thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, or water-soluble cutting oil (alkalinic). 2. Operate it away from direct sunlight.

16-4-6 7

LCD Readout Digital Pressure Switch Series ZSE3/ISE3

Dimensions/Switch Only

Grommet type 30 I 01 Z SE3- T1 -

20.5 ZSE ISE RESET button DOWN button PSE SET button UP button Z I SE3 PS

(3000) I SE 2

Lead wire length ZSP ISA2 IS 40.5

3.5 ZSM PF2 8.5 01: R 1/8 IF 2-ø3.5 Mounting hole T1: NPTF 1/8 13 M5 x 0.8 Data

Connector type 30 I 01 Z SE3- T1 - C 20.5

RESET button DOWN button SET button UP button 600 (3000) Lead wire length 10 39 3.5 8.5 01: R 1/8 T1: NPTF 1/8 2-ø3.5 Mounting hole 13 M5 x 0.8

16-4-7 8 Series ZSE3/ISE3

Dimensions/Switch Only

Grommet type 7 50.6 ZSE3-0X-

Vacuum Vacuum pad supply

20.5 connection port port

RESET button DOWN button Pneumatic circuit

SET button UP button Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 600 (3000) Lead wire length 58 51.5

PV 18 8 10.2

10.25 10 22.6 6.5 5.75

Vacuum supply port 2-ø3.3 Mounting hole Vacuum pad 0X: M5 x 0.8 connection port 0XY: M6 x 1.0 0X: M5 x 0.8 0XY: M6 x 1.0

Connector type ZSE3-0X-C 7 50.6

Vacuum Vacuum pad supply

20.5 connection port port

RESET button DOWN button Pneumatic circuit SET button UP button 600 (3000) Lead wire length 10 58 50

PV 18 8 10.2

10.25 10 22.6 6.5 5.75

Vacuum supply port 2-ø3.3 Mounting hole Vacuum pad 0X: M5 x 0.8 connection port 0X: M5 x 0.8 0XY: M6 x 1.0 0XY: M6 x 1.0 16-4-8 1 Air Checker: Electronic Pressure Switch Series PS1000/PS1100 For Positive Pressure For Vacuum

ZSE ISE PSE

Z I SE3 PS

Small, lightweight electronic pressure switch

Extremely compact (1/3 size as compared to Series ZSE2) 13W x 10H x 30L (mm)

2-wire type Applicable to either NPN or PNP output.

Easy mounting Plug-in port for One-touch fittings.

Wide calibration range Calibration: –0.1 to 0.45 MPa is possible with one pressure switch.

High visibility A large LED indicator for high visibility.

16-5-1 2 Series PS1000/1100

How to Order Specifications

Model PS1000-R06L PS1100-R06L PS 00 R06 L Switch output Present pres.≥Setting pres.: ON Present pres.≤Setting pres.: ON Max. operating 1 MPa pressure Regulating Output specifications –0.1 to 0.45 MPa –0.1 to 0.4 MPa Lead wire length pressure range 10 2-wire system (For positive pressure) L 3 m Fluid Air/Non-corrosive gas 2-wire system 11 (For vacuum and residual pressure) Piping specifications Indication light ON: When red LED turns on Temperature R06 ø6 reducer 3% F.S. or less characteristics ± Switch Specifications Repeatability ±1% F.S. or less 0.4 Hysteresis 4% F.S.

Pressure 0.2 Load voltage 12 to 24 VDC (Ripple ±10% or less) Setting pressure (MPa) Load current 5 to 40 mA t 0 Leakage 1 mA or less -0.1

220° Dimensions

30 3000 25.5 Lead wire length

Left end adjustment limit Right end adjustment limit AIRCHECKER – + PS1000-R06L

13 PRESS. –0.10 to 45 MPa {–1 to 4.6 kgf/cm2} MADE IN JAPAN Internal Circuit/Wiring Calibration trimmer Lead wire colors inside ( ) are those prior to conformity to IEC standards. LED display Circuit OUT (+) OUT (+) Brown (Red) Brown (Red) Load 10 + + A Main circuit Main circuit of switch 12 to 24 VDC of switch 12 to 24 VDC – – Applicable One-touch fittings A 30 Load H L T KQ S Y 06-M5 16 OUT (–) OUT (–) Blue (Black) Blue (Black) Other Series KQ/KS 13 ø6 reducer Series KJ 14.5 Example of connection with a PLC (Sequence controller) Series KJ (-X20) 16 NPN PNP Source type Sink type Input unit Input unit Brown (Red) Input Blue (Black) Input

Switch Switch

Blue (Black) COM Brown (Red) COM

16-5-2 1

Compact Pressure Switch Series ZSE1/ISE1 For Vacuum For Positive Pressure

ZSE ISE PSE

Z I SE3 PS

Can be integrated with ZM ejector system.

Variable hysteresis 1 to 10% of set pressure (Variable)

Easy and simple wiring

16-6-1 2 Series ZSE1/ISE1

How to Order

Operating pressure range/ Piping specifications Setting pressure range 01 R 1/8 Nil 0 to 1 MPa T1 NPTF 1/8 L 0 to 100 kPa Note) M5 x 0.8 (female) threaded.

Positive pressure ISE1

Vacuum ZSE1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Piping specifications Wiring specifications 00 For mounting on ZM ejector Nil Grommet type (Lead wire: 0.6 m) 01 Single mounting R 1/8 L Grommet type (Lead wire: 3 m) T1 Single mounting NPTF 1/8 C Connector type (Lead wire: 0.6 m) Note) Single mounting style: M5 x 0.8 CL Connector type (Lead wire: 3 m) (female) threaded. CN Without connector

Output specifications NPN open collector 1 output 14 w/o analog output, 3 turns adjustment NPN open collector 1 output With Connector/How to Order 15 w/o analog output, 200 degrees adjustment NPN open collector 2 output Without lead wire (Connector 1 pc., Socket 4 pcs.) ···ZS-20-A 16 w/o analog output, 3 turns adjustment With lead wire······························································ZS-20-5A- NPN open collector 2 output 17 w/o analog output, 200 degrees adjustment Note) When ordering switch with 5 m long lead wire, indicate NPN open collector 1 output Lead wire length 18 both part numbers. w/analog output, 3 turns adjustment Nil 0.6 m Ex.) ZSE1-01-15CN······1 pc. NPN open collector 1 output 19 ZS-20-5 A-50·········1 pc. 30 3 m w/analog output, 200 degrees adjustment 50 5 m PNP open collector 1 output 55 w/o analog output, 200 degrees adjustment

16-6-2 3

Compact Pressure Switch Series ZSE1/ISE1

Specifications

ZSE1 ISE1L ISE1 For vacuum For low pressure For high pressure Operating pressure range/Regulating pressure range 0 to –101 kPa 0 to 100 kPa 0 to 1 MPa Proof pressure 500 kPa 1.5 MPa Fluid Air/Non-corrosive, non-flammable gas Power supply voltage 12 to 24 VDC ±10%, Ripple (P-P)10% or less Current consumption 1 output: 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC Response time 5 ms or less ZSE ISE Repeatability ±1% F.S. or less Enclosure IP40 PSE Operating temperature range Operating: 0 to 60°C, Stored: –10 to 60°C (With no condensation) Operating humidity range Operating/Stored: 35 to 85%RH (With no condensation) Z Resistance I SE3 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, Vibration resistance in X, Y, Z directions for 2 hrs. each (De-energized) PS Impact resistance 980 m/s2 in X, Y, Z directions, 3 times each (De-energized) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Temperature characteristics (Based on 25°C) ±3% F.S. or less Z 1 I SE 2 Withstand voltage 1000 VAC for 1 min. (Between lead wires and case) Insulation resistance 50 MΩ or more (at 500 VDC by megameter) ZSP Port size 01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type Weight Approx. 40 g (Including 0.6 m—Long lead wire) ISA2 IS Output Specifications ZSM Model -14 -15 -16 -17 -18 -19 -55 PNP open collector Output type NPN open collector 30 V, 80 mA 80 mA PF2 Residual voltage 1 V or less (With load current of 80 mA) Number of outputs 12 1 IF 1 to 10% of set prss. 3% F.S. or less 1 to 10% of set prss. Hysteresis 1 to 10% of set press. (Variable) (Fixed) (Variable) (Adjustable) ON: when output is ON ON: when output is ON ON: when output is ON (Red) Data Indicator light (Red) (OUT1: Red, OUT2: Green) Tr immer adjustment 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees 1 to 5 V ±5% F.S. Analog output None None Output impedance: Approx. 1 kΩ

16-6-3 4 Series ZSE1/ISE1

Calibration Procedure Hysteresis Internal Circuit and Wiring Example Set the ON-pressure by the pressure setting Hysteresis is the pressure difference between the ON and trimmer. Turning clockwise can set the high the OFF pressure of the output signal. The set pressure is I pressure/high vacuum pressure. the pressure selected to switch from OFF to ON condition. Z SE1(L)- -14/-15 In the event of setting, use a flat head screwdriver suited for the groove of a Brown DC (+) trimmer, and rotate it lightly with a fingertip. High pressure High vaccum I Black OUT Z SE1--14/-15/-18/-19 Set point ON LED Red Switches with variable hysteresis can be adjusted Main circuit of switch by means of the HYS potentiometer in the range Hysteresis OFF Blue DC (–) 1 to 10% of the setting pressure range. Readjust it when the hysteresis setting I trimmer was changed after setting the ON Atmospheric Z SE1(L)- -16/-17 pressure. pressure 0 How to Use Connector Brown DC (+) Black OUT1 1. Attaching and detaching connectors LED Red Pressure setting trimmer White OUT2 When assembling the connector to the switch

Hysteresis setting trimmer LED Green Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy housing, push the connector straight onto the Main circuit of switch Blue DC (–) SET pins until the lever locks into the housing slot. When removing the connector from the Indicator light HYS switch housing, push the lever down to I SE1(L)- -18/-19 unlock it from the slot and then withdraw the Z connector straight off of the pin. Brown DC (+) Lead wire 0.2 to 0.33 mm2 Max. coating O.D. Black OUT1 Socket ø1.7 mm LED Red Hook White OUT2 1 kΩ Connector

I Main circuit of switch Blue DC (–) Z SE1(L)--16/-17 DC polarity indicator With pressure setting trimmer 1 (SET 1), OUT Lever 1 (Black lead wire, Red LED) can be set. I Z SE1(L)- -55 With pressure setting trimmer 2 (SET 2), OUT

2 (White lead wire, Green LED) can be set. 2 Lead wire 0.2 to 0.33 mm Brown DC (+) Socket Max. coating O.D. Hook Connector ø1.7 mm DC polarity indicator Black OUT + 21— Lever Pin LED Red Pressure setting trimmer 1 Slot Main circuit of switch Blue DC (–) Pressure setting trimmer 2 Housing

SET1 SET2 Indicator light 2. Crimping of lead wires and sockets Strip 3.2 to 3.7 mm at the end of the lead Caution wires, insert the ends of the core wires evenly into the sockets, and then crimp with Refer to pages 16-14-3 to 16-14-4 a crimping tool. When this is done, take care for Safety Instructions and that the coverings of the lead wires do not enter the core wire crimping area. Common Precautions on the products mentioned in this (Crimping tool: model no. DXT170-75-1) Set the possible min. pressure for adsorption catalog, and refer to pages 16-1- confirmation. If setting the pressure lower Core wire crimping area Covering retainer 11 to 16-1-13 for Precautions on than that, switch becomes ON in case that Socket Core wire adsorption is not completely done. If setting Lead wire every series. the pressure higher than that, switch does not become ON even though it may absorb Hook Covering workpieces. 3. Attaching and detaching lead wires with sockets Attaching Insert the sockets into the square holes of the connector (with +, 1, 2, – indication), and High vacuum Supply pressure continue to push the sockets all the way in Steady adsorption until they lock by hooking into the seats in Set point the connector. (When they are pushed in Unsteady their hooks open and they are locked adsorption automatically.) Then confirm that they are Atmospheric Non adsorption locked by pulling lightly on the lead wires. pressure 0 Detaching Regarding the pressure setting To detach a socket from a connector, pull out the lead wire while pressing the socket’s Caution hook with a stick having a thin tip (about 1 Observe the following precautions for setting mm). If the socket will be used again, first the vacuum pressure: spread the hook outward. Use your fingertips to gently turn the Socket Connector screwdriver. Do not use a screwdriver with a large grip or with a tip that does not fit into the trimmer Lead wire groove because this could strip the groove. Hook

16-6-4 5

Compact Pressure Switch Series ZSE1/ISE1

Dimensions Grommet type: Connector type: ZSE1-00-14/-15/-18/-19 ZSE1-00-14C/-15C/-18C/-19C 23.4

Indicator light (Red) 23 Indicator light (Red) 23

H L H L L H

15 H

HYS SET HYS SET Hysteresis setting trimmer Pressure setting trimmer Hysteresis setting trimmer Pressure setting trimmer ZSE 23.4 23.4 ISE Indicator light (Red, Green) Indicator light (Red, Green)

23 23 PSE

H L H L L H L

15 H

SET2 SET1 SET1 SET2 Z I SE3 Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 PS

600 (3000) — ZSP + 2 1 ISA2 40 40

. Pressure supply Pressure supply IS

port ø2 79.8 port ø2

72 O-ring O-ring 5 5 . . ZSM 9 9 30 30 21 21 6 6 PF2 27 27 2-M2.5 x 24L Mounting threads 2-M2.5 x 24L Mounting threads IF Data Grommet type: Connector type: I 01 I 01 Z SE1- T1 -14/-15/-18/-19 Z SE1- T1 -14C/-15C/-18C/-19C

Pressure setting trimmer Hysteresis setting trimmer Pressure setting trimmer Hysteresis setting trimmer

SET HYS SET HYS L HHL L HHL 15 15 Indicator light (Red) 23 Indicator light (Red) 23

I I Z SE1-01-16/-17 Z SE1-01-16C/-17C Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2

SET1 SET2 L HHL

SET1 SET2 15 L HHL

15 Indicator light (Red, Green) 23 23 Indicator light (Red, Green) 600 (3000) 600 (3000) 49 56.5 47 47 3.5 3.5 8.5 8.5 2-ø3.5 Mounting hole 13 Piping port 01: R 1/8 2-ø3.5 Mounting hole 13 Piping port 01: R 1/8 M5 x 0.8 depth 5 T1: NPTF 1/8 M5 x 0.8 depth 5 T1: NPTF 1/8

16-6-5 1

Compact Pressure Switch Series ZSE2/ISE2 For Vacuum For Positive Pressure

ZSE ISE PSE

Z I SE3 PS

Can be integrated with ZX or ZR ejector system.

Easy and simple wiring Connector type

16-6-7 2 Series ZSE2/ISE2

How to Order

Operating pressure range/ Piping specifications Setting pressure range 01 Single mounting R 1/8, M5 x 0.8 Nil 0 to 1 MPa T1 Single mounting NPTF 1/8, M5 x 0.8 L 0 to 100 kPa Note) M5 x 0.8 (female) thread.

Positive pressure ISE2 Vacuum ZSE2

01 Single mounting R 1/8 Nil Grommet type (Lead wire: 0.6 m) T1 Single mounting NPTF 1/8 L Grommet type (Lead wire: 3 m) 0X W/suction filter (Mounting on ZX unit) M5 x 0.8 C Connector type (Lead wire: 0.6 m) 0XY W/suction filter (Mounting on ZX unit) M6 x 1 (Option) CL Connector type (Lead wire: 3 m) 0R Base mounting (Mounting on ZR unit) CN Without connector Note) Single mounting type: M5 x 0.8 (female) threaded.

Output specifications NPN open collector 15 30 V, 80 mA

55 PNP open collector 80 mA

With Connector/How to Order

Without lead wire (Connector 1 pc., Socket 3 pcs.) ·····ZS-10-A With lead wire ·······························································ZS-10-5A- Note) When ordering switch with 5 m long lead wire, indicate Lead wire length both part numbers. Caution Nil 0.6 m Refer to pages 16-14-3 to 16-14-4 for Safety Ex.) ZSE2-01-15CN········1 pc. 30 3 m ZS-10-5 A-50···········1 pc. Instructions and Common Precautions on the 50 5 m products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series.

16-6-8 3

Compact Pressure Switch Series ZSE2/ISE2

ZSE2/ISE2 Specifications

ZSE2 ISE2L ISE2 For vacuum For low pressure For high pressure Operating pressure range/ 0 to –101 kPa 0 to 100 kPa 0 to 1 MPa Regulating pressure range Proof pressure 500 kPa 1.5 MPa Fluid Air/Non-corrosive, non-flammable gas Power supply voltage 12 to 24 VDC ±10%, Ripple (P-P) 10% or less Current consumption 17 mA or less at 24 VDC ZSE Response time 5 ms or less ISE Repeatability ±1% F.S. or less Enclosure IP40 PSE Operating temperature range Operating: 0 to 60°C, Stored: –10 to 60°C (With no condensation, nor freezing) Z Operating humidity range Operating/Stored: 35 to 85%RH (With no condensation) I SE3 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, Vibration resistance in X, Y, Z directions for 2 hrs. each (De-energized) PS Resistance

Output Specifications ZSM PF2 Model -15 -55 Output type NPN open collector 30 V, 80 mA PNP open collector 80 mA IF Residual voltage 1 V or less (With load current of 80 mA) Hysteresis 3% F.S. or less (Fixed) Data Number of outputs 1 Indicator light ON: when output is ON (Red)

16-6-9 4 Series ZSE2/ISE2

Calibration Procedure How to Use Connector Internal Circuit and Wiring Example Set the ON-pressure by the pressure setting 1. Attaching and detaching connectors trimmer. Turning clockwise can set the high When assembling the connector to the switch -15 NPN open collector pressure/high vacuum pressure. housing, push the connector straight onto the DC ( + ) pins until the lever locks into the housing slot. Brown When removing the connector from the OUT switch housing, push the lever down to Black + Load 12 to 24 VDC unlock it from the slot and then withdraw the Max. 30 V, 80 mA DC (–) – Pressure connector straight off of the pin. Main circuit LED Red Blue setting trimmer Lead wire 0.2 to 0.33 mm2 Max. coating O.D. Electric circuit diagram ø1.7 mm SET -55 PNP open collector DC ( + ) Socket Brown Indicator light

Hook OUT + Black 12 to 24 VDC Connector Load –

Main circuit LED Red DC (–) Max. 80 mA DC polarity indicator Blue

Lever Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Electric circuit diagram Set the possible min. pressure for adsorption confirmation. If setting the pressure lower Connection example with a PLC than that, switch becomes ON in case that at – common terminal Lead wire 0.2 to 0.33 mm2 adsorption is not completely done. If setting Switch DC ( + ) Max. coating O.D. the pressure higher than that, switch does Socket Brown Hook Connector ø1.7 mm not become ON even though it may absorb OUT workpieces. DC polarity indicator Black + O— Lever PLC Input terminal DC (–) Pin Blue

Slot Main circuit of switch – Housing COM High vacuum – + Supply pressure 12 to 24 VDC Steady adsorption Set point Filter case Unsteady 2. Crimping of lead wires and sockets adsorption Caution Strip 3.2 to 3.7 mm at the end of the lead Non adsorption 1. Do not use with thinner, carbon tetrachloride, wires, insert the ends of core wires evenly into Atmospheric 0 chloroform, acetate, aniline, cyclohexane, tri- the sockets, and then crimp with a crimping pressure chloroethylene, sulfuric acid, lactic acid and tool. When this is done, take care that the watermiscible cutting fluid (alkaline). coverings of the lead wires do not enter the 2. Operate it away from direct sunlight. core wire crimping area. Regarding the pressure setting (Crimping tool: model no. DXT170-75-1) Caution Core wire crimping area Covering retainer Socket Core wire Caution Observe the following precautions for setting Lead wire the vacuum pressure: Use your fingertips to Refer to pages 16-14-3 to 16-14-4 gently turn the screwdriver. Do not use a screwdriver with a large grip or with a tip that Hook Covering for Safety Instructions and does not fit into the trimmer groove because Common Precautions on the this could strip the groove. 3.Attaching and detaching lead wires products mentioned in this with sockets catalog, and refer to pages 16-1- 11 to 16-1-13 for Precautions on Hysteresis Attaching Insert the sockets into the square holes of every series. Hysteresis is the pressure difference between the connector (with +, 0, – indication), and the ON and the OFF pressure of the output continue to push the sockets all the way in signal. The set pressure is the pressure until they lock by hooking into the seats in selected to switch from OFF to ON condition. the connector. (When they are pushed in their hooks open and they are locked automatically.) Then confirm that they are locked by pulling lightly on the lead wires. Detaching High pressure

High vacuum To detach a socket from a connector, pull out Set point ON the lead wire while pressing the socket’s hook with a stick having a thin tip (about 1 mm). If the socket will be used again, first Hysteresis OFF spread the hook outward.

Socket Connector Atmospheric pressure 0 Lead wire Hook

16-6-10 5

Compact Pressure Switch Series ZSE2/ISE2

Dimensions/With Suction Filter: ZSE2-0X Grommet type: ZSE2-0X -15 Indicator light (Red) H 20 SET

L Vacuum Vacuum pad supply connection port 7 35.6 port Pressure setting trimmer ZSE Pneumatic circuit ISE PSE

Z I SE3 600

(3000) PS

58 ISA2 52

PV 10.2 IS 6.5 18 32

8 V ZSM 10 10 17.6 5.5 PF2 Vacuum supply port 2-ø3.3 Mounting hole M5 x 0.8 Vacuum pad connection port IF M5 x 0.8 Data Connector type: ZSE2-0X -15C Indicator light (Red) H 20

SET Vacuum Vacuum pad L supply connection port 7 35.6 port Pressure setting trimmer Pneumatic circuit 600

(3000)

O + - 32 59 58

PV 10.2 6.5 18

8 V

10 10 17.6 5.5 Vacuum supply port 2-ø3.3 Mounting hole Vacuum pad connection port M5 x 0.8 M5 x 0.8

16-6-11 6 Series ZSE2/ISE2

01 Dimensions/Standard Type: ZSE2- T1

Grommet type: ZSE2- 01 -15 01 T1 Connector type: ZSE2- T1 -15C

Pressure setting trimmer Pressure setting trimmer

SET SET L H L H 15 15

20 Indicator light (Red) 20 Indicator light (Red) 600 (3000) 600

(3000) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 48.5 41 39 39 3.5 3.5 8.5 8.5

2-ø3.5 13 Piping port 01: R 1/8 2-ø3.5 13 Piping port 01: R 1/8 Mounting hole M5 x 0.8 depth 5 T1: NPTF 1/8 Mounting hole M5 x 0.8 depth 5 T1: NPTF 1/8

Dimensions/Base Mount Type: ZSE2-0R

Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Pressure setting trimmer Indicator light (Red) Indicator light (Red)

SET SET L H L H 9 9 15 15

25 2-M2.5 x 41L 25 2-M2.5 x 41L 31 Mounting thread 31 Mounting thread 600 600 (3000) (3000) 42 40 40 49.5 3 3 20 20 18 18 16 16 9 9 13 11 13 11

Gasket Vacuum supply port ø3.3 Gasket Vacuum supply port ø3.3

16-6-12 7

Compact Pressure Switch Series ZSE2/ISE2

01 Dimensions: ISE2 - T1

Grommet type: ISE2- 01 -15 01 T1 Connector type: ISE2- T1 -15C

Pressure setting trimmer Pressure setting trimmer

SET SET L H L H 15 15 ZSE ISE 20 Indicator light (Red) 20 Indicator light (Red) PSE

Z I SE3

600 PS (3000)

600 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy (3000) Z 1 I SE 2 ZSP ISA2 48.5 41 39 39 IS 3.5 3.5 ZSM 8.5 8.5 2-ø3.5 13 Piping port 01: R 1/8 2-ø3.5 13 Piping port 01: R 1/8 PF2 Mounting hole M5 x 0.8 depth 5 T1: NPTF 1/8 Mounting hole M5 x 0.8 depth 5 T1: NPTF 1/8 IF Data

16-6-13 1

Adsorption Confirmation Switch Series ZSP1

ZSE ISE PSE

Z I SE3 PS

Can be integrated with ZX ejector system.

Best suited for small diameter nozzles ø0.3 to ø1.2

Adsorption confirmation switch Adsorption nozzle

ø0.3 to ø1.2

Several mm2 chip part

Suction filter comes as standard

16-7-1 2 Series ZSP1

How to Order

Vacuum ZSP1 15

Available nozzle diameter S ø0.3 to ø0.7 B ø0.5 to ø1.2

Connection With suction filter M5 x 0.8 0X (For mounting on ZX ejector) With suction filter M6 x 1 0XY (For mounting on ZX ejector) Wiring specifications Nil Grommet type (Lead wire: 0.6 m)

Without lead wire (Connector 1 pc. Socket 3 pcs.) ZS-10-A

With lead wire ZS-10-5A-

Note) When ordering switch with 5 m long lead wire, Lead wire length Indicate both part numbers. Nil 0.6 m Ex.) ZSP1- 0X-15CN 1 pc. 30 3 m ZS-10-5 A-50 1 pc. 50 5 m Specifications

Model ZSP1-S ZSP1-B Fluid Air Operating pressure range –20 to –101 kPa Applicable adsorption nozzle dia. ø0.3 to ø0.7 (Refer to “Graph (1)” on page 16-7-3.) ø0.5 to ø1.2 (Refer to “Graph (2)” on page 16-7-3.) Hysteresis 0.5 kPa Internal orifice ø0.5 ø0.8 Supply voltage 12 to 24 VDC (Ripple ±10% or less) Output type NPN open collector 30 V, 80 mA Indicator light ON: When output is ON. Current consumption 17 mA or less at 24 VDC Operating temperature range 0 to 60°C (With no condensation) Port size M5 x 0.8 Grommet type Grommet oil-resistant vinyl heavy-duty code 3-wire, ø3.4, 0.2 mm2 Lead wire Connector type Heat-resistant vinyl electrical wire ø1.55, 0.31 mm2

16-7-2 3

Adsorption Confirmation Switch Series ZSP1 How to Set Adsorption Confirmation Relation between supply pressure and adsorption Applicable Adsorption Nozzle Range nozzle diameter is shown in the below graph. Adjustment Needle

Graph (1) ZSP1-S1 kPa = 7.5 mmHg Graph (2) ZSP1-B 1 kPa = 7.5 mmHg 1. Supply the vacuum and electrical power source –101 –101 to the unit. Rotate an adjustment needle clock- Applicable adsorption Applicable adsorption wise until it stops. nozzle range nozzle range 2. With the adsorption nozzle away from a workpiece (open), turn the adjustment needle counterclockwise until the indicator light turns on. –50 –50 3. From the above 2. position, turn the adjustment needle 1/4 to 1 turn clockwise. 1. 2. 3. –20 –20 Right ZSE Supply pressure (kPa) Supply pressure (kPa) ISE 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.7 0.9 1.1 Right Left 1/4 to 1 turn Adsorption nozzle diameter (mm) Adsorption nozzle diameter (mm) PSE Adjustment Indicator light Indicator light Pneumatic Circuit and Principle needle closed ON OFF Z I SE3 4. Re-adjust the needle so the indicator light turns S1 S2 The air pressure forms a bridge circuit ON only when the work adsorption is steady. PS P1 inside the unit with a vacuum applied to the Vacuum circuit, but with the adsorption nozzle “S4” Indicator light Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Pressure Z 1 source sensor open, adjust needle “S2” so that (P1 ≅ P2). Adjustment needle I SE 2 S3 P2 S4 When parts are absorbed by nozzle “S4”, the resulting (P2 – P1) differential will be Adsorption detected by the pressure sensor. ZSP (ø0.3 to ø1.2) Internal Circuit and Wiring Example ISA2

Lead wire colors inside ( ) are those prior to conformity to IEC standards. IS Brown (Red) DC(+)········Supply voltage + terminal ZSM Hysteresis Black (White) OUT··········NPN open collector MAX. 30 V, 80 mA Hysteresis is the pressure difference between the PF2 ON pressure and the OFF pressure of the output signal. The set pressure is the pressure selected IF to switch from OFF to ON condition. Main circuit of switch Blue (Black) DC(–)·········Supply voltage GND terminal Data How to Use Connector High pressure 1. Attaching and detaching connectors 2. Crimping of lead wires and sockets High vacuum When assembling the connector to the Strip 3.2 to 3.7 mm at the end of hte lead Set point ON switch housing, push the connector wires, insert the ends of the core wires

straight onto the pins until the lever locks evenly into the sockets, and then crimp Hysteresis OFF into the housing slot. with a crimping tool. When this is done, When removing the connector from the take care that the coverings of the lead switch housing, push the lever down to wires do not enter the core wire crimping Atmospheric unlock it from the slot and then withdraw area. pressure 0 the connector straight off of the pin. (Crimping tool: model no. DXT170-75-1) Lead wire 0.2 to 0.33 mm2 Core wire crimping area How ro Replace Max. coating Covering retainer Filter Element O.D. ø1.7 m Socket Core wire Lead wire If the filter element becomes clogged, leading to a Socket reduced adsorption force or delayed response Hook Covering time, stop the operation and re-place the element. Hook (Element part number ZX1-FE) Verify that the filter Connector 3. Attaching and detaching lead wires gasket is placed properly in the gasket groove DC polarity indicator with sockets before installing an element. Lever Attaching Insert the sockets into the square holes of the connector (with +, 0, – indication), and Filter case Pin continue to push the sockets all the way in until they lock by hooking into the seats in Slot the connector. (When they are pushed in Housing their hooks open and they are locked automatically.) Then confirm that they are locked by pulling lightly on the lead wires. Filter element Detaching (ZX1-FE) To detach a socket from a connector, pull out the lead wire while pressing the Filter gasket socket's hook with a stick having a thin tip (about 1 mm). If the socket will be used again, first spread the hook outward. Gasket groove Socket Connector

Hook Lead wire 16-7-3 4 Series ZSP1

Dimensions Grommet type: ZSP1- 0X -

Adjusting needle

Vacuum Pressure ADJ supply port sensor 20 Adsorption 08 nozzle port 7 48.3 600

Adsorption Vacuum supply port nozzle port

0X: M5 x 0.8 58 0X: M5 x 0.8 51

0XY: M6 x 1 50 0XY: M6 x 1

PV 6.5 8 10.2

10 11 17.8 5.5

2-ø3.3 Mounting hole

Connector type:

ZSP1- 0X - C Adjusting needle

ADJ Vacuum Pressure

20 supply port sensor

08 Adsorption 7 48.3 nozzle port 600 (3000) Lead wire length

Adsorption Vacuum supply port nozzle port

0X: M5 x 0.8 59.5 0X: M5 x 0.8

0XY: M6 x 1 50 0XY: M6 x 1

PV 6.5 8 10.2

10 11 17.8 5.5

2-ø3.3 Mounting hole

16-7-4 1

Air Catch Sensor Series ISA2

ZSE ISE Detection distance Repetition accuracy PSE

Z 0.01 to 0.5 mm 0.01 mm or less I SE3 PS

Model Detection distance Detection accuracy Note) ISA2-G 0.01 to 0.25 mm 0.01 mm or less ISA2-H 0.03 to 0.5 mm Note) Detection distance: 0.01 to 0.15 mm (ISA2-G), 0.03 to 0.15 mm (ISA2-H) Supply pressure: At supply pressure 100 to 200 kPa 2 Port Solenoid Valve with Manual Lock is newly added.

