ANALOG PROCESSING CIRCUITS IN

ORGANIC TECHNOLOGY

A DISSERTATION

SUBMITTED TO THE DEPARTMENT OF

AND THE COMMITTEE ON GRADUATE STUDIES

OF STANFORD UNIVERSITY

IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF

DOCTOR OF PHILOSOPHY

Wei Xiong

October 2010

© 2011 by Wei Xiong. All Rights Reserved. Re-distributed by Stanford University under license with the author.

This work is licensed under a Creative Commons Attribution- Noncommercial 3.0 United States License. http://creativecommons.org/licenses/by-nc/3.0/us/

This dissertation is online at: http://purl.stanford.edu/fk938sr9136

ii I certify that I have read this dissertation and that, in my opinion, it is fully adequate in scope and quality as a dissertation for the degree of Doctor of Philosophy.

Boris Murmann, Primary Adviser

I certify that I have read this dissertation and that, in my opinion, it is fully adequate in scope and quality as a dissertation for the degree of Doctor of Philosophy.

Zhenan Bao

I certify that I have read this dissertation and that, in my opinion, it is fully adequate in scope and quality as a dissertation for the degree of Doctor of Philosophy.

Robert Dutton

Approved for the Stanford University Committee on Graduate Studies. Patricia J. Gumport, Vice Provost Graduate Education

This signature page was generated electronically upon submission of this dissertation in electronic format. An original signed hard copy of the signature page is on file in University Archives.

iii

Abstract

Low- organic thin-film offer potential for many novel applications. Because organic transistors can be fabricated near room temperature, they allow integrated circuits to be made on flexible plastic substrates. This physical flexibility allows organic transistors to integrate with bendable organic displays, polymeric muscles, and conformal sensors. Additionally, organic semiconductors are inherently sensitive to specific molecules, making organic transistors naturally suited for chemical and biological sensors. In all these applications, data converters are the essential link between the digital processors and the analog media. However, because of the inherent non-uniformities in organic processing, organic analog circuits suffer from large variations that lead to inaccurate and unreliable data conversion. Dielectric leakage and large parasitic capacitances further limit the available design space. This dissertation describes the sources of these process handicaps and offers design techniques to counter them. By applying these techniques, this research demonstrated the world's first organic-transistor digital-to-analog converter and the first organic- transistor analog-to-digital converter. Both data converters operate at 3 V, 100 Hz and resolve 6 bits. Similar design methodology can be utilized in designing other organic- transistor based analog circuits.

iv

Acknowledgements

First, I would like to thank Professor Boris Murmann for advising my doctoral research. I knew nothing about organic , but Boris’s vision convinced me to enter this field. Through his guidance, I was able to build truly novel devices. I very much appreciate his generous support – never did I worry about lack of resources, and cherish the freedom he gave – to try things, to ruminate, and to twiddle thumbs every now and then. Most of all, I thank him for an enjoyable Ph.D. experience.

I thank my co-advisor, Professor Zhenan Bao, for being a constant source of knowledge and support. Her lab had been instrumental in helping me finding my way around organic transistors. She offered valuable advices on both organic electronics and on the general science during the long shared drives to conferences, for which I am greatly thankful.

I thank Professor Alberto Salleo for his help from Day 1 to Day 1800. He was always available whenever I needed enlightenment on organic materials (or Italy). On the first day, he helped me understand the basic polymer conduction; and on the 1800th day, he advised me on career opportunities. In between, he sent me papers, offered his lab equipment, and showed me how to properly measure organic transistors. I thank him for all the help and for chairing my oral defense committee.

v

I also thank Professor Bob Dutton for serving on my oral and reading committees, and for showing me the genesis of some of the semiconductor theories, and how they can apply to the organic transistors.

I am tremendously grateful to my collaborators, Drs. Hagen Klauk and Ute

Zschieschang of the Max Planck Institute for Solid State Research in Stuttgart,

Germany, for the fabrication of the organic transistors and circuits. Their work on developing high-quality organic transistors was instrumental in achieving the circuit performance cited in this dissertation. Especially, I thank Hagen for his experience and optimism, and Ute for her dedication in making sure every transistor worked as best as it could.

In addition to fabrication at the Max Planck Institute, much of the earliest fabrication was performed and advised by Dr. Jim Kruger of Stanford Nano Fab.

Almost everything I knew about silicon fabrication I learned from Jim. These knowledge would be constructive in developing the organic circuit processes. I’m very grateful for Jim’s help.

I would like to thank the current and former members of Murmann Group and

Bao Group for useful discussions. In particular, I thank Alex Guo, who helped with much of FPGA programming, Yoonyoung Chung, Echere Iroaga, Jason Hu, Clay

Daigle, Jim Salvia, Justin Kim, Pedram Lajevardi, Manar El-Chammas, Noam Dolev,

Alireza Dastgheib, Prastoo Nikaeen, Colin Reese, and Tony Sokolov.

On the personal side, I would like to thank my parents – for everything. They always strived to achieve a better life for our family. It is through their hard work and

vi dedication that I am in the position to complete this Ph.D. I will always remember their love, care and inspiration. I also thank my brother for his love and support (and free Google food). He took care many of our family tasks so I could focus on my career and school. I could not ask for a better sibling.

I want to thank my grandparents – who took turns rearing me when my parents were studying abroad. It’s often said that the Ph.D. is an exercise in perseverance.

Whatever perseverance I had, I inherited from them.

Finally, my deepest gratitude goes to my beautiful wife Cheryl. She put up with some truly atrocious schedules – dinner at 10pm, not home until 3am; on more than a few occasions our dates ended in the lab. She may not care for the difference between a transistor and a , but her hugs and smiles made all the difference in the world when things were going badly – and organic transistors went badly often. I thank her being there for me, always.

vii

Table of Contents

Abstract ...... iv

Acknowledgements ...... v

Table of Contents ...... viii

List of Tables ...... x

List of Figures ...... xi

1. Introduction ...... 1

1.1. Motivation ...... 1

1.2. Background on Organic Semiconductors and Organic Transistors ...... 4

1.3. Research Goals ...... 9

1.4. Organization ...... 13

2. Organic Transistor Fabrication ...... 14

2.1. Fabrication at the Stanford Nano Fab ...... 14

2.2. Fabrication at the Max Planck Institute ...... 19

2.3. Special Circuit Layout Considerations...... 25

3. Effects of Organic Device Non-idealities on Analog Circuits ...... 28

3.1. Device Mismatch ...... 28

3.2. Large Parasitic Capacitances ...... 33

3.3. Dielectric Leakage ...... 34

3.4. Modeling Inaccuracies ...... 37

4. Design of Organic DAC and ADC ...... 40

4.1. Design Limitations due to the OTFT Process ...... 41

4.2. DAC Design and Measurement ...... 43

viii

4.2.1 DAC Architecture ...... 43

4.2.2 Calibration ...... 49

4.2.3 Limits on DAC Operating Speed ...... 49

4.2.4 DAC Measurement ...... 53

4.3. ADC Design and Measurement ...... 58

4.3.1 ADC Architecture ...... 58

4.3.2 Auto-zeroed Comparator Design ...... 63

4.3.3 Digital Logic Implementation ...... 71

4.3.4 ADC Measurement ...... 74

5. Conclusion and Future Work ...... 79

5.1. Summary of This Dissertation ...... 79

5.2. Future Work ...... 81

5.2.1 Integration with Organic Sensors ...... 81

5.2.2 Packaging and Physical Interfaces ...... 82

5.2.3 Organic Transistor AM Radio ...... 85

6. Appendix A ...... 87

6.1. Probe Station and Test Equipment ...... 87

6.2. Interfaces between Probes and FPGA ...... 92

7. Appendix B: OTFT Model ...... 93

References ...... 97

ix

List of Tables

Table 1: Comparisons of typical organic transistors and inorganic transistors...... 9

Table 2: Some main OTFT parameters...... 22

Table 3: Summary of OTFT fabrication steps...... 23

Table 4: Nominal OTFT parameters, calculated stage gains and settling times of the ADC comparator...... 69

Table 5: Summary of ADC characteristics...... 78

Table 6: Comparisons of this organic ADC and a silicon ADC...... 78

Table 7: Fabrication layers with additional thick pads to facilitate wire bonding...... 84

x

List of Figures

Figure 1: Unique advantages of organic transistors – flexibility, large-area printing, and chemical specificity...... 3

Figure 2: Some conceptual applications of organic transistors – (clockwise from top left) a wearable mobile phone, smart bandages, artificial skin and retina, and an electronic newspaper...... 3

Figure 3: Hundreds of organic semiconductors. (Source: Bao research group.) ...... 4

Figure 4: Improvements in organic semiconductor mobility and corresponding example applications. (Source: Bao research group.) ...... 6

Figure 5: Chemical structures of the three organic semiconductors used in this work. (Sources: Wikipedia; Klauk research group; Bao research group.) ...... 6

Figure 6: Illustrations of the bottom-gate top-contact and the bottom-gate bottom- contact structures...... 7

Figure 7: The top-contact OFET closely resembles the silicon MOSFET...... 8

Figure 8: State-of-art digital organic circuits, circa 2010 ...... 10

Figure 9: State-of-art analog organic circuit, circa mid-2009 ...... 11

Figure 10: General block diagram of a mixed-signal electronic system...... 12

Figure 11: An organic ADC (top half of the substrate) and an organic DAC (bottom half of the substrate) developed in this research...... 12

Figure 12: Typical organic transistor fabrication procedures in the SNF...... 15

Figure 13: Photograph of the organic transistor and circuit structures on a PECVD oxide wafer, with linear and octagonal transistors at the right...... 17

Figure 14: Photograph of a wafer with spin-on-glass as the dielectric...... 18

Figure 15: Output curves of organic transistor fabricated at the SNF with 200 nm- thick cross-linked PVP dielectric, channel length = 100 μm, channel width = 2000 μm...... 18

Figure 16: Transfer curves of the organic transistor with cross-linked PVP dielectric, showing large hysteresis due to trapped charges in the dielectric...... 19

xi

Figure 17: Cross-sectional view of an OTFT fabricated at the Max Planck Institute (not to scale) – the organic semiconductor can be either p-type or n-type, source and drain metals are gold, gate metal is aluminum (left); Photograph of an OTFT (right). 20

Figure 18: Measured output characteristics of an n-type OTFT (length = 20 μm, width = 400 μm) with VGS swept from 0 to 3 V in 0.5 V increments (left); Measured transfer characteristics of the same OTFT with VDS swept from 1 V to 3 V in 0.5 V increments (right)...... 22

Figure 19: Measured output characteristics of a p-type OTFT (length = 20 μm, width = 400 μm) with VGS swept from 0 to -3 V in -0.5 V increments (left); Measured transfer characteristics of the same OTFT with VDS swept from -1 V to -3 V in -0.5 V increments (right)...... 23

Figure 20: Cross-sectional view of the capacitor, fabricated in the OTFT process (not to scale) (left); Photograph of two formed by intersecting traces (right). ... 24

Figure 21: Cross-sectional view of the layers of OTFT, via and capacitor (not to scale)...... 25

Figure 22: A gate-metal mask showing all traces in the vertical direction (left); A source-drain-metal mask showing all traces in the horizontal direction (right)...... 26

Figure 23: Distributions of measured organic transistor drain-source currents, normalized to the mean...... 29

Figure 24: Measured organic transistor drain-source currents, normalized to the mean, as a function of the transistor W/L ratios. The lines are the standard deviations of drain-source currents, for p-type (dash line) and n-type (solid line), respectively. L is constant at 20 μm...... 30

Figure 25: Distributions of measured capacitances, normalized to the mean...... 32

Figure 26: Illustration of an OTFT viewed from above, showing the gate overlaps (Loverlap) and the channel (L)...... 33

Figure 27: Measured and modeled leakage density of capacitors fabricated in the organic process, as a function of applied capacitor voltage...... 35

Figure 28: A typical switched-capacitor circuit with sample-and-hold operation and some leakage current (top); Modeled voltage errors due to leakage (bottom)...... 37

Figure 29: Parameters of the OTFT model in Cadence Verilog-A...... 38

Figure 30: Schematics of the OTFT model (left); The capacitor model (right)...... 39

Figure 31: OTFT process characteristics limit the available design space...... 42

xii

Figure 32: Current-steering DAC (top) and switched-capacitor DAC (bottom) architectures...... 42

Figure 33: C-2C structure on silicon suffers from parasitic substrate capacitances (top); The same C-2C structure on glass or plastic has no substrate capacitance (bottom)...... 45

Figure 34: Circuit schematic of the C-2C DAC; VREF = 3 V, VRESET = 1.5 V...... 46

Figure 35: Comparison of the unit capacitor matching (σu_DNL) and the corresponding unit capacitance required for C-2C and binary-weighted DACs in our organic process (for DNL = 1, yield = 95%)...... 48

Figure 36: Minimum DAC frequency required for 1-LSB output error due to capacitor leakage (8-bit and 10-bit are included for comparison)...... 52

Figure 37: Measured DAC transfer function (before calibration) becomes increasingly nonlinear as the clock rate increases from 100 Hz to 500 Hz...... 54

Figure 38: Measured DAC output voltage error (code 63, before calibration) as a function of the clock rate; from top to bottom: 0.1 Hz, 0.5 Hz, 1 Hz, 2 Hz, 5 Hz and 10 Hz...... 54

Figure 39: Ideal and measured (after calibration) DAC transfer functions at 100 Hz conversion rate...... 55

Figure 40: DAC DNL and INL before calibration [(a) and (b)] and after calibration [(c) and (d)]...... 56

Figure 41: Spectrum of 10 Hz and 45 Hz DAC output sinusoids (500-point FFT). ... 57

Figure 42: Photograph of the C-2C DAC on glass substrate...... 58

Figure 43: SAR ADC, showing its main circuit blocks...... 59

Figure 44: C-2C structure with integrated sampling switches S0 – S5. The switches sample every clock cycle to prevent accumulation of leakage charges on the sampling capacitors C...... 61

Figure 45: ADC circuit with detailed C-2C DAC and calibration DAC schematics. . 61

Figure 46: Photograph of the ADC on the glass substrate...... 63

Figure 47: The comparator circuit and device parameters...... 64

Figure 48: Two-phase operation of the comparator...... 65

xiii

Figure 49: Measured transfer function (left) and small-signal gain (right) of an OTFT inverter, with Wp = Wn = 500 μm, Lp = Ln = 20 μm...... 66

Figure 50: Measured transient response of the first gain stage of a test comparator, showing a gain of ΔVout/ΔVin = -7.8 and a settling time of 13 ms. The clock rate was 30 Hz...... 68

Figure 51: Anti-symmetrical layout of the inverter to maintain constant steady-state gain...... 70

Figure 52: Cross-sectional views of the inverter in the nominal condition (top), with mask misalignment (bottom)...... 71

Figure 53: Conceptual diagram of the SAR algorithm...... 72

Figure 54: State machine of the SAR algorithm implementation. “CMP” is the comparison result between the DAC output and the sampled input, with “1” representing a larger input...... 73

Figure 55: Timing diagrams of the main control ...... 74

Figure 56: Measured comparator output and DAC output, showing that an input voltage had been converted to code 19...... 76

Figure 57: Measured ADC transfer function at 100 Hz sampling rate...... 76

Figure 58: Measured ADC DNL and INL without calibration...... 77

Figure 59: Measured ADC DNL and INL with calibration...... 77

Figure 60: The organic ADC integrated with organic sensors...... 82

Figure 61: Unsuccessful attempts at wire bonding using aluminum (left) and gold (right) pads...... 83

Figure 62: Concept of an organic transistor AM radio receiver...... 85

Figure 63: Drawing of the measurement apparatus...... 88

Figure 64: Photograph of the test setup...... 88

Figure 65: Photograph of the probe station...... 89

Figure 66: CAD drawing of the probe wedge...... 89

Figure 67: Photograph of the probe wedges mounted on the probe station...... 90

Figure 68: Photograph of a probe card...... 91

xiv

Figure 69: The measurement apparatus with a probe card instead of probe wedges. . 91

Figure 70: Photograph of the adapter board (left) and the FPGA board (right)...... 92

xv

1. Introduction

This chapter provides an overview on organic transistors, their applications, and the research conducted for this dissertation. Section 1 introduces some of the unique properties of organic transistors and the potential applications. Section 2 summarizes the structures and performances of organic transistors. Section 3 outlines our research goals. Section 4 describes the organization of this dissertation.

1.1. Motivation

In the three decades since Alan J. Heeger, Alan G. MacDiarmid, and Hideki

Shirakawa discovered electrical charge transport in polymers [1], for which they would win the Nobel Prize in chemistry in 2000, much progress had been made in extending their groundbreaking discovery to practical applications. The invention of the organic light-emitting diode (OLED) by Ching W. Tang and Steven Van Slyke in

1987 [2] further promoted the research of semiconducting polymers. Today, due to its superior image quality and mechanical flexibility, OLED is poised to overtake liquid crystal display (LCD) as the display of choice. As the two-terminal organic diodes

1 reach commercialization, the three-terminal organic transistors are transitioning from scientific experiments to practical devices.

