(12) United States Patent (10) Patent No.: US 7,885,309 B2 Ershov Et Al
US007885309B2 (12) United States Patent (10) Patent No.: US 7,885,309 B2 Ershov et al. (45) Date of Patent: Feb. 8, 2011 (54) LASER SYSTEM (51) Int. Cl. (75) Inventors: Alexander I. Ershov, San Diego, CA HOIS 3/22 (2006.01) (US); William N. Partlo, Poway, CA (52) U.S. Cl. ........................................... 372/57; 372/58 (US); Daniel J. W. Brown, San Diego, (58) Field of Classification Search ................... 372/55, CA (US); Igor V. Fomenkov, San Diego, 372/58, 57, 61 CA (US); Robert A. Bergstedt, See application file for complete search history. Carlsbad, CA (US); Richard L. Sandstrom, Encinitas, CA (US); Ivan (56) References Cited Lalovic, San Francisco, CA (US) U.S. PATENT DOCUMENTS Assignee: (73) Cymer, Inc., San Diego, CA (US) 3,530,388 A 9, 1970 Guerra et al. ................ 330.43 (*) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 (Continued) U.S.C. 154(b) by 952 days. FOREIGN PATENT DOCUMENTS Appl. No.: 11/787,180 (21) JP 2000-223408 2, 1999 (22) Filed: Apr. 13, 2007 WO WO97/O8792 3, 1997 (65) Prior Publication Data OTHER PUBLICATIONS US 2010/O108913 A1 May 6, 2010 Masakatsu Sugii et al., "High locking efficiency XeCl ring amplifier Related U.S. Application Data injection locked by backward stimulated Brillouin scattering.” J. Appl. Phys. 62 (8), Oct. 15, 1987, pp. 3480-3482. (63) Continuation-in-part of application No. 1 1/584,792. filed on Oct. 20, 2006, now abandoned, and a continu (Continued) ation-in-part of application No. 1 1/521,904, filed on Primary Examiner Minsun Harvey Sep.
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