To check the workpiece position Position check of metal mold on the reference plane

16-8-1 2 Stable detection of 0.01 to 0.5 mm clearance Due to the pneumatic bridge circuit and semiconductor pressure sensor, the non-contact type sensor is hardly affected by fluctuations in the supply pressure.

Plug connectors (Centralized wiring) Requires less man hours to wire. Terminal box

Easy to add and remove manifold stations. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Modular construction Requires less man hours to wire.

With regulator + 2 port solenoid valve

With 2 port solenoid valve 16-8-2 3

Air catch sensor Series ISA2

Optimum position is known at a glance. LEDLED levellevel metermeter ZSE Above set position NG ISE PSE Extraneous Easy-to-operate material Z SE3 W large dial I PS

2 wiring methods Variations Model ISA2-G ISA2-H Operating pressure range 30 to 200 kPa 50 to 200 kPa IndividualIndividual Detection distance 0.01 to 0.25 mm 0.03 to 0.5 mm wiring wiring Output type NPN open connector, PNP open collector Lead wire with connector (Individual wiring) Electrical entry Terminal box (Centralized wiring) Mounting DIN rail, Bracket Number of manifold stations 1 to 6 stations Port size Rc, NPT, G 1/8 IP66 (IP65 for solenoid valve. Regulator Enclosure Centralized and pressure gauge are open type.) wiring

16-8-3 4

Air Catch Sensor Series ISA2

How to Order Manifold Without control unit IISA2 N3PL B

With control unit

Pressure gauge of regulator Note 1) A∗ Without pressure gauge Note 2) MPa single notation Square embedded E2 0.2 pressure gauge Control unit Z2∗ PSI single notation MPa C With regulator + 2 port solenoid valve E4 MPa single notation 0.4 V With 2 port solenoid valve Z4∗ PSI single notation MPa G2 MPa single notation Round pressure 0.2 gauge P2∗ MPa-PSI double notation MPa G4 MPa single notation 0.4 Electrical entry and supply port position P4∗ MPa-PSI double notation MPa SR Centralized wiring with supply port on the right Note 1) Due to new Japanese weight and SL Centralized wiring with supply port on the left measurement legislation, PSI notation type cannot be sold or used in Japan. Individual wiring with supply port on the right PR Note 2) The pressure gauge port is Rc 1/8. PL Individual wiring with supply port on the left ∗ Manufactured upon receipt of order. Note) The supply port position is the one when the switch is viewed from the front. Stations Throttle/Manual lock of 2 port solenoid valve 1 1 station Nil Without throttle, without manual lock 2 2 stations C With throttle, without manual lock 3 3 stations W Without throttle, with manual lock 4 4 stations M With throttle, with manual lock 5 5 stations Throttle 6 6 stations

Option Nil Without bracket Manual lock B With bracket With mounting D bracket for DIN rail Note) DIN rail must be ordered separately. Electrical entry of 2 port solenoid valve (Refer to the page 16-8-18.) D : DIN connector D0: DIN connector T : Conduit terminal DL: DIN connector (Without connector) TL: Conduit terminal Voltage of 2 port (With indicator light) (With indicator light) solenoid valve 1 100 VAC 2 200 VAC 3 110 VAC 4 220 VAC 5 24 VDC 6 12 VDC 36 230 VAC

16-8-4 5

Air Catch Sensor Series ISA2

How to Order For single and double notation type and additional stations Air catch sensor ISA2 G E2 1

Detection distance Electrical entry G 0.01 to 0.25 mm Piping specifications Straight H 0.03 to 0.5 mm Output specifications Nil Rc 1/8 ZSE N NPT 1/8 1 NPN output Nil ISE F∗ G 1/8 5 PNP output ∗ Made to order PSE Note 1) Pressure gauge Right angle A∗ Without pressure gauge Note 2) Z I SE3 MPa single notation Square embedded E2 0.2 pressure gauge L∗ Z2∗ PSI single notation MPa Individual wiring PS E4 MPa single notation 0.4 ∗ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z4 PSI single notation MPa N Without lead wire Z 1 G2 MPa single notation Round pressure I SE 2 0.2 gauge P2∗ MPa-PSI double notation MPa G4 MPa single notation 0.4 ZSP P4∗ MPa-PSI double notation MPa P Terminal block box Note 1) Due to new Japanese weight and ISA2 measurement legislation, PSI notation Centralized wiring type cannot be sold or used in Japan. ∗ Manufactured upon receipt Note 2) The pressure gauge port is Rc 1/8. of order. IS ∗ Manufactured upon receipt of order. ZSM Ordering Example PF2 Without control unit Centralized wiring Individual wiring Centralized wiring/Supply port right IF Individual wiring Centralized wiring Centralized wiring air catch sensor Terminal air catch sensor Data Terminal box air catch sensor ISA2-GE41N box ISA2-HE41P ISA2-GE41P

3 0 3 0 3 0 3 0 3 0

P PU P P P ULL SET Supply port LL SET UL L SET UL L SET UL L SET Supply port 6 9 6 9 6 9 6 9 6 9

0.2 0.2 0.2 0.2 0.2 0.1 0.3 IN IN 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 IN 0 0.4 0.4 0.4 0.4 0.4 MPa 0 MPa 0 MPa 0 MPa 0 MPa Right Left Right

Bracket DIN rail mounting DIN rail mounting bracket bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B 1 set (1 station manifold part number) IISA2NPL-1D 1 set (1 station manifold part number) IISA2NSR-3D 1 set (3 stations manifold part number) ∗ISA2-GE41P 1 set (Air catch sensor part number) ∗ISA2-GE41N 1 set (Air catch sensor part number) ∗ISA2-HE41P 3 sets (Air catch sensor part number) Prefix the part number of the air catch sensor Prefix the part number of the air catch sensor Prefix the part number of the air catch sensor with an asterisk (∗). with an asterisk (∗). with an asterisk (∗). With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor Individual wiring 2 port solenoid valve ISA2-HE41P Terminal box air catch sensor 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0

PU PU PU PU PU PU LL SET LL SET LL SET LL SET LL SET LL SET Supply port 6 9 6 9 6 9 6 9 6 9 6 9 Supply port

0.2 0.2 0.2 0.2 0.2 0.2 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.05 0.15 IN 0 0.4 0 0.4 0 0.4 0 0.4 0 0.4 0 0.4 IN MPa MPa MPa MPa MPa MPa 0.2 0 MPa Left Right

Bracket Bracket

Stations 3 2 1 Stations 1 2 3 IISA2CSL-3B5DLCE2 1 set (3 stations manifold part number) IISA2VPR-3B5DLC 1 set (3 stations manifold part number) ∗ISA2-HE41P 3 sets (Air catch sensor part number) ∗ISA2-GE41 3 sets (Air catch sensor part number) Prefix the part number of the air catch sensor with an Prefix the part number of the air catch sensor with an asterisk (∗). asterisk (∗).

16-8-5 6 Series ISA2

Specifications

Model ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 Detection distance 0.01 to 0.25 mm 0.03 to 0.50 mm Fluid Dry air (filtered to 5 µm) Operating pressure range 30 to 200 kPa 50 to 200 kPa Recommended detection nozzle ø1.5 ø2.0 Consumption 50 kPa 5 or less 10 or less flow rate 100 kPa 8 or less 15 or less

/min (ANR) Supply

l pressure 200 kPa 12 or less 22 or less Power supply voltage 12 to 24 VDC, Ripple (p-p) 10% or less (With power polarity protection) Current consumption 15 mA or less Switch Output NPN PNP NPN PNP open collector: one output open collector: one output open collector: one output open collector: one output Maximum load current 80 mA Maximum load voltage 30 VDC (at NPN output) Residual voltage 1.5 V or less (at 80 mA)

Resistance 1.5 mm amplitude in 10 to 500Hz or acceleration of 98 m/s2 without control unit and bracket mounted,

Environmental Vibration resistance Others 30 m/s2, whichever is smaller for 2 hours in X, Y, Z direction each (De-energized) Impact resistance Without control unit and bracket mounted: 980 m/s2, Others: 150 m/s2 in X, Y and Z direction, 3 times each (De-energized) Port size Nil: Rc 1/8, N type: NPT 1/8, F type: G 1/8 Lead wire (Individual wiring type) 4-core, oil resistant, cable (0.64 mm2) with M12, 4-pin pre-wired connector Ter minal block box (Centralized wiring type) Front wiring (Electrical entry ø21) Individual wiring type (body only): 253 g, common wiring type (body only): 250 g, Weight Ter minal box: 205 g, lead wire: 278 g, connecting bracket with sealing for additional station: 4 g Note 1) Refer to “Relation between Nozzle Diameter and Detection Distance” (page 16-8-8) for hysteresis. Note 2) Refer to “Setting Procedure” (page 16-8-11) for LED level meter.

Working Principle

P1 In a bridge circuit as in the left figure, a detection gap is applied to the detection nozzle (S4) while the setting dial S3 S1 S3 Sensor is adjusted to balance the pressure applied to the pressure S2 S4 sensor (P1 = P2). The pressure sensor detects the differential P2 pressure generated when the detection nozzle (S4) is S1, S2: Fix orifice released. When the work piece comes close to the detection S3: Variable orifice (adjusted by setting dial) nozzle, the back pressure P2 increases until it is larger than S4: Detection nozzle P1 (P2 > P1). Then the switch output turns on to notify that the pressure is below the detection gap.

16-8-6 7

Air Catch Sensor Series ISA2

Internal Circuit and Wiring

NPN open collector output Circuit and Wiring for 2 Port Solenoid Valve DC (+)

OUT Without indicator light DC circuit Without display light AC Circuit Load 1 DC (+) 1 ( ) MAX 80 mA 12 to 24 VDC Rectifying witch

s device ZNR ZNR Main circuit of DC ( ) SOL 12 to 24 VDC SOL 100 to 200 VAC

2 DC ( ) 2 ( ) ZSE ISE PNP open collector output Conduit terminal Conduit terminal DC (+) With indicator light DC circuit DIN type connector With indicator light AC Circuit PSE 1 DC (+) 1 ( ) MAX 80 mA Rectifying OUT device Z Load 12 to 24 VDC witch ZNR ZNR SE3

s I 100 to 200 VAC SOL 12 to 24 VDC SOL Main circuit of DC () LED 2 DC () indicator 2 ( ) PS light

ZNR Use of incorrect power supply will cause SOL 12 to 24 VDC damage to equipment. ISA2

LED 2 DC () IS ZSM Wiring PF2 Individual wiring Centralized wiring 2: NC 1: Brown Ter minal block IF 3 0 1 Brown DC (+) OUT OUT OUT OUT OUT Data 2 NC 6 9 3: Blue 1 2 3 4 5 3 Blue DC () 4: Black DC DC NC OUT 4 Black OUT () (+) 6

1. Insert the connector of the lead wire with its key groove at the proper position. 2. Hold the knurl with 2 fingers and rotate it clockwise until finger 1. Mount the seal conduit on the terminal box. For mounting tight. procedure, refer to the catalog and instruction manual provided by the manufacturer of the seal conduit. Lead wire with connector 2. Thread the cable through the seal conduit and arrange wiring Knurl according to the polarity of the terminal block illustrated above. 3. Fasten the seal conduit with a tightening torque not greater than 5 N⋅m. Do not hold the terminal box or the switch.

3. Connect the colored wires coming from the cable terminal. Refer to the circuit diagram and table above to avoid mistakes.

Seal conduit entry (ø21)

16-8-7 8 Series ISA2

Relation between Nozzle Diameter and Detection Distance

The data in the following charts are characteristics of hysteresis at the detection distance. In case accuracy is required by the settings, the design should be made so that the hysteresis will stay within the optimum adjustment range not larger than 0.01 mm. The smaller the hysteresis, the better the sensitivity. In cases where the hysteresis exceeds 0.01 mm, the air catch sensor should be used to check the presence of the work piece.

ISA2-G ISA2-H

Detection nozzle: ø1.0 Detection nozzle: ø1.0 Detection side piping: ø6 x ø4 tubing 5 m Detection side piping: ø6 x ø4 tubing 5 m 0.1 Supply pressure 0.1 Supply pressure 0.09 30 kPa 0.09 50 kPa 0.08 0.08 0.07 0.07 0.06 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 0.06 100 kPa 0.05 0.05 100 kPa 0.04 0.04

Hysteresis (mm) 0.03 200kPa Hysteresis (mm) 0.03 200 kPa 0.02 0.02 0.01 0.01 Optimum adjustment range Optimum adjustment range 0 0 0 0.05 0.1 0.15 0.2 0.25 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.5 Detection distance (mm) Detection distance (mm)

Detection nozzle: ø1.5 Detection nozzle: ø1.5 Detection side piping: ø6 x ø4 tubing 5 m Detection side piping: ø6 x ø4 tubing 5 m 0.1 Supply pressure 0.1 Supply pressure 0.09 30 kPa 0.09 50 kPa 0.08 0.08 100 kPa 0.07 0.07 0.06 0.06 0.05 0.05 100 kPa 0.04 0.04 200 kPa Hysteresis (mm) 0.03 Hysteresis (mm) 0.03 200 kPa 0.02 0.02 0.01 0.01 Optimum adjustment range Optimum adjustment range 0 0 0 0.05 0.1 0.15 0.2 0.25 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.5 Detection distance (mm) Detection distance (mm)

Detection nozzle: ø2.0 Detection nozzle: ø2.0 Detection side piping: ø6 x ø4 tubing 5 m Detection side piping: ø6 x ø4 tubing 5 m 0.1 Supply pressure 0.1 Supply pressure 0.09 30 kPa 0.09 50 kPa 0.08 0.08 100 kPa 0.07 0.07 0.06 0.06 0.05 0.05 100 kPa 0.04 0.04 200 kPa

Hysteresis (mm) 0.03 Hysteresis (mm) 0.03 200 kPa 0.02 0.02 0.01 0.01 Optimum adjustment range Optimum adjustment range 0 0 0 0.05 0.1 0.15 0.2 0.25 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.5 Detection distance (mm) Detection distance (mm)

16-8-8 9

Air Catch Sensor Series ISA2

Response Time

Response time changes with detection distance and piping length. It is hardly influenced by the supply pressure and nozzle diameter (ø1.0 to ø2.0). While all graphs assume a fixed set distance with changes in the detection distance, the upper charts show responses at various set values and the lower charts show responses at various piping lengths. If the set distance is equal to the set value, the response becomes quicker as the set value becomes smaller or the piping length becomes shorter. ISA2-G ISA2-H ZSE Detection nozzle: ø1.5 Supply pressure: 100 kPa Detection nozzle: ø2.0 Supply pressure: 100 kPa ISE Detection side piping: ø6 x ø4 tubing 5 m Detection side piping: ø6 x ø4 tubing 5 m PSE 2.5 Set value 2 Z 2 I SE3 0.05 mm 1.5 Set value 0.1 mm 1.5 0.1 mm PS 0.05 mm Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 1 0.15 mm Z 1 1 I SE 2 0.3 mm 0.5 mm 0.5 ZSP 0.5 0.15 mm Response time (sec) Response time (sec) 0.25 mm ISA2 0 0 IS 0 0.05 0.1 0.15 0.2 0.25 0.3 0 0.1 0.2 0.3 0.4 0.5 0.6 Detection distance (mm) Detection distance (mm) ZSM Detection distance Response time characteristics Detection distance Response time characteristics PF2 Detection nozzle: ø1.5 Supply pressure: 100 kPa Detection nozzle: ø2.0 Supply pressure: 100 kPa IF Detection side piping: ø6 x ø4 Set distance: 0.15 mm Detection side piping: ø6 x ø4 Set distance: 0.3 mm 3 1.5 Piping tubing length Piping tubing length Data 10 m 2.5 10 m 1.2 8 m 2 0.9 1.5 8 m 5 m 5 m 0.6 1

Response time (sec) Response time (sec) 3 m 3 m 0.3 0.5 1 m 1 m 0 0 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape

Please keep the nozzle shape as illustrated below. Figure (1) Take every caution against chamfer on the detection surface and/or nozzle hole, which could affect the characteristics as illustrated in Figure (1). Chamfer is not ø1 ø1.5 ø2 allowed. Detection surface 2 or more 2 or more 2 or more

ø3 or more ø3 or more ø3 or more

16-8-9 10 Series ISA2

Supply Pressure Dependence

The charts illustrate changes in the detection distance with fluctuations in the supply pressure.

ISA2-G ISA2-H

Detection nozzle: ø1.0 Detection nozzle: ø1.0 Detection side piping: ø6 x ø4 tubing 5 m Detection side piping: ø6 x ø4 tubing 5 m 0.4 0.6 0.5 mm ) ) 0.5 0.25 mm 0.3 mm mm 0.4

0.2 0.3 0.15 mm 0.2 0.15 mm Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 0.1 Detection distance ( Detection distance ( 0.1 0.01 mm 0.03 mm 0 0 050100 150 200 250 050100 150 200 250 Supply pressure (kPa) Supply pressure (kPa)

Detection nozzle: ø1.5 Detection nozzle: ø1.5 Detection side piping: ø6 x ø4 tubing 5 m Detection side piping: ø6 x ø4 tubing 5 m 0.4 0.6 0.5 mm ) ) 0.25 mm 0.5 0.3 mm mm 0.4

0.2 0.3 0.15 mm 0.2 0.15 mm 0.1 Detection distance ( Detection distance ( 0.1 0.01 mm 0.03 mm 0 0 050100 150 200 250 050100 150 200 250 Supply pressure (kPa) Supply pressure (kPa)

Detection nozzle: ø2.0 Detection nozzle: ø2.0 Detection side piping: ø6 x ø4 tubing 5 m Detection side piping: ø6 x ø4 tubing 5 m 0.4 0.6 0.5 mm 0.25 mm

) ) 0.5 0.3 mm mm 0.4

0.2 0.3 0.15 mm 0.2 0.15 mm 0.1

Detection distance ( Detection distance ( 0.1 0.01 mm 0.03 mm 0 0 050100 150 200 250 050100 150 200 250 Supply pressure (kPa) Supply pressure (kPa)

16-8-10 11

Air Catch Sensor Series ISA2

Setting Procedure

The detection distance is set with the LED level meter and setting 1. For accuracy in setting, apply a clearance gauge to the dete- dial. ction nozzle to replicate the set condition in advance. Keep the setting dial pulled out while in use. If released, it will 2. Confirm that the set pressure is applied. If the setting dial is return to its original position and become unable to rotate. fully open, the LED level meter appears as . 3. Pull the setting dial and rotate it in the positive direction. The lights will turn on in the order shown below.

Rotate in the ZSE positive direction. ISE Red PSE Pull out Z SE3 Before pulling out I Green 1 PS

Example Rotate clockwise IN

Maximum 0.24 MPa Minimum 0.16 MPa

3. Installation of cover Throttle After setting the installation needles, locate the OPEN arrow at the top right position and insert the claws on the cover into the grooves on the case (indicated by in the expanded view of A part). Rotate the cover clockwise until it stops. Confirm that the cover is firmly secured. Solenoid

3. Power on the valve, then off again. Expanded view A Confirm that the detection nozzle does not suck up water of A part or cutting oil. Note) Do not rotate the throttle more than 4 turns or it will fall out. Finger

16-8-11 12 Series ISA2

Relation between Dial Scale and Detection Distance Test procedure and conditions Dial scales when the detection nozzle is under the following conditions; Supplied pressure: 100 kPa Piping: ø6 x ø4 tubing, 5 m in length.

Results of measurement Note 1) Relation between the detection distance and set dial scales Note 2) (Scale numbers) ISA2-G ISA2-H Detection nozzle diameter Detection nozzle diameter Detection distance Detection distance ø1.0 ø1.5 ø2.0 ø1.0 ø1.5 ø2.0 0.05 mm 0.3 to 0.7 0.9 to 1.4 0.3 to 0.7 0.1 mm 1.1 to 1.5 2.4 to 2.8 2.6 to 3.4 0.10 mm 1.1 to 1.5 2.3 to 2.8 2.0 to 2.5 0.2 mm 2.4 to 2.9 4.5 to 5.1 5.4 to 6.4 0.15 mm 1.9 to 2.3 3.4 to 4.1 3.7 to 4.6 0.3 mm 3.0 to 3.5 5.5 to 6.3 7.0 to 8.3

0.20 mm 2.5 to 3.0 4.4 to 5.5 5.3 to 7.0 0.4 mm 3.3 to 3.8 6.0 to 7.0 7.9 to 9.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 0.25 mm 3.0 to 3.5 5.2 to 7.0 6.6 to 10.7 0.5 mm 3.5 to 4.0 6.5 to 7.5 8.6 to 10.7

Average variation per scale (Detection distance [mm]) ISA2-G ISA2-H Detection nozzle diameter Detection nozzle diameter Detection distance Detection distance ø1.0 ø1.5 ø2.0 ø1.0 ø1.5 ø2.0 0.05 mm 0.010 0.005 0.006 0.1 mm 0.008 0.004 0.003 0.10 mm 0.007 0.004 0.003 0.2 mm 0.008 0.005 0.004 0.15 mm 0.010 0.005 0.004 0.3 mm 0.025 0.011 0.007 0.20 mm 0.010 0.005 0.003 0.4 mm 0.046 0.019 0.011 0.25 mm 0.010 0.007 0.003 0.5 mm 0.050 0.021 0.012 Note 1) This data provides reference values as a guide only, this should not be viewed as a guarantee of our products performance. Note 2) Set dial scales are as follows;

0.2

Scale

Between each major scales, it is sub divided into ten A scale smaller settings (for example, between 2.0 to 3.0—2.1, 2.2, 2.3 etc.), settings are possible at each increment.

3 0

6 9

16-8-12 13

Air Catch Sensor Series ISA2

∗ When the SUP port is on the left, the stations are sequentially Dimensions: Centralized Wiring Type numbered from the side of the terminal block box.

With bracket L1 3 60 38 L2 38 5 Ter minal block box LED level meter

End plate L End plate R

3 0 3 0 3 0 ZSE ISE P P P ULL SET ULL SET ULL SET 6 9 6 9 6 9 81 Setting dial

0.2 0.2 0.2 0.3 0.3 0.3 PSE 0.1 0.1 0.1

0.4 0.4 0.4 0 MPa 0 MPa 0 MPa Pressure gauge Z 12 I SE3 12 21 Bracket 24 PS

5.5 6.5 L3 SUP port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 24 36 Rc, NPT, G 1/8 Z 1 I SE 2 OUT 3 36 OUT 2 OUT 4 OUT 1 ZSP OUT 5 Left Right ∗ Stations 1 n ISA2 Stations 1 2 3 4 5 6 L1 106 144 182 220 258 296 IS L2 38 76 114 152 L3 38 76 114 152 190 DC () OUT 6 34 63 (Max. 65) 63 (Max. ZSM 17 DC (+)

39 5 Detection port M4 x 8 PF2 19 Rc, NPT, G 1/8 (With HW, SW) Terminal block box wiring diagram For the bracket attachment IF Seal conduit entry position, refer to page 16-8-16. (ø21) Data With DIN rail L1 3 60 38 L2 38 5 Ter minal block box LED level meter

End plate L End plate R

3 0 3 0 3 0

P P P ULL SET ULL SET ULL SET 6 9 6 9 6 9 81

0.2 0.2 0.2 0.1 0.3 0.1 0.3 0.1 0.3

0.4 0.4 0.4 0 MPa 0 MPa 0 MPa 18 12 Pressure gauge SUP port 20.5 Rc, NPT, G 1/8 DIN rail mounting 5.25 bracket DIN rail center 11.2 L3 L4 24 OUT 3 L5 OUT 2 OUT 4 OUT 1 Right OUT 5 Left ∗ Stations 1 n

Stations 1 2 3 4 5 6 L1 106 144 182 220 258 296 L2 38 76 114 152 L3 38 76 114 152 190 DC () 34

OUT 6 65) 63(Max.

17 L4 120 162.5 200 237.5 275 312.5 DC (+) L5 135.5 173 210.5 248 285.5 323 39 19

9.8 Detection port Terminal block box wiring diagram Seal conduit entry Rc, NPT, G 1/8 (ø21)

16-8-13 14 Series ISA2

Dimensions: Individual Wiring Type

With bracket L1 38 L2 38 LED level meter 3 5 Lead wire connector End plate L End plate R

3 0 3 0 3 0

P P P ULL SET ULL SET ULL SET 92 6 9 6 9 6 9 81 Setting dial 0.2 0.2 0.2 0.1 0.3 0.1 0.3 0.1 0.3

0.4 0.4 0.4 0 MPa 0 MPa 0 MPa 12 12

21 Bracket

SUP port Plug Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 24 6.5 L3 Pressure gauge Rc, NPT, G 1/8 5.5 24 36 36

Left Right Stations 1························· n Stations 1 2 3 4 5 6 L1 46 84 122 160 198 236 L2 38 76 114 152 L3 38 76 114 152 190 34 63(Max. 65) 63(Max. 17 5 19 Detection port M4 x 8 For the bracket attachment Rc, NPT, G 1/8 (With HW, SW) position, refer to page 16-8-16. With DIN rail

L1 3 38 L2 38 5 LED level meter Lead wire connector End plate L End plate R

3 0 3 0 3 0

DIN rail P P P UL L SET UL L SET UL L SET

92 Setting dial 6 9 6 9 6 9

center 81

0.2 0.2 0.2 0.1 0.3 0.1 0.3 0.1 0.3

0.4 0.4 0.4 0 MPa 0 MPa 0 MPa 18 12 SUP port Pressure gauge Rc, NPT, G 1/8 20.5 Plug 24 DIN rail mounting bracket L3 5.25 11.2 L4 L5

Electrical entry dimensions Left Right Straight union Right angle Stations 1························· n

Stations 1 2 3 4 5 6 L1 46 84 122 160 198 236

41 L2 38 76 114 152 32.2 34 L3 38 76 114 152 190 63 (Max. 65) 63 (Max.

17 L4 62.5 120 162.5 200 237.5 275 L5 73 135.5 173 210.5 248 285.5 The direction of a right angle Detection port

connector cannot be changed. 9.8 19 Rc, NPT, G 1/8

16-8-14 15

Air Catch Sensor Series ISA2

Dimensions: With Control Unit SUP port on the left

3 3 Throttle needle ZSE

SUP port P P ULL SUP port ULL ISE Rc, NPT, G 1/4 6 Rc, NPT, G 1/8 6 118 0.1 0.1 PSE 0.1 0.05 0.15 143 144 0 0 0.2 0 MPa Z

178 I SE3 DIN connector Manual lock 64.4 PS

82 Conduit terminal Conduit terminal ISA2 10 97 40 42 IS ZSM With regulator + 2 port solenoid valve With 2 port solenoid valve PF2 IF Data SUP port on the right

97 Conduit terminal Conduit terminal 82

DIN connector DIN connector

0 0

T SE SET 9 9

0.3 162 0.3 0.1 0.05 0.15 0.4 0.4 0.2 0 MPa 133 128 103

SUP port 64.4 Rc, NPT, G 1/8 Throttle needle SUP port Rc, NPT, G 1/8

42 10 40 25

With regulator + 2 port solenoid valve With 2 port solenoid valve

16-8-15 16 Series ISA2

Bracket Mounting Position

With 2 stations, the bracket is mounted on the second sensor from the left. 12 Left 12Right 12

MPa MPa MPa MPa MPa MPa

With n stations, the bracket is mounted on the first and “n” th sensor from the left.

12 n Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

MPa MPa MPa

Addition of Manifold Stations

1. Disassembly 1. Loosen the screws and remove the 2 mounting brackets on the front and back side. 2. Disassemble the switch carefully so that the O-ring on the SUP port will not be detached. End plate removal Slot for removal

Hook the fingers on the top and bottom removal grooves to pull out the plate. Existing joint brackets It can be removed by pulling horizontally.

2. Insertion Recess Protrusion 1. Fit seal for additional station (ISA-7-B) to the recess of the SUP port of the additional switch. 2. Fit the protrusion of the additional switch into the existing switch. 3. Mount joint brackets (ISA-3-A) at 2 positions. Note) Perform temporary tightening of screws. 4. Confirm that the recess of the SUP port of the existing switch has seal for additional station attached. 5. Fit the protrusion of the existing switch into the recess of the additional switch. Existing joint brackets Joint brackets (ISA-3-A) 6. Mount the existing joint bracket. Note) Perform temporary tightening of screws. The switch for adding stations 3. Assembly 1. Tighten the joint brackets with the prescribed tightening torque of 1.2 N⋅m. 2. Arrange pneumatic piping and confirm that there is no air leakage from new joints.

16-8-16 17

Air Catch Sensor Series ISA2

Parts List

End plate R ISA-6-B

Terminal block box ISA-11-L

ZSE ISE PSE

Z Combination I SE3 bracket End plate L ISA-3-A Right ISA-6-A PS Seal for additional station Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z 1 ISA-7-B SE Throttle I 2

2 port solenoid valve ZSP

Spacer ISA2 Regulator Y20 IS

Terminal block box ZSM ISA-11-L (Centralized wiring/Supply port left) PF2 ISA-11-R (Centralized wiring/Supply port right) IN IF

Left Data

Spacer Seal for additional station End plate L End plate R Y20 ISA-7-B ISA-7-A ISA-6-A ISA-6-B When 2 air catch sen- When a 2 port solenoid sors are connected or valve is connected to the when a 2 port solenoid right: valve is connected to the left:

Joint bracket Lead wire with connector (Individual wiring type) Bracket DIN rail mounting bracket ISA-3-A ISA-8-A ISA-8-B ISA-4-A ISA-9-A A pair consists 1 set.Straight, 5 m Right angle, 5 m

With mounting screw 2 pcs.

