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Annotation The objective of this thesis is to describe in details the process of bonding of ZERODUR mirrors on CNC holder, and the influence of the heating and cooling of the wax on the final shape of mirror. For bonding of the ZERODUR glass to the aluminum holder we have used red wax, and we have monitor the influence of this material to the final shape of our optic by measuring the surface shape before and after bonding by using the LuphoScan. Furthermore the consecutive process of bonding numerically is verified by using MSC Marc& MSC Mentat 2015. This work shows that for manufacturing of ultra-precise optics bonding of the ZERODUR glass to the ZERODUR disk gives better results, compared to aluminum disk. Keywords: visco- elastic, precision machining, grinding, polishing, heat transfer, experiments, FEM 6 Table of Contents Annotation........................................................................................................................................6 Table of Contents .............................................................................................................................7 List of Tables ...................................................................................................................................9 List of Figures ................................................................................................................................10 List of Symbols ..............................................................................................................................12 List of Abbreviations .....................................................................................................................13 Acknowledgements ........................................................................................................................15 Dedication ......................................................................................................................................16 Chapter 1: Introduction ..................................................................................................................17 Chapter 2: Literature review ..........................................................................................................19 2.1 Definition of Aspherical Optical Elements ....................................................................... 21 2.2 Basic characteristics of aspherical elements compared with spherical elements ............. 22 2.2.1 Quality of the surface form ....................................................................................... 22 2.2.2 Quality of surface texture .......................................................................................... 22 2.3 Mathematical representation of aspherical surfaces ......................................................... 23 2.3.1 Basic equation according to ISO 10110- Part 12 ...................................................... 23 2.4 Design drivers ................................................................................................................... 23 2.5 Classifications ................................................................................................................... 24 2.6 Generating of aspherical optics (the historical approach) ................................................. 24 2.7 Optical fabrication technologies ....................................................................................... 27 2.8 Material removal mechanisms .......................................................................................... 28 2.9 Precision grinding process ................................................................................................ 29 2.9.1 Grinding modes for optical grinding......................................................................... 30 2.9.2 Grinding wheels ........................................................................................................ 31 2.9.3 Nozzle and coolant selection .................................................................................... 32 2.9.4 Grinding process characterization............................................................................. 34 2.9.4.1 Grinding Energy ........................................................................................................ 34 2.10 Surface texture and form ................................................................................................... 36 7 2.11 Polishing …………………………………………………………………………………36 2.12 Local correction ................................................................................................................ 37 Chapter 3: Overview of material properties and material models .................................................41 3.1 Mirror substrate materials ................................................................................................. 43 3.1.1 Glass ceramics .......................................................................................................... 46 3.2 Materials used for blocking the optic................................................................................ 48 3.2.1 Waxes, Pitch, and Cements ....................................................................................... 49 Chapter 4: Manufacturing process .................................................................................................50 Chapter 5: Design of experiments ..................................................................................................52 Chapter 6: Numerical simulations of the manufacturing process ..................................................56 6.1.1 Meshing..................................................................................................................... 56 6.1.2 Material Properties .................................................................................................... 58 6.1.3 Contact Bodies .......................................................................................................... 61 6.1.4 Initial conditions ....................................................................................................... 62 6.1.5 Boundary conditions ................................................................................................. 62 Chapter 7: Comparison of results from simulations and experiments ...........................................64 7.1 Results from numerical simulations.................................................................................. 64 7.2 Results from Experiments ................................................................................................. 72 Chapter 8: Conclusion....................................................................................................................76 References ......................................................................................................................................77 8 List of Tables Table 1: Overview specifications and characteristics of the different processes (typical values in production) .................................................................................................................................................................... 40 Table 2: Material properties of selected materials for optical applications ................................................ 44 Table 3: Properties of ZERODUR .............................................................................................................. 48 Table 4: Material properties of brass .......................................................................................................... 58 Table 5: Material properties of aluminum .................................................................................................. 58 Table 6: Material properties of red wax ...................................................................................................... 60 Table 7: Thermo- Rehologically Simple properties for wax. ..................................................................... 61 Table 8: Tangential deviation for aluminum and Zerodur disk (unpublished results of TOPTEC) [26] .... 73 Table 9: Tangential deviation for consecutive steps of manufacturing of the mirror (unpublished results of TOPTEC) [26] ............................................................................................................................................ 74 9 List of Figures Figure 1: Example of spherical mirror from SiSiC and lightweight base plate structure [22].................... 18 Figure 2: Payload accommodation on board Solar Orbiter. ....................................................................... 20 Figure 3: Optomechanic structure of METIS. [6] ....................................................................................... 20 Figure 4: Principle of generating or polishing spheres using the symmetry between tool and workpiece [18] .................................................................................................................................................................... 25 Figure 5: Principle of a copy machine for aspheres [14] ........................................................................... 25 Figure 6: Principle of shape- copying machine as designed by Mackenson in the 1920s.[25] ................... 26 Figure 7: Principle and setup of the first computer grinding machines built by Zeiss [11] ........................ 27 Figure 8: An interpretation of the Taniguchi