The Disilicides of Tungsten, Molybdenum, Tantalum, Titanium, Cobalt, and Nickel, and Platinum Monosilicide: a Survey of Their Thermodynamic Properties
The Disilicides of Tungsten, Molybdenum, Tantalum, Titanium, Cobalt, and Nickel, and Platinum Monosilicide: A Survey of Their Thermodynamic Properties Cite as: Journal of Physical and Chemical Reference Data 22, 1459 (1993); https:// doi.org/10.1063/1.555922 Submitted: 21 December 1992 . Published Online: 15 October 2009 M. S. Chandrasekharaiah, J. L. Margrave, and P. A. G. O’Hare ARTICLES YOU MAY BE INTERESTED IN Thermodynamic considerations in refractory metal-silicon-oxygen systems Journal of Applied Physics 56, 147 (1984); https://doi.org/10.1063/1.333738 Thermal and Electrical Conductivity of Graphite and Carbon at Low Temperatures Journal of Applied Physics 15, 452 (1944); https://doi.org/10.1063/1.1707454 Formation of thin films of NiSi: Metastable structure, diffusion mechanisms in intermetallic compounds Journal of Applied Physics 55, 4208 (1984); https://doi.org/10.1063/1.333021 Journal of Physical and Chemical Reference Data 22, 1459 (1993); https://doi.org/10.1063/1.555922 22, 1459 © 1993 American Institute of Physics for the National Institute of Standards and Technology. The Disilicides of Tungsten, Molybdenum, Tantalum, Titanium, Cobalt, and Nickel, and Platinum Monosilicide: A Survey of Their Thermodynamic Properties M. s. Chandrasekharaiah and J. L. Margrave HARC, Materials Science Research Center, 4802 Research Forest Drive, The Woodlands, TX 77381 and P. A. G. O'Hare Chemical Kinetics and Thennodynamics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899-0001 Received December 21, 1992; revised manuscript received February 19, 1993 A critical evaluation is presented of the thermodynamic properties of six disiIi cides and one monosilicide that are important in the manutacture ot very large scale integrated circuits.
[Show full text]