16-8-17 18 Series ISA2

DIN Rail ISA-5- L Applicable models 1.25 8 4.5 7.5 Part no. L Individual wiring type Centralized wiring type ISA-5-1 73.0 IISA2P-1 ISA-5-2 135.5 IISA2P-2 IISA2S-1 ISA-5-3 173.0 IISA2P-3 IISA2S-2 ISA-5-4 210.5 IISA2P-4 IISA2S-3 35 35

5.5 ISA-5-5 248.0 IISA2P-5 IISA2S-4 ISA-5-6 285.5 IISA2P-6 IISA2S-5 ISA-5-7 323.0 IISA2S-6 Pressure Gauge for Air Catch Sensor

Square embedded pressure gauge Round pressure gauge Connection GC3 44AS G36 01 thread Notation Maximum Nil R 1/8 Maximum pressure P NPT 1/8

Thread type Port size Voltage 02 Rc 1/4 CE Nil Rc 1 100 VAC 02N NPT 1/4 marked N NPT 2 200 VAC 02F G 1/4 F G 3 110 VAC Option (The shape of pressure gauge) Note 2) 4 220 VAC Throttle Nil None 5 24 VDC Nil Without throttle and manual lock E Square embedded pressure gauge (With limit indicator) 6 12 VDC S With throttle G Note 1) Round pressure gauge (With limit indicator) 36 230 VAC B With manual lock Note 1) The pressure gauge port is Rc 1/8. The pressure gauge K With manual lock and throttle is included in the package (not assembled). Electrical entry Note 2) Order individually when 0.4 MPa gauge is required. D DIN connector Option specification DL DIN connector (With light) Nil None D0 DIN connector (Without connector) N Non-relieving T Conduit terminal R Flow direction: Right to left TL Conduit terminal (With light) Z Note 1) Unit representations on the label and pressure gauge are PSI and F When specifying more than one option, enter symbols first in numerical, then Standard Specifications in alphabetical orders. Valve type Direct operation poppet Note 1) Compatible with thread type NPT. Under the New Measurement Law, Fluid Air, Inert gas this type is only sold outside Japan. (The SI unit is used inside Japan.) Withstand pressure MPa 2.0 In all cases, with the exception of NPT, add “-X2025” at the end of the order number. Example) AR20-02E-1-X2025 Body material Al Seal material HNBR Standard Specifications Ambient temperature C 20 to 60 Model AR20 Fluid temperature C 10 to 60 (No freezing) Port size 1 4 Enclosure Dustproof and jetproof (Equivalent to IP65) Fluid Air Atmosphere Environment with no corrosive or explosive gas Valve specifications Proof pressure 1.5 MPa Valve leakage cm3/min (ANR) 0.2 or less Maximum operating pressure 1.0 MPa Mounting orientation Free Set pressure range 0.02 to 0.2 MPa Vibration resistance/Impact resistance m/s2 Note 2) 30/150 or less Gauge port size Note 1) 1 8 Rated voltage 24/12 VDC, 100/110/200/220 VAC (50/60 Hz) Set pressure + 10% rated voltage Relief pressure 0.05 MPa Allowable voltage fluctuation {at relief flow of 0.1 /min(ANR)} B type l Type of coil insulation Ambient and fluid temperature 5 to 60 C (No condensation) Power consumption DC VCA2: 6.5 W Construction Relieving type Apparent Note 1) 50 Hz AC VCA2: 7.5 VA Weight (kg) 0.29 Coil specifications power 60 Hz Pressure Round Note 2) G36-2-01 0.2 MPa Note 1) Since the AC specifications include a rectifying device, there is no difference gauge Square embedded Note 3) GC3-2AS between the apparent power required for starting and holding. Note 1) The type with square embedded pressure gauge does not have connection. Note 2) Vibration resistance: No malfunction resulted in a one-sweep test in a 10 to Note 2) The “” in the part number of the round pressure gauge indicates the type of 300 Hz range in the axial and right angle directions of the main valve and connection threads, no symbol for R and N for NPT. Contact SMC for supply of the armature, for both energized and de-energized states. connection thread type NPT and the pressure gauge of PSI unit representation. Shock resistance: No malfunction resulted in an impact test using a drop im- Note 3) With an O-ring (1 pc.) and mounting screws (2 pcs.). pact tester. The test was performed in the axial and right angle directions of the main valve and armature, for both energized and de-energized states. 16-8-18 19 Series ISA2 Specific Product Precautions 1 Be sure to read before handling.

Air Catch Sensor Series ISA2 Pressure Source Operating Environment Caution Warning 1. Supply air Since the orifice of the air catch sensor is small, prevent 1. Do not use in an environment where vibration or foreign matter from entering the equipment. For this purpose, ZSE impact occurs. Use a bracket in an environment use supply air that is dry and filtered 5 mm or better. ISE with vibration exceeding 30 m/s2. 2. Operating pressure PSE 2. The enclosure of the switch conforms to IP66 Since the product adopts a semiconductor pressure sensor, and that for the solenoid valve to IP65. The keep the operating pressure not larger than 0.2 MPa. Z SE3 pressure gauge and the regulator have open I 2 Port Solenoid Valve Series VCA constructions. Take proper protection PS measures in an environment where water Precautions on Design Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy splashes, oil or spatters from welding may ZSE 1 adhere to the product. Warning I 2 3. Since steel piping lacking flexibility is easily 1. Energized continuously ZSP affected by moment loads or propagation of Please consult with SMC if the product is to be energized vibration, employ flexible tubing, etc., to continuously for long periods of time. ISA2 prevent interactions of such factors. Selection 4. Although CE accredited, this air catch sensor is IS not equipped with surge protection against Caution lightning. Necessary counter-measures for 1. Leakage voltage ZSM possible lightning surge should be fitted to Take special precautions if a resistor is used in parallel with system components as required. the switching element or a C-R element (for surge voltage PF2 5. Do not operate in locations having an protection) is used for protection of the switching element. The atmosphere of flammable, explosive or valve may fail to turn off due to leakage current flowing IF corrosive gases, which can result in fire, through the resistor or C-R element. explosion or corrosion. The air catch sensor Switching element Data does not have an explosion proof rating. OFF Caution C R 1. When an air catch sensor is contained in a box, Valve oltage Power v supply

provide an air outlet to constantly keep the Leakage atmospheric pressure inside the box. Leakage voltage Internal pressure rises will hinder normal air discharge and may lead to possible malfunction. AC coil DC coil 2. The air outlet is provided on the setting dial 10% or less rated voltage 2% or less rated voltage section of the air catch sensor. Do not turn off air supply to the switch if water or cutting oil splashes around the setting dial. Mounting Mounting Warning 1. Do not use the air catch sensor if the leakage Caution amount increases or the equipment does not 1. If the detection nozzle is exposed to splashes operate properly. of water or cutting oil, do not allow backflow After installation, connect compressed air and electricity and from the detection nozzle to the switch body. conduct an appropriate functionality inspection to confirm that Install the switch body at a position higher the air catch sensor is installed properly. than the detection nozzle wherever possible. 2. Do not apply external force to the coil. Apply a wrench to the exterior surface of the piping joint at the Piping time of tightening. 3. Do not use heat insulators, etc. to keep the Caution temperature at the coil assembly. 1. Piping equipment Do not use a tape heater for freeze prevention except on the In the piping between the switch body and the detection piping and body. If may cause the coil to burn. nozzle, do not use equipment or fittings that can possibly cause leakage or serve as resistance. Do not use One-touch fittings in an environment where the air catch sensor is exposed to water or other liquid.

16-8-19 20 Series ISA2 Specific Product Precautions 2 Be sure to read before handling.

2 Port Solenoid Valve Series VCA

Disassembly and Assembly Wiring Caution Caution • Before the product is disassembled, DIN connector (B type only) shut off the power and pressure The internal wiring of the DIN connector is illustrated below. Connect supply and exhaust the residual each terminal to the power supply. pressure.

Mounting

+ • Disassembly procedure 1: + 3 screw 1 1. Remove the top mounting screws. ( ) 2. Remove the solenoid coil, spring 2 2: (+)

Fitting cable Note) Washer (Cable O.D. Body ø6 to 12 mm) Rubber seal

Small bind screw Proper Tightening Torque N⋅m ⋅ VCA27 0.4 to 0.5 Tightening torque 0.5 to 0.6 N m Gasket

Note) With a cable O.D. ø9 to 12 mm, hollow the rubber sealing before use.

Wiring Conduit terminal In case of a conduit terminal, refer to the marks below for wiring. Caution • Tighten each part with an appropriate tightening torque shown 1. Use electrical wires with a conductive sectional below. 2 area of 0.5 to 1.25 mm . Make sure that no • Seal the piping part (G 1/2) securely with a dedicated electric excessive force is applied to the wires. wiring pipe, etc. 2. Adopt an electrical circuit which will not cause Terminal cover chattering at the contact. Round head combination screw 3. The voltage variation must stay within the –10% M3 A G 1/2 ⋅ to +10% range of the rated voltage. In case Tightening torque 0.5 to 0.6 N m Tightening torque ⋅ importance is attached to response 0.5 to 0.6 N m

characteristics due to use of a DC power source, Mark 2 1 + Mark keep the variation within the –5% to +5% range. - - + The voltage drop is the value at the lead wire to A which the coil is connected.

Round head combination screw M3 tightening torque 0.5 to 0.6 N⋅m Conduit terminal View A-A (Internal connection diagram)

16-8-20 21 Series ISA2 Specific Product Precautions 3 Be sure to read before handling.

2 Port Solenoid Valve Series VCA Regulator Series AR

Electric Circuit Mounting and Adjustment Caution Warning 1. The adjustment knob must be handled manually. Use of tools may ZSE In case of series VC (B type coil) cause damage to the product. ISE Conduit terminal, DIN type connector 2. Check the inlet and outlet pressure indications on the pressure Rectifying gauge while setting. If the knob is turned to excess, it may cause PSE DC circuit ZNR AC circuit ZNR device 1 (+, -) internal parts to fracture. 1 Z 3. Since products for 0.02 to 0.2 MPa settings come with a pressure I SE3 gauge for 0.2 MPa, do not apply pressure exceeding 0.2 MPa. It SOL. SOL. may cause damage to the pressure gauge. PS 2 (-, +) 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Without indicator light Without indicator light Z 1 Caution I SE 2 Conduit terminal, DIN type connector 1. Unlock the knob before pressure adjustment and lock it again when DC circuit AC circuit Rectifying ZSP ZNR ZNR device the adjustment is over. 1 (+, -) 1 Incorrect procedure may cause damage to the knob or lead to the outlet pressure fluctuation. ISA2 SOL. SOL. • Pull the adjustment knob to release the lock. An orange colored line is provided at the bottom of the adjustment handle for visual IS 2 (-, +) 2 checking. Indicator light Indicator light • Push the pressure regulation knob to engage the lock. If it does ZSM With indicator light With indicator light not lock easily, turn the knob slightly clockwise or counterclockwise until the orange colored line goes out of sight. 2. When the product is installed, leave a space of 60 mm on the side PF2 Maintenance of the valve guide (opposite to the knob) for maintenance and inspection. IF Warning 1. Low-frequency operation Data Perform valve switching at least every 30 days to prevent malfunction. Also, conduct a periodic inspection at intervals of approximately 6 months to use the product in its best condition.

Manual Operation Warning How to operate manually Locking type (tool required)

To open valve: Rotate to the right by 90° using a flat head screwdriver. It will still hold open even when the driver removed. To close valve: Rotate to the left by 90° to achieve the former closed position. Electrical operations should be undertaken when the valve is closed.

Valve closed (vertical slit) Valve open (horizontal slit)

16-8-21 For details about certified products 1 conforming to international standards, visit us at www.smcworld.com.

Mechanical Style Pressure Switch Series IS1000

Specifications ZSE ISE Model IS1000-01 PSE Long service life: Fluid Air/Inert gas 5 million cycles Z Proof pressure 1.0 MPa I SE3 Max. operating pressure 0.7 MPa PS Regulating pressure range (at OFF point) 0.1 to 0.4 MPa Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Hysteresis 0.08 MPa or less Z 1 I SE 2 Error of scale ±0.05 MPa Repeatability ±0.05 MPa ZSP Contacts 1a ISA2 Wiring specifications Grommet, Lead wire length 0.5 m (Standard) Fluid Air IS Ambient and fluid temperature –5 to 60 C (No freezing) ° ZSM Port size R 1/8 Weight 74 g PF2 Switch Characteristics IF IS1000-01 IS1000-01-X202 Max. contact capacity AC 2 VA, 2 W DC Data Voltage 24 VAC/DC or less 48 VAC/DC 100 VAC/DC Max. operating current 50 mA 40 mA 20 mA Impact resistance 30 G

Electrical Circuit Operating Pressure Range Up to 100 VAC/DC ON pressure OFF pressure 0.5

0.4 Hysteresis 0.3

Reed switch 0.2

0.1 Operating pressure (MPa)

0 0.1 0.2 0.3 0.4 Set pressure scale (MPa) How to Order IS1000 01 S

Port size Seal Option 01 R 1/8 Nil None X201 Lead wire length 3 m N01 NPT 1/8 S With seal Regulating pressure range X202 0.1 to 0.6 MPa Lead wire length 3 m X215 Regulating pressure range 0.1 to 0.6 MPa

16-9-1 2 Series IS1000

Construction 5 500 ≅ t

u 0.1 0.2 y 0.3 0.4

50 20 i

58.5 MPa q Component Parts !0 IS1000

Precautions Be sure to read before handling. Refer to pages 16-14-3 and 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. Wiring Pressure Source Warning Warning 1. Connect load before connecting with power 4. How to connect contact protection box 1. Do not use with corrosive gases or fluids. source. Connect the lead wires from the body and the 2. Never use in an environment where flamma- 2. In the case of induction load or lead wire ex- contact protective box side indicated ble fluid or gas is used. Since this is not an ceeding 5 m long, the following contact protec- “SWITCH”. Lead wire should be as short as explosion-proof construction, it may lead to an tion box should be used. It may lead to dam- possible, within 1 m. explosive disaster. age to a switch. 5. Dimensions of lead wire 3. Avoid use in vacuum applications. Enclosure: ø 3.4 Part no. Voltage Lead wire length Switch may be imploded. Insulator: ø 1.1 CD-P11 100 VAC Switch side: 0.5 m Conductor: ø 0.64 Pressure Setting CD-P12 24 VDC Load side: 0.5 m Mounting/Piping Warning 1. Scale of switching set display is the set value Warning at the pressure drop. 3. Internal circuit of contact protection box 2. When detecting ON-pressure signal, note that 1. When changing piping by hand, hold body. set pressure on scale plate plus ON-OFF differ- CD-P11 Electrical wire must not be subjected to exces- Brown ential (Hysteresis) will be ON-pressure signal. sive force. 3. Pressure display on the scale plate is just as a Surge Choke coil It may cause a malfunction or damage. reference guide. For an accurate setting, absorber 2. Do not drop nor apply excessive force. measure it by pressure gauge. Blue It may cause a malfunction or damage. 3. Tighten IS1000-01 applying the spanner on Operating Environment CD-P12 the PT fitting part. Warning (+) Brown 1. Avoid using a switch in a magnetic environ- Choke coil ment. It may cause a malfunction. Condenser 2. Do not use in such an environment, where Resistance (–) Blue water or oil is splashed. Since it is the open type construction, if water or oil make an ingress into the internal parts, the electric 4. Mounting direction is available in either circuit will be corroded and may result in a horizontal or perpendicular. malfunction or damage. 3. Avoid vibration. Vibration may cause malfunction or may cause setting to be incorrect.

16-9-2 For details about certified products 1 conforming to international standards, visit us at www.smcworld.com.

Pneumatic Pressure Switch Series IS3000

Model ZSE ISE Model Piping method Micro switch type Min. applicable load PSE Can be used for micro load, IS3000-02 Rc 1/4 thread Standard 5 VDC 160 mA around 10 mA e.g. relays, pro- IS3100 Gasket piping ZSE3 IS3010-02 Rc 1/4 thread I grammable controllers, etc. Micro load 5 VDC 1 mA IS3110 Gasket piping PS

Micro Switch Ratings Data

0 0 Model IS3 1 00 IS3 1 10 Non inductive (A) Inductive load (A) Non inductive (A) Load Load resistance Light load Inductive load Motor load Load resistance IS3100 IS3000-02 Circuit (Gasket piping) (Rc 1/4 thread) Rated N.C. N.O. N.C. N.O. N.C. N.O. N.C. N.O. N.C. N.O. voltage (V) 125 AC 5 1.5 0.7 3 2.5 1.3 0.1 250 AC 3 1 0.5 2 1.5 0.8 — 30 DC 4 2 3 3 0.1 125 DC 0.4 0.05 0.4 0.05 — Insulation resistance: 100 MΩ or more at 500 VDC by megameter Voltage resistance: 1500 VAC, 50 / 60 Hz for 1 min. (When using switch with neon light: 1000 VAC for 1 min.)

How to Order IS3110 IS3010-02 (Gasket piping) (Rc 1/4 thread) IS3 002L10 0

JIS Symbol Piping method Indicator light 0 Rc 1/4 thread Nil None 1 Gasket piping L1 With neon light/110 VAC L2 With neon light/220 VAC Micro switch load type L5 LED/24 VDC 0 Standard Note) Micro load type: Not available “L2” option. 1 Micro load Port size Nil With gasket 02 Rc 1/4 N02 NPT 1/4

16-9-3 2 Series IS3000

Construction IS3000-02/3010-02 Precautions (Rc 1/4 thread) q Be sure to read before handling. Refer Locking nut w to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to t 16-1-13 for Precautions on every series.

e Wiring Warning 1. Light assembly for 24 VDC has 2 terminals and polarity. One is “+” for red load wire and the other is “–” for black load wire. Light will r not light up if wired incorrectly. 2. Light ass'y for 24 VDC has 3 mA of current leakage. Connect the LED directly to the power supply if the input of the PLC sees the

Relay CR LAMP GOES OUT C. N.O. WHEN PRESSURE CR RISES. IN C. N.C. Ex. 2) When using contact “b” only LAMP LIGHTS WHEN PRESSURE CR C. N.C. RISES. Component Parts Caution No. Description Material 1. In the case of using a switch with indicator q Adjusting screw Rolled steel light, wire the indicator light per the following: w 2. Please put the enclosed seal of “LAMP LIGHTS IN Setting spring Rolled steel WHEN PRESSURE RISES.” or “LAMP GOES e Lever Rolled steel OUT WHEN PRESSURE RISES.” on the r Piston Polyacetal equipment where it is easy to see. t Micro switch — Ex. 3) + – u Plug y Bottom cover Aluminum die-cast u ∗ O-ring NBR PLC 3. Thread using for the terminal is M3. ∗ Only for gasket mounting style Dimensions Mounting/Piping Caution 1. Allow the space required for maintenance. Otherwise, maintenance or pressure adjustment cannot be made, since the adjusting screw is on the top of the body. SMC 2. Mounting is possible in either horizontal or vertical orientations. Pressure Setting Indicator light Caution 1. Turn the adjusting screw on the cover to set the pressure with a flat head screwdriver. Fix the screw with locking nut after adjusting. Hysteresis is a fixed value. Increase the setting value by turning to “+” (H) side. Decrease the setting value by turning to

70 “–” (L) side. For IS3100, 3110 2. Use a flat head screwdriver to set the Gasket piping side pressure. Then, lock it in place with the lock nut. Otherwise the set pressure will change. 3. The hysteresis (the ON-OFF range) is fixed. 4. Set pressure scale is the value when pressure increases. 5 7 2-ø5.5 19 (Hex.) 15 18 ø5 Operating Environment Mounting hole 1 5 16 19 G /2 48 ø12.2 Warning Electric wiring hole 22 1. Do not use in an environment, where water or 58 oil is splashed. Because it is the open type Other construction. If water or oil were to make an ingress, the electrical circuit would be Caution corroded and result in a malfunction or 1. Spare part is LIGHT ASSEMBLY only. If it is damage. necessary to repair, please contact SMC. 2. Operating fluids are either air or inert gas Light Assembly exclusively. Never use liquids. 3. Never use in an environment where flamma- For 110 VAC: 1530118-1 220 VAC: 1530118-2 ble fluid or gas is used. 24 VDC: 1530118-5 Use of this product near flammable materials Able to convert into L1, L2, L5 by changing could cause an explosive situation. This each light assembly. product is not explosion-proof. 16-9-4 1

General Purpose Pressure Switch Series ISG

Model/Specifications ZSE ISE ISG General Purpose Switch is Model Operating Hysteresis Proof Body material pressure range adjusting range pressure Repeatability in contact with Hysteresis Electrical PSE Open type (MPa) scale plate entry widely used in machine tools, (Non-waterproof) Dripproof (MPa) (MPa) (MPa) fluid material Z industrial machines, compressors, ISG110-030 ISG210-030 Brass, Phosphor bronze None I SE3 chemical plants, power plants, ISG110-031 ISG210-031 Brass, Phosphor bronze Yes (Open type) 0.02 to 0.3 0.01 to 0.2 1.0 ±0.006 PS ISG111-030 ISG211-030 Stainless steel 316 None Grommet machineries for ships, and for Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy ISG111-031 ISG211-031 Stainless steel 316 Yes ZSE 1 automatic pressure control such I 2 ISG120-030 ISG220-030 0.02 to 0.35 Brass, Phosphor bronze None (Dripproof)

as hydraulic, water, liquid and ISG120-031 ISG220-031 0.02 to 0.45 Brass, Phosphor bronze Yes JIS F 8801 ZSP 0.05 to 0.7 1.5 ±0.014 atmospheric pressure. ISG121-030 ISG221-030 0.02 to 0.35 Stainless steel 316 None Cable gland ISA2 ISG121-031 ISG221-031 0.02 to 0.45 Stainless steel 316 Yes Type A ISG130-030 ISG230-030 0.03 to 0.4 Brass, Phosphor bronze None 20a IS

ISG130-031 ISG230-031 0.03 to 0.6 Brass, Phosphor bronze Yes 20b ∗ 0.1 to 1.0 1.5 ±0.02 ZSM ISG131-030 ISG231-030 0.03 to 0.4 Stainless steel 316 None 20c ∗ ISG131-031 ISG231-031 0.03 to 0.6 Stainless steel 316 Yes PF2 ISG190-030 ISG290-030 –10 to Brass, Phosphor bronze None 7 to 53 kPa 0.5 ±2 kPa ISG191-030 ISG291-030 –100 kPa Stainless steel 316 None IF

Ambient and fluid temp.: 5 to 80°C (No freezing), Contacts: 1a1b, 2ab (Made to Order), Port size: R 3/8, Weight: 1.3 kg (Open type), 1.5 kg (Dripproof) Data ∗ Option ISG190 ISG130

Fluid JIS Symbol Type of operating fluid is limited by the material of wetted parts. Body material in contact with fluid material Fluid Bellows Fluid entering part Non corrosive water/Air/Liquid/Inert gas Phosphor bronze Brass

Fluids which do not corrode stainless steel 316 e.g. steam (150°C or less) ∗ Stainless steel 316 Stainless steel 316 ∗ Ambient temperature: 80°C or less.

Contacts Rated Voltage

1a1b Snap type 2ab Snap type Rated Non inductive (A) Inductive load (A) (Standard) voltage (V) Load resistance Light load Inductive load Motor load N.C. N.O. N.C. N.O. qe wety AC 110 12 2 12 3 220 10 1 10 1.5 440 6 1 3 1

w r q r 550 5 0.8 2 0.5 a b CC DC 24 3 2.5 3 2.5 contact contact 48 1.5 1.2 1.5 1.25 When rising pressure When rising pressure q – w = ON q – e r – y = ON 110 0.5 0.25 0.5 0.2 e – r = OFF q – w r – t = OFF 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 MΩ or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min.

16-9-5 2 Series ISG

Construction Precautions Be sure to read before handling. q u Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and w Common Precautions on the e 1 3 products mentioned in this catalog, i and refer to pages 16-1-11 to 16-1- LOW 13 for Precautions on every series. r 2 4 o Selection t !0 !1 Caution y 1. Select the model taking into consideration the !2 material suitable for the operating fluid. Type of operating fluid is limited by the material of !3 wetted parts. Please contact SMC for materials not specified. !4

ISG 1031 0 0W Mounting/Piping Caution Multi- 1. Mounting is possible in either horizontal or purpose vertical orientations. pressure Contacts/Bulb gland switch Nil 1a1b (Standard) Pressure Source Contact W 2ab Warning Enclosure Nil Type A 20a (Standard) Bulb 1. In the case of using switch in any liquid, install 1 Open type (Non-waterproof) B Type A 20b gland a water hammer or surge reducer to prevent 2 Dripproof (Equivalent to IP44) C Type A 20c the damage to switch caused by surges or Note) Symbol must be ordered pulsation pressure. Operating pressure range alphabetically like “-BW”. 1 0.02 to 0.3 MPa Hysteresis scale plate Pressure Setting 2 0.05 to 0.7 MPa 0 None 3 0.1 to 1.0 MPa 1 Hysteresis scale plate Caution 9 –10 to –100 kPa Note) Not available for ISG 1. Set the pressure by adjusting the setting 19/29 type pressure adjusting bolt to the right to increase Material and to the left to decrease. Port size 0 Copper alloy 2. Adjust the hysteresis with hysteresis adjusting 3 bolt. In case of switch with scale plate, adjust 1 Stainless steel 316 03 R /8 N03 NPT 3/8 the hysteresis with a flat head screwdriver tightening the adjusting bolt in the thread cap. Turn to the right to increase and to the left to Other Operating Environment decrease. 1. Never use in an environment, where 3. Hysteresis must be within the specified range Caution flammable fluids or gases are used. Since this in this catalog, operation may be unstable 1. Bellows assembly is available for mainte- product is not explosion-proof and may trigger when activated out of the specified range. nance. When replacing other parts, please an explosive disaster. 4. Scale plate is only for reference. Use the contact SMC, since it cannot be repaired by gauge to get the correct pressure value. user. 5. Set pressure scale at the value of the pres- Order Bellows assembly with the part number sure increase. as follows: Bellows assembly for ISG- (No other part numbers exist.) Ex.) Bellows assembly for ISG 110-030 16-9-6 3

General Purpose Pressure Switch Series ISG

Dimensions Open type ISG110 to 191-030 (Without hysteresis scale plate) ISG110 to 131-031 (With hysteresis scale plate)

Hysteresis adjusting bolt Hysteresis adjusting bolt Setting pressure adjusting bolt Setting pressure adjusting bolt ZSE ISE PSE

75 93 I SE3 110 110 173 173

≅ ≅ PS

18 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 8.5

8.5 Z 1 I SE 2 2.3 2.3 54 54 3-ø6.3

3-ø6.3 ≅ ≅ ZSP 23 20 20 26 3010 29 26 23 30 10 29 ISA2 99 77 99 77 ≅126 R 3/8 ≅126 R 3/8 IS ZSM PF2 IF Dripproof type ISG210 to 291-030 (Without hysteresis scale plate) ISG210 to 231-031 (With hysteresis scale plate) Data

Hysteresis adjusting bolt Hysteresis adjusting bolt Setting pressure Setting pressure adjusting bolt adjusting bolt 75 110 93 110 175 175 ≅ ≅ 18 8.5 8.5

30 2.3 2.3 56 3-ø6.3 30 56 ≅ 3-ø6.3 ≅ 20 26 23 339 29 26 23 20 339 29 99 79 99 79 126 ≅ R 3/8 ≅126 R 3/8

JIS F 8801 A type 20a JIS F 8801 A type 20a Cable gland Cable gland

16-9-7 4 Related Products: Pressure Switch with Neon Light

Specifications Easy operation by indicating Operating pressure range 0.1 to 1.0 MPa the operating status with a Hysteresis adjusting range 0.03 to 0.4 MPa neon light. Proof pressure 1.5 MPa Repeatability ±0.02 MPa Contacts 1ab (Neon light 1b)

Port size R 3/8 Electrical entry Grommet Weight 1.3 kg Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy ∗ Hysteresis scale plate is not available.

Model

Body material in contact Model Power supply for neon light Fluid with fluid material IS2761-103L1 110 VAC Non-corrosive water/ Internal Wiring Diagram 220 VAC Photophor bronze, Brass IS2761-103L2 Air/Liquid/Inert gas IS2761-103L9 24 VDC IS2761-1103L1 110 VAC 1 2 Liquid, which do IS2761-1103L2 220 VAC Stainless steel 316 not corrode stainless steel 316. 4 5 IS2761-1103L9 24 VDC

3 6

Dimensions 1.3: Power supply for neon light 4: Common 5: Normally closed 6: Normally open b point (4-5) becomes OFF. Neon light Setting pressure a point (4-6) becomes ON. adjusting bolt Neon light turns off.

Spare Parts “Bellows assembly” and “Light/Top cover Hysteresis

assembly” are available for maintenance. Order 75 adjusting bolt

them following the example below: (Component 110 parts’ number are not existed.) 175 Ex.) 1S2761 - Bellows assembly for 103L1 ≅ 1S2761 - Light and top cover assembly for 103L1 18 8.5 When replacing other parts, please contact SMC for repair, since it cannot be repaired by user. 2.3 3-ø6.3 56 ≅

26 23 20 1032 10 29 99 79 126 ≅ R 3/8

16-9-8 For details about certified products 1 conforming to international standards, visit us at www.smcworld.com.

Vacuum Switch Diaphragm Style Series ZSM1-115/121

Specifications ZSE ISE Model ZSM1-115 ZSM1-121 PSE Switch specifications Solid state Contact (Reed switch) Z Fluid Air/Inert gas I SE3 Max. operating pressure 0.5 MPa PS Regulating pressure range –27 to –80 kPa Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z 1 Hysteresis Max. 15 kPa Max. 20 kPa I SE 2 Repeatability ±10% or less ZSP Ambient and fluid temperature –5 to 60°C (No freezing) Supply voltage 4.5 to 28 VDC 100 VAC/DC or less ISA2 Indicator light ON: When output is ON. Lead wire 3 2 IS

1 Port size R /8 ZSM Weight 65 g PF2

Electrical Specifications IF ZSM1-115 Data Supply voltage 4.5 to 28 VDC Output (Open collector) 30 V, Max. 100 mA Current consumption 10 mA or less (24 VDC)

ZSM1-121 Supply voltage 100 VAC Operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC

How to Order ZSM1 1 15

Vacuum switch Lead wire length diaphragm style Nil 0.5 m (Standard) L 3 m

Switch/Voltage 15 Solid state 4.5 to 28 VDC 21 Contact (Reed switch) 100 VAC/DC

Connection 0 For mounting on ZM ejector 1 R 1/8 T1 NPTF 1/8

16-10-1 2 Series ZSM1

Internal Circuit Wiring

ZSM1-115 ZSM1-115

+ ········· Brown—Connect to the positive terminal of the Switch ( + ) power source to make the switch’s Brown main circuit operate. Black () + Output ····· Black — Connect to a load. Load ( ) (PLC input, + replay) of switch of switch – Main circuit Main circuit

– ········· Blue — Connect to the GND terminal of the Blue (–) power source.

ZSM1-121 Connection example with PLC In the case of common terminal is “ – ” negative Resistance Brown Brown ( + ) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy LED Black () PLC Zener diode Input terminal of switch Reed switch Main circuit Blue (–) Blue

– COM

– +

Dimensions

23 10

15 ZSM1-115 ZSM1-121 Pressure adjusting screw 500

Indicator light Indicator light 52.5

R 1/8

16-10-2 3

Vacuum Switch Diaphragm Style Series ZSM1

Precautions Be sure to read before handling. Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series.

Wiring Pressure Setting Warning Warning 1. Do not apply excessive pulling force on the lead wire. 1. Setting of vacuum pressure ZSE It may cause a malfunction or damage. Set the possible minimum pressure for adsorption when used for ISE 2. Wiring of ZSM1-121 adsorption confirmation. If setting the pressure lower than that, Switches may be connected in series, voltage drop will be switch becomes ON in case when adsorption is not complete. If PSE increased by the LED’s internal resistance (2 V drop per each). setting the pressure higher than that, switch does not become Use switches within the specified range of min. operating ON though it is absorbing workpieces properly. Z I SE3 voltage. 3. Diaphragm switches have no built-in contact protection circuits.

