About the Nanoscale Science, Engineering, and Technology Subcommittee The Nanoscale Science, Engineering, and Technology (NSET) Subcommittee is the interagency body responsible for coordinating, planning, implementing, and reviewing the National Nanotechnology Initiative. NSET is a subcommittee of the National Science and Technology Council (NSTC), which is one of the principal means by which the President coordinates science, space, and technology policies across the Federal Government. The National Nanotechnology Coordination Office (NNCO) provides technical and administrative support to the NSET Subcommittee and supports the subcommittee in the preparation of multi-agency planning, budget, and assessment documents, including this report. For more information on NSET, see http://www.nano.gov/html/about/nsetmembers.html. For more information on NSTC, see http://www.ostp.gov/nstc/. For more information on the NNI, NSET, and NNCO, see http://www.nano.gov. About this document This document is the report of a workshop held under NSET auspices in January 2004 seeking input from the research community on the NNI research agenda relating to capabilities needed for instrumentation and metrology for nanotechnology. It was used as input for the NNI Strategic Plan released in December 2004. The meeting was jointly sponsored by the National Institute of Standards and Technology, Technology Administration, U.S. Department of Commerce, and, through the NNCO, the other member agencies of the NSET Subcommittee. Cover and book design Book design and layout by Roan Horning, Geoff Holdridge, and other NNCO staff members. Cover design by Kathy Tresnak of Koncept Advertising and Design. Front cover: Central image shows a Zyvex nanomanipulator in a focused ion beam system at a 52 degree tilt. The sample being probed on the center stage is a deprocessed integrated circuit chip (courtesy of Zyvex Corporation). Back cover: Digital Instruments multimode SPM vector piezoresponse force microscopy image of lead titanate thin film (courtesy of A. Gruverman and B.J. Rodriguez, North Carolina State University, and S.V. Kalinin, J. Shin and A. Baddorf, Oak Ridge National Laboratory). Background graphic at bottom of entire cover courtesy of L. J. Whitman, Naval Research Laboratory. Copyright information This document is a work of the U.S. Government and is in the public domain. Subject to stipulations below, it may be distributed and copied, with acknowledgment to the National Nanotechnology Coordination Office (NNCO). Copyrights to portions of this report (including graphics) contributed by workshop participants and others are reserved by original copyright holders or their assignees, and are used here under the Government’s license and by permission. Requests to use any images must be made to the provider identified in the image credits, or to the NNCO if no provider is identified. Printed in the United States of America. 2006. Instrumentation and Metrology for Nanotechnology Report of the National Nanotechnology Initiative Workshop January 27–29, 2004, Gaithersburg, MD Workshop Chair Michael T. Postek National Institute of Standards and Technology Workshop Co-Chair Robert J. Hocken University of North Carolina, Charlotte Sponsored by National Science and Technology Council Committee on Technology Subcommittee on Nanoscale Science, Engineering, and Technology National Institute of Standards and Technology Technology Administration U.S. Department of Commerce ACKNOWLEDGMENTS Thanks go to the principal authors of this report, who are listed on the title pages of the respective chapters. In addition, we thank all participants of the January 27–29, 2004 NNI Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenges, held at the National Institute of Standards and Technology (NIST), an agency of the U.S. Department of Commerce’s Technology Administration, in Gaithersburg, Maryland. A complete list of attendees is provided in Appendix B. The participants braved inclement weather (freezing rain, snow, and sleet) to attend this workshop. Special thanks are extended to the members of the workshop technical organizing committee, listed below. The presentations and discussions that took place at the workshop provided the foundation for this report. Without this valuable input this report would not have been possible. Many thanks are also due to the conference support staff of NIST, especially Kathy Kilmer, Angela Ellis, Dean Smith, Sarah Bell, and Ken Osbourne, who made sure that the meeting logistics were handled properly and efficiently. Special thanks are also due to Joan Pellegrino of Energetics, Inc., who provided facilitation support and editorial assistance for the final report. Thanks also go to the entire