A number of structures exist for organic transistors, including the thin-film implementation used in this work. The organic field-effect transistors (OFET) present a new approach to building electronics that can mechanically flex, span large areas, and integrate with organic materials. In particular, the recent development of low- voltage complementary OFET provides a path to realize many novel applications. At present, the most immediate application is flexible displays, with several manufacturers demonstrating commercial prototypes [3] – [5]. In the near future,

OFETs may underpin devices ranging from large-area structural monitors to artificial skin [6] – [8]. Because OFET can be manufactured at or near room temperature, they allow integrated circuits to be made on flexible plastic substrates that do not withstand the high processing temperatures used for silicon based devices. And because organic materials can be made soluble [9] – [11], the ability to print organic OFETs advances the prospect of inexpensive large-area electronics [9]. Furthermore, as most organic semiconductors are sensitive to specific chemical or biological agents [12], OFETs make excellent sensory receptors. This mechanical flexibility, large-area coverage, and chemical specificity make OFETs naturally suited to integration with organic materials such as artificial muscles [13], polymer actuators [14] and biochemical sensors [15]. Figure 1 illustrates these unique advantages of organic transistors. Figure

2 shows some potential applications of organic transistors.

2

Figure 1: Unique advantages of organic transistors – flexibility, large-area printing, and chemical specificity.

Figure 2: Some conceptual applications of organic transistors – (clockwise from top left) a wearable mobile phone, smart bandages, artificial skin and retina, and an electronic newspaper.

3

Pentacene Based Dihydrodiazapentacene Imidazolylquinoline Substituted Fused-Bithiophene Spiro-Linked Compounds H C 3 CH3 i H H R N P-type: SiR3 SiPr3 N N R S S R N N F X N N R H S S (v, 6, 2003) H N N N N Anthracene Based F X H (v, 0.06, 2005) (v, 0.09, 2005) -5 R= H (v, 0.038, 2005) R (v, 5x10 , 2003) R= H (v, 0.006, 2003) Carbazole Derivatives N N N R R R= CH3 (v, 0.001, 2003) R= (v, 0.148, 2005) C H N 1 2 F X R 12 25 C8H17 -4 R CH3 F X R= (v, 5x10 , 2003) N N 2 N (sc, 0.02, 2004) n R -5 -5 R2 R1 SiR3 1 (v, 7x10 , 2005) (v, 7x10 , 2005) R ,R = Me (v, 0.3, 2003) i R1 1 2 SiR3 SiPr3 Thioacene CH3 R N H3C R n= 0, R= H (v, 0.013, 2003) R = Cl (v, N.O., 2003) -5 S N 2 N R= Me (s, 10 , 2003) H C S X= H (v, 0.014, 2005) RR R C12H25 3 C H n= 0, R= C6H13 (v, 0.13, 2003) R1= Me; R2= H (v, 2.5, 2003) S 8 17 Triarylamines -5 X= F (v, 0.045, 2005) S n= 1, R= H (v, 0.072, 2003) R1= C6H13; R2= H (v, 0.251, 2003) R= Et (s, 10 , 2003) R= octyl (v, 0.003, 2005) R1= Cl, R2= H (v, 0.01, 2005) (v, 0.001, 2004) S R i R= H (v, 0.09, 1998) S -4 R = H, R = Cl (v, 0.14, 2005) (v, 0.12, 2005) n= 1, R= C6H13 (v, 0.18, 2003) R= Pr (s, 0.4, 2003) R= dodecyl (v, 1.2x10 , 2005) 1 2 N Quinones R= C6H13 (v, 0.15, 1998) (s, 0.002, 2005) R2 R= Me (s, N.A., 2005) R= 4-octylphenyl (v, 0.12, 2005) R= C12H25 (v, 0.14, 1998) N O O O R= Et (s, 1, 2005) -5 -4 R R= C18H37 (v, 0.06, 1998) R= 4-methylphenyl (v, 10 , 2004) R1 R= (s, 10 , 2005) S CH3 CH3 SiR3 i -4 R= Pr (s, 10 , 2005) R1 R S N CH CH Bis- and oligo-(benzodithiophene) Ph R1= H, R2= C6H13 (v, 0.30, 2005) -4 R= H (v, 0.063, 2005) 3 3 Ph R2 R= (s, 10 , 2005) (v, 1.1, 2004) R = C H , R = CH (v, 0.054, 2005) (v, 0.05, 2005) O (v, N.A., 2005) O (v, N.A., 2005) O N 1 6 13 2 3 R= C6H13 (v, 0.5, 2005) S S S S -6 (v, 10 , 2004) C H C6H13 C6H13 6 13 N N Rubrene Derivatives S S SS Tetracene Based R (v, 0.04, 1997) (v, 1.6x10-2, 2001) Thiophene-Thiazolothiazole Co-Oligomers R= Cl; R'= H (sc, 1.4x10-4, 2004) S S R= H (v,N.O. , 2004) -4 S S S C6H13 R N (s, 10 , 2005) R= Br; R'= H (sc, 0.3, 2004) R N N S N S R R= Cl; R'= Cl (sc, 1.6, 2004) S SS C H (v, 0.1, 2002) R' S C6H13 SS6 13 O S -3 R S N S (sc, 1.3, 2004) R= Br; R'= Br (sc, N.A., 2004) (v, 0.15, 1999) (v, 10 , 2001) (v, 0.02, 2004) (v, 0.003, 2004) (v, 0.002, 2004) (v, N.O., 2004) S R N (v, 10-3, 2004) (v, 10-3, 2004) Bis- and oligo-(dithienothiophene) TTF Derivatives S (sc, 15.4, 2004) X2 S S S S S -4 S S S S X2 S S S S R= (s, 3x10 , 2005) X1 S S S Polycyclic Aromatic Hydrocarbons (v, 0.5, 2005) (s, 0.7, 2005) X1 S S S S S S S S S S S S S S S DT-TTF -3 R1-6= H S S X1= S, X2= H (sc, 0.4, 2004) X = H, X = S (sc, 1.8x10 , 2004) (sc, 0.062, 2004) t (sc, 1.4, 2004) 1 2 -4 Phthalocyanines Bu S (v, 0.05, 2000) (v, 0.045, 2005) X = H, X = S (sc, 0.015, 2004) -4 R R (v, 1.4x10 , 2005) M = Cu (v, 0.02, 1996) 1 2 X = S, X = H (sc, 1.4x10 , 2004) N 1 2 C H OOCH 1 2 12 25 12 25 R R (sc, 1, 2005) Bis(1,3-dithiol-2-ylidene) Compounds with Conjugated Spacer X X X X R1,2,4,5=H; R3,6= C6H13 N S S S S S S S S N = Sn (v, 3.4x10-3, 1997) (v, 0.011, 2005) R= H (v, N.O., 1978) R= H (v, N.O., 1978) N N -3 NN R= O(CH2)10OH; M= Cu S S S S -6 -4 S S X X X X = H2 (v, 2.6x10 , 1997) -4 S S N M N M = Benzo (v, 2x10 , 1978) = Benzo (v, 2x10 , 1978) R R R1,4=H; R2,3,5,6= C6H13 -3 (s, 4x10 , 2003) S S (sc, 0.0012, 2004) X= C (v, 0.06, 2005) X= C (v, 0.42, 2005) N 6 3 = Zn (v, 2.8x10 , 1997 RR RR RR N N N N -5 = N (v, 0.2, 2005) R (v, 0.012, 2005) -4 = O(CH2)10OH; M= none = N (v, 3.3x10 , 2005) = Fe (v, 6.9x10 , 1997) N N S S N (s, 4.8x10-5, 2003) S S S S S S S S Chalcogenophenes C10H21 R1-6= C6H13 -4 S S Oligothiophenes = Pt (v, 1.5x10 , 1997) But X X -4 = NH ; M= none N N Se Se (v, 9.5x10 , 2005) C H OOCH -5 2 N N N N N S R R 12 25 12 25 = Ni (v, 5.4x10 , 1997) t -6 Se Se H n 5 4 Bu S S S Se X (s, 0.02, 2005) (s, 10 , 1999) SS S -3 R1-6= Ph-p-C12H25 X n= 1 (s, 1.03x10 , 2005) C8H17 N N N N N (v, 0.0036, 2003) X= S (v, 0.081, 2004) O O S -4 S (s, 0.001, 2005) C8H17 SS X= Se (v, 0.17, 2004); (sc, 1.5, 2005) = 2 (s, 6.5x10 , 2005) N OC H BTQBT SS SS SS SS N N 8 17 X= Te (v, 0.0073, 2004) = 3 (s, 2.2x10-4, 2005) C H O N N OC8H17 (v, 0.2, 2004) 8 17 N N S Porphyrins NNN C8H17O N RR RR RR Oligo(aryl) Oligo(arylacetylene) N N C H C6H13 8 17 C H N N N O O BenzoBTQBT R= H (v, N.O., 1978) X= C (v, N.O., 1978) 6 13 C H M C8H17 C H 6 13 N HN O -4 -5 -7 Me3N SiR3 6 13 O O (v, 3x10 , 1978) = Benzo (v, 8x10 , 1978) = N (v, 6x10 , 1978) M O n C8H17 O S O O O n= 2 (4P) (v, 0.01, 1997) R= CH (v, 0.3, 2005) N N NH N NH HN N O O Naphtha[1,8-bc:5,4-b'c']dithiophene 3 S C8H17 N N OO i -4 N n= 3 (5P) (v, 0.04, 1997) C6H13 S S Pt H2SO4 N OC H O O N N N R= Pr (v, 4.3x10 , 2005) C H N N 8 17 O O N R S n= 4 (6P) (v, 0.07, 1997) S 6 13 H S N N N HN NH HN N OC H O R = C6H13 S -4 C8H17O N 8 17 O O S S S Oligo(arylvinylene) H n n (s, 2x10 , 2003) S N N O O -4 -4 S C8H17O N O O M O (v, 3x10 , 2005)(v, 10 , 2005) (v, 0.006, 2005) C H C H NH N O C8H17 10 21 10 21 C8H17 O O O O M= Eu (s, 0.6, 2005) O C H O O Poly(9,9'-dioctyl-flourene-co-bithiophene) -4 8 17 N O R = C8H17 -4 M= Tb (s, 6.4x10 , 2005) N N N O = Ho(s, 0.4, 2005) (v, 0.12, 2004) (s, 2.2x10 , 2003) N S S O O N N S (s, 0.012, 2003) (s, 0.68, 2005) = Lu (s, 1.7x10-3, 2005) N = Lu (s, 0.24, 2005) R N S n O O (v, 0.057, 2005) Thiophene-Based Polymers N O O (v, 0.036, 2005) (v, 0.11, 2005) S n O O C H C H R R C H C H C H C H S 8 17 8 17 O O Polar-Substituted Thiophenes RR C6H13 6 13 6 13 C6H13 6 13 6 13 S S Thiophene Core Substitutions n n F8TT N Unsubstituted Thiophenes C6H13 S S S S S S S R R R n C8H17 C8H17 -3 N S S S S R SS SS SSS SSS F8T2 (s, 1.1x10 , 2005) C8H17 C8H17 S S S S R R2 R S S S S S 1 S S 1 head-to-tail head-to-head poly(3-hexylthiophene) P3HT -3 S S S -3 (s, 0.02, 2004) S S S R= (CH2)3OC4H9 (v, 8x10 , 1998) (HT) (HH) (s, 3x10 , 2004) -4 -4 C6H13 R= (CH ) OC H (v, 0.033, 1998); (s, 0.01, 1998) Regioregular P3HT(s, 0.12, 2004) R1= H, R2= phenyl (s, 5x10 , 2005) (v, 5x10 , 2001) (s, 3x10-3, 1998) 2 3 4 9 4T (v, 0.014, 2004) 5T (v, 0.078, 2004) O O = (CH ) OC H (v, 9x10-3, 1998); (s, 1x10-3, 1998) O HO Regiorandom P3HT R1= C6H13, R2= phenyl (v, 0.042, 2005) S 2 3 8 17 O -3 N Thiophene-Thiazole/Thiadiazole Cyclopentadithiophene Based Polymers O -3 R = C H , R = phenyl (v, 0.3, 2005) OOOO = (CH2)4PO(OEt)2 (s, 4.9x10 , 2002) R R S S SSS S S 1 10 21 2 S S 6 R R= C4H9 (s, 1.2x10 , 2005) Co-Polymer R1 R1 1 1 n n -4 S S S S S S S R = C H , R = biphenyl (v, 0.049, 2005) -4 C H R2 R 1 6 13 2 (s, 10 , 2003) = C8H17 (s, 3x10 , 2005) 9 19 N N 2 -5 N R = C H , R = flourene (v, 0.01, 2005) S = C H (s, 8.5x10 , 2005) S S SS 6T (v, 0.07, 2003) 8T (v, 0.2, 2003) 1 6 13 2 Thiophene-Fluorene Oligomers n 10 21 SS n -3 S S S S R = C H , R = flourenone (v, 2x10 , 2005) (v, N.O., 2004) n n n -5 S n n n (sc, 0.1, 1996) 1 6 13 2 -3 -5 -4 = C12H25 (s, 2.4x10 , 2005) R= C8H17 S (s, 10 , 1999) (s, 2.8x10 , 1999) (s, 2.9x10 , 1999) -3 -4 -6 R R R R (s, 3.4x10 , 2005) R1=H, R2= C8H17 (s, 5x10 , 2003) -5 R1= C6H13, R2= phenanthrene (v, 0.067, 2005) n (s, 2.5x10 , 2004) (s, 7.9x10 , 2003) N N O O -7 Alkyl-Substituted Thiophenes -3 C12H25 R , R = C H (s, 10 , 2003) R = H, R = thiazole (s, 7x10 , 2001) S S n= 1, R= C H (v, 0.012, 2003) O C12H25 1 2 8 17 1 2 C H S 6 13 C12H25 O R= C H (v, 0.23, 1998) C6H13 SSS S 6 13 6 13 S S n= 2, R= C6H13 (v, 0.14, 2003) O S S S C H C H Poly(alkylidene fluorene) Poly(p-phenylene vinylene) (PPV) R = C10H21 (v, 0.2, 2003) 6 13 S S 6 13 n= 3, R= C H (v, 0.025, 2003) S R S S R= H (v, 0.011, 1999) O 6 13 S S S n = cyclohexyl (v, 0.038, 2005) SSS S S R R O -4 (v, N.O., 2004) n= 4, R= C6H13 (v, 0.023, 2003) S S n -4 OR1 S -4 -3 (s, 0.06, 2005) (s, 4x10 , 2004) = C6H13 (v, 3.5x10 , 1999) n (s, 6x10 , 2005) C12H25 OR -4 n= 2, R= H (v, 0.08, 2003) (s, 6.3x10 , 2005) 2 (v, 8x10 , 2004) (s, 0.07, 2005) O n= 2, R= cyclohexyl (v, 0.17, 2005) C H Aromatic-Substituted Thiophenes O C12H25 C6H13 FF 6 13 S S S S S R S N N n n R R R R O RO S S S S S S R S S R S S 1 n S S S S S S C8H17 -4 R= CH3 S S R R RR R2 SSS R= C6H13 (s, 4x10 , 2004) R3O n -3 C6H13 SSS S C6H13 S S S R1 S S -4 R= CH3 (v, 9.2x10 , 2004) R= C2H5 (v, 1.1, 2003) n -3 -4 (s, 4x10 , 2005) (v, 0.02, 2004) -5 -3 S FF = C H (s, 10 , 2004) R1= CH3, R2= C18H37, R3= H (s, 10 , 2005) R= H (v, 10 , 1999) C H 8 17 = C H (v, 0.5, 2003) R= phenyl (s, 1.4x10 , 2003) R= tolyl (v, 0.03, 2004) S S C6H13 -3 6 13 10 21 = C6H13 (v, 1, 2003) -5 R1, R2= phenyl (s, 0.033, 2001) n (s, 2x10 , 2005) -3 -3 = 3,7-dimethyloctyl = C H (v, 2x10 , 1999) -3 = C10H21 (s, 2x10 , 2004) R1= CH3, R2,3= 3,7-dimethyloctyl (s, 10 , 2005) 6 13 = biphenyl (v, 7.7x10 , 2003) = biphenyl (v, 0.17, 2003) R1, R2= biphenyl (v, 0.055, 2003) -3 = C6H13 (v, 0.054, 2004) = C10H21 (v, 0.5, 2003) Alternating Co-Oligomers (s, 0.03, 2005) C H C8H17 C8H17 (s, 10 , 2005) -3 8 17 C8H17 C8H17 R = C H , R = C H (s, 0.01, 2005) (sc, 0.66, 2002) = phenyl (v, 3x10 , 2001) R1, R2= tolyl (v, 0.03, 2004) 1,2 11 23 3 18 37 = C12H25 (v, 0.016, 1998) N S S R S S S S S S S -3 SS Phenoxazine Based Polymers R = C H (v, 1.3x10 , 1998) S S S S S C6H13 Polytriarylamines R 18 37 S S S C6H13 C6H13 S S S S R S n n C H -4 R R 6 13 N R= H (s, 0.02, 2001) (s, 10 , 2001) S S S n= 1 (s, 0.01, 2003) S S n 3,3"PTT-8 (s, 0.03, 2005) 3',4'PTT-8 (s, 0.01, 2004) N C6H13 R = C6H13 (v, 0.03, 1997) n = 2 (s, 0.09, 2003) RR C12H25 C H = C6H13 (s, 0.054, 2003) R= tolyl (v, 0.02, 2004) O 6 13 t t R2 R2 R2 R2 = 3 (s, 0.054, 2003) R = C8H17 (s, N.A., 2005) BuMe2Si SiMe2Bu C6H13 C6H13 S S x C H C H SC4H9 S O 6 13 6 13 n = 4 (s, 0.09, 2003) = C10H21 (s, 0.6, 2005)) n S S -6 -6 N -6 R1 S = C H (s, 0.12, 2005) n (s, 9x10 , 2005) (x=0.25) (s, 6x10 , 2005) S S S S n= 4 (v, 8x10 , 1998) S S SSS S 12 25 n R S S C H PQT-12 (s, 0.14, 2004) 1-x S S S S S S S 1 12 25 -4 -4 S S S C H (x=0.50) (s, 3x10 , 2005) n = 5 (v, 3x10 , 1998) (s, 0.018, 2003) Bu Bu Bu Bu 6 13 n (v, 0.012, 1997) R R R R -4 (v, 10-4, 1999) C4H9S = 6 (v, 4x10-5, 1998) 2 2 2 2 (v, 0.011, 2004) Bu Bu N (x=0.75) (s, 2x10 , 2005) (s, 0.01, 2004) n= 3 (v, 0.012, 2004) -3 S S S (s, 1.4x10 , 1997) -3 Asymmetric End-Capped Thiophenes Si Si S S S R1, R2= H (v, 1.4x10 , 1997) S S N = 4 (v, 0.064, 2004) Bu m S S S 2 mn Bu m n O R = C H , R = H (v, 0.055, 2003) S S R S S 2 2 1 6 13 2 R 2 C6H13 -5 -5 2 n -6 1 S S S S m= 2 (s, 3.4x10 , 2005) m= 2 (s, 6.9x10 , 2005) S R = H, R = C H (v, 1.1x10 , 2003) C6H13 n 1 2 6 13 -5 -5 -4 = 3 (s, 4.6x10 , 2005) = 3 (s, 6.7x10 , 2005) (s, 6x10 , 2005) (s, 8x10-5, 2004) R1= H, R2= C6H13 (v, 0.02, 2004) (v, 0.011, 2004)