High vacuum PS Use switches with contact protection box (part no. CD-P11) with Supply pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy inductive loads or 5 m or more lead wire length. Steady adsorption ZSE 1 4. Internal circuit of contact protection box Setting pressure I 2 Unsteady adsorption CD-P11 Non adsorption ZSP Brown Atmospheric pressure 0 Surge Choke coil 2. Hysteresis ISA2 absorber Hysteresis is the pressure difference between the ON pressure Blue and the OFF pressure of the output signal. The set pressure is the pressure selected to switch from OFF to ON condition. IS 5. How to connect the contact protection box Connect the lead wires from the body and the contact protective ZSM box side indicated “SWITCH”. High vacuum

Lead wire should be as short as possible, within 1 m. Hysteresis Setting pressure ON PF2 OFF Installation/Piping IF Caution Atmospheric pressure 0 3. Number of rotations of pressure adjusting screw Data 1. When piping switch by hand, hold body. Electrical wire must not be subjected to excessive force. Number of rotations L H 2. Do not drop nor apply excessive force. 051015 18 23 It may cause malfunction or damage. 3. Tighten switch by applying the wrench on the fitting part. Turning it by applying a wrench on the main body may cause Applicable setting range damage to the product. –27 to –80 kPa 4. Mounting is possible in either horizontal or vertical orientation. Non-adjustable range Max. number of rotations are 18. Caution 1. How to Set Vacuum Pressure The pressure setting trimmer is used to set the on-pressure. Clockwise rotation increases the on-pressure setting. Pressure adjusting screw

Switch assembly

Pressure Source Indicator light Warning 1. Do not absorb water, etc. when using as an adsorption Operating Environment confirmation switch. It may result in a malfunction or damage. 2. Operating fluids are either air or inert gas exclusively. Warning It cannot be used with corrosive fluids. 1. Not able to use it under the influence of a magnetic field. Affected by the magnetic field, and result in a malfunction. 2. Do not use in such an environment where water or oil is splashed. Since it is the open type construction, if water or oil make an ingress into the internal parts, the electric circuit will be corroded and may result in malfunction or damage. 3. Never use switch in an environment where flammable fluid or gas is used. It may result in an explosive disaster, since it is not explosion- proof construction. 16-10-3 1

Digital Flow Switch Series PF2A/PF2W For Air For Water

Flow rate setting and monitoring are possible 1 with the digital display. Two types for different applications ZSE 2 Integrated and remote type displays ISE Three types of output: 3 Switch, accumulated pulse, and analog outputs. PSE Switching from real-time flow rate to ZSE3 4 accumulated flow is possible. I Two independent flow rate settings are possible. PS

For High Temperature For Air For Water Fluid (Water 90°C) IS 1 to 10 0.5 to 4 0.5 to 4 ZSM 5 to 50 2 to 16 2 to 16 PF2 10 to 100 5 to 40 5 to 40 20 to 200 10 to 100 IF 50 to 500 Data Integrated Type 150 to 3000 300 to 6000 For Water Series PF2W 600 to 12000 Application examples

Flow control of N2 gas to prevent Flow control of cooling water for Flow control of pressurized detection camera shimmering and wafer temperature regulation and cooling water for welding gun lead frame oxidation high frequency electric power supply

Main line flow control The accumulated pulse output function (100 l/pulse) enables remote monitoring of accumulated flow. 100 l/pulse M/C

A COM B COMDC12V GND F.G. R.S. HOLD COM BANK1 BANK2 : MULTI COUNTER CEU5 UP

COUNT PRESET FUNC. Make possible the monitoring LEFT RIGHT M/C DOWN of air flow from the main line MODE SEL. SET to each branch line. AC100~240VCOM OUT1OUT2OUT3OUT4OUT5S.STOP RD SD SG RS-232C M/C Pulse counter Flow control for each branch line

16-11-5 2

For Air P. 16-11-7

50 l/min 500 l/min 12000 l/min 10 l/min 200 l/min 6000 l/min 100 l/min 3000 l/min

For Water P. 16-11-17

16 l/min 40 l/min 100 l/min 4 l/min

Integrated Remote type Flow rate Output specifications Port size (Rc, NPT, G) measurement display type Accumulated Display unit Sensor unit range l/min Switch output Analog output pulse output 3/8 1/23/4 1 PF2W704 PF2W504 0.5 to 4 720 PF2W30 520 2 to 16 740 540 5 to 40 711 33 511 10 to 100 : Output from integrated display type and remote display unit type : Output from remote sensor unit type

For High Temperature P. 16-11-26 Fluid (Water 90°C)

Integrated Remote type Flow rate Output specifications Port size (Rc, NPT, G) measurement display type Accumulated Display unit Sensor unit range l/min Switch output Analog output pulse output 3/8 1/2 3/4 PF2W704T PF2W504T 0.5 to 4 720T PF2W30 520T 2 to 16 740T 540T 5 to 40 : Output from integrated display type and remote display unit type : Output from remote sensor unit type

16-11-6 For details about certified products 3 conforming to international standards, visit us at www.smcworld.com. Digital Flow Switch For Air Series PF2A

How to Order ZSE Integrated ISE display type PF2A7 10 01 27 PSE

Flow rate range Z 10 1 to 10 l/min Thread type Unit specifications I SE3 50 5 to 50 l/min Nil Rc Wiring specifications Nil With unit switching function 11 10 to 100 /min N NPT M Fixed SI unit Note) PS l Nil 3 m lead wire with connector 21 20 to 200 l/min F G Note) Fixed unit: Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy N Without lead wire 51 50 to 500 /min Real-time flow rate: l/min Z 1 l Port size I SE 2 Output specifications Accumulated flow: l Port Flow rate (l/min) Symbol Applicable model Symbol Output specifications Applicable model size 10 50 100 200 500 ZSP PF2A710, PF2A750 01 1/8 27 NPN open collector 2 outputs PF2A710, PF2A750 PF2A711, PF2A721, PF2A751 02 1/4 PF2A710, PF2A750 ISA2 03 3/8 PF2A711, PF2A721 67 PNP open collector 2 outputs PF2A711, PF2A721/PF2A751 04 1/2 PF2A751 IS Specifications ZSM Model PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 Measured fluid Air, Nitrogen Flow rate measurement range 0.5 to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min PF2 Set flow rate range 0.5 to 10.5l /min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Flow rate measuring range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min IF Minimum set unit 0.1 l/min 0.5 l/min 1 l/min 2 l/min 5 l/min Accumulated pulse flow rate exchange value (Pulse width: 50 ms) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse Data Note 1, 2) Real-time flow rate /min, CFM x 10–2 /min, CFM x 10–1 Display unit l l Accumulated flow l, ft3 x 10–1 Operating fluid temperature 0 to 50°C Linearity ±5% F.S. or less Repeatability ±1% F.S. or less ±2% F.S. or less Temperature characteristics ±3% F.S. or less (15 to 35°C, based on 25°C), ±5% F.S. or less (0 to 50°C, based on 25°C) Current consumption (No load) 150 mA or less 160 mA or less 170 mA or less Weight Note 3) 250 g 290 g Port size (Rc, NPT, G) 1/8, 1/4 3/8 1/2 Detection type Heater type Display 3-digit, 7-segment LED Operating pressure range –50 kPa to 0.5 MPa –50 kPa to 0.75 MPa Proof pressure 1.0 MPa Accumulated flow range 0 to 999999 l Maximum load current: 80 mA; Internal voltage drop: 1 V or less (With load current of 80 mA) NPN open collector Maximum applied voltage: 30 V; Two outputs Switch output Note 4) Maximum load current: 80 mA NPN open collector Internal voltage drop: 1.5 V or less (With load current of 80 mA); Two outputs

Output specifications Accumulated pulse output NPN or PNP open collector (same as switch output) Indicator light Lights up when output is ON OUT1: Green; OUT2: Red Response time 1sec. or less Hysteresis Hysteresis mode: Variable (can be set from 0), Window comparator mode: 3-digit fixed Note 5) Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Enclosure IP65 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No condensation or freezing) Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized) 2 Resistance Impact resistance 490 m/s in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Note 1) For digital flow switch with unit switching function. (Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 2) Flow rate display can be switched between the basic condition of 0°C, 101.3 kPa and the standard condition (ANR) of 20°C, 101.3 kPa, and 65% RH. Note 3) Without lead wire. Note 4) Switch output and accumulated pulse output can be selected during initial setting. Note 5) Window comparator mode — Since hysteresis will reach 3 digits, keep P_1 and P_2 or n_1 and n_2 apart by 7 digits or more. (In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The flow switch is comformed to CE mark.

16-11-7 4 Series PF2A

How to Order

Remote type Display unit PF2A5 10 01

Flow rate range 10 1 to 10 l/min 50 5 to 50 l/min Output specifications 11 10 to 100 l/min Nil Output for display unit 21 20 to 200 l/min Thread type 1 Output for display unit + analog output (1 to 5 V) 51 50 to 500 l/min Nil Rc 2 Output for display unit + analog output (4 to 20 mA) N NPT Wiring specifications F G Nil 3 m lead wire with connector N Without lead wire Port size Port Flow rate (l/min) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Symbol Applicable model size 10 50 100 200 500 01 1/8 PF2A510/550 02 1/4 03 3/8 PF2A511/521 04 1/2 PF2A551

Specifications

Model PF2A510 PF2A550 PF2A511 PF2A521 PF2A551 Measured fluid Air, Nitrogen Detection type Heater type Flow rate measuring range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min Operating pressure range –50 kPa to 0.5 MPa –50 kPa to 0.75 MPa Proof pressure 1.0 MPa Operating fluid temperature 0 to 50°C Linearity Note 1) ±5% F.S. or less Repeatability Note 1) ±1% F.S. or less Temperature ±2% F.S. or less (15 to 35°C, based on 25°C) characteristics ±3% F.S. or less (0 to 50°C, based on 25°C) Output for display unit Analog voltage output (Non-linear) output impedance 1 kΩ output for display unit PF2A3 Voltage output 1 to 5 V within the flow rate range Note 2) Linearity: ±5% F.S. or less; allowable load resistance: 100 kΩ or more. Analog output Current output 4 to 20 mA within the flow rate range

Output specifications Linearity: ±5% F.S. or less; allowable load resistance: 300 Ω or less with 12 VDC, 600 Ω or less with 24 VDC Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Current consumption (No load) 100 mA or less 110 mA or less Enclosure IP65 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No condensation or freezing) Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration Resistance Impact resistance 490 m/s2 in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Weight Note 3) 200 g 240 g Port size (Rc, NPT, G) 1/8, 1/4 3/8 1/2 Note 1) The system accuracy when combined with PF2A3. Note 2) Output system can be selected during initial setting. Note 3) Without lead wire. (Add 20 g for the types of analog output whether voltage or current output selected.) Note 4) Flow rate unit measured under the following conditions: 0°C and 101.3 kPa. Note 5) The sensor unitis comformed to CE mark.

16-11-8 5 Digital Flow Switch For Air Series PF2A

How to Order

Remote type Display unit PF2A3 0A0

Unit specifications Flow rate range Nil With unit switching function Mounting Note) Symbol Flow rate range Type for sensor unit M Fixed SI unit A Panel mounting Note) Fixed unit: 1 to 10 l/min PF2A510 0 Real-time flow rate: l/min ZSE 5 to 50 l/min PF2A550 ISE 10 to 100 l/min PF2A511 Output specifications 1 20 to 200 l/min PF2A521 Symbol Output specifications Applicable model PSE 50 to 500 l/min PF2A551 0 NPN open collector 2 outputs PF2A300/310 1 PNP open collector 2 outputs PF2A301/311 Z I SE3 Specifications PS

Note 2, 3) Real-time flow rate l/min, CFM x 10–2 l/min, CFM x 10–1 IS Display unit Accumulated flow l, ft3 x 10–1 Accumulated flow range 0 to 999999 l ZSM Note 4) Linearity ±5% F.S. or less PF2 Repeatability Note 4) ±1% F.S. or less ±1% F.S. or less (15 to 35°C based on 25°C) Temperature characteristics IF ±2% F.S. or less (0 to 50°C based on 25°C) Current consumption 50 mA or less 60 mA or less Data Weight 45 g Maximum load current: 80 mA

Note 5) Internal voltage drop: 1 V or less (With load current of 80 mA) NPN open collector (PF2A300, PF2A310) Maximum applied voltage: 30 V Switch output 2 outputs Maximum load current: 80 mA PNP open collector (PF2A301, PF2A311) Internal voltage drop: 1.5 V or less (With load current of 80 mA)

Output specifications 2 outputs Accumulated pulse output NPN or PNP open collector (same as switch output) Display 3-digit, 7-segment LED Indicator light Lights up when output is ON OUT1: Green; OUT2: Red Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Response time 1 sec. or less Hysteresis Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (3 digits) Note 6) Enclosure IP40 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No condensation or freezing) Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each Resistance Impact resistance 490 m/s2 in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Note 1) The flow rate measurement range can be modified depending on the setting. Note 2) For digital flow switch with unit switching function. (Fixed SI unit [l/min or l] will be set for switch types without the unit switching function.) Note 3) Flow rate display can be switched between the basic condition of 0°C, 101.3 kPa and the standard condition (ANR) of 20°C, 101.3 kPa, and 65% RH. Note 4) The system accuracy when combined with PF2A5. Note 5) Switch output and accumulated pulse output can be selected during initial setting. Note 6) Window comparator mode — Since hysteresis will reach 3 digits, keep P_1 and P_2 or n_1 and n_2 apart by 7 digits or more. (In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 7) The display unit is comformed to CE mark.

16-11-9 6 Series PF2A

Flow Characteristics (Pressure loss)

PF2A710/510 PF2A750/550 PF2A711/511

1.0 3.0 10

2.5 0.8 8 2.0 0.6 6 1.5 0.4 4 1.0 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa)

0.2 2 0.5

012.55 7.5 10 0 5 10 15 20 25 3035 40 45 50 0 10 25 50 75 100 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min)

15 30

10 20 Pressure loss (kPa) Pressure loss (kPa) 5 10

0 20 50 100 150 200 050100 150200 250 300350 400 450 500 Flow rate (l/min) Flow rate (l/min) Sensor Unit Construction

PF2A710/750 Component Parts PF2A510/550 No. Description Material q Attachment ADC w Seal NBR e Mesh Stainless steel r Body PBT t Sensor PBT Flow direction PF2A711/721/751 Component Parts PF2A511/521/551 No. Description Material q Attachment ADC w Seal NBR e Spacer PBT r Mesh Stainless steel t Body PBT y Sensor PBT Flow direction Operating Unit Descriptions Connectors

RESET Buttons LED Display Connectors shown below are applicable Press the and buttons simultaneously Displays the real-time flow rate, (female contact). to activate the RESET function. accumulated flow, and set value. Contact each manufacturer for details. This clears the unit when an abnormality The mark blinks when the Connector Number Applicable occurs and resets the accumulated flow accumulated flow is being of Manufacturer display to “0”. measured. size pins series Output (OUT1) Indicator: Green U P UP Button ( Button) Correns Corporation VA-4D Use this button to increase a set Lights up when OUT1 is ON. OMRON Corporation XS2 Blinks when an overcurrent error SET value. occurs on OUT1. M12 4 Yamatake Corporation PA5-4I OUT1 OUT2 DOWN SET Button ( Button) Hirose Electric Co., Ltd. HR24 Use this button to change a set value or any of the modes. DDK Ltd. CM01-8DP4S Output (OUT2) Indicator: Red Lights up when OUT2 is ON. DOWN Button ( Button) Blinks when an overcurrent error Use this button to decrease a set occurs on OUT2. value.

16-11-10 7 Digital Flow Switch For Air Series PF2A

Dimensions: Integrated Display Type for Air PF2A710/750 Internal circuit and wiring example 98 67 to are terminal numbers. 82 58 6 60 17 1.6 Brown 1 Load OUT1 4 Load Black FLOW SWITCH ZSE UP OUT2 ISE

Main circuit 2 White + 12 SET to 54 44 3 – OUT1 OUT2 24 VDC PSE DOWN Blue FOR AIR PF2A7 - -27 (-M) Z I SE3 2-Port size 24 4-ø4.5 40 Brown PS 50 1 OUT1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 4 Z 1 Black I SE 2 (41.5) Load White OUT2 2 + Main circuit 12 ZSP Load to – 24 VDC 3 Blue ISA2 PF2A7--67(-M) IS

42 ZSM 4 PF2

2-ø3.4 43 IF Flow direction Data

PF2A711/721/751

64 116 23 88 1.6 Connector pin numbers 43

FLOW SWITCH U P

SET 34 54 44 OUT1 OUT2 DOWN FOR AIR 1 2

Pin no. Pin description 4–ø4.5 40 2-Port size 30 1 DC (+) 50 2 OUT2 3 DC (–) 4 OUT1 (41.5) 73

Flow direction

16-11-11 8 Series PF2A

Dimensions: Remote Type Sensor Unit for Air PF2A510/550 Internal circuit and wiring example 98 to are terminal numbers. 82 B 60 23 Display unit Sensor unit (PF2A30/31) 48.2 1.6 Brown 1 2 6

NC 2 White 4 8 Switch + 12 Black output to 4 3 7 – 24 VDC Main circuit Main circuit 34 54 44 Blue 3 1 5 PF2A5-

Display unit 4-ø4.5 40 2-Port size 24 Sensor unit (PF2A30/31) 50 Brown 1 2 6 Analog output Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 2 Load 4 8 White Switch + 12 output to 4 3 7 – 24 VDC Main circuit Black Main circuit

3 1 5 Blue (43.5) PF2A5--1 (mm) Output specifications A B Display unit Pulse output only 42 62 Sensor unit (PF2A30/31)

A Brown Pulse output + Analog output 52 72 1 2 6 Analog

4 output 2 Load 4 8 + White Switch 12 output to 4 3 7 – 24 VDC 2-ø3.4 43 Main circuit Black Main circuit Flow direction 3 1 5 Blue PF2A5--2 PF2A511/521/551 B 116 23 Wiring 76.2 1.6 Brown (1) DC (+)

Black (4) OUT

White (2) NC/Analog output Main circuit 54 44 34 Blue (3) DC (–) ∗ Use this sensor by connecting to SMC remote type display unit Series PF2A3. 4-ø4.5 40 2-Port size 30 50 Connector pin numbers

21 (43.5) 3 4 (mm) Output specifications A B Pin no. Pin description Pulse output only 48 62 1 DC (+) Pulse output + Analog output 58 72 2 NC/Analog output A 3 DC (–) 4 OUT

Flow direction

16-11-12 9 Digital Flow Switch For Air Series PF2A

Dimensions: Remote Type Display Unit for Air PF2A3-A Internal circuit and wiring example Panel mounting type to are terminal numbers.

41.8 40.3 OUT2 NC 8 Load 40 4.3 Sensor 4 OUT1 Black 3 7 Load Brown 6 ZSE 2 + Main circuit ISE SMC FLOW SWITCH Blue – 1 5 12 to 24 VDC PSE

40 A

35.8 Series UNIT Z RESET PF2A5 PF2A30-A SET I SE3 OUT2 NC PS 8 Load Sensor 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy OUT1 Z 1 3 x 7.2(= 21.6) Panel fitting dimensions Black I SE 2 3 7 Load 8-M3 +0.5 6.4 36 0 Brown 2 6 ZSP + Main circuit Blue – 1 5 ISA2 12 to 24 VDC 1 234 Series PF2A5 PF2A31-A IS 0 +0.5 ∗ Do not connect the white wire of the sensor to . 36

19.4 ZSM

5678 Terminal block number PF2 1 2 3 4 IF ∗ The applicable panel thickness is 1 to 3.2 mm. View A

1 234 Data

5678

Analog output 1 to 5 VDC 4 to 20 mADC 5 6 7 8

5 20 Analog output [V] 1 Analog output [mA] 4

Min. measured Max. measured Real-time Min. measured Max. measured Real-time flow rate value flow rate value flow rate [l/min] flow rate value flow rate value flow rate [l/min]

Basic condition Standard condition Basic condition Standard condition Part no. Minimum measured Maximum measured Minimum measured Maximum measured Part no. Minimum measured Maximum measured Minimum measured Maximum measured flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 1 10 1.1 10.7 PF2A510--2 1 10 1.1 10.7 PF2A550--1 5 50 5.4 53.5 PF2A550--2 5 50 5.4 53.5 PF2A511--1 10 100 11 107 PF2A511--2 10 100 11 107 PF2A521--1 20 200 21 214 PF2A521--2 20 200 21 214 PF2A551--1 50 500 54 535 PF2A551--2 50 500 54 535

16-11-13 For details about certified products 10 conforming to international standards, visit us at www.smcworld.com. Digital Flow Switch, Large Flow Type For Air Series PF2A

How to Order

Integrated display type PF2A7 H

Flow rate range Unit specifications High flow type 03 150 to 3000 l/min Wiring specifications Nil With unit switching function Port specifications 06 300 to 6000 l/min Nil 3 m lead wire with connector M Fixed SI unit Note) 12 600 to 12000 l/min Nil Rc N Without lead wire Note) Fixed unit:

N NPT Real-time flow rate: l/min Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy F G Output specifications Accumulated flow: l, m3, m3 x 103 Port size 28 NPN open collector 1 output + Analog output (1 to 5 V) Flow rate (l/min) Applicable 29 NPN open collector 1 output + Analog output (4 to 20 mA) Symbol Port size 3000 6000 12000 model 68 PNP open collector 1 output + Analog output (1 to 5 V) 10 1 PF2A703H 69 PNP open collector 1 output + Analog output (4 to 20 mA) 14 11/2 PF2A706H ∗ Switching of switch output and accumulated pulse output 20 2 PF2A712H is possible with NPN or PNP open collector outputs. Specifications

Model PF2A703H PF2A706H PF2A712H Measured fluid Dry air Detection type Heater type Flow rate measuring range Note 1) 150 to 3000 l/min 300 to 6000 l/min 600 to 12000 l/min Minimum setting unit Note 1) 5 l/min 10 l/min Note 2) Real-time flow rate l/min, CFM Display unit Accumulated flow l, m3, m3 x 103, ft3, ft3 x 103, ft3 x 106 Operating pressure range 0.1 to 1.5 MPa Proof pressure 2.25 MPa Pressure loss 20 kPa (at maximum flow rate) Accumulated flow range 0 to 9,999,999,999 l Linearity Note 3) ±1.5% F.S. or less (0.7 MPa, at 20°C) Repeatability ±1.0% F.S. or less (0.7 MPa, at 20°C), ±3.0% of F.S. or less in case of analog output Pressure characteristics ±1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa) Temperature characteristics ±2.0% F.S. or less (0 to 50°C, based on 25°C) NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (With load current of 80 mA) Switch output Note 4) PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (With load current of 80 mA) Output Note 4) Flow rate per pulse: 100 /pulse, 10.0 ft3/pulse Accumulated NPN or PNP open collector l specifications pulse output Pulse width: 50 msec Output voltage: 1 to 5 V; Load impedance: 100 kΩ or more Analog output Note 5) Output current: 4 to 20 mA; Load impedance: 250 Ω or less Response time 1 sec. or less Hysteresis Hysteresis mode: Variable (can be set from 0); Window comparator mode: (can be set from 0 to 3% F.S.) Power supply voltage 24 VDC (Ripple ±10% or less) Current consumption 150 mA or less Enclosure IP65 Operating temperature range 0 to 50°C (No condensation) Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each Resistance Impact resistance 490 m/s2 in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Weight 1.1 kg (Without lead wire) 1.3 kg (Without lead wire) 2.0 kg (Without lead wire)

Port size (Rc, NPT, G) 1 11/2 2 Note 1) Flow rate display can be switched between the basic condition of 0°C, 101.3 kPa and the standard condition (ANR) of 20°C, 101.3 kPa, and 65% RH. Note 2) For digital flow switch with unit switching function. (Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 3) The high flow rate type is CE marked; however, the linearity with applied noise is ±5% F.S. or less. Note 4) Switch output and accumulated pulse output selections are made using the button controls. Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow.

16-11-14 11 Digital Flow Switch, High Flow Type For Air Series PF2A

Flow Characteristics (Pressure loss)

PF2A703H PF2A706H PF2A712H 20 20 20

10 10 10 ZSE ISE Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) PSE

Z I SE3 0 150 600 1200 1800 2400 3000 0 300 1200 2400 3600 4800 6000 0 600 2400 4800 7200 9600 12000 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PS

RESET buttons Flow rate display Press the UP and DOWN buttons Displays the real-time flow rate, simultaneously to activate the accumulated flow, and set value. RESET function. This clears the unit when an abnormality occurs and resets the Flow rate confirmation indicator accumulated flow display to “0”. The blinking intervals change Unit display depending on the flow rate value. Displays the selected unit. Fixed SI unit (l/min, or l, m3 or m3 x 103) will be set for switches without the unit switching function. Output (OUT1) indicator Lights up when OUT1 is ON. Blinks when an overcurrent error DOWN button ( button) occurs on OUT1. Use this button to decrease a set UP button ( button) value. Use this button to increase a set value. MODE button ( button) SET button ( button) Use this button to change a function. Use this button to select a function. Connectors Connectors shown below are applicable (female contact). Contact each manufacturer for details. Connector size Number of pins Manufacturer Applicable series Correns Corporation VA-4D OMRON Corporation XS2 M12 4 Yamatake Corporation PA5-4I Hirose Electric Co., Ltd. HR24 DDK Ltd. CM01-8DP4S

16-11-15 12 Series PF2D

Dimensions PF2A703H/706H/712H Internal circuit and wiring example D to are terminal numbers. E B F Brown Accumulated 1 pulse output Load OUT1 ON 4 Black OFF Analog output 50 msec 2

A + Main circuit White Load – 24 VDC 3 Blue U P SET MODE DOWN 28 PF2A7H--29(-M) 60 C 2-G

(41.5) Connector pin numbers Brown Accumulated 1 pulse output ON 4 3 4 OUT1 Black OFF Load Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Analog output 2 50 msec Main circuit White Load + – 24 VDC 3 1 2 Blue

68 PF2A7H--69(-M) Pin no. Pin description 1 DC (+) 2 Analog output 3 DC (–) Accumulated pulse output 4 OUT1 40 4-I thread with depth J wiring examples

Max. 30V 80 mA or less OUT1 Black Load H 0V Blue

50 msec

28 PF2A7H--29(-M)

Model A B C D E F G H I J Brown PF2A703H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Black Load PF2A706H 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 46 M6 x 1 9 0 V PF2A712H 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50 msec

68 Analog output PF2A7H--69(-M) 1 to 5 VDC 4 to 20 mADC

5 20 Analog output [V] Analog output [mA] 1 4

Min. measured Max. measured Real-time Min. measured Max. measured Real-time flow rate value flow rate value flow rate [l/min] flow rate value flow rate value flow rate [l/min]

Minimum measured Maximum measured Minimum measured Maximum measured Part no. Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A703H--28 PF2A703H--29 PF2A703H--68 150 3000 PF2A703H--69 150 3000 PF2A706H--28 PF2A706H--29 PF2A706H--68 300 6000 PF2A706H--69 300 6000 PF2A712H--28 PF2A712H--29 PF2A712H--68 600 12000 PF2A712H--69 600 12000

16-11-16 For details about certified products 13 conforming to international standards, visit us at www.smcworld.com. Digital Flow Switch For Water Series PF2W

How to Order ZSE Integrated ISE display type PF2W7 20 03 27 PSE

Flow rate range Unit specifications Z I SE3 04 0.5 to 4 l/min Thread type Nil With unit switching function Note) 20 2 to 16 l/min Nil Rc M Fixed SI unit 40 5 to 40 l/min N NPT Note) Fixed unit: PS 11 10 to 100 /min F G Real-time flow rate: l/min Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy l Port size Accumulated flow: l Z 1 I SE 2 Port Flow rate (l/min) Wiring specifications Symbol Applicable model size 4 16 40 100 Nil 3 m lead wire with connector 03 3/8 PF2W704, PF2W720 N Without lead wire ZSP 04 1/2 PF2W720, PF2W740 06 3/4 PF2W740, PF2W711 Output specifications ISA2 10 1 PF2W711 27 NPN open collector 2 outputs 67 PNP open collector 2 outputs Specifications IS

Model PF2W704 PF2W720 PF2W740 PF2W711 ZSM Measured fluid Water Flow rate measurement range 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min PF2 Set flow rate range 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min Flow rate measuring range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min IF Minimum set unit 0.05 l/min 0.1 l/min 0.5 l/min 1 l/min Accumulated pulse flow rate exchange value (Pulse width: 50 ms) 0.05 l/pulse 0.1 l/pulse 0.5 l/pulse 1 l/pulse Data Linearity ±5% F.S. or less ±3% F.S. or less Repeatability ±3% F.S. or less ±2% F.S. or less Temperature characteristics Note 1) ±5% F.S. or less (0° to 50°C, based on 25°C) Current consumption (No load) 70 mA or less 80 mA or less Weight Note 2) 460 g 520 g 700 g 1150 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Detection type Karman vortex Display 3-digit, 7-segment LED Note 3) Real-time flow rate l/min, gal (US)/min Display unit Accumulated flow l, gal (US) Operating pressure range 0 to 1 MPa Proof pressure 1.5 MPa Accumulated flow range 0 to 999999 l Ambient temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No condensation or freezing) Maximum load current: 80 mA; Internal voltage drop: 1 V or less (With load current of 80 mA) Note 4) NPN open collector Maximum applied voltage: 30 V; 2 outputs Output Switch output Maximum load current: 80 mA specifications PNP open collector Internal voltage drop: 1.5 V or less (With load current of 80 mA); 2 outputs Accumulated pulse output NPN or PNP open collector (same as switch output) Indicator light Lights up when output is ON, OUT1: Green; OUT2: Red Response time 1 sec. or less Hysteresis Hysteresis mode: Variable (can be set from 0), Window comparator mode: 3-digit fixed Note 5) Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Enclosure IP65 Operating temperature range 0 to 50°C Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs. each 2 Resistance Impact resistance 490 m/s in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Note 1) In the case of PF2W711, ±3% of F.S. or less (15°C to 35°C, based on 25°C). Note 2) Without lead wire. Note 3) For digital flow switch with unit switching function. (Fixed SI unit [l/min or l] will be set for switch type without the unit switching function.) Note 4) Switch output and accumulated pulse output can be selected during initial setting. Note 5) Window comparator mode — Since hysteresis will reach 3 digits, keep P_1 and P_2 or n_1 and n_2 apart by 7 digits or more. The minimum setting unit is 1 digit. (Refer to the table above.) (In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The flow switch is comformed to CE mark. 16-11-17 14 Series PF2W

How to Order

Remote type Sensor unit PF2W5 20 03

Flow rate range 04 0.5 to 4 l/min 20 2 to 16 l/min Output specifications 40 5 to 40 l/min Nil Output for display unit (sensor output) only 11 10 to 100 l/min 1 Output for display unit + Analog output (1 to 5V) 2 Output for display unit + Analog output (4 to 20 mA) Thread type Wiring specifications Nil Rc Nil Lead wire with connector 3 m N NPT N Without lead wire F G Port size

Specifications

Model PF2W504 PF2W520 PF2W540 PF2W511 Measured fluid Water Detection type Karman vortex Flow rate measuring range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min Operating pressure range 0 to 1 MPa Withstand pressure 1.5 MPa Operating fluid temperature 0 to 50°C 0 to 50°C Linearity Note 1) ±5% F.S. or less ±3% F.S. or less

Repeatability Note 1) ±2% F.S. or less ±1% F.S. or less Temperature characteristics ±2% F.S. or less (15 to 35°C based on 25°C), ±3% F.S. or less (0 to 50°C based on 25°C) Pulse output, N channel, open drain, output for display unit PF2W3. Output for display unit (Specifications: Maximum load current of 10mA; Maximum applied voltage of 30 V)

Note 2) Voltage output 1 to 5V within the flow rate range Linearity: ±5% F.S. or less; allowable load resistance: 100 kΩ or more. Analog output Current output 4 to 20 mA within the flow rate range Output specifications Linearity: ±5% F.S. or less; allowable load resistance: 300 Ω or less with 12 VDC, 600 Ω or less with 24 VDC Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Current consumption (No load) 20 mA or less Enclosure IP65 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No condensation or freezing) Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs. each 4.9 m/s2 Resistance Impact resistance 490 m/s2 in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Weight Note 3) 410 g 470 g 650 g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W3. Note 2) Output system can be selected during initial setting. Note 3) Without lead wire. (Add 20 g for the types of analog output whether voltage or current output selected.) Note 4) The sensor unitis comformed to CE mark.

