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G-Tran Series Sensor Unit Model Sc1 Cold-Cathode Ion

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G-Tran Series Sensor Unit Model Sc1 Cold-Cathode Ion No. SK00-8431-EI-023-03 G-TRAN SERIES SENSOR UNIT MODEL SC1 COLD-CATHODE ION GAUGE INSTRUCTION MANUAL This manual is for the SC1 cold-cathode ion gauges of the following serial numbers. Serial No. 02300G and higher Read this manual before operation and keep it at hand for immediate reference. Components Division, ULVAC , Inc. 2500 Hagizono, Chigasaki City, Kanagawa-ken, Japan http://www.ulvac.co.jp/ Prior to Operation Upon receipt of this gauge, make sure that it is the correct model you ordered and that it is not damaged in transit. Read this instruction manual before installing, operating, inspecting, or maintaining the product and fully understand the safety precautions, specifications and operating procedures regarding the product. The copyright of this instruction manual is held by ULVAC, Inc. You are prohibited from copying any portion of this instruction manual without the consent of ULVAC Inc. You are also prohibited from disclosing or transferring this instruction manual to third parties without the express written consent of ULVAC Inc. The contents described in this instruction manual are subject to change without prior notice because of changes in specifications or because of product improvements. Safety Denotations Safety symbols are used throughout this instruction manual to call the operator's attention to safety. The terminology used in safety symbols is classified below. Indicate status of urgency of danger when failure to comply with DANGER results in serious personal injury or death The work ignoring this warning will lead to serious damage to human life or factory facility (including this equipment) at a high probability. Indicate status of danger when failure to comply with WARNING results in serious worker’s injury or death. The work ignoring this warning will cause possibility leading to serious damage to human life or factory facility (including this equipment) Indicate status of danger when failure to comply with WARNING results in minor injury or moderate damage. The work ignoring this warning will cause possibility leading to minor damage to worker or breakage to equipment or necessary to adjust. Direct hazard is not existed, describe the necessity to know ✔ Note from the viewpoint of worker’s safety or correct and safe operation of equipment I Safety Precautions For safe use of this vacuum gauge, carefully read this manual and comply with the safety precautions given in this manual. Repair Request repairs for this unit from the dealer where purchased, from ULVAC Inc., or from the URL listed in this instruction manual. Power off If this unit is accidentally damaged, immediately turn off the power supply. There is a risk of fire and electric shock from use in this state. Power off If this unit produces unusual heat, smoke, or a strange smell, immediately turn off the power supply. There is a risk of fire from use in this state. Turn off power. Turn off the power to the vacuum gauge before conducting maintenance. The anode of the sensor head is energized with a voltage of 2.6 kV DC. You may receive electric shock if you touch it. Protective grounding Always connect this unit electrically to a grounded vacuum chamber. Use a conductive metal clamp on the NW flange. If this unit is not correctly connected, it will not only show the wrong pressure, there is a risk of damage to this unit and the equipment connected to this unit and a risk of fire. When this unit is insulated from the vacuum chamber, ground the case section (D-sub connector shell section) with a class D (class 3) ground. Don't disassemble. Do not disassemble the vacuum gauge. Don't modify. Do not modify the vacuum gauge. If it is modified, its functions are not warranted. Also fire or electric shock may result. Operating environment Do not connect the sensor head to a test object in which pressure is in excess of atmospheric pressure. If the pressure in the sensor head exceeds atmospheric pressure, the sensor head will be damaged or it will pop out from the connector, causing injury to the surrounding, including human body. If the pressure exceeds atmospheric pressure, provide an isolation valve so that the pressure in the sensor head does not exceed atmospheric pressure. Use in a corrosive gas atmosphere If this unit is exposed to chemically active gases including corrosive gases and halogen or halogenated gases, problems will occur such as pressure characteristics changing. When using this unit in these types of environments, install an isolation valve between this unit and the vacuum chamber and protect this unit as much as possible so it is not exposed to these gases. II Use in a CVD gas