Wright State University EE480/680 Micro-Electro-Mechanical Systems (MEMS) Summer 2006 LaVern Starman, Ph.D. Assistant Professor Dept. of Electrical and Computer Engineering Email:
[email protected] EE 480/680, Summer 2006, WSU, L. Starman MicroElectroMechanical Systems (MEMS) 1 Microelectronics/MEMS IBM • How are they made? • What are they made out of? • How do their materials behave? Wires Transistors Diodes Resistors Capacitors EE 480/680, Summer 2006, WSU, L. Starman MicroElectroMechanical Systems (MEMS) 2 1 Microelectronics Si MOSFET Si BJT EE 480/680, Summer 2006, WSU, L. Starman MicroElectroMechanical Systems (MEMS) 3 MEMS 270 µm EE 480/680, Summer 2006, WSU, L. Starman MicroElectroMechanical Systems (MEMS) 4 2 Course Outline • Semiconductor Materials • Crystal structure, growth, & epitaxy • Film formation – oxidation & deposition • Metalization • Lithography & etching • Impurity doping – diffusion & implantation • Lithography • Etching • Resistivity Measurement • Other Techniques EE 480/680, Summer 2006, WSU, L. Starman MicroElectroMechanical Systems (MEMS) 5 EE 480/680, Summer 2006, WSU, L. Starman MicroElectroMechanical Systems (MEMS) 6 3 Semiconductor Materials • Material Classes –Solid • Insulators • Semiconductors • Conductors –Liquid –Gas – Plasma 2-D schematic representation of crystalline solids, amorphous materials or liquids, and gases. EE 480/680, Summer 2006, WSU, L. Starman MicroElectroMechanical Systems (MEMS) 7 Solids General classification of solids based on the degree of atomic order • Semiconductors are