Trifluormethylphenyl-Based Oligomers Thiophene Based Oligomers Quinoid Systems Polymeric Systems C F F C N S C8F13 8 13 NC O O O O N-type: 3 S S NC CN F CCF CN NC N N S 3 3 S S C F O S N C F 6 13 N N N N Perylene Diimide Derivatives CF3 6 13 S S x SSR NC CN NC CN N O O (v, N.O., 2005) x -4 S -5 NC N O O (v, 0.18, 2005) x = 1 (v, 2x10 , 2004) R S (v, 10 , 1994) N N N N x = 1 (v, 0.059, 2004) O TCNQ (v, 10-3, 1994) n n -7 -6 O O = 2 (v, 0.074, 2004) (v, 9.6x10 , 2004) BBL (s, 0.1, 2003) BBB (s, 10 , 2003) R N N R S = 1.5 (v, 0.026, 2004) R = C6H13 (v, 0.1, 2005) F C N -3 3 S CF3 = 3 (v, 3.9x10 , 2004) = C6F13 (v, 0.6, 2005) -3 R1 O O O O S N CF = 2 (v, 10 , 2004) -3 3 F C = 4 (v, 2.5x10 , 2004) NCN COONH -4 S 3 R2 N N NCN 4 (v, N.O., 2002) PTCDA (v, 10 , 1997) R = C H (v, 0.06, 2004) O 5 11 (v, 0.3, 2005) -3 (v, 3x10 , 2005) N N CN NC = C8H17 (v, 1.3, 2004) O O R3 N N CN S S C6F13 SS C6F13 n O O R = (v, 0.1, 2004) R4 -6 = C12H25 (v, 0.5, 2004) N N C F S S S S (v, 2.2x10 , 2004) S C8H17 C8H17 N N -5 F3C F C 6 13 C6F13 n (s, 10 , 2004) S 3 O O -6 S RRN N = C H (v, 0.6, 2005) S -3 R = R = R = R = H (v, 3.6x10 , 2004) 13 27 S (v, 10 , 2005) 1 2 3 4 (s, 0.7, 2001) -3 -5 CF S OO (s, 4.8x10 , 2005) (v, 0.64, 2004) = C H (v, 1.5x10 , 1996) N 3 CF3 = n-CH2C3F7 6 5 N O O -4 F F (s, 10 , 2004) -4 (v, N.O., 2005) (v, 1.83, 2005) F F CN = (v, 1.9x10 , 2005) R = R = H -8 F F 1 4 (v, 10 , 2004) CN OR F S F F NC S Naphthalene Diimides N S S O R = R = CH C F C F F3C F O 2 3 3 S S N N 3 7 7 15 F C N N S S S F S S CN O H R 3 S NC S S S F F O S S F OON OON F (v, 0.08, 2003) F R R O n OOO OON OON S S N CF3 O N N CF F F R = R = H -7 C H RO N N 3 F F 1 4 (v, 2.1x10 , 2004) 8 17 C8H17 -3 (v, 0.085, 2005) (v, 0.45, 2005) R = C4H9 (v, 0.2, 2003) (v, 2.8x10 , 2005) R2 = R3 = OCH3 F F F F F (s, 0.21, 2005) R = 2' ethylhexyl (s, 2.2x10-8, 2004) F F F C F C N 3 O 3 S S S S O R1 = R4 = OCH3 -7 OON OON S S (v, 2.5x10 , 2004) OOO OON OON S S F F S S S S CF3 O R2 = R3 = H NTCDA H R N CF3 F F F F F O C3F7 C7F15 (v, 0.025, 2005) -3 NTCDI R = C H (v, 0.16, 2000) (v, 0.018, 2005) (v, 0.043, 2005) (v, 3x10 , 1996) 8 17 (v, 0.03, 2000) (v, 0.06, 2000) (v, 0.11, 2004) Phthalocyanines Fullerenes and Fullerene Derivatives = C12H25 (v, 0.01, 2000) O -3 O = C18H37 (v, 5x10 , 2000) R R R R R KEY: R R R1 R R R = F, M = Cu (v, 0.03, 1998) R O N N N N 2 -1 -1 OON -4 -3 + N N R = CH (CH ) CH R = NH (v, 3x10 , 2003) R R = F, M = Zn (v, 1.2x10 , 1998) N N • (Deposition Method, Mobility [cm V s ], Year) N 1 2 2 7 3 2 2 N N R N R = -N N -4 N N Cl M = Lu (v, 10 , 1990) -4 N M N -5 N Cu N F C O = CH2(CF2)6CF3 = NH2 (v, 2x10 , 2003) R = F, M = Co (v, 4.5x10 , 1998) N Cu M 3 O CF N N N -4 -4 • v: vapor; sc: single crystal; s: solution 3 R N R -3 N N (s, 3x10 , 2003) N = Tm (v, 10 , 1990) = CH2(CF2)2CF3 = NH2 (v, N.O., 2003) R = F, M = Fe (v, 2.1x10 , 1998) N N N R N -5 N -5 N N (v, 0.12, 2000) = (CH ) CH = N(CH ) (v, 10 , 2003) R R R = Cl, Me = Fe (v, 2.7x10 , 1998) R C60 (v, 0.56, 2003) PCBM (s, 0.2, 2005) 2 7 3 3 2 R • N.O.: Not Observed; N.A.: Not Available O OON R R R R R -4 R2 R = SO3Na (s, 3x10 , 2003)

Figure 3: Hundreds of organic semiconductors. (Source: Bao research group.)

1.2. Background on Organic Semiconductors and Organic Transistors

Organic semiconductors comprise any semiconductor derived from hydrocarbon

based materials. The semiconductor can take the form of single-crystal,

polycrystalline, small molecules, or long polymeric chains [16]. Over the past twenty

years, hundreds of organic semiconductors have been discovered or synthesized; some

4 are shown in Figure 3. The most common ones include polycyclic aromatic compounds such as pentacene and rubrene, and various polythiophenes polymers. Due to their simpler formulation and higher performance, p-type organic semiconductors far outnumber the n-type. However, recent progresses in developing air-stable n-type organic semiconductors have shown promise [17] – [18]. It is expected that the performance of n-type will soon approach that of the p-type. As with inorganic semiconductors, charge mobility is a critical performance measure of organic semiconductors. The highest p-type mobility was achieved by single-crystal rubrene at

40 cm2V-1s-1 [19]. The highest n-type mobility was achieved by thiazole oligomers at

1.8 cm2V-1s-1 [20]. As the mobility of organic semiconductors increased over the years, the practical usefulness of the organic devices also increased. Figure 4 shows the evolution of organic transistors and corresponding applications. Presently, the typical p-type mobility in a circuit range between 0.1 and 1 cm2V-1s-1, a level that is suitable for low-speed sensors and displays. The typical n-type mobility in a circuit range between 0.01 and 0.1 cm2V-1s-1. In this work, three types of organic semiconductors were used – pentacene and dinaphthothienothiophene (DNTT) [21] for the p-type OFETs, and hexadecafluoro-copperphthalocyanine (F16CuPc) [22] for the n-type OFETs. The chemical structures of these three are shown in Figure 5.

5

Crystalline Si High speed IC Polycrystalline Si

1 10 Low speed IC Amorphous Si 0 a-Si:H 10 Displays, Sensors ) -1 s

-1 -1

V 10 2 E-paper, Solar cells

(cm 10-2 Lab experiments 10-3 Mobility

10-4

1986 1988 1990 1992 1994 1996 1998 2000 2002 2004 2006 Year Figure 4: Improvements in organic semiconductor mobility and corresponding example applications. (Source: Bao research group.)

Figure 5: Chemical structures of the three organic semiconductors used in this work. (Sources: Wikipedia; Klauk research group; Bao research group.)

Among the many structures devised for OFETs, the most common ones are the bottom-gate top-contact, and the bottom-gate bottom-contact [23]. Figure 6 shows the physical differences between these two structures. Typically, the top-contact structure achieves higher mobility than the bottom-contact. The exact mechanism of superiority

6 is presently unclear, but various literatures have identified the reduced contact resistances of the top-contact devices as a possible source of higher apparent charge mobility [24] – [25]. In contrast, the bottom-contact structure is easier to fabricate – because the semiconductor resides at the very top of the structure and deposited as the last step, it is not exposed to the deleterious effects from various chemicals used to fabricate the lower layers. This work experimented with both structures, as detailed in

Chapter 2. However, all circuit designs utilized the top-contact OFETs.

top-contact bottom-contact

Source Drain Semiconductor

Semiconductor Source Drain Dielectric Dielectric Gate Gate

Substrate Substrate

Figure 6: Illustrations of the bottom-gate top-contact and the bottom-gate bottom- contact structures.

Conceptually, the organic field-effect transistors behave similarly as the traditional silicon transistors. Whereas a silicon transistor conducts based on the energy differentials between the semiconductor and the contact metals [26], an organic transistor conducts based on the energy differentials between the organic molecules’ highest occupied molecular orbital (HOMO) level or the lowest unoccupied molecular orbital (LUMO) level and the bandgap energy of the contact metals [23]. Conduction in an organic transistor exhibits similar mechanisms as in a silicon transistor, with both electrons and holes acting as charge carriers. This similarity allows the OFET to

7 share many attributes with the silicon MOSFET. Schematically, as seen in Figure 7,

OFET resembles an inverted version of the silicon MOSFET. Electrically, the channel-controlling field effect operates on both the OFET and the silicon MOSFET.

Indeed, experiments have shown that the OFET can reuse many of the first-order

MOSFET behavioral models and equations, such as the quadratic current-voltage relationship [27] – [28]. Similarities also exist at the circuit level, in terms of intrinsic gain (gm·ro) and transconductor efficiency (gm/ID) [29]. One notable distinction between the OFET and the MOSFET is sub-threshold conduction – OFETs tend to not have well-defined threshold that clearly delineate between the on and the off states as in MOSFETs; rather, OFETs typically have more gradual current onsets [23].

(All threshold voltage values stated in subsequent chapters were extrapolated from linear fits of square-root of ID versus VGS plots.)

top-contact Silicon MOSFET

Source Drain

Semiconductor

Dielectric Gate

Substrate

Wikipedia Figure 7: The top-contact OFET closely resembles the silicon MOSFET.

Despite similarities between OFET and silicon MOSFET, numerous practical differences exist – a consequence of forty years of development gap and the inherent divergence in processing technologies. Table 1 lists some of the distinctions between typical organic transistors and inorganic transistors.

8

Table 1: Comparisons of typical organic transistors and inorganic transistors.

Organic Transistor Inorganic Transistor

Material Hydrocarbons III, IV, V elements

Structure Molecular polymers Crystal lattice

Interaction Weak Van der Waals forces Strong valance bond

Speed Transit frequency < 10 MHz Transit frequency > 100 GHz

Mobility 10-3 –101 cm2/V-s 102 –103 cm2/V-s

Typical Size 1 μm – 100 μm22 nm –0.5 μm Processing Crystal growth, vapor deposition Crystal growth, vapor deposition technology Inkjet, spin-coating, weaving, gravure

Processing 50 – 150° C> 500° C temperature

History 1977: First organic conductors 1947: First transistor 1987: First organic LED 1958: First integrated circuits 1987: First organic transistor [30] 1962: First LED

1.3. Research Goals

Despite the low performance of organic transistors relative to silicon transistors, substantial progress has been made in developing practical organic circuits in the past ten years. Several organic transistor based products are on the verge of commercialization, including Plastic Logic’s electronic reader, PolyIC’s printed RFID tags, and various displays that use organic transistors in their backplanes.

Academically, a number of substantive circuits have advanced the practical possibilities of organic transistors. Among the digital circuits, recent state-of-art designs, shown in Figure 8, include a 26 bit x 26 bit non-volatile random access memory (NVRAM) [31], a 128 bit RFID tag [32], a programmable gate array [33],

9 and an 8 bit decoder [34]. However, in the analog realm, the state-of-art had been lagging in progress. Until the publication of a 6 bit DAC (part of this work) [35] and a

1 kHz comparator [36] in 2009, the most advanced analog organic circuit had been the simple differential amplifier seen in Figure 9 [37]. This sparse showing of analog organic circuits could be traced to the large process drifts in OFET fabrication – often orders of magnitude higher than those in silicon processes [38]. For digital circuits, such drifts could be tolerated as long as there was enough distinction between logic 0 and 1. For analog circuits, large drifts would render the circuits inoperative. Thus, the goal of this research was to fill this gap – to develop drift-tolerant analog circuits in the organic transistor technology.

26x26 NVRAM 128b RFID Tag Sekitani, Science v.326, Myny, ISSCC 2009 2009

3 to 8 Decoder Programmable Gate Array, Ishida, ISSCC 2010 Ishida, ISSCC 2009 Figure 8: State-of-art digital organic circuits, circa 2010.

10

Differential amplifier, Gay, ISSCC 2006

Figure 9: State-of-art analog organic circuit, circa mid-2009.

In most mixed-signal electronic systems, there exist three main sections – the analog transducer that interfaces with the physical environment, the analog signal processing front-end, and the digital signal processor (see Figure 10). Data converters play a critical role in bridging the analog signals and the digital bits. For the emerging organic sensors, in particular, data converters are indispensable. Yet, data converters, which rely on component matching for accuracy, had not been demonstrated in an

OFET process thus far. This research aimed to address such deficiencies with the designs of organic data converters – a 3 V, 6-bit digital-to-analog converter (DAC)

[39], and a 3 V, 6-bit analog-to-digital converter (ADC) [40]. The DAC and the ADC are described in Chapter 4. A photograph of the DAC and the ADC on a plastic substrate is shown in Figure 11.

11

Amplifiers, ADC Filters, etc. Analog Media and Digital Transducers Processor Amplifiers, DAC Filters, etc.

Sensors, Displays, Analog Signal Processing Digital Signal Actuators, Antennas… Processing

Figure 10: General block diagram of a mixed-signal electronic system.

Figure 11: An organic ADC (top half of the substrate) and an organic DAC (bottom half of the substrate) developed in this research.

12

1.4. Organization

This dissertation contains five chapters. This first chapter introduces the concept of organic semiconductors and transistors, their uses, and the research goal of building organic data converters. Chapter 2 details the fabrication of organic devices and their characteristics. Chapter 3 describes the non-idealities caused by the organic transistor fabrication process, and the consequent detrimental effects on analog circuit design.

Chapter 4 is the core of the data converter design – it shows that by leveraging organic process characteristics and the appropriate circuit architectures, the data converters can overcome the negative process effects. In Chapter 4, the organic DAC is described first, followed by the organic ADC (which utilizes the DAC). Measurement results are presented to demonstrate the functionalities of the DAC and the ADC. Chapter 5 offers a conclusion of this dissertation and future extensions of this research, including ideas on an organic-transistor amplitude-modulation (AM) radio receiver. Finally,

Appendices A and B describe the measurement apparatus and the simulation model parameters.

