Specialty Gas Equipment

Abbreviations & Symbols

Symbol Chemical Name Symbol Chemical Name

Al2O3 Aluminum Oxide CH3SH Methyl Mercaptan Ar CH4 AsH3 Arsine B F Boron 11 Trifluoride CHClF2 Chlorodifluoromethane 11 3 (Halocarbon 22) B2H6 Diborane BCl Boron Trichloride CHCl2F Dichlorofluoromethane 3 (Halocarbon 21) BF3 Boron Trifluoride CHF3 Trifluoromethane (Halocarbon 23) C2ClF5 Chloropentafluoroethane (Halocarbon 115) Cl2 Chlorine C2Cl2F4 1,2-Dichlorotetrafluoroethane (Halocarbon 114) CO C2F6 Hexafluoroethane (Halocarbon 116) CO2 C2H2 C H F 1,1-Difluoroethylene (Halocarbon 1132A) COCl2 Phosgene 2 2 2 COS C2H3CIF2 1-Chloro-1, 1-Difluoroethane (Halocarbon 142B) D2 C2H4 Fe2O3 Iron Oxide C2H4F2 1,1-Difluoroethane (Halocarbon 152A) H2 C2H4O H2O C2H5Cl Ethyl Chloride H2S C2H6 H2SiCl2 Dichlorosilane C2H6O C F Perfluoropropane (Halocarbon 218) HCl 3 8 HD Hydrogen Deuteride C3H4 Allene (Propadiene) C3H6 Propylene He Helium Hg Mercury C3H6O Propylene Oxide HSiCl3 Trichlorosilane C3H6O Vinyl Methyl Ether K2O Potassium Oxide C3H8 C4F8 Octafluorocyclobutane (Halocarbon C-318) Kr Krypton MgO Magnesium Oxide C4H6 1,3- N2 C4H6 Ethyl Acetylene N2O C4H8 1- C4H8 cis-2-Butene N2O4 Nitrogen Tetroxide C H Na2O Sodium Oxide 4 8 Ne Neon C4H8 Trans-2-Butene NH3 C4H10 C4H10 NO NO2 Nitrogen Dioxide C5H12 CaO Calcium Oxide O2 PF5 Phosphorous Pentafluoride CBrF3 Bromotrifluoromethane (Halocarbon 13B1) CClF3 Chlorotrifluoromethane (Halocarbon 13) PH3 SF6 Sulfur Hexafluoride CCl2FCClF2 1,1,2-Trichloro-1,2,2-Trifluoroethane (Halocarbon 113) Si Silicon SiCl4 Silicon Tetrachloride CCl2F2 (Halocarbon 12) SiF4 Silicon Tetrafluoride SiH4 CCl3F (Halocarbon 11) SiO2 Silicon Dioxide CF4 Tetrafluoromethane (Halocarbon 14) SO2 CH3Cl Methyl Chloride Xe Xenon Specialty Gas Equipment

Abbreviations & Symbols Cont.

