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Mid-Infrared Quantum Cascade Lasers Nigerian Journal of Technology (NIJOTECH) Vol. 31, No. 3, November, 2012, pp. 227{232. Copyright ©2012 Faculty of Engineering, University of Nigeria. ISSN 1115-8443 MID-INFRARED QUANTUM CASCADE LASERS S.O. Edeagu Nanoelectronics Research Group, Department of Electronic Engineering, University of Nigeria, Nsukka, Nigeria. Email: [email protected] Abstract Quantum cascade lasers (QCL) based on intersubband transitions operating at room temperature in the mid-infrared or `molecular fingerprint’ spectral region (3.4{17 µm) have been found useful for several applications including environmental sensing, pollution monitoring, and medical appli- cations. In this tutorial review we present an introductory overview of the design and development of mid-infrared quantum cascade lasers and their applications. Keywords: laser, intersubband transitions, quantum cascade, mid-infrared, quantum well 1. Introduction known as the Bernard-Duraffourg condition. In late 1962, the first reports of the operation of semicon- Semiconductor lasers have become ubiquitous de- ductor injection lasers were published. The four inde- vices in today's modern high-tech society. They can pendent groups were Hall and co-workers at the GE be found in familiar devices such as bar-code scanners Research Lab, New York [7], Nathan and co-workers used in supermarkets, laser printers in offices, compact at the IBM T.J. Watson Research Center, New York disc and digital versatile disc (DVD) players at home [8], Holonyak and co-workers at the GE Advanced and laser pointers used during presentations. They Semiconductor Lab, New York [9] and Quist and co- are widely used in industry for example, cutting and workers at Lincoln Lab, MIT [10]. These lasers were welding metals and other materials, in medicine for achieved using GaAs p-n junctions. surgery, in optical communications, in optical metrol- In 1994, a fundamentally different kind of laser ogy and in scientific research. diode known as the quantum cascade laser (QCL) The laser is theoretically based on Einstein's clas- emerged. During the last decade significant improve- sic paper of 1917, in which he introduced the con- ments made in quantum cascade lasers has led to cept of stimulated or induced emission of radiation its gradual emergence as the mid-infrared source of [1]. The first demonstration of stimulated emission choice. The quantum cascade laser's unique proper- took place in 1954 when Townes and co-workers used ties, such as its small size, high output power, tunabil- a beam of ammonia (NH3) gas, in a microwave de- ity of the emission wavelength, and ability to work in vice called the maser (microwave amplification by pulsed and continuous wave mode at room tempera- stimulated emission radiation) [2]. It generated a co- ture, make it ideal for the remote sensing of environ- herent source of microwaves at 23.87 GHz. In 1958, mental gases and pollutants. Schawlow and Townes proposed a theory extending stimulated emission to optical and infrared frequen- cies [4]. Two years later, the optical equivalent of the 2. Basic Concepts maser - the laser (light amplification by stimulated emission radiation) - was demonstrated by Maiman Conventional semiconductor lasers operate via ra- [5]. He used a three-level ruby laser emitting light of diative recombination of an electron in the conduc- wavelength 693 nm. tion band with a hole in the valence band (band-band The first theoretical understanding of the re- transition or inter-band transition). The recombina- quirements for the realization of stimulated emis- tion generates a photon. Fig. 1 shows a schematic sion in a semiconductor was developed by Bernard diagram of an interband transition. Due to the fact and Duraffourg of the Centre National d'Etudes des that two types of carriers, electron and holes, are in- T´el´ecommunications (CNET), France and published volved, semiconductor lasers are also known as bipolar in 1961 [6]. The equations derived by them became lasers. In contrast, the quantum cascade laser, makes Nigerian Journal of Technology Vol. 31, No. 3, November 2012. 228 S.O. EDEAGU Figure 1: Interband optical transitions between confined states in a quantum well [13]. Figure 2: (a) Intersubband absorption in an n-type quantum use of only a single carrier, the electron. The radia- well. (b) Intersubband emission following electron injection to tive recombination takes place within a single band a confined upper level in the conduction band [13]. between two bound states of a potential well (intra- band transition or intersubband transition), as illus- trated in Fig. 2. Through so-called electron recycling, material system lattice-matched to InP [14]. Over a single electron generates multiple photons. the years other material systems have been used to Quantum cascade lasers (QCLs) [14] are semicon- demonstrate QCLs. In 1998, Sirtori and cowork- ductor lasers which rely on inter-subband transitions ers used the GaAs/AlGaAs