13

2. Organic Transistor Fabrication

The initial organic transistors used in this work were fabricated at the Stanford

Nano Fab. However, their performance was unacceptable. Section 2.1 details the fabrication process and some organic transistor data. When it became clear that the

Stanford Nano Fab did not possess the conditions for manufacturing stable organic transistors, a joint research effort was engaged with the Max Planck Institute for Solid

State Research in Germany. Section 2.2 describes the details of the fabrication process at the Max Planck Institute. Section 2.3 explains some special considerations of designing organic circuits.

2.1. Fabrication at the Stanford Nano Fab

The Stanford Nano Fab (SNF) presented a natural starting venue for organic device fabrication because of its convenient location and allowance for experimental materials. To reduce variability in the fabrication of organic transistors, early tests employed conventional photolithography on silicon substrates. While a multitude of specific techniques were attempted in determining the best approach, all wafers

14

0: Prepare silicon wafer Silicon Wafer

Gate Interconnect 1: Deposit and etch gate contacts and interconnects

2: Sputter dielectric

Via 3: Etch vias

Source Drain 4: Deposit and etch source and drain contacts

5: Deposit and etch Photoresist photoresist as separators

SAM & Organic Semiconductor 6: Deposit SAM and organic semiconductor

Figure 12: Typical organic transistor fabrication procedures in the SNF. followed the general procedures outlined in Figure 12, with Steps 0 to 5 performed in the SNF and Step 6 performed in the Bao Lab in the Chemical Engineering department. As shown in Figure 12, the organic transistors were of the bottom-gate bottom-contact type described in Chapter 1. The contact and interconnect metals were

15

50 nm-thick gold with an adhesion layer of 0.5 nm-thick titanium. The self-assembled monolayer was octadecylphosphonic acid (OTS), deposited by immersing the wafers in an OTS vapor for 24 hours. The organic semiconductor was pentacene, deposited in a 50 nm-thick layer through thermal evaporation. Five types of dielectrics were used – plasma-enhanced chemical vapor deposited (PECVD) silicon oxide, conventional polyvinylpyrrolidone (PVP), cross-linked PVP, poly(methyl methacrylate) (PMMA), and spin-on-glass (SOG). The thicknesses of the dielectrics varied between 100 nm and 300 nm depending on the material and the sputtering speed. At these thicknesses, the transistor generally required a drain-source voltage (VDS) and a gate-source voltage (VGS) in excess of 20 V for conduction. A large number of transistor topologies and dimensions were produced and tested, with channel lengths ranging from 5 μm to 100 μm, and width-to-length ratio ranging from 1 to 1000. Examples of the transistors and rudimentary circuits are shown in Figure 13.

Numerous papers have shown that the quality of the dielectric is a main determinant of organic transistor performance – specifically, that the surface roughness of the dielectric adversely affects the transistor mobility [41] – [42], and that the charge traps in the dielectric lead to undesirable hysteresis when the device is biased [43]. Of the five dielectric materials attempted in the SNF, PMMA did not withstand the energy of the photolithography process and warped during metal etching

(Step 4 in Figure 12). PECVD silicon oxide was unacceptably rough – AFM measurement of the dielectric surface showed an root-mean square roughness in excess of 5 nm, or over 10% of the thickness of the semiconductor layer. (The standard chemical-mechanical polishing used for smoothing oxide surface was not

16 available in the SNF.) Conventional PVP, cross-linked PVP and SOG (see Figure 14) showed good transistor behavior but suffered from trapped charges in the dielectric.

Figure 15 shows the measured output curves of one organic transistor with 200 nm- thick cross-linked PVP dielectric. The IV characteristics were well-defined. However, due to the excessive trapped charges, the transistor showed large hysteresis, as evident in the transfer curves in Figure 16.

After numerous experiments, it became clear that the SNF did not possess the appropriate equipment for high-quality organic transistor fabrication.

Figure 13: Photograph of the organic transistor and circuit structures on a PECVD oxide wafer, with linear and octagonal transistors at the right.

17

Figure 14: Photograph of a wafer with spin-on-glass as the dielectric.

Figure 15: Output curves of organic transistor fabricated at the SNF with 200 nm-thick cross-linked PVP dielectric, channel length = 100 μm, channel width = 2000 μm.

18

Figure 16: Transfer curves of the organic transistor with cross-linked PVP dielectric, showing large hysteresis due to trapped charges in the dielectric.

2.2. Fabrication at the Max Planck Institute

A collaboration was formed with Hagen Klauk of the Max Planck Institute for

Solid State Research in Stuttgart, Germany in the development of high-quality organic transistors for integrated circuits. The Klauk Group had already developed 3 V complementary organic thin-film transistors (OTFT) using shadow mask processing

[44], the collaboration aimed to extend the transistor work to integrated circuits. The

Stanford team was responsible for circuit and device design and layout, while the Max

Planck team was responsible for fabrication. The finished substrates were shipped back to Stanford for testing and analysis. Glass was chosen as an intermediate substrate material toward the eventual goal of fabricating circuits on plastic substrates.

19

A total of 28 substrates containing multiple circuits and devices were produced. Since all organic transistors used in the subsequent work belonged to the thin-film variety, the following text will identify them specifically as organic thin-film transistors

(OTFT), rather than the more generic organic field-effect transistors (OFET).

interconnects

drain gate source

Figure 17: Cross-sectional view of an OTFT fabricated at the Max Planck Institute (not to scale) – the organic semiconductor can be either p-type or n-type, source and drain metals are gold, gate metal is aluminum (left); Photograph of an OTFT (right).

As shown in Figure 17, the OTFTs use the bottom-gate top-contact structure. A

40 nm-thick titanium-gold interconnect layer was first deposited by evaporation onto the glass substrate and patterned by photolithography and wet etching. Conventional soda-lime chrome masks were used for this photolithography step. 50 nm-thick aluminum was then deposited by thermal evaporation through a polyimide shadow mask to define the gate electrodes of the OTFTs. The substrate was briefly exposed to oxygen plasma (150 W, 15 seconds exposure) to create a 3.6 nm-thick AlOx layer. The substrate was subsequently immersed in a 2-propanol solution of octadecylphosphonic acid (OTS), allowing a 2.1 nm-thick organic self-assembled monolayer (SAM) to form

20 on the aluminum oxide. The total thickness of the AlOx-SAM dielectric was approximately 5.7 nm, with a unit capacitance of 7 fF/μm2. This ultra-thin dielectric served as the gate dielectric for the OTFTs, allowing for a low operating voltage of 3

V. (The dielectric breakdown voltage was a correspondingly low 4.5 V.) 30 nm-thick pentacene or DNTT and F16CuPc were then deposited in vacuum through two additional shadow masks to form the semiconductors for the p-type and n-type

OTFTs, respectively. Finally, 30 nm-thick gold was evaporated through a fourth shadow mask to provide the source and drain contacts of the OTFTs. The use of polyimide shadow masks had the advantage that the source and drain contacts could be prepared on top of the organic semiconductors – providing better injection efficiency compared with bottom contacts – without exposing the organic semiconductors to deleterious chemicals [45]. The shadow masks were sufficiently soft to avoid damaging the semiconductors despite physical contact. The masks were cut by laser to produce the positive deposition patterns. For a long narrow opening, such as that required to pattern the channel, the non-uniform heat from the laser resulted in rough edges on the shadow mask, leading to variations in the channel length. Multiple-finger source and drain contacts, shown in Figure 17, were designed to reduce the laser heating and to produce more uniform opening. The resolution of the laser limited the minimum feature size to 20 μm. However, the difficulty of precisely aligning different layers led to typical feature sizes of 50 μm or larger, with 20 μm used only for critical features such as channel lengths, and only in localized areas.

Connections between devices were made via traces on the interconnect layer. The measured output and transfer characteristics of a p-type OTFT and of an n-type OTFT

21 are shown in Figure 18 and Figure 19, respectively. Both devices exhibited excellent

IV characteristics with negligible hysteresis. Nevertheless, they did exhibit the typical

OTFT non-idealities such as large contact resistance and gate-bias-dependent mobility

[25]. Table 2 lists some main OTFT parameters. Table 3 summarizes the fabrication steps. All processing were conducted below 90°C.

Table 2: Some main OTFT parameters.

p-type n-type

2 Oxide Capacitance Cox 7 fF/μm Saturation Mobility μ ~ 0.5 cm2V-1s-1 ~ 0.02 cm2V-1s-1

Threshold Voltage VTH -0.5 V 0.5 V

Intrinsic Gain gmro ~ 100 ~ 50

Transit Frequency fT up to 18 kHz up to 700 Hz

0.25 0.5

VGS = 3.0 V VDS = 3 V 0.20 0.4

VGS = 2.5 V 0.15 0.3 ) A) 0.5 μ A (

μ VDS = 1 V D I

0.10 ) ( 0.2 VGS = 2.0 V D SQRT(I 0.05 VGS = 1.5 V 0.1

0.00 0.0 01230123

VDS (V) VGS (V)

Figure 18: Measured output characteristics of an n-type OTFT (length = 20 μm, width = 400 μm) with VGS swept from 0 to 3 V in 0.5 V increments (left); Measured transfer characteristics of the same OTFT with VDS swept from 1 V to 3 V in 0.5 V increments (right).

22

0.0 2.0

VDS = -3 V

-0.5 VGS = -1.5 V 1.5 -1.0

V = -2.0 V ) GS 0.5 A) A

μ -1.5 1.0

( VDS = -1 V μ D I ) ( D -2.0 V = -2.5 V GS 0.5 SQRT(I -2.5

VGS = -3.0 V -3.0 0.0 -3 -2 -1 0 -3 -2 -1 0

VDS (V) VGS (V)

Figure 19: Measured output characteristics of a p-type OTFT (length = 20 μm, width = 400 μm) with VGS swept from 0 to -3 V in -0.5 V increments (left); Measured transfer characteristics of the same OTFT with VDS swept from -1 V to -3 V in -0.5 V increments (right).

Table 3: Summary of OTFT fabrication steps.

Layer Material Thickness Patterning Purpose photo- interconnect Metal 1 Ti + Au 0.3 nm + 40 nm lithography lines Metal 2 Al 50 nm shadow mask gate electrodes n-type Semi 1 F CuPc 30 nm shadow mask 16 semiconductor pentacene or p-type Semi 2 30 nm shadow mask DNTT semiconductor source and drain Metal 3 Au 30 nm shadow mask contacts

A critical component of our integrated circuits is the thin-film capacitor. The capacitors were created simultaneously with the OTFTs by intersecting an aluminum

23 trace (deposited with the OTFT gate electrodes) with a gold trace (deposited with

OTFT source and drain contacts). The aluminum traces served as the bottom electrodes; the gold traces served as the top electrodes, shown in Figure 20. The capacitors shared the same AlOx-SAM dielectric as the OTFTs, with the same dielectric capacitance of 7 fF/μm2. Other passive components, such as and , were not needed for this research and were not fabricated in this process.

Top metal SAM

AlOX Top metal (Au)

Bottom metal (Al) Substrate (glass)

Bottom metal Figure 20: Cross-sectional view of the capacitor, fabricated in the OTFT process (not to scale) (left); Photograph of two capacitors formed by intersecting traces (right).

Vias were needed to connect devices of different layers in the integrated circuits.

The fabrication process allowed two types of vias: metal 1 to metal 2 (M1-M2), and metal 1 to metal 3 (M1-M3). Vias of both types were formed by depositing the upper- layer metal directly on the bottom-layer metal. Due to the positive patterning, no etching was needed. For M1-M2 vias, aluminum (M2) was placed on top of gold (M1).

The low processing temperatures avoided the formation of intermetallic compound such as Au5Al2 (white plague) or AuAl2 (purple plague). To prevent microscopic

24 cracks at the vertical edges, the aluminum layer was made thicker than the gold layer.

For M1-M3 vias, as both metal layers were gold, the deposition required no special treatment. Direct connection between metal 2 and metal 3 was not possible because aluminum (M2) oxidized immediately in air, before gold (M3) could be deposited.

(Depositions were performed in vacuum, but switching masks required breaking the vacuum.) Consequently, each connection between metal 2 and metal 3 required a M1-

M2 via and a M1-M3 via. Figure 21 illustrates the layers of an OTFT, a M1-M3 via, and a capacitor.

Figure 21: Cross-sectional view of the layers of OTFT, via and capacitor (not to scale).

2.3. Special Circuit Layout Considerations

The organic transistor process required special considerations during circuit layout. Most of these considerations were due to the properties of the shadow masks.

As the shadow masks were physically very soft and pliable, accurate placement of the masks on the substrate was challenging. This led to potentially large misalignments between the layers. Thus, the circuit elements were designed to be relatively large to

25 allow sufficient overlap coverage between the layers – for example large gate-source and gate-drain overlaps. Additionally, any long or large opening on a mask further reduced the structural rigidity of the mask, leading to potential deformations during handling. Two techniques were employed to minimize this deformation: 1. long traces were sectioned into multiple shorter traces, with typically trace lengths limited to below 500 μm; 2. all traces on a mask ran in the same direction – for example, on the gate-metal mask, all traces ran in the vertical direction, whereas on the source-drain- metal mask, all traces ran in the horizontal direction, as illustrated in Figure 22. (The interconnect metal was fabricated through photolithography and thus did not use shadow mask.)

Figure 22: A gate-metal mask showing all traces in the vertical direction (left); A source-drain-metal mask showing all traces in the horizontal direction (right).

The shadow masks were 50 μm thick. It was discovered that metal lines narrower than 50 μm suffered from poor deposition, resulting in vanished edges. The insufficient metal thickness at the line edges was due to the small aspect ratio of the

26 mask opening to the mask height; the walls of the mask opening essentially blocked the metal particles from reaching the substrate during deposition. Thus, the minimum trace width in the design was set to 50 μm, and most traces were at least 100 μm wide.

The restrictions on the length, the width, and the direction of the traces led to the need for large numbers of vias and crossovers in the circuit. The vias were fabricated at the same time as the transistors, as shown in Figure 21. Crossovers were a late addition to the process – concerns of large parasitic capacitances prevented their earlier use. Because the traces were wide (typically 50 μm to 100 μm), and the aluminum-oxide dielectric was only 5.7 nm thick, the typical crossovers had capacitances of 17.5 pF to 70 pF. To prevent these large capacitances from affecting the circuit performance, crossovers were only allowed on power lines and digital control lines where the voltages were steady-state.

An important layout consideration was testability. The pads were formed on the interconnect layer. The thinness of the metal (40 nm) precluded wire bonding; thus cantilevered probes were used (see Appendix A). Each probe wedge contained 26 probe tips arranged in a row. Two probe wedges were needed to provide the 52 signals, controls and power lines to the circuit. The probe tips had a 1 mm pitch, thus resulting in a large layout area. During testing, it was desirable to view simultaneously both probe wedges under the microscope, thus the pads needed to be located close together

– leading to the unconventional layout where the pads were located in the center of the floorplan and the active circuitry surrounding the pads.

27

3. Effects of Organic Device Non- idealities on Analog Circuits

At this nascent stage of development, the organic transistor fabrication process can produce several undesirable side effects on the performance of analog circuits.

The four most significant are mismatches between devices, large parasitic capacitances from gate overlaps, dielectric leakage, and a lack of accurate device models. Section 3.1 to 3.4 describes these, respectively.

3.1. Device Mismatch

Variations between OTFTs had been a well-known problem [38]. Numerous causes were possible, including irregular morphology of the semiconductor, difficulty in controlling the precise dimensions of OTFTs during fabrication, mobile trapped charges in the dielectric, uneven material deposition, and the presence of dust particles. In this research, much effort went into producing homogeneous OTFTs.

Clean room and deposition techniques largely removed dust contamination and

28 uneven material coverage. The use of aluminum oxide as an ultra-thin dielectric, in conjunction with surface passivation from OTS, served to effectively limit the amount of trapped charges. However, the problems caused by irregular semiconductor morphology and non-uniform transistor dimensions remained. The semiconductor morphology was a fundamental characteristic of the semiconductor materials, and beyond the ability to control at this point. The non-uniform transistor dimensions were a byproduct of shadow masks. As explained in Chapter 2, the shadow masks were very thin and soft as to avoid damaging the underlying semiconductors during fabrication, but the laser was unable to smoothly cut such thin and soft masks – resulting in rough edges along the OTFT channels and subsequently varying OTFT performances.

15 60 P-type, σ = 39% 60 N-type, σ = 23%

10 Count Count 5

0 -100 -80 -60 -40 -20 0 20 40 60 80 100 DeviationsDeviations from from Mean Mean Current (%) (%)

Figure 23: Distributions of measured organic transistor drain-source currents, normalized to the mean.