Energetics, Inc. facilitation team—Tracy Carole, Paget Donnelly, Melissa Eichner, Mark Ellis, Keith Jamison, and Jamie Lyons. Finally, thanks to all the members of the National Science and Technology Council’s Subcommittee on Nanoscale Science, Engineering, and Technology, who through the National Nanotechnology Coordination Office, cosponsored the workshop with NIST and reviewed the draft report before publication. Michael Postek, Chair (NIST) Robert J. Hocken, Co-Chair (UNC Charlotte) Nanocharacterization Bob Keller (NIST) Nanomanufacturing Richard Cavanagh (NIST) Jorn Larsen-Basse (NSF) Kevin Lyons (NIST) T. J. Mountziaris (NSF) Julie Chen (NSF) Nora Savage (EPA) Nanoelectronics, James Whetstone (NIST) Hongda Chen (USDA) Nanophotonics and Xiang Zhang (UCLA) Nanomagnetics Marylyn Bennett (Texas Nanomechanics Robert Shull (NIST) Instruments) Clare Allocca (NIST) David Wollman (NIST) James Arnold (NASA) Stephen Hsu (NIST) Altaf H. Carim (DOE) Avram Bar-Cohen (U. of Douglas Smith (NIST) David Seiler (NIST) Maryland) Bryan Huey (U. of Connecticut) Jon Pratt (NIST) Nanofabrication Computational Crosscut John Kramar (NIST) Charles Clark (NIST) Ronald Boisvert (NIST) Peter Votruba-Drzal (NIST) Richard Silver (NIST) Mark Lundstrom (Purdue U.) Kristin Bennett (DOE) Guebre Tessema (NSF) Nell Sedransk (NIST) The workshop was sponsored by the National Institute of Standards and Technology, an agency of the U.S. Department of Commerce’s Technology Administration and, through the National Nanotechnology Coordination Office (NNCO), the other member agencies of the Nanoscale Science, Engineering, and Technology (NSET) Subcommittee, Committee on Technology, National Science and Technology Council. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the authors and do not necessarily reflect the views of the United States Government or the authors’ parent institutions. PREFACE This report on Instrumentation and Metrology for Nanotechnology is one of a series of reports resulting from topical workshops convened during 2003 and 2004 by the Nanoscale Science, Engineering, and Technology (NSET) Subcommittee of the National Science and Technology Council’s Committee on Technology through the National Nanotechnology Coordination Office (NNCO). The workshops were part of the NSET Subcommittee’s long-range planning effort for the National Nanotechnology Initiative (NNI), the multiagency Federal nanotechnology program. The NNI is driven by long-term goals based on broad community input, in part received through these workshops. The NNI seeks to accelerate the research, development, and deployment of nanotechnology to address national needs, enhance our nation’s economy, and improve the quality of life in the United States and around the world, through coordination of activities and programs across the Federal Government. At each of the topical workshops, nanotechnology experts from industry, academia and government were asked to develop broad, long-term (ten years or longer), visionary goals and to identify scientific and technological barriers that once overcome will enable advances toward those goals. The reports resulting from this series of workshops inform the respective professional communities, as well as various organizations that have responsibilities for coordinating, implementing, and guiding the NNI. The reports also provide direction to researchers and program managers in specific areas of nanotechnology R&D regarding long-term goals and hard problems. This report is the result of a workshop held under NSET Subcommittee auspices in January 2004 seeking input from the research community on the NNI research agenda related to one of the original NNI “grand challenge” topics, “Nanoscale Instrumentation and Metrology.” The findings from this workshop were used in formulating the new NNI Strategic Plan released in December 2004, particularly the Program Component Area (PCA) on Instrumentation Research, Metrology, and Standards for Nanotechnology described in that plan. This report will continue to inform the NNI research program under that PCA. The report was also co-sponsored by the National Institute of Standards and Technology (NIST) to provide input to its research agenda within the overall NNI program. The report identifies and highlights research needs in five priority areas for nanotechnology-related instrumentation and metrology: (1) nanocharacterization; (2) nanomechanics; (3) nanoelectronics, nanomagnetics, and nanophotonics; (4) nanofabrication; and (5) nanomanufacturing. It also includes a discussion of crosscutting computational science issues and challenges. On behalf of the NSET Subcommittee, we wish to thank Dr. Michael Postek of NIST and Prof. Robert Hocken of the University