16-11-18 15 Digital Flow Switch For Water Series PF2W

How to Order

Remote type Display unit PF2W3 0A0

Unit specifications Flow rate range Nil With unit switching function Symbol Flow rate range Type for sensor unit Mounting M Fixed SI unit Note) 0.5 to 4 l/min PF2W504 A Panel mounting Note) Fixed unit: ZSE 0 2 to 16 l/min PF2W520 Real-time flow rate: l/min ISE 5 to 40 /min PF2W540 l Accumulated flow: l 3 10 to 100 l/mim PF2W511 PSE Output specifications Panel mount adapter part no. 0 NPN open collector 2 outputs Description Panel adapter B Z I SE3 1 PNP open collector 2 outputs Part no. ZS-22-02 PS

Note 4) Switch output 2 outputs Maximum load current: 80 mA PNP open collector (PF2W301, PF2W331) Internal voltage drop: 1.5 V or less (With load current of 80 mA)

specifications 2 outputs Accumulated pulse output NPN or PNP open collector (Same as switch output) Enclosure IP40 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No condensation or freezing) Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs. each Resistance Output Impact resistance 490 m/s2 in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Display 3-digit, 7-segment LED Indicator light Lights up when output is ON, OUT1: Green; OUT2: Red Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Response time 1 sec. or less

Hysteresis Hysteresis mode: Variable (can be set from 0) Window comparator mode: 3-digit fixed Note 5) Note 1) Values vary depending on each set flow rate range. Note 2) For digital flow switch with unit switching function. (Fixed SI unit [l/min or l] will be set for switch types without the unit switching function.) Note 3) The system accuracy when combined with PF2W5. Note 4) Switch output and accumulated pulse output can be selected during initial setting. Note 5) Window comparator mode — Since hysteresis (H) will reach 3 digits, keep P_1 and P_2 or n_1 and n_2 apart by 7 digits or more. (In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The display unit is comformed to CE mark.

16-11-19 16 Series PF2W

Flow Characteristics (Pressure loss)

PF2W704, PF2W504 PF2W720, PF2W520 PF2W740, PF2W540

0.030 0.05 0.07 0.025 0.04 0.06 0.020 0.05 0.03 0.015 0.04 0.02 0.03 0.010 Pressure loss (MPa) Pressure loss (MPa) 0.02 Pressure loss (MPa) 0.005 0.01 0.01 0 0 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 04682 10 12 14 16 0 5 10 15 20 25 30 35 40

PF2W711, PF2W511 0.035 0.030

0.025

0.020

0.015

0.010 Pressure loss (MPa)

0.005 0 1234567891011

Flow rate (l/min)

Sensor Unit Construction

Component Parts No. Description Material q Attachment Stainless steel w Seal NBR e Body PPS r Sensor PPS

Flow direction

Connectors and operating unit descriptions are the same as Series PF2A for air. Refer to page 16-11-10.

16-11-20 17 Digital Flow Switch For Water Series PF2W

Dimensions: Integrated Display Type for Water PF2W704, PF2W720 Internal circuit and wiring 67 example L 58 6 to are terminal numbers. 60 17 1.6 Brown 1 Load OUT1 4 FLOW SWITCH Black Load UP OUT2

SET 2 Main circuit

54 44 + 34 White ZSE OUT1 OUT2 – ISE DOWN 3 FOR WATER Blue 12 to 24 VDC PSE PF2W7--27(-M) 4-ø4.5 40 2-Port size Z I SE3 50 Brown 1 (41.5) OUT1 4 PS

Black Load Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy White ZSE 1 2 OUT2 I 2 + Main circuit Load – 3 ZSP Blue 12 to 73 24 VDC ISA2 PF2W7--67(-M) 42 IS 4 Connector pin numbers

43 ZSM 2-ø3.4 43 Flow direction PF2

Model L dimension 1 2 IF PF2W704 100 PF2W720 106 Pin no. Pin description Data 1 DC (+) 2 OUT2 PF2W740 3 DC (–) 4 OUT1 120 67 6 60 17 1.6

FLOW SWITCH U P

S E T 60 50 34 55 34 OUT1 OUT2 DOWN FOR WATER

4-ø4.5 40 2-Port size 34 50

(41.5) 73 34

Flow direction

16-11-21 18 Series PF2W

Dimensions: Integrated Display Type for Water PF2W711

148 77 80 79 32 9 2

FLOW SWITCH U P

SET 70 58 46 45 OUT1 OUT2 DOWN

4-ø5.5 36 2-Port size 45 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

46 60 (41.5) 88

Flow direction

16-11-22 19 Digital Flow Switch For Water Series PF2W

Dimensions: Remote Type Sensor Unit for Water PF2W504/520-(N)- Internal circuit and wiring L B example to are terminal numbers. 60 23 48.2 1.6 Display unit Sensor unit (PF2W30/31) 12 to Brown 24 VDC 1 2 6

2 White 4 8 NC Switch + Black ZSE output – 34 54 44 4 3 7 ISE Main circuit Main circuit Blue 3 1 5 PSE

PF2W5- Z 4-ø4.5 40 2-Port size 6 I SE3 50 Display unit PS (PF2W30/31) 12 to

(43.5) White output – 4 3 7 Black Main circuit Main circuit ISA2 3 1 5 Blue IS

A PF2W5 - -1 ZSM 4 Output specifications A B Pulse output only 42 62 Display unit PF2 Sensor unit (PF2W30/31) 12 to Pulse output + Analog output 52 72 2-ø3.4 43 Brown 24 VDC 1 2 6 IF Analog Flow direction output 2 Load 4 8 Switch + White Data output – Model L dimension 4 3 7 Black PF2W504 100 Main circuit Main circuit PF2W520 106 3 1 5 Blue

PF2W504-(N)- PF2W5--2 120 B 60 23 48.2 1.6 Wiring

Brown (1) DC (+)

Black (4) OUT 60 50 34 55 White (2) NC/Analog output Main circuit

Blue (3) DC (–)

4-ø4.5 40 2-Port size 6 ∗ 50 Use this sensor by connecting to SMC remote type display unit Series PF2W3.

Connector pin numbers

21 (43.5)

3 4

Output specifications A B Pin no. Pin description A Pulse output only 42 62 1 DC (+) Pulse output + Analog output 52 72 2 NC/Analog output 3 DC (–) 4 OUT Flow direction

16-11-23 20 Series PF2W

Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)- B 148 32 80 70 58 46 45

4-ø5.5 36 2-Port size 45 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy (43.5)

Output specifications A B Pulse output only 63 77 A Pulse output + Analog output 73 87

Flow direction

Analog output 1 to 5 VDC 4 to 20 mADC

5 20 Analog output [V] Analog output [mA] 1 4

0 Min. measured Max. measured Real-time 0 Min. measured Max. measured Real-time flow rate value flow rate value flow rate [l/min] flow rate value flow rate value flow rate [l/min] Minimum measured Maximum measured Minimum measured Maximum measured Part no. Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2W504--1 0.5 4 PF2W504--2 0.5 4 PF2W520--1 2 16 PF2W520--2 2 16 PF2W540--1 5 40 PF2W540--2 5 40 PF2W511--1 10 100 PF2W511--2 10 100

16-11-24 21 Digital Flow Switch For Water Series PF2W

Dimensions: Remote Type Display Unit for Water PF2W3-A Internal circuit and wiring example Panel mounting type

to are terminal numbers. OUT2 NC 8 Load 41.8 40.3 Sensor 4 OUT1 40 4.3 Black 3 7 Load ZSE Brown ISE 2 6 + SMC FLOW SWITCH Main circuit Blue – 1 5 PSE A 12 to 24 VDC 40 Z UNIT 35.8 Series I SE3 RESET SET PF2W5 PF2W30-A PS

Main circuit + 19.4 36 Blue 1 5 – ZSM

5 678 12 to 24 VDC Series PF2 PF2W5 PF2W31-A ∗ ∗ View A The applicable panel thickness is 1 to 3.2 mm. Do not connect the white wire of the sensor to . IF Data Terminal block number 1 2 3 4

1 234

5 678

5 6 7 8

16-11-25 For details about certified products 22 conforming to international standards, visit us at www.smcworld.com. Digital Flow Switch, High Temperature Fluid Type For Water Series PF2W

How to Order

Integrated display type PF2W7 20 T 03 27

Flow rate range 04 0.5 to 4 l/min Temperature range Unit specifications ° 20 2 to 16 l/min T 0 to 90 C Nil With unit switching function 40 5 to 40 l/min M Fixed SI unit Note)

Model PF2W704T PF2W720T PF2W740T Measured fluid Water, Mixture of water (50%) and ethylene glycol (50%) Flow rate measurement range 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min Set flow rate range 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min Flow rate measuring range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min Minimum setting unit 0.05 l/min 0.1 l/min 0.5 l/min Accumulated pulse flow rate exchange value (Pulse width: 50 ms) 0.05 l/pulse 0.1 l/pulse 0.5 l/pulse Operating fluid temperature 0 to 90°C (With no cavitation) Linearity ±5% F.S. or less Repeatability ±3% F.S. or less Temperature characteristics Note 1) ±5% F.S. or less (0 to 90°C, based on 25°C) Current consumption (No load) 70 mA or less Weight Note 2) 710 g Port size (Rc, NPT, G) 3/83/8, 1/2 1/2, 3/4 Detection type Karman vortex Display 3-digit, 7-segment LED Note 3) Real-time flow rate /min, gal (US)/min Display unit l Accumulated flow l, gal (US) Operating pressure range 0 to 1 MPa Withstand pressure 1.5 MPa Accumulated flow range 0 to 999999 l Maximum load current: 80 mA; Internal voltage drop: NPN open collector 1 V or less (With load current of 80 mA) Maximum applied voltage: 30 V; 2 outputs Note 4) Switch output PNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5 V or less (With load current of 80 mA); 2 outputs

Output specifications Accumulated pulse output NPN or PNP open collector (Same as switch output) Indicator light Lights up when output is ON OUT1: Green; OUT2: Red Response time 1 sec. or less Hysteresis Hysteresis mode: Variable (can be set from 0); Window comparator mode: 3-digit fixed Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Enclosure IP65 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No condensation or freezing) Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs. each 2 Resistance Impact resistance 490 m/s in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Note 1) ±5% F.S. or less (0 to 50°C, based on 25°C), ±3% F.S. or less (15 to 35°C, based on 25°C) Note 2) Without lead wire. Note 3) For digital flow switch with unit switching function. (Fixed SI unit [l/min or l] will be set for switch type without the unit switching function.) Note 4) Switch output and accumulated pulse output can be selected during initial setting. Note 5) Window comparator mode — Since hysteresis will reach 3 digits, keep P_1 and P_2 or n_1 and n_2 apart by 7 digits or more. (In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The flow switch is comformed to CE mark.

16-11-26 23 Digital Flow Switch, High Temperature Fluid Type For Water Series PF2W

How to Order

Remote type Display unit PF2W5 20T 03

Flow rate range 04 0.5 to 4 l/min 20 2 to 16 l/min 40 5 to 40 l/min ZSE Output specifications ISE Nil Output for display unit Temperature range 1 Output for display unit + Analog output (1 to 5 V) PSE T 0 to 90°C 2 Output for display unit + Analog output (4 to 20 mA) Thread type Z Wiring specifications I SE3 Nil Rc Nil 3 m lead wire with connector N NPT N Without lead wire PS F G Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Port size ZSE 1 Flow rate (l/min) I 2 Symbol Port Applicable model size 4 16 40 03 3/8 PF2W504T/520T ZSP 04 1/2 PF2W520T/540T 06 3/4 PF2W540T ISA2 Specifications IS Model PF2W504T PF2W520T PF2W540T Measured fluid Water, Mixture of water (50%) and ethylene glycol (50%) ZSM Detection type Karman vortex Flow rate measuring range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min PF2 Operating pressure range 0 to 1 MPa Withstand pressure 1.5 MPa IF Operating fluid temperature 0 to 90°C (With no cavitation) Data Linearity Note 1) ±5% F.S. or less Repeatability Note 1) ±2% F.S. or less Temperature characteristics ±2% F.S. or less (15 to 35°C based on 25°C), ±3% F.S. or less (0 to 50°C based on 25°C) Pulse output, N channel, open drain, output for display unit PF2W3. Output for display unit (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)

Note 2) Voltage output 1 to 5 V within the flow rate range Linearity: ±5% F.S. or less; allowable load resistance: 100 kΩ or more. Analog output Current output 4 to 20 mA within the flow rate range Output specifications Linearity: ±5% F.S. or less; allowable load resistance: 300 Ω or less with 12 VDC, 600 Ω or less with 24 VDC Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Current consumption (No load) 20 mA or less Enclosure IP65 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No condensation or freezing) Withstand voltage 1000 VAC for 1 min. between external terminal and case Insulation resistance 50 MΩ (500 VDC) between external terminal and case Vibration resistance 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs. each Resistance Impact resistance 490 m/s2 in X, Y, Z directions 3 times each Noise resistance 1000 Vp-p, Pulse width 1 µs, Rise time 1 ns Weight Note 3) 660 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 Note 1) The system accuracy when combined with PF2W3. Note 2) Output system can be selected during initial setting. Note 3) Without lead wire. (Add 20 g for the types of analog output whether voltage or current output selected.) Note 4) The sensor unitis comformed to CE mark.

Display units are the same as those of remote type digital flow switch for water (series PF2W3). Refer to page 16-13-19 for details.

16-11-27 24 Series PF2W

Flow Characteristics (Pressure loss) PF2W704T/504T PF2W720T/520T PF2W740T/540T

0.030 0.05 0.07 0.025 0.04 0.06 0.020 0.05 0.03 0.015 0.04 0.02 0.03 0.010 Pressure loss (MPa) Pressure loss (MPa) Pressure loss (MPa) 0.02 0.005 0.01 0.01

0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 04682 10 12 14 16 0 5 10 15 20 25 30 35 40

Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

Sensor Unit Construction

Component Parts No. Description Material q Attachment Stainless steel w Seal FKM e Body PPS r Sensor PPS

Flow direction

Connectors and operating unit descriptions are the same as Series PF2A for air. Refer to page 16-11-10.

16-11-28 25 Digital Flow Switch, High Temperature Fluid Type For Water Series PF2W

Dimensions: Integrated Display Type for Water Internal circuit and wiring example 120 74 to are terminal numbers. 60 23 Brown 1 1.6 Load OUT1 4 Black Load OUT2

Main circuit 2 FLOW SWITCH + 12 ZSE U P White to – ISE SET 3 24 VDC

60 50 34 Blue OUT1 OUT2 DOWN PSE FOR WATER PF2W7 T- -27 (-M)

Z Brown I SE3 1 OUT1 4 4-ø4.5 2-Port size 34 40 Black Load PS 50 White Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 2 OUT2 Z 1 + 12 I SE 2 Main circuit Load to (41.5) – 24 VDC 3 Blue ZSP PF2W7T--67(-M) ISA2 Connector pin numbers IS 43

77 ZSM PF2 34 1 2

Pin no. Pin description IF 1 DC (+) Flow direction 2 OUT2 Data 3 DC (–) 4 OUT1

16-11-29 26 Series PF2W

Dimensions: Remote Type Sensor Unit for Water PF2W504T/520T/540T-(N) Internal circuit and wiring B example 120 23 to are terminal numbers. 60 1.6 Display unit Sensor unit (PF2W30/31) Brown 12 to 24 VDC 1 2 6

NC 2 White 4 8 Switch + 60 50 34 Black output 4 3 7 – Main circuit Main circuit Blue 3 1 5

PF2W5T- 4-ø4.5 40 2-Port size 34 50

Main circuit Black

(43.5) 3 1 5 Blue

PF2W5T--1

Output specifications A B

A Display unit Pulse output only 52 72 Sensor unit (PF2W30/31) Pulse output + Analog output 62 82 Brown 12 to 24 VDC 1 2 6 Analog output 2 Load 4 8 + White Switch output Flow direction 4 3 7 –

Main circuit Black Main circuit 3 1 5 Analog output Blue 1 to 5 VDC 4 to 20 mADC PF2W5T--2

Wiring 5 20 Brown (1) DC (+)

Black (4) OUT

White (2) NC/Analog output Main Circuit Analog output [V] 1 Analog output [mA] 4 Blue (3) DC (–) 0 Min. measured Max. measured Real-time 0 Min. measured Max. measured Real-time flow rate value flow rate value flow rate [l/min] flow rate value flow rate value flow rate [l/min] ∗ Use this sensor by connecting to SMC remote type display unit Series PF2W3. Minimum measured Maximum measured Minimum measured Maximum measured Part no. Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] Connector pin numbers PF2W504T--1 0.5 4 PF2W504T--2 0.5 4 43 PF2W520T--1 2 16 PF2W520T--2 2 16 PF2W540T--1 5 40 PF2W540T--2 5 40

1 2

Refer to PF2W3 on page 16-11-25 for dimensions of remote type Pin no. Pin description display unit. 1 DC (+) 2 NC/Analog output 3 DC (–) 4 OUT

16-11-30 27

Digital Flow Switch Series PF2A/PF2W

Functions: PF2A, PF2W Refer to the operation manual how to set and to operate.

Flow rate measurement selection Output types Real-time flow rate and accumulated flow rate can be selected. Real-time switch output, accumulated switch output, or Up to 999999 of flow rate value can be accumulated. accumulated pulse output can be selected as an output type. Unit switching Real-time switch output ( ) For Air • Hysteresis mode ZSE ISE Display Real-time flow rate Accumulated flow ON l/min l YES –2 –1 3 –1 PSE CFM x 10 , CFM x 10 ft x 10 OFF P-2 P-1 CFM = ft3/min High flow rate → Z “P” • Window comparator mode I SE3 High Flow Rate Type (For Air) H: Hysteresis Display Real-time flow rate Accumulated flow HH ON PS /min , m3, m3 x 103

Flow rate measuring unit confirmation Accumulated switch output ( ) Data This function allows to confirm the accumulated flow rate when real-time flow rate is selected and to confirm the ON real-time flow rate when accumulated flow rate is selected. “P” OFF P-3 Error correction High flow rate →

LED display Contents Solution OUT1 Output Note 1) mode A current of more than Check the load and wiring Note 2) 80mA is flowing to OUT1 for OUT1.

ON Note 1) A current of more than Check the load and wiring 80mA is flowing to OUT2. for OUT2. Note 1) OFF “n” n-3 Note 2) The setting data has Perform the RESET High flow rate → changed for whatever operation, and reset all Note 1) Note 1) Output mode is set to inverted output at the reasons. data again. factory before shipment. Note 1) The flow rate is over the Reduce the flow rate until it is within the flow rate flow rate measurement Note 2) measurement range, using Accumulated pulse output ( ) range (for air only). an adjustment valve.

Note 1) Applicable for all integrated display types other than series “P” ON PF2A7H and remote type sensor display units. Note 2) Only for series PF2A7 H. OFF

Key lock Output OUT1 mode This function prevents incorrect operations such as 50 msec changing the set value accidentally. ON

Accumulation clearance Note 1) OFF “n” This is to clear the accumulated value. Note 1) For digital flow switch with unit switching function. (Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set Initialization of setting (Only for series PF2A7H) for switch types without unit switching function.) This is to restore the setting to the initial state when Refer to the specifications of display unit for the flow rate value per pulse. dispatched from the factory.

16-11-31 28 Series PF2A/PF2W Specific Product Precautions 1 Be sure to read before handling.

Design and Selection Design and Selection Warning [Series PF2A7H] 1. Operate the switch only within the specified 10. Sudden increase of flow rate may destroy the voltage. flow sensor. Ensure to open/close the flow Use of the switch outside the range of the specified voltage control valve not to exceed the maximum flow can cause not only malfunction and damage of the switch but rate measurement values. also electrocution and fire. 2. Do not exceed the maximum allowable load Caution specification. 1. Data of the flow switch will be stored even A load exceeding the maximum load specification can cause after the power is turned off. damage to the switch. Input data will be stored in EEPROM so that the data will not

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy be lost after the flow switch is turned off. (Data can be 3. Do not use a load that generates surge rewritten for up to one million times, and data will be stored voltage. for up to 20 years.) Although surge protection is installed in the circuit at the output side of the switch, damage may still occur if a surge is Mounting applied repeatedly. When a surge generating a load such as a relay or solenoid is directly driven, use a type of switch with a Warning built-in surge absorbing element. 1. Mount switches using the proper tightening 4. Since the type of fluid varies depending on the torque. product, be sure to verify the specifications. When a switch is tightened beyond the specified tightening The switches do not have an explosion proof rating. To prevent torque, the switch may be damaged. On the other hand, a possible fire hazard, do not use with flammable gases or tightening below the specified tightening torque may cause fluids. the installation screws to come loose during operation. 5. Monitor the internal voltage drop of the switch. When operating below a specified voltage, it is possible that Thread Tightening torque N⋅m Thread Tightening torque N⋅m the load may be ineffective even though the pressure switch Rc 1/8 7 to 9 Rc 3/4 28 to 30 function is normal. Therefore, the formula below should be Rc 1/4 12 to 14 Rc 1 36 to 38 satisfied after confirming the minimum operating voltage of the Rc 3/8 22 to 24 Rc 1 1/2 48 to 50 load. Rc 1/2 28 to 30 Rc 2 48 to 50 Supply – Internal voltage > Minimum operating voltage drop of switch voltage of load 2. Apply wrench only to the metal part of the pipings when installing the flow switch onto [For air] the system piping. 6. Use the switch within the specified flow rate Do not apply wrench to anything other than the piping measurement and operating pressure. attachment as this may damage the switch. Operating beyond the specified flow rate and operating 3. Monitor the flow direction of the fluid. pressure can damage the switch. Install and connect piping so that fluid flows in the direction [For water] of the arrow indicated on the body. 7. Use the switch within the specified flow rate 4. Remove dirt and dust from inside the piping measurement and operating pressure. using an air blower before connecting piping Operating beyond the specified flow rate and operating to the switch. pressure can damage the switch. Avoid especially the 5. Do not drop or bump. application of pressure above specifications through a water Do not drop, bump, or apply excessive impacts (490 m/s2) hammer. while handling. Although the external body of the switch (switch case) may not be damaged, the inside of the switch a) Use a device such as a water hammer relief valve to slow could be damaged and cause a malfunction. the valve’s closing speed. 6. Hold the body of the switch when handling. b) Absorb impact pressure by using an accumulator or elastic The tensile strength of the cord is 49N. Applying a greater piping material such as a rubber hose. pulling force on it can cause a malfunction. When handling, c) Keep the piping length as short as possible. hold the body of the switch – do not dangle it from the cord. 8. Design the system so that the fluid always fills 7. Do not use until you can verify that the detection passage. equipment can operate properly. Especially for vertical mounting, introduce the fluid from the Following mounting, repair, or retrofit, verify correct bottom to the top. mounting by conducting suitable function and leakage tests 9. Operate at a flow rate within the flow rate after piping and power connections have been made. measurement range. 8. Avoid the mounting orientation with the If operated outside of the flow rate measurement range, the bottom of the body facing up. Karman vortex will not be generated and normal The switch can be mounted in any way such as vertically or measurement will not be possible. horizontally, however, avoid the mounting orientation with the bracket on the bottom of the body facing upward.

16-11-32 29 Series PF2A/PF2W Specific Product Precautions 2 Be sure to read before handling.

Mounting Usage Warning Warning [For air] 1. When using a switch for high temperature ZSE 9. Never mount a switch in a place that will be fluid, the switch itself also becomes hot due to ISE used as a scaffold during piping. the high temperature fluid. Avoid touching the Damage may occur if an excessive load is applied to the switch directly as this may cause a burn. PSE switch. Z 10. Be sure to allow straight pipe length that is Operating Environment I SE3 minimum 8 times the port size upstream and downstream of the switch piping. Warning PS When abruptly reducing the size of piping or when there is a Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 1. Never use in the presence of explosive gases. Z 1 restriction such as a valve on the upstream side, the The switches do not have an explosion proof rating. Never use I SE 2 pressure distribution in the piping changes and makes in the presence of an explosive gas as this may cause a accurate measurement impossible. Therefore, flow serious explosion. ZSP restriction measures such as these should be implemented on the downstream side of the switch. 2. Mount switches in locations where there is no vibration greater than 98 m/s2, or impact ISA2 [For water] greater than 490 m/s2. 11. Never mount a switch in a place that will be 3. Do not use in an area where surges are IS used as a scaffold during piping. generated. Damage may occur if an excessive load is applied to the When there are units that generate a large amount of surge in ZSM switch. Especially when the switch supports the piping, do the area around pressure switches, (e.g., solenoid type lifters, not apply a load of 15 N·m or more to the metal part of the high frequency induction furnaces, motors, etc.) this may switch. PF2 cause deterioration or damage to the switches' internal 12. Be sure to allow straight pipe length that is circuitry. Avoid sources of surge generation and crossed lines. IF minimum 8 times the port size upstream and 4. Switches are not equipped with surge downstream of the switch piping. protection against lightning. Data When abruptly reducing the size of piping or when there is a Flow switches are CE compliant; however, they are not restriction such as a valve on the upstream side, the equipped with surge protection against lightning. Lightning pressure distribution in the piping changes and makes surge protection measures should be applied directly to accurate measurement impossible. Therefore, flow system components as necessary. restriction measures such as these should be implemented on the downstream side of the switch. 5. Avoid using switches in an environment where When used with the downstream side open, be careful of the likelihood of splashing or spraying of the cavitation that is prone to occur. liquids exists. Switches are dustproof and splashproof; however, avoid using Wiring in an environment where the likelihood of heavy splashing or spraying of liquids exists. Since the display unit of the remote Warning type switches featured here is not dust or splash proof, the 1. Verify the color and terminal number when use in an environment where liquid splashing or spraying exists must be avoided. wiring. Incorrect wiring can cause the switch to be damaged and [For air] malfunction. Verify the color and the terminal number in the 6. Use the switch within the specified fluid and instruction manual when wiring. ambient temperature range. 2. Avoid repeatedly bending or stretching the Fluid and ambient temperatures are 0° to 50°C. Take lead wire. measures to prevent freezing fluid when below 5°C, since this Repeatedly applying bending stress or stretching force to may cause damage to the switch and lead to a malfunction. the lead wire will cause it to break. The installation of an air dryer is recommended for eliminating condensate and moisture. Never use the switch in an 3. Confirm proper insulation of wiring. environment where there are drastic temperature changes Make sure that there is no faulty wiring insulation (contact even when these temperatures are operated within the with other circuits, ground fault, improper insulation between specified temperature range. terminals, etc.). Damage may occur due to excess current flow into a switch. [For water] 4. Do not wire in conjunction with power lines 7. Use the switch within the specified fluid and or high voltage lines. ambient temperature range. Wire separately from power lines and high voltage lines, The fluid and ambient temperatures range for the switches is avoiding wiring in the same conduit with these lines. Control 0° to 50°C (and 0° to 90°C for high temperature fluid). Take circuits including switches may malfunction due to noise measures to prevent freezing fluid when below 5°C, since this from these other lines. may cause damage to the switch and lead to a malfunction. 5. Do not allow loads to short circuit. Never use the switch in an environment where there are Although switches indicate excess current error if loads are drastic temperature changes even when these temperatures short circuited, all incorrect wiring connections cannot be fall within the specified temperature range. protected. Take precautions to avoid incorrect wiring. 16-11-33 30 Series PF2A/PF2W Specific Product Precautions 3 Be sure to read before handling.

Maintenance Measured Fluid Warning Warning 1. Perform periodical inspections to ensure 6. Never use flammable fluids. proper operation of the switch. 7. Install a filter on the inlet side when there is a Unexpected malfunctions may cause possible danger. possibility of condensate and foreign matter 2. Take precautions when using the switch for an being mixed in with the fluid. interlock circuit. If foreign matter adheres to the switch’s vortex generator or When a pressure switch is used for an interlock circuit, devise vortex detector, accurate measurement will no longer be a multiple interlock system to prevent trouble or possible. malfunctioning, verify the operation of the switch and interlock function on a regular basis.

Detection principle of digital flow switch for air Detection principle of digital flow switch for water

A heated thermistor is installed in the passage, and fluid absorbs heat from When an elongated object (vortex generator) is placed in the flow, the thermistor as it is introduced to the passage. The thermistor's resistance reciprocal vortexes are generated on the downstream side. These vortexes value increases as it loses heat. Since the resistance value increase ratio are stable under certain conditions, and their frequency is proportional to has a uniform relationship to the fluid velocity, the fluid velocity can be the flow velocity, resulting the following formula. detected by measuring the resistance value. To further compensate the fluid f = k x v and ambient temperature, the temperature sensor is also built into the switch f: Frequency of vortex v: Flow velocity k: Proportional constant to allow stable measurement within the operating temperature range. (determined by the vortex generator's dimensions and shape). Therefore, the flow rate can be measured by detecting this frequency.

This flow switch uses l/min as the flow rate indicator unit. The mass flow is converted and displayed under the conditions of 0°C Fluid and 101.3 kPa. The conversion conditions Temperature can be switched to 20°C compensation element Vortex generator Vortex detector and 101.3 kPa with high Fluid velocity flow type switches. detection element ∗ Top view 16-11-34 31 Series PF2A/PF2W Specific Product Precautions 4 Be sure to read before handling.