on GaAs material sys- in a multiple quantum-well heterostructure. The tran- tem [20]. Others include InAs/AlSb [21] [22] and sitions typically occur in the mid- and far-infrared InGaAs/AlAsSb [23]. These designed quantum well spectral region. QCLs are based on two fundamental structures are grown by using thin-film crystal growth phenomena of quantum mechanics, namely tunneling techniques such as molecular beam epitaxy (MBE) or and quantum confinement. metal-organic chemical vapor deposition (MOCVD) The original idea for creating the quantum cascade [18]. laser was first postulated in 1970 by two theoreticians, The design of a QCL consists of one basic struc- Kazarinov and Suris of the Ioffe Institute in Leningrad ture called a period or stage, repeated multiple times (now St. Petersburg) [15]. They proposed that one (typically 25 to 75). Each period consists of an ac- could obtain light amplification based on intersubband tive region, where the optical transition takes place, transitions in quantum wells electrically pumped by and an relaxation/injector region, where the carriers resonant tunneling. Their proposal came shortly after can relax after having completed the optical transi- a seminal paper on the superlattice concept by Esaki tion. The active region is undoped and contains the and Tsu of the IBM Research Labs [16]. quantum wells and barrier regions that support the However due to the lack of appropriate technology electronic states while the relaxation/injector region in the 1970s, it took more than twenty years before the is n-doped. first quantum cascade laser was invented and demon- For the QCL invented by Faist et al. in 1994, strated by the Bell Labs groups of Capasso and Cho the laser structure consisted of 25 stages with the in 1994 [14][17]. This achievement was largely made Al0:48In0:52As-Ga0:47In0:53-As heterojunction mate- possible by the emergence of molecular beam epitaxy rial system lattice matched to InP [14]. Each of the (MBE) as a practical crystal growth technology for periods consisted of four AlInAs barriers forming three quantum well heterostructures, largely pioneered by GaInAs quantum wells and a digitally graded AlIn- Cho at Bell Laboratories [18]. GaAs region that is doped. Quantum cascade lasers, also known as unipolar Under an applied bias (an applied electric field of lasers, are designed by means of band-gap engineer- 105 V/cm) the band edges of the quantum wells are ing [19]. The art of band-gap engineering enables one slightly tilted forming a staircase structure. The carri- to engineer new materials by tuning their band gap. ers (electrons) are injected by resonant tunneling from The first QCL was constructed from a concatenated the ground state of one active region to the upper laser series of quantum wells, using the GaAs/AlxIn1−xAs level of the active region in the neighboring period. Nigerian Journal of Technology Vol. 31, No. 3, November 2012. Mid-Infrared Quantum Cascade Lasers 229 Figure 3: Schematic diagram of the conduction band for two periods of a quantum cascade laser with a quantum well active region [14]. The laser transition is indicated by the wavy arrows, Figure 4: Schematic diagram of a superlattice QCL with a and the electron flow by the straight arrows. miniband-to-miniband radiative transition [26]. The laser tran- sition is indicated by the wavy arrows, and the electron flow by the straight arrows. The electron drops in energy level emitting a photon in the process. As the electron moves from one stage laser frequency is thus determined by the height of the to another, it emits multiple photons in a cascade pro- minigap. The extremely short electron lifetime (decay cess, as the electron remains inside the conduction occurs rapidly) from the lower laser-level miniband band throughout its traversal of the active region. makes this structure suitable for longer wavelengths (λ ≥ 10µm) [27{30]. 3. Active Region Designs 3.3. Bound-to-continuum active region There are two major designs for the active region of quantum cascade lasers: quantum-well active region In a bound-to-continuum design [31], transitions oc- and superlattice active region [11]. A third design, cur between a discrete upper state and a lower super- the so-called bound-to-continuum scheme, combines lattice miniband. This design [see Fig. 5] combines the features of the quantum-well QCL and the super- the efficient electron injection into the upper laser level lattice QCL. Various other designs for the QCL active of the quantum-well design with the fast depopula- region have been developed [24], which is far beyond tion/electron extraction efficiency of the lower laser the scope of this article. level of the superlattice design, thereby reducing the threshold and increasing the power. 3.1. Quantum-well active region The laser action involves transitions from a discrete The quantum-well active region is based on the upper state to a superlattice miniband. This design three-level laser system.
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