Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 Section 1 - PRODUCT AND COMPANY IDENTIFICATION Material Name TICL4 Synonyms TITANIUM TETRACHLORIDE; TITANIUM CHLORIDE; TITANIC CHLORIDE; TETRACHLOROTITANIUM; TITANIUM CHLORIDE (TiCl4) (T-4)-; TITANIUM(IV) CHLORIDE; T-308; SMOKE STICKS #15-049; UN 1838; Cl4Ti Chemical Family inorganic, halogenated Product Use semiconductor manufacture Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) Emergency Telephone Number: CHEMTREC - U.S. - 1-800-424-9300 CHEMTREC - Intl. - 1-703-527-3887 E-mail:
[email protected] Section 2 - HAZARDS IDENTIFICATION Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Acute Toxicity - Oral - Category 4 Acute Toxicity - Inhalation - Vapor - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 3 ( respiratory system ) GHS Label Elements Symbol(s) Signal Word Danger Hazard Statement(s) ____________________________________________________________ Page 1 of 10 Issue date: 2018-12-03 Revision 3.2 Print date: 2018-12-03 Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 Fatal if inhaled. Harmful if swallowed. Causes severe skin burns and eye damage. May cause respiratory irritation. Precautionary Statement(s) Prevention Do not breathe vapor or mist. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Do not eat, drink or smoke when using this product. Wear respiratory protection. Wear protective gloves/protective clothing/eye protection/face protection.