To measure the variability of the OTFTs, 60 p-type and 60 n-type transistors (W

= 400 μm, L = 20 μm) were fabricated on a glass substrate. Figure 23 shows a

29

Figure 24: Measured organic transistor drain-source currents, normalized to the mean, as a function of the transistor W/L ratios. The lines are the standard deviations of drain-source currents, for p-type (dash line) and n-type (solid line), respectively. L is constant at 20 μm. histogram of their measured drain-source currents, normalized to the mean current of each type, respectively. The normalized currents approximated a Gaussian distribution, with a 39% standard deviation for the p-type and a 23% standard deviation for the n-type. This amount of variability was an order of magnitude greater than that of the silicon CMOS transistors of similar operating regime. In analog circuits, where transistor matching is typically a critical design parameter – for example in current mirrors and differential amplifiers – this large mismatch between

OTFTs introduced typically unacceptable errors. Furthermore, as shown in Figure 24

30 of 120 OTFTs of varying dimensions on a glass substrate, the transistors did not conform to the area-scaling rule [46], thus invaliding a fundamental design axiom used in silicon CMOS transistors. (With better process control and material improvements, it is expected that OTFTs will exhibit some form of area scaling. But, at this nascent stage of development, empirical data did not show a strong correlation between area and mismatch.)

Although capacitors also suffered mismatches due to the imprecise shadow masks, their matching precision was far higher than that of OTFT currents because of the capacitor’s simple square geometry. In addition, because the capacitors were fabricated by intersecting two metal traces, as shown in Figure 20, they were immune to x-y mask misalignments. (The intersecting technique could not counter rotational misalignment, but mask rotation did not appear to be a problem.) Measurement of 120 capacitors showed a standard deviation of capacitance mismatches of 8.4% for 0.0025 mm2 capacitors (17.5 pF), 4.7% for 0.01 mm2 capacitors (70 pF) and 1.7% for 0.04 mm2 capacitors (280 pF). Figure 25 shows a histogram of the mismatch distributions for 70 pF and 280 pF capacitors. From these measurements, the mismatch distribution approximately followed the area-scaling rule, specifically,

σ ≈ k (3.1) Area where k was an empirical process parameter. This result illustrated that, for the capacitors, the organic thin-film process exhibited a similar characteristic as that of

31 typical silicon CMOS process – the mismatch between capacitors could be reduced by increasing their areas.

Comparing Figure 23 and Figure 25, the capacitors showed a mismatch that was an order of magnitude better than the mismatch of OTFT currents. Additionally, the capacitor mismatch conformed to the area-scaling rule. These results established that any organic circuit requiring good linearity should use capacitors as the matching elements – leading to the switched-capacitor designs used in this work.

15 200um x 200um Cap, n = 40, σ = 1.7% 100um x 100um Cap, n = 40, σ = 4.7%

10 Count 5

0

-10 -8 -6 -4 -2 0 2 4 6 8 10 Deviation from Mean Capacitance (%)

Figure 25: Distributions of measured capacitances, normalized to the mean.

32

3.2. Large Parasitic Capacitances

In our organic thin-film process, potential mask misalignment was a constant concern. Indeed, in the initial stages of this work, numerous OTFTs failed to operate due to gaps between the gate electrode and the source or drain contacts. To ensure well-formed channels, the transistors contained extra-wide gate-source and gate-drain overlaps to accommodate mask misalignments. In this fabrication process, repeated experiments (and multiple visual markers) had fine-tuned the alignment accuracy to within +/- 20 μm. Consequently, a minimum gate overlap of 20 μm was necessary, as illustrated in Figure 26. These large parasitic capacitances limited the maximum speed of the OTFTs.

Gate

Source Drain

Loverlap Loverlap

L

Figure 26: Illustration of an OTFT viewed from above, showing the gate overlaps (L ) and the channel (L). overlap

A common measure of the maximum operational speed of a transistor is the transit frequency fT – the frequency at which the (extrapolated) transistor current-gain drops to unity. As shown in Figure 18 and Figure 19, the OTFTs in this research

33 exhibited the quadratic ID-VGS behavior to a first-order approximation. Thus, the transit frequency could be computed using the following [47]:

g μ f ≅ m = ()V −V (3.2) T π π ()+ 2 GS TH 2 C gg 2 L 2Loverlap 3 L

W g ≅ μC ()V −V (3.3) m ox L GS TH

≅ + 2 = + 2 Cgg 2Coverlap 3WLCox 2WLoverlapCox 3WLCox (3.4)

In a transistor, fT is determined by materials properties (mobility μ) as well as by process parameters (channel length L and gate-source overlap Loverlap). At the latter stages of this research, |VGS_max| = 3 V, L = 20 μm, Loverlap = 20 μm, VTHP = -0.5 V,

2 -1 -1 2 -1 -1 VTHN = 0.5 V, μp = 0.5 cm V s , μn = 0.02 cm V s . These gave a maximum fT of approximately 18 kHz for the p-type OTFTs and 700 Hz for the n-type OTFTs. These results represented the best achieved performances; most of the earlier works were far worse. As seen in (3.2), the maximum speed was primarily limited by semiconductor mobility and OTFT feature sizes: channel length and gate overlap length. Whereas the mobility was a function of chemistry, the feature sizes were determined by the fabrication process.

3.3. Dielectric Leakage

All dielectric materials have a certain amount of leakage. The aluminum oxide used in this research was only 3.6 nm thick and thus allowed significant leakage.

34

Treating the AlOx surface with OTS reduced the leakage by three orders of magnitude

[44]. Figure 27 shows the measured leakage density of 10 capacitors fabricated in the

OTFT process. Although the leakage density of the AlOx-SAM dielectric was approximately one-thousand times lower than that of the 90 nm silicon CMOS [48], because the organic circuit operated roughly one-million times slower than 90 nm silicon CMOS circuits, the leakage current was substantial. Empirical curve-fitting of the measurements in Figure 27 showed that the leakage current through a unit capacitor was approximately exponential to the applied voltage VC:

-5 10

Leakage Model -6 10 ) 2

-7 10

-8 10

Current density (A/cm -9 10 10 measured capacitors

-10 10 -3 -2 -1 0 1 2 3 Voltage (V)

Figure 27: Measured and modeled leakage density of capacitors fabricated in the organic process, as a function of applied capacitor voltage.

⎛ VC ⎞ ≈ a − I LEAK I0 ⎜e 1⎟ (3.5) ⎝ ⎠

35 where I0 = 0.6 pA and the leakage coefficient a = 0.45 V. The parameters, I0 and a, were derived from room-temperature measurements and could drift over temperature, leading to considerably varied leakage currents. The leakage charge on a unit capacitor is

Δ = Δ = Δ Q I LEAK t C V (3.6)

In a typical switched-capacitor circuit such as the one shown in Figure 28 (top), the accumulated leakage charges could result in large output voltage errors during sample- and-hold operations. The output voltage errors vary as a function of sampling frequency – slower sampling results in larger error, as illustrated in Figure 28

(bottom). This leakage behavior placed a minimum operating speed on the switched- capacitor circuits.

36

Leakage Vout current Vcap Vin Sample and hold

1 Vcap = 3V

Vcap = 1.5V 0.75

0.5 Output errors (LSB) errors Output Leakage Error (LSB) 0.25

0 1 10 100 1000 Sampling Frequency (Hz) Figure 28: A typical switched-capacitor circuit with sample-and-hold operation and some leakage current (top); Modeled voltage errors due to leakage (bottom).

3.4. Modeling Inaccuracies

As with any novel technology, developing accurate simulation models for the organic transistors had been a difficult task, one that was compounded by the lack of consistency of the OTFTs. Previous literature argued for a hybrid approach – fitting

37 empirical data into a simple physical model [37]. This research employed the same approach. From the measurements shown in Figure 18 and Figure 19, the OTFTs behaved similarly to the standard field-effect transistor (FET), with well-defined quadratic IV characteristics in the active regions. Thus, the first-order FET equations formed the basis of the OTFT model. A portion of the model in Cadence Verilog-A is shown in Figure 29. (The full model is shown in Appendix B.) All circuit simulations utilized this model, with the model parameters adjusted to match measurements for each batch of OTFTs.

......

module mos_level1(vdrain, vgate, vsource, vbody); vth = vto - gamma*(sqrt(2*phi - vbs) - sqrt(2*phi)); inout vdrain, vgate, vsource, vbody; ibd = 0; electrical vdrain, vgate, vsource, vbody; ibs = 0; parameter real width = 100e-6 from (0:inf); parameter real length = 10e-6 from (0:inf); // parameter real vto = 1.3 from (0:inf ); // channel component of drain current. (channel charge ignored)... parameter real gamma = 0 f rom [0:inf ); // parameter real phi = 0.2 from (0:inf ); beta = kp*width/leff; parameter real lambda = 0.005 from [0:inf); if (vgs <= vth) begin parameter real tox = 5.7e-7 from (0:inf); id = 0; parameter real u0 = 0.1 from (0:inf ); end else if (vgs > vth && vds < vgs - vth) begin parameter real xj = 0 f rom [0:inf ); id = beta*(vgs - vth - vds/2)*vds*(1 + lambda*vds); parameter real is = 1e-14 f rom (0:inf); end else begin parameter real cj=0 f rom [0:inf ); id = beta*0.5*(vgs - vth)*(vgs - vth)*(1 + lambda*vds); parameter real vj=0.75 exclude 0; end parameter real mj=0.5 f rom [0:1); parameter real fc=0.5 from [0:1); qgb = cgbo * vgb; parameter real tau = 0 from [0:inf); qgs = cgso * vgs; parameter real cgbo = 0 from [0:inf ); qgd = cgdo * vgd; parameter real cgso = 7e-12 f rom [0:inf ); parameter real cgdo = 7e-12 f rom [0:inf ); I(vdrain, vsource) <+ dev_type_sign * id; parameter integer dev_type = `p_type; I(vbody, vdrain) <+ dev_type_sign * (ibd + ddt(qbd)); ... I(vbody, vsource) <+ dev_type_sign * (ibs + ddt(qbs)); if( dev_type == `n_type ) dev_type_sign = 1; I(vgate, vbody) <+ dev_type_sign * ddt(qgb); else dev_type_sign = -1; I(vgate, vsource) <+ dev_type_sign * ddt(qgs); end I(vgate, vdrain) <+ dev_type_sign * ddt(qgd); ......

Figure 29: Parameters of the OTFT model in Cadence Verilog-A.

A common problem of FET simulation models is device symmetry. In a physical transistor, the source and the drain are interchangeable – current always flows from the higher voltage terminal to the lower voltage terminal. But in a simulation model,

38 the terminals are predefined as “source” or “drain”, and the current flows in a predefined direction, which fails to reflect the physical interchangeability of the terminals. For the OTFT model developed for this research, ideal diodes formed an alternative route for the current to flow “backward”, allowing the interchangeability of the terminals. Figure 30 shows a schematic of this OTFT model. Also shown in Figure

30 is the capacitor model. The capacitor model contained two non-ideal diodes to simulate the effect of dielectric leakage. The diode’s IV characteristics matched the result from (3.5). Symmetry required the use of two diodes in the capacitor model.

Figure 30: Schematics of the OTFT model (left); The capacitor model (right).

Despite using measurement data in the simulation models, large discrepancies often existed between OTFT performances and the model predications. The OTFT variations were too great to allow for accurate modeling. Accordingly, the models could only provide a “ball-park” estimate of the circuit behavior. The circuit design needed to be sufficiently flexible to tolerate large imprecision.

39

4. Design of Organic DAC and ADC

Data converters are ideal demonstrations of the research goals stated in Chapter 1.

Any system that connects an analog signal transducer, such as an antenna, an actuator, a sensor, or a display, to a digital signal processor requires data converters. Moreover, the main attributes of data converters – linearity, speed and power – are fundamental to all analog circuits. By implementing data converters with organic transistors, this research attempted to build a design framework that can apply to other analog circuits.

In a data converter, the most fundamental requirements are resolution and conversion rate. Resolution is largely a measure of circuit linearity, in particular, how well the circuit elements are matched along the transfer characteristic. Conversion rate depends on the operating speed of the circuit, specifically, how quickly the circuit elements can settle to their steady-state so a conversion decision can be made. (This assumes the data converter is not the type that utilizes incomplete settling to achieve a conversion rate higher than indicated by the steady-state settling time.) In this research, the data converter designs primarily focused on the resolution and the conversion speed. The designs also considered power consumption, but not as a main focus.

40

4.1. Design Limitations due to the OTFT Process

The poor characteristics of the OTFT processing detailed in Chapter 3 – device mismatch, large parasitic capacitances, dielectric leakage, and modeling inaccuracies – limited the available design space of the data converters. Device mismatch introduced nonlinearity, thus limiting the effective resolution of the data converter. Large parasitic capacitances slowed circuit settling time, reducing the maximum operating speed of the data converter. Dielectric leakage created voltage errors during sample- and-hold, preventing the data converter from operating slowly and removing the option of exchanging speed for accuracy. Finally, the modeling inaccuracies added uncertainty to the design – a good-performing circuit in simulation might translate into a non-functional circuit in reality, or a barely-working one with unacceptably poor yield. These limitations can be visualized in Figure 31. For example, in a silicon

CMOS data converter, the available design space might be bounded by the larger dotted lines. In the OTFT process, the aforementioned process characteristics served to compress the available design space to the much smaller box. Indeed, the negative impacts of these process characteristics might be so severe as to completely void the design space, making a functional data converter impossible. Previous attempts at organic data converters were unsuccessful (V. Subramanian, personal communication) possibly due to similar constraints in their OTFT processes. This research was successful in creating the world’s first organic data converters through improvements in the fabrication process, careful analyses of process constraints, and devising techniques to overcome each of these constraints.

41

resolution

Device mismatch

Dielectric Large leakage capacitances speed

Model inaccuracy yield

Figure 31: OTFT process characteristics limit the available design space.

VDD n-2 n-1 Iu 2Iu 4Iu 2 Iu 2 Iu

b0 b1 b2 bn-2 bn-1

IOUT

Cp

VOUT Cu Cu 2Cu 4Cu 2n-2 Cu 2n-1 Cu

bn bn-1 bn-2 b2 b1

VREF

Figure 32: Current-steering DAC (top) and switched-capacitor DAC (bottom) architectures.

42

4.2. DAC Design and Measurement

4.2.1 DAC Architecture

Numerous DAC architectures exist, including current-steering and switched- capacitor types, shown in Figure 32. For a current-steering DAC, the critical parameter is the matching of the drain currents between the elemental transistors that make up the array. For a B-bit binary-weighted DAC, the maximum allowed current mismatch can be calculated using the following expressions [49]:

σ = INL INL (4.1) 2 ()erfinv ()Y

σ = DNL DNL (4.2) 2()erfinv()Y

σ σ ≈ 2 INL u _ INL (4.3) 2B

σ σ ≈ DNL u _ DNL (4.4) 2B −1

where erfinv is the inverse error function, and σu_INL and σu_DNL represent the standard deviations (σ) of the transistor-current mismatches, respectively. With B = 6, INL < 1

LSB, DNL < 1 LSB and Y = 0.95 (corresponding to a confidence interval of 2 sigma), the DAC requires σu_INL < 12.7% and σu_DNL < 6.4%. However, as described in

Chapter 3, the use of shadow masks and non-uniformities in OTFT mobility introduced transistor mismatches far greater than 6.4%. From Figure 23, measurement

43 of 60 p-type and 60 n-type OTFTs on one substrate showed 1-σ drain-current mismatches of 39% and 23%, respectively. Because of these large variations, the current-steering architecture was not suitable for our OTFT process.

In a switched-capacitor DAC, because the transistors function as switches, the precision of their currents had little impact on the output. Rather, the critical parameter was the matching between the capacitors in the array. Although the capacitors also have mismatches due to the OTFT processing, their precision was far higher than that of transistor currents because of the capacitor’s simple square geometry. As shown in

Figure 25, measurement of 120 capacitors showed 1-σ capacitance mismatches of

8.4% for 0.0025 mm2 capacitors (17.5 pF), 4.7% for 0.01 mm2 capacitors (70 pF) and

1.7% for 0.04 mm2 capacitors (280 pF). Moreover, the mismatch followed approximately the area-scaling rule of (3.1). This result illustrated that this OTFT process exhibited a similar characteristic as that of typical silicon CMOS process – the mismatch between capacitors could be reduced by increasing their areas.

For a 6-bit switched-capacitor DAC, a requirement of less than 1-LSB INL and 1-

LSB DNL, and 95% yield, the maximum mismatch of binary-weighted capacitors can also be calculated using (4.1) – (4.4), giving σu_INL < 12.7% and σu_DNL < 6.4%. For a

6.4% mismatch, 0.01 mm2 unit capacitors were chosen, with a unit capacitance of 70 pF. However, in a binary-weighted DAC, the largest capacitance was 2(B-1) times the unit capacitance, equaled to 2240 pF for 6 bits. This large capacitance, together with the relatively high on-resistances of the OTFTs, resulted in a long DAC settling time and low operating speed. An alternative DAC architecture was thus needed to reduce

44 the capacitance – leading to the C-2C design. In a C-2C DAC, at any node in the circuit the largest capacitance is no more than twice that of the unit capacitor and thus significantly reducing the settling time. Furthermore, a 6-bit binary-weighted DAC required 64 unit capacitors – a large amount that was difficult to fabricate with high process yield at this nascent stage of process development. A 6-bit C-2C DAC required only 17 unit capacitors – a quantity easier to achieve high process yield.

Cu Cu 2Cu Cu 2Cu Cu 2Cu Cu 2Cu

Cp Cp

Conductive silicon substrate

Cu Cu 2Cu Cu 2Cu Cu 2Cu Cu 2Cu

C C X p X p

Glass or plastic substrate

Figure 33: C-2C structure on silicon suffers from parasitic substrate capacitances (top); The same C-2C structure on glass or plastic has no substrate capacitance (bottom).