atmosphere If this unit is exposed to gases that deposit materials including CVD (Chemical Vapor Deposition) material gases and rotary pump oil mist, problems will occur such as pressure characteristics changing. When using this unit in these types of environments, install an isolation valve between this unit and the vacuum chamber and protect this unit so it is not exposed to these gases. Moisture and fouling If there is a large quantity of fouling in the gauge head from the gradual vaporization of moisture or organic matter, pressure accuracy and response speed will be affected. Review installation locations and methods so that fouling does not occur. Gas type dependency The pressure value and accuracy for this unit differ by the type of gas measured. The accuracy for this unit is based on measuring nitrogen gas. Be careful when using gases other than nitrogen. Check line voltage. Prior to turning ON the power, make sure that the vacuum gauge operating voltage and the supply voltage are in agreement. Connection of incorrect power can damage the vacuum gauge and cause fire. Shut off power If there is a possibility of the operator touching the anode terminal of the sensor head during operation, shut off the power. The anode terminal of the sensor head is energized with a discharge voltage of 2.6 kV DC. If you touch it when this gauge is actuated, you will get electric shock. Operating environment Do not use the gauge in a place where it may be splashed with water. If wetted, it may fail or electric leak or fire can result. Keep out foreign matter. If foreign matter like metal fragments or combustibles are admitted into the vacuum gauge through the openings in the gauge, remove them. Also keep intact the connecting terminals at the top of the gauge. Otherwise, the vacuum gauge may be damaged. Beware of magnetic field The magnetic flux density at the center of the sensor head is about 0.1 T. It will be attracted by or attract a metal part nearby with high magnetic force. Be careful in maintenance that a screwdriver or a metal part will be attracted with high magnetic force. Check connection. See to it that the power cable does not come into contact with other conducting parts. Discarding When you discard a vacuum gauge, please process according to the regulations of each local government. Especially the sensor head that used it in the atmosphere which may exert danger on a human body needs to process through a special processing contractor. Operating conditions Use this vacuum gauge in the environment set forth by the specifications. III Repacking for transfer If the vacuum gauge is to be shipped to other site, repack it in the same way as on delivery. If the gauge is shipped bare, it may be damaged. Warning for Air transportation Packaging The sensor for this product contains strong magnetic material. Therefore, please seal the interior of the packaging material with metal plate (more than 0.5mm thickness). The magnetic force from the item packaged by above method is less than .418A/m(0.00525gauss) at 4.6m distance from any given point, or less than 0.159A/m(0.002gauss) at 2.1m distance from any given point, qualifying IATA packaging standard 902 or UN-2807. Wear clean gloves. Handle the internal electrode with clean gloves. If the internal electrode is stained with oil or contaminant, the pressure indication may be affected by outgas. Impact to the anode pin and glass part. Such an impact may cause leak. Do not bend the anode pin nor give an impact to the black glass portion. Do not polish the glass portion of the anode. Polishing can cause leak. Polish the pin using care not to apply load on the glass portion. Insulation resistance of anode The pressure indication may be abnormal (higher than actual or no change of indication) or components may fail if the insulation resistance of the anode is not higher than 10,000 MΩ. Check center axis of anode After reassembly, make sure that the anode pin is at the center of the magnetic pole 2. There is a possibility of contact with the magnetic pole or low pressure indication. Scar and dust on O-ring and O-ring groove These can cause leak. Make sure that the O-rings and the O-ring groove are free of scars and dust. Dry parts After cleaning, dry up electrode parts. If they are not dry, components may be damaged by poor insulation. Do not touch the sensor head Do not touch the sensor head and anode during insulation resistance check. If the anode and sensor head body are shorted, a high voltage of 2.6 V DC will be applied to the sensor head. Do not conduct inspection in combustible gas atmosphere. When turning on the high voltage to this gauge under atmospheric pressure, avoid a combustible gas atmosphere. If a higher voltage of about 2.6 kV DC is applied, sparks will be produced and may cause fire.
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