Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 ()

SECTION 1: Identification

Product identifier Material Name CARBON MONOXIDE, ADSORBED Synonyms CARBON OXIDE; CARBON OXIDE (CO) Chemical Family inorganic, gas Product Description This gas may be packaged in an SDS®, SAGE® or PDS ® gas source package. The package contains an adsorbent media which allows the gas to be stored at sub-atmospheric pressures. There is no possibility of contact or exposure to the adsorbent. This SDS addresses only the hazards of the gas. Product Use semiconductor manufacture Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Supplier Entegris Singapore Pte. Ltd. 30A Kallang Place, #13-01 Singapore 339213

Telephone: +65-6745-2422 Fax: +65-6745-4477

Emergency # 800-101-2201 (CHEMTREC Toll Free in country) +(65)-31581349 (CHEMTREC local in country) 1-703-527-3887 (CHEMTREC International) E-mail: [email protected]

SECTION 2: Hazards identification

Singapore Standard SS 586-2:2014 Flammable Gases - Category 1 Acute Toxicity - Inhalation - Gas - Category 3 Reproductive Toxicity - Category 1A

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Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

Specific Target Organ Toxicity - Single Exposure - Category 1 ( circulatory system , nervous system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( blood , heart ) Label elements Hazard symbols

Signal word Danger Hazard statements H220 Extremely flammable gas. H331 Toxic if inhaled. H360 May damage fertility or the unborn child. H370 Causes damage to organs. (circulatory system , nervous system ) H373 May cause damage to organs through prolonged or repeated exposure. (blood , heart ) Precautionary statements Prevention P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P260 Do not breathe gas. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P271 Use only outdoors or in a well-ventilated area. P270 Do not eat, drink or smoke when using this product. P201 Obtain special instructions before use. P202 Do not handle until all safety precautions have been read and understood. Response P377 Leaking gas fire: Do not extinguish, unless leak can be stopped safely. P381 Eliminate all ignition sources if safe to do so. P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P311 Call a POISON CENTER or doctor/physician. P321 Specific treatment (see label). Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification None

SECTION 3: Composition / information on ingredients

CAS Component Name Percent

630-08-0 Carbon monoxide 100

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Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 4: First aid measures

Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact Get medical attention, if needed. Eye contact Flush eyes with plenty of water for at least 15 minutes. Then get immediate medical attention. Ingestion Not a likely route of exposure. Most Important Symptoms/Effects Acute toxic if inhaled, circulatory system damage, nervous system damage Delayed blood damage, heart damage, reproductive effects Indication of any immediate medical attention and special treatment needed Treat symptomatically and supportively. Note to Physicians For inhalation, consider oxygen.

SECTION 5: Firefighting measures

Flammable Properties Flammable gas. Severe explosion hazard. Vapor/air mixtures are explosive. Containers may rupture or explode if exposed to heat. Vapors or gases may ignite at distant ignition sources and flash back. Suitable extinguishing media regular dry chemical, carbon dioxide, water spray, alcohol resistant foam. Large fires: water spray or fog, alcohol-resistant foam Unsuitable Extinguishing Media Do not direct water at source of leak or safety devices; icing may occur. Special Hazards Arising from the Chemical Flammable gas. Severe explosion hazard. Vapor/air mixtures are explosive. Containers may rupture or explode if exposed to heat. Vapors or gases may ignite at distant ignition sources and flash back. Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: Cool containers with water from unmanned hose holder or monitor nozzles until well after fire is out. If this is impossible then take the following precautions: Keep unnecessary people away, isolate hazard area and deny entry. Let the fire burn. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. For tank, rail car or tank truck: Evacuation radius: 1600 meters (1 mile). Do not attempt to extinguish fire unless flow of material can be stopped first. Flood with fine water spray. Cool containers with water. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Special Protective Equipment and Precautions for Firefighters

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Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure.