45

In the silicon CMOS process, the C-2C topology suffered from parasitic capacitances between the summing nodes and the silicon substrate [50]. The parasitic capacitances could be as much as 30% of the unit capacitance of the C-2C array. But with the organic process, the substrate was insulating glass or plastic and did not contribute to parasitic capacitances, as illustrated in Figure 33.

VREF VRESET

off-chip calibration C/64 C/64 C/64

... VOUT 2C 2C C C C C CLOAD S1 S2

S3 VREF VREF ... VREF VRESET Bit 0 (LSB) Bit 1Bit 2, 3, 4 Bit 5 (MSB)

Figure 34: Circuit schematic of the C-2C DAC; VREF = 3 V, VRESET = 1.5 V.

A schematic of the C-2C DAC is shown in Figure 34: S1 and S2 are the pull-up and pull-down switches, respectively; S3 is a complementary transmission gate for sampling a reset voltage VRESET (the need to sample VRESET is described in Section

4.2.3 on combating dielectric leakage). Since the capacitor network is linear, superposition can be applied to calculate the DAC output voltage VOUT :

B−1 C C − − V = LOAD V + OUT V b 2 (B i) OUT + RESET + REF ∑ i (4.6) COUT CLOAD COUT CLOAD i=0

46

COUT is the equivalent output capacitance of the DAC, equaling to 2Cu, where Cu is the capacitance of one unit capacitor. CLOAD is the load capacitance at the DAC output,

th equaling to approximately 4Cu in this design. B is the number of bits, and bi is the i bit, either 1 or 0. VREF equals 3 V, and VRESET equals 1.5 V.

Calculation of the DNL of the C-2C DAC gives the appropriate unit-capacitor size. The DNL at the major code transitions determines the matching requirement at a given yield. Similar to a binary-weighted DAC, the maximum DNL of the C-2C DAC occurs at the mid-code transition – i.e. from 011111 to 100000. Analysis of the C-2C network shows that the maximum allowed unit-capacitor mismatch can be calculated from the following expressions:

σ 2 ≈ 1 σ 2 2B DNL u _ DNL 2 (4.7) 4

σ ≈ 1 σ B = DNL DNL u _ DNL 2 (4.8) 2 2()erfinv()Y

where σDNL is the standard deviation of the DNL at the mid-code transition and σu_DNL is the standard deviation of the unit-capacitor mismatch. For B = 6, DNL < 1 LSB and a yield of 95%, σu_DNL = 1.6%, a much more stringent requirement than that for a binary-weighted DAC. This need for better matching in a C-2C DAC is the result of having a lower output capacitance – instead of spreading the DNL over 2B times the unit capacitance as in a binary-weighted DAC, the C-2C DAC can only spread the

DNL over 2 times the unit capacitance. Comparing (4.4) and (4.8), a C-2C DAC requires a unit-capacitor matching that is approximately square-root(2B-1) times better

47

100 1000000

100000 BW 10

10000

C-2C (%) 1 1000 u_DNL σ

C-2C 100 Unit Capacitance (pF)

0.1 BW 10

0.01 1 24681012 Number of Bits

Figure 35: Comparison of the unit capacitor matching (σu_DNL) and the corresponding unit capacitance required for C-2C and binary-weighted DACs in our organic process (for DNL = 1, yield = 95%).

than that of the binary-weighted DAC. To achieve 1.6% matching, 0.04 mm2 unit capacitors were chosen with a unit capacitance of 280 pF. Figure 35 illustrates the relationships between the number of bits, the unit capacitor matching σu_DNL, and the unit capacitances for C-2C and binary-weighted DACs. Compared to a binary- weighted DAC, although the unit-capacitor size of a C-2C DAC was larger, the capacitance needing to be switched at the MSB node was significantly smaller: 280 pF for C-2C versus 2240 pF for binary-weighted (32 x 70 pF). This reduced switching

48 capacitance resulted in a faster DAC speed. In terms of the total capacitance in the

DAC, the C-2C contained 4760 pF, whereas the binary-weighted contains 4410 pF.

Thus, the C-2C DAC was only slightly larger in capacitor area than the binary- weighted DAC.

4.2.2 Calibration

To correct any realistic deviations from analysis and process parameters, a two- bit calibration circuit was added externally at the output of the C-2C DAC, shown in

Figure 34. The calibration circuit consisted of three thermometer-coded elements, each represented by a 4.7 pF capacitor that was approximately 1/64th of the C-2C unit capacitor. Although the calibration was implemented off-chip with discrete CMOS switches and discrete capacitors, the concept could be readily fabricated on-chip: the smallest individual capacitor that could be fabricated in this organic thin-film process was 2.8 pF (limited by the minimum opening in the shadow masks); and thermometer coding guarantees monotonicity despite any large mismatches between the small calibration capacitors. A similar calibration circuit was implemented on-chip when the

DAC was integrated as a part of the ADC.

4.2.3 Limits on DAC Operating Speed

Section 3.2 discussed the maximum operating speed in the context of the transistor transit frequency fT. For the DAC, the settling time of the output voltage

49 limits the maximum operating speed. For the C-2C DAC, the settling at the output node is approximately equal to the settling of the MSB node because any settling errors at lower bits will be attenuated by the C-2C network. The time ts required to settle to within 1 LSB of a B-bit DAC can be calculated using the following expression:

= () ts B ln 2 RON CTOTAL (4.12) where RON is the on-resistance of the p-type or the n-type OTFT switch at the MSB node (S1 or S2 in Figure 34) and CTOTAL is the total load capacitance to this OTFT.

RON can be calculated from the following expression:

1 R = ON μ ()(− ) (4.13) COX W L VGS VTH

With the device parameters specified in Section 3.2, to obtain equal RON, the width of the n-type OTFT (Wn) needed to be ten times the width of the p-type OTFT (Wp). As a reasonable compromise that avoids excessively large devices, the DAC used Wn =

5Wp. With Wp = 200 μm, Wn = 1000 μm, and VGS = 3 V, the approximate on- resistances were 714 kΩ and 1428 kΩ, for the p-type and n-type OTFTs, respectively.

CTOTAL in (4.11) equaled approximately 620 pF (the sum of CU = 280 pF and all overlap capacitances at the OTFT drain node equaling approximately 340 pF). Thus, the maximum operational speed of the 6-bit DAC was 1/(2ts) ≈ 132 Hz. (Although the overlap capacitances of the OTFT switches were substantial, because they were not connected to the charge conservation nodes between the C and 2C capacitors, they did not affect the 1:2 ratio required for the C-2C operation.)

50

A lower limit on the operational speed was governed by the dielectric leakage current through the capacitors. In this organic thin-film process, the leakage current through a capacitor was nonlinearly related to the applied capacitor voltage (see

Figure 27), resulting in input-dependent output errors. The slower the operation and the longer the capacitors lost charge through leakages, the greater the errors. Section

3.3 described the leakage measurement and the derived leakage model. To quantify the amount of errors and thus establish a lower bound on the operating speed, the change in the DAC output voltage is calculated as a function of the leakage current and the DAC clock rate. At the DAC output, the error in the output voltage is a weighted function of all capacitor leakages. Calculating the exact worst case value of the error is analytically difficult. However, the calculation can be simplified by recognizing that the MSB capacitor leakage holds the greatest contribution to the output voltage error, since the C-2C network attenuates the effects of all other capacitor leakages. Therefore, only considering the MSB capacitor allows a simple estimate for the minimum frequency fmin of the DAC:

1 I f = = LEAK min Δ Δ (4.16) 2 t 2C VOUT

B 1 ⎛ VC ⎞ 2 f = I ⎜e a −1⎟ min 0 ⎜ ⎟ ε (4.17) 2CU ⎝ ⎠ where ε is the allowed output error due to leakage. Although this result is a simplified estimate, it offers insight into the relationship between the minimum speed limit of the

DAC and its dependencies. For CU = 280 pF, VC = 1.5 V and ε = 1 LSB, Figure 36

51 plots fmin as a function of the leakage coefficient a. In the empirical leakage model developed in Section 3.3, a = 0.45 V; thus the minimum operating frequency of this 6- bit DAC is estimated to be 1.8 Hz. This minimum frequency is small because the full- scale range of the DAC output was purposefully designed such that the maximum Vc was 1.5 V. At Vc = 2.5 V, the leakage would have been ten times greater, and thus the minimum frequency would be a more detrimental 18 Hz. Further, variations in I0 or the leakage coefficient a (due to temperature or process) could significantly alter this minimum frequency, as shown in Figure 36. To prevent leakage errors from accumulating over multiple clock cycles, the DAC recharges all capacitors by sampling VRESET every clock cycle, as shown in Figure 34.

2 10 B = 6 B = 8 B = 10

1 10 Minimum frequency (Hz) frequency Minimum

0 10 0.3 0.35 0.4 0.45 0.5 0.55 0.6 Leakage coefficient (V)

Figure 36: Minimum DAC frequency required for 1-LSB output error due to capacitor leakage (8-bit and 10-bit are included for comparison).

52

4.2.4 DAC Measurement

The DAC was fabricated on a commercial LCD glass substrate measuring 88 mm

× 88 mm. The glass was placed in the probe station for measurement. Two custom- designed multi-probe handlers (MPHs) provided the interface contacts. Wire bonding was attempted but was unsuccessful due to insufficient adhesion between the gold pads and the glass surface. The MPHs were connected to the FPGA board via an adapter board. The FPGA provided the digital signals to the DAC. All signals were loaded with appropriate capacitances on the adapter board to reflect realistic OTFT conditions. The DAC output was connected to an oscilloscope. All measurements were performed in ambient air and at room temperature. Appendix A includes detailed descriptions of the test platform.

The DAC contained twelve capacitors – seven 280 pF unit capacitors, and five 560 pF capacitors each formed from two unit capacitors. To increase the sample size, two

DACs were measured. (One capacitor was damaged during measurement for a total sample size of 23.) The standard deviation of the unit capacitor mismatches was

3.4%, twice as much as that of the test capacitors in Section 3.1. There were two possibilities for the wider distribution: 1. in the actual circuit, the shadow mask openings for capacitors were more difficult to control due to adjacent circuitry; 2. the dielectric thickness might vary across the circuit. The mismatch standard deviation of the 560 pF capacitors was 2.1%, equaled to 0.62 of the mismatch standard deviation of the 280 pF capacitors, approximately conforming to the area-scaling rule (square root of 280/560 = 0.707).

53

2.2

2

1.8

1.6

1.4 100 Hz Output voltage (V) voltage Output 200 Hz 300 Hz 1.2 400 Hz 500 Hz

1 0 16 32 48 63 Input code Figure 37: Measured DAC transfer function (before calibration) becomes increasingly nonlinear as the clock rate increases from 100 Hz to 500 Hz.

4

3

2

1

0 DAC output voltage error (LSB) error voltage output DAC

-1 0.1 0.2 0.3 0.4 0.5 Clock period (T ) CLK Figure 38: Measured DAC output voltage error (code 63, before calibration) as a function of the clock rate; from top to bottom: 0.1 Hz, 0.5 Hz, 1 Hz, 2 Hz, 5 Hz and 10 Hz.

54

Figure 37 and Figure 38 illustrate the upper and the lower speed limits of the

DAC. In Figure 37, as the clock rate increased above 100 Hz, the measured

(uncalibrated) DAC transfer function became increasingly distorted, as predicted by

(4.12) – (4.13). In Figure 38, as the clock rate decreased below 10 Hz, the leakage error progressively worsened. At 2 Hz, the leakage error was 0.5 LSB, approximating the 1 LSB error predicted by (4.14) – (4.17).

2.2

2

1.8

1.6

1.4 Output voltage (V) voltage Output

Measured 1.2 Ideal

1 0 16 32 48 63 Input code Figure 39: Ideal and measured (after calibration) DAC transfer functions at 100 Hz conversion rate.

Figure 39 shows the measured DAC transfer function after calibration, together with the ideal characteristic described by (4.6). Compared to the ideal transfer function, the measured transfer function had a 60 mV offset and an 8% gain error. The offset was due to the residual voltage from the calibration circuit; and the gain error resulted from the imprecise estimation of CLOAD. Figure 40 shows the static linearity of the DAC, as measured by DNL and INL at a conversion rate of 100 Hz. Before

55 calibration, the maximum DNL and INL were -2.8 LSB and +3.1 LSB, respectively.

After calibration, the maximum DNL and INL were -0.6 LSB and -0.8 LSB, respectively. Figure 41 shows the spectrum of two output sinusoids at 10 Hz and 45

Hz, synthesized at the conversion rate of 100 Hz. The harmonic spurs of the sinusoids are clearly visible. For the 10 Hz output, the highest spur was at -24 dBc. For the 45

Hz output, the highest spur was at -29 dBc. For sinusoids between 1 Hz to 49 Hz, the worst case occurred at 10 Hz. Thus, the spurious-free dynamic range (SFDR) of the

DAC was 24 dB.

4 4 (a) (b) 3 3 2 2 1 1 0 0

-1 (LSB)INL -1 DNL (LSB) DNL -2 -2 -3 -3 -4 -4 0 16 32 48 63 0 16 32 48 63 Input code Input code

1 1 (c) (d)

0.5 0.5

0 0 INL (LSB) DNL (LSB) DNL -0.5 -0.5

-1 -1 0 16 32 48 63 0 16 32 48 63 Input code Input code

Figure 40: DAC DNL and INL before calibration [(a) and (b)] and after calibration [(c) and (d)].

56

0

-20

-40 Amplitude (dBc)

-60 0 10 20 30 40 50 Frequency (Hz)

0

-20

-40 Amplitude (dBc) Amplitude

-60 0 10 20 30 40 50 Frequency (Hz)

Figure 41: Spectrum of 10 Hz and 45 Hz DAC output sinusoids (500-point FFT).

A photograph of the DAC is shown in Figure 42. (The substrate sits on a black background to enhance visibility.) The circuit contained thirteen p-type OTFTs, thirteen n-type OTFTs, and seventeen unit capacitors. The total area of the DAC was

28 mm × 14 mm.

57

2 mm

Figure 42: Photograph of the C-2C DAC on glass substrate.

4.3. ADC Design and Measurement

4.3.1 ADC Architecture

In Section 3.1, measured mismatch distributions showed that capacitors could be made an order of magnitude more precisely than OTFTs. Moreover, capacitor areas could be scaled to achieve a desired matching precision. These process characteristics were applied to the design of the switched-capacitor C-2C DAC. Similarly, the successive approximation register (SAR) architecture was chosen for the ADC because the conversion accuracy of a SAR ADC largely depends on capacitor matching [49]. The OTFTs in the SAR ADC act as on-off switches and have minimum

58 effect on the conversion accuracy once the circuit has settled.

For the design target of 6-bit conversion, a SAR ADC requires 6 cycles to reach each valid output; however, as most organic applications deal with relatively static signals – such as an organic sensor that detects chemical reactions, high speed was not a requirement for this OTFT data converter: a 10 Hz conversion rate was deemed sufficient. (Conversely, the speed could not be too slow as to result in large errors due to dielectric leakage.) As shown in Figure 43, the SAR ADC contained four main blocks – the C-2C DAC from Section 4.2, the calibration DAC, the comparator, and the digital SAR logic. Because the primary goal of this research was to validate organic analog circuits, the digital SAR logic was implemented in an external field- programmable gate array (FPGA) board. All interfaces between the FPGA board and the organic circuits were loaded with appropriate capacitances and resistances to reflect realistic OTFT parasitics.

Organic Process

Figure 43: SAR ADC, showing its main circuit blocks.

59

Of the four process limitations described in Chapter 3, two had been mitigated through architectural selections: the switched-capacitor topology in the DAC and the

SAR topology in the ADC circumvented the poor matching of the OTFTs; the C-2C topology of the DAC improved the conversion rate despite the large parasitic capacitances. Moreover, the parasitic capacitances – more precisely the variations in the parasitic charges from the OTFT switches, did not affect the sample-and-hold accuracy because the C-2C structure uses bottom-plate sampling [49]. The “true” sampling switch is the OTFT connected to VMID in Figure 44. Although it also injects parasitic charges, those charges are constant for all ADC voltages in the absence of hysteresis. (Chapter 2 showed that the OTFTs had negligible hysteresis.)

In the DAC, resetting the capacitor to a voltage VRESET every clock cycle prevented the dielectric leakage charges from accumulating over multiple clock cycles. In the ADC, a set of input sampling switches were integrated within the C-2C structure, as shown conceptually in Figure 43 and schematically in Figure 44. To prevent the accumulation of dielectric leakage charges, the ADC sampled the input every clock cycle, rather than every sixth clock cycle as in a typical 6 bit SAR ADC.

Re-sampling every clock cycle effectively resets the capacitors in the C-2C array, but results in tracking errors if the rate of change of the input exceeded 1/6 least- significant-bit (LSB) per clock period, equivalent to 530 mV/sec at the 100 Hz clock rate in this ADC design. For slow-changing signals, such as that from our intended chemical sensor, this re-sampling technique does not introduce appreciable tracking error.