Set Flow Rate Range and Rated Flow Rate Range Caution Set the flow rate within the rated flow rate range. The regulating flow rate range is the range of flow rate that can be set on the controller. ZSE ISE The rated flow rate range is the range of flow rate that satisfies the specifications (accuracy, linearity, etc.) of the sensor. Although it is possible to set a value outside the rated flow rate range, the specifications will not be guaranteed even if the value stays within the regulating flow rate range. PSE Z I SE3 Flow rate range Sensor 1 l/min 5 l/min 10 l/min 20 l/min 50 l/min 100 l/min 200 l/min 500 l/min PS

Flow rate range Sensor 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min

PF2W504 0.5 l/min 4 l/min PF2W504T 4.5 l/min 0.35 l/min

PF2W520 2 l/min 16 l/min PF2W520T 1.7 l/min 17l/min

PF2W540 5 l/min 40 l/min PF2W540T 3.5 l/min 45 l/min

10 l/min 100 l/min PF2W511 7 l/min 110 l/min

Rated flow rate range of sensor Set flow rate range of sensor

16-11-35 1 Digital Flow Switch For Deionized Water and Chemicals Series PF2D

ZSE ISE

Body and sensor PSE ZSE3 New PFA I Tube PS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy ZSE 1 Super PFA I 2 Three types of flow range ZSP 0.4 to 4 l/min (PF2D504) ISA2 1.8 to 20 l/min (PF2D520) 4.0 to 40 l/min (PF2D540) IS ZSM Swept flow characteristics Tapered side seal minimizes dead volume PF2 to reduce accumulation of liquid pool. IF Swept Flow Characteristics (Reference) Dust generation of 3 particles/cc or less 1000 Data (Average number) Fill the flow path with sulfuric

· m] acid and leave it for 30 Karman vortex eliminates moving parts Ω 100 minutes. and allows low dust generation. After disposing the sulfuric acid, flush the flow path out Particle Characteristics (Reference) with deionized water and 10 measure the resistance rate 50 of the fluid that is discharged from the downstream side. Ratio of resistance [k 1 051015 20 25 30 A quick recovery time indicates little liquid pool. 2 or 3 particles/cc Duration of flow [min] ticle ratio [number/cc] ticle ratio r

Pa 0 Tube 010203040506070 Duration of flow [min]

The data was obtained by performing an actual 10 minutes’ supersonic cleaning using an average 16 MΩ·cm of deionized water at class 10000 clean room (1 l/min flow rate). The diameter of the measured particles ranges from 0.1 to 0.5 µm. The flow rate used during measuring is 100 cc/min.

Processing chart for Series PF2D Body Vibration reducing seals Malfunctions (output errors) that Remote type sensor unit would otherwise be caused by Assembly Sensor vibration are prevented. Common environment 4 types of outputs available

Supersonic cleaning With button operation, 4 types of output specification combinations are available. Double-packing Drying 1234

Accumulated Accumulated Output 1 Switch output Switch output Clean room class 1000 pulse output pulse output

Accumulated Accumulated Output 2 Switch output Switch output Shipment pulse output pulse output

16-11-37 2 Digital Flow Switch For Deionized Water and Chemicals Series PF2D

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Remote type Sensor unit PF2D5 2013 1 Output specifications Flow rate range 1 Output for display unit Note 1) + analog output (1 to 5 V) 04 0.4 to 4 l/min Port size (inch) 2 Output for display unit Note 1) + analog output (4 to 20 mA)

Model PF2D504 PF2D520 PF2D540 Measured fluid Liquid not to corrode nor erode deionized water and/or Teflon®. Viscosity: 3 mPa·s (3 cP) or less Detection style Karman vortex Flow rate measuring range 0.4 to 4 l/min 1.8 to 20 l /min Note 1) 4 to 40 l/min Operating pressure range Note 2) 0 to 1 MPa 0 to 0.6 MPa Proof pressure Note 3) 1.5 MPa 0.9 MPa Operating fluid temperature 0 to 90°C Linearity Note 4) ±2.5%F.S. or less (at 25°C water) Repeatability ±1%F.S. or less (at 25°C water) Temperature characteristics ±5%F.S. or less (0 to 50°C) Pulse output, N channel, open drain, output for display unit PF2D300/301 Pulse output (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output Voltage output Note 5) 1 to 5 V within the flow rate range specifications Analog Linearity: ±2% F.S. or less, Allowable load resistance: 100 kΩ or more output Current output Note 6) 4 to 20 mA within the flow rate range Linearity: ±2% F.S. or less, Allowable load resistance: 30 0Ω or less with 12 VDC, 600 Ω or less with 24 VDC Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Current consumption 20 mA or less (Without load) Enclosure IP65 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C in stock (No freezing or condensation) Voltage resistance 1000 VAC for 1 min between external terminals and case Insulation resistance 50 MΩ or more (500 VDC) between external terminals and case Vibration resistance 4.9 m/s2 resistance

Environmental Impact resistance 490 m/s2 to X, Y, Z directions 3 times for each Noise resistance 1000 Vp-p, Pulse width: 1 µs, Standing: 1 ns Weight 140 g (Without lead wire) 225 g (Without lead wire) Port size 3/8 inch tube 1/2 inch tube 3/4 inch tube Wetted material Body: New PFA, Sensor: New PFA, Tube: Super PFA Note 1) 1.6 to 20 l/min (0.1 MPa) with viscosity of 1 mPa·s (1 cP) or less Note 2) The operating pressure range drops according to the fluid temperature. See attached graph. 1.0 Note 3) 1.5 times of the maximum operating pressure and varying with fluid temperature. PF2504/520 Note 4) The system accuracy when combined with PF2D30. Note 5) When the voltage output is selected. Note 6) When the current output is selected. Note 7) The sensor unit is conformed to CE mark. 0.5 PF2540 Operating pressure [MPa] Operating 0 20 40 60 80 90 100 Fluid temperature [°C]

16-11-38 3 Digital Flow Switch For Deionized Water and Chemicals Series PF2D

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Remote type Display unit PF2D30M0 A

Unit specifications Nil With unit switching function M Fixed SI unit Note 1) Output specifications Note 1) Fixed unit: ZSE Real-time flow rate: l/min ISE 0 NPN open collector 2 outputs Accumulated flow: l PNP open collector 2 outputs 1 PSE Panel mounting Z Specifications for Display Unit I SE3

Model PF2D300/301 PS Flow rate measurement range Note 1) 0.25 to 4.5 /min 1.3 to 21.0 /min 2.5 to 45 /min Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy l l l Z 1 Set flow rate range Note 1) 0.25 to 4.5 l/min 1.3 to 21.0 l/min 2.5 to 45 l/min I SE 2 Note 1) Minimum setting unit 0.05 l/min 0.1 l/min 0.5 l/min ZSP Accumulated pulse flow rate exchange Note 1) 0.05 l/pulse 0.1 l/pulse 0.5 l/pulse value (Pulse width: 50 ms) ISA2 Note 2) Real-time flow rate Display l/min, gal (US)/min units Accumulated flow l, gal (US) IS Accumulated flow range 0 to 999999 l Linearity Note 3) ±2.5% F.S. or less ZSM Repeatability 0.5% F.S. or less ± PF2 1% F.S. or less (15 to 35 C) Temperature characteristics ± ° ±2% F.S. or less (0 to 50°C) IF Current consumption 60 mA or less Weight 45 g Data Maximum load current: 80 mA NPN open collector Internal voltage drop: 1.5 V or less (With load current of 80 mA) (PF2D300, PF2W300, PF2W330) Maximum applied voltage: 30 V Switch output 2 outputs Note 4) Maximum load current: 80 mA PNP open collector Internal voltage drop: 1.5 V or less (With load current of 80 mA) (PF2D301, PF2W301, PF2W331) 2 outputs Output specifications Accumulated pulse output NPN open collector or PNP open collector (Same as switch output) Enclosure IP40 Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (No freezing or condensation) Voltage resistance 1000 VAC for 1 min between external terminals and case Insulation resistance 50 MΩ or more (500 VDC Mega) between external terminals and case 10 to 500 Hz at whichever is smaller: 1.5 mm amplitude or 98 m/s2 acceleration in X, Y, Z directions for 2 hrs each

resistance Vibration resistance

Environmental Impact resistance 490 m/s2 to X, Y, Z directions 3 times for each Noise resistance 1000 Vp-p, Pulse width: 1 µs, Standing: 1 ns Display 3-digits 7-segment LED Indicator light ON: when light is on, OUT1: Green; OUT2: Red Power supply voltage 12 to 24 VDC (Ripple ±10% or less) Response time 1 sec. or less Hysteresis Hysteresis mode: Adjustable (can be set from 0) Window comparator mode Note 5): Fixed (3 digits) Note 1) The value varies depending on set flow range Note 2) For digital flow switch with unit switching function. (Fixed SI unit [l/min or l] will be set for switch types without unit switching function.) Note 3) The system accuracy when combined with PF2D5. Note 4) Switch output and accumulated pulse output can be selected using the control button operation during initial setting.

1234 Output 1 Switch output Switch output Accumulated pulse output Accumulated pulse output Output 2 Switch output Accumulated pulse output Switch output Accumulated pulse output Note 5) Window comparator mode: Since hysteresis (H) will reach 3 digits, keep P_1 and P_2 or n_1 and n_2 apart by 7 digits more. (In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.) Note 6) The display unit is conformed to CE mark. 16-11-39 4 Series PF2D

Flow Characteristics (Pressure characteristics) PF2D504 PF2D520 PF2D540

0.040 0.030 0.035 0.035 0.030 0.025 0.030 0.025 0.020 0.025 0.020 0.015 0.020 0.015 Pressure loss [MPa] Pressure loss [MPa] 0.015 Pressure loss [MPa] 0.010 0.010 0.010 0.005

0.005 0.005 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 0 0.5 1.0 1.5 2.0 2.5 3.03.5 4.0 0246810121614 18 20 051015 20 25 3035 40 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min)

Construction PF2D504/520 Component Parts o !0 u !0 !2 yr!w 0 e No. Description Material q Body New PFA w Sensor New PFA e Tube Super PFA r Housing A PPS t Housing B PPS y Housing C PPS u Bushing POM i Cap PPS o Gasket FKM !0 O-ring FKM !1 Thread Stainless steel 304 !2 PVC !1 qt i Lead wire

PF2D540

o!0 u!0 !2ywr e

!1 qt i

16-11-40 5 Digital Flow Switch For Deionized Water and Chemicals Series PF2D

Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 176 z to , are terminal numbers. 70 60 Display 40 Sensor (PF2D30/31) Brown 15 2 6 Analog Switch output Load 4 8 output + 12 to White or ZSE 24 VDC 3 7 Pulse – ISE

Main circuit Black Main circuit output

A 1 5 ø 62 52 42 Blue PSE Model A PF2D5--1 Z I SE3 PF2D520 12.7 4-ø4.5 PF2D504 9.52 Display Sensor (PF2D30/31) PS Brown

52 1 1 5 ISA2 Blue 18 PF2D5 - -2 IS

PF2D540-19 Wiring ZSM 186 86 Brown (1) DC (+) PF2 78 56 Black (4) OUT IF 15 White (2) Analog output Main circuit Data

Blue (3) DC (–)

∗ Use this sensor by connecting to SMC remote type display unit Series 72 62 52 ø19.05

4-ø4.5 62 1 25

Flow direction Analog Output 20 5 Voltage [V] Current [mA] 41

0 0.4 4 (in case of PF2D504) 1.8 20 (in case of PF2D520) 440(in case of PF2D540) Flow rate [l/min]

16-11-41 6 Series PF2D

Dimensions: Separate Type Display Unit 0 Internal circuit and wiring example PF2D301-A Panel mounting type z to , are terminal numbers. OUT2 NC 41.8 8 Load 40.3 Sensor 4 40 4.3 OUT1 Black 3 7 Load Brown 2 6 FLOW SWITCH +

SMC Main circuit Blue 1 5 – A 40 12 to 24 VDC

UNIT 35.8 RESET Series

SET PF2D5 PF2D300-A(-M) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

3 x 7.2 (= 21.6) 8-M3 Panel fitting dimension OUT2 NC 36 +0.5 8 Load 6.4 0 Sensor 4 OUT1 Black 3 7 Load 1 234 Brown 2 6 + Main circuit +0.5 0 Blue 1 5 – 36 19.4 12 to 24 VDC Series 5 678 PF2D5 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit. View A The applicable panel thickness is 1 to 3.2 mm. Terminal block number

1 2 3 4

1 234

5 678

5 6 7 8

16-11-42 7 Digital Flow Switch For Deionized Water and Chemicals Series PF2D

Functions/PF2D Refer to the operation manual how to set and to operate.

Unit switching Real-time switch output ( ) • Hysteresis mode Display Real-time flow rate Accumulated flow ZSE ON l/min l YES ISE GPM gal (US) OFF P-2 P-1 GPM = gal (US)/min Real-time flow rate → PSE “P” • Window comparator mode Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set H: Hysteresis Z I SE3 for the type without the unit switching function. HH ON PS NO OFF Flow rate measuring unit confirmation P-1 P-2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Real-time flow rate → Z 1 This function allows to confirm the accumulated flow rate Output I SE 2 OUT1 mode • Hysteresis mode when real-time flow rate is selected and to confirm the ON ZSP ∗ For OUT2 is the same. YES real-time flow rate when accumulated flow rate is selected. OFF n-2 n-1 Real-time flow rate → ISA2 Error correction • Window comparator mode Note 1) H: Hysteresis IS LED display Contents Solution “n” HH ON

A current of more than Check the load and wiring NO OFF ZSM n-1 n-2 80 mA is flowing to OUT1 for OUT1 Real-time flow rate → PF2 The setting data has Perform the RESET Note 1) Output mode is set to inverted output at the factory before changed for whatever operation, and reset all shipment. reasons. data again. IF Accumulated switch output ( ) The flow rate is over the Reduce the flow rate until flow rate measurement it is within the flow rate range, Data range. using an adjustment valve. ON “P” OFF P-3 Key lock Accumulated flow rate → This function prevents incorrect operations such as Output changing the set value accidentally. OUT1 mode

Accumulation clearance ON This is to clear the accumulated value. Note 1) OFF “n” n-3 Accumulated flow rate → Note 1) Output mode is set to inverted output at the factory before shipment.

Accumulated pulse output ( )

“P” ON

OFF

Output OUT1 mode 50 msec

Note 1) OFF “n” Note 1) Refer to the specifications of display unit for the flow rate value per pulse.

16-11-43 8

Applicable Fluid Compatibility check list: Materials of digital flow switch for deionized water and chemicals and fluid

Chemical Compatibility

Acetone Ț

Ammonium hydroxide Ț

Isobutyl alcohol X

Isopropyl alcohol Ț Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Hydrochloric acid Ț

Ozone X

Hydrogen peroxide Concentration 50% or less 50°C or less Ț

Ethyl acetate Ț

Butyl acetate Ț

Nitric acid (Except fuming nitric acid) Concentration 10% or less Ț

Deionized water Ț

Sodium hydroxide X

Ultra deionized water Ț

Toluene Ț

Hydrofluoric acid Concentration 50% or less Ț

Sulfuric acid (Except fuming sulfuric acid) Concentration 20% or less Ț

Phosphoric acid Concentration 30% or less Ț Note 1) The material and fluid compatibility check list provides reference values as a guide only. Note 2) Please consult with SMC for made to order specifications such as: Teflon coated threads to prevent rust/corrosion when in contact with strong acid or alkali.

· Compatibility is indicated for fluid temperatures at 100 C or less. ° Table symbols Ț : Can be used · Please consult with SMC regarding fluids other than the above. : Can be used under · Please consult with SMC regarding operating conditions. certain conditions · The product is not explosion proof. Please be sure to take measures to guard it from explosive X: Cannot be used gas when using explosive fluid.

16-11-44 9 Series PF2D Specific Product Precautions 1 Be sure to read before handling.

Design and Selection Design and Selection Warning Caution 1. Operate the switch only within the specified 1. Data of the flow switch will be stored even after ZSE voltage. the power is turned off. ISE Use of the switch outside the range of the specified voltage Input data will be stored in EEPROM so that the data will not can cause not only malfunction and damage of the switch but be lost after the flow switch is turned off. (Data can be PSE also electrocution and fire. rewritten for up to one million times, and data will be stored for 2. Do not exceed the maximum allowable load up to 20 years.) Z I SE3 specification. A load exceeding the maximum load specification can cause Mounting PS damage to the switch. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 3. Do not use a load that generates surge voltage. Warning Z 1 I SE 2 Although surge protection is installed in the circuit at the 1. Monitor the flow direction of the fluid. output side of the switch, damage may still occur if a surge is Install and connect piping so that fluid flows in the direction of ZSP applied repeatedly. When a surge generating a load such as a the arrow indicated on the body. relay or solenoid is directly driven, use a type of switch with a 2. Remove dirt and dust from inside the piping ISA2 built-in surge absorbing element. using an air blower before connecting piping to 4. Be sure to verify the applicable fluid. the switch. IS The switch does not have an explosion proof rating. To prevent 3. Do not drop or bump. possible fire hazard, do not use with flammable gases or Do not drop, bump, or apply excessive impacts (490 m/s2) ZSM fluids. while handling. Although the external body of the switch 5. Monitor the internal voltage drop of the switch. (switch case) may not be damaged, the inside of the switch PF2 When operating below a specified voltage, it is possible that could be damaged and cause a malfunction. the load may be ineffective even though the pressure switch 4. Hold the body of the switch when handling. IF function is normal. Therefore, the formula below should be The tensile strength of the cord is 49 N. Applying a greater satisfied after confirming the minimum operating voltage of the pulling force on it can cause a malfunction. When handling, load. hold the body of the switch—do not dangle it from the cord. Data Supply – Internal voltage > Minimum operating 5. Do not use until you can verify that equipment voltage drop of switch voltage of load can operate properly. Following mounting, repair, or retrofit, verify correct mounting 6. Use the switch within the specified flow rate by conducting suitable function and leakage tests after piping measurement and operating pressure. and power connections have been made. Operating beyond the specified flow rate and operating 6. Never mount a switch in a place that will be used pressure can damage the switch. Avoid especially the as a scaffold during piping. application of pressure above specifications through a water hammer. 7. Be sure to allow straight pipe length that is minimum 8 times the port size upstream and a) Use a device such as a water hammer relief valve to slow downstream of the switch piping. the valve’s closing speed. When abruptly reducing the size of piping or when there is a b) Absorb impact pressure by using an accumulator or elastic restriction such as a valve on the inlet side, the pressure piping material such as a rubber hose. distribution in the piping changes and makes accurate c) Keep the piping length as short as possible. measurement impossible. Therefore, flow restriction measures 7. Design the system so that the fluid always fills such as these should be implemented on the outlet side of the switch. the detection passage. When used with the outlet side open, be careful of the Especially for vertical mounting, introduce the fluid from the cavitation that is prone to occur. bottom to the top. 8. Operate at a flow rate within the flow rate measurement range. If operated outside of the flow rate measurement range, the Karman vortex will not be generated and normal measurement will not be possible. 9. Never use flammable fluids and/or penetrable fluids. These can cause fire, explosion or corrosion. ∗ Refer to MSDA (material safety data sheet) when using chemicals.

16-11-45 10 Series PF2D Specific Product Precautions 2 Be sure to read before handling.

Wiring Operating Environment Warning Warning 1. Verify the color and terminal number when wiring. 1. Never use in the presence of explosive gases. Incorrect wiring can cause the switch to be damaged and The switches do not have an explosion proof rating. Never use malfunction. Verify the color and the terminal number in the in the presence of an explosive gas as this may cause a instruction manual when wiring. serious explosion. 2. Avoid repeatedly bending or stretching the lead 2. Mount switches in locations where there is no wire. vibration greater than 98 m/s2, or no impact Repeatedly applying bending stress or stretching force to the greater than 490 m/s2. lead wire will cause it to break. 3. Do not use in an area where surges are

3. Confirm proper insulation of wiring. generated. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Make sure that there is no faulty wiring insulation (contact with When there are units that generate a large amount of surge in other circuits, ground fault, improper insulation between the area around pressure switches, (e.g., solenoid type lifters, terminals, etc.). Damage may occur due to excess current flow high frequency induction furnaces, motors, etc.) this may into a switch. cause deterioration or damage to the switches’ internal 4. Do not wire in conjunction with power lines or circuitry. Avoid sources of surge generation and crossed lines. high voltage lines. 4. Switches are not equipped with surge protection Wire separately from power lines and high voltage lines, against lightning. avoiding wiring in the same conduit with these lines. Control Flow switches are CE compliant; however, they are not circuits including switches may malfunction due to noise from equipped with surge protection against lightening. Lightening these other lines. surge protection measures should be applied directly to 5. Do not allow loads to short circuit. system components as necessary. Although switches indicate excess current error if loads are 5. Avoid using switches in an environment where short circuited, all incorrect wiring connections such as power the likelihood of splashing or spraying of liquids supply polarity cannot be protected. Take precautions to avoid exists. incorrect wiring. Switches are dustproof and splashproof; however, avoid using in an environment where the likelihood of heavy splashing or spraying of water and/or oil exist. Since the display unit of the Usage remote type switches featured here is not dust or splash proof, the use in an environment where water and/or oil splashing or Warning spraying exists must be avoided. 1. When using a switch for high temperature fluid, the switch itself also becomes hot due to the high temperature fluid. Avoid touching the switch Maintenance directly as this may cause a burn. Warning 1. Perform periodical inspections to ensure proper operation of the switch. Unexpected malfunctions may cause possible danger. 2. Take precautions when using the switch for an interlock circuit. When a pressure switch is used for an interlock circuit, devise a multiple interlock system to prevent trouble or malfunctioning. Verify the operation of the switch and interlock function on a regular basis. 3. Do not disassemble or perform any conversion work on flow switches. 4. Check the following during regular maintenance to avoid damage and loss because of chemicals. a) Do not touch the remaining chemicals in piping and/or digital flow switch. b) Verify the names and characteristics of using chemicals and treat them accordingly.

16-11-46 11 Series PF2D Specific Product Precautions 3 Be sure to read before handling.

Measured Fluid Others Warning Warning 1. Check regulators and flow adjustment valves 1. Since switch output remains OFF while a ZSE before introducing the fluid. message is displayed after the power is turned ISE If pressure or flow rate beyond the specified range are applied on, start measurement after a value is displayed. to the switch, the sensor unit may be damaged. 2. Perform settings after stopping control systems. PSE 2. Be sure to take preventive measures not to When the switch’s initial setting and flow rate setting are Z expose the switch to inflammable and/or performed, output maintains the condition prior to the settings. I SE3 explosive gases when using inflammable fluid. Output turns OFF when the switch’s initial setting and flow rate 3. Place the filter on the upstream side when setting are preformed. PS extraneous material can be infected. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Z 1 Accurate measurement cannot be fulfilled when extraneous I SE 2 material is adherent to the vortex generator and the vortex detector of the switch. ZSP ISA2 Set Flow Rate Range and Rated Flow Rate Range Caution IS Set the flow rate within the rated flow rate measuring range. ZSM The set flow rate range is the range of flow rate that is possible in setting at the controller side. The flow rate measuring range is the range that satisfies the specifications (accuracy, linearity etc.) on the sensor. PF2 Although it is possible to set a value outside the flow rate measuring range, the specifications will not be guaranteed. IF Flow range Sensor 0.4 l/min 1.8 l/min 4 l/min10 l/min 20 l/min 40 l/min Data

4 l/min PF2D504 0.4 l/min 4.5 l/min 0.25 l/min

1.8 l/min 20 l/min PF2D520 1.3 l/min 21 l/min

4 l/min 40 l/min PF2D540 2.5 l/min 45 l/min

Rated flow rate range of sensor Set flow rate range of sensor

16-11-47 For details about certified products 1 conforming to international standards, visit us at www.smcworld.com.

Diaphragm Style Flow Switch Series IFW5

ZSE How to Order ISE The flow switch, series IFW is used for detection and confirmation of the IFW5 10 N 03 1 1 PSE flow as a relaying device for the Z I SE3 general water applications in some Diaphragm various equipment such as cooling style flow Light PS switch 0 None Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy water fixture in the industrial 1 With neon light (110 VAC, Red) Z 1 I SE 2 machinery. 2 With neon light (110 VAC, Green) Flow range 3 With neon light (220 VAC, Red) ZSP Ȝ Low flow setting possible (1 /min) 10 1 to 10 /min l l 4 With neon light (220 VAC, Green) Ȝ Simple flow setting 20 10 to 20 l/min 5 Note) With LED light (24 VDC, Red) ISA2 50 Note) Without removing the cover, you can set with a 20 to 50 l/min 6 With LED light (24 VDC, Green) screwdriver from the outside. Note) LED light is available for 5, 6, 7, 8 IS (with terminal box for 24 VDC). Thread type ZSM Nil Rc Terminal box N NPT 0 Without terminal box (Contact: 1ab) PF2 F G 1 With terminal box (Contact: 1ab) 2 With terminal box (Contact: 1b) IF 5Note) With terminal box (24 VDC, + COM, Contact: 1b) Port size 6Note) With terminal box (24 VDC, + COM, Contact: 1a) Data 03 3/8 7Note) With terminal box (24 VDC, – COM, Contact: 1b) 04 1/2 8Note) With terminal box (24 VDC, – COM, Contact: 1a) 06 3/4 Note) Terminal box for 24 VDC is available for 5, 6 PAT. PEND (LED light).

Specifications

∗ Fluid Water/Non-corrosive liquid Operating pressure 0.1 to 0.6 MPa Water resistance 1.2 MPa Operating temperature range –5 to 60°C (No freezing) Operation Diaphragm style Insulation resistance 100 MΩ (500 DC by megameter) Withstand voltage 1500 VAC for one min. Without terminal box: 1ab Contact With terminal box: 1a or 1b Port size 3/8, 1/2, 3/4 Body BC6 Body material in contact Rod C3604B with fluid material Diaphragm NBR About the use of ∗, please confirm SMC.

16-12-1 2 Series IFW5

Micro Switch Ratings Model

Note) Non inductive load (A) Inductive load (A) Flow range Max. flow Hysteresis Model Voltage Load resistanceLight load Inductive load Motor load (l/min) (l/min) (l/min) N.C. N.O. N.C. N.O. N.C. N.O. N.C. N.O. IFW510 1 to 10 20 1 or less 125 VAC 5 5 1.5 0.7 4 4 2.5 1.3 IFW520 10 to 20 25 1.5 or less 250 VAC 5510.5 4 4 1.5 0.8 IFW550 20 to 50 60 3 or less 8 VDC 7533 5433 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the 14 VDC 5533 4433 operation position (ON signal) to the return position (OFF signal). 30 VDC 5533 4 43 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1

250 VDC 0.3 0.3 0.05 0.05 0.3 0.3 0.05 0.05 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Construction/Working Principle Flow Characteristics

Adjusting gear IFW510 Operating lever 0.14 P1 = 0.6 MPa Gear P1 = 0.5 MPa Micro switch 0.12 Flow setting P1 = 0.4 MPa P1 = 0.3 MPa indication lever 0.10 P1 = 0.2 MPa

0.08 P1 = 0.1 MPa

0.06 Protection diaphragm

Pressure drop (MPa) 0.04

Body 0.02

0 510152025 Flow rate (l/min) IFW520

0.12 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.4 MPa 0.10 P1 = 0.3 MPa

P1 = 0.2 MPa 0.08 P1 = 0.1 MPa Rod 0.06

0.04 Pressure drop (MPa)

0.02

510152025 Working Principle Flow rate (l/min) Liquid flow creates a pressure differential nearby the orifice of the port of the body q. One set of diaphragms monitors the pressure differential and operates the IFW550 micro switch through the rod w and operating lever r. 0.10 The rod w moves downward with increased flow, and upward with decreased P1 = 0.6 MPa flow. Moving the gear t upward or downward by the adjusting gear e manually P1 = 0.5 MPa 0.08 P1 = 0.4 MPa offers an electric signal at various flow rates. P1 = 0.3 MPa

P1 = 0.2 MPa 0.06 P1 = 0.1 MPa Component Parts 0.04 No. Description Material No. Description Material Pressure drop (MPa) q Body BC6 r Operating lever SPCC 0.02 w Rod C3604B t Adjusting gear POM e Gear POM 10 20 30 40 50 60 70 Flow rate (l/min)

16-12-2 3

Diaphragm Style Flow Switch Series IFW5

Dimensions IFW50--00 to 04 (Without terminal box)

ZSE ISE PSE

Z I SE3 PS With neon light Lead wire length ≅ 500

IFW50--10 to 24 (With terminal box)

With neon light

2-3/8, 1/2, 3/4

16-12-3 4 Series IFW5

IFW50--55 to 86

(With light, Terminal box for 24 VDC) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy

“n”

2-3/8, 1/2, 3/4

16-12-4 5

Diaphragm Style Flow Switch Series IFW5

Internal Wiring Diagram IFW50--00/10/20 Precautions Be sure to read before handling. Refer to pages 16-14- A (N.O.) Symbol Contact Color of 3 to 16-14-4 for Safety Instructions and Common C (COM) lead wire C Common Black Precautions on the products mentioned in this B (N.C.) A Normally Open White catalog, and refer to pages 16-1-11 to 16-1-13 for B Normally Closed Red Precautions on every series. Mounting & Wiring ZSE IFW5 0- -01 to 04/11 to 14/21 to 24 ISE Caution 1. Mount a switch, so that the liquid flow is in the same direction as PSE A (N.O.) Symbol Contact Color of C (COM) lead wire that of the arrow on the body. C Common Black Z 2. The flow switch can be installed either horizontally or vertically. I SE3 A Normally Open White B (N.C.) 3. Provide a straight pipe portion that corresponds to B Normally Closed Red approximately 5 times the bore of the pipe before and after the PS area of the pipe on which the product is installed, thus keeping Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy IFW50--55/56 the product as far away as possible from the elements that Z 1 disturb the flow, such as elbows or valves. I SE 2 4. For wiring, refer to the internal wiring diagram. e Color of Symbol Contact lead wire 5. If a terminal box is not available, wire by selecting the contact at ZSP q Power supply (Common) Black 1a or 1b. At that time, insulate the lead wires that will not be w w Ter minal (Relay terminal) Red used. ISA2 24 VDC e Power supply (Light terminal) Blue 6. Because this is an open style, it cannot be used where water or N.O. N.C. oil splashes. IS q 7. It cannot be used if a water hammer or pulsation pressure is applied to the fluid. ZSM 8. In order to prevent a malfunction or diaphragm damage caused IFW5 0- -65/66 by debris or cutting chips in the fluid, install a filter with PF2 approximately 100 mesh on the inlet side of a flow switch.

e Color of Symbol Contact lead wire Adjusting IF q Power supply (Common) Black Caution w w Ter minal (Relay terminal) White Data 24 VDC 1. To adjust flow, remove grommet of the upper cover and rotate e Power supply (Light terminal) Blue N.C. N.O. flow adjusting gear using a flat head screwdriver. Tur ning clockwise can increase the set flow and turning q counterclock can decrease the set flow. 2. Align the indicator needle to the graduation on the left side of the window name plate if the IN side pressure is 0.1 MPa, and IFW5 0- -75/76 to the graduation on the right side if the pressure is 0.2 MPa. (Refer to Fig. (1).)

e Color of 3. The flow rate setting point is set at the ON flow rate. Therefore, Symbol Contact lead wire in the case of the 1a contact, the ON signal is output if fluid with q Power supply (Common) Black a higher flow rate than the set flow rate has occurred. 24 VDC w w Ter minal (Relay terminal) Red In the case of the 1b contact, the OFF signal is output when the e flow rate has decreased from the set flow rate for the amount N.O. N.C. Power supply (Light terminal) Gray that corresponds to the hysteresis. q 4. If the IN side pressure exceeds 0.2 MPa, the setting cannot be made with the graduation on the window name plate. Therefore, perform the setting by installing a flow rate gauge on the outlet IFW50--85/86 side of the flow switch. 5. To prevent the chattering that is associated with the fluctuation of the operating flow rate, set the difference between the set e Color of Symbol Contact lead wire flow rate and the operating flow rate so that it is as large as q Power supply (Common) Black possible. w w Ter minal (Relay terminal) White 6. Use at or below the maximum operating pressure and maximum 24 VDC flow rate. e Power supply (Light terminal) Gray N.C. N.O. Graduations for q adjusting on flow rate

Graduations for IN Graduations for IN pressure 0.1 MPa pressure 0.2 MPa

Fig. (1) Viewing faceplate 16-12-5 For details about certified products 1 conforming to international standards, visit us at www.smcworld.com.

