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Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550

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Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 Section 1 - PRODUCT AND COMPANY IDENTIFICATION Material Name TICL4 Synonyms TITANIUM TETRACHLORIDE; TITANIUM CHLORIDE; TITANIC CHLORIDE; TETRACHLOROTITANIUM; TITANIUM CHLORIDE (TiCl4) (T-4)-; TITANIUM(IV) CHLORIDE; T-308; SMOKE STICKS #15-049; UN 1838; Cl4Ti Chemical Family inorganic, halogenated Product Use semiconductor manufacture Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) Emergency Telephone Number: CHEMTREC - U.S. - 1-800-424-9300 CHEMTREC - Intl. - 1-703-527-3887 E-mail: [email protected] Section 2 - HAZARDS IDENTIFICATION Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Acute Toxicity - Oral - Category 4 Acute Toxicity - Inhalation - Vapor - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 3 ( respiratory system ) GHS Label Elements Symbol(s) Signal Word Danger Hazard Statement(s) ____________________________________________________________ Page 1 of 10 Issue date: 2018-12-03 Revision 3.2 Print date: 2018-12-03 Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 Fatal if inhaled. Harmful if swallowed. Causes severe skin burns and eye damage. May cause respiratory irritation. Precautionary Statement(s) Prevention Do not breathe vapor or mist. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Do not eat, drink or smoke when using this product. Wear respiratory protection. Wear protective gloves/protective clothing/eye protection/face protection. Response Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage Store in a well-ventilated place. Keep container tightly closed. Store locked up. Disposal Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Reacts violently with water. Section 3 - COMPOSITION / INFORMATION ON INGREDIENTS CAS Component Name Percent 7550-45-0 TITANIUM TETRACHLORIDE 100 Section 4 - FIRST AID MEASURES Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eyes Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. ____________________________________________________________ Page 2 of 10 Issue date: 2018-12-03 Revision 3.2 Print date: 2018-12-03 Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute Fatal if inhaled, Harmful if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed bronchitis Note to Physicians For inhalation, consider oxygen. Avoid gastric lavage or emesis. Section 5 - FIRE FIGHTING MEASURES Extinguishing Media Suitable Extinguishing Media regular dry chemical, carbon dioxide. Large fires: Flood with water. Apply water from a protected location or from a safe distance. Unsuitable Extinguishing Media water Special Hazards Arising from the Chemical Negligible fire hazard. Hazardous Combustion Products hydrochloric acid, oxides of titanium, chlorine Advice for firefighters Negligible fire hazard. Fire Fighting Measures Do not get water inside container. Do not scatter spilled material with high-pressure water streams. Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. Use extinguishing agents appropriate for surrounding fire. Do not get water directly on material. Large fires: Flood with fine water spray. Reduce vapors with water spray. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Section 6 - ACCIDENTAL RELEASE MEASURES Personal Precautions, Protective Equipment and Emergency Procedures Wear personal protective clothing and equipment. Methods and Materials for Containment and Cleaning Up Stop leak if possible without personal risk. Reduce vapors with water spray. Do not get water directly on material. Avoid contact with combustible materials. Do not touch spilled material. Do not get water inside container. Only personnel trained for the hazards of this material should perform clean up and disposal. Dike for later disposal. Do not use water. Keep unnecessary people away, isolate hazard area and deny entry. Ventilate closed spaces before entering. Environmental Precautions Avoid release to the environment. ____________________________________________________________ Page 3 of 10 Issue date: 2018-12-03 Revision 3.2 Print date: 2018-12-03 Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 Section 7 - HANDLING AND STORAGE Precautions for Safe Handling Do not breathe vapor or mist. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Do not eat, drink, or smoke when using this product. Wear respiratory protection. Wear protective gloves/clothing and eye/face protection. Conditions for Safe Storage, Including any Incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Protect from physical damage. Store outside or in a detached building. Store in a cool, dry place. Notify State Emergency Response Commission for storage or use at amounts greater than or equal to the TPQ (U.S. EPA SARA Section 302). SARA Section 303 requires facilities storing a material with a TPQ to participate in local emergency response planning (U.S. EPA 40 CFR 355.30). Keep separated from incompatible substances. Incompatible Materials metals, peroxides, water Section 8 - EXPOSURE CONTROLS / PERSONAL PROTECTION Component Exposure Limits The following constituents are the only constituents of the product which have a PEL, TLV or other recommended exposure limit. At this time, the other constituents have no known exposure limits. ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) There are no biological limit values for any of this product's components. Engineering Controls Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. Individual Protection Measures, such as Personal Protective Equipment Eye/face protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Skin Protection Wear appropriate chemical resistant clothing. Respiratory Protection Under conditions of frequent use or heavy exposure, respiratory protection may be needed. Respiratory protection is ranked in order from minimum to maximum. Consider warning properties before use. Any air- purifying full-facepiece respirator equipped with an N95, R95, or P95 filter. The following filters may also be used: N99, R99, P99, N100, R100 or P100. Any powered, air-purifying respirator with a tight-fitting facepiece and a high-efficiency particulate filter. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. Glove Recommendations Wear appropriate chemical resistant gloves. Protective Materials polyvinyl chloride (PVC), rubber ____________________________________________________________ Page 4 of 10 Issue date: 2018-12-03 Revision 3.2 Print date: 2018-12-03 Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 Section 9 - PHYSICAL AND CHEMICAL PROPERTIES colorless to Appearance Physical State liquid yellow liquid colorless to Odor irritating odor Color yellow Odor Threshold Not available pH Not available Melting Point -25 °C Boiling Point 136 °C Boiling Point Range Not available Freezing point Not available Evaporation Rate Not available Flammability (solid,
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