60

Bit 0 Bit 1 Bit 5

S0 S1 S5

Figure 44: C-2C structure with integrated sampling switches S0 – S5. The switches sample every clock cycle to prevent accumulation of leakage charges on the sampling capacitors C.

Organic Process

Figure 45: ADC circuit with detailed C-2C DAC and calibration DAC schematics.

The fourth process limitation – modeling inaccuracy, was mitigated through calibration. In Section 4.2, the DAC contained off-chip calibration. Here, the ADC

61 implemented on-chip calibration using a two-bit thermometer-coded calibration DAC.

The calibration DAC corrected any realistic deviations from the simulation model.

Figure 45 shows the circuit schematics of the C-2C DAC with the integrated sampler and the calibration DAC. The calibration DAC used the same basic OTFT design as the C-2C DAC, but with 8.75 pF unit capacitors formed from connecting multiple 280 pF capacitors in series. In the design of the calibration DAC, layout became a particular concern. The calibration DAC required 12 control signals. Due to test platform limitations, these additional control signals forced multiple voltage lines, such as VREFP, VREFN, VMID, to be combined in layout, resulting in 60 signal crossovers. Because the dielectric was only 5.7 nm thick, any crossover would lead to large parasitic capacitance, or potential shorts. By only allowing crossovers between constant-voltage lines and digital control lines, the circuit avoided the deleterious effects of parasitic capacitances. To prevent shorts, additional layout spaces were inserted between traces in the vicinity of the crossovers. Figure 46 shows a photograph of the ADC on the glass substrate.

62

Comp C-2C DAC

Cal DAC

C-2C DAC

Figure 46: Photograph of the ADC on the glass substrate.

4.3.2 Auto-zeroed Comparator Design

The comparator formed the decision-making part of the ADC. Figure 47 shows the circuit schematic of the comparator. Several design considerations led to the use of inverter-based gain stages: 1. The comparator must tolerate large device mismatches;

2. The comparator must self-bias to avoid the variability of biasing circuitry; 3. To avoid poor yield, the comparator should be simple. The cascade of inverter-based gain stages satisfied all these conditions. In particular, the inverter was robust against the effects of OTFT mismatch because it could automatically self-bias to a high-gain dc

63

Figure 47: The comparator circuit and device parameters. operating point. By introducing a two-phase operation, as illustrated in Figure 48, any static offset in the inverter, such as threshold voltage drift, was zeroed as the offset is common to both phases. In the reset phase, the transmission gate shorted the input to the output, establishing the dc operating point, and fixing the bottom plate of CS1 to this dc voltage (VDC). Simultaneously, the DAC charged the top plate of CS1 to a voltage proportional to the DAC code (VDAC). In the sample-compare phase, the transmission gate shuts off. The DAC then switched to the sampling mode. The voltage on the top plate of CS1 was now proportional to the input (VIN); and the voltage on the bottom plate of CS1 was now proportional to (VDC + VIN – VDAC). The difference (VIN – VDAC) was then amplified by the inverter, thus obtaining a

64 comparison between the DAC code and the sampled input.

Reset phase

+ - VC = VDAC VC = VDC

Sample phase

+ - VC = Vin VC = VDC + Vin -VDAC

V = A(V –V ) OUT in DAC

Figure 48: Two-phase operation of the comparator.

The comparator gain AV could be calculated from the expression below [49]:

V −V A = OUT DC (4.18) V ε ⋅ ⋅ −B VFSR 2

where VOUT – VDC is the change in the output voltage between the reset and the sample-compare phases, ε is the desired output accuracy, VFSR is the input full-scale range (FSR), and B is the number of bits. For this ADC, VOUT = 0 or 3 V, VDC = 1.5 V,

ε = 0.5 LSB, VFSR = 2 V, and B = 6 bits, the comparator required a gain of 96. To achieve 100 Hz clock rate, the comparator needed to settle within 5 ms (half of one clock cycle).

A gain of 96 with a settling time of 5ms was beyond the state-of-art in organic circuits [37]. Conventional linear amplifier designs could not reach this target in

65 organic technology. However, inverters could provide suitably high gain, but in a narrow voltage range, as demonstrated by the measured transfer function of an OTFT inverter in Figure 49. The maximum small-signal gain of the inverter was in excess of

60. In the comparator, the two-phase operation conveniently acted as the self-biasing mechanism for the inverter and automatically placed the quiescent point within the high-gain voltage range. Moreover, the ultra-thin dielectric and the SAM passivation effectively suppressed bias-induced hysteresis, allowing inverters to be used without suffering from metastability.

3 -80

-60 2

-40

Vout (V)(V) 1 -20 small-signal gain (V/V) 0 0 01230123 Vin (V) Vin (V)

Figure 49: Measured transfer function (left) and small-signal gain (right) of an OTFT inverter, with Wp = Wn = 500 μm, Lp = Ln = 20 μm.

In the comparator, a cascade structure was chosen over a regenerative latch.

Countering process variations required that each inverter to be individually self- biased. In a latch, such requirement forced ac-coupling of the feed-forward and the feedback paths, resulting in lowered gain from the additional capacitive load. In a cascade, analysis showed that the ac-coupled inverter (such as the one shown in Figure

51) gain Astep(t) in response to an input step is

66

⎛ ⎛ βC ⎞ ⎛ βG ⎞⎞ A (t) = A ⎜1− ⎜1+ F ⎟exp⎜− m t ⎟⎟ step 0 ⎜ ⎜ ⎟ ⎜ ⎟⎟ ⎝ ⎝ CL ⎠ ⎝ CL ⎠⎠

C C where A = − S β = F 0 + + + CF CF CS Cgsp Cgsn

(4.19) = + CF Cgdp Cgdn

= + − β = + CL Cload (1 )CF , Gm g mp g mn

And the time constant τ is

C τ = L (4.20) β Gm

The time ts to settle to 95% of the steady-state gain equals approximately 3τ. CS and

CF are the input capacitance and the feedback capacitance of the inverter, respectively, as shown in Figure 47. Cgs and Cgd are the parasitic gate-source and gate-drain capacitances of the OTFTs. Cload is the load capacitance at the inverter output node, and gm is the transconductance of OTFT. The steady-state gain A0 is simply the ratio of CS to CF, with CF equaling the sum of the gate-drain capacitance Cgd of the p-type

OTFT and the n-type OTFT. To minimize CF, the n-type OTFT was made the same size as the p-type OTFT. This preserved a reasonable steady-state gain despite the low n-type mobility, at the expense of longer settling time.

Figure 50 shows the measured transient response of the first gain stage of a test comparator to a VFSR/64 = 32 mV input. When Clock was low, the output voltage settled to the DC operating point of 1.5 V. After Clock transitioned to high, an input

67 step of -32 mV was applied, the output voltage then settled to 1.75 V, giving a gain A0 of ΔVout/ΔVin = (1.75-1.50)/-0.032 = -7.8. The comparator in this test case had low

OTFT mobility, resulting in a settling time ts of approximately 13 ms. Both the gain and the settling time of this test comparator were within the expectation from (4.19).

The actual ADC comparator had approximately five times higher OTFT mobility. The gains and the settling times of each stage of the ADC comparator are listed in Table 4 and summarized in Figure 47.

0.20 3.00 Vin = -32mV A0 = -7.8 0.15 Clock 2.50 Vout ts = 13ms 0.10 2.00 ΔVout 0.05 1.50 ΔVin 0.00 1.00 Input Voltage (V) Voltage Input

-0.05 0.50 Clock and Output Voltage (V) Clock Low Clock High -0.10 0.00 0.020 0.025 0.030 0.035 0.040 0.045 0.050 Time (sec)

Figure 50: Measured transient response of the first gain stage of a test comparator, showing a gain of ΔVout/ΔVin = -7.8 and a settling time of 13 ms. The clock rate was 30 Hz.

68

Table 4: Nominal OTFT parameters, calculated stage gains and settling times of the ADC comparator.

1st Stage 2nd Stage 3rd Stage 4th Stage Unit

Mobility 0.5 0.5 0.5 0.5 cm2/V-s 2 Cox 7777fF/um Width 500 400 400 100 um Length20202020um Overlap20202020um

Vgs -1.5 -1.5 -1.5 -1.5 V P-type OTFT P-type VTH -0.5 -0.5 -0.5 -0.5 V

Cgs 70 56 56 14 pF

Cgd 70 56 56 14 pF

Mobility 0.02 0.02 0.02 0.02 cm2/V-s 2 Cox 7777fF/um Width 500 400 400 300 um Length20202020um Overlap20202020um

Vgs 1.5 1.5 1.5 1.5 V N-type OTFT N-type VTH 0.5 0.5 0.5 0.5 V

Cgs 70 56 56 42 pF

Cgd 70 56 56 42 pF

CS 1100 1100 1100 1100 pF

CF 140 112 112 56 pF

Cload 800 720 720 440 pF

A0 -7.9 -9.8 -9.8 -19.6 V/V β 0.101 0.085 0.085 0.046

CL 926 823 823 493 pF

gmp 8.75 7 7 1.75 uS

gmn 0.35 0.28 0.28 0.21 uS time constant 1.00 1.34 1.34 5.45 msec settling time 3.01 4.01 4.01 16.35 msec

69

C ≈ − S A0 CF = + CF Cgdp Cgdn

P-type OTFT N-type OTFT Figure 51: Anti-symmetrical layout of the inverter to maintain constant steady- state gain.

Although the inverter’s steady-state gain was largely independent of the inconsistent OTFT transconductance gm, the gain still suffered from variations in Cgd.

To tolerate mask alignment errors during fabrication, large overlaps were created between the gate metal and the source-drain metals, leading to large Cgd – nominally

70 pF for a 500 μm wide OTFT. Depending on the amount of misalignment, Cgd could vary from 0 pF to 140 pF over process. To minimize gain variations caused by this fluctuation in Cgd, the p-type OTFT was placed anti-symmetrical to the n-type OTFT, as shown in Figure 51. Any increase in Cgd of one OTFT is compensated by an equal decrease in Cgd of the opposing OTFT, resulting in a constant total Cgd and a constant gain. (Because CS was a capacitor fabricated from intersecting metal traces, it was immune to x-y mask misalignment.) Figure 52 shows the cross-sectional views of the

70 inverter, in the nominal condition and with misalignment.

Cgdp Cgdn

P-type OTFT N-type OTFT

Cgdp Cgdn

P-type OTFT N-type OTFT

Misalignment

C A ≈ − S ≈ constant 0 C F Figure 52: Cross-sectional views of the inverter in the nominal condition (top), with mask misalignment (bottom).

4.3.3 Digital Logic Implementation

The digital logics resided in the FPGA. The core logic consisted of two main blocks: the successive-approximation register (SAR) algorithm and the control interface. Additional blocks included the clock tree, the test mode control, and ROM to store calibration and test patterns. Calibration was performed off-line in Matlab; and the resulting correction codes stored in the ROM. All digital logics were written in

Verilog. Chipscope provided the PC interface.

71

Figure 53: Conceptual diagram of the SAR algorithm.

The SAR algorithm was derived from the common binary search routine.

Referring to Figure 43 of the ADC block diagram, at the beginning of the conversion cycle, the DAC was set to mid-code = 1/2 VDAC/VREF, equivalently 100000 in binary.

If the sampled input was greater than this DAC output, the SAR algorithm incremented the DAC by 1/4 VDAC/VREF, giving 110000b. Conversely, the SAR algorithm decremented the DAC by 1/4 VDAC/VREF, giving 010000b. The algorithm continued until reaching the smallest resolution of 1/64 VDAC/VREF, in a total of six cycles for a 6-bit algorithm. Figure 53 displays a conceptual diagram of the algorithm.

The state machine shown in Figure 54 represented the binary implementation of the

SAR algorithm in the FPGA.

The control interface managed the 32 signals connecting the FPGA and the organic circuit – 12 for the C-2C DAC bits, 12 for the calibration DAC, 4 for the comparator, 2 for the sampling switches, 1 for the reset switch, and 1 for the comparison output (input to the FPGA).

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Figure 54: State machine of the SAR algorithm implementation. “CMP” is the comparison result between the DAC output and the sampled input, with “1” representing a larger input.

The timing of some of the main signals is shown in Figure 55. The FPGA could be timed from an internal fixed-frequency oscillator, or an external clock source. The external clock allowed variable FPGA frequency, and hence variable ADC sampling frequency.

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50MHz 4MHz OSC DCM 4MHz 125KHz /32 FPGA Main Clock 4MHz External 49 0 Sample_clk 100 phases, 0-100 0

94 50

Comp_clk

90 45

P1e 51 97 resetsw_clkb

61 97 Set_clk

61 97 cal_clk (if active during output phase)

547 cal_reset_clk

Figure 55: Timing diagrams of the main control signals.

4.3.4 ADC Measurement

The ADC was tested in ambient air. Figure 46 shows a photograph of the ADC on a glass substrate. The ADC included 27 p-type OTFTs, 26 n-type OTFTs, 19 capacitors, 60 crossovers, and over three hundred vias. Total area measured 28 mm x

22 mm. The measured p-type mobility and n-type mobility were 0.5 cm2V-1s-1 and

0.02 cm2V-1s-1, respectively.

Figure 56 shows the measured comparator output as the DAC incremented from code 17 to 21 while sampling VIN = 1.55 V at 100 Hz. A clear low-to-high transition

74 occurred between code 18 and 19, indicating that the 1.55 V input was converted to code 19. Figure 57 captures the nonlinearity measurements in the form of the transfer function of the ADC. The ADC achieved full 6-bit resolution with no missing code at a sampling frequency of 100 Hz and a conversion rate of 100/6 = 16.7 Hz. The full- scale range was 1.7 V, slightly lower than the designed 2 V due to the aforementioned gain error in the DAC (described in Section 4.2). Figure 58 shows the measured differential nonlinearity (DNL) and integral nonlinearity (INL) of the ADC at the sampling frequency fs = 100 Hz before calibration. The worst DNL = 2.2 LSB, and the worst INL = -2.9 LSB. After applying calibration, the worst DNL improved to -0.6

LSB, and the worst INL improved to 0.6 LSB, as shown in Figure 59.

At fs = 100 Hz, the power consumption of the ADC (excluding FPGA) was simulated to be 3.6 μW, of which the comparator consumed 2.9 μW.

Table 5 summarizes the ADC characteristics; and Table 6 compares this organic

ADC to a recent silicon ADC [51]. This organic ADC achieved higher speed efficiency (ratio of fs to fT) than the silicon ADC, validating the design methodology of the organic ADC.

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Figure 56: Measured comparator output and DAC output, showing that an input voltage had been converted to code 19.

64

56

48

40

32

Output Code 24

16

8

0 1.0 1.5 2.0 2.5 3.0 Input Voltage (V)

Figure 57: Measured ADC transfer function at 100 Hz sampling rate.

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4

2

0

DNL (LSB) DNL -2

-4 0 8 16 24 32 40 48 56 63 Code

4

2

0

INL (LSB) -2

-4 0 8 16 24 32 40 48 56 63 Code

Figure 58: Measured ADC DNL and INL without calibration.

1

0.5

0

DNL (LSB) DNL -0.5

-1 0 8 16 24 32 40 48 56 63 Code

1

0.5

0

INL (LSB) -0.5

-1 0 8 16 24 32 40 48 56 63 Code Figure 59: Measured ADC DNL and INL with calibration.

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Table 5: Summary of ADC characteristics.

Process 3 metal complementary organic thin-film

Minimum feature size 20 μm

Chip area 28 mm x 22 mm

Resolution 6 bits

Full-scale range 1.7 V

Max DNL / INL -0.6 LSB / 0.6 LSB

Clock rate / Update rate 100 Hz / 16.7 Hz

Power consumption 3.6 μW @ 3 V

Table 6: Comparisons of this organic ADC and a silicon ADC.

Organic SAR ADC 90 nm Silicon SAR ADC

(this work) (Draxelmayr, ISSCC 2004)

Resolution 6 bits 6 bits

Sampling rate (fs) 100 Hz 600 MHz

Maximum transistor speed (fT) 18 kHz 150 GHz

-3 -3 Speed efficiency (fs / fT) 5.56 x 10 4.0 x 10

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5. Conclusion and Future Work

5.1. Summary of This Dissertation

Over the past fifty years, silicon semiconductor technology had transformed the world. The success of silicon-based transistors has created entirely new fields of electronics and expanded the boundary of imagination. Today, a new class of applications is emerging – one that adds unconventional dimensions to electronics with features such as mechanical flexibility, large area at low cost, and integration with chemistry and biology. Examples include flexible cell phone displays, electronic paper, printed RFID tags, artificial skin, and biochemical sensors. Organic semiconductor technology is a promising enabler of these novel applications. Because organic transistors can be fabricated near room temperature, they allow integrated circuits to be made on flexible plastic substrates that can bend and flex. The printability of organic semiconductors can allow transistor to be made in large form- factors inexpensively. And since most organic semiconductors are inherently sensitive

79 to specific chemical agents, organic transistors make natural chemical and biological sensors.