Paddle Style Flow Switch Series IF3

How to Order IF3 series flow switches detect and confirm liquid flow, generally used IF3 1 1 N 10 1 1 in fields such as air conditioning, water supply equipment, etc. Seal material of Paddle style wetted parts flow switch Ȝ Piping sizes ranges from 3/4B to 0 NBR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 6B. 1 FPM Ȝ Wide range of applicable fluids. Wetted metal part materials: Copper alloy, Enclosure Metal material for wetted parts Stainless steel 0 Open type 0 Brass, Phosphor bronze Ȝ Various enclosures (No water Dripproof/Rainproof type 1 1 Stainless steel 304 protected). (Equivalent to IP42) Open type, Dripproof/Rainproof, Splashproof 2 Splashproof/Low jetproof type /Low jetproof type (Equivalent to IP44) Port size 06 3/4 ON-flow range Thread type 10 1 Nil Rc Note 1) IF3 0 is available for 0 14 to 60 l/min “06”. 1 20 to 1500 l/min N NPT Note 2) IF31 and IF33 are 3 36 to 2600 l/min available for “10”.

Specifications

Copper alloy Water/Non corrosive liquid Fluid Stainless Liquid, which do not corrode stainless steel 304. steel 304 Max. pressure 1 MPa Water resistance 1.75 MPa

Insulation resistance 100 MΩ (500 DC by megameter) Withstand voltage 1500 VAC for one min. Contact 1ab Port size 3/4, 1

Micro Switch Ratings

Non inductive load (A) Inductive load (A) Voltage Load resistanceLight load Inductive load Motor load N.C. N.O. N.C. N.O. N.C. N.O. N.C. N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 14 VDC 15 15 3 1.5 10 10 5 2.5 30 VDC 6 6 3 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03

16-12-6 2

Paddle Style Flow Switch Series IF3

Fluid and Ambient Temperature Range Enclosure

Fluid temperature Applicable ambient temperature Note) Open type Using indoors away from water drop. ° ° ° 70 C or less 70 C (70 C) or less Dripproof/Rainproof type When using indoors or outdoors, where it is 80°C 58°C (60°C) or less (JIS C 0920) exposed to water drop. (Equivalent to IP42) ° ° ° Sealed construction. When using in a bad 90 C 47 C (50 C) or less Splashproof/ environment, such as outdoors, or areas 100°C 35°C (40°C) or less Low jetproof type exposed to water stream temporarily, or near (JIS C 0920) Note) ( ) For IF32 the coast. (Equivalent to IP44) ∗ To protect the microswitch, ambient temperature must be lowered when ZSE the fluid temperature exceeds 70°C. ISE

Construction Flow Characteristics PSE Z Upper insulator Fluid: Water, Outlet pressure: 0 MPa I SE3 Micro switch Sealing thread depth: 9 mm (3/4), 11 mm (1) PS Flow range (l/min) Retaining screw Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Mounting ON-flow Z 1 Flow adjusting Flow Minimum Maximum I SE 2 screw rate/setting switch ON OFF ON OFF Port Paddle (m/s) flow flow flow flow Retaining screw size size ZSP (min) (min) 3/4 Long 14 7 38 33 0.66 to 1.79 ISA2 IF30-06 3/4 Middle 18 9 50 44 0.85 to 2.36 3/4 Short 22 11 60 53 1.04 to 2.83 IS 1 Short 20 10 60 55 0.56 to 1.67 ZSM 1 1/4 Short 34 17 100 90 0.57 to 1.67 1 1/2 Short 52 26 160 140 0.63 to 1.95 PF2 2 Middle 45 23 140 125 0.34 to 1.06 IF IF31-10 2 1/2 Middle 90 45 280 250 0.41 to 1.29 3 Middle 80 40 250 220 0.26 to 0.81 Data 4 Long 170 85 550 480 0.33 to 1.05 5 Long 300 150 1,000 870 0.37 to 1.24 6 Long 460 230 1,500 1,300 0.40 to 1.32 1 Short 36 18 110 100 1.00 to 3.05 1 1/4 Short 54 27 160 140 0.90 to 2.67 1 1/2 Short 90 45 270 230 1.10 to 3.29 2 Middle 90 45 270 230 0.68 to 2.05 Component Parts IF33-10 2 1/2 Middle 160 80 500 420 0.74 to 2.30 Material No. Description 3 Long 160 80 500 420 0.52 to 1.63 IF30 IF31 IF32 q Cover SPCD SPCD 12 ADC 4 Long 320 160 1,000 800 0.61 to 1.91 w Mounting plate SPCC Stainless steel 304 Stainless steel 304 5 Long 560 280 1,800 1,450 0.69 to 2.23 e Bellows PBP or Stainless steel 304 6 Long 800 400 2,600 2,000 0.70 to 2.28 r Body C3604B or Stainless steel 304 ON-flow: Flow volume under which a microswitch starts activation while t Mobile bar C2700W or Stainless steel XM7 flow is increasing. y Paddle Stainless steel 304 OFF-flow: Flow volume under which a microswitch starts activation while u O-ring NBR or FPM flow is decreasing. • The maximum flow is twice the maximum ON-flow. • Operating flow volume varies depending on sealing depth and direction, etc. Data shows the reference value.

16-12-7 3 Series IF3

ON-flow Change due to Pressure Pressure Drop Curve

50 0.05

e 40 0.04 ip -flow p e B ip e ON /4 p p 3 pi 30 Min. 0.03 1B B , 3 2B pe 20 0.02 pi

ON-flow change (%) ON-flow B Pressure drop (MPa) 5 B, 1 , 4 10 0.01 1 /4 pipe Max. ON-flow , 6B 21/2B 11/2B, 0 0 0.2 0.4 0.6 0.8 1.0 12345 Pressure (MPa) Flow speed (m/s)

9. Wire the microswitch according to the symbols on the upper Mounting & Wiring insulators. (They will be opposite the terminal symbols on the microswitch. The terminals are screw terminals.) Caution 10. Threads used for the terminals are M4 type. 1. Mount the switch on top of horizontal pipe so that fluid flow is in the direction of the arrow. Internal wiring diagram ± ± Sealing depth should be 9 mm 1 mm for 3/4B and 11 mm Symbol Contact 1.2 mm for 1B. A (N.O.) C Common 2. Mounting orientation is only allowed to install it perpendicularly C (COM) to the horizontal pipe. B (N.C.) A Normally Open 3. Provide a straight pipe portion that corresponds to B Normally Closed approximately 5 times the bore of the pipe before and after the area of the pipe on which the product is installed, thus keeping Adjusting the product as far away as possible from the elements that disturb the flow, such as elbows or valves. Caution 4. Three types of paddles, short, medium, and long, are provided 1. Flow adjustment is done by turning the flow adjusting screw with each model. Use one of them according to the pipe size with Phillips screwdriver. Turning clockwise can increase the and the set flow rate. set flow and turning counterclock can decrease the set flow. 5. When installing a paddle on IF3∗O type, piping may be 2. Flow rate % relation to the number of turns is shown in the interfered with by the tip of a paddle. table below. However, this is just a guide. For precise setting Because this is used to detect a small flow rate, and to narrow use a flow meter. the distance between a paddle and piping, additional machining of the paddle tip may be necessary to eliminate Flow adjusting screw (Rotations) 0 123456789101112 interference between the two. Contact ON-flow (%) 30 40 50 59 68 74 80 85 89 93 96 98 100 6. Use pipe fittings that comply with JIS specifications. 3. The flow rate setting point is set at the ON-flow rate. Therefore, For 3/4B to 3B, use commercially available union tees of in case of 1a contact, ON signal is output when the fluid with different diameters. higher flow than the setting flow rate is flown. For 4B to 6B, use a 1B socket that has been cut in half and In the case of the 1b contact, the OFF signal is output when welded. the flow rate has decreased. 7. When using piping which is non-standard, piping may interfere Refer to the flow rate characteristics table for details on the with the paddle. When this happens, please machine the operation flow rate. paddle accordingly. 4. Do not touch the two types of stop screws that are indicated in 8. It cannot be used when a water hammer or pulsation pressure the construction diagram. is applied to the fluid. 5. To prevent the chattering that is associated with the fluctuation of the operating flow rate, set the difference between the set Applicable fittings flow rate and the operating flow rate so that it is as large as possible. For pipe fitting 3/4B through 3B For pipe fitting 4B through 6B 6. Use at or below the maximum operating pressure and Piping B Reducing tees B Welding Welding maximum flow rate. 7. Spare parts 1 1 x 1 x 1 Short, medium, and long paddles are provided as a 3 piece 1 1 1 1 /4 1 /4 x 1 /4 x 1 set with each model, so arrange them as indicated below.

1B socket 24 or more 1 1 1 1 /2 1 /2 x 1 /2 x 1 cut in half There is no compatibility between the paddle for a 3/4B 2 2 x 2 x 1 connecting bore and for a 1B because their installation pitches 1 1 1 differ. 2 /2 2 /2 x 2 /2 x 1 Arrangement example: Paddle set for IF300-06-00 (Part 3 3 x 3 x 1 number are not existed.) Pipe 4B Reducing tees B: JIS B 2301 through 6B Without flash Socket : JIS B 2302 Pipe : JIS B 3452 16-12-8 4

Paddle Style Flow Switch Series IF3

Dimensions Standard type: 300/301/303 Dripproof/Rainproof type: 310/311/313

ZSE ISE PSE

Z I SE3 PS

B: Paddle middle Paddle B: middle Paddle B:

C: Paddle long Paddle C: IS C: Paddle long Paddle C: ZSM

Dimensions Dimensions Part no. Port size A B C D EF Part no. Port size ABCDE F PF2 3 3 IF300 /4 28 31 34 22 137 101 IF310 /4 28 31 34 22 137 101 IF301 1 37 62 89 28 188 98 IF311 137628928188 98 IF IF303 1 29 39 56 28 155 98 IF313 129395628155 98 Data Splashproof/Low jetproof type: 320/321/323

Regular hexagon G1/2 depth 17 For wiring width across flats 36

Port size A: Paddle short Paddle A: B: Paddle middle Paddle B: C: Paddle long Paddle C:

Dimensions Part no. Port size A B C D E F 3 IF320 /4 28 31 34 22 143 107 IF321 137628928194 104 IF323 129395628161 104 16-12-9 5 Series IF3

Flow Rate vs. Flow Speed

1 1 1 2 3/4B (ø21.6) 1B (ø27.6) 1 /4B (ø35.7) 1 /2B (ø41.6) 2B (ø52.9) 2 /2B (ø67.9)

1.8

1.6 ø80.7) 3B ( 1.4

1.2

1 4B (ø105.3)

Flow speed (m/s) Flow 0.8

0.6 5B (ø130.8) ø155.2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 0.4 6B (

0.2

0 50 100 150 200 250 300 350 400

Flow rate (l/min)

( ): Gas pipe bore sizes

16-12-10 8

ZSE ISE PSE

Z I SE3 PS

16-13-1 9 Glossary of Terms

A I R

Absolute pressure····················· Input impedance······················· Reducer···································· Accuracy··································· Insulation resistance················· 16-13-3 Reed switch······························ Analog output function·············· 16-13-3 Internal voltage drop················· Relative pressure······················ 16-13-4 Auto preset function·················· Repeatability····························· & Auto shift function····················· Residual voltage······················· 16-13-5 K Response time·························· Reversed output mode············· C Key lock mode·························· 16-13-4 Ripple········································

Channel selection function········ Chattering································· L S Condensation···························· 16-13-3 Connection port size················· Leakage current························ Self-diagnostic function············· Connector································· Liquid contact part···················· Sequence controller (PLC)······· Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Current consumption················ Load·········································· Setpoint adjustment angle········ Load current······························ 16-13-4 Setpoints··································· Load impedance······················· Shock resistance······················ 16-13-5 D Load lock chamber··················· Solid state switch······················ Load voltage····························· Stainless diaphragm················· Detection range························ Suction filter······························ Deviation level indicator light······· SUS ∗∗∗···································· Diffusion type semi- M Switch output···························· conductor pressure sensor······· 16-13-3 Digit (Minimum displayable unit)········· Maximum operating pressure··· Digital pressure switch·············· Minimum displayable T 16-13-4 DIN rail······································ pressure unit (digit)··················· Minimum setting unit (digit)······· Temperature characteristics····· The amount of leakage············· 16-13-5 E TSJ··········································· N Ejector······································· 16-13-3 Noise resistance······················· U Non reversed output mode······· 16-13-4 F Normal mode···························· Unit conversion························· 16-13-5 NPN output······························· URJ··········································· F.S.··········································· Failure predict output function······· Frequency response················· 16-13-3 O V Full scale··································· Full span··································· ON-OFF output························· Vacuum breaking pressure······· Open collector··························· Vibration resistance·················· 16-13-5 Operating humidity range········· Voltage resistance···················· G Operating indicator light············ 16-13-4 Operating pressure range········· Gas contact part······················· Operating temperature range········ W Gauge pressure························ 16-13-3 Operating voltage····················· Grommet··································· Orifice······································· Window comparator mode········ 16-13-5

H P Z

Hysteresis································· Panel-mounting························· Zero out (Zero ADJ)·················· 16-13-5 Hysteresis································· 16-13-3 Peak high display mode············ Hysteresis mode······················· Peak low display mode············· 16-13-4 PNP output······························· 0-9 Proof pressure·························· Protective construction············· 2-wire type pressure switch······ 16-13-5

16-13-2 10 Glossary of Terms

A Absolute pressure Digital pressure switch The pressure based on the absolute vacuum condition (0 standard). The pressure switch manages signals via a sensor using a micro computer Absolute pressure display mode on Series PSE100 is a mode where like a CPU, it indicates pressure valve in digital output, ON-OFF. display is based on the atmospheric pressure. DIN rail Accuracy The rail equivalent to DIN Standard in Germany. The products introduced The maximum difference between the true value and that indicated by an in this catalogue are corresponding to 35 [mm] width type. instrument is the measure of the instrument’s accuracy. It is expressed as a percentage of the full-scale value of the reading according to the type of instrument. ZSE E ISE Ejector Analog output function Simple piece of equipment to generate a vacuum. Positive air pressure is PSE A voltage or current output which has a value proportional to the measured used to generate a vacuum. No moving parts. pressure. Z 5 V I SE3 F PS oltage 1 V F.S. Output v

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy F. S. is the abbreviation for Full Span or Full Scale. The maximum 0 Pressure Rated pressure Z 1 fluctuation width. I SE 2 Graph (1) EX.) When output voltage is 1 to 5 [V], Auto preset function F. S. = The max. voltage – The min. voltage ZSP Refer to “Technical Information” on page 16-13-9. = 5 [V] – 1 [V] = 4 [V] Auto shift function ISA2 Refer to “Technical Information” on page 16-13-10. Failure predict output function Refer to “Technical information” on page 16-13-9. IS C Frequency response ZSM The inverse number of response time. The higher the frequency becomes, Channel selection function the shorter the response time becomes. Refer to “Technical Information” on page 16-13-11. PF2 Full scale Chattering Same meaning as F.S. If the ON and OFF setpoints are of identical value with no hysteresis, IF “chattering” occurs. Chattering refers to the repeated change of an output from “High” to “Low” at a high frequency. Full span Data Same meaning as F.S. Condensation Natural phenomenon. Humidity in the air collects on colder surfaces and liquefies. G Gas contact part Connection port size Wetted parts. Parts that are in contact with the process fluid. Size of the process connection on the switch. Gauge pressure Connector Pressure converted as the atmospheric pressure to be the reference value (0). Type for wiring by a lead wire with a connector. Grommet Current consumption No worry about coming it off with vibration, etc. Maximum current needed for normal operation. Does not include the load current. H Hysteresis D The difference between the “OFF” state and “ON” state value at a given Detection range setpoint value. Distance at which an instrument such as the Air Catch Sensor is operational. Hysteresis mode Refer to “Technical Information” on page 16-13-8. Deviation level indicator light The indicator light which shows how much the current value differs from the setting value in Air Catch Sensor. I Input impedance Diffusion type semi-conductor pressure sensor The impedance at the input terminals of a circuit, transmission line, etc., Pressure sensor, which sensor part (sensor chip) for detecting the “seen” by a signal source, expressed in ohms. pressure is formed by the diffusion resistance on a diaphragm made of silicone. Insulation resistance Resistance between electrical circuit and the body. Digit (Minimum displayable unit) When displaying pressure by Digital Pressure Switch, it indicates how fine Internal voltage drop it can display or set. In case of 1 digit = 1 kPa, it is displayed like 1, 2, 3 . . . Caused by the resistance of an electrical part in an electronic circuit. 99, 100, with displaying every 1 kPa. Example is a 2-wire pneumatic pressure switch.

16-13-3 11 Glossary of Terms

K Key lock mode Operating humidity range It is the function to prevent from malfunctioning. Commands other than Humidity range for normal operation. unlocking key lock mode by pressing the botton can not to be accepted. Operating indicator light L LED indicator is on when ON-OFF output is ON. Leakage current Operating pressure range Current flow at the “OFF” state. Ideally, this value is “0”. Pressure range. The unit was designed to operate in.

Liquid contact part Operating temperature range Wetted parts. Parts that are in contact with the process fluid. Temperature range for normal operation.

Load Operating voltage Electrical appliance connected to the output, e.g. relay, solenoid, etc. Voltage range for normal operation.

Load current Orifice

Current flow through the electrical appliance once the output is energized. Restriction for controlling flow of fluid. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Load impedance Resistance of the load that impedes the current flow. P Panel mounting Load lock chamber To allow a product to be mounted on a panel in an appealing and secure Vacuum chamber located in front of the main vacuum chamber in fashion. semiconductor production line. Prevents main vacuum chamber to be SMC panel mount type is designed in advance for easy installment on a contaminated (loss of vacuum) during the loading and unloading process. panel.

Load voltage Peak high display mode Voltage supplied to load. Refer to “Technical Information” on page 16-13-8. Peak low display mode M Refer to “Technical Information” on page 16-13-8. Maximum operating pressure Maximum operating pressure the unit is designed for. Exceeding this PNP output pressure could result in malfunction of or damage to the unit. Refer to “Technical Information” on page 16-13-7.

Minimum displayable pressure unit (digit) Proof pressure Minimum unit to indicate pressure. If the min. display unit is 1 [kPa], display A pressure exceeding the upper limit. It will result in damage to product. indicates in each 1 [kPa] (by [kPa]) i.e. 0, 1, 2, 3 . . . 99, 100 [kPa]. Protective construction Minimum setting unit (digit) Refer to “Technical Information” on page 16-13-13. The least possible unit to set pressure value on the digital pressure switch. If the minimum setting unit is 1 [kPa], setting is possible only with integer multiplies of that number i.e. 1, 2, 3 . . . (Not available 1.5, 2.5 . . .). R Reducer N One of the connection types. Connect directly to the “One-touch” fittings. Noise resistance Reed switch Amount of electrical noise, an electrical appliance can withstand without Type of switch in which two strips of magnetic material sealed inside a malfunctioning. glass tube are caused to come into contact by the magnetic field of a nearby magnet. Non reversed output mode Refer to “Technical Information” on page 16-13-8. Relative pressure Converted pressure value based on any own decided standard pressure. Normal mode When based on the absolute vacuum, it is called Absolute Pressure, while Refer to “Technical Information” on page 16-13-8. based on the atmospheric pressure, it is called Gauge Pressure.

NPN output Repeatability Refer to “Technical Information” on page 16-13-7. Refer to “Technical Information” on page 16-13-9. Residual voltage O Voltage occurred in COM and output when the switch output is in ON state. It varies depending on an applied load current. It is ideal to be “0”. ON-OFF output Refer to “Technical Information” on page 16-13-6. Switch output. Response time The inverse number of frequency response. The shorter the response time Open collector becomes, the higher the frequency becomes. Internally the output wire and terminal are directly connected to collector of output transistor. (Refer to Fig. (1) and (2).) C: Collector E: Emitter B: Base B: Base

E: Emitter C: Collector Fig. (1) NPN type Fig. (2) PNP type 16-13-4 12 Glossary of Terms

U Reversed output mode Unit conversion Refer to “Hysteresis mode” and “Window comparator mode” in “Technical Refer to “Technical Information” on page 16-13-13. Information” on page 16-13-8. URJ Ripple Abbreviation of Union Ring Joint and means VCR fitting. VCR is a A small AC voltage superimposed on top of DC voltage. registered trademark of Swagelok Marketing Co. In the case of Fig. (3), ripple 10% means V' ≥ V" V'/V x 100 = 10% V When no pulsation has occurred, ripple is 0%. ZSE Vacuum breaking pressure ISE

V' Positive pressure added for releasing the work or quickly returning to V" atmospheric pressure after breaking the vacuum condition. V PSE Vibration resistance ZSE3 The amount of vibration a device can withstand without damage. I Time Fig. (3) Voltage resistance PS Maximum voltage level when voltage runs between electrical circuit and Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy S Z 1 body. The value indicates strength against voltage. If higher voltage runs, I SE 2 Self-diagnostic function product may be damaged. (In this case, voltage is different from power Error message is displayed if the unit is operated outside its designed supply voltage to operate product.) operational envelope. ZSP

Sequence controller (PLC) W ISA2 Programmable logic controller. Depending on application, it can utilize Window comparator mode inputs from pressure or limit switches and control outputs executing a Refer to “Technical Information” on page 16-13-8. IS control program down loaded in its memory. ZSM Setpoint adjustment angle Z The number of turns. The potentiometer can be rotated normally given in degrees e.g. 270° for a standard potentiometer. Zero out (Zero ADJ) PF2 Reset of the display to zero at atmospheric pressure. Setpoints IF The number of the ON-OFF output points in one product. Product with 2 setting points means 2 output type. 0-9 2-wire type pressure switch Data Shock resistance Refer to “Technical Information” on page 16-13-12. The amount or severity of shock, an appliance can withstand without damage.

Solid state switch Typically a transistor. A solid state switch does not have any mechanical parts.

Stainless diaphragm Material of a diaphragm for detecting pressure is made of stainless steel.

Suction filter Filter installed between the vacuum pad and the ejector to prevent dust entry to the ejector.

SUS ∗∗∗ JIS symbol classifying the grade of stainless steel.

Switch output Refer to “Technical Information” on page 16-13-6, ON-OFF output. T Temperature characteristics Refer to “Technical Information” on page 16-13-9.

The amount of leakage As an example, testing for detecting leakage is called a leak test.

TSJ Abbreviation of Tube Swage Joint. We recommend the swage lock fitting® made by Chroford Fitting be used.

16-13-5 13 Technical Information

1 Outline 3 Difference between ON-OFF and Analog output

The Pressure Switch detects pressure of gases or liquids. Built-in circuitry Ȝ ON-OFF output allows for the adjustment of set points and outputs. Outputs are ON-OFF ON-OFF output is also referred to as switch output. Fig. (1) shows an solid state or reed switch type outputs. Some models feature analog equivalent circuit of a NPN switch with the output off. In this circuit the outputs. The pressure is detected using solid state, metal diaphragm or load is not powered, because there is no current flow. Negative potential piston type sensors. Applications for pressure switches are numerous and is not connected. include areas such as positioning, leakage testing, supply pressure When using a PLC, the input section sees a high level. verification, etc.

PLC High level 2 How pressure is detected 12 to 24 [VDC] Ȝ Solid state sensor Max. 80 [mA] This sensor is used in dry air and inert gas applications. Four diffused Max. 30 [V] Load resistors form a bridge circuit on a silicon diaphragm. When pressure is applied, the diaphragm is deflected causing the diffused resistors to No current flow. change resistance (piezoelectric effect). An electrical signal, which is Load is not powered.

proportional to the pressure change, is inputted during normal Main circuit of switch

Fig. (2) Equivalent circuit of a NPN type switch with the output on

P: Pressure Silicon diaphragm or stainless diaphragm Ȝ Analog output 4 diffused resistors An analog output provides an output voltage that is proportional to the forming a bridge circuit. pressure measured by the sensor.

Analog Output—Pressure Characteristic Graph 5 When diaphragm is deformed by applying pressure, resistance value of diffused resistor varies and therefore sensor output does too, due to piezoelectric effect. As the pressure increases, sensor output voltage becomes larger. (Refer to 1

the graph left.) (V) Output voltage Sensor output voltage V Sensor output voltage 0 Pressure Rated voltage Pressure P Vacuum Absolute vacuum ZSE5B/6B: –100 [kPa] to 100 [kPa] = 1 to 5 [V]

16-13-6 14 Technical Information

4 Difference between NPN and PNP output Ȝ NPN

12 to 24 [VDC] Fig. (1) shows an example of a NPN switch. The solid state switch output is an open collector output. The NPN refers to type of output transistor used. Max. 80 [mA] NPN transistor Fig. (3) shows the equivalent circuit with the output transistor in its ON Max. 30 [V] Load state. The current for the load flows in (sinks) to the transistor. The NPN type of output is also referred to as the “Sinking Type”. In order for this circuit to work, the other side of the load has to be connected to the positive terminal of a power source. The diagram on the left shows two ZSE Main circuit of switch power sources, one for the load and one for the switch. In actual ISE applications it will cause no problem to use one source for both. Fig. (1) Connection example of NPN output Summary: An NPN output has the current flowing from the load into the PSE PLC High level transistor when energized. (Sinking type) (PLC uses the one for VaCOM.) Z 12 to 24 [VDC] I SE3 Max. 80 [mA] Max. 30 [V] PS Load

12 to 24 [VDC] Fig. (4) shows an example of a PNP switch. The solid state switch output is an open collector type output. The PNP refers to the type of output transistor used. Fig. (6) shows the equivalent circuit with the output Max. 80 [mA] transistor in its ON state. The current for the load flows out (sources) of the Load transistor. The PNP type of output is also referred to as the “Sourcing PNP transistor Type”. In order for this circuit to work the other side of the load has to be connected to the negative common. Main circuit of switch Summary: A PNP output has the current flowing from the transistor to the load when energized. (Sourcing type) (PLC uses the one for GNDCOM.) Fig. (4) Connection example of PNP output PLC Low level 12 to 24 [VDC]

Max. 80 [mA] Load No current flow. Load is not powered. Main circuit of switch

Fig. (5) Equivalent circuit of a PNP switch with the output off

PLC High level 12 to 24 [VDC]

Max. 80 [mA] Load Current flows. Load is powered. Main circuit of switch

Fig. (6) Equivalent circuit of a PNP switch with the output on

16-13-7 15 Technical Information

5 Hysteresis mode Hysteresis is the difference between the ON and OFF value of an output. This is necessary to prevent the switch from “Chattering” once the setpoint is reached. In the case of “Normal Mode”, the output remains ON until the Hysteresis mode acuum V

pressure falls to a level below the setpoint minus the hysteresis. This Set value P1 (n1) means the output will be turned off at a specific pressure which can be Hysteresis calculated as follows: P2 (n2)

OFF switch point = setpoint – hysteresis 00 Time “Reversal Mode” is defined as: ON switch point = setpoint – hysteresis Normal ON mode output OFF Time Reverse ON mode output OFF Time

6 Window comparator mode Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy This mode is used when the output has to stay ON within a certain High Accuracy Pressure Switch Series PSE pressure range. The hysteresis is fixed (3 digits) (ZSE5B/6B: 2 digits). This mode is used when the output has to stay ON within a certain When calibrating the switch, make sure that calibration point P1 is at least pressure range. The hysteresis for these switches is fixed at 2% F.S. The 7 digits different from calibration point P2. The effective area of operation is effective area of operation is shown in the graph and is marked with “L”. shown in the graph and is marked with “L”. If the difference between P1 Thus, Series PSE100 can be set without paying attention to the difference and P2 is less than 6 digits, this mode will not operate. between P1 and P2. In the case of a switch with 2 outputs, the Output 2 is using calibration points P3 and P4. Reversal Mode reverses above operation. Window Comparator Mode can be applied in situations where the supply pressure has to be within a certain range.

L = Effective area L = Effective area

Window comparator mode H = Fixed hysteresis (3 digits) acuum Window comparator mode H = Fixed hysteresis (2% F.S.) acuum V V Set value H Set value P2 (n2) P2 (n2) H L

P1 (n1) H P1 (n1) HL 00 00 Time Time Normal ON Normal ON mode mode output output OFF OFF Time Time Reverse ON Reverse ON mode mode output output OFF OFF Time Time Caution: Motion differs only for remote controlled high accuracy pressure switch series PSE100. Refer to the right chart.

7 Peak high and peak low display modes Ȝ Z/ISE3, Z/ISE4, 4B, 4E, Z/ISE5B, 6B Ȝ Peak high and peak low display modes for PSE100

High High High High Peak mode high Peak mode high High acuum V Pressure acuum V Pressure Peak mode low Peak mode low Low Low Low Low Low Time Time Under most operating conditions the pressure will vary over time (see Summary: Pressure fluctuations are constantly monitored and the graph). The highest pressure measured is stored and displayed as “Peak maximum or minimum pressures updated. This function allows the user to Mode High”. The lowest pressure measured is stored and displayed as record the quality of his pressure regulation before performing any kind of “Peak Mode Low”. calibration procedures. Applications include the control of pressure in a caulking operation.

