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Properties of Ultra-Thin Flexible Glass  Advanced Processing of UTG S2S and R2R  Examples for Functional Layers/ Layer Stacks  Summary

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Properties of Ultra-Thin Flexible Glass  Advanced Processing of UTG S2S and R2R  Examples for Functional Layers/ Layer Stacks  Summary Manuela Junghähnel Processing on FlexibleProcessing Glass – on Challengesultra and Opportunities-thin flexible Glass Dr Manuela Junghaehnel page 1 © Fraunhofer FEP Content Introduction Applications fields for ultra-thin flexible glass Properties of ultra-thin flexible glass Advanced Processing of UTG S2S and R2R Examples for functional layers/ layer stacks Summary 2 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Introduction glass flat curved flexible thickness > 1 mm thickness 1 … 0.2 mm thickness < 0.2 mm 3 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Diversity of flexible glass in FLEX Applications Smart curved Surfaces Display Wearables Sensors Interior Cover glass Smart Watch Fingerprint sensors Wall panels Smart Phones Smart Glasses Antennas Laminated panels Tablets Fitness armband Label Room dividers TV Move tracker Bio-sensor Railings Head-up Automotive High-Tec Optics Mirrors Micro lenses Lighting Filter optics Displays Micro displays Electronics Micro cameras Interior Lighting Photovoltaics OLED Thin film solar cells Lighting panels Organic solar cells Smart Windows Energy Storage Architectural glazing Thin-film batteries Electrochromics Super capacitors Thermochromics Micro batteries 4 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Application example: Display and Cover Glass will find in new form-factor devices due to its superior application performance shows superior haptics and customer experience with high scratch resistance UTG allows highest optical quality, longer-living and reliable OLED displays due to high temperature resistance during processing and unsurpassed barrier properties Cover Glass – ultra-thin glass Touch Sensor UTG Substrate Active matrix OLED Layers Glue UTG Barrier Courtesy of SCHOTT AG 5 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP World thinnest glass interposer demonstrator … based on SCHOTT‘s 30 µm ultra-thin glass Cooperation SCHOTT AG – Georgiatech Industry Consortium 30 µm Thin Glass Panel Interposer Courtesy of SCHOTT AG 6 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Properties of ultra-thin flexible glass Glass thickness < 200 µm flexible glass ➢ Ultra-thin ➢ High transparency ➢ Superior surface quality ➢ Perfect water vapour and oxygen hermeticity ➢ High-temperature processing ➢ Low surface roughness – aesthetic appeal 7 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Properties of ultra-thin flexible glass Main flexible glass suppliers ➢ Nippon Electric Glass Co., Ltd.: G-Leaf™ ➢ Asahi Glass Co., Ltd.: SPOOL™ ➢ Corning Inc.: Corning® Willow® Glass ➢ Schott AG: AF 32 eco , D 263 eco, AS 87 eco 8 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Properties of diverse UTGs – thermal properties Corning® NEG AGC Schott Schott Schott Willow® Glass G-LeafTM SpoolTM AF 32® eco D 263® T eco AS 87® eco Density 2.3 - 2.5 2.46 2.51 2.43 2.51 2.46 [g/cm³] CTE [K-1] 3 - 5 x 10-6 3.8 x 10-6 3.8 x 10-6 3.2 x 10-6 7.2 x 10-6 8.7 x 10-6 Tg [°C] 717 557 621 Strain point 650 - 700 650 670 594 [°C] Annealing 700 - 750 705 720 633 point [°C] Softening 940 950 872 point [°C] Thicknesses 200; 100; (50) 100; 70; 50; 30 200; 100; 50 100; 70; 50; 25 100; 70; 50; 25 100, 145, 175, [µm] 210, 250, 330, 350, 400 Glass width of max. 1.3 m 0.6 m (1 m) max. 0.5 m max. 0.5 m rectangular: rolls 5~580 round: Ø 50~410 ▪ Main of the data are coming from fact sheets 9 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Properties of diverse UTGs – mechanical properties Corning® NEG AGC Schott Schott Schott Willow® Glass G-LeafTM SpoolTM AF 32® eco D 263® T eco AS 87® eco Young's 70 - 80 73 77 66 72,9 73.3 modulus [GPa] Poisson 0.20 - 0.25 0.2 0.22 0.235 0.208 0.216 Ratio Hardness 555 590 500 (560*) Surface Ra < 0.5 nm Ra < 0.2 nm < 1 nm < 1 nm < 0.5 roughness RMS Total ± 10% ≤ 5 µm ≤ 5 µm ≤ 10 µm thickness variation Thickness ± 10 µm ± 10 µm ± 10 µm ± 10 µm tolerance *) hardness measured at chemical ▪ Main of the data are coming from fact sheets strengthened condition 10 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Manufacturing Methods Down-Draw Process Overflow Process even overflows molten glass fromOverflowboth sides on both sidesflow of molten glass roller treams fuse at annealing the bottom furnace of the wedgs roller direction in which it is drawn glass ribbon