Symbol Symbol

A G Å Angstrom(s) g gram(s) AA Atomic Absorption gal gallon(s) abs absolute GC Gas Chromatography or ACGIH American Conference of Chromatograph Governmental Industrial Hygienists GMIS Gas Manufacturers Intermediate ASTM American Society for Testing Standard Materials GPA Gas Processors Association atm atmosphere(s) avg average H Hall Electrolytic Conductivity Detector B HAP Hazardous Air Pollutants bp HID Helium lonization Detector Btu British thermal unit(s) hr hour Hz hertz C CAA Clean Air Act I cal calorie(s) ICP Inductively Coupled Plasma CAS Chemical Abstract Services () ccm cubic centimeter(s) per minute ID Identification or inside diameter ccs cubic centimeter(s) per second in, ins inch(es) CEM Continuous Emission Monitor in3, cu in cubic inch(es) cf cubic feet CFCs J CFR Code of Federal Regulations J joule CGA Compressed Gas Association K cm centimeter(s) cm2 square centimeter K Kelvin cm3, cc cubic centimeter kg kilogram(s) COA Certificate of Analysis kPa Kilo pascal(s) COC Certificate of Conformance ºK degree(s) Kelvin CP Chemically Pure L Cp specific heat at constant pressure L liter(s) Cv specific heat at constant volume lb pound(s) Cv coefficient of flow LC Liquid Chromatography ºC degree(s) Celsius Lpm liters per minute D M DID Discharge lonization Detector ␮ micron(s), 10-5m DIN Deutsche Industrie Normen m3 cubic meter(s) (German Industrial Standards) mA milliampere DISS Diameter Index Safety System max maximum DOT Department of Transportation mg milligram(s) E min minute(s) ea each ml milliliter(s) ECD Electron Capture Detector mm millimeter(s) EPA Environmental Protection Agency MNPT Male National Pipe Thread mol.wt. molecular weight F MOS Metal Oxide Semiconductor ºF degree(s) Fahrenheit MW molecular weight FID Flame lonization Detector mp FNPT Female National Pipe Thread MS Mass Spectrometry F.O.B. Freight on Board MSD Mass Selective Detector FPD Flame Photometric Detector MVCR Male VCR ft foot, feet MVFS Male Vacuum Face Seal 3 ft , cu ft Cubic foot (feet) N FTIR Fourier Transform Infrared Spectrometer or Spectroscopy N/A not applicable FIFRA Federal Insecticide, Fungicide, and nbp normal boiling point Rodenticide Act NDIR Non-Dispersive Infrared Analyzer Specialty Gas Equipment

Abbreviations & Symbols Cont.

Symbol Symbol

NDUV Non-Dispersive Ultraviolet Analyzer S NER normal evaporation rate SCC standard cubic centimeters NF National Formulary sccm standard cubic centimeters per NFPA National Fire Protection Association minute NIST National Institute of Standards and sccs standard cubic centimeters per Technology second nm nanometer(s) scfh standard cubic feet per hour No number scfm standard cubic feet per minute nom nominal scfs standard cubic feet per second NOS not otherwise specified sec second(s) NPD Nitrogen/Phosphorous Detector SFC Supercritical Fluid Chromatography NPT National Pipe Thread SFE Supercritical Fluid Extraction NTP Normal temperature and pressure slpm standard liters per minute NTRM NIST Traceable Reference Material sp. gr. specific gravity NMR Nuclear Magnetic Resonance sp. vol. specific volume Spectroscopy SRM Standard Reference Materials O SS Stainless Steel Stn. Stl. Stainless Steel OD outside diameter STEL Short Term Exposure Limit Ohm-cm ohms centimeter STP standard temperature and pressure OSHA Occupational Safety and Health Administration T oz ounce(s) TCD Thermal Conductivity Detector P TEA Transversely Excited Atmosphere THC Total Content Pa pascal(s) TLV Threshold Limit Value PID Photo Ionization Detector tp triple point ppb part(s) per billion TPH Total Petroleum ppba part(s) per billion atomic TWA Time Weighted Average ppbv part(s) per billion by volume ppbw part(s) per billion by weight U ppm part(s) per million UHP Ultra High Purity ppma part(s) per million atomic UN United Nations ppmv part(s) per million by volume USP United States Pharmacopoeia ppmw part(s) per million by weight UPC Ultra Pure Carrier ppt parts(s) per trillion ppta Parts(s) per trillion atomic V pptv Parts(s) per trillion by volume VAC volts alternating current pptw Parts(s) per trillion by weight VDC volts direct current psi pound(s)-force per square inch VOC Volatile Organic Compounds psia pound(s)-force per square inch Vol volume absolute Vol% volume percent psig pound(s)-force per square inch gauge W w.c. water column pressure R wt. weight Ra Roughness average wt% weight percent RFO restricted flow orifice wt. ppm weight parts per million ºR degree(s) Rankine Y yd yard(s) > greater than < less than