16-13-8 16 Technical Information

8 Temperature characteristics 10 Failure predict function The temperature characteristic is defined as the change in linearity over a In the case of performance decrement caused by clogging up the silencer given temperature range. All data given in a technical specification sheet is of vacuum system (ejector), cracking of vacuum pad, or decreasing the based on 25[°C]. The temperature range is dependent on the product vacuum reaching degree by leakage from vacuum piping, it detects the series. Normally SMC products are rated from 0 to 50[°C] or 0 to 60[°C]. abnormality quickly and send out the output to the outside right before the system comes to a stop. In case the ON-OFF output is in the normal mode, when the failure predict 5.12 Example) When the property at the temperature output switches ON (over P1), and the pressure turns OFF without 5 characteristic condition ±3.0 [% F.S.] and reaching the failure predict pressure (P3), the number of failure predict 25[°C] is expressed by the bold line in the chart 4.88 detection is counted. When it is consecutively counted up to the failure ZSE on the left, how much temperature effect will predict numbers (EC) preset, the failure predict output will turn ON. When the analog output voltage receive? It can be ISE determined. a switch turns ON, (over P1) and the pressure exceeds the failure predict Example: Analog output = 1 to 5 [V] pressure (P3), the count of failure predict numbers will be reset. PSE F. S. = 5 [V] – 1 [V] = 4 [V] 1.12 ±3 [% F.S.] = 4 x 0.03 = ±0.12 [V] Z 1 The output error induced by the temperature I SE3 0.88 change can be as much as ±0.12 [V]. Since P3 Analog output voltage [V] Analog output voltage 0 this is the maximum value, the error will Pressure Rated P1 Pressure actually occur within the range enclosed by the PS thin line in the chart on the left. acuum P2 V Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Example) When the property at the temperature Z 1 103 I SE 2 100 characteristic condition ±3.0 [% F.S.] and 97 25[°C] is expressed by the bold line in the chart ON Time on the left, how much temperature effect will ZSP the analog output voltage receive? OUT1 OFF The chart on the left illustrates the example when 100 [kPa], F.S. = 100 – 0 = 100 [kPa], ON Time Output ON ISA2 ±3.0% F.S. = 100 x 0.03 = ±3 [kPa]. It means

that if the tempareture is changed within the ailure

F predict output OFF range of 0 to 50[°C], the error will occur at the IS 3 max. ±3 [kPa]. Since this is the maximum value, Time

Pressure indication [kPa] Failure predict 0 the error will actually occur within the range Since it is normal, Abnormal Abnormal Abnormal Pressure [kPa] 100 number (EC) –3 enclosed by the thin line in the chart on the left. the number count EC = 1 EC = 2 EC = 3 ZSM is reset EC = 0. PF2 We explained by giving 2 examples. As for temperature characteristics, the smaller this value is, the smaller the error would be. That means it is strong 11 Auto preset function against the temperature changes. IF Auto preset function enables automatic selection of the optimum set point value when the pressure switch is used for adsorption confirmation simply by repeating the adsorption and release cycle with the workpiece. Data 9 Repeatability Refer to the catalog and instruction manual for how to enter the auto preset mode. This section describes calculation of the set value. The repeatability is defined as the ability of an instrument to provide the How to Calculate the Set Value same output every time for the same input. Usually given as a percentage A = Max. pressure value in auto preset mode of the full scale value. B = Tentative min. pressure value in auto preset mode Example: Full scale reading 100 [kPa] Setpoint for output 50 [kPa] P1 = A – (A – B)/4 Repeatability ±1 [% F.S.] P2 = B + (A – B)/4 F. S. = 100 [kPa] – 0 [kPa] = 100 [kPa] Manual adjustment is possible after finishing in the auto preset mode. ±1 [% F.S.] = 100 [kPa] x 0.01 = ±1 [kPa] The deviation from the setpoint is ±1 [kPa]. This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.) Note: If the pressure switch allows an error of 1 [% F.S.], the output Starting Finished turns ON at 51 [kPa]. Taking the repeatability into account, the Adsorption Adsorption output turns ON at 50 to 52 [kPa] and, in the same way, the AdsorAdsorptionption Adsor Adsorptionption A pressure display turns 50 [kPa] at 49 to 51 [kPa]. (Refer to the P1 chart below.)

Thus, the smaller the repeatability, the more precision in acuum V reproduction the product achieves. P2 No adsorption Released Released Released B Released Time

NOTE: Make sure to NOTE: Make sure to 51 51 generate a continue vacuum 50 Effective area of vacuum before vacuum when 49 49 pressure indication calibration. finished. at 50 [kPa].

Set value [kPa] Set value Note) In the case of using this function on PSE100, input the auto shift

Time Pressure indication Actual pressure [kPa] ON signal while workpiece is not adsorbed. Judging as B = 0, calibrate the set point value. OFF In the meantime, output will be turned ON. Time Normal mode

Effective area for switch to become energized.

16-13-9 17 Technical Information

12 Auto shift function The auto switch function is the function to regard the pressure value at the Another application for the auto shift function would be the testing for point of this signal being input as the benchmark and to display and leaks. Under normal circumstances a vessel charged with compressed air conduct switching. For example, it will be used to take countermeasures to a certain pressure will stay pressurized at the same pressure level against the main line pressure fluctuation. If the main line pressure is unless the vessel has a leak. If the vessel has a small leak the pressure fluctuated, the performance of an ejector will vary and also the pressure will decrease over time. No vessel is absolutely leakproof, therefore will cange at the non-adsorption case. Therefore, the phenomenon that leakage testing is done measuring the amount of pressure drop over a switching is not done will take place, even if a workpiece is in suction. period of time. Using a pressure switch, an output can be generated as (Refer to the chart below.) The auto shift function is utilized like this case. soon as the pressure level decreases by 1 [kPa], for example. Without the Auto shift function the vessel has to be charged to the exact pressure level Supply pressure normal Supply pressure drop Supply pressure increase every time. If the initial pressure level is too high the output of the switch does not become energized at all or becomes energized after an excessive amount of time. If the pressure is too low the output is always P1 energized. In either case it is impossible to determine if the vessel is good

acuum P2 or bad. V Set value

Normal filled Insufficient filled Excessive filled Operating normally Time pressure pressure pressure ON Not turned ON n1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy with adsorption Not turned OFF with n2 OFF non-adsorption

Time Set value Normal mode When the Auto Shift Function is NOT used. Filled pressure If the auto shift function is used, switching will be done by regarding the point of this signal being input as the benchmark. Therefore, switching can Time be surely done as long as the auto shift signal is being input at the non- ON adsorption case. And if the auto shift signal is input, the pressure value at the benchmark OFF will be defined to be 0 on display. As such, the set value to be set at the mode Reverse Time time of confirming adsorption will be converted from the time when the When the Auto Shift Function is NOT used. auto shift signal is input. In case the auto shift is not at all used, switching is done just on the basis of either larger or smaller than the set value. To combat fluctuations in initial pressure level, the auto shift feature is Meanwhile, when the auto shift is used, switching will be done by whether activated as soon as the vessel is charged. The initial pressure level is now to fluctuate by the set value from the benchmark (from the time of inputting used as a reference. As soon as the pressure drops by 1 [kPa] (see auto shift). (Refer to the chart below.) example above) from the point at which the auto shift feature is activated, the output is energized. Refer to the chart below.

Supply pressure normal Supply pressure drop Supply pressure increase Normal filled Insufficient filled Excessive filled pressure pressure pressure P1 n1 n1 n2 P1 P2 n2 n1 acuum P1

V P2 n2 Set value

P2 Set value

Time Filled pressure Operating normally Operating normally Operating normally ON Time ON

Normal mode OFF Time OFF Reverse mode Reverse When the Auto Shift Function is used. Time When the Auto Shift Function is used.

O-SHIFT GND 10 [ms] T terminal or longer AU Disconnected

O-SHIFT GND T terminal 10 [ms] or longer AU Disconnected

16-13-10 18 Technical Information

13 Channel selection function How to Activate the Auto Shift Function Channel Selection Function is explained with an example when adsorbing Pull the AUTO-SHIFT input to GND for at least 10 [ms]. The auto shift workpiece. The pressure on the nozzle varies according to the nozzle feature is activated by the rising flank of the auto shift input. The Display diameter. It is necessary to change the setting pressure whenever and Set points are now based on the pressure at the moment of release changing the nozzle size in line. But in reality, it is impossible to stop the after auto shift input. line only for change of nozzle. Pressure switches are required for each nozzle to change the pressure without stopping the line. Channel Selection Example: The figure below is based on the condition of set values as P1 = Function is adopted for that case. 40 [kPa] and P2 = 20 [kPa]. Nozzle 1 Replacement of nozzle Nozzle 2 ZSE ISE 100 P1 PSE acuum

V Set value P2 Z 50 Nozzle 1: Large diameter I SE3 Nozzle 2: Small diameter Time PS

Actual pressure (kPa) ON 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Time Abnormal operation Z 1 100 OFF I SE 2 Normal mode Time It is also available for adjusting one nozzle to the different form of works. ZSP 50 When there are two types of nozzles, OUT1 and OUT2 are adopted without any problems like OUT1 for Nozzle 1 and OUT2 for Nozzle 2. Display [kPa] Display ISA2 When more than 3 types of nozzle are needed, A and B channels are available for selection; thus 2 outputs x 2 channels = 4 outputs are 0 0 IS Time available. B) B) A) A) . . . . ZSM 10 [ms] GND –50 Nozzle 1 Nozzle 2 Nozzle 3 Nozzle 4 P3 P1 P4 P1 P3 PF2 O-SHIFT terminal After 10 [ms] is passed, P4 T 10 [ms] display is unstable P2 P2 AU 10 [ms] around zero during the –100 IF time exceeded. Disconnected Set value of OUT2 (CH Set value of OUT2 (CH Set value of OUT1 (CH Set value Time of OUT1 (CH Set value Data ON Time ON Normal mode ON-OFF output OFF OFF Time Time Operate in the manner same Since auto shift signal is Certain switching can be obtained by selecting the output corresponding to as ordinary inputted at applying 50 the nozzle as the graph above. since auto shift kPa, switching is done at function is not pressures of 90 [kPa] used. and 70 [kPa]. How to Select the Channel When the CH.SELECT terminal is open state, CH.A is selected, while when connecting with GND, CH.B is selected. It takes 10 [ms] to switch the channel.

CH.B 10 [ms] 10 [ms]

Channel CH.A Time GND

terminal 10 [ms] 10 [ms] CH.SELECT Disconnected Time

16-13-11 19 Technical Information

14 2-wire pressure switch connections 15 Voltage and current output pressure sensors A 3-wire type switch is a switch that has an output line other than the Voltage output signal is a voltage signal in the range of 1 to 5 [V]. The positive and negative lines that supply the electricity. When there are 2 signal has to be converted by an A/D converter for pressure display or outputs, 4 lines will be required in total. This type of switch belongs to the switch output. Current output signal is a current signal in the range of 4 to family of 3-wire type switches. 2-wire type switches have only positive and 20 [mA]. The signal is transformed into a voltage signal before being negative wires that are used for supplying the electricity from the power converted by a A/D converter for pressure display or switch output. source and for providing the output as well. Advantages and Disadvantages (Long distance applications) When the voltage signal has to travel any amount of distance, voltage The 2-wire type works with both the sinking type (current runs into the drops occur due to the resistance of the lead wire. The voltage drop switch) and the sourcing type (current is flown out of the switch). It is increases proportional with the resistance of the wire and thus proportional dependant upon whether a load is connected with the positive or negative with the length of the wire. side. These switches are known for high speed response, longevity, and they can reduce wiring work.

Voltage drops at the value of “r” x “I”. 1 to 5 [V] Caution Current “I” “PS1000, PS1100” Lead wire resistance “r” The load current range for a PS1000 and PS1100 is between 5 [mA] to 40 Sensor Equipment Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy [mA]. Current If 40 [mA] is exceeded the output transistor could be damaged. Besides, do not connect a PLC, which can detect 1 [mA], since there is a leak GND GND current of 1 [mA] in OFF state. It may result in an error when the electric potential difference is caused between sensor’s GND 5 to 40 [mA] Brown OUT(+) and GND of a receiver device. Load Connection of the voltage output

It appears that it would be of benefit to reduce the current flow as much as possible, however if the current is reduced too much other problems, such as inductive noise from external devices, occur. Result: Voltage outputs are

12 to 24 [VDC] not suitable for long distance applications. SMC’s analog outputs are all of Main circuit of switch Blue OUT(–) the voltage variety, but tests have proven that there is no problem in applications of 10 [m] or less. Connection example when used as a sinking type Current is the same value. 4 to 20 [mA] Current I Brown OUT(+) Lead wire resistance “r” Sensor Equipment Current

GND GND Connection of the current output 5 to 40 [mA] Load 12 to 24 [VDC] The current flow is the same regardless of the distance. The cost of a Main circuit of switch Blue OUT(–) current system is higher, because the voltage signal has to be converted to a current signal on one end of the transmission line, then on the other Connection example when used as a sourcing type end it has to be converted to a voltage signal again. The packaging size of a current sensor might be larger due to the size of the additional parts. Connection example with PLC NPN compliant Sourcing type Input unit Brown Input unit Switch

Blue Connection example with NPN compliant, sourcing type input unit

PNP compliant Sinking type Input unit Input Input unit Switch

Brown

Connection example with PNP compliant, sinking type input unit

16-13-12 20 Technical Information

Operable fluids by pressure switch 16 Protective construction 18 for general purpose fluids Stainless steel IP Metal exists in nature as ore (like oxide or sulfide). This means that oxide or sulfide is more stable than pure metal. Accordingly, metallic material Second characteristic numeral chemically oxidizes (metallic constituent becomes ion and melts out). It corrodes in the natural environment. First characteristic numeral Even though corrosion of metal easily occurs in an environment where oxidizing tendency is stronger, some kinds of metal have a characteristic for which corrosion never happens if the level of oxidizing goes higher than a specific point. In such a case, it is called “metal in passive state”. Ȝ ZSE First Characteristics: Stainless steel has corrosion resistance because of a thin coat of passive ISE Degrees of protection against solid foreign objects state on its surface. However, there does not exist stainless steel with absolute corrosion resistance; therefore, many types of stainless steel 0 Non-protected have been developed for improved corrosion resistance performance. PSE 1 Protected against solid foreign objects of 50 mm ø and greater SMC Pressure Switch and Pressure Sensor for general purpose fluids have adopted stainless steel 304 for the fittings where in contact with fluids Z 2 Protected against solid foreign objects of 12.5 mm ø and greater I SE3 as well as stainless steel 630 for diaphragm of sensor part. 3 Protected against solid foreign objects of 2.5 mm ø and greater Corrosion resistance performance of both stainless steel 304 and stainless PS 4 Protected against solid foreign objects of 1.0 mm ø and greater steel 630 is almost the same level in anti-corrosiveness property.

Unit

Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 1x 10–3 1x 10–6 1x 10–5 1.0197 x 10–5 9.8692 x 10–6 1.0197 x 10–1 7.5006 x 10–3 1.4503 x 10–4 1x 103 1 1x 10–3 1x 10–2 1.0197 x 10–2 9.8692 x 10–3 1.0197 x 102 7.5006 1.4503 x 10–1 1x 106 1x 103 1 1x 10 1.0197 x 10 9.8692 1.0197 x 105 7.5006 x 103 1.4503 x 102 1x 105 1x 102 1x 10–1 1 1.0197 9.8692 x 10–1 1.0197 x 104 7.5006 x 102 1.4503 x 10 9.8067 x 104 9.8067 x 10 9.8067 x 10–2 9.8067 x 10–1 1 9.6784 x 10–1 1 x 104 7.3556 x 102 1.4217 x 10 1.0133 x 105 1.0133 x 102 1.0133 x 10–1 1.0133 1.0332 1 1.0332 x 104 7.6000 x 102 1.4706 x 10 9.8067 9.8067 x 10–3 9.8067 x 10–6 9.8067 x 10–5 1 x 10–4 9.6784 x 10–5 1 7.3556 x 10–2 1.4220 x 10–3 1.3332 x 102 1.3332 x 10–1 1.3332 x 10–4 1.3332 x 10–3 1.3595 x 10–3 1.3158 x 10–3 1.3595 x 10 1 1.9330 x 10–2

Ex. 1) Convert the units of 350 [mmHg] to [kPa]. 1 [mmHg] = 1.3332 x 10–1 1.3332 x 10–1 x 350 = 46.662 [kPa] Ex. 2) Convert the units of 80 [kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 x 10–2 [kgf/cm2] 1.01972 x 10–2 x 80 = 0.81576 [kgf/cm2]

16-13-13 1

Safety Instructions

These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by labels of "Caution", "Warning" or "Danger". To ensure safety, be sure to observe ISO 4414 Note 1), JIS B 8370 Note 2) and other safety practices.

Operator error could result in injury or equipment damage. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Caution :

Warning : Operator error could result in serious injury or loss of life.

Danger : In extreme conditions, there is a possible result of serious injury or loss of life.

Note 1) ISO 4414: Pneumatic fluid power--General rules relating to systems. Note 2) JIS B 8370: General Rules for Pneumatic Equipment

Warning

1. The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications. Since the products specified here are used in various operating conditions, their compatibility for the specific pneumatic system must be based on specifications or after analysis and/or tests to meet your specific requirements. The expected performance and safety assurance will be the responsibility of the person who has determined the compatibility of the system. This person should continuously review the suitability of all items specified, referring to the latest catalog information with a view to giving due consideration to any possibility of equipment failure when configuring a system. 2. Only trained personnel should operate pneumatically operated machinery and equipment. Compressed air can be dangerous if an operator is unfamiliar with it. Assembly, handling or repair of pneumatic systems should be performed by trained and experienced operators. 3. Do not service machinery/equipment or attempt to remove components until safety is confirmed. 1. Inspection and maintenance of machinery/equipment should only be performed once measures to prevent falling or runaway of the driver objects have been confirmed. 2. When equipment is to be removed, confirm the safety process as mentioned above. Cut the supply pressure for this equipment and exhaust all residual compressed air in the system. 3. Before machinery/equipment is restarted, take measures to prevent shooting-out of cylinder piston rod, etc. 4. Contact SMC if the product is to be used in any of the following conditions: 1. Conditions and environments beyond the given specifications, or if product is used outdoors. 2. Installation on equipment in conjunction with atomic energy, railway, air navigation, vehicles, medical equipment, food and beverages, recreation equipment, emergency stop circuits, clutch and brake circuits in press applications, or safety equipment. 3. An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis.

16-14-3 2 Common Precautions Be sure to read before handling. For detailed precautions on every series, refer to main text.

Selection 4. Use clean air If the compressed air supply is contaminated with chemicals, Warning cynthetic materials, corrosive gas, etc., it may lead to break 1. Confirm the specifications. down or malfunction. Products represented in this catalog are designed for use in compressed air appllications only (including vacuum), unless Operating Environment otherwise indicated. Do not use the product outside their design parameters. Warning Please contact SMC when using the products in applications 1. Do not use in environments where the product other than compressed air (including vacuum). is directly exposed to corrosive gases, chemicals, salt water, water or steam. Mounting

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 2. Do not expose the product to direct sunlight for an extended period of time. Warning 3. Do not use in a place subject to heavy 1. Instruction manual vibrations and/or shocks. Install the products and operate them only after reading the instruction manual carefully and understanding its contents. 4. Do not mount the product in locations where it Also keep the manual where it can be referred to as is exposed to radiant heat. necessary. 2. Securing the space for maintenance Maintenance When installing the products, please allow access for maintenance. Warning 3. Tightening torque 1. Maintenance procedures are outlined in the When installing the products, please follow the listed torque operation manual. specifications. Not following proper procedures could cause the product to malfunction and could lead to damage to the equipment or Piping machine. 2. Maintenance work Caution If handled improperly, compressed air can be dangerous. 1. Before piping Assembly, handling and repair of pneumatic systems should be performed by qualified personnel only. Make sure that all debris, cutting oil, dust, etc, are removed from the piping. 3. Drain flushing 2. Wrapping of pipe tape Remove drainage from air filters regularly. (Refer to the specifications.) When screwing piping or fittings into ports, ensure that chips from the pipe threads or sealing material do not get inside the 4. Shut-down before maintenance piping. Also, when the pipe tape is used, leave 1.5 to 2 thread Before attempting any kind of maintenance make sure the ridges exposed at the end of the threads. supply pressure is shut of and all residual air pressure is released from the system to be worked on. Air Supply 5. Start-up after maintenance and inspection Apply operating pressure and power to the equipment and Warning check for proper operation and possible air leaks. If operation 1. Operating fluid is abnormal, please verify product set-up parameters. Please consult with SMC when using the product in 6. Do not make any modifications to be product. applications other than compressed air (including vacuum). Do not take the product apart. Regarding products for general fluid, please ask SMC about applicable fluids. 2. Install an air dryer, aftercooler, etc. Excessive condensate in a compressed air system may cause valves and other pneumatic equipment to malfunction. Installation of an air dryer, after cooler etc. is recommended. 3. Drain flushing If condensate in the drain bowl is not emptied on a regular basis, the bowl will over flow and allow the condensate to enter the compressed air lines. If the drain bowl is difficult to check and remove, it is recommended that a drain bowl with the auto-drain option be installed. For compressed air quality, refer to “Air Preparation Equipment” catalog.

16-14-4 3

Digital Pressure Switches Precautions 1 Be sure to read before handling. Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to main text for more detailed precautions on every series.

Selection Mounting Warning Warning 1. Monitor the internal voltage drop of a switch. 1. Do not drop or apply the excessive force (1000 m/s2) When operating below the specified voltage, it is possible that to a switch when handling. a load may be ineffective, even though the pressure switch Do not drop, or bump, or apply the excessive force (more than functions normally. Therefore, the formula below should be 1000 m/s2) when handling a switch. The internal parts of a satisfied after confirming the voltage of operating load. switch are damaged, and may result in a malfunction, even though a switch case itself is not damaged. Supply Internal voltage drop – Voltage of operation load Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy voltage of switch > 2. When handling a switch, hold it by the switch body. 2. Leakage current The tensile strength of the power source cord is 49 N. If pulling with more strength, switch may be damaged. When handling a A 2-wire switch design requires a minimal amount of current (1 switch, hold it by the switch body. mA or less) to flow through the switch in the OFF condition. 3. Operation by the button Load operating current > Switch leakage current Refer to the instruction manual for operating by the button for (Input OFF current on controller) the digital pressure switch. If the above condition is not met, the switch fails to return 4. Do not touch the LCD readout. (remains ON). If it does not meet the specifications, use a 3- Do not touch the LCD indicator face of the pressure switch wire switch. If n pieces of switches are connected in parallel, n during operation. Static electricity can change the readout. times the current flows through the loads. 5. Use a straight bladed watchmakers' screwdriver for the set trimmer to turn it softly. Use a straight bladed watchmakers' screwdriver to adjust the Caution set trimmer for I(Z)SE1/I(Z)SE2/PS100. Turn it softly, but do 1. Adsorption confirmation switch for presence of a not turn more when reached to the stopper at both ends. If a workpiece. trimmer were broken, it would be impossible to adjust it. Use the Air Catch Sensor (back pressure sensor) Series ISA 6. Pressure port (dustproof/dripproof type) for correct workpiece placement. Do not introduce any wire or similar object to a pressure port 2. The calibration data is stored in an EDPROM. as this may damage the pressure sensor and cause a Input data (set pressure, etc.) is be stored in EEPROM, so that malfunction. the data will not be lost after the pressure switch is turned off. (Data is stored for up to 100,000 hours after the power is turned off.)

Wiring Warning 1. Do not wire in conjunction with power lines or high voltage lines. Wire separately from power lines and high voltage lines, avoiding wiring in the same conduit with these lines. Control circuits including switches may malfunction due to noise from these other lines. 2. Do not connect directly the power source and the output wire. (2-wire type) If a switch changes to the ON condition without any load connected, damage will occur due to overcurrent flow. 3. Do not short-circuit a load. (3-wire type) The digital pressure switches display an error code if the load is short-circuited, but it is impossible to protect the switch from wiring errors. As for other pressure switches, the switches will be instantly damaged if loads are short-circuited. Use caution to avoid reverse wiring between the power supply line (brown) and the output line (black) for 3-wire type particularly.

16-1-12 4

Digital Pressure Switches Precautions 2 Be sure to read before handling. Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to main text for more detailed precautions on every series.

Piping Maintenance Caution Caution 1. Piping materials such as air hose, etc. 1. Replacement of filter element If a switch is used in a panel-mount application, the excessive If the operation of the switch deteriorates due to clogging of stress may be applied on the switch body by the piping the filter, replace the filter element (ZX1-FE). This only applies materials such as air hose, etc. Make sure not to apply such an to the vacuum switches ZSE2, ZSP1 and ZSE3 when used excessive force by piping materials. with the ZX series vacuum ejector. 2. Cleaning of switch body

Wipe off dirt with a soft cloth. If dirt does not come off easily, Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Pressure Source use a neutral detergent diluted with water to dampen a soft cloth. Wipe the switch only after squeezing the excess water out of the dampened cloth. Then finish off by wiping with a dry Warning cloth afterwards. 1. Use a switch within the specified fluid and ambient temperature range. Ambient and fluid temperature operation is as follows: Digital pressure switches: 0 to 50°C, other pressure switches: 0 to 60°C. Take measures to prevent moisture from freezing in circuits when below 5°C, since this may cause damage to the O-ring and lead to a malfunction. The installation of an air dryer is recommended for eliminating condensate and moisture. Never use the switch in an environment where there are drastic temperature changes even when these temperatures are operated within the specified temperature range. 2. Vacuum switch An instant pressure pulse up to 500 kPa (0.5 MPa) (at the time of vacuum release) does not affect the performance of the switch. However, a constant pressure of 200 kPa (0.2 MPa) or more should be avoided.

Operating Environment Warning 1. Do not use in an area, where surges are generated. Installation of a switch in an area around the equipment (electromagnetic lifters, high frequency induction furnaces, motors etc.), which generates the large surge voltage could cause to deteriorate an internal circuitry element of a switch or result in damage. Implement countermeasures against the surge from the generating source, and avoid touching the lines with each other. 2. Operating environment In general, the digital pressure switches featured here are open type. Avoid using in an environment where the likelihood of splashing or spraying of liquids (water, oil, etc.) exists. If used in such an environment, use a dusttight or dripproof type.

16-1-13 5 Flow Switches Precautions 1 Be sure to read before handling.

Design and Selection Mounting Warning Warning 1. Make sure to use a switch by the specified voltage. 1. Mount a switch by observing the proper tightening Use of a switch outside the range of the specified voltage can torque. cause not only malfunction and damage of the switch, but When a switch is tightened beyond the specified tightening also electrocution and fire. torque, a switch may be damaged. On the other hand, 2. Never use such a load, which exceeds the tightening below the specified tightening torque may cause maximum allowable load. the installation screws to come loose during operation. It may result in a damage to a switch. 3. Since the type of fluid varies depending on the Thread Proper tightening torque (N·m) product, make sure to verify the specifications. 1/8 7 to 9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy 12 to 14 Never use flammable gases or fluids, since the switch is not 1/4 22 to 24 explosion proof construction. It may result in a fire. 3/8 1/2 28 to 30 [For air] 3/4 28 to 30 4. Make sure to use a switch within the specified flow 1 36 to 38 rate for measurement and the maximum operating 2. Apply a wrench only to the metal part of the piping pressure. when installing the flow switch in the system Operating beyond the specified flow rate and operating pressure piping. can damage the switch. Do not apply a wrench to the plastic part of the main housing If using a switch by exceeding the maximum operating pressure, of the switch. switch is damaged. 3. Monitor the flow direction of the fluid. [For water] Install a switch in the direction as indicated on the body. 5. Make sure to use a switch within the specified flow 4. Remove solid foreign objects, etc. inside piping by rate for measurement and the maximum operating air blow before connecting a switch with piping. pressure. 5. Do not drop or bump. Operating beyond the specified flow rate and operating Do not drop, bump, or apply excessive impacts (490 m/s2) pressure can damage the switch. while handling. Although the external body of the switch Damage to the switch may occur if the switch is subject to (switch case) may not be damaged, the inside of the switch higher pressure than its designed limit. could be damaged and cause a malfunction. Avoid especially the application of pressure above 6. Hold the body of a switch when handling. specifications through a water hammer. The tensile strength of the cord is 49 N. Applying a greater pulling force on it can cause a malfunction. When handling, a) Use a device such as a water hammer relief valve to slow hold the body of the switch—do not dangle it from the cord. the valve's closing speed. 7. Do not use until you can verify that equipment can b) Absorb an impact pressure by using a rubber material operate properly. piping such as a rubber hose and an accumulator. Verify whether it is mounted correctly by running fluids or c) Keep the piping length as short as possible. applying the electricity in order to conduct suitable function and leakage tests when mounting for the first time or after system repair or modification was made. [For air] 8. Ever mount a switch in a place that will be used as a scaffold during piping. If an excessive weight is applied on a switch, switch may be damaged. 9. Be sure to allow straight pipe length that is minimum 8 times the port size upstream and downstream of the switch piping. Do not suddenly narrow the pipe size because doing so will disturb the flow speed distribution in the pipe, making it impossible to obtain the correct measurements. [For water] 10. Never install a switch in such a place, where switch is used as a foothold in the piping. Damage may occur if an excessive load is applied to the switch. Especially when the switch supports the piping, do not apply a load of 15 N·m or more to the metal parts of the switch. 16-11-2 6 Flow Switches Precautions 2 Be sure to read before handling.

Wiring Fluid Warning Warning 1. Verify the color and terminal number when wiring. 1. Check regulators and the flow adjustment valves Incorrect wiring can cause a switch to be damaged and may ZSE before introducing the fluid. ISE result in a malfunction. Verify the color of wiring and the If pressure or flow rate beyond the specified range are applied terminal number in the instruction manual when wiring. to the switch, the sensor unit may be damaged. PSE 2. Avoid repeatedly bending or stretching the lead [For air] Z wire. 2. Fluids for measurement for this digital flow switch I SE3 Repeatedly applying bending stress or stretching force to the lead wire will cause it to break. are nitrogen and air. Please note that accuracy cannot be guaranteed when other PS 3. Confirm proper insulation of wiring. fluids are used. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (800) Area: Local 588-9200-Outside (650) Office: 94080-6370-Main CA Francisco, San South Way, Ryan Inc.-230 Engineering, Steven of Courtesy Make sure that there is no wiring insulation (contact with other Z 1 I SE 2 circuits, ground fault, improper insulation between terminals, 3. Never use flammable fluids. etc.). Overcurrent is flown and may result in a damage. 4. Install a filter or mist separator on the upstream side ZSP when there is a possibility of condensate and foreign matter being mixed in with the fluid. ISA2 The rectifying device built into the switch will be clogged up Operating Environment and accurate measurement will no longer be possible. IS Warning [For water] 1. Never use in an environment, where explosive 5. Never use flammable fluids. ZSM gases are used. 6. Install a filter in the inlet side when it is likely for The switches do not have an explosion-proof rating. Never use solid foreign objects to get mixed with fluids. PF2 in an environment, where explosive gases are used, as this may cause a serious explosion. IF 2. Mount a switch in such locations, where no vibration or shock (less than 98 m/s2) is affected. Data [For air] 3. Use the switch within the specified fluid and ambient temperature range. Fluid and ambient temperatures are 0° to 50°C. Take measures to prevent freezing fluid when below 5°C, since this may cause damage to a switch and lead to a malfunction. The installation of an air dryer is recommended for eliminating condensate and moisture. Never use a switch in an environment, where temperature changes drastically even within the allowable ambient temperature range.

Maintenance Warning 1. Perform periodical inspections to ensure proper operation of the switch. Unexpected malfunctions and wrong operations may not secure the safety. 2. Use caution when using a switch for an interlock circuit. When a pressure switch is used for an interlock circuit, devise a multiple interlock system to prevent trouble or malfunctioning. Verify the operation of the switch and interlock function on a regular basis. 3. Do not disassemble or modify the main body.

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