www.schott.com www.neg.co.jp 11 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP The fragility of ultra-thin flexible glass 12 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Challenges for processing on ultra-thin flexible glass Main challenges: Bending, the combination of stress Improvement of reliability Reduction of bending radius key is thickness reduction Management of loads on the glass Stress control: tension, compression Process procedure: substrate handling, transport, cleaning, cutting, coatings 13 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Properties of ultra-thin flexible glass – bending of glass Calculation of bending stress 푑 s … bending stress 퐸 ∙ 2 E … Young's modulus 휎 = d … thickness substrate 푟 r … bending radius 120 120 100 µm PET Melinex 400 @ RT 100 100 100 µm flexible glass 80 80 60 0.5 mm 60 40 0.2 mm 40 0.1 mm 20 0.05 mm 20 bending stress [MPa] bending stress bending stress [MPa] bending stress 0.03 mm 0 0 0 10 20 30 40 50 0 5 10 15 20 bending radius [cm] bending radius [cm] 14 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Properties of ultra-thin flexible glass Surface roughness Dimension stability 100 µm flexible glass 100 µm PET web Tmax during deposition < 50°C!!! TiO2, 30 nm SiO2 , 300 … 500 nm TiO2, 30 nm Flexible glass or PET web 15 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Properties of ultra-thin flexible glass - transmittance 100 80 60 40 transmittance [%] AF32, 50 µm 20 AF32, 100 µm D263T, 50 µm D263T, 100 µm 0 200 250 300 350 400 wave length [nm] Schott Product AF32eco D263Teco CTE (20 - 300 °C) x10-6/°K 3.2 7.2 Tg [°C] 715 557 Alkaline Content no yes 16 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Mechanical Characterization of flexible glass *) theoretical bending radius of the surface strength neglecting edge Surface Fracture Strength flaws (@100 µm glass thickness) Ball on Ring test: r*theor.~ 0.9 mm Stress Calculation r*theor.~ 1.6 mm The surface strength of all UTG-types is much higher than the edge strength Differences of the surface strength between the sample types of appr. 65% A theoretical max bending radius of 0.9-1.6 mm of the surface can be assumed. 17 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Properties of ultra-thin flexible glass Thin Film Stress Measurement 150 nm thick ITO on flexible glass Measurement device: Profilometer - Ambios XP-Plus 200 Stylus calculation by Stoney equation: 150 dglass = 200 µm dglass = 100 µm 125 2 1 퐸 푡푠 휎 = · · 100 6푅 1 − 휐 푡푓 75 flatness [µm] 50 Stress Maximum bow Glass Thickness [µm] [MPa] [µm] 25 100 254 123 0 200 469 49 0 1 2 3 4 5 scan length [cm] 18 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP Process capabilities on flexible glass @ Fraunhofer FEP sheet-to-sheet processes roll-to-roll processes films - Inorganic thin Inorganic Organic devicesOrganic 19 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP S2S in-line processing of ultra-thin flexible glass ▪ PVD and PECVD ▪ Originally for rigid substrates (glass, plastic, metals) ▪ Suitable for flexible glass max. 600 x 600 mm² ▪ Thickness ≤ 200 µm ▪ Cathode length 750 mm and 900 mm ▪ DC and PMS sputtering (standard methods) ▪ Deposition @ RT, ▪ heating ▪ Post-annealing by FLA 20 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP S2S Processing of thin-films ultra-thin flexible glass © 2016 Fraunhofer FEP © 2016 Fraunhofer FEP 600 x 600 mm² substrate on S2S carrier ITO coated 600 x 600 mm² substrate with ≤ 200 µm Corning® Willow® Glass ≤ 200 µm Corning® Willow® Glass as deposited state before annealing 21 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP R2R processing of inorganic films on UTG VON ARDENNE FOSA LabX – R2R vacuum coating of flexible glass ▪ R2R vacuum coater: 2, 4 or 8 process stations + pre-treatment ▪ Substrate speed: up to 4 m/min ▪ Substrate width : 200 - 1200 mm, Substrate thickness: 50 - 100 µm ▪ Coating temperature: 350 °C ▪ Rollers touching substrate back side only ▪ Minimized particle load on substrate ▪ Application examples ▪ ITO for OLED, Invisible ITO for Touch Screen ▪ IMI, AR © VON ARDENNE Corporate Archive 22 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP BMBF – KONFEKT (FKZ 13N13818) R2R processing of inorganic films on UTG FOSA LabX 330 Glass 23 Short course: Processing on ultra-thin flexible Glass | ICCG 12 Manuela Junghähnel, 11 June 2018 © Fraunhofer FEP BMBF – KONFEKT (FKZ 13N13818) OLED on Ultra Thin Glass @ Fraunhofer FEP 2 x 100 µm UTG Active area: 62 cm² Module size: 18.3 x 66.3 cm² Performance @ 1000 cd/m² : current voltage lum.efficacy Color coordinates CCT CRI [mA] [V] [lm/W] C.I.E.
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