As with any nascent technology, numerous difficulties exist in creating integrated circuits based on organic transistors. The organic transistor fabrication process presents significant handicaps to circuit design. In this research, we studied the causes and effects of process handicaps, and devised circuit techniques to overcome them in the designs of data converters. To achieve acceptable conversion accuracy in the presence of severe transistor mismatches, we employed switched-capacitor architecture. To improve conversion speed, we used the C-2C capacitor array rather than the more conventional binary-weighted array. To prevent dielectric leakage from introducing errors, we refreshed the capacitors every clock cycle. To mitigate modeling errors, we added calibration. Finally, to achieve a large voltage gain while maintaining stable operation under significant process variations, such as variations in threshold voltage, we designed an auto-zeroing inverter-based comparator. Using these circuit techniques, along with multiple fabrication and layout considerations, we built a 3 V, 6-bit organic-transistor DAC and a 3 V, 6-bit organic-transistor ADC. To our knowledge, these were the first successful data converters in the organic transistor technology. Although organic transistors are still immature, with careful process- device-circuit co-design, moderately complex analog organic circuits are within reach.

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5.2. Future Work

5.2.1 Integration with Organic Sensors

A primary purpose of an ADC is to convert sensory information to digital bit for digital signal processing. To this end, it is natural to integrate the organic transistor

ADC with organic sensors. The Bao Group in Stanford Chemical Engineering has developed a number of organic transistor based sensors. One particular sensor has shown to detect chemical attributes of seawater, including salinity, pH factor, and concentrations of several amino acids [52]. As this sensor uses FTTF as the semiconductor, additional fabrication procedures need to be developed to integrate the sensor with the organic ADC, which uses DNTT and F16CuPc. Secondly, the sensor operates by immersion in seawater, but exposure to water would destroy the OTFTs in the ADC. Thus, the ADC needs to be encapsulated in a non-permeable material such as Parylene. Figure 60 shows a conceptual drawing of the integrated ADC with organic sensors.

In circuit design, the main issue is the signal interface between the sensor and the

ADC. Since the organic sensor outputs current, whereas this organic ADC reacts to voltage, a transimpedance amplifier needs to be developed to convert the current to a voltage. The transimpedance amplifier must use the same types of organic transistor as the ADC. Based on the existing performances of the organic transistors, a classic textbook design would unlikely achieve the desired results. New circuit architectures are needs for the transimpedance amplifier. It is possible that with the improved n-type

OTFT currently under development; the available design space may be expanded

81 sufficiently to allow greater design flexibility beyond switched-capacitors.

A third obstacle to integration is testability. As shown in Appendix A, testing the organic ADC requires a delicate set of 52 probes. Once integrated, it may be impossible to immerse the sensor in water while still maintaining probe contact. There are two solutions to this problem: 1. Move the digital logic on-chip to reduce the number of probe connections, or 2. Rearrange the probe pads to the peripheral of the substrate to allow for easier probe connections. Neither solution is straightforward given the device and process limitations. Substantial efforts should be devoted to solve the testability problem at the beginning of the project to avoid future dead ends.

Figure 60: The organic ADC integrated with organic sensors.

5.2.2 Packaging and Physical Interfaces

It is often said that the secret of the semiconductor industry is not the chip design,

82 but the packaging – i.e. getting the signals in and out of the chip. As the organic circuits advance, greater signal density will require robust packaging solutions. This research essentially bypassed the packaging problem by using a large number of probes. However, the probes were difficult to align, sensitive to external movements, and time-consuming to set up. A better solution is preferred. One possibility is wire bonding. Figure 61 shows two of the attempts at wire bonding this organic ADC.

230nm aluminum pads, 150nm gold pads, Successful bonds > 70%. Successful bonds < 20%.

Figure 61: Unsuccessful attempts at wire bonding using aluminum (left) and gold (right) pads.

The main difficulty with wire bonding resulted from the thin metal pads. The manually-operated ultrasonic wire bonder was designed to attach a 20 μm-diameter gold wire to a typical 1 μm-thick pad. However, due to the shadow mask process, depositing 1 μm-thick pad was not feasible. In fact, as shown in Table 3, the interconnect layer, where the pads were located, was only 40 nm thick. A thicker interconnect layer would complicate the deposition of subsequent layers due to the uneven surface heights. Consequently, an additional fabrication step was added to

83 increase the pad thickness to that shown in Table 7. But, as shown in Figure 61, even with the thickened pads, the success rates were less than desirable.

Table 7: Fabrication layers with additional thick pads to facilitate wire bonding.

Substrate Layer Material Thickness Patterning Purpose metal-1 Ti / Au 0.3nm + 40 nm photolithography interconnect lines #276 metal-2 Al 60 nm shadow mask gates SC-1 F16CuPc 30 nm shadow mask semiconductor for n-channel TFTs SC-2 pentacene 30 nm shadow mask semiconductor for p-channel TFTs metal-3 Au 50 nm shadow mask source/drain contacts metal - thick Al 230 nm shadow mask thick pads for wire-bonding

Substrate Layer Material Thickness Patterning Purpose metal-1 Ti / Au 0.3nm + 40 nm photolithography interconnect lines #277 metal-2 Al 56 nm shadow mask gates metal - thick Au 150 nm shadow mask thick pads for wire-bonding SC-1 F16CuPc 30 nm shadow mask semiconductor for p-channel TFTs SC-2 pentacene 30 nm shadow mask semiconductor for p-channel TFTs metal-3 Au 50 nm shadow mask source/drain contacts

Adding the thick-pad layer severely degraded OTFT performance. On Substrate

#276 with the aluminum pads, the OTFTs showed distorted IV curves. Visual inspection found that thousands of tiny aluminum particles had uniformly distributed on the substrate, roughly 1 particle every 5 μm in density. Some aluminum particles had contaminated the OTFT channels. This contamination was likely caused by the miniscule gap between the substrate and the shadow mask during the thick-pad deposition. On Substrate #277, where the thick-pad gold was deposited before the semiconductors, no contamination was seen. However, the OTFT performance was equally poor, likely because the contaminants still existed but were covered by the semiconductors.

Although the attempts at wire bonding were unsuccessful, the results were adequately promising to warrant further development. One possible solution is to encapsulate the circuit with Parylene, then etch away the pad openings, and finally

84 deposit the thick pads. Successful wire bonds would remove the need for fragile probes, and significantly improve the testability of the organic circuits.

5.2.3 Organic Transistor AM Radio

Coil AM Antenna Amplifier Demodulator Driver

0.5 – 1.6 MHz DC – 2 kHz Figure 62: Concept of an organic transistor AM radio receiver.

The first “killer app” for the (silicon) transistor was the transistor radio. While an organic transistor radio is unlikely to be the killer app the organic electronics industry has been searching, it nevertheless would provide a dramatic demonstration on the capability of organic transistors. Figure 62 shows a concept of the organic transistor radio. The antenna can simply be a coiled metal trace, easily producible with current deposition techniques. (The coil needs to be sufficiently thick to reach a reasonable quality-factor Q, for example, Q > 5.) The directivity gain would be low due to the

85 small antenna size relative to the AM frequency, but should be sufficient for demonstration purpose. (The broadcast AM signal strength is roughly 40 to 80 dBuV or approximately 0.1 to 10 mV RMS at the receiving antenna.) With the expected improvements in OTFT mobility and finer geometries, the 2 kHz bandwidth required for the driver could be within reach. For example, several groups have reported organic transistor ring oscillators with stage delays less than 10 μs [53] – [54]. For the

1.6 MHz amplifier and the demodulator, inspiration can be found in the 13.56 MHz organic RFID tags [55] – [56]. The RFID circuits utilizes the non-quasi-static behavior of the OTFT channel, in which the gate voltage modulates the channel charges so fast that the charges do not have sufficient time to transit the channel. There is no dc current, but the modulated voltage induces current pulses as the OTFTs rapidly switch on and off. The non-quasi-static state does not produce power gain, but can produce voltage gain. The main obstacle of this approach appears to be the resolution. A reasonable audio signal needs at least 5 bits (or the equivalent in signal-to-noise ratio), whereas the organic RFID designs are 1 bit. Integrating the induced current pulses may overcome this problem. For example, in a signal with a 1 MHz carrier and a 1 kHz AM envelope, there are 250 pulses from the envelope minimum to the envelope maximum. Integrating several pulses at a time may provide the precision to discriminate between the 32 distinct voltage levels.

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6. Appendix A

6.1. Probe Station and Test Equipment

All circuit measurements were performed on a Karl-Suss probe station, shown in

Figure 63, Figure 64 and Figure 65. Two probe wedges, each containing 26 probes, made the contacts to the circuit. The probe wedges, shown in Figure 66 and Figure 67, were manufactured by GGB Industries. The probe tips were made of beryllium copper, a soft metal alloy suitable for contacting the gold pads. Each tip was cantilevered to allow slight vertical flex. Care needed to be taken when lowering the probes to the substrate surface to avoid excessively scratching the pads. Since the pads were only 40 nm thick, each contact resulted in scraping away some gold. Each pad could handle up to a dozen contacts, after which there might not be enough gold remaining to ensure good contact. (For future designs, the contacts can be improved by depositing additional 30 nm of gold onto the pads during the source/drain deposition.) In addition, it was critical that all 52 probes contacted the pads

87 simultaneously. This required careful adjustment of the vertical and rotational axes of the probe handlers.

Probe Station Adapter FPGA Probe Board Board Manipulator Probes

Figure 63: Drawing of the measurement apparatus.

Figure 64: Photograph of the test setup.

88

Figure 65: Photograph of the probe station.

Figure 66: CAD drawing of the probe wedge.

89

Figure 67: Photograph of the probe wedges mounted on the probe station.

An alternative to the probe wedges was a probe card, shown in Figure 68, and as installed in Figure 69. The probe card could provide a more rigid platform, but less adaptive to different situations – such as changes in pad spacing. In view of the unknowns, the probe wedges were judged a superior choice.

90

Typical pitch = 150μm Customizable landing pattern

Figure 68: Photograph of a probe card.

Probe Station Adapter FPGA Board Board Holder Probe Card

Adjustable Vacuum Chuck Adjustable Stage Stage

Figure 69: The measurement apparatus with a probe card instead of probe wedges.

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6.2. Interfaces between Probes and FPGA

As noted in Chapter 4, the digital logics of the DAC and the ADC were implemented in an FPGA. Since the FPGA (Xilinx Spartan 3E) could support only 36 outputs, and the circuits required 52 connections, an adapter board was inserted between the probes and the FPGA board. Figure 70 shows this setup. The adapter board also provided power, ground, and reference voltages to the probes, and the reference output voltage to the FPGA board.

Figure 70: Photograph of the adapter board (left) and the FPGA board (right).

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7. Appendix B: OTFT Model

All simulations were performed using Cadence Spectre with Verilog-A. The

OTFT model is shown below.

8. `include "discipline.h" 9. `include "constants.h" 10. 11. // Organic FET Veriloga Model, p type 12. // March 3, 2008 13. // 14. // 15. // Based on the OVI Verilog-A Language Reference Manual, version 1.0 1996 16. // 17. // 18. 19. `define n_type 1 20. `define p_type 0 21. 22. 23. //------24. // mos_level1 25. // 26. // - A basic, level 1, Schichmann-Hodges style model of a MOSFET transistor 27. // 28. // vdrain: drain [V,A] 29. // vgate: gate [V,A] 30. // vsource: source [V,A] 31. // vbody: body [V,A] 32. // 33. // INSTANCE parameters 34. // width = [m] 35. // length = [m] 36. // vto = threshold voltage [V] 37. // gamma = bulk threshold [] 38. // phi = bulk junction potential [V] 39. // lambda = channel length modulation [] 40. // tox = oxide thickness [cm] 41. // u0 = mobility [cm^2/V-s] 42. // xj = metallurgical junction depth [m] 43. // is = saturation current [A]

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44. // cj = bulk junction capacitance [F] 45. // vj = bulk junction voltage [V] 46. // mj = bulk grading coefficient [] 47. // fc = forward bias capacitance factor [] 48. // tau = parasitic diode factor [] 49. // cgbo = gate-bulk overlap capacitance [F] 50. // cgso = gate-source overlap capacitance [F] 51. // cgdo = gate-drain overlap capacitance [F] 52. // dev_type = the type of mosfet used [] 53. // 54. 55. module pfet(vdrain, vgate, vsource, vbody); 56. inout vdrain, vgate, vsource, vbody; 57. electrical vdrain, vgate, vsource, vbody; 58. parameter real width = 100e-6 from (0:inf); 59. parameter real length = 20e-6 from (0:inf); 60. parameter real vto = 0.5 from (0:inf); 61. parameter real gamma = 0 from [0:inf); 62. parameter real phi = 0.2 from (0:inf); 63. parameter real lambda = 0.005 from [0:inf); 64. parameter real tox = 5.7e-7 from (0:inf); 65. parameter real u0 = 0.5 from (0:inf); 66. parameter real xj = 0 from [0:inf); 67. parameter real is = 1e-18 from (0:inf); 68. parameter real cj=0 from [0:inf); 69. parameter real vj=0.75 exclude 0; 70. parameter real mj=0.5 from [0:1); 71. parameter real fc=0.5 from [0:1); 72. parameter real tau = 0 from [0:inf); 73. parameter real cgbo = 0 from [0:inf); 74. parameter real cgso = 14e-12 from [0:inf); 75. parameter real cgdo = 14e-12 from [0:inf); 76. parameter integer dev_type = `p_type; 77. 78. `define EPS0 8.8541879239442001396789635e-12 79. `define EPS_OX 4.5*`EPS0/100.0 80. 81. `define F1(m, f, v) ((v/(1 - m))*(1 - pow((1 - f), m))) 82. `define F2(m, f) (pow((1 - f), (1 + m))) 83. `define F3(m, f) (1 - f*(1 + m)) 84. 85. // 86. // visible variables. 87. // 88. real vds, 89. vgs, 90. vbs, 91. vbd, 92. vgb, 93. vgd, 94. vth, 95. id, 96. ibs, 97. ibd, 98. qgb, 99. qgs, 100. qgd, 101. qbd, 102. qbs; 103. 104. real kp, fc1, fc2, fc3, fpb, leff; 105. real beta; 106. 107. integer dev_type_sign; 108. 109. analog begin 110. 111. @ ( initial_step or initial_step("static") ) begin 112. leff = length - 2*xj;

94

113. kp = u0*`EPS_OX/tox; 114. fc1 = `F1(mj, fc, vj); 115. fc2 = `F2(mj, fc); 116. fc3 = `F3(mj, fc); 117. fpb = fc*mj; 118. 119. if( dev_type == `n_type ) dev_type_sign = 1; 120. else dev_type_sign = -1; 121. end 122. 123. vds = dev_type_sign*V(vdrain, vsource); 124. vgs = dev_type_sign*V(vgate, vsource); 125. vgb = dev_type_sign*V(vgate, vbody); 126. vgd = dev_type_sign*V(vgate, vdrain); 127. vbs = dev_type_sign*V(vbody, vsource); 128. vbd = dev_type_sign*V(vbody, vdrain); 129. 130. if (vbs > 2*phi) begin 131. vth = vto + gamma*sqrt(2*phi); 132. end else begin 133. vth = vto - gamma*(sqrt(2*phi - vbs) - sqrt(2*phi)); 134. end 135. 136. 137. // 138. // parasitic diodes... 139. // 140. ibd = is*(exp(vbd/$vt) - 1); 141. ibs = is*(exp(vbs/$vt) - 1); 142. 143. if (vbd <= fpb) begin 144. qbd = tau*ibd + cj*vj*(1 - pow((1 - vbd/vj), (1 - mj)))/(1 - mj); 145. end else begin 146. qbd = tau*ibd + cj*(fc1 + (1/fc2)*(fc3*(vbd - fpb) + 147. (0.5*mj/vj)*(vbd*vbd - fpb*fpb))); 148. end 149. 150. if (vbs <= fpb) begin 151. qbs = tau*ibs + cj*vj*(1 - pow((1 - vbs/vj), (1 - mj)))/(1 - mj); 152. end else begin 153. qbs = tau*ibs + cj*(fc1 + (1/fc2)*(fc3*(vbs - fpb) + 154. (0.5*mj/vj)*(vbs*vbs - fpb*fpb))); 155. end 156. 157. // 158. // channel component of drain current. (channel charge ignored)... 159. // 160. beta = kp*width/leff; 161. if (vgs <= vth) begin 162. id = 0; 163. end else if (vgs > vth && vds < vgs - vth) begin 164. 165. // 166. // linear region. 167. // 168. id = beta*(vgs - vth - vds/2)*vds*(1 + lambda*vds); 169. end else begin 170. 171. // 172. // saturation region. 173. // 174. id = beta*0.5*(vgs - vth)*(vgs - vth)*(1 + lambda*vds); 175. end 176. 177. qgb = cgbo * vgb; 178. qgs = cgso * vgs; 179. qgd = cgdo * vgd; 180. 181. I(vdrain, vsource) <+ dev_type_sign * id;

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182. I(vbody, vdrain) <+ dev_type_sign * (0 + ddt(qbd)); 183. I(vbody, vsource) <+ dev_type_sign * (0 + ddt(qbs)); 184. I(vgate, vbody) <+ dev_type_sign * ddt(qgb); 185. I(vgate, vsource) <+ dev_type_sign * ddt(qgs); 186. I(vgate, vdrain) <+ dev_type_sign * ddt(qgd); 187. end 188. endmodule

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