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods and Materials for Containment and Cleaning Up Avoid heat, flames, sparks and other sources of ignition. All equipment used when handling the product must be grounded. Fully encapsulating, vapor protective clothing should be worn for spills and leaks with no fire. Do not touch or walk through spilled material. Stop leak if possible without personal risk. Do not direct water at spill or source of leak. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Keep unnecessary people away, isolate hazard area and deny entry. Remove sources of ignition. Ventilate closed spaces before entering.

SECTION 7: Handling and storage

Precautions for safe handling Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Do not breathe gas. Wash thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Use only outdoors or in a well-ventilated area. Do not eat, drink, or smoke when using this product. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Keep separated from incompatible substances. Incompatible Materials halogens, lithium, oxidizing materials

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits Carbon monoxide 630-08-0

Singapore: 25 ppm PEL ; 29 mg/m3 PEL

ACGIH: 25 ppm TWA Biological limit value 3.5 % of hemoglobin Medium: blood Time: end of shift Parameter: Carboxyhemoglobin ACGIH: (background, nonspecific ); 20 ppm Medium: end-exhaled air Time: end of shift Parameter: Carbon monoxide (background, nonspecific ) Engineering controls

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Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

Ventilation equipment should be explosion-resistant if explosive concentrations of material are present. Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection For the gas: Eye protection not required, but recommended. For the liquid: Wear splash resistant safety goggles. Contact lenses should not be worn. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Protective Clothing For the gas: Protective clothing is not required. For the liquid: Wear appropriate protective, cold insulating clothing. Glove Recommendations Wear insulated gloves. Respiratory Protection The following respirators and maximum use concentrations are drawn from NIOSH and/or OSHA. 350 ppm Any supplied-air respirator. 875 ppm Any supplied-air respirator operated in a continuous-flow mode. 1200 ppm Any air-purifying full-facepiece respirator (gas mask) with a chin-style, front-mounted or back-mounted canister providing protection against the compound of concern. End of service life indicator required (ESLI). Any self-contained breathing apparatus with a full facepiece. Any supplied-air respirator with a full facepiece. Emergency or planned entry into unknown concentrations or IDLH conditions - Any self- contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. Any supplied-air respirator with a full facepiece that is operated in a pressure- demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Escape - Any air-purifying full-facepiece respirator (gas mask) with a chin-style, front-mounted or back-mounted canister providing protection against the compound of concern. End of service life indicator required (ESLI). Any appropriate escape-type, self- contained breathing apparatus. 1200 ppm

SECTION 9: Physical and chemical properties

Appearance colorless gas Physical State gas Odor odorless Color colorless Odor Threshold Not available pH Not available Melting Point -199 °C Boiling Point -192 °C (liquid ) Boiling Point Not available Freezing point Not available Range

Evaporation Rate Not available Flammability (solid, gas) Flammable Autoignition 609 - 650 °C Flash Point (Not applicable ) Temperature Lower Explosive Decomposition 12 - 12.5 % Not available Limit temperature Upper Explosive 74 % Vapor Pressure 760 mmHg @ -191 °C Limit

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Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

Vapor Density Specific Gravity 0.968 Not available (air=1) (water=1) 0.03 g/L (@ Partition coefficient: n- Water Solubility Not available 20 °C ) octanol/water 0.01657 cp 0 Viscosity Kinematic viscosity Not available °C 1.11 g/L at 22 °C Solubility (Other) Not available Density pressure: 760 Torr Physical Form gas Taste tasteless Molecular Formula CO Molecular Weight 28.01 Solvent Solubility Soluble alcohol, benzene, acetic acid, ethyl acetate, chloroform, cuprous chloride solutions

SECTION 10: Stability and reactivity

Reactivity May ignite in air. Chemical stability Stable at normal temperatures and pressure. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid heat, flames, sparks and other sources of ignition. Minimize contact with material. Avoid inhalation of material or combustion by-products. Keep out of water supplies and sewers. Materials to Avoid (Incompatibilities) halogens, lithium, oxidizing materials Hazardous decomposition products None known.

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation: toxic if inhaled, circulatory system damage, nerve damage, blood damage, heart damage, reproductive effects Skin contact No information on significant adverse effects. Eye contact No information on significant adverse effects. Ingestion ingestion of a gas is unlikely Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published:

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Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

Carbon monoxide (630-08-0) Inhalation LC50 Rat 1807 ppm 4 h Acute Toxicity Estimate Inhalation - Gas 1807 ppm Immediate Effects toxic if inhaled, circulatory system damage, nervous system damage Delayed Effects blood damage, heart damage, reproductive effects Irritation/Corrosivity Data No animal testing data available for skin or eyes. Respiratory Sensitization No data available. Dermal Sensitization No data available. Carcinogenicity Component Carcinogenicity None of this product's components are listed by ACGIH, IARC, NTP, DFG or OSHA. Mutagenic Data No data available. Reproductive Effects Data Available data characterizes this substance as a reproductive hazard. Tumorigenic Data No data available. Specific Target Organ Toxicity - Single Exposure circulatory system, nervous system Specific Target Organ Toxicity - Repeated Exposure blood, heart Aspiration hazard Not applicable. Medical Conditions Aggravated by Exposure blood system disorders, heart or cardiovascular disorders, hormonal disorders, respiratory disorders Additional Data Alcohol may enhance the toxic effects. May cross the placenta. Smoking may enhance the toxic effects.

SECTION 12: Ecological information

Component Analysis - Aquatic Toxicity No LOLI ecotoxicity data are available for this product's components. Persistence No data available. Bioaccumulative potential No data available. Mobility No data available. Other adverse effects None known. Other Toxicity No data available.

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Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Component waste information There is no applicable waste information for this product's components. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: Shipping Name: ADSORBED GAS, TOXIC, FLAMMABLE, N.O.S. , ( Contains: Carbon monoxide ) Hazard Class: 2.3 UN#: UN3514 Required Label(s): 2.3, 2.1

ICAO Information: Shipping Name: ADSORBED GAS, TOXIC, FLAMMABLE, N.O.S. , ( Contains: Carbon monoxide ) Hazard Class: 2.3 UN#: UN3514 Forbidden by Air

IMDG Information: Shipping Name: ADSORBED GAS, TOXIC, FLAMMABLE, N.O.S. , ( Contains: Carbon monoxide ) Hazard Class: 2.3 UN#: UN3514 Required Label(s): 2.3, 2.1 International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None

SECTION 15: Regulatory information

Singapore Regulations List of Hazardous Substances Carbon 630-08-0 monoxide

Exclusions: 1. Gas mixtures containing Carbon monoxide weighing <1 metric tonne. 2. Gas mixtures containing Carbon monoxide as by-products from combustion activities Poisons List No information was found for the substance(s) on the List of Hazardous Substances. Hazardous Substance Transport Quantities Carbon monoxide 630-08-0

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Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

1000 kg Maritime and Port Authority This product contains no components identified on Singapore's Maritime and Port Authority - Dangerous Goods. Arms and Explosives Act None of this product's components are on the list. Schedule of Chemical Weapons None of this product's components are on the list. Misuse of Drugs Act None of this product's components are on the list. Petroleum and Flammable Materials This product contains no components identified on Singapore's Petroleum and Flammable Materials. Strategic Goods Control This product contains no components identified on Singapore's Strategic Goods Control. Toxic Industrial Wastes This product contains no components identified on Singapore's Toxic Industrial Wastes. Component Analysis - Inventory Carbon monoxide (630-08-0) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No Yes Yes Yes No Yes Yes

SECTION 16: Other information

NFPA Ratings Health: 2 Fire: 4 Instability: 2 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 4/21/2021 - Update to Section(s) 1. Preparation and Revision Date 08/31/2015 Revision date 4/21/2021 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - ; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Existing and ______Page 9 of 10 Issue date: 2021-04-21 Revision 2.3 Print date: 2021-04-21

Safety Data Sheet Material Name: CARBON MONOXIDE, ADSORBED SDS ID: 0093 (SINGAPORE)

New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; KR REACH CCA - Korea Registration and Evaluation of Chemical Substances Chemical Control Act; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TH-TECI - Thailand - FDA Existing Chemicals Inventory